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Inductively Coupled Plasma Source (ICP)

1. kk kk kK KK KK KK KK eee KK KK KI K DE KK KI KK KK 1 1 Type Conventions kk kk kk KK KK KK we KK KK KK KK KK KK KK KK kk k 1 1 ICONS SYMBOLS ou sa sw h s ben QA ga kan di Wa N n N gohan GG 1 1 Safely ic cs Ses s I MI ap dara EP REARS aja Ta AAN Gee A ra KANG E SERRE Ajaa LE DBDI pa an a a NE 1 3 product Safety Compliance kk kk kk KK KK KK KK KK KK KK KK KK KK KK KK 1 3 Directives 4 5945 aa Aan WA NE IA EA ARENG eee sh Scie gg ewes eee eee RSS 1 4 Installation Requirements KK KK KK KI eee 1 4 Conditions of Use kK kK KK KK KK KK KK KK KK KK KK kK KK KK KK KK k 1 4 Chapter 2 Theory General Description kk kK KK KK KK KK KK K KK KK KK KK KK KK KK K KK KK 2 1 Theory of Operation kk kk kK KK KK KK KK KK KK KK KK KI KK KK KK KK KK Ye 2 1 Application to Vacuum Processing kk kk kK KK K KK KK eee 2 3 Reactive Sputter Deposition kK KK KK KK KK KK KEK KK KK KK 2 3 Surface Treatment and Plasma Enhanced Chemical Vapor Deposition PECVD 2 4 Chapter 3 Specifications Functional Specifications kK KK KK KK KK KK KK KK KK KK KK KK KK 3 1 Physical Specifications sasa sk Gg tpe bag UN WU kb Y gay teag ese 3 1 Electrical Specifications kk KK kK KK KK KK KK KK KK KK KK KK KK 3 2 Operational Specifications kk ee KK KK KK KK KK KK KK KK KK KK KK 3 2 Environmental
2. RF power cable Advanced Energy s HFV series power supply HFV 15 pin User port ICP 15 pin User port Figure 2 1 ICP source schematic An induction coil is used to apply power to a plasma in the source by means of induced RF electric fields The electrically conductive plasma of the ICP source is essentially a single turn secondary current path with respect to the primary induction coil High RF current levels on the primary coil are required to drive the heating fields and currents within the plasma body Thus a resonant RF power matching circuit in the form of a series and shunt capacitor is required to facilitate high RF currents 10 s of Amperes on the induction coil and to match the complex impedance of the loaded resonant circuit to the 50 Q output and 50 Q cable from the RF generator Naturally the load impedance of the ICP source dynamically changes with respect to gas flow gas composition vacuum pressure and power The ICP source has been configured to operate with AE s HFV series RF generators This power supply is a variable frequency generator 1 765 to 2 16 MHz that uses direct digital synthesis DDS to minimize the reflected power for a given load impedance The DDS tuning features of the HFV sense the state of forward and reflected power at the generator as a result of the ICP source s load impedance and provide dynamic adjustments to the RF frequency in order to minimize reflected RF power on the
3. Inductively coupled plasma source plasma source DC Sputter Magnetron Manifold for delivery of activated oxygen nitrogen Reactive sputtering process chamber gt Workpiece E Figure 2 2 A typical reactive sputter deposition system 5707016 B 2 3 Advanced Energy In conventional reactive sputter deposition a dc power magnetron is used to sputter metals from bulk material targets in the presence of O or N feed gases alone or in combination with inert carrier gases such as argon Metal species arrive at the work piece along with activated oxygen and nitrogen atomic or molecular species to form the films The desired film stoichiometry and other properties are controlled by balancing the arrival rate of metal oxide and or nitride species among other parameters Since the oxygen or nitrogen atomic or molecular species are activated by the plasma in the vicinity of the magnetron a dielectric layer may form on the magnetron target a condition that is often referred to as target poisoning If the rate of insulating film growth on the target exceeds the sputter rate of material from the target the electrical operation of the dc magnetron is disrupted As such target poisoning restricts the sputtering rate of material the deposition rate of films and the stoichiometry properties of the film The ICP source may be used to enhance the reactive sputter deposition process by providing a high flu
4. 1 kuri a a lt gi L 215 9 8 50 End View 281 7 mm 11 09 1440 H gt Q 1 Figure 5 1 ICP source spacing reguirements mounting holes and connections 5 2 5707016 B ICP Source PHYSICAL INSTALLATION AND VACUUM CONNECTIONS Physical Installation The ICP source should be orientated in one of three positions for effective air cooling vertical horizontal with upward air flow or horizontal with lateral air flow These orientations are displayed in Figure 5 2 through Figure 5 4 Failure to mount the ICP source in one of the three orientations shown could result in ineffective air cooling of the device and diminish the operable range of net time averaged power Also a clear space of at least 6 0 wide should be allowed at the air intake fan intake and exhaust sides of the chassis for effective air cooling Air Flow In Air Flow Out Figure 5 2 Vertical placement 5707016 B 5 3 Advanced Energy UP 7 gt Air Flow Out Air Flow In Figure 5 3 Horizontal placement upward air flow UP Air Flow Out Air Flow In Figure 5 4 Horizontal placement lateral air flow The ICP source should be supported by a GROUNDED customer supplied mounting bracket or plate from the six 10 32 screw hole locations on the back side of the ICP source Refer to Figure 5 1 on page
5. 5 2 for mounting dimensions The ICP source should not be supported only by its end flange fittings 5 4 5707016 B ICP Source Vacuum Connections After unpacking and mounting the ICP source remove any protective covers from the end flange fitting Keep the end flanges free of dust dirt or unwanted greases when handling Scratches dirt and debris on the end flanges can corrupt or destroy the vacuum sealing integrity of the flange Avoid allowing dust or any foreign object to enter the discharge tube during installation If it is necessary the sealing surfaces of the end flange fittings may be cleaned with a diluted isopropyl alcohol solution and dust free wipe per usual vacuum practice A WARNING Do not use alcohol as a cleaning solvent in the presence of open flames or where sparks or arcs occur The ICP source vacuum connections should be made prior to making cooling water connections and all other electrical connections The end flanges have the following type of standard vacuum coupling interfaces Other flange sizes may be available upon request Table 5 1 Available ICP Source End Flange Configurations Flange Type Flange OD Vacuum Tube Sealing material inches Centering Ring ID Gasket inches ISO KF 50 aluminum 2 95 2 10 captured elastomer Note All dimensions are nominal ISO International Standards Organization KF Klein Flange Once the ICP source is mounted and sealed the
6. Bldg 347 Yamabuki cho Shinjuku ku Tokyo Japan AE Korea Ltd Gongduk Building 4th floor 272 6 Seohyun Dong Bundang Gu Sungam Si Kyunggi 463 050 Korea Phone 82 31 705 1200 Fax 82 31 705 276 5707016 B 6 9 Advanced Energy Table 6 2 Global Support Locations Continued Office Telephone AE United Kingdom Phone 44 1869 320022 Unit 5 Minton Place Fax 44 1869 325004 Market Court Victoria Road Bicester Oxon OX6 7QB UK AE Taiwan Ltd Phone 886 2 82215599 10F 6 No 110 Chung Shan Rd Fax 886 2 82215050 Sec 3 Chungho City Taipei Hsien Taiwan 235 AE China Phone 86 755 3867986 Rm 910 Anhui Building Fax 86 755 3867984 No 6007 Shennan Road Shenzhen China 518040 RETURNING UNITS FOR REPAIR Before returning any product for repair and or adjustment first follow all troubleshooting procedures If after following these procedures you still have a problem or if the procedure instructs you to call AE Global Support and discuss the problem with a representative Be prepared to give the model number and serial number of the unit as well as the reason for the proposed return This consultation call allows Global Support to determine whether the problem can be corrected in the field or if the unit needs to be returned Such technical consultation is always available at no charge If you return a unit without first getting authorization from Global Sup
7. HFV Load Power Set Point W Figure 5 8 Frequency response vs load power setpoint and inlet pressure 5707016 B 5 13 Advanced Energy HFV Average Reflected Power W at Optimal Tune Oxygen Plasma Continuous Tune y 1 Inlet ICP Source Pressure mT 600 800 1000 1200 1400 1600 1800 2000 HFV Load Power Set Point W Figure 5 9 Reflected power response vs load power setpoint and inlet pressure MAINTENANCE Wear of ICP Source Components The ICP source requires very little maintenance and in some applications could operate for an indefinite period of time before it ever requires maintenance However depending upon your operating conditions and operating gases the ICP source discharge tube could slowly sputter erode by ion bombardment of the ICP source discharge Also long term operation of the ICP source could lead to slow chemical or slow thermal deterioration of the sealing O rings Thus occasionally it may be necessary to perform preventative maintenance or to replace the O ring seals and or the discharge tube The following steps describe how to service or replace the discharge tube and O rings if preventative maintenance is required or in the unlikely event that the discharge tube or O ring should suddenly fail Removing the O Ring Seals and Discharge Tube The removal of the discharge tube and O rings is a relatively simple task but does require some preparation The following materials are r
