Home

- Brooks Instrument

1. Appendix C X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 Greek a pyova mm lecrpovica m Brooks f onoir arua CE yow Baits Cey op pe 1006 ms Hilecrpo Moym nz EMC vr BO ST5 EEC Cmoc hmote galere asi mpoeoyr Kota Ty Emyn tou KOMM peropop coros TO Gola voks p ta va onanere pe Oppavo mau pipou eua Doig pov odios poro qey grumo kat TY vb H Brooks koni viva mp jm ite ven soiree Kenda r orok ue 55 vu moroso non CE Em m tmu er CORTO GRO 600 I abra vg APTTO GORO I SLETE Kadun vo Omo VO GEBEN ekorn EAN PEEL vp Koi vu MOMENT Dalparot Hua Ch rubro poi miaou Eurima tov muni m me vi PET Gapida Eav eivai eeapjidsiuo api va Eten pil arum LATEL KR S IDMYV Tb va Ar Kies TT COMTE TO ELE DOU To tou va OUV EETOI ato Perki mopiinua erras crumuobliiberr va Sopa ena om era Go Expo xata 360 polpez TAL RET METEN WEL K TOA FE 1 TEDI Ch muv cmuor capri arena ma oae xou IPROWOROIOONTOI AEREA rey pa open sis yl va Woy emp maromoiqan CI Baur aper va KOTOAIYSt TE KETDIO d PER VEKO Italiano Questa strumentazione elettrica ed elettronica p
2. 2 Connect the instrument to a source of the same gas used for its original calibration Regulate the Set point to 100 flow and adjust the inlet and outlet pressures to the calibration conditions Verify that the output signal reaches 5 00 volts and stabilizes at that value Vary the command voltage over the 1 to 100 range and verify that the output signal follows the Set point If possible connect a flow measurement device to monitor the actual flow behavior and verify the accuracy of the mass flow instrument If the mass flow instrument performs as described above then it is functioning correctly and the problem may lie elsewhere Table 4 1 lists possible malfunctions which may be encountered during bench troubleshooting For controller models only Apply 5 to the 15 Vdc valve override pin pin 5 of 9 row and verify the output signal falls below 2 When deposition makes it necessary to clean the MF series Smart Mass Flow Controller or Mass Flow Meter use the following procedures 1 Remove the unit from the system 2 Purge with dry nitrogen gas which removes virtually all particulate matter from the device Should contamination persist subject all wetted components to ultrasonic cleaning Following this purge the device thoroughly with dry nitrogen once again 3 If the sensor is contaminated remove the sensor and use a hemostat or tweezers to push a 0 007 diameter piano wire through the flow sensor tube to remove any co
3. Svensk Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet pa signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som stalls f r CE godkannande Om man anvander en annan signalkabel ska kabeln i sin helhet vara skarmad till 80 eller runda typer av anslutningskontakter ska vara skarmade Kabelgenomforingar ska vara av metall alternativt med metalliserad skarmning Kabelns sk rm ska i bada andar vara ansluten till kontakternas metallkapor eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter ar som standard ej metalliserade kablar som anv nds m ste vara 80 skarmade f r att verensst mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse 46 Installation and Operation Manual X TMF MfS MFC eng Appendix D PN 541 C 061 AAG November 2008 MF Smart Series Appendix D Important Safety Instructions ENGLISH IMPORTANT SAFETY INSTRUCTIONS This appendix contains important safety and operating instructions for use with the Thermal Mass Flow Meter Controller Series The instrument complies to the PED PRESSURE EQUIPMENT
4. ie nov ace ur ete dan puns dean R cotes 26 Section 6 M dallistinig ECL 31 Appendix A Gas Conversion Tables ii 36 Appendix B Dimensional Drawings sers 40 Appendix C Translation of CE Marking electrical installation instructions nr nn n rna 42 Appendix D Important Safety Instructions ss 47 Figures Figure 2 1 mechanical installation suse msn is ab dees re De Risen 11 Figure 2 2 Electrical compartment ii 12 Figure 2 3 Open Collector ein ere dida 13 Figure 2 4 MF Profibus Main Power Connection rss aa rese KAR 15 Figure 2 5 Finn mbeting otitis ner ced eed tn Saatat Ye ASSA EHE FARS BOKENS daa a ede 16 Figure 2 6 p c boards with the locations of jumper switches sss eene 17 Figure 2 7 RS 232 interconnection of TMF and PC not for Profibus seen 19 Figure 2 8 RS 485 multidrop interconnection TMFs and PC us 19 Tables Table T T Flow ranges per model tad Ie e aHa 6 Table 2 1 Pin configuration 1 saat e de tati 12 Table 2 2 Electrical connection 9 pins terminal 12 Table 2 3 Electrical connection 6 pins terminal 14 Table 2 4 Dipswitch settings not for Profibus ss 18 Table 4 1 Bench Troubleshooting iiie pee utu Ea eee p Root Haee EP ED yo eee ass 23 Table 5 1 Flow ranges and pressure rating ss 27 Table 5 2 Pre
5. document no 834 L 030 AAG upon request The model MF53S control valve assembly consists of an axially mounted main valve driven by the top mounted pilot valve The main valve should not be disassembled If necessary please return the Mass Flow Controller to the factory 4 6 Housing Dis Assembly Procedure In the event that it is required to adjust the hardware settings in the main or digital board l e jumper settings or switches the following tools are needed 1 1 4 Hex screw for removal of the top cover 2 3mm Hex screw 130 mm long shaft for removal of the housing 25 MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 5 26 Specification PERFORMANCE SPECIFICATIONS Flow Accuracy Repeatability Rangeability Controllability Stability Temperature Effect after re zeroing 0 7 of rate and 0 2 f s at calibration conditions or 0 5 of rate and 0 1 f s at calibration conditions on request 1 f s for model MF63 53 above 1100 In min 0 25 of rate 50 1 within specified accuracy 100 1 i e total operating range Less than 0 5 of rate per year Less than 0 015 C of rate shift from original Calibration over 0 70 C For flowrates over 100 l min gas and ambient temperatures must be equal PHYSICAL SPECIFICATIONS Materials of Construction Mechanical Connections Electrical Connections SPECIFICATIONS
6. 485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore required to connect an RS 485 to a standard PC Figure 2 8 is an interconnection diagram showing two MFs linked to an IBM compatible PC via RS 485 and RS 485 to RS 232 converter The RS 485 bus requires two resistors of 120 one at the end of the bus and one at the beginning near the converter depending on the convertor the resistor may already be installed internally in the converter The RS 485 bus also requires a daisy chain network meaning that the wires are connected as showed in figure2 8 AN NS NO GS 600080 D connector to PC 25 pin 9 pin Jl 7 5 Gnd 4 7 or 2014 RTS or DIR 120 ohm 120 ohm 3 2 RxD IL 213 T TxD RS 485 lt RS 232 converter Figure 2 8 RS 485 multidrop interconnection TMFs and PC Installation and Operation Manual Section 2 Installation X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 2 11 Interconnection with Peripheral Equipment For Profibus communication cable and connectors as specified in Profibus guideline Profibus interconnection guidelines document 2 142 for further details refer to Profibus instruction manual 2 12 Interconnection A shielded cable must be used for interconnection between the device and the pheriph
7. A FOR GASES WHICH CLOG AND CONTAMINATE THE MFC EASILY AN ANTI CLOG LAMINAR FLOW ELEMENT MUST BE ORDERED FOR FLOW RANGES UP TO 3460 min min N2 ADD B DIN ANSI PN40 150 LBS PRESSURE RATING FLANGED CONNECTION FOR THE 1 5 AND 2 MF64S C ENHANCED ACCURACY SPECIFICATIONS 0 5 OF RATE PLUS 0 1 F S Flow range 50 min min to 100 In min D NOT FOR UL LISTED OR RECOGNIZED MODELS 35 MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Appendix A Gas Conversion Tables NOTE USE OF THE CONVERSION TABLES If a Mass Flow Meter or Controller is operated on a gas other than the gas it was Calibrated with a scale shift will occur in the relationship between the output signal and the mass flow rate as a result of the difference in heat capacities between the two gases This scale shift can be calculated by using the ratio of the molar specific heat of the two gases or the sensor conversion factor The gasconversion table is available at Brooks Instrument under document no J 836 D 508 USE OF A MFC M FOR A DIFFERENT GAS THAN IT IS CALIBRATED FOR For use with a different gas type multiply the output reading by the ratio of the gas factor of the desired gas and the gas factor of the calibrated gas Actual gas Output Factor of the new gas Flowrate Reading x Factor of the calibrated gas Example The controller is calibrated for nitrogen 1000mln min full scale The d
8. BrooksEu BrooksInstrument com E Mail BrooksAs Brooksinstrument com E Mail BrooksAm Brooksinstrument com www Brooksinstrument com BROOKS Copyright 2008 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
9. Certification E Wetted parts stainless steel with Viton Buna N PTFE Kalrez or EPDM seals NPT F Tube compression VCR and VCO Option Flanged DIN or ANSI type available Terminal strip accessible via PG 11cable gland Or fixed cable with flying leads EMC Directive 89 336 EEC EN 61326 1 1997 A1 1998 ATEX Directive 94 9 EC KEMA 98ATEX4887 X Type n Certificate EN 50021 1999 EN 50281 1 1 1998 A1 Pressure Equipment Directive 97 23 EC UL and cUL listed with 1 2 inch NPTF or M20 x 1 5mm E us conduit connector for Class Division 2 Groups A B C D and Class II Division 2 Groups F and G and Class III Class Zone 2 Group IIC HA T3C Ambient gas temperature 40 F 150 F 5 C 65 C Class 2 Power Supply 28 Vdc max 370 mA for controllers and 90 mA for meters Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 5 Specification MF Smart Series AL US Protection Grade UL and cUL recognized with Pg11 or M20x1 5 cable gland for Class Division 2 Groups A B C D and Class II Division 2 Groups F and G and Class III Class Zone 2 Group IIC IIB T3C Ambient gas temperature 40 F 150 F 5 C 65 C Class 2 Power Supply 28 Vdc max 370 mA for controllers and 90 mA for meters IP 65 and NEM Table 5 1 Flow ranges and pressure rating Brooks Smart Mass Flow Products Controller Meter Mass Flow Mas
