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Turbo-V 903 Pumping System

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1. EK 01 to TV 903 Pumping System ano Turbo V 903 Pumping System User Manual 87 901 016 01 A 173 306 11 Xpnoewo To TV 903 Pumping System and KINAYNO2 TO
2. 50 C service Agilent 1 oto Agilent advanced exchange service pe pia advanced exchange service cuvnup vo 174 306 pia va TIG Turbo V 903 Pumping System User Manual 87 901 016 01 A Xpnoewo
3. Mn 903 Pumping System Tia va to TV 903 Pumping System apkei O interlock Kal H Soft Start and AUTO O1avopm TOU yp oou pe to Soft Start EVEPY OXETIKI N CO TOU software 1 REMOTE I O INTERCONNECTION RS 232 485 COMMUNICATION DESCRIPTION Technical Information LED tou TV 903 Pumping System pe TI
4. O TV 903 Pumping System TV 903 Pumping System TOV 61010 1 170 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Xpnon KINAYNO2 Xpnoewo 11 01 80 C
5. H piac 48000 max To TV 903 Pumping System va Kadapo Kevo To TV 903 Pumping System UVATI and ev c computer host serial RS232 RS485 OZYTEUC TOU XELPLOTI KATA
6. TV 908 Pumping System TOU Kavi va ponn 6800 Nm Bolted Flange otepewdei M10 ano and 8 8 B wvi DN 160 Bolted M10 8 10 Nm To TV 903 Pumping System va eyKataotabei To TV 903 Pumping System TOU Turbo V 903 Pumping System User Manual 87 901 016 01 A 169 306 11 O6nyieo Xpnoewo NPOZOXH O TV 903 Pumping System 61010 1
7. va To TV 903 Pumping System pia Turbo V 903 Pumping System User Manual 87 901 016 01 A Xpnoewo 11 Kai va TO va
8. av dev H Oa H 2bar Turbo V 903 Pumping System User Manual 87 901 016 01 A 171 306 11 Xpnoewo MANA OA 172 306
9. TOU a KAVOVIKT HEPIOTPOPN apy 400 ms 1 N stop 1 Waiting for interlock 200 ms Turbo V 903 Pumping System User Manual 87 901 016 01 A Xpnoewo 11 Tou TV902 Navigator Tia va otapamoete to TV 903 Pumping System apket va O KINAYNO2 TO controller ro TV 903 Pumping System Power Supply 969 6501 TO
10. EPXEOTE TO MOTE va to TV 903 Pumping System va 85 399 NPOZOXH va To TV 903 Pumping System 166 306 Turbo V 903
11. va 01 and 20 C 70 C OOXEUK ano 0 95 un a pe TOV a 10 and NPOZOXH o Agilent Turbo V 903 Pumping System User Manual 87 901 016 01 A 165 306 11 O nyico Xpnoewo Mpoero acia To TV 903 Pumping System pia EI IKI cav va EXOUV KATA
12. 500 400 Pumping Speed L s 300 200 100 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 Inlet Pressure mbar Figure 5 Graph of nitrogen pumping speed vs inlet pressure Output Power during High Temperature Condition When the body temperature reaches a value gt 45 C the maximum output power decreases with a rate of 3 W C up to a max body temperature of 55 C If the body temperature exceed 55 C the controller goes in status 6 Fail Turbo V 903 Pumping System User Manual 87 901 016 01 A 267 306 18 Technical Information Interconnections Interconnections The following figure shows the TV 903 Pumping System interconnections Output Power Supply Ti External fan ground Serial Line Input Output Figure 6 Interconnections 268 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Earth ground Connection We recommend that you fit a separate earth ground conductor to the TV903 Pumping System Use a separate insulated green yellow conductor and use a M5 x 10 screw and shake proof washer fitted to the earth hole on the pump to secure the ea
13. 162 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Xpnoewo 11 O UC TOU Agilent H Agilent EK pe TV 903 Pumping System and pia AIO To
14. Postava 2 Pr prava na in tal ciu 224 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Navod na Obsluhu 15 In tal cia POZOR Neodstra ujte lepiacu p sku a ochrann uz ver sk r ne pripoj te turbov vevu k syst mu Zariadenie v dy nain talujte v miestnosti a v iadnom pr pade ho nepou vajte v prostred v ktorom by bolo vystaven vplyvu po asia d sneh mr z prachu agres vnym plynom v bu n m alebo ve mi hor av m l tkam Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny tlak Z bary nad rov ou atmosf rick ho tlaku a teplota od 10 C do 35 C relat vna vlhkos 0 90 bez kondenz cie V pr tomnosti magnetick ho po a mus by v veva chr nen vhodn m ochrann m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 903 Pumping System sa mus pripoji k prim rnej v veve pozri Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 225 306 15 N vod na Obsluhu Upevnenie vyvevy Ak sa objav chyba rotora pripojenie v vevy k syst mu bude vystaven siln mu to iv mu momentu Ak pripojenie nie je dostato ne pevn aby to iv mu momentu odolalo m e sa odpoji v veva od syst mu alebo kryt motora od pl a v ve vy V takom pr pade sa m u z v vevy alebo syst mu prudko vymr ti ko
15. Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 163 306 11 O6nyieo Xpnoewo AUTO TO OUHBALIKOUG NPOZOXH av O av va TO 164 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Xpnoewo 11 TT a va eyyundei aflomotiac Agilent va 01 a KATA ty Kal
16. Turbo V 903 Pumping System User Manual 87 901 016 01 A 239 306 16 Priro nik za Navodila Pritrjevanje rpalke POZOR Po direktivi EN 61010 1 spada TV 903 Pumping System v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava TV 903 Pumping System ima vhodne izhodne in serijske priklju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Prepri ajte se da je izolacija naprave priklju ene na TV 903 Pumping System primerna tudi v primerno ene napake kar je opisano v direktivi EN 61010 1 240 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Uporaba Priro nik za Navodila 16 Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 80 C SVARILO Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manjSi od 2 bara nad pritiskom atmosfere
17. Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer TV 903 Pumping System m koples til en hovedpumpe se skjema i Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 139 306 9 Instruksjon Manual Festing av pumpen ezt tja Dersom rotoren delegges kan tilkoplingen mellom pumpen og systemet utsettes for et betydelig dreiemoment Dersom tilkoplingen ikke er sterk nok til t le dette dreiemomentet kan pumpen lesne fra systemet eller motoren kan losne fra pumpens hylster dette tilfellet kan metallsplinter kastes ut fra pumpen eller fra systemet Dette kan fore til alvorlige skader eller dod og eller skader p annet utstyr i nerheten Fest TV 903 Pumping System i en stabil posisjon monter turbopumpens innlopsflens til systemets motflens med en tilkopling som er i stand til t le et dreiemoment p 6800 Nm rundt sin egen akse For eksempel denne Bolted Flange kan festes med ekstra resistente st lskruer M10 klasse over 8 8 Folgende tabell viser det ngdvendige antall skruer og de korresponderende torgue fester Flens Skruenes storrelse Ant Strammemoment DN 160 Bolted M10 8 10 Nm TV 903 Pumping System kan monteres i en valgfri stilling TV 903 Pumping System m ikke festes gjennom fundamentet 140 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instruksjon Manual 9 t are TV 903
18. a with no flashing the pump is normally rotating a slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition TV 903 Pumping System Switching off To switch off the TV 903 Pumping System it is necessary to remove the mains The integrated controller immediately stops the pump WARNING The TV903 Pumping System Power Supply 969 6501 must be powered with 3 wire power cord see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable Turbo V 903 Pumping System User Manual 87 901 016 01 A 255 306 17 Instructions for Use Emergency Stop To immediately stop the TV 903 Pumping System in an emergency condition it is necessary to remove the supply cable from the mains plug 256 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instructions for Use 17 Maintenance The TV 903 Pumping System does not require any maintenance Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the
19. 175 Felhaszn l i K zik nyv 177 Biztons gi tmutat Turb molekul ris szivatty khoz 178 ltal nos inform ic 179 T rol s 181 El k szit s telepit sre 182 Telepit s 183 A szivatty r gzit se 184 Haszn lat 186 Karbantart s 189 Megsemmisit s 190 Podrecznik Instrukcji 191 Wskazowki dotyczace bezpiecze stwa dla Pomp Turbomolekularnych 192 Informacje ogolne 193 Magazynowanie 195 Przygotowanie do instalacii 196 Instalacja 197 Mocowanie pompy 198 Turbo V 903 Pumping System User Manual 87 901 016 01 A Contents Uzytkowanie 200 Konserwacja 203 Przetworstwo odpadow 204 14 N vod k Pou it 205 Bezpe nostn n vod pro Turbomolekul rn v v vy 206 V eobecn informace 207 Uskladn n 209 P prava kinstalaci 210 Instalace 211 Upevn n v v vy212 Pou it 214 dr ba 217 Likvidace 217 15 N vod na Obsluhu 219 Bezpe nostn pokyny pre Turbomolekul rne v vevy 220 V eobecn inform cie 221 Uchov vanie 223 Pr prava na in tal ciu 224 In tal cia 225 Upevnenie v vevy 226 Pou itie 228 dr ba 231 Turbo V 903 Pumping System User Manual 87 901 016 01 A 11 306 Contents 12 306 16 17 Likvid cia 231 Priro nik za Navodila 233 Varnostna navodila za Turbomolekularne rpalke 234 Splo ne informacije 235 Shranjevanje 236 Priprava za montazo 237 Monta a 238 Pritrjevanje rpalke 239 Uporaba 241 Vzdr evanje 244 Odlaganje
20. SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina Crpalke ne uporabljajte v prisotnosti eksplozivnih plinov Turbo V 903 Pumping System User Manual 87 901 016 01 A 241 306 16 Priro nik za Navodila Vklju itev in uporaba naprave TV 903 Pumping System Za vklju itev TV 903 Pumping System morate priklju iti napetost Vgrajeni kontroler samodejno prepozna zaporo in prisotnost signalov za vklop ter za ene rpalko Na in mehkega zaganjanja Soft Start je predviden za zagon rpalke po dalj em obdobju neobratovanja To omogo a optimalno porazdelitev maziva v le ajih Za ponovno aktiviranje Soft Start na ina je potreben ustrezen programski ukaz ali Remote I O glej poglavja Povezave in Opis komunikacije RS 232 485 v prilogi Technical Information Zelena LED dioda ki se nahaja na sprednji plo i TV 903 Pumping System s hitrostjo utripanja ozna uje delovne pogoje sistema a Brez utripanja rpalka je normalno vrti Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju Waiting for interloc Hitro utripanje perioda pribli no 200 ms Napaka izklju evanje naprave TV 903 Pumping System Za izklju itev TV 903 Pumping System morate izklju iti napetost Vgrajen kontroler takoj zaustavi rpalko 242 306 Turbo V 903 Pumping System User Manual 87 901 016
21. TV 903 Pumping System TV902 Navigator 173 173 174 115 o nyiwv ste Agilent Technologies 162 172 161 306 11 Xpnoewo Mopiak c Eyxe1pi 10 Eva 11000 pe Le potopa POTOPA va KINAYNOZ TOU kai
22. Turbo V 903 Pumping System User Manual 87 901 016 01 A 227 306 15 N vod na Obsluhu Pou itie NEBEZPE T to as popisuje z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 80 C Nikdy nepouzivajte turbovyvevu ak vstupna priruba nie je pripojen k vakuovej komore alebo ak nie je zablendovana V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho pr slu enstva Vysok teploty m u sp sobi pop leniny Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu vetrajte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na ventila nom vstupe mus by ni ne 2 bary nad atmosf rick m tlakom NEBEZPE Ak v vevu pou vate na od erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov 228 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Navod na Obsluhu 15 Zapnutie a pouzitie zariadenia TV 903 Pumping System Ak chcete zapn zariadenie TV 903 Pumping System mus te ho pripoji ku zdroju nap jania Integro
23. Het TV 903 Pumping System is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 48000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement Het TV 903 Pumping System is volledig vrij van verontreinigingen en is dus 00k geschikt voor toepassingen die een schoon vacu m verlangen Het TV 903 Pumping System is bovendien van hulpconnectors voorzien waarmee een extra ventilator kan worden gevoed en waarmee het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend RS 232 of RS 485 In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical information Deze handleiding maakt van de volgende symbolen gebruik vu tel Bij dit synbool staat tekst met procedures die indien niet opgevolgsd schade aan apparatuur kunnen veroorzaken Turbo V 903 Pumping System User Manual 87 901 016 01 A 91 306 6 Bedrijfshandleiding ANTENNES Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of method
24. 22 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruzioni per l uso 1 ar IH TV 903 Pumping System appartiene alla seconda categoria di installazione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimen tazione che soddisfi tale categoria Il TV 903 Pumping System ha dei connettori per gli ingres si uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso al TV 903 Pumping System abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A 23 306 1 Istruzioni per l uso Uso In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 80 C AVVERTENZA Non far funzionare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare lesioni alle persone ATTENZIONE Evitare urti oscillazioni o br
25. 87 901 016 01 A Istruktionsbog 7 Start og anvendelse af TV 903 Pumping System For at starte TV 903 Pumping System er det tilstr kkeligt at tilslutte et forsyningsstik Den indbyggede controller genkender blokerings og startsignaler automatisk og starter pumpen Soft Start metoden bruges n r man starter pumpen efter at den har st et stille over en l ngere periode Det giver mulighed for at fordele fedtmidlet i lejerne p bedste m de For at aktivere Soft Start metoden p ny skal ovenn vnte m de programmeres ved hj lp af software se afsnittene INTERCONNECTION og RS 232 485 COMMUNICATION DESCRIPTION i bilaget Technical Information Den grgnne LED der er anbragt p panelet p TV 903 Pumping System s fundament angiver systemets funktion ved blink konstant t ndt pumpen er i normal rotation langsomme blink periode p ca 400 ms systemet er 1 stilling for acceleration bremsning stop eller Waiting for interlock a hurtige blink periode p ca 200 ms fejl Stop af TV 903 Pumping System For at afbryde TV 903 Pumping System er det tilstrakkeligt at afbryde str mtilf rselen Den indbyggede controller afbryder straks pumpen Turbo V 903 Pumping System User Manual 87 901 016 01 A 115 306 7 Istruktionsbog For operatorens sikkerhed skal TV903 Pumping System Power Supply 969 6501 stromforsynes med et 3 tr det fodekabel se tabellen over de bestilbare stykker fo
26. Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Lein Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 901 016
27. H vitt minen 160 Alkuper isen ohjeiden k nn s pige Agilent Technologies 147 306 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergia saattaa vapautua VAROITUS T ss k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 148 306 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi Turbo V 903 Pumping System User Manual 87 901 016 01 A Ohjek sikirja 10 Yleisi tietoja T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilent in toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st TV 903 Pumping System on kokonaisj rjestelm joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuj
28. LY A vesz lyt jelz zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra ami ha nem megfelel en v gzik el s lyos szem lyi s r l sekhez vezethet A megjegyz sek fontos a sz vegb l kivonatolt inform ci kat tartalmaznak 180 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Felhaszn l i K zik nyv 12 T rol s A Agilent turbomolekul ris szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h6m rs klettartomany 20 C 70 C relativ p ratartalom O 95 nem kondenz l A turbomolekularis szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti ket Egy turbomolekul ris szivatty rakt roz si ideje 10 h nap a sz ll t s d tum t l sz m tva FIGYELEM Ha valamilyen okb l a rakt roz si id t t ll pik a szivatty t vissza kell vinni a gy rba Inform ci rt forduljon a helyi Agilent k pviselethez Turbo V 903 Pumping System User Manual 87 901 016 01 A 181 306 12 Felhaszn l i K zik nyv El k sz t s telep t sre A TV 903 Pumping Systemt k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon
29. System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Efekt pompowania jest uzyskiwany poprzez turbin obrotow o wysokiej pr dko ci max 48000 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci Urz dzenie TV 903 Pumping System jest ca kowicie pozbawiony czynnik w zanieczyszczaj cych a wi c odpowiedni do zastosowa gdzie jest wymagana tzw czysta pr nia Poza tym posiada z cza pomocnicze poprzez kt re istnieje mo liwo zasilania dodatkowego wentylatora zdalnego sterowania za po rednictwem g wnego komputera computer host pod czonego do linii szeregowej RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje przedstawiono w dodatku Technical information W tej instrukcji zastosowano nast puj ce umowne znaczenia UWAGA Komunikaty zwiekszonej uwagi sa wyswietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury Turbo V 903 Pumping System User Manual 87 901 016 01 A 193 306 13 Podrecznik Instrukcji ZAGROZENIE Komunikaty zagrozeniu przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidtowe wykonanie mogtoby spowodowac powaz
30. TV 903 Pumping Systemin k ynnistys ja k ytt TV 903 Pumping Systemin k ynnistykseen riitt ett se kytket n s hk verkkoon Sis nrakennettu valvoja tunnistaa automaattisesti lukitus ja k ynnistyssignaalit ja k ynnist pumpun Soft Start tapaa k ytet n pumpun k ynnistykseen pitkien seisokkiaikojen j lkeen T m sallii ihanteellisen voiteluaineen jakautumisen laakereihin Jotta k ynnistys voitaisiin suorittaa Soft Start tavalla tulee kyseinen tapa aktivoida uudelleen ohjelmiston tai Remote I O avulla ks kappaleet INTERCONNECTION ja RS 232 485 VIESTINN N KUVAUS Technical Information liitteess Vihre LED joka sijaitsee TV 903 Pumping System n perustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet a palaa jatkuvasti pumppu py rii normaalisti a vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa a vilkkuu nopeasti noin 200 ms n jakso virhetila TV 903 Pumping Systemin pys ytt minen TV 903 Pumping Systemin pys ytt miseen riitt ett se kytket n irti s hk verkosta Sis nrakennettu valvoja pys ytt pumpun v litt m sti Turbo V 903 Pumping System User Manual 87 901 016 01 A 157 306 10 Ohjek sikirja K ytt j n turvallisuuden takaamiseksi TV903 Pumping System Power Supply 969 6501 virran sy t n on tapahduttava pistokkeella
31. adgang til de spendingsforende dele Kontroll r at anordningen der er tilsluttet TV 903 Pumping System har en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A 113 306 7 Istruktionsbog Anvendelse Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet bor samtlige elektriske og pneumatiske tilslutninger udfores I forbindelse med opvarmning af vakuumkammeret m indlgbsflangens temperatur ikke overstige 80 C ADVARSEL FORSIGTIG Pumpen m aldrig aktiveres hvis indlobsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hjeelp af lukkeflangen Ror aldrig turbopumpen eller dens tilbehor i forbindelse med opvarmningsprocedurerne Den hoje temperatur kan resultere i skade p personer Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d r skal v re mindre end 2 bar over atmosf risk tryk ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser folges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser 114 306 Turbo V 903 Pumping System User Manual
32. kansainv lisesti hyv ksytty tyyppi ja 3 lla johtimella varustettua s hk kaapelia k ytt m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t Valvojassa kehittyv t korkeaj nnitteet voivat aiheuttaa vakavia onnettomuuksia tai jopa kuoleman Irrota s hk kaapeli ennen yksik n sis lle suoritettavien huoltotoimenpiteiden aloittamista H t pys ytys TV 903 Pumping System on pys ytett v h t tilassa irrottamalla s hk kaapeli pistorasiasta 158 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Huolto Ohjek sikirja 10 TV 903 Pumping System ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilent in korjauspalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Ennen pumpun l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus
33. ki je nadzorovana z ra unalnikom preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information Navodila so napisana po naslednjem standardnem protokolu Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i Opombe vsebujejo vse najbolj pomembne informacije iz besedila Turbo V 903 Pumping System User Manual 87 901 016 01 A 235 306 16 Priro nik za Navodila Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum 236 306 Turbo V 903 Pumping System
34. pojky kter odol to iv mu momentu 6800 Nm kolem sv osy Nap p rubu Bolted Flange lze p ipevnit vysokopevnostn mi ocelov mi rouby M10 t dy vy ne 8 8 N sleduj c tabulka uv d nezbytn po et roub a p slu n utahovac moment P ruba Velikost roub Po et Utahovac moment DN 160 Bolted M10 8 10 Nm Vyv va TV 903 Pumping System se m e instalovat v libovoln poloze V v vu TV 903 Pumping System nelze p ipev ovat vyu it m jej z kladny 212 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A N vod k Pou it 14 POZOR Podle sm rnice EN 61010 1 pat v v va TV 903 Pumping System do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du V v va TV 903 Pumping System je vybavena vstupn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Zajist te aby izolace za zen p ipojen ho k v v v TV 903 Pumping System byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A 213 306 14 N vod k Pou it Pou it NEBEZPE Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup P ed pou it m syst mu prove te v echna elektrick a pneum
