MP97E User Manual P-661/U-164.01
Contents
1. eeeeeeeeessess 19 333 Drive Electronics with LEMO Socket 20 o4 RUMIN OF ING WOON esae dd da d eoe 20 35 Application RecommendatiONS cooccocccoccociconconicnnconincncaninnnos 22 35 1 CONTINUOUS Operat tibus cese ra etn estet a bleu ee alee 22 352 Low Duty Cycle OperatiON cooocccccconccncononcnnononcnnconanonnononenonnns 22 853 Open boop Opera isis aeo usen hese Deed ee 22 354 Closed Loop Operation ccccoccccconncoccnococononocnnnncnnnnonannnnanononos 22 30 Mamtenali enda eere dade dia 23 Old Equipment Disposal 24 Technical Data 25 5d SDpecitCcallODS sita IA 25 D2 Motor PertolfrialiGe usse callo sic ti die 26 5 2 1 Velocity and Dynamic Force ooccoccccncccccccccncnccncnconcncnanonononnnnonos 26 522 Impact of Off Time and Temperature 2f 55 DIMENSIONS acm t css uis e e a 28 Contents SONNEN coe usu EE 28 A UIS EUR 29 Introduction 1 www pi ws Piezo Nano Positioning PI Introduction PILine OEM piezo linear motors are designed to be used as drive units in linear positioning stages At the heart of the patented ultrasonic drive is a piezoceramic plate which is excited to produce high frequency eigenmode oscillations A friction tip attached to the plate moves along an inclined linear path at an eigenmode frequency Through its contact with the friction bar it drives the moving part of the mecha2. Operating 3 5 1 3 5 3 3 5 4 WWW pl ws Piezo Nano Positioning PI Application Recommendations Continuous Operation Highest dynamic force and holding force are achieved during continuous operation 100 duty cycle CAUTION Do not operate at full power for 100 of the operating time as the motor may overheat During continuous operation at room temperature the average power level must not exceed 80 see Fig 11 on p 27 Low Duty Cycle Operation The piezomotor will not immediately achieve its maximum dynamic and holding force when operated after a rest period or with low duty cycle This behavior results from the friction bar contamination which occurs even during a short off time The contamination reduces the friction grip between friction tip and friction bar for the first minute of operation You will observe this behaviour even in vacuum Open Loop Operation CAUTION Adjust the control signal for open loop systems so that the motor does not abruptly reach the end stop or try to move past it because this significantly increases the wear of friction tip and friction bar Closed Loop Operation For closed loop operation external position feedback devices such as incremental encoders are required not included Installing such devices follow the mounting guidelines provided by the manufacturer P 661 U 164 01 MP97E Release 1 0 0 Page 22 Piezo Nano Positioning PI Operating NOTE
3. You should mount the external feedback device as close as possible to the designed motion 3 6 Maintenance Operating the PILine piezo linear motors in clean environments no maintenance is required If you believe your unit requires maintenance contact PI WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 23 Old Equipment Disposal Piezo Nano Positioning PI 4 Old Equipment Disposal WWW pl ws In accordance with EU directive 2002 96 EC WEEE as of 13 August 13th 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG will ensure environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 13th 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany P 661 U 164 01 MP97E Release 1 0 0 Page 24 Technical Data Piezo Nano Positioning 5 Technical Data 2 Specifications Model Active axes Travel range Min incremental motion KKK Max velocity KKK Max acceleration Non energized holding stiffness KKK Min holding force Max push pull force Preload on friction bar Motor voltage provided by the
4. Nano Positioning PI CAUTION The length of the friction tip given in Fig 13 is valid when the motor is mounted and preloaded For ease of mounting it is strongly recommended to provide 1 mm of additional space between friction bar and motor housing et _ WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 30