10. D 508 Rev 14 Orifice factor Density kg m 3 Acetylene Ethyne Air Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f 13B1 1 3 Butadiene Butane 1 Butene CIS 2 Butene Trans 2 Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetrafluoride f 14 Carbonyl Fluoride Carbonyl Sulfide Chlorine Chlorine Dioxide Chlorine Trifluoride Chlorodifluoromethane f 22 Chloroform Trichloromethane Chloropentafluoroethane f 115 Chlorotrifluoroethylene Chlorotrifluoromethane f 13 2 Chlorobutane Cyanogen Cyanogen Chloride Cyclobutane Cyclopropane Deuterium Diborane Diboromodifluoromethane f 12B2 1 2 Dibromotetrafluoroethane f 114B2 Dichlorodifluoromethane f 12 Dichlorofluoromethane f 21 Dichlorosilane Diedthylsilane 2 2 Dichloro 1 1 1 Trifloroethane 1 2 Dichloroethane Ethylene dichloride 1 2 Dichlorotetrafluoroethane f 114 1 1 Difluoro 1 Chloroethane 1 1 Difluoroethane 1 1 Difluoroethylene Difluoromethane f 32 37 Installation and Operation Manual Appendix A X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 Gas Conversion Table continued Dimethylamine CH3 2NH Dimethylether CH3 20 2 2 Dimethylpropane C CH3 4 Disilane Si2H6 Ethane C2H6 Ethanol C2H60 Ethylacetylene Ethyl Chloride Ethylene Ethylene Oxide Fluorine Fluoroform f 23
11. EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 80 D of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden worden Het scherm moet worden verbonden met aarde Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 80 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Norsk Til den det ang r Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger
12. Flow is higher than desired Partially clogged sensor Clean sensor see cleaning procedures Section 4 3 Instrument grossly out of calibration Flow is lower than desired Partially clogged restrictor Replace or clean restrictor Controller oscillates applicable to MFC Pressure drop or inlet pressure deviates from calibrated values Oversized orifice Valve out of adjustment Unstable inlet pressure Defective p c Board Adjust pressures Check orifice size Adjust valve see calibration procedures section 4 4 Check external pressure regulator Contact Brooks Instrument 23 Section 4 Maintenance MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 4 3 Cleaning Procedures 4 4 Calibration Procedure 24 Bench Troubleshooting 1 Establish a proper connection between the MF series Smart Mass Flow Meter or Controller and a 15 Vdc to 28 Vdc power supply and connect an output signal readout device 4 digit voltmeter recommended to pins 5 of 6 row and 4of 6 row of the terminal strip Switch on the power and allow the instrument to warm up for 45 minutes In case of a Controller model adjust the Set point to zero Do not connect the device to a gas source yet Observe the output signal and if necessary perform the zero adjustment procedure section 3 2 If the output signal does not zero properly please contact Brooks Instrument
13. Germane Germanium Tetrachloride Halothane Helium Hexafluoroacetone Hexafluorobenzine Hexafluoroethane f 116 Hexafluoropropylene HFP Hexam ethyldisilane HMDS Hexane Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen lodide Hydrogen Selenide Hydrogen Sulfide lodine Pentafluoride Isobutane Isobutene Isopentane Krypton Methane Methylacetylene Methyl Bromide 3 Methyl 1 butene Methyl Chloride Methyl Fluoride Methyl Mercaptan Methyl Silane Methyl Trichlorosilane Methyl Vinyl Ether Monoethyanolamine Monoethylamine CH3CH2NH2 Monomethylamine Neon Nickel Carbonyl Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride 38 Installation and Operation Manual X TMF MfS MFC eng Appendix A PN 541 C 061 AAG November 2008 MF Smart Series Gas Conversion Table continued Orifice factor Density kg m 3 Nitrogen Trioxide Nitrosyl Chloride Nitrous Oxide Octofluorocyclobutane Oxygen Oxygen Difluoride Ozone Perchloryl Fluoride Perfluorobutane Perfluoro 2 Butene Perfluoromethyl vinylether PMVE Perfluoropropane Pentane n Pentane Pentafluoroethane Phosgene Phosphine Phosphorous Pentafluoride Phosphorous Trifluoridide Propane same as CH3CH2CH3 Propylene Propene Rhenium Hexafluoride Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluorid
14. Most IBM compatible PCs are equipped with one or more RS 232 ports COM ports as standard The RS 232 usage and definitions are very diverse On the MF Smart Mass Flow device the TXD signal is the output signal of the device and the RxD the input signal The communication terminals can be directly connected to a serial COM port of any PC The other part of the terminals can be connected to Brooks model 0152 0154 Microprocessor based Readout and Control Electronics Or power supply only This model provides the power supply for Smart Mass Flow devices as well as providing local readout and displaying the analogue output signals Figure 2 7 shows the interconnection diagram of the RS 232 configuration The pin assignment on an IBM Compatible PC This is standard for RS 232 Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 2 Installation MF Smart Series D connector to PC 25 pin 9 pin 715 Gng HOS ve Z NS VA ND VG NG GA PNG NG NO Nm x 2 SY 9 S SY N SVS SS ELSE ES 000606 3 2 RxD 2 3 TxD Figure 2 7 RS 232 interconnection of TMFs and PC not for Profibus The RS 485 is essentially a multidrop connection It allows a maximum of 32 devices to be connected to a computer system IBM compatible PCs are not equipped with RS
15. Valve override input n a 6 NC Not connected 7 CMDCOM Setpoint return n a 8 VCMD 0 1 5 Vdc Setpoint input n a 9 ICMD 0 4 20 mA Setpoint input n a 12 Abbreviation for the function description can be found under the top cover Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 2 Installation MF Smart Series DO Digital communication pins 1 and 2 pins 1 and 2 are available for connecting the device to the TxD A or RxD A lines for RS 232 RS 485 communications NOTE Either RS 232 or RS 485 should be specified at the time of ordering See section 2 7 for details of how to configure the p c board Alarm pin 3 A TTL Open Collector alarm output is available Type of used transistor is NPN x 2 9 S K S amp I N NI S S S s SS EL TESS AC 0000000 O R load gt Imax 25mA alarm output Figure 2 3 Open Collector 5 Vdc reference pin 4 A 5 Vdc ref voltage is available on pin 4 This can be used to set the Set point with the aid of an externally locate potentiometer 10 turn 2 KOhm suggested Valve override pin 5 Controller models only To open or close the control valve independently of the Set point signal e g for safety reasons pin 5 is available to carry a valve override
16. When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during removal installation or other handling of internal circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive bag or other conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide techno
17. an earth terminal Card Edge Connectors are non metallic as standard The cables used must be screened with 80 shielding to comply with CE certification The shielding should be connected to an earth terminal 42 Installation and Operation Manual X TMF MfS MFC eng Appendix C PN 541 C 061 AAG November 2008 MF Smart Series Espanol Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magnetica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de se al cuando se va a utilizar un equipo con marca CE Calidad del cable de se al prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n Si usted adquiere su propio cable de se al deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 8095 Cuando utilice conectores del tipo D 6 Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deberan utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo tarje
18. proche de z ro Dans le cas contraire le personnel risque de se blesser gri vement et ou d endommager le mat riel 6 Bien s assurer que les pi ces d origine Brooks sont utilis es pour des interventions d entretien Des pi ces de substitution pourraient affecter les performances de l appareil et engendrer de graves disfonctionnements 49 Installation and Operation Manual Appendix D X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 NORSK VIKTIG SIKKERHETS INSTRUKS Dette tillegget inneholder viktige sikkerhets og drifts instruksjoner for bruk av Brooks metall rar mengde maler Thermal Mass Flow Meter Controller Series Instrumentet tilfredstiller PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Kontakt lokale myndigheter for nasjonale eller lokale sikkerhetskoder og andre installasjonskrav SIKKERHETS INSTRUKS 1 Les alle instruksjoner og sikkerhetsanmerkninger for 1 mengde m leren Flow meteret og 2 alle aktuelle seksjoner av instruksjons manualen f r bruk av produktet 2 ADVARSEL Bruk ikke dette instrumentet utover de spesifikasjonene som er gitt instruksjons boken Dersom advarslene ikke f lges kan det resultere i alvorlig personskader og eller deleggelse av utstyret 3 Kontroller at instrumentet er skikkelig koblet b de elektrisk og mekanisk 4 DRIFT a Start forsiktig Ventilen pnes langsomt for unng str mning sjokk b Kontroller at det ikke er lekkasjer rundt m lerens i
19. signal Leave floating i e not connected to allow for normal control operation 5 Vde Valve Open 0 Vdc Valve losed IA IV NOTE The valve override command on pin 5 takes precedence over the communication mediated valve override command Analogue Setpoint Input pins 7 8 or 9 Controller models only The MF series Smart Mass Flow Controller can be used either with a current or voltage Set point To use the current Set point connect the Set point signal to pin 9 and the Set point return signal to pin 7 on the terminal jumper J1 must be in place refer to Figure 2 6 To use the voltage Set point connect the Set point signal to pin 8 and the Set point return to pin 7 Power Supply pins 1 and 2 The power supply is connected via pin 1 15 to 28 Vdc and pin 2 power supply common Installation and Operation Manual Section 2 Installation X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 Table 2 3 Electrical connection 9 pins terminal pin Function Controller Meter CDD 1 VSUP 15 Vdc to 28 Vdc Power supply o 2 SUPCOM Power supply common i 3 NC Reserved n a n a 4 SIGCOM Flow signal output common 5 VSIG 0 1 5 Vdc Flow signal output 6 156 0 4 20 mA Flow signal output Abbreviation for the function description can be found under the top cover Signal Out
20. used with reactive gases some of which may be toxic contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be purged for a significant time with Nitrogen before and after use on reactive gasses Figure 2 1 Mechanical installation Recommended installation procedures a All models should be mounted in places that are relatively free from mechanical shocks and vibration b Leave sufficient room for access to the electrical components c Install in a manner that allows the instrument to be easily removed for cleaning d The mounting position of the Smart Mass Flow Meter or Controller can be either horizontal or vertical in case process pressures are smaller than 10 bar e For higher process pressures a horizontal installation is preferred since these pressures may cause a thermal siphon effect of the output signal at zero flow conditions and degrading specifications NOTE The control valve of the MF series Smart Mass Flow Controller provides precision control and is not designed for positive shut off If positive shut off is required it is recommended that a separate shut off valve be installed in line downstream from the MF series Smart Mass Flow Controller NOTE If the power supply to the MF series Smart Mass Flow Controller is interrupted a NORMALLY CLOSED valve will be fully closed while a NORMALLY OPEN valve will be fully open The NORMALLY OPEN control v
