User Manual MP117E - Physik Instrumente
Contents
1. Setting up an XY system 1 a b o gt AN Le e e A O o Figure 8 Setting up an XY system consisting of two N 664 3A stages 1 Upper stage moving platform in reference position with a d mounting holes Y 2 7 mm with counterbore for M2 5 socket head cap screws 2 Lower stage with a d M2 5 mounting holes in the platform Holes that overlap during attachment are marked with the same letters 1 If necessary Make the required mounting holes in the base body of the upper stage accessible Start up the upper stage p 25 and perform a reference move to the reference point switch see the user manual of the controller 2 Position the upper stage rotated by 90 on the moving platform of the lower stage see above figure 3 Align the upper stage so that the required mounting holes in the upper and lower stage overlap holes a to d in the above figure 4 Completely screw in one M2 5 screw into each of the holes 5 Ensure that no screw heads protrude from the counter sunk mounting holes 6 Check that the upper stage fits without backlash N 664 NEXACT Stage MP117E Version 1 0 1 21 5 Installation P I 5 4 Affixing the Load to the N 664 NOTICE Screws that are too long The N 664 can be damaged by screws that are screwed in too deeply gt Observe the depth of the mounting holes p 38 gt Only use screws of the correct length for the2. For more information about the P Stages2 dat stage database see user manual of the E 861 1A1 controller 26 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI ws 6 Start Up and Operation 6 3 Operating the N 664 Prerequisites Y GX SS SS You have read and understood the General Notes on Start Up and Operation p 25 You have read and understood the user manual of the controller You have read and understood the user manual of the PC software You have properly mounted the stage p 13 The controller and the required PC software have been installed All connections with the controller have been established see user manual of the controller Operating the N 664 gt Follow the instructions in the manual of the used controller for start up and operation of the N 664 6 4 Discharging the Piezo Actuators of the Drive INFORMATION The N 664 is driven by NEXACT piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can stay charged for several hours Touching or short circuiting the contacts in the drive connector of the N 664 can trigger unpleasant electric shocks If you want to avoid these unpleasant electric shocks gt Discharge the stage before you pull out the drive connector from the controller Discharging the piezo actuators of the drive If you want to pull o
3. To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany N 664 NEXACT Stage MP117E Version 1 0 1 43 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the N 664 an EC Declaration of Conformity has been issued in accordance with the following European directives 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 N 664 NEXACT Stage MP117E Version 1 0 1 45
4. Typographic Conventions The following symbols and typographic conventions are used in this user manual Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation ho N 664 NEXACT Stage MP117E Version 1 0 1 1 About this Document P I INFORMATION Information for easier handling tricks tips etc Symbol Label Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant ps Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the stage is mounted horizontally The contact point of the load is in the center of the platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached 2 Version 1 0 1 MP117E N 664 NEXAC
5. respective mounting holes Prerequisites v You have read and understood the General Notes on Installation p 13 v You have properly mounted the stage p 16 v You prepared the load so that it can be affixed to the mounting holes on the moving platform The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast two points are provided for affixing the load on the moving platform Tools and accessories Atleast two screws of suitable length Options M2 5 screws M8 screws Suitable tools for fastening the screws 22 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Affixing the load to the N 664 Figure 9 Mounting holes for affixing the load to the moving platform White arrows 8 x M2 5 through holes with 5 mm thread depth Black arrows 10 x M3 holes with 4 mm thread depth Exact position see Dimensions p 38 1 Align the load so that the selected mounting holes in the moving platform can be used for affixing it 2 Affix the load to the selected mounting holes in the moving platform using the screws Maximum screw in depth in the moving platform of the N 664 M2 5 screws 5 mm M3 screws 4 mm Maximum torque M2 5 screws 0 8 Nm M3 screws 1 8 Nm 3 Check that the load fits on the moving platform of the stage without backlash N 664 NEX