8. Specifications kk KK KK KK KK eee 3 3 Chapter 4 Connectors Indicators and Controls User Control Connections_ kk kk kK KK KK KIRIYE eee KK kk a 4 1 Generator Port 4 6 3s aa a salada li ana au a a lk ak lk asa alal a a uk dla aa a a dl li akla a a 4 1 User POM es nate xi A a a b ang ek 22713 Ba ee es hk e Da eS 4 1 Interlocks and Conditions kk kk KK kK KK KK eee ee 4 2 Chapter 5 Installation Setup and Operation Unpacking ss sa wa 23251xy5x4 4 5 2 eaen E Bg gag a 31 BG ANE a AG BA S445 S84 5 1 Grounding XD DH HHHBHBBHHHHF HH 5 1 5707016 B vii Advanced Energy Spacing Reguifemenis_ KK kK KK KK KK KK KK KK KK KK KK KK KK KK ea 5 2 Physical Installation and Vacuum Connections KK 5 3 Physical Installation_ ee ese Gees es Ghats Sant KIRI KK KK 5 3 Vacuum Connections Se RRR ehh KK KK KK KK KK KK eee eee 5 5 Connecting Cooling Water kk kK KK KK KK KK KK KK KK KI KK KK KK IK KK KK 5 5 Connecting Cables and Connectors AWK kK KK KK KK KK KK KK KK KK KK KK 5 6 Connecting Generator and User Port Conneciions_ 5 6 Connecting Power Inputs kk KK KK KK KK KK KI KK KK KK KK KK KK KK KK 5 7 Operation sere ar E a Ag TA 2gmmmm g mggmgoggggmmzommeaemmrmmranz 5 8 Operating OVerview_ a KK KK KK KK KK KK KK KK KK KK KK KK KK KK kk 5 8 First Time Operation KK KK KK KK KK KK
9. authorized AE service center AE will return the repaired unit freight prepaid to you by second day air shipment or ground carrier for local returns repair parts and labor will be provided free of charge Whoever ships the unit either you or AE is responsible for properly packaging and adequately insuring the unit ized Returns Before returning any product for repair and or adjustment call AE Global Support and discuss the problem with them Be prepared to give them the model number and serial number of the unit as well as the reason for the proposed return This consultation call will allow Global Support to determine if the unit must actually be returned for the problem to be corrected Such technical consultation is always available at no charge Units that are returned without authorization from AE Global Support and that are found to be functional will not be covered under the warranty see warranty statement below That is you will have to pay a retest and calibration fee and all shipping charges Warranty Statement The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed AE specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an
10. iii 5707016 B Advanced Energy Index iv 5707016 B
11. kPa 13 F to 158 F 60 g m 3 660 mbar to 1060 mbar approximately 3265 m above sea level i Non condensing 15 C 2 Maximum relative humidity when the unit temperature slowly increases or when the unit temperature directly increases from 25 C to 30 C 3 Maximum absolute humidity when the unit temperature directly decreases from 70 C to 5707016 B 3 3 Advanced Energy Table 3 6 Cooling Specifications Description Specification Coolant Requirements Air Temperature 15 C to 30 C 59 F to 86 F inlet temperature Water Flow Rate 1 0 Ipm 0 26 gpm minimum Water Pressure 5 2 bars 75 psi maximum inlet pressure Contaminates The following specifications are recommended for the water used to cool the HFG 5000 generator pH between 7 and 9 e Total chlorine lt 20 ppm e Total nitrate lt 10 ppm e Total sulfate lt 100 ppm e Total dissolved solids lt 250 ppm e Total hardness expressed as calcium carbonate equivalent or less than 250 ppm e Specific resistivity of 2500 Q cm or higher at 25 C e Total dissolved solids TDS as estimated by the following TDS lt 640 000 specific resistivity Q cm A WARNING Do not use de ionized or triple distilled water for cooling purposes De ionized water causes both corrosion and erosion of cooling manifolds 3 4 5707016 B ICP Source Chapter 4 Connectors Indicators and C
12. mechanically shocking the end of the discharge tube Allow the end of the discharge tube that has no O ring to extend about 1 cm beyond the assembly Begin installing an end flange on the end of the discharge tube that has the O ring using four 4 10 32 stainless steel screws This will secure the discharge tube in place while you install the second O ring Do not fully tighten the end flange in place yet Note Important It is best to tighten each screw about 2 to 4 turns and then move to the adjacent screw in a rotational sequence about the end flange rather than to tighten each screw individually This measure helps to apply even pressure on the O ring seal and prevents the end flange from resting against the end of the discharge tube and placing undue stress on the tube Stretch and slip the second O ring over the end of the discharge tube Press this second O ring down into the sealing slot of the ICP source assembly Carefully remove any excess vacuum grease from the exposed end of the discharge tube if necessary Begin installing the second end flange with the remaining four 10 32 stainless steel screws Do not fully tighten the end flange in place yet Note Important It is best to tighten each screw about 2 4 turns and then move to the adjacent screw in a rotational sequence about the end flange rather than to tighten each screw individually This measure helps to apply even pressure on the O ring seal and prevents
13. source may be brought under vacuum Base vacuum pressures will depend on the user s vacuum system capabilities Refer to Troubleshooting on page 6 1 should you observe any significant vacuum leaks as a result of the installation of your ICP source CONNECTING COOLING WATER The ICP source is water cooled Do not operate it until the water is connected and the cooling requirements are met The ICP source requires two 4 NPT fittings for input and output flow refer to Figure 5 1 on page 5 2 5707016 B 5 5 Advanced Energy WARNING If you are connecting multiple units in series be sure that the input water temperature to all units is less than the maximum input water temperature WARNING Do not use de ionized water for cooling purposes Connect the input and output connections and tighten securely Turn on the water and ensure that there are no leaks at the connections or within the ICP source chassis Be sure that the flow rate and the temperature are within the minimum specifications required to operate your ICP source see Table 3 6 on page 3 4 WARNING Ensure that there are no water leaks in the cooling system before connecting input RF or ac power Note Keep the water cooling system running as long as the associated RF generator is on and capable of delivering power to the unit CONNECTING CABLES AND CONNECTORS WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources
14. the end flange from resting against the end of the discharge tube and placing undue stress on the tube 5707016 B 5 17 Advanced Energy 8 Visually inspect the lateral centering of the discharge tube by looking into the end flanges If the tube appears to be well centered in the discharge assembly tighten down both end flanges 9 If the discharge tube is not well centered remove the end flanges leaving the O rings in place Attempt to re center the discharge tube and then repeat steps 5 7 and 8 10 Re install the ICP source into your vacuum system and make any vacuum leak checks that are appropriate for your system and application 11 Re connect the ICP source per installation and operation instructions described in this manual 5 18 5707016 B ICP Source Figure 5 10 Isometric drawing of ICP source for discharge tube and sealing O ring 1433 5707016 B 5 19 Advanced Energy 5 20 5707016 B ICP Source Chapter 6 Troubleshooting Maintenance and Global Support BEFORE CALLING AE GLOBAL SUPPORT Z AWARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Checks with the Power Off 1 Ensure the power to the HFV generator is off as well as ac power to the ICP source 2 Check for visible damage to the unit cables and connectors 3 Ensure all unit connectors are installed correc
