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User Manual PZ249E - Physik Instrumente

1. 3 6 Technical Features 3 6 1 PICA Piezo Actuators P 21x are preloaded high load piezo actuators for static and dynamic applications They provide a sub millisecond response and sub nanometer resolution The piezo actuators have a friction free preloaded PICA Power piezo ceramic that is integrated in a stainless steel case The high load capacity and internal preload makes them ideal for applications such as precision manufacturing and active vibration damping 3 6 2 Strain Gauge Sensors SGS Strain gauge sensors derive the position information from their expansion A strain gauge sensor consists of an electrically conductive film the resistance of which changes with the strain Strain gauge sensors are attached to the actuator and measure its displacement The sensors are equipped with a full bridge circuit that is insensitive to thermal drift and assure optimum position stability in the nanometer range 18 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking NOTICE Destruction of the piezo actuator by discharging too quickly If the P 21x is not connected to the electronics the lines on the voltage connection must be short circuited with a discharge resistor of 10 kQ in order to prevent the piezo actuator from charging during temperature changes and compressive stresses Unsuitable short circuiting leads to an abrupt contraction of the piezo actuator due to exces
2. rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der ROomerstr 1 D 76228 Karlsruhe Germany yy P 21x Piezo Actuator PZ249E Version 1 0 1 59 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the P 21x an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 Safety Low Voltage Directive EN 61010 1 2010 lt laa P 21x Piezo Actuator PZ249E Version 1 0 1 61
3. 1 7 PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model Overvie W ccccecceccececcecceceeceeceeceeaecuecueaecuecuesesaecueceeaesaeceeseeaesuecueseeaesueaeeaeeneeneaees 9 FOC Ba VIW AA WAA MEEDA WANAE MANEEUBWZA WAO Ee eE R eta teeta 12 COS Ol UENO ee AUAWA MAN MA MAHIBU MULI MA UHANAE 14 Suitable Electronics w wawawawawawawawawzwawawiwzwzunununununakuwawakawa wakiw wiwiwi wwa waa 15 AS WW 16 Technical Features w w wawamanwawawawamunwnwawawamununwawawanuzuzunwa wananunua kanuni wawa 18 3 1 Model Overview INFORMATION Optional accessories are available for the P 21x piezo actuators that have to be integrated during the manufacturing of the P 21x p 16 If a P 21x piezo actuator is ordered with these options it receives a customer specific product number beginning with P 21xK This manual also applies to all piezo actuators that have a customer specific product number due to integrated options Piezo actuators without a sensor Model peen ooo P 21x Piezo Actuator PZ249E Version 1 0 1 9 3 Product Description P J Piezo actuators without a sensor suitable for high temperature range and high vacuum teas is AAAA P 212 10V Preloaded piezo actuator 15 um 1000 V 2000 N high temperature vacuum P 212 20V Preloaded piezo actuator 30 um 1000 V 2000 N high temperature vacuum P 212 40V Pre
4. 1000 V 4500 N SGS high temperature vacuum P 216 8SV__ Preloaded piezo actuator 120 um 1000 V 4500 N SGS high temperature vacuum P 216 9SV_ Preloaded piezo actuator 180 um 1000 V 4500 N SGS high temperature vacuum P 21x Piezo Actuator PZ249E Version 1 0 1 11 3 Product Description 3 2 Product View 3 2 1 Overview The figure serves as an example and can differ from your model 2 1a Figure 1 Example of product view 1 Case consisting of 1a Base with wrench flat 1b Case tube Not shown here Optional inlets and outlets for protective air optional water protection 2 Moving pusher with wrench flat and M5 P 212 or M6 P 216 internal thread 3 Cable exit for piezo voltage Not shown here Cable exits for sensors 4 Protective earth connection 12 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 2 2 Product Labeling 1 2 38 EEE ee ES ce 98 7 65 Figure 2 P 21x Type plate example view Data matrix code contains the serial number Product name Serial number Manufacturer s logo CE conformity mark Country of origin Manufacturer s address website Disposal of used devices OC MN DAA WO DH Warning sign Observe manual Figure 3 P 21x Symbol for the protective earth conductor example view P 21x Piezo Actuator PZ249E Version 1 0 1 13 3 Product Description P J Figure
5. 2 Connecting the P 21x to the Protective Earth Conductor INFORMATION gt Observe the applicable standards for mounting the protective earth conductor The P 21x has an M4 threaded hole for connecting the protective earth conductor This hole is located on the base of the piezo actuator and is marked in the dimensional drawing with the symbol for the protective earth conductor see Dimensions p 51 Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 21x see Unpacking p 19 v The P 21x is not connected to the electronics Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm and protective earth conductor resistance lt 0 1 Q at 25 A Supplied M4 protective earth screw set p 14 for connecting the protective earth conductor Suitable screwdriver P 21x Piezo Actuator PZ249E Version 1 0 1 25 5 Installation pP I Figure 9 Mounting of the protective earth conductor profile view 1 Base of the P 21x 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P 21x to the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of
6. Downloading Manuals INFORMATION lf a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 45 The current versions of the manuals are found on our website For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD P 21x Piezo Actuator PZ249E Version 1 0 1 3 1 About this Document P I Download freely accessible manuals 1 a 3 Open the website http www pi portal ws Click Downloads Click the corresponding category e g P Piezo Actuators Nanopositioning amp Scanning Systems Click the corresponding product code e g P 212 Click Documents The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals he 2 3 4 Carry out steps 1 to 5 of the download process for freely accessible manuals Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and password in the User login for software download section in the Release News In the User login area on the left margin in the website enter the user name and the password in the corresponding fields Click Login The available manuals ar