6. 15 9 Figure 13 Sub D 15 connector f for sensor mating side Vop Supply voltage 5V Input GND Encoder signal 1 cosine Output Encoder signal 1 cosine inverted Output Encoder signal 2 sine Output Encoder signal 2 sine inverted Output Q Z U _ o ap oy RB wy N E ie a oo a a The character indicates that the corresponding pin is not connected Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Pin assignment of the N664B0001 adapter The pin assignments of the N664B0001 adapter which is included in the scope of delivery of the N 664 are as follows Sub D 15 m connector See above Pin assignment of the Sub D 15 f connector on the N 664 HD Sub D 15 f connector See following table 5 1 I A Lo J MS 00000 NL ro oo A 15 10 Figure 14 HD Sub D 15 f connector for sensor mating side Output The character indicates that the corresponding pin is not connected N 664 NEXACT Stage MP117E Version 1 0 1 41 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations
7. ACT Stage MP117E Version 1 0 1 23 5 Installation P I 5 5 Connecting the N 664 to the Controller 1 5 m N Y Figure 10 N 664 Connections 1 HD Sub D 15 m drive connector 2 Sub D 15 f sensor connector 3 Adapter Sub D 15 m to HD Sub D 15 f Prerequisites v You have read and understood the General Notes on Installation p 13 v You have installed a suitable controller p 9 v You have read and understood the user manual of the controller v The controller is switched off Tools and accessories N664B0001 adapter in the scope of delivery p 9 Screwdriver for slotted screws SL Connecting the N 664 to the E 861 1A1 controller 1 Connect the drive connector of the stage to the corresponding controller socket see user manual of the controller 2 Connect the sensor connector f of the stage to the controller a Connect the sensor connector f of the stage to the connector side of the adapter Sub D 15 m b Secure the connection with the integrated screws against accidental disconnection c Connect the female side of the adapter HD Sub D 15 f to the panel plug of the controller see user manual of the controller 3 Secure the connections on the controller with the integrated screws against accidental disconnection 24 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter Ge
8. ANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacki N 664 NEXACT Stage ng Unpack the N 664 with care Compare the contents against the items covered by the contract and against the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Keep all packaging materials in case the product needs to be returned MP117E Version 1 0 1 11 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ccccceeeccecceeeeeeeeceeeee cece eeeeaeeeeaaeseeeeeseaeessaeeeeeeseenees 13 Attaching the N 664 to a Surface uursnnessseennsnnnnnnnennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 16 Setting Up an XY System unessssnssennnnnnennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnannnnn 20 Affixing the Load to the N 664 uuusessnsensssnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nn 22 Connecting the N 664 to the Controller 220u0220044444nnnnennnnnnnnnnnnnnennnnnnnnnennnnn 24 5 1 General Notes on Installation NOTICE amp Damage from changes in position due to external forces Displacement of the moving platform of the stage from externally acting forces can damage the drive Changes in position of the moving platform that are triggered by externally acting forces can also damage the load or the environment gt Especially when the stage is ve
9. O POSITIONING WWW PI WS 3 Product Description 3 2 Scope of Delivery The N 664 is delivered with the following components N 664 3A Stage according to order N664B0001 Adapter Sub D 15 m to HD Sub D 15 f for sensor connection MP117E User manual this document in printed form Screws for mounting the N 664 1047 M3x12 ISO 4762 4 pieces 1025 M2 5x12 ISO 4762 4 pieces 3 3 Suitable Controllers E 861 1A1 Digital NEXACT Controller gt To order contact our customer service department p 33 3 4 Technical Features 3 4 1 Linear Encoder Sensor The stage is equipped with an optical linear encoder For the encoder resolution refer to the table in the Specifications section p 35 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 4 2 Reference Point Switch The stage is equipped with a direction sensing reference point switch that is located approximately in the middle of the travel range This sensor transmits a TTL signal that indicates whether the stage is on the positive or negative side of the reference point switch The commands that use the reference signal are described in the user manual of the controller and or in the corresponding software manuals N 664 NEXACT Stage MP117E Version 1 0 1 9 PIEZO N
10. PI MP117E N 664 NEXACT Stage User Manual Version 1 0 1 Date 18 11 2013 This document describes the following product N 664 3A Ultra High Precision Linear Positioning System with NEXACT Piezo Drive 30 mm PlOne Linear Encoder 0 5 nm Resolution Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany __ Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation 2013 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 18 11 2013 Document number MP117E MMa version 1 0 1 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual ccceceeseeceeeeeeeteteeneeeeenees 1 1 2 Symbols and Typographic Conve
