Operating Instructions
Contents
1. Olympus LEXT OLS 4000 Confocal Laser Microscope The Olympus LEXT OLS4000 is a confocal microscope capable of taking high resolution 3D images The magnification Optical and Digital of this microscope ranges from 108x 17 280x It is capable of resolving features 10 nm in size in the z direction sample height and 120 nm in the x y plane The system is capable of performing a variety of metrology measurements Step height surface line roughness and area volume measurements are some of the more commonly used metrology measurements Figure 1 at the end of the text contains an image with key hardware identified on it 1 Purpose This manual describes best known methods for capturing 3D images and describes some of the more commonly used measurement capabilities of the system Users must be trained on the operation of the microscope in order to use it Only qualified users who have been trained may use the system There are several pinch points that users must be aware of prior to use 2 Reference Material a http www olympus ims com en metrology ols4000 b LEXT User Manual Wizard contact lab staff for full electronic copy 3 Safety Instructions a EMO button can be depressed at any time to stop power to the system b Do Not insert or remove a sample while the laser is on MUST BE IN COLOR MODE c Liquids wet samples are not permitted on the system at anytime d Keep hands from of the system there are several pinch points that can o2. ccur due to moving objective lenses and stages The system is equipped with a Class III laser i Users should be familiar with OSHA mandates for this class of laser products https www osha gov dts osta otm otm iii otm iii 6 html ii Maintenance should only be performed by an authorized service representative m 4 System Specifications Objective Lens Magnification 5x to 100x Laser 3D image Magnifications 20X to 100X Digital Magnification 1 to 8x Total Magnification capability 5x to 17 280x Color Imaging Mode White LED Light 2 megapixel CCD Detector Laser Imaging Mode 405 nm Laser Photomultiplier Detector Minimum Z Resolution 10 nm Minimum XY Resolution 120 nm 5 Logging in a Login to the computer with User LEXT Password Olympus b Startup Double click the OLS4000 icon on the Windows desktop c Click on Allow trust this program d Login with User ID ADMIN Password olympus e Clear off the stage System will ask the user to check the safety around a sample object lens and the stage f The system will then ask if the user would like to move the reference Z position Select OK provided nothing is on the stage 6 Objectives Information Lens Magnification Field of view um Working Distance Numerical optical 8x digital mm Aperture 108x 864x 2560 320 10x 216x 1728x 1280 160 20x 50x 50x 7 Loading and Unloading of Samples a LOAD AND UNLOAD at 5x i Loading at higher magnif
3. ications can cause damage the objective lenses ii Loading at higher magnifications can damage your samples oy iii To load press the move to load unload button iv Then Press the move to origin v To Unload Press the load unload remove sample return stage to home position These may be located on the MAP SCREEN tab b Do not place your fingers by the objective lenses Potential sich point c Never move the stage or the objective lenses by hand The system has software features that will move the stage objective lenses d Adjust Coarse Focus discussed in next section if sample is large to ensure it does not make contact with the objective lenses e At any point in time an image reference for an area of interest can be set using the update snapshot icon to the right of the Map Screen tab f The green box will show the last known area of interest defined by the user 8 Imaging a Select Imaging then Microscope then Color or Laser then either COLOR b Coarse Focus Generally not needed i Upon placing the sample on the stage adjust the coarse focus ii Never force the coarse focus adjustment make sure the coarse focus is unlocked the locking collar is on the right side at the back of the unit See Picture ii VUIIITONLY ADJUST AT THE COARSE FOCUS AT 5X 11111 Damage to the objective lenses and or your sample may occur
4. if adjusted at higher magnification T d nr PN C Auto Focus Select the FOCUS Tab and then select the AF button E CLICK FOCUS Tab then Auto Focus AF Button d Auto Brightness Select the BRIGHTNESS Tab and then Select AUTO button To manually adjust the brightness up down user must unlock the Auto Brightness first Eng hiness To enable auto brightness Click Tab then AUTO i Color No Automatic Brightness adjustment ii Laser Brightness Automatically Adjusts Manual Focus can be achieved by moving the objective stage up down to achieve the correct focal distance h Magnification Change i Simply select the magnification on the screen ii KEEP Hands and Fingers away from objectives while moving Pinch Point Magnification setting Si ee Ss iii Auto Focus should engage and display the live image i Image Capturing 9 Acquiring a 3D Image a Always uses the LASER to capture an image 405 nm i The instrument is only rated to take measurements on the 20x 50x high NA and 100x objectives ii An image taken at 5x and 10x may not give you accurate readings b Move to the desired location on the sample Can be done three ways i Moving the sample stage with the Joystick ii Double Clicking on the small sample captured image iii Double Clicking on the live image screen c Under Imaging Microscope Color Laser select the de