5. Operating 3 Operating 3 7 General Notes CAUTION PILine piezo linear motors and drive electronics should be operated in clean environments Protect the units against dust oil grease and liquid spray If the friction bar becomes contaminated with dust oil grease or condensed water the motor will show an instant drop in dynamic force and speed CAUTION The P 661 produces a heat dissipation of up to 5 W the U 164 01 produces up to 10 W which might disturb your application CAUTION Although the piezomotor is theoretically soundless you will encounter an operation noise up to 50 dB A Keep in mind that the P 661 respectively U 164 01 is an ultrasonic device you will receive higher noise levels even at frequencies between 100 and 500 kHz See Motor Performance Section on p 26 for further information on operational conditions 3 2 Initial Operation Initial operation of your PlLine piezo linear motor involves the following steps 1 Integrate the motor piezoelectric actuator friction bar and external bearing into your application Follow the instructions in Section 2 p 9 2 Provide for the control signals required to operate the system see the User Manual of your drive electronics for details WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 17 Operating 3 3 1 WWW pl ws Piezo Nano Positioning PI 3 Connect the motor to the drive electronics Follow the instructions in Se
6. drive electronics Operating voltage drive electronics Max electrical power drive electronics Operating temperature range Humidity Body material Mass w o friction bar and drive electronics Dimensions w o friction bar and drive electronics Cable length Connector Recommended controller drive electronics KK kkk P 661 P01 1 unlimited 0 05 um 500 mm s 150 m s 0 7 N um 10 1 5 N 2N 9 N 10 120 Vpp 42 Vrms approx 210 kHz 12 V oW 20 to 50 C max 9596 non condensing aluminum anodized 10g 14 x 35 x 6 mm 1 6 m open end C 184 C 185 PI U 164 01 1 unlimited 0 05 um 500 mm s 150 m s 3 N um 10 4 N 6N 18 N 10 168 Vpp 60 Vrms approx 155 kHz 12 V 10 W 20 to 50 C max 95 non condensing aluminum anodized 20g 24 x 44 x 9 mm 1 0 m open end C 184 C 185 The travel range of piezo linear motors is virtually unlimited and depends on the length of the friction bar which is available separately The minimum incremental motion is a typical value that can be achieved in the open loop mode of a piezomotor stage Depends on the mounting conditions To reach the specs it is important to follow the mounting guidelines of the OEM motors which are given in Section 2 on p 9 WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 25 Technical Data Piezo Nano Positioning 5 2 Miotor Performance 5 2 1 Veloc
7. holes according to the hole pattern given in the drawing on p 28 For mounting the actuator you can use either a its elongated holes when you want to insert the mounting screws from the top b its threaded holes M2 when the mounting screws are to be inserted from the bottom In this case the mounting surface should be provided with elongated holes WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 14 Mounting Piezo Nano Positioning PI oe E E gt PIL ine p 661 p01 5 1 1051229020 wm piws US Pat No 6 765 335 d Fig 4 Mounting holes on P 661 piezoelectric actuator 2 Mount the piezoelectric actuator without tightening the mounting screws completely 3 Adjust the position of the piezoelectric actuator to achieve the required preload 31 Place the 0 5 mm adjust gauge comes with the motor between the housing of the piezoelectric actuator and the friction bar so that the friction tip is located in the gap of the gauge 32 Press the piezoelectric actuator gently in the direction of the friction bar until there is no free space left between the actuator housing the adjust gauge and the friction bar and tighten the screws lightly Then remove the adjust gauge 33 Fully tighten the screws 2 3 2 U 164 01 Actuator Mounting WWW pl ws 1 Provide the mounting surface for the piezoelectric actuator with mounting holes according to the hole pattern given in the drawing on p 29 CAU