15. CP Source For processes requiring different or extended ranges of operation than those listed contact Advanced Energy Industries Table 3 4 Operational Specifications averaged RF Power AE Model Reactive Sputtering Surface Clean and 3151800 PECVD Total gas flow rate lt 100 sccm lt 2sLm Pressure range 2 to 200 mT 2 to 200 mT Option 001 measured at inlet Peak RF Power 3 kW 3kW Continuous and net time 2kW 2kW 3 2 5707016 B ICP Source Table 3 4 Operational Specifications Continued AE Model 3151800 Duty Cycle at Peak RF Power Reactive Sputtering up to 66 Surface Clean and PECVD up to 66 Minimum Maximum ON time at peak RF power min 10 sec max 3 min min 10 sec max 3 min ENVIRONMENTAL SPECIFICATIONS Table 3 5 and Table 3 6 describe the environmental specifications for the ICP Source Table 3 5 Climatic Specifications Temperature Relative Humidity Air Pressure Operating Class 3K3 Class 3K2 Class 3K3 0 C to 40 C 10 to 85 80 kPa to 106 kPa 32 F to 104 F 2 g m to 25 g m 800 mbar to 1060 mbar approximately 2000 m above sea level Storage Class 1K4 Class 1K3 Class 1K4 25 C to 55 C 35 to 95 80 kPa to 106 kPa 13 F to 131 F 1 g m to 29 g m 800 mbar to 1060 mbar approximately 2000 m above sea level Transportation Class 2K3 Class 2K3 Class 2K3 25 C to 70 C 95 2 66 kPa to 106
16. K KK KK KK KK KK 5 8 Normal Operation kk KK KK KK KK KK KK KK KK KK aug KK KK KK Ke 5 11 Maintenance HHHH H HH 5 14 Wear of ICP Source Components_ KK KK KK KK KK KK RR KK KK 5 14 Removing the O Ring Seals and Discharge Tube KK 5 14 Cleaning the Discharge Tube kK KK KK KK KK KK tee 5 16 List of Replacement Paris a2 csi ne Ske kk kk KK eax KK KK KK KK KI K K bee ee wee be KH 5 16 Replacing the Discharge Tube and Seals 0c KRI eee 5 17 Chapter 6 Troubleshooting Maintenance and Global Support Before Calling AE Global Support 0 0 0 KK KK KK KK KK KK eee 6 1 Checks with the Power Off 0c KK KK KK KK KK KK eee 6 1 Checks with the Power On kk KK KK KK eee 6 1 Troubleshooting ss sn ala kw k kd vice be Shee r kk averse a a W d BAR a 2 6 1 Troubleshooting the ICP Source aee 6 2 AE World Wide Web Site es bees Sue ea eee KK KK ene 6 8 AE Global Support sara sal wa renek eo a aa bau eke eres dice OREA 6 9 Returning Units for Repair KK KK KK K KK KK KK KI KI KIR KI KI KK KK KI KK 6 10 Wealzn reee oA0OIAM OoOermmm mmmmw_m_p_a_amn 6 10 Authorized Returns kk kk kK KK KK KK KK ee 6 11 Warranty Statement kk kK KK KK KK KK KK KK KK KK KK KK KK KK KK 6 11 viii 5707016 B ICP Source List of Figures ICP source schemat 3 ak sad ale doe ki ayn Sir l hi aa kl a a
17. MANUAL Inductively Coupled Plasma Source ICP 5 07016 B January 2001 Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins CO 80525 USA nd 800 446 9167 D technical support aei com User Manual Inductively Coupled Plasma Source ICP 5707016 B gan ADVANCED ENERGY Advanced Energy COPYRIGHT This manual and the information contained herein is the property of Advanced Energy Industries Inc No part of this manual may be reproduced or copied without the express written permission of Advanced Energy Industries Inc Any unauthorized use of this manual or its contents is strictly prohibited Copyright 2001 Advanced Energy Industries Inc All Rights Reserved DISCLAIMER AND LIMITATION OF LIABILITY The information contained in this manual is subject to change by Advanced Energy Industries Inc without prior notice Advanced Energy Industries Inc makes no warranty of any kind whatsoever either expressed or implied with respect to the information contained herein Advanced Energy Industries Inc shall not be liable in damages of whatever kind as a result of the reliance on or use of the information contained herein PRODUCT USAGE STATEMENT WARNING Read this entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow instru
18. a dk tes al E we die eS 2 2 A typical reactive sputter deposition system kk kK KK KK KK KK RR KK KK KK 2 3 Surface treatment and PECVD kk kk kk kk kK KK KK KI KK KK KK KK KK KOK eens 2 5 Generator port conl clOl 5 a 5t4 5 a W see hose WI a ee he WR N 4A0 W 4 Wu 4 1 User port connector 0 0 0 kk kK kk KK KK KK KK KK KK kk kk kk kk kk kk kk lk kk lk kk ka 4 2 Interlock connections kk kk kk kk KK KK KK KK KK KI KK KK KK KK kk kk kk lk kk lk kk ke 4 2 ICP source spacing requirements mounting holes and connections 5 2 Vertical placement 5 5 aaa ga gak S A RE AR a KU Bak W ees 5 3 Horizontal placement upward air flow eea ee 5 4 Horizontal placement lateral air flow kK KK ee 5 4 Typical installation RRS KK KK KK eer KI KK KI KK KI KK KK KK ae ees 5 9 Frequency response vs load power setpoint and inlet pressure 5 12 Reflected power response vs load power setpoint and inlet pressure 5 12 Frequency response vs load power setpoint and inlet pressure 5 13 Reflected power response vs load power setpoint and inlet pressure 5 14 Isometric drawing of ICP source for discharge tube and sealing O ring 5 19 wac coc cars aaa i trys a ergata Aes ee ee 9 et ag ad IA Sen 4 ee are 6 3 Fault tree continued cede eeetnde hes KK KK KK te kas KK KK KOK KK dened 6 4 Fa
19. able on AE s HFV series generators Consult AE for details if continuous tune mode is not appropriate for your applications see AE Global Support on page 6 9 Normal operation of the ICP source may be stopped and re started by means of the RF enable signal or RF power setpoint signal and interlock signal or manually by means of the STOP STANDBY switch on the HFV front panel Normal Operation Figure 5 6 through Figure 5 9 show contour plots of RF frequency and reflected power against setpoint load power and inlet pressure for Ar and O that are exemplary of normal operation Depending on the installation and pumping speed of your vacuum system the exact values of frequency and reflected power in your installation may deviate from these exemplary response surfaces As such the following data should be used as a guide to anticipate the ICP source s response and range under normal operation There may be applications where it is necessary to work outside the normal range of operation as depicted in Figure 5 6 through Figure 5 9 In such cases it is possible to make adjustments to the ICP source s fixed match component to extend the normal range of operation Please consult AE Global Support for service and support for more details to alter or extend the range of operation of your ICP source see AE Global Support on page 6 9 Figure 5 6 and Figure 5 7 show the exemplary response of HFV frequency and reflected power for ar
20. ctions can cause personal injury and or property damage All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury Advanced Energy Industries Inc AE provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces or uses potentially lethal high voltage high current radio frequency RF energy NEVER DEFEAT INTERLOCKS OR GROUNDS iv 5707016 B ICP Source TRADEMARKS Ac ADVANCED is a registered trademark of Advanced Energy Industries Inc L ENERGY Advanced Energy is a registered trademark of Advanced Energy Industries Inc FixedMatch is a registered trademark of Advanced Energy Industries Inc CUSTOMER FEEDBACK Advanced Energy s technical writing staff has carefully developed this manual using research based document design principles However improvement is ongoing and the writing staff welcomes and appreciates customer feedback Please send any comments on the content organization or format of this user manual to e tech writing aei com 5707016 B V Advanced Energy vi 5707016 B ICP Source Table of Contents Chapter 1 Introduction Read This Secon 5s ask nan a hak ca ha na n a a a Gg A aha es 1 1 Interpreting the Manual
21. cuum sealing 1 in ICP source No discharge ignition No RF power to HFV failure 2 ICP source No RF enable 4 Setpoint signal is not 5 greater than 220 mV Open RF path 6 Pressure too high or 7 low Fixed match hybrid 8 failure Figure 6 1 Fault tree 5707016 B Advanced Energy Plasma ignition but Repeated igntion ICP source pressure 7 with intermittent loss and loss every 1 too high or low to 5 sec and HFV sweeps in HFV DDS tuning 9 frequency settings not optimal of Plasma FixedMatch hybrid requires adjustment 10 Load power setpoint too low for stable 11 operation Repeated ignition and Unstable pressure 12 loss after 1 to 5 min and or flow settings Forced air cooling failure ICP source 13 overtemp Faulty User Generator FixedMatch hybrid ICP source pressure 7 too high or low Arcing in ICP source assembly Condensation in ICP source due to wet or 15 humid environment Foreign object in ICP source assembly FixedMatch hybrid failure 16 8 Figure 6 2 Fault tree continued 6 4 5707016 B ICP Source Plasma Ignites but Reflected Power ICP Source Pressure f HFV is near f 7 Generator Does not 9 too High or Low Reach Stable Load the max allowed level of Reflected Power Power Set Point Fixed match Hybrid Requires 10 Adjustment Load Power Set Point is achieved but tuning condit
22. e at any one of the six 10 32 mounting holes on the back of the ICP source assembly A suitable chassis ground connection made to any of these fittings can prevent or minimize radio frequency interference However this grounding connection should not be used as the primary grounding point for the RF generator or in substitution for the grounding RFI mounting point on the generator Note For more information about grounding refer to the AE Application Note titled Grounding p n 5600031A You can find this AE Application Note on AE s web site http www advanced energy com or you can request a copy by calling Global Support see AE Global Support on page 6 9 The three pole ac connection that drives the cooling fans on the ICP source can serve as an additional ac power ground A WARNING To ensure proper grounding and installation use only AE approved RF cables AE pn 1345767 between the HFV generator and the ICP source 5707016 B 5 1 Advanced Energy SPACING REQUIREMENTS Top View Side View I gt z 2 Gi O ol o od Q 381 0 mm le 481 2 mm hi 15 18 95 2 Q li Be 25 aul lt i 4
