UZM User Manual
Contents
1. 2 1 Design Details Base Material Steel Bearings Linear ball bearings Drive Mechanism 2 wedge design with transmission ratio of 4 1 Backlash compensated leadscrew Drive Screw Pitch 4 mm Reduction Gear 10 1 Feedback Screw mounted rotary encoder 2 000 cts rev index pulse Limit Switches Mechanical Origin Optical at center of travel Cable Length 3 m included Vacuum Compatibility On request vacuum compatible version of UZM160PE 05 available up to 109 hPa Additional motor mounted gear on some drive options NOTE This product complies with the RoHS directive Restriction of Hazardous Substances RoHS Compliant gt Newport EDH0158En1040 12 1 5 2 Experience Solutions UZM Series Vertical Linear Stages m Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects A2. Vertical Linear Stages PRENTA ES ESP LS Compliant GO USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed UZM Series Vertical Linear Stages Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K A EDH0158En1040 12 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from Incorrect usage Load on the stage greater than maximum specified load Carriage
3. 4 Phase 2 4 Tachometer 5 Phase 3 5 Motor 6 Phase 3 6 Motor 7 Phase 4 7 Motor 8 Phase 4 8 Motor 9 Common Phase 3 4 9 N C ufo 2 1 10 N C 10 NC Ge 11 Common Phase 1 2 11 N C o 12 N C 12 N C e e 13 Mechanical Zero 13 Mechanical Zero T 14 Shield Ground 14 Shield Ground 5 E 15 Index Pulse I 15 Index Pulse I d o9 Q4 26 0 V logic 16 0 V logic 17 End of Run 17 End of Run 18 End of Run 18 End of Run 19 Encoder Phase A 19 Encoder Phase A 20 Encoder Phase B 20 Encoder Phase B 21 Encoder Power 5 V 21 Encoder Power 5 V 22 0 V Encoder 22 0 V Encoder 23 Encoder Phase A 23 Encoder Phase A 24 Encoder Phase B 24 Encoder Phase B 25 Index Pulse I 25 Index Pulse I gt Newport Experience Suns 9 EDHO158En1040 12 15 UZM Series Vertical Linear Stages m Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit h
4. Max Torque 20 Nm Where Q Off center load N D Cantilever distance m gt Newport EDH0158En1040 12 1 5 4 Experience Solutions UZM Series Vertical Linear Stages 3 5 Stage Weights The weight indicated into the below table is the average value for stages without any cable Weight Ib kg UZM160 47 4 21 5 3 meter MMCABLE 3 Cable 1 54 0 7 3 meter MCAB 3 Cable 1 32 0 6 The weight difference between drive units is not significant m Drive 4 1 gt Newport Experience Solutions Stepper Motor Drives Stepper motor driven stages are offered in two variants One mini step drive version UZM160PP 05 with resolutions of 0 05 pm This combines high speed positioning and smooth displacement from 1 10 step per encoder count driving mode For ultra smooth low speed positioning micro stepping up to 250x is possible using our controllers One full step version UZM160PE 05 with step down gear and resolu tions of 0 05 pm This is primarily designed for applications requiring the position to be maintained within the stage s resolution when power is switched off UZM160PE 05 Mini Step Drive Is used for stepper motors when 1 pulse emitted by electronic corresponds to theoretical physical motion of a fraction of a full step of the motor For these stages a mini step equals 1 10 of a full step Full Step Drive Is used for stepper motors when 1 pulse emitted b