35. v v v firmy Agilent Turbo V 903 Pumping System User Manual 87 901 016 01 A 209 306 14 N vod k Pou it Pr prava k instalaci V v va TV 903 Pumping System se dod v ve speci ln m ochrann m balen Pokud toto balen vykazuje zn mky po kozen k n muz mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby v v va TV 903 Pumping System nespadla a chra te ji p ed ot esy nebo vibracemi Balic materi l nevyhazujte do voln ho prost ed Tento materi l Ize 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 na t ma ivotn ho prost ed POZOR Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu Norm ln prost ed nechr n nou v v vu TV 903 Pumping System nem e po kodit P esto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m prachem 210 306 PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Postava 1 P prava k instalaci Turbo V 903 Pumping System User Manual 87 901 016 01 A Navod k Pouziti 14 Instalace POZOR Pied piipojenim turbomolekul rn vyv vy do syst mu nesund vejte adhezni a ochrann v ko Toto za zen instalujte pouze v m stnosti
36. 11 Xwveuon vou logo WEEE pe inv vupektika WEEE Auto UG egappoopevo AEN pall pe TOV pe TOV HE TO OXETIKA NE Turbo V 903 Pumping System User Manual 87 901 016 01 A 175 306 11 O nyico 176 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 12 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz ltal nos inform ic 179 T rol s181 El k szit s telepit sre 182 Telepit s 183 A szivatty r gz t se 184 Haszn lat 186 A TV 903 Pumping Sys
37. 90 bez opar W obecnosci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szezegotowego zapoznania sie z tematem patrz dodatek Technical Information TV 903 Pumping System musi by podtaczony do gl wnej pompy patrz schemat w Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 197 306 13 Podrecznik Instrukcji Mocowanie pompy ZAGROZENIE W przypadku uszkodzenia wirnika ztacze miedzy pompa i systemem moze by narazone na bardzo wysoki moment Jezeli ztacze jest niewystarczajace by wytrzyma wspomiany moment pompa mo e sie odczepi od systemu lub silnik mo e odczepi sie od obudowy pompy W takim przypadku fragmenty metalu moga by wyrzucone przez pompe lub przez system i moga one spowodowa powa ne uszkodzenia lub mier os b jak i uszkodzi aparature znajduj c sie w pobli u systemu Zamocowa TV 903 Pumping System w pozycji stabilnej montuj c ko nierz wej cia turbopompy do ko nierza systemu dokr caj c w taki spos b aby po czenie to wytrzyma o moment 6800 Nm wok w asnej osi Na przyk ad ta Bolted Flange mo e by zamocowana rubami M10 stalowymi o du ej wytrzyma o ci powy ej klasy 8 8 Niniejsza tabela opisuje ilo potrzebnych rub i na jaki moment trzeba je dokr ci Ko nierz Wymiary ruby N Moment dokr cenia TV 903 Pumping System mo e by zainstalowany w
38. 901 016 01 A Gebrauchsanleitung 2 Installation VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei Anschluss der Turbopumpe an das System abnehmen Das Ger t darf nur in geschlossenen Umgebungen installiert und nicht in Umgebungen benutzt werden wo es Witterungsbedingungen Regen Frost und Schnee Staub oder tzenden Gasen ausgesetzt ist oder die explosionsf hig oder mit einer erh hten Brandgefahr sind Beim Betrieb m ssen folgende Umgebungsbedingungen eingehalten werden a Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 10 C bis 35 C a Relative Luftfeuchtigkeit 0 90 2 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informationen siehe im Anhang Technical Information Der TV 903 Pumping System ist an eine Prim rpumpe anzuschlief en siehe Schema in Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 35 306 2 Gebrauchsanleitung Befestigung der Pumpe WARNUNG Wenn ein L uferschaden auftritt k nnte die Verbindung zwischen der Pumpe und dem System mit einem erheblichen Drehmoment belastet werden Setzt die Verbindung diesem Drehmoment keinen ausreichenden Widerstand entgegen besteht die M glichkeit dass sich die Pumpe vom System oder der Motor vom Pumpengeh use l st In diesem Fall k nnten Metallsplitter von der Pumpe oder vom System
39. 903 Pumping System laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Turbo V 903 Pumping System User Manual 87 901 016 01 A 155 306 10 Ohjek sikirja K ytt T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 80 C tta VAROITUS lk k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 2 baaria yli atmosf risen paineen VAROITUS Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell 156 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Ohjek sikirja 10
40. 903 Pumping System neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie je vybaven pomocn mi konektormi na pripojenie al ieho ventil tora ovl da ho na dia ku pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information N vod na pou itie obsahuje tieto tandardn ozna enia Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia Turbo V 903 Pumping System User Manual 87 901 016 01 A 221 306 15 N vod na Obsluhu 13 13 14 MW Nebezpe ie maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie Pozn mky upozor uj na d le it inform cie v texte 222 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Navod na Obsluhu 15 Uchovavanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce podmienky prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti O
41. 97 Gebruik 99 Inschakeling en gebruik van het TV 903 Pumping System Afzetten van het TV 903 Pumping System 100 Noodstop 101 Onderhoud 102 Afvalverwerking 103 Vertaling van de originele instructies EE Agilent Technologies 89 306 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen N Sa TIN Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 90 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving
42. De modus Soft Start is voorzien om de pomp te starten na een lange periode van stilstand Hierdoor is een optimale verdeling van het vet in de lagers mogelijk Om met Soft Start te starten moet deze modus met behulp van de software of Remote I O gemachtigd worden zie de paragrafen INTERCONNECTION en RS 232 485 COMMUNICATION DESCRIPTION in de bijlage Technical Information De groene LED op het paneel van de basis van het TV 903 Pumping System geeft door de frequentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waiting for interlock a knippert snel periode van circa 200 ms fouttoestand Afzetten van het TV 903 Pumping System Om het TV 903 Pumping System af te zetten behoeft slechts de stroomvoorziening te worden onderbroken De ingebouwde controller stopt onmiddellijk de pomp 100 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bedrijfshandleiding 6 Voor de veiligheid van de bediener dient het TV 903 Pumping System Power Supply 969 6501 gevoed te worden met een driedradige voedingskabel zie de tabel met de bestanddelen die u kunt bestellen voorzien van een stekker met internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken
43. De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 120 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bruksanvisning 8 Allm n information OBSERVER Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter Systemet TV 903 Pumping System best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin max 48000 varv min
44. Destination Controller Technical Information 18 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Turbo V 903 Pumping System User Manual 87 901 016 01 A 287 306 18 Technical Information Window Meanings Table 6 Window Meanings N Read Write Datatype Description 000 R W L Start Stop in remote mode the window is a read only 008 R W L Remote default or Serial configuration 100 R W L Soft Start write only in Stop condition 101 R W N Set Point type 102 R W N Set Point threshold expressed in Hz mA or s 103 R W N Set Point delay time between the pump start and the set point check seconds 104 R W L Set Point signal activation type the signal can be high level active or low level active 105 R W N Set point hysteresis in of threshold 106 R W L Water cooling 107 R W L Active Stop write only in stop 108 R W N Baud rate 288 306 Admitted Values Start 1 Stop 0 Remote 1 Serial 0 default 1 YES 1 NO 0 0 Frequency 1 Current 2 Time def
45. Instrukcji Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 192 306 Pompy Turbomolekularne opisane w niniejszej Instrukcji Obslugi posiadaja wysoka ilos energii kinetycznej spowodowanej bardzo wysoka predko cia obrotowa razem z masa wlaSciwa wirnik w W przypadku uszkodzenia systemu na przyktad z powodu kontaktu miedzy wirnikiem a stojanem lub z powodu pekniecia wirnika energia obrotowa mo e by zwolniona Aby unikna uszkodzenia aparatury i zapobiec uszkodzeniom ciata operator w nale y obowiazkowo przestrzega zalece dotyczacych instalacji opisanych w niniejszej instrukcji obstugi Turbo V 903 Pumping System User Manual 87 901 016 01 A Podrecznik Instrukcji 13 Informacje ogolne Ta aparatura jest przeznaczona do uzytku zawodowego U ytkownik musi przeczyta bardzo uwa nie niniejsz instrukcj ka da dodatkow informacje dostarczon przez firm Agilent przed u ytkowaniem aparatury Firma Agilent uchyla si od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego nieprzestrzegania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych Urz dzenie TV 903 Pumping System jest zintegrowanym systemem sk adaj cym si z pompy turbomolekularnej stosowanej do wytwarzania wysokich i ultra wysokich pr ni i z relatywnego kontrollera
46. Manual 87 901 016 01 A Istruzioni per l uso 1 immagazzinamento Per garantire il massimo livello di funzionalit ed affidabilit del le pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti con dizioni ambientali temperatura da 20 C a 70 C umidit relativa da 0 a 95 non condensante jl cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent Preparazione per l installazione Il TV 903 Pumping System viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TV 903 Pumping System e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Turbo V 903 Pumping
47. Pumping System Power Supply 969 6501 mit einem dreidr htigen Stromkabel siehe Tabelle der Bestellteile versorgt werden das mit einem auf internationaler Ebene genehmigten Stecker ausgestattet ist Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforderungen der EG Richtlinien zu entsprechen Die Hochspannungen die sich im Controller entwickeln k nnen zu schweren Sch den oder zum Tod fiihren Vor den Wartungsarbeiten innerhalb der Einheit die Stromkabel trennen Not Aus Zur Stillsetzung des TV 903 Pumping System in Notsituationen muss das Netzkabel von der Steckdose herausgezogen werden 40 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Gebrauchsanleitung 2 Wartung Der TV 903 Pumping System erfordert keine Wartung Eventuelle Eingriffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden WARNUNG Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service in Anspruch genommen werden der eine general berholte Pumpe als Ersatz f r die defekte Pumpe zur Verf gung stellt Bevor man dem Hersteller eine Pumpe zur Reparatur oder den Umtauschdienst eingesendet ist das Formular Sicherhe
48. Pumping System h rer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarden Kople derfor anordningen til en ledning for stromtilforsel som tilfredsstiller kravene for denne klassen TV 903 Pumping System er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre stromkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til TV 903 Pumping System har en egnet isolering ogs under forhold med en enkel feil i fglge EN 61010 1 standarden Turbo V 903 Pumping System User Manual 87 901 016 01 A 141 306 9 Instruksjon Manual Bruk De viktigsteinstruksjonene for korrekt bruk finnes i dette avsnittet For systemet tas i bruk m en utfore alle elektriske og pneumatiske koblinger Ved en eventuell oppvarmingen av vakuumkammeret m temperaturen ved inngangsflensen ikke overskride 80 C ADVARSEL Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke beror turbopumpen eller noe av tilleggsutstyret under oppvarmingen De hoye temperaturene kan fore til brannskader FORSIKTIG Unng stat svingninger eller plutselige bevegelser av turbopumpen n r den er i funksjon Lagrene kan skades Bruk stav og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen gjennom den dertil egnede pni
49. System User Manual 87 901 016 01 A 189 306 12 Felhaszn l i K zik nyv Megsemmis t s A c mk n jelenl v WEEE logo jelent se A lent l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad ES A L SZ N LX i 190 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 13 Podrecznik Instrukcji Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 192 Informacje ogolne 193 Magazynowanie 195 Przygotowanie do instalacii 196 Instalacja 197 Mocowanie pompy 198 Uzytkowanie 200 Wtaczenie i U ytkowanie TV 903 Pumping System 201 Zatrzymanie TV 903 Pumping System 201 Zatrzymanie Awaryjne 202 Konserwacja 203 Przetworstwo odpadow 204 Ttumaczenie instrukcji oryginalnej e Agilent Technologies 191 306 13 Podrecznik
50. System User Manual 87 901 016 01 A 19 306 1 Istruzioni per l uso Pr ione per l in 27 Fatal Onde evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata NOTA Il TV 903 Pumping System non pu essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comunque di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Figura 1 Preparazione per l installazione 20 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruzioni per l uso 1 Installazione agaid 7a Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema Installare questo apparato solo in ambienti chiusi ed in ogni caso non utilizzarlo in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali a pressione massima 2 bar oltre la pressione atmosferica a temperatura da 10 C a 35 C umidit relativa 0 90 non condensante In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni sche
51. Temperaturomr de 20 C till 70 C Relativ fuktighet O till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r f rsta g ngen De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet Nd Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information Turbo V 903 Pumping System User Manual 87 901 016 01 A 123 306 8 Bruksanvisning F rberedelser f r installation TV 903 Pumping System levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TV 903 Pumping System inte tappas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd taa ad Komponenter som skall uts ttas f r vakuum far inte hanteras med bara h nder pga kontamineringsrisken Anv nd alltid handskar eller liknande skydd Normal p verkan fr n omgivningen kan inte skada TV 903 Pumping System Trots det r det s krast att h lla pumpen nerpackad tills den ska installeras i systemet f r att f rhindra att det kommer in damm eller annat i den PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969
52. a helyi k pviselethez A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le a TV 903 Pumping Systemt s ker lje annak b rmilyhez val hozz t s t vagy r zk d s t Ne dobja el a csomagol anyagokat a k rnyezetben Az anyag teljesen jrafeldolgozhat s megfelel a 85 399 EK a K rnyezetv delemr l sz l ir nyelvnek FIGYELEM G zkivon si probl m k elker l s re ne rintse meg puszta k zzel a v kuumnak kitett komponenseket Mindig viseljen keszty t vagy m s alkalmas v d felszerel st VESZ LY Ha csak a l gk rnek van kit ve az nem k ros thatja a TV 903 Pumping Systemt M gis aj nlatos z rva tartani a szivatty t a rendszerbe val telep t sig megakad lyozva a porral val szennyez d s b rmely form j t PUMPING SYSTEM 969 8811 bra 1 El k szit s telepit sre 182 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Felhaszn l i K zik nyv 12 Telepites FIGYELEM Ne t vol tsa el az ntapad cs kot s a v d kupakot csak a turb szivatty rendszerre csatlakoztat sa el tt Csak belt ri k rnyezetbe telepitse az eszk zt 6s semmilyen esetben se haszn lja k ros id j r si jelens geknek es h j g pornak agressziv g zoknak kitett illetve robban s vagy t zveszelyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri ny
53. bara nad pritiskom atmosfere a temperatura Od 10 C od 45 C a Relativna vlaZnost 0 90 brez kondenza V prisotnosti magnetnih polj mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information TV 903 Pumping System morate priklju iti na primarno rpalko glej Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A Priro nik za Navodila 16 Pritrjevanje rpalke e pride do napake na rotorju potem lahko med povezavo rpalke s sistemom pride do velikega navora e povezava ne more izdr ati tak nega navora se lahko rpalka izklju i iz sistema ali se ohi je motorja iztrga iz nostilca rpalke V tak nem primeru lahko priletijo kovinski delci iz rpalke ali sistema in povzro ijo resne po kodbe ali smrt in ali po kodujejo okoli ko opremo Namestite TV 903 Pumping System na stabilno pozicijo tako da zmontirate dovodno prirobnico turbo rpalke na prirobnico na sistemu tako da povezava lahko zdr i navor ve ji od 6800 Nm okoli osi Na primer to prirobnico lahko namestite z mo nimi jeklenimi vijaki M10 razred vi ji od 8 8 Spodnja tabela prikazuje tevilo potrebnih vijakov in pripadajo i navor Prirobnica Velikost vijakov St Navor DN 160 Bolted M10 8 10 Nm TV 903 Pumping System lahko montirate v tevilne pozicije Naprave TV 903 Pumping System ne morete fiksirati z njegovo lastno spodnjo ploskvijo
54. for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 169 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353
55. geschleudert werden die schwere Sch den oder den Tod und oder Sch den an benachbarten Ger ten zur Folge haben k nnten Den TV 903 Pumping System in einer stabilen Position befestigen Den Eintrittsflansch der Turbopumpe am Gegenflansch des Systems montieren Diese Verbindung soll einem Drehmoment von 6800 Nm um die eigene Achse standhalten Zum Beispiel kann dieser Bolted Flange unter Verwendung hoch widerstandsf higer Stahlschrauben M10 Klasse h her als 8 8 befestigt werden Die folgende Tabelle zeigt die erforderliche Anzahl Schrauben und das jeweilige Anzugsmoment Der TV 908 Pumping System kann in jeder beliebigen Position installiert werden Der TV 903 Pumping System kann nicht mittels seines Sockels befestigt werden 36 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Gebrauchsanleitung 2 MESTE Der TV 903 Pumping System geh rt zur zweiten Installationsklasse berdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung muss daher an eine Speisungsleitung angeschlossen werden die dieser Kategorie entspricht Der TV 903 Pumping System hat Verbinder f r den Ein und Ausgang und die Schnittstellenkommunikation die an die Au enkreise angeschlossen werden m ssen sodass kein Teil unter Spannung zug nglich ist Sicherstellen dass die Isolie rung der an den TV 903 Pumping System angeschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlin
56. jamais faire fonctionner la pompe si la bride entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions graves Nas Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque car les paliers pourraient se d t riorer Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bar au del de la pression atmosph rique AVERTISSEMENT Lorsgue la pompe est utilis e pour le pompage de gaz toxigues inflammables ou radioactifs suivre les proc dures typigues de chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs Turbo V 903 Pumping System User Manual 87 901 016 01 A 53 306 3 Mode d emploi Mise en marche et utilisation du TV 903 Pumping System Pour allumer le TV 903 Pumping System il suffit de fournir la tension d alimentation Le contr leur incorpor reconna t automatiquement la pr sence de signaux d interlock et de d marrage et il actionne la pompe Le mode Soft Start est pr vu pour d marrer la pompe apr s une p riode d arr t prolong e Celui ci permet une distribution optimale de la grai
57. kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hjaelp af en hurtigroterende turbine 48000 omdr min max Turbinen drives af en elektrisk trefasemotor med hgj effekt TV 903 Pumping System er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum TV 903 Pumping System har endvidere hj lpestik der gor det muligt at forsyne en ekstra ventilator og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse RS 232 eller RS 485 De folgende afsnit indeholder oplysningerne der er ngdvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger Turbo V 903 Pumping System User Manual 87 901 016 01 A 107 306 7 Istruktionsbog I brugsanvisningen anvendes f lgende standardrubrikker mager Denne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader ANUS Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne modsat fald er der risiko for sv re personskader Dette g r opm rksom p vigtig information i teksten 108 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruktionsbog 7 Opbevaring Det er ngdvendigt at overholde folgende forskrifter for at sikre optim
58. liberada ATEN AO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instru es de instala o descritas neste manual 74 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de Istru es 5 Informa es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instru es e todas as informa es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instru es pelo uso indevido por parte de pessoas n o treinadas por opera es n o autorizadas ou pelo uso contr rio s normas nacionais espec ficas O TV 908 Pumping System um sistema integrado constitu do por uma bomba turbomolecular para aplica es de alto e ultra alto v cuo e do relativo controller O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 48000 r p m m x movida por um motor el ctrico trif sico de alto rendimento O TV 903 Pumping System totalmente isento de agentes contaminadores e portanto adequado para aplica es que requerem um v cuo limpo Al m disso tem conectores auxiliares atrav s dos quais poss vel alimentar um ventilador adicional
59. mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned pump to replace that broken down Before returning the pump to the constructor for repairs or advanced exchange service the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a pump is to be scrapped it must be disposed of in accordance with the specific national standards Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale Turbo V 903 Pumping System User Manual 87 901 016 01 A 257 306 17 Instructions for Use Disposal 258 306 Turbo V 903 Pumpin