23. e gauge to examine the level of erosion or deposits along the interior wall of the discharge tube Look for visible signs of O ring galling on the exterior surface of the tube 9 Replace the tube if the wall has lost more than 1 mm of thickness from its interior diameter Clean or replace the tube if it appears that deposits could generate flakes or particulates that are undesirable in your process Clean or replace the tube if the O ring material has galled or fused to its sealing surfaces 10 Inspect the O rings for cracking hardening tearing and thermal or chemical decomposition Replace the O rings if any such damage is observed Cleaning the Discharge Tube The discharge tube may be cleaned if deposits form on its interior wall and cannot be removed by plasma etching plasma ashing or other operating vacuum processing means The method of cleaning your ICP discharge tube depends on the model of your ICP source and the discharge wall materials Alumina or sapphire discharge tube materials should be cleaned as any ceramic material Vycor and other silicon dioxide and silica based materials should be cleaned as any conventional high purity glassware or quartz materials After cleaning the discharge tube should be rinsed in distilled water air dried rinsed in isopropyl alcohol and dried again per conventional vacuum equipment practices Such cleaning protocols vary from user to user and from application to application Note When c
24. ecommended e Phillips head screw driver 5 14 5707016 B ICP Source e Dust and lint free wipes as used in clean room environments e Isopropyl alcohol or similar solvent used for cleaning vacuum components Dust and powder free clean gloves for clean room environments and handling vacuum components AN DANGER Ensure that the circuit breaker on the RF generator is also in the OFF position Disconnect all electrical connections from the ICP source assembly including all RF ac and dc power or signal connections including User Generator Port connections Note It is not necessary to disconnect water cooling connections to the ICP source when performing this maintenance operation However it is recommended that the flow of cooling water should be turned OFF to avoid undue condensation on the ICP source assembly in humid environments Such condensation could introduce unwanted water into your vacuum system Use the following steps to remove the O ring seals and cylindrical discharge tube from the ICP source assembly Refer to Figure 5 10 on page 5 19 1 Vent the ICP source to atmosphere and remove it from its vacuum installation 2 Remove the end flanges by loosening and removing the four 10 32 stainless steel screws from each end of the assembly Note Important It is best to loosen each screw about 2 to 4 turns and then move to each screw in a rotational sequence around the end flange rather than to completely
25. ed match network Gas flow pressure and chemistry and intrinsic plasma dynamics of such gas mixtures After installation of your ICP source check the condition of the plasma source and its installation by operating it under a set of reference conditions The following operational notes discuss how to examine the ICP source operation by examining a the frequency response and b the reflected power response of the HFV generator By dialing in these reference conditions you may use the response of the HFV to determine if your ICP is operating properly However please note that these operational notes and reference conditions should be treated as guidelines to operating your ICP source Different users will have different vacuum systems gas mixtures and pumping speeds As a result your ICP source and HFV generator may respond somewhat differently and deviate from the reference conditions Once the unit is connected and the appropriate vacuum conditions are set the HFV power supply is turned on and enabled As soon as the user provides the setpoint power signal to the ICP source HFV set the HFV generator provides forward power and proceeds through its electronic tuning algorithm in order to ignite the discharge and minimize reflected power First Time Operation You need to supply the following provisions to test the ICP source installation against the recommended operation guidelines e A vacuum pressure gauge such as a capacitance
26. expressed warranty shall exist only if the goods are installed started in operation and tested in conformity with the seller s published instructions The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse negligence or accident or that have been altered or repaired by anyone other than the seller or the seller s duly authorized agent This warranty is expressly made in lieu of any and all 5707016 B 6 11 Advanced Energy other warranties express or implied unless otherwise agreed to in writing The warranty period is 12 months after the date the goods are shipped from AE In all cases the seller has sole responsibility for determining the cause and nature of the failure and the seller s determination with regard thereto shall be final 6 12 5707016 B ICP Source A AE global support 6 9 AE web site 6 8 air flow 5 4 C cables and connectors connections 5 6 checks with the power off 6 1 checks with the power on 6 1 cleaning discharge tube 5 16 components wear 5 14 conditions of use 1 4 configurations end flange 5 5 connections 5 2 cables and connectors 5 6 cooling water 5 5 generator and user port 5 6 input power 5 7 interlock 4 2 user control 4 1 vacuum 5 3 5 5 connectors generator port 4 1 user port 4 2 cooling water connections 5 5 customer feedback 1 v customer support before calling 6 1 contact information 6 9 D direct
27. generator by means of three NC switches within the ICP source The ICP source interlock signals are in series with the user s interlock signal on pins 11 and 12 of the User port Figure 4 3 illustrates the interlocking connection from pin 11 of the Generator port on the ICP source ICP Source Interlock Connection Generator Port Chassis cover Pin 11 TSA switch TSB User port Pin 11 Figure 4 3 Interlock connections Interlock loop is CLOSED when Thermoswitch A CLOSED below 65 to 67 C e Chassis cover switch CLOSED Thermoswitch B CLOSED below 65 to 67 C User Port Connections Pin 11 to Pin 12 CLOSED Note External series resistance between pin 11 and pin 12 must be 15 Q or less Pin 11 is tied to 15 Vdc by a resettable fuse in the HFV power supply 4 2 5707016 B ICP Source Chapter 9 Installation Setup and Operation UNPACKING Unpack and inspect your ICP source carefully Check for obvious physical damage If no damage is apparent proceed with the unit connections If you do see signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately see AE Global Support on page 6 9 Save the shipping container for submitting necessary claims to the carrier GROUNDING Grounding is supplied by the RF generator at its RFI mounting hole or stud Refer to the installation instruction of the RF generator Additional grounding of the ICP source may be mad
28. gon gas in the ICP source under continuous tune and load power regulation e Figure 5 6 shows the frequency response versus load power setpoint and inlet pressure e Figure 5 7 shows the reflected power response versus load power setpoint and inlet pressure 5707016 B 5 11 Advanced Energy HFV Average Operating Frequecy kHz at Optimal Tune Argon Plasma Continuous Tune Mode Inlet ICP Source Pressure mT 600 800 1000 1200 1400 1600 1800 2000 HFV Load Power Set Point W Figure 5 6 Frequency response vs load power setpoint and inlet pressure HFV Average Reflected Power W at Optimal Tune Argon Plasma Continuous Tune Mode N o 100 OQ O Inlet ICP Source Pressure mT S 600 800 1000 1200 1400 1600 1800 2000 HFV Load Power Set Point W Figure 5 7 Reflected power response vs load power setpoint and inlet pressure 5 12 5707016 B ICP Source Figure 5 8 and Figure 5 9 show the exemplary response of HFV frequency and reflected power for oxygen gas in the ICP source under continuous tune and load power regulation e Figure 5 8 shows the frequency response in kHz versus load power setpoint and inlet pressure e Figure 5 9 shows the reflected power response in Watts versus load power setpoint and inlet pressure HFV Average Operating Frequency kHz at Optimal Tune Oxygen Plasma Continuous Tune Mode Inlet ICP Source Pressure mT 600 800 1000 1200 1400 1600 1800 2000
