User Manual PZ254E - Physik Instrumente
Contents
1. Windows operating systems Open the FTP download directory in Windows Explorer Log in with the user name and the password from the Release News In the directory of the corresponding product go to the Manuals sub directory Copy the desired manual to the hard disk of your PC or to a data storage medium Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter apo IS nenn E o yn 5 General Safety Instructions ccccccccccoconnnccnnnnononononnnenonnnonononancnnnnnnnononannnennnnnnnononanennnns 5 Organizational Measures oooccccnncccccccnonccnnonononononnncnnnnnonononanennnononnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnss 7 2 1 Intended Use The P 753 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the P 753 is intended for fine positioning as well as the fast and precise motion of small objects The motion takes place linearly in one axis The P 753 can be mounted with a horizontally or vertically oriented motion axis Vertical mounting is only possible under certain conditions p 21 The intended use of the P 753 is only possible in combination with suitable electronics p 12 that is available from Pl The electronics is not included in the scope of delivery of the P 753 The electronics must provide the requ2. P 753 Positioning Systems PZ254E Version 1 0 0 37 10 Technical Data Pp I 10 1 2 Maximum Ratings P 753 stages are designed for the following operating data in continuous operation Maximum Operating Maximum Operating Maximum Power Frequency without Consumption Load P 753 11C 20 to 120 V 1 9 kHz 5 4 W P 753 1CD P 753 21C 20 to 120 V 1 25 KHz 10 8 W P 753 2CD P 753 31C 20 to 120 V 1 kHz 16 2 W P 753 30D To prevent damage it is recommended to operate the stage with maximally one third of the resonant frequency If the stage is operated with a load the values are lower Corresponds to the power provided by the amplifier which results in heating of the piezo actuator to approximately 80 C 38 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P 753 Area of application Maximum altitude Air pressure Relative humidity Operating temperature Storage temperature Transport temperature Overvoltage category Protection class Degree of pollution Degree of protection according to IEC 60529 For indoor use only 2000 m 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C
3. 20 C to 80 C 20 C to 80 C 25 C to 85 C IP20 P 753 Positioning Systems PZ254E Version 1 0 0 39 10 Technical Data I 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings cable exit P 753 12C Figure 10 P 753 11C P 753 1CD 40 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data cable exit P 753 22C Figure 11 P 753 21C P 753 2CD P 753 Positioning Systems PZ254E Version 1 0 0 41 10 Technical Data I cable exit P 753 32C Figure 12 P 753 31C P 753 3CD 42 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Torque for Stainless Steel Screws A2 70 Serew Sze Minimum Torque emun Torge 10 4 Pin Assignment 7W2 Sub D mix connector Figure 14 Sub D mix connector Exemplary top view P 753 Positioning Systems PZ254E Version 1 0 0 43 10 Technical Data gt I Piezo voltage A2 Probe Probe sensor signal moving part of the capacitive sensor Data ID chip Data cable for ID chip GND target and ID chip Ground of target and ID chip GND PZT Ground of piezo voltage a Target Target sensor signal non moving part of the Capacitive sensor LEMO coaxial connectors Figure 15 LEMO connectors PZT P and T See Probe sensor signal moving part N shield of the capacitive
4. 5 Installation I The figure below serves as an example and can differ from your stage model Figure 5 P 753 Four counter sunk holes for mounting from above white arrows and two threaded holes for mounting from below hatched arrows Prerequisite v You have read and understood the general notes on installation p 17 v You have provided a suitable surface For the required position of the holes see Dimensions p 40 For mounting from above with M3 screws Four M3 holes with a depth of at least 3 mm are present For mounting from below with M3 screws Two through holes for M3 screws are present The thickness of the surface and the depth of the counterbores at the through holes in the surface are matched for compliance with the maximum screw in depth of 5 mm in the P 753 The evenness of the surface is lt 10 um For applications with great temperature changes The surface should have the same thermal expansion properties as the P 753 e g surface made of aluminum v You have accounted for the space required for a cable routing free of kinks and in accordance with regulations v The P 753 is not connected to the controller 22 Version 1 0 0 PZ254E P 753 Positioning Systems 5 Installation PIEZO NANO POSITIONING WWW PI WS Tools and accessories For mounting from above Four M3 screws of suitable length p 40 For mounting from below Two M3 screws of suitable length p 40
