User Manual MP55E - Physik Instrumente
Contents
1. 154 30 83 8 8 amp e 4 1 8l 3 eo m a on 9 0 o 066 t i 2 E e e e e pes amp Lo i 3 2 78 37 5 38 1 TA 23 23 4x M6 v 6 La Z i e oO e S Rag 3 X JE 1 Release 1 1 0 WWW pi ws Page 11 M 451 Vertical Positioning Stages Operating Manual MP 55E 4 3 2 M 451 1PD 154 30 80 8 8 Mm 1 ol 9 e P i io di ot 3 e 2 06 6 oo x 1 e 3 9 i e elo a Lo 3 a 78 37 5 38 1 125 122 150 Release 1 1 0 WWW pi ws Page 12 4 3 3 M 451 Vertical Positioning Stages Operating Manual MP 55E M 451 12S 154 30 81 8 1 D i ES 1 1 9 a e P oO Il gt 11 G 6 6 D Y 1 ze e Y e e e ex e 0 N 78 EN 37 5 38 1 ty 23 23 4x M6 V6 Wn oy i To Ox iD oj o a 9o E o xm e 1 Release 1 1 0 WWW pi ws2. Page 13 4 4 4 4 1 4 4 2 M 451 Vertical Positioning Stages Operating Manual MP 55E Pin Assignments M 451 1DG M 451 1DG stages are equipped with a sub D15 m socket for connecting the motor controller Connector type Dsub15 m Pin Function 1 internal use 9 Motor input 2 Motor input 10 internal use 3 internal use 11 internal use 4 5 V input 12 Limit Switch negative side 5 Limit Switch positive side 13 Reference signal output 6 GND Limit Switch and Logic 14 Encoder A A when using RS 422 type transmission 7 A when using RS 422 type transmission 15 Encoder B B when using RS 422 type transmission 8 B when using RS 422 type transmission M 451 1PD M 451 1PD stages are equipped with a sub D15 m socket for connecting the motor controller and one 3 pin round connector for the power supply J2 SIGNALS J1 POWER Gil BOR EN Ms 7 Looooco of Connector J1 Power Suppl Connector J2 Signals Controller connection Type 3 pin round socket Type sub D15 m connector Reference No Reference No AMP 9 215594 1 Switchcraft Tini Q G Pin Signal PIN Signal 1 Control input for optional motor brake 1 GND cit 2 Voltage input 9 1G 3 n c 2 N C 10 GND power 3 PWM signal in MAGN 11 PWM signal in SIGN 4 5 V input 12 NLIMIT Limit signal of negative side 5 PLIMIT Limit signal of positive side 13 REFS reference signal 6 GND Limit 14 Encoder out A 7 Encoder out
3. A 15 Encoder out B 8 Encoder out B Release 1 1 0 WWW pi ws Page 14 4 4 3 M 451 Vertical Positioning Stages M 451 12S Operating Manual MP 55E M 451 12S stages are equipped with a sub D 15 m socket for connecting the motor controller Connector type sub D 15 m Pin 1 2 3 10 11 12 13 14 15 Function phase 1a phase 1b phase 2a phase 2b n c n c n c n c n c n c input 5 V supply from controller output Limit signal positive GND n c output Limit signal negative oT 3 Release 1 1 0 WWW pi ws Page 15
4. Motor voltage range 0 to 24 0 to 12 24 V Body material Al Al Al Recommended controller C 843 C 848 C 843 C 848 C 630 C 600 2 phase stepper 24 V chopper voltage max 0 8 A phase 20 000 microsteps with C 600 C 630 controllers A3 Design Resolution Theoretical minimum movement that can be made based on characteristics of mechanical drive components selected A4 Minimum incremental motion The minimum motion that can be repeatably executed for a given input sometimes called the practical or operational resolution B1 Max Normal Load Centered vertical load on horizontal stage Limit and Position Reference Sensors All sensors used are magnetic field triggered Hall effect sensors usable with bipolar or CMOS circuitry Power supply Voltage output Release 1 1 0 5V GND supplied by the motor controller through the motor connector TTL level 0 V or 5 V Limit Switch Logic with DC motor versions active high normal motor operation low overtravel condition high with stepper motor version active low normal motor operation high overtravel condition low WWW pi ws Page 10 M 451 Vertical Positioning Stages Operating Manual MP 55E 4 3 Dimensions Dimensions are in mm decimal places separated by commas in drawings 4 3 1 M 451 1DG