21. vedligeholdes Bem rk at anvendelse af uoriginale reservedele kan forringe instrumentets specifikationer og dermed ge risikoen for skader Desuden kan anvendelse af uoriginale reservedele medf re risiko for brand elektrisk st d eller forringet virkem de 47 Installation and Operation Manual Appendix D X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 NEDERLANDS BELANGRIJKE VEILIGHEIDSINSTRUCTIES Deze appendix bevat belangrijke veiligheidsinstructies voor het gebruik van de Themal Mass Flow Meter Controller Series Deze instrumenten vodoen aan de PED Pressure Equipment CE Directive 97 23 EC wet op het vervaardigen en distibueren van drukvaten binnen de Europese lidstaten De locale authoriteiten kunnen u op de hoogte stellen van de daar geldende additionele en of locale eisen voor installatie en gebruik VEILIGHEIDS INSTRUCTIES 1 Lees voor het in gebruiknemen alle instructies en waarschuwingen op de flowmeter en in de gebruiks handleiding 2 WAARSCHUWING Gebruik dit instrument niet buiten de in de gebruiks handleiding vastgelegde MAXIMALE GEBRUIKS DRUKKEN Het niet in acht nemen van deze waarschuwingen kunnen leiden tot persoonlijke verwondingen en of beschadiging van de meetapparatuur 3 Overtuig u v r het in gebruik nemen dat het instrument volgens de geldende voorschriften is ingebouwd in de leiding en aangesloten op het eventuele spanningsnetwerk 4 INGEBRUIK NEMEN a Langza
22. 28 Power requirements Power Consumption Mass Flow Meters Power Consumption Mass Flow Controllers Temperature Leak Integrity Security Warm up time Damping not for Profibus Response Meters Settling Time Controllers 15Vdc to 28Vdc use only 24 Vdc for NO valves and for use of MF51 24Vdc only for all Profibus units Models MF60 S MF61 S MF63 S and MF64 S for 24 Vdc 10 at 80 mA for 15 Vdc 5 at 90 mA Also applicable for Profibus Models MF50 S MF51 S and MF53 S for 24 Vdc 10 at 140 mA for 15 Vdc 10 at 185 mA Also applicable for Profibus NOTE With valve override function activated the total power consumption specifications are for 15 Vdc at 285 mA or for 24 Vdc at 370 mA Also applicable for Profibus Both ambient and process gas 0 70 C Outboard 1 x 10 9 mbar I sec Helium To prevent unauthorized setting or reranging of span or zero these functions are only accessible via the Brooks Smart Control model 0160 or using Smart DDE model 0162 lt 10 minutes 1 F S accuracy Performance within specifications 45 minutes Damping from 0 to 10 seconds is possible for the flow output signal default setting is 0 5 sec Standard response of the flow output signal 1 sec Response of better than 0 2 seconds on request Standard 1 sec Settling time or up to 0 2 seconds is possible to within 2 full scale of final value for any command Set po
23. ANT CLOG LAMINAR FLOW ELEMENT MUST BE ORDERED FOR FLOW RANGES UP TO 3460 mln min N2 ADD C ENHANCED ACCURACY SPECIFICATIONS 0 5 OF RATE PLUS 0 1 F S Flow range 50 mln min to 100 In min D NOT FOR UL LISTED OR RECOGNIZED MODELS 31 Installation and Operation Manual Section 6 Modellisting X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 MASS FLOW CONTROLLER F S FLOWRANGES 1001 1100 In min MASS FLOW CONTROLLER F S FLOWRANGES 1101 1300 In min MASS FLOW CONTROLLER F S FLOWRANGES 1301 1600 In min MASS FLOW CONTROLLER F S FLOWRANGES 1601 1900 In min MASS FLOW CONTROLLER F S FLOWRANGES 1 901 2200 In min MASS FLOW CONTROLLER F S FLOWRANGES 2201 2500 In min MECHANICAL CONNECTIONS ITHOUT ADAPTORS 9 16 18 UNF ONLY FOR MF50 60 51 61 53 63 ja TUBE COMPRESSION FITTINGS ONLY FOR MF50 60 51 61 18 TUBE COMPRESSION FITTINGS ONLY FOR MF50 60 51 61 18 TUBE COMPRESSION FITTINGS ONLY FOR MF50 60 51 61 VCO ONLY FOR MF50 60 51 61 ONLY FOR MF50 60 51 61 6mm TUBE COMPRESSION FITTINGS ONLY FOR MF50 60 51 61 mm TUBE COMPRESSION FITTINGS ONLY FOR MF50 60 51 61 14 BSP F ONLY FOR MF50 60 51 61 BSP F ONLY FOR MF53 63 BSP F ONLY FOR MF53 63 lt lt lt lt lt lt o 0001820 gt gt gt gt gt Olay e EG BERG BENE BENE BEN
24. Brooks Instrument tilbyr levert med utstyret egnet kabel som m ter de krav som stilles til CE sertifisering Dersom kunden selv velger kabel m kabel med fullstendig 80 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes metallet i pluggen eller nippelen i begge ender over 360 tilkoblet elektrisk jord Kort kantkontakter er normalt utf rt i kunststoff De tilh rende flatkabler m v re utf rt med fullstendig 80 skjerming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav Portugu s O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE sera necessario ter uma aten o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certifica o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 80 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas met lica
25. CE DIRECTIVE 97 23 EC Consult local authorities as to national and or local safety codes and any additional installation requirements SAFETY INSTRUCTIONS 1 Please read all instructions and cautionary markings on 1 the flowmeter and 2 all appropriate sections of the Instruction and Operating Manual before using this product 2 WARNING Do not operate this instrument in excess of the specifications listed in the Instruction and Operating Manual Failure to heed this warning can result in serious personal injury and or damage to the equipment 3 Please make sure that the instrument is properly connected to electrical and pressure sources 4 OPERATION a Slowly initiate flow into the system Open process valves slowly to avoid flow surges b Check for leaks around the meter inlet and outlet connections If no leaks are present bring the system up to operating pressure 5 WARNING If this equipment is not properly serviced serious personal injury and or damage to the equipment can result from potentially high operating pressures Please make sure that the process line pressure is removed prior to service 6 Please make sure that original parts of Brooks are used when the device requires servicing Note however that look alike substitutions and procedures can affect the product s performance and place the save operation of your process at risk It furthermore may result in fire electrical hazards or improper operation DANISH VIGTI
26. DNt0O PIG 120 MF64 ONLY gt 2 o gt gt gt 2 2 2 000 DIN DN100 PN40 2D MF64 ONLY DIN DN100 PN64 2D MF64 ONLY ANSI 150 LBS 2D MF64 ONLY 6 ANSI 300 LBS 2D MF64 ONLY ANSI 600 LBS 2D MF64 ONLY DIN DN 150 PN 16 2D MF64 ONLY DIN DN 150 PN 40 2D MF64 ONLY DIN DN 150 PN 64 2D MF64 ONLY 150 LBS 2D MF64 ONLY 300 LBS 2D MF64 ONLY DIN DN200 PN10 2D MF64 ONLY DIN DN200 PN16 2D MF64 ONLY DIN DN200 PN25 2D MF64 ONLY DIN DN200 PN64 2D MF64 ONLY SPECIFY Q o 1 1 1 gt gt 2 2 AIR 1 1 1 p 68 60 Lez 33 Installation and Operation Manual Section 6 Modellisting X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 2 2 5 gt lt o gt gt m 2 gt EPDM ONLY FOR VALVE SEAT 2D IN m o o w 217 m 7 O TI N NPUT OUTPUT 0 5Vdc 0 5 Vdc amp 0 20mA INCL RS 232 9600 BDS 20mA 4 20 mA amp 1 5Vdc INCL RS 232 9600 BDS 0 20 mA 0 20mA amp 0 5Vdc INCL RS 232 9600 BDS 1 5V dc 1 5 Vdc amp 4 20mA INCL RS 232 9600 BDS DIG COMM DIGITAL COMMUNICA TION ONLY PROFIBUS DP PNO CERTIFIED 831 A 023 and 541 C 068 AAG 4 AL __ ef DI e el HE EEE LI 2 ri NEE 34 Installation and Operation Manual X
27. E BENE ENE KER lt 5 N x 1 16 12SAE MS ONLY FOR MF53 63 2 TUBE COMPRESSION FITTINGS ONLY FOR MF50 60 51 61 53 63 14 TUBE COMPRESSION FITTINGS ONLY FOR MF53 63 TUBE COMPRESSION FITTINGS ONLY FOR MF53 63 Y NPT F ONLY FOR MF53 63 N NPT F ONLY FOR MF53 63 Y NPT F SEE OPTION B ONLY FOR MF53 63 64 y VCO 200 In min max ONLY FOR MF50 60 51 61 53 63 14 VCO ONLY FOR MF53 63 Y VCR 200 In min max ONLY FOR MF50 60 51 61 53 63 ANSI 72 150 LBS ONLY FOR MF53 63 ANSI 7 300 LBS ONLY FOR MF53 63 ANSI 1 150 LBS ONLY FOR MF53 63 ANSI 1 300 LBS ONLY FOR MF53 63 ANSI 1 150 LBS see option B for MF64 ONLY FOR MF53 63 64 ANSI 172 300 LBS ONLY FOR MF53 63 N N IN IN IN IN IN IN IN IN ININININININININININ lt Z lt JAISEITIOITRImMIDIOIBIX 32 Installation and Operation Manual X TMF MfS MFC eng Section 6 Modellisting PN 541 C 061 AAG i November 2008 MF Smart Series ANSI2 150 LBS see option B for MF64 ONLY FOR MF53 63 64 ANSI2 300 LBS ONLY FOR MF53 63 T VCO ONLY FOR MF53 63 3 4 VCR ONLY FOR MF53 63 2 NPT SEE OPTIONS B MF64 ONLY ANSI 3 150 LBS MF64 ONLY 300 LBS MF64 ONLY 600 LBS 2D MF64 ONLY DIN DN80 PN40 2D MF64 ONLY DIN DN80 PN64 2D MF64 ONLY DIN DN80 PN100 2D MF64 ONLY 150 LBS MF64 ONLY 300 LBS MF64 ONLY 4 600 LBS 2D MF64 ONLY DN
28. F53S Brooks MF series Smart Mass Flow Controllers control gas flows The flow ranges per model are listed in Table 1 1 Table 1 1 Flow ranges per model Mass Flow Mass Flow Flow Ranges Controller Meter Model Model min f s max f s Unit MF50 S MF60 S 0 00 30 In min MF51 S MF61 S 20 100 In min MF53 S MF63 S 100 2500 In min MF64 S 18 2160 m n h refers to normal conditions i e 0 C 1013 25 mbar The Brooks MF series Smart Mass Flow Meter is a stand alone instrument with microprocessor based electronics on board The MF series Smart Mass Flow Controller has an integrally mounted control valve module with which table gas flows can be achieved MASS FLOW METERS The supplied inlet adapter has a built in upstream inlet filter for flow straightening Besides reducing the effects of changes in upstream piping this also protects the measuring element from occasional debris in the flow stream In addition it eliminates the need for extra expensive inlet filtering Flow signal adjustable via software not for Profibus 0 5 or 1 5 Vdc or 0 20 mA or 4 20 mA Output damping provides a constant scale reading under fluctuating flow rate conditions Standard factory setting 0 5 sec not for Profibus Output limiting prevents possible damage to delicate acquisition devices by limiting the output to 0 5 25 Vdc on the voltage signal output and 0 21 mA on the current o