5. E 509 sensor servo controller module Optional E 517 interface and display module or E 515 display module 12 Version 1 0 0 PZ254E P 753 Positioning Systems 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 6 Technical Features 3 6 1 PICMA Piezo Actuators P 753 stages are driven by PICMA piezo actuators PICMA actuators have all ceramic insulation and are therefore far superior to conventional actuators in respect to performance and lifetime The monolithic piezoceramic block is protected against humidity and failure due to increased leakage current by a ceramic insulation layer In this way an especially high reliability is achieved even under extreme ambient conditions In contrast to motorized drives there are no rotating parts or friction The piezo actuators are therefore backlash maintenance and wear free 3 6 2 Flexure Guides P 753 stages have flexure guides flexures for frictionless motion and high guiding accuracies A flexure guide is an element which is free from static and sliding friction It is based on the elastic deformation bending of a solid e g steel and does not have any rolling or sliding parts Flexure elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not require any lubricants 3 6 3 Capacitive Sensors Capacitive sensors measure the position d
6. Suitable screwdriver Mounting the stage on a surface 1 Align the P 753 on the surface so that the corresponding holes in the P 753 and the surface overlap 2 Mount the P 753 on the surface from above or from below Mounting from above with four M3 screws a Introduce four screws into the counter sunk holes in the base body of the P 753 from above b Tighten the four screws Observe the specified torque range p 43 while doing so Mounting from below with two M3 screws a Introduce two screws through the holes in the surface into the base body of the P 753 from below b Tighten the two screws Observe the specified torque range p 43 while doing so 3 Make sure that no screw heads protrude from the counter sunk holes 4 Check that the P 753 fits on the surface without backlash 5 If necessary secure the screws with a thread locking adhesive P 753 Positioning Systems PZ254E Version 1 0 0 23 5 Installation gt I 5 4 Affixing the Load NOTICE Mechanical overload due to high torques and high loads When affixing the load high torques and high loads can overload the moving platform of the P 753 Mechanical overload can cause damage to the piezo actuators sensors and flexure joints of the P 753 and lead to losses in accuracy gt Observe the torque range p 43 given for the screws used during installation gt Avoid torques gt 0 3 Nm on the moving platform gt Do not exceed the maximum p
7. Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50581 2012 laa P 753 Positioning Systems PZ254E Version 1 0 0 47
8. by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 13 10 2014 Document number PZ254E CBo Version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual cccccesseeceeeeeesseeeeeeeeeeeeees 1 1 2 Symbols and Typographic CONVENTIONS ccooocccnccccnnncnnccnnnnnconcnononnnononononnnnnononanenns 1 1 3 FOUR E ee 2 1 4 Other Applicable DOCUMENTS cccccccccconnnccnnnccconononnccnonononononannnnnnnnononnnannnnnnnnnnnnonans 3 1 5 Downloading Manuals ccccooncnccconcnncccncnnconononnnnnnnononnanoncnnoncnnononcnnnnnnnnnnnnanennnnanens 3 2 Safety 5 2 1 mended Une A e ooo qecisooce aeunawec qresesaeaneasene godess 5 2 2 General Safety Instructions cccccccconccnncoconncnnnnononnnnnnnononnnnnnononannnnnnnnnnnnnnnononnnons 5 2 3 Organizational Measures cccoooncnccconcnncconnnnconononnononcnnononnnnnnnnnnnnonancnnononnnnonennnnnnnos 7 3 Product Description 9 3 1 es LO SA 9 3 2 o A e PO o a 10 3 3 Product LSB ING cornada 10 3 4 510901918 I CNV CMY nenne ee 12 3 5 SUltableEl amp Clronies u nenne de 12 3 6 a
9. considerable reduction in the lifetime of the piezo ceramic of the actuator gt When the P 753 is not used but the controller remains switched on to ensure temperature stability discharge the P 753 p 29 NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the P 753 gt Only operate the P 753 with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 38 for which the P 753 is specified gt Only operate the P 753 when the operating voltage is properly connected see Pin Assignment p 48 NOTICE Uncontrolled oscillation Oscillations can cause irreparable damage to the stage Oscillations are indicated by a humming and can result from the following causes A change in the load and or dynamics requires the servo control parameters to be adjusted The stage is operated near its resonant frequency If you notice oscillations gt In closed loop operation immediately switch off the servo mode gt In open loop operation immediately stop the stage INFORMATION The positive direction of motion of the axis is given in the product view p 10 INFORMATION Sound and vibration e g footfall impacts can be transmitted to the stage and can affect its performance with regard to position stability gt Avoid transmitting sound and vibration while the st
