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1. 0 5 bar 9
2. NMOS SMOS Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks GF40 GF80GF81 Devices October 2014 Czech Z kladni instrukce Pred instalaci si pre t te n sledujici instrukce Spole nost Brooks Instrument konstruuje vyr b a te
3. A Ha Brooks Instrument
4. ESD 1 2 3 OT
5. 1 ce 2 Brooks Instrument
6. Brooks Insturment Ha 100 360 10090
7. 4 2 4 3 Troubleshooting Guidelines 4 3 Section 5 Parts List 5 1 General NE 5 1 5 2 Service 6 2 PRA ea O en Wa ee 5 2 Section A Essential Instructions Essential Instructions Likusias inas aus TT iii A 1 Warranty Local Sales Service Contact Information 2 4 2 Back Cover Contents Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks Flomega October 2014 Figures Figure Page Number Number 1 1 Flomega Dimensions dd 1 4 2 1 Standard 12 Pole Connector and Pin neam ana 2 4 3 1 Measurement Principle 5891 iii 3 1 3 2 Measurement Principle u a n n a 3 2 3 3 Principle of Mass Flow Controller issus 3 3 3 4 Jumper Settings for Flomega Models 588170417 3 4 3 5 Jumper Settings for Flomega Models 5882 92 3 6 3 5 Jumper Settings for Flom ga aaa captada ac delen atat en 3 6 5 1 Flomega Spare Parts en aan nana aan ana 5 2 Tables Table Page Number Number 1 1 Prod ct erteilen 1 3 4 1 TrOUBlESNOO pl ddr da 4 4 5 1 Spare Parts LIST a IS ia ET B 1 Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007 AAG October 2014 1 1 Purpose Section 1 Introduction Brooks Flomega 1 2 Description The Brooks Models 5881 5882 Flow Controllers are a mass
8. 25 mm 1 PED 97 23 Brooks Instrument 1 25 mm 1 Ha II III PED 25 mm 1 SEP Brooks Instrument Ha 2004 108
9. epyaoiag Exel EKT G TIIEOEWG E TTEPITTTWON AVTIKAT OTAONG TO TTPOOWITTIK EIVAI EI IKEUJEVO KAI xpnoiporroie TTOU TTPOBA TTE Brooks Instrument Mn eykekpiu va KAI ETTEUB OEIG EVOEXETAI ETTIPE OOUV TIG ETTI OEIG TOU KAI TIPOKAAEOOUV via TNV Aerroupy a AVTIKATAOT OEIG HE PAIVOLJEVIKA EV EXETAI TTPOKAAEOOUV TTUPKAYIG Kiv uvo N EKTPOTTANEIAG rj aveTTAPK Aerroupy a BeBalwBeg te T Ta avoiyuara rou ESOTTAIOHO KAEIOT KAI TA TTPOOTATEUTIK KAAUNNATA TOUS TTPOKEIN VOU va ATTOPEUXBE NAEKTPOTTAN IAG KAI TTPOOWTTIKWV TPAUHATIOHUWV EKTOG EKTEAOUVTAI EPYAOIEG EIDIKEUH VO TTPOOWTIIK NPOEIAOMOIHEH Mpoksiu vou yia OUOKEUEG HE PEUGTO TAV via OTTOLOVS TTOTE TTPOKEITAI KAEIDOUV oi BAABI EG EICAYWYIJG KAI E AYUWYIJG KOVT OTIG OUOKEUEG OI OUOKEUEG TTP TTEI ATTOOTPAYYIOTOUV EVTEAWG H un OUHH PEWON Hrropei va BEPLIK SIAOTOAN TOU UYPOU Trou TTEPI XOUV HE ATTOTEAEONA VA OUOKEUN kai VA TrpoowTrikoi Tpauparicpo Eupwrra kh O nyia yia rov 80OTTAIGN urr Trigon PED ESOTTAIOH G TT EON EOWT
10. 1000 gr hr H O Input output Signal Options 0 20 mA or 4 20 mA or 0 5 Vdc Power Supply 15 Vdc or 24 Vdc Response Time 5 sec 7 sec to 2 of SP for 2 10 change Physical Specifications 5881 5891 5882 5892 Mechanical Connections 5 16 1 16 1 8 tube connection 1 4 compression 1 4 NPT 1 4 VCO 1 4 VCR Inlet Filter 40 micron stainless steel mesh Wetted Materials Stainless steel Viton PTFE EPDM Buna Kalrez Teflon Housing Material Cast aluminum Electrical Connections 12 pole circular connector Certifications CE certified IP65 weatherproof PED 97 23 EC compliant 1 3 Section 1 Introduction Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG Brooks Flomega October 2014 Z N CELANEGS M8x6deep eg to 5 16UNS Connections A Figure 1 1 Flomega Dimensions Installation and Operation Manual Section 2 Installation X TMF FM MFC eng Part Number 541 C007 AAG October 2014 Brooks Flomega 2 1 General This section contains the procedures for the receipt and installation of the instrument See Section 1 for dimensional and connection requirements Do not attempt to start the system until the instrument has been permanently installed It is important that the start up procedures be followed in the exact sequence presented 2 2 Receipt of Equipmen
11. aggiornamento la programmazione e la manutenzione del prodotto devono essere eseguiti esclusivamente da personale specializzato Leggere tutte le istruzioni prima dell installazione utilizzo manutenzione del prodotto Se questo manuale quello relativo al Vostro prodotto cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni Conservare il presente manuale per future consultazioni ATTENZIONE Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d Uso L inosservanza pu causare gravi lesioni alle persone e o danni all apparecchiatura e Qualora le istruzioni del manuale non siano chiare contattare un rappresentante della Brooks Instrument per chiarire il problema Rispettare tutti gli avvisi le istruzioni e gli avvertimenti riportati sul apparecchiatura o forniti insieme ad essa Installare apparecchiatura in base alle istruzioni riportate nel Manuale d Uso e alle prescrizioni locali e nazionali in vigore Collegare i prodotti esclusivamente ad un adeguata sorgente di pressione ed alimentazione elettrica Procedimento 1 mettere lentamente sotto pressione il sistema Aprire lentamente le valvole di servizio per evitare oscillazione del flusso 2 Controllare che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso Se non ci sono perdite caricare il sistema alla pressione d esercizio
12. mus m t tyto kovov st n n V p pad jejich pou it mus kovov kabelov pr chodky b t propojeny se st n n m kabelu St n n by m lo b t p ipojen ke kovov mu t lesu p stroje nebo krytu na obou konc ch kabelu a po cel m jeho obvodu St n n by m lo b t uzemn no P pojky vedouc ke kart m podle norem jsou nekovov Pro spln n po adavk p edpis CE mus b t pou it kabely kompletn st n ny St n n by m lo b t uzemn no Konfigurace kontakt je uvedena v p ilo en m n vodu k obsluze Elektrostatick v boj ESD UPOZORN N Tento p stroj obsahuje komponenty citliv na po kozen statickou elekt inou P i mont i demont i i jin manipulaci s vnit n mi elektronick mi obvody je pot eba dodr ovat p slu n postupy Postup o et ov n 1 Odpojte p stroj od nap jen 2 Osoba prov d j c dr bu m b t p i instalaci vyj m n i pr ci na desce plo n ch spoj nebo jin vnit n elektronice uzemn na zemn c m n ramkem nebo jin m vyhovuj c m zp sobem 3 Desky plo n ch spoj je nutn p epravovat v elektricky vodiv m obalu Plo n spoje vyj mejte z vodiv ho obalu a bezprost edn p ed instalac do p stroje Plo n spoje vyjmut z p stroje a ur en pro dal vyu it op t neprodlen um st te do ochrann ho obalu Pozn mky Existence prvk citliv na elektrostatick v
13. 25 4 mm unterliegen der Druckger terichtlinie Das Kapitel zu den technischen Daten in dieser Anleitung enth lt wichtige Sicherheits und Betriebsanweisungen in Bezug auf die Druckger terichtlinie Messger te die in diesem Handbuch beschrieben sind erf llen die europ ische Richtlinie 97 23 EG Alle Durchflussmesser von Brooks Instrument fallen unter die Fluidgruppe 1 Messger te die gr er als 25 mm oder 1 inch sind erf llen die Kategorien Il oder III der Druckger terichtlinie PED Messger te mit einer Gr e von 25 mm oder 1 inch oder kleiner sind Sound Engineering Practice SEP Europ ische Verordnung zur elektromagnetischen Vertr glichkeit EMV Ger te von Brooks Instrument elektrischer und elektronischer Art mit CE Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Vertr glichkeit EMV Richtlinie 2004 108 EC erfolgreich bestanden Dennoch muss bei der Wahl des Signalkabels f r das Ger t mit CE Zeichen auf folgende Dinge geachtet werden Qualit t von Signalkabel Kabeldurchf hrung und Anschl sse Brooks Instrument liefert qualitativ hochwertige Kabel die den Anforderungen f r eine CE Zertifizierung entsprechen Sollten Sie eigene Kabel einsetzen so sollte das Kabel berall mit einer 100 Abschirmung versehen sein D oder Rundstecker sollten eine Metallabschirmung aufweisen Wenn m glich m ssen Kabeldurchf hrungen aus Metall mit Kabelschirmgeflechts Klemmen verwendet
14. Gli strumenti di misura descritti nel presente manuale sono conformi alla Direttiva UE 97 23 Ogni flussimetro Brooks al gruppo di fluidi 1 Gli strumenti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria III della PED Gli strumenti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP Sound Engineering Practice Direttiva europea relativa alla compatibilit elettromagnetica EMC Le apparecchiature elettriche elettroniche Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilit elettromagnetica Direttiva EMC 2004 108 EC In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE Qualit dei cavi di segnale dei pressacavi e dei connettori La Brooks Instrument offre cavi d alta qualit conformi ai reguisiti della certificazione CE Qualora vengano utilizzati cavi di segnale propri devono essere scelti con schermatura al 100 e interamente filtrati connettori D o rotondi devono essere schermati con schermatura metallica In caso di necessita bisogna utilizzare pressacavi metallici di collegamento per fissare la schermatura del cavo La schermatura del cavo deve far contatto col guscio metallico o col pressacavo il cavo deve essere schermato su entrambi i lati a 360 La schermatura deve essere effettuata
15. n 1 Laitteet jotka ovat suurempia kuin 25 mm tai 1 tuuma ovat PED I II III kategorien mukaisia e Mittarit joiden koko on alle 25 mm tai 1 tuuma ovat hyv n konepajak yt nn n SEP mukaisia Eurooppalainen direktiivi s hk magneettisesta yhteensopivuudesta EMC Brooks Instrumentin CE merkin saaneet s hk s hk iset laitteet t ytt v t EMC direktiivin vaatimukset ja testit s hk magneettisesta yhteensopivuudesta 2004 108 EC EMC direktiivi Erityist huomioita on kiinnitett v CE merkittyjen laitteiden k yt ss olevien kaapelien valintaan Kaapelien kiinnikkeiden ja liittimien laatu Brooks Insturmentin kaapelit ovat korkealaatuisia ja t ytt v t CE merkint direktiivin vaatimukset Muun valmistajan kaapelia k ytett ess on k ytett v 100 suojattua kaapelia Liittimien tulee olla h iri suojattua tyyppi Tarvittaessa k ytet n metallisia kiinnikkeit kaapelin suojuksen kiinnitt miseen Kaapelin suojakuoren pit olla yhdistettyn metallisuojukseen tai laippaan ja sen pit olla molemmista p ist suojattuna 360 Suojaus p ttyy maadoitukseen Standardin mukaan korttien liittimet eiv t ole metallisia K ytettyjen kaapelien suojaus on oltava 100 jotta se t ytt isi CE merkinn n direktiivin vaatimukset Suojaus p ttyy maadoitukseen Napojen j rjestys Katso liitteen oleva k ytt opas Elektrostaattinen purkaus ESD VAROITUS Tuote sis lt elektroniikkakomponentteja
16. All pressure equipment with an internal pressure greater than 0 5 bar and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Specifications Section of this manual contains instructions related to the PED directive Meters described in this manual are in compliance with EN directive 97 23 EC All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are in compliance with PED category II or III Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP European Electromagnetic Compatibility EMC The Brooks Instrument electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 2004 108 EC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks Instrument supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shie
17. Procedimento 1 Pressurize lentamente o sistema Abra lentamente as valvulas para evitar variag es bruscas de caudal 2 Verifigue se ha fugas nas ligac es de entrada saida do medidor de caudal Se n o detectar fugas poder colocar o sistema pressao de trabalho e Antes de efectuar qualquer opera o de manuten o verifique sempre a possibilidade do equipamento estar sob press o No caso de ser preciso substituir pegas estas devem ser as recomendadas pela Brooks Instrument e o trabalho de substituigao devera ser efectuado por tecnicos qualificados Procedimentos e pegas n o conformes poder o alterar o desempenho do eguipamento danific lo ou colocar em risco a sua seguranga ou de outros Substituir pegas por outras nao originais meramente semelhantes podera originar chogues el ctricos fogo ou em funcionamento inadeguado Dever manter o equipamento intacto e fechado verificando se as coberturas de protec o est o nos seus lugares devidos de forma a evitar choques el ctricos e ou danos pessoais excepto no caso de se tratar de um t cnico qualificado e se estiver a executar trabalhos de manuten o ATEN O Se por qualquer raz o for necess rio fechar as v lvulas a montante e jusante do equipamento tenha em aten o que o mesmo dever ser previamente esvaziado do flu do que o atravessa Esta obriga o surge do facto de existir a possibilidade de ocorrer dilata o t rmica do l quido no interior do aparelh
18. intensitate Componentele defectate cu toate c n aparen sunt func ionale duc n timp la defec iuni incipiente Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541C007 AAG Slovak Zakladne prikazy Pre ta pred in tal ciou Brooks Instrument svoje v robky projektuje vyr ba a testuje takym sposobom aby tieto vyhoveli dom cim aj medzin rodn m norm m Tieto zariadenia je potrebn predp san m sp sobom in talova prev dzkova a udr iava na zabezpe enie ich spolahlivej a norm lnej prev dzky v celom pracovnom rozsahu Ni ie uveden pr kazy je potrebn dodr iava a za leni do programu bezpe nostn ch predpisov v priebehu in tal cie prev dzky a dr by v robkov Brooks Instruments V z ujme zabezpe enia vyhovuj ceho v konu in tal ciu prev dzku programovanie aktualiz ciu a dr bu zariaden m vykon va v lu ne odborne kvalifikovan person l e Pred in tal ciou prev dzkou a servisu zariaden je potrebn pre ta v etky pr kazy Ak t to pr ru ka nie je spr vna tak na zadnej strane treba n js miestneho distrib tora kontaktova ho pre al ie inform cie Pre neskor ie inform cie uschovajte pr ru ku UPOZORNENIE Neprev dzkova zariadenie v rozsahu mimo rozsahu uvedenom v prev dzkovej pr ru ke Poru enie tohto ozn menia m e ma za n sledok a k ujmu na zdrav a vedie k po ko
19. lagring eller terl mnande till fabriken Anm rkningar Dessa instrument r ej unika vad g ller dess ESD Elektrostatiska urladdningar k nsliga komponenter De flesta samtida konstruktioner inneh ller komponenter som utnyttjar metalloxid teknologi NMOS SMOS 0 s v Erfarenhet har visat att ven sm m ngder av statisk elektricitet kan skada eller f rst ra dess komponenter Skadade komponenter ven om de annars verkar fungera ordentligt har ofta en kortare livsl ngd Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007 AAG October 2014 Brooks Flomega THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG Brooks Flomega October 2014 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by u
20. s vnit n m tlakem vy m ne 0 5 baru g a velikosti v t ne 25 mm nebo 1 palec se vztahuje platnost sm rnice o tlakov m za zen PED Kapitola Technick daje v t to p ru ce obsahuje d le it bezpe nostn a provozn pokyny souvisej c se sm rnic PED M ic p stroje popsan v t to p ru ce jsou v souladu se sm rnic EN 97 23 ES O V echny pr tokom ry spole nosti Brooks Instrument spadaj do r mce Kapaliny skupina O M ic p stroje v t ne 25 mm nebo 1 palec jsou v souladu se sm rnic PED kategorii II nebo III M ic p stroje s velikosti 25 mm nebo 1 palec a men spadaj do ramce Spr vn ch technick ch postup SEP Evropsk sm rnice pro elektromagnetickou kompatibilitu EMC Elektrick elektronick za zen Brooks Instrument nesouc zna ku CE bylo sp n testov no dle p edpis pro elektromagnetickou kompatibilitu sm rnice EMC 2004 108 EC V b ru sign ln ch kabel pro pou it se za zen m ozna en m CE je nutn v novat zvl tn pozornost Kvalita sign ln ch kabel kabelov ch pr chodek a konektor Brooks Instrument dod v vysoce jakostn kabely spl uj c po adavky kvalitativn ho za azen CE Pokud chcete pou t vlastn sign ln kabely zvolte typy s kvalitn m st n n m v ech il a v cel d lce trasy V p pad pou it konektor kruhov ch nebo tvaru D
21. Part Number 541C007AAG Brooks GF40 GF80GF81 Devices October 2014 Swedish V sentliga anvisningar L s detta innan du forts tter Brooks Instrument konstruerar tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder Dessa produkter m ste installeras p r tt s tt handhas och underh llas f r att de skall fungera kontinuerligt enligt deras normala specifikation De f ljande anvisningarna b r f ljas och integreras till Ert s kerhetsprogram varje g ng n r Brooks Instruments produkter installeras handhas och underh lls F r att angiven funktion anv nd kvalificerad personal till att installera handha uppgradera och serva produkten Las alla instruktioner innan produkten installeras startas upp och underhalls Om du finner att denna instruktionshandbok inte r den r tta instruktionsboken titta pa i slutet av p rmen f r information om hur man kan kontakta lokala representanter Spara denna instruktions manual f r senare behov VARNING K r inte detta instrument utanf r dess specifikationer som r angiven i Instruktionsboken Undvikande att ta denna varning kan leda till allvarliga personliga skador och eller skada utrustningen Om du inte f rst r nagon av dessa instruktioner kontakta din representant f r Brooks Instrument f r klarl ggande F lj alla varningar och instruktioner som f ljer med leveransen
22. Prima di effettuare manutenzione controllare che la linea di processo non sia sotto pressione avete bisogno di pezzi di ricambio il personale specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument Attivit e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza La sostituzione con pezzi di ricambio non originali pu causare incendi pericolo di scosse elettriche o funzionamento improprio e Tutti gli sportelli dellimpianto devono essere chiusi le cappe di protezione devono essere al loro posto per evitare scosse elettriche e lesioni personali tranne quando il personale specializzato esegue lavori di manutenzione ATTENZIONE In caso di apparecchiature in cui scorre un liquido se per qualsiasi motivo bisogna chiudere le valvole d entrata e d uscita accanto all apparecchiatura allora si deve svuotare completamente l apparecchiatura L inosservanza pu causare la dilatazione termica del liquido che pu danneggiare Papparecchiatura e provocare lesioni alle persone Direttiva europea relativa alle apparecchiature a pressione PED Ogni apparecchiatura a pressione con pressione interna maggiore di 0 5 bar g e pi grande di 25 mm o di 1 pollice ricade nell ambito della Direttiva Europea relativa alle apparecchiature a pressione PED II capitolo Dati tecnici del manuale contiene le disposizioni relative alla direttiva PED