7. below the calibration temperature 21 C to 24 C Piezo actuator is depolarized gt Contact our customer service department due to overheating p 45 P 21x Piezo Actuator PZ249E Version 1 0 1 43 8 Troubleshooting 44 PI Reduced P 21x or controller has been gt Perform a recalibration of the axis accuracy replaced Axes were mixed up during connection The piezo Servo control parameters actuator starts incorrectly set because e g oscillating or the load was changed positions inaccurately Operation with frequency that is too high displacement see controller manual or contact our customer service department p 45 With calibrated systems Observe the assignment of the axes when connecting several piezo actuators to a multi channel controller This assignment is indicated by labels on the devices Immediately switch off the servo mode of the corresponding axes Check the settings of the servo control parameters on the controller Adjust the servo control parameters on the controller according to the load change Operate the piezo actuator with maximally one third of the resonant frequency resonant frequency of the unloaded piezo actuator see Data Table p 47 resonant frequency of the loaded piezo actuator see Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator p 36 If the problem that occurred with your system is not listed in the table abo
8. max Drive properties Electrical capacitance 130 250 500 1000 1500 nF 20 Dynamic operating 13 13 13 13 13 UA Hz 20 current coefficient x um Miscellaneous Mass with cable 170 200 250 370 480 g 5 Piezo ceramic PICA Power Temperature range 40 to 80 C The operating voltage should not exceed 750 V in continuous operation Requires integrated strain gauge sensor These versions are shipped with a performance report The position resolution of piezo actuators is not limited by stiction or friction Dynamic small signal stiffness is approx 50 Yo higher 48 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 2 Maximum Ratings P 21x piezo actuators are designed for the following operating data Maximum operating frequency without load Maximum power consumption A B Maximum without considering considering thermal considering operating thermal aspects aspects thermal aspects voltage range A A A One third of the resonant frequency of the unloaded piezo actuator For further restrictions see Overview of Limiting Factors p 34 In order to prevent the maximum permissible operating temperature from being exceeded the unloaded uncooled piezo actuator may only be operated maximally with this operating frequency at an operating voltage of 1000 V peak to peak In the case of smaller amplitudes of the operating voltage and or the use
9. servo control parameters to be adjusted The piezo actuator is operated near its resonant frequency If you notice oscillations gt In closed loop operation immediately switch off the servo mode gt In open loop operation immediately stop the piezo actuator INFORMATION The outwards motion of the pusher corresponds to the positive direction of motion and is proportional to the applied operating voltage 6 2 Determining the Operating Parameters 6 2 1 Overview of Limiting Factors Limiting factors for the operation of the piezo actuator Resonant frequency The resonant frequency must not exceed one third of the resonant frequency of the loaded piezo actuator See Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator p 36 Maximum tensile compressive stress capacity p 47 The mass of the load to be moved and the operating frequency of the piezo actuator must be selected so that the dynamic forces that occur during operation do not exceed the maximum tensile compressive stress capacity of the piezo actuator See Calculating the Forces that Occur During Dynamic Operation p 37 34 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation Maximum permissible operating temperature of the piezo actuator p 50 The greater the operating frequency the operating voltage peak to peak and the capacitance of the piezo actuator the gre
10. too quickly If the cooling is too fast the resulting thermomechanical load can destroy the piezo actuator gt Only connect the protective air to the piezo actuator when the piezo actuator has cooled down to room temperature INFORMATION The piezo actuator can be cooled with protective air when the P 21x has been ordered with the option PT1000 temperature sensor and protective air connection for PICA high voltage piezo actuators P 177 50 p 16 Protective air connection with P 177 50 option P 212 P 216 2 1 Inlet for protective air M3 PK 2 plug nipple 2 Outlet for protective air M3 PK 2 plug nipple P 21x Piezo Actuator PZ249E Version 1 0 1 29 5 Installation P J Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 21x see Unpacking p 19 or the P 21x is connected to the switched off electronics from PI Tools and accessories Hoses for feeding and discharging the protective air suitable for M3 PK 2 plug nipple Suitable protective air Compressed air according to ISO 8573 1 quality class 4 that is passed through a dryer and a microfilter with 99 9999 efficiency The maximum air pressure in the piezo actuator must not be more than 0 5 bar 7 3 psi Connecting the protective air 1 Make sure that the piezo actuator has cooled down to room temperature 2 Connect the protec
11. 4 P 21x Warning sign DANGER on voltage connection with attached shorting plug Warning sign DANGER Notice of risk of electric shock p 6 3 3 Scope of Delivery Piezo actuator according to order p 9 000036450 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2 flat washers P 202 01 Shorting plug for high voltage piezo actuators with internal discharge resistor of 10 kQ PZ246EK Short instructions for high voltage piezo actuators 14 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 4 Suitable Electronics To operate a P 21x you need electronics The device is selected depending on the type of application The table below lists the suitable products E 421 00 High power piezo amplifier module without case 550 W 1100 V integrated P S E 470 20 High power piezo amplifier 550 W 1100 V bench top E 471 20 High power piezo amplifier controller amp interface display upgrade possible 550 W 1100 V bench top 19 E 472 20 High power piezo amplifier 2 channels 550 W 1100 V bench top 19 E 462 00 HVPZT piezo amplifier 10 to 1000 V bench top E 462 0E1 HVPZT piezo driver amplifier module 10 to 1000 V OEM version E 464 00 HVPZT piezo amplifier 3 channels 1100 V bench top E 481 00 High power piezo amplifier controller energy recovery 1100 V 2000 W 19 E 4
