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User Manual MP118E - Physik Instrumente

1. The air side cables E852B0072 and N661B0008 for the sensor connections of the vacuum compatible miniature positioners contain the electronics for the respectively connected sensors The electronics in the cables and the sensors in the miniature positioners are adapted to each other gt Make sure that the serial number of the connected miniature positioner matches the serial number on the connector shell of the cable see p 10 gt lf the cable or the miniature positioner has to be replaced contact our customer service department p 57 INFORMATION For the reproducibility of the positioning to be optimal all components must be affixed with zero backlash gt Make sure that miniature positioner and load are affixed with zero backlash LPS 24 Miniature Positioner MP118E Version 1 1 0 19 5 Installation I INFORMATION When handling the vacuum version of the miniature positioner appropriate cleanliness must be ensured gt Only touch the miniature positioner with powder free gloves gt f necessary wipe the miniature positioner clean 5 2 Mounting the LPS 24 NOTICE Screws that are too long The LPS 24 can be damaged by screws that are screwed in too deeply gt Observe the depth of the mounting holes p 63 gt Only use screws of the correct length for the respective mounting holes Figure 6 Position of the mounting holes in the cover of the base body LPS 24 5862 9 1110 5862 V 1120 left
2. cccccceecceeeeeeeeeaeeeeeeeeseeeeeeeeeseaeeeeesesaaees 14 3 6 2 Reference Point SWItCH cceccccccseecceceseceeseeeeeeseeeeceeseeeeeeseaeeeeeas 14 4 Unpacking 15 5 Installation o 5 1 General Notes on Installation cccccccssssseceeceeeseeeeeeeeeeseeeesseaeeeeeeseaseeeeeesaaees 17 5 2 Mounung Me Mes 2 ie casita cron Sorat shone curred daardvnaet E E a 20 5 3 Affixing the Load to the LPS 24 ccccccccscesscesecceecsceesseeeeeecesscceesesensecessscceeses 23 5 4 Setting Up a Multi Axis System cccccccseescececseeseeeeeseeeeeeeeesaeeeeeeseseaeeeeeesaaaees 25 5 4 1 General Information on Setting Up a Multi Axis System 27 5 4 2 Setting Up an XY Systemi sisii iriiria einiaid 27 5 4 3 Setting Up a Z System with an Adapter Bracket c cseeseeeeees 33 5 5 Connecting the LPS 24 to the Controller cccccccecseeeeeeeeeeeeeeeeeeeeeeeeeeeeeeaaees 37 5 5 1 Connecting the LPS 24 5862 9 1110 00 eecceceeeeeeseeeeeeeeeeeeeess 37 5 5 2 Connecting the LPS 24 5862 9 1230 0 cceeecsecceeeeeeeeesseeeeeeeeeeaes 38 5 5 3 Connecting the LPS 24 5862 V 1120 via Vacuum Feedin rough sssrinin EEr E e a 39 5 5 4 Connecting the LPS 24 5862 V 1230 via Vacuum FeediNrouUgD oerein E ar eE ee E 41 Start Up and Operation 45 6 1 General Notes on Start Up and Operation ccccccseeeeecseeeeeeeeeseeeeeeeeeeenaeeees 45 6 2 Perang Parame isana E T 47 6 3 Oia Me Le Siac es awe createed d
3. Your application and the LPS 24 can be damaged by uncontrolled oscillations Uncontrolled oscillations can be identified by the fact that the miniature positioner approaches the target position too slowly or too fast or does not keep it stable servo jitter If uncontrolled oscillations occur during the operation of the LPS 24 gt Immediately switch off the servo control system of the affected axis gt Check the settings of the servo control parameters NOTICE Destruction of the piezo actuators by electric flashovers ap Using the LPS 24 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuators of the NEXACT drive by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials e g metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the LPS 24 in environments that can increase the electric conductivity gt Only operate the LPS 24 within the permissible ambient conditions and classifications p 61 gt For operation in vacuum below 0 1 hPa Do not operate the LPS 24 during evacuation INFORMATION Shock like impacts can cause encoder malfunction gt Protect the miniature positioner from shock like impacts gt Carry out a reference move see user manual of the controller INFORMATION The positi
4. sensor in vacuum 15 pin motor LEMO to HD Sub D HD Sub D f m 15 pin motor 15 pin Sensor Sub D f 15 pin sensor Recommended E 861 1A1 E 861 1A1 E 861 1A1 E 861 1A1 controller driver Ask about custom designs 10 1 2 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the LPS 24 Area of application For indoor use only Maximum altitude 2000 m Relative humidity Highest relative humidity 80 for temperatures to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Storage temperature LPS 24 5862 9 1110 40 C to 85 C LPS 24 5862 V 1120 20 C to 70 C LPS 24 5862 9 1230 and LPS 24 5862 V 1230 20 C to 60 C LPS 24 Miniature Positioner MP118E Version 1 1 0 61 10 Technical Data Transport temperature Maximum bakeout temperature for vacuum compatible products Overvoltage category in acc with EN 60664 1 2007 VDE 0110 1 Protection class acc to EN 61140 VDE 0140 1 Degree of pollution acc to EN 60664 1 2007 VDE 0110 1 Degree of protection acc to IEC 60529 10 1 3 Maximum Ratings PI LPS 24 5862 9 1110 40 C to 85 C LPS 24 5862 V 1120 20 C to 70 C LPS 24 5862 9 1230 and LPS 24 5862 V 1230 20 C to 60 C LPS 24 5862 V 1120 130 C Sub D 15 m f vacuum feedthrough see Accessories p 13 125 C LPS 24 5862 V 1230 5
5. 7 Inthe single axis window switch on the servo mode for the axis by marking the Servo check box LPS 24 Miniature Positioner MP118E Version 1 1 0 51 6 Start Up and Operation i Ji 6 5 Discharging the Piezo Actuators of the Drive Discharging the piezo actuators of the drive If you want to pull out the connector of the drive from the controller 1 If you are working in closed loop operation Switch off the servo mode on the controller 2 Set the piezo voltage on the controller to O V by sending an RNP command see user manual of the controller 3 If possible Switch off the controller 4 Wait at least 10 seconds before disconnecting the controller 52 Version 1 1 0 MP118E LPS 24 Miniature Positioner 7 Maintenance PIEZO NANO POSITIONING WWW PI WS 7 Maintenance In this Chapter General Notes on Maintenance ccccccccececcececcececcececcccecccececcececaecueaeceeaesecauaecauaecass 53 Cleaning the LIP S224 espesie i e iE eTe iiie 54 7 1 General Notes on Maintenance NOTICE Damage due to improper maintenance The miniature positioner can become misaligned as a result of improper maintenance The specifications can change as a result p 59 gt Only loosen screws according to the instructions in this manual For the 5862 9 1230 and 5862 V 1230 LPS 24 models the following applies Risk of glare and irritation The linear encoder of the LPS 24 uses a class 2 laser according to DIN EN
6. and LPS 24 5862 9 1230 5862 V 1230 right 20 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 5 Installation ae Figure 7 LPS 24 5862 9 1110 or 5862 V 1120 4 mm maximum screw in depth for mounting on a surface Base body of the LPS 24 Cover of the base body of the LPS 24 Surface on which the LPS 24 is mounted Counterbore in the surface M2 5 hex head cap screw ISO 4762 ISO 1206 Through hole in the surface for M2 5 screw M2 5 threaded hole depth 2 mm in the cover of the base body Recess in the base body depth 2mm ON DAA WH DHS LPS 24 Miniature Positioner MP118E Version 1 1 0 21 5 Installation PP I Figure 8 LPS 24 5862 9 1230 or 5862 V 1230 2mm maximum screw in depth for mounting on a surface Base body of the LPS 24 Cover of the base body of the LPS 24 Surface on which the LPS 24 is mounted Counterbore in the surface M2 5 hex head cap screw ISO 4762 ISO 1206 Through hole in the surface for M2 5 screws M2 5 threaded hole depth 2 mm in the cover of the base body N D9 OQ KR DW HS Prerequisites v You have read and understood the general notes on installation p 17 v You have provided a suitable surface Four mounting holes are present For the required position of the holes see Dimensions p 63 The thickness of the surface and the depth of the mounting holes and counterbores are matched for compliance with the maximum screw in de
