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EasyView & e-Vision Manual

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1. MKS Instruments Spectra Products 57 e Vision amp EasyView SP104018 102 June 2006 Process Eye Barchart With Trend Interactive Becpe EAR yew We Dep OF xX 428 H RadapRn Gi L Cl Td waa amen Er No name COM1 LM75 00501010 gt LA Bachs Aceumacy5 is 3 iie D I mb F 2964e004mby te i e edd di to a 34 Barchart With Trend lnteractive 2 As Trend 0 34 Barchart With Tread Interactive 1 As Barchart Pesk Jump Interactve Select a category then click a button to see ts descaption Drag the button to ary toolbar Desesiption Use Reape Wizard to create o eh a recpet 10 15 2 25 W 3 4 45 50 al Category Aek EventText UserText StartTime En Time E Wizard Message Connected to No rame COME LM75 00501010 1607 2002 11 38 47 No Time Specified W awaya Show latest Alarm s Acknowledge All Record 1 of 1 Barchart With Trend Interactive You can then drag one of the buttons in this case the Create New Recipe button onto the toolbar You can add as many buttons are you like from different toolbars To save this new Toolbar click lt OK gt This new Toolbar can then be positioned next to the other toolbars OES 04 mbar dl solk d ith Trend Interactive 1 As Barchart Se 58 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Adding Annotations Time stamped annotations can be added to a trend in two ways The first is to cli
2. Shared Folders 2 Local Users and Groups J users CI Groups Performance Logs and Alerts A Device Manager Storage Removable Storage Disk Defragmenter Disk Management Ee Services and Applications BR Services and Applications User name Full name Description Password User must change password at nest logon User cannot change password Password never expires Account is disabled It is recommended that you use the name RGA User to easily identify the account You can enter a full name description and password if you wish Check the User cannot change password and Password never expires boxes as shown 16 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Click on the lt Create gt button and then click the lt Close gt button to return to the Computer Management dialog 8 Computer Management m Fie Action view Window Help am x 2 Names Full Name K gi Administrator E Guest g HelpAssistant Laso EI Computer Management Local i System Tools Event viewer Shared Folders 2 Local Users and Groups Users Groups g Performance Logs and Alerts Set Password Z Device Manager All Tasks gt SI Storage Removable Storage Disk Defragmenter Disk Management Ta Services and Applications Delete Rename lt Opens property sheet for the current selection Remote Desktop Help Assi aft Corporat
3. This information can help in fault diagnosis if your RGA is not performing as expected MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 87 In order to test the multiplier power supplies the filament needs to be switched on If you run diagnostics without switching the filament on the following dialog appears Switch on filaments The filament is off at present which means that the SEM Supply diagnostics cannot be performed If you are sure that the analyzer pressure is lower then the maximum operating pressure then it s safe to turn the filaments on Do you want to turn the filaments on Click lt Cancel gt to exit without running diagnostics Click lt No gt to run diagnostics with the filament off in which case the multiplier voltage will not be tested Click lt Yes gt to switch the filament on and then run diagnostics 88 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 10 EasyView Tuning Periodic checks on the tuning accuracy of the instrument should be performed as part of your systems maintenance Depending on the accuracy of the results you wish to obtain this period may be between 1 or 12 month intervals TUNING Note The tuning parameters can only be changed whilst in the analog mode In all other modes the tuning information can only be viewed e CasyView LM76 00099001 Abw Head LM76 00399001 A uk l b Gel GY a
4. 8 Scan Navigation Toolbar E MA Ab WW These seven buttons control the viewing of live and stored data E When the Historic Data button is not depressed the active continuous mass scan view is displaying the live data currently being acquired While the button is depressed the continuous scan window will display historic data New data is still being acquired in this historic mode you will see the total number of scans figure increasing while the current scan number remains the same The six navigation buttons will only become available when historic data is being viewed e g The Live Data button is not depressed pg Click on the First Scan button to view the oldest scan stored in memory q Click on the Jump Back button to view the scan 10 scans previous to the current one being view a he Previous Scan button allows you to view the last scan The Next Scan button allows you to view the next scan b Click on the Jump Forward button to view the scan 10 scans subsequent to the current one being view py Click on the Last Scan button to view the newest scan acquired in the current recipe run 54 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 9 Chart Display Toolbar Ea E e LE he La These nine buttons that make up the Chart Display Toolbar control certain aspects of the active recipe windows io E F D JI B 41 oi Click on the Properties
5. Click Apply to apply the new calibration or Cancel to ignore the result Details of the previous and current calibration will be displayed click lt Apply gt to apply the current calibration C EasyView LIM176 01100013 RGA lul LK be id 41 gt Multiplier i A Calibrate M Multiplier 1 v against the Faraday detector using mass ui 40 BE and a multiplier gain of Tu 100 Iw Apply the resulting calibration to both filaments Star Last calibrated by EasyView 28 10 2003 13 59 24 Current source sensitivity 6 68e 002 4 mbar EasyView LH76 01100013 The date and sensitivity of the current calibration will be displayed at the bottom of the EasyView window lt MESSAGE Time 2003 10 28 13 52 58 Value Calibrating RGA Source EasyView Faraday detector gt lt MESSAGE Time 2003 10 28 13 52 58 Value Parameters mass 28 pkht 1 00e 007 gt lt MESSAGE Time 2003 10 28 13 52 58 Value Existing sensitivity 2 18e 004 4 mbar gt lt MESSAGE Time 2003 10 28 13 53 05 Value Filaments have been on for 2 8 minutes gt lt MESSAGE Time 2003 10 28 13 53 08 Value Gain 100 fsp 9 16e 005 mbar RGA Zero is 60 1 ppm of full scale reading gt lt MESSAGE Time 2003 10 28 13 53 10 Value Reading 2 91e 007 mbar gt lt MESSAGE Time 2003 10 28 13 53 10 Value Peak center calibration 6 23e 004 4 mbar gt lt MESSAGE Time 2003 10 28 13 53 29 Value Peak maximum calibrat
6. Ge Zaro Line IS LINES l e AP TLabel Font Ere Late Lei Linke T TF r I D Trend Key Font mot shown 82 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 8 Other Menus View Pull Down Menu Toolbars Status Bar Properties This menu can be used to set up the appearance of EasyView Toolbars Selecting Toolbars from the menu will bring up the Toolbars edit dialog Toolbars Toolbars Menu bar wilielault wi Scan Navigation wi Chart Display Customize wi Trend Display wl indow Arrangement Reset wilrterachve Scan mea W Show Tooltips w Cool Look Status Bar The Status Bar appears at the bottom of the screen ua ecu nba To make the Status Bar visible invisible click on the Status Bar item in the pull down menu If a check is visible then the Status Bar will be visible MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Properties The Properties item will only be active if a mode is running with a view loaded Click on the properties button to bring up the view properties of the active view If the view is a trend you will get the trend properties dialog If the view is a swept measurement view then you will get the swept measurement view properties dialog Window pull down menu The Window pull down menu is where you can add a new trend view or arrange the view windows you
7. The Toolbars appear as one row of buttons below the menu bar and immediately above the recipe list and views windows The twenty five buttons consist of four separate toolbars Each of the toolbars may be hidden by selecting lt View Toolbars gt from the menu bar and un checking those you wish to hide The default setting is visible for all four toolbars 7 Default Toolbar fF io The first seven buttons make up the Default Toolbar The Close recipe button is use to halt a recipe that is currently running The Close Recipe button will not be available unless a recipe is running and the Status window has focus click in the status window to give it focus Also the recipe needs to have been configured to include the ability to end the recipe prematurely E The Run Recall button will run the recall program to allow review of stored data The Run Software Setup button will launch the software setup wizard to allow changes to the installation The Print button will print the data from the active data window h P The Add Annotation button can be used to add annotation to a trend at a particular time The add annotation at selected time button is used to mark a place on a trend s Click on the Help button to open the EasyView help file Use EasyView Help just as you would any other Windows help document MKS Instruments Spectra Products 53 e Vision amp EasyView SP104018 102 June 2006
8. Your Product ID is mksrga4 00 0007 easyview 33322 If you need to contact MKS about your installation please quote this Product ID On the latest versions of Windows this information is displayed in Support Information when you navigate from Control Panel Add Remove Programs MKS RGA Software It is also shown in Help About in the main components of the EasyView suite MKS Spectra Products The Support Information dialog provides details of your software version numbers and instructions on how to re obtain these version numbers after installation Note the version number will be required if support is requested ai EasyView Setup LG J EasyView has been successfully installed Lick the Fresh button to ewt the mstallabon Once the program is installed you should work through Section 3 2 Creating User Accounts MKS Instruments Spectra Products 13 e Vision amp EasyView SP104018 102 June 2006 3 2 Creating User Accounts Overview The following section describes how to create a new user and assign user rights using the WindowsXP environment as a guide This is not common for all Windows operating systems advice from your IT representative or MKS Spectra should be sought if you are unsure of how to continue or if the PC is part of your company network You will need to create a RGA User account with Power User rights 14 MKS Instruments Spectra Products e Vision
9. Acquisition Comrod L dl u soff A 3 Acowacyh 160 LeU mbar e F 1 333e 004 mbar e i Low Mass Alignment 327h7 D ni Emission 0 SmA r al y gt dy High Mass Alignment 32767 ai S KI Clectron Cnergy 0 100eV 70 00 al E D o Low Mass Resolution 2276 4 a 2 Ton Energy 0 Lei 55 Ki T D eroian 32767 4 b Evtract QI 112 0 Ki D High Mass ki l d v There are two main areas concerning the tuning of the instrument the mass alignment and resolution controls and the ion source parameters Mass alignment The mass alignment controls adjust the position of the peaks in relation to the mass scale There are two controls for the alignment The low mass control affects all masses by the same amount Moving to slider to the right causes the peaks to move to the right and causes the alignment value to increase Moving the slider to the left causes the peaks to move to the left and the alignment number to decrease The high mass control affects high masses more than the low masses for example moving mass 10 by 0 1 amu using the high mass control causes mass 100 to move by 1 amu Mass resolution The resolution controls adjust the peak width As you increase the resolution the peak will get narrower but will also become smaller Reducing the resolution will make the peaks bigger but can lead to interference between adjacent peaks The factory settings for standard instruments have the resolution set so the peak
10. EasyView LM7 601603006 Barchart 0 J EasyView LM76 01603006 Trend EasyView Barchart Mode T T E T T 0 20 25 30 40 00 48 00 00 50 00 00 52 00 00 54 00 00 56 00 Scan 20 trom 01 to 1016 1 16 2004 13 48 42 Elapsed Time 18 ME be var 1 E Come etfs of E Peak Carter AccuacyS vo 1 Mett bs F 1 iefttsba ke g D Instrement Vetus Stew bardor J Active Filament Sensor Identification Standard Opan Sauce Flamesi Status on Detector Type Fest Channel Mate Total Prossur Kal TT statniplier Status BI Maimu Macs 200 AM 1 J e Configuration Sent Hari Control en Us e TA E hen A Easier L76 01600006 Ready Prosare in mbar Selecting Individual View The bottom section of the pull down list contains a list of the currently open views The currently active view is highlighted by tick next to it To make a different view active click on that view 86 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 9 EasyView Diagnostics To run the diagnostics mode click on the diagnostics button The diagnostics mode is only available when no scan mode has been selected Running diagnostics produces the following report Instrument Diagnostic Information 15 10 2003 11 41 40 LMi76 00399001 ZS Ae mks Serial Number Technology for Productivity Instrument Info Sensor Identification Standard Open Source User Defined Name Process Eye Version 4 00000420 Detector Type
11. The Key Mode button changes the key table view between vertical and horizontal views Customizing Toolbars You can customize the toolbars as required you can choose which Toolbars are visible or you can create your own toolbars with your own choice of buttons From the view pull down menu select lt Toolbars gt ee LasyView EasyView LM 6 0 Recipe View Window Help Toolbars s Status Bar RS Properties Je This will bring up the toolbar dialog Check the box for the toolbars you wish to have displayed Checking the lt Cool Look gt check box will change the appearance of the toolbars Toolbars Toolbars W Show Tooltips i Cool Look m To create a new toolbar click on the lt New gt button 56 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Hew Toolbar Toolbar name test Cancel Give the new Toolbar a name and click lt OK gt This will create a blank Toolbar that you can then customize From the toolbar dialog box click on the lt Customize gt button to bring up the customize dialog Customize Toolbars Commands Toolbars mMenu bar Iw Show Tooltips New Default jw Cool Look Scan Navigation Reset Chart Display Trend Display Window Arrangement Interactive Scan test Rn i in i in Cancel Click on the lt Command gt tab to see the buttons currently assigned to the new Toolbar you have created
12. using the Faraday detector to have a value of 4e 007 mbar Steri 5 Last calibrated by EasyView Never Current source sensitivity 1 50e 004 4 mbar EasyView LM76 01100013 Click on the lt Faraday gt tab to enter the Faraday calibration setup page Choose a mass that you know the actual partial pressure of to calibrate on and enter the partial pressure of that mass To start the calibration click on lt Start gt The date of the last calibration using these settings is displayed at the bottom of the window Calibration can only be performed if the instrument is not in one of the scanning modes The calibration routine will then measure the zero the peak maximum value and the peak centre value of the mass chosen and then perform a stability check of 10 scans LG Calibration Wizard Starting Faraday calibration using Easy iew source settings RGA Zero is 60 1 ppm of Full scale reading Peak center calibration 6 23e 004 4 mbar Peak maximum calibration 6 55e 004 Ambar Status Running stability check 3 of 103 92 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Click lt Next gt to view the results of the calibration CG Calibration Wizard Calibration result Calibration succeeded The stability test result was excellent 4 typical sensitivity For the current conditions is 1 506 004 Ambar The current sensitivity is 2 18e 004 Almbar The new calibration is 6 55e 004 Amb
13. width at 5 10 for HPQ2 units of the max peak height is 1 amu See the following diagram MKS Instruments Spectra Products 89 e Vision amp EasyView SP104018 102 June 2006 This peak is aligned at mass X Peak Height The resolution is set to 1 amu at 5 of max peak height 100 Jamu All instruments have the mass alignment and resolution set before leaving the factory A copy of the tuning numbers QDAC values will always be included with the documentation Only small changes to the alignment and resolution should ever be necessary to account for small changes in temperature between the factory and place of operation If major changes are made to the settings so that peaks are no longer visible please re enter the factory defaults to try and recover the peaks 90 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 11 EasyView Calibration Mass spectrometers measure an ion current and not an actual pressure In order to convert this ion current to a pressure we need to calculate a calibration factor In calibration mode the user supplies the actual partial pressure of a given gas and EasyView calculates the calibration factor required to convert the measured ion current to this pressure MKS Instruments Spectra Products 91 e Vision amp EasyView SP104018 102 June 2006 To view the calibration page click on the calibration button Calibrate masg vo 28