12. 82 00 PICA high power piezo driver controller with energy recovery 1050 V 6 A 19 E 500 Modular piezo controller configuration example High voltage piezo amplifier for PICA HVPZT 3 channels with PC interface and display consisting of 1 x E 500 00 19 chassis for modular piezo controller system 1 to 3 channels 3 x E 508 00 HVPZT piezo amplifier module 3 to 1100 V 1 channel 1 x E 517 i3 Interface display module 24 bit D A TCP IP USB RS 232 IEEE488 3 channels Optionally as high voltage amplifier servo controller additionally with 1 x E 509 S3 Sensor piezo servo control module SGS sensors 3 channels gt Toorder contact our customer service department p 45 gt Before selecting electronics calculate the power requirements of the application p 37 P 21x Piezo Actuator PZ249E Version 1 0 1 15 3 Product Description P J 3 5 Accessories Options with a gray background have to be ordered together with the P 21x piezo actuator for manufacturing reasons Piezo actuators that are equipped with these options have a customer specific product number beginning with P 21xkK Order Description Number P 177 50 PT1000 temperature sensor and protective air connection for PICA high voltage piezo actuators with E 481 and E 482 controllers P 706 00 Water resistant case for P 212 P 216 P 176 B12 Ball tip contact surface hardened and polished for P 212 P 176 B16 Ball tip contact surface hardened and
13. Feedthroughs for Sensors The dimensions of the following vacuum feedthroughs are identical LEMO SWH 0S 304 CLLSV part of the P 892 VA option for SGS LEMO SWH 0S 303 CLLSV part of the P 899 VA option for temperature sensor fi amome aA pon S3 E max S1 Figure 18 LEMO SWH 0S 30x CLLSV Ee ee ee ee e E 56 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Pin Assignment 10 3 1 Voltage Connection LEMO FGG 0B 701 CJA 1173 Connector front view Z N WAKO DA W Input Piezo voltage 1000 V female M GND Ground male The connector shell is connected with the cable shield 10 3 2 Connection of the Position Sensor LEMO FFA 0S 304 CLA ee ol rene Mee 1 neu Supp votage tor strain gauge sensor e oma ssr o The connector shell is connected with the cable shield 10 3 3 Connection of the Temperature Sensor LEMO FFA 0S 303 CLA Connector ne isl o foun rem S owe frees oo The connector shell is connected with the cable shield P 21x Piezo Actuator PZ249E Version 1 0 1 57 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local
14. L tAn Moy f Fayn Dynamic force N F dyn Met Effective mass Mer approx 1 3 of the mass of the piezo actuator additional mass M kg see also Calculating the Effective Mass p 35 AL Displacement in the application peak to peak m f Frequency Hz Example The dynamic forces at 1000 Hz 2 um displacement peak to peak and 1 kg effective mass are approximately 40 N 6 2 5 Calculating the Power Requirement for Sinusoidal Operation gt Calculate the average current requirement for sinusoidal operation with the following formula la f C Upp gt Calculate the peak current requirement for sinusoidal operation with the following formula Imax f m C Up Cales AA Required average current of the It is essential for the power amplifier source sink A supply to supply enough current hii peak current of the amplifier source sink A Operating frequency Hz Details on the operating frequency see Overview of Limiting Factors p 34 P 21x Piezo Actuator PZ249E Version 1 0 1 37 6 Start Up and Operation P L eE A Capacitance of the piezo actuator See Data Table p 47 for the F As V small signal capacitance of the piezo actuator For large signal conditions a safety factor of 70 should be added to the small signal Capacitance 6 3 Operating the P 21x Prerequisite v You have read and understood the General Notes on Start Up and
15. Operation p 31 You have determined the operating parameters for your application p 34 You have correctly installed the P 21x p 21 You have provided suitable electronics that can supply the required currents p 37 v You have read and understood the user manual of the used electronics Operating the P 21x gt Follow the instructions in the manual of the used electronics for connecting starting up and operating the P 21x p 15 38 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 4 Discharging the P 21x The P 21x must be discharged in the following cases When the P 21x is not used but the electronics remain switched on to ensure temperature stability Before demounting e g before cleaning and transporting the P 21x and for modifications Prerequisite v You have read and understood the General Notes on Installation p 21 Tools and accessories If the P 21x is not connected to the electronics Supplied shorting plug p 14 Alternative Electronics from PI Discharging a P 21x connected to the electronics In closed loop operation 1 Switch off the servo mode on the electronics 2 Set the piezo voltage to 0 V on the electronics In open loop operation gt Set the piezo voltage to 0 V on the electronics Discharging a P 21x that is not connected to the electronics gt Connect the voltage connection of the piezo actuator wi
16. PZ249E P 21x Piezo Actuator User Manual Version 1 0 1 Date 02 03 2015 PI This document describes the following products P 212 Preloaded Piezo Actuator P 212 10 20 40 80 without sensor P 212 10V 20V 40V 80V without sensor high temperature range and high vacuum P 212 1S 2S 4S 8S with sensor P 212 1SV 2SV 4SV 8SV with sensor high temperature range and high vacuum P 216 Preloaded Piezo Actuator P 216 10 20 40 80 90 without sensor P 216 10V 20V 40V 80V 90V with sensor high temperature range and high vacuum P 216 1S 2S 4S 8S 9S with sensor P 216 1SV 2SV 4SV 8SV 9SV with sensor high temperature range and high vacuum Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING WWW PI WS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2015 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instruc
17. TION In the following calculation the maximum permissible operating temperature of the piezo actuator is not taken into account During operation without cooling the maximum operating temperature may already be exceeded when the operating frequency is still below the limit value calculated in the following gt For the maximum permissible operating frequency without cooling see column B of the table in Maximum Ratings p 49 1 Calculate the resonant freguency of the loaded piezo actuator with the following formula Mott To lo m eff fo Resonant frequency of the loaded piezo actuator Hz fo Resonant frequency of the unloaded piezo actuator Hz see Data Table p 47 Met Effective mass approx 1 3 of the mass of the piezo actuator kg Met Effective mass Mer additional mass M kg See also Calculating the Effective Mass p 35 Calculate the maximum operating frequency of the loaded piezo actuator with the following formula fmax fo 3 fmax Maximum operating frequency of the loaded piezo actuator Hz fo Resonant frequency of the loaded piezo actuator Hz 36 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 2 4 Calculating the Forces that Occur During Dynamic Operation gt Calculate the dynamic forces that act on the piezo actuator during sinusoidal operation with the frequency f with the following formula A