5. nine ees 4 3 4 Load Characteristics and Stiffness essen 4 3 5 pege Welghts 5 5 WI TER TREE ee sie aed EIEEERUR THER SER RR TURIS 5 40 DRIVE nn ee er enone a Sind 5 4 1 Stepper Motor Drives oni eene cscs REEF ER EFE ERR FRE RR Es 5 42 DC Motor Drive siio toe nie ren eite Anta hs et eei e eet eor re end 6 5 0 MOlOP 20m 6 5 1 UEAIPP Motor Characteristics eeessessseseeseee eene 6 5 2 Command Signals for the Stepper Motor 6 5 3 UE404CC Motor Characteristics essere 6 5 4 Command Signals for the DC Motor essere 7 5 5 Sensor POSItIOD race ote eite eee eon Lex ERR Pe oinin i 5 6 Feedback Signal POSITION iiie item s 8 5 7 PINOS eer eerie tenuit eine ier din 9 6 0 Connection to Newport Controllers 10 6 1 Warnings on Controllers resserre 10 6 2 Connection iiec anil niin deanna deinen 11 VE EE 11 6 4 MMCGABELES Cable iio aiisacenndnin n eie aeris 11 6 5 MCAB 3 Cable itii trt t RR CP TOI D TO TEE I EXC TELE ER HER TERR ERR T 12 7 0 Connection to Non Newport Electronics 13 Tel COMME CH ONS sor e rehenes 13 CY Newport Experience Solutions iii EDH0158En1040 12 15 UZM Series Vertical Linear Stages EDH0158En1040 12 15 8 0 Stage Mounting eerte 14 8 1 Stage MOUNTING ss 14 8 2 Interfaces Disassembling ss steel eH ERO REPRE PHELE 14 8 3 Interface Plates Mou
6. 168 g oO o o o o 3 M f 4 SLOTS o 26 6 5 Z i o 0 ON 11 44x4 0 290 5 x101 6 Y y Y f Le 12 99 330 gt MODEL SHOWN UZM160PE 05 DIMENSIONS IN INCHES AND MILLIMETERS i lt 6 30 160 39 10 4 1328 105 45 y A e 37 8 5 37 9 5 gt Le in lt 5 12 130 gt lt 4 96 126 gt lt MODEL METRIC L gt M UZM160PP 05 6 97 177 M UZM160PE 05 8 58 218 M UZM160CC 05 9 33 237 M UZM160MS 05 9 06 230 gt Newport Se an 15 EDH0158En1040 12 15 UZM Series Vertical Linear Stages 10 0 Maintenance 10 1 10 2 10 3 EDH0158En1040 12 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The UZM160 stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The UZM160 stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your UZM160 stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in
7. indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user gt Newport EDH0158En1040 12 1 5 vi Experience Solutions UZM Series Vertical Linear Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Neverthe
8. speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions UZM Series Vertical Linear Stages Table of Contents KT rte GU PIN CHO TIG terne FOR teens Gee Cet vr i exec He Ord es ii EC Declaration Or CONOMIE En ee Ee v D finitions and Symbols 3 5 e ne ema HELFER RENE ERREUR EES vi KE GS TR S vii CAUTIONS session vi catseuv M S viii 1 0 Introduction 1 2 0 Geht 2 2 1 Design Details icici ii RI RR n E EEE Eaa 2 3 0 Characterislics eeee eret 3 Sil Definitions osse ie ERR SER RHEUR EE e e REQUE mS 3 3 2 Mechanical Specifications ns 4 3 3 Load Specification Definitions
9. this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your UZM160 stage to Newport once a year for recalibration to its original specifications D Newport 1 6 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 1 T EDH0158En1040 1 2 15 NNevvport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055
10. Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
11. H0158En1040 12 15 UZM Series Vertical Linear Stages Di Description UZM160 vertical translation stages offer high precision vertical translation for applications requiring submicron resolution accuracy High resolution vertical motion is achieved with a precision inclined plane design consisting of two opposing wedges which move past each other by means of inclined ball bearing races A precision leadscrew translates the lower edge horizontally and this motion is converted into vertical translation by the inclined ball races between the two wedges For automatic return to a pre determined height all UZM160 stages include a center home position Position measuring is performed with a 2000 pts rev encoder integral with the motor shaft Unlike vertically mounted translation stages UZM160 stages center the mass of the payload directly over the bearings avoiding positioning errors caused by cantilever loads The low profile design of these stages make them particularly suited for space limited XYZ positioning applications The modular design of UZM160 stages brings you the flexibility to choose the drive configuration that best matches your specific application requirements DC motor or stepper motor driven versions with mini step or full step drive options For optimal performance we recommend the use of our motion controllers UZM160 stages are supplied with a 3 meter cable for connection to our motion controllers