23. ase Instrucciones de operaci n adjuntas Descarga Electroest tica ESD PRECAUCI N El aparato incluye piezas electr nicas que son susceptibles a los da os provocados por la electricidad est tica Observar los adecuados procesos para remover instalar o manipular las tareas y medios de circuitos el ctricos internos Proceso de operaci n Desconectar la fuente el ctrica de la unidad La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar sacar o ajustar el circuito impreso el ctrico u otro medio interno El circuito impreso debe ser transportado en embalaje conductivo Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente directamente antes de la instalaci n Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulaci n almacenamiento o devoluci n a la f brica Notas Esto equipo no es el nico contenido de piezas susceptibles a la descarga electroest tica ESD En la mayor a de los medios electr nicos modernos se encuentran piezas fabricadas por tecnolog a de xido met lico NMOS SMOS etc Las experiencias confirman que incluso una m nima electricidad est tica puede da ar o destruir dichos medios Las piezas averiadas aunque funcionen aparentemente bien indican una falla inicial A 20 Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng
24. dentro da sua gama de utiliza o As instru es seguintes devem ser durante a instalag o uso e ou manutengao dos eguipamentos da Brooks Instrument apreendidas e integradas no plano de protecg o e seguranca no trabalho Para assegurar o desempenho adeguado a instalag o explorag o actualizag o e ou manuteng o do eguipamento deve ser realizada exclusivamente por pessoal qualificado e Antes de instalar utilizar e ou executar opera es manuten o devem ser lidas todas as instru es do equipamento No caso do presente manual n o ser apropriado procure na capa traseira o distribuidor mais pr ximo e contacte o para obter informa es adicionais Guarde este manual para futura refer ncia ATEN O n o sujeite o equipamento a condi es fora das gamas de servi os indicadas Ao n o respeitar esta advert ncia poder provocar avarias no equipamento e ou danos pessoais Se as instru es deste manual n o estiverem suficientemente claras contacte o representante Brooks Instrument para esclarecer as suas duvidas sempre presente todas as advert ncias apelos e instru es indicadas no equipamento e ou fornecidas junto com o mesmo e A instala o do equipamento dever ser efectuada cumprindo todas as instru es indicadas no manual assim como as normas e regulamentos locais e nacionais vigentes Ligue o equipamento exclusivamente a fontes de energia el ctrica e ou pneum tica adequadas
25. der Anschl sse Zufluss und Ausfluss des Durchflussmessers auf Undichtigkeiten berpr fen Wenn das System dicht ist auf Betriebsdruck hochfahren Sicherstellen dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird Wenn Ersatzteile ben tigt werden stellen Sie sicher dass qualifizierte Personen Ersatzteile verwenden die von Brooks Instrument vorgegeben sind Nicht genehmigte Teile und Verfahren k nnen die Leistungsf higkeit des Produkts beeintr chtigen und den sicheren Betrieb Ihres Prozesses gef hrden hnlich aussehende Austauschteile k nnen zu Br nden elektrischen Gefahren oder nicht sachgerechtem Betrieb f hren Stellen Sie sicher dass alle T ren der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind um Stromschl ge und Personensch den zu vermeiden es sei denn die Wartungsaufgaben werden von qualifizierten Personen durchgef hrt WARNUNG Werden die Ein und Auslassventile neben Durchflussmessger ten aus irgendwelchen Gr nden geschlossen so m ssen die Ger te komplett entleert werden Durchflussmessgeraete muessen vor dem Schliessen von Ein und Auslassventilen komplett entleert werden anderenfalls kann es zu einer thermischen Ausdehnung der Fl ssigkeit und damit zum Bruch des Ger tes kommen Personensch den k nnen die Folge sein Europ ische Druckger terichtlinie PED Alle Druckger te mit einem internen Druck von mehr als 0 5 bar g und einer Gr e von mehr als tin 1 in
26. esperienze dimostrano che l elettrostaticit anche in piccola misura pu danneggiare o rovinare gli strumenti componenti danneggiati anche se all apparenza funzionano correttamente potrebbero manifestare il difetto rapidamente Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks GF40 GF80GF81 Devices October 2014 Latvian Svariga instrukcija Pirms turpinat izlasiet Brooks Instrument projekta ra o un parbauda savus ra ojumus atbilsto i daudziem nacionalajiem un starptautiskajiem standartiem Lai nodro inatu o izstradajumu turpmaku darbibu atbilsto i noteiktajiem parametriem tie ir pareizi jauzstada jalieto un jaapkopj Uzstadot lietojot Brooks Instrument izstradajumus un veicot to apkopi ir jaiev ro Sie noradijumi un jaieklauj tie jusu dro ibas programma Lai nodro inatu pienacigu izstradajuma sniegumu izstradajuma uzstadi anu lieto anu atjaunina anu programm anu un apkopi uzticiet veikt tikai kvalific tam person lam Pirms izstradajuma uzstadi anas lieto anas un apkalpo anas izlasiet visus noradijumus Ja ST instrukciju rokasgramata nav pareiza izstradajumam atbilsto a rokasgramata l dzu skat aizmugur jo v ku kur ir sniegta viet j tirdzniecibas biroja kontaktinformacija BRIDIN JUMS Nelietot instrumentu rpus Instrukciju un lieto anas rokasgr mat nor ditajiem parametriem i bridinajuma neiev ro an
27. fait une ventuelle dilatation thermique du fluide peut casser l appareil et provoquer des blessures Directive europ enne quipements sous pression PED Tous les quipements sous pression dont la pression interne est sup rieure 0 5 bar pression relative et dont la taille d passe 25 mm ou un pouce entrent dans le cadre de la directive PED e La section c Sp cifications de ce manuel contient les instructions relatives la directive PED Les appareils de mesure de ce manuel sont conformes la directive EN 97 23 EC e Tous les d bitm tres Brooks Instrument fonctionnent avec des fluides de groupe 1 Les appareils de mesure d une taille sup rieure a 25 mm ou un pouce entrent dans la cat gorie PED I Il ou III Les appareils de mesure d une taille inf rieure ou gale 25 mm ou un pouce rel vent des bonnes pratiques d ing nierie SEP Compatibilit lectromagn tique europ enne CEM L quipement Brooks Instrument lectrique lectronique portant le marquage CE r pond la r glementation en mati re de compatibilit lectromagn tique directive CEM 2004 108 EC Il faut cependant pr ter une grande attention au choix du c ble d interconnexion utiliser avec l quipement marqu CE Qualit du c ble d interconnexion des presse toupes et connecteurs Brooks Instrument fournit un ou des c bles de qualit sup rieure qui r pondent aux sp cifications exig es pour la certif
28. flow measurement devices designed for accurately measuring and controlling flows of liguids This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks Models 5881 5882 Mass Flow Controllers and Models 5891 5892 Flow Meters This manual is organized into the following sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance 8 Troubleshooting Section 5 Parts List Section A Essential Instructions Back Cover Warranty Service and Support It is recommended that this manual be read in its entirety before attempting to operate or repair The Brooks Models 5881 5882 consist of three basic units a flow sensor a control valve and an integral electronic control system Designed to operate at 15 Vdc or 24 Vdc the Models 5881 5882 monitor and maintain a stable mass flow relatively independent of pressure and temperature variations Standard features include a Thru flow patented design of the sensor b In line type control valve c Soft start d Valve override e Low command valve inhibit f Flow output limiting g Temperature of heater output 14 Section 1 Introduction Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG Brooks Flomega October 2014 1 3 Specifications _ PP PR O O T T TZS WARNING Do not operate this instrument in excess of the spec
29. hat lyos helyi s nemzeti el r sok szerint telep tse a berendez st term keket kiz r lag a megfelel elektromos s nyom sell t forr sra k sse Menete 1 Lassan helyezze nyomas al rendszert Lassankent nyissa ki az zemi szelepeket az raml singadoz s elker l se rdek ben 2 Ellen rizze nincs e sziv rg s az raml sm r be s kimeneti bek t sein l Ha nincs sziv rg s t ltse fel a rendszert az zemi nyom sra Szervizel s el tt mindenk ppen ellen rizze hogy az zemi vezet k nincs e nyom s Amennyiben cserealkatr szekre van sz ks g mindenk ppen szakk pzett szem lynek kell kezelnie a Brooks Instrument ltal meghat rozott cserealkatr szeket A nem enged lyezett alkatr szek s tev kenys gek befoly solhatj k a term k teljes tm ny t illetve vesz lyeztethetik a biztons gos zemeltet st A puszt n hasonl alkatr szekkel t rt n helyettes t s t zet ram t svesz lyt vagy el gtelen m k d st eredm nyezhet berendez s sszes ajtaja mindenk ppen legyen z rva a v d burkolatok pedig legyenek a hely k n az ram t s s a szem lyi s r l sek elker l se rdek ben kiv ve ha szakk pzett szakember v gez rajta karbantart si munk kat A FIGYELEM Folyad kot ramoltat berendez sek eset ben ha b rmilyen okb l el kell z rni a berendez s melletti ki s bel p szelepeket a berendez st teljesen le kell r teni Ennek elmu
30. install s utilis s et entretenus pour pouvoir fonctionner dans le cadre de leurs sp cifications normales Les instructions qui suivent doivent tre respect es et int gr es votre programme de s curit lors de l installation l utilisation et l entretien des produits Brooks Instrument Afin d assurer un fonctionnement correct faites appel du personnel qualifi pour l installation l utilisation la mise jour la programmation et l entretien du produit Lisez toutes les instructions avant l installation l utilisation et l entretien du produit Si le pr sent manuel d utilisation n est pas le bon consultez la derni re page de la couverture pour conna tre le point de vente le plus proche Conservez ce manuel d utilisation pour pouvoir vous y reporter par la suite AVERTISSEMENT n utilisez pas cet instrument au del des sp cifications num r es dans le manuel d utilisation Le non respect de cet avertissement peut entra ner de graves blessures et ou endommager l quipement Si vous ne comprenez pas l une des instructions prenez contact avec un repr sentant de Brooks Instrument pour obtenir des explications Tenez compte de tous les avertissements pr cautions et instructions marqu es sur le produit et fournies avec celui ci Installez votre quipement de la fa on indiqu e dans les instructions d installation du manuel d utilisation et conform ment la l gislation en vigueur au niveau local et national
31. jotka voivat vahingoittua staattisesta s hk st Sis isten piirilevyjen purkamisessa asennuksessa ja k sittelyss tulee noudattaa kaikkia m r yksi ja ohjeita Asennusohjeet 1 J rjestelm n s hk t katkaistaan 2 Laitteen kanssa ty skentelev henkil on suojattava s hk iskuilta rannehihnalla tai muulla suojavarustuksella ennen piirilevyn tai muun sis osan asennusta poistamista tai korjaamista 3 Piirilevyt kuljetetaan konduktiivisessa pakkauksessa Piirilevyt puretaan paketista juuri ennen asennusta Poistettu piirilevy on heti pakattava soveltuvaan suojapakkaukseen kuljettamista varastoimista tai palautusta varten Huomautukset Tuotteen herkkyys elektrostaattiselle purkaukselle ESD ei ole ep tavallista Suurin osa elektroniikkatuotteista sis lt komponentteja jotka hy dynt v t metallioksiditekniikkaa NMOS SMOS jne Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite n ytt isi toimivan normaalisti Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541C007 AAG French Instructions essentielles A lire avant de commencer Brooks Instrument congoit fabrigue et teste ses produits pour r pondre a de nombreuses normes nationales et internationales Ces produits doivent tre correctement
32. llig f r elektrostatische Entladung sind Die meisten modernen elektronischen Ger te enthalten Komponenten die die Metalloxidtechnologie NMOS SMOS etc verwenden Die Erfahrung hat gezeigt dass schon geringe Mengen elektrostatischer Energie ausreichen um diese Ger te zu besch digen oder zu zerst ren Besch digte Teile fallen fr h aus obwohl sie funktionsf hig zu sein scheinen Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541 C007 AAG Greek Baoik s odnyiec AiapdoTe OUVEXIOETE H Brooks Instrument oxedi ger TTAP VE KAI OKI L E TA TNG OUNN PPWON pe TTA BOC EOVIKWV Kai IEBVWV TTPOT TTWV XP ON Kai OUVT PNO TOUS ATTOTEAEI TTPO TT BEON TNG Aerroupyiag EVTOG TWV opiwv Ol TTAPAK TW O NVIEG TIPETTEI TNPO VTAI KAI TTP TTEI VA EVOWHATWBOUV oro AOPG EIGG Tnv Kal OUVT PNON Trpo vrwv TNG Brooks Instrument OWOT Aeiroupyia evnu pwon TTPOYPAHHATIOH G KAI TTP TTEI VA VIVETAI OTTO EI IKEUUEVO TTPOOWITTIK NiaB oTe Aec TIG O NYIEG rrpiv EYKATAOTIJOETE AEITOUPY OETE KAI OUVTNPAOETE TO rrpoi v rrap v Eyxelpidio TO OWOT EVXEI
33. mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas 1 888 554 FLOW O Europe D 31 0 318 549 290 C QUALI Asia TT 81 0 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS Brooks ra reed ERA dead Brooks Instrument LLC FIOMOG A ESF Brooks Instrument LLC KATE Ze rue va aut ae ia diana lla DuPont Dow Elastomers Teflon ctr innen E I DuPont de Nemours 8 Co VOR m anne Swagelok Co MTOM ee DuPont Performance Elastomers Brooks Instrument 407 West Vine Street P O Box 903 Hatfield PA 19440 0903 USA T 215 362 3700 F 215 362 3745 E Mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Neonstraat 3 6718 WX Ede Netherlands T 31 0 318 549 300 F 31 0 318 549 309 E Mail BrooksEuQBrooksinstrument com O Copyright 2014 Brooks Instrument LLC All rights reserved Printed in U S A
34. naudotu Brooks Instrument nurodytas pakaitines dalis Netinkamos dalys ir proced ros gali pakenkti gaminio veikimui ir pavoju saugiai j sy proceso eksploatacijai Tik pana iai atrodantys pakaitalai gali salygoti gaisra elektros pavojus ar netinkama veikima e U tikrinkite kad visos rangos durel s b t u darytos o apsauginiai dang iai u d ti kad i vengtumete elektros sm gio ir su eidim i skyrus kai kvalifikuoti darbuotojai atlieka prie i ros darbus A SP JIMAS naudojant skysto srauto renginius jei d l kokios nors prie asties prireikia u daryti alia renginio esan ius leidimo ir i leidimo vo tuvus i renginio reikia i leisti vis skyst To nepadarius galimas iluminis skys io pl timasis galintis sugadinti rengin ir su eisti mon s Europos sl gin s rangos direktyva PED Visa sl gin ranga kurios vidinis sl gis didesnis nei 0 5 bar g o dydis didesnis nei 25 mm arba 1 colis yra reglamentuojama sl gin s rangos direktyvos PED ios instrukcijos dalyje Techniniai duomenys pateikiami nurodymai susij su PED direktyva e Sioje instrukcijoje apra yti matuokliai atitinka Europos S jungos direktyv 97 23 EB O Visi Brooks Instrument srauto matuokliai priklauso 1 skys iu grupei e Didesni nei 25 mm arba 1 colis matuokliai atitinka PED I Il arba III kategorij 25 mm arba 1 colio ar ma esni matuokliai atitinka tinkam in inerijos pr
35. nstalleerd verwijderd of aangepast 3 Printplaten moeten in een geleidende verpakking worden vervoerd De platen mogen pas vlak voor de eigenlijke installatie uit de beschermende verpakking worden gehaald Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getransporteerd opgeslagen of teruggestuurd naar de fabriek Opmerkingen Dit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie NMOS SMOS enz Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen Beschadigde componenten zelfs als ze goed lijken te functioneren raken eerder defect Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541C007 AAG Estonian Olulised juhised Enne kasutamist lugege hoolikalt labi Brooks Instrument konstrueerib valmistab ja katsetab oma tooteid selliselt et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite n uetele Ainult n uetekohane paigaldamine kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames Brooks Instrument i toodete paigaldamisel kasutamisel ja hooldamisel tuleb t ita allj rgnevaid juhiseid ja integreerida need asjakohasesse ohutuspro
36. relative high flows more heat current is involved the thermal lag of the fluidum increases Also the decreasing operation of the guideline reduces the outstanding performance of the device For flows up to 1000 g h the design has been changed to overcome above mentioned problems The guideline is left out to reduce the thermal lag effects Since the heat gradient now varies with flow two extra sensors T5 and T6 are added to measure the heat gradient at T1 T2 see Figure 3 2 With this technigue flows up to 1000 g h can be measured with high accuracy This new technigue is used in Models 5882 5892 The Flomega Model 5881 82 liguid mass flow controller consists of the same unique sensor design In addition an in line control valve and control electronics are included This control valve differs from the traditional Brooks 5800 Series mass flow controllers for gases In the latter expansion of the flow in the control valve compartment may lead to outgassing of the fluid and influences the controllability of the mass flow controller easily A manual degassing of the valve would be required Therefore Brooks Instrument developed an in line control valve especially designed for accurately controlling the liquid flowrates Dead volumes in the flow path have been eliminated as much as possible to ensure troublefree operation For easy maintenance the valve orifice is field adjustable Heater WEIN T6 i i 1 8 5 z fluidum tempera
37. signal cable to be used with CE marked eguipment Quality of the signal cable and cable connectors Brooks standard supplies high quality cable s which meets the specifications for CE certification e If you provide your own signal cable you should use a cable which is overall completely screened with at least 100 shield Cable connectors used should be made from metal and cable glands should either be metal or metal shielded The cable screen should be connected to the metal connector or gland and shielded at both ends over 360 degrees For pin configuration please refer to Figure 2 1 Cables suitable for a temperature of at least 90 shall be used Recommended installation procedures a The flow controller or sensor should be inspected for cleanliness or any visible external damage after it is removed from its shipping container The FLOMEGA should be located in an atmosphere with vibration levels lower than SAMA PMC 31 1 condition 3 Leave sufficient room for access to the electrical components Install in such a manner that it permits easy removal if the instrument reguires cleaning o ao CAUTION The Models 5881 5892 can be installed in any position However mounting orientations other than original factory calibration position mounting holes down may require re zeroing to regain the specified accuracy 2 5 2 6 Section 2 Installation Brooks Flomega 2 13 Start Up Guidelines