8. the friction tip is on the stationary part of your mechanics and the friction bar is affixed on the moving part the pin wire assignment specified below and in the User Manual of the drive electronics causes the motion polarity shown in Fig 6 To reverse direction of motion interchange the yellow and the white wires of the Plline piezo linear motor when connecting Negative Positive control control signal signal Friction bar is moving actuator is stationary Control signals Negative and Positive control signal refers to the C 184 and C 185 analog drive electronics Fig 6 Motion direction definitions for P 661 or U 164 01 piezomotors with the wiring as specified in the drive electronics User Manual motor top view schematic representation 3 3 2 OEM Drive Electronics Board www pi ws The connections to a C 184 16x OEM driver board can be made in one of the following ways depending on the application B Solder the wires from the piezoelectric actuator to the solder points on the board B Attach an appropriate terminal connector to the driver board and connect the wires from the motor to it either directly or using an appropriate connector For the location of the solder points connector on the driver board and for the assignment of the wires to the solder points pins see the User Manual of your drive electronics P 661 U 164 01 MP97E Release 1 0 0 Page 19 Operating Piezo Nano Positioning PI The
9. 64 01 Fig WWW pl ws Max Continuous Input Signal vs c cm S 25 20 0 20 40 50 Temperature C 11 P 661 amp U 164 01 maximum allowable level of control input signal in continuous operation 100 duty cycle depending on the ambient temperature P 661 U 164 01 MP97E Release 1 0 0 Page 27 PI Technical Data Piezo Nano Positioning 5 3 Dimensions 5 3 1 P 661 P01 Dimensions in mm decimal places separated by commas in drawings Standard tolerance DIN ISO 2768 f H Ra 1 6 T 1 9 2 5 16 14 SV Fig 12 Dimensions of P 661 given length of the friction tip is valid when the motor is mounted and preloaded WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 28 Technical Data Piezo Nano Positioning PI 5 3 2 U 164 01 Dimensions in mm decimal places separated by commas in drawings Standard tolerance DIN ISO 2768 f H Ra 1 6 oy 3 EN H oo N A An O CO TIO N 0 mounting Tolerance 5 20 24 045 mounting tolerance A Distance between friction bar and motor housing when the motor is mounted and preloaded A Mounting screws are applied from the top side shown in the figure above use the included M2 5x10 torx pan head screws Fig 13 Dimensions of U 164 01 in mm decimal places separated by commas in drawing WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 29 Technical Data Piezo
10. Piezo Nano Positioning PI MP97E User Manual P 6681 UJ 164 07 PlLine amp OEM Piezo Linear Motors Release 1 0 0 Date 2009 05 05 This document describes the following product s ERO lt a x use te a m P 661 SMOG TPO wapi amp 5 PILine OEM Piezo Linear Motor 2 N push pull force B U 164 01 PILine OEM Piezo Linear Motor 4 N push pull force cone mm PILine Pedit Pii i P C E alm mtm 1 Patia 4 745 555 Physik Instrumente PI GmbH Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Manufacturer s Declaration according to Appendix II B of 98 37 EG Machinery Directive Partly Completed Machinery Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Romerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name PILine OEM Piezo Linear Motors Model Numbers P 661 U 164 01 Product Options all complies with the following European directives 98 37 EC Machinery Directive The applied standards certifying the conformity are listed below Safety of Machinery EN 12100 The manufacturer hereby declares that P 661 and U 164 01 must not be operated until the machinery in which it is to be integrated complies with the requirements of 98 37 EC Machinery Directive April 27 2009 Karlsruhe Germ
11. TION The length of the friction tip given on p 29 is valid when the motor is mounted and preloaded For ease of mounting it is strongly recommended to provide 1 mm of additional space between friction bar and motor housing P 661 U 164 01 MP97E Release 1 0 0 Page 15 Piezo Nano Positioning PI Mounting Three holes are provided for actuator mounting Use the included M2 5x10 torx pan head screws to fix the piezo motor to your mounting platform ID No 100085432 US Pat No 6 765 335 Fig 5 Mounting holes on U 164 01 piezoelectric actuator top view 2 Adjust the position of the piezoelectric actuator to achieve the required preload a with adjust gauge 1 Place the 0 5 mm adjust gauge comes with the motor between the housing of the piezoelectric actuator and the friction bar so that the friction tip is located in the gap of the gauge 2 Press the piezoelectric actuator gently in the direction of the friction bar until there is no free space left between the actuator housing the adjust gauge and the friction bar and tighten the screws lightly Then remove the adjust gauge 3 Fully tighten the screws or b without adjust gauge here you need a stop on your mounting platform 1 Push the housing of the piezoelectric actuator against the stop of your mounting platform 2 Fully tighten the screws WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 16 Piezo Nano Positioning PI