12. Phase A Encoder Phase A Encoder Phase B Encoder Phase B Direction Motion gt Direction Direction Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Hp HEC ME ED IEN Newport User Stage Encoder Phase A Pin 19 e gt p Encoder Phase A I Pin 23 gt Encoder Phase B Pin 20 I gt pa Encoder Phase B L Pin 424 i E Output Signals Index Pulse Phasel Pin 15 7 gt Ep T Index Pulse Phasel Pin 25 1 S E 21 if 5V5 Encoders if 150 mA max amp Sensors i 0v Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 gt Newport EDH0158En1040 12 1 5 8 Experience Solutions UZM Series Vertical Linear Stages 5 7 Pinouts The SUB D25 connection for the UZM160 stages is given in the following table UZM160PP 05 amp PE 05 UZM160CC 05 UE41PP UE404CC 1 Phase 1 1 Tachometer 2 Phase 1 2 Tachometer 3 Phase 2 3 Tachometer
13. as been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts gt Newport EDH0158En1040 12 15 10 Experience Solutions UZM Series Vertical Linear Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may b
14. e Solutions 1 1 EDH0158En1040 12 15 UZM Series Vertical Linear Stages These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MMCABLE 5 7 m MMCABLE 7 or 10 m MMCABLE 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk For cable lengths in excess of 3 meters we recommend the MMCABLE REG to ensure a high quality regulated 5 V supply to the stages 25 PIN SUB D ET FEMALE 25 PIN SUB D AE 21 MALE gt Se 54 o jg lt DIMENSIONS IN INCHES CC AND MILLIMETERS E 24 62 gt This regulator is available as an option Please note that for best efficiency this regulator should be attached to the stage to re adjust the 5 V coming from the controller through the long cable 6 5 MCAB 3 Cable lt 2 28 58 gt DISCONNECTED LOCKING gt KNOBS amp 1 CABLE CONNECTOR STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE 21 50 38 CABLE IN MOTION 23 78 96 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standa
15. e connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables Our stages are delivered with a MMCABLE 3 or MCAB 3 3 meter cable according to the UZM160 stage you bought This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers The cable supplied with your UZM160 stage is given in the following table Stages Supplied Cable UZM160PP 05 MMCABLE 3 UZM160PE 05 MMCABLE 3 UZM160CC 05 MCAB 3 6 4 MMCABLE 3 Cable lt 2 60 66 gt DISCONNECTED LOCKING gt KNOBS I 9 39 10 6 STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE 21 97 50 CABLE IN MOTION 24 72 120 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MMCABLE 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application D Newport Experienc
16. gnetic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director V EDH0158En1040 12 15 UZM Series Vertical Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note
17. hase 4 Motor 8 S m Ge Phase 4 Motor Y to Wt Y 14 i 4 NE Ground Ground 1 i C 4 16 a 0 V logic 0 V logic 13 m Mechanical Zero li Mechanical Zero 18 i 1 ri X ra Encoder Phase A Encoder Phase A 23 l Ls 1 Encoder Phase A Encoder Phase A 20 T Rm Encoder Phase B Encoder Phase B 24 tr it Encoder Phase B Encoder Phase B 15 E Index Pulse Index Pulse I 25 Ge i in Index Pulse I Index Pulse I 17 End of Run 2 End of Run D 18 m End of Run 2 End of Run 2 21 1 m 45 V Encoder 5 V Encoder 22 i X I 0V Encoder 0 V Encoder Connector Connector Connector Pap ES Cap Cap The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Newot Stage 1 Mechanical Zero Stage End of Run liq max 10 mA lin Max 16 mA V max 30 V V max 5 6 V K 56V 1f the Mechanical Zero output js not used a 1 kQ 0 25 W H resistor must be connected S Ee between pins 13 and 21 eee A Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 gt Newport Ep