38. szabv nynak Ezeket a berendez seket megfelel en kell telepiteni zemeltetni s karbantartani ahhoz hogy mindenk ppen a norm l m k desi tartom nyuknak megfelel en zemelhessenek Az alabbi utasitasokat be kell tartani s be kell p teni a munkavedelmi programba a Brooks Instrument term keinek telepit se zemeltet se s karbantart sa soran A megfelel teljes tm ny garant l sa rdek ben kiz r lag szakk pzett szem lyzet v gezze a term k telep t s t zemeltet s t friss t s t programoz s t s karbantart s t Valamennyi utas t st el kell olvasni a term k telep t se zemeltet se s szervizel se el tt Amennyiben ez a k zik nyv nem a megfelel kiadv ny a h ts bor t n keresse meg a helyi forgalmaz t s tov bbi t j koztat s rt l pjen kapcsolatba vele rizze meg ezt a k zik nyvet k s bbi t j koztat sk nt FIGYELEM Ne m k dtesse a berendez st az zemeltet si utas t sban megadott zemi tartom nyokon t l Ennek megs rt se s lyos szem lyi s r l shez vagy a berendez s meghib sod s hoz vezethet e Amennyiben a gepk nyv utas t sai nem egy rtelm ek l pjen kapcsolatba Brooks Instrument k pvisel j vel hogy tiszt zz k a probl m t be a berendez sen felt ntetett vagy azzal egy tt sz ll tott sszes figyelmeztet st felh v st s utas t s e megfelel telep t si utas t sban megadott utas t sok valamint a
39. to the valve override terminal V O R Note For normal operation terminal 12 must be left open floating 2 3 2 4 Section 2 Installation Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks Flomega October 2014 Function Wire Color C evde to 24 Vdo Spy Re Pin 6 5881 91 No Function Pin 6 5882 92 Temp Heater Pin No 1 BERE 3 4 EE 6 8 Command GreyPink 10 11 i 12 Figure 2 1 Siandard 12 Pole Circular Connector and Pin Functions Installation and Operation Manual Section 2 Installation X TMF FM MFC eng Part Number 541C007AAG October 2014 Brooks Flomega 2 12 Installation ACAUTION When installing the Mass Flow Controller or Meter care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until time of installation A CAUTION Any sudden change in system pressure may cause mechanical damage to elastomer materials Damage can occur when there is a rapid expansion of fluid that has permeated elastomer materials The user must take the necessary precautions to avoid such conditions The Brooks electrical electronic eguipment bearing the CE mark has been succesfully tested to the regulations of the Electro Magnetic Compatability EMC directive 89 336 EEC Special attention however is reguired when selecting the
40. ATIBILITY Products in this manual may contain metal or elastomeric seals gaskets O rings or valve seats It is the user s responsibility to select materials that are compatible with their process and process conditions Using materials that are not compatible with the process or process conditions could result in the Meter or Controller leaking process fluid outside the pressure boundary of the device resulting in personnel injury or death It is recommended that the user check the Meter or Controller on a regular schedule to ensure that it is leak free as both metal and elastomeric seals gaskets O rings and valve seats may change with age exposure to process fluid temperature and or pressure No routine maintenance is required to be performed on the Models 5881 5892 other than occasional cleaning It is recommended a non residual solvent be used for cleaning the flow sensor and control valve If an in line filter is used the filtering element should periodically be replaced or ultrasonically cleaned WARNING If it becomes necessary to remove the instrument from the system power to the device must be disconnected CAUTION It is important that this instrument be serviced only by properly trained and qualified personnel Proper purging techniques should be followed before removing the flow controller from a system 4 1 4 2 Section 4 Maintenance amp Troubleshooting Brooks Flomega 4 2 Dis
41. Branchez tous les produits aux sources d lectricit et de pression agr es e Utilisation 1 Faites lentement entrer le d bit dans le syst me Ouvrez progressivement les vannes de proc d pour viter des pics de d bits 2 V rifiez qu il n y a pas de fuite au niveau des branchements d entr e et de sortie du d bitm tre S il n y a pas de fuite amenez le syst me sa pression d utilisation Avant de proc der l entretien assurez vous que la conduite de proc d n est plus sous pression Lorsqu il faut remplacer une pi ce assurez vous que les pi ces de rechange sont celles indiqu es par Brooks Instrument et que des personnes qualifi es effectuent le remplacement Les pi ces et proc dures non autoris es peuvent porter atteinte au fonctionnement du produit et mettre en p ril la s curit de votre proc d Les remplacements par des pi ces d apparence similaire peuvent entra ner des incendies des risques lectriques ou un mauvais fonctionnement V rifiez que toutes les trappes de l quipement sont ferm es et que les couvercles de protection sont en place pour viter les chocs lectriques et les blessures sauf lorsque l entretien est r alis par des personnes qualifi es AVERTISSEMENT dans le cas d appareils coulement liquide si les vannes d entr e et de sortie adjacentes aux appareils doivent tre ferm es pour une raison quelconque les appareils doivent tre compl tement vidang s Si cela n est pas
42. Brooks Instrument 1 4 4 Kitasuna Koto Ku Tokyo 136 0073 Japan T 81 0 3 5633 7100 F 81 0 3 5633 7101 E Mail BrooksAs Brooksinstrument com BROOKS INSTRUMENT
43. Disassembly Use a screwdriver to remove the orifice through the process connection from the outlet body Take care ofthe O ring Apply Nitrogen gas flow at 2 bar inlet pressure Screw the orifice in the outlet body and adjust till 0 output signal has been reached again Checkif value opens at 5 7 Vdc if not adjust orifice final turn clock wise Installation and Operation Manual Section 4 Maintenance amp X TMF FM MFC eng Troubleshooting Part Number 541C007AAG October 2014 Brooks Flomega 4 3 Troubleshooting Guidelines A WARNING Service and troubleshooting should be performed only by personnel who have been trained in safe repair procedures and have thoroughly read this manual General Before applying power remove cover of the housing and check jumper setting see calibration sheet and make sure that the valve connector has been fixed correcily Controller only After applying power wait at least 35 minutes to allow the unit to warm up Troubleshooting Guidelines on following page Refer to Table 4 1 for symptoms possible causes and remedies 4 3 4 4 Section 4 Maintenance amp Installation and Operation Manual Troubleshooting X TMF FM MFC eng Part Number 541 C007AAG Brooks Flomega October 2014 Table 4 1 Troubleshooting Symptom Possible Cause Ta No power Check power wiring 1b Electronic failure Return to factory Controller Indicates 2a Liguid source is empt
44. EOETE rj pUBLIOETE K PTEG TUTTWH VWV KUKAWH TWY EOWTEPIK IGTA N 3 Ol K PTEG TUTTWHEVWV KUKAWHOTWV TTP TTEI VA HETAPEPOVTAI OE OUOKEUAOIA OTTO AYWYINO OI K PTEG TTPETTEI apaipeBo v ATT TO TTPOOTATEUTIK TTEPIBANHA HOVO TTPIV Tnv TOTTOBETNON Oi K PTEG TOU APAIPEONKAV TTPETTEI va TOTTOBETNOOUV CE TIPOOTATEUTIKI cuokeuao a yia OTO EPYOOTAOIO Maparnp josig H urrap n egapTnudTwv euaicenTwv ora ESD NA EKTPOOTATIKG EKKEVWONG HOVA IK XAPAKTNPIOTIK TNG OUOKEU G aurric OUYXPOVEG NAEKTPOVIKEG OUOKEU G TTEPIEXOUV EEAPTAUATA rexvoAoy ag HETAAAIKWV O eldiwv NMOS SMOS H rreipa xel arrodci el TI HIKP TTOO TNTA OTATIKOU N EKTPIOHOU APKEI yia TTPOKAAEOEI BAGBEG VA KATAOTPEWEI TIG OUOKEUEG AUTEG trou UTTEOTNOAV BA Bn kal av HOIG OUV va EITOUPYO V OWOT KIV UVEUOUV TTPWIUN AOTOXIA na A 9 A 10 Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks GF40 GF80GF81 Devices October 2014 Hungarian Alapvet utasitasok El sz r olvassa el ezeket A Brooks Instrument olyan m don tervezi gy rtja s teszteli term keit hogy azok megfeleljenek sz mos belf ldi s nemzetk zi
45. EPIK rou 0 5 bar g kal uey Gouc HEVAA TEPOU 25 mm TNG 1 IVTOAG eurrirrrel orig IAT EEIG TNG eupwrraik c O nyiag via egorrAioH ut Trigon PED To kep Aalo rou rrap vrog EYxEIPI IOU rrepihauB vel odnyiec OXETIK pe PED Ol HETPNTEG TTOU TTEPIYP POVTAI oro rrap v EYXEIP IO GUUHOPPWVOVTAI HE TNV EUPWTTAIKI O nyia 97 23 EK Brooks Instrument av kouv op a PEUOTWV 1 0 arr 25 mm 1 ivroa GUHHOPPWVOVTAI HE I II kai III Odnyiac PED Merpnr c 25 mm 1 rj Kal HIKPOTEPOI KaTUOKEUG OVTAI OUUPWVA LIE TOUG KAV VEG TNG T XVNG SEP Eupwrraik O nyia yia Tnv NAEKTPOHAYVNTIK OUHBATOTNTA O E OTTAIOH G Brooks Instrument Trou PEPEI ro CE XEI UTTOOTEI ETTITUXWG OKINEG TTOU rrpofA rrouv OI IAT EEIG TNG O ny ag via Tnv ouuBar rnra Odnyia 2004 108 EC wa Tnv EMC I IAITEPN TTPOOOXA OTNV rou KAAW IOU rov EEOTTAIOJI Trou PEPEI TO CE Not rnra KA W IWV OUATOG GTUTTIOBAITTTWV KAI BUOUATWV KAAW IWV H Brooks Instrument Trpoop per UWNANS TTOIOTNTAG KaAwdla orro a TTANPOUV CE Ze
46. Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG October 2014 Brooks Flomega Liquid MFCs MFMs Models 5881 5891 and 5882 5892 Brooks Flomega BROOKS www Brookslnstrument com INSTRUMENT Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG Brooks Flomega October 2014 Essential Instructions Read before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards These products must be properly installed operated and maintained to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing operating and maintaining Brooks Instrument products To ensure proper performance use qualified personnel to install operate update program and maintain the product Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference A WARNING Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual Failure to heed this warning can result in serious personal injury and or damage to the equipment If you do not understand any of the instructions contact your Brooks I
47. Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG October 2014 e Accurate upstream pressure regulation is reguired to ensure proper valve control operation Piping should be sized to avoid excessive pressure drops It is recommended to install the controller in a vertical upwards position This installation position will release the entrained gas in the valve compartment more easily A constant higher back pressure than atmospheric pressure is also beneficial for the stability of the control valve performance Note The control valve in the 5881 5882 provides precision control If positive shut off is required it is recommended a separate shut off valve be installed in line The controller body is machined to accept 5 16 24 threaded inlet and outlet fittings Make sure that the proper O ring size 902 and material is used when securing the fittings Note A CAUTION When used with a reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the instrument purged with clean dry before use a After the flow controller has been installed in the flow system and the connecting cable attached refer to Figure 2 1 apply power set the command to 100 and purge the controller with liguid to a minimum of 15 minutes or give V O R for some minutes This is most important if the p
48. Operation Manual Contents X TMF FM MFC eng Part Number 541 C007AAG October 2014 Brooks Flomega Paragraph Page Number Number Section 1 Introduction 1 1 PUDOSE EE 1 1 t2 NP edem acer vane aderen aliens te na at a ade 1 1 1 3 Specifications a i ne 1 2 Section 2 Installation 2 1 General cca n ac da dalla daca tata 2 1 2 2 heceiptot EQUIPMENT iter ctr ad aa S sa 2 1 2 3 Recommended Storage Practice siens 2 1 o 2 2 2 5 Transit oie ate dna iata dani iii a rr A RA 2 2 2 6 Removal from Storage nds cei si a i aid tne aa a aim a E ti A aaa ai d d 2 2 27 Inline Filt l aa a a dana ne 2 2 2 8 GONN CIONS vr uita O inea data a ba all tin at cana Dal ada aa i 2 3 2 9 Precision 5V Reference 2 2 3 2 10 Command ovinke Et 2 3 NS A O NA 2 3 2 12 E a 2 5 2 13 Start Up Guidelines usines 2 6 Section 3 Operation 8 1 Theory Operation zadan nee ite i deen a aasa a a atata da 3 1 3 2 Calibration Procedure 3 7 33 Ma ea LL nu 3 7 34 Rangeability pa a 3 7 Section 4 Maintenance amp Troubleshooting 4 1 General a a end 4 1 4 2 Disassembly and
49. PIDIO OUUBOUAEUBEITE TOW EGUIPUMO Ta OTOIXEIA ETTIKOIVWVIAG TOU TOTTIKO AVTITTPOOWITTOU PUAGETE TO EYXEIPI IO AUTO UENAOVTIK A NPOEIAOMOIHEH Mn As roupyeite OUOKEUN OUTI KGB UTT P ACN TUV opiwv Trou avayp dqovrai O nyiwv Kai Nerroupyiag H un ouuu pewon pe TNV TTPOLI OTTOINON AUT Hrropei va oe TTPOOWITIK KAI oTov E OTTA1OJO E TTEPITTTWON karav nong K TTOIAG O NVIEG NTAOTE IEUKPIVIOEIG ATT TOV TOTTIKO TNG Brooks Instrument TNPEITE NEG TIG TIPOEIDOTTOINOEIG TPOPUAGEEIS KAI O NVIEG Tou rj GUVO EUOUV To rrpoi v TN CUOKEU TTWG TTPOB ETTETAI orig O NVIEG EYKAT OTAONG TOU OWOTOU EYXEIPI OU O NYIWV KAI OTIC KE HEVEG TOTTIKEG KAI E VIK G IAT EEIG UVO OTE OTIG OWOTEG KAI TTIEONG Aiadikagia 1 va EEKIVAOEI apy po oro Avoigte apy BaABidec Aerroupyiag va ATTO P VETE TIG ATT TOLIEG AUEOHEIWOEIG pons 2 amp yia IAPPOEG OUVO OEIG EIO DOU KAI EEO OU TOU podpetpou Av UTT PXOUV IAPPOEG VEHIOTE TO G OTNUA H XPI n Trigon Tnv KAVOVIKI Trigon EPVAOIAG arr cuvrripnon BeBalwBg te
50. RZE ENIE W przypadku miernik w przep ywu cieczy je eli znajduj ce si na nich zawory wej ciowe i wyj ciowe maj by z jakiego powodu zamkni te to urz dzenie musi zosta ca kowicie opr nione z ciek ego medium Niedope nienie tego zalecenia mo e doprowadzi do termicznego zwi kszenia obj to ci cieczy co z kolei mo e spowodowa uszkodzenie urz dzenia i obra enia personelu Europejska dyrektywa dotycz ca urz dze ci nieniowych PED Wszystkie urz dzenia ci nieniowe pracuj ce przy ci nieniu wewn trznym wzgl dnym wi kszym ni 0 5 bara i wielko ci powy ej 25 mm lub 1 cala podlegaj dyrektywie europejskiej dotycz cej urz dze ci nieniowych PED Rozdzia Specyfikacja techniczna niniejszej instrukcji zawiera zalecenia dotycz ce dyrektywy PED Mierniki opisane w tej instrukcji s zgodne z dyrektyw EN 97 23 EC Wszystkie mierniki przep ywu firmy Brooks Instrument nale do 1 szej grupy cieczy Urz dzenia pomiarowe o wielko ci powy ej 25 mm lub 1 cala nale do kategorii II lub III dyrektywy PED Urz dzenia pomiarowe o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom Uznanej Praktyki In ynierskiej SEP Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej EMC Urz dzenia elektryczne elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE przesz y pozytywnie testy pod k tem spe niania przez nich wymog w kompatybilno ci elekt
51. TTEPITTTWON IKOU KAAW IOU orjparoc xpnoiporroie re KAAWSIO HE Owp kion 100 og onpeia T TTOU D rj KUKAIKG TTPETTEI XOUV xpnoiHoTroIndo v rrpor unon HETAAAIKOI OTUTTIOGAITITEG KAAWOIWV OTEP WON TNG Na ouv elgi Owp kion TOU KAAW IOU oro HETAAAIK KEAUPOG OTUTTIOONITTTI Kai va OWPAKIOTEI Kal d o 360 poipes Bwp k on TTPETTEI VA TEPUATITEI oe yeiwon E POUG Ta B ouaTa kpou EIVAI EK KATAOKEUNG XPNOIHOTTOIO HEVA TTPETTEI va xouv 100 Owp kion OUHHOPYWON TNV TTIOTOTTO NON CE H Owp kion rrp rrel va TEPPATITEI yeiwon Tia didra n akidwv Zuu ouAeu eite TO OUVNUNEVO EYXEIPI IO O NYIWV HAEKTPOOTOTIKH EKKEVWON ESD A lt H ouokeun OUTI Trepi xel NAEKTPOVIKG E APTIJHATA orro a HTTOPOUV va UTTOOTOUV EUKOAA BAGBEG ATTO rov OTATIKO NAEKTPIOHO Mp rrei va AKONOUBOUVTAI 01 OpOEG XEIPIOJOU KATA TNV apaipeon TOTTOB TNON rj AMO XEIPIGL TUV EOWTEPIKUV TTAAKETWV KAI IAT EWV OEOTE TN OUOKEU EKTOG T OEWC yia TN YE WON TOU TTPOOWITTIKOU pe MO AOPAAEG KAI KATAAANAO H OO TTPIV TOTTOBET OETE APAIP
52. a e ven Izjemljeno kartico nemudoma staviti v za itno embala o za gibanje skladi enje ali po iljanje nazaj Opombe Nije poseben pojav da se v napravi nahajajo ob utljivi sestavni deli na elektrostati no pra njenje ESD V ve em delu modernih elektronskih sredstev nahajajo se sestavni deli na kovinsko oksidno tehnologijo NMOS SMOS itd Izkustva potrjujejo da majhna stati na elektrika more po kodovati ali uni iti ta sredstva O kodovani rezervni deli e na videz dobro delajo naka ejo za etno napako Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541C007 AAG Spanish Instrucciones b sicas z iL alos primero El Brooks Instrument proyecta fabrica y prueba sus productos de manera que stos respondan a numerosas normas nacionales e internacionales Dichas instalaciones deben ser emplazadas operadas y mantenidas adecuadamente para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando operando y mantenimiento los productos Brooks Instrument O Para asegurar el adecuado rendimiento para instalar operar actualizar programar y mantener tiene gue realizarse exclusivamente por una persona calificada Antes de la instalaci n operaci n y servicio del producto leer todas las respectivas instrucciones Si el presente manual n
53. aa k ytt ja huoltaa k ytt ohjeiden mukaan jotta niiden toimivuus taataan Brooks Instrumentin laitteiden asennuksessa k yt ss ja huollossa on noudatettava soveltuvia m r yksi ja ohjeita lis ksi mainitut ohjeet on huomioitava ty suojelun ohjeistuksessa Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkil saa asentaa k ynnist p ivitt ohjelmoida ja huoltaa laitteita Lue kaikki k ytt ohjeet koskien tuotteen asennusta k ytt ja huoltoa Jos k ytt ohje on puutteellinen lis tietoja saa paikalliselta j lleenmyyj lt Yhteystiedot l ytyv t oppaan kansilehdest S ilyt ohjeet VAROITUS K ytt ohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja arvoja ei saa ylitt Rajoitusten laiminly nti voi aiheuttaa tuotteen rikkoutumisen ja tai vakavan henkil vahingon vaaran e Jos ohjeissa on ep selvyytt ota yhteytt Brooks Instrumentin edustajaan ongelman selvitt miseksi e Noudata kaikkia laitteessa olevia tai siihen liittyvi ohjeita m r yksia ja varoituksia e Laittteen asennuksessa on noudatettava erityisi asennusohjeita sek voimassa olevia paikallisia ja kansainv lisi m r yksi Laitteet saa yhdist vain soveltuvaan s hk ja paineverkkoon e Asennusohjeita 1 P st virtaus hitaasti j rjestelm n Avaa venttiilit hitaasti jotta virtaus pysyy tasaisena 2 Tarkista ettei virtausmittarin sis n ja ulosmenon vieress ole vuotoa Jos j rje
54. ad con las categor as I III de PED Los instrumentos de medici n m s peque os que 25 mm o 1 pulgada siguen la Pr ctica Aceptada de Ingenier a SEP Directriz Europea respecto a la Compatibilidad Electromagn tica EMC Las instalaciones de Brooks Instrument el ctricas electr nicas merecedores de la categor a CE cumplieron con xito las pruebas que verifican las exigencias de la compatibilidad electromagn tica directiva de EMC 2004 108 EC Al mismo tiempo se ha de prestar una especial atenci n en la selecci n de los cables de se al utilizados con los equipos marcados con CE Calidad de los cables de se al piezas de uni n de cable y conectores El Brooks Instrument ofrece cables de alta calidad que responden a los requerimientos de calificaci n CE Si se utiliza cable propio de la firma se ha de elegir uno que sea completamente filtrado con blindaje de 100 Las piezas de uni n de forma D o circular deben ser blindadas mediante blindaje met lica Si es necesario aplicar piezas de uni n de metal para sujetar el filtro de cable Conectar el filtro de cable a la caja o manguito de metal blind ndolo en ambas caras en 360 El blindaje debe terminar en tierra Los conectores que pertenecen a las tarjetas normalmente no son metalizados Los cables utilizados deben ser filtrados con una blindaje de 100 para responder a la calificaci n CE El blindaje debe terminarse en tierra Configuraci n de contacto V