5. OR io 7 2 3 Move the stage tete en rada 8 24 Maintenance ooccccncnnnnnnnnnonnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnrnnnnnnnnineniss 8 3 M 451 and Motor Controllers 8 4 Technical Rr rcp 10 4 1 Specificatioris cce DT ertragen iia iaa 10 4 2 Limit and Position Reference Sensors cccccccccceecceeeeeeeeeeeeees 10 4 3 DIMENSIONS iniciada aladdin 11 43 1 A A AOS 11 43 2 Nod PD oa 12 433 IMAZ A AAA AA dad o a ten 13 4 4 PITASSIO AMES m 14 4 4 1 M 451 1DO 1i E REA ER Ra De Rie fa ER EE FR Pax a PAREM REM MER mets 14 BAD A AO 14 44 37 N51 29S wisst TE S san Ded mtd utes fred catu Geass 15 Copyright 2004 by Physik Instrumente PI GmbH amp Co KG Release 1 1 0 File M 451 User MP55E110 doc 198656 Bytes Release 1 1 0 WWW pi ws Page 2 0 1 0 2 M 451 Vertical Micro Positioning Stage User Manual MP 55E Manufacturer Declarations Safety Precautions Read This Before Operating M 451 Linear Stages If the platform is not at its reference position mounting screws could enter the case when inserted in the four M6 mounting holes on top of the platform This could cause damage to the stage mechanics M 451 stages are powered by powerful electric motors and can accelerate to high speeds Be aware that automatic limit switch halt may not be supported by or activated at the motor control electronics Be aware that failure of the motor controlle
6. 2 Mercury C 600 C 630 Axes per controller up to 19 20r4 20r4 20r4 1 4 3 Host PC interface RS 232 RS 232 Internal Internal RS 232 RS 232 RS 232 RS 4220r RS 422 or PClbus ISA bus busor daisy chain daisy chain IEEE IEEE daisy chain GPIB GPIB Multiple controllers yes yes yes yes yes same yes same yes same on same host PC separate separate separate separate port port port ports ports slots slots Custom configurations possible with networked controllers controlling hundreds of axes Operation of the controller is described in the associated controller User Manual Release 1 1 0 WWW pi ws Page 9 4 4 1 4 2 M 451 Vertical Micro Positioning Stage Technical Data Specifications User Manual MP 55E Notes C 862 C 842 C 844 C 862 C 842 C 844 ActiveDrive integrated PWM servo amplifier 24 V power supply included M 500 PS Models M 451 1PD M 451 1DG M 451 12S Units Notes Travel range 12 5 12 5 12 5 mm Design resolution 0 042 0 0028 0 0084 um A3 Min incremental motion 0 2 0 1 0 2 um A4 Unidirectional repeatability 0 3 0 3 0 3 um Backlash 1 1 1 um Max velocity 3 0 5 0 8 mm s Max normal load 12 12 12 kg B1 Encoder resolution 4000 2000 counts rev Motor Resolution 20000 steps rev Leadscrew pitch 0 5 0 5 0 5 mm rev Gear ratio 29 6 1 Wedge ratio 3 1 3 1 3 1 Nominal motor power 30 3 e W
7. A 3 watt DC motor with zero backlash gearhead and shaft mounted 2048 counts rev optical encoder is used The system provides 3 nm encoder resolution and lt 100 nm minimum incremental motion gt ActiveDrive DC motor A high efficiency PWM servo amplifier is mounted side by side with the motor see PWM Amplifiers for details for maximum dynamic performance This design eliminates power losses and PWM amplifier noise radiation The motor is equipped with a shaft mounted optical encoder gt 2 phase stepper motor A direct drive microstepped 2 phase stepper motor 20 000 counts rev is used It provides 0 2 um minimum incremental motion and ultra smooth vibration free positioning Order Numbers M 451 1DG Vertical Positioning Stage 12 5 mm DC Motor Gearhead M 451 1PD Vertical Positioning Stage 12 5 mm ActiveDrive DC Motor M 451 12S Vertical Positioning Stage 12 5 mm 2 phase Stepper Motor Fig 1 M 451 1PD ActiveDrive version Release 1 1 0 www pi ws Page 4 1 2 1 3 1 3 1 1 3 2 M 451 Vertical Micro Positioning Stage User Manual MP 55E Application Examples The M 451 is designed to work together with a variety of Pl piezo NanoPositioning stages such as the P 500 series and P 560 MARS series see Figure below These piezo driven positioning and scanning stages provide sub nanometer resolution and accuracy and very high scanning speeds Fig 2 P 562 3CD MARS XYZ Piezo NanoPositioning amp Scann
8. Technical Documentation PI MP 55E User Manual M 451 Vertical Positioning Stages Release 1 1 0 Product Description and Operating Notes This document is valid for the products M 451 1DG Vertical MicroPositioning Stage 12 5 mm DC Motor Gearhead M 451 1PD Vertical MicroPositioning Stage 12 5 mm ActiveDrive DC Motor M 451 12S Vertical MicroPositioning Stage 12 5 mm Stepper Motor Release 1 1 0 Release Date 2004 06 23 Physik Instrumente PI GmbH amp Co KG 76228 Karlsruhe Germany FAX 49 721 4846 299 EMail info pi ws www pi ws M 451 Vertical Micro Positioning Stage User Manual MP 55E Table of Contents 0 Manufacturer Declarations c cceeeseeeeeeeeeeeeeeeeeeeeeeeeeees 3 0 1 Safety Precaultloris ce ee htec EUER YR ERE aloe De ER xu RR Ins 3 0 2 Declaration of Conformity s eeu os reete tette ed Raetia PE ARMS URE 3 1 INTOdUCION ooo ETE aa CERE E EE RUSSE Rec a 4 1 1 Model SUmMOY re actin tien 4 1 2 Application Examples sssssssssssse me 5 1 3 EISE 5 1 3 1 Limit SWwifChes ocococccnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnonnnnnnnnnnnennnnss 5 1 3 2 Position Reference Signal Sensors sssseeseee 5 1 33 PWM Amplifiers lt td 6 2 Operating M 451 Stages cccccccccccccccccccccccccnccocononononononononons 7 2 1 Operating ENvirONMeNt oooocoocccccncconcnoncnonononononononcnonnnonononnnoncnonnnnnnnos 7 2 2 Mo ntiNng eio iei e