12. any Du aetate Dr Karl Spanner President Declaration of Conformity according to DIN EN ISO IEC 17050 2005 01 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Romerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name PILine OEM Piezo Linear Motors Model Numbers P 661 U 164 01 Product Options all complies with the following European directives 2006 95 EC Low voltage directive LVD 2004 108 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 LI pert en m April 27 2009 Dn po dd Karlsruhe Germany Physik Instrumente PI GmbH 8 Co KG is the owner of the following company names and trademarks PIO PICO PICMA PILine amp PIFOC PiezoWalk amp NEXACT NEXLINE NanoCube NanoAutomation The products described in this manual are in part protected by the following patents US patent No 6 765 335 Copyright 1999 2009 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of
13. ate measures to conform to the safety requirements published by international standards DANGER The P 661 respectively U 164 01 PlLine amp piezo motor does not contain any user serviceable parts Do not remove the cover of the motor Never re assemble the motor Hazardous voltage can be present on the motor components DANGER Do not make electrical contact with the conductors in the connecting cables PlLine amp motors are driven by piezoelectric actuators which require hazardous voltages When removing the connectors from the drive electronics the piezoelectric actuator in the motor can stay charged for several hours Therefore short circuit pins Piezo1 Piezo2 and Piezo3 of the LEMO connector Fig 7 p 20 by connecting them to ground Temperature changes can also induce charges on the piezoelectric actuator WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 4 gt Introduction WWW pl ws Piezo Nano Positioning PI CAUTION Install and operate the P 661 respectively U 164 01 PlLine amp motor only when you have read the operating instructions Keep the instructions readily available close to the device in a safe place When the instructions are lost or have become unusable ask the manufacturer for a new copy Add all information given by the manufacturer to the instructions e g supplements or Technical Notes CAUTION Make sure the friction tip rides completely on the friction bar throughout
14. ction 3 3 p 18 4 Tune the drive electronics to the mechanics to obtain the optimal excitation frequency see the User Manual of your drive electronics for details 5 Run the motor in for approx 1 hour See Section 3 4 p 20 for details 6 Repeat the frequency tuning described in Step 4 NOTES Operate the motor only if mounting is completed preload force is applied see p 9ff Tuning must be repeated when the friction bar or the actuator are disturbed or remounted and or the drive electronics is replaced Connecting Motor and Drive Electronics BEN TCT a Do not make electrical contact with the conductors in the i connecting cables PlLine motors are driven by piezoelectric actuators which require hazardous voltages Therefore short circuit pins Piezo1 Piezo2 and Piezo3 of the LEMO connector Fig 7 p 20 by connecting them to ground Temperature changes can also induce charges on the piezoelectric actuator General Information CAUTION Use only the wires provided by PI for interconnecting motor and drive electronics Do not extend or shorten the wire length since this will affect the performance of the motor and can cause damage to the drive electronics P 661 U 164 01 MP97E Release 1 0 0 Page 18 Operating Piezo Nano Positioning PI If you need special wire lengths consult your Physik Instrumente sales engineer or write info pi ws Provided that the piezoelectric actuator with