55. aktika SEP Europoje taikomi elektromagnetinio suderinamumo EMC reikalavimai CE enklu pa ym ta Brooks Instrument elektrin elektronin ranga buvo s kmingai i bandyta pagal elektromagnetinio suderinamumo reikalavimus EMC direktyv 2004 108 EC Bet reikia ypatingo d mesio renkantis signalizavimo kabel kuris bus naudojamas su CE enklu pa ym ta ranga Signalizavimo kabelio kabeli riebok li ir jung i kokyb Brooks Instrument tiekia kokybi kus kabelius kurie atitinka CE sertifikavimo specifikacijas Jei naudojate savo signalizavimo kabel jis turi b ti visi kai ir visas ekranuotas 100 Y ekranu Naudojamos D arba apskrito tipo jungtys turi b ti ekranuotos metaliniu ekranu Jei taikoma reikia naudoti metalinius kabeli riebok lius u tikrinan ius kabelio ekrano suspaudim Kabelio ekran reikia jungti prie metalinio apvalkalo ar riebok lio ir ekranuoti abiejuose galuose 360 laipsni Ekranas turi baigtis j eminimu Standartin s kra tin s jungtys yra ne metalin s Naudojami kabeliai turi b ti ekranuoti 100 ekranu kad atitikt CE sertifikavim Ekranas turi baigtis jZeminimu Keturi kontakt konfig racija r prid t instrukcij ESD elektrostatinis i lydis A PERSPEJIMAS iame prietaise yra elektronini komponent kuriuos gali sugadinti statin elektra ISimant ar dedant vidines spausdintin s plok tes ar renginius arba atliekant su
56. al Section 3 Operation X TMF FM MFC eng Part Number 541 C007AAG October 2014 Brooks Flomega 3 2 Calibration Procedure AAA AN Note Calibration of the Flomega models requires the use of the digital voltmeter DVM and an accurate calibration standard It is recommended that calibration be performed only by trained and qualified service personnel a Install the Flomega in the flow calibration system Apply power open downstream shut off valve apply line pressure and set command voltage to 100 or apply V O R for some minutes Allow flow controller to purge with the calibration liquid for approximately 15 minutes b Set command voltage to 0 and close downstream shutt off valve Allow the controller to warm up for an additional 20 minutes c Reference REF adjustment Connect DVM Positive lead to pin REF and negative lead to the Common Adjust REF P1 for 5 Vdc 1 mV d Zero adjustment Connect DVM positive lead to OUTPUT Adjust zero for 0 mV 10 mV e Command 100 flow Wait 5 minutes f With command at 100 use the calibration standard to measure the mass flow rate Adjust span until the measured flow rate is within 0 5 of the desired flow rate g Set command to 0 and close the downstream shut off valve Wait approximately 10 minutes for the output signal to stabilize Adjust zero for O mV 10 mV Open downstream shut off valve h Command 50 flow Wait 5 minutes and measure the flow rate with the calibr
57. as rezultata var rasties traumas un vai aprikojuma bojajumi Ja j s nesaprotat kadu no instrukcijam sazinieties ar Brooks Instrument parstavi un l dziet izskaidrot to O lev rojiet visus bridin jumus piesardzibas m rus un instrukcijas kas noraditi uz izstr d juma vai pieg d ti kopa ar to o Uzst diet aprikojumu ta k tas noradits attiecigaja instrukciju rokasgramata ieklautaj uzst diSanas instrukcija un atbilsto i piem rojamajam viet j m un nacionalajam normam Pievienojiet visus izstradajumus pareiziem elektriskajiem un spiediena avotiem Lieto ana 1 L n m uzs ciet pl smu sist m Lai izvair tos straujiem pl smas k pumiem l n m atveriet procesa varstus 2 P rbaudiet vai nav nopl des ap pl smas m r t ja iepl des un izpl des savienojumiem Ja nopl des nav uzst diet sist m darba spiedienu O P rliecinieties par to lai pirms instrumenta tehnisk s apkopes b tu likvid ts procesa l nijas spiediens Ja ir nepiecie ams veikt k du da u nomai u nodro iniet lai tiktu izmantotas Brooks Instrument nor d t s da as un da u nomai u veiktu kvalific ts person ls Neat autu da u un proced ru izmanto ana var ietekm s ra ojuma sniegumu un samazin t procesa dro bu L dz gu bet ne identisku da u nomai as lieto ana var izrais t ugunsgr ka elektrisko trauc jumu riskus un nepareizu izstr d juma darb bu Nodro iniet lai b tu aizv rtas visas durvis un b tu
58. assembly and Assembly Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG October 2014 N OD GS OG Electronic Disassembly Remove the four screws from the top of the cover and remove cover Remove the four screws which hold the pc board assembly and gently pull the board from the base Disconnect the valve output cable and sensor cable connector from pc board To reassemble follow the above steps in reverse order Internal Disassembly Remove the insulation from the sensor assembly Remove the inlet and outlet connections Unscrew the 3 screws which hold the whole ssembly two are located at the outlet body and one just above the inlet body Genily pull the whole assembly from the base To reassemble follow the above steps in reverse order A layer of silicone must be laid inside and between the inlet outlet holes of housing and body Be sure a good thermal contact is obtained between copper heatsink and housing Valve Disassembly Unscrew the four high tensile allen head key screws Gently pull the outlet body from the valve assembly take care of the o ring Remove O ring from valve stem before removing the coil assembly and adapter plate and pull gently the valve stem out of the body take care of the O ring To reassemble follow above steps in reverse order Apply 3 5 Nm force to the screws 1 in a digital pattern Orifice
59. atakse h id inseneritavasid Euroopa elektromagnetilise hilduvuse direktiiv EM Brooks Instrument i elektrilised elektroonilised seadmed millele on omistatud CE t his on edukalt l binud asjakohased katsed ja vastavad elektromagnetilise hilduvuse n uetele EMU direktiiv 2004 108 EC Kuid signaalkaabli valimisel on vaja p rata suurt t helepanu CE t hisega seadmetele Signaalkaabli l biviigutihendite ja konnektorite kvaliteet Brooks Instrument turustab k rgekvaliteedilisi kaableid mis vastavad CE sertifikaadi n uetele Olemasoleva kaabli kasutamisel j lgige et kaabel oleks t ielikult mbritsetud varjestusega D v i Ring t pi konnektorid peavad olema varustatud metallvarjestusega Kus kohaldatav tuleb kasutada metallist l biviike mis tagavad kaabli varjestuse henduse Kaabli varjestus hendatakse metallkesta v i l biviigutihendiga ja on m lemast otsast kaitstud 360 ulatuses Varjestus peab olema maandatud Mikroskeemide serva hendused on ldjuhul mittemetallist Vastavuse tagamiseks CE sertifikaadi n uetele peavad kasutatud kaablid olema 100 varjestatud Varjestus peab olema maandatud Klemmide konfigureerimine vt komplekti kuuluvat kasutusjuhendit Elektrostaatiline laeng T HELEPANU seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente Seadmesse paigaldatud tr kkplaatide eemaldamisel ja paigaldamisel samuti tr kkplaadi v i seadmega muude toimingu
60. ate i prev zute cu filtre pentru a corespunde clasific rii CE Ecranarea trebuie terminat cu o legare la p m nt Configura ie de contact Vezi instruc iunile de operare ata ate Desc rcare electrostatic ESD A ATEN IE Instala ia include piese care sunt predispuse la defectare sub influen a electricit ii statice Trebuie respectate metodele corespunz toare de extragere instalare sau alte manipul ri ale circuitelor electronice Procedur de manipulare 1 Instalatia trebuie scoas de sub tensiune naintea de inserarea scoaterea sau reglarea vreunei cartele electronice sau a altui dispozitiv intern persoana trebuie s se lege la p m nt cu banda pentru articula ia m inii sau alte dispozitive de siguran disponibile pentru acest scop 3 Cartelele cu cablaje electronice imprimate trebuie transportate n ambalaje anti electrostatice conductoare Cartelele se pot scoate din ambalaj doar nemijlocit naintea amplas rii lor Cartela demontat trebuie pus ne nt rziat n ambalajul de protectie n vederea transport rii a depozit rii sau return rii la produc tor Observa ii n echipamente se g sesc adesea componente sensibile la desc rcare electrostatic ESD Majoritatea echipamentelor moderne includ componente electronice realizate n tehnologie metal oxid semiconductor NMOS SMOS etc Experien a a dovedit c acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slab
61. ation standard 3 3 Response Adjustment mm a Make a step in command to the controller from 2 to 100 of full scale flow and record the output signal b Ifthe output signal shows more than 10 overshoot or oscillate adjust proportional gain If the signal does not show overshoot but is not within 2 of final value after the response specification adjust proportional gain the other way around c Repeat steps a and b until the response output signal meets the specification 3 4 Rangeability E rar ZE The 5881 5882 is designed to control mass flows from 2 to 100 of the specified full scale flowrate This at an inlet pressure up to 100 or 400 bar see pressure rating of your Flomega and a maximal differential pressure of 40 bar 5881 20 bar Operation at other inlet or differential pressures is possible as long as certain guidelines are observed If a controller is operated with a process liquid other than its calibration liquid a scale shift can occur in the relationship between the output signal and the mass flowrate 3 7 3 8 Section 3 Operation Brooks Flomega THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG October 2014 Installation and Operation Manual Section 4 Maintenance amp X TMF FM MFC eng Troubleshooting Part Number 541 C007 AAG October 2014 Brooks Flomega M 4 1 General A WARNING METER CONTROLLER SEAL COMP
62. av denna produkt Installera din utrustning p s ttet som anges i den g llande handbokens installationsanvisningar och enligt till mpliga lokala och nationella f reskrifter Koppla varje produkt till f reskriven str m och tryckk llan Igangs ttning 1 Koppla langsamt fl de i systemet Oppna processventiler sakta f r att undvika f r h ga fl den 2 Kontrollera l ckor vid m tarens anslutningar f r in och utlopp Om inget l ckage f rekommer k r systemet upp till drifttrycket Kontrollera att processledningens tryck ar bortkopplat f re service I fall det beh ves kompletteras med nya delar se till att komponenter f reskrivna av Brooks Instrument anv nds Samt att kvalificerad personal utf r arbetet Ej rekommenderade komponenter och tg rder kan paverka produktens prestanda och s tta din drifts kerhet pa spel Felaktiga ersattningar kan orsaka eld elektriska skador samt felaktig funktion Se till att anordningens kapor och skyddslock ligger pa sin plats med syfte att f rebygga elektriska kontakt och personliga skador det enda undantag g ller nar underhallsarbete utf rs av kvalificerad personal VARNING I fall av fl desm tare regulatorer f r v tskor Ifall ventiler f re och efter skall st ngas maste alla ledningar t mmas p all v tska Att ej t mma ledningar alt koppla bort trycket kan gora sa att v tskans v rmeutvidgning kan spr cka skada utrustningen och orsaka personliga ska
63. be dampened out by adjusting potentiometer P8 It can be adjusted between a RC time of 0 1 sec to 10 sec f Proportional Gain By adjusting potentiometer P4 the proportional gain can be changed This will enable you to optimize your response g Valve Override When applying 15 Vdc to 0 Vdc on pin number 12 of the connector the valve is commanded to the closed position independent of the setpoint When applying 5 Vdc to 15 Vdc on the same pin the valve is commanded to the fully open position independent of the setpoint Note Excessive high flowrates around gt 200 full scale setting may produce a decreasing output signal The output signal is limited up to 6 8 Vdc and 24 mA h Temperature Heater Output On pin no 6 of the connector the output voltage can be monitored which reflects the temperature of the heat source This can be used for monitoring or alarm purposes in case liguids are used which are limited regarding the warm up temperature Note The electronics are executed with a temperature limiter for the heater When this temperature is reached the heating circuitry is switched off 3 5 3 6 Section 3 Operation Brooks Flomega 123 0 20 mA m J 1 123 4 20 mA EN Figure 3 6 Jumper Settings for Flomega Qu Dn 0 20mA NI 5 4 20mA V 0 5V 0 20mA HN 4 20mA Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG October 2014 Installation and Operation Manu
64. biti na svojem mestu zaradi izogibanja oku in osebnim po kodbam razen e na njej strokovnjak opravlja dela vzdr evanja 4 OPOMBA V primeru naprave za tok teko ine e je iz katera koli razloga potrebno zapreti vstopne in izstopne ventile pri napravi naprava se mora celotno izprazniti Zamuda tega lahko provzro i toplotno pro irjenje teko ine kar po koduje napravo in lahko povrzo i osebno po kodbo Europske smernice za naprave ohranjanja pritiska PED Vsaka naprava ohranjanja pritiska z notranjim pritiskom ve od 0 5 bara g in ve jim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje pritiska PED Poglavje priro nika Tehni ni podatki vsebuje navodila ki se nana ajo na smernice PED Merilni instrumenti navajani v priro niku ustrezajo smernicam EU tevilke 97 23 EK Vsaki merilec pretoka Brooks sodi v skupino teko in tevilke 1 Merilni instrumenti ve ji od 25 mm ali 1 palca ustrezajo kategriji PED II ali III Merilni instrumenti manj i od 25 mm oziroma 1 palca ali manj i sledijo sprejeti in enjeski praksi SEP Evropska smernica za Elektromagnetno kompatibilnost EMC Naprave Brooks Instrument ki so zaslu ile CE ozna bo elektri ni elektronski so uspe no izpolnile testove zahteve o elektromangnetni kompatibilnosti t 2004 108 EC smernice EMC Obenem mora se posebno pozornost posvetiti na izbiro signalnega kabla ki se uporabljajo za naprave z ozna bo CE Kakaovost signalnih kabl
65. blikacija na zadnji strani poi ite lokalnega distributerja in za nadaljnje informacije stopite z njim v kontakt Prihranite ta priro nik za poznej e informacije 4 OPOMBA Ne koristite napravo izven podro ja iz navodila za uporabo Prekr ek tega lahko privede do osebnih po kodb ali okvare naprave V kolikor navodila priro nika niso enosmiselna stopite v kontakt z zastopnikom dru tva Brooks Instrument da raz istite problem Dr ite se vseh opozoril povabil navodil ki so navedena na napravi ali skupaj z njim izporo ena Napravo instalirajte shodno navodilom in relevantnim lokalnim in nacionalnim navodilom iz navodila za instalirenje Izdelek spojite izklju no na ustrezni izvir elektrike in obskrbo tlaka Proces 1 Po asi polo ite sistem pod tlak Po asi odpirajte pogonske ventile zaradi izogibanja nihanju pretoka 2 Preverjajte ima li curljanja pri povezu vstopa in izstopa merilca toka e ni curljanja naplonite sistem na pogonski tlak Pred servisom vsekakor preverjajte ali je pogonski vod pod tlakom e je potreben rezervni del svekakor strokovna oseba mora rokovati z rezervnimi deli odrejenimi od Brooks Instrument Nedovoljeni rezervni deli in dejavnosti lahko vplivajo na u inek izdelka oziroma ugro avajo varnostni pogon Sprememba samo z podobnimi rezervnimi deli lahko ima za posledico po ar nevarnost elekti nega oka ali nedovoljno funkcioniranje Vsa vrata naprave svekakor morajo biti zaprta za itni ovitki morajo
66. boje ESD v p stroj ch je ast m jevem Prvky s technologi oxidu kov NMOS SMOS jsou pou v ny u v t iny modern ch elektronick ch za zen Zku enosti dokazuj e i jen mal elektrostatick v boje mohou po kodit nebo zni it tyto za zen U po kozen ch sou stek jakkoli zd nliv pracuj c ch bezchybn doch z brzy k poru e Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541C007 AAG Dansk Grundl ggende vejledninger Lees disse fgr anvendelse Brooks Instruments designer fremstiller og afpraver sine produkter s ledes at de tilpasser sig b de de indenrigs og internationale standarder Disse udstyr ber installeres bruges og repareres omhyggeligt s at de kan virke tilsvarende deres normale anvendelsesperiode De folgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation e Foratgarantere den passende kapacitet er udstyrets installation anvendelse opdatering programmering kun tilladt for kvalificeret personale Alle vejledninger skal leeses fgr produktets installation anvendelse og reparation e Hvis denne manual ikke er den passende udgave kontakt venligst jeres leverand r for yderligere information Det anbefales at gemme denne manual for senere brug OBS Udstyret ma ikke anvendes til andet end det er angivet i brugsanvisningen Hvis denne regel brydes kan der forekomme alv
67. con messa a terra connettori Card Edge normalmente non sono di metallo cavi utilizzati devono essere filtrati con schermatura al 100 per essere conformi alla marcatura CE La schermatura deve essere effettuata con messa a terra Configurazione pin Vedi Manuale d uso allegato Scarica elettrostatica ESD ATTENZIONE Il dispositivo contiene componenti elettronici che possono essere danneggiati da elettricit statica Bisogna rispettare le adeguate procedure durante la rimozione l installazione o altra manovra delle schede del circuito elettrico interno Procedura di manovra 1 Togliere alimentazione elettrica all apparecchiatura La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare togliere o impostare la scheda del circuito elettrico o altri dispositivi interni 3 Le schede del circuito stampato devono essere spedite in contenitori conduttivi Le schede devono essere tolte dal rivestimento protettivo esclusivamente prima dell installazione Le schede confezionate devono essere collocate immediatamente nell imballaggio protettivo per la movimentazione l immagazzinamento o resa alla fabbrica Note E un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica ESD Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo ossido NMOS SMOS ecc Le