60. nie wymaga adnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowa niony personel ZAGROZENIE Przed wykonaniem jakiejkolwiek interwencji na systemie nale y odtaczy go od zasilania otworzy odpowiedni zaw r wlotu powietrza odczeka a do catkowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy bedzie poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent kt ry pozwoli na uzyskanie zregenerowanego systemu w zastepstwie uszkodzonego systemu Przed wysytka systemu do konstruktora celem naprawy lub advanced exchange service nale y obowiazkowo wypetni i przekaza do miejscowego biura sprzeda y karte Bezpieczenstwo i Zdrowie zataczona do niniejszej instrukcji Jeden egzemplarz karty musi by wtozony do opakowania systemu przed jego wysytka Jezeli pompa musi by poddana rozbi rce rzystapi do jej eliminacji zgodnie z obowiazujacymi krajowymi normami w meritum sprawy Turbo V 903 Pumping System User Manual 87 901 016 01 A 203 306 13 Podrecznik Instrukcji Przetworstwo odpadow 204 306 Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi
61. opadkov 244 Instructions for Use 245 Safety Guideline for Turbomolecular Pumps 246 General Information 247 Storage 249 Preparation for Installation 250 Installation 251 Pump Fixing 252 Use 254 Maintenance 257 Disposal 257 Turbo V 903 Pumping System User Manual 87 901 016 01 A Contents 18 Technical Information 259 Description of the TV 903 Pumping System 261 Technical Specification 264 TV 903 Pumping System Outline 266 Interconnections 268 Earth ground Connection 269 How to Connect the Open Collector Inputs of the Controller 2 6 How to Connect the Outputs of the Controller 279 Procedure to Connect the Serial and 1 0 ports to an External Cable 282 Soft Start 291 Air Cooling Kit 292 Connection of the Fore Vacuum Pump 296 Connection to the Pump 297 Pump used in Presence of Magnetic Fields 298 Accessories and Spare Parts 299 Turbo V 903 Pumping System User Manual 87 901 016 01 A 13 306 Contents 14 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari Informazioni Generali 16 Immagazzinamento 19 Preparazione per l installazione 19 Installazione 21 Fissaggio della pompa 22 Uso24 Accensione ed Uso del TV 903 Pumping System Arresto del TV 903 Pumping System 25 Arresto di Emergenza 26 Manutenzione 27 Smaltimento 28 Traduzione delle istruzioni originali 5 Agilent Tec
62. p virkning kan ikke skade TV 903 Pumping System Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres p systemet Herved forhindres at der kommer stov i pumpen 110 306 PUMPING SYSTEM 969 8811 4 48VDC POWER SUPPLY 969 6501 Figur 1 Forberedelser f r installation Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruktionsbog 7 Installation diere Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet Dette apparat m kun installeres i lukkede omgivelser og m under ingen omstandigheder benyttes p steder med skiftende vejrforhold regn is sne stov aggressive luftarter eller i omgivelser med eksplosionsfare eller gget risiko for brand F lgende krav til omgivelsesforholdene g lder ved drift a max tryk 2 bar over det atmosf riske tryk temperatur fra 10 C til 35 C relativ luftfugtighed 0 90 ikke kondenserende Hvis pumpen er anbragt i nerheden af elektromagnetiske felter skal den afskarmes Se bilaget Technical Information for yderligere oplysninger TV 903 Pumping System skal tilsluttes en hovedpumpe se skemaet Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 111 306 7 Istruktionsbog Fastgorelse af pumpe Hvis rotoren beskadiges kan forbindelsen mellem pumpen og systemet blive udsat for et kraftigt drejemoment Hvis forbindelsen ik
63. sah dr by uvniti jednotky privodni kabel odpojte Nouzov zastaven Pro okam it zastaven vyv vy TV 903 Pumping System v nouzov situaci je treba odpojit nap jec kabel z nap jec z suvky 216 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A dr ba N vod k Pou it 14 V v va TV 903 Pumping System nevy aduje dnou dr bu Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby NEBEZPE Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V pr pad poruchy kontaktujte technick servis firmy Agilent kter m e dodat n hradn repasovanou v v vu vym nou za porouchanou P ed odesl n m vyv vy v robci na opravu nebo v m nu za repasovan kus vypl te list Zdrav a bezpe nost p ilo en k tomuto n vodu a ode lete ho do kancel e m stn ho prodejn ho odd len P ed odesl n m p ibalte k za zen kopii tohoto listu Likvidace Pokud se m v v va vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami V znam loga WEEE nach zej c ho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovan m WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v
64. show the pump and the controller Figure 2 Controller model 969 6500 Figure 3 Pumping System model 969 8811 Turbo V 903 Pumping System User Manual 87 901 016 01 A 261 306 18 Technical Information Pump Description The pump consists of a high frequency motor driving a turbine fitted with 5 bladed stages and 2 Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium alloy machined from a single block The Macrotorr stages are in the form of two discs The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy During normal operation the motor is fed with a voltage of 27 Vac three phase at 800 Hz To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio The pump has to be air cooled and an external fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating If the therm
65. t to v v vy Podrobn informace jsou uvedeny v p loze Technical Information Tento manu l pou v n sleduj c standardn protokol POZOR V stra n hl en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen Turbo V 903 Pumping System User Manual 87 901 016 01 A 207 306 14 N vod k Pou it UTAN Varovn hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v pripad nedodr en mohly zp sobit v n raz Pozn mky obsahuj d le it informace p evzat z textu 208 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A N vod k Pou it 14 Uskladn n Aby byla zaji t na maxim ln provozuschopnost a spolehlivost turbomolekul rn ch v v v firmy Agilent mus te dodr ovat n sleduj c pokyny P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rni v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln a skladovatelnost turbomolekularni v v vy je 10 m s c ode dne doru en POZOR Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis
66. warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52
67. with forced air 48 Vdc 10 DC 320 W 290 W Ramp status with forced air 250 W Normal Autotuning status with forced air 2 x T5A250H UNI EN 292 1 UNI EN 292 2 EN 61010 1 2001 EN 61326 1 2006 Emission level Class B for Residential Application Immunity level for Industrial Application With European or NEMA plug 3 meters long optional RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and T Plus software optional 2 20 C to 70 C 18 7 41 2 When the TV 903 Pumping System has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature Turbo V 903 Pumping System User Manual 87 901 016 01 A 265 306 18 Technical Information TV 903 Pumping System Outline The following figure shows the TV 903 Pumping System outlines dimensions are in mm inches Figure4 TV 903 pumping system outline 266 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Nitrogen Pumping Speed 800 rr 700 600
68. 01 A Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
69. 01 A Priro nik za Navodila 16 SVARILO Za varnost operaterja mora biti TV 903 Pumping System Power Supply 969 6501 napajan preko triveznega napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Visoka napetost ki je prisotna v krmilniku lahko povzro i hude po kodbe ali smrt Preden za nete z vzdr evalnimi postopki v notranjosti izvlecite napajalni kabel Zaustavitev v sili Za takoj enj izklop naprave TV 903 Pumping System je treba izklju iti napetostni kabel iz napajanja Turbo V 903 Pumping System User Manual 87 901 016 01 A 243 306 16 Priro nik za Navodila Vzdr evanje Naprave TV 903 Pumping System ni potrebno vzdr evati Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjeno rpalko s popravljeno Preden odnesete rpalko na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je prilo en navodilom in ga poslate lokalni prodajni pisarni Pred
70. 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System Turbo V 903 Pumping System Turbo V 903 Pumping System User Manual 87 901 016 01 A 3 306 Turbo V 903 Pumping System 4 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Contents Contents 1 Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni Generali 17 Immagazzinamento 19 Preparazione per l installazione 19 Installazione 21 Fissaggio della pompa 22 Uso 24 Manutenzione 27 Smaltimento 28 2 Gebrauchsanleitung 29 Sicherheitshinweise f r Turbomolekula
71. 3 Pumping System User Manual 87 901 016 01 A Mode d emploi 3 Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut Turbo V 903 Pumping System User Manual 87 901 016 01 A 57 306 3 Mode d emploi Mise au rebut 58 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual A Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 60 Informaci n general 60 Almacenamiento 63 Preparaci n para la instalaci n 64 Instalaci n 65 Fijaci n de la bomba 66 Uso68 Encendido y Uso del TV 903 Pumping System 69 Parada del TV 903 Pumping System 69 Parada de Emergencia 70 Mantenimiento 71 Eliminaci n 72 Traducci n de las instrucciones originales EE Agilent Technologies 59 306 4 Manual de istrucciones Indicaciones de Seguridad para Bombas
72. 3 Pumping System User Manual 87 901 016 01 A Technical Information 18 How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The following figure refers to the programmable set point signal on pins lland9 P1 1 Controller 15 08 45 08 gt A 90 24V 9 1 N 1 Figure 16 Typical output connection The following figure shows a typical output connection to a relay coil Turbo V 903 Pumping System User Manual 87 901 016 01 A 279 306 18 Technical Information AR 4 5 el LP fonolo DIE JE ENIO Lol Figure 17 Output to a relay coil P2 Serial Figure 18 9pin connector This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 903 Pumping System Table 3 Signal characteristics and use 280 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 to Connect the Outputs of the Controller v 5 2 Signal name nn 5 V OUT TX RS232 ptional GND RS485 1 2 3 4 5 6 7 8 9 Reserved A serial communication kit with a
73. 5 399 para la preservaci n del medio ambiente Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada El TV 903 Pumping System no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo 64 306 PUMPING SYSTEM 969 8811 ji 48VDC POWER SUPPLY 969 6501 Figura 1 Preparaci n para la instalaci n Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de istrucciones 4 Instalacion ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema Este equipo debe ser instalado s lo en ambientes cerrados y en ninguna circunstancia podr utilizarse en ambientes expuestos a agentes atmosf ricos lluvia hielo nieve polvos gases agresivos ni en ambientes explosivos o sujetos a elevado riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 10 C a 35 C humedad relativa O 90 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Info
74. 56 Mise au rebut 57 Traduction de la mode d emploi originale EE Agilent Technologies 43 306 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e ARIA ANR Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 44 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Mode d emploi 3 Indications g n rales Cet appareillage a t con u en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Le TV 903 Pumping System est un syst me int gr constitu d une pompe turbomol culai
75. 6501 Figur 1 F rberedelser f r installation 124 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bruksanvisning 8 Installation ssa dan Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet Denna apparat f r endast installeras inomhus Den f r inte anv ndas i milj er som uts tts f r atmosf rf r ndringar regn is sn damm fr tande gaser eller i omr den med h g explosions eller brandrisk F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar over atmosf riskt tryck a temperatur fr n 10 C till 45 C relativ luftfuktighet 0 90 utan kondens I n rvaro av magnetf lt ska pumpen skyddas med s rskilda sk rmar Se bilagan Technical information f r ytterligare upplysningar TV 903 Pumping System m ste anslutas till en huvudpump se schemat i Technical information Turbo V 903 Pumping System User Manual 87 901 016 01 A 125 306 Bruksanvisning Fasts ttning av pump VARNING I h ndelse av rotorfel kan anslutningen mellan pumpen och systemet uts ttas for ett h gt vridmoment Om anslutningen inte t l ovann mnda vridmoment kan pumpen lossna fr n systemet eller motorn kan lossna fr n pumpens h lje detta fall kan metallf rem l slungas iv g fr n pumpen eller systemet och f rorsaka allvarliga skador eller d dsfall och eller skador p apparater i n rheten F st TV
76. 903 Pumping System User Manual 87 901 016 01 A 291 306 18 Technical Information Air Cooling Kit 292 306 TV 903 Pumping System An air cooling kit mod 5218 NM is available to improve the TV 908 Pumping System cooling during heavy operational conditions Single fan specifications a air flow 187 m h a input voltage 48 Vdc a dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 5W To supply the fan it is necessary to connect the fan supply to the P4 connector of the controller with the special shielded cable included into the kit to reduce noises and to accomplish to EMC norms Figure 21 Pumping system Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Air Cooling Kit Cable Fixing In order to avoid unwanted detachment of the Air cooling kit cable two fixing clamps are included together with the cable kit Figure 22 Kit cable fixing The following instructions detail how to fix the FAN cable with the TV903 Pumping System plastic Air cooling kit Press the two fixing clamps into the dedicated holes 7 mm diameter on the Air cooling plastic shroud qe sy 7 mm diameter hole Figure 23 Pressing of the clamps Turbo V 903 Pumping System User Manual 87 901 016 01 A 293 306 18 Technical Information Connect the FAN cable both on t
77. 903 Pumping System i ett stabilt l ge genom att ansluta turbopumpens intagsfl ns till systemets fl ns som m ste t la ett vridmoment p 6800 Nm kring sin axel Den h r Bolted Flange till exempel kan fixeras med h gh llfasta st lskruvar M10 klass h gre n 8 8 I tabellen nedan anges hur m nga skruvar som beh vs och med vilket moment de ska dras t Flans Dimension skruvar Ant Atdragningsmoment DN 160 Bolted M10 8 10 Nm TV 903 Pumping System kan installeras i valfri position TV 903 Pumping System systemet kan inte fastsp nnas med sin egen bas 126 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bruksanvisning 8 usara TV 903 Pumping System tillh r den andra installationsklassen eller versp nningsklassen enligt standard EN 61010 1 Anslut d rf r anordningen till en elledning som uppfyller kraven f r denna klass TV 903 Pumping System r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon sp nningsf rande del Kontrollera att anordningen som r ansluten till TV 903 Pumping System har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A 127 306 8 Bruksanvisning Anv ndning OBSERVER I denna paragraf beskrivs de huvudsakliga driftsf rloppen Innan du anv nd
78. Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Retum is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessaries from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packag
79. Gebrauchsanleitung 2 Einschaltung und Gebrauch des TV 903 Pumping Systems Zur Einschaltung des TV 903 Pumping System ist es mit der erforderlichen Versorgungsspannung zu versorgen Der eingebaute Controller erfasst automatisch das Vorhandensein von Interlock und Anlaufsignalen und startet die Pumpe Der Modus Soft Start ist zum Einschalten der Pumpe nach einem l ngeren Stillstand vorgesehen Dies erm glicht eine optimale Fettverteilung in den Lagern Um einen Start mit aktivem Soft Start vorzunehmen muss der genannte Modus iber Software oder Remote I O wieder bef higt werden siehe Abschnitte INTERCONNECTION und RS 232 485 COMMUNICATION DESCRIPTION im Anhang Technical Information Die gr ne LED im Boden Schaltfeld des TV 903 Pumping System gibt mit der H ufigkeit ihres Blinkens die Betriebsbedingungen des System an a Daueranzeige Die Pumpe befindet sich im normalen Betrieb Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus Stoppen des TV 903 Pumping System Zum Stoppen des TV 903 Pumping System ist die Versorgungsspannung abzuschalten Der eingebaute Controller sorgt f r den sofortigen Pumpenstopp Turbo V 903 Pumping System User Manual 87 901 016 01 A 39 306 2 Gebrauchsanleitung WARNUNG F r die Sicherheit des Bedieners muss der TV 903
80. M10 8 10 Nm A TV 903 Pumping System b rmely helyzetben felszerelhet A TV 903 Pumping System nem r gzithet az alapj n kereszt l 184 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Felhaszn l i K zik nyv 12 1973831116 ATV 903 Pumping System a m sodik telep t si vagy t lfesz ltseg kateg ri hoz tartozik az EN 61010 1 szabv ny szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zatra A TV 903 Pumping Systemnak olyan bemeneti kimeneti s soros kommunik ci s csatl z sai vannak amelyeket gy kell k ls aramk r kh z csatlakoztatni hogy semmilyen fesz lts g alatt l v r sz ne legyen hozz f rhet Gy z dj n meg arr l hogy a TV 903 Pumping Systemhoz csatlakoztatott eszk z szigetel se megfelel m g egyes hib k eset n is az RN 61010 1 ir nyelv szerint Turbo V 903 Pumping System User Manual 87 901 016 01 A 185 306 12 Felhaszn l i K zik nyv Haszn lat Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat A rendszert az zemeltet s megkezd se el tt minden elektromos s pneumatikus csatlakoz sra k sse r A v kuumkamra esetleges felmeleged sekor a bemeneti karim n l m rt h m rs klet nem haladhatja meg a 80 C ot VESZ LY Soha ne haszn lja a turb szivatty t ha a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz nem z rja azt le a lez r karima Ne rintse meg a turb sz
81. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istru es Bedrijfshandleiding Istrukstionsbog Bruksanvisning Instruksjon manual 87 901 016 01 A 04 2011 Turbo V 903 Pumping System Pumping System model 969 8811 Controller model 969 6500 Power Supply model 969 6501 Ohjek sikirja Felhaszn l i k zik nyv Podrecznik instrukcji Navod k pouziti Navod na obsluhu Priro nik za navodila User Manual a Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 901 016 01 A Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied
82. Pumping System User Manual 87 901 016 01 A Xpnoewo 11 PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A 167 306 11 O6nyieo Xpnoewo Kal KOTI KI 168 306 Eykataotnote AUT pe KIVOUVO va 01 a neon 2 bar and 10 C 35 C a OXETIKI 0 90
83. ROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of guotation date Units without a Purchase Order
84. Start Stop In 3 Interlock In a lt lt lt E 5 Speed setting aa In 6 Speed setting In rer XM HH eee 8 Soft start In 9 24 vdc Out ns ae ESS mun 1 Programmable set point Out 12 Contact normally open ss Ge TVS ee ic gt n Li 15 e Ground Out e Programmable analog signal Signal Description Start Stop input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump Interlock input signal to control the pump rotation With the supplied cover connector the interlock signal is connected to the 24 Vdc pin and the interlock signal to the GROUND pin Turbo V 903 Pumping System User Manual 87 901 016 01 A 271 306 18 Technical Information Contact this output signal OPTOMOS solid state relay is enabled when the reference quantity chosen frequency current time is higher than the set threshold The signal is normally open it will close the circuit when activated or normally close The factory default setting are a Frequency 720 Hz 90 of the max rotational frequency Hysteresis 2 Activation type normally open Delay time O sec These setting can be changed by serial interfaces see windows me
85. Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a ser liberada UVA MANS TNM Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 60 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de istrucciones 4 Informaci n general ATENCI N Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas El TV 903 Pumping System es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vac o y por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombe
86. User Manual 87 901 016 01 A Priro nik za Navodila 16 Priprava za montazo TV 903 Pumping System je dobavljen v posebni za itni embala i Ce je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam TV 903 Pumping System ne pade iz rok oz ga ne stresajte EmbalaZo zavrzite v skladu s pravili Material je moZno v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Normalna izpostavljenost na okolje ne more po kodovati naprave TV 903 Pumping System Kljub temu je priporo ljivo da je rpalka zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Slika 1 Priprava za monta o Turbo V 903 Pumping System User Manual 87 901 016 01 A 237 306 16 Priro nik za Navodila Monta a POZOR Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem 238 306 Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje a Maksimalen pritisk 2
87. V 903 Pumping System ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Kuva 1 Valmistelut asennusta varten 152 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Ohjekasikirja 10 Asennus HUOMIO Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n Asenna laite ainoastaan suljettuun tilaan l k yt sit ilmastotekij ille sade pakkanen lumi p lylle tai sy vytt ville kaasuille altistuvissa r j hdysvaarallisissa tai eritt in palovaarallisissa tiloissa K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen l mp tila 10 C 35 C suhteellinen kosteus 0 90 ei tiivist v Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest TV 903 Pumping System tulee kytke p pumppuun ks Technical Information liitteen kaaviota Turbo V 903 Pumping System User Manual 87 901 016 01 A 153 306 10 Ohjek sikirja Pumpun kinnitys Jos roottori vaurioituu pumpun ja j rjestelm n v liseen liit nt n saattaa kohdistua