10. 10 2 o A 40 10 3 Torque for Stainless Steel Screws A2 70 coococcoconcccccococconoconconoooanonconancnnonnnnonnnnos 43 10 4 Pin PP O 5 O EE A 43 Old Equipment Disposal 45 EC Declaration of Conformity 47 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ooccccnnccccooononnccnnncccncnnonnccnnnnnnnonnnanonnnns 1 Symbols and Typographic CONVENtIONS ccccccccconcccnnnccccnnnnoncconnnonononannnnnnnnnonononanennnnnons 1 PP on O E 2 Other Applicable DOCUMENTS cccccccccccnnccnnncccconononncnnnnnnononononennnnnonononannnnnnnonononannnnnnnnnnns 3 Downloading Manuals sarita ica 3 1 1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P 753 x stands for the different models p 9 Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury A gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to ta
11. AA ee ee ee 13 3 6 1 PICMA Piezo Actuators ooccccccccnnnccconcnnononcnnnonanonnononcnnononnnononaneness 13 3 6 2 PO OS GUIDES IMA A e 13 3 6 3 Capacitive SONSOSMS cccscccseeceecsceseeccescceseeeeecscsseeeeesscuseeeeecscusenees 13 3 6 4 ID Chip Only Models With Sub D Connector 13 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installation ooocccccconcnnoconnnnccconnnnonononnnnonnnnnonanonnononess 17 5 2 Connecting the P 753 to the Protective Earth Conductor cooccccccnnccnccconnnnnnonos 19 5 3 Mounting the P 753 sara 21 5 4 Affixing the Load nee we 24 6 Start Up and Operation 27 6 1 General Notes on Start Up and Operation ooccccccooonncnncccnnnccnncnonnncconononanccnnononnns 27 6 2 Operating the P 753 entire 29 6 3 Discharging the P 753 cccccsessccecesseeecseseeeceeeseeecsaseeecseuseecsesecessaseeessensensseags 29 10 11 12 Maintenance 31 7 1 General Notes on Maintenance cccccceccececcecceccececceccucceceeceeeucneceeeeeaeeeeeenseees 31 7 2 Cleaning the P 758 ccccccccccssscecceesececsesscesceeeeeeceaececseaseeessageeesseuseeessaeeeessaneees 31 Troubleshooting 33 Customer Service 35 Technical Data 37 10 1 SSC ICAO AAA N e 37 10 1 1 Dala Table micci n rr vackddesseadecssanevvaewsoetoaes 37 10 1 2 Maximum Ratings abra co 38 10 1 3 Ambient Conditions and Classifications oooocococcncocincccincnoncninnnnono 39
12. E Version 1 0 0 17 5 Installation YY I NOTICE Ir f Mechanical overload from incorrect handling An impermissible mechanical overload of the moving platform of the P 753 can cause damage to the piezo actuators sensors and flexure joints of the P 753 as well as losses of accuracy gt Only hold the P 753 externally by the base body NOTICE a Damage from unsuitable cables gt Only use cables provided by PI for connecting the P 753 to the electronics Unsuitable cables can damage the stage and the electronics NOTICE AR Damage from incorrect mounting Incorrect mounting of the P 753 or incorrectly mounted parts can damage the P 753 gt Only mount the P 753 and the loads on the mounting fixtures holes intended for this purpose NOTICE Damage due to incorrectly tightened screws Incorrectly tightened screws can cause damage gt Observe the torque range p 43 given for the screws used during installation INFORMATION Extended cables can reduce the positioning accuracy of the P 753 or affect the sensor processing by the electronics gt Do not use cable extensions If you need longer cables contact our customer service department p 35 18 Version 1 0 0 PZ254E P 753 Positioning Systems 5 Installation PIEZO NANO POSITIONING WWW PI WS 5 2 Connecting the P 753 to the Protective Earth Conductor INFORMATION In the case of P 753 stages with Sub D connectors groun
13. PI PZ254E P 753 Positioning Systems User Manual Version 1 0 0 Date 13 10 2014 This document describes the following products P 753 11C P 753 1CD LISA High Dynamics Piezo Nanopositioning System 12 um Direct Metrology Capacitive Sensor P 753 21C P 753 2CD LISA High Dynamics Piezo Nanopositioning System 25 um Direct Metrology Capacitive Sensor P 753 31C P 753 3CD LISA High Dynamics Piezo Nanopositioning System 38 um Direct Metrology Capacitive Sensor 11C 21C 31C with LEMO connectors 1CD 2CD 3CD with Sub D connector Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano The products described in this document are in part protected by the following patents German patent no 10021919C2 German patent no 10234787C1 German patent no 10348836B3 German patent no 102005015405B3 German patent no 102007011652B4 US patent no 7 449 077 Japanese patent no 4667863 Chinese patent no ZL03813218 4 2014 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected
14. R piezo servo controller E 753 digital piezo controller P 5xx P 6xx P 7xx piezo positioning PZ240EK Short Instructions systems 1 5 Downloading Manuals INFORMATION lf a manual is missing or problems occur with downloading gt Contact our customer service department p 35 P 753 Positioning Systems PZ254E Version 1 0 0 3 1 About this Document gt I INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals Pl website gt Follow the corresponding instructions for downloading Download freely accessible manuals 1 2 3 4 Open the website http www pi portal ws Click Downloads Click the corresponding product category Go to the corresponding product code The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Open the FTP download directory ftp pi ftp ws