9. ane be sure to align it so that the motor housing see Fig 3 sits above the platform or on its left or right side The motor housing must never sit under the platform Mounting holes for mounting the stage onto a flat plane Motor Housing Fig 3 Motor Housing and Mounting Holes of M 451 elevation stages To mount the stage onto a flat plane proceed as follows 1 Move the stage to its reference position approximately in the middle of the travel range To do this connect the stage to a motor controller see section 0 on p 8 for a summary of suitable controllers see section 3 1 on p 8 and execute the appropriate referencing commands See the User Manual of the controller and any associated software manuals for a detailed description Warning If the platform is not at its reference position mounting screws could enter the case when inserted in the four M6 mounting holes on top of the platform This could cause damage to the stage mechanics 2 Insert the mounting screws into the four mounting holes on top of the platform see Fig 3 tighten and make sure the screw heads do not interfere with stage motion For mounting objects onto the platform use the 27 threaded M4 holes Note that overlength screws could cause permanent damage from screw set 4642 which contains six M6x16 ISO 4762 hex head cap screws comes with the stage Release 1 1 0 www pi ws Page 7 2 3 2 4 M 451 Vertical Micro Positionin
10. e is required M 451 and Motor Controllers M 451 Vertical Translation Stages must be connected to an appropriate motor controller Pl offers DC motor and stepper motor controllers with a wide range of size and performance In general the DC motor versions can be controlled by the C 842 C 843 C 844 C 848 and Mercury C 860 C 862 controllers the stepper motor drives by the C 600 and C 630 stepper motor controllers Note the following restrictions Stepper motor devices must all be connected to networked with other stepper motor devices gt If analog DC motor devices M 451 1DG and PWM devices M 451 1PD are connected to the same C 842 C 844 or C 848 controller a PWM converter box is required part number C 842 AP1 for each M 451 1DG PWM devices and DC motor devices M 451 1DG can be mixed on C 843 controllers Release 1 1 0 WWW pi ws Page 8 M 451 Vertical Micro Positioning Stage User Manual MP 55E Fig 4 DC motor controllers C 848 and C 880 benchtop rackmount background top to bottom C 843 PCI bus and C 842 ISA bus cards and Mercury controllers alone and networked foreground left to right C00 Stepping Motor Controle 0000 anno VELO je Dada as po Fig 5 Stepper motor controllers 3 axis Apollo foreground and 4 axis C 600 background both internetworkable Controller Summary Drive type DC Motor Stepper Motor Controller C 880 C 848 C 843 C 84
11. g Stage User Manual MP 55E Move the stage To position an M 451 stage proceed as follows 1 Setup the motor controller following the instructions in the controller manual Connect a host computer to the controller for computer controlled operation and install the host software in the host computer This procedure is described in the controller manual or in the associated software manuals 2 Connect the stage to the controller using the connecting cable C 815 38 that comes with the stage With multi axis controllers be sure to note the axis designation of the connection selected 3 M 451 1PD ActiveDrive PWM versions only Connect the stage to the power supply part number M 500 PS which comes with the stage Then connect the power supply to the local power 100 240 V 47 63 Hz The power supply adjusts automatically to the supply voltage it sees 4 Configure the controller for the connected stage using the host software See the appropriate software manual for details 5 Command a few test moves to make sure everything is working properly See the appropriate software manual for details Note Individual setting of motion control parameters P I D terms velocity acceleration is required for smooth and optimized movement Incorrect parameter setting may cause severe spindle vibration If this occurs set the motor off and modify the parameter settings Maintenance When operated in a clean environment no maintenanc