29. his manual Type Conventions To quickly identify certain words and phrases in type that differ from the rest of the text please note the following type conventions e Pin and signal names appear in capitalized italics DUTY CYCLE A Technical terms appear in italicized letters when introduced in the text Unit labels switches indicators etc generally appear in boldface letters as they are labeled on the unit MODIFY Functions are printed in boldface lowercase letters analog input filtering Icons Symbols This symbol represents important notes concerning potential harm to people this unit or associated equipment It is found whenever needed in the manual Advanced Energy includes this symbol in Danger Warning and Caution boxes to identify specific levels of hazard seriousness AN DANGER This box identifies hazards that could result in severe personal injury or death 5707016 B 1 1 Advanced Energy A WARNING This box identifies hazards or unsafe practices that could result in personal injury A CAUTION This box identifies hazards or unsafe practices that could result in product or property damage The following symbols could appear on labels on your unit e Hazardous voltage HAZARDOUS VOLTAGE Risk of death or bodily injury Disconnect all sources of input power before working on this 1332 High voltage e Protective earth ground Warning refer to ma
30. ion is not stable HEV DDS Tuning Settings not Optimal Fixed match Hybrid Failure Unstable Pressure and or FlowSettings 12 9 8 Figure 6 3 Fault tree continued 5707016 B Advanced Energy Table 6 1 Fault Tree Causes and Corrections Identification Probable Cause and Correction 1 Loss of vacuum Due to extreme thermal or mechanical shock the ICP source discharge sealing tube has fractured or the O ring seals around the discharge tube have developed a leak Check for vacuum leaks around the ICP source Safely disconnect the ICP source and power supply remove the ICP source from the vacuum system remove the end flanges and inspect the O rings and discharge tube Refer to Removing the O Ring Seals and Discharge Tube on page 5 14 for the procedure to inspect and replace O rings and or discharge tube components if necessary Also check for condensation within the unit which may have led to thermal shocks on the discharge tube 2 HFV failure The failure is related to the function of the HFV Safely disconnect the HFV from the ICP source and troubleshoot the HFV per recommendations in the HFV manual 3 No interlock Closure of the interlock loop pin 11 to 12 of the 15 pin User port is necessary to activate the HFV generator Verify that the User Generator port connections are securely attached and ensure that the loop is closed Make certain the ICP source chassis is closed and tha
31. ives 1 4 discharge tube cleaning 5 16 illustration 5 19 maintenance 5 14 replacement 5 17 Index E end flange configurations 5 5 F fault tree causes and corrections 6 6 feedback user manual 1 v first time operation 5 8 frequency response vs load power set point and inlet pressure 5 12 5 13 G general description 2 1 generator port 4 1 connector 4 1 grounding 5 1 H horizontal placement lateral air flow 5 4 horizontal placement upward air flow 5 4 icons in user manual 1 1 on unit 1 2 ICP source schematic 2 2 input power connections 5 7 installation illustration 5 9 safety requirements 1 4 safety warning 1 3 5 6 5 7 vacuum connections 5 3 interlock connections 4 2 interlocks and conditions 4 2 isometric drawing of ICP source for discharge tube and sealing O ring 5 19 M maintenance 5 14 O ring seals and discharge tube 5 14 wear of ICP source components 5 14 mounting 5 2 5707016 B Index i Advanced Energy N normal operation 5 11 O operation 5 8 first time 5 8 normal 5 11 overview 5 8 O rings illustration 5 19 maintenance 5 14 replacement 5 16 P parts replacement 5 16 wear 5 14 PECVD 2 4 2 5 placement horizontal 5 4 vertical 5 3 ports generator and user port connections 5 6 generator port 4 1 user port 4 1 product safety compliance 1 3 R reactive sputter deposition 2 3 illustration 2 3 reactive sputtering 2 1 reflected power response vs load power
32. leaning the discharge tube use care to avoid mechanically stressing or shocking the tube LIST OF REPLACEMENT PARTS Contact AE Global Support for replacement parts see AE Global Support on page 6 9 Table 5 2 Replacement Discharge Tube and O rings ICP Source Model Part Description AE Part Number 3151800 001 O ring Silicone Orange 274146 ASM 335 5 16 5707016 B ICP Source Table 5 2 Replacement Discharge Tube and O rings Discharge Tube Vycor 2161023 02 Discharge Tube Alumina 2161022 Note O rings and discharge tube may be purchased from AE Replacing the Discharge Tube and Seals Complete the following steps to replace the O ring seals and cylindrical discharge tube from the ICP source assembly refer to Figure 5 10 on page 5 19 1 2 Prepare the clean discharge tube end flanges and hardware for assembly Prepare the O rings for assembly This may include applying a thin layer of high temperature vacuum grease to the surface of the O rings however it is not necessary and may not be recommended for certain high purity ultra high vacuum applications Stretch and slip one O ring over one end of the discharge tube and locate the O ring about 0 5 cm from the end Carefully remove any excess vacuum grease from the exposed end of the discharge tube if necessary Gently insert the discharge tube into the ICP source assembly using care to avoid
33. manometer located within 30 cm of the inlet to the ICP source 5 8 5707016 B ICP Source e An effective vacuum pumping speed of at least 50 l sec at the exhaust of the ICP source A source of Ar O or N gas with a mass flow controller rated at between 20 and 500 sccm Figure 5 5 depicts a typical installation and provisional user vacuum equipment and connections Ignition Pressure gt 10 mT A Exhaust Cooling Air Operating Pressure 2 to 200 mT Capacitance Manometer Vacuum Process Chamber or Forline Base Pressure lt 0 1 mT Feed Gases 02 N2 Ar Mass Flow Controllor s Additional Services Water 0 25 GPM at 50 PSI AC Power 120 VAC 1 Amp RF Supply AE HFV Series Generator Figure 5 5 Typical installation A WARNING Do not attempt to ignite the ICP source at inlet pressures below 10 mTorr or under zero flow or uncontrolled gas flow conditions It is strongly advised that you interlock the operation of the ICP source and HFV generator against active gas flow and minimum pressure set points per usual vacuum processing practices Failure to do so may lead to atmospheric arcs within the ICP source assembly and damage to the ICP source unit A WARNING Read all of the following instructions before proceeding with the initial operation of the ICP source and HFV generator 5707016 B 5 9 Advanced Energy Complete the following steps to initially turn on and ope
34. mponents Two thermoswitches which are connected in series with the interlock loop monitor the ambient air temperature near the top panel of the ICP source Should the ICP source fans fail or should the cooling air flow and temperature be inadequate the thermoswitches will interrupt the HFV as should be indicated by the INTERLOCK OK LED on the HFV front panel 14 Faulty User Generator port connections User signals to the HFV are made through the User Generator connections at the ICP source Loose connections may interrupt these control and interlocking signals Inspect and tighten all connections to ensure that these signals are being communicated appropriately 15 Condensation in ICP source due to wet or humid conditions Condensation may occur within the ICP source assembly if the device is maintained under the following collective conditions The ICP source is operated in very wet or humid environments Chilled cooling water is allowed to flow in the unit when it is not being operated e Forced air cooling is turned off while the unit is not being operated Should the source be activated when condensation has occurred atmospheric arcing along the induction can result Make certain that the ICP source is operated within specified environments and that forced air is always present on the ICP source when it is installed in a working system see Environmental Specifications on page 3 3 Note Condensati
35. n is approximately 10 mT PHYSICAL SPECIFICATIONS Table 3 2 describes the physical specifications of the ICP Source Table 3 2 Physical Specifications Description Specification Size 28 3 cm H x 48 3 cm W x 23 5 cm D 11 125 H x 19 W x 9 25 D Weight lt 15 9 kg lt 35 1b Materials Chassis and flanges Aluminum Water cooled end flanges Nickel plated brass or anodized aluminum Discharge Tube AE 3151800 001 Vycor Induction Coil Silver plated copper 5707016 B 3 1 Advanced Energy Table 3 2 Physical Specifications Continued Description Connector Cable Specifications Specification RF input HN type AC input 120 Vac User Port 15 pin shielded male subminiature D Generator Port 15 pin shielded female subminiature D Coolant Yu Female threaded NPT Vacuum Components O rings 2 AE 3151800 001 Silicone rubber orange Flanges ISO KF50 50 mm quick flange connection ELECTRICAL SPECIFICATIONS Table 3 3describes the electrical specifications for the ICP Source Table 3 3 Electrical Specifications Description RF Power Specifications Specification Frequency 1 765 to 2 160 MHz RF Power 2 kW continuous 3 kW peak AC Power Specifications 106 120 Vac 1 A OPERATIONAL SPECIFICATIONS Table 3 4 describes the operations specifications for the I