18. ater the thermal power generated in the piezo actuator The operating frequency operating voltage and operating time must be selected so that the maximum permissible operating temperature of the piezo actuator is not exceeded For the maximum permissible operating frequency without cooling see column B of the table in Maximum Ratings p 49 When cooling measures p 29 are used the limit values for the operating frequency operating voltage and operating time increase The use of a temperature sensor p 16 can prevent the piezo actuator from overheating Peak and average output current of the used electronics p 15 The used electronics must be selected so that it can supply the required currents See Calculating the Power Requirement for Sinusoidal Operation p 37 6 2 2 Calculating the Effective Mass Meff T 3 Meff T 3 M Figure 10 Effective mass of an unloaded piezo actuator left and a piezo actuator loaded with an additional mass M right Each piezo actuator is permanently mounted at one end P 21x Piezo Actuator PZ249E Version 1 0 1 35 6 Start Up and Operation P J Find the mass m of your piezo actuator in the data table p 47 Determine the additional mass M Calculate the effective mass Mey of the unloaded piezo actuator and Mex of the loaded piezo actuator with the formulas in the above figure 6 2 3 Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator INFORMA
19. ation of Conformity PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ccceceecceeeeeeeeeeseeeeeeeeeeeaaeseeeeeeees 1 Symbols and Typographic COnVventions ccccccccccccececsseeseecceeeeeeeaeeeeeeeeeeeesssaageeeeeees 1 Other Applicable DOCUMENTS ccccccccceceeeeeseeeeeeeeeeaeeeeseeeeeeeeeaaeaeseeeeeeessaeaeeeeeeeeessaas 3 Downloading Manuals KWa 3 1 1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P 21x x stands for the different models p 9 Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual DANGER A Imminently hazardous situation If not avoided the hazardous situation will result in death or serious injury gt Actions to take to avoid the situation AN Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation P 21x Piezo Actuator PZ249E Version 1 0 1 1 About this Document PI NOTICE Dangerous situation If not avoided the dangerous situation will r
20. cccssescceceeeeeeeeeeeeeeceeeeeseeeeeeeseeeeeesaueeessaeeeesseeseesneaes Maintenance 7 1 General Notes on Maintenance cccceeceecceeccecceeeeeeceeneecueeeeeceeaeeeesneeseeeneeens 7 2 CANIN iNe P AAA AAA AAA AA AAA AAA Troubleshooting Customer Service Technical Data IO AI 10 1 1 Daa VOC A A 10 1 2 MaximuM RAUNG Seese WA 10 1 3 Ambient Conditions and Classifications WA MDOT SIONS IAE tenn acssactseecsetiornnese E A sone 10 2 1 P 21x Piezo ACtuatoT wwwwwmwamamamwamawwnwa wawaua wamuuwa www 10 2 2 P 21x with P 177 50 Option Temperature Sensor and Protective Air Connection scscteesiacestsncdahwsetacsncs etoenczecaveanraccoiereeeasieees 10 2 3 P 21x with the P 706 00 Option Water Resistant Case 10 2 4 P 176 B12 and P 176 B16 Ball TIPS ww smemmnamwmnnawa 10 2 5 P 176 F12 and P 176 F16 Flat Mini 10 2 6 P 176 10 Magnetic Adapter WA 10 2 7 Vacuum Feedthrough for High Voltage Piezo Actuators 10 2 8 Vacuum Feedthroughs for SEensorS wwwmmawwnaawananawwnaawwnza TORS INASHIKA 10 3 1 Voltage Connection cccccccccsssseeececeeeeceseeeeeeeeeesseaaaeeeeeeeeeessaeaeases 10 3 2 Connection of the Position Sensor wwwwawamamwamawanwawawamwawawuwa 10 3 3 Connection of the Temperature Sensor cccceecccseeeeeeeeeeeeeeeeeaes Old Equipment Disposal EC Declar
21. e 47 90 180 Dynamic operating current 5 5 5 coefficient Miscellaneous Mass with cable 110 120 150 Piezo ceramic PICA Power Temperature range 40 to 80 C The operating voltage should not exceed 750 V in continuous operation P 212 80 O to 1000 18 4 5 2000 300 10 0 5 370 a 210 Unit um nm nm N um kHz Nm nF uA Hz x um Tolerance typ typ 20 20 max max max 20 20 5 Yo Requires integrated strain gauge sensor These versions are shipped with a performance report The position resolution of piezo actuators is not limited by stiction or friction Dynamic small signal stiffness is approx 50 Yo higher P 21x Piezo Actuator PZ249E Version 1 0 1 47 10 Technical Data P I P 216 10 P 216 20 P 216 40 P 216 80 P 216 90 Unit Tolerance Operating voltage Oto 1000 Oto 1000 Oto 1000 Oto1000 0to 1000 V Motion and positioning Closed loop travel 15 30 60 120 180 um Closed loop 0 3 0 6 1 2 2 4 3 6 nm typ resolution Open loop resolution 0 15 0 3 0 6 1 2 1 8 nm typ Linearity error 0 2 0 2 0 2 0 2 0 2 Yo typ Mechanical properties Static large signal 210 140 80 50 32 N um 20 stiffness in motion direction Unloaded resonant 17 12 7 4 5 3 kHz 20 frequency Push pull force capacity 4500 4500 4500 4500 4500 N max in motion direction 500 500 500 500 500 Shear load 60 36 23 23 23 N max Torque on tip 1 1 1 1 1 Nm
22. e displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter Mendod USG AI aa 5 General Safety Instructions cccccccececeeccceeeeeseeeeeeeeeeeeseeeeseceeeeeeseseaeeeeeeeeeesssaaaeeeeeeess 6 Organizational MEASUIES ccccccceeeeeccceeeeeeeeeseeeceeeseceueesseeeeeeeseseeseeeceeeeessseeeeeeeeeeeeseaas 7 2 1 Intended Use The P 21x is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design the P 21x is intended for the following applications Positioning of high loads see Specifications p 47 Dynamic positioning Vibration damping Force generation The motion takes place in one axis The specifications of the P 21x apply to mounting with a vertically oriented motion axis Mounting with a horizontally oriented motion axis is not recommended The intended use of the P 21x is only possible in a completely mounted and connected state and only in combination with suitable drive or control electronics p 15 available from PI The electronics is not included in the scope of delivery of the P 21x The electronics must provide the required operating voltages To ensure proper performance of the position c