14. 5 e Depending on the instrument configuration Faraday only or Faraday and Multiplier detectors are available 7 Gain Select zy 9 02BE 9 YF X100 or x20k electronic gain ranges are available Start Mass The start mass of the measurement or when in Leak Detect SE HR E ze mode the probe mass 114 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Mass Span AR d F SEU ER The first mass plus the mass span cannot exceed the maximum mass allowed by the control unit Pressure Unit Select Select from the list of available pressure units d Tone On Off Generates an audio tone in Leak Detect mode Not available with some sensor packages If a more detailed explanation of any of the tool bar buttons is required these can be found in the corresponding sections of the main EasyView manual MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 115 Page Tabs Device Instrument information such as friendly name IP address and internal software versions are displayed 116 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Plot 1 00000 empting to Connect to server 10 10 54 216 Server is Connect empting to select LM98 00104016 ontrol Established This is the measurement page where most of your time will be spent From here you can access any of the measurement modes filament control and diagnostics de
15. 87e 008 Argon 4 67e 007 Carbon dioxide 5 71e 007 Photoresist 64 S6e 008 ss 32 00 ss 36 00 Ze 40 00 E 44 00 K 64 00 00 05 00 00 00 00 Elapsed Time This type of view is more flexible as any user variables can be plotted 62 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 1 Swept Measurement Properties Settings The following section outlines the various changes that can be made to views using the Properties for Continuous Mass Scan View dialog We will look at each function in turn Properties for Continuous Mass Scan View Axis C Use the data acquisition properties to set the X axis properties e Use the following First Mass 1 Last Mass 50 Annotations Mass cursor Show elapsed time in addition to scan number jw Minor ticks F Show real time in addition to scan number Initial Y Axis Properties C Use the data acquisition properties to set the Y axis scale D e Use the following explicit settings Current maximum value is 1 3e 004 Max value 0 000133 Min value 1 33e 008 jw Log scale Restrict these values to the maximum bounds of the acquired data Grid jw Minor ticks Subsequent Y Axis 4utoranging Strategy If the bounds of the data subsequently change during the lifetime of this view C Leave the Y axis unchanged Force the Y axis scale within the new recommended bounds C Expand the Y axis scale to include the new recommended bounds coc
16. Creating User e TE 14 OVETVICW eenn a a a a a 14 3 3 Creating the RGA User Account sssssssssssssrenensnsrrsrnnrnsnerennnnrnrnerrenne 15 Be The Set up WWIZAIG EE 20 ENEE ebe 20 see Di e WEEN 21 EasyView Setup Wizard dalog NEEN 22 Hardware Setup dial g EE 23 Pressure UNIES dialog DEEN 24 Disk Storage Location dialog ENNEN 24 LOG File Details dialog DEE 25 5 Adding your Instruments vasesenesesesnsenenennnenenencnsenenenenenenenananananenenananans 27 5 1 Recommended installation method If 192 168 0 250 is not in use 28 5 2 Recommended installation method If 192 168 0 250 is already in use 29 5 3 Device Manager se ed hee 30 THTONIMAON lu 30 EE 30 TP GONMGULAUOM dalog Saririman ese emids Gelopne tae enc e i 32 Device Manage Controls EEN 33 BAECS EEN 35 6 USING EASY TEE 37 EE ee EE 37 6 1 Starting BASVVIlGW e eae ols pede soo NE T E 38 6 2 EEN 39 E ER e et Geo EE 41 6 4 Barenart le E 43 Gy Nea CHECK leede 45 616 Peak JUMO MOJE vases tates ee 47 OA DISK le 50 6 8 The Main EasyView sScreen s sssssssssssesrnnnnssenrnnnnrnrnenrrnsnerenrnrennnenrenne 52 LTG Ba EE 52 2 Menti e 52 AER geing el E ICONS E 52 4 Views WINdOWS EE 52 5 EasyView Control WiNdOW ENEE 53 MKS Instruments Spectra Products 3 e Vision amp EasyView SP104018 102 June 2006 O Keiser 53 Z BIEL ge ell EE EE SE 8 Scan Navigation Wal e TE 54 9 Chart DISDlay ag Keele TEE 55 10 Frend Display TOONS casi listen versie
17. Faraday Channel Plate External Hardware None RF Configuration Smart Head Maximum Mass 200 AMU Control Unit Use Standard RGA Embedded Software Yersion V3 70 New Head LM76 00399001 Emission m Electron Energy eu Ion Energy ev Extract Y Faraday Ajmbar Active Filament 1 Diagnostics Results Diagnostic Min Max Reading Passed 450 Supply 533 80 355 90 409 99 y 15 Supply 16 50 13 50 15 01 g 130 Supply 143 40 116 20 131 80 y 54 Supply 4 75 5 35 496 y 15 Supply 13 50 17 50 14 99 y Clasbvan Camanava nen acon mca Za Source Settings Standard Electron Energy 1 00 70 00 Low Electron Energy 1 00 40 00 User defined 1 1 00 70 00 User defined 2 1 00 70 00 User defined 3 1 00 70 00 EasyVview 1 00 70 00 Mass Alignment Resolution Settings 5 50 5 50 5 50 5 50 5 50 5 50 112 00 112 00 112 00 112 00 112 00 112 00 1 50e 004 1 50e 004 1 50e 004 1 50e 004 1 50e 004 1 50e 004 Low Mass Alignment Low Mass Resolution High Mass Alignment High Mass Resolution Standard Electron Energy 32767 Low Electron Energy 32767 User defined 1 32767 User defined 2 32767 User defined 3 32767 EasyVview 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 32767 a The report contains information about the control unit configuration ion source settings and mass alignment resolution settings as well as power supply levels
18. One way is to select one of the pre defined channels in the selection table Mass Hame dy Atomic hydrogen d Hydrogen m 4 Helium 12 Carbon 14 Nitrogen 2 KR 14 CH group 14 Atomic nitrogen 15 CH3 group 15 Methane 16 Methane des AA hari oir K Clicking on one of the lines will set the mass value and channel name Alternatively you can type in the value of the mass you wish to display in the Value text box Walue 2 Then type the name that you wish to appear on the trend key in the Channel name or alias text box Channel Name or Alias H ydroger If you leave this box blank the channel name will be displayed as Mass where is the value entered in the Value text box The measurement name is the name of the measurement that you want to use to provide the partial pressure data If the box is left blank the measurement selection will be Auto Optionally enter a measurement name or leave blank for auto selection when this view i used This does not mean that the best data will be selected only that the software will look for a mass with the value entered for each measurement in the measurement list The first measurement that contains this mass value will be the one that is used For example You have two Bar chart measurements Bar chart 1 that is a mass 1 to 50 Faraday measurement and Bar chart 2 which is a mass 1 to 100 multiplier measurement 68 MKS Inst
19. Preferences The Preferences menu can be accessed from the lt recipe gt pull down menu ewe LasyView EasyYiew LM 6 01603006 Recipe View Window Help Connections Pascal Preferences l w mbar Print Torr Print Setup mTorr Exit Auko view to Front Allos Demo Test Data 110 Ww Show recipe error message boxes Graph Settings re Units of Pressure EasyView supports the following pressure units Pascal mBar Torr and mTorr The internal units used by EasyView are Pascal and all internal pressure values are stored in these units This enables EasyView and Recall to use different units to display pressures depending on the preference set in the particular program Pascal is simply converted to the required unit before displaying the information Pascal w mbar Torr mTorr A tick in the selection indicates the currently used pressure unit All pressure axis will be labelled with the selected unit 98 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Auto View to front When EasyView is running a measurement the view for that measurement is displayed in the Views Window When more than one recipe is running however not all views are displayed With the lt auto view to front gt the view for the currently selected instrument is visible asi feu LHTi D1G0G006 Done To select a recipe click on its tab in the EasyView contr
20. Windows Control Panel and select the NETWORK CONNECTIONS icon Choose the network connection you are using for the link with the instrument right click and choose PROPERTIES A New LAN Properties General Authentication Advanced Connect using Bai D Link DFE S30T PCI Fast Ethernet Configure This connection uses the following tems t Client for Microsoft Networks JS File and Printer Sharing for Microsoft Networks al os Packet Scheduler Internet Protocal TT CDA Install Uninstall Description Allows your computer to access resources on a Microsoft network Show icon in notification area when connected Notify me when this connection has limited or no connectivity Check the options shown above Your network connection status is now displayed in the task bar near the clock Mouse over the icon to check the status of the connection MKS Instruments Spectra Products 125 e Vision amp EasyView SP104018 102 June 2006 Check the IP Address of the Host Computer Open Windows Control Panel and select the NETWORK CONNECTIONS icon Choose the network connection you are using for the link with the instrument right click and choose PROPERTIES Highlight the INTERNET PROTOCOL TCP IP entry from the list and click on the PROPERTIES button The following displays a computer configured for automatic IP addressing DHCP If you are not part of a DNCP network or intend to directly connect to the i
21. a horizontal grid aligned with the ticks of the Y axis Minor Ticks Displays minor ticks on the Y axis Subsequent Y Axis Auto Ranging Strategy If a view s Y axis limits are based on an interactive measurement these limits can be changed during the lifetime of the view Three options determine how the axis will react to changes in the measurement such as electronic gain range or detector changes for example Leave the Y Axis unchanged The Y Axis settings remain unchanged when the measurement changes The settings will be based on the measurement when the view is loaded Force the Y Axis scale within the new recommended bounds Changes the Y Axis settings to match the new measurement settings Expand the Y Axis scale to include the new recommended bounds Change either the maximum or the minimum Y axis settings to incorporate the new settings For example If you increase the electronic gain the minimum displayed pressure would be changed to match the smaller pressure that could now be measured The maximum pressure displayed would remain the same If the electronic gain was then reset to its previous value the Y Axis would not change Once the changes to the view settings are complete the view can be saved Click on the lt Next gt button to bring up the Save View dialog box MKS Instruments Spectra Products 65 e Vision amp EasyView SP104018 102 June 2006 2 Trend View Properties Settings Trend views A
22. amp EasyView SP104018 102 June 2006 3 3 Creating the RGA User Account Click on the lt Start gt button right click on My Computer and select Manage from the menu E LABO17 gt Internet S amp S secher ZE L My Documents Sa E mail A My Recent Documents gt Express Vi My Pictures Q Windows Movie Maker Ee My Music wi MSN Explorer BE my coy Open Explore e My Nel Fax Software Video Camera search p Control Windows Media Player Mop Network Drive Va Printers Disconnect Network I Cal Tour Windows XP Shows on Desktop Uklo an Rename Recall E All Programs gt ZC Run A Log Off fo Turn Off Computer E Computer Management File Action View Window Help SR Gg Computer Management Local Qh System Tools Bi System Tools Sol Event Viewer Sa Stor age KR shared Folders Ba Services and Applications Local Users and Groups z Performance Logs and Alerts Device Manager E a Storage Removable Storage Disk Defragmenter Disk Management Ee Services and Applications In the Computer Management dialog click on the Local Users and Groups entry to expand the list and show the Users and Groups folders MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Computer Management m Fie Action view Window Help E 2 mj Computer Management Local H System Tools gj Event Viewer
23. and Multiplier 3 Multiplier 1 2 and 3 refer to the same physical detector but using three separate calibration values d Audio control Not support on certain sensor configurations Switches the audio tone on or off The tone changes in frequency as the measured peak height changes This is a useful feature if you are unable to see your monitor while leak checking 46 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 6 6 Peak Jump Mode bi we EasyView EasyView LM76 0060001 3 Recipe Yiew Window Help Dh p S DN S OL Ee IE a a J EasyView LM76 0060001 3 Trend ke b s 10 Moss 20 5 32 ver ay 00 21 49 p 8 4 62 000 fi2oe 000 f448e 009 Is zong 00 03 30 00 04 00 00 04 30 00 05 00 00 05 30 00 06 00 00 06 30 00 07 00 00 07 30 00 00 00 Elapsed lime 41 gt A duh LES hex Dad A Deg fchion Cone CG Peak Center e AccuracyS e The Peak Jump view is loaded and the interactive Peak Jump control toolbar appears in the status window Acquisition Control i Peak Center e Accuracy5 e Use this toolbar to change the scan parameters each of the functions are explained below CG Peak Center e Scan Mode control The scan mode is the method used to report the peak height The options are Peak Centre Peak Max or Peak Average Accuracy e Accuracy control Scan accuracy determines the sampling amount carried out on each reading A high accuracy number provides a cle
24. and the multiplier gain required The multiplier will be calibrated at the mass chosen so that the pressure reported in faraday and multiplier at this mass will be the same Click lt Start gt to begin the calibration CG Calibration Wizard Starting Faraday calibration using Easy iew source settings Starting multiplier calibration Required peak height is 1 626 009mbar using 4 detector gain of 100 Peak height is 1 63e 009 mbar at 699 Status Running stability check 3 of 10 Cancel The calibration will do a zero measure the peak height in faraday adjust the multiplier voltage so the peak height in multiplier with the gain specified matches and then check the stability MKS Instruments Spectra Products 95 e Vision amp EasyView SP104018 102 June 2006 CG Calibration Wizard Starting Faraday calibration using Easy iew source settings Starting multiplier calibration Required peak height is 1 626 009mbar using a detector gain of 100 Peak height is 1 63e 009 mbar at 6994 Status Completed Click Next to review the results Cancel When the calibration finishes click lt Next gt 96 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 CG Calibration Wizard Calibration result Calibration succeeded The stability test result was excellent The current sensitivity is 2 23e6 002 Ambar at 695 Volts The new calibration is 6 68e 002 Ambar at 699 volts
25. button to display the settings for the currently active recipe view Click on the Grid button to display a Y axis grid in the currently active view window Default is disabled Click on the Log Lin button to switch between a linear and logarithmic Y axis Default is linear Click on the Y axis Minor Ticks button to enable the display of minor ticks on the Y axis Default is major ticks Click on the Time button to switch between real and elapsed time on the X axis from the start of the recipe Default is elapsed time Click on the Days button to display the date and time on the X axis Default is time only Click on the X axis Minor Ticks button to enable the display of minor ticks on the X axis Default is major ticks Click on the Add Scroll Bar button to add a scroll bar to the X axis Default is no scroll bar Click the Add Cursor button to add a measurement cursor to the active Bar chart display The cursor can be moved to the required mass and will display the mass number and partial pressure AS many cursors as are required can be added MKS Instruments Spectra Products 55 e Vision amp EasyView SP104018 102 June 2006 10 Trend Display Toolbar ei F Si These two buttons constitute the Trend Display Toolbar The Key Display button controls the display of the key table for the active trend views The button will not be available if no trend view is available i