36. nce of the ICP as the inlet pressure is adjusted higher or lower It may be possible to make adjustments to the FixedMatch of the ICP in order to facilitate pressures outside the factory set range Contact AE if your process requires such changes see AE Global Support on page 6 9 8 FixedMatch hybrid failure The ICP source uses a FixedMatch to provide a near 50 Q impedance to the HFV generator Failure of the FixedMatch affects discharge ignition and operation To check the condition of the FixedMatch remove all ac power from the HFV power supply and the ICP source Remove the perforated top cover of the ICP source and visually inspect the hybrid for evidence of burns arcs open connections or other damage If damage is evident or suspected contact AE for technical support and service see AE Global Support on page 6 9 9 HFV DDS tuning settings not optimal The HFV generator uses Direct Digital Synthesis DDS to determine the optimal frequency for driving the ICP source Program settings have been optimized for normal operation but not necessarily for all viable ranges of operation Consult your HFV manual for how to program the DDS settings or contact AE for technical support and service for your specific needs see AE Global Support on page 6 9 10 FixedMatch The FixedMatch is designed to accommodate a limited range of ICP hybrid requires source operation Outside this range the HFV will run
37. nstalled according to the following requirements WARNING Operating and maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken Conditions of Use This product is a component and has no intrinsic function It must be used with a high voltage power supply that is compliant with applicable requirements and it must be incorporated into a larger system that provides appropriate safety measurements 1 4 5707016 B ICP Source Chapter 2 Theory GENERAL DESCRIPTION Advanced Energy s new Inductively Coupled Plasma ICP Source generates a high density plasma for the remote delivery of activated gaseous species The compact unit easily adapts to either new or existing vacuum systems The primary benefits of the ICP source include e Reactive Sputtering Enhanced rates of deposition improved film stoichiometry reduced target arcing and expanded domain of operation for deposition of oxides nitrides and similar dielectric coatings e Surface Treatment and Plasma Enhanced Chemical Vapor Deposition Remote generation of reactive species for altering surface properties of materials by reactive substitution i e surface oxidation reactive etching plasma enhanced chemical vapor depo
38. nual CE label 8 N 8 5707016 B ICP Source Non ionizing radiation 1030 Hot surface 1309 SAFETY Do not attempt to install or operate this equipment if you have not first acquired proper training e Ensure that this unit is properly grounded e Ensure that all cables are properly connected e Verify that input line voltage and current capacity are within specifications before turning on the power supplies Use proper ESD precautions e Operate this device only within the specified range of vacuum pressure delivered power and duty cycle e BE CAREFUL AROUND THIS EQUIPMENT WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it WARNING Excessive ozone could be generated by components within the unit if you operate it beyond specified pressure ranges PRODUCT SAFETY COMPLIANCE This product is designed to comply with the following standards and directives 5707016 B 1 3 Advanced Energy Directives This product is a component and has no intrinsic function It must be used with a high voltage power supply that is compliant with applicable requirements and it must be incorporated into a larger system that provides appropriate safety measures This device must be installed and used only in compliance with applicable requirements Installation Requirements This unit must be i
39. of input power before working on this unit or anything connected to it Before making any input power connections to the ICP source turn off system circuit breakers supplying input power to the RF generator Ensure that the circuit breaker on the RF generator is also in the OFF position Connecting Generator and User Port Connections With the RF generator power off the connections are made from the RF generator User port to the ICP source Generator port with the supplied 15 pin cable The user then makes the connection to the ICP source User port The functions of the pins of 5 6 5707016 B ICP Source the ICP source User port connection reflects those functions of the RF generator User port connections Please refer to the Interconnect Schematics for the RF generator supplied with your ICP source Connecting Power Inputs WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Complete the following steps to connect the input power to the ICP source 1 Inspect the center conductor on the RF coaxial cable that mates to the ICP source to be certain that the center conductor has not been damaged in any way or unduly extruded into the cable assembly 2 Thread the HN type RF connection of the power cable to the HN type RF input connection of the ICP source securely 3 Connect the RF power cable to the AE RF generator per its inst
40. on can also lead to thermal shock and failure of the discharge tube 16 Foreign object in ICP source assembly High RF voltages and currents circulate within the ICP source assembly At no time should a foreign object be inserted or placed within the ICP source Such objects can lead to arcs that may damage the ICP unit and associated equipment AE WORLD WIDE WEB SITE For additional product information and troubleshooting procedures consult Advanced Energy s World Wide Web site e http www advanced energy com 6 8 5707016 B ICP Source AE GLOBAL SUPPORT Please contact one of the following offices if you have questions Table 6 2 Global Support Locations Office AE World Headquarters 1625 Sharp Point Drive Fort Collins CO 80525 USA Telephone Phone 800 446 9167 or 970 221 0108 or 970 221 0156 Fax 970 407 5981 Email technical support aei com AE Voorhees NJ 1007 Laurel Oak Road Voorhees NJ 08043 USA Phone 800 275 6971 or 856 627 6100 Fax 856 627 6159 AE California 491 Montague Expressway Milpitas CA 95035 USA Phone 408 263 8784 Fax 408 263 8992 AE Austin Phone 512 231 4200 8900 Cameron Road Fax 512 719 9042 Suite 100 Austin TX 78754 AE GmbH Phone 49 711 77927 0 Raiffeisenstrasse 32 Fax 49 711 7778700 70794 Filderstadt Bonlanden Germany AE Japan KK Phone 81 3 32351511 TOWA Edogawabashi Fax 81 3 32353580
41. ontrols USER CONTROL CONNECTIONS The user controls the HFV generator and ICP source through connections to 15 pin subminiature D ports on the ICP source assembly The User port connection from the HFV is connected to the Generator port of the ICP source The signals of the ICP source User port are identical to those of the HFV generator User port This connection is made in order to interlock the ICP source with the operation of the HFV generator by means of a series interlock connection between pin 11 of both the Generator port and User port on the ICP source Generator Port Figure 4 1 shows the Generator port connector Pin 1 Pin8 Ping _ pin 15 1441 Figure 4 1 Generator port connector The Generator port is a 15 pin shielded male subminiature D connector Refer to the User port connector description of the HEV 8000 or HF V L 3 kW generator manual for specifications and functions of signal and return pins User Port Figure 4 2 shows the User port connector 5707016 B 4 1 Advanced Energy Pin 1 Pin 9 Pin 8 Pin 15 00000000 00000909 1061 Figure 4 2 User port connector The User port is a 15 pin shielded female subminiature D connector Refer to the User port connector description of the HFV 8000 or HFV L 3 kW generator manual for specifications and functions of signal and return pins Interlocks and Conditions The ICP source is interlocked to the operation of the HFV
42. ould be lit 6 On the User port connection provide a closed connection between pins 4 and 9 to satisfy the RF enable condition The RF ENABLE indicator LED HFV front panel should be lit 7 On the User port connection provide a 3 to 5 Vdc max of 10 Vdc signal between pins 5 and 6 to initially start the HFV power supply and ICP source This should correspond to a load power of about 900 to 1500 W The ICP source should be ignited as made evident by a dim glow from within ICP source assembly Within about a second the HFV should scan in its frequency range in order to find that frequency that allows the setpoint power to be delivered to the ICP source Once this condition is met the SET POINT indicator LED on the HFV front panel should be lit Shortly thereafter the HFV generator should continue to tune to a frequency between 1765 and 2160 kHz as indicated on the front panel of the generator and a minimum point of reflected power typically less than 500 W 5 10 5707016 B ICP Source The HFV generator is configured to continuously adjust its frequency to minimize the level of reflected power even after the load power setpoint condition has been met This is referred to as the Continuous Tune Mode As such the user may see slight dynamic deviation in the HFV operating frequency of about 10 to 50 kHz Such deviation should not influence the operation or output performance of the ICP source Note Other tune modes are avail