11. Setting Up an XY System Two N 664 3A stages can be combined to an XY system gt For further combination possibilities contact our customer service department p 33 NOTICE Impermissibly high load on the stages In an XY system the stage for the Y axis must be moved as well Impermissibly high loads interfere with the motion and can damage the stages gt Include the mass of the moved stage in the calculation of the load to be moved gt For all stages in a multi axis system Do not exceed the maximum permissible load gt For all stages in a multi axis system make sure that forces that act upon the moving platform in the respective direction of motion do not exceed the active push pull force of the drive p 35 Designations in these instructions Lower stage Forms the basis of the multi axis system X axis is attached to a surface Upper stage Forms the Y axis of the multi axis system is attached to the lower stage rotated by 90 Prerequisites v You have read and understood the General Notes on Installation p 13 v You accounted for the space required for cable routing free of kinks and in accordance with regulations v You have properly attached the lower stage to a surface p 16 Tools and accessories Four M2 5 screws in the scope of delivery of the upper stage p 9 Allen wrench AF 2 20 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation
12. T Stage PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals E 861 NEXACT Servo Controller PZ205E User Manual PIMikroMove SM148E Software Manual 1 6 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 33 The current versions of the manuals are found on our website For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Download freely accessible manuals 1 oo wD Open the website http www pi portal ws Click Downloads Click the corresponding category e g N PiezoWalk Drives Click the corresponding product code e g N 664 Click Documents The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium N 664 NEXACT Stage MP117E Version 1 0 1 3 1 About this Document P I Download password protected manuals 1 2 3 4 Carr
13. XACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories Screws according to the selected mounting option see above Four M3x12 screws in the scope of delivery or Four M2 5x12 screws in the scope of delivery or Four M4 screws of suitable length not in the scope of delivery Suitable Allen wrench or screwdriver For M3 screws Allen wrench AF 2 5 For M2 5 screws Allen wrench AF 2 Attaching the N 664 to a surface 1 Only for mounting from above When the required mounting holes in the base body of the N 664 are covered by the moving platform Start up the stage p 25 and perform a reference move to the reference point switch see the user manual of the controller 2 Align the stage on the surface so that the corresponding mounting holes in stage are above the holes in the surface 3 Screw in the screws on the mounting holes according to the selected mounting option p 25 For mounting from above Introduce the screws through the moving platform and the base body of the N 664 into the surface For mounting from below Introduce the screws through the surface into the base body of the N 664 Maximum screw in depth 9 mm Maximum torque 0 5 Nm 4 Ensure that no screw heads protrude from the counter sunk mounting holes 5 Check that the N 664 fits on the surface without backlash N 664 NEXACT Stage MP117E Version 1 0 1 19 5 Installation P I 5 3
14. c rail PiezoWalk principle The N 664 is equipped with a linear encoder for direct position measurement The intended use of the N 664 is only possible when installed and in connection with a suitable controller p 9 The controller is not included in the scope of delivery of the N 664 2 2 General Safety Instructions The N 664 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the N 664 gt Only use the N 664 for its intended purpose and only use it if it is in a good working order Read the user manual gt Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the N 664 N 664 NEXACT Stage MP117E Version 1 0 1 5 2 Safety PI 2 3 Organizational Measures User manual gt Always keep this user manual available by the N 664 The latest versions of the user manuals are available for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the N 664 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property