29. GE SIKKERHEDSINSTRUKTIONER Denne instruktion indeholder vigtige oplysninger om sikkerhed og anvendelse af Brooks Thermal Mass Flow Meter Controller Series Instrumentet opfylder PED trykudstyrs CE direktivet 97 23 EC Kontakt de lokale myndigheder for oplysning om nationale og eller lokale sikkerhedskrav og yderligere krav i forbindelse med installationen SIKKERHEDSINSTRUKTIONER 1 L s alle instruktioner samt faremarkeringer p 1 flowmeteret og 2 i alle relevante sektioner af instruktions og brugervejledningen fer instrumentet tages i brug 2 ADVARSEL Anvend ikke dette instrument udover de specifikationer som er angivet instruktions og brugervejledningen Manglende opmaerksomhed pa denne advarsel kan resultere i alvorlige personskader og eller skader pa udstyret 3 Veer sikker pa at instrumentet er korrekt tilsluttet elektrisk og mekanisk 4 ANVENDELSE a Luk langsomt flow ind i systemet For at undg tryksted abnes afsp rringsventilen langsomt b Kontroller ind og udgangstilslutningerne for l kager Hvis ingen l kager findes kan systemet bringes op pa normalt procestryk 5 ADVARSEL Hvis vedligehold af instrumentet ikke sker som anbefalet er der i tilf lde af h je tryk risiko for alvorlige skader p s vel personer som p instrumentet S rg derfor for at instrumentet er trykl st f r det afmonteres for service 6 V r opm rksom p kun at anvende originale Brooks reservedele n r instrumentet skal
30. Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series Brooks MF Smart Series MFC MFM Smart Mass Flow Controller BROOKS www BrooksInstrument com IN ST RUMENT Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 Dear Customer We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www Brooksinstrument com Yours sincerely Brooks
31. Instrument Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Products Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference e If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product e Inform and educate your personnel in the proper installation operation and maintenance of the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources e To ensure proper performance use qualified personnel to install operate update program and maintain the product e
32. Nachbildungen kann die Leistung des Ger tes einschr nken und die Betriebssicherheit aufheben Fehlfunktionen und gef hrliche Betriebszust nde k nnen weitere Folgen sein FRANCAIS INSTRUCTIONS IMPORTANTES DE SECURITE Cet appendice contient des instructions importantes de s curit pour l utilisation du Thermal Mass Flow Meter Controller Series Cet instrument est conforme aux nouvelles directives PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC INSTRUCTIONS 1 Veuillez bien lire toutes les instructions remarques et avertissements 1 sur l appareil et 2 dans le manuel d installation d utilisation et d entretien 2 AVERTISSEMENTS Ne pas utiliser cet instrument en dehors des caract ristiques de fonctionnement sp cifi es dans le manuel d instructions Dans le cas contraire le personnel risque de se blesser gri vement et ou d endommager le mat riel 3 S assurer que l appareil est bien reli lectriquement et soumis une pression de travail 4 OPERATION a Lorsque l installation du d bitm tre dans la canalisation est achev e La mise en d bit du d bitm tre doit tre ex cut e progressivement en ouvrant doucement le vanne de r gulation afin d viter tout sur d bit b V rifier que les raccordements d entr e et sortie soient parfaitement tanches sans fuite puis mettre sous pression de travail 5 AVERTISSEMENT Lors d interventions d entretien bien s assurer que la pression dans la canalisation est
33. TMF MfS MFC eng Section 6 Modellisting PN 541 C 061 AAG November 2008 MF Smart Series e qs eee AT STANDARD RESPONSE 1 WFSOIST lt 3 SEC MFO B FastRESPONSE SPECFY VALUES SEO 5 D gt 3 SPECIFY VALUES SEC 1 D FLOW OUTPUT DAMPING SPECIFY VALUES SEC 1 NCALIBRATED TANDARD CALIBRATION INCLUDED SEE OPTION C TORAGE OF MULTIPLE CAL CURVES ADD PER AVAILABLE ALIBRATION GAS PECIFY OWER SUPPLY INPUT 24 Vdc Standard selection 2 I gt z O m 3 o fo milo IB U O O O AREA CLASSIFICATION SAFE AREA 2D CERTIFIED FOR USE IN ZONE 2 2D UL LISTED NPT ENTRY ONLY MF64 UL RECOGNIZED PG11 ENTRY ONLY MF64 WELDED SENSOR NO CERT NPT ENTRY ONLY MF64 2D WELDED SENSOR NO CERT PG11 ENTRY ONLY MF64 2D SPECIFY B2 TYPICAL MODEL NUMBER SPECIFY I 2 MF50S AC1HC1BAOKC NOTES fi JENHANCEMENTS PLEASE FILL IN THE REQUESTED SPECIFICA TIONS WHEN Y OU HAVE DESCRIBED THE ENHANCEMENTS Standard response time of the flow output signal Model MF50 51 and MF60 60 standard 1 sec or on request better than 0 2 sec Model MF53 63 standard 3 sec or on request better than 1 sec Model MF64 3 sec Standard settling time for controllers Model MF50 51 standard 1 sec or on request better than 0 2 sec Model MF53 standard 3 sec or on request better than 1 sec to within 2 full scale of final value Da ONS a
34. Wenn m glich sollten Kabeldurchf hrungen mit Anschlu m glichkeiten f r die Kabelabschirmung verwendet werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlie en Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm ige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 80 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotential zu verbinden English All Brooks electrical electronic equipment bearing the CE mark has been successfully tested in accordance with the Electromagnetic Compatibility regulations EMC directive 89 336 EEC However special care is required when selecting signal cables to be used with equipment bearing the CE mark Quality of signal cables cable glands and connectors Brooks supplies high quality cabling that meets the specifications for CE certification However if you wish to use your own signal cable you should select one that is fully screened with at least 80 shielding Any D or Circular type connectors used should be screened with a metal shield If applicable metal cable glands must be used to clamp the cable shielding The cable shielding should be connected to the metal shell or gland and have 360 shielding at both ends The shielding should be connected to
35. alve meets application specific requirements since it allows nitrogen gas purging if the power supply is interrupted 11 Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 2 Installation MF Smart Series 2 7 In Line Filter An in line filter is installed as standard in the instrument s inlet to prevent any foreign material entering the flow sensor or control valve The filtering element should be periodically replaced or ultrasonically cleaned Apply only clean gasses on Mass Flow Meter Controllers 2 8 Electrical Interfacing not for Profibus The installation of Smart TMF involves connecting to terminal strips For details of correct installation see figure 2 2 and Table 2 2 2 3 and 2 4 Table 2 1 Pin configuration PIN NO FUNCTION 1 VSUP 2 SUPCOM 3 NC 4 SIGCOM 5 VSIG ee E No No Tr s 2 S d S xx 1 TxD A ELESSE EE 2 RxD CEI 3 TTLALM 4 VREF Figure 2 2 Electrical compartment 5 VOR 6 NC 7 CMDCOM 8 VCMD 9 ICMD Table 2 2 Electrical connection 9 pins terminal pin Function Controller Meter 1 TxD A RS 232 RS 485 TxD A 2 RxD A RS 232 RS 485 RxD A S K 98 GE 3 TTLALM TTL Open collector alarm output Sea alaa ea 4 VREF 5Vdcref output Abs 5 VOR
36. am opvoeren van de stroom in het systeem Open de kranen langzaam om een plotselinge golfbeweging van de vloeistofstroom te voorkomen b Controleer het instrument op eventuele lekkage met name de in en uitlaat aansluitingen Als er geen lekkage wordt ontdekt kan het systeem op bedrijfsdruk worden gebracht 5 WAARSCHUWING Nalatig onderhoud van dit instrument kan ernstig persoonlijk letsel en of beschadiging van de meet apparatuur tot gevolg hebben Overtuig u zelf ervan dat de procesdruk is afgevoerd alvorens onderhoud aan het instrument te plegen 6 Overtuig u ervan dat er uitsluitend originele Brooks Instrument onderdelen worden gebruikt voor onderhoud en service aan het instrument U wordt erop gewezen dat het gebruik van universele onderdelen en voorschriften om daar mee om te gaan nadelige gevolgen kunnen hebben voor het gebruik van het instrument en daardoor de juiste weking van uw proces in gevaar kan komen Zelfs kan het gebruik daarvan resulteren in brandgevaarlijke situaties electriciteitsgevaar of onjuist functioneren SUOMI TURVAOHJEET T m liite sisaltaa t rkeit turva ja k ytt ohjeita Brooks Thermal Mass Flow Meter Controller Series Instrumentit kuuluvat CE direktiiviin PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Kysy lis paikallisilta viranomaisilta koskien kansainv lisi ja tai paikallisia turvakoodeja sek muita asennusvaatimuksia TURVAOHJEET 1 Kaikki ohjeet ja 1 virtausmittariin kiinnitetyt v
37. arest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas E 1 888 554 FLOW Europe XT 31 318 549 290 Within Netherlands EP 0318 549 290 Asia 011 81 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS Brooks Brooks Instrument LLC Cllr DuPont Dow Elastomers Teflon E I DuPont de Nemours amp Co Meme DuPont Performance Elastomers Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 318 549 300 T 011 81 3 5633 7100 T 215 362 3700 F 31 318 549 309 F 011 81 3 5633 7101 F 215 362 3745 E Mail
38. aroittavat merkinn t sek 2 manuaalin soveltuvat kohdat on luettava ennen laitteen k ytt nottoa 2 VAROITUS l k yt t t instrumenttia yli manuaalissa mainittujen maksimiarvojen Mik li t t varoitusta ei noudateta voi seurauksena olla vakava henkil vahinko ja tai laitteen vaurioituminen 3 Varmista ett mittalaite on oikein asennettu sek prosessiputkistoon ett s hk isesti 4 K YTT a P st paineet hitaasti j rjestelm n Avaa putkistossa olevat venttiilit hitaasti jotta v ltytt isiin paineiskuilta b Tarkista mahdolliset vuodot mittarin prosessiliittimien kohdalta Mik li vuotoja ei ole nosta prosessipaine k ytt paineeseen 5 VAROITUS Mik li t t laitetta ei huolleta asianmukaisesti saattaa korkea k ytt paine aiheuttaa vakavia henkil vahinkoja ja tai laitteen rikkoutumisen On varmistettava ett putkistopaine on poistettu huollon ajaksi 6 Tulee varmistaa ett k yet n Brooks in alkuper isi varaosia kun laite vaatii huoltoa Huomaa ett korvaavat n k isoasat sek k sittely voi vaikuttaa laitteen toimintaan sek saattaa prosessin riskialttiiksi Lis ksi t m voisi aiheuttaa palo tai s hk isen vaaran tai toimintaongelmia 48 Installation and Operation Manual X TMF MfS MFC eng Appendix D PN 541 C 061 AAG November 2008 MF Smart Series DEUTSCH WICHTIGE SICHERHEITSHINWEISE Dieser Anhang enth lt wichtige Hinweise f r einen sicheren Betrieb des Ganzmeta