43. port and that unit is found to be functional you will be charged a re test and calibration fee plus shipping charges To ensure years of dependable service Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide WARRANTY Advanced Energy AE products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory please see warranty statement below for details 6 10 5707016 B ICP Source Author In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged For a warranty claim to be valid it must Be made within the applicable warranty period e Include the product serial number and a full description of the circumstances giving rise to the claim Have been assigned a return material authorization number see below by AE Global Support All warranty work will be performed at an authorized AE service center see list of contacts at the beginning of this chapter You are responsible for obtaining authorization see details below to return any defective units prepaying the freight costs and ensuring that the units are returned to an
44. rate the ICP source for O and or N service as applicable to AE Model 3151800 001 1 Check to ensure that the ICP source fans are operating and unobstructed and that sufficient cooling water is flowing to the unit 2 Verify that the ICP source is under vacuum with a base pressure of less than 5 mTorr with no flowing gases 3 Provide a gas flow of either Ar No or O to provide an inlet pressure of between 10 and 100 mT 4 Follow the start up procedure for the HFV generator Note If any problems arise during the proceeding process steps shut off the HFV power supply and refer to the Troubleshooting section of the HFV manual a Make sure the STANDBY STOP switch on the HFV front panel is in the stop position b Select load power regulation by means of the selector switch on the rear of the generator c Connect your User port cable to the User port of the ICP source to access the user functions of the HFV generator d Turn on the power to the generator from the circuit breakers on the rear of the generator Note The front panel display of the generator should now be active and the LOAD REGULATION indicator should be lit e Turn the STANDBY STOP switch on the front panel to the standby position The generator should now be under control of the User port 5 On the User port connection provide a closed connection between pins 11 and 12 to satisfy the interlock The INTERLOCK indicator LED on the HFV front panel sh
45. remove each screw individually from the assembly This measure helps to release pressure on the O ring seal evenly preventing the end flange from resting against the end of the discharge tube and placing undue stress on the tube 3 Using clean room gloves gently rotate approximately 30 the ICP source discharge tube to make certain the O rings have not seated to the surfaces of the ICP sealing grooves 4 Using clean room gloves gently apply pressure to one end of the discharge tube with one hand while securing the lateral motion of the discharge tube with the other This is done to loosen the O ring seal on the surface of the discharge tube 5 After moving the discharge tube laterally about 1 cm the user should be able to remove one of the O rings Note The O rings are stretched over the cylindrical discharge tube and will present some tension to lateral displacement of the discharge tube Do not attempt to over force the tube in the assembly 5707016 B 5 15 Advanced Energy 6 With one O ring removed gently and cautiously draw the discharge tube out of the assembly Do not angle or twist the tube in the assembly Be careful not to mechanically shock the discharge tube in the assembly to remove it or dislodge The discharge tube is especially susceptible to chipping or shattering at its ends 7 Inspect the discharge tube for wear cracks and deposits along its interior and exterior surfaces 8 If available use a bor
46. ructions Refer to the HFV manual 4 Connect the supplied three wire ac power cord to the ICP source service panel 5 Connect the ac power cord to a 115 Vac power source Note The cooling fans will be operable when ac power is supplied to the fans If the fans do not operate immediately halt the installation of the ICP source and refer to Troubleshooting on page 6 1 to resolve the problem WARNING Use the three wire ac power cord with the ground prong as supplied or an equivalent Do not remove the ground prong or attempt to defeat it with an adaptor Note Connections must be made securely to prevent excessive RF emissions 5707016 B 5 7 Advanced Energy OPERATION Operating Overview The ICP source is an electrical load device that works in concert with the AE HFV series RF generator to ignite and sustain a discharge The HFV is a variable frequency generator 1 765 to 2 16 MHz that senses forward and reflected power levels and makes dynamic adjustments to its operating frequency in order to provide the setpoint power to the ICP source and to minimize reflected power levels for efficient power conversion The ICP source has been configured and optimized to operate effectively over a range of power and pressure This range of operation is determined by the following Frequency band of the HFV generator e Discharge tube scale and induction coil design Series and shunt capacitance of the passive fix
47. s cleaning or ashing of the surface of the work piece To assist in PECVD processes chemically active and or inert carrier gases are introduced through the ICP source The activated species may be combined with additional depositing gases or vapors injected downstream of the ICP source and in proximity to the work piece 2 4 5707016 B ICP Source Advanced Energy s Inductively Coupled Plasma Source JA Ps ra i i S dary d iti 5 econdary deposition Msg gas and or vapor N y distribution manifold User s Deposition Process Chamber Workpiece Ez A Figure 2 3 Surface treatment and PECVD 5707016 B 2 5 Advanced Energy 2 6 5707016 B ICP Source Chapter 3 Specifications FUNCTIONAL SPECIFICATIONS Table 3 1describes the functional specifications for the ICP Source Table 3 1 Functional Specifications Description Specification Delivered RF Power Continuous Operation 2 kW with 23 C ambient air De rated for higher ambient air temperatures by 25 W C above 23 C Cycled ON OFF with Duty Cycle 2 kW net time averaged power Up to 3 kW peak power with 1 min ON time Gas Compatibility and Operating Pressure AE 3151800 001 Oxygen compatible Pressure measured at inlet flange Ar 2 to 200 mT O No and He 2 to 200 mT alone or in combination Ranges of operation may be modified contact AE for details Pressure for ignitio
48. set point and inlet pressure 5 12 5 14 replacement discharge tube and seals 5 17 O rings 5 16 replacement parts 5 16 S safety precautions 1 3 safety warning installing 5 7 schematic diagram 2 2 spacing requirements 5 2 specifications 3 1 ac power 3 2 connector cable 3 2 continuous operation 3 1 coolant contaminates 3 4 coolant flow rate 3 4 coolant pressure 3 4 coolant requirements 3 4 coolant temperature 3 4 cooling 3 4 cycled ON OFF with duty cycle 3 1 delivered RF power 3 1 environmental 3 3 3 4 functional 3 1 gas compatibility and operating pressure 3 materials 3 1 operational 3 2 physical 3 1 RF power 3 2 size 3 1 vacuum components 3 2 weight 3 1 surface treatment and PECVD 2 5 surface treatment and plasma enhanced chemical vapor deposition PECVD 2 1 surface treatment and plasma enhanced chemical vapor deposition PECVD 2 4 symbols in user manual 1 1 on unit 1 2 T theory of operation 2 1 troubleshooting 6 1 fault tree fault tree 6 3 fault tree causes and corrections 6 6 U unpacking 5 1 user manual icons used 1 1 symbols used 1 2 type conventions 1 1 user manual feedback 1 v user port 4 1 connector 4 2 V vacuum connections 5 5 processing 2 3 Index ii 5707016 B Advanced Energy vacuum connections 5 3 5 5 vertical placement 5 3 W warranty authorized returns 6 11 filing a claim 6 10 returning units 6 11 statement 6 11 web site AE 6 8 Index
49. sition PECVD and low energy ion sputtering The ICP source is designed primarily for applications where a remote source of atomic oxygen or reactive nitrogen is desired but may also be configured for operation with fluorine bearing compounds The air and water cooled plasma source contains its own compact fixed match and uses a remote power supply AE s HFV series variable frequency power supply This robust and versatile plasma source gives process engineers great flexibility and control of a wide range of reactive plasma chemistries at a number of critical points within the process stream THEORY OF OPERATION Figure 2 1 shows a schematic diagram of the ICP source The source has a 3 OD discharge tube that is sealed with elastomer O rings at each end The discharge tube is made of materials that block ultraviolet light radiation emitted by the gas discharge thereby preventing the generation of harmful ozone within the ICP source chassis and work environment The discharge tube may be readily removed and serviced as necessary by removing the end flanges without opening the ICP source enclosure or disrupting any electrical components 5707016 B 2 1 Advanced Energy Exhaust cooling air Advanced Energy s Inductively Coupled Plasma Source gt User s Vacuum and Process Chamber Feed gases Activated gases FIXED MATCH 120 Vac fan power Cooling water input Cooling water return