15. damage Only install and operate the N 664 after having read and understood this user manual Personnel qualification The N 664 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description E T 3 Product Description In this Chapter Product View An an 7 SCOPE OF Delivery einen 9 Suitable Gontr llers u a aan nein 9 Technical Features nase er 9 3 1 Product View 3 1 1 Product Details 1 Figure 1 N 664 3A stage moving platform in reference position Base body Moving platform Cable for drive connection Cable for sensor connection x A N m Positive direction of motion of the stage N 664 NEXACT Stage MP117E Version 1 0 1 7 3 Product Description P I 3 1 2 Product Labeling Figure 2 Labeling of stage and connections 1 Notice of laser radiation p 29 here top side of sensor connector f 2 Warning sign Observe manual here top side of sensor connector f 3 Warning sign and values for the laser p 29 here bottom side of sensor connector 4 Type plate specifying a Product name b Serial number c Country of origin d Address of manufacturer website e Warning sign Observe manual f CE conformity mark g Old equipment disposal notice h Manufacturer logo 8 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NAN
16. e maximum load p 35 is not exceeded Ruler of the encoder is Contact our customer soiled e g from being service department p 33 touched Encoder malfunction due Carry out a reference move to shock impact see user manual of the controller If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 33 32 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website N 664 NEXACT Stage MP117E Version 1 0 1 33 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter SPECICATION 35 Maximum RADO S sesia annisa EAS aa EATA ANENA ee 37 DIMENSIONS eier ea une RE Een 38 Pin ASSIM darias in edlen 39 10 1 Specifications 10 1 1 Data Table Active axes Min incremental motion Integrated sensor PlOne linear nanometrology encoder Op
17. eaeeseaaesseneeenaees 32 8 1 General Notes on Troubleshooting CAUTION A Risk of glare and irritation The linear encoder of the N 664 uses a class 2 laser according to DIN EN60825 1 2007 Technical data of the laser Lmax 1 mW 655 nm On delivery and if used according to the intended use of the N 664 the laser is fully shielded Laser radiation can exit from the laser only if N 664 is opened The laser beam can cause glare and irritation gt Do not open or disassemble the N 664 gt Contact our customer service department if there is any malfunction of the N 664 N 664 NEXACT Stage MP117E Version 1 0 1 31 8 Troubleshooting P I 8 2 Possible Causes and Correction Target position is approached too Servo control parameters Switch off the servo control slowly or with overshoot are not optimally set system immediately Target position is not kept stable Large changes in the load 2 Check the settings of the BT servo control parameters Uncontrolled oscillations of the N 664 If necessary correct the settings of the servo control parameters Reduced holding force and feed Ceramic rail of the Contact our customer force NEXACT drive is soiled service department p 33 e g from being touched No or limited motion Excessive load gt Reduce the load see Data Excessive counterforces in table p 35 the direction of motion In the case of vertical mounting gt Ensure gravity compensation so that th
18. en loop resolution Closed loop resolution Max step frequency open loop 08 lt 0 002 0 5 um along the entire travel range 0 03 5 nm along 20 Linearity um N 664 3A x Motion and positioning 30 2 mm nm nm typ nm Bidirectional repeatability Pitch 5 EJS 3 o9 o9 3 3 Qa a D lt aw o o N 664 NEXACT Stage MP117E Version 1 0 1 35 10 Technical Data P I 36 BEE N el rance Mechanical properties Mechanical properties VCH u CI HE BEE Drive properties TT press wexacio mena persia votage CCS mses TT Operaing tempera raros ows i Te EE ie Mass a 5 10 HD sub D connector 15 pin Motor Connector D Sub 15 f 15 pol Sensor E 861 controller for NEXACT linear Recommended controller drives and positioners With E 861 Depending on drive electronics Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 2 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the N 664 Area of application For indoor use only Maximum altitude 2000 m Relative humidity Highest relative humidity 80 for temperatures to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Operating temperature 10 C to 50 C Storage temperature 20 C to 70 C Transport temperature 20 C to 70 C Overvoltage ca
19. ensation will render the N 664 inoperable gt Keep the N 664 free from dirt and condensation gt Avoid touching the ceramic rail of the NEXACT drive and the ruler of the linear encoder The ceramic rail and the ruler are not accessible in the reference position of the moving platform delivery state If necessary before installation and demounting gt Start up the stage p 25 and perform a reference move to the reference point switch see the user manual of the controller NOTICE N 664 NEXACT Stage MP117E Version 1 0 1 1 Damage from incorrect mounting Incorrect mounting of the N 664 or incorrectly mounted parts can damage the N 664 gt Only mount the N 664 and the loads on the mounting fixtures holes intended for this purpose al 5 Installation P I NOTICE Warping of the N 664 due to mounting on uneven surfaces Mounting the N 664 on an uneven surface can warp the N 664 Warping reduces the accuracy gt Mount the N 664 on an even surface The recommended evenness of the surface is lt 10 um gt For applications with great temperature changes Only mount the N 664 on surfaces that have the same or similar thermal expansion properties as the N 664 NOTICE y Damage from unsuitable cables Unsuitable cables can damage the stage and the electronics gt Only use cables provided by PI for connecting the N 664 to the electronics INFORMATION For the reproducibility of the positioning