15. ear is also decreased because the contact pressure is uniformly WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 20 Piezo Nano Positioning PI Operating distributed NOTE Before the run in the mechanics must be completely mounted and the drive electronics must be properly tuned see User Manual of the drive electronics The following conditions are required for run in m Duty cycle 50 B Run in procedure 1 Move to left end of bar respecting the mechanical end stop see Fig 2 at approximately 70 of max control input 2 Stop for 1 sec 3 Move to right end of bar respecting the mechanical end stop at approximately 8096 of max control input 4 Stop for 1 sec Repeat this procedure B Duration approx 20 minutes After this time the motor achieves 90 of its maximum dynamic force The duration depends on the angular alignment of the friction tip to the friction bar You can shorten the run in procedure by keeping the tightest possible mounting tolerances After run in the friction bar must be cleaned thoroughly using a cotton swab or a lint free cloth soaked with alcohol or acetone Alternatively you can use oil free compressed air Do not disturb the actuator or friction bar mounting but make sure that the cleaning agent does not enter the actuator NOTE Run in must be repeated if the friction bar or the actuator is disturbed or remounted WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 21
16. es you will receive higher noise levels even at frequencies between 100 and 500 kHz 1 2 Unpacking Unpack the P 661 respectively U 164 01 with care Check the contents against the bill of sale and the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage please contact PI immediately Save all packing materials in the event the product need be shipped back to PI or elsewhere WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 6 Introduction Piezo Nano Positioning PI 1 3 System Components To operate PILine P 661 respectively U 164 01 OEM piezo linear motors in addition to the piezoelectric motor itself a friction bar or a ceramic ring for rotatory applications and drive electronics are required Since the length of the friction bar and the choice of the drive electronics depend on the application both items are not included as standard components but must be ordered separately 1 3 1 Standard Components The following components are always included m PiLine OEM Piezo Linear Motor piezoelectric actuator with wires P 661 P01 or U 164 01 B Screw set for mounting order 4230 for P 661 P01 order 000025687 for U 164 01 B Adjust gauge 0 5 mm polystyrene order M661E0040 B MP97E User Manual for P 661 U 164 01 this document in printed form 1 3 2 Friction Bar One of the following friction bars must be ordered separately Frict
17. ion bars for P 661 P01 Order P 661 B01 P 661 B02 P 661 B05 WWW pl ws Length x Width x Thickness 15 x 3 5 x 0 5 mm 25 x 3 5 x 0 5 mm 55 x 3 5 x 0 5 mm P 661 U 164 01 MP97E Release 1 0 0 Page 7 Piezo Nano Positioning PI Introduction Friction bars for U 164 01 Order Length x Width x Thickness P 664 B01 15x5 x0 5 mm P 664 B02 25x5 x0 5 mm P 664 B05 55x 5 x 0 5 mm All friction bars are made of Al 2Os ceramics 1 3 3 Drive Electronics One of the following drive electronics must be ordered separately For P 661 P01 Order Type C 184 161 Analog OEM drive electronics C 185 161 Analog drive electronics box with power supply For U 164 01 Order Type C 184 164 Analog OEM drive electronics C 185 164 Analog drive electronics box with power supply The C 184 and C 185 drive electronics convert an analog control signal into the voltage which excites the ultrasonic oscillation of the piezoelectric actuator Analog control permits continuously adjusting the output power and thus the velocity of the motor The required 10 volt range differential control signal corresponds to the analog output of standard DC motor controllers from different manufacturers such as GALIL NI or DeltaTau which also provide special options for piezo linear motors All drive electronics are described in their own manuals WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 8 Mounting Piezo Nano Positioning PI e Mou