18. ical Linear Stages 5 4 Command Signals for the DC Motor Motor Motor y Tachometer Tachometer Motor m Motor Tachometer Tachometer Displacement gt Direction Direction lt Displacement un LT T HI In the above drawings Motor signal is referred to Motor signal Tacho Generator signal is referred to Tacho Generator signal Direction When the stage moves in Direction the Motor voltage is higher than Motor voltage and Tacho Generator voltage is higher than Tacho Generator voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage and Tacho Generator voltage is lower than Tacho Generator voltage 5 5 Sensor Position Home Position Origin i at Center of Travel Range EOR Limit 4 EOR Limit Mechanical Zero Index Pulse Index Pulse a Stage Travel Range Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source D Newport Experience Solutions 7 EDH0158En1040 1 2 15 UZM Series Vertical Linear Stages 5 6 Feedback Signal Position Encoder
19. idity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year D Newport EDH0158En1040 12 15 viii Experience Solutions UZM Series Vertical Linear Stages Vertical Linear Stages UZM160 m Introduction This manual provides operating instructions for the UZM160 stage that you have purchased e UZMI60PP 05 e UZM160CC 05 UZMI60PE 05 UZMI60CC 05 RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the UZM160 stage UZM160PP 05 D Newport Experience Solutions 1 ED
20. less if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Experience Solutions vii EDH0158En1040 12 15 UZM Series Vertical Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high hum
21. ll Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com D Newport Experience Solutions 3 EDH0158En1040 1 2 15 UZM Series Vertical Linear Stage
22. nting sense 14 95 4 Assembly Pattern ec reti eects eee oben etes eee beaten tet 15 9 0 Dimensions 15 10 0 Maintenance notet tonto tonnes 16 I0 LMaintenangee 1 e ni dm nissan 16 10 2 ReDaltsa abo ORB TE NEE DUO HR UE 16 10 3 CAND TALLOW c isle oe essa ee Me a Pete cash vou stay v aA e 16 Service FON EE Diere eege NR 17 D Newport iv Experience Solutions UZM Series Vertical Linear Stages EC Declaration of Conformity M d SRE PSO Ka ONG fe K d S NS S A Ge Se KE E CN Gi SS Ka SUN s AS QU OS QU OAS Ie ONG x NAT XXe NA gt Newport Experience Solutions COSAS COS e Ee SOY NO UZM Series EC Declaration of Conformity following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description UZM Function Vertical Linear Stages Models M UZM160 CC 05 PE 05 PP 05 the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro ma
23. rd 3 meter cable MCAB 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MCAB 5 7 m MCAB 7 or 10 m MCAB 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk gt Newport EDH0158En1040 12 15 12 Experience Solutions UZM Series Vertical Linear Stages Di Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a UZM160 stage when it is used with non Newport controllers WARNING Newport guarantees C compliance of the UZM160 only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a UZM160 stage is used with non Newport controllers SUB D25M Connector UE41PP UE404CC g A 2 Common Phase 3 4 N C 10 i i 1 N C N C 1 Common Phase 1 2 N C 1 d 1 NC NC 1 D M Phase 1 Tachometer 2 o Phase 1 Tachometer 3 r3 i mi Phase 2 Tachometer 4 LE it e Phase2 Tachometer Y a i1 Y 5 i 1 et Phase 3 Motor 6 m i Phase 3 Motor L SE i i P