26. details on installing EasyView 8 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 3 Installation Overview Before you start to install EasyView make sure you have fitted and configured any network cards you may require If you are using Windows NT 2000 or XP you must log on as an Administrator to install EasyView You will only require Power User privileges to run EasyView This manual describes each stage of installation in turn and each section should be completed fully before moving onto the next MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 3 1 Installing EasyView SSES Insert the software installation disk into the CD drive of the PC The EasyView Set up Program will start automatically if not browse to the root directory of the CD and run the Setup Exe file EasyView Set up dialog There are two choices that can be made from the Set up dialog Install software now installs the main EasyView program Install network RGA runs the Device Manager program from the CD It is useful for configuring instruments without the need to install the main EasyView program Do not choose this option now instead choose the install software option and continue to work through the sections of this manual 10 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Enter a Full Name and Organization
27. e Imba F Rea E 2 Inctrument States Zwee haan J Active Filament 1 Sensor Ideart siian Seid Open Sarea Fasmer Stanes Ce Detector Type Fair Chiral Das Total Drermge NA Done Pressure N mbar MKS Instruments Spectra Products 85 e Vision amp EasyView SP104018 102 June 2006 Tile Recipe Horizontally Selecting tile recipe horizontally will bring the views for the current active measurements to the front and tile them horizontally EasyView EasyView LM76 01 603006 agit Becpe yew pindo peip x Ok SLEE Enua h g ELLE aa 7 EasyV iew LM76 01603006 Barchart EasyView Barchart Mode H 10 12 14 16 18 20 2 N 23 8 DW RBM V BW An 4 u G A8 ap Scan 20 froen 501 to 1014 1 15 2004 13 48 42 EasyView Trend View 004900 005000 00 51 00 00 5200 00 54 00 D I Elapsed Time 004800 005300 55 00 005600 005700 Uda uk GE be ed A ml G Peak Cortes AccuscyS ve IIH nds es F 1L tii inbs e Es i Sensor Identilin ation Standard Open Seurve on Detevior Type Faraday Channel Mate Total Pressure HE of Masimem Mar Dm Ae Serart Hast Comtret Unit Use Nien S tosegeg Di Min A EavyView NIR Maddii Ready Prosare N aiu Tile Recipe Vertically Selecting tile recipe vertically brings the views for the currently active measurements to the front and tiles them vertically LasyView LasyView LM76 01603006 Recipe Yew Window Hep x Wb A OEB nuer FULL CATH S
28. if required otherwise leave at the default i MKS RGA Software Setup Quick Setup Enter your User Information and the Setup Key Full Name EasyView User Organization MKS Instruments Spectra Products requirements You will find We kef on your CD or jewel case MKS Spectra Products The Quick Setup Key is supplied with your CD and determines the type of installation For an EasyView installation the CD key is easyview If an invalid key is entered a confirmation dialog appears giving you the option to re enter the key Once a valid key has been entered click the lt Next gt button to continue MKS Instruments Spectra Products 11 e Vision amp EasyView SP104018 102 June 2006 On line dialog iv EasyView Setup Connecting to instruments On line Choose whether the installation is on or off line An on line installation means that you will be able to connect to instruments from this computer and acquire data in real time This installs all the features of EasyView If you choose an offline installation you will for example be able to review data stored from an on line installation on a different computer but you will not be able to acquire data from this computer directly Which setup do you want to install On line installation need to acquire data from RGA instruments in real time Offline installation 1 will not be needing to acquire data with this computer MKS Spectra Pro
29. thickness of the plotted line can be changed to aid visibility Select a rnlnr PR Change Color Colour control The colour of the plotted line can also be changed select a colour then click lt OK gt to apply it to the channel 48 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Update Scan Changes made to the channels properties are not immediately made to the scan When all changes required have been made click lt Update Scan gt The new settings will then be applied to the current scan MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 49 6 7 Disk Store Disk Store is available in any of the EasyView scan modes and can be accessed by clicking the button shown Start disk storage What to store where to store Buffering scans 1 15 10 2003 11 39 46 to 106 15 10 2003 11 41 10 Start Storing e From now onwards E From buffered scan 1 at time 15 1 0 2003 e 11 39 46 _ Finish Storing Ce C fics 21 atime 15 10 2003 z 14 08 Cancel What to store options From now onwards stores each buffered scan to disk until stopped by the user From buffered scan allows start and end scan configuration Note The buffer is reset if any changes to the current scan are made otherwise the last 500 scans are stored in the buffer If disk storage is started at a buffered scan then it is possible to stop disk sto
30. to be upgraded This manual is concerned only with e Vision instruments Only the option shown above should be selected Do not attempt to carry out any upgrade to any existing non e Vision based instruments you may have MKS Instruments Spectra Products 21 e Vision amp EasyView SP104018 102 June 2006 EasyView Setup Wizard dialog Setup Wizard Welcome to EasyView Version 4 0 Development Build Number 700 Product ID mksrqa4 00 0007 easyview 33322 This Setup Wizard will guide you through the final steps of the software installation process Help ts always available by pressing the F1 function key Click the Next button lt Back Cancel Help At any stage during software setup you can click on lt F1 gt to bring up the help dialog These help pages give concise information about the current page of the setup wizard 22 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Hardware Setup dialog Es Setup Wizard Hardware Setup The Wizard can search for P or e Vision contol units or serial instruments op this or other computers Do You want to install new hardware orto change your existing hardware setup Run hardware auto detection now The Wizard will only be able to detect Instruments that are switched on e Skip hardware auto detection The existing hardware setup is corect Run hardware auto detection if you need to change the configura
31. wives vals wun ee gg 56 Bel UE ln Lee el ee 56 7 Changing Adding Views in EASYVICW sasesenenecnencnnsnsesenennenenennsnseseneaens 61 7 1 Swept Measurement Properties Settings NEEN 63 Eeer 63 Initial Y axis Gelee EE 64 7 2 Trend View Properties Settings cccccccscesecseceeeeeeeeeeeeeesseseeseeaeeeeeaeeees 66 AXIS Auto range Properties E 74 8 OCCT Men s wisscaacanriaiansind vet arinnar aA aie ueverdansecabavedsteaes cadcauersare devi aaa 83 View Pull Down ET UR 83 OGM Te 83 Status TE 83 Breil 84 Window pull down Bn ET WEE 84 New Trend WINGOW ssia scicerssvesasacatinoiadiessadnawiacateaneteierecxtansaparaencuresieieaeis 84 Arande All ele Le E 85 BEING RECHE LO Be SE 85 Cascade D ele 85 TNE Recipe Klenge Ee 86 Tile RECIPE Vertically srme nansa naa a A 86 Selecting Individual View ssssssssssnsssusensnsnerrusnrsnsnsrnnnnrensnenrunnnrnnnerenne 86 9 EasyView Dtaeneetlee2xgegeseg esegeagesuseegskdegegee Eege NeN REESEN EENS 87 10 EASY VICW TUNING EE 89 11 EasyView Calibration E 91 KE E e 98 Bue SOF PRESSUPC moreira a N 98 Auto VIEW TO ln EE 99 IER Belle EE 99 Common Gases EE 99 AS PVINGHAG E 100 Pratng a WEE 100 14 FASVVICW TOOIS vicasiccivinsscantenerersienavedarssnssssteduceedecrcenvisiisuneecierssctiait 103 Backup alid RECOV EE 103 Computer LOCK EE 106 EXITING COMPUTE LOCK aian E 108 LS JaVa WED Applet ciscrssisaserdistvisvecsaniiresteuceanisctsssusdetseasveseivatasnzedensvis 110 15 1 Accessing the
32. 0001 SI d the next would be Data000002 SI d and so on for each file While storing to disk the Disk Store toolbar will be visible in the status window mks EasyView LM98 00104252 Ap Mame A ue US be B A File C Docuwnenis and Settings lohn Hickson MAS SPECTRA My Documents Easy View Data Easy View LM98 80 108252 DataZ00d0 470190857 57 0 Allow Changes a Acquisition Control aH BR Notice that the disk store icon is no longer available and the path to the disk store file is displayed Checking the Allow Changes box pauses the disk store and re enables the scan toolbar Zrcke EasyView LM98 00104252 Ap Name LML Ra Allow Changes Y File Paused Uncheck to restart Acquisition Control H 1 w s50 DR A 32 v Accuracy5 e CQ 6 673e 007 mbar E 6 673e 007 mbar v You can then change the scan properties un check the Allow Changes option and continue with the Disk Store without having to run through the Start Disk Storage dialog Note The name of the file will still change MKS Instruments Spectra Products bi e Vision amp EasyView SP104018 102 June 2006 6 8 The Main EasyView screen The main EasyView screen is where most of your time will probably be spent The picture shows the main screen in Analog scan mode we EasyView EasyView LM76 00600013 Recipe eut Window Help Xx ep 7 ove R 9 10 kasy iew LM 6 00600013 Analog EasyView Analog Mode 131 132
33. 133 134 135 136 137 138 139 Scan 9 1 13 7004 11 10 16 asyView LM b UUBUUU13S Gap View RGA A lul Lh bx 44 gt Acquisition Control l 125 ER Kg ER Ax e AccuracyO v zie GOG7e007 mbor F GOG7e007 mba v s i Low Mass Alignment 32767 Ki P D Emission 0 SmA 1 00 Bi il gt High Mass Algament 41279 4 Bj gt Electron Cp 100e 70 00 Bi E gt m Lowe Mass Resolution 35839 EI pi gt Ton Crergy 0 10e V 55 al E H High Mass Resolution zeen EI E gt Cxtract 0 190 izo Ki H gt i di v in AAE rS e LIRE Done Pressure in mbar 1 Title Bar The Title Bar shows the application name EasyView The Close Minimize and Maximize button on the right hand side of the title bar operate in the normal manner 2 Menu Bar EasyView is no different to other Windows programs all the available function are available via the menu bar 3 EasyView Control Icons EasyView can be controlled from these icons use them to select the required mode 4 Views Windows The Views windows are where the data acquired in EasyView is displayed Any number of trend windows many be added to the default views 52 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 5 EasyView Control Window The EasyView control window contains all the controls to run EasyView From here select the scan mode control disk store set the control unit parameters calibrate and run diagnostics 6 Toolbars
34. 168 0250 Fixed Shared Ready New Details Configure e Additional registered connections There are no additional registered connections Details Help F1 Information pane Serial Number the serial number of the instrument Name the friendly name of the instrument Address the IP address of the instrument Type whether the IP address is fixed manually assigned or DHCP assigned by your DHCP server this is not supported Access see Access Levels on page 37 Status the current status of the instrument Controls lt Close gt closes the Device Manager dialog lt New gt specify an instrument by its serial number lt Details gt Auto discovery log displays information on all found sensors Refresh update the list of discovered sensors lt Configure gt Browse to the instrument displays the homepage of the sensor Change IP address change to the IP address and subnet Access the access level of the sensor lt Details gt display a list of past connections that are no longer active These functions are described in more detail beginning on page 33 30 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 When Device Manager is started the program searches for connected instruments and displays information on any found which exist on the same IP scope as the hos
35. BillingtonshMy Documents Proces W 5 Processing file C Documents and SettingasSteve BillingtontMy Documents Proces W 5 Processing file C Documents and SettingsSteve BillingtontMy Documents Proces wW E Unzip complete File processed 22 zi 7 Loading He CADOCUME 155 TEVEB TSLOCALS 15T emp SICU Deg into the Rec zi 7 Loading file C ADOCUME 7145 TEYEB 7T LOCALS 14T empi SILM Reg into the Rec d Process Epe 2000 system Restore for Tool Number Computers4sG1 UserSteve When the restore is complete click the lt Close gt button MKS Instruments Spectra Products 105 e Vision amp EasyView SP104018 102 June 2006 Computer Lock EasyView has the ability to lock the computer to prevent unauthorised use Note If you misplace the account information MKS cannot recover it The first time the utility is run a dialog appears detailing the functions of the lock program click lt Yes gt to continue MKS_PASSWORD IMPORTANT WARNING This is the first time you have used this application The purpose of the application is to lock out unauthorised access to all applications running on this computer Users will be required to enter a Username and Password to use the computer Furthermore the ability to close down the computer will be restricted to Super Lisers re you sure you want to proceed and install this application MKS_PASSWORD Your initial Username is admin and the initial password is blank Y
36. INStruMent csccscceecseceececsncceesncoesarenesareseransuesenegs 111 15 2 Page VIEWS and K e nde EE 114 TNE TOO EEN 114 le Ne E 116 4 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 L Getting Help We are always pleased to provide assistance where we can If you are experiencing difficulties or need help feel free to call your local MKS Instruments facility and ask for the Customer Support Group Please have the following information ready so that our technical staff may help you quickly and effectively The serial numbers of the analyser and e Vision unit The EasyView software version number this is written on the software CD ROM and can also be found when using EasyView by clicking Help About About EasyView E EasyView File Version Product ID mksrga5 00 001 0 easyview 13035 c 1999 2003 MKS Instruments Spectra Products The operating system used On line help is available during the install process and can be accessed by clicking the lt Help gt button on any of the dialog boxes Support Contact Telephone Numbers United Kingdom 44 0 1270 250150 MKS Instruments Spectra Products 5 e Vision amp EasyView SP104018 102 June 2006 Warning The control unit must not be powered up when not connected to the analyser 6 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 1 Introduction EasyVi
37. Instruments Spectra Products 73 e Vision amp EasyView SP104018 102 June 2006 Y Axis General Properties Enabling the grid check box will draw a horizontal grid on the wi Ef trend Enabling the minor ticks check box will display minor ticks If grid is enabled grid lines for the minor ticks are also displayed Eo ene Enter a label for the Y axis in this text box Y axis Title If there is only one trend pane on Percentage of total window the trend this box is set to 100 height for this pane and unavailable If there is more than one trend pane you can set the proportion of the trend window that the particular pane will occupy Percentage of total window a height for this pane 50 Y Axis Auto range Properties C Leave the asis unchanged Force the asis scale within the new recommended bounds Expand the y axis scale to include the new recommended bounds If the view uses an interactive measurement to set the Y Axis limits then those limits can change during the lifetime of the view Changing the electronic gain or type of detector for example You can select one of three options to control how the view will react to a change in the measurement Leave the Y Axis unchanged Leaves the Y Axis settings unchanged when the measurement changes The settings will be based on the measurement settings when the view is loaded Force the Y Axis scale within the new recommended bounds Changes the X Axis settings to match
38. PC e Share this instrument with other users f Attempt to gain exclusive access to this instrument These settings configure the access to this instrument from the main application software packages such as Process Eye and Easy view Cancel Instrument Access i EasyView will auto connect and will D CR not allow access to other users Iw Se Instrument when the application software whether the instrument is in use by Share this instrument with other users its host or not e Attempt to gain exclusive access to this instrument These settings configure the access to this instrument from the main application software packages such as Process Eye and EasyView Cancel MKS Instruments Spectra Products 35 e Vision amp EasyView SP104018 102 June 2006 The access level of a particular instrument is reflected in the EasyView Loader screen as shown mks EasyView Loader SerialNo bn 98 00104016 ban Lia9 00104252 Name IF no connections are listed click Edit Connections and check that Process Eye is connected to the Instrument Servers you require Main Done The view above shows two shared instruments EasyView has not made a connection to these instruments so both are available You can see that both are ready to be used by Easyview To begin using one of them highlight it and click on the lt Connect gt button mks EasyView Loader Serialo Harme e ren E