18. ity and Dynamic Force WWW pl ws PI The following graphs can be used to estimate the motor performance at different control signal levels P 661 Velocity vs dynamic force push pull force at different control signal input levels 700 600 500 400 velocity mm s 300 200 100 0 0 0 5 1 1 5 2 force N 2 5 Fig 8 P 661 velocity vs dynamic force at control signal input levels of 100 80 60 and 50 U 164 01 Velocity vs dynamic force push pull force velocity mm s 500 450 0 5 1 1 5 2 2 5 force N 100 80 50 3 5 4 Fig 9 U 164 01 velocity vs dynamic force at control signal input levels of 100 80 and 50 P 661 U 164 01 MP97E Release 1 0 0 Page 26 Technical Data 5 2 2 Impa Piezo Nano Positioning PI ct of Off Time and Temperature The information given by the graphs below shall help you to protect your equipment against damage P 661 amp U 164 01 Static holding force vs motor off time static holding force N e P 661 m U 164 01 0 10 20 30 40 50 60 off time h Fig Max 10 P 661 amp U 164 01 static holding force depending on the off time of the motor piezoelectric actuator does not oscillate imum allowable level of control input signal in continuous operation vs ambient temperature for P 661 amp U 1
19. nics forward or backwards With each oscillatory cycle the mechanics executes a step of a few nanometers the macroscopic result is a smooth motion with a virtually unlimited travel range Because the ceramic plate with the friction tip is pressed against the friction bar holding forces are generated even when the motor is at rest A typical open loop motion system with a P 661 or a U 164 01 is set up as shown in the example in Fig 1 integrated PiLine OEM Motor C 184 OEM Board Custom stage with integrated P 661 or U 164 01 OEM motor and friction bar Drive electronics with external power supply excites the piezoceramic plate in the actuator G 3 party device provides the control signals for the drive electronics Fig 1 System configuration with PlLine amp OEM piezo linear motor integrated in a custom stage and PI s C 184 OEM driver For closed loop operation external position feedback devices such as incremental encoders and an external controller are required not included P 661 U 164 01 MP97E Release 1 0 0 Page 3 Piezo Nano Positioning PI Introduction Features BH Small High Speed Linear Motor B Patented Principle Features High Holding Forces B Velocity to 500 mm s B Acceleration to 15 g B Minimum Incremental Motion to 0 05 um B Self Locking with up to 4 N 1 1 Safety Precautions WARNING When mounting the motor follow the instructions in this manual and take appropri
20. nting 2 1 WWW pl ws Mounting PlLine piezo linear motors comprises the following steps which are described in this section 1 Designing the moving system p 9 2 Fixing the friction bar p 12 3 Mounting the piezoelectric actuator p 13 Designing the Moving System CAUTION Make sure the friction tip rides completely on the friction bar throughout the motors complete path of travel Otherwise the motor could be permanently damaged CAUTION Do not lubricate the bearing with grease All components of the mechanics must be free from dust oil and grease Otherwise the performance of the motor will be severely limited CAUTION Do not extend or shorten the wire length since this will affect the performance of the motor and can cause damage to the drive electronics The dimensions and the hole pattern for mounting are provided by the drawings on p 28 and p 29 Friction bar or piezoelectric actuator and cables can be on the moving part of the mechanics For optimum performance the design of your mechanics should comply with the following recommendations B lfthe friction bar becomes contaminated with dust oil grease or condensed water the motor will show an instant drop in dynamic force and speed It is therefore P 661 U 164 01 MP97E Release 1 0 0 Page 9 Piezo Nano Positioning PI Mounting recommended to enclose the entire system and to avoid changes in ambient temperature B Actuat
21. on bar should not exceed the length of the element on which it is to be fixed Make sure this element is solid and even along all the length of the friction bar to prevent it from breaking when the friction tip of the piezoelectric actuator is pressed against Make sure that the points where the friction bar is affixed with two component adhesive are outside the range where the friction tip rides on the friction bar e g using mechanical end stops 2 2 1 Materials and Preparations To fix the friction bar on the mounting surface we recommend the following two component adhesive UHU Plus Endfest Wherever applicable it is a good idea to prepare the mounting surface so that the