50. t internal temperature of the ICP is below 65 C Ensure that interlock conditions on the HFV are satisfied The front panel Interlock OK LED is lit on the HFV unit when the interlock loop is closed 4 No RF enable Closure of the RF Enable loop pin 4 to 9 of the 15 pin User port is necessary to command the RF power Verify that the User Generator port connections are securely attached to ensure the loop is closed The front panel RF ON LED is lit on the HFV unit when the RF enable loop is closed 5 Load power If the RF command is enabled the setpoint signal needs to be greater setpoint signal is less than 220 mV in order for the RF to be turned on than 220 mV 6 Open RF path Bad cables worn connectors and damaged components in the ICP source unit are some examples of conditions that prevent power delivery A limited test can be done by replacing the ICP source with a 50 Q dummy load to test the RF cable connections 6 6 5707016 B ICP Source Table 6 1 Fault Tree Causes and Corrections Continued Identification 7 Pressure too high or low Probable Cause and Correction The ICP source has been configured to operate in a range of inlet pressures Discharge ignition and reliable HFV tuning may be troublesome if you attempt to operate the source outside this range Begin operation of the ICP source within the prescribed normal range of operation and investigate the ignition performa
51. tly and are fastened tightly 4 Check to determine whether any system related circuit breakers have been tripped 5 Ensure there is input power to both the generator and the ICP source and ensure the input power meets specifications 6 Ensure ground connections are adequate and secure 7 Ensure that vacuum connections are leak free and that vacuum pressure and gas flow conditions meet specifications Checks with the Power On 1 Check the unit s input and remote power connections to ensure the proper power is being supplied to the unit 2 Check the LEDs on all units to determine that the proper ones are lit 3 Check for fan operation and air flow on the ICP source TROUBLESHOOTING Faults with the ICP source may be a result of either the HFV generator or the ICP source The following troubleshooting guide is for faults that are related to the ICP source Please refer to troubleshooting guide for the HFV for problems related to the generator 5707016 B 6 1 Advanced Energy Troubleshooting the ICP Source The following fault tree in Figure 6 1 through Figure 6 3 and Table 6 1 will assist you in identifying the source of difficulty should your ICP source fail to operate properly To use the tree identify the problem you are experiencing and then use the numeric cause and correction reference in Table 6 1 on page 6 6 6 2 5707016 B ICP Source Base vacuum pressure not achieved Loss of va
52. transmission line and to provide effective power transfer to the ICP load Refer to the HFV user manual supplied with your ICP source for more details on its installation operation and programming features The ICP source uses a FixedMatch element that has been optimized for gas chemistries pressures and power levels commonly used by that particular ICP source However if the impedance of the ICP falls outside the typical ranges of operation the 2 2 5707016 B ICP Source fixed match may be discretely trimmed by adding additional capacitance to the shunt or series capacitors Contact AE before considering or requesting such changes as poor matching and or dynamics may be caused by conditions not associated with the ICP source See AE Global Support on page 6 9 Tube materials and fixed match may be pre specified to accommodate a wide variety of gases and gas mixtures including but not limited to N O Ar He water vapor H 0 and mixtures thereof APPLICATION TO VACUUM PROCESSING The following figures illustrate the application of the ICP source to several vacuum based processes as discussed in the General Description Reactive Sputter Deposition Figure 2 2 illustrates the use of an ICP source to enhance a typical reactive sputter deposition system used for deposition of oxide and nitride films such as aluminum oxide aluminum nitride or silicon dioxide Feed gases Inductively coupled
53. ult tree continued be vie seeks Gee beeen 2 KK KK KK kk oh oes bees 6 5 5707016 B ix Advanced Energy x 5707016 B ICP Source List of Tables Functional Specifications_ kK KK kK KK KK KK KK KK KK KK eed KK KK KK KK eS 3 1 Physical Specifications kk kk KK kK KK KK KK KK KK KK KK KK KK KK KK eee ees 3 1 Electrical Specificalions_ kk kK kK KK KK KK KK KK KI KK KK KK KIRI de KK KK K8 3 2 Operational Specificatio0ns_ kk KK KK KK KK KK KK KK KK KK ee eee KK 3 2 Climatic Specifications_ kk kK eee KK KK KK ke 3 3 Cooling Specifications kk kk kK kK KK KK KK KK KK KK KK KK KK KK KK KK KK kk 3 4 Available ICP Source End Flange Configurations_ RR RR KK KK 5 5 Replacement Discharge Tube and O rings kk kK KK KK KK es 5 16 Fault Tree Causes and Correciilons_ KK KK KK KK KK KK KK KK KK KK KK 6 6 Global Support Locations kk kK KK KK KK KK KK KK KK KK KK KK KK KK KK KK Y 6 9 5707016 B Ki Advanced Energy xii 5707016 B ICP Source Chapter 1 Introduction READ THIS SECTION To ensure safe operation read and understand this manual before attempting to install or operate this unit At a minimum read and heed Safety on page 1 3 of this chapter INTERPRETING THE MANUAL The following sections explain the type conventions icons and symbols that appear in t
54. up against its adjustment frequency limit and the forward and reflected power will both rise in order to meet the Load Power Setpoint It is possible to make adjustments to the FixedMatch of the ICP source in order to facilitate pressures outside the factory set range Contact AE if your process needs require such changes see AE Global Support on page 6 9 11 Load power In some pressure flow conditions and for certain gases there is a setpoint too low for stable operation minimum required power level needed to sustain the plasma in an inductively coupled state Increase the setpoint power until the HFV generator settles into a stable RF frequency 50 kHz and the reflected power drops below 500 W If the HFV generator operation is limited by its frequency range 1 765 to 2 16 kHz refer to identifications 9 and 10 of this table 12 Unstable pressure and or flow settings The HFV DDS tuning algorithms are always active and can be sensitive to spikes or drop outs in pressure Unstable pressure conditions which are usually sporadic and slow in their variation will lead to variation in the HFV and ICP source operation 5707016 B 6 7 Advanced Energy Table 6 1 Fault Tree Causes and Corrections Continued Identification 13 Forced air cooling failure leading to over temperature fault Probable Cause and Correction Forced air is used to cool the ICP source and protect internal co
55. x of dissociated gases metastable and other reactive species prior to their injection into the sputter deposition process The pre activated gases are allowed to flow into the deposition process chamber through a high conductance distribution manifold preferably made of quartz pyrex alumina or similar dielectric vacuum compatible material The manifold introduces the activated gases in close proximity to the work piece surface When compared to conventional reactive sputter deposition the use of the ICP source results in e Reduced probability of target poisoning when depositing dielectric films at high deposition rates e Reduced O and N gas flows for the process e Improved film qualities such as hardness visible light transmission and material stoichiometry e A wider range of DC magnetron operation Moreover since the ICP source is a non electrode high density plasma source it requires little preventative maintenance when used in production Surface Treatment and Plasma Enhanced Chemical Vapor Deposition PECVD Figure 2 3 shows an ICP source used to assist in surface treatment and plasma enhanced chemical vapor deposition PECVD processes In this application working gases are activated by the ICP source which is closely coupled to the processing vacuum chamber The activated gases generated by the ICP source are allowed to diffuse to the work piece surface where they may facilitate etching chemical substitution reaction

Inductively Coupled Plasma Source (ICP)

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