88. a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy pou i re im soft tartu skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis Turbo V 903 Pumping System User Manual 87 901 016 01 A 223 306 15 N vod na Obsluhu Pr prava na in tal ciu Zariadenie TV 903 Pumping System sa dod va v peci lnom ochrannom balen Ak je balenie po koden o sa m e sta napr klad po as dopravy obr te sa na miestneho predajcu Po as vyba ovania dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu i vibr ci m Obalov materi l nevyhadzujte ale zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a spl a po iadavky normy EEC 85 399 na ochranu ivotn ho prostredia POZOR Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu Be n vystavenie vplyvu prostredia nem e zariadenie TV 903 Pumping System po kodi Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii usadzovania prachu PUMPING SYSTEM 969 8811
89. a bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error Parada del TV 903 Pumping System Para parar el TV 903 Pumping System basta con desenchufarlo de la corriente El controler incorporado detiene inmediatamente la bomba Turbo V 903 Pumping System User Manual 87 901 016 01 A 69 306 4 Manual de istrucciones Para seguridad del operador el TV 903 Pumping System Power Supply 969 6501 debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los Las altas tensiones que se desarrollan en el controlador pueden provocar graves da os o incluso resultar fatales Desconectar el cable de alimentaci n antes de ejecutar las operaciones de mantenimiento en el interior de la unidad requerimientos de las normas CE Parada de Emergencia Para detener en condiciones de emergencia el TV 903 Pumping System es necesario desconectar el cable de alimentaci n de la toma de corriente 70 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de istrucciones 4 Mante
90. a tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 48000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori TV 903 Pumping System j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin J rjestelm n kuuluu lis ksi apuliittimi joiden avulla on mahdollista k ytt lis tuuletinta ohjata j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla RS 232 RS 485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information T m k sikirja k ytt seuraavanlaisia merkint j HUOMIO Huomio merkinn t varoittavat toimenpiteist joiden laiminly nti voi johtaa laitteen vaurioitumiseen Turbo V 903 Pumping System User Manual 87 901 016 01 A 149 306 10 Ohjek sikirja Varoitus merkint jen teht v n on kiinnitt k ytt j n huomio erityisiin toimintatapoihin joiden virheellinen suorittaminen voi aiheuttaa vakavia henkil vahinkoja Huomiot sis lt v t t rke tekstist otettua tietoa 150 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Ohjek sikirja 10 Varastointi Noudata seuraavia ohjei
91. a v dn m p pad v v vu nepou vejte v prost ed kde by byla vystavena atmosf rick m vliv m d mr z sn h prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem teplota od 10 C do 35 C relativn vlhkost 0 90 bez sr en V p tomnosti magnetick ch pol se v v va mus chr nit feromagnetick m st n n m Viz podrobn informace v p loze Technical Information V v va TV 903 Pumping System se mus p ipojit k prim rn mu erpadlu viz Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 211 306 14 N vod k Pou it Upevn n v vevy Pokud dojde k poru e rotoru propojen vyv vy se syst mem by mohlo b t vystaveno velk mu to iv mu momentu Pokud toto propojen nebude schopno vydr et tento to iv moment vyv va by se mohla odpojit od syst mu nebo kryt elektromotoru by se mohl odpojit od pl t v vevy V tomto p pad by z v vevy nebo syst mu mohly vylet t kovov lomky ktere by mohly zp sobit v n raz nebo smrt a tak po kodit okoln za izeni V v vu TV 903 Pumping System um st te do stabiln polohy a p vodn p rubu turbomolekul rn v v vy p ipevn te k protip rub syst mu pomoc p
92. aakt met sterke stalen schroeven M10 klasse hoger dan 8 8 In de volgende tabel staat het benodigde aantal schroeven en het bijbehorende aandraaimoment Flens Afmetingen schroeven Nr Aanhaal koppel De turbopomp met inlaatflens ConFlat moet aan de vacu mkamer worden bevestigd met behulp van de speciale mechanische bevestigingselementen van Agilent Zie voor meer informatie de bijlage Technical Information Het TV 903 Pumping System kan in alle standen worden geinstalleerd Het TV 903 Pumping System kan niet met behulp van zijn eigen basis worden bevestigd Turbo V 903 Pumping System User Manual 87 901 016 01 A 97 306 6 Bedrijfshandleiding Ole Het TV 903 Pumping System behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet Het TV 903 Pumping System bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Controleer of de inrichting verbonden met het TV 903 Pumping System goed geisoleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 98 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Gebruik Bedrijfshandleiding 6 In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng a
93. accion lo por um controlo remoto atrav s de um computer host conectado por meio de linhas seriais RS 232 RS 485 Nos seguintes par grafos est o descritas todas as informac es necess rias para garantir a seguranca do operador durante o uso da aparelhagem Informac es detalhadas s o fornecidas no ap ndice Technical Information Este manual utiliza as seguintes convenc es As mensagens de cuidado s o visualizadas antes de proceder que se n o observadas poderiam causar danos aparelhagem Turbo V 903 Pumping System User Manual 87 901 016 01 A 75 306 5 Manual de Istruc es ATENCAO As mensagens de atenc o atraem a atenc o do operador num procedimento ou uma pr tica espec fica que se n o executada de modo correto poderiam provocar graves les es pessoais As notas cont m informac es importantes estrapoladas pelo texto 76 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de Istru es 5 Armazenagem Para garantir o n vel Maximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condic es ambientais devem ser as seguintes temperatura de 20 C a 70 C humidade relativa de 0 a 95 n o condensante 80 accionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em modalidade Soft Star
94. al funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C a relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for forste gang De turbomolekyleere pumper m opbevares i 10 m neder fra forsendelsesdatoen diste re Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger fas ved henvendelse til den lokale Agilent representant Turbo V 903 Pumping System User Manual 87 901 016 01 A 109 306 7 Istruktionsbog Forberedelser fer installation FORSIGTIG TV 903 Pumping System leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten Sorg for at TV 903 Pumping System ikke tabes eller uds ttes for stod eller vibrationer ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om miljobeskyttelse Komponenter der skal uds ttes for vakuum m ikke bergres med bare hender idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse Normal atmosfarisk
95. aning table windows 101 to 105 The same settings are used by the programmable set point Speed setting PWM input signal to set the pump speed The PWM signal characteristics must be the following a frequency 100 Hz 20 amplitude 24 V max duty cycle range from 25 to 75 a corresponding to an output frequency from 300 Hz to 800 Hz linearly The duty cycle percentage is referred to the low level portion of the PWM signal Programmable analog signal this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power set by the user The default setting is the frequency see the following example diagram 272 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 a 0 Output V Frequency Hz Figure 10 Output signal Fault this open collector output signal is ON when a system fault condition is detected Programmable set point this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vdc when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the thresho
96. ar l quidos o part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 48000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El TV 903 Pumping System no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio Asimismo posee conectores auxiliares con los que se puede alimentar un ventilador adicional pilotarlo a distancia con un ordenador host conectado mediante l nea serial RS 232 RS 485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada Este manual utiliza las convenciones siguientes Los mensajes de atenci n se visualizan antes de los procedimientos que al no respetarse podr an provocar da os al equipo Turbo V 903 Pumping System User Manual 87 901 016 01 A 61 306 4 Manual de istrucciones LL ALI IHT Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una operaci n especifica que al no realizarse correctamente podria provocar graves lesiones personales Las notas contienen informaci n importante extraida del texto 62 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de istrucciones 4 Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilida
97. ar pump is 10 months from the shipping date CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations Turbo V 903 Pumping System User Manual 87 901 016 01 A 249 306 17 Instructions for Use Preparation for Installation The TV 903 Pumping System is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the TV 903 Pumping System Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 250 306 PUMPING SYSTEM 969 8811 PA 48VDC POWER SUPPLY 969 6501 Figure 1 Preparation for installation Turbo V 903 Pumping System User Manual 87 901 016 01 A Instructions for Use 17 Installation CAUTION Do not remove the adhesive and protective ca
98. ara ligar o TV 903 Pumping System suficiente fornecer a tens o de alimenta o O controller incorporado reconhece automaticamente os sinais de interlock e de activa o e acciona a bomba O modo Soft Star previsto para acender a bomba depois de um prolongado per odo parado Isto permite uma ptima distribui o da massa lubrificante nos rolamentos Para poder arrancar a bomba em Soft Start ser preciso reactivar o modo acima referido utilizando o software ou o Remote I O consultar os par grafos INTERCONNECTION e RS 232 485 COMMUNICATION DESCRIPTION no ap ndice Technical Information O LED verde posicionado no painel da base do TV 903 Pumping System indica atrav s da frequ ncia de intermit ncia as condi es operacionais do sistema aceso fixo a bomba funciona normalmente a intermitencia lenta periodo de aprox 400 ms o sistema est em estado de acelerac o ou de paragem ou de Stop ou de waiting for interlock intermitencia r pida periodo de aprox 200 ms condi o de erro Paragem do TV 903 Pumping System Para parar o TV 903 Pumping System suficiente desligar a tens o de alimentac o O controller incorporado para imediatamente a bomba 84 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de Istru es 5 ATENCAO Para a seguranca do operador o TV 903 Pumping System Power Supply 969 6501 deve ser alimentado com um cabo d
99. atick p ipojen P i zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 80 C Turbomolekul rn v v vu nikdy nepou vejte nebude li p vodn p ruba p ipojen k vakuov komo e nebo nem li uta enou zav rac p rubu B hem zah v n se turbomolekul rn v v vy ani jej ho p slu enstv nedot kejte Vysok teplota m e zp sobit pop leniny B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohla by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosf rickym tlakem NEBEZPE Pokud pou v te v v vu pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn 214 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Navod k Pouziti 14 Zapnut a pou v n v vevy TV 903 Pumping System Pro uveden v v vy TV 903 Pumping System do provozu je nutn priv st s ov nap t Integrovan regul tor automaticky zji uje pr tomnost sign l blokov n a spou t c ch sign l a uvede vyv vu do provozu Pozvoln rozb h Soft Start se pou v pro zapin ni v v vy po del p est vce To umo uje opt
100. ault 0 default 867 0 to 99999 default 0 0 high level active 1 low level active default 0 0 to 100 default 2 0 NO 1 YES 0 NO 1 YES 600 0 1200 1 2400 2 4800 3 9600 4 default 4 Turbo V 903 Pumping System User Manual 87 901 016 01 A 109 110 111 120 121 300 Technical Information 18 Pump life cycle time cycle number reset Interlock type default 1 Analog output type output voltage signal pro portional to frequency or power Rotational frequency setting Hz Maximum rotational freguency in Hz active only in Stop condition Pump current in mA dc Pump voltage in Vdc Pump power in W pump current x pump voltage duty cycle Driving freguency in Hz Pump temperature in C Pump status Error code Cycle time in minutes zeroed by the reset command Cycle number zeroed by the reset command To reset write q Impulse 0 Continuous 1 0 frequency 1 power default 0 150 to 1100 default 1100 150 to 1100 default 1100 Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 Bit description see the following figure 0 to 999999 Oto 9999 Turbo V 903 Pumping System User Manual 87 901 016 01 A 289 306 18 Technical Information 302 R N Pump life in hours zeroed by O to 999999 the reset command 320 Reserved to Agilent s
101. d Start up time Recommended forepump Operating position Cooling requirements Operating ambient temperature Bakeout temperature Vibration level displacement Lubricant Cooling requirements Noise level Power supply Input for TV903 Pumping System Power Supply 969 6501 Input voltage lt 1x107 mbar lt 1 x 107 Torr According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump Custom ISO 160 F KF 25 48000 rpm lt 6 minutes DS 402 TriScroll 300 any Natural air convection Forced air or water optional 10 C to 45 C 80 C at inlet flange max lt 0 01 um at inlet flange permanent lubrication Forced air FAN off lt 50 dB A at 1 meter FAN on lt 55 dB A at 1 meter 200 240 Vac 10 Turbo V 903 Pumping System User Manual 87 901 016 01 A Input freg Max input power Max operating power Power supply Input for TV903 Pumping System 969 8811 Input voltage Input freq Max input power Max output power Protection fuse for power supply system 969 6501 Compliance with Power cable Serial communication T Plus kit Installation category Pollution degree Storage temperature Weight kg Ibs Pumping System 18 Technical Information 50 60 Hz 400 VA 320 W
102. d de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones a durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre O y 95 no condensante a el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez a el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ATENCI N En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent Turbo V 903 Pumping System User Manual 87 901 016 01 A 63 306 4 Manual de istrucciones Preparaci n para la instalaci n ATENCI N El TV 903 Pumping System se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 903 Pumping System y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 8
103. de maneira suficiente ao referido torque a bomba pode soltar se do sistema ou o motor pode soltar se do involucro da bomba Nesse caso fragmentos de metal podem ser projectados da bomba ou do sistema que podem provocar les es graves ou a morte e ou danificar os eguipamentos adjacentes Colocar o TV 903 Pumping System em posic o est vel fixando a flange de entrada da turbobomba contra flange do sistema com uma liga o que resista a um torgue de 6800 Nm volta do seu eixo Por exemplo esta Bolted Flange pode ser fixada com parafusos M10 de aco de alta resist ncia classe maior que 8 8 A tabela seguinte descreve o n mero de parafusos necess rios e o torgue de aperto com o gual apert los O TV 903 Pumping System pode ser instalado em gualguer posi o O TV 903 Pumping System n o pode ser fixado atrav s da sua base Turbo V 903 Pumping System User Manual 87 901 016 01 A 81 306 5 Manual de Istru es CUIDADO O TV 903 Pumping System pertence a segunda categoria de instalac o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimenta o apropriada para esta categoria O TV 903 Pumping System tem conectores para as entradas saidas e para a comunicac o de s rie que devem ser ligados aos circuitos externos de modo a n o permitir o acesso s partes sob tens o Assegure se de que o isolamento do dispositivo ligado ao TV 903 Pumping System esteja isola
104. dekablet skal v re udstyret med et stik som skal v re godkendt p international plan Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske stod og opfylde kravene ifolge CE EF normerne De hoje spendinger som udvikles i controller en kan for rsage alvorlige skader eller d den For der foretages vedligeholdelses operationer inde i enheden skal man koble fadekablet fra Nodstop Afbrydelse af TV 903 Pumping System i n dsituationer sker ved at koble ledningen fra forsyningsstikket 116 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruktionsbog 7 Vedligeholdelse TV 903 Pumping System behgver ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale Inden der foretages noget som helst indgreb p systemet skal strommen forst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted der udskifter pumpen med en repareret pumpe Inden pumpen sendes til konstruktgrens reparationsv rksted eller advanced exchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes og sendes til den lokale forhandler En kopi af dette dokument skal inds ttes i systemet
105. do correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 82 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Utilizac o Manual de Istru es 5 Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as ligac es el ctricas e pneum ticas Durante o eventual aquecimento da c mara a v cuo a temperatura na flange de entrada n o deve ser superior a 80 C ATENCAO Nunca activar a bomba se a flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com a flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as operac es de aquecimento A elevada temperatura pode causar lesdes s pessoas Evitar colis es oscilac es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a saida de ar da bomba utilizar ar ou gas inerte sem poeiras ou particulas A press o de entrada atrav s da porta especifica deve ser inferior a 2 bar acima da press o atmosf rica ATENCAO Ouando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presenca de gases explosivos Turbo V 903 Pumping System User Manual 87 901 016 01 A 83 306 5 Manual de Istru es Acendimento e Utiliza o do TV 903 Pumping System P
106. dprotokoll Denne advarselen vises foran fremgangsm ter som dersom de ikke folges kan f re til at utstyret skades Turbo V 903 Pumping System User Manual 87 901 016 01 A 135 306 9 Instruksjon Manual AVENE IER Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medfore alvorlige skader Merknadene inneholder viktig informasjon som er hentet fra teksten 136 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instruksjon Manual 9 Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pumper m folgende anvisninger folges Under transport flytting og lagring av pumpene m ikke folgende miljoforhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato ae Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon Turbo V 903 Pumping System User Manual 87 901 016 01 A 137 306 9 Instruksjon Manual Klargjore til installasjon FORSIKTIG TV 903 Pumping System leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader so
107. dstopp av TV 903 Pumping System 130 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bruksanvisning 8 Underh ll TV 903 Pumping System r underh llsfritt Allt servicearbete m ste utf ras av auktoriserad personal VARNING Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas Vanta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad som kan ers tta pumpen med en renoverad pump Innan systemet l mnas in till tillverkaren f r reparation eller advanced exchange service m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av pumpen skall ske enligt g llande lagstiftning Turbo V 903 Pumping System User Manual 87 901 016 01 A 131 306 8 Bruksanvisning Bortskaffning 132 306 Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlin
108. durante su funcionamiento Los cojinetes podrian dafiarse Para el envio de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos 68 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de istrucciones 4 Encendido y Uso del TV 903 Pumping System Para encender el TV 903 Pumping System basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce autom ticamente la presencia de las sefiales de interblogueo y de arrangue y activa la bomba El modo Soft Start est previsto para encender la bomba despu s de un prolongado periodo de parada Esto permite una distribuci n ptima de la grasa en los cojinetes Para haber una puesta en marcha Soft Start activa es necesario rehabilitar el modo anteriormente indicado mediante software o Remote I O v anse los apartados INTERCONNECTION y RS 232 485 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde situado en el panel de la base del TV 903 Pumping System indica con la frecuencia de su parpadeo las condiciones operativas del sistema a encendido fijo l