39. Technology for Productivity Spectra Products MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 As part of our continuous product improvement policy we are always pleased to receive your comments and suggestions about how we should develop our product range We believe that the manual is an important part of the product and would welcome your feedback particularly relating to any omissions or inaccuracies you may discover You can send your comments to MKS Instruments Spectra Products Cowley Way Crewe Cheshire CW1 6AG U K 44 0 1270 250150 Tel 44 0 1270 251939 Fax Email manual_info mksinst com www mksinst com e Vision e Vision and EasyView are registered trademarks of MKS Instruments Windows and Windows 95 are trademarks of the Microsoft Corporation All other brand or product names are trademarks or registered trademarks of their respective companies 2 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 E e EE 6 Connecting Control UES EN 7 2 Installation RCQUITCINCNES sisecescsenenensenenesenesenesesesnssananananaenenensnsnsnanaeas 8 d E EE EE 9 OVENI ECW arenes eege EE 9 3 1 Installing Easkkietz eseeeeee EE EE E EE EEEREREEEEEEEEEEEE ee 10 Easy VIEW Set up Ke ECH E 10 BI e Re Ee Le BEE 12 Destination Folder dialog scesccsessesseceecsecncceeaneceesnseeatenetaresetarenesens 12 Support Infomation dialog ER 13 32
40. a X Axis Use the data acquisition properties to set the X axis properties Creates a view with the X axis properties governed by the measurement on which the view has been based For example if the view was based on a Bar chart scan measuring from mass 5 up to mass 45 then this view will show mass 5 to mass 45 along the X Axis Use the following Bases the X axis range on the values entered in the text boxes with the following limitation Although you can choose not to display masses that are being measured you cannot choose to display masses that are not being measured For example you create a Bar chart measurement scanning from mass 5 to 45 you can base a view displaying from mass 10 to 40 but not from mass 5 to 50 If this is attempted the view will revert to displaying the measurement s range MKS Instruments Spectra Products 63 e Vision amp EasyView SP104018 102 June 2006 Minor Ticks Displays minor ticks on the X axis Show elapsed time in addition to scan number Displays the elapsed time from the start of the recipe Show real time in addition to scan number Displays the real time governed by the PC clock Note Both the above options cannot be enabled at the same time To edit the Annotations icon click on lt Annotations gt Annotations dialog Annotations Annotations Stream Mame Display Check or uncheck the streams to show hide them on the view Double click the shapes list to change the disp
41. a Products e Vision amp EasyView SP104018 102 June 2006 5 Adding your Instruments Before connecting any instruments to your network you must seek advice from your IT staff on the following points Is the IP address 192 168 0 250 already in use All new instruments have a default fixed IP address of 192 168 0 250 which can be changed to suit your network if required Only one instance of an IP address can exist at any one time this address needs to be available for the initial configuration of the instrument What IP addresses are available for my instruments You will require a unique IP address for each instrument What is the Subnet range of my network This will be required during the configuration of the instrument Concise help on IP addresses networking network configuration and using Device Manager can be accessed by either choosing the lt Help gt button on the Device Manager dialog or from the MKS RGA Applications program group We recommend you read through these help pages before continuing any further MKS Instruments Spectra Products 27 e Vision amp EasyView SP104018 102 June 2006 5 1 Recommended installation method If 192 168 0 250 is not in use After obtaining the information you required above you should connect your instruments to your network using the supplied Cat5e shielded UTP cable If this cable is not a suitable length an alternative of the same specification should be sought A
42. a higher partial pressure to saturate E is D I rrkber S Detector control The detector type used for the scan can be changed Depending on the type of instrument the options are Faraday Multiplier 1 Multiplier 2 and Multiplier 3 Multiplier 1 2 and 3 refer to the same physical detector but using three separate calibration values rick Add Trend control The add trend button adds a default trend in addition to the Barchart view This tend can be edited in the same way as any normal trend view see Section 7 Changing adding Views 44 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 6 5 Leak Check Mode bh EasyView EasyView LM76 01603006 SCH Recipe Yiew Window Help WP e E e P S Wit BRILL vk ve EasyView LM76 01603006 Lcakcheck ss 4 00 9 22 010 EasyView Leakcheck View 00 00 30 00 01 00 00 01 30 00 02 00 00 02 30 00 03 00 00 03 30 00 04 00 00 04 30 00 05 00 Elapsed lime MM duh UK Bex GS Acep sition Conal a 4 00000 dv Accuracy5S 1o 1 333e 004 mba e F 1 333e004mbar v d e Instrument Status Scanning Leakcheck Jd Active Filament i Sensor Identification Standard Open Source Filament Status On Detector Type Faraday Channel Plate Total Prossure NIA banans Multipher Status oe Masumum Mass A AMI i A RF Configuration Sman Head Central d linir tice Vision 10008 Baseline Monkering Done Pressure in mbar The Leak Check view is loaded and the interact
43. already have deck Mew Trend Window Arrange All Windows d Ering Recipe To Front Cascade Recipe fe Tile Recipe Horizontally TT Tile Recipe vertically 1 Easy View LM76 01603006 Barchart vw 2 Easy View LM 76 01603006 Trend New Trend Window Clicking on new trend window will bring up the trend properties window for a new view 84 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Arrange All Windows This item will bring up an additional list Cascade Tile Horizontally Tile Vertically Arrange Icons From here you can arrange the windows in the usual way In this menu however all the currently open views from all the currently running measurements will be arranged The other arrangement methods in this pull down menu apply only to the active recipe Bring Recipe to Front Selecting Bring Recipe to front will bring the views for the current active measurement to the front Cascade Recipe Selecting cascade recipe will bring the views for the currently active measurement to the front and arrange them in a cascade fashion e LasyView LasyView LM 76 01603006 Recipe View Weken De OBR S OR BR naarpn FULL COW Gwy jaa J Easy iew LM76 01603006 Trend kr E lt Easy iew LM76 01603006 Barchart 2 4 6 8 12 4 ww 3 D A 6 W V R2 KH HGH 9 0 Au HO Sean 20 of 1000 1 15 2004 174042 Al Uda huh I be I Com ff Sofij E Peak Conte AccumyS o
44. an scan but increases scan time The accuracy ranges available are from 0 to 8 SR Peak Jump settings Use this button to open the Peak Jump settings window shown on the next page MKS Instruments Spectra Products 47 e Vision amp EasyView SP104018 102 June 2006 Settings for each of the 15 channels can be edited using this toolbar Click on the channels tab to edit the settings for that particular Massi channel CG Check the box to enable the channel In the above example only channels 1 to 7 are enabled channels 8 to 15 are disabled A 3al Scan Mass control t Set the particular channels scan mass Note that the mass cannot be less than 1 and cannot exceed the maximum mass allowed by the control unit igo 1 333e 004 mbar e Electronic Gain control The electronic gain of the pre amplifier can be changed by selecting one of the values from the drop down list Depending on the type of instrument the allowed values are 1 100 and 20000 The higher the gain selected the smaller the partial pressure that can be measured this may cause peaks of a higher partial pressure to saturate E 1234 004 mbar e Detector control The detector type used for the scan can be changed Depending on the type of instrument the options are Faraday Multiplier 1 Multiplier 2 and Multiplier 3 Multiplier 1 2 and 3 refer to the same physical detector but using three separate calibration values di Line Thickness control The
45. ar Click Apply to apply the new calibration or DeFault to apply the Factory default Default To exit without writing the new calibration information click lt Cancel gt To apply the factory default calibration click lt Default gt Otherwise choose lt Apply gt to write the calibration information CG Calibration Wizard Your selected calibration factor has been applied The application logfile holds the details Click Finish to exit the Calibration wizard The calibration is now complete click on lt Finish gt to exit MKS Instruments Spectra Products 93 e Vision amp EasyView SP104018 102 June 2006 i EasyView LM76 01100013 SC A Mi KR Set d Faraday jm Calibrate mass ui 20 GER using the Faraday detector to have a value of 16 007 mbar wv Apply the resulting calibration ta both filaments L Last calibrated by Easyview 28 10 2003 13 54 04 Current source sensitivity 6556 004 4 rmbar URED Cie LH76 01100012 Jee The date and sensitivity value of the calibration just performed is displayed at the bottom of the EasyView window lt MESSAGE Time 2003 10 28 13 52 58 Value Calibrating RGA Source EasyView Faraday detector gt lt MESSAGE Time 2003 10 28 13 52 58 Value Parameters mass 28 pkht 1 00e 007 gt lt MESSAGE Time 2003 10 28 13 52 58 Value Existing sensitivity 2 18e 004 4 mbar gt lt MESSAGE Time 2003 10 28 13 53 05 Value Filament
46. ault printer settings You may only print swept measurement views and trends other views within EasyView cannot be printed If you do require a hard copy of these other views use lt print screen gt from the keyboard 100 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Below is a printout of a typical Bar Chart spectrum of nitrogen 3 z Arasaure miw wem E Debt SE e A D Sean 5 i i Ve E muma Soros Puh ors fe A7 MKS Instruments Spectra Products 101 e Vision amp EasyView SP104018 102 June 2006 This is a typical trend printout The key at the foot of the printout shows the colour of the line the channel name and the value of the trend line at the start and finish of the trend printout Hydrogen From 3 50e 008 To 7 956 009 Helium From 1 11 008 To 4 13e 008 Carbon 12 From 6 36e 009 To 3 1Be 009 Nitrogen 14 From 6 32e 006 To 6 24e 006 Hydrocarbon 15 From 2 07e 008 To 4 13e 008 Oxygen 16 From 1 59e 009 To 2 07e 008 OH group From 6 36e 009 To 2 07e 008 Water From 1 59e 009 To 7 95e 009 Argon 36 From 2 54e 008 To 2 23e 008 Argon From 3 02e 008 To 3 18e 009 Carbon dioxide From 3 97 e 008 To 1 59e 009 HT MISS Instruments Spectra Products Process Eye 2000 There is no title or foot note feature in the print facility You can however give the printout a title by adding a caption to the view 102 MKS Instruments Spectra Pr
47. ay MES RGA Applications FR SECSIM Pro 2 0 J Snagit 6 e Spectra ee Easyview Or by clicking on the desktop shortcut The CD is not required to run EasyView The EasyView information page now loads giving information on the currently connected head EasyView LM76 00399001 Atw Head M76 0039900I A tah UM be PT H Instrument Status Tle A J Active Filament 1 Sensor Identification Standard Open Source Filament Status on Detector Type Faraday Charmel Plate Total Pressure NIA re Multiplier Status OF Maximum Macc 200 AMI RF Confiquration Smart Head Control Unit Use Standard RGA External Hardware Embedded Yersivn v3 70 38 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 6 2 Toolbars Each mode of operation can be accessed through the tool bar A WM Af hee Ld VW SA Use the following buttons to start or stop a scan mode or to access the other functions of the program For detailed information on each function see the relevant section shown in brackets A Analog scan mode 7 3 Barchart scan mode 7 4 lt Leak Check scan mode 7 5 Peak Jump scan mode 7 6 LI Disk Store 7 7 7 1411F Filament Select Use this button to toggle between the filaments Hwy Filament Status ee Red Filament ON Blue Filament OFF Run Diagnostics a Performs a diagnostics check on the RGA head LJ Show Information Page Thi
48. ck on the Add Annotation button which will cause the Annotations dialog to appear Annotations Time of annotation 28711 2002 14 48 02 Mote Cancel Here you can specify a time for the annotation to appear on the trend add the text you wish to appear in the Notes field The second way to add an annotation is to click on the Add annotation m at selected time button The screen cursor will change to a pen select the point on the trend that you want to add the annotation and click GG Barchart With Trend Interactive 2 As Trend Els Ka lass 2 Mass 4 biss 12 htss 14 Hydrogen Helium Carbon 12 Nitrogen 14 1 75e 003 1 91e 008 3 18e 008 2 14e 006 htss 15 lass 16 Nass 17 Mass 18 htss 28 Hydrocarbon 15 Oxygen 16 OH group Water Nitrogen 1 59e 009 7 74e 007 2 48e 007 1 37e 006 8 65e 005 htss 32 htss 36 htss 40 Nass 44 Oxygen Aragon 36 Argon Carbon dioxide 1 44e 005 9 54e 009 1 45e 006 5 56e 008 00 05 00 Elapsed Time The annotations dialog appears again allowing you to add text to the annotation with the date and time determined by the point at which the annotation was added to the trend SS MKS Instruments Spectra Products 59 e Vision amp EasyView SP104018 102 June 2006 Each annotation added is marked by a symbol along the top of the trend moving the cursor over this symbol causes the entered text to be displayed as a tool tip You may add as many annotations as you wish
49. d without seeking advice from your IT staff Likewise assigning a new IP address to the instrument must be done under advice or network conflicts could occur 128 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 PC and Instrument on the same IP ranges You can see in the dialog below that the IP address of the instrument and the IP address of the host computer are in the same IP range IP Configuration for LM9 00101005 New Control Unit Settings C Assign an IFP address automatically using DHCP Use the following fixed settings IF addres 192 168 0 250 Help Subnetmask 255 255 2556 U Note The IF address of this compufer 192 168 0 10 Browse to the instrument when this dialog clases Cancel In the above case communication between the host PC and the instrument is possible though Device Manager will recommend you change the instruments IP address to another not ending in 250 This is to avoid potential problems when installing more than one instrument RGA Device Manager SPECO40055 spectra com Multiple Network Cards DoR The list shows the control units that are connected to network and serial ports of this computer Elese Double click an item to view more details Serial Number Access Status Details 7 LMS2 00101005 Friendly Name 192 168 0 250 Fixed No preconmection Requires ne Configure e 4 Additional registered connections The
50. ducts An On line installation installs the full suite of EasyView components and should be chosen if the PC is to run the RGA instrument An Off line installation installs only the components required to view stored data and create or modify recipes Destination Folder dialog iv EasyView Setup Destination Folder Select a folder where the application will be installed The Installation Wizard will install the files for EasyView in the following folder To install into a different folder click the Browse button and select another folder fou can choose not to install EasyView by clicking Cancel to exit the Installation Wizard Destination Folder C Program Files Spectra MKS Spectra Products Here you can select the installation directory used for the EasyView software The above shows the default directory of C Program Files Spectra 12 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 If you wish to install to another directory click on the lt Browse gt button A standard Browse dialog is displayed where you can select a directory of your choosing The installation process will begin to install the EasyView software onto your PC This process may take a few minutes depending on the type of installation chosen and the specifications of the PC Support Information dialog ie EasyView Setup Support Information Product ID and Yersion Number