7. platform Affix the adapter plate to the lower miniature positioner a Introduce two M3x5 screws into the two counter sunk holes in the middle of the adapter plate from above b Tighten the two screws with a maximum torque of 80 Ncm each c Ensure that the screw heads do not protrude from the counter sunk holes LPS 24 Miniature Positioner MP118E Version 1 1 0 31 5 Installation gt Ji d Check that the adapter plate fits without backlash 3 Position the upper miniature positioner on the adapter plate as in the figures above i e rotated by 90 in relation to the lower miniature positioner 4 Affix the upper miniature positioner to the adapter plate lf the upper miniature positioner is an LPS 24 5862 9 1230 5862 V 1230 a Align the upper miniature positioner The center of the upper miniature positioner is located over the center of the adapter plate Four mounting holes on the bottom side of the upper miniature positioner overlap with the counter sunk holes in the corners of the adapter plate b Introduce four M2 5x4 screws into the counter sunk holes of the adapter plate from below c Tighten the four screws with a maximum torque of 50 Ncm each d Ensure that the screw heads do not protrude from the counter sunk holes If the upper miniature positioner is an LPS 24 5862 9 1110 or 5862 V 1120 a Make two of the four counter sunk holes in the corners of the adapter plate accessible by commanding the
8. 861 1A1 controller 1 Connect the drive connector of the miniature positioner to the corresponding controller socket See user manual of the controller 2 Connect the sensor connector f of the miniature positioner to the controller a Connect the sensor connector of the miniature positioner to the plug side of the adapter Sub D 15 m b Connect the female side of the adapter HD Sub D 15 f to the panel plug of the controller see user manual of the controller 3 Secure the connections in question with the integrated screws against being accidently pulled out 38 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 5 3 Connecting the LPS 24 5862 V 1120 via Vacuum Feedthrough 28 92 Figure 17 Sub D 15 m f vacuum feedthrough for LPS 24 5862 V 1120 Prerequisites v You have read and understood the general notes on installation p 17 v You have installed a suitable controller p 13 v You have read and understood the user manual of the controller y The controller is switched off LPS 24 Miniature Positioner MP118E Version 1 1 0 39 5 Installation gt Ji Tools and accessories N661B0008 Y cable the electronics of which has been adapted to the miniature positioner by PI see serial number of the miniature positioner on the connector shell in the scope of delivery p 12 N664B0001 adapter in the scope of delivery p 12 C 815 VF vacuum feedt
9. 9 1110 or 5862 V 1120 model is to be affixed to a 5862 9 1110 or 5862 V 1120 model You have connected the lower miniature positioner to the controller p 37 You have put the lower miniature positioner into operation p 45 and the system is still ready for operation Tools and accessories Suitable adapter plate available as an optional accessory p 13 lf a5862 9 1110 or 5862 V 1120 model is to be affixed to a 5862 9 1110 or 5862 V 1120 model N 662 AP1 If a5862 9 1230 or 5862 V 1230 model is to be affixed to any LPS 24 model N 662 AP2 For diameter and position of the holes in the adapter plates see Dimensions p 63 2 M3x5 screws from the scope of delivery of the adapter plate 4 M2 5x4 screws from the scope of delivery of the adapter plate Allen wrench AF 2 Allen wrench AF 2 5 If a 5862 9 1110 or 5862 V 1120 model is to be affixed to a 5862 9 1110 or 5862 V 1120 model Suitable Phillips head screwdriver Setting up an XY system 1 Position the adapter plate on the lower miniature positioner as in the figures above The counterbores of the two larger holes located in the middle of the adapter plate point upwards The two larger counter sunk holes in the adapter plate and two holes in the moving platform of the lower miniature positioner overlap Ifthe lower miniature positioner is an LPS 24 5862 9 1230 or 5862 V 1230 The adapter plate ideally sits over the middle of the moving
10. Sensor Connection for LPS 24 5862 9 1110 cc eeeeeeeeeeeeeeeees 69 10 3 3 Sensor Connection for LPS 24 5862 9 1230 cccccsseseceeeeaeeeeeees 70 10 3 4 Connection for Drive and Sensor for LPS 24 5862 V 1120 71 10 3 5 Drive Connection for LPS 24 5862 V 1230 ecccecccesseeeeeeeeeeeeeees 72 10 3 6 Sensor Connection for LPS 24 5862 V 1280 ccccsseeeeeeeeseeeeeees 72 10 3 7 N664B0001 Adapter for the Sensor Connection ccccceeeee sees 73 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 12 EC Declaration of Conformity 75 77 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual cccceccecceeeeeeeeeeseeeeeeeeeeeaaeeeeeeeees 1 Symbols and Typographic COnventions cccecccccccccceessesseeceeeeeeeeseeeeeeeeeeeessuaageeseeees 1 PIQUE CS eaaa tani yneeasdnaianaien Tuasereattatenyanaciuleaian 2 Other Applicable DOCUMENHS cccccceeceseeeseeeeeeeeeeaeeeeeceeeesseueeeseeeeeeeesseeeaeeeeeeeeeesaas 2 Downloading Manuals cinneniactscadsdanssiszanddswsiehiehentacasaciadansanientdaneietssnannectananiedandienenisanelcass 3 1 1 Goal and Target Audience of this User Manual This user manual contains the information needed for the intended use of the LPS 24 unless stated otherwise LPS 24 is used in this manual to refer to the 5862 9 1110 5862 9 1230 5862
11. V 1120 and 5862 V 1230 models see Model Overview p 7 Basic knowledge of servo systems motion control concepts and applicable safety measures Is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation LPS 24 Miniature Positioner MP118E Version 1 1 0 1 1 About this Document INFORMATION PI Information for easier handling tricks tips etc Symbol Label 1 2 gt p 5 RS 232 AA 1 3 Figures Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may al
12. axis systems Typical combinations XY system p 27 Z system p 33 XZ or XYZ combination LPS 24 Miniature Positioner MP118E Version 1 1 0 25 5 Installation I Figure 10 Example of an XYZ system Three LPS 24 5862 9 1230 mounted using an adapter plate and adapter bracket Lower miniature positioner here LPS 24 5862 9 1230 N 662 AP2 adapter plate Middle miniature positioner here LPS 24 5862 9 1230 N 662 APZ adapter bracket Upper miniature positioner here LPS 24 5862 9 1230 Om A GW N sas 26 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 1 General Information on Setting Up a Multi Axis System NOTICE Impermissibly high load on the miniature positioners In a multi axis system also the miniature positioner used for the Y and or Z axis must be moved Impermissibly high loads interfere with the motion and can damage the miniature positioners gt Include the masses of the moved miniature positioners and the mounting adapters p 13 in the calculation of the load to be moved gt For all miniature positioners in a multi axis system Do not exceed the maximum permissible load gt When a miniature positioner is mounted vertically make sure that the installed load is lower than the self locking of the drive gt Only install and operate the multi axis system after you have read and understood the user manuals of all components of the
13. i gt LPS 24 LPS 24 LPS 24 LPS 24 Tolerance 5862 9 1110 Vacuum to 5862 9 1230 Vacuum to 10 hPa 10 hPa 5862 V 1120 5862 V 1230 i j Crosstalk angular error 15 mm travel I h O O I h O Crosstalk angular error 1 mm travel Mechanical properties Stiffness in 1 1 motion direction Load capacity 10 10 l 5 N max max O O1 5 Feed force active Holding force 5 passive Drive properties Motor type NEXACT NEXACT linear NEXACT linear drive drive linear drive Operating 10 to 45 10 to 45 10 to 45 voltage NEXACT linear drive 10 to 45 Operating 10 to 50 10 to 50 10 to 50 10 to 50 temperature range Material Stee Steel Steel Steel Dimensions 24mm x 33 mm x 24mm x 63mm x 20 mm 20 mm h O gt O 5 a 60 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 10 Technical Data LPS 24 LPS 24 LPS 24 Tolerance 5862 9 1110 Vacuum to 5862 9 1230 Vacuum to 10 hPa 10 hPa 5862 V 1120 5862 V 1230 Cable length l 1 5 m on the l 1 5 m on the vacuum 10 mm vacuum side side 1 5 m on the air 2 m on the air side side Connector HD Sub D m Sub D 15 motor HD Sub D m LEMO 15 pin motor and sensor in 15 pin motor FGJ 1B 306 CLLM27 HD Sub D f vacuum Sub D f 15 motor LEMO 15 pin sensor Sub D 15 to pin sensor FGJ 2B 308 CLLM21 HD Sub D m