23. ection of the P 21x see Unpacking p 19 or the P 21x is connected to the switched off electronics from PI Tools and accessories Optionally available tip p 16 Open end wrench for holding the pusher P 212 AF 7 P 216 AF 8 P 21x Piezo Actuator PZ249E Version 1 0 1 27 5 Installation P J Fastening a tip 1 Use a suitable open end wrench to hold the pusher by the wrench flats 2 Manually screw the tip into the mounting hole in the pusher of the P 21x 3 Remove the open end wrench from the pusher 5 5 Affixing the Load Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 21x see Unpacking p 19 or the P 21x is connected to the switched off electronics from PI Tools and accessories Screw of suitable length p 51 P 212 M5 P 216 M6 Suitable screwdriver Open end wrench for holding the pusher P 212 AF 7 P 216 AF 8 Affixing the load 1 Use a suitable open end wrench to hold the pusher by the wrench flats 2 Fasten the load to the mounting hole in the pusher with a suitable screw see Dimensions p 51 3 Remove the open end wrench from the pusher 28 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 6 Optional Connecting the Protective Air NOTICE Destruction of the piezo actuator by cooling
24. eessaeeesseeeeseeeeees 18 3 6 2 Strain Gauge Sensors SGS wwwwwmnsmamawwmwnnananawumwnznzimanimenanaa 18 4 Unpacking 19 5 Installation AAA 5 1 General Notes on Installation cccccccssssseececeeeeeeeeceeeeeeeeeseeeeeeeesseaeeeesessaaees 21 5 2 Connecting the P 21x to the Protective Earth Conductor ww wwwmmemmeaa 25 5 3 MOUNUNO NGM kX wi Aaa 26 5 4 Optional Fastening a Tip wwwwwwmamemamwwmwnnamunumumunanunanumumunanunawuuna 27 5 5 AINO INE AA 28 5 6 Optional Connecting the Protective Air cccccccccsssseeeeeeeeeeeeeeeeeeeeeeeesenaaeeees 29 6 Start Up and Operation 31 6 1 General Notes on Start Up and Operation ccccccsseeeeeeeeeeeeeeeeeseeeeeeeeeeeaeees 31 10 11 12 6 2 Determining the Operating ParaMmeters cccccccssecceceeeeceeceeceeseeeeeesseeeeesseees 6 2 1 Overview Of Limiting Factors wwwwsmmmmwmnamamumunawamimenimu wina 6 2 2 Calculating the Effective MASS cccccsccsssesseeeeeeeeeeeeeeeeeeeeeeeeseaas 6 2 3 Calculating the Maximum Operating Frequency of the Loaded Piezo PACU GIOF Ia 6 2 4 Calculating the Forces that Occur During Dynamic Operation 6 2 5 Calculating the Power Requirement for Sinusoidal Operation 6 3 Operating the P 21X eecccccccccccesseeeeeeeeeeseeeeeeeeeeeeeesseeeeeeeeeeeesseeaaeeseeeeeessaaaaeees 6 4 Discharging the P 21X ccccc
25. equest exit precise position upon request gt Contact our customer service department p 45 for details on the position of the plug nipples 52 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 3 P 21x with the P 706 00 Option Water Resistant Case The dimensions of the P 21x with water resistant case are supplied upon request gt Contact our customer service department p 45 10 2 4 P 176 B12 and P 176 B16 Ball Tips Figure 13 P 176 B16 1 contact surface hardened and polished P 21x Piezo Actuator PZ249E Version 1 0 1 53 10 Technical Data P I 10 2 5 P 176 F12 and P 176 F16 Flat Tips Figure 15 P 176 F16 1 contact surface hardened and polished 54 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 6 P 176 10 Magnetic Adapter OB ISS gt Figure 16 P 176 10 1 magnet 9 6x2 10 2 7 Vacuum Feedthrough for High Voltage Piezo Actuators LEMO SJG 0B 701 CJA 1173 part of the P 203 VA option for high voltage piezo actuators _SW105_ enw Figure 17 Vacuum feedthrough LEMO SJG 0B 701 CJA 1173 P 21x Piezo Actuator PZ249E Version 1 0 1 55 10 Technical Data P I J LEMO device socket J coded EGJ 0B 701 CJA flange side atmosphere High voltage contact female flange side atmosphere Male contact GND flange side atmosphere 10 2 8 Vacuum
26. esult in damage to the equipment gt Actions to take to avoid the situation INFORMATION Information for easier handling tricks tips etc Symbol Label 1 Zi gt p 5 RS 232 A 2 Version 1 0 1 Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website Am AA E 470 20 high power piezo amplifier E 471 20 high power piezo amplifier E 472 20 high power piezo amplifier 2 channels E 462 00 HVPZT piezo amplifier E 464 00 HVPZT piezo amplifier 3 channels PZ176E User Manual E 481 00 high power piezo amplifier controller PZ1 70E User Manual E 482 00 PICA high power piezo amplifier PZ236E User Manual controller E 500 modular piezo controller PZ62E User Manual E 462 0E1 HVPZT piezo driver amplifier module PZ210E User Manual 10 to 1000 V OEM version 1 4
27. ezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ccccccccsssscceeceeeeeceeeeeeeeecesecaeeseceeseeeaeeeeesaaaeceseeseaees 21 Connecting the P 21x to the Protective Earth Conductor cccccseeeceeeeseeeeeeeeeeaeees 25 Mounino the 22 1X Ia 26 Optional FANANI aa 27 AINGI NE AA aa 28 Optional Connecting the Protective Air www wwwwwmanamwwwnanamwnnananwwnanwa zi manaaa 29 5 1 General Notes on Installation NOTICE aD Destruction of the piezo actuator by discharging too quickly If the P 21x is not connected to the electronics the lines on the voltage connection must be short circuited with a discharge resistor of 10 kQ in order to prevent the piezo actuator from charging during temperature changes and compressive stresses Unsuitable short circuiting leads to an abrupt contraction of the piezo actuator due to excessively fast discharging Abrupt contraction can destroy the piezo actuator gt Only remove the supplied shorting plug from the voltage connection of the piezo actuator when this is necessary for installation or operation gt Keep the shorting plug near the piezo actuator after removing it gt Only use the supplied shorting plug to short circuit the lines at the voltage connection of the piezo actuator NOTICE Destruction of the piezo actuator by loads that are too high Loads
28. lity discharge the P 21x p 39 If possible Limit the maximum operating voltage to 750 V during continuous operation NOTICE Operating voltages that are too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the P 21x gt gt gt Only operate the P 21x with controllers drivers and original accessories from PI Do not exceed the operating voltage range p 49 for which the P 21x is specified Only operate the P 21x when the operating voltage is properly connected see Pin Assignment p 57 NOTICE gt gt gt Destruction of the piezo actuator by overheating ah Overheating can destroy the piezo actuator Cool the piezo actuator with e g protective air p 29 Monitor the temperature of the piezo actuator with a temperature sensor p 16 Adjust the operating voltage operating frequency and or operating time so that the maximum operating temperature of the piezo actuator is not exceeded see Ambient Conditions and Classifications p 50 Maximum Ratings p 49 and Determining the Operating Parameters p 34 P 21x Piezo Actuator PZ249E Version 1 0 1 33 6 Start Up and Operation P J NOTICE Uncontrolled oscillation Oscillations can cause irreparable damage to the piezo actuator Oscillations are indicated by a humming and can result from the following causes Achange in the load and or dynamics requires the