51. e is particularly useful for displaying digital channels on a trend Channel Display Name Measurement M Mass 1400 Lo Atomic nitrogen lt lt uto gt gt MKS Instruments Spectra Products 69 e Vision amp EasyView SP104018 102 June 2006 Adding a Trend pane Although you cannot define multiple Y Axis scales to allow display of different data on the same trend you can create multiple trend panes which allow you to display a number of different Y Axis on the same trend CC lest Views Z As Irend wa Zar Smo be Eao 1x10 ven Di 06 S Trend 1 Units S CH So ven Dt mr 000100 000200 000700 e 00 05 00 000600 000700 Dtmpnn 000900 00 1000 Elapsed Time This is a 2 pane trend with channel 1 displayed on trend pane 1 with its own measurement units and channel 2 displayed on trend pane 2 with different measurement units On the Trend display pane and channe properties dialog click on the lt Add pane gt button to add a new pane Trend Display Pane and Channel Properties Set the channels to be associated with this Trend View Individual panes display thea oven selection of channels from a common list of 5 items Trend Pane 1 e Channel i Name Measurement Add Pane M Mass 2 Hydrogen BarCharti M hass 4 Helium BarChartl E hass 12 Cabu 12 BaChati E Mass 14 f Nitrogen 14 Dat bart Edit Channel gt gt M Mass 15 Hydrocarbon 15 Ba hat M Mass 16 Oxygen 16 Dat bat M Mass 17 OH grou
52. ents Spectra Products e Vision amp EasyView SP104018 102 June 2006 External Trip The filaments can be controlled by an external signal applied via the X trip socket See the e Vision hardware manual for signal requirements If External Trip is selected the Filament Trip and Filament Control options become available Filament Trip Turns the filament off when the X trip condition is met The filament must be manually switched on once the trip condition is cleared Filament Control The filament will be turned off for the duration of the X trip condition once the condition is cleared the filament will switch back on automatically Configure Sensor Once the options have been configured click on this button to write the configuration settings to the sensor When finished with this dialog click the lt Done gt button to exit the dialog MKS Instruments Spectra Products 119 e Vision amp EasyView SP104018 102 June 2006 Network Sensor Security Specify IP Address IP Address 10 10 54 216 Sub Netmask 255 255 255 0 Gateway 0 0 0 0 Obtain Address Automatically Il Set IP Address Under the Network tab the following options are available Specify IP Address You may change the sensors IP address Subnet mask and Gateway if required For help on understanding and assigning IP addresses please see the on line help included on the EasyView installation disk Obtain Address Automaticall
53. ents Spectra Products e Vision amp EasyView SP104018 102 June 2006 Once the Java runtime has been downloaded and installed you may need to click the Refresh button on your browser You now have access to the instrument to start click the Plot tab once again The view changes to show the following screen and access to the toolbar is now available dall lial all WKS SX 1 00000 empting to Connect to server 10 10 54 216 Server is Connected empting to select LM98 00104016 ontrol Established MKS Instruments Spectra Products 113 e Vision amp EasyView SP104018 102 June 2006 15 2 Page Views and Controls The Tool Bar F 100 Ji The measurement modes scan parameters and instrument diagnostics can be accessed from the toolbar Each function is described in turn through the following section S Filament Control lei K Click the buttons to turn on or switch between the filaments The currently active filament is displayed in red Scan Modes A A H Analog Bar Chart and Leak Detect modes Diagnostics q Displays a dignostic report on the instrument Tuning N Enter the tuning mode You must be in Analog Scan mode this setting is password protected Accuracy D T EE Scan accuracy determines the sampling amount carried out on each reading A high accuracy number provides a clean scan but increases scan time The accuracy ranges available are from 0 to 8 Detector Select F 5 626E
54. ept for the default admin account you have created Clicking lt Yes gt saves any new accounts you have created MKS Instruments Spectra Products 109 e Vision amp EasyView SP104018 102 June 2006 15 Java Web Applet It is possible to view and manipulate certain aspects of the EasyView package remotely via your Internet browser This provides the facility of network users without the EasyView software installed access to the sensor data The applet is highly intuitive and includes all the data display routines required for troubleshooting including leak detection mode All that is required is a Java enabled Web browser and the IP address of the unit you wish to view Simply enter the IP address of the sensor you wish to view into the Address field of your browser and you are taken to the sensor s home page A Java applet can be downloaded from this page to enable access 110 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 15 1 Accessing the instrument Start your web browser and type in the IP address of the instrument you wish to view A about blank Microsoft Internet Explorer g x DEER Ze OF O I el Wl A Sec tes mete El os del wes sO Ee buet mm You are directed to the instruments home page ere Te z Qm O DAG Den kea ss 02 a WaS ECH imks MKS Instruments Spectra Products 111 e Vision amp EasyView SP104018 102 June 2006 If you cho
55. ess IF address Subnet mask 255 255 255 oO Default gateway Use the following DNS server addresses Prefered ONS server eae Alternate DNS server aa MKS Instruments Spectra Products 127 e Vision amp EasyView SP104018 102 June 2006 PC and Instrument on different IP ranges You can use Process Eye s Device Manager to check on the current IP address status of both the host PC and the instrument Start DEVICE MANGER highlight the instrument click the CONFIGURE button and choose CHANGE THE IP ADDRESS from the list You can see in the dialog below that the IP address of the instrument differs from the IP address of the host computer IP Configuration for LM9 7 00101005 New Control Unit Settings C Assign an IP address automatically using DHCP f Use the following fixed settings IPaddred 192 168 0 250 Help Gubnet mask 255 255 255 O Note The IF address of this computer 10 10 54 43 Browse to the instrument when this dialog closes Cancel In this example the host PC will not be able to communicate with the instrument while the two IP addresses are in different ranges There are two options Change the IP address of the host PC or change the IP address of the instrument To change the IP address of the instrument overtype the current address with the new one Note If the host PC is part of your network then changing its IP address is not recommende
56. ew is designed to operate with the MKS Spectra e Vision range of instruments It will not operate with any other control unit in the MKS Spectra range EasyView will run under Windows 98SE ME NT 2000 and Windows XP operating systems No other versions of Windows are supported The EasyView package is designed to monitor partial pressures in a production environment where it is essential to observe and record the current status of the process while simultaneously reviewing historical events in both the current and archived runs The data acquisition is fast and covers a wide dynamic range of pressures so that some or all of the partial pressures can be measured and stored while only data of interest is displayed The package has been designed to be easy to use and understand so it can be used by skilled and unskilled operators alike Connecting Control Units The e Vision range uses an RJ 45 Ethernet connection only The cable used must meet Cat 5e specification and be of the STP Shielded Twisted Pair type For connection of an e Vision unit directly to the PC the cable must be a cross over type cable If the connection is made through a hub or network the cable is a standard patch cable The control unit must be one suitably configured to run with EasyView If the control unit was supplied with another software package or a previous version of EasyView please contact your local MKS Spectra facility for upgrade instructions No
57. explicit settings option allows the maximum and AU limits on the Y axis to be e Use the following explicit settings defined manually Max value Enter the maximum and minimum values you wish to display in the text fields Bn 33 Min value E 35e 008 To display a Log scale check the box w Log scale Note The software cannot display negative numbers or zero when set to Log scale If the Units of pressure check box is enabled the axis will change scale if the ressure units are changed in the preferences P g P i Units of pressure Restrict these values to the maximum bounds of the acquired data By checking the above option the scale is limited by the maximum limits of the measurements being used For example if the only data to be displayed is mass channels from Barchart1 the limit of the maximum value you can have will be the full scale pressure on Barchart1 With this option selected the Y axis does not have a scale as such All enabled channels are given a value of either zero or one and are then plotted against their channel name f Stack channels of digital data SS test45 1 As Trend Digital Input 2 1 Oe Af 00 00 00 00 01 00 00 02 00 00 03 00 00 04 00 00 05 00 00 06 00 00 07 00 00 08 00 00 09 00 00 10 00 Elapsed Time This option is only useful for displaying digital data In the above example there are two digital input channels with both channels configured to draw stepped MKS
58. gt to save the account Permissions Administrator can add edit and delete users Enable Shutdown allows the account to close the password application Checking both options gives the account the option to not only end the computer lock but also to either save or delete the current list of users on exit Exiting Computer Lock Log on using your admin account RGA PC Password Lock m This computer i curently locked To use the computer please provide a valid UserName and Password Press Alt T ab to show hide this dialog User ame Password 108 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Click on the close button at the top right hand corner of the dialog B RGA PC Password Lock mi Lock PC Configure PC Will be locked in 5 minutes Click lt Yes gt to exit the lock if no user action is taken the program will revert back to a locked state Exit MKS_PASSWORD 5 Are you sure you want to exit the MES extended password application Doing so will allow unauthorized use of the PC No will automatically be chosen in 16 seconds Preserve User Information Do you want to retain all stored username and password information Choosing No effectively resets the application to a never used state Yes will automatically be chosen in 17 seconds No At this dialog clicking lt No gt will delete any users exc
59. i JAMIE RIS Amar v F Amez is 149762 tooo Sam 1 4 fe el E Accuracy 8 F 5 62665 2x 5 62665 but mmm Kann 9 eS D II MKS Instruments Spectra Products 117 e Vision amp EasyView SP104018 102 June 2006 Settings The Settings page is password protected with a default password of MKS It is recommended that this password be changed to prevent unauthorised changes to the sensor configuration files See Security for details This section is Password Protected Please Enter password to continue Enter Password Hetwork Security Friendly Name No Name Filament Type Tungsten RF Trip F Emission Trip F External Trip C Filament Trip Filament Control W Configure Sensor a Done Under the Sensor tab the following options are available Friendly Name Giving the unit a friendly name is especially useful if you have more than one sensor package installed Filament Type Tungsten or Thoria filament types are available depending on your sensor package option The filament current drawn by the types of filaments is different so you should ensure that the correct setting is chosen to match your sensor RF Trip recommended Enabled If the RF stage of the electronics package runs out of tune an on screen alarm is generated Emission Trip recommended Enabled If a problem is detected with filament emission the filament is turned off 118 MKS Instrum
60. ies Displays the creation time of the view C View creation time This option is only available when editing a live trend S um 16 01 06 Sets the elapsed start time to the same time that the measurement was created Type the name of the measurement in the text box Key Legend properties None No legend is displayed Top Legend Display the legend at the top Side Legend Display the legend at the side 78 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Editing a live Trend Trend views can be changed by using the following toolbar buttons these only affect the currently active view Alternatively right clicking the Trend will show the View Properties dialog E Sr P I p 41 Vol Click the Y axis minor ticks button to turn minor ticks on or off for the Y axis Click the Y axis grid button to turn the grid on and off for the Y axis Click the Y axis log lin button to change between log and linear mode for the Y axis Click the display days button to switch on and off the display days function Click the true elapsed time button to switch between displaying the real time and the elapsed time Click the X axis minor ticks button to turn minor ticks on and off for the X axis Click the X axis scroll bars button to turn scroll bars on and off for the X axis Click the legend key b
61. iew has been installed and the RGA User account created you must run the Setup Wizard before you can use the software This can be found in Start All Programs MKS RGA Applications Tools Setup Wizard or by attempting to start the EasyView program prior to running Setup Wizard 20 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 4 1 Standard setup Click on Start All Programs MKS RGA Applications Tools and select the Setup Wizard entry Setup Wizard You have administrative priviliges It is not normally best practice to run the RGA software as administrator It is recommended that you create a power user account and complete the setup as that user Do you want to continue anyway If you are currently logged on as an administrator the above warning dialog will appear It is best to log off and switch accounts to the RGA User you created earlier If an earlier version of our RGA software is detected by the Setup Wizard the following dialog is displayed Setup Wizard AGA For Windows td The Wizard has found an installation of RGA For Windows E IF You have a control unit that curently rune on AGA For Windows software you must upgrade tt before it can be used with Easy yey f Yes have AGA For Windows control unit s and am ready to upgrade them now have AGA For Windows control units but cannot upgrade them at this time e donot have any control units that need
62. igin of the elapsed time will depend on how the time origin is defined See the next section on configuring the elapsed time origin e Display elapsed time Offset from the elapsed time origin that the time axis will start to display hb own wii wt ss 76 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Amount of time that will be displayed on screen in this case the last 10 minutes of data will be displayed Span E dd E hh 10 rim 88 Scrolls the Trend to keep the latest data displayed Scroll display If unchecked the trend will only display data for the first x minutes Where X is the number of minutes set in the span Displays the number of days as well as the time the Trend M Display days has run Displays minor ticks on the time axis Minor time ticks To edit the Annotations icon click on lt Annotations gt Annotations Annotations Stream Mame splay Annotations E Check or uncheck the streams to show hide them on the view Double click the shapes list to change the display shane colour of the curently selected stream Cancel Any annotation streams defined in the recipe will be listed check the display box to show the annotation on the view To change the icon select one of the icons from the list Click lt OK gt to return to the properties page MKS Instruments Spectra Products 77 e Vision amp EasyView SP104018 102 June 2006 Elapsed time origin propert
63. ing on with different usernames it may be simpler to create a common location available to all users Choose lt No gt to specify a folder of your choosing 24 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Log File Details dialog The EasyView Error Log File is where information on any script errors encountered is stored This information can be viewed to help with recipe diagnosis The default value is adequate in most cases but if you need to increase the file size or store the log as an XML file these options can be set here Log File Details Preferences Maximum filesize 100 E Bytes Store Log as XML Cancel Otherwise accept the default recommendation and click lt Next gt Setup Wizard Setup Wizard has enough information to complete the installation When the Setupyizard finishes what would you like to do rest Run EasyView Run Recall to review existing data files IF wou think the settings that pou have entered are correct click Finish Back Cancel Help To complete the standard installation leave the boxes un checked and click the lt Finish gt button MKS Instruments Spectra Products 25 e Vision amp EasyView SP104018 102 June 2006 setup Wizard 1 Easy view setup is complete An installation completed dialog will appear click lt OK gt to exit the installation program 26 MKS Instruments Spectr