15. S 5 Installation 5 Installation In this Chapter General Notes on Installation cccoonccccoooncnncoonnnnccononnnonncnnnonanonnnnononnnnnarnnnnnanonnos 17 Connecting the P 753 to the Protective Earth Conductor 2 200022200020n0e nennen 19 Mounino the P27 99 ana eei SEEE 21 AD A o E aeeneeuseaeaenaanusiaamnadiae 24 5 1 General Notes on Installation Dangerous voltage and residual charge on piezo actuators A The P 753 is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 753 can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 753 gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off Pl controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller P 753 Positioning Systems PZ254
16. age is being operated 28 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 2 Operating the P 753 gt Follow the instructions in the manual of the controller used for start up and operation of the P 753 6 3 Discharging the P 753 The P 753 must be discharged in the following cases Before installation fthe P 753 is not used but the controller remains switched on to ensure temperature stability Before demounting e g before cleaning and transporting the P 753 and for modifications The P 753 is discharged through the internal discharge resistor of the controller from PI Discharging a P 753 that is connected to the controller In closed loop operation 1 Switch off the servo mode on the controller 2 Set the piezo voltage to O V on the controller In open loop operation gt Set the piezo voltage to 0 V on the controller Discharging a P 753 that is not connected to the controller gt Connect the stage to the switched off controller from PI P 753 Positioning Systems PZ254E Version 1 0 0 29 PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance ccccccccececcececcececcececucceccccecuccececaeceeauceeacsecauaeceuaecass 31 NS A qn A 31 7 1 General Notes on Maintenance NOTICE Misalignment from loosening screws on the base body The P 753 is maintenance free a
17. d loops can occur when the stage is grounded via its protective earth connector as well as by the shield of the connection cable for the electronics gt If aground loop occurs contact our customer service department p 35 INFORMATION gt Observe the applicable standards for mounting the protective earth conductor The P 753 is equipped with an M4 hole for fastening the protective earth conductor This hole is located next to the cable exit and is marked with the protective earth conductor symbol see Dimensions p 40 Prerequisite v You have read and understood the general notes on installation p 17 v The stage is not connected to the electronics Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm Supplied M4 protective earth screw set p 12 for connecting the protective earth conductor Suitable screwdriver P 753 Positioning Systems PZ254E Version 1 0 0 19 5 Installation I Figure 4 Mounting of the protective earth conductor profile view 1 Base body of the P 753 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P 753 to the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the P 753 as shown in the profile
18. e point refer to the model 114039262 Serial number example individual for each P 753 Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers Bo JUSA Brandname name Pr pana logo a Warring sgn Observe manual re of origin Coenen se of origin Germany CL WWW PI WS Manufacturer s address website Symbol for the protective earth conductor marks the protective earth connection of the P 753 Figure 3 P 753 Residual voltage warning sign on connector Warning sign Residual voltage Notice of risk of electric shock p 5 P 753 Positioning Systems PZ254E Version 1 0 0 11 3 Product Description E 3 4 Scope of Delivery ETB AA P 753 Stage according to order p 9 000036450 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2flat washers PZ240EK Short instructions for piezo positioning systems 3 5 Suitable Electronics To operate a P 753 you need suitable electronics Devices are selected depending on the type of application The following table lists suitable devices x suitable Chan P 753 Model E 610 piezo amplifier servo controller OEM module E 625 piezo servo controller bench top E 665 servo controller bench top E 753 digital piezo controller E 501 modular piezo controller consisting of E 505 piezo amplifier module