20. latform manually N 664 NEXACT Stage MP117E Version 1 0 1 25 6 Start Up and Operation P I NOTICE Uncontrolled oscillation Your application and the N 664 can be damaged by uncontrolled oscillations Uncontrolled oscillations can be identified by the fact that the stage approaches the target position too slowly or too fast or does not keep it stable servo jitter If uncontrolled oscillations occur during the operation of the N 664 gt Immediately switch off the servo control system of the affected axis gt Check the settings of the servo control parameters INFORMATION Shock like impacts can cause encoder malfunction gt Protect the stage from shock like impacts gt Carry out a reference move see user manual of the controller INFORMATION The positive direction of motion is away from the cable exit side INFORMATION The repeatability of the positioning is only ensured when the reference point switch is always approached from the same side Recommended controllers from PI fulfill this requirement with their automatic direction detection for reference moves to the reference switch 6 2 Operating Parameters If you use the software enclosed with the E 861 1A1 controller the operating parameters can be loaded from the P Stages2 dat stage database gt Download the PI Update Finder from the PI website http www update pi portal ws and use it to update the P Stages2 dat stage database on your PC
21. n P NOTICE Screws that are too long The N 664 can be damaged by screws that are screwed in too deeply gt Observe the depth of the mounting holes p 38 gt Only use screws of the correct length for the respective mounting holes NOTICE Protruding screw heads Protruding screw heads can damage the N 664 gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion Prerequisites v You have read and understood the General Notes on Installation p 13 v You have provided a suitable surface For the required position of the holes see Dimensions p 38 For mounting from above with M3x12 screws Four M3 holes with a depth of at least 3 mm are present For mounting from above with M2 5x12 screws Four M2 5 holes with a depth of at least 2 5 mm are present For mounting from below with M4 screws Four through holes for M4 screws are present The thickness of the surface and the depth of the counterbores at the through holes in the surface are matched for compliance with the maximum screw in depth of 9 mm in the N 664 The evenness of the surface is 10 um For applications with great temperature changes The surface should have the same or similar thermal expansion properties as the N 664 v You accounted for the space required for cable routing free of kinks and in accordance with regulations 18 Version 1 0 1 MP117E N 664 NE
22. neral Notes on Start Up and Operation 20u44440nnnnnnnnnnnnnnnnnnnnnnnnnnnennnnn 25 Operating Parameters cia ia ii 26 Operating the N 664 eierens ann a Re 27 Discharging the Piezo Actuators of the Drive uunnesenssnennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 27 6 1 General Notes on Start Up and Operation NOTICE Damage from collisions Collisions can damage the stage the load to be moved and the environment gt Make sure that no collisions are possible between the stage the load to be moved and the environment in the motion range of the stage gt Do not place any objects in areas where they can get caught by moving parts gt Stop the motion immediately if a controller malfunction occurs gt If possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion NOTICE aD Damage from changes in position due to external forces Displacement of the moving platform of the stage from externally acting forces can damage the drive Changes in position of the moving platform that are triggered by externally acting forces can also damage the load or the environment gt Especially when the stage is vertically mounted make sure that the forces that act on the moving platform in the direction of motion do not exceed the active push pull force of the drive p 35 gt Initiate all motions by sending motion commands to the controller Do not displace the moving p