29. loaded piezo actuator 60 um 1000 V 2000 N high temperature vacuum P 212 80V Preloaded piezo actuator 120 um 1000 V 2000 N high temperature vacuum P 216 10V Preloaded piezo actuator 15 um 1000 V 4500 N high temperature vacuum P 216 20V Preloaded piezo actuator 30 um 1000 V 4500 N high temperature vacuum P 216 40V Preloaded piezo actuator 60 um 1000 V 4500 N high temperature vacuum P 216 80V Preloaded piezo actuator 120 um 1000 V 4500 N high temperature vacuum P 216 90V Preloaded piezo actuator 180 um 1000 V 4500 N high temperature vacuum Piezo actuators with sensor weest ee A 10 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description Piezo actuators with sensor suitable for high temperature range and high vacuum oe eae eee P 212 1SV_ Preloaded piezo actuator 15 um 1000 V 2000 N SGS high temperature vacuum P 212 2SV_ Preloaded piezo actuator 30 um 1000 V 2000 N SGS high temperature vacuum P 212 4SV__ Preloaded piezo actuator 60 um 1000 V 2000 N SGS high temperature vacuum P 212 8SV__ Preloaded piezo actuator 120 um 1000 V 2000 N SGS high temperature vacuum P 216 1SV_ Preloaded piezo actuator 15 um 1000 V 4500 N SGS high temperature vacuum P 216 2SV_ Preloaded piezo actuator 30 um 1000 V 4500 N SGS high temperature vacuum P 216 4SV_ Preloaded piezo actuator 60 um
30. ly e g in the case of modifications reconnect the P 21x to the protective earth conductor before starting it up again Mechanical forces can damage or misalign the P 21x gt Avoid impacts that affect the P 21x gt Do not drop the P 21x gt Avoid torques bending forces and lateral forces on the moving pusher of the P 21x gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 47 6 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 3 Organizational Measures User manual gt Always keep this user manual available by the P 21x The latest versions of the user manuals are available for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the P 21x on to other users also turn over this user manual as well as all other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual If your user manual is incomplete and is therefore missing important information serious or fatal injury as well as property damage can result Only install and operate the P 21x after having read and understood this user manual Personnel qualification Only authorized and qualified personnel must install operate maintain and clean the P 21x P 21x Piezo Actuator PZ249E Version 1 0
31. of cooling measures higher operating frequencies are possible For further restrictions see Overview of Limiting Factors p 34 Power consumption of the unloaded uncooled piezo actuator that is operated at an operating voltage of 1000 V peak to peak with the operating frequency from column B of this table P 21x Piezo Actuator PZ249E Version 1 0 1 49 10 Technical Data PI 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P 21x Area of application For indoor use only Maximum altitude 2000 m 50 Air pressure Relative humidity Operating temperature Storage temperature Transport temperature Maximum bake out temperature for vacuum compatible products Overvoltage category Protection class Degree of pollution Degree of protection according to IEC 60529 Version 1 0 1 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C 20 C to 80 C With models for high temperature range and high vacuum P 21x xxV 40 C to 150 C 20 C to 80 C 20 C to 80 C Piezo actuators for high temperature range and high vacuum P 21x xxV 150 C LEMO vacuum feedthroughs see Optional Accessories p 16 100 C PZ249E P 21x Piezo Actuator WWW PI WS 10 Technical Da
32. ontrol the electronics must also be able to read out and process the signals from the position sensors P 21x Piezo Actuator PZ249E Version 1 0 1 5 2 Safety P J 2 2 General Safety Instructions The P 21x is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 21x gt Only use the P 21x for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the P 21x Temperature changes and compressive stresses can induce charges in the P 21x piezo actuator After being disconnected from the electronics the piezo actuator can stay charged for several hours Touching the live parts of the P 21x can result in serious injury or death from electric shock gt Do not open the P 21x lf a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 21x in the case of malfunction or failure of the system If touch voltages exist touching the P 21x can result in serious injury or death from electric shock gt Connect the P 21x to a protective earth conductor p 25 before start up gt Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed temporari
33. oth that is lightly dampened with a mild cleanser or disinfectant e g alcohol or isopropanol When the piezo actuator is used in a vacuum gt Only touch the piezo actuator with powder free gloves gt If necessary wipe the piezo actuator clean 42 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting No or limited The cable is not connected gt Check the cable connections motion correctly Excessive load gt Do not exceed the permissible compressive tensile stress capacity according to the specifications p 47 The E 481 or E 482 If the piezo actuator is equipped with the electronics from PI has option PT1000 temperature sensor and deactivated the voltage protective air connection for PICA high voltage output due to overheating of piezo actuators p 16 the E 481 and E 482 the piezo actuator electronics evaluate the signal of the temperature sensor Switch off the electronics Wait a few minutes until the piezo actuator has sufficiently cooled down Switch the electronics on again Preventive measures Reduce the operating voltage operating frequency and or operating time Cool the piezo actuator Zero shift of the position Perform a zero point adjustment of the sensor for the following sensor see manual of the electronics reasons used Load in direction of motion Ambient operating temperature of the piezo actuator is far above or
34. polished for P 216 P 176 F12 Flat tip contact surface hardened and polished for P 212 P 176 F16 Flat tip contact surface hardened and polished for P 216 P 176 10 Magnetic adapter for P 212 P 203 VA Vacuum feedthrough for high voltage piezo actuators to 10 hPa 100 C consisting of Vacuum feedthrough LEMO SJG 0B 701 CJA 1173 Ajr side cable with 2 LEMO connectors 2 m P 892 VA Vacuum feedthrough strain gauge sensor to 10 hPa 100 C consisting of Vacuum feedthrough LEMO SWH 0S 304 CLLSV Air side cable with 2 LEMO connectors 2 m P 899 VA Vacuum feedthrough temperature sensor to 10 hPa 100 C consisting of m Vacuum feedthrough LEMO SWH 0S 303 CLLSV Air side cable with 2 LEMO connectors 2 m 16 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description Number Connector m F G 0B 701 CJA 1173 connector f PHG OB 701 CJL 1173 Number i P 892 05 Extension cable for strain gauge sensors LEMO connector s 5 m P 892 10 Extension cable for strain gauge sensors LEMO connector s 10 m P 892 15 Extension cable for strain gauge sensors LEMO connector s 15 m Connector m FFA 0S 304 CLAC32 connector f PCA 0S 304 CLLC32 Number Connector m FFA 0S 303 CLAC32 connector f PCA 0S 303 CLLC32 gt To order contact our customer service department p 45 P 21x Piezo Actuator PZ249E Version 1 0 1 17 3 Product Description P J