19. eristics on the P 753 The contact surface of the load has an evenness of at least 10 um The thermal expansion properties are similar to those of the P 753 e g loads made of aluminum P 753 Positioning Systems PZ254E Version 1 0 0 33 8 Troubleshooting 34 PI When stages whose ID chip p 13 does not contain any calibration data or LEMO conneciors are used the axis displacement has to be recalibrated after the P 753 or the controller has been replaced The stage starts oscillating or positions inaccurately P 753 or controller has been replaced Axes were mixed up during connection only with LEMO conneciors The stage is not connected to the corresponding controller only with several systems Servo control parameters incorrectly set because e g the load was changed Open loop operation near the resonant frequency gt Perform a recalibration of the axis displacement see controller manual or contact our customer service department p 35 Observe the assignment of the axes when connecting the stage to the controller This assignment is indicated by labels on the devices Observe the assignment of the devices when several systems are connected The assignment is indicated on the calibration label of the controller see rear panel or bottom side which contains the serial number of the stage to be connected Immediately switch off the servo mode of the corresponding sta
20. ermissible stress and load capacities according to the specifications p 37 NOTICE Warping of the P 753 due to affixing of loads with uneven contact surface Affixing loads with an uneven contact surface can warp the P 753 Warping reduces the accuracy gt Only affix loads on the P 753 whose contact surface with the moving platform of the stage has an evenness of at least 10 um gt For applications with great temperature changes Only affix loads on the P 753 that have the same or similar thermal expansion properties as the P 753 NOTICE Center of load at unsuitable position If the center of load is located far outside of the moving platform e g high set ups and long levers the P 753 can be damaged from high strain on the flexure guides high torques and oscillations especially when operated dynamically gt Ifthe center of the load to be affixed is far above or to the side of the moving platform adjust the controller settings before start up or contact our customer service department p 35 24 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation NOTICE Screws that are too long The P 753 can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 40 gt Only use screws of the correct length for the respective mounting holes INFORMATION The positive direction of motion of the axis i
21. ge axes Check the settings of the servo control parameters on the controller Adjust the servo control parameters on the controller according to the load change In open loop operation only operate the stage with a frequency that is below the resonant frequency lf the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 35 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website P 753 Positioning Systems PZ254E Version 1 0 0 35 PIEZO NANO POSITIONING 10 Technical Data In this Chapter WWW PI WS 10 Technical Data ICC o AAA e PEC nee ne 37 PNET S10 Sata orcas 40 Torque for Stainless Steel Screws A2 70 ooooooooccccnccccnocconnconoononnnnononncnnononanenonononanenos 43 Hi oea A O ene 43 10 1 Specifications 10 1 1 Data Table P 753 1CD P 753 2CD P 753 3CD Unit T
22. irectly on the moving platform direct metrology and work without contact Neither friction nor hysteresis interferes with the motion which allows excellent linearity values to be achieved in combination with the high position resolution In connection with suitable electronics capacitive sensors achieve the best resolution stability and bandwidth 3 6 4 ID Chip Only Models With Sub D Connector An ID chip is located in the Sub D connector of the stage When the stage is calibrated at the factory with digital electronics the calibration data is saved together with specific product information on the ID chip When switched on digital electronics read the data from the ID chip of the connected stage Stages whose ID chip contains the calibration data can therefore be connected to any suitable digital electronics without a new calibration For more information on the ID chip see the manual of the controller used P 753 Positioning Systems PZ254E Version 1 0 0 13 4 Unpacking PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 1 Unpack the P 753 with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned P 753 Positioning Systems PZ254E Version 1 0 0 15 PIEZO NANO POSITIONING WWW PI W
23. ired operating voltages To ensure proper performance of the servo control system the electronics must be able to read out and process the signals from the capacitive sensors 2 2 General Safety Instructions The P 753 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 753 gt Only use the P 753 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect Safety The operator is responsible for the correct installation and operation of the P 753 P 753 Positioning Systems PZ254E Version 1 0 0 5 2 Safety E I The P 753 is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 753 can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 753 gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off Pl controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touchi