68. cto capaz de ser portador de pe as sens veis a descargas electrost ticas ESD Na maioria dos dispositivos electr nicos Brooks encontram se pe as de tecnologia de xidos met licos NMOS SMOS etc A experi ncia mostra que at pequenas quantidades de electricidade est tica s o capazes de danificar ou destruir esses dispositivos Os componentes danificados embora inicialmente funcionem aparentemente bem acabam por ter falhas prematuramente Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks GF40 GF80GF81 Devices October 2014 Romanian Indicatii de referinta Cititi le nt i pe acestea Brooks Instrument i proiecteaz produce si testeaz produsele ntr un mod ce respect un mare num r de standarde autohtone i internationale Aceste instala ii trebuie amplasate exploatate i ntre inute corespunz tor pentru ca n toate situa iile domeniul lor de lucru s corespund oper rii normale n ceea ce prive te instalarea operarea i ntre inerea produselor Brooks Instrument indica iile de mai jos trebuie respectate i trebuie introduse in programul de protec ia muncii Pentru garantarea prestatiei corecte instalarea operarea actualizarea programarea si intretinerea produsului poate fi realizata doar catre personal calificat Instruc iunile de instalare ale produsului trebuie citite integral nainte de punerea n serviciu
69. de piese de schimb este neap rat necesar ca manevrarea pieselor de schimb sa fie facuta de personal cu calificare profesional agreat de Brooks Instrument Utilizarea altor piese de schimb dec t cele originale si licentiate poate avea efecte asupra performantelor instalatiei si asupra sigurantei sale in exploatare Utilizarea de piese asem n toare de substituire poate avea ca rezultat pericol de incendiu si electrocutare In toate cazurile toate usile instalatiei trebuie nchise custile de protectie puse la locurile lor pentru evitarea electrocut rii gi r nirii de persoane exceptand situatiile cand un specialist efectueaz lucr ri de intretinere A ATENTIE in cazul instalatiilor cu flux de fluide dac din orice motiv este necesar inchiderea valvelor de intrare gi iegire limitrofe instalatiei instalatia trebuie complet golita Neglijarea acestui lucru poate avea ca efect dilatarea termica a fluidului care poate defecta instalatia si poate produce raniri de persoane Directiva european pentru instalatiile sub presiune PED Toate instalatiile si sistemele presurizate ce se afl sub presiuni interne ce dep sesc 0 5 mbar g si au mai mult de 25 mm sau 1 tol cad sub incidenta normei europene corespunz toare PED La capitolul Date tehnice din cartea masinii se g sesc indicatiile corespunzatoare directivei PED Mijloacele de masurare mentionate in cartea masinii corespund directivei 97 23 EK EU Toate debit
70. denia CE Ak pou ijete vlastn signalne kable maju ma 100 n tienenie s pln m filtrovanim Pripojky kruhove alebo tvaru D maju ma kovov tienenie V pripade potreby treba pou i kovov k blov spojky k upevneniu k blov ho filtra K blov filter treba pripoji ku kovov mu telesu alebo k puzdru na oboch stran ch zabezpe it tienenie v kruhu 360 Tienenie m by ukon en uzemnen m Pripojky veduce ku kart m podla noriem sti nekovov Pou it kable pre vyhovenie predpisom CE musia ma 100 n filtrovanie tienenim Tienenie m by ukon en uzemnen m Konfigur cia kontaktov Vi prilo en n vod na obsluhu Elektrostatick v boj ESD UPOZORNENIE Pr stroj obsahuje s iastky ktor m u by po koden od elektrostatick ch n bojov Pri monta i odstra ovan alebo inej dr by vn torn ch obvodov ch kariet je potrebn dodr iava pr slu n postupy Postup o etrovania 1 Zariadenie odpoji od nap jania 2 Osoba vykon vaj ca dr bu m by uzemnena uzem uj cim n ramkom alebo in m na t to pr cu vyhovuj cim sp sobom pred vykon van m in tal cie demont e a nastavenia obvodov ch kariet alebo in ho vn torn ho prostriedku 3 Karty obvodov sa musia prepravova v elektricky vodivom balen Karty sa m u vybera z ochrann ho obalu v lu ne len tesne pred mont ou zasunut m Vybran kartu okam ite treba umiestni do ochrann ho obalu ur en ho pr
71. deniu zariadenia Ak v n vode nie su jednozna n kontaktujte z stupcu Brooks Instrument objasnenie problemov Dodr ujte v etky upozornenia prikazy usmernenia uvedene zariadeni alebo s nim dodane Zariadenia in talujte podla n vodu uveden ho v prikaze na in talaciu v s lade s miestnymi a n rodnymi predpismi Zariadenie vylu ne len na wyhovujuci elektricky a tlakovy zdroj Postup 1 Pomaly natlakujte system Prev dzkovy ventil otvorte pomaly na zamedzenie kolisania prietoku 2 Prekontrolujte tesnost vstupn ho a vystupneho zapojenia prietokomeru Ke nie je presakovanie spoje su tesne naplnit system na prevadzkovy tlak Pred vykon vanim servisnych prac kontrolovat system nie je pod tlakom V pripade Ze je potrebna vymena su iastky vymenu dielov ur enych Brooks Instrument musi vykonat kvalifikovana osoba Pou itie nepovolenych dielov a vykon vanie nepovolenych aktivit ohrozuju bezpe nost prevadzvky a maju negativny vplyv na vykon zariadenia Nahradenie su iastok len podobnymi komponentmi m e mat za n sledok po iar raz elektrickym prudom alebo nedostato nu funkciu zariadenia V etky ochranne kryty dvierka zariadenia maju byt zatvoren na zabezpe enie ochrany proti razu elektrickym prudom proti obsluhy Vynimku tvori vykonavanie udr by kvalifikovanym odbornikom UPOZORNENIE Pri zariadeniach s prietokom kvapal n ke z ak
72. dor European Pressure Equipment Directive PED Radets Direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckb rande anordningar Alla utrustning f r tryck med ett tryck ver 0 5 Bar g bar och st rre demensioner n 25 mm eller 1 inch faller under Tryck direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckb rande anordningar PED Den h r Instruktionsbokens Sektion Specifikation inneh ller anvisningar g llande PED Direktivet Matare som beskrivs i denna Instruktionsbok r i verensst mmelse med EN Direktivet 97 23 EC Brooks Instruments alla fl desm tare faller under fl desgrupp nr Matare som r st rre an 25 mm eller 1 inch verensst mmer med PED kategorier Il eller III Matare pa 25mm eller 1 inch eller mindre faller under Sound Engineering Practice SEP God Teknisk Praxis European Electromagnetic Compatibility EMC Elektromagnetisk kompatibilitet Brooks Instrument elektriska elektroniska CE markta anordningar har redan genomgatt ett framgangsrikt prov enligt regleringar under Electromagnetic Compatibility EMC directive 2004 108 EC Man m stre dock gna s rskild uppm rksamhet till valet av signalkabeln som skall anv nds for CE m rkta anordningar Signalkablars packboxars och kontakdons kvalitet Brooks Instrument levererar h gkvalitativa kablar som verensst mmer med specifikation f r CE intygade produkter Om man anv nder sin egen signalkabel da b
73. dowych Te produkty musza by poprawnie instalowane obstugiwane oraz konserwowane aby zapewni ich prawidtowe dziatanie zgodnie ze specyfikacja techniczna Podczas instalowania obstugiwania i konserwowania produkt w firmy Brooks Instrument nale y przestrzega nastepujacych zalecen O Aby zapewni wta ciwe dziatanie sprzetu instalacja obstuga aktualizacje programowanie i konserwacja powinny by wykonywane przez przeszkolony personel o Przed instalacja obstuga i czynno ciami serwisowymi nale y zapozna sie ze wszystkimi zaleceniami producenta Aby uzyska instrukcje obstugi odpowiednig dla danego sprzetu nalezy skontaktowa sie z lokalnym przedstawicielem handlowym producenta Instrukcje obstugi nalezy zachowa do p zniejszego uzycia A OSTRZE ENIE wolno przekracza podanych w instrukcji zakres w dzia ania urz dzenia Nieprzestrzeganie tego zalecenia mo e doprowadzi do powa nego zagro enia ycia lub zdrowia personelu i lub uszkodzenia sprz tu e Je eli jakie zalecenia w instrukcji obs ugi urz dzenia s niezrozumia e prosimy o skontaktowanie si z przedstawicielem firmy Brooks Instrument aby wyja ni problem e Nale y post powa bior c pod uwag wszystkie ostrze enia uwagi i zalecenia umieszczone na produkcie lub do czone do niego e Instalacj urz dzenia nale y przeprowadzi zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowi zuj cymi lokalnymi i narodowymi o
74. e dopravu skladovanie alebo pre sp tn prepravu do v robn ho z vodu Pozn mky Existencia prvkov ktor s citliv na elektrostatick v boje ESD v pr stroji je ast m javom U v iny modern ch elektronick ch prostriedkov s pou it prvky s technol giou oxidu kovov NMOS SMOS at Sk senosti dokazuj e aj nepatrn elektrostatick v boje po kodzuj zni ia tieto prostriedky Po koden s iastky aj ke zdanlivo pracuj bez chyby odkazuj na vznikaj ce poruchy A 17 A 18 Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG Brooks GF40 GF80GF81 Devices October 2014 Slovene Osnovna navodila Najprej preberite jih Brooks Instrument tako konstruira izdeluje in terstira svoje izdelke da oni ustrezajo tevilnim doma im in mednarodnim standardom Te naprave se morajo ustrezno instalirati koristiti in vzdr evati da vsekakor delajo ustrezno normalnom podro ju funkcioniranja Naslednjih navodil se mora dr ati in potrebno je vgraditi v program varstva pri delu pri instaliranju kori enju in vzdr avanju izdelkov proizvajalca Brooks Instrument Za jemstvo ustreznega u inka naj izklju no strokovno osobje opravlja instaliranje kori enje osve enje programiranje in vzdr evanje izdelka Potrebno je prebrati vsa navodila pred instaliranjem kori enjem in servisiranjem izdelka V kolikor ta priro nik ni ustrezna pu
75. e setting may produce a decreasing output signal The output signal is limited up to 6 8 Vdc and 24 mA COMMON SENSOR VOLTAGE OUTPUT REF Figure 3 4 Jumper Settings for Flomega Models 5881 91 Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG October 2014 Section 3 Operation Brooks Flomega Models 5882 92 see Figures 3 5 and 3 6 Electronic Features The Flomega Model 5882 liguid mass flow controller and Model 5892 liguid mass flow meter has a number of features which are customer selectable by jumper setting or adjustable bypotentiometer These are a Voltage or Current Setpoint This is jumper selectable For 0 5 Vdc setpoint insert jumper J5 to position 2 3 and jumper J7 to position 2 4 For 0 20 mA setpoint insert jumper J5 to position 2 3 and jumper J7 to position 2 3 For 4 20 mA setpoint insert jumper J5 to position 1 2 and jumper J7 to position 1 2 b 0 20 mA or 4 20 mA Output This is jumper selectable For 0 20 mA output insert the jumper J1 to position 2 3 and jumper J2 to position 1 2 For 4 20 mA output insert jumper J1 to position 1 2 and jumper J2 to position 2 3 0 5 Vdc output is always available c Soft Start To enable soft start feature insert jumper J6 to position 2 3 d Artificial zero To enable this feature insert jumper J14 to position 1 2 When flow signal is less than 1 output is command to zero i e 0 V and 0 mA or 4 mA e Output Damping The output can
76. els van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en lichamelijk letsel te voorkomen behalve als gekwalificeerd personeel de onderhoudswerkzaamheden uitvoert WAARSCHUWING bij vloeistofstroomapparaten waarvan de inlaat en uitlaatkleppen om welke reden dan ook gesloten zijn moet de vloeistof volledig worden afgetapt Als dat wordt nagelaten kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken PED richtlijn Pressure Equipment Directive Alle drukapparatuur met een interne druk van meer dan 0 5 barg en een diameter van meer dan 25 mm valt onder de PED richtlijn e In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED richtlijn De meters die in deze handleiding worden beschreven voldoen aan de Europese richtlijn 97 23 EG Alle stromingsmeters van Brooks Instrument vallen in groep 1 Meters met een diameter van meer dan 25 mm voldoen aan de categorie n Il of III van de PED richtlijn Meters met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap Elektromagnetische compatibiliteit EMC De elektronische apparatuur van Brooks Instrument met de CE markering is succesvol getest in overeenstemming met de EMC voorschriften richtlijn EMC 2004 108 EC De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE markering verdie
77. ennyiben saj t jelkabelt alkalmaznak olyat kell v lasztani amely 100 os arnyekolassal teljes m rt kben sz rt A D vagy k r alak csatlakoz knak f m rny kol val rny koltnak kell lennie Sz ks g eset n f m k bel sszek t ket kell alkalmazni a k belsz r r gz t s re A k belsz r t a f m h zhoz vagy h velyhez kell csatlakoztatni s mindk t fel n 3607 ban le kell rny kolni Az rny kol snak f ldel sben kell v gz dnie A k rty khoz tartoz csatlakoz k szabv nyosan nem f mesek Az alkalmazott k beleknek 100 s rny kol ssal sz rteknek kell lenni k hogy megfeleljenek a CE min s t snek Az rny kol snak f ldel sben kell v gz dnie rintkez konfigur ci L sd a mell kelt kezel si utas t st Elektrosztatikus kis l s ESD VIGY ZAT A k sz l k olyan alkatr szeket tartalmaz melyek hajlamosak a sztatikus elektromoss g okozta k rosod sra Be kell tartani a megfelel elj r sokat a bels ramk ri k rty k s eszk z k elt vol t sa behelyez se vagy egy b kezel se sor n Kezel si elj r s 1 A berendez st aramtalanitani kell A szem lyt f ldelni kell csukl p nttal vagy egy b biztons gos s a c lra alkalmas eszk zzel miel tt ramk ri k rty t vagy egy b bels eszk zt telep tene venne ki vagy ll tana be 3 A nyomtatott ramk ri k rty kat vezet k pes csomagol sban kell sz ll tani A k rty k kiz r lag k zvetle
78. esigned for liguids and is different from the traditional Brooks 5800 Series thermal mass flow meters for gases The bypass or shunt technigue used for gases cannot be applied for liquids viscosity variations air bubbles convection and attitude sensitivity deteriorates the performances dramatically Therefore Brooks Instrument developed Flomega This thru flow meter is unigue in its patented design performance and reliability In the new sensor the heat transfer to and from the liguid is perpendicular to the pipe axis contrary to classic way of heat transfer along the pipe wall This technique enables a high heat current to and from the liquid which is essential for a thru flow sensor Using thermal feedback reduces power consumption to a minimum Figure 3 1 shows the lay out of the sensor The temperature difference between heater and bottom of the sensor is regulated to a constant of 10 or 20 C To ensure a constant heat gradient linearity along the tube a high conductive strip guideline is added A fixed conductance from the pipes to the guideline is realized with a so called interface material The temperature T1 T2 reflects the heat current to and from the liquid As can be seen T1 T2is proportional to the liguid flow thru the sensor and the heat gradient at T1 T2 3 1 Section 3 Operation Brooks Flomega Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG October 2014 As with
79. et is voldaan aan de specificaties in de handleiding Het niet naleven van deze waarschuwing kan ernstig letsel en of schade aan de apparatuur tot gevolg hebben Als u en of meer instructies niet begrijpt vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument Neem alle waarschuwingen voorschriften en instructies in acht die op het product zijn aangebracht of bij het product zijn geleverd e Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en nationale voorschriften Sluit alle producten aan op de juiste elektrische voedings en drukbronnen Bediening 1 Laat het systeem langzaam volstromen Open de procesafsluiters langzaam om drukstoten te voorkomen 2 Controleer op lekkages rondom de inlaat en uitlaataansluitingen van de stromingsmeter Als er geen lekkages zijn kan het systeem op de bedrijfsdruk worden gebracht Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren Als vervangingsonderdelen nodig zijn zorg er dan voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen Niet goedgekeurde vervangingsonderdelen kunnen brand elektrische schokken of een onjuiste werking tot gevolg hebben Zorg ervoor dat alle deks
80. fs internes 3 Les cartes de circuits imprim s doivent tre transport es dans un r cipient conducteur Les cartes ne doivent enlev es de cette enveloppe protectrice qu au dernier moment juste avant l installation Les cartes retir es doivent tre imm diatement plac es dans un r cipient de protection pour le transport le stockage ou le retour l usine Observations Brooks Instrument n est pas le seul proposer des produits comportant des composants sensibles aux d charges lectrostatiques La plupart des produits lectroniques modernes contiennent des composants qui utilisent des technologies oxydes m talliques NMOS SMOS etc L exp rience d montre que d infimes quantit s d lectricit statique suffisent endommager ou d truire ces appareils Les composants endommag s m me s ils semblent fonctionner correctement tombent rapidement en panne Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks GF40 GF80GF81 Devices October 2014 German Wichtige Anweisungen Bitte zuerst lesen Brooks Instrument entwickelt produziert und testet seine Produkte derart dass sie viele nationale und internationale Standards erf llen Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt Die folgenden Anweisungen m ssen eingehalten werden und in Ihr Sicherheitspro
81. gas Low flow at 6a Valve leakage Adjust orifice turn C W valve should zero setpoint open at 5V 7Vdc 1 bar diff pressure Output is fluctuating 7a Pulsation because of pump Apply damping potmeter P8 Output stable 8a VOR has been used Shut valve and wait 20 minutes but flow is too high too long Installation and Operation Manual Section 5 Spare Parts X TMF FM MFC eng Part Number 541 C007 AAG October 2014 Brooks Flomega 5 1 General Refer to Figure 5 1 and Table 5 1 to order replacement parts Table 5 1 Spare Parts List umber Rogue tej sa Valve O ring Buna N 375B016MUA Viton 375B014QTA Teflon 375B014QMA 6 1 Stem Assembl 839Z045AAA 7 1 Plunger Assembly 622Z186AAA 8 1 Lower Guide Spring 820Z076BBA Valve Seat Viton 715Z245AAA 9 1 Buna N 715Z246AAA Kalrez 715Z250AAA 577Z151BMT Orifice O ring Buna N 375B006SUA 11 1 Viton 375B006QTA Kalrez 375B006TTA PC Board Assembly PC Board Assembly Cable Connector 207F014ZJK ri Buna N 375B003SUA Viton 375B003QTA Kalrez 375B003TTA 375B010SUA Vitonj 375B010QTA Kalrez 375 0100 Recommended Spare parts 5 1 Section 5 Spare Parts Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks Flomega October 2014 TU AN V FN j W W V V VW W Wig ee 25 jeb Figure 5 1 Flomega Spare Parts 5 2 Seri
82. gramm integriert werden wenn Sie Brooks Produkte installieren bedienen und warten Um die entsprechende Leistung zu gew hrleisten setzen Sie qualifiziertes Personal f r die Installation den Betrieb die Aktualisierung Programmierung und Wartung des Produkts ein Lesen Sie alle Anweisungen bevor Sie das Produkt installieren in Betrieb nehmen und warten Falls es sich bei diesem Handbuch nicht um das richtige Handbuch handelt schauen Sie bitte auf der R ckseite nach den Kontaktdaten Ihres Vertriebsb ros vor Ort Bewahren Sie dieses Handbuch auf falls Sie sp ter etwas nachschauen m chten WARNUNG Dieses Ger t nicht auBerhalb der in Bedienungsanleitung und Handbuch angegebenen Grenzen betreiben Wird diese Warnung nicht beachtet kann dies zu schweren Personensch den bzw Sch den des Ger tes f hren Falls Sie Anweisungen nicht verstehen wenden Sie sich zur Kl rung an Ihren Brooks Instrument Vertreter Befolgen Sie alle Warnhinweise und Anweisungen die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden Installieren Sie Ihr Ger t wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und gem der g ltigen regionalen und nationalen Gesetze Schlie en Sie alle Produkte an eine geeignete Strom und Druckluftversorgung an Bedienung 1 Langsam den Zufluss zum System starten Die Ventile langsam ffnen um einen sprunghaften Anstieg der Durchflussmenge zu verhindern 2 Bereich