14. iE 47 Performing the Reference Point Definition for LPS 24 5862 V 1120 1 000010000000 48 Discharging the Piezo Actuators of the Drive ccccccccssecceceseeceeceeeceeceeeeeeseeeeeeseees 52 6 1 General Notes on Start Up and Operation NOTICE Damage from collisions Collisions can damage the miniature positioner the load to be moved and the environment gt Make sure that no collisions are possible between the miniature positioner the load to be moved and the environment in the motion range of the miniature positioner gt Do not place any objects in areas where they can get caught by moving parts v Stop the motion immediately if a controller malfunction occurs gt f possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion NOTICE Damage to the piezo actuators If the moving platform of the miniature positioner is displaced by applying external forces the piezo actuators of the NEXACT drive may be damaged irreparably gt Initiate all motions by sending motion commands to the controller Do not displace the moving platform manually gt Make sure that forces acting on the moving platform in the direction of motion do not exceed p 59 the passive holding force and the feed force of the drive LPS 24 Miniature Positioner MP118E Version 1 1 0 45 6 Start Up and Operation i Ji NOTICE Uncontrolled oscillation
15. moving platform of the lower miniature positioner to one end of the travel range b Align the upper miniature positioner so that the two corresponding mounting holes on its bottom side overlap with the two counter sunk holes of the adapter plate that have been made accessible c If the two cross head screws on the front sides of the linear guidings prevent access to the two counter sunk holes in the adapter plate Remove the two cross head screws from the guidings d Introduce two M2 5x4 screws into the two counter sunk holes of the adapter plate from below e Tighten the two screws with a maximum torque of 50 Ncm each f Ensure that the screw heads do not protrude from the counter sunk holes g If you have removed the two cross head screws from the linear guidings in step c Screw the two cross head screws into the linear guidings h Make the other two counter sunk holes in the corners of the adapter plate accessible by commanding the moving platform of the lower miniature positioner to the opposite end of the travel range i Perform steps c to g for the two counter sunk holes in the adapter plate that have been made accessible 5 Check that the upper miniature positioner fits without backlash 32 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 3 Setting Up a Z System with an Adapter Bracket NOTICE Screws that are too long ap The lower miniature positio
16. multi axis system gt If you require special mounting adapters contact our customer service department p 57 5 4 2 Setting Up an XY System NOTICE Screws that are too long The lower miniature positioner can be damaged by screws that are inserted too deeply gt Observe the depth of the mounting holes in the moving platform of the lower miniature positioner gt Only use screws of the correct length for the respective mounting holes LPS 24 Miniature Positioner MP118E Version 1 1 0 27 5 Installation YY I NOTICE Damage to the piezo actuators If the moving platform of the miniature positioner is displaced manually the piezo actuators of the NEXACT drive can be damaged irreparably gt Initiate all motions by sending motion commands to the controller Do not displace the moving platform manually INFORMATION Currently no standard adapter plate is offered for affixing an LPS 24 5862 9 1110 or 5862 V 1120 model to a 5862 9 1230 or 5862 V 1230 model gt If you want to set up such an XY system please contact our customer service department p 57 Designations in these instructions Lower miniature positioner Forms the basis of the multi axis system X axis is attached to a surface Upper miniature positioner Forms the Y axis of the multi axis system is attached to the lower miniature positioner rotated by 90 28 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO
17. the corresponding commands Prerequisites v You have established communication between the controller and the PC with PiIMikroMove v In PlIMikroMove you have selected the stage type LPS 24 5862V1120 in the Select connected stages step Performing the reference point definition for LPS 24 5862 V 1120 with PIMikroMove 1 Close the Start up controller window which shows the Start up axes step by clicking Close The main window of PlMikroMove opens 2 Inthe main window of PIMikroMove open the single axis window for the LPS 24 5862 V 1120 by selecting the miniature positioner in the View gt Single Axis Window menu Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation The single axis window shows the current position of the miniature positioner in the Position mm field 1 LPS 24_5862V1120 Axis 1 LPS 24_5862V1120 on E 861 on RS 232 COM1 96C v State 0 002300 4 jm gt gt i OL Target 9 000000 J mm Step size 9 100000 mm Velocity 5 000000 mm sec 4 mm gt Figure 21 PlMikroMove Single axis window 3 Inthe single axis window make sure that the servo mode is switched off for the axis a Expand the view of the single axis window by clicking on the gt button at the right edge of the window b If necessary remove the check in the Servo check box that is located at the top center of the single a
18. 0 C LEMO vacuum feedthroughs see Scope of Delivery p 12 80 C The miniature positioner is designed for the following operating data Maximum Operating Maximum Operating Maximum Power Frequency Consumption Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 Dimensions 10 2 1 LPS 24 5862 9 1110 5862 V 1120 Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 26 Dimensions of the LPS 24 5862 9 1110 and 5862 V 1120 moving platform in reference position LPS 24 Miniature Positioner MP118E Version 1 1 0 63 10 Technical Data i gt I 10 2 2 LPS 24 5862 9 1230 5862 V 1230 Dimensions in mm Note that the decimal places are separated by a comma in the drawings Tore o Figure 27 Dimensions of the LPS 24 5862 9 1230 and 5862 V 1230 moving platform in reference position 64 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 3 N 662 AP1 Adapter Plate Dimensions in mm Note that the decimal places are separated by a comma in the drawings O55 D3 4 2 9 Bea a mms r wT Di ies A A Figure 28 N 662 AP1 adapter plate LPS 24 Miniature Positioner MP118E Version 1 1 0 65 10 Technical Data I 10 2 4 N 662 AP2 Adapter Plate Dimensions in mm Note that the decima
19. 60825 1 2007 Technical data of the laser Lmax lt 1 mW A 655 nm On delivery and if used according to the intended use of the LPS 24 the laser is fully shielded Laser radiation can exit from the laser only if LPS 24 is opened The laser beam can cause glare and irritation gt Do not open or disassemble the LPS 24 gt Contact our customer service department if there is any malfunction of the LPS 24 LPS 24 Miniature Positioner MP118E Version 1 1 0 53 7 Maintenance T Ji 7 2 Cleaning the LPS 24 Prerequisites v You have discharged the piezo actuators of the LPS 24 v You have disconnected the LPS 24 from the controller Cleaning the LPS 24 gt Donotdo any ultrasonic cleaning Only when the miniature positioner is not used in vacuum gt Clean the surfaces of the LPS 24 with a cloth that is slightly dampened with a mild cleanser or disinfectant e g ethanol or isopropanol When the miniature positioner is used in a vacuum gt Only touch the miniature positioner with powder free gloves gt f necessary wipe the miniature positioner clean 54 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Target position is approached too Servo control parameters Switch off the servo control slowly or with overshoot are not optimally set system immediately Target position is not kept stable Large changes in the load 2 Check the setti
20. 62 V 1230 models Follow the instructions in the manual of the used controller for start up and operation of the LPS 24 gt LPS 24 5862 V 1120 model For the start up and operation of the LPS 24 follow the instructions in the manual of the used controller but perform the reference point definition according to the instructions in Performing the Reference Point Definition for LPS 24 5862 V 1120 see below p 48 LPS 24 Miniature Positioner MP118E Version 1 1 0 47 6 Start Up and Operation i Ji 6 4 Performing the Reference Point Definition for LPS 24 48 5862 V 1120 INFORMATION The LPS 24 5862 V 1120 miniature positioner has neither a reference point switch nor limit switches and therefore cannot perform a standard reference move The reference point is defined with the following procedure 1 In open loop operation servo mode switched off a motion is carried out to the negative hard stop 2 The mode of reference point definition is set to the value zero In this mode an absolute position value can be assigned for the reference point definition of the axis 3 The current position is set to the value 7 75 mm 4 The miniature positioner is moved away from the hard stop in open loop operation 5 The servo mode is switched on lt is recommended to use PIMikroMove to execute this procedure PIMikroMove takes care of switching the mode to reference point definition for example so that you do not have to deal with