35. sively fast discharging Abrupt contraction can destroy the piezo actuator gt Only remove the supplied shorting plug from the voltage connection of the piezo actuator when this is necessary for installation or operation gt Keep the shorting plug near the piezo actuator after removing it gt Only use the supplied shorting plug to short circuit the lines at the voltage connection of the piezo actuator Figure 5 Voltage connection of the P 21x with attached shorting plug 1 Voltage connection of the P 21x 2 P 202 01 shorting plug in the scope of delivery P 21x Piezo Actuator PZ249E Version 1 0 1 19 4 Unpacking P I INFORMATION When handling the vacuum version of the piezo actuator appropriate cleanliness must be ensured At PI all parts are cleaned before assembly During assembly and calibration powder free gloves are worn Afterwards the piezo actuator is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the piezo actuator with powder free gloves gt If necessary wipe the piezo actuator clean after unpacking 1 Unpack the P 21x with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned 20 Version 1 0 1 PZ249E P 21x Pi
36. t surface The surface of the P 21x can become hot during operation Touching the P 21x can cause slight injuries from burning gt Cool the P 21x e g with protective air p 29 so that the temperature of its surface does not exceed 65 C gt If sufficient cooling is not possible Make sure that the hot P 21x cannot be touched gt When sufficient cooling and protection against contact are not possible Mark the danger zone according to the legal regulations P 21x Piezo Actuator PZ249E Version 1 0 1 31 6 Start Up and Operation P J NOTICE Destruction of the piezo actuator by electric flashovers The use of the P 21x in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 21x in environments that can increase the electric conductivity gt Only operate the P 21x within the permissible ambient conditions and classifications p 50 gt For operation in vacuum below 0 1 hPa Do not operate the P 21x during evacuation NOTICE aD Destruction of the piezo actuator by dynamic forces During dynamic operation dynamic forces can occur that cancel the preload of the piezo actua
37. ta PIEZO NANO POSITIONING 10 2 Dimensions 10 2 1 P 21x Piezo Actuator Dimensions in mm Note that the decimal places are separated by a comma in the drawings DA Dos Si _ To To LO to O I ami ee ve wT Figure 11 P 21x 1 Sensor only with models with position sensor and or with P 177 50 option 2 Piezo PZ249E Version 1 0 1 51 P 21x Piezo Actuator 10 Technical Data pP I n e e e e o SOOD O a aa TA ee Ce ee ee ee AA 10 2 2 P 21x with P 177 50 Option Temperature Sensor and Protective Air Connection If the P 21x has been ordered with the option PT1000 temperature sensor and protective air connection for PICA HVPZT P 177 50 p 16 the actuator differs from the standard model in the following points The piezo actuator has the following diameter P 212 25 mm P 216 30 mm See B in the drawing in the Dimensions section p 51 Plug nipples M3 PK 2 for protective air connection are present Position of the In the base of the piezo In the base of the piezo protective air inlet actuator across from the cable actuator below the cable exit exit 9 5 mm above the lower 8 mm above the lower edge of edge of the base the base Position of the In the case tube of the piezo In the case tube of the piezo protective air outlet actuator above the cable exit actuator across from the cable precise position upon r
38. th the shorting plug see Unpacking p 19 gt Alternative Connect the voltage connection of the piezo actuator to the switched off electronics from PI P 21x Piezo Actuator PZ249E Version 1 0 1 39 PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance ccccccccececcececcececcccecccceccccecuccececaececaucecacsesauaecauaecass 41 deanna INe PE AKAA 41 7 1 General Notes on Maintenance The P 21x is maintenance free 7 2 Cleaning the P 21x NOTICE Destruction of the piezo actuator by electric flashovers ah The intrusion of fluids into the case of the piezo actuator can lead to the destruction of the piezo actuator by electric flashovers Before cleaning the P 21x gt Discharge the P 21x p 39 gt Disconnect the voltage connection of the P 21x from the electronics gt Connect the voltage connection of the P 21x with the supplied shorting plug p 19 Prerequisites v You have discharged the piezo actuators of the P 21x p 39 v You have disconnected the P 21x from the electronics v The supplied shorting plug is attached to the voltage connection of the P 21x see Unpacking p 19 P 21x Piezo Actuator PZ249E Version 1 0 1 41 7 Maintenance P I Cleaning the P 21x gt Do not do any ultrasonic cleaning Only when the piezo actuator is not used in vacuum gt When necessary clean the surfaces of the P 21x with a cl
39. that are too high can destroy the P 21x gt Do not exceed the maximum tensile compressive stress capacity according to the specifications p 47 P 21x Piezo Actuator PZ249E Version 1 0 1 21 5 Installation P I NOTICE Destruction of the piezo actuator by mechanical overload Torques bending forces shearing forces and lateral forces can destroy the piezo actuator gt Avoid bending forces and lateral forces on the pusher of the P 21x gt Do not exceed the maximum torque and the maximum shearing load on the pusher according to the specifications p 47 gt Avoid torques on the base when the pusher is tightly clamped gt Make sure that the center of load of the moving system is on the motion axis of the piezo actuator gt Avoid an uneven load distribution by using suitable structures or guide elements e g ball tips or flexure guides gt Observe the information on parallelism in the Dimensions section p 47 gt Do not screw the piezo actuator tight on both ends Piezo actuators may only be loaded axially The following figures are to help you avoid mounting errors B C Figure 6 Not tightly screwed at both ends and no angles A Incorrect Angle error on the pusher B Correct Axial loading of the actuator C Incorrect Both ends of the actuator screwed in tight 22 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation Fle