83. grammi N uetekohase talitluse tagamiseks tohib toodet paigaldada kasutada t iustada programmeerida ja hooldada ainult kvalifitseeritud personal Enne toote paigaldamist kasutamist hooldamist lugege k ik kasutusjuhised hoolikalt l bi Kui k esolev kasutusjuhend ei vasta teie tootele p rduge kohaliku edasim ja poole kelle kontaktandmed leiate kasutusjuhendi tagakaanelt Hoidke see kasutusjuhend edaspidiseks alles HOIATUS rge kasutage seda instrumenti v ljaspool kasutusjuhendis spetsifitseeritud piirv rtusi Selle hoiatuse eiramine v ib p hjustada t siseid kehavigastusi ja v i kahjustada seadet Kui te saa m ne juhise m ttest aru p rduge selgituste saamiseks kohaliku Brooks Instrument i edasim ja poole J rgige k iki hoiatusi t helepanule manitsusi ja juhiseid mis on tootele peale kantud v i tootega kaasa antud Seadme paigaldamisel j rgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju Uhendage tooted n uetekohaste toite ja surveallikatega Talitlus 1 Avage aeglaselt vool s steemi Vooluimpulsside v ltimiseks avage t ventiilid aeglaselt 2 Kontrollige et voolukulum turi sisend v i v ljund henduste mber ei ole lekkeid Kui lekkeid ei ole laske s steemil saavutada t surve Enne seadme hooldamist veenduge et kogu s steem surve vabastatud Varuosasid tohib vahetada ainult kvalifitseeritud personal kas
84. hoko vek d vodu je nutn uzavrie vstupn a v stupn ventily zariadenie je potrebne uplne vyprazdnit Zanedbanie vypu t ania ma za nasledok po kodenie zariadenia s mo nost ou zranenia obsluhy z dovodu tepelnej rozt a nosti naplne Europska smernica vzt ahujuca sa na tlakove zariadenia PED V etky zariadenia s vy m vn tornym pretlakom ako 0 5 bar g a v ieho rozmeru ako 25 mm alebo 1 anglick palec podliehaj pod Europsku smernicu vztahujucu sa na tlakove nadoby PED Kapitola Technick udaje navodu na obsluhu obsahuje prikazy vztahuj ce sa na smernicu PED Meracie prostriedky uvedene v n vode na obsluhu vyhovuju smernici 97 23 ES EU V etky prietokomery Brooks patria do 1 skupiny kvapalin Meracie pr stroje presahuj ce rozmery 25 mm alebo 1 sp aj I II alebo III kateg riu PED Meracie pristroje men ie alebo rovne ako 25 mm alebo 1 zodpovedaju zau ivanej meracej praxi SEP Europska smernica vztahujuca sa na elektromagneticku kompatibilitu EMC Elektrick elektronicke zariadenia Brooks Instrument ktor si zaslu ili zna ku CE uspe ne splnili sku obne testy po iadaviek elektromagnetickej kompatibility smernica EMC 2004 108 EC Pritom treba venovat zvla tnu starostlivost na vyber signalnych kablov zariadenia s ozna enim CE Kvalita signalnych kablov k blovych spojov a pripojov Brooks Instrument pon ka wysoko kvalitne kable ktore spl aju po iadavky kvalitativneho zara
85. ication CE Si vous utilisez votre propre c ble d interconnexion ce c ble doit tre prot g par un blindage integral Les connecteurs rectangulaires ou circulaires utilis s doivent avoir un blindage m tallique S il y a lieu des presse toupes m talliques doivent faire office de serre cran de c ble L cran du cable doit tre raccord l enveloppe m tallique ou au presse toupe et blind aux deux extr mit s sur 360 degr s Le blindage doit s achever sur une prise de terre Les connecteurs de carte standards sont non m talliques Les c bles utilis s doivent tre prot g s par un blindage int gral pour se conformer la certification CE Le blindage doit s achever sur une prise de terre En ce qui concerne la configuration des broches veuillez vous reporter au manuel d utilisation joint ESD d charge lectrostatique ATTENTION cet instrument contient des composants lectroniques sensibles l lectricit statique Des proc dures de manipulation ad quates doivent tre respect es pendant le retrait installation ou la manipulation des cartes de circuits imprim s ou des dispositifs internes Proc dure de manipulation 1 L alimentation lectrique de l appareil doit tre coup e 2 Le personnel doit tre mis la terre au moyen d une bande de poignet ou d un autre moyen s r et ad quat avant l installation le retrait ou le r glage de toutes les cartes de circuits imprim s ou autres dispositi
86. ifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment A CAUTION It is the user s responsibility to select and approve all materials of construction Careful attention to metallurgy engineered materials and elastomeric materials is critical to safe operation Specifications See Table 1 1 Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG October 2014 Section 1 Introduction Brooks Flomega Table 1 1 Product Specifications Performance Specifications 5881 5891 5882 5892 Minimum Full Scale Flow gr hr 15 200 Maximum Full Scale Flow gr hr 100 1000 Accuracy lt 30 gr hr F S 1 F S 230 gr hr F S 0 5 F S 0 5 F S Process Temperature Range 0 100 C 0 90 C Process Temperature Coefficient 0 03 F S C Ambient Temperature Range 0 65 C Ambient Temperature Coefficient Repeatability lt 50 Max F S 0 2 of F S 50 100 Max F S 0 2 of rate lt 50 Max F S 0 4 of rate 50 100 Max F S 0 2 of rate Metering Rangeability Calibrated F S flow down to a minimum of 2 g h Calibrated F S flow down to a minimum of 20 g h Control Range 50 1 Viscosity Limit 200 cP Max Pressure Differential 20 bar 40 bar Pressure Drop sensor 10 mbar 100 gr hr H 0 150 mbar
87. ikrinti tinkam veikim montuoti eksploatuoti naujinti programuoti ir pri i r ti gamin turi tik kvalifikuoti darbuotojai O Perskaitykite visus nurodymus prie montuodami eksploatuodami ir pri i redami gaminj Jei gavote netinkama instrukcija galiniame jos virselyje i rekite vietines prekybos atstovybes kontaktine informacija I saugokite Sia instrukcija pasi i rejimui ateityje A ISPEJIMAS nenaudokite Sio prietaiso virsydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis Nesilaikydami Sio ispejimo galite sunkiai susi eisti ir arba sugadinti jranga O Jei nesuprantate kokiy nors nurodymu kreipkites j Brooks Instrument atstova kad paai kintu e Paisykite vis sp jimo persp jim ir nurodym pa ym t ant gaminio arba pateikt su juo O rang montuokite taip kaip nurodyta atitinkamos instrukcijos montavimo nurodymuose arba taikomuose vietiniuose ar nacionaliniuose kodeksuose Visus gaminius junkite prie tinkam elektros ir sl gio altini e Eksploatacija 1 l tai junkite sraut sistem L tai atidarykite proceso vo tuvus kad i vengtum te srauto antpl d i 2 Patikrinkite ar n ra nuot ki aplink srauto matuoklio leidimo ir i leidimo jungtis Jei nuot ki n ra sukurkite sistemoje darbin sl g O Prie atlikdami prie i ros darbus b tinai pasalinkite slegi proceso linijoje Jei reikia pakeisti dalis u tikrinkite kad kvalifikuoti darbuotojai
88. jomis kitus darbus reikia laikytis tinkam darbo proced r Darbo proced ra 1 Atjunkite renginio maitinim 2 Darbuotojai turi pasir pinti eminimu naudodami rie o juostel ar kitas saugias tinkamas priemones prie jd dami i imdami ar reguliuodami bet koki spausdintin s plok t s kortel ar kit vidin komponent 3 Spausdintin s plok t s korteles reikia transportuoti laid iame konteineryje Neleid iama i imti plok t s i apsauginio d klo nebent prie pat d jim I imtas plok tes reikia nedelsiant d ti apsaugin konteiner transportavimui ar saugojimui arba gr inti gamykl Pastabos is instrumentas n ra unikalus d l jame esan i ESD elektrostatiniam i lyd iui jautri komponent Daugelyje iuolaikini elektronini gamini yra komponent kuriuose naudojama metalo oksid technologija NMOS SMOS ir pan Patirtis rodo kad net ir ma as statin s elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti Sugadinti komponentai net jei atrodo kad jie veikia tinkamai anksti nustoja veikti Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks GF40 GF80GF81 Devices October 2014 Polish Zalecenia wstepne Prosimy przeczyta przed rozpoczeciem uzytkowania Brooks Instrument projektuje wytwarza i testuje swoje produkty tak aby spetniaty wymagania licznych norm krajowych i miedzynaro
89. laszt sa a folyad k h t gul s t okozhatja ami k ros thatja a berendez st s szem lyi s r l shez vezethet Nyom start berendez sekre vonatkoz eur pai ir nyelv PED Minden 0 5 bar n l g magasabb bels nyom s s 25 mm n l vagy 1 h velykn l nagyobb nyom start berendez s a nyom start berendez sekre vonatkoz eur pai ir nyelv PED hat lya al tartozik Ag pk nyv M szaki adatok fejezete tartalmaz a PED ir nyelvre vonatkoz utas t sokat Ag pk nyvben megadott m r eszk z k megfelelnek 97 23 EK EU ir nyelvnek Minden Brooks tfoly sm r az 1 es folyad kcsoportba tartozik e 25 mm n l vagy 1 h velykn l nagyobb m r eszk z k megfelelnek a PED I II vagy III kateg ri nak e _A25mm es illetve 1 h velykes vagy kisebb m r eszk z k az elfogadott m rn ki gyakorlatot SEP k vetik Elektrom gneses kompatibilit sra vonatkoz eur pai ir nyelv EMC A Brooks Instrument CE jel l st ki rdemelt elektromos elektronikus berendez sei sikeresen teljes tett k az elektrom gneses kompatibilit si k vetelm nyeket 2004 108 EC sz EMC ir nyelv vizsg l teszteket Ugyanakkor k l n s figyelmet kell ford tani a CE jel l s berendez sekhez felhaszn lt jelk belek kiv laszt s ra A jelk belek k bel sszek t k csatlakoz k min s ge A Brooks Insturment magas min s g k beleket k n l melyek megfelelnek a CE min s t s k vetelm nyeinek Am
90. ld should be terminated to an earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to an earth ground For pin configuration Please refer to the enclosed Instruction Manual ESD Electrostatic Discharge A CAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of internal circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibi
91. mal drift Advarsel Ved brug af udstyr som anvendes til veeske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket samme tid i forbindelse med aftapning Safremt dette ikke overholdes er der risiko for at veesken pa grund af varmeudvikling ekspanderer og dette kan for rsage skade pa udstyr og personer Det Europeeiske direktiv for trykudstyr PED Pa alt udstyr hvis indgangstryk er starre end 0 5bar g og starre end 25 mm eller en tomme geelder det europ iske direktiv for trykapparater Manualens afsnit tekniske data indeholder anvisninger om PED direktivet manualen angives maleinstrumenter der er tilpasset direktivet 97 23 EK EU Alle Brooks gennemstramningsmalere tilhgrer veeskegruppen nr 1 Alle malinstrumenter som er st rre end 25 mm eller en tomme beskrives i direktivet PED s kategorier Il eller III Alle malinstrumenter som er pa 25 mm eller en tomme eller mindre beskrives i Sound Engineering Practice SEP Det europ iske direktiv for elektromagnetisk kompatibilitet EMC Alle Brooks instrumenter elektrisk elektronisk som har CE markering er godkendt og testet ifolge om elektromagnetiske kompatibilitets forskrifter EMC direktiv 2004 108 EC OBS Man skal vaere opmaerksom pa hvilken type kabler der bruges til CE meerket udstyr Om kvalitet af signalkabler kabeltilslutninger og koblinger Brooks tilbyder kabler af hojest kvalitet som er tilpasset CEE kvalificeringens forskrif
92. ment com or are available from any of the Brooks Instrument locations listed above AWARNING Before returning the device purge thoroughly with a dry inert gas such as Nitrogen before disconnecting gas connections Failure to correctly purge the instrument could result in fire explosion or death Corrosion or contamination may occur upon exposure to air 2 5 Transit Precautions To safeguard against damage during transit transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit 2 6 Removal from Storage Upon removal from storage a visual inspection should be conducted to verify the condition of the equipment is as received If the equipment has been in storage in conditions in excess of those recommended See Section 2 3 the device should be subjected to a pneumatic pressure test in accordance with applicable vessel codes 2 7 In Line Filter An in line type 40 micron filter has been installed upstream from the flow sensor to prevent the possibility of any foreign material entering the flow sensor or control valve Installation and Operation Manual Section 2 Installation X TMF FM MFC eng Part Number 541C007AAG October 2014 Brooks Flomega 2 8 Connections iu 0 S S A CAUTION Itis the user s responsibility to select and approve all materials of construction Careful attention to metallurgy engineered materials andela
93. met lica Se precisar de usar bucins estes t m que permitir a crimpagem da malha blindagem do cabo A blindagem do cabo deve ser ligada ao corpo met lico ou bocal e assegurando a blindagem em 360 A blindagem deve terminar numa liga o terra Os conectores ligados a cart es ser o em geral n o met licos Os cabos utilizados devem ter fita de blindagem a 100 para satisfazer a marca o CE A blindagem dever terminar numa liga o terra Atribui o de pinos Veja as instru es de opera o anexas Descarga Electrost tica ESD A ATEN O Alguns componentes deste equipamento s o suscept veis ac o da electricidade est tica podendo ficar danificados Ao remover colocar ou manipular placas de circuitos electr nicos dever ter em aten o os seguintes procedimentos Desligar o equipamento da rede O utilizador antes de qualquer interven o que envolva os cart es de circuitos ou outros dispositivos internos ter que se ligar terra por meio duma bracelete de pulso ou outro dispositivo adequado Os circuitos impressos dever o ser transportados numa embalagem condutiva Os cart es s dever o ser retirados da embalagem protectora imediatamente antes da sua inser o O cart o retirado dever ser recolocado imediatamente na embalagem protectora que servir para o seu transporte armazenagem ou retorno a f brica Observa es Tenha presente que este equipamento poder n o ser o nico obje
94. metrele Brooks corespund clasei 1 de fluide Mijloacele de masurare mai mari de 25 mm sau 1 tol corespund categoriei PED Il sau III Mijloacele de masurare mai mici de 25 mm sau 1 tol se conformeaza practicii ingineresti acceptate SEP Directiva europeana privitoare la compatibilitatea electromagnetica EMC Instalatiile electrice electronice ce poart marca Brooks Instrument CE indeplinesc cu succes cerintele testelor de verificare ale compatibilit tii electromagnetice Cf directivelor europene EMC cu nr 2004 108 EC n acela i timp trebuie acordat o aten ie deosebit la alegerea cablurilor de semnalizare utilizate pentru instala iile ce poart marcajul CE Calitatea cablurilor de semnalizare a leg turilor prin cablu i a conectoarelor Brooks Instrument ofer cabluri de calitate ridicat care corespund cerin elor calitative ale CE n m sura n care folosi i cabluri proprii trebuie alese acelea care sunt 100 ecranate i prev zute cu filtre Conectoarele D sau cele circulare trebuie sa dispun de ecrane metalice n caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu Filtrul de cablu trebuie conectat la carcasa metalic sau manson i n ambele cazuri trebuie asigurat ecranarea la 360 Ecranarea trebuie terminat cu o legare la p m nt Conform standardului conectoarele apar in nd pl cilor electronice nu sunt metalice Cablurile folosite trebuie s fie 100 ecran
95. n l a behelyez s el tt vehet k ki a ved burkolatb l A kiszerelt k rty t halad ktalanul el kell helyezni a mozgat sra rakt roz sra vagy a gy ri visszaszallitasra szolg l v d csomagol sba Megjegyz sek Nem egyedi jelens g hogy a k sz l kben elektrosztatikus kis l sre ESD rz keny alkatr szek tal lhat k A legt bb korszer elektronikus eszk zben f moxid technol gi s alkatr szek NMOS SMOS stb tal lhat k A tapasztalatok azt igazolj k hogy m g kis m rt k sztatikus elektromoss g is k ros thatja vagy t nkreteheti ezeket az eszk z ket A k rosodott alkatr szek m g ha l tsz lag megfelel en m k dnek is kezd d hib ra utalnak Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541 C007 AAG Italian Istruzioni fondamentali Leggerle subito La Brooks Instrument progetta fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali Tali apparecchiature devono essere installate messe in esercizio e tenute in manutenzione in maniera adeguata affinch operino in conformita alle loro normali specifiche di funzionamento Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante l installazione il funzionamento e la manutenzione dei prodotti Brooks Instrument Per garantire un adeguato rendimento l installazione il funzionamento
96. nstrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources Operation 1 Slowly initiate flow into the system Open process valves slowly to avoid flow surges 2 Check for leaks around the flow meter inlet and outlet connections If no leaks are present bring the system up to the operating pressure Please make sure that the process line pressure is removed prior to service When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury except when maintenance is being performed by qualified persons A WARNING For liquid flow devices if the inlet and outlet valves adjacent to the devices are to be closed for any reason the devices must be completely drained Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury
97. nsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is
98. nt speciale aandacht Kwaliteit van de signaalkabel kabelafdichtingen en stekkers Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificaties voor de CE markering Als u zelf voor signaalkabel zorgt moet u altijd een volledig afgeschermde kabel gebruiken Stekkers van het type D of ronde stekkers moeten zijn voorzien van een metalen afscherming Indien nodig moeten metalen kabelafdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd De afscherming moet aan de aardpotentiaal worden aangesloten Card Edge Connectors zijn standaard niet van metaal De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE markering De afscherming moet aan de aardpotentiaal worden aangesloten Voor de pinconfiguratie Raadpleeg de bijgevoegde handleiding VOORZICHTIG Dit instrument bevat elektronische componenten die gevoelig zijn voor statische elektriciteit Neem de juiste procedures in acht bij Elektrostatische ontlading het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten Procedure 1 Schakel de voeding van de eenheid uit 2 Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat of ander intern apparaat mag worden ge