39. d Defective electronic board Clean the control valve section 4 3 or return the device to the factory Check the valve override input pin 5 of 9 row Contact Brooks Instrument Output signal stays at approx 5 25 Vdc or 21 mA regardless of Set point and there is flow through the meter controller Valve leaks or is stuck open applicable to MFC 15V applied to the valve override input applicable to MFC Defective electronic board Clean and or adjust control valve Section 4 3 Check the valve override terminal pin 5 of 9 row Contact Brooks Instrument Output signal follows Set point at higher set points but will not go below 2 Control valve leaks or is stuck open Clean the control valve or return the device to the factory Section 4 3 Output signal follows Set point at lower set points but does not reach full scale Insufficient inlet pressure or pressure drop Partially clogged sensor Partially clogged valve applicable to MFC Valve out of adjustment applicable to MFC Valve guide spring failure applicable to MFC Adjust pressures inspect in line filters and clean replace as necessary 4 2 Clean sensor see cleaning procedures Section 4 3 Clean the control valve section 4 3 or return the device to the factory see cleaning procedures Adjust valve see calibration procedures Section 4 4 Controller oscillates see below Instrument grossly out of calibration
40. e Cable Shielding Earth Cable requirements Complaince with EMC directive 89 336 EEC requires that the equipment be fitted with fully screened cables with at least 8096 shielding The cables with at least 80 shielding The cable shielding should be connected to the PG connector s metal shell and have 360 shielding at both ends The shielding should be connected to an earth terminal For translations of this instruction see Appendix D of the MF series Instruction and Operation manual p n 541 C 061 AAG Translations of installation instructions Section 2 Installation MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 2 9 2 Profibus connector MF series 16 The Profibus DP electronics is hooked up via a separate M12 connector on top of the device This connector has IP65 protection rate and is defined in the Profibus guideline 2 142 Interconnection Technology Sepecifictions This allows for the use of standards available Profibus approved network connectors enabling fast and easy connection of a Profibus network Figure 3 4 below shows the pin numbering The connector provides the four mandatory signals as defined in the EN 50170 i e RxD TxD P RxD TxD N VP and DGND The Profibus signals are galvanic isolated from the main electronics The fifth 5 connector terminal is the shieldings 1 2 3 4 5 Figure 2 5 Pinnumbering Installation and Operat
41. e Sulfur Trioxide Sulfuryl Fluoride Tetrachlorom ethane Tetrafluoroethylene TFE Tetrafluorohydrazine Trichlorofluorom ethane f 11 Trichlorosilane Trimethyloxyborane TMB B OCH3 3 1 1 2 Trichloro 1 1 2 Triflouroet f 113 C2CL3F3 Trimethylamine CH3 3N Tungsten Hexafluoride WF6 Uranium Hexafluoride UF6 Vinyl Bromide C2H3Br Vinyl Chloride C2H3CL Vinyl Fluoride C2H3F Water Vapor H20 Xenon Xe 39 Installation and Operation Manual X TMF MfS MFC eng i PN 541 C 061 AAG MF Smart Series November 2008 Appendix B Dimensional Drawings wer LS RN ES 927 927 927 x 11 987 1 2 11 987 ur 12 48 11 28 11 54 11 67 MF53 CONTROLLER 40 Installation and Operation Manual X TMF MfS MFC eng Appendix B PN 541 C 061 AAG N November 2008 MF Smart Series 1543 05 35418 10 04 288 5 ue 200 I da fone A 19940406 7108 11 05 296 amp 11240206 318818 1200 220 PROFIBUS CONNECTOR RECOMMENDED 41 Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 Appendix C Translation of CE Marking electrical installation instructions Dansk Brooks Instrument har gennemf rt CE m rkning af elektronisk udstyr med succes i henhold til regulativet om elektrisk stoj EMC direktivet 89 336 EEC Der skal dog g res opm rksom p benyttelsen af signalkabler i forbindelse med CE m rkede udst
42. e temperature In case Zero adjustment is required this can be done via Smart Control model 0160 Calibration of the Smart MF is not described in this manual Calibration can only be achieved with use of the accurate Brooks Volumeter equipment and the Smart Service software model 0163 see paragraph 4 4 21 MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 4 Maintenance 4 1 General 4 2 Troubleshooting 22 No routine maintenance is required on the MF series Smart Mass Flow Meters and Controllers other than occasional cleaning The in line filter should periodically be replaced or ultrasonically cleaned NOTE If recalibration is required but the necessary expertise or equipment is not available the instrument should be returned to the factory System checks The MF series Smart Mass Flow Meters and Controllers are generally used as a component in gas handling systems which can be complex in nature It can therefore be very difficult to isolate a malfunction in the system An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime If possible perform the following system checks before removing a suspect Mass Flow Meter or controller for bench troubleshooting or return to the factory especially if the system is new 1 Verify a low resistance common connection and that the correct power supply voltage and signals are present of
43. efore disconnecting gas connections Failure to correctly purge the instrument could result in fire explosion or death Corrosion or contamination may occur upon expo ure to air All flow instruments returned to Brooks requires completion of Form RPR003 1 Brooks Instrument Decontamination Statement along with a Material Safety Data Sheet MSDS for the fluid s used in the instrument Failure to provide this information will delay processing by Brooks personnel Copies of these forms can be downloaded from the Brooks website www BrooksInstrument com or are available from any Brooks Instrument location listed above All models are fitted with the following inlet and outlet connectors as standard NPT F tube compression fittings VCR VCO DIN or ANSI flanges Prior to installation make certain that all piping is clean and free of obstruction Install the piping in a manner that permits easy access to the instrument should it need to be removed for cleaning or test bench troubleshooting Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 2 Installation MF Smart Series 2 6 Mechanical Installation For dimensional drawings see Appendix B Dimensional drawings NOTE When installing the Mass Flow device care should be taken to prevent foreign materials from entering the instruments inlet or outlet Do not remove the protective end caps until the actual moment of installation When
44. eral equipment All relevant connections can be made via the terminal strips The shielding of the cable must be grounded via the cable gland please refer to appendix C for detailed instructions 20 Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series Section 3 Operation 3 1 Operating Procedure 3 2 Zero Adjustment 3 3 Calibration Procedure 1 Apply power to the Mass Flow device and allow approximately 45 minutes for the instrument to reach a stable temperature 2 Check the flow reading before turning on the pressurised gas supply If the flow reading is gt 0 2 then the instrument should be re zeroed see section 3 2 3 Turn on the gas supply 4 Regulate flow to 0 Monitor the instrument s output signal If the output is not lt 0 2 check for leaks 5 Commence normal operation Each Smart Mass Flow device is factory adjusted to provide a 0 10 mVdc signal at zero flow The adjustment is carried out in our calibration laboratory an ambient the temperature of 20 C is maintained After initial installation and warm up in the gas system the zero flow indication may differ from the factory setting This is primarily caused by differences in temperature between our calibration laboratory and the final mounting position When checking the zero flow indication always mount the device in its final location and allow a minimum of 45 minutes for it to reach a stabl
45. esired gas is carbon dioxide Multiply the output reading by 0 740 to calculate the flow of carbon dioxide When the output reading is 750 min min the flow rate for carbon dioxide is 750 x 0 740 555 ml min CALCULATE GAS FACTOR FOR MIX GASSES In order to calculate the conversion factor for a gas mixture the following formula should be used Sensor 100 conversion P1 P2 factor for sensor sensor sensor Mixture conversion conversion conversion factor 1 factor 2 factor n Where P1 percentage of gas 1 by volume P2 percentage of gas 2 by volume Pn percentage of gas n by volume Example The desired gas is 20 Helium He and 80 Chlorine CI2 by volume The desired full scale flow rate of the mixture is 20 In min Sensor conversion factor for the mixture is 100 Mixture Factor 20 f 80 0 946 1 386 0 876 N2equivalent flow 20 0 946 21 14 In min It is generally accepted that the mass flow rate derived from this equation is only accurate to 5 The table below lists the conversion factors for various gases with respect to nitrogen The conversion table is used to determine the flow rate for gases other than the pre selected gas The flow meter is factory set to a pre selected gas pressure and flow range 36 Installation and Operation Manual X TMF MfS MFC eng Appendix A PN 541 C 061 AAG November 2008 MF Smart Series Gas Conversion Table Source J 836
46. ginal manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument com to locate the service location ne
47. il rischio di lesioni personali e o al danneggiamento dello strumento stesso 3 Controllare che lo strumento sia correttamente collegato alle fonti di pressione che a quelle elettriche 4 ISTRUZIONI OPERATIVE a Lentamente procedere ad aprire il flusso allo strumento Aprire lentamente le valvole di processo dello strumento per evitare picchi di pressione b Controllare l assenza di perdite sia sui raccordi di entrata che in quelli di uscita dello strumento Se non si riscontra alcuna perdita portare lo strumento alla pressione di esercizio 5 ATTENZIONE Se allo strumento non viene fatta regolarmente una corretta manutenzione alle alte pressioni potrebbero verificarsi lesioni personali e o danni allo strumento Assicurarsi che la pressione di processo sia stata tolta laddove si necessiti effettuare una manutenzione 6 Assicurarsi che siano utilizzate solo parti originali nella manutenzione degli strumenti Si fa notare che la sostituzione con parti compatibili e la manutenzione effettuata non seguendo le procedure del fornitore posso provocare alterazioni nelle prestazioni dello strumento ed alterare lo stato di sicurezza delle Vs linee di processo Ancor pi potrebbe provocare rischi di incendio rischi elettrici o far risultare errati i processi in corso 50 Installation and Operation Manual X TMF MfS MFC eng Appendix D PN 541 C 061 AAG November 2008 MF Smart Series SWEDISH VIKTIG S KERHETSINFORMATION Denna bilaga