40. the P 21x as shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 5 3 Mounting the P 21x Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 21x see Unpacking p 19 or the P 21x is connected to the switched off electronics from PI 26 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories M8 screw of suitable length see Dimensions p 51 Suitable tools for fastening the screw Open end wrench for holding the base P 212 AF 15 P 216 AF 22 Mounting the P 21x 1 Use a suitable open end wrench to hold the base of the P 21x by the wrench flats 2 Mount the P 21x on a suitable surface with an M8 screw For this purpose use the M8 mounting hole on the bottom side of the base see Dimensions p 51 3 Remove the open end wrench from the base 5 4 Optional Fastening a Tip INFORMATION The optionally available tips p 16 make it possible to realize different mechanical connections to a load Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage conn
41. tions First printing 02 03 2015 Document number PZ249E CBo version 1 0 1 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual cccccssseceeeeeeeseeeeeeeeeseeees 1 1 2 Symbols and Typographic CONVENTIONS cccccseescececeeeeeeeeeeeaeeeeeeeseeeeeeeeeaaaeeees 1 1 3 Other Applicable DOCUMENTS ccccccceccesseeseeeeeeeeeeeaeeseeeeeeeeessaeeeeeeeeeeeessaanseses 3 1 4 Downloading Manuals ccccceeccccceeeeeecaeeeeeeneeseeeceaeeeesseueeeseaaeeeesseeeessaneessaaeees 3 2 Safety 5 2 1 STS UA II 5 2 2 General Safety Instructions wwwmmmnamamamumunanamanuwumunaninanuwununanunanu una 6 2 3 Organizational MEASULES cccccssseeceecceeeeecececseeseceeeceeaeeceessaeaeeeeeeesaaeeeeeesaaaeeeess 7 3 Product Description 9 3 1 POG OV OIC II II 9 3 2 OCC VIEW AA AAA SEA WA a wa mawa Mapana io wasee MARU aetenneaeseeadenocieseceae 12 3 2 1 cece net eccentrics mawaa aaah akawaua eaaa 12 3 2 2 aana Ua EDE UAE AAA AE 13 3 3 SCOPE of Delivery 00 0 eecccccccseseeeeeceeeeeeeeeceeeeeeeeeseasseeeeeseaaeeeeesseaeeeesssaaaeeesessaaees 14 3 4 Suitable ElECtrONICS EE 15 3 5 AA IAA 16 3 6 TUU III 18 3 6 1 PICA Piezo Actuators cccccccceecccceeceeeeeeeeeeeeeseueeesee
42. tive air Attach the hose for feeding the protective air to the corresponding plug nipple on the P 21x see above figure Attach the hose for discharging the protective air to the corresponding plug nipple on the P 21x see above figure 30 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation cccccccsseeeccceceesseceeeeeeeeeeeeeeeeeeeeeesaaees 31 Determining the Operating ParaMeters ccccccccssseseeeeeseeeceeeeseeeeeeeesseeeeeeseseaeeeeeeeas 34 SG AI 38 Discharging Ne F222 WG csser eE eo EE ea e ain 39 6 1 General Notes on Start Up and Operation DANGER A Risk of electric shock if the protective earth conductor is not connected lf a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 21x in the case of malfunction or failure of the system If touch voltages exist touching the P 21x can result in serious injury or death from electric shock gt Connect the P 21x to a protective earth conductor p 25 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 21x to the protective earth conductor before Starting it up again A Burning from ho
43. tor Operation without a preload can destroy the actuator gt Do not exceed the maximum tensile compressive stress capacity according to the specifications p 47 gt Observe the notes in Determining the Operating Parameters p 34 NOTICE Destruction of the piezo actuator by operating frequencies that are too high An operating frequency that is too high can destroy the piezo actuator gt Select the operating frequency so that the following conditions are met The operating frequency is maximally one third of the resonant frequency resonant frequency of the unloaded piezo actuator see Data Table p 47 resonant frequency of the loaded piezo actuator see Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator p 36 The dynamic forces that occur during operation do not exceed the maximum tensile compressive stress capacity of the piezo actuator see Calculating Forces that Occur During Dynamic Operation p 37 32 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramics of the actuator gt gt When the P 21x is not used but the electronics remain switched on to ensure temperature stabi
44. ve or cannot be solved as described contact our customer service department p 45 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website P 21x Piezo Actuator PZ249E Version 1 0 1 45 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data In this Chapter 10 Technical Data OS CHIC e E E 47 DIMEN AA 51 FINAS SIC MIMIC Wi 57 10 1 Specifications 10 1 1 Data Table P 212 10 P 212 20 P 212 40 Operating voltage Oto 1000 Oto1000 Oto 1000 Motion and positioning Closed loop travel 15 30 60 Closed loop resolution 0 3 0 6 1 2 Open loop resolution 0 15 0 3 0 6 Linearity error 0 2 0 2 0 2 Mechanical properties Static large signal stiffness in 90 60 34 motion direction Unloaded resonant frequency 17 12 7 Push pull force capacity in 2000 300 2000 300 2000 300 motion direction Shear load 15 10 10 Torque on tip 0 5 0 5 0 5 Drive properties Electrical capacitanc
45. xure Figure 7 Ball tips or flexure joints for decoupling lateral forces and bending forces AN py tt il 4 Te p m lt F l WA II r E S D Figure 8 No lateral forces or torques A Incorrect Shearing force from lateral force B Correct Axial loading of the actuator C Incorrect Torsion from torque P 21x Piezo Actuator PZ249E Version 1 0 1 23 5 Installation P I NOTICE Damage from unsuitable cables Unsuitable cables can damage the piezo actuator and the electronics gt Only use cables provided by PI for connecting the P 21x to the electronics NOTICE Heating up of the P 21x during operation ne The heat produced during operation of the P 21x can affect your application gt Install the P 21x so that your application is not affected by the dissipating heat INFORMATION Extended cables can affect the performance of the P 21x gt Only use extension cables from PI p 16 INFORMATION When handling the vacuum version of the piezo actuator appropriate cleanliness must be ensured gt Only touch the piezo actuator with powder free gloves gt If necessary wipe the piezo actuator clean INFORMATION The outwards motion of the pusher corresponds to the positive direction of motion and is proportional to the applied operating voltage 24 Version 1 0 1 PZ249E P 21x Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation 5

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