64. ion Description Built in account For administering tr Built in account for quest access to Account For Providing Remote Assis This is a vendor s account for the F Right click the RGA User account you have just created and select Properties from the list RGA User Properties Member OF Profile Member of Ee Users Remove Apply Click on the Member of tab to display the default Users group Click on the lt Add gt button to add another group type MKS Instruments Spectra Products 17 e Vision amp EasyView SP104018 102 June 2006 Select Groups Select this object type From this location MES OZN3YPJFJZ3 Enter the object names to select examples In the Enter the object names to select field type in Power Users as shown and click lt OK gt Select Groups Select this object type Objet Types From this location MES OZN3YPJFJZ3 Enter the object names to select examples Power Users Check Names The Select Groups dialog will reflect the changes made select Groups AE Select this object type Obiect Types From this location MES OZN3YPJFJZ3 Enter the object names to select examples MES D2N sy PIPIA s Power Users Check Names 18 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Click lt OK gt to return to the Computer Management dialog Computer Management m File Action view Window Hel
65. ion 6 55e 004 A mbar gt lt MESSAGE Time 2003 10 28 13 53 48 Value Calibration succeeded The stability test result was excellent gt lt MESSAGE Time 2003 10 28 13 53 57 Value Calibration applied EasyView New factor 6 55e 004 A mbar gt lt MESSAGE Time 2003 10 28 13 55 51 Value Calibrating RGA Source Easy iew Multiplier 1 detector gt lt MESSAGE Time 2003 10 28 13 55 51 Value Parameters mass 40 pkht 0 00e 000 dgain 100 mmpkht 0 gt lt MESSAGE Time 2003 10 28 13 55 51 Value Existing settings sensitivity 2 23e 002 A mbar voltage 695 0 volts gt lt MESSAGE Time 2003 10 28 13 56 04 Value Filaments have been on for 5 8 minutes gt lt MESSAGE Time 2003 10 28 13 57 01 Value Peak height of mass 40 03amu using Faraday detector 1 62e 009mbar gt lt MESSAGE Time 2003 10 28 13 57 01 Value Starting multiplier calibration Required peak height is 1 62e O09mbar using a detector gain of 100 gt lt MESSAGE Time 2003 10 28 13 58 16 Value The current sensitivity is 2 23e 002 A mbar at 695 Volts The new calibration is 6 68e 002 A mbar at 699 Volts gt lt MESSAGE Time 2003 10 28 13 58 32 Value Calibration applied EasyView New factor 6 68e 002 4 mbar gt The details of the calibration shown above are also be logged to the log file located in EasyView Logs Process xml MKS Instruments Spectra Products 97 e Vision amp EasyView SP104018 102 June 2006 12
66. ive Leak Check control toolbar appears in the status window Acquisition Control tal 4 00000 Accuracy 5 e fo 1 333e 004 mbar e E 1 333e004mba e d Use this toolbar to change the scan parameters each of the functions are explained below tu Apmpmpmpmpdvl Probe Mass control To change the probe mass of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass number Note that the first mass cannot be less than 1 and that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit Accuracy e Accuracy control Scan accuracy determines the sampling amount carried out on each reading A high accuracy number provides a clean scan but increases scan time The accuracy ranges available are from 0 to 8 MKS Instruments Spectra Products 45 e Vision amp EasyView SP104018 102 June 2006 n 1 333e 004 mbar e Electronic Gain control The electronic gain of the pre amplifier can be changed by selecting one of the values from the drop down list Depending on the type of instrument the allowed values are 1 100 and 20000 The higher the gain selected the smaller the partial pressure that can be measured this may cause peaks of a higher partial pressure to saturate E 1 346004 mbar e Detector control The detector type used for the scan can be changed Depending on the type of instrument the options are Faraday Multiplier 1 Multiplier 2
67. lay shapecalour of the curently selected stream Cancel Any annotation streams defined in the recipe will be listed check the display box to show the annotation on the view To change the icon displayed on screen select one of the others from the list Click lt OK gt to return to the properties page Initial Y axis Properties In a swept measurement the Y axis is always shown as pressure the units of which are determined in the EasyView preferences Section 13 Preferences Use data acquisition properties to set Y axis Creates a view with the Y axis properties governed by the measurement on which the view is based 64 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 4 Or 5 decade log scale Changes the Y axis from a linear scale with its origin at zero to a logarithmic scale with a minimum on which is dependant on the accuracy of the measurement The higher the accuracy the lower the minimum pressure will be displayed Use the following explicit settings Allows manual entry of the maximum and minimum displayed pressures The display can be either linear or logarithmic determined by the check box Restrict these values to the maximum bounds of the acquired data Causes the Y axis maximum pressure setting to be governed by the maximum pressure obtained from the measurement associated with the view Note You cannot display zero or negative values in logarithmic mode Grid Displays
68. ler the partial pressure that can be measured this may cause peaks of a higher partial pressure to saturate E 1234 004 mba e Detector control The detector type used for the scan can be changed Depending on the type of instrument the options are Faraday Multiplier 1 Multiplier 2 and Multiplier 3 Multiplier 1 2 and 3 refer to the same physical detector but using three separate calibration values 42 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 6 4 Barchart Mode Mth e EasyView EasyView LM76 0060001 3 Recpe Yiew Window Help xX SE Pic g of Ferien LM76 0060001 3 Barchart EasyView Darchart Mode HU 10U 110 Scan 1 13 2004 10 41 46 ANN 41 gt A ll L bl KM A action Col te 1 2 dl iZ Feat Center PEMESE ain 6 657e 007 mba v F 6667e007 mbar e b Instrument Status Scanning Barchart Jd Active Filament i Sensor Identification Standard Open Source Filament Status On Detector Type Faraday Channel Plate Total Pressure NIA Zen Multiplier Status OF Masimum Mass A AMI i A RF Configuration Sman Head Central l linir tice Srandard RGA Man Me Done Pressure in mbar The Barchart view is displayed and the interactive Barchart control toolbar will appear in the status window Acquisition Control H Idi NK 50 i Peak Center e Accuracy5 e gio 1 333e 004 mbar e E 1 333e 004 mbar e ko Use this toolbar to change the scan parameters each of the func
69. mme IF no connections are listed click Edit Connections and check that Process Ewe is connected to the Instrument Serwers wou require Running Easy ew Running Easy ies Hain A Easy view LMIDIUT IT A Easy view LMIDIUTIM j Done The view above shows two exclusive instruments EasyView has made the connection to both these instances when the program was started Notice the green tick on both the instrument icons and running EasyView is indicated under Status Notice also that both instruments have a view tab 36 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 6 Using EasyView Overview All the standard view modes are available including Analog Scan Barchart Peak Jump and Leak Check These modes are fully interactive allowing changes to the scanning parameters to be made in real time There is also the ability to perform a Disk Store where the scan data is saved to disk for viewing at a later date using the Recall program The following pages describe the main areas of interest to get you started using EasyView The later sections describe each area in greater detail as well as explaining the Diagnostics and Calibration modes available MKS Instruments Spectra Products 37 e Vision amp EasyView SP104018 102 June 2006 6 1 Starting EasyView To start the main EasyView program click on Start Programs MKS RGA Applications EasyView
70. nstrument you will need to assign a static IP address Internet Protocol TCP IP Properties KEN General Alternate Configuration Tou can get IF settings assigned automatically if your network supports this capability Otherwise You need to ask your network administrator for the appropriate IP settings Obtain an IP address automatically Use the following IP address Ce Obtain ONS server address automatically Use the following DNS server addresses Eee EE 126 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Assign a Static IP Address Open Windows Control Panel and select the NETWORK CONNECTIONS icon Choose the network connection you are using for the link with the instrument right click and choose PROPERTIES Highlight the INTERNET PROTOCOL TCP IP entry from the list and click on the PROPERTIES button The default IP address of the instrument is 192 168 0 250 the host PC address needs to be in the same range but not the same number As you can see below this host s IP address ends in 10 but could have been any number up to 255 excluding 250 Use the Subnet shown Internet Protocol TCP IP Properties General ou can get IF settings assigned automatically if your network supports this capability Othenvise You need to ask your network administrator for the appropriate IP settings Obtain an IP address automatically Use the following IP addr
71. ntinue gt button MKS Instruments Spectra Products 31 e Vision amp EasyView SP104018 102 June 2006 A dialog is displayed warning of the consequences of IP changes to an instrument Once your instruments have been installed and are in use on your network you should observe the warning information displayed but during this initial configuration click the lt Yes gt button to continue IP Configuration dialog IP Configuration for LM92 54564644 Nem Control Unit Settings Assign an ID address automatically using DHCP e Use the following fized settings ID address Subnet E GE a Ul Help The IP address of this computer is 10 10 54 1730 w Browse to the instrument when this dialog closes Cancel Options Assign an IP address automatically using DHCP This feature is not currently supported Use the following fixed settings The IP address you will assign to the instrument Browse to the instrument when this dialog closes Once the address change has completed you browser is started and you are taken to the instruments home page See Section 15 for more information on the web functions of the e Vision Help Launch the help program on IP addressing and networking Enter the new IP address of the instrument and click the lt OK gt button to commit the changes 32 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 The instrument informa
72. nts and Settings Steve BillingtonsMy Documents Proces W 5 Processing file C Documents and SettingasSteve BillngtonsMy Documents Proces zi 5 Processing file C Documents and Settings Steve BillingtonsMy Documents Praces W 5 Processing file C Documents and Settings Steve BillingtonsMy Documents Proces W 5 Processing file C Documents and Settings Steve BillingtonsMy Documents Proces w 5 Processing file C Documents and Settings Steve BillingtonsMy Documents Proces zi D Processing file C Qocuments and Settings Steve BillngtonshMy Documents Proces W 4 Zip complete File processed 22 Compression 7875 Z Process Eve 2000 system Backup for Tool Number Computers 561 UsereSteyve When the operation has completed click the lt Close gt button to exit 104 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 To restore from a back up file click on the lt Restore gt tab ef Process Eye 2000 System Backup Restore filename zip A PE2K B ackup 4SG1 Steve Billington ZIP Browse Start Restore Restore Use the lt Browse gt button to select the backup and on lt Start Restore gt to begin w Status Me Operation Complete Status zi 5 Processing file C Documents and Settings Steve BilingtonsMy Documents Proces 5 Processing file C ADocuments and Settings Steve BilingtonsMy Documents Proces Ai D Processing file C Documents and Settings Steve
73. oducts e Vision amp EasyView SP104018 102 June 2006 14 EasyView Tools Under the Tools menu there are three programs available as shown The following section explains each program in turn a nal viewer ay MES RGA Applications Backup and Recover ZEN Lock This Computer om Setup Wizard SECSIM Pro 2 0 D Easy View bei Recall Snagit 6 Spectra Backup and Recover The Backup and Recover tool is used to backup the current EasyView installation The tool will backup the views and registry settings for the current user ef Process Eye 2000 System Backup Backup filename zip A PE2K Backup 45G1 Steve Billington ZIP Browse One ZIF file on a fixed drive and any network drive OF one ZIF file split across multiple disks if required for local removable media Multiple ZIP files to fit on F Include report output LHTM amp JPG F Include report output LEM Start Backup Choose the location and name for the backup file To make a spanned backup across a number of disks click the Multiple Zip files to fit option and then select the type of media There is also a custom size option where you may specify the file size of each spanned file MKS Instruments Spectra Products 103 e Vision amp EasyView SP104018 102 June 2006 When ready click lt Start Backup gt to begin w Status Operation Complete Status W Er Processing file C Docume
74. ol window Graph Settings Graph Preferences o 2 hu j k Ka T gt 3 Xx Axis Label Item Size Color Font Style Bold Label Font ds d MM aia abcdeABCDE gt e iie Reset to defaults Cancel From the lt graph settings gt option the global properties for the views can be adjusted Common Gases List The list of common gases which is used throughout the program when editing Trend channels for example can be tailored to suit your application using Notepad This file is located in C Program Files Spectra RGA Applications Workstation MKS Instruments Spectra Products 99 e Vision amp EasyView SP104018 102 June 2006 13 Printing Both lt print setup gt and lt print gt can be accessed from the recipe pull down menu Unless a measurement is running the lt print gt option will be greyed out In addition there is a print button on the tool bar dx A Close Connections Preferences Frink Setup Exit Printing a View You may print any active view if the view is not currently active click on the view you wish to print so it becomes the active view Then either click on the lt print gt button or select lt print gt from the recipe pull down menu If you click on the print button the print will start immediately with the default settings If you select lt print gt from the recipe pull down menu the standard Windows print dialog appears giving you the option to change the def
75. ou will be a Super User Your First action should be to Login with this Username and change your password You can if you wish add Further users who may or may not have the right to create further users Choose Yes to acknowledge that you have understood this message or choose No to quit The above dialog displays the initial username of admin and a blank password as the dialog suggests you should give this admin account a new password as soon as possible Click lt Yes gt to continue RGA PC Password Lock eo This computer is curently locked To use the computer please provide a valid UserName and Password Press Alt T ab to show hide this dialog Usel ame Password The computer is now locked to unlock enter admin in the UserName text box and then click on lt Logon gt 106 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 amp RGA PC Password Lock Lock PC Configure PC Will be locked in 5 minutes Click on lt Configure gt to begin adding users or change the admin password Extended Password Configuration No Rew Mouse activity lockout tine mina 5 Edit Delete New Cancel In configure you can create edit and delete users You can also change the inactivity time before the computer is locked Click on lt Edit gt Add Edit User The default Admin account should have the Teater option