109. e 134 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instruksjon Manual 9 Generell informasjon FORSIKTIG Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren b r lese denne brukerveiledningen og all annen informasjon fra Agilent for utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppfglging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TV 903 Pumping System systemet best r av en turbo molekul r pumpe for bruk i hgy eller ultrahoye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe vaesker eller faste partikler Pumpingen oppn s med en hgyhastighetsturbin maks 48000 opm koplet til en sv rt effektiv trefase elektrisk motor TV 903 Pumping System har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum Den har dessuten hjelpekontakter som gir muligheter for forsyning av en ekstra vifte og fjernstyring av systemet med en serietilkoplet RS232 eller RS485 vertsmaskin De folgende avsnitt inneholder all informasjon som er ngdvendig for a sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information Denne manualen bruker folgende standar
110. e alimentac o com 3 fios ver a tabela das partes que podem ser encomendadas equipado de uma tomada aprovada a nivel internacional Utilize este cabo e tomada juntos com uma tomada adequadamente conectada a terra para evitar choques el ctricos e satisfazer os requisitos das normas CE As altas tens es que se desenvolvem no controller podem provocar graves danos ou at morte Antes de realizar operac es de manutenc o no interno da unidade desligar o cabo de alimentac o Paragem de Emerg ncia Para parar o TV 903 Pumping System em condi es de emerg ncia necess rio desconectar o cabo de alimentac o da tomada de alimentac o Turbo V 903 Pumping System User Manual 87 901 016 01 A 85 306 5 Manual de Istruc es Manutenc o O TV 903 Pumping System n o requer qualquer manutenc o Todas as opera es devem ser efectuadas por pessoal autorizado ATENCAO Antes de executar qualquer operac o no sistema deslig lo da alimenta o introduzir ar na bomba abrindo a v lvula especifica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent que permite obter uma bomba regenerada que substitua a que apresenta defeito Antes de reenviar ao fabricante uma bomba para as repara es ou o advanced exchange service indispens vel preencher e enviar ao escrit ri
111. e czestotliwoScia wtasnego migania stan operatywny systemu za wiecona na sta e pompa znajduje sie w normalnych obrotach a miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock miga szybko okres 200 ms stan b du Zatrzymanie TV 903 Pumping System Aby zatrzyma TV 903 Pumping System wystarczy odtaczy napiecie zasilania Wbudowany sterownik zatrzyma natychmiast pompe Turbo V 903 Pumping System User Manual 87 901 016 01 A 201 306 13 Podrecznik Instrukcji ZAGROZENIE Dla zagwarantowania bezpiecze stwa operatorowi TV 903 Pumping System Power Supply 969 6501 musi by zasilany kablem zasilajacym o 3 przewodach zobacz tabele czesci dajacych sie zam wi i zamontowana wtyczka zgodna z miedzynarodowymi normami Kabel ten wraz z wtyczka podtaczy do kontaktu uziemionego celem unikniecia pora e pradem elektrycznym oraz spetnienia wymog w norm CE Du e sity wewnetrzne wytwarzajace sie w kontrolerze moga spowodowa powa ne uszkodzenia ciata lub Smierc Przed przeprowadzeniem czynno ci konserwacyjnych wewnatrz tego urzadzenia odtaczy kabel zasilajacy Zatrzymanie Awaryjne Aby zatrzyma TV 903 Pumping System w stanie awarii nale y wyja kabel zasilania z odpowiedniej wtyczki 202 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Podrecznik Instrukcji 13 Konserwacja Urzadzenie TV 903 Pumping System
112. e die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht 92 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bedrijfshandleiding 6 Opslag Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen a tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C a relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum ali Vile tel Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent Turbo V 903 Pumping System User Manual 87 901 016 01 A 93 306 6 Bedrijfshandleiding Voorbereiding voor installatie OORZICHTIG Het TV 903 Pumping System wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opne
113. ej poruchy napr pri kontakte rotora a statora alebo pri zlomen rotora sa mo e uvolni rota n energia NEBEZPE Pokyny k in tal cii uveden v tomto n vode musia by d sledne dodr ovan aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy 220 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Navod na Obsluhu 15 VSeobecn informacie POZOR Toto zariadenie je ur en pre profesion lnych pracovn kov Sk r ne za nete zariadenie pou va pre tajte si n vod na pou itie a v etky al ie pokyny spolo nosti Agilent Spolo nos Agilent nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iasto nom s lade s t mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi normami danej krajiny Zariadenie TV 903 Pumping System predstavuje integrovan syst m s turbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s pr slu n m kontroln m modulom Syst m dok e od erpa ubovo n typ plynu alebo plynnej zmesi Nie je vhodn na od erp vanie tekut n alebo pevn ch ast c Od erp vanie zabezpe uje vysokor chlostn rota n turb na max 48000 ot ok min tu poh an vysokov konn m 3 f zovym elektrick m motorom Zariadenie TV
114. ema acceso fisso la pompa in rotazione normale lampeggiante lentamente periodo di circa 400 ms il sistema in stato di rampa o di frenata o di Stop o di Waiting for interlock lampeggiante velocemente periodo di circa 200 ms condizione di errore Arresto del TV 903 Pumping System Per arrestare il TV 903 Pumping System sufficiente togliere la tensione di alimentazione Il controller incorporato arresta immediatamente la pompa Turbo V 903 Pumping System User Manual 87 901 016 01 A 25 306 1 Istruzioni per l uso Per la sicurezza dell operatore il TV903 Pumping System Power Supply 969 6501 deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella delle parti ordinabili dotato di una spina approvata a livello internazionale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensioni che si sviluppano nel controller possono provocare gravi lesioni o la morte Prima di eseguire delle operazioni di manutenzione all interno dell unit scollegare il cavo di alimentazione Arresto di Emergenza Per arrestare in condizioni di emergenza il TV 903 Pumping System occorre staccare il cavo di alimentazione dalla presa di alimentazione 26 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruzioni per l uso 1 Manutenzione Il TV 903 Pumping Sy
115. ement ne pas laisser tomber le TV 903 Pumping System et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e Le TV 903 Pumping Systemne ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation 48 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Mode d emploi 3 Preparation pour l installation PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Figure 1 Preparation pour l installation Turbo V 903 Pumping System User Manual 87 901 016 01 A 49 306 3 Mode d emploi Installation atv Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me 50 306 Installer cet appareil uniquement dans un local ferm et ne jamais l utiliser dans un milieu expos aux conditions atmosph riques pluie gel neige la poussi re aux gaz agressifs encore moins dans un milieu pouvant pr senter un risque d explos
116. en folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten Turbo V 903 Pumping System User Manual 87 901 016 01 A 31 306 2 Gebrauchsanleitung WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausf hrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 32 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Gebrauchsanleitung 2 Lagerung Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von O bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start in Gang zu setzen Die Lage
117. er systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig verstiga 80 C S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sfl nsen Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser fria fr n damm eller andra partiklar Ing ngstrycket mot r tt port m ste understiga 2 bar ut ver det atmosf riska trycket 128 306 D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av explosiva gaser Turbo V 903 Pumping System User Manual 87 901 016 01 A Bruksanvisning 8 Start och anv ndning av TV 903 Pumping System F r att starta TV 903 Pumping System beh ver du bara ansluta till ett eluttag Den inbyggda styrenheten k nner automatiskt igen f rreglings och startsignaler och startar pumpen Soft Start r till f r att starta pumpen efter att den har st tt stilla en l ngre tid Detta medger en optimal distribution av fettet i lagren F r att aktivera mjukstart m ste man terst lla det
118. eratura mo e spowodowa uszkodzenia cia a na osobach UWAGA Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu powietrza pompy stosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 bar w ponad ci nienie atmosferyczne ZAGRO ENIE Kiedy pompa jest stosowana do pompowania gaz w toksycznych atwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa pompy w obecno ci gaz w wybuchowych 200 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Podrecznik Instrukcji 13 Wtaczenie i Uzytkowanie TV 903 Pumping System Aby wtaczy TV 903 Pumping System wystarczy dostarczy napiecie zasilania Wbudowany sterownik rozpoznaje automatycznie obecnos sygnat w interlock u i uruchomienia i uruchamia pompe Tryb Soft Start zosta przewidziany do w czenia pompy po d ugim okresie jej nieeksploatowania Pozwala to na optymalne rozprowadzenie smaru w o yskach By uruchomi pomp w aktywnym trybie Soft Start nale y uruchomi oprogramowanie software lub I O zdalne patrz paragrafy INTERCONNECTION i RS 232 485 COMMUNICATION DESCRIPTION w za czniku Technical Information Zielona dioda LED znajdujaca sie na panelu podstawy TV 903 Pumping System wskazuj
119. ervice to 399 400 R A CRC EPROM 0E 0E8XXXX where XXXX are variable 402 R A CRC Param PA PA8XXXX where XXXX are variable 404 R A CRC Parameter structure XXXX 406 R A Program Listing code amp XXXX revision 407 R A Parameter Listing code amp XXXX revision 500 Reserved to Agilent service 503 R W N RS 485 address 0 to 31 default 0 504 R W L Serial type select 0 RS 232 1 RS 485 default 0 7 6 5 4 3 2 1 0 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP T bearing gt 60 C OVERVOLTAGE CONTROLL OVERTEMP T gt 60 C AUX FAIL POWER FAIL V supply lt 43 Vdc Figure 20 Window N 206 Bit Description 290 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Soft Start Soft Start mode is provided to start the pump after a protracted stop of the TV903 Pumping System This allows a better grease distribution in the berings The Soft Start mode is disabled by default To enable the Soft Start mode it must be activated by the suitable software or Remote I O command see the paragraphs INTERCONNECTIONS and RS 232 485 COMMUNICATION DESCRIPTION Soft Start frequency steps are as follow 300 Hz 400 Hz 500 Hz 600 Hz 700 Hz and 800 Hz The pump remains at each step for 300 sec and the minimum ramp up time in soft Start mode is 36 minutes Turbo V
120. es shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Retum only products for which the RA was issued Product being retumed under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00800234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl raQagilent com http www agilent com Pg 1 3 A sj Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Com Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only O Taxable O Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Cho
121. g System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 18 Technical Information Description of the TV 903 Pumping System 261 Pump Description 262 Controller Description 263 Technical Specification 264 TV 903 Pumping System Outline266 OUTPUT Power during High Temperature Condition 267 Interconnections 268 Earth ground Connection 269 J54 Power Input 269 P4 External Fan 270 J1 In Out 270 Signal Description 271 HOW to Connect the Open Collector Inputs of the Controller 276 HOW to Connect the Outputs of the Controller 279 P2 Serial 280 Procedure to Connect the Serial and 1 0 ports to an External Cable 282 RS 232 RS 485 Communication Description 283 Communication Protocol 283 Window Meanings 288 Soft Start 291 Original Instructions EE Agilent Technologies 259 306 18 Technical Information Air Cooling Kit 292 TV 903 Pumping System 292 Air Cooling Kit Cable Fixing 293 Connection of the Fore Vacuum Pump 296 Connection to the Pump 297 Pump used in Presence of Magnetic Fields 298 Accessories and Spare Parts 299 260 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Description of the TV 903 Pumping System The TV 903 Pumping System is composed by a pump with an envelope with fins and a shroud with two fans and a dedicated integrated controller 969 6500 The pump is equipped with a custom ISO 160 F high vacuum flange The following pictures
122. gssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor NY JA x x Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Generell informasjon 134 Lagring137 Klargjore til installasjon 138 Installasjon 139 Festing av pumpen 140 Bruk 142 Starte og bruke TV 903 Pumping System 143 Stoppe TV 903 Pumping System 143 Nodstopp 144 Vedlikehold 145 Eliminering 146 Oversetting av den opprinnelige samsvarserkl ringen 134 EE Agilent Technologies 133 306 9 instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper De turbomolekyl re pumpene som er beskrevet i den f lgende Bruksanvisningen har et hgyt kinetisk energiniv som skyldes den hoye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt CUISINE For a unng skader p utstyret og forebygge operat rskader m installasjonsanvisningene beskrevet i denne manualen f lges n y
123. he FAN side and on the integrated controller side the cable must lay between the foreline flange and the bottom side of the plastic Air cooling kit Fix the cable by locking the fixing clamps Leave a ripple of about 5 6 cm in length between the cable connector FAN side and the first locking clamp see Figures below s Locking clamp Figure 24 294 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Figure 25 Turbo V 903 Pumping System User Manual 87 901 016 01 A 295 306 18 Technical Information Connection of the Fore Vacuum Pump A flange KF 25 NW is available to connect the TV 903 Pumping System to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The TV 903 Pumping System is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming 296 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Informa
124. hnologies 106 115 105 306 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den hoje omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes AVON JJEN For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 106 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruktionsbog 7 Generel information Dette udstyr er beregnet til professionel anvendelse Brugeren bor l se denne brugsanvisning og anden yderligere information fra Agilent fer udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstraekkeligt kendskab ikke autoriserede indgreb pa udstyret eller h ndtering der strider imod geeldende lokale regler TV 903 Pumping System er et integreret system som omfatter en turbomolekyl r pumpe til hgje eller meget hgje vakuumtilpasninger og den respektive controller Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet
125. hnologies 16 25 15 306 1 Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata NU ALI Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 16 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruzioni per l uso 1 Informazioni Generali ATTENZIONE Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il TV 903 Pumping System un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller Il si
126. huomattavaa v nt momenttia Ellei liit nt kest kyseist momenttia pumppu saattaa irrota j rjestelm st tai moottori pumpun kotelosta T ll in metallikappaleita saattaa sinkoutua pumpusta tai j rjestelm st ja aiheuttaa vakavia vahinkoja tai kuoleman ja tai l hell olevien laitteiden vaurioita Kiinnitt k TV 903 Pumping System vakaaseen asentoon asentamalla turbopumpun sis ntulolaippa j rjestelm n vastalaippaan liitoksella joka kest 6800 Nm n momentin akselinsa ymp ri T m ruuvilaippa voidaan esimerkiksi kiinnitt kest vill ter sruuveilla M10 lujuusluokka yli 8 8 Seuraavassa taulukossa esitet n vaadittu ruuvim r ja vastaava v nt momentti Laippa Ruuven koko Maara Kiristys momentti DN 160 Bolted M10 8 10 Nm TV 903 Pumping System voidaan asentaa mihin tahansa asentoon TV 903 Pumping Systemia ei voida kiinnitt perustansa kautta 154 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Ohjek sikirja 10 HUOMIO TV 903 Pumping System kuuluu toiseen EN 61010 1 s nn sten mukaiseen asennusluokkaan tai ylij nniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka t ytt t m n luokan vaatimukset TV 903 Pumping System laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett TV
127. id cia Ak je potrebn likvid cia v vevy mus prebehn v s lade so pecifick mi predpismi danej krajiny V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu E s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja Turbo V 903 Pumping System User Manual 87 901 016 01 A 231 306 15 N vod na Obsluhu Likvidacia 232 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 16 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke 234 Splo ne informacije 234 Shranjevanje 236 Priprava za monta o 237 Monta a 238 Pritrjevanje rpalke 239 Uporaba 241 Vklju itev in uporaba naprave TV 903 Pumping System 242 Izklju evanje naprave TV 903 Pumping System 242 Zaustavitev v sili 243 Vzdr evanje 244 Odlaganje opadkov 244 Prevod navodil v izvirniku ip Agilent Technologies 233 306 16 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih nav
128. ie EN 61010 1 vorgesehen wird Turbo V 903 Pumping System User Manual 87 901 016 01 A 37 306 2 Gebrauchsanleitung Gebrauch In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Vor Benutzung des Systems sind alle elektrischen und pneumatischen Anschl sse auszuf hren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Tempera tur am Eingangsflansch 80 C nicht berschreiten Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlussflansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch eventuelle heif e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr VORSICHT W hrend des Betriebs sind StoR und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel f tungsanschluss soll unter 2 bar ber dem atmosph rischen Druck betragen Wenn die Pumpe zur F rderung von giftigen leicht entflamm baren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und MaRnahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden 38 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A
129. im ln distribuci mazac ho tuku v lo isc ch Pro zapnut s aktivn m pozvoln m rozb hem je nutno obnovit tento zp sob v softwaru nebo prost ednictv m d lkov ch VSTUP V STUP viz odstavce INTERCONNECTION a RS 232 485 COMMUNICATION DESCRIPTION v p loze Technical Information Zelen kontrolka um st n na panelu z kladny v v vy TV 903 Pumping System indikuje provozn stavy syst mu blik n m bez blik n vyv va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov n rychl blik n interval cca 200 ms poruchov stav Vypnut v v vy TV 903 Pumping System V v va TV 903 Pumping System se vypne odpojen m s ov ho nap t Vestav n regul tor v v vu okam it zastav Turbo V 903 Pumping System User Manual 87 901 016 01 A 215 306 14 N vod k Pou it Pro zaji t n bezpe nosti obsluhy mus b t TV 903 Pumping Syst m Power Supply 969 6501 nap jen troj ilov m privodnim kabelem viz tabulka dil kter Ize doobjednat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Vysok nap ti kter vznik v regul toru m e zp sobit v n zran ni i smrteln Pred prov d nim z
130. ing a torque of 6800 Nm around its axis For example this Bolted Flange can be fixed using high strength M10 steel screws class higher than 8 8 The following table shows the necessary number of screws and the relevant fixing torque Flange Bolt size N Fixing torque DN 160 Bolted M10 8 10 Nm The TV 903 Pumping System can be installed in any position The TV 903 Pumping System cannot be fixed by means of its base 252 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instructions for Use 17 CAUTION The TV 903 Pumping System belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 903 Pumping System has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the TV 903 Pumping System is adeguate even in the case of single fault as per directive EN 61010 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A 253 306 17 Instructions for Use Use This paragraph details the fundamental operating procedures Make all electrical and pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 80 C Never use the turbopump when the inlet flange is not connected to the
131. ion ou d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique a temp rature de 10 C 35 C humidit relative 0 90 non condensante En pr sence de champs magn tiques la pompe doit tre prot g e l aide d crans appropri s Pour tout autre renseignement se reporter l opuscule Technical Information Le TV 903 Pumping System doit tre connect une pompe primaire Cf sch ma dans Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A Mode d emploi 3 Fixation de la pompe En cas d endommagement du rotor la connexion pompe syst me pourrait tre soumise un couple tr s important Si la connexion n est pas en mesure de r sister au dit couple la pompe peut se d tacher du syst me ou le moteur de l enveloppe de la pompe Dans ce cas des morceaux de m tal peuvent tre expuls s par la pompe ou le syst me et entra ner des blessures graves voire la mort et ou endommager s rieusement les guipements environnants Fixer le TV 903 Pumping System de facon stable en assurant la collerette d entr e de la turbopompe la contre collerette du syst me au moyen une connexion en mesure de r sister un couple de 6800 Nm autour de son axe Par exemple cette flasgue boulonn e peut tre fix e l aide de vis M10 en acier haute