friction bar is placed in a slot of 0 5 mm depth see Fig 3 7 0 01 o un e P 661 P01 W 3 6 0 1 mm U 164 01 W 5 1 0 1 mm Fig 3 Slot for the friction bar dimensions in mm WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 12 Piezo Nano Positioning PI Mounting 2 2 2 How to proceed To affix the friction bar proceed as follows 1 Degrease the mounting surface and the friction bar with acetone If the mounting surface is located at the moving part of your system make sure that acetone does not enter the bearing 2 Mix the two component adhesive according to the manufacturer specifications NOTE Make sure that adhesive does not contact the front surface of the friction bar 3 Place a drop of adhesive at the positi
22. ons 1 and 2 4 Affix the friction bar on the mounting surface Remove the protective film from the adhesive tape and press the friction bar against the surface If you for example affix the friction bar on the guide rail of a bearing it is recommended to place the bearing on an even surface oriented as shown in the figure below Both the bearing and the friction bar can then be adjusted on each other using the even surface Guide rail Friction Bar 5 Let the adhesive cure according to the manufacturer specifications The curing times for UHU Plus Endfest are listed in the table below WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 13 Piezo Nano Positioning PI Mounting Temperature Curing time Strength after curing 20 C 12h 1200 N cm 40 C 3h 1800 N cm 70 C 40 min 2000 N cm 100 C 10 min 2500 N cm 180 C 5 min 3000 N cm 2 3 Miounting the Piezoelectric Actuator NOTE Keep in mind that the housing of the piezoelectric actuator has to be perpendicular to the friction bar over the entire travel range to maintain the proper distance pressure between friction tip and friction bar 2 3 1 P 661 P01 Actuator Mounting NOTES Mount the actuator only with its bottom surface lying on the mounting base as shown in Fig 4 It is recommended to use the M2x8 mounting screws which come with the piezoelectric actuator 1 Provide the mounting surface for the piezoelectric actuator with mounting
23. or portion and friction bar must be mounted on an even rigid surface with high stiffness to avoid torsion of the basic profiles B The friction tip must be perpendicular to the friction bar and the proper distance pressure between them must be maintained over the entire travel range B Do not use cantilevers for mounting B Limit the travel distance using mechanical end stops Ideally the end stops are integrated in the mounting surface see figures below B High quality linear bearings especially suitable for high precision applications are recommended This might be cross roller bearings or ball bearings B Vertical mounting When turned off the piezomotor can bear a vertical force F due to its intrinsic friction P 661 F 1 5 N at least U 164 01 Fa 3 N at least In a typical industrial application the components of Fh are the gravitational force Fg m g and vibration force F m A f df WWW pl ws P 661 U 164 01 MP97E Release 1 0 0 Page 10 Piezo Nano Positioning PI Mounting Friction Tip Friction Bar stationary on moving part Integrated end stops limiting the travel distance Fig 2 Application example with P 661 friction bar is fixed on the guide rail of the bearing and should be limited by mechanical end stops WWW pi Wws P 661 U 164 01 MP97E Release 1 0 0 Page 11 Piezo Nano Positioning PI Mounting 2 2 Fixing the Friction Bar NOTES The length of the fricti
24. the motors complete path of travel Otherwise the motor could be permanently damaged CAUTION Do not lubricate the bearing with grease All components of the mechanics must be free from dust oil and grease Otherwise the performance of the motor will be severely limited CAUTION Use only the wires provided by PI for interconnecting motor and drive electronics Do not extend or shorten the wire length since this will affect the performance of the motor and can cause damage to the drive electronics CAUTION Do not excite the piezoelectric actuator unless the motor is mounted and preloaded CAUTION Do not operate at full power for 10096 of the operating time as the motor may overheat During continuous operation the average power level must not exceed 80 see Fig 11 on p 27 P 661 U 164 01 MP97E Release 1 0 0 Page 5 Piezo Nano Positioning PI Introduction CAUTION The P 661 produces a heat dissipation of up to 5 W the U 164 01 produces up to 10 W heat dissipation which might disturb your application CAUTION Adjust the control signal for open loop systems so that the motor does not abruptly reach the end stop or try to move past it because this significantly increases the wear of friction tip and friction bar CAUTION Although the piezomotor is theoretically soundless you will encounter an operation noise up to 50 dB A Keep in mind that the P 661 and the U 164 01 are ultrasonic devic