12. ing system 200 um x 200 um x 200 um mounted on an M 451 1PD elevation stage Features 3 Nanometer Design Resolution 100 nm Minimum Incremental Motion 12 5 mm 1 2 Travel Range 12 kg Load Capacity ActiveDrive Motor see PWM Amplifiers section for details available Compatible with Leading Industrial Motion Controllers VV VV ON ON V Non Contact Reference and Limit Switches see Limit Switches and Position Reference Signal Sensors sections for details gt Mounting Platform for P 500 and MARS Piezo NanoPositioning Systems Self Locking with M 451 1DG Limit Switches M 451 stages are protected against running into a hard stop by magnetic limit sensors Hall effect sensors with TTL drivers at each end of travel The limit sensor signals work with the controller s limit sense input lines The TTL output signal is active high with DC motor versions and active low with stepper motor versions For sensor specifications see p 10 Position Reference Signal Sensors The DC motor versions are equipped with position reference sensors Hall effect sensors with TTL drivers located approximately in the middle of the operating range they can be used to reference the absolute position of the stage within 0 5 um accuracy Always approach the reference sensor from the same side to reach the same position The difference in the reference points when approached from the positive side and from the negative side is about 0 2 m
13. m to 0 4 mm The reference sensor in M 451 stages provides a static signal level which depends on the platform position If the platform is on the positive side the reference signal Release 1 1 0 WWW pi ws Page 5 1 3 3 M 451 Vertical Micro Positioning Stage User Manual MP 55E is 5 V while if the platform is on the negative side the signal level is O V For sensor specifications see p 10 PWM Amplifiers The M 451 1PD stages with the ActiveDrive direct DC motor drive have the revolving leadscrew connected directly to the 30 watt DC motor by a flexible coupling For maximum dynamic performance the DC servo motors are driven by high efficiency PWM power amplifiers integrated into the stages An external line power power supply order number M 500 PS is provided to supply the built in amplifiers directly This architecture allows high torques and high velocities while loading the motor controller with control signals only The actual power is provided by the external supply Release 1 1 0 WWW pi ws Page 6 2 1 2 2 M 451 Vertical Micro Positioning Stage User Manual MP 55E Operating M 451 Stages Operating Environment M 451 stages should be operated in clean environments The aluminum case is not hermetically sealed Make sure that metal dust and liquid spray do not enter the case Mounting M 451 stages can be mounted in almost any orientation horizontally or vertically If you mount the stage on a vertical pl
14. r may drive the stage into a hard stop at high speeds When the stage is first connected to the motor controller be aware that the stage could start an undesired move Never put your finger anywhere where the moving platform or any connected object could possibly trap it Declaration of Conformity The manufacturer Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany declares that the M 451 Vertical Stages comply with the ISO IEC Guideline 22 and EN 45014 European Standards CE markings have been affixed to the device accordingly Release 1 1 0 www pi ws Page 3 M 451 Vertical Micro Positioning Stage User Manual MP 55E 1 Introduction The M 451 is ideal for high precision high load vertical positioning tasks M 451 vertical stages feature a precision machined base of high density stress relieved aluminum for exceptional stability and minimum weight Precision cross roller guided wedges and low friction leadscrews provide maintenance free positioning Unidirectional repeatability of 0 3 um is ensured with high precision rotary encoders DC motor versions or 2 phase microstepping stepper motors All versions are equipped with high precision non contact Hall effect limit switches and the DC motor versions with a direction sensing reference sensor 1 1 Model Survey Depending on the application integrated drives using the following motor types are offered gt DC motor gearhead combination
Download Pdf Manuals
Related Search