48. inneh ller viktig information om s kerhet och handhavande vid installation och anv ndande av Brooks Fl desm tare i Thermal Mass Flow Meter Controller Series Instrumentet r i verensst mmande med PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Kontakta de lokala myndigheterna ang ende eventuella nationella f reskrifter och ytterligare f reskrifter ang ende krav p riktig installation S KERHETS INSTRUKTION 1 L s alla instruktioner och varningsf reskrifter p 1 fl desm taren och 2 alla aktuella avsnitt i Instruktion och handhavande manualen innan produkten tas i drift 2 VARNING Anv nd inte detta instrument utanf r de angivna specifikationerna som anges i Instruktion och handhavande manualen Att ej beakta denna varning kan resultera i alvarlig personskada och eller skada p utrustningen 3 V nligen kontrollera att instrumentet r r tt inkopplat elektriskt och mekaniskt med avseende p elektrisk sp nning och aktuellt tryck 4 Vid ig ngs ttning a Sl pp l ngsamt p aktuellt fl de i systemet ppna processventiler l ngsamt f r att undvika f r h ga fl den b Kontrollera om det finns n gra l ckage runt fl desm tarens anslutningar Om det inte finns n got l ckage ka f rsiktigt till aktuellt arbetstryck 5 Varning Om denna utrustning inte servas enligt instruktionsboken kan alvarlig personskada intr ffa Utrustningen kan skadas av f r h gt tryck V nligen kontrollera att processtryc
49. int step virtually without any dead time over or undershoot Model MF53S 3 sec 1 sec on request Installation and Operation Manual X TMF MfS MFC eng Section 5 Specification PN 541 C 061 AAG November 2008 MF Smart Series KEMAX w TYPE EXAMINATION CERTIFICATE 2 Equipment and protective systems intended for use In pobentially explosive ameaphares Directe SEC 5 Examination Certificato Mumbar 08ATEX4887 X issue Number 4 a Equipment Smart Mass Flow Controller MF31 and MES Emari Mass Flow Meter Type MPG MAS MES and 17 8 This queme and amy acoeptatie variston freie ii speed he scheduls jo Ms cericale nnd the documents Hornin reload bo Quality B V that this equipment has bets found id comply with the Essential Health and Salety Requirements relating to fhe design and construction of equipment and protestia syrerne intended for usa in poter ray airscsphems given in Annex I bo the dimcrve The exemingSon and tit repute ane recorded in confidenza test na 2113503 14 9 Compliance with the Essor al Heath and Safety Requirements has been assured by compliance wit EN 60070 15 2001 EN 50281 1 1 1888 A1 50 the ce 37 la placed der tha certificata number it indicates that the equipment is subject to cec conditions for sado fogd in fe ches de to this perine 11 ee i MR le mel last ln ul not
50. io m rranafacturing process ami soppii of fg equipment 12 The mikiny of the equipment shall include fre bimn 136 EExnAI T4 and 13D IP65 T85 C This cartificala sed on March 21 MUSAE Me M j tti shall be rerst d balore fa date of cssca on ef presumo of conica ong of the Harder mentioned above comarca in the Official Joumal of B V s Mirage Page 13 ee of Shin coat and ipy Mjaa weed Thi Secale only be reek in ery Bee ey target KEMA Oualty BV Utrechtsoneg 310 8312 AR Amhem P O Box 6185 6802 ED Ambem The 26358 20 00 P3128 3 52 58 00 catoemanfiemacos wewkeracom Registered Amhem 0085338 you Re Tat 29 Installation and Operation Manual Section 5 Specification X TMF MfS MFC eng E PN 541 C 061 AAG MF Smart Series November 2008 Table 5 2 Pressure Matrix Size Flange Applicable Gastket MAWP 21C bar MAWP 70C bar P E D Module H types Category nz ma BA 2 50 00 N40 NA amp 60 50 N40 507 DF 008 507 00 00 50 00 55 55 48 45 vu ul o 7 ul Alt ole A zzz zzz o o 4 4 AJ ol BIO Q Q D o o V ODF Ub to spiral wound s Up to spiral wound 60 55 Up to spiralwound 48 4 LE EE Pa ES L M K o NM NEM mM E B9
51. ion Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 2 Installation MF Smart Series 2 10 Digital Communication NOTE The printed circuit boards only need to be reconfigured if the hardware settings differ from those specified at the time of ordering J1 Volt input Current input I J2 normal operation Master reset parameters clear configurable O open no jumper installed closed jumper installed N Default setting for assymetric supply i e 15Vdc to 24Vdc J1 K1 K2 i z not applicable for ki K7 K6 sw A refer to sw refer to K5 5 table 2 4 5 table 2 4 W K3 J2 K3 MP2 K2 K1 MP3 ver Main p c board part 097 B 265 ZZZ Communication p c board part 097 B 335 ZZZ for RS 485 part 097 B 337 ZZZ for RS 232 Communication p c board part 097 8 296 777 Figure 2 6 p c boards with the locations of jumper switches note Switch number 1 is the lowest switch of four 4 ID Brooks MF series Smart Mass Flow Meters and Controllers incorporate two printed circuit boards one main board containing the processor and a piggyback board The piggyback board enables the device to communicate with a PC via an RS 232 or RS 485 connection The piggyback board is installed via the K5 K6 and K7 connectors
52. ket p m taren r fr nkopplat i samband med service 6 V nligen kontrollera att bara BROOKS originaldelar anv nds i samband med service Observera at delar med motsvarande utseende men ej originaldelar kan p verka fl desm tarens funktion och prestanda samt p verkar s kerheten i processen Det kan ven resultera i eldsv da elektrisk fara eller felaktig funktion ESPANIOL IMPORTANTES INSTRUCCIONES DE SEGURIDAD Este ap ndice contiene importantes instrucciones de operaci n y seguridad para el uso de los rot metros de tubo de vidrio BROOKS de la Thermal Mass Flow Meter Controller El instrumento es conforme a la directiva 97 23 CE sobre Equipos a Presi n de la Comunidad Europea PED Consulte con sus autoridades locales por si existieran normas 6 directivas adicionales sobre el uso y o instalaci n de dicho tipo de instrumentos INSTRUCCIONES DE SEGURIDAD 1 Lease con cuidado todas y cada una de las identificaciones del aparato 1 asi como las secciones del Manual de Inatalaci n y Operci n antes de usar el rot metro 2 ATENCION No operar nunca el instrumento por encima de las especificiones de M xima Presi n de Operaci n rese adas en el Manual de Instalaci n y Operaci n El no seguir estas instrucciones puede provocar da os y perjuicios en personas y 6 equipos 3 Asegurarse de que el instrumento ha sido conectado e instalado correctamente a la fuente de presi n y o el ctrica 4 OPERACION a Empezar abrie
53. ll Schwebek rperdurchfluss messers der Baureihe Thermal Mass Flow Meter Controller Series von Brooks Instrument Das Ger t entspricht den g ltigen PED Richtlinien PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Konsultieren Sie lokale Zulassungsbeh rden f r nationale und oder regionale Sicherheitsbestimmungen bzw weitergehende Installationsvorschriften SICHERHEITSHINWEISE 1 Bitte lesen Sie alle gekennzeichneten Sicherheitshinweise Warnungen auf 1 dem Gerat und 2 alle ent sprechenden Kapitel in der dazugeh rigen Installations und Bedienungsanleitung vor dem Betrieb des Ger tes 03 Bitte stellen Sie sicher dass das Gerat einwandfrei mit elektrischen und druckbeaufschlagten Leitungen verbunden ist 4 BETRIEB a Lassen Sie das Ger t zu Beginn langsam durchstr men ffnen Sie Ventile langsam damit Druckst e verhindert werden b Pr fen Sie den Aufbau am Ein und Ausgang des Ger tes auf Leckagen Wenn Sie kein Leck feststellen k nnen erh hen Sie langsam den Systemdruck bis der gew nschte Prozessdruck erreicht ist 5 WARNUNG Bei unsachgem er Wartung des Ger tes geht von diesem aufgrund potentiell hoher Betriebsdr cke ein hohes Sicherheitsrisiko f r Personen und Material aus Bitte vergewissern Sie sich vor Wartungsarbeiten dass die Leitungen drucklos sind 6 Verwenden Sie ausschlie lich Original Ersatzteile von Brooks Instrument f r die Wartung und Reparatur von Ger ten Verwendung von Fremdfabrikaten oder
54. logy CMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibit early failure or degraded performance Pressure Equipment Directive PED All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Directive is applicable within the European Economic Area EU plus Norway Iceland and Liechtenstein Pressure equipment can be traded freely within this area once the PED has been complied with Appendix 1 of this manual contains important safety and operating instructions related to the PED directive Meters decribed in this manual are in compliance with EN directive 97 23 EC module H Conformity Assessment All Brooks Instrument flowmeters falls under Fluid group Meters larger then 25mm 1 inch are in compliance with category I II or III of the PED Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 Table of Contents section 13 INtrodWCtiONn is kuissa Et 5 1 1 Howto use this manual ei Heise Her rennen len 5 1 2 astuneen LITA A ili Serum AEK EAA Mn on Tean 6 Section 2 Installation eoe D A TS A esi NAT a SN au
55. mM E VDI U U 0 gt U U UTI gt Z Z Z Z 2 2 2 VM ala Oli A OI oo AJ OO o 30 Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series Section 6 Modellisting STANDARD RESPONSE 1 SEC MF50 51 lt 3 SEC B FASTRESPONSE SPECFY VALUES SEG MI c near RAMP SPECFY VALUES SEC U D FLOW OUTPUT DAMPING SPECIFY VALUES SEC 1 STORAGE OF MULTIPLE CAL CURVES ADD PER AVAILABLE CALIBRATION GAS SPECIF POWER SUPPLY INPUT SPECIF o 2 24 Vdc Standard selection AREA CLASSIFICATION WELDED SENSOR NO CERT NPT ENTRY ONLY MF64 2D B2 TYPICAL MODEL NUM BER Y Y 6 2 MF50S AC1HC1BAOKC NOTES n JENHANGEMENTS O O O 3 PLEASE FILL IN THE REQUESTED SPECIFICA TIONS WHEN Y OU HAVE DESCRIBED THE ENHANCEMENTS Standard response time of the flow output signal Model MF50 51 and MF60 60 standard 1 sec or on request better than 0 2 sec Model MF53 63 standard 3 sec or on request better than 1 sec Model MF64 3 sec Standard settling time for controllers Model MF50 51 standard 1 sec or on request better than 0 2 sec Model MF53 standard 3 sec or on request better than 1 sec to within 2 full scale of final value 2 OPTIONS JAJ J AJ J A FOR GASES WHICH CLOG AND CONTAMINATE THE MFC EASILY AN