24. s 3 2 Mechanical Specifications Travel Range 9mm inimum Incremental Motion 0 2 um Uni directional Repeatability 0 9 um Bi directional Repeatability 5 9 um On Axis Accuracy 8 um or 4 um aximum Speed UZM160CC 05 amp UZM160PP 05 1 mm s UZM160PE 05 0 1 mm s Pitch 2 100 prad or 50 prad Roll 002 200 prad or 100 urad 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 2 To obtain arcsec units divide urad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D a D Cantilever distance a Construction parameter 3 4 Load Characteristics and Stiffness Cz Normal centered load capacity 200 N 300 N Cx Cx Axial load capacity 200 N Kax Compliance in roll 0 13 urad Nm Kay Compliance in pitch 0 65 urad Nm QxD
25. suis 13 EDH0158En1040 12 15 UZM Series Vertical Linear Stages m Stage Mounting 8 1 Stage Mounting WARNING Before to use a M UZM stage it is imperative to fix it Directly on a rectified working surface from holes located on the mounting plate On another stage directly or with a mounting interface But in no case the stage has to remain without fastening It is equally necessary to fasten the device to move on the carriage Directly Removing the plate on the top of the stage UZM160 25 HOLES 1 4 20 THD 1 0 25 4 SPACING 4 SLOTS 9 26 6 5 M UZM160 f ON 9 8x5 3 250x 135 5 25 HOLES M6 THD 98 25 SPACING Y 4 SLOTS 9 26 6 5 eS e E CZ ON 14 4 290 5x 101 6 o o o o d o o o o i E 1 o o o o 5 a d zy T O S y J BASE PLATE Fl DOE TE ON THE CARRIAGE MODEL SHOWN UZM160 DIMENSIONS IN INCHES AND MILLIMETERS CAUTION The working surface flatness directly influences stage accuracy and performance 8 2 Interfaces Disassembling Unscrew 4 CHc M6 screws square 5 0 in 128 mm Disassemble the top plate of the stage Disassemble the base plate fixed with 4 CHc M6 screws on 7 6 x 5 0 in 192 x 128 mm on the body stage 8 3 Interface Plates Mounting Make steps of Interfaces Disassembling chap
26. ter in the opposite order gt Newport EDH0158En1040 12 15 14 Experience Solutions UZM Series Vertical Linear Stages 8 4 Assembly Pattern Stacking UZM160 Series stages either together or with other Newport stage is easily accomplished Below are example schematics of the assembly pat terns used These interfaces are accessed by unscrewing and removing the upper and or lower plates of the stages see dimension drawing UZM160 TOP INTERFACE AFTER REMOVING THE TOP PLATE DIMENSIONS IN INCHES AND MILLIMETERS o RENE 4 HOLES M6 THD A ON SQR 2 48 63 DEPTH 24 6 A ee SN MADEIN FRANCE SERIAL NUMBER 4 HOLES M6 THD ON SOR 5 04 128 DEPTH 24 6 4 CLEARANCE HOLES FOR M6 SCREW ON 7 56x5 04 192x128 m Dimensions 25 HOLES 14 4 20 M6 THD DEPTH 35 9 SPACING 1 0 25 4 SLOTS 9 26 6 5 A ON 9 84 5 33 250 x 135 5 SUB D25M CONNECTOR BE 7 IS U je o o o o o E Fa d b d o o o o o 2 2 d Bu ll 175 155 zu Ki oO o o o o
27. y electronic corresponds to theoretical physical motion of 1 full step of the motor Stepper Motor Performance Specifications Resolution Speed Mot otor um mm s UZM160PP 05 0 05 1 UEAIPP UZM160PE 05 0 05 0 1 5 EDH0158En1040 12 15 UZM Series Vertical Linear Stages 4 2 DC Motor Drive One DC motor driven configuration is available UZM160CC 05 with a resolution of 0 05 pm This features a built in tachometer that provides superior motion control accuracy in higher dynamic applications UZM160CC 05 DC Motor Performance Specifications Resolution Speed Mot otor pm mm s UZM160CC 05 0 05 1 UE404CC m Motor 5 1 UE41PP Motor Characteristics Motor Angle by Step RMS Current per Resistance Inductance Newport C Phase A Q mH Utilization UE41PP 1 8 0 6 2 9 3 4 Full Step or Mini Step 5 2 Command Signals for the Stepper Motor 1 2 3 4 Phase e quse ree m Direction y g a Direction Phase 2 Le cl Phase3 PTS Ee EN Phase4 Direction Displacement gt Direction 5 3 UE404CC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Tachometer Voltage V Current A Current A Q mH Const V krpm UE404CC 30 0 7 1 2 18 6 6 6 3 gt Newport EDH0158En1040 12 1 5 6 Experience Solutions UZM Series Vert
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