76. out a measurement running The diagnostics checks each power supply within the electronics package and displays the result Some power supplies are not tested as shown here depending on the sensor configuration MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 123 16 Communications Troubleshooting The following flowchart should help you through any connection problems you may encounter Note that this assumes you are connecting directly from the host PC to the instrument If the instrument is to become part of a network then assistance should also be sought from your IT staff Page 62 Assign an IP address NO No communication Configure Access and run Process Eye 124 YES Carry out reset to default IP address STILL NG y Use the Troubleshoot feature in Device Manager Check mains supply and fuse Check patc cable and x over adaptor verify netwo connectivity with another device MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 NG Replace patch cable and x over adaptor NGP Replace NIC cables or adaptor Enabling the Network Connection Notification To aid in troubleshooting the network status notification should be enabled The following paragraph explains the procedure Open
77. p Sum ep o V Computer Management Local Name 1 FullName Description SE System Tools 3 Administrator Built in account For administering tr ll Event Viewer Guest Built in account for guest access to shared Folders i Helpassistant Remote Desktop Help Assi Account for Providing Remote Assis Lann 2 Local Users and Groups H Users ar A 4 Groups Set Password g Performance Logs and Alerts aft Corporation This is a vendor s account For the H Si Device Manager All Tasks gt SI Storage Removable Storage eee Disk Defragmenter Ename E aE D n Services and Applications Help Opens property sheet for the current selection Right click on the RGA User account and select the Properties field In the RGA User Properties dialog confirm that Power User is displayed under the Member of tab RGA User Properties General Member Of Profile Member of e Power Users e Users Remove Click on the lt OK gt and exit the Computer Management dialog At this point you should now log off as the Administrator and log on as the RGA User to continue through Section 4 Set up Wizard MKS Instruments Spectra Products 19 e Vision amp EasyView SP104018 102 June 2006 4 The Set up Wizard Overview The Setup Wizard application configures the connection to the instrument the directory used to store data default pressure units and how the EasyView software will start Once EasyV
78. p BarChartl E Mass 18 Wale Bahai B Mas 29 Nitrogen BarCharti Gr der ee M Mass 32 Oxygen Dat bat M hass 36 Argon 36 Dat bat E Mass 40 Argon BarChartl E Mass 44 Cabu danke Bar Chia C Mass 64 00 Photoresist 64 lt Autos gt C Mass 69 00 Fluorocarbon lt lt Auto gt gt lt ai Checked channels that are not acquired are automatically excluded en The settings for each pane can be modified Select the pane that you wish to edit from the Trend Pane Pull down list box emm Trend Pane 1 70 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 The two pane view at the start of this section was created in the following way Trend Pane 1 TI Channel 1 was enabled on trend pane 1 Channel Display Name Measurement Bal Channel 1 UserMleasure er defined Channel 2 Usertleasure cer defined Ou Trend Pane 2 Channel 2 was enabled on trend Channel Display Name Measurement pane 2 C User defined gg Channel 1 User easure User defined m Channel 2 Userbleasure MKS Instruments Spectra Products 71 e Vision amp EasyView SP104018 102 June 2006 Configuring the Trend s Y Axis Once the channels have been set click on the lt Next gt button causing the Properties for Trend View Pane Y axis dialog to appear Properties for Trend View Pane Y axis Each pane has a set of properties that define its Y axis scale and its appearance Show Proper
79. rage at a defined buffered scan as well Start disk storage What to store Where to store eai ments and Settings Steve Billington My Documents Process Eye Data E asyView LM 76 00399001 Name Data How to make up the file name Just use the folder name specified Append date time information to the name e Append incrementing number to the name C Documents and Settings Steve Billington My Documents Process Eye Data E asyView LM 76 00399001 D ata000001 SI d Cancel Where to store options Folder enter the path or browse to the folder where the scans are to be stored The default path is EasyView Data EasyView Head Serial Number 50 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Name Enter a name for the saved data file by default this is data but it can be anything you choose As well as the name the file can be amended with other information Just use the folder name specified will create the file data SI d Append date time information to name adds date and time information to the file and would create the file DataYYYYMMDDHHmmsSS SI d Where YYYY is the current year MM is the current month DD is the current day HH is the current hour mm is the current minute and SS is the current second Append incrementing number to the name adds a sequential number to the name and would create the following file Data00
80. re are no additional registered connections Help EI ls there an Unlisted instrument that you expected to find Click Troubleshoot to launch the Hardware Troubleshoot Connection Troubleshooting Wizard MKS Instruments Spectra Products 129 e Vision amp EasyView SP104018 102 June 2006 Resetting the Default IP Address To reset the instrument to its default IP address of 192 168 0 250 carry out the following procedure Power on the unit Press the RESET button and immediately press and hold the MODE button for 20 seconds Important If the instrument has been configured for DHCP keep the MODE button pressed for 90 seconds or a reset will not occur 130 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006
81. ruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 If the channel has a mass value of 4 00 the data would be taken from Barchart1 because this is the first measurement that contains a mass with a value of 4 00 This will be true even if the peak height on mass 4 is so small that it is lost in the noise level and mass 4 in multiplier is a good stable peak If the value is mass 84 the data would be taken from Barchart2 even if the peak is SO large it is off scale This is because Barchart2 is the first measurement that contains mass 84 If the measurement name entered is not a valid measurement name in the current recipe then the measurement selection defaults to auto Editing the channel display To change the colour of a trend line click on the Colour list box Color 9 This will bring up a standard Windows colour selection dialog where you can choose a new colour To change the thickness of the displayed line move the slider on the Line Thickness control te EES Line thickness Moving the slider to the right increases the thickness Moving the slider to the left decreases the thickness The Draw Stepped check box can be used when displaying digital information on a trend Draw Stepped Instead of each point on the trend being joined by a straight line the points are joined only by horizontal and vertical lines The data is forced to be a value of either zero or one This featur
82. s enter a new IP address for the instrument Additional registered connections Click on the lt Details gt button to display a list of previously registered connections to instrument which are no longer available Once all the heads have been configured from Device Manager the installation is complete Access set the access level of the instrument see next page for explanation Once the access levels have been configured you can now start using the EasyView program see Section6 Using EasyView 34 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Access Levels The access level of the instrument determines whether the instrument is available to other instances of EasyView on other computers or used exclusively by its host PC These options are explained below Instrument Access EasyView will not auto connect to the instrument Connect to this instrument when the application software Choose this option if the instrument is hed ee belongs to another user running z EasyView on another computer These settings configure the access to this instrument from the main application software packages such as Process Eye and EasyView Cancel Inst t X j j i PEEP x EasyView will auto connect and will allow other users to use the w Connect to this instrument when the application software instrument when not in use by this it launched
83. s button switches from the Status display to the Information display _ Tuning Mode Tuning Enter the instrument tuning mode Calibration Mode MKS Instruments Spectra Products 39 e Vision amp EasyView SP104018 102 June 2006 40 Peak Jump Settings Only visible when in Peak Jump mode MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 6 3 Analog Mode A ewe FasyView FasyView 476 00600013 Recipe View Window Help xX S Si d FasyView Analog Mode 128 129 130 131 134 132 133 Scan 9 1 13 2004 11 10 16 e basyView LM 6 UUGUUU13 Easy View RGA K A ul I be EA Acquisition Control AL 26 JK 16 A 32 AccuracyO sie GOG7e 007 mbar F C GG7e007 mbar v A A Low Mass Alignmaer 32767 al p Emission 0 5 ue a eee gt l High Mass Alignment aan al w gt Electron Energy o 100ev am x D gt Low Mass Resuksion 35833 al Bl gt ke frees t0ev 55 a LI gt i High Mass Resolution 2o71 al T _ gt Extract 0 Go4i ua d m e i Man MASSAA ALLL LE Done Pressure in mbar The Analog view is displayed and the interactive analog control toolbar will appear in the status window Acquisition Control H kk 50 afe Aw AccuracyS e ado 1 333004 mbar e F 1 333e 004 mbar e Use this toolbar to change the scan parameters each of the functions are explained below ful Tale Start Mass control To change the start mass of the scan either enter a n
84. s have been on for 2 8 minutes gt lt MESSAGE Time 2003 10 28 13 53 08 Value Gain 100 fsp 9 16e 005 mbar RGA Zero is 60 1 ppm of full scale reading gt lt MESSAGE Time 2003 10 28 13 53 10 Value Reading 2 91e 007 mbar gt lt MESSAGE Time 2003 10 28 13 53 10 Value Peak center calibration 6 23e 004 amp 4 mbar gt lt MESSAGE Time 2003 10 28 13 53 29 Value Peak maximum calibration 6 55e 004 A mbar gt lt MESSAGE Time 2003 10 28 13 53 48 Value Calibration succeeded The stability test result was excellent gt lt MESSAGE Time 2003 10 28 13 53 57 Value Calibration applied EasyView New factor 6 55e 004 A mbar gt The details of the calibration shown above are also be logged to the log file located in EasyView Logs Process xml 94 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Multiplier Calibration To calibrate the multiplier click the lt Multiplier gt tab on the calibration page le EasyView LI176 01100013 864 A lul l cx ON i Multiplier J Calibrate M Multiplier 1 v against the Faraday detector using mass ui 40 alel and a multiplier gain of fu 100 ale Eram Iw Appo the resulting calibration to both filaments 4 Start Last calibrated by Easyview Never Current source sensitivity 2 23e 002 A mbar Main A ZOE H blll Rae Select the multiplier setting to be calibrated from the drop down list the mass to calibrate on
85. s shown selected if Permissions not select them jw Administrator This user can create edit delete users Typically only one user has this permission jw Enable shutdown This user can close down the password application You must always have On certain Windows versions a user without this permission cannot shut down Windows using Task Manager or Ctrl 4lt Del at least one Admin A user with all permissions can optionally un install all stored user and account with the password information on exit from the password application options shown selected Password F d See Add a password for the Confirm password admin account Cancel Click lt OK gt to save the settings and exit MKS Instruments Spectra Products 107 e Vision amp EasyView SP104018 102 June 2006 To create a new user account click the lt New gt button Add Edit User UserName Permissions Administrator This user can createedit delete users Typically only one user has this permission Enable shutdown This user can clase down the password application On certain Windows versions a User without this permission Cannot shut down Windows using Task Manager or Ctrl Alt Del A user with all permissions can optionally un install all stored user and password information on exit from the password application Password Password Confirm password Cancel Add a Username select the permissions and enter a password for the account Click lt OK
86. se not to install the Java runtime when you installed the main EasyView program you will need to do this now before you can proceed If a connection to the internet is available you can download the applet by clicking on the Plot tab If your PC does not have access to the internet you will have to install the Java runtime from the EasyView installation disk F Microvision IP Microsoft Internet Explorer File Edit View Favorites Tools Help Q sex amp EN a G P Search Si Favorites A Media Le Gd amp Address http 212 23 26 133 ER mks Plot Settings Configuration Instrument Name LM92 00101005 Serial Number LM92 00101005 IP Address 212 23 26 133 SubNet Mask 255 255 255 248 Gateway 212 23 26 134 MAC Address 02 80 AD 20 23 63 Server Name DOS Server Server Version V1 22 Built Dec 1 2003 17 11 19 Protocol Version V2 03 Identify Sensor Clicking the Plot tab begins the Java download Security Warning Do you want to install and run Java Plug in 1 3 signed on 11 05 2000 21 09 and distributed by Sun Microsystems Inc Publisher authenticity verified by VeriSign Commercial Software Publishers C4 Caution Sun Microsystems Inc asserts that this content is safe You should only install view this content if you trust Sun Microsystems Inc to make that assertion CI Always trust content from Sun Microsystems Inc Yes Accept the security warning to begin 112 MKS Instrum
87. ssign a new IP address to each instrument in turn and then install the instruments on your network Proceed to Section 5 3 Device Manager 28 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 5 2 Recommended installation method If 192 168 0 250 is already in use If the above IP address is not available on your network then the instrument must be configured using a PC disconnected from the network Seek advice from your IT staff on obtaining a PC with a fixed IP address within the range of addresses used by your network but not one that you intend to use for an instrument Connect the e Vision directly to the PC using a Cross over cable or if you do not have one of these cables available use a standard patch cable and a hub Assign a new IP address to each instrument in turn and then install the instruments on your network Proceed to Section 5 3 Device Manager MKS Instruments Spectra Products 29 e Vision amp EasyView SP104018 102 June 2006 5 3 Device Manager Before you can begin to use an instrument with EasyView it must be configured with an IP address this is achieved by using the Device Manager Device Manager is located in Start All Programs MKS RGA Applications Tools Device Manager Device Manager Network Admin spectra com 192 168 0 1 H E x The list shows the control units that are connected to the local subnet Close LM102 00104008 WoName LM 192
88. t CO Mass 69 00 Fluorocarbon lt lt Auto gt gt lt amp Mass 32 Mass 36 Mass 40 LLL Checked channels that are not acquired are automatically excluded et The list of common gases can be edited to suit your needs see Section 12 Preferences for details 66 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Editing a Trend channel You can edit a channel by either double clicking it or by highlighting the channel and then clicking the Edit channel button This displays the Channel Properties dialog which allows set up of each channel independently The Channel Properties options are explained below Channel Properties Entry for channel 1 Type Mass Value 2 00 Optionally enter a measurement name or leave blank for auto selection when this view i2 used Channel Name or Alias H Wdrogen Color E Line thickness D Draw Stepped For mass channels you may double click an item from the list Mass Hame Atomic hydrogen Hydrogen Helium Carbon Mitrogen 2 CH group Atomic nitrogen CH3 group Methane 2 Methane f harain Cat IG Cancel Type vw nm Type Mass Mass refers to one of the partial pressure measurements MKS Instruments Spectra Products 67 e Vision amp EasyView SP104018 102 June 2006 Editing a mass channel If Mass is selected as the channel type there are a number of ways of editing the channel