24. ke to avoid the situation ol P 753 Positioning Systems PZ254E Version 1 0 0 1 About this Document INFORMATION PI Information for easier handling tricks tips etc Symbol Label 1 2 gt p 5 RS 232 AA 1 3 Figures Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 2 Version 1 0 0 PZ254E P 753 Positioning Systems 1 About this Document PIEZO NANO POSITIONING WWW PI WS 1 4 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website E 501 modular piezo controller E 505 piezo amplifier module E 509 sensor servo controller module E 515 display module E 517 interface and display module E 610 C0 piezo amplifier servo controller E 625 CR piezo servo controller E 665 C
25. nd precisely aligned Loosened screws on the base body cause a loss in positioning accuracy gt Do not loosen any screws on the base body 7 2 Cleaning the P 753 Prerequisites v You have discharged the piezo actuators of the P 753 p 29 Y You have disconnected the P 753 from the controller Cleaning the P 753 gt Clean the surfaces of the P 753 with a cloth that is slightly dampened with a mild cleanser or disinfectant e g ethanol or isopropanol gt Donotdo any ultrasonic cleaning P 753 Positioning Systems PZ254E Version 1 0 0 31 8 Troubleshooting PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting No or limited The cable is not gt Check the cable connections motion connected correctly Excessive load gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 37 Zero shift of the Perform a zero point adjustment of the sensor for the sensor see controller manual following reasons Load applied in direction of motion Ambient operating temperature of the stage far above or below calibration temperature 21 C to 24 C Reduced Warping of the base Only mount the P 753 on surfaces with accuracy body or the moving the following characteristics platform Evenness of at least 10 um The thermal expansion properties are similar to those of the P 753 e g surfaces made of aluminum Only affix loads with the following charact
26. ng the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 753 in the case of malfunction or failure of the system If touch voltages exist touching the P 753 can result in minor injuries from electric shock gt Connect the P 753 to a protective earth conductor p 19 before start up gt Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 753 to the protective earth conductor before starting it up again Mechanical forces can damage or misalign the P 753 gt Avoid impacts that affect the P 753 gt Do not drop the P 753 gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 37 gt Only hold the P 753 externally by the base body 6 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 2 Safety The P 753 is maintenance free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators Loosened screws cause a loss in positioning accuracy gt Only loosen screw
27. olerance Active axes X X X Motion and positioning Integrated sensor Capacitive Capacitive Capacitive Closed loop travel 12 25 38 um Closed loop open loop 0 05 0 1 0 2 nm typ full resolution travel Linearity error closed loop 0 03 0 03 0 03 typ Repeatability 1 2 3 nm typ Pitch yaw 5 a 10 urad typ Mechanical properties Stiffness in motion direction 45 24 16 N um 20 Unloaded resonant frequency 5 6 3 7 2 9 kHz 20 Resonant frequency 200g 2 5 1 7 1 4 kHz 20 Push pull force capacity in 100 20 100 20 100 20 N max motion direction Load capacity vertical 10 2 10 2 10 2 kg max horizontal mounting Drive properties Ceramic type PICMA P 885 PICMA P 885 PICMA P 885 Electrical capacitance 1 5 3 1 4 6 UF 20 Dynamic operating current 12 15 15 UA Hz 20 coefficient x um Miscellaneous Operating temperature range 20 to 80 20 to 80 20 to 80 C Material Steel Steel Steel Dimensions 44 mm x 44 mm x 44 mm x 30 mm x 30 mm x 30 mm x 15 mm 62 mm 80 mm Mass 0 16 0 215 0 26 kg 5 Cable length 1 5 1 5 Es m 10 mm Sensor voltage connection Sub D Special Sub D Special Sub D Special The resolution of Pl piezo nanopositioning systems is not limited by friction or stiction Value given is noise equivalent motion with the E 503 piezo amplifier module Versions with LEMO connector available as P 753 x1C Vacuum compatible versions to 10 hPa available as P 753 xUD Non magnetic versions available as P 753 xND
28. properly connected dangerous touch voltages can occur on the P 753 in the case of malfunction or failure of the system If touch voltages exist touching the P 753 can result in minor injuries from electric shock gt Connect the P 753 to a protective earth conductor p 19 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 753 to the protective earth conductor before Starting it up again NOTICE Destruction of the piezo actuator by electric flashovers The use of the P 753 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 753 in environments that can increase the electric conductivity gt Only operate the P 753 within the permissible ambient conditions and classifications p 39 P 753 Positioning Systems PZ254E Version 1 0 0 27 6 Start Up and Operation R I NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a