21. Be a LPS 24 Miniature Positioner MP118E Version 1 1 0 71 10 Technical Data gt Ji 10 3 5 Drive Connection for LPS 24 5862 V 1230 LEMO SGJ 1B 306 CLLSV Contact side of the connector f e Cf 10 3 6 Sensor Connection for LPS 24 5862 V 1230 LEMO SGJ 2B 308 CLLSV Contact side of Function the connector f Supply voltage for laser diode Input 3 3 V Supply voltage 5 V C C ce o oo The sign indicates that the corresponding pin has not been assigned The signals at the sensor connection of the LPS 24 5862 V 1230 are not transmitted directly to the controller but are prepared for the sensor connection of the controller by the electronics in the sensor cable on the air side 72 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 7 N664B0001 Adapter for the Sensor Connection The pin assignments of the N664B0001 adapter which is included in the scope of delivery of LPS 24 5862 9 1230 5862 V 1120 and 5862 V 1230 are as follows m Sub D 15 m connector See Sensor Connection for LPS 24 5862 9 1230 p 70 HD Sub D 15 f connector See Sensor Connection for LPS 24 5862 9 1110 p 69 LPS 24 Miniature Positioner MP118E Version 1 1 0 73 11 Old Equipment Disposal PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be dispose
22. MP118E LPS 24 Miniature Positioner User Manual Date 23 05 2014 Version 1 1 0 PI This document describes the following products 5862 9 1110 LPS 24 Miniature Linear Positioner 15 mm 150 nm Resolution 5862 9 1230 LPS 24 Miniature Nanopositioner 15 mm 0 5 nm Resolution 5862 V 1120 LPS 24 Miniature Linear Positioner 15 mm 20 nm Resolution Vacuum Compatible to 10 hPa 5862 V 1230 LPS 24 Miniature Nanopositioner 15 mm 0 5 nm Resolution Vacuum Compatible to 10 hPa Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING WWW PI WS Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation 2014 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the SOUICe Original instructions First printing 23 05 2014 Document number MP118E KSch version 1 1 0 Subject to change without notice This manual is superseded by any new release The latest release is available for downloa
23. Observe the maximum depth of 4 mm for the insertion of locating pins into the moving platform gt Make sure to exclusively use screws and locating pins of the correct length for the respective holes LPS 24 Miniature Positioner MP118E Version 1 1 0 23 5 Installation gt Ji NOTICE Impermissibly high load on the miniature positioner An impermissibly high load interferes with the motion of the moving platform and can damage the miniature positioner gt In respect to the mass and mounting type of the load observe the maximum permissible forces that are allowed to act on the moving platform according to the specification p 59 Figure 9 Black arrows denote locating holes for alignment of the load whereas white arrows denote threaded holes for affixing the load Prerequisites You have read and understood the general notes on installation p 17 S You have properly mounted the miniature positioner p 20 lt S The miniature positioner is not connected to the controller lt S You have prepared the load so that it can be affixed to the mounting holes on the moving platform The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast two points are provided for affixing the load on the moving platform If you use locating pins for aligning the load You made one or two locating holes of 3 mm H7 for
24. POSITIONING WWW PI WS 5 Installation Figure 11 Example Setting up an XY system consisting of two LPS 24 5862 9 1110 and the N 662 AP1 adapter plate Lower miniature positioner Linear guiding Moving platform KR MH 4 M2 5x4 screws for affixing the upper miniature positioner to the adapter plate N 662 AP1 adapter plate 6 2 M3 x5 screws for affixing the adapter plate to the lower miniature positioner Q 7 Upper miniature positioner 8 Cross head screw on the front side of the linear guiding LPS 24 Miniature Positioner MP118E Version 1 1 0 29 5 Installation PP I Figure 12 Example Setting up an XY system consisting of two LPS 24 5862 9 1230 and the N 662 AP2 adapter plate 1 Lower miniature positioner 2 4M2 5x4 screws for affixing the upper miniature positioner to the adapter plate 3 N 662 AP2 adapter plate 4 2M3x5 screws for affixing the adapter plate to the lower miniature positioner 5 Upper miniature positioner Prerequisites v You have read and understood the general notes on installation p 17 v You have read and understood the general notes on setting up a multi axis system p 27 v You accounted for the space required for cable routing free of kinks and in accordance with regulations v You have properly mounted the lower miniature positioner p 20 30 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS v 5 Installation If a 5862
25. accommodation of locating pins 24 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories M3 screws of suitable length Quantity LPS 24 5862 9 1110 or 5862 V 1120 2 screws LPS 24 5862 9 1230 or 5862 V 1230 2 to 4 screws Suitable tools for fastening the screws Optional Locating pins for easy alignment of the load on the LPS 24 suitable for holes of 3 mm H7 and 4 mm depth Quantity LPS 24 5862 9 1110 or 5862 V 1120 1 locating pin LPS 24 5862 9 1230 or 5862 V 1230 2 locating pins Affixing the load to the LPS 24 1 Align the load so that the selected mounting holes in the moving platform can be used for affixing it If you use locating pins to align the load Observe the maximum depth of 4 mm for the insertion of locating pins into the moving platform a Insert the locating pins into the locating holes in the moving platform or the load b Place the load on the moving platform in such a way that the locating pins are inserted into the corresponding locating holes on the other side Affix the load to the selected mounting holes in the moving platform using the Screws Maximum screw in depth in the moving platform of the LPS 24 4 mm Maximum torque 80 Necm Check that the load fits on the moving platform of the miniature positioner without backlash 5 4 Setting Up a Multi Axis System The LPS 24 can be used in multi
26. ase body 6 7 8 LPS 24 Miniature Positioner MP118E Version 1 1 0 9 3 Product Description l 3 2 3 Product Labeling Figure 4 Position of the product labels explanation of the labeling see table Present with all models Only with LPS 24 5862 9 1230 and 5862 V 1230 Only with LPS 24 5862 9 1230 and 5862 V 1230 Only with LPS 24 5862 9 1230 and 5862 V 1230 Only with LPS 24 5862 9 1120 and 5862 V 1230 sensor cable on the air side QA A OO N m 586291230 Model number example 1 5 114010244 Serial number example individual for each LPS 24 Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers Country of origin Germany Country of origin 10 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 3 Product Description e a is WWW PIL WS Manufacturer s address website Notice of laser radiation p 53 here Top side of sensor connector Warning sign Observe manual here Top side of sensor connector Warning sign and values for the laser p 53 here Bottom side of sensor connector 4 655nm Data matrix code example contains the serial number LPS 24 Miniature Positioner MP118E Version 1 1 0 11 3 Product Description i l 3 3 Scope of Delivery 12 The LPS 24 is delivered with the following components Order Component Number LPS 24 Miniature positioner acc
