DektakXT Stylus Profilometer User Instructions (MMRC) These basic
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1. DektakXT Stylus Profilometer User Instructions MMRC GLAs Emily Warren ewarren caltech edu and Heather Audesirk haudesir caltech edu Document Updated 4 16 2012 These basic instructions are for general use of the DektakXT profilometer The full user guide can be found on the desktop of the control computer How the system works The DektakXT system takes measurements electromechanically by moving a diamond tipped stylus over the sample surface according to a user programmed scan length speed and stylus force The stylus is linked to a Linear Variable Differential Transformer LDVT which produces and processes electrical signals that correspond to surface variations of the sample Our system is only configured in 2D mode which means Manual X Y translation 101 6 x 101 6 mm 4 x 4 inches of X Y translation manual leveling manual theta rotation Maximum sample thickness 50 mm 1 9 inches thick Maximum scan length 55 mm 2 16 inches Stylus Tip Diameter 2 microns When you arrive the instrument should be off and the cover to the isolation chamber should be closed The bottom of your sample must be clean no Hg or Ga In contaminated samples allowed Start Up 1 Turn on power supply Black box on right 2 Press I button on white power control box 3 Start Vision64 Software The following should happen The tower assembly will move to its upper limit The system stops with the stylus in the Tower Up position The sca2. cal Results box and select Append You can then select whatever it is that you want to measure and select a location for R and M cursors When you hit Calculate you will see all of those values listed in the Analytical Results box Unloading Sample 1 Hit Tower Up 2 Hit Unload sample 3 Either load a new sample or power the system down To power down the DektakXT system 1 Close the Vison64 software 2 Press the black OFF button on the EMO Box 3 Turn off the power switch on the black power supply box Calibration notes 4 16 2012 ELW manually reset vertical calibration using 8 48kA standard measured 704 105 3x Bruker should be sending the correct calibration profile sometime soon For reference Bruker Customer Service 800 873 9750
3. d Options tab in Measurement Setup you can select whether you want the software to auto save your data Running a Scan 1 You can run a single scan or multiple scans To run a single scan click the Single Acquisition button and the scan will begin automatically 2 To run multiple identical scans under the measurement setup menu click the Advanced Options tab and change the number of measurements Press Measurement to begin scanning Manual Leveling Note If you notice a significant slope to your data during the scan you can adjust the stage tilt by turning the silver knob in the front of the instrument Turn the knob to counteract the slope in your data You should not have to adjust this significantly you can further level the data during the data analysis step If something seems wrong contact a GLA 3 After the scan is complete the Data Analysis window should automatically open If not you can click on it To export your data you can right click on the plot and select Export Data To zero level data on computer 1 Under Data Analyzer window select Terms Removal F Operator You should now be able to right click on your data to set your reference cursor to zero and level your data Analysis 1 Select the Data Analysis Screen if you re not already there You should see a trace of your data in the Data Analysis box 2 Right click inside the Analyti
4. e will provide a vertical bit resolution of approximately 0 1nm The 65 5um range has a resolution of 1nm the 524um range has a 2 resolution of 8nm and the 1mm range has a vertical resolution of 15nm So while the 65 5um 524um and 1mm scan ranges would all work for a 10um step the 65 5um is the best 3 Profile Will determine whether you start at bottom middle or top of designated range Valleys Provides 90 of the measurement range below the zero horizontal grid line This option is used primarily for measuring etch depths Hills and Valleys Provides 50 of the measurement range above the zero horizontal grid line and 50 below This option is used in most applications especially if the surface characteristics of the sample are not well known or if the sample is out of level Hills Provides 90 of the measurement range above the horizontal grid line This option is used primarily for measuring step heights 4 Stylus Tip 2 microns need to be sure to reset this everytime you start the program 5 Stylus Force Standard range is between 1 and 15mg Default is 3mg but use less force for soft fragile samples Can use N Lite mode for very low force down to 0 03mg but you need to select the box this limits your scan length as well 6 Length Y length of scan can measure up to 55000um 5 5cm 7 Duration Time of scan Length and Duration determine the resolution of your scan Saving Data 1 Under the Advance
5. n stage initializes The Vision64 Welcome screen appears followed by the Vision64 Instrument tab which includes the DektakXT Live Video Display 4 After the system initializes it is safe to load your sample onto the stage Bruker recommends letting the system warm up for 15 minutes but we haven t seen that it makes a difference in measurement quality Put on gloves before touching anything inside of the lid 5 Check that the flat glass block is free of dust this flat surface is what allows us to measure accurately over longer distances It should be kept clean at all times If you see any dust please blow it off with compressed air or N2 Loading your sample 1 In the Live Video Window hit Unload Sample the stage should move toward you if not it was already in unload 2 Youcan now position your sample on the chuck vacuum capabilities are currently not installed so just center it carefully 3 Inthe Live Video Window hit Load Sample Note During a scan the machine will pull the stylus towards the back of the machine so you want to move your sample so that you are at the front edge of your desired scan area Adjusting sample position 1 To position a sample using the manual sample positioning stage controls Ensure the stylus is not touching the sample surface If it is click the Tower Up button on the toolbar Position the scan start site by using the X Y positioning levers Pull the le
6. ver below the front of the platform for coarse X movement Push the lever back up to secure coarse position Pull the lever below the left side of the platform for coarse Y movement Push the lever back up to secure coarse position Turn the respective knobs to finely position the sample 2 Hit Tower Down to lower the stylus The stylus will hit the sample and then retract to 1mm above the surface Be sure not to bump the instrument during this process Calibration 1 If desired you can use the calibration standards in DektakXt drawer or by old profilometer to calibrate the instrument prior to use to check that the system is working properly To do so follow the instructions above for loading and running a scan and ensure that the measurements correspond to the calibration standard specs If the standards are off significantly contact the GLA Software Scan Parameters The Measurement Set up window allows you to control scan parameters Set each of the following 1 Scan Type Standard Scan 2 Range Sets the Z range of the instrument Set this to a range slightly larger than the feature you want to measure Note if using Hills and Valleys mode you can only measure half of the range above the starting point and half below The selected scan range is scaled across the LVDT output of the stylus head sensor and digitized The greater the selected scan range the lower the vertical resolution of the measurement The 6 5um rang
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