23. nnnnnnnnninicnnnnncnnnnn 37 102 Maximum Ratings nee ern 37 10 3 Dimensions c coooccccnnnoncnonononinonocncnnonaconono naco tinnu ntina nunna tunnun oran nnn nn naar nn naar AAEE annan nanne 38 10 4 Pin Assignment nserneeennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nn nnn nn 39 10 4 1 Drive Connection uuuueeanaannnnnnnnennnnnnannnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 39 10 4 2 Sensor Connection uuueneenneennannannnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnannnnnnnnnn 40 Old Equipment Disposal 43 EC Declaration of Conformity 45 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ursssssnsnnssennnnnnnnnnnnnnnnnnnnnn 1 Symbols and Typographic Conventions uunsersssenssennnnnnnnnnennnnnnnnnnnnnnnnnnnnnn nn 1 Definition es ei 2 FIQULES da ine ne ee 3 Other Applicable Documents 20044240044440nnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 3 Downloading Manuals voices citess atzeess sn RB 3 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the N 664 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and
24. nnnnnnnnnnnnnnnnnnnnnnnnnannnnnnnnnnnnn 16 5 3 Setting Up an XY System uuunsssssennssennnnnnnnsnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nenn 20 5 4 Affixing the Load to the N 664 uuusssnseenssnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn anna 22 5 5 Connecting the N 664 to the Controller 220424004444nnnnnnnnnnnnnnennnnnn nenn 24 6 Start Up and Operation 25 6 1 General Notes on Start Up and Operation 40snsensnennnnennnnnennnnnnnnnenn 25 6 2 Operating Parameters ursnssssnennsnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnnenannnnn nenn 26 6 3 Operating the N 664 2nusnsenssnnnnsnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnannnnn nenn 27 6 4 Discharging the Piezo Actuators of the Drive unuensssnsnnnnnnnnennnnnnnnnnnnnnen 27 Maintenance 29 7 1 General Notes on Maintenance occccccccnnnononcncnnnonononenaninnnn nono ease eeeeeeeeanaeeeeeeeenees 29 7 2 Cleaning the N 664 uu 240rsnsnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnannnnnnnnnnnnnnnnnnnnnnn naar 29 Troubleshooting 31 8 1 General Notes on Troubleshooting 2 240444400nnnnnnnnnnnnnnnnnnnennnnnnnnenn 31 8 2 Possible Causes and Correction cccccccccccccococononononononononononononononocononononononononos 32 Customer Service 33 Technical Data 35 10 1 SPECHCAUIONS u nn eier au 35 10 1 1 Data able EEE EEE IE ee 35 10 1 2 Ambient Conditions and Classifications ooonno
25. ntions ursneesssennssennnnnennnnnnnnnnnnnnnnnnnnnn nn 1 1 3 OPINION ainnean aaia cantdewerdaaeattecadawierdaarnan a iaaa 2 1 4 EU ici en hen AETA AEE 3 1 5 Other Applicable Documents 2444440nnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nn 3 1 6 Downloading Manuals ocooonoccccnoniciccnnnoccccnnnonccnnnnonccnnn nro rc rr 3 2 Safety 5 2 1 INTENDED USES nenn a din 5 2 2 General Safety Instructions cccceecceceeeeeeeeeeeeeeeeeeeeeceaeeeeaaeseeneeseaeeesaaeseenaeeenees 5 2 3 Organizational MCASULES ccecececeeeeeceneeeesaeceeneeceeeeeceaeeseaaeseeneeceaeeesaeseeaaeesnees 6 3 Product Description 7 3 1 Pro d ct VIEW esitarkistaa aaia i aia aa e a aaa ieia 7 3 1 1 Product Detalls coin 7 3 1 2 Product LabelinQ oococoonoccccnnnocicononoccnonanonccnonnonnnn nan enee aaae 8 3 2 Scope of Delivery cooooconcccnncnnnnccnnncncnnnccccncnnn narco 9 3 3 Suitable Controllers oooonccccnnnnnnnncnnnconcccnnnccnncrn nan c ronca 9 3 4 Technical Features ooooooccnnnccccononccccnnnnccnnnnnnncncnnnne cnn rre cnn ia cnn EENEN EUREEN AE 9 3 4 1 Linear Encoder Sensor cccccccescceeesceeeseeeeeecesneeeeeeaeseeaaeeneeaeenaes 9 3 4 2 Reference Point Switch sssssssennsnennnnnnnnnnnnnnnnnnnnnnnnnnnn nn 9 4 Unpacking 11 5 Installation 13 5 1 General Notes on Installation 4404s4000nnnannnnnnnnnnnnnnnnnnnnnnnnnnnnnn nenn 13 5 2 Attaching the N 664 to a Surface u nsuensnssssnennn
26. rtically mounted make sure that the forces that act on the moving platform in the direction of motion do not exceed the active push pull force of the drive p 35 gt Initiate all motions by sending motion commands to the controller Do not displace the moving platform manually N 664 NEXACT Stage MP117E Version 1 0 1 13 5 Installation P I Figure 3 Accessible when the moving platform is driven out Ruler of the linear encoder 1 Bottom side of the moving platform of the N 664 3A 2 Detail Ruler of the linear encoder do not touch Figure 4 Accessible when the moving platform is driven out Ceramic rail of the NEXACT drive 1 Bottom side of the moving platform of the N 664 3A 2 Detail Ceramic rail of the NEXACT drive do not touch 14 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation NOTICE Damage from mechanical actions The ruler of the linear encoder is scratch sensitive and can be damaged by mechanical actions e g from pointed objects gt Treat the ruler with extreme care The ruler is not accessible in the reference position of the moving platform delivery state If necessary before installation and demounting gt Start up the stage p 25 and perform a reference move to the reference point switch see the user manual of the controller NOTICE Malfunction due to soiling Any type of soiling e g dust oil grease or cond