27. d p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual cccccessseceeeeeesseeeeeeeeeseeees 1 1 2 Symbols and Typographic CONVENTIONS cccccseeeccceeeeeeeceeeeeaeeeeeeeeeeeeeeeeeeaaaeeeees 1 1 3 VUE CS aea E E E E 2 1 4 Other Applicable DOCUMENTS c ccccccecesseeeseeeeeeeeeeeueeseeeeeeeeeseeeeaeeeeeeeessaaaaeess 2 1 5 Downloading Manuals ccccseeeececeeseeecaeeeeeeaeeeeeeseaueeesseeeeeesaaseeesseeeessaneeeenaeees 3 2 Safety 5 2 1 Mendea USE sessirnir deeisaetaaveaueeguerosenceseesespaeees 5 2 2 General Safety Instructions ccccccceecccceeeeeeesseeeeeeeeeeseeeeeeeeeeeeseseeeeeeeeeeessaanseees 5 2 2 1 Organizational NI CASUNES wiusiiciesreenctaevsnenicussaeuctsauiandiiacansiioavacaumecedaneus 6 2 2 2 Measures for Handling Vacuum Compatible Products 00 6 3 Product Description 7 3 1 Mode LOVEN C N eee Cee none eee ee ere eee eee eee a ener 7 3 2 OCC tie ate A aes eed aceiteceg aencesds r aeeesnteasoaseesesese 8 3 2 1 ON A 8 3 2 2 POGUG I DEAG siirsin ERRARE ARR EE E ROARS 8 3 2 3 Prouet ADS NIG srie EE e EARE EAEEREN 10 3 3 Scope of Delivery 000 ceecccccccsseeececcceeeeeeeecsaeseeeeeseeaeeeeeesaeseeeeessaaaeeeessseaeeeeeessaaees 12 3 4 PACC CS SO NSS MEE 13 3 5 suitable OM ONGIS srein anaiai Ea AAEE AENEA TEE e N ANER 13 3 6 Tecnmcal Felu S e E A EA 14 3 6 1 Linear Encoder Sensor
28. d of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany LPS 24 Miniature Positioner MP118E Version 1 1 0 75 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the LPS 24 an EC Declaration of Conformity has been issued in accordance with the following European directives 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 a LPS 24 Miniature Positioner MP118E Version 1 1 0 77
29. e Output Encoder signal 1 sine w o Encoder signal 2 cosine inverted O O U Encoder signal 1 sine inverted Pe O D Z Z J i The sign indicates that the corresponding pin has not been assigned LPS 24 Miniature Positioner MP118E Version 1 1 0 69 10 Technical Data Pp I 10 3 3 Sensor Connection for LPS 24 5862 9 1230 The Sub D 15 f connector transmits the signals to and from the integrated linear encoder and the reference point switch 5 d di Et w W a y a _ _ ir y a a a a Figure 33 Sub D 15 connector f for sensor mating side C e C 3 COS COS Encoder Encoder signal 1 cosine 1 cosine Output n Encoder me 1 a cosine e a o SING o Encoder ee 2 sine eS Encoder signal 2 Output sine ee EA Reference point switch Output The character indicates that the pin connection is not connected 70 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 4 Connection for Drive and Sensor for LPS 24 5862 V 1120 The Sub D 15 m connector transmits the signals from and to the integrated linear encoder and the signals for controlling the drive 4 a Et a _ _ ir y a a a a Figure 34 Sub D 15 m connector pron preon The sign indicates that the corresponding pin has not been assigned Drive N GUR M G CG G T o
30. e nanometer precision of piezo actuators The LPS 24 is equipped with a linear encoder for direct position measurement The intended use of the LPS 24 is only possible when installed and in connection with a Suitable controller p 13 The controller is not included in the scope of delivery of the LPS 24 2 2 General Safety Instructions The LPS 24 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the LPS 24 gt Only use the LPS 24 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect Safety The operator is responsible for the correct installation and operation of the LPS 24 LPS 24 Miniature Positioner MP118E Version 1 1 0 5 2 Safety F I 2 2 1 Organizational Measures User manual gt Always keep this user manual available by the LPS 24 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the LPS 24 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can re
31. e ruler with extreme care NOTICE f Malfunction due to soiling Any type of soiling e g dust oil grease or condensation will render the LPS 24 inoperable gt Keep the LPS 24 free from dirt and condensation gt Avoid touching the ceramic rail of the NEXACT drive and the ruler of the linear encoder NOTICE Malfunction due to radiation Radiation e g X rays will render the LPS 24 inoperable gt Protect the LPS 24 from radiation NOTICE a Damage from incorrect mounting Incorrect mounting of the LPS 24 or incorrectly mounted parts can damage the LPS 24 gt Only mount the LPS 24 and the loads on the mounting fixtures holes intended for this purpose 18 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 5 Installation NOTICE Warping of the LPS 24 due to mounting on uneven surfaces Mounting the LPS 24 on an uneven surface can warp the LPS 24 Warping reduces the accuracy gt Mount the LPS 24 on an even surface The recommended evenness of the surface is 10 um gt For applications with great temperature changes Only mount the LPS 24 on surfaces that have the same or similar thermal expansion properties as the LPS 24 NOTICE Damage from unsuitable cables Unsuitable cables can damage the miniature positioner and the electronics gt Only use cables provided by PI for connecting the LPS 24 to the electronics INFORMATION
32. eeeeeeeeseeeeeeeeseeeeeeeeeeeeesssaaeeeeeeees 17 Mo nt ng the LPS 24 iseina EE a r ia eE iE 20 Affixing the Load to the LPS 24 ccccccccccccsssseeeecceeseceecceeaseeeecssaaseeeesssaseeeesseaaeeeees 23 Setting Up a Multi Axis System cecccccccccccceseeseeeeeeeeeeeeeeseeeeeeeesseeaeseeeeeeeessaaeaeeeeeeess 25 Connecting the LPS 24 to the Controller cccccccccccccssseseeeeeeeeeeeeeeeeeseeeeeessaeaeeeeeeees 37 5 1 General Notes on Installation Figure 5 Accessible when the moving platform is driven out Ruler of the linear encoder and ceramic rail of the NEXACT drive left LPS 24 5862 9 1110 5862 V 1120 right LPS 24 5862 9 1230 5862 V 1230 LPS 24 Miniature Positioner MP118E Version 1 1 0 17 5 Installation gt Ji NOTICE Ka i fr f Damage to the piezo actuators If the moving platform of the miniature positioner is displaced by applying external forces the piezo actuators of the NEXACT drive may be damaged irreparably gt Initiate all motions by sending motion commands to the controller Do not displace the moving platform manually gt Make sure that forces acting on the moving platform in the direction of motion do not exceed p 59 the passive holding force and the feed force of the drive NOTICE Fa Damage from mechanical actions The ruler of the linear encoder is scratch sensitive and can be damaged by mechanical actions e g from pointed objects gt Treat th
33. general notes on installation p 17 v You have installed a suitable controller p 13 v You have read and understood the user manual of the controller y The controller is switched off Connecting the LPS 24 5862 9 1110 to the E 861 1A1 controller 1 Connect the drive connector of the miniature positioner to the corresponding controller socket See user manual of the controller 2 Connect the sensor connector HD Sub D 15 f of the miniature positioner to the panel plug of the controller see user manual of the controller 3 Secure the connections in question with the integrated screws against being accidently pulled out LPS 24 Miniature Positioner MP118E Version 1 1 0 37 5 Installation I 5 5 2 Connecting the LPS 24 5862 9 1230 Lad Ho D Sub 15 t Em f Oo l HD 2 E a a D Sub 15 Figure 16 Cable diagram for LPS 24 5862 9 1230 with controller no e amp amp E i 3 B me a s eaa 1 Controller here E 861 1A1 2 N664B0001 adapter for the sensor connection 3 LPS 24 5862 9 1230 Prerequisites v You have read and understood the general notes on installation p 17 v You have installed a suitable controller p 13 v You have read and understood the user manual of the controller v The controller is switched off Tools and accessories N664B0001 adapter in the scope of delivery p 12 Connecting LPS 24 5862 9 1230 to the E
34. gh b Provide the vacuum chamber with a suitable opening c Install the vacuum feedthrough so that the plug side of the vacuum feedthrough LEMO 8 pin is in the vacuum chamber Connecting the LPS 24 5862 V 1230 to the E 861 1A1 controller gt Connect the miniature positioner vacuum feedthroughs cable adapter and 42 Version 1 1 0 MP118E LPS 24 Miniature Positioner controller with each other as shown in the connection diagram below PIEZO NANO POSITIONING WWW PI WS 5 Installation HD 9 D Sub 15 s gt 1 m f m f bd 6 T 2 D Sub 15 Figure 20 Cable diagram for LPS 24 5862 V 1230 with vacuum feedthroughs and controller Controller here E 861 1A1 N664B0001 adapter for the sensor connection F852B0072 cable for sensor signals on the air side kK030B0664 cable for the drive on the air side 000025824 vacuum feedthrough for the sensor connection 000015460 vacuum feedthrough for the drive Vacuum chamber LPS 24 5862 V 1230 miniature positioner O N DAA WD DHS LPS 24 Miniature Positioner MP118E Version 1 1 0 43 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation ccccccccssssecceeeeesseceeeeeeeeeeeeeeeeeeeeeeeeaees 45 Operating SC i So cecessnasactonzaisctnseacacatntcaeabuaseccersnarsabtegeanneisnaneachiiessoeateacceseeeentoeene 47 Operating the LPS 24 aeniea E Norea