5. iplier Tube 2 Set the BOTTOM button iii Set the pitch 10 nm or 0 010 um min 1 Number of Steps Focal Plane Cuts will be displayed based on the distance between the top and bottom Acquisition setting gm Film thickness Top Bottom setting Range setting Top Distance oum Bottom Pitch Step Press the Acquisition button to obtain image Q Acquisition Select PROFILE Select one of the four views i Coloronly appears if COLOR was selected during acquisition Lai Intensity Displays a laser intensity image in 3D Displays a color image in 3D Height Displays the surface of the 3D image with simulated colors 48 Wireframe Displays the surface of the 3D image with wireframe 10 Image Enhancement a Several Image enhancements are possible on the Confocal System The system has three one shot filter adjustments i Level Corrections ii Noise Removal iii Brightness and Contrast Correction Profile measurement EP b Select LEVEL ADJUST from LEXT Manual in Figure 3 C Select the Noise Removal button and select the desired profile correction Description specimen mainly glass wafer etc This is suitable for the noise removal on the step surface specimen mainly gold bump IC PCB pattern grooves optical waveguide etc This is suitable for the noise removal on the jagged surface specimen mainly raw material surface fi
6. is of the systems measurement capabilities i Surface Line Roughness ii Profile Heights Angle Distance ii Particle Analysis v Film Thickness b Referto the user manual for details on data acquisition 13 Auto Save Feature a Auto Save can be enabled to b To Enable Disable Auto Save select the ADVANCED SETTINGS box c Select the AUTO SAVE box d Two settings maybe selected Destination Description The acquired images will automatically be stored in the database The acquired images will automatically be stored in the database and on a hard disk These image files will be saved in LEXT format e Findthe location of the folder that the images should be saved to DESKTOP USER Polarizer DIC Prism Objective Lenses E Coarse Focus Adjust Sample Stage Ou Mp us E Figure 1 Features of the Confocal 3D Microscope BEI Lf Individual 2D Images Before Stitching Simulation 2D Image After Stitching 4 3D Image After Stitching Figure 2 Stitching Example from OEM Website ial DouE TARAP mn pl i gt 2 1 E wie HELLE TARSA DASA EPRE lt Image after correcting surface gt Figure 3 Images before and after surface level correction Laser Confocal with DIC Polymer Film Laser Confocal Polymer Film Figure 4 DIC Example from OEM Website APPENDIX A Reference Material for Metrology Measurements
7. lm etc This is suitable for the noise removal on the curved surface mainly solder bump bearing etc This is suitable for the noise removal on the user defined surface Registering a user definition filter Brightness and Contrast Image Enhancement The image can be returned to its original state at anytime by selecting the UNDO button Manual correction of the images can be obtained by using the IMAGE CORRECTION button 11 DIC Image Capture d 0200 From Manual Creates a shadowing effect on color and laser images creating 3D topologically inaccurate images with features that pop out See Figure 4 Works by splitting polarized light into two rays that provide information about adjacent points on a sample Rays are recombined to determine differences in index of refraction and optical path length NOTE DIC WILL ALTER THE RESULTS OF ANY METROLOGY MEASUREMENTS IF LEFT IN THE SYSTEM IT IS ONLY TO BE USED TO OBTAIN CLEAR OPTICAL IMAGES Push Polarizer Lens into the system Insert the DIC Lens into the system Adjust the color wheel until the clearest image is obtained When acquiring an image Enable DIC option so system knows DIC prism is installed Film thickness Normal Color re ESETET g When Completed Remove DIC Filter and Return Polarizer to the retracted position 12 Image Metrology a Appendix A contains information pertaining to the collection and analys
8. sired acquisition settings for the sample i Dropdown contains FINE FAST or STEP 1 Fine uses a finer pitch to capture images 10 um Fast uses a coarser pitch less scans and faster 20 um Multi layer See Manual for details STEP allows users to set the pitch Snap Shot No Pitch change just captures image on screen on gee Acquisition setting E z Normal Film thickness Multi layer Step EN Snap shot ii Color will capture and display a 3D color image iii DIC stands for Differential Interference Contrast and maybe desired for image enhancements with the use polarizers and a color prism iv Manual will require the users to set the Top and Bottom Focal Planes v Stitching Maybe used to quilt an array of images together 1 25x25 max array 2 Figure 2 shows stitched example 3 Contact Lab staff for additional training if needed Acquisition setting Normal Film thickness ee Fine a Color B M Manual E EU d Select Step to setup manually i Set the bottom 1 Scroll the mouse down past the lowest focal plane on the sample a If Red appears turn down the brightness using AB b Red indicates oversaturated signal on the Photomultiplier Tube 2 Set the TOP button ii Set the top 1 Scroll the mouse up past the top focal plane on the sample a If Red appears turn down the brightness using AB b Red indicates oversaturated signal on the Photomult
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