25. the source First printing 2009 05 05 Document Number MP97E KSch Release 1 0 0 P 661 U 164 User MP97E100 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws About this Document Users of this Manual This manual is designed to help the reader to install and operate the P 661 U 164 01 PlLine OEM Piezo Linear Motors It assumes that the reader has a fundamental understanding of micropositioning systems and applicable safety procedures The manual describes the physical specifications and dimensions of the P 661 U 164 01 PlLine amp OEM Piezo Linear Motors as well as the installation procedures which are required to put the associated positioning system into operation This document is available as PDF file The newest release is available for download at www pi ws or via email contact your PI Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death DANGER Indicates the presence of high voltage gt 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Pb Calls attention to a procedure practice or condition which if not correc
26. tly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The driver electronics which is required to operate P 661 U 164 01 PlLine amp OEM Piezo Linear Motors is described in separate manuals All documents are available as PDF files Updated releases are available for download at www pi ws or via email contact your Physik Instrumente sales engineer or write info pi ws Contents Introduction 3 WAS Salet Precautions a EA 4 12 MACK UNG o HH 6 Lo System Components e 7 131 Standard Components eese 7 12 Fiction Bt idos T 133 Dive El CIONES A Ma ER 8 Mounting 9 21 Designing the Moving SySteM occcocccccccccccnccocccnonncncnconcncnnninanonos 9 22 FIXNE FHeolol Dari chk oleh ascii ento de 12 221 Materials and Preparations coocccconcccccnccncnconcnconcnnnnnnnnnnnnnnnnos 12 222 HOW TO DIOCOGU ii ean aAa arana 13 23 Mounting the Piezoelectric Actuator 14 23 1 P 661 P01 Actuator Mounting cooccccoccncconcncnoncncnnncncnncnnnnoos 14 232 U 164 01 Actuator Mounting ooccccoocccconcncnnncncnnncnconnnnnnncnnnnoos 15 Operating 17 31 General NOS aic e e peo nent aa 17 92 nisl Opera ida 17 33 Connecting Motor and Drive Electronics 18 391 General Information eee ates i eat I e teta 18 332 OEM Drive Electronics Board
27. wires of the PILine piezo linear motor have the following functions indicated by the wire color Wire Color Function Shield GND Yellow Piezo 3 White Piezo 2 Red Piezo 1 3 3 3 Drive Electronics with LEMO Socket When using a C 185 16x drive electronics box the P 661 respectively the U 164 01 PlLine piezo linear motor is connected via a LEMO socket Connect the Lemo 3 pin connector FFA 0S 303 CLAC17 which comes with the drive electronics to the wires of the piezoelectric actuator as listed below to have a motion polarity as shown in Fig 6 on p 19 To reverse direction of motion interchange the yellow and white wires when attaching the connector The shield must be connected to the metal part of the Lemo connector 2 1 Lemo Signal Wire Pin Color 1 Piezo 2 white 3 3 Piezo 1 red lezo IE Fig 7 Lemo connector FFA 0S 303 CLAC17 pins from solder side 3 4 Run In of the Motor For maximum force generation a PlLine piezo linear motor requires firm even contact between a well defined area of the friction tip and the friction bar Depending on manufacturing and mounting tolerances the initial contact may be irregular consisting of a line or worse yet a point By having the piezomotor move the mechanics open loop or closed loop a stable area of contact is quickly established by wearing in the friction tip This procedure called run in increases the force generation of the piezomotor The rate of subsequent w
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