27. tegory in acc with EN 60664 1 2007 VDE 0110 1 Protection class acc to EN 61140 VDE 0140 1 Degree of pollution 1 acc to EN 60664 1 2007 VDE 0110 1 Degree of protection IP20 acc to IEC 60529 10 2 Maximum Ratings The stage is designed for the following operating data Maximum Operating Maximum Operating Maximum Power Voltage Frequency Consumption A A A N 664 NEXACT Stage MP117E Version 1 0 1 37 10 Technical Data P I 10 3 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 11 Dimensions of the N 664 3A moving platform in reference position 38 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Pin Assignment 10 4 1 Drive Connection The HD Sub D 15 connector transmits the signals to control the drive AMP Amplifier enable Output The character indicates that the corresponding pin is not connected This pin is connected to the GND in the connector shell In the E 861 1A1 controller this pin is used to activate the amplifiers N 664 NEXACT Stage MP117E Version 1 0 1 39 10 Technical Data P I 10 4 2 Sensor Connection 40 Pin assignment of the Sub D f connector on the N 664 The Sub D 15 connection transmits the signals from and to the integrated incremental linear encoder sensor and the reference point switch www y z
28. to be optimal all components must be affixed with zero backlash gt Make sure that stage and load are affixed with zero backlash 5 2 Attaching the N 664 to a Surface Options for attaching the N 664 to a surface INFORMATION The mounting holes in the base body of the stage are only accessible from above when the moving platform is in the reference position delivery state If necessary gt Start up the stage p 25 and perform a reference move to the reference point switch see the user manual of the controller The mounting holes of the N 664 are intended for the following mounting options 16 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Mounting option Mounting holes details see Dimensions p 38 Mounting from above with A O OD 0 M3x12 screws lt mz oo Figure 5 N 664 top view M4 holes with core hole diameter 3 4 mm and counterbore for mounting from above with M3 screws Mounting from above with O OD 0 M2 5x12 screws This mounting option is used e g when setting up an XY system consisting of two N 664 3A stages p 20 Figure 6 N 664 top view holes with 2 7 mm and counterbore for mounting from above with M2 5 screws Mounting from below with M4 screws Figure 7 N 664 bottom view M4 holes for mounting from below with M4 screws N 664 NEXACT Stage MP117E Version 1 0 1 17 5 Installatio
29. ut the connector of the drive from the controller 1 If you are working in closed loop operation Switch off the servo mode on the controller Set the piezo voltage on the controller to 0 V by sending an RNP command see user manual of the controller If possible Switch off the controller Wait at least 10 seconds before disconnecting the controller N 664 NEXACT Stage MP117E Version 1 0 1 27 PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance ooocccccccccncnonoccnnnnnonnnonanonannno nono nana nn cnn cnn no nnnna nana ncnnnnnnnns 29 Cleaning the N 664 vies cccior 22 0 een dita neeceees 29 7 1 General Notes on Maintenance The N 664 is maintenance free 7 2 Cleaning the N 664 Prerequisites Y You have discharged the piezo actuators of the N 664 v You have disconnected the N 664 from the controller Cleaning the N 664 gt Clean the surfaces of the N 664 with a cloth that is slightly dampened with a mild cleanser or disinfectant e g ethanol or isopropanol gt Do not do any ultrasonic cleaning N 664 NEXACT Stage MP117E Version 1 0 1 29 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting In this Chapter General Notes on Troubleshooting 4 4444u44400nnnnnnnnnennnnnnnnnnnnnnennnnnnnnnannnnn 31 Possible Causes and Correction ccccccceceeeeeeeeeceneeceeeeeeeaeeseaaeeeeeees
30. y out steps 1 to 5 of the download process for freely accessible manuals Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and password in the User login for software download section in the Release News In the User login area on the left margin in the website enter the user name and the password in the corresponding fields Click Login The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium 4 Version 1 0 1 MP117E N 664 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter Intended Use ee 5 General Safety Instructions 24 0240044n400nnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 5 Organizational Measures 220u04440nnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnen 6 2 1 Intended Use The N 664 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the N 664 is intended for single axis positioning adjusting and shifting of loads at different velocities The N 664 is a stage for nanopositioning technology The feed is produced by NEXACT piezo actuators coupled to a cerami
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