99. o ci musi zosta uziemiona za pomoc opaski na przegubie d oni lub w inny bezpieczny spos b zanim przyst pi do instalacji wyj cia lub regulacji obwodow drukowanych lub innych wewn trznych podzespo w elektronicznych urz dzenia 3 Obwody drukowane nale y transportowa w przewodz cym pojemniku P ytki drukowane nale y wyjmowa z opakowania ochronnego bezpo rednio przed ich monta em Wymontowane p ytki nale y niezw ocznie umie ci w opakowaniu ochronnym s u cym do transportowania sk adowania lub odsy ania do producenta Uwagi Fakt e urz dzenie zawiera cz ci nieodporne na wy adowania elektrostatyczne ESD jest rzecz normaln Wi kszo nowoczesnych urz dze elektronicznych zawiera komponenty wykonane w technologii tlenk w metali NMOS SMOS itp Jak pokazuje praktyka nawet niewielkie wy adowanie elektrostatyczne mo e uszkodzi lub zniszczy takie urz dzenie Uszkodzone cz ci nawet je eli na poz r dzia aj poprawnie szybko doprowadzaj do nieprawid owej pracy urz dzenia Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541 C007 AAG Portuguese Instruc es B sicas Ler antes de proceder A Brooks Instrument projecta fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais Estes eguipamentos devem ser instalados utilizados e mantidos de forma adeguada e devem funcionar
100. o podendo provocar danos pessoais ou materiais graves Directiva Europeia para equipamentos sob press o PED Todos os equipamentos sujeitos a press o interior superior a 0 5 bar 9 e com calibre superior a 25 mm 1 polegada est o sob a vig ncia da directiva europeia de equipamentos sob press o PED O cap tulo Dados t cnicos do manual cont m instru es relativas Directiva PED O caudal metro objecto deste manual satisfaz a directiva 97 23 CE da UE Os caudal metros Brooks pertencem ao grupo 1 de fluidos Os caudal metros com calibre superior a 25 mm 1 polegada pertencem s categorias PED Il ou III caudal metros de 25 1 polegada ou menores seguem as Boas regras de engenharia SEP Directiva Europeia sobre Compatibilidade electromagn tica EMC Os equipamentos el ctricos electr nicos da Brooks Instrument que t m a marca o CE passaram os testes comprovativos dos requisitos de compatibilidade electromagn tica Directiva EMC n mero 2004 108 EC Todavia ao utilizar os aparelhos compete lhe a escolha dos cabos de sinal adequados para os equipamentos com marca o CE Qualidade dos cabos de sinal bucins e conectores A Brooks Instrument fornece cabos de alta qualidade que cumprem todos os requisitos da marca o CE No caso de utilizar os seus pr prios cabos de sinal assegure uma blindagem a 100 Os conectores do tipo D ou circular t m que ser blindados por uma malha
101. o es la adecuada publicaci n busque al distribuidor local que figura en la contraportada y p ngase en contacto con l para obtener informaciones Guarde el presente manual para tener informaciones tambi n en el futuro ATENCION No funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento El incumplimiento de estas ltimas puede conducir a graves dafios personales o a la averia del eguipo Si las instrucciones del manual no son evidentes pongase en contacto con el representante de Brooks Instrument para aclarar el problema Observar todas las alertas advertencias e instrucciones indicadas en el eguipo o suministradas con el mismo Instale su equipo en conformidad con las recomendaciones indicadas en las respectivas instrucciones de instalaci n y con las pautas de las normas vigentes locales e internacionales Conectar el producto exclusivamente a la adecuada fuente electrica y presi n Proceso 1 Colocar lentamente flujo en el sistema Abrir lentamente las valvulas de proceso para evitar oscilaci n del flujo 2 Verificar si hay fuga de las conexiones de entrada y salida del fluj metro Si no hay el sistema con la presi n de operaci n Antes de efectuar el servicio verificar si hay presi n o no en la tuberia de la red Si se reguiere realizar un recambio de piezas solamente el personal calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las pie
102. ominal 60 maximum 25 minimum Upon removal from storage a visual inspection should be conducted to verify the condition of equipment is as received 2 1 2 2 Section 2 Installation Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks Flomega October 2014 2 4 Return Shipment AAA SSS E 6 S S zi Prior to returning any instrument to the factory visit the Brooks website www Brookslnstrument com for a Return Materials Authorization Number RMA or contact one of the following locations Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm OBrookslnstrument com www Brookslnstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 0 318 549 309 E mail BrooksEuOBrookslnstrument com All flow devices returned to Brooks require completion of Form RPR003 2 Brooks Instrument Decontamination Statement along with a Material Safety Data Sheet MSDS for the fluid s used in the instrument Failure to provide this information will delay processing by Brooks personnel Copies of these forms can be downloaded from the Brooks website www Brooksinstru
103. or man anvanda en kabel som dr fullstandigt skarmad med en 100 avsk rmning D eller Cirkelformiga kontakdon skall vara sk rmade med metalliska avsk rmningar Om det dr anvandbart b r metallpackboxar som ger en bra fastspanning f r kabelsk rmar anv ndas Kabelavs rmningen m ste kopplas till den metalliska sk rmande anordningen eller packboxen och sk rmas vid b da ndar runt omkring Avsk rmningens avsp nning m ste jordas Card Edge Kontaktdon r icke metalliska F r att verensst mma med krav p CE intyg skall de kablarna som anv nds vara sk rmade med 100 sk rmning Sk rmningen m ste jordas Vad g ller stiftkonfigurationen Se den bifogade Instruktionshandboken ESD Elektrostatiska urladdningar A OBS Denna utrustning inneh ller elektroniska komponenter som r l ttp verkade av skada orsakad av statisk elektricitet L mplig hanteringsprocedur m ste f ljas n r man tar bort installerar eller p n got annat s tt hanterar inre kretskort eller andra anordningar 1 Str m till enheten maste kopplas fran 2 Personalen maste jordas med hj lp av ett armband eller n got annat s kert medel innan n got kretskort eller andra inre anordningar installerras tas bort eller justeras 3 Kretskort m ste transporteras i en speciell f rpackning f r elektronik Kort skall ej tas fran deras skydssk pa innan man skall installera dem De borttagna korten b r omedelbart l ggas i speciell f rpackning f r transport
104. orlige personskader eller brist pa udstyret Hvis vejledningerne ikke er forstaelig kontakt venligst Deres Brooks repreesentant for at afklare problemet som er opstaet Overhold alle regler som er markeret eller leveret sammen med udstyret Installer udstyret efter den angivne installationsvejledning og geeldende lovgivning for anvendelsesomrade Udstyret ma kun tilsluttes med kabler og stik som overholder kravspecifikationerne i vejledningen Ibrugtagning 1 bn langsomt for trykket i systemet bn langsomt for alle procesventiler for forhindre ustabil gas flow 2 Tjek systemet for l kage ved tilsluttet m leinstrumenter samlinger og andet tilsluttet udstyr Derefter ag trykket i systemet indtil arbejdstrykket er opnaet Far reparation tjek altid at procesledningen ikke star under tryk Hvis der er brug for at udskifte defekte dele m kun kvalificeret personale udf re arbejdet og af sikkerhedsmeessige rsager m der kun anvendes originale Brooks reservedele Det er ikke tilladt at anvende reservedele eller udfgre arbejde der pa nogen made kan aendre produktet fra dens oprindelige specifikationer Manglende overholdelse af de foreskrevne procedurer kan resultere i braend og fare for elektrisk stod eller kortslutning Af sikkerhedsmaessige rsager s rg for at alle sikkerhedsforanstaltninger er overholdt Eksempelvis at alle afsk rmninger eller anden form for installationsbeskyttelse er lukket eller installeret ved nor
105. ov povezav kablov priklju kov Brooks Insturment nuja kabele visoke kakovosti ki ustrezajo zahtevam kvalificiranja CE V kolikor se uporbalja lastni signalni kabel treba je izbrati ki za 100 senco v polni meri filtriran Priklju ki D olika kroga morajo biti zasen eni kovonskom sencom e bo potrebno uporabite kovinske povezave za pritrditev filtra kabla Filtar kabla je treba priklju iti na kovinsko ohi je ali pla t in na obe polovici je treba sen iti v 360 Sen enje mora zavr iti v ozemljitvi Priklju ki ki sodijo karitcam normalno nisu kovinskik Kori eni kabli moraju biti filtrirani s 100 senco da odgovarjajo CE kvalifikaciji Sencanje mora imat konec v ozemljitvi Konfiguracija stika Vidi prilo eno navodilo za uporabo Elektrostati no izpra njenje ESD A OPOZORILO Naprava vsebuje take sestavne dele ki so naklonjeni k po kodbi od stati ne elektrike Treba se je dr ati ustreznih postopkov pri odstranjevanju vlogu ali drugega rokovanja kartic in sredstev notranjih tokovnih krogov Posotpek rokovanja 1 napravo je treba izklopiti iz elektri nega toka Osebo je treba ozemljiti zapestnim pa ekom ali z drugim varnostnim in za ta namen primernim sredstvom preden bi instalirala jemala ali nastavila kartico za tokovni krog ali drugo notranjo opremo 3 Tiskane kartice tokovnega kroga je treba izporo iti v konduktivni embala i Karte so odstranjive izklju no neposredno pred vlogom iz za itne embal
106. pareizi uzst d ti visi aizsargp rsegumi t d j di nov r ot elektro oka un traumu risku Iz mums ir gad jumi kad kvalific ts person ls veic ra ojuma apkopi BR DIN JUMS Ja idr s pl smas ier u tuvum eso os iepl des un izpl des v rstus k da iemesla d ir j aizver no ier c m ir j izlai viss idrums Pret j gad jum idrums var termiski izplesties p rraut ier ci un rad t traumas Eiropas spiedieniek rtu direkt va PED Uz vis m spiedieniek rt m kuru iek jais spriegums p rsniedz 0 5 bar g un ir liel kas par 25 mm jeb 1 collu attiecas Eiropas spiedieniek rtu direkt va PED s rokasgr matas tehnisko parametru noda ir sniegtas a PED Direkt vu saist t s instrukcijas o Saj rokasgramata aprakstitie maritaji atbilst EN Direktivas 97 23 EK prasibam O Visi Brooks Instrument pl smas merttaji ietilpst 1 kidrumu grupa o Uz 25 mm jeb 1 collu maziem un maz kiem m r t jiem attiecas labas in enierijas prakse SEP 25 mm jeb 1 collu maz ki meritaji atbilst PED kategorijai II vai III Eiropas elektromagn tisk s savietojamibas direktiva EMS Brooks Instrument elektrisk s elektroniskas iek rtas ar CE zimi ir iztur ju as parbaudi un atzitas par atbilsto am Eiropas elektromagn tiskas savietojamibas direktivas EMS prasibam EMS 2004 108 EC Tom r izv loties sign lkabeli kas tiks lietots kopa ar CE mar juma iek
107. piem izmantojot aproces vai citus dro us piem rotus l dzek us 3 Druk t s sh mas kartes ir j transport vado iepakojum Pl ksnes no aizsargkorpusa dr kst iz emt tikai tie i pirms uzst d anas Transport jot uzglab jot vai atgrie ot r pn c no iz emt s pl ksnes ir nekav joties j ievieto aizsargiepakojum Koment ri Instruments nav unik ls taj aspekt ka tas satur pret ESD elektrostatisko izl di jut gus komponentus Vairums m sdienu elektroiek rtu satur komponentus kuru ra o an izmantota met la oks du tehnolo ijas NMOS SMOS u c Pieredze r da ka pat neliels daudzums statisk s elektr bas var nodar t boj jumus d m ier c m vai piln b saboj t t s Boj tie komponenti pat tad ja tie ietami darbojas pareizi ir pak auti tr kai atteicei Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541 C007 AAG Lithuanian Pagrindines instrukcijos Perskaitykite prie tesdami Brooks Instrument projektuoja gamina ir i bando savo gaminius kad jie atitiktu jvairius nacionalinius ir tarptautinius standartus Sie gaminiai turi tinkamai montuojami eksploatuojami ir pri i rimi kad ir toliau veiktu jiems b dingus techninius parametrus Toliau pateikty nurodymu reikia laikytis ir jtraukti juos saugos programa montuojant eksploatuojant ir pri i rint Brooks Instrument produktus e Siekiant u t
108. rocess liguid contains elements which will react with air components to form corrosive or precipitative mixtures It will also preserve the accuracy and life of the controller This purge should also be performed when a controller is being removed from an active corrosive or toxic process liguid line b Set the command to zero and block the flow downstream of the controller Wait at least 35 minutes to allow the flow controller to reach operating temperature Check the output signal from the controller pin 2 with a voltmeter If necessary adjust the zero potentiometer accessible through cover to set the output signal to 0 mV 10 mV An absolute zero shift may occur during normal controller operation if the ambient temperature is substantially different than the temperature when the adjustment was performed The zero output signal can be adjusted Please don t remove the cover If possible the zero pot should be adjusted while the controller is in its normal working environment Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG October 2014 3 1 Theory of Operation Section 3 Operation Brooks Flomega noma J rta N VV Zh x T T z Cp x m h Heatflux m Massflux C K Constants Cp Heat Capacity Figure 3 1 Measurement Principle for 5891 Flomega A new thermal measurement principle is used in our Flomega The patented thru flow sensor is especially d
109. romagnetycznej Dyrektywa EMC 2004 108 EC Jednak e szczeg ln uwag nale y po wi ci przy doborze przewod w sygna owych kt re maj by stosowane z urz dzeniami ze znakiem CE Jako przewodu sygna owego d awic oraz z czy przewodu Firma Brooks Instrument dostarcza wysokiej jako ci przewody kt re spe niaj wymagania zawarte w specyfikacji dla certyfikatu CE Je eli stosuje si w asne przewody sygna owe to powinny one by w ca o ci w pe ni ekranowane Z cza typu D lub okr g e powinny zawiera metalowy ekran Je li to mo liwe nale y stosowa metalowe d awice przewodu zapewniaj ce mocowanie jego ekranu Ekran przewodu powinien by po czony z metalow os on lub d awic zapewniaj c ca kowite dook lne ekranowanie na obu ko cach przewodu Ekran przewodu powinien by uziemiony Z cza kraw dziowe s standardowo niemetaliczne Stosowane przewody musz by w pe ni ekranowane zgodnie z certyfikatem CE Ekran przewodu powinien by uziemiony Konfiguracja styk w jest podana w niniejszej instrukcji obs ugi Wy adowania elektrostatyczne ESD UWAGA Urz dzenie zawiera cz ci elektroniczne podatne na uszkodzenia spowodowane adunkami elektrostatycznymi Przy obchodzeniu si z wewn trznymi podzespo ami i cz ciami elektronicznymi nale y przestrzega nast puj cych zasad post powania Nale y od czy zasilanie od urz dzenia 2 Osoba wykonuj ca czynn
110. rtu ir j iev ro pa a uzmanibaSignalkabela kabela blivsl gu un savienotaju kvalit te Brooks Instrument pieg d augstas kvalit tes kabe us kas atbilst CE sertifik cijas tehniskajiem parametriem Ja j s lietojat pats savu sign lkabeli tam ir j b t piln b 100 ekraniz tam D un apa tipa savienot jiem ir j b t apr kotiem ar met la ekraniz jumu Ja nepiecie ams ir j izmanto met la bl vsl gi ar kabe a ekraniz juma skavojumu Kabe a ekraniz jumam ir j b t savienotam ar met la apvalku un ab s pus s aizsarg tam 360 gr du diapazon Ekraniz jumam ir j beidzas pie iezem juma Card Edge savienot ji standarta izpild jum ir nemet la Kabe iem ir j b t p rkl tiem ar 100 ekraniz jumu lai tie atbilstu CE sertifik cijas pras b m Ekraniz jumam ir j beidzas pie iezem juma Attiec b uz tapu konfigur ciju skat pievienoto instrukciju rokasgr matu ESD elektrostatisk izl de IEV ROT PIESARDZ BU is instruments satur elektriskos komponentus kas ir jut gi pret statisko elektr bu Iz emot un uzst dot iek j s des plates un ier ces vai k cit di darbojoties ar t m ir j iev ro noteikta darba k rt ba Darba k rt ba 1 Iek rta j atsl dz no baro anas 2 Pirms jebk das druk tas sh mas kartes vai citas iek j s ier ces uzst d anas iz em anas vai regul anas person lam kas veiks os darbus ir j b t iezem tam
111. si exploatarea sa n m sura in care edi ia acestui manual nu este cea adecvat identifica i pe ultima copert coordonatele distribuitorului local i pentru l muriri suplimentare adresati v acestuia P strati acest manual pentru referin e ulterioare ATEN IE Nu utiliza i instala ia n afara intervalului de func ionare indicat n instruc iunile de operare Nerespectarea acestui lucru se poate solda cu r niri grave de persoane sau defectarea instala iei n m sura n care indica iile c r ii ma inii nu sunt suficient de l muritoare lua i leg tura reprezentantul Brooks Instrument pentru clarificarea problemei P strati toate avertismentele avizele si instructiunile livrate odata instalatia sau inscriptionate aceasta Efectuati instalarea echipamentului n conformitate indicatiile de instalare corespunzatoare respectiv cu respectarea prevederilor nationale Echipamentul se conecteaza exclusiv la surse de energie electric si de presiune corespunzatoare e Succesiune 1 Presurizati lent instala ia Deschide i ncetul ncetul supapa de func ionare pentru evitarea fluctuatiilor de flux 2 Controlati dac nu sunt prelingeri la intrarea sau ie irea debitmetrului de bran are Dac nu sunt scurgeri presurizati instala ia la presiunea de lucru naintea exploat rii intretinerii verificati neap rat dac conducta uzinal nu este sub presiune In m sura n care este nevoie
112. stelm ss ei ole vuotoa aseta oikea k ytt paine e Tarkista ett laitteeseen menev paine on katkaistu ennen laitteen korjaamista v ltt ksesi killisen painep st n aiheuttaman loukkaantumisriskin Mahdollisten varaosien tulee olla Brooks Instrumentin hyv ksymi Vain valtuutettu huoltohenkil saa asentaa varaosat Ei hyv ksyttyjen varaosien k ytt voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin Samoin ei hyv ksyttyjen varaosien k ytt voi aiheuttaa tulipalon s hk iskun tai virhetoiminnan riskin e Varmista ett kaikki kaikki laitteen ovet luukut ovat suljettuina ja tarkista ett suojakannet ovat paikoillaan est ksesi mahdollisen s hk isku ja loukkaantumisvaaran VAROITUS Jos j rjestelm ss virtaa neste ja laitteen sis n ja ulosmenoventtiilit pit sulkea laite on ensin tyhjennett v kokonaan Tyhjent misen laiminly nti aiheuttaa nesteen l mp laajenemista joka saattaa johtaa laitteen rikkoutumiseen ja henkil vahingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joidenpaine on suurempi kuin 0 5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma kuuluvat eurooppalaiseen painelaitedirektiiviin PED e PED direktiivi koskevat m r ykset l ytyv t k ytt oppaan Tekniset tiedot luvusta e K ytt oppaassa kuvatut mittarit ovat 97 23 EC EU direktiivin mukaisia e Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhm
113. stn ch a n rodn ch p edpis P ipojte v echny produkty ke spr vn m zdroj m elektrick energie a stla en ch medii Postup 1 Pomalu do syst mu p iv d jte m dium Pro zabr n n vzniku r z v syst mu otvirejte procesn ventily postupn 2 P ekontrolujte t snost vstupn ho a v stupn ho p ipojen pr tokom ru Pokud nezjist te dn net snosti postupn zvedejte tlak na provozn hodnotu P ed prov d n m servisn ch prac zkontrolujte zda syst m nen pod tlakem V p pad pot eby v m ny d l zajist te aby byly pou ity n hradn sou sti specifikovan spole nost Brooks Instrument a v m nu prov d la kvalifikovan osoba Pou it neschv len ch d l a postup m e negativn ovlivnit efektivitu a bezpe nost procesu Pou it n hrad za origin ln d ly m e zp sobit po r raz elektrick m proudem nebo nespr vnou funkci Pokud nen zrovna prov d na dr ba kvalifikovanou osobou ujist te se e za zen je opat eno v emi p edepsan mi kryty UPOZORN N Pokud je u za zen s pr tokem kapalin nutno z jak hokoli d vodu uzav t vstupn a v stupn ventily je nutn za zen kompletn vypr zdnit Pokud tak neu in te m e z d vodu teplotn rozta nosti zbytk m dia v za zen doj t k jeho po kozen nebo k ohro en zdrav osob Evropsk sm rnice pro tlakov za zen PED Na ve ker tlakov za zen
114. stomeric materials is critical to safe operation Standard the Flomega models are supplied with adapters Inlet and outlet thread size is 5 16 24 UNF Optional adapters can be supplied 5 16 24 to 1 16 tube compression fittings 5 16 24 to 1 8 tube compression fittings 5 16 24 to tube compression fittings 5 16 24 to Va NPT F 5 16 24 to 4 VCR Prior to installation make certain all piping is clean and free of obstructions Install the piping in such a manner that permits easy removal if the instrument is to be removed for cleaning or test bench troubleshooting 2 9 Precision 5V Reference The 5881 5882 is eguipped with a precision 5V reference The reference voltage is available at terminal 11 refer to Figure 2 1 for use in conjunction with potentiometer to provide a 0 5 Vdc command 2 10 Command Input The command input hook up is as follows Connect the external command voltage to terminal 8 command input and to terminal 1 command input return Refer to Figure 2 1 2 11 Valve Override The valve override function allows full opening and closing of the valve independent of the command setting The valve override function can be accessed from terminal 12 Refer to Figure 2 1 The valve override for the mass flow controller is as follows a To open the valve apply a voltage between 5 Vdc and 15 Vdc to the valve override terminal V O R b To close the valve apply 0 Vdc or common
115. stuje tento produkt tak aby splnil mnoho n rodn ch a mezin rodn ch standardu P stroje musi b t dn nainstalov ny pou v ny a udr ov ny tak aby byl zaji t n jejich nep etr it provoz v r mci norm ln ch technick ch specifikac Mus te dodr ovat n sleduj c pokyny a integrovat jejich obsah do sv ho bezpe nostn ho programu p i instalov n pou v n a udr ov n produkt spole nosti Brooks Pro zaji t n spr vn funkce za zen mohou jeho instalaci obsluhu programov n dr bu a aktualizace firmwaru prov d t v hradn kvalifikovan osoby O P ed instalac provozem a dr bou produktu si prostudujte v echny pokyny Pokud tato p ru ka nen tou spr vnou p ru kou pro dan za zen informujte se na zadn stran ob lky o kontaktu na m stn prodejn kancel Uchovejte si tuto p ru ku pro pozd j pot ebu UPOZORN N Neprovozujte za zen v rozsahu mimo dan rozsah v provozn p ru ce Poru en tohoto upozorn n m e mit za n sledek v n jmy na zdrav a v st k po kozen za zen O Pokud n kterym pokyn m nerozumite kontaktujte sv ho prodejniho zastupce spole nosti Brooks a wy adejte si objasn ni O Dodr ujte v echny wystrahy upozorn ni a pokyny uveden a na produktu nebo s nim dodane O Namontujte za zen specifikovan m zp sobem podle spr vn monta ni p ru ky a podle platn ch m
116. t FV Fm lt titta When the instrument is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to your nearest Product Service Department Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm OBrookslnstrument com www Brookslnstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 0 318 549 309 E mail BrooksEu Brooksinstrument com Remove the envelope containing the packing list Carefully remove the instrument from the packing case Make sure spare parts are not discarded with the packing materials Inspect for damaged or missing parts 2 3 Recommended Storage Practice If intermediate or long term storage of equipment is required it is recommended that the equipment be stored in accordance with the following a Within the original shipping container b Stored in a sheltered area preferably a warm dry heated warehouse 32 C 90 F maximum 45 F 7 C minimum d Relative humidity 45 n
117. t early failure Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007 AAG October 2014 Brooks Flomega Dear Customer We appreciate this opportunity to service your flow measurement and control reguirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liguid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest guality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www Brookslnstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG Brooks Flomega October 2014 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and
118. tallation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG Brooks Flomega October 2014 Electronic Features see Figure 3 4 The Flomega Model 5881 liguid mass flow controller and Model 5891 liguid mass flow meter has a number of features which are customer selectable by jumper setting or adjustable by potentiometer These are a Voltage or Current Setpoint This is jumper selectable For 0 5 Vdc setpoint insert jumpers J9 J10 and J11 to position 0 For 0 20 mA setpoint insert jumper J9 to position X and jumpers J10 and J11 to position 0 For 4 20 mA setpoint insert jumper J9 J10 and J11 to position X b 0 20 mA or 4 20 mA Output This is jumper selectable For 0 20 mA output insert the jumpers J6 and J7 to position X and jumper J8 to position 0 For 4 20 mA output insert jumpers J6 and J7 to position 0 and jumper J8 to position X 0 5 Vdc output is always available Voltage output 6 7 8 0 c Proportional Gain By adjusting potentiometer P4 the proportional gain can be changed This will enable you to optimize your response d Valve Override When applying 5 Vdc to 15 Vdc on pin number 12 of the connector the valve is commanded to the fully open position independent of the setpoint When applying 15 Vdc to 0 Vdc on pin number 12 of the connector the valve is commanded to the closed position independent of the setpoint Note Excessive high flowrates around gt 200 full scal
119. te teostamisel j rgige n uetekohase k sitsemise juhiseid K sitsemisjuhised 1 Lahutage seade toiteallikast 2 Enne tr kkplaadi v i m ne muu siseelemendi paigaldamist eemaldamist v i konfigureerimist peab personal olema maandatud l bi randmepaela v i m ne muu sobiva vahendi 3 Tr kkplaate transporditakse voolujuhtivas konteineris V tke tr kkplaat kaitsvast konteinerist v lja vahetult enne selle paigaldamist Seadmest eemaldatud tr kkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse kas siis edasiseks transportimiseks hoiustamiseks v i tehasesse tagasisaatmiseks Kommentaarid See seade ei ole ainus mis sisaldab staatilise elektri suhtes tundlikke elemente Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente mille valmistamiseks on kasutatud metalloksiidtehnoloogiat NMOS SMOS jne Kogemused n itavad et isegi v ike kogus staatilist elektrit v ib neid seadmeid kahjustada v i isegi h vitada Kuigi v ib n ida et kahjustatud komponendid t tavad n uetekohaselt hakkavad talitlush ired ilmnema juba varakult A 5 A 6 Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Brooks GF40 GF80GF81 Devices October 2014 Finnish Perusohjeet Lue ensin ohjeet huolellisesti Brooks Instrument suunnittelee valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainv listen standardien vaatimuksia Tuotteet tulee asent
120. ter Hvis man veelger at bruge egne kabler skal man veelge et kabel som har den nadvendige afskaermning for at sikre 100 mod udefra kommende stgj Tilslutningerne D eller rundformede tilslutninger skal v re afskaermet med skal af metal Stikket skal veere afskeermet pa alle sider Al afskaermning skal jordes Card Edge tilslutninger er ifglge standarden ikke metalliske De anvendte kabler og stik skal v re 100 afsk rmet for at opfylde CE kravene De skal ligeledes jordes For stik konfigurationen se vedlagte brugsvejledning Elektrostatisk afladning ESD A OBS Udstyret indeholder tilbehor som kan skades ved elektrostatisk elektricitet Alle forskrifter skal overholdes ved kontakt med alle elektriske komponenter bade under drift og vedligeholdelse Behandlingsproceduren 1 Sluk for al stramtilfarsel til udstyret 2 Personer som skal i kontakt med udstyret skal v re jordet eller b re anden form for elektrisk beskyttende udstyr Manglende overholdelse af dette kan medfgre skader pa alle elektriske komponenter 3 elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske skader Emballagen ma ikke abnes for komponenten skal installeres i udstyret Ved afslutning af vedligeholdelse reparation af udstyret skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal pa lager eller transporteres Bemeerkninger Dette udstyr er ikke
121. ture 2 8 4 pipe temperature 3 z middle of interface Gh Constant T1 T2 T6 T5 v SIE Bh Heatflux CK Constonts dm Mossflux Figure 3 2 Measurement Principle Installation and Operation Manual X TMF FM MFC eng Part Number 541 C007AAG October 2014 Section 3 Operation Brooks Flomega Electronics see Figure 3 3 There are two control sections in the electronics one for creating a temperature difference between top and bottom of the sensor upper part of block diagram and one for controlling the valve The signal gene rated by the temperature elements T1 and T2 are amplified in such a way that 100 of the customer s flowrate equals 100 full scale output This amplification has a three switch selectable coarse adjustment and one potentiometer for fine tuning Using the temperature difference of T5 and T6 5882 92 the output is corrected by the heat gradient For rapid response output this amplified signal is applied to a D action A comparison amplifier compares the output signal with the customer adjusted setpoint value and will drive the valve to the desired value via a P I D action For specific fluidum which requires a one time linearisation a network is created that linearises the sensor s output signal Avoltage to current converter is added to provide a 0 20 mA or 4 20 mA output I pt100 s HEATSINK Figure 3 3 Principle Mass Flow Controller 3 3 3 4 Section 3 Operation Ins
122. unik i den hensigt at det indeholder for elektrostatisk afladning ESD sensitive reservedel de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel NMOS SMOS m m Erfaringerne viser at selv den mindste statiske elektricitet kan skade eller odelasgge disse instrumenter Selv en fungerende elektrisk del kan have levetiden markant reduceret pa grund af statisk elektricitet A 3 Section A Essential Instructions Installation and Operation Manual X TMF FM MFC eng Part Number 541C007AAG Dutch Essenti le instructies Lees ze voordat u verder gaat Brooks Instrument ontwerpt produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen Deze producten moeten correct worden ge nstalleerd bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken De volgende instructies moeten worden toegevoegd aan en ge ntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert bedient en onderhoudt Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren bedienen updaten programmeren onderhouden e Lees alle instructies voordat u het product gaat installeren bedienen en onderhouden Als dit niet de juiste handleiding is kijk dan op de achterzijde voor contactinformatie van uw vertegenwoordiger Bewaar deze handleiding voor later WAARSCHUWING gebruik dit instrument niet als ni
123. utades selleks Brooks Instrument i poolt heakskiidetud varuosi Mitteoriginaalvaruosade kasutamine ja ebap dev toimingute tegemine v ivad kahjustada toote t omadusi ja p hjustada riski tootmistegevuse ohutuse tagamisel Originaalvaruosadele sarnaste osade kasutamine v ib p hjustada tule v i elektril giohtu v i seadme v rtalitlust Elektril gi ja vigastuseohu v ltimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal va seadme hooldamisel kvalifitseeritud isikute poolt HOIATUS voolava vedelikuga seadmete kasutamisel kui seadmega k lgnevad sisend ja v ljundklapid on vaja mingil p hjusel sulgeda tuleb seadmed vedelikust t iesti t hjaks lasta Vastasel korral v ib vedelik soojuse m jul paisuda niiv rd et seade puruneb See v ib p hjustada t siseid kehavigastusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub k ikidele surveseadmetele mille sisesurve on le 0 5 baari g ja l bim t le 25 mm v i 1 tolli K esoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid K esolevas kasutusjuhendis kirjeldatud m turid vastavad EN direktiivi 97 23 E n uetele Brooks Instrument i voolukulum turid kuuluvad vedelike 1 gruppi M turid l bim duga le 25 mm v i 1 tolli vastavad surveseadmete direktiivi kategooriale I II v i III M turitele l bim duga alla 25 mm v i 1 tolli kohald
124. vce Tools Slotted head screwdriver Tweeker e Allen head key wrench Syringe with silicon Torque wrench 3 5 N m Installation and Operation Manual Section A Essential Instructions X TMF FM MFC eng Part Number 541 C007 AAG Bulgarian Brooks Instrument Brooks Instrument e
125. werden Der Kabelschirm sollte an die Metallh lle oder durchf hrung angeschlossen werden und an beiden Enden rundherum 360 abgeschirmt werden Die Abschirmung sollte geerdet werden Randstecker auf Platinen sind standardm ig nicht aus Metall Die verwendeten Kabel m ssen mit einer 100 Abschirmung versehen werden um die CE Vorgaben zu erf llen Die Abschirmung sollte geerdet werden Klemmenbelegung Siehe beigef gtes Handbuch ESD Elektrostatische Entladung ACHTUNG Dieses Ger t enth lt elektronische Komponenten die durch elektrostatische Entladungen besch digt werden k nnen Ordnungsgem e Verfahrensanweisungen m ssen w hrend des Ausbaus der Installation oder anderer Handhabung der eingebauten Platinen oder Ger te eingehalten werden Verfahrensanweisung 1 Trennen Sie das Ger t von der Stromversorgung 2 Das Personal ist vor dem Einbau Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden 3 Platinen sind in speziellen Beh ltern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern Platinen d rfen erst kurz vor dem Einbau aus der Schutzh lle entfernt werden Ausgebaute Platinen m ssen umgehend in Schutzbeh lter zum Transport zur Lagerung oder R cksendung an das Werk gelegt werden Anmerkung Dieses Ger t ist wie viele andere elektronische Ger te auch mit Komponenten best ckt die anf
126. y Check in line filters liquid zero flow regardless or blocked supply shut off valves etc of command 2b Supply pressure too high Lower supply pressure or differential pressure too high 2c VOR input is 15 to 0 Vdc Determi ne undesirable voltage at VOR input 2d Valve clogged Remove clean and adjust orifice valve voltage will increase to max See 6a 2e Valve seat not compatible with liguid valve voltage max Choose correct valve seat 2 Electronic failure material consult factory Return to factory Output controller 3a Pressure diff too low Increase pressure diff clean much lower than in line filter contaminated filter sensor valve 6a setpoint sensor valve clogged Output signal 4a VOR input at 5V to 15V Determine cause of undesirable input remains at maximum Clean orifice or valve Adjust orifice 4b Flow too high because according to 6a of leakage of the valve valve voltage min ba Unstable upstream Check pressure regulator downstream pressure control 5b Differential pressure Power pressure or changr prop Gain too high bc Gas in valve compartment Purge system VOR 2 minutes or 100 setpoint 15 minutes 5d Very low viscosity and or Change prop gain Decrease gain high density of liquid compared with water 5e Outgassing of liquid Max temp of liquid close to boiling point Choose proper liquid delivery system Vertical position is recommended Apply higher back pressure proper pressurizing
127. zas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro El recambio realizado con piezas solo similares pueden traer como consecuencias incendios chogues el ctricos o funcionamiento bajo Todas las puertas de la instalaci n deben estar cerradas las cubiertas de protecci n tienen que hallarse en el debido sitio con el fin de evitar los dafios personales y los choques el ctricos salvo cuando un especialista efect a el mantenimiento A ADVERTENCIA En caso de instalaciones que circulen l quido si por cualquier raz n se hubiera de cerrar las v lvulas de entrada y salida situadas al lado del equipo dichas instalaciones deber n ser completamente vaciadas La omisi n de esto ltimo puede provocar la dilataci n t rmica del l quido lo que puede da ar al equipo y conducir a da os personales Directriz Europea de los Equipos de Presi n PED Todos los equipos de presi n con una presi n interna que supere a 0 5 bar g con tama o mayor a 25 mm o 1 pulgada entran el mbito de la Directriz Europea de los Equipos de Presi n PED El cap tulo Datos T cnicos del manual incluye las instrucciones respecto a las directivas de PED Los instrumentos de medici n indicados en el Manual responden a las EN directivas 97 23 EC Todos los fluj metros Brooks pertenecen a la categor a 1 del grupo de fluidos Los instrumentos de medici n m s grandes que 25 mm o 1 pulgada est n en conformid
128. znaczeniami Wszystkie urz dzenia mo na pod cza wy cznie do odpowiednich r de energii elektrycznej oraz ci nienia e Pierwsze czynno ci obstugowe 1 Nale y powoli w czy przep yw w instalacji Nast pnie powoli otworzy zawory robocze tak aby unikn waha przep ywu 2 Nale y teraz sprawdzi czy nie wyst puj nieszczelno ci przy pod czeniach wej ciowym i wyj ciowym miernika przep ywu Je eli nie ma adnych nieszczelno ci mo na zwi kszy ci nienie w instalacji do warto ci ci nienia roboczego e Przed przyst pieniem do czynno ci serwisowych nale y upewni sie e ci nienie robocze jest od czone Je eli konieczna jest wymiana cz ci zamiennych nale y zawsze stosowa cz ci zamienne specyfikowane przez firm Brooks Instrument a czynno ci ich wymiany powinien w ka dym przypadku dokonywa przeszkolony personel Stosowanie nieautoryzowanych cz ci i procedur serwisowych mo e niekorzystnie wp yn na dzia anie produktu oraz zagrozi bezpiecze stwu instalacji Korzystanie z podobnie wygl daj cych zamiennik w mo e doprowadzi do po aru pora enia pr dem lub nieprawid owego dzia ania urz dzenia e Nale y upewni sie ze wszystkie otwory urz dzenia s zamkni te a os ony umocowane na swoich miejscach aby zapobiec obra eniom cia a lub pora eniu pr dem personelu Zalecenie to nie dotyczy przeszkolonego pracownika wykonuj cego prace serwisowe lub konserwacyjne OST

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