132. ionale wetgeving te werk Turbo V 903 Pumping System User Manual 87 901 016 01 A Bedrijfshandleiding 6 Afvalverwerking Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd NE DS Wi A a Turbo V 903 Pumping System User Manual 87 901 016 01 A 103 306 6 Bedrijfshandleiding Afvalverwerking 104 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper Generel information 106 Opbevaring 109 Forberedelser for installation 110 Installation 111 Fastgorelse af pumpe 112 Anvendelse 114 Start og anvendelse af TV 903 Pumping System Stop af TV 903 Pumping System 115 Nodstop 116 Vedligeholdelse 117 Bortskaffelse 117 Overs ttelse af originalinstruktionerne 5 Agilent Tec
133. istor reading exceeds 60 C the pump fails and stops with Error Code 1 WIN 206 If the thermistor reading is below 0 C the pump fails and stops with Error Code 0 WIN 206 See Window Meanings section for details The pump is balanced after assembly with a residual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 25 flange 262 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Controller Description The integrated controller is a solid state frequency converter which is driven by a single chip microcomputer and is composed of one PCB which include 3 phase output analog and input output section microprocessor and digital section The controller converts a 48Vdc voltage supply into a 3 phase low voltage medium frequency output which is required to power the pump The controller can be operated by a remote host computer via the serial connection A Windows based software is available T Plus optional Turbo V 903 Pumping System User Manual 87 901 016 01 A 263 306 18 Technical Information Technical Specification 264 306 Table 1 Technical Specification Pumping speed N2 680 I s He 700 1 s Compression ratio N2 gt 5 x 106 He 6 x 103 Base pressure with recommended forepump Inlet flange Foreline flange Rotational spee
134. it und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung der Pumpe hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen Turbo V 903 Pumping System User Manual 87 901 016 01 A 41 306 2 Gebrauchsanleitung Entsorgung 42 306 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Eguipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugefilhrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat b EN 4 X b Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires 44 Indications g n rales 44 Stockage 47 Preparation pour l installation 48 Installation 50 Fixation de la pompe 51 Utilisation 53 Mise en marche et utilisation du TV 903 Pumping System 54 Arr t du TV 903 Pumping System 54 Arr t d urgence 55 Entretien
135. itional fan to be controlled from a remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol The caution messages are displayed before procedures which if not followed could cause damage to the equipment Turbo V 903 Pumping System User Manual 87 901 016 01 A 247 306 17 Instructions for Use WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text 248 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instructions for Use 17 Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 90 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the customer a the shelflife of a turbomolecul
136. ivatty t vagy annak tartoz kait a meleg t si folyamat k zben A magas h m rs klet g si s r l seket okozhat FIGYELEM Ker lje a turb szivatty t s t r z s t vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty tleveg ztet s hez A bemeneti nyom snak a megfelel bemenetn l m rve 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt VESZ LY Amikor a szivatty t m rgez t zvesz lyes vagy radioakt v g zok szivatty z s ra haszn lja k vesse az egyes g zok kezel s re vonatkoz elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben 186 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Felhaszn l i K zik nyv 12 A TV 903 Pumping System bekapcsol sa s m k dtet se A TV 903 Pumping System bekapcsol s hoz elegend azt r kapcsolni a t pfesz lts gre A be p tett vez rl automatikusan felismeri a kapcsolatot s a start jel jelenl t t s elinditja a szivattyut A l gy indit s Soft Start zemm dot arra tervezt k hogy a szivattyut hosszabb m k dtet smentes id szak ut n igy indits k be Ez ltal a csap gyakban a ken zsir optim lisan oszl dik el Aktiv lt l gy indit s zemm ddal t rt n indit shoz a fenti zemm dot egy szoftveren kereszt l vagy REMOTE 1 0 seg ts g vel kel
137. ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla Turbo V 903 Pumping System User Manual 87 901 016 01 A 159 306 10 Ohjek sikirja Havitt minen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin jisenmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot N AN OY A 160 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 11 163 165 166 168 169 171
138. jakiejkolwiek pozycji TV 903 Pumping System nie mo e by zamocowany poprzez w asn podstaw 198 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Podrecznik Instrukcji 13 UWAGA TV 903 Pumping System nale y do drugiej kategorii instalacji lub nadnapiecia przewidzianej przez norme EN 61010 1 Dlatego te podtaczy urzadzenie do linii zasilania kt ra spetnia te wymogi TV 903 Pumping System posiada konektory wej ciowe wyjsciowe i do przekazu szezregowego kt re musza by podtaczone do obwod w zewnetrznych w spos b aby adna czes znajdujaca sie pod napieciem nie mogta by dostepna Nale y upewni sie e izolacja przyrzadu podtaczonego do TV 903 Pumping System posiada odpowiednie nawet w stanie pojedynczej usterki odizolowanie zgodnie z wymaganiami normy EN 61010 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A 199 306 13 Podrecznik Instrukcji U ytkowanie W tym paragrafie zostaly przedstawione gl wne procedury operatywne Przed zastosowaniem systemu nale y wykona wszystkie potaczenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr niowej temperatura na kolnierzu nie mo e przekroczy 80 C ZAGROZENIE Nie nalezy nigdy uruchomia pompy kiedy kotnierz wejsciowy nie jest podtaczony do komory lub nie jest zamkniety kotnierzem zamykajacym Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temp
139. ke er tilstr kkelig til at modst dette drejemoment kan pumpen rive sig los fra systemet eller motoren kan rive sig los fra pumpens beklaedning dette tilf lde kan metalfragmenter blive slynget ud af pumpen eller systemet hvilket kan medfore alvorlige kv stelser eller dadsfald og eller materiel beskadigelse af apparaterne i neerheden Mont r TV 903 Pumping System i en stabil position ved at montere turbopumpens indgangsflange p systemets kontraflange Forbindelsen skal kunne t le et drejemoment p 6800 Nm omkring dens egen akse Denne Bolted Flange kan for eksempel fastggres med skruer M10 af hgjstyrkest l klasse hgjere end 8 8 P nedenst ende oversigt vises hvor mange skruer der krzeves samt hvilket spendingssmoment de skal strammes ved Flange Dimension skruer Ant Drejningsmoment DN 160 Bolted M10 8 10 Nm TV 903 Pumping System kan installeres i en hvilken som helst position TV 903 Pumping System kan ikke fastggres i fundamentet 112 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruktionsbog 7 ale TV 903 Pumping System h rer til den anden installationsklasse eller oversp ndingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse TV 903 Pumping System er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opn
140. kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemne nou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Vysok nap tie v kontrolnom zariaden m e sp sobi v ne kody alebo smr Prv ne za nete prev dza dr b rske pr ce v tejto jednotke odpojte nap jaciu n ru N dzov zastavenie Ak chcete zariadenie TV 903 Pumping System okam ite vypn v stave n dze mus te odpoji k bel nap jania z nap jacej z suvky 230 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A dr ba N vod na Obsluhu 15 Zariadenie TV 903 Pumping System nevy aduje iadnu dr bu Ak ko vek pravy a opravy syst mu mus vykona kvalifikovan person l NEBEZPE Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte servisn stredisko spolo nosti Agilent kde v m pokazen v vevu vymenia za n hradn repasovan Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Zdravie a bezpe nos pripojen k n vodu na pou itie a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Likv
141. l tt az egys g belsej ben karbantart si munk t v gezne kapcsolja le az egys gr l a t pfesz lts g szolg ltat k belt V szle ll t s A TV 903 Pumping System v szhelyzetben val azonnali le ll t s hoz ki kell h zni a t pk belt a h l zati aljzatb l 188 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Felhaszn l i K zik nyv 12 Karbantart s A TV 903 Pumping System nem ig nyel karbantart st A rendszeren v gzett b rmely karbantart si munk t arra jogosults ggal rendelkez szem lyzetnek kell elv geznie VESZ LY Miel tt b rmely munk t v gezne a rendszeren v lassza le azt a t pfesz lts gr l leveg ztesse t a szivatty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett Miel tt jav t sra vagy cser re visszak ldi a rendszert a gy rt hoz az ehhez a kezik nyvh z csatolt Eg szs g s biztons g rlapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz Az rlap egy m solat t sz ll t s el tt el kell helyezni a rendszert tartalmaz csomagba Ha a szivatty t le kell selejtezni azt a specifikus nemzeti el r soknak megfelel en rtalmatlan tani kell Turbo V 903 Pumping
142. l be llitani l sd az INTERCONNECTION s RS 232 485 COMMUNICATION DESCRIPTION KOMMUNIK CI LE RASA pontokat a Technical Information c mell kletben A TV 908 Pumping System en elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lm nyeit a ha nem villog a szivatty rendesen forog a ha lassan villog kb 400 ms os peri dus a rendszer gyorsul sban f kez sben le ll s vagy kapcsolatra v r llapotban van a ha gyorsan villog kb 200 ms os peri dus az meghib sod st jelent A TV 903 Pumping System kikapcsol sa A TV 903 Pumping System kikapcsol s hoz egyszer en le kell kapcsolni a t pfesz lts get A be p tett vez rl azonnal le ll tja a szivatty t Turbo V 903 Pumping System User Manual 87 901 016 01 A 187 306 12 Felhaszn l i K zik nyv A g pkezel biztons ga rdek ben a TV903 Pumping System Power Supply 969 6501 egys get h romeres bet pk bellel kell ell tni l sd a megrendelhet alkatr szek t bl zat t ami egyik v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek A magasfesz lts g ami az ellen rz egys gben keletkezik s lyos s r l seket s t hal lt okozhat Mie
143. ld value to avoid bouncing For example reference quantity frequency threshold 500 Hz a hysteresis 1 activation type high level Turbo V 903 Pumping System User Manual 87 901 016 01 A 273 306 18 Technical Information N gt Set point output Vdc 495 500 595 Frequency Hz Figure 11 Set point output The set point output stays at 0 Vdc until the fre quency becomes higher than 505 Hz that is 500 Hz 1 6 of 500 Hz then the output goes at 24 Vde and stays at 24 Vdc until the frequency be comes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency a threshold 720 Hz a hysteresis 2 a activation type high level delay time 0 second The T Plus Software optional allows the operator to set all the programmable feature 274 306 When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND and 24 Vdc OUT see the following figure Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Mating Connector Figure 12 Turbo V 903 Pumping System User Manual 87 901 016 01 A 275 306 18 Technical I
144. lle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 80 C bedragen AARSCHUWING Laat de pomp nooit draaien als de inlaatflens niet op de vacuiimkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken VOORZICHTIG Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van giftige brandbare of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen Turbo V 903 Pumping System User Manual 87 901 016 01 A 99 306 6 Bedrijfshandleiding Inschakeling en gebruik van het TV 903 Pumping System Om het TV 903 Pumping System in te schakelen is het voldoende om dit van stroom te voorzien De ingebouwde controller herkent automatisch de aanwezigheid van interlock en startsignalen en start de pomp
145. m kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TV 903 Pumping System pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om miljobeskyttelse For unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr Normale miljgmessige belastninger kan ikke gdelegge TV 903 Pumping System Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedstoving 138 306 PUMPING SYSTEM 969 8811 F 48VDC POWER SUPPLY 969 6501 Figur 1 Klargj re til installasjon Turbo V 903 Pumping System User Manual 87 901 016 01 A Instruksjon Manual 9 Installasjon Sa Tapen og beskyttelsesproppen skal fjernes f rst n r turbopumpen koples til systemet Dette apparatet m bare installeres i lukkede lokaler Det m iallfall ikke installeres i lokaler som er utsatt for ver og vind regn frost sn st v aggressive gasser i eksplosive eller brannfarlige milj er Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 10 C til 35 C relativ fuktighet 0 90 uten kondens
146. men met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat het TV 903 Pumping System niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming Het TV 903 Pumping System kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen 94 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bedrijfshandleiding 6 Voorbereiding voor installatie PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Figuur 1 Voorbereiding voor installatie Turbo V 903 Pumping System User Manual 87 901 016 01 A 95 306 6 Bedrijfshandleiding Installatie OORZICHTIG Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden 96 306 Installeer dit apparaat uitsluitend in gesloten ruimten en gebruik het in elk geval niet in ruimten die aan de weersomstandigheden regen vorst sneeuw stof of agre
147. natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu SA Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 14 Navod k Pouziti Bezpe nostn n vod pro Turbomolekul rn vyv vy 206 V eobecn informace 207 Uskladn ni 209 Priprava k instalaci 210 Instalace 211 Upevn ni vyv vy 212 Pouziti 214 Zapnuti a pouzivani vyv vy TV 903 Pumping System 215 Vypnuti vyv vy TV 903 Pumping System 215 Nouzov zastaveni 216 Udrzba 217 Likvidace 217 Preklad origin ln ho n vodu dip Agilent Technologies 205 306 14 N vod k Pou it Bezpe nostn n vod pro Turbomolekul rn v vevy Turbomolekul rni vyv vy jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefunk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie NEBEZPE Pokyny k instalaci uveden v tomto n vodu mus b t p sn dodr ov ny za elem prevence po kozen za zen a zran n obsluhy 206 306 Turb
148. ne uszkodzenia ciata Sa to wazne informacje wyciagniete z tekstu 194 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Podrecznik Instrukcji 13 Magazynowanie W celu zagwarantowania najwyZszego poziomu funkcjonalno ci i niezawodnosci pomp Turbomolekularnych Agilent nale y przestrzega nastepujacych zalece podczas transportu przestawiania i magazynowania pomp nie nale y przekracza nastepujacych warunk w Srodowiskowych temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesiecy od daty wysy ki Je eli z jakiegokolwiek powodu czas magazynowania jest d u szy nale y odes a pomp do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa si z miejscowym przedstawicielem firmy Agilent Turbo V 903 Pumping System User Manual 87 901 016 01 A 195 306 13 Podrecznik Instrukcji Przygotowanie do instalacji Urz dzenie TV 903 Pumping System jest dostarczane w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu skontaktowa si z miejscowym biurem sprzeda y Podczas rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku urz dzenia TV 903 Pumping System ani nie poddawa go uder
149. nformation How to Connect the Open Collector Inputs of the Controller 276 306 Here below there are the typical connections of the open collector input of the integrated controller to an external system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open collector pin are available 24 Vdc 5 Vdc Cust y device nd Controller JA K NPN eres 24 Vdc PNP 5 Vdc Customers device Controller JS Figure 13 Case 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 i 24 Vdc Customer s i device Controller A 5 Vdc SK 24 Vdc DE Controller Customer s i 5 Vdc device prika QE i 777 Sa i Figure 14 Case 2 with relay utilisation Turbo V 903 Pumping System User Manual 87 901 016 01 A 277 306 18 Technical Information i 24 Vdc Customer s device 17 Controller PNP EN 5 Vdc O 24 Vdc Controller Customer s i device 5 de JAK NPN Ka Figure 15 Case 2 with transistor utilisation 278 306 Turbo V 90
150. ng m ikke vere mindre enn 2 bar over atmosfarisk trykk ADVARSEL N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene folges Pumpen skal ikke brukes i eksplosjonsfarlige milj er 142 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instruksjon Manual 9 Starte og bruke TV 903 Pumping System TV 903 Pumping System startes ved sette stromkabelen i veggkontakten Den innebygde styreenheten kjenner automatisk igjen blokkerings og startsignaler og starter pumpen Modusen Myk Start er beregnet for oppstarting av pumpen etter at denne har v rt uaktiv i en lengre periode Den gir en optimal fordeling av fett i lagrene For oppn en Myk Start igjen er det n dvendig tilbakestille modusen via software eller Remote I O se avsnittene INTERCONNECTION og RS 232 485 COMMUNICATION DESCRIPTION i tillegget Technical Information Den gronne lysdioden p TV 903 Pumping System basepanel angir systemets funksjon ved hjelp av blink a den lyser fast pumpen roterer normalt a den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand Stoppe TV 903 Pumping System TV 903 Pumping System stoppes ved kople det fra stromforsyningen Den innebygde styreenheten stanser
151. nimiento El TV 903 Pumping System no necesita ning n mantenimiento Cualquier operaci6n deber ser realizada por personal autorizado Antes de realizar cualguier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta gue el rotor se pare completamente y esperar a gue la temperatura superficial de la bomba sea inferior a 50 C En caso de averia se podr utilizar el servicio de reparaci n Agilent gue permite obtener una bomba regenerada para sustituir la averiada Antes de enviar al fabricante una bomba para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que la bomba se tenga que desguazar eliminarla respetando las normas nacionales espec ficas Turbo V 903 Pumping System User Manual 87 901 016 01 A 71 306 4 Manual de istrucciones Eliminaci n Significado del logotipo WEEE presente en las etiguetas El simbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este simbolo valido s lo para los paises miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean
152. nshinweise 30 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Gebrauchsanleitung 2 Allgemeines VORSICHT Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem fsem Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Missachtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Der TV 903 Pumping System ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuumanwendungen integriert mit einem entsprechenden Controller besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine max 48000 1 min erreicht die von einem Hochleistungsdrehstrommotor angetrieben wird Der TV 903 Pumping System enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r Anwendungen die ein sauberes Vakuum erfordern Der TV 903 Pumping System verf gt des Weiteren ber Zusatzanschlisse ber die ein zus tzlicher Ventilator versorgt werden kann Die Vorrichtung kann von einem Host Computer ber eine serielle Leitung gesteuert RS232 RS485 werden In d
153. o V 903 Pumping System User Manual 87 901 016 01 A N vod k Pou it 14 V eobecn informace Toto za zen je ur eno pro odborn ky U ivatel by si m l p ed pou it m za zen p e st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do za zen nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v p slu n ch st tn ch norm ch V v va TV 903 Pumping System je integrovan syst m s turbomolekul rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na max 48000 ot min poh n n vysoce v konn m trojf zov m elektromotorem V v va TV 903 Pumping System neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vy aduj c ist vakuum Je vybavena p davn mi konektory pro p ipojen p davn ho ventil toru ovl dat jej na d lku pomoc hostitelsk ho po ta e p ipojen ho s riovou linkou RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n
154. o de vendas local a ficha Seguran a e Sa de anexa ao presente manual de instru es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedi o 86 306 Caso uma bomba tenha que ser destru da proceder sua elimina o respeitando as normas nacionais espec ficas Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de Istru es 5 Eliminac o Significado do log tipo WEEE presente nos r tulos O s mbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este s mbolo v lido apenas para os pa ses da Comunidade Europeia indica que o produto no qual est aplicado NAO deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e eliminac o ap s a oportuna verificac o dos termos e condic es do contrato de venda Turbo V 903 Pumping System User Manual 87 901 016 01 A 87 306 5 Manual de Istru es Eliminac o 88 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 90 Algemene informatie 90 Opslag 93 Voorbereiding voor installatie 94 Installatie 96 Bevestiging van de pomp
155. odilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 234 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Priro nik za Navodila 16 Splo ne informacije POZOR Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakrSnega koli dejanja ki niso v skladu s standardi TV 903 Pumping System je integriran sistem s turbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine maks 48000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor TV 903 Pumping System ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje Opremijen je s pomo nimi prilju ki za dodaten ventilator ki skrbi za nazor obe za zrak
156. om s felett h m rs klet 10 C t l 35 C ig relativ p ratartalom 0 90 nem kondenz l Elektromagneses mez k jelenl t ben a szivatty t ferromagneses pajzs segits g vel v deni kell R szletes inform ci rt l sd a Technical Information fejezetet A TV 908 Pumping Systemt egy els dleges szivatty hoz kell csatlakoztatni l sd Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 183 306 12 Felhaszn l i K zik nyv A szivatty r gz t se Ha rotorhiba jelentkezik a szivatty s a rendszer k z tti csatlakoz s jelent s nyomat knak lehet kit ve Ha a csatlakoz s nem k pes ezt a nyomat kot elvisel sni a szivatty lev lhat a rendszerr l illetve a motor lev lhat a szivatty h zr l Ebben az esetben f mr szecsk k rep lhetnek sz t a szivatty b l vagy a rendszerb l ami komoly k rokat illetve hal los s r l seket s vagy a t bbi g p k rosod s t okozhatja R gz tse a TV 903 Pumping Systemt stabil helyzetben a turb szivatty bemeneti karim j t a rendszer ellenkarim j ra szerelve 6800 Nm tengely k r li nyomat knak ellen llni k pes csatlakoz ssal P ld ul ez a csavarmenetes karima r gz thet nagy teherb r s M10 ac lcsavarokkal 8 8 n l magasabb oszt ly A k vetkez t bl zat a csavarok sz ks ges sz m t s a r gz t nyomat kot mutatja Karima Csavarmeret Szam Rogzito nyomatek DN 160 Bolted
157. ors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed Turbo V 903 Pumping System User Manual 87 901 016 01 A Instructions for Use 17 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TV 903 Pumping System is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liguids or solid particles The pumping action is obtained through a high speed turbine max 48000 rpm driven by a high performance 3 phase electric motor The TV 903 Pumping System is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is equipped with auxiliary connectors to supply an add
158. ose one from each row and supply Purchase Order if reguesting a billable service 3A LI Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B Exchange Repair upgrade _IConsignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR 0 HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed C Toxic Corrosive Reactive 1 Flammable El Explosive 1 Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the
159. ovann mnda l get med mjukvaran eller fj rrkontroll I O se styckena INTERCONNECTION och RS 232 485 COMMUNICATION DESCRIPTION i bilagan Technical Information Den gr na lysdioden p underdelen av TV 903 Pumping System anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt a l ngsamt blinkande ungef r var 400 ms systemet r i l ge f r acceleration bromsning Stop eller Waiting for interlock a hastigt blinkande ungef r 200 ms feltillst nd Avst ngning av TV 903 Pumping System Om du vill st nga av TV 903 Pumping System beh ver du bara dra ut elkabeln ur v gguttaget Den inbyggda styrenheten avbryter omedelbart pumpens funktion Turbo V 903 Pumping System User Manual 87 901 016 01 A 129 306 8 Bruksanvisning VARNING F r operat rens s kerhet b r TV 903 Pumping System Power Supply 969 6501 vara anslutet med en str mkabel med 3 stycken ledare se tabellen ver ordinerbara delar tillsammans med kontakt godk nd p internationell niv Anv nd sladden och kontakten tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer Den h ga sp nningen som framkallas av styrenheten kan orsaka personskador eller till och med d da Dra d rf r alltid ur str mkabeln innan eventuella underh llsarbeten utf rs inuti enheten Nodstopp Dra ut elsladden fr n str muttaget f r att utf ra ett n
160. p before connecting the turbopump to the system Install this device only in indoor ambient and in any case don t use in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 10 C to 35 C relative humidity O 90 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 903 Pumping System must be connected to a primary pump see Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 251 306 17 Instructions for Use Pump Fixing WARNING If a rotor failure occurs the connection of the pump to the system could be subjected to a significant torque If the connection is not sufficient to withstand that torque the pump could detach from the system or the motor housing could detach from the pump envelope In this case metal fragments could be projected from the pump or system which could cause serious injury or death and or damage to surrounding equipment Fix the TV 903 Pumping System in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstand
161. po iljanjem morate kopijo obrazca vstaviti v embala o sistema rpalko je treba uni iti v skladu z dolo enimi nacionalnimi standardi Odlaganje opadkov Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe 244 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 17 Instructions for Use Safety Guideline for Turbomolecular Pumps 246 General Information 247 Storage 249 Preparation for Installation 250 Installation 251 Pump Fixing 252 Use 254 Switching on and Use of TV 903 Pumping System 255 TV 903 Pumping System Switching off 255 Emergency Stop 256 Maintenance 257 Disposal 257 Original Instructions Er Agilent Technologies 245 306 17 Instructions for Use Safety Guideline for Turbomolecular Pumps 246 306 Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rot
162. product Prim Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature 1 1 1 1 21 2 1111 Pg 2 3 s Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the produci on Page 2 TURBO PUMPS and TURBO CONTROLLERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Fareline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging EEG OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage prablem Solenoid failure Damaged flange Error code an display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SC
163. pumpen umiddelbart Turbo V 903 Pumping System User Manual 87 901 016 01 A 143 306 9 Instruksjon Manual TV903 Pumping System Power Supply 969 6501 m forsynes med en 3 VIVER tr ds str mkabel se tabellen for deler som kan bestilles og utstyrt med et stopsel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og stopselet sammen med en egnet jordet kontakt for unng elektrisk stot og for overholde EU forskriftene Hoyspenningene som utvikler seg inne i styreenheten kan fore til alvorlige skader eller dodsulykker For man utforer vedlikeholdsoperasjoner inne i enheten er det nodvendig kople fra stromkabelen Nodstopp Trekk nettkabelen ut av stromuttaket for stoppe TV 903 Pumping System i en nodssituasjon 144 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instruksjon Manual 9 Vedlikehold TV 903 Pumping System er vedlikeholdsfritt Alt arbeid p systemet m kun utfgres av autorisert personell ADVARSEL For noe arbeid gjores p systemet m det frakoples stromtilforselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom pumpen stanser m du ta kontakt med Agilent reparasjonservice eller med Agilent avanserte bytteservice som kan tilby en overhalt pumpe til erstatning for den gdelagte For en pumpe returneres til produsenten for repara
164. r sistance classe sup rieure a 8 8 La table ci apr s indigue le nombre de vis n cessaires et le couple de serrage appliguer Bride Dimension vis N Couple de serrage Le TV 903 Pumping System peut tre install e dans n importe quelle position Le TV 903 Pumping System ne peut tre fix par sa base Turbo V 903 Pumping System User Manual 87 901 016 01 A 51 306 3 Mode d emploi mid kraj Le TV 903 Pumping System appartient la deuxi me cat gorie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie Le TV 903 Pumping System dispose de connecteurs pour les entr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de fa on qu aucune partie sous tension ne soit accessible S assurer que l isolation du dispositif branch au TV 903 Pumping System a une isolation appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 52 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Utilisation Mode d emploi 3 Ce paragraphe pr sente les principales proc dures op rationnelles Avant d utiliser le syst me effectuer tous les branchements lectrigues et pneumatigues Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 80 C AVERTISSEMENT Ne
165. r than the case should be carefully reviewed by Agilent specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Accessories and Spare Parts Table 7 Accessories and Spare Parts Description Part number ts S Power Supply unit 969 6501 Controller Model 969 6500 T Plus software and serial cab 969 9883 969 9957 Turbo V 903 Pumping System User Manual 87 901 016 01 A 299 306 18 Technical Information Accessories and Spare Parts 300 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action reguest form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adeguate or timely manner Upon receipt of your Corrective Action Reguest we will dete
166. rdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum VORSICHT Falls die Lagerdauer aus verschiedenen Grinden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter Turbo V 903 Pumping System User Manual 87 901 016 01 A 33 306 2 Gebrauchsanleitung Vor der Installation Der TV 908 Pumping System wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Der TV 903 Pumping System ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St f en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist gem den Vorschriften zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz VORSICHT Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den bloBen H nden angefasst werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Der TV 903 Pumping System kann durch die Umgebung an sich keine Sch den erleiden Er sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Abbildung 1 Vor der Installation 34 306 Turbo V 903 Pumping System User Manual 87
167. re con ue pour des applications de vide pouss et ultrapouss et dot d un contr leur Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e 48000 tr min maxi mue par un moteur lectrique triphas haut rendement Le TV 903 Pumping System est totalement exempt d agents polluants et il est par cons quent indiqu pour toutes les applications exigeant un vide propre Il est en outre dot de connecteurs auxiliaires permettant d alimenter un ventilateur suppl mentaire de le piloter distance l aide d un ordinateur host connect par ligne s rielle RS232 ou RS485 Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants Faite Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage Turbo V 903 Pumping System User Manual 87 901 016 01 A 45 306 3 Mode d emploi AHSA AMI Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui effec
168. refore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the T Plus software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9600 19200 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character Turbo V 903 Pumping System User Manual 87 901 016 01 A 283 306 18 Technical Information lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 a lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be wri
169. rmation para m s detalles El TV 903 Pumping System ha de conectarse a una bomba primaria v ase diagrama en Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 65 306 4 Manual de istrucciones Fijaci n de la bomba LOVU A HUN En caso de da arse el rotor la conexi n entre la bomba y el sistema puede ser sometida a un par de fuerza excesivo En estas circunstancias la conexi n podria no resistir a dicho par de fuerza y como consecuencia la bomba podria separarse del sistema o el motor podria separarse respecto del contenedor de la bomba En este caso fragmentos de metal pueden ser proyectados por la bomba o por el sistema con consiguiente grave riesgo de lesiones o muerte y o da os a los aparatos adyacentes Fijar el TV 903 Pumping System en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 6800 Nm en torno a su propio eje Por ejemplo esta Bolted Flange puede ser fijada con tornillos M10 de acero de alta resistencia clase mayor de 8 8 La tabla siguiente describe el n mero de tornillos necesarios y con cual par de apriete apretarlos DN 160 Bolted M10 8 10 Nm El TV 903 Pumping System puede instalarse en cualquier posici n EI TV 903 Pumping System no puede fijarse utilizando su base 66 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de i
170. rmi Vedere l appendice Technical Information per ulteriori dettagli Il TV 903 Pumping System deve essere collegato ad una pompa primaria vedere schema in Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A 21 306 1 Istruzioni per l uso Fissaggio della pompa Se si verifica un danno al rotore la connessione tra la pompa ed il sistema potrebbe essere sottoposta ad una coppia significativa Se la connessione non sufficiente per resistere alla suddetta coppia la pompa potrebbe staccarsi dal sistema o il motore potrebbe staccarsi dall involucro della pompa In questo caso frammenti di metallo potrebbero essere proiettati dalla pompa o dal sistema i quali potrebbero causare seri danni o la morte e o danni agli apparati adiacenti Fissare il TV 903 Pumping System in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia di 6800 Nm attorno al proprio asse Per esempio questa Bolted Flange pu essere fissata con viti M10 in acciaio ad alta resistenza classe maggiore di 8 8 La seguente tabella descrive il numero di viti necessarie e con quale coppia di serraggio stringerle Flangia Dimensione viti N Coppia di serraggio DN 160 Bolted M10 8 10 Nm Il TV 903 Pumping System pu essere installato in qualsiasi posizione Il TV 903 Pumping System non pu essere fissato tramite la sua base
171. rmine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Reguest for Action see backside page to Agilent Vacuum Products Division Torino Ouality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc I Agilent Technologies i Agilent Technologies Vacuum Products Division Instructions for returning products
172. robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku Turbo V 903 Pumping System User Manual 87 901 016 01 A 217 306 14 N vod k Pou it Likvidace 218 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 15 Navod na Obsluhu Bezpe nostn pokyny pre Turbomolekul rne v vevy 220 V eobecn inform cie 221 Uchov vanie 223 Pr prava na in tal ciu 224 In tal cia 225 Upevnenie v vevy 226 Pou itie 228 Zapnutie a pou itie zariadenia TV 903 Pumping System 229 Vypnutie zariadenia TV 903 Pumping System 229 N dzov zastavenie 230 dr ba 231 Likvid cia 231 Preklad origin lneho n vodu Agilent Technologies 219 306 15 N vod na Obsluhu Bezpe nostn pokyny pre Turbomolekul rne v vevy Turbomolekul rne v vevy op san v nasleduj cej pr ru ke sa vyzna uj vysokou kinetickou energiou a to v aka vysokej r chlosti ot ania v kombin cii so pecifickou hmotnos ou svojich rotorov V pr pade syst mov
173. rpumpen 30 Allgemeines31 Lagerung 33 Vor der Installation 34 Installation 35 Befestigung der Pumpe 36 Gebrauch 38 Wartung 41 Turbo V 903 Pumping System User Manual 87 901 016 01 A 5 306 Contents 6 306 Entsorgung 42 Mode d emploi 43 Normes de s curit pour Pompe Turbomol culaires 44 Indications g n rales 45 Stockage 47 Preparation pour l installation 48 Installation 50 Fixation de la pompe51 Utilisation 53 Entretien 56 Mise au rebut 57 Manual de istrucciones 59 Indicaciones de Seguridad para Bombas Turbomoleculares 60 Informaci n general 61 Almacenamiento 63 Preparaci n para la instalaci n 64 Instalaci n 65 Fijaci n de la bomba 66 Uso 68 Mantenimiento 71 Eliminaci n 72 Turbo V 903 Pumping System User Manual 87 901 016 01 A Contents 5 Manual de Istru es 73 Indica es de Seguran a para Bombas Turbomoleculares 74 Informa es gerais 75 Armazenagem 77 Prepara o para a instala o 78 Instala o 80 Fixa o da bomba 81 Utiliza o 83 Manuten o 86 Elimina o 87 6 Bedrijfshandleiding 89 Veiligheidsinstructies voor Turbomoleculaire pompen 90 Algemene informatie 91 Opslag 93 Voorbereiding voor installatie 94 Installatie 96 Bevestiging van de pomp 97 Gebruik 99 Onderhoud 102 Afvalverwerking 103 7 Istruktionsbog 105 Sikkerhedsanvisninger for Molekyl re turbopumper 106 Turbo V 903 Pumping System User Manual 87 901 016 01 A 7 306 Conten
174. rth conductor to the pump The screw must be fixed with a 2 Nm torque The impedance between the pump body and the earth connection point must be lt 0 10 J54 Power Input VDC an OMMON VDC 57 COMMON 48VDC 6 5A Figure 7 Power input The controller must be supplied with a voltage of 48 Vdc 10 according to the drawing use 2 pins for each pole Input current during Normal Operation 6 5 A Turbo V 903 Pumping System User Manual 87 901 016 01 A 269 306 18 Technical Information P4 External Fan CONNECT THIS SHIELD TO FASTON ON FRONT PANEL FAN CABLE A FAN FERRITE Figure 8 External fan This is a dedicated 48 Vdc connector to supply the optional external fan A shielded cable with ferrite is shipped with the controller see picture The faston contact has to be connected on the front panel in order to reduce noise and accomplish the EMC rules J1 In Out Figure 9 In Out This connector carries all the input and output signals to remote control the TV 903 Pumping System 270 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 It is a 15 pins D type connector the available signals are detailed in the table the following paragraphs describe the signal characteristics and use Table 2 Signal characteristics and use Pin N Signal name In Output 1 Start Stop In 2
175. s emballage inden afsendelse Skrotning af pumpen skal foreg i overensstemmelse med det p galdende lands s rlige love Bortskaffelse Betydningen af WEEE logoet p m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverandgren af anordningen enten fabrikken eller en forhandler for igangsattelse af afhentnings og bortskaffelsesprocessen efter ngje at have kontrolleret betingelserne i salgskontrakten Turbo V 903 Pumping System User Manual 87 901 016 01 A 117 306 7 Istruktionsbog Bortskaffelse 118 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar 120 Allman information 120 F rvaring 123 F rberedelser f r installation 124 Installation 125 Fasts ttning av pump 126 Anv ndning 128 Start och anv ndning av TV 903 Pumping System 129 Avst ngning av TV 903 Pumping System 129 N dstopp 130 Underh ll 131 Bortskaffning 132 Overs ttning av originalinstruktionerna 5 Agilent Technologies 119 306 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar
176. serial cable and the T Plus software is available optional Turbo V 903 Pumping System User Manual 87 901 016 01 A 281 306 18 Technical Information Procedure to Connect the Serial and 1 0 ports to an External Cable In the following picture it has showed the right procedure to connect a cable to the I O or to the serial port A shielded cable of 3 m maximum length has to be utilized for both serial and I O port connection Remove the plastic protection on both the ends of the cable picture b and after it is necessary to connect the wires to the single pins like showed in the picture c Take care to have a good contact between the metallic case and the external shield of the wire Moreover this operation has to be done at least on the controller side 282 306 In this way you will be sure to reduce the influence of the external noise and to accomplish the EMC requests In picture d is showed the cable assembled HILOED CABLE SHIELD 7 SHIELI OLDERED Ti CONNECTOR METALLIC CASE HELL ASSEMBLEI HELL TU DI Figure 19 Cable assembled Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector P2 The communication protocol is the same see the structure below but only the RS 485 manages the address field The
177. sjon eller som innbytte mot et overhalt system er det helt ngdvendig fylle ut og sende det vedlagte skjemaet Helse og sikkerhet til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser Turbo V 903 Pumping System User Manual 87 901 016 01 A 145 306 9 Instruksjon Manual Eliminering Betydelsen av symbolet p logo WEEE p etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC direktiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverandgren av anordningen som kan vaere et firma eller en forhandler som sgrger for oppsamling 0g eliminering etter ha kontrollert avtal og betingelser i kjopekontrakten F R 146 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 10 Ohjekasikirja Turbomolekyylipumppujen Turvaohjeet 148 Yleisi tietoja 149 Varastointi 151 Valmistelut asennusta varten 152 Asennus 153 Pumpun kinnitys 154 K ytt 156 TV 903 Pumping Systemin k ynnistys ja k ytt 157 TV 903 Pumping Systemin pys ytt minen 157 H t pys ytys 158 Huolto 159
178. sse dans les roulements Pour obtenir une mise en marche Soft Start il faut r activer ce mode op ratoire l aide du logiciel ou par marche arr t distance Cf paragraphes INTERCONNECTION et RS232 485 COMMUNICATION DESCRIPTION dans l annexe Technical Information La LED verte plac e sur le panneau de la base du TV 903 Pumping System indique par sa fr quence de clignotement les conditions op rationnelles du syst me a allum e fixe la pompe est en rotation normale clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente interlock a clignote rapidement p riode d environ 200 ms condition d erreur Arr t du TV 903 Pumping System Pour arr ter le TV 903 Pumping System il suffit de retirer la tension d alimentation Le contr leur incorpor arr te imm diatement la pompe 54 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Mode d emploi 3 Pour la s curit de l op rateur le TV 903 Pumping System doit tre aliment par un cable d alimentation 3 fils voir le tableau des parties qui peuvent tre ordonn es dot d une fiche approuv e niveau international Utiliser ce cable et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques et satisfaire les requis des normes CE Les tensions lev es qui se d veloppent dans le contr leur peuvent provoquer de gra