29. s according to the instructions in this manual gt Do not open the P 753 2 3 Organizational Measures User manual gt Always keep this user manual available by the P 753 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the P 753 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the P 753 after having read and understood this user manual Personnel qualification The P 753 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel P 753 Positioning Systems PZ254E Version 1 0 0 7 PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model Overview ccccecceccececcecceceeceeceeceenecueceeaeceecuesesaecuecueaeeaecueseeaeseesueseeaesueaeeaeeaeeneaess 9 PIOQUEL VIEW essen ern at ea ren Transen ea li renaco cunas 10 Prode Label reese NENNEN ERESSNRER EEE EE 10 SCODE OF CINCO AA ee ee ee ee ee 12 Suitable Electronics coslada 12 Technical Features canta iii es 13 3 1 Model Over
30. s given in the product view p 10 Figure 6 P 753 M2 5 holes in the moving platform for affixing loads Center of load at the optimum position Figure 7 Example of an optimally placed load 1 center of load P 753 Positioning Systems PZ254E Version 1 0 0 25 5 Installation i I Center of load at an unsuitable position Figure 9 Long lever and center of load 1 on the side of the moving platform Prerequisite v You have read and understood the general notes on installation p 17 Tools and accessories M2 5 screws of suitable length p 40 Suitable tools Affixing the Load gt Only affix loads to the threaded holes p 40 intended for this purpose and with suitable screws While doing so observe the torque range p 43 specified for the screws and avoid torques gt 0 3 Nm on the moving platform gt Affix the load so that it is centered and that the center of load is on the moving platform 26 Version 1 0 0 PZ254E P 753 Positioning Systems 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation ccccccconccnncccconncnnnoconononnnononnnnnnnononnnnnnnnnnos 27 Oe GN P 703 arrene a a ATNA 29 LIS Sar QUANG Ne P S AO En Ee Eee n 29 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not
31. sensor Target Target sensor signal non moving Cable shield part of the capacitive sensor Piezo voltage Ground of piezo voltage on cable shield 44 Version 1 0 0 PZ254E P 753 Positioning Systems 11 Old Equipment Disposal PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG ensures environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address Physik Instrumente PI GmbH Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany P 753 Positioning Systems PZ254E Version 1 0 0 45 12 EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity For the P 753 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety Low
32. view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 20 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Mounting the P 753 NOTICE Warping of the P 753 due to mounting on uneven surfaces Mounting the P 753 on an uneven surface can warp the P 753 Warping reduces the accuracy gt Mount the P 753 on an even surface The recommended evenness of the surface is 10 um gt For applications with great temperature changes Only mount the P 753 on surfaces that have the same or similar thermal expansion properties as the P 753 NOTICE Tensile stress on piezo actuator with vertical mounting If the stage is mounted vertically and the direction of motion of the X axis is downward this will result in a tensile stress which reduces the internal preload of the piezo actuator Operation with reduced preload can destroy the piezo actuator gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 37 NOTICE Protruding screw heads Protruding screw heads can damage the P 753 gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion P 753 Positioning Systems PZ254E Version 1 0 0 21
33. view The following standard versions of the P 753 are available O o Ze P 753 11C LISA high dynamics piezo nanopositioning system 12 um direct metrology capacitive sensor LEMO connector s P 753 1CD LISA high dynamics piezo nanopositioning system 12 um direct metrology capacitive sensor Sub D connector s P 753 21C LISA high dynamics piezo nanopositioning system 25 um direct metrology capacitive sensor LEMO connector s P 753 31C LISA high dynamics piezo nanopositioning system 38 um direct metrology capacitive sensor LEMO connector s P 753 2CD LISA high dynamics piezo nanopositioning system 25 um direct metrology capacitive sensor Sub D connector s P 753 3CD LISA high dynamics piezo nanopositioning system 38 um direct metrology capacitive sensor Sub D connector s P 753 Positioning Systems PZ254E Version 1 0 0 9 3 Product Description E l 3 2 Product View The figure serves as an example and can differ from your stage model 1 Figure 1 Example of product view 1 Moving platform 2 Protective earth connection 3 Cable exit 4 Base body X Positive direction of motion of the stage 3 3 Product Labeling Figure 2 P 753 Position of the product labeling example of a view from above 10 Version 1 0 0 PZ254E P 753 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 3 Product Description Position Labeling Description P 753 1CD Product name example the places after th
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