56. mmunication Smart Control Digital communication either via RS 232 or RS 485 allows to connect our Brooks model 0160 Smart Control This interface program can be used to operate and re configure Smart Mass Flow Products calibration parameters are not accessible Smart DDE If you require bi directional links between your Windows based applications and Brooks Smart Mass Flow Products our model 0162 Smart DDE a powerful user friendly Dynamic Data Exchange software program offers all the features you need Smart Service If you are equipped with primary standard Volumeter calibration equipment or secondary standard Brooks Smart Mass Flow Meters you can use the model 0163 Brooks Smart Service program for re configuration diagnostics calibration and or verification The HART protocol based commands are listed in a separate document Brooks part number 541 C 053 AAA Profibus DP Communication manual Please refer to Profibus instruction manual partnumber 541 C 068 AAG Section 1 Introduction MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 1 2 Description Models MF60S MF61S MF63S and MF64S Brooks MF series Smart Mass Flow Meters are primarily used to provide accurate measurements of gas flows The heart of these systems is the thermal mass flow sensor which produces an electrical output signal as a function of flow rate In addition models MF50S MF51S and M
57. ndo el caudal cuidadosamente Abra lentamente las v lvulas para evitar puntas de caudal b Comprobar si existen fugas en el caudal metro y sus conexiones Si no se encuentran fugas continuar abriendo hasta conseguir las condiciones normales de servicio 5 ATENCION Llevar un mantenimiento adecuado con el fin de prevenir y evitar fallos debidos a altas presiones de operaci n El no seguir estas instrucciones puede provocar dafos y perjuicios en personas y 6 equipos Despresurizar la l nea antes de desmontar el rot metro 6 Utilice solo piezas originales BROOKS para el mantenimiento de su rot metro El uso de piezas de otros suministradores con apariencia similar puede afectar las prestaciones y la seguridad del equipo Cualquier cambio indebido puede resultar en una explosi n 6 operaci n incorecta 51 Installation and Operation Manual X TMF MfS MFC eng PN 541 061 MF Smart Series November 2008 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the ori
58. nn og utl pstilkoblinger Dersom det ikke er synlige lekkasjer kan ventilen pnes til fullt operasjonstrykk 5 ADVARSEL Dersom utstyret ikke blir riktig vedlikeholdt kan det fore til alvorlige personskader og eller skade p instrumentet p grunn av potensielle h ye trykk P se at prosesstrykket er avlastet f r utstyret demonteres 6 Bruk alltid Brooks original deler ved service Merk at selv om erstatningene ser like ut kan de p virke produktets virkem te og gj re prosessen usikker Det kan videre f re til brann elektrisk risiko eller feil virkem te ITALIANO IMPORTANTI ISTRUZIONI PER LA SICUREZZA Questa appendice contiene importanti istruzioni sia per la sicurezza che per l uso corretto degli flussometri metallici della Brooks Instrument della Thermal Mass Flow Meter Controller Series Questi strumenti seguono la normativa PED Direttiva CE 97 23 EC per gli strumenti in pressione Consultare le autorit locali per i codici di sicurezza nazionali internazionali e per ulteriori norme di installazione ISTRUZIONI DI SICUREZZA 1 Prima di utilizzare il prodotto leggere attentamente tutte le istruzioni ed marchi di sicurezza applicati sui flussimetri 1 e Appendici relative delle istruzioni e del manuale operativo 2 2 ATTENZIONE Non utilizzare questo strumento oltre limiti massimi delle specifiche elencate sia nelle istruzioni per l uso che nel manuale operativo La mancata osservanza di tali istruzioni potrebbe causare
59. ntamination end closest to the control valve The sensor tube can then be flushed with a solvent that leaves no residue This can be accomplished conveniently using a hypodermic needle filled with solvent NOTE Do not soak the sensor assembly in a cleaning solution If solvent seeps into the sensor assembly it will probably damage the sensor or at least significantly alter its operating characteristics The calibration of MF series Smart Mass Flow devices is not described in this manual Such calibration requires the use of accurate and traceable calibration equipment such as Brooks Volumeter equipment in addition Smart Service software model 0163 is needed 1 Wetted components include the body laminar flow element and all valve components including the orifice process adapters and inlet filter Installation and Operation Manual X TMF MfS MFC eng Section 4 Maintenance PN 541 C 061 AAG November 2008 MF Smart Series However if the above equipment is available at your facility then Brooks Instrument will supply you with copy of the calibration procedure document no 834 P 088 AAG upon request 4 5 Valve Dis Assembly Procedure NOTE If dis assembly is required but the necessary expertise or equipment is not available then the instrument should be returned to the factory However if the requisite equipment is available at your facility Brooks Instrument will supply you with copy of the valve dis assembly procedure
60. ogue I O In case of profibus no analogue I O is possible except for the Valve OverRide VOR input In these cases this PG11 connector is solely used for the power supply connection and the VOR input signal Figure 2 4 shows the terminal connection location for power supply and V O R the power connection as well as the profibus connection terminals can be acces seal by opening the top cover plate by removing the four polts on the top of the cover plate The minimum reguirement to operate the device on a Profibus network is the connection of the power supply lines labeled 24V and GND Kal LT DT K5 DDD 00 Main power connection K3 5V N Z4v VOR GNO KD g BROOKS INSTRUMENT A ci 24 Vdc 0 VOR Valve Override T Power supply common sHIELO KD Figure 2 4 MF Profibus Main Power Connection The valve override signal middle screw terminal labeled VOR can always be used in parallel to the network The command OPEN or CLOSE issued through this VOR terminal always takes precedence over the network valve override command If the level on this terminal is left floating not connected a valve override command issued through the network will be carried out NOTE With regard to the power supply connections the attached cable must be as short as possible to ensure that the minimum required voltage and current is available at the mass flow devic
61. on the main board see Figure 2 6 The digital communication piggyback board is used for all communication related hardware settings For this purpose the board is equipped with a dipswitch block SW1 holding 4 switches RS 232 Board 097 B 364 ZZZ or RS 485 Board 097 B 363 ZZZ and to select the baud rate Table 2 4 summarizes the possible settings Section 2 Installation MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 18 For dis assembly of the top cover and or housing refer to section 4 6 Table 2 4 Dipswitch settings not for Profibus Physical Baud rate Dipswitch block SW1 Layer selection Switch Switch Switch Switch selection 1 2 3 4 RS 232 Off On RS 485 1200 Off Off Off 2400 On Off Off 3600 Off On Off 4800 On On Off 7200 Off Off On 9600 On Off On 19200 Off On On 38400 On On On not supported by Windows Since Brooks MF series Smart Mass Flow devices are capable of communication immediately after start up you should set the correct baud rates prior to power up Any changes to the baud rate settings or the physical layer selection made during operation will take effect immediately The communication I O drivers are directly connected to the terminal strip on top of the device The RS 232 is essentially a point to point connection i e one host computer and one Smart Mass Flow device
62. orage Practice If intermediate or long term storage of equipment is required it is recommended that the equipment be stored in accordance with the following conditions a Within the original shipping container b Stored in a sheltered area preferably a warm dry heated warehouse c Ambient temperature 21 C 70 F nominal 32 C 90 F maximum 45 F 7 C minimum d Relative humidity 45 nominal 60 maximum 25 minimum Section 2 Installation MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 2 4 Return Shipment 2 5 Gas connections 10 Prior to returning any instrument to the factory visit the Brooks website www BrooksInstrument com for a Return Materials Authorization Number RMA or contact one of the following locations Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 318 549 309 E mail BrooksEu Brooksinstrument com AWARNING Before returning the device purge thoroughly with a dry inert gas such as Nitrogen b
63. put pins 4 5 and 6 Pin 4 and 5 indicates the flow rate represented by a 0 5 Vdc or 1 5 Vdc signal proportional to the mass flow Pin 4 and 6 indicates the flow rate represented by either a 0 20 mA or 4 20 mA signal current proportional to the mass flow Both the current and voltage signals are returned via pin 4 NOTE I O configuration to be defined at time of ordering Reconfiguration at customer side can be accomplished using digital communication NOTE With regard to the power supply connections the attached cable must be as short as possible to ensure that the minimum required voltage and current is available at the mass flow device Cable Shielding Earth Cable requirements Compliance with EMC directive 89 336 EEC requires that the equipment be fitted with fully screened signal cables with at least 80 shielding The cable shielding should be connected to the PG connector s metal shell and have 360 shielding at both ends The shielding should be connected to an earth terminal For translations of this instruction see Appendix D Translations of CE Marking electrical installation instructions 14 Installation and Operation Manual X TMF MfS MFC eng Section 2 Installation PN 541 C 061 AAG E November 2008 MF Smart Series 2 9 Electrical interfacing Profibus MF 2 9 1 Main connector MF series The MF series have a PG11 connector at the inlet side of the mass flow device for the power supply and anal
64. rodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilit Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualit che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 8096 I connettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemit Lo schermo deve essere collegato ad un terminale di terra connettori Card Edge sono normalmente non metallici II cavo impiegato deve comunque avere una schermatura del 80 per soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra 44 Installation and Operation Manual X TMF MfS MFC eng Appendix C PN 541 C 061 AAG November 2008 MF Smart Series Nederlands Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit
65. s Section 2 2 1 General 2 2 Receipt of Equipment Installation This section contains the procedures for the receipt and installation of the instrument See Section 1 for dimensional and connection requirements Do not attempt to start the system until the instrument has been permanently installed It is important that the start up procedures be followed in the exact sequence presented When the instrument is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to your nearest Product Service Department Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 318 549 309 E mail BrooksEu Brooksinstrument com Remove the envelope containing the packing list Carefully remove the instrument from the packing case Make sure spare parts are not discarded with the packing materials Inspect for damaged or missing parts 2 3 Recommended St
66. s 9 P N PORRER DEC 9 2 2 Receipt of equipment rade a dee ai 9 2 3 Recommended storage practice iii nns estne enne aa ana naa a an aa ran 9 2 4 Return Shipment ide 10 2 5 Gas Connections tet o ato o En to d iii NN oh a mnt 10 2 6 Mechanical Installation seen 11 AA ure 12 2 8 Electrical Interfacing not for Profibus su 12 2 9 Electrical interfacing Profibus MF sienne 15 2 9 1 Main connector MF series nennen Sensi erode gen Ria 15 2 9 2 Profibus connector MF series sise 16 2 10 Digital Communication siennes 17 2 11 Interconnection with Peripheral Equipment ss 20 2 12 InterconnectlOn c er ntm A anale ext ae al Ga eee S R rn 20 Section 3 Operationen A e ii 21 3 1 Op rating Procedure 2 ud tantra ada eet A 21 9 2 Zer0 Adjustment aars en 21 3 3 Calibration Procedure ann ida HA SK MA 21 Section 4 Maintenance eoe eat Y ad ote iade idad 22 451 E 22 4 2 Troubleshooting een ne nn nr en agir nu 22 4 3 es kei e ie Een daud 24 4 4 Calibration Procedure ss a naan annan aa aa aa a a aa naan nannaa aa nannaa nannaa 24 4 5 Valve Dis Assembly Procedure siennes 25 4 6 Housing Dis Assembly Procedure aan kana hk 25 Section 5 Specification
67. s Flow Flow Ranges Pressure P E D N2 Equivalent Ratings Module H Category Model Model Min f s Unit MF50S MF60S 0 003 30 I min 100bar S E P MF51S MF61S 100 I min 100bar S E P MF53S MF63S 2500 min 70 bar 1 for all 150 Ibs flanges 2 for all other connections MF64 S 2160 m h See pressure matrix Table 5 2 1 referring to normal conditions i e 0 C 1013 25 mbar 2 MF60 can be used at 300 bar Setpoint Input not for Profibus Analogue Outputs not for Profibus Digital Communication Alarm 5 Vdc ref not for Profibus Voltage 0 5 or 1 5 input impedance gt 2000 Ohm or Current 0 20 mA or 4 20 mA 250 Ohm impedance Voltage 0 5 or 1 5 Vdc gt 2000 Ohm and Current 0 20 mA or 4 20 mA Max loop resistance 375 Ohm RS 232 or RS 485 Baud rate 1200 2400 3600 4800 7200 9600 9K2 38K4 Default RS 232 Baudrate 9600 Profibus DP If self diagnostics detect a fallure the alarm mode will be Analogue activated TTL Open Collector output signal grounded when activated Max 30 Vdc 25 mA not for Profibus Or via communication port when used digitally 5 Vdc reference voltage load impedance gt 2000 Ohm To be specified at ordering 27 Section 5 Specification MF Smart Series Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008
68. s de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado a blindagem ou bucha metalica em ambas as extremidades em 360 A blindagem deve terminar com a liga o a massa Os conectores Card Edge nao sao em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 80 nos termos da Certifica o CE A blindagem deve terminar com liga o a massa 45 Installation and Operation Manual Appendix C X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 Suomi Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEC Erityista huomiota on kuitenkin kiinnitettava signaalikaapelin valintaan Signaalikaapelin kaapelin lapiviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka tayttavat CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 80 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mik li mahdollista tulisi k ytt metallisia kaapeliliittimi kiinnitett ess suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla maadoitettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden t ytyy olla 80 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu
69. ssure Matrix RR Lettera ni SI 30 Gas Conversion Table is nts ete ptt etre et ey nm etatis mas 37 Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series Section 1 1 1 How to use this manual Introduction It is recommended to read this manual before installing operating or repairing these Mass Flow Instruments This manual is organised into nine sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section 5 Specification Sections 6 Modellisting Appendices A D This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks MF series Smart Mass Flow Meters and Controllers This series of microprocessor based field instruments is designed to meet the rigorous demands of various industries applications The use of digital technology ensures that the Brooks Smart series provides maximum accuracy and signal integrity In addition it allows easy interfacing to any peripheral equipment either through analogue or digital communication This manual covers Smart Mass Flow Meter models MF60S MF61S MF63S and MF64S and Smart Mass Flow Controller models MF50S MF51S and MF53S Digital communication The presence of a computer icon to the left of the text as shown here Denotes that the accompanying text refers to digital co
70. ta Card Edge no son met licos los cables utilizados deberan ser protegidos con un apantallamiento del 8096 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Fran ais Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pour v hiculer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 80 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 80 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre 43 Installation and Operation Manual
71. the connector of the MF series Smart TMF 2 Verify that the process gas connections have been made correctly and that they have been tested for leaks 3 If the mass flow controller appears to be functioning but cannot achieve Set point verify that there is sufficient inlet pressure and pressure drop at the controller to provide the required flow 4 Verify that all user selectable jumpers and switches have been set to the appropriate positions Refer to Figure 2 4 and table 2 4 NOTE If it becomes necessary to remove the instrument from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the instrument thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to correctly purge the instrument could result in fire explosion or death The MF series Smart Mass Flow device may also become corroded or contaminated upon exposure to air Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 4 Maintenance MF Smart Series Table 4 1 Bench Troubleshooting Trouble Possible Cause Check Corrective Action Output stays at zero regardless of Set point and there is flow through the meter controller Clogged Sensor Defective electronic board Clean sensor Refer Section 4 3 Flow can not be achieved regardless of checkpoint applicabable to MFC Clogged Control Valve Valve override input is grounde
72. to fully open or close the control valve independently of the set point Low flow cutoff prevents the valve from opening whenever the Set point is less than 1 of full scale ALL MODELS Digital communication features Digital communication via RS485 or RS232 provides access to all of the Smart TMF s functions including Accurate mass flow measurement and Set point regulation controller only as a percentage of full scale and in selectable engineering units Flow totalizer Ambient temperature Operational settings gt Calibration storage of up to 10 calibration curves gt Controller settings controller only PID settings Selectable soft start Adaptive valve control gt Adaptive filtering for signal flow component Alarms gt Self diagnostic EEPROM error Database error Analogue output error gt Out of range indications for Analogue set points higher than 100 controller only Flow Valve controller only Analogue output Installation and Operation Manual Section 1 Introduction X TMF MfS MFC eng PN 541 C 061 AAG MF Smart Series November 2008 gt Environmental errors No gas flow detected Power supply outside specification range Ambient temperature outside specified range high and low flow alarms Digital communication via Profibus DP referring to document 541 C 068 AAG Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Serie
73. utput not for Profibus Analarm TTL open collector signal output is available to the user If the instrument s specifications are exceeded either by process conditions or by the device itself an alarm signal can be generated Note Digital output communication is simultaneously available with analogue output not for Profibus Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 Section 1 Introduction MF Smart Series MASS FLOW CONTROLLER Standard features include The supplied inlet adapter has a built in upstream inlet filter for flow straightening Besides reducing the effects of changes in upstream piping this also protects the measuring element from occasional debris in the flow stream In addition it eliminates the need for extra expensive inlet filtering Each MF series Smart Mass Flow Controller is provided with an adaptive valve control algorithm for the maintenance of stable flow control even under varying process conditions pressure temperature Setpoint source selectable Setpoint signal source for the Mass Flow Controller can be selected from not for Profibus communication RS232 RS485 or 0 5 Vdc or 1 5 Vdc or 0 20 mA or 4 20 mA Fast Response Control provides rapid gas settling times with minimal over undershoot Standard factory setting 1 sec for MF50 51 and meter models 3 sec for MF53 Valve Override VOR available at pin 12 allows the user
74. yr Kvaliteten af signal kabler og stik Brooks lever kabler af h j kvalitet der im dekommer specifikationerne til CE m rkning Hvis der anvendes andre kabel typer skal der benyttes et sk rmet kabel med hel sk rm med 80 daekning Forbindelses stikket type D eller cirkul re skal v re sk rmet med metalhus og eventuelle PG forskruninger skal enten v re af metal eller metal sk rmet Sk rmen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen b r v re forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 80 d kning Skeermen b r v re forbundet til jord Deutsch Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel fur CE zertifizierte Ger te sind spezielle Anforderungen zu beachten Qualit t der Verbindungskabel Anschlu stecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten da eine 80 igenSchirmababdeckung des Kabels gew hrleistet ist oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen

- Brooks Instrument

Contents

Download Pdf Manuals

Related Search

Related Contents