35. he adapter bracket b Introduce four M2 5x4 screws into the counter sunk holes of the adapter bracket c Tighten the four screws with a maximum torque of 50 Ncm each 2 Affix the adapter bracket to the lower miniature positioner a Position the adapter bracket to which the upper miniature positioner is affixed on the moving platform of the lower miniature positioner as in the figures The upper miniature positioner is not located over the cable exit of the lower miniature positioner but on the opposite side The two counter sunk holes in the adapter bracket and two holes in the moving platform of the lower miniature positioner overlap If the lower miniature positioner is an LPS 24 5862 9 1230 or 5862 V 1230 The adapter bracket ideally sits over the middle of the moving platform 36 Version 1 1 0 MP118E LPS 24 Miniature Positioner 5 Installation PIEZO NANO POSITIONING WWW PI WS b Introduce two M3x5 screws into the counter sunk holes of the adapter bracket c Tighten the two screws with a maximum torque of 80 Ncm each 3 Check that the adapter bracket and the upper miniature positioner fit without backlash 5 5 Connecting the LPS 24 to the Controller 5 5 1 Connecting the LPS 24 5862 9 1110 a HD a O Sub 15 HD D Sub 15 Figure 15 Cable diagram for LPS 24 5862 9 1110 with controller 1 Controller here E 861 1A1 2 LPS 24 5862 9 1110 Prerequisites v You have read and understood the
36. hrough for drive and sensor signals available as an optional accessory p 13 Suitable tools for installing the vacuum feedthrough Installing the vacuum feedthrough 1 See the above figure for the dimensions of the vacuum feedthrough 2 Provide the vacuum chamber with a suitable opening 3 Install the vacuum feedthrough so that the Sub D 15 f socket is in the vacuum chamber Connecting the LPS 24 5862 V 1120 to the E 861 1A1 controller gt Connect the miniature positioner vacuum feedthrough Y cable adapter and controller with each other as shown in the connection diagram below HD D Sub 15 1 f m 3 m f m f D Sub 15 HD 2 D Sub 15 Figure 18 Cable diagram for LPS 24 5862 V 1120 with vacuum feedthrough and controller Controller here E 861 1A1 N664B0001 adapter for the sensor connection N661B0008 Y cable for drive and sensor signals C 815 VF vacuum feedthrough Vacuum chamber LPS 24 5862 V 1120 miniature positioner O aA KR DO DH m 40 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 5 4 Connecting the LPS 24 5862 V 1230 via Vacuum Feedthrough 1 2 S3 S 1 M l po man nnn E maxi Figure 19 Dimensions of the LEMO vacuum feedthroughs for LPS 24 5862 V 1230 Vacuum feedthrough for the drive item number 000015460 LEMO SGJ 1B 306 CLLSV component of the LPS 24 5862 V 1230 1 BRP A B je Emai L m tS side Vacuum feedthr
37. iature positioner is on the positive or negative side of the reference point switch The commands that use the reference signal are described in the user manual of the controller and or in the corresponding software manuals INFORMATION The LPS 24 5862 V 1120 model does not have a reference point switch 14 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking INFORMATION When handling the vacuum version of the miniature positioner attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the miniature positioner is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the miniature positioner with powder free gloves gt If necessary wipe the miniature positioner clean after unpacking 1 Unpack the LPS 24 with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned LPS 24 Miniature Positioner MP118E Version 1 1 0 15 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ccccccccccccccecesseeeeeee
38. l places are separated by a comma in the drawings 3x45 05 5 3 4 AINA A Figure 29 N 662 AP2 adapter plate 66 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 5 N 662 APZ Adapter Bracket Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 30 N 662 APZ adapter bracket LPS 24 Miniature Positioner MP118E Version 1 1 0 67 10 Technical Data P Ji 10 3 Pin Assignment 10 3 1 Drive Connection for LPS 24 5862 9 1110 and 5862 9 1230 The HD Sub D 15 m connector transmits the signals to control the drive AMP amplifier enable The sign indicates that the corresponding pin has not been assigned This pin is connected to the GND in the connector shell In the E 861 1A1 controller this pin is used to activate the amplifiers This pin is only assigned in the LPS 24 5862 9 1230 68 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 2 Sensor Connection for LPS 24 5862 9 1110 The HD Sub D 15 f connector transmits the signals to and from the integrated linear encoder and the reference point switch z 1 inf wu gt h ai on bf _ LE t p p i 15 10 Figure 32 HD Sub D 15 f connector for sensor mating side Reference point switch Output Supply voltage 5 V Encoder signal 2 cosin
39. luding releasenews in the file name Find the user name and password in the User login for software download section in the Release News In the User login area on the left margin in the website enter the user name and the password in the corresponding fields Click Login The available manuals are displayed LPS 24 Miniature Positioner MP118E Version 1 1 0 3 1 About this Document I 8 Click the desired manual and save it on the hard disk of your PC or on a data storage medium 4 Version 1 1 0 MP118E LPS 24 Miniature Positioner 2 Safety PIEZO NANO POSITIONING WWW PI WS 2 Safety In this Chapter Mendod USG rreri ee sinc setadecepy uc ct gesiaebes ects lt b aeeeocseasectece oetitsoaweeteaead uenieaccuenasinck sep inaeweneees 5 General Safety Instructions cccccceeeeeeccccececeeeseeeeeeeeeeeeaeeeeeeceeeessseeaeeeeeeeesssaaaeeeseeeees 5 2 1 Intended Use The LPS 24 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the LPS 24 is intended for single axis positioning adjusting and shifting of loads at different velocities The LPS 24 is a miniature positioner for nanopositioning technology The feed is produced by NEXACT piezo actuators coupled to a ceramic rail PiezoWalk principle NEXACT drives thus combine relatively long travel ranges with th
40. model is used as the Y axis upper miniature positioner Material Steel 1 4104 mass 52 5 g including 4M2 5x4 screws ISO 4762 2 M3x5 screws ISO 4762 N 662 APZ Adapter bracket for the vertical mounting of LPS 24 miniature positioners Material Steel 1 4104 mass 57 3 g including 4M2 5x4 screws ISO 4762 2 M3x5 screws ISO 4762 C 815 VF Vacuum feedthrough for LPS 24 5862 V 1120 drive and sensor signals Sub D 15 m f including Technical Note C815T0003 To order contact our customer service department p 57 3 5 Suitable Controllers E 861 1A1 Digital NEXACT Controller gt To order contact our customer service department p 57 LPS 24 Miniature Positioner MP118E Version 1 1 0 13 3 Product Description i 3 6 Technical Features 3 6 1 Linear Encoder Sensor The miniature positioner is equipped with an optical linear encoder For the encoder resolution refer to the table in the Specifications section p 59 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 6 2 Reference Point Switch The miniature positioner is equipped with a direction sensing reference point switch that is located approximately in the middle of the travel range This sensor transmits a TTL signal that indicates whether the min
41. n 3 1 Model Overview Four standard versions of the LPS 24 miniature positioner are available They differ in terms of the following features Sensor resolution Dimensions Suitability for operation in vacuum Vacuum Sensor cuum resolution suitability to 10 hPa 5862 9 1110 24 MM x 33mm x 20 mm 5862 9 1230 24 mm x 63 mm x 20 mm gt For further technical data see the specifications p 59 LPS 24 Miniature Positioner MP118E Version 1 1 0 3 Product Description i l 3 2 Product View 3 2 1 Overview Figure 1 Left LPS 24 5862 9 1230 appearance of the 5862 V 1230 model is identical right LPS 24 5862 9 1110 appearance of the 5862 V 1120 model is identical 3 2 2 Product Details D amp Figure 2 Miniature positioner LPS 24 5862 9 1110 5862 V 1120 from top left and bottom right Moving platform Linear guiding Base body Cover of the base body Cable exit for connection of drive and sensor Ceramic rail of the NEXACT drive Ruler of the linear encoder NOO0QUAOQONS 8 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 3 Product Description Figure 3 Miniature positioner LPS 24 5862 9 1230 5862 V 1230 from top left and bottom right Cable exit for sensor connection Cable exit for drive connection Ceramic rail of the NEXACT drive 1 Moving platform 2 Linear guiding 3 Ruler of the linear encoder 4 Base body 5 Cover of the b