179. ssieve gassen zijn blootgesteld of in ruimten met explosiegevaar of groot risico op brand Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn max druk 2 bar boven de atmosferische druk temperatuur van 10 C tot 35 C relatieve vochtigheid 0 90 niet condenserend In aanwezigheid van elektromagnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie Het TV 903 Pumping System moet op een primaire pomp aangesloten zijn zie schema in Technical information Turbo V 903 Pumping System User Manual 87 901 016 01 A Bedrijfshandleiding 6 Bevestiging van de pomp Als schade aan de rotor optreedt zou de verbinding tussen de pomp en het systeem aan een behoorlijk groot koppel onderhevig kunnen zijn Als de verbinding niet voldoende is om dit koppel te weerstaan zou de pomp van het systeem of de motor van het pomplichaam los kunnen raken In dit geval kunnen metaalfragmenten door de pomp of het systeem in het rond worden geschoten welke ernstig letsel de dood en of schade aan omliggende apparaten kunnen veroorzaken Bevestig het TV 903 Pumping System in een stabiele positie door de inlaatflens van de turbopomp op de contraflens van het systeem te monteren met een verbinding die in staat is om een koppel van 6800 Nm rondom de eigen as te weerstaan Deze flens Bolted Flange kan bijvoorbeeld worden vastgem
180. stem non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato Prima di effettuare qualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent che permette di ottenere una pompa rigenerata in sostituzione di quella guasta Prima di rispedire al costruttore una pompa per riparazioni o advanced exchange service indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche Turbo V 903 Pumping System User Manual 87 901 016 01 A 27 306 1 Istruzioni per l uso Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un si
181. stema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit 48000 giri min max mossa da un motore elettrico trifase ad alto rendimento Il TV 903 Pumping System totalmente privo di agenti contaminanti ed quindi adatto per applicazioni che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i quali possibile alimentare un ventilatore aggiuntivo pilotarlo da remoto tramite un computer host collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information Questo manuale utilizza le seguenti convenzioni messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni al apparecchiatura Turbo V 903 Pumping System User Manual 87 901 016 01 A 17 306 1 Istruzioni per l uso NU ALI ZN messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Le note contengono informazioni importanti estrapolate dal testo 18 306 Turbo V 903 Pumping System User
182. stema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita N hav Y NA N JA N OY 28 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeines 30 Lagerung 33 Vor der Installation 34 Installation 35 Befestigung der Pumpe 36 Gebrauch 38 Einschaltung und Gebrauch des TV 903 Pumping Systems 39 Stoppen des TV 903 Pumping System39 Not Aus 40 Wartung 41 Entsorgung 42 bersetzung der Originalanleitungen 1 a Agilent Technologies 29 306 2 Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine grof e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden WARNUNG Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installatio
183. stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta Nuez T S lt EN Fr be 72 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Turbo V 903 Pumping System User Manual 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 74 Informac es gerais 74 Armazenagem 77 Preparac o para a instalac o 78 Instalac o 80 Fixa o da bomba 81 Utilizac o 83 Acendimento e Utilizac o do TV 903 Pumping System 84 Paragem do TV 903 Pumping System 84 Paragem de Emerg ncia 85 Manutenc o 86 Eliminac o 87 Traduc o das instruc es originais EE Agilent Technologies 73 306 5 Manual de Istruc es Indica es de Seguran a para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rota o poderia ser
184. strucciones 4 Pu EI TV 903 Pumping System pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a El TV 903 Pumping System tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado al TV 903 Pumping System mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Turbo V 903 Pumping System User Manual 87 901 016 01 A 67 306 4 Manual de istrucciones Uso En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 80 C ADVERTENCIA No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbo bomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCI N Evitense golpes oscilaciones o bruscos desplazamientos de la turbo bomba
185. t 0 tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedic o CUIDADO Se por uma raz o qualquer o per odo de armazenagem for superior ser necess rio enviar outra vez a bomba para o fabricante Para mais informac es contatar o representante local da Agilent Turbo V 903 Pumping System User Manual 87 901 016 01 A 77 306 5 Manual de Istru es Preparac o para a instalac o O TV 903 Pumping System fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remoc o da embalagem tomar muito cuidado para n o deixar cair o TV 903 Pumping System e para n o submet lo a choques ou vibrac es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do meio ambiente Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposic o do vacuo Utilizar sempre luvas ou outra protecc o adeguada O TV 903 Pumping System n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instalac o no sistema para evitar eventuais acumulac es de p 78 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de Is
186. ta jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta Turbo V 903 Pumping System User Manual 87 901 016 01 A 151 306 10 Ohjek sikirja Valmistelut asennusta varten TV 903 Pumping System toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TV 903 Pumping Systemin putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta HUOMIO Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta T
187. te voorkomen en om te voldoen aan de vereisten van de EG normen De in de controller ontwikkelde hoge voltage kan ernstige letsels of de dood veroorzaken Maak de voedingskabel los alvorens onderhoudswerkzaamheden in het systeem uit te voeren Noodstop Om het TV 903 Pumping System in noodomstandigheden te stoppen moet de stroomtoevoerkabel van het stopcontact losgekoppeld worden Turbo V 903 Pumping System User Manual 87 901 016 01 A 101 306 6 Bedrijfshandleiding Onderhoud Het TV 903 Pumping System is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd WAARSCHUWING Alvorens werkzaamheden aan het systeem uit te voeren de voeding loskoppelen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent in te schakelen zo krijgt men een geregenereerde pomp ter vervanging van de defecte pomp Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij het systeem in de verpakking worden gevoegd 102 306 Mocht de pomp gesloopt worden ga dan overeenkomstig de specifieke nat
188. tem bekapcsol sa s m k dtet se 187 A TV 903 Pumping System kikapcsol sa 187 Veszle llit s 188 Karbantart s 189 Megsemmisit s 190 Az eredeti utasit s fordit sa Agilent Technologies 178 177 306 12 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz A jelen g pk nyvben le rt turb molekul ris szivatty k nagy mozg si energi val rendelkeznek nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor s az ll r sz rintkez se vagy a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 178 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Felhaszn l i K zik nyv 12 Altal nos informaico FIGYELEM A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent elh rit mag t l minden felel ss get minden olyan esem ny eset ben amely ezen utas t sok r szben vagy teljes eg sz ben val be nem tart sa a berendez s szakk pzetlen szem lyek ltal t rt n nem megfelel haszn lata az enged ly n lk li bea
189. tion 18 Connection to the Pump Figure 26 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 resistance at 25 C and pins E G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply Turbo V 903 Pumping System User Manual 87 901 016 01 A 297 306 18 Technical Information Pump used in Presence of Magnetic Fields 298 306 Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependent from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be expected However if the effect is greate
190. tru es 5 Preparac o para a instalac o PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Figura 1 Preparac o para a instalac o Turbo V 903 Pumping System User Manual 87 901 016 01 A 79 306 5 Manual de Istru es Instalac o Remover a etiqueta autocolante e retirar a tampa de protecc o somente no momento de ligar a turbobomba ao sistema 80 306 Instale este equipamento somente em locais fechados e para todos os efeitos n o utilize o equipamento em ambientes expostos aos efeitos delet rios do tempo chuva gelo neve em ambientes sujeitos a p gases agressivos ambientes explosivos ou com alto risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condic es ambientais press o maxima 2 bar al m da press o atmosf rica temperatura de 10 C a 35 C humidade relativa 0 90 n o condensante Na presenca de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O TV 903 Pumping System deve ser ligado a uma bomba prim ria consultar esquema em Technical Information Turbo V 903 Pumping System User Manual 87 901 016 01 A Manual de Istru es 5 Fixacao da bomba Em caso de dano no rotor a ligac o entre a bomba e o sistema corre o risco de sofrer um torque muito grande Se a ligac o n o resistir
191. ts 8 306 Generel information 107 Opbevaring 109 Forberedelser for installation 110 Installation 111 Fastgorelse af pumpe 112 Anvendelse 114 Nodstop 116 Vedligeholdelse 117 Bortskaffelse 117 Bruksanvisning 119 S kerhetsanvisningar f r Molekyl ra turbopumpar120 Allman information 121 F rvaring 123 F rberedelser f r installation 124 Installation 125 Fastsattning av pump 126 Anvandning 128 Underh ll 131 Bortskaffning 132 Instruksjon Manual 133 Sikkerhetsanvisninger for Turbomolekyl re pumper 134 Generell informasjon135 Turbo V 903 Pumping System User Manual 87 901 016 01 A Contents Lagring 137 Klargjgre til installasjon 138 Installasjon 139 Festing av pumpen 140 Bruk 142 Vedlikehold 145 Eliminering 146 10 Ohjek sikirja 147 Turbomolekyylipumppujen Turvaohjeet 148 Yleisi tietoja 149 Varastointi 151 Valmistelut asennusta varten152 Asennus 153 Pumpun kinnitys154 K ytt 156 Huolto 159 H vitt minen 160 11 Xpnoewo 161 162 163 165 166 Turbo V 903 Pumping System User Manual 87 901 016 01 A 9 306 Contents 10 306 12 13 108 169 171 174
192. tten into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Table 4 Data type Field length Valid characters Logic L 1 0 off 1 on Numeric N 6 0 Y right justified with Alphanumeric A from blank to ASCII lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE 284 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Technical Information 18 Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The controller can answers with the following response types Table 5 Type Logic Numeric Alphanumeric ACK NACK Unknown Window Data Type Error Out of Range Win Disabled Turbo V 903 Pumping System User Manual 87 901 016 01 A Description After a read instruction of a logic window After a read instr
193. tu e de fa on impropre risque de provoquer de graves l sions Les notes contiennent des renseignements importants isol s du texte 46 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des pompes Turbomol culaires Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante Ala premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche par le client en mode soft Start Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition Mein En cas de d passement du temps de stockage pour toutes raisons la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone Turbo V 903 Pumping System User Manual 87 901 016 01 A 47 306 3 Mode d emploi Preparation pour l installation ATTENTION Le TV 903 Pumping System est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli r
194. uction of a numeric window After a read instruction of an alphanumeric window The command execution has been successfully completed The command execu tion has been failed The specified window in the command is not a valid window The data type specified in the command Logic Numeric or Alphanu meric is not accorded with the specified Win dow The value expressed during a write command is out of the range value of the specified window Length Value 1 byte MW 6 bytes E 10 bytes 1 byte 0x6 1 byte 0x15 1 byte 0x32 1 byte 0x33 1 byte 0x34 1 byte 0x35 The specified window is Read Only or temporarily disabled for ex ample you can t write the Soft Start when the Pump is running 285 306 18 Technical Information Examples Command START Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller STX ADDR WINDOW WR ON ETX CRC 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 286 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Command SOFT START ON Source PC
195. uschi spostamenti della turbopompa guando in funzione cuscinetti potrebbero danneggiarsi Per la mandata al aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica AVVERTENZA Ouando la pompa viene utilizzata per il pompaggio di gas tos sici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi 24 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Istruzioni per l uso 1 Accensione ed Uso del TV 903 Pumping System Per accendere il TV 903 Pumping System sufficiente fornire la tensione di alimentazione di 48 Vdc Il controller incorporato riconosce automaticamente la presenza dei segnali di interlock e di avvio ed avvia la pompa Il modo Soft Start previsto per accendere la pompa dopo un prolungato periodo di fermo Questo permette un ottimale distribuzione del grasso nei cuscinetti Per avere una partenza con Soft Start attivo occorre riabilitare il modo suddetto tramite software o Remote I O vedere i paragrafi INTERCONNECTION e RS 232 485 COMMUNICATION DESCRIPTION nell appendice Technical Information Il LED verde posto sul pannello della base del TV 903 Pumping System indica con la frequenza del suo lampeggio le condizioni operative del sist
196. ut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i TV 903 Pumping System som d rf r passar f r till mpningar som kr ver ett rent vakuum TV 903 Pumping System har dessutom hj lpkontakter som g r det m jlig att f rse str m till en extra ventilator och att fj rrstyra den med hj lp av en host dator som r ansluten genom seriell f rbindelse RS 232 RS 485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical information I bruksanvisningen anv nds f ljande standardrubriker Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst Turbo V 903 Pumping System User Manual 87 901 016 01 A 121 306 8 Bruksanvisning VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finns risk f r sv ra personskador Detta visar p viktig information i texten 122 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Bruksanvisning 8 Forvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras
197. vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases 254 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Instructions for Use 17 Switching on and Use of TV 903 Pumping System To switch on the TV 903 Pumping System it is necessary to supply a voltage of 48 Vdc The integrated controller automatically recognizes the interlock and start signals presence and start up the pump Soft Start mode is provided to start the pump after a protracted stop This allows a better grease distribution in the bearings To enable the Soft Start mode it must be activated by the suitable software or Remote I O command see the paragraphs INTERCONNECTIONS and RS 232 485 COMMUNICATION DESCRIPTION in the appendix Technical Information The green LED located on the TV 903 Pumping System base front panel indicates with its flashing frequency the system operating conditions
198. van kontroln modul automaticky rozpozn sign ly spojenia a spustenia a zapne v vevu tartovac re im Soft Start jemn tart sa pou va pri uveden v vevy do chodu po dlhom obdob mimo prev dzky To umo uje optim lnu distrib ciu mazacieho tuku v lo isk ch Ak si el te uvies zariadenie do chodu v re ime Soft Start mus te ho aktivova pr slu n m softv rov m pr kazom alebo prostredn ctvom dia kov ch VSTUPOV V STUPOV vi odseky INTERCONNECTION a RS 232 485 COMMUNICATION DESCRIPTION v prilohe Technical Information Zelen di da LED na z kladnom elnom paneli zariadenia TV 903 Pumping System ukazuje frekvenciou blikania sp sob innosti syst mu iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov n beh brzdenie Stop alebo akanie na spojenie r chle blikanie interval asi 200 ms chybov stav Vypnutie zariadenia TV 903 Pumping System Ak chcete vypn zariadenie TV 903 Pumping System mus te odpoji nap janie Zabudovan kontroln modul v vevu okam ite zastav Turbo V 903 Pumping System User Manual 87 901 016 01 A 229 306 15 N vod na Obsluhu Z d vodu bezpe nosti obsluhuj ceho pracovn ka mus by zariadenie TV 903 Pumping Syst m Power Supply 969 6501 nap jan pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str
199. vatkoz sok vagy a specifikus nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt nik A TV 903 Pumping System egy nagy s rendk v l nagy v kuumalkalmaz sokhoz val turbo molekul ris szivattyb l s a megfelel vez rl egys gb l ll integr lt rendszer A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni De nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z st egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 48000 fordulat perc biztos tja A TV 903 Pumping System szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra A berendez s rendelkezik olyan seg dcsatlakoz kkal melyken kereszt l tov bbi ventill tort t pl lhat ez ut bbi t vvez rl sel m k dtethet egy sorosan RS232 vagy RS485 csatlakoztatott gazdag p seg ts g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben Ez a k zik nyv a k vetkez figyelmeztet jelz seket haszn lja A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem tartanak be az a berendez s k rosod s t okozhatja Turbo V 903 Pumping System User Manual 87 901 016 01 A 179 306 12 Felhaszn l i K zik nyv VESZ
200. ves endommagements ou la mort Avant d effectuer les op rations d entretien l int rieur de l unit d brancher le c ble d alimentation Arr t d urgence Pour arr ter le TV 903 Pumping System en conditions d urgence il faut d brancher le cordon d alimentation de la prise lectrique Turbo V 903 Pumping System User Manual 87 901 016 01 A 55 306 3 Mode d emploi Entretien Le TV 903 Pumping System n exige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent qui permet d obtenir une pompe r g n r e en remplacement de la pompe endommag e Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau de vente local la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage du syst me avant l exp dition 56 306 En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales concernant la gestion des d chets Turbo V 90
201. vov asti a sp sobi v ne zranenie alebo smr a alebo po kodi al ie zariadenia Upevnite zariadenie TV 903 Pumping System do stabilnej polohy tak e pripevn te vstupn pr rubu turbov vevy k protipr rube syst mu Pripojenie mus by schopn vydr a to iv moment 6800 Nm okolo vlastnej osi Napr klad skrutkovacia pr ruba sa m e upevni pomocou ve mi pevn ch oce ov ch skrutiek M10 trieda vy ia ne 8 8 Nasleduj ca tabu ka uv dza potrebn po et skrutiek a potrebn u ahovac moment Priruba Rozmer skrutiek Pocet Utahovaci moment DN 160 Bolted M10 8 10 Nm Zariadenie TV 903 Pumping System m e by nain talovan v ubovo nej polohe Zariadenie TV 903 Pumping System sa nem e upevni pomocou vlastnej z kladne 226 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A N vod na Obsluhu 15 POZOR Zariadenie TV 903 Pumping System patr do druhej in tala nej prep ovej kateg rie pod a normy EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Zariadenie TV 903 Pumping System m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj iemu okruhu tak aby k iadnej s iastke pod nap t m nebol pr stup Presved ite sa i zariadenie pripojen k TV 903 Pumping System m adekv tnu izol ciu aj pre pr pad samostatnej chy by pod a normy EN 61010 1
202. zeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu bo zgodny z dyrektyw UE 85 399 dotycz cej ochrony rodowiska Aby unikn problem w odgazowywania nale y nie dotyka go ymi r koma cz ci przeznaczonych do wytwarzania pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie Urz dzenie TV 903 Pumping System nie mo e by uszkodzone poprzez wystawienie go na dzia anie atmosfery Dlatego te zaleca si aby pompa do momentu zainstalowania jej w systemie pozosta a zamkni ta celem unikni cia zanieczyszczenia jej py em PUMPING SYSTEM 969 8811 48VDC POWER SUPPLY 969 6501 Posta 1 Przygotowanie do instalacji 196 306 Turbo V 903 Pumping System User Manual 87 901 016 01 A Podrecznik Instrukcji 13 Instalacja UWAGA Usuna ta me klejaca i zdja korek zabezpieczajacy dopiero w momencie potaczenia pompy do systemu Przyrzad ten nale y umieszeza w miejscach zamknietych i nie stosowa go w miejscach wystawionych na dzialanie czynnik w atmosferycznych deszcz mr z nieg pyt w niszezacych gaz w w Srodowiskach wybuchowych lub z wysokim ryzykiem po arowym Podczas dziatania nale y obowiazkowo przestrzega nastepujacych warunk wi otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym temperatura od 10 C do 35 C wzgl dna wilgo 0

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