89. t PC The host PC s IP address and network name is also displayed in the title bar of the dialog Device Manager Network Admin spectra com 192 168 0 1 The list shows the control units that are connected to the local subnet LM102 00104008 NoName LM 192 168 0 250 Fixed Shared If no instrument information is displayed it may be that your network uses a scope outside the 192 168 0 0 255 range In this case you can use the lt New gt button and search for the instrument by its serial number Mew Instrument If the instrument that you expected to find was notin the list on the previous dialog there are two possible reasons It may not have responded because itis not switched on or there may be some problem with your network hardware ou should click Cancel and investigate these possibilities first However it may be that the control unit network settings do not match the network settings of this computer If you have never successtully connected to the instrument this ts a likely cause In the lather case you should enter the serial number of the new instrument in the boses below and choose Continue Be sure to discuss changes to your network setup with your network adminsitrator Change Network Settings Enter the senal number of the control unit to be re configured LM E i Continue Cancel Enter the serial number of the instrument you wish to configure in the text box and click the lt Co
90. te This manual is concerned ONLY with the EasyView software package used in conjunction with the e Vision range of instruments MKS Instruments Spectra Products 7 e Vision amp EasyView SP104018 102 June 2006 2 Installation Requirements EasyView operates under Windows 98SE ME NT SP6 or higher 2000 and Windows XP environments running on an IBM compatible PC It is recommended that ALL available updates for your particular operating system have been applied before the installation of EasyView The EasyView Installer will search your system for files required for the correct operation of the program these may include Service Packs Windows Installer Updates or newer versions of Internet Explorer This process is automated and simply requires the user s permission to install the required components Note You will need to have administrative privileges to install these updates Once the required updates have been applied or if your machine already meets the software requirements the first page of the EasyView Installation Wizard appears i MKS RGA Software Setup Quick Setup Enter your User Information and the Zar Key Full Name SOFTWARE Organization SPECT R SENSORTECH LTD rom CO The Quick Setup Rey ensures the installation wizard creates the appropriate setup for your requirements ou wll find the key on pour CD or jewel case MES Spectra Products 4 Back Cancel See Section 3 for
91. the EasyView programs Once added annotations cannot be removed as they become part of the measurement data 80 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 View Global Properties You can set the global properties of the views from the Graph Settings under Preferences ee EasyView EasyView LM 6 01603006 Recipe View Window Help Pascal we mbar Print l Torr Prink Setup mTorr Exit S Auto view Fo Front 1x10 4 Allow DemoiTest Data Show recipe error message boxes 1x10 05 Graph Settings The Graph Preferences dialog will appear Graph Preferences Y Axis Label 3 x Axis Label Item Size Color Font Style Bold Label Font DD D CR fp Aral abcdeABCDE m ae Reset to defaults Cancel Here you can manipulate the various options used in the graphs size colour font and the style of each item The dialog changes to reflect any changes that are made MKS Instruments Spectra Products 81 e Vision amp EasyView SP104018 102 June 2006 Clicking on the lt Reset to Defaults gt button will return all the settings to their factory defaults The following diagram shows all the options that can be set If the properties cannot be changed for a selected item they will remain greyed out Trend Line 1 15 Border Title Font Plot Area Gs Trach Panie Minor Tick Marks d Ee 7 e 3 e SH Zen
92. the new measurements settings Expand the Y Axis scale to include the new recommended bounds Changes either the maximum or minimum Y axis setting to incorporate the new settings 74 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 For example if you increase the electronic gain the minimum displayed pressure would be changed to match the smaller pressure that could now be measured The maximum pressure displayed would remain the same If the electronic gain was reset to its previous value the Y Axis would not change MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 75 Configuring the trend time axis Click lt Next gt on the Trend properties dialog to bring up the Time axis and legend properties dialog Time Axis Display and Legend Properties Each pane shares a common set of properties for the Time Axis Time Axis Clock start Elapsed jn dd 0 win mmf0 ss e Display elapsed time start Span 0 dd fo hh 10 mmi0 ss V Scroll display Display days Minor time ticks Elapsed Time Origin Display clock time e View creation time C Specific data source start time Key Legend C None e Top legend C Side legend lt Back Cancel Time axis properties This option will display the time axis using real time as calculated by the PC clock Display clack time This option displays the time axis as an elapsed time The or
93. these will also be visible when using Recall 60 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 7 Changing Adding Views in EasyView The RGA data gathered by the instrument can be displayed on screen in a number of different views To modify any view manually highlight the view and either right click or click on the properties button on the chart display setup toolbar 5 View types Swept Measurement view this is a display of partial pressure versus mass Bar chart shown below where there is a single bar shown per mass Fal Barchart With Trend Interactive 1 AsBarchart D x pen z m e 3 2 2 oO i ARRE LEREN E A f _ 5 10 15 20 gt 20 30 30 40 45 50 Scan 2 JI Another form of the swept measurement view is the Analog view where there are a number of bars per mass giving a pseudo analog view i Analog Interactive 1 As Analog 1x10 Pressure Tha 30 60 70 40 50 Scan 135 MKS Instruments Spectra Products 61 e Vision amp EasyView SP104018 102 June 2006 Trend view where a variable versus time can be plotted es Analog Interactive 2 As Trend LIVE bass 2 00 i Mass 14 00 Day D Hydrogen i Nitrogen 14 00 00 08 7 D e D0 7 35e 008 Mass 15 00 Nass 16 00 kass 17 00 lass 18 00 kass 28 00 Hydrocarbon 15 Oxygen 16 OH group Water Nitrogen 1 83e 007 1 59e 007 1 90e 006 7 89e 006 1 11e 006 Oxygen Argon 36 9 46e 008 5
94. ties for Trend Pane 1 v Scale properties for the selected pane C Use the individual measurement properties to set the Y axis scale Iv e Use the following explicit settings Current maximum value is 1 0e 002 Max value Min value W Log scale 0 0001 33 fB 35e 008 Restrict these values to the maximum bounds of the acquired data C Stack channels of digital data General properties for the selected pane M Grid Y axis Title Trend 1 Units Y axis Minor ticks Percentage of total window height for this pane E Subsequent Axis autoranging strategy for the selected pane If the bounds of the data subsequently change during the lifetime of this view C Leave the Y axis unchanged e Force the Y axis scale within the new recommended bounds Expand the Y axis scale to include the new recommended bounds e Each trend pane can have a different Y Axis setup To set up each pane select the pane you want to edit from the pull down list box Show Properties for Trend Pane 1 Y Axis Scale Properties The scale can be set in a number of ways t Us Individual measurement properties to set the y axis scale By selecting the above option the scale will be defined by the measurements that the displayed channels use E g full scale on the axis will be equal to the full scale pressure of the measurement 72 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Checking the Use the following
95. tion is now displayed if no instrument has been found check that power has been applied and the network cable is attached For further troubleshooting advice see Section 17 Troubleshooting Device Manager Network Admin spectra com 192 168 0 1 SE Ei The list shows the control units that are connected to the local subnet Close LHI02 00104008 WoName LM 192165 0 250 Fixed Shared Ready Details e Configure e Additional registered connections There are no additional registered connections Details Help F1 Device Manager Controls i EE lt Details gt View auto discovery log displays the action history of Device Manager when searching for instruments Auto Discovery Log Auto discovery log at 29 04 2004 10 09 13 1 Version 3 server info received from 10 10 54 76 windows senal instrument server This server must be upgraded to work with this software 2 Yersion 3 server into received from 10 10 54 64 windows seral instrument server This server must be upgraded to work with this software Cancel Refresh refresh the current list of found instruments MKS Instruments Spectra Products 33 e Vision amp EasyView SP104018 102 June 2006 lt Configure gt Browse to this instrument starts your web browser and takes you to the home page of the instrument For more information on the web applet see Section 16 Java Web Applet Change the IP addres
96. tion of a control unit or to Install a control unit for the first time Back Cancel Help For now click the option to skip hardware auto detection as shown and continue to setup the EasyView software MKS Instruments Spectra Products 23 e Vision amp EasyView SP104018 102 June 2006 Pressure Units dialog Setup Wizard Pressure Units Choose the pressure units to be used throughout the full software suite Process Eye Professional can calculate and display pressures in any of the following units Select one of C Pascal e mbar C torr C milliT orr lt Back Cancel Help Here you may choose the unit of pressure EasyView will use by default This may also be changed later while using EasyView by selecting Recipe Preferences on the menu bar Disk Storage Location dialog Setup Wizard Disk Storage Location Choose a location on the local computer where recipes and data files will be stored Your standard Windows setup places data files for the current user on drive C There is 18437 MB of free space on this drive The Setup Wizard will automatically create a separate Process Eye folder on this drive for storing data files required by or generated by the application Is this default installation acceptable Yes CN S Log file settings cent ms The default location for storing recipes views and data is Current User My Documents If multiple users are to use the same PC logg
97. tions are explained below ful db Start Mass control To change the start mass of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass number Note that the first mass cannot be less than 1 and that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit H 50 afe Mass Span control kert To change the mass span of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass span Note that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit MKS Instruments Spectra Products 43 e Vision amp EasyView SP104018 102 June 2006 GC Peak Center e Scan Mode control The scan mode is the method used to report the peak height The options are Peak Centre Peak Max or Peak Average Accuracy e Accuracy control Scan accuracy determines the amount of averaging carried out for each reading A high accuracy number provides a clean scan but increases scan time The accuracy ranges available are from 0 to 8 io 1 333e 004 mbar e Electronic Gain control The electronic gain of the pre amplifier can be changed by selecting one of the values from the drop down list Depending on the type of instrument the allowed values are 1 100 and 20000 The higher the gain selected the smaller the partial pressure that can be measured this may cause peaks of
98. trend view can be associated with any measurement Along with the RGA data it is also possible to display signals from the analog digital inputs and other user variables The only limitation is that the X axis is always time Adding a Trend view To add a trend view simply click on the new trend button on the fick EasyView control page Alternatively select lt New Trend Window gt from the lt Window gt pull down menu Window Help deck Mew Trend Window The first dialog displayed is the Trends Display Pane and Channel Properties By default 13 of the 15 masses are enabled but you can enable and disable channels by checking the box next to the channel Clicking on the Use standard view will set the channels to be the same as those in the default trend Trend Display Pane and Channel Properties Set the channels to be associated with this Trend View Individual panes display their own selection of channels from a common list of 15 items Trend Pane 1 Channel Name Measurement Add Pane Mass 2 Hydrogen BarChart1 Mass 4 Helium BarChart1 Mass 12 Carbon 12 BarChart1 Mass 14 Nitrogen 14 Ba hat Edit Channel gt gt Mass 15 Hydrocarbon 15 BarChart1 Mass 16 Oxygen 16 BarChart1 Mass 17 OH group BarChartl Mass 18 Water BarChart Tec Mass 28 Nitrogen BarChart1 View gt gt Oxygen BarChart1 Argon 36 Dat hat Argon Dat hat Mass 44 Carbon dioxide BarChart1 C Mass 64 00 Photoresist 64 lt lt Auto gt g
99. umber directly into the box or click on the arrows to increase or decrease the mass number Note that the first mass cannot be less than 1 and that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit H EN DE Mass Span control tert To change the mass span of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass span Note that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit MKS Instruments Spectra Products 41 e Vision amp EasyView SP104018 102 June 2006 Accuracy 5 e Accuracy Control Scan accuracy determines the amount of averaging carried out for each reading A high accuracy number provides a clean scan but increases scan time The accuracy ranges available are from 0 to 8 A Points per peak control The number of measurements each full mass is divided into 8 16 or 32 The higher the number of points per peak selected the better the representation of peak shape However scan time and the amount of data generated will increase If the data is to be imported into Excel for instance choose a lower value iio 1 333e 004 mbar e Electronic Gain control The electronic gain of the pre amplifier can be changed by selecting one of the values from the drop down list Depending on the type of instrument the allowed values are 1 100 and 20000 The higher the gain selected the smal
100. utton to make the legend key visible or invisible Click the table view button to move the legend key either to the left of the trend or above the trend MKS Instruments Spectra Products 79 e Vision amp EasyView SP104018 102 June 2006 Adding annotation to a Trend To add annotation click the lt Annotation gt button this will bring up the Annotations dialog box i Annotations Time of annotation 15 08 2002 09 47 05 Note Cancel Here you can enter text into the Note text box when your annotation is complete press the lt OK gt button By default the time of annotation will be the current time although you can select a new time by using the time and date list boxes To add an annotation to a trend click the lt Trend Annotation gt button this will change the cursor to a pen ES GG Trend Peaks External Total Pressure Peaks External Total Pressure Oxygen Extemal Total EE 09 25 00 09 30 00 09 35 00 09 40 00 09 45 00 09 50 00 Time 4 You can move the cursor along the trend line until the event that you want to annotate has been selected Clicking on the trend at this point will bring up the annotation dialog but now the time will be set to the time at that position on the trend Currently the only way to view these annotations is to recall a saved file with annotations and then save this file as a text file The annotations cannot be viewed in any of
101. y DHCP Obtain an IP address from your DHCP server BOOTP Set IP Address Once the options have been configured click on this button to write the configuration settings to the sensor When finished with this dialog click the lt Done gt button to exit the dialog 120 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Security The default Settings password can be changed here Enter and confirm your new password Enter New Password Re Enter Password ml Set Password Set Password Once the password has been changed click on this button to write the new password to the sensor When finished with this dialog click the lt Done gt button to exit the dialog MKS Instruments Spectra Products 121 e Vision amp EasyView SP104018 102 June 2006 Configuration The Configuration tab provides a detailed report on the sensor s configuration settings 122 MKS Instruments Spectra Products e Vision amp EasyView SP104018 102 June 2006 Diagnostics Diagnostics Technology for Productivity Spectra Products Serial Number LM98 00104016 Min Max Value Result 450 Volts NA NA NA 15 Volts 16 5 13 5 15 195 130 Volts 160 0 140 0 149 29 5 Volts 4 75 5 35 4 9750 15 Volts 13 5 17 5 15 088 Electron Energy 68 0 30 0 57 739 Extractor NA NA NA SEM Supply NA NA HA OK Java Applet Window Diagnostics can only be performed whilst in the Plot mode with

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