42. ner can be damaged by screws that are inserted too deeply gt Observe the depth of the mounting holes in the moving platform of the lower miniature positioner gt Only use screws of the correct length for the respective mounting holes Designations in these instructions Lower miniature positioner X axis in an XZ combination Y axis in an XYZ combination The miniature positioner to which the upper miniature positioner is attached with an adapter bracket Upper miniature positioner Forms the Z axis of the multi axis system is mounted on the lower miniature positioner in a vertical alignment with an adapter bracket LPS 24 Miniature Positioner MP118E Version 1 1 0 33 5 Installation PP I Figure 13 Example Setting up an XZ system consisting of two LPS 24 5862 9 1110 and the N 662 APZ adapter bracket 1 Lower miniature positioner 2 N 662 APZ adapter bracket 3 2M3x5 screws for affixing the adapter bracket to the lower miniature positioner 4 4 M2 5x4 screws for affixing the upper miniature positioner to the adapter bracket 5 Upper miniature positioner 34 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 14 Example Setting up an XZ system consisting of two LPS 24 5862 9 1230 and the N 662 APZ adapter bracket 1 Lower miniature positioner 2 N 662 APZ adapter bracket 3 2 M3x5 screws for affixing the adapter bracket to the lower miniature po
43. ngs of the ae servo control parameters Uncontrolled oscillations of the LPS 24 if necesan correct the settings of the servo control parameters Reduced holding force and feed Ceramic rail of the Contact our customer force NEXACT drive is soiled service department p 57 e g from being touched No or limited motion Excessive load gt Reduce the load see Data Excessive counterforces in Table p 59 the direction of motion In the case of vertical mounting gt Ensure gravity compensation so that the maximum load p 59 is not exceeded Ruler of the encoder is Contact our customer soiled e g from being service department p 57 touched Encoder malfunction due Carry out a reference move to shock impact see user manual of the controller LPS 24 Miniature Positioner MP118E Version 1 1 0 55 8 Troubleshooting P I Only LPS 24 5862 V 1120 5862 V 1230 Reduced accuracy Sensor cable or miniature After a sensor cable or a positioner has been miniature positioner has been replaced replaced it is necessary to adapt the sensor electronics to the sensor in the miniature positioner again gt Contact our customer service department p 57 If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 57 56 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 9 Cu
44. ording to order 5862 9 1110 5862 9 1230 5862 V 1120 or 5862 V 1230 000044133 Screw set m 8 M2 5x6 screws ISO 4762 4 M3x6 screws ISO 4762 MP118E User manual this document in printed form With LPS 24 5862 9 1230 5862 V 1120 and 5862 V 1230 N664B0001 Adapter Sub D 15 m to HD Sub D 15 f for sensor connection Only with LPS 24 5862 V 1120 N661B0008 Y cable for drive and sensor signals on the air side Sub D 15 f to Sub D 15 f and HD Sub D 15 m 2 1 m A suitable vacuum feedthrough is available as an optional accessory p 13 Only with LPS 24 5862 V 1230 000015460 Vacuum feedthrough for the drive LEMO 6 pin m f K030B0664 Cable for the drive on the air side LEMO 6 pin to HD Sub D 15 m 1 6 m 000025824 Vacuum feedthrough for the sensor connection LEMO 8 pin m f E852B0072 Cable for sensor signals on the air side LEMO 8 pin to Sub D 15 f 1 5 m Version 1 1 0 MP118E LPS 24 Miniature Positioner 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 4 Accessories Order Description Number N 662 AP1 Adapter plate for setting up an XY system consisting of two LPS 24 s whereby a 5862 9 1110 or 5862 V 1120 model is used as the Y axis upper miniature positioner Material Steel 1 4104 mass 29 4 g including 4M2 5x4 screws ISO 4762 2 M3x5 screws ISO 4762 N 662 AP2 Adapter plate for setting up an XY system consisting of two LPS 24 s whereby a 5862 9 1230 or 5862 V 1230
45. ough for the sensor item number 000025824 LEMO SGJ 2B 308 CLLSV component of the LPS 24 5862 V 1230 a2 A B fe maxi ft m 5 j8 side Prerequisites v You have read and understood the general notes on installation p 17 v You have installed a suitable controller p 13 v You have read and understood the user manual of the controller v The controller is switched off LPS 24 Miniature Positioner MP118E Version 1 1 0 41 5 Installation PI Tools and accessories Included in the scope of delivery p 12 000015460 vacuum feedthrough for the drive 000025824 vacuum feedthrough for the sensor connection K0O30B0664 cable on the air side for the drive E 852B0072 cable on the air side for sensor signals the electronics of which has been adapted to the miniature positioner by PI see serial number of the miniature positioner on the connector shell N664B0001 adapter Suitable tools for installing the vacuum feedthrough Installing the vacuum feedthrough 1 Install the vacuum feedthrough for the drive 000015460 a See the above table for the dimensions of the vacuum feedthrough b Provide the vacuum chamber with a suitable opening c Install the vacuum feedthrough so that the plug side of the vacuum feedthrough LEMO 6 pin is in the vacuum chamber Install the vacuum feedthrough for the sensor signals 000025824 a See the above table for the dimensions of the vacuum feedthrou
46. pth in the LPS 24 see figures above The evenness of the surface is lt 10 um 22 Version 1 1 0 MP118E LPS 24 Miniature Positioner 5 Installation PIEZO NANO POSITIONING WWW PI WS For applications with great temperature changes The surface has the same or similar thermal expansion properties as the LPS 24 v You accounted for the space required for cable routing free of kinks and in accordance with regulations v The miniature positioner is not connected to the controller Tools and accessories For LPS 24 5862 9 1110 and 5862 V 1120 Four M2 5 hex head cap screws of suitable length For LPS 24 5862 9 1230 and 5862 V 1230 Four to eight M2 5 hex head cap screws of suitable length Suitable tools for fastening the screws Mounting the LPS 24 1 Align the miniature positioner on the surface so that the corresponding mounting holes in miniature positioner and surface overlap 2 Screw the screws into the mounting holes on the bottom side of the surface Maximum screw in depth InLPS 24 5862 9 1110 and 5862 V 1120 4 mm In LPS 24 5862 9 1230 and 5862 V 1230 2 mm Maximum torque 50 Necm 3 Check that the LPS 24 fits on the surface without backlash 5 3 Affixing the Load to the LPS 24 NOTICE Screws and locating pins are too long Screws and locating pins that are inserted too deeply damage the LPS 24 gt Observe the depth of the mounting holes p 63 in the moving platform gt
47. rtup dialog Start up selected stages i LPS 24 5862V1120 Move to Neg limit Reference Pos limit Automatic Define absolute position New absolute position 7 79 Work without referencing no range checks absolute position unknown Figure 24 Advanced startup dialog 50 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In the Advanced startup dialog window set the value for the current position c Select Define absolute position PIMikroMove automatically sets the appropriate mode of reference point definition d Inthe New absolute position field enter the value 7 75 as the new current position e Click OK to set the position value The Warning window opens The position of the selected axes will be set to 7 750000 i If this is not the actual current position the axes may move out of the allowed range during operation Do you really want to set the absolute position to 7 750000 Yes set position Cancel Figure 25 Window for applying the set position value f Click Yes set position to apply the set position value The Warning and Advanced startup dialog windows close g Inthe Start up controller window click Close to close the window 6 On the PiezoWalk channels card in the main window of PIMikroMove move the miniature positioner 100 steps in the positive direction by clicking the gt arrow key
48. sitioner 4 4 M2 5x4 screws for affixing the upper miniature positioner to the adapter bracket 5 Upper miniature positioner Prerequisites v You have read and understood the general notes on installation p 17 v You have read and understood the general notes on setting up a multi axis system p 27 v You accounted for the space required for cable routing free of kinks and in accordance with regulations v If you set up an XZ combination You have properly mounted the lower miniature positioner on a surface p 20 LPS 24 Miniature Positioner MP118E Version 1 1 0 35 5 Installation gt Ji v f you set up an XYZ combination You have properly mounted the miniature positioners for the X and Y axis p 27 Tools and accessories N 662 APZ adapter bracket available as an optional accessory p 13 For the diameter and position of the holes in the adapter bracket see Dimensions p 63 Mounting accessories in the scope of delivery of the adapter bracket 4 M2 5x4 screws 2 M3x5 screws Allen wrench AF 2 Allen wrench AF 2 5 Setting up a Z system 1 Affix the upper miniature positioner to the adapter bracket a Align the upper miniature positioner see figures The cable exit points to the bending edge of the adapter bracket i e downwards in the Z system Four mounting holes on the bottom side of the upper miniature positioner overlap with the counter sunk holes in the long side of t
49. so differ and must not be seen as guaranteed properties 1 4 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals E 861 NEXACT Servo Controller PZ205E User Manual PIMikroMove SM148E Software Manual 2 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 5 Downloading Manuals INFORMATION lf a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 57 The current versions of the manuals are found on our website For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Download freely accessible manuals 1 2 3 4 5 Open the website http www pi portal ws Click Downloads Click the corresponding category e g PlmiCos Click the corresponding product code e g LPS 24 Click Documents The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 4 Carry out steps 1 to 5 of the download process for freely accessible manuals Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file inc
50. stomer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website LPS 24 Miniature Positioner MP118E Version 1 1 0 57 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter PECCO seperecece sents eat oepieoeecseessiece E 59 PINTS SIONS iastece oezsceescanees esse E E oeceeeuseeteaececuene 63 PNAS SONON aee E E naraincaumeneroas 68 10 1 Specifications 10 1 1 Data Table LPS 24 LPS 24 LPS 24 LPS 24 5862 9 1110 Vacuum to 5862 9 1230 Vacuum to 10 hPa 10 hPa 5862 V 1120 5862 V 1230 Tolerance mjo k a k m m nm Motion and positioning Integrated Optical linear Optical linear Optical linear Optical linear encoder sensor encoder encoder PlOne PlOne Sensor 20 0 5 0 5 resolution Open loop 0 03 0 03 0 03 resolution n p in 40 1 1 incremental motion Velocity 10 10 10 10 m s max closed loop Unidirectional 50 20 20 20 typ repeatability LPS 24 Miniature Positioner MP118E Version 1 1 0 59 10 Technical Data
51. sult in minor injury and property damage gt Only install and operate the LPS 24 after having read and understood this user manual Personnel qualification The LPS 24 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel 2 2 2 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the miniature positioner attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the miniature positioner is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the miniature positioner with powder free gloves gt f necessary wipe the miniature positioner clean after unpacking 6 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model OVErVICW ccceccecceceececcecceceeceecuececaecueceeaecuecueceenecuecueaeeaecueseeaesaesuesesaeseteneaees FVOGUCL VIW seencataccisiaaaccdysenntecianaat E e eA eiaa aei aa CONS Ol DEIVI oora TE PROCES SOUS S eea a E a E E Suitable Controllers 2 2 2 c ccccccccceceececcecceeeeceeceeceeeecueceeaeeaecueceeaeeaecueceeaeenecueaeeaeeaeeeeaees Technical Features icine vieeencitdeeurnnnuseiteactisintiamceswntactgecuiicnsukiteamassinedanesranmectpneuiiensutdieawata
52. ud E iE 47 6 4 Performing the Reference Point Definition for LPS 24 5862 V 1120 48 6 5 Discharging the Piezo Actuators of the DIive ccccccccccseeeeceeeeeeeeesseeeeseeeeees 52 Maintenance 53 7 1 General Notes on Maintenance ccccccceceeseeeeceseeseceeseeeceeeeseeeeseeeteeseeetseneees 53 7 2 CICAMING the LF O22 serris taiesmcnespeaticninaendenpscictianedntanendinatinecnavagneberianeamennins 54 Troubleshooting 55 Customer Service 57 Technical Data 59 TO OO SCINCATO NS vnvsanaccnaaane a a E Aae aE 59 10 1 1 Dala ION es wii ge ste nacre E eo ssereth demon EE 59 10 1 2 Ambient Conditions and Classifications ccccccscseseeeceeseeeeeeeees 61 10 1 3 Maximum RaUNgS seis dendicaxaectiiaruanaieeccvasandindniiuandunuveresivavectineauauetioas 62 12 PUTS ASO TS ieee recesses csr te sacra nace E N 63 10 2 1 LPS 24 5862 9 1110 5862 V 1120 0 0 ccceccccceeeeeseeeeeeeeeeeeeeeeeeees 63 10 2 2 LPS 24 5862 9 1230 5862 V 1230 ccccceccccccceesseeeeeeeeeeeeeeeeeeeees 64 10 2 3 N 662 AP1 Adapter Plate ccccccccssseeccesseeeseseeecsenseessenseesseaes 65 10 2 4 N 662 AP2 Adapter Plate cccccccccseseeeceeseeeceseeecsanseessenseesseaes 66 10 2 5 N 662 APZ Adapter Bracket ccccccsseeeeeeeeseeeeseeeesseeeeeseeseeesaees 67 TORS FAT PASSIOMMMC ea ifueesineapeuistonty nateiwsnicnnaieaneneads 68 10 3 1 Drive Connection for LPS 24 5862 9 1110 and 5862 9 1230 68 10 3 2
53. ve direction of motion is away from the cable exit side 46 Version 1 1 0 MP118E LPS 24 Miniature Positioner PIEZO NANO POSITIONING WWW PI WS 6 2 6 3 6 Start Up and Operation INFORMATION The repeatability of the positioning is only ensured when the reference point switch is always approached from the same side Recommended controllers from PI fulfill this requirement with their automatic direction detection for reference moves to the reference point switch Operating Parameters If you use the software enclosed with the E 861 1A1 controller the operating parameters can be loaded from the P Stages2 dat stage database gt Download the PI Update Finder from the PI website http www update pi portal ws and use it to update the PiStages2 dat stage database on your PC For more information about the P Stages2 dat stage database see user manual of the E 861 1A1 controller Operating the LPS 24 Prerequisites v You have read and understood the General Notes on Start Up and Operation p 45 You have read and understood the user manual of the controller You have read and understood the user manual of the PC software You have properly installed the miniature positioner p 17 XK NN The controller and the required PC software have been installed All connections with the controller have been established See user manual of the controller Operating the LPS 24 gt LPS 24 5862 9 1110 5862 9 1230 and 58
54. xis window 4 Start the motion of the miniature positioner to the negative hard stop a Inthe main window of PIMikroMove go to the Piezo Walk channels card by clicking the corresponding tab b On the PiezoWalk channels card enter e g the value 100 in the Open Loop Number of Steps column c On the PiezoWalk channels card click the lt arrow key repeatedly until the position display in the single axis window no longer changes Step Amplitude Open Loop Analog Driving Open Loop Velocity lt Open LoopNumber of Steps gt Open Loop Remaining Steps HALT Relax 1 55 000000 0 000000 200 000000 l 100 000000 gt LORE Relax Figure 22 PIMikroMove Excerpt from the PiezoWalk channels card in the main window 5 Set the current position to the value 7 75 mm LPS 24 Miniature Positioner MP118E Version 1 1 0 49 6 Start Up and Operation i Ji a Inthe main window of PIMikroMove use the E 861 gt Start up axes menu item to open the Start up controller window again in the Start up axes step Start up controller connected E 861 on R 232 COMI 9600 baud Select anes vith sored states Ref switch Limit hards 5 Stored pos 1 LPS 24 5862V1120 Reference selected axes by moving to Neg limit Ref switch Fos limit Automatic Restore Figure 23 Start up controller Start up axes b Inthe Start up controller window click Advanced The Advanced startup dialog window opens Advanced sta

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