User s operating notes
Contents
1. Appi Gauss bet hod NE Portis ta tik 11 Suioto cue by signal beerndnebed iho Emo FAS O00 prm 644 00 ciiis at Peel 512 7250 00 pm E44 0I ches nnmaied at Peel S12 11 The ellipsometer will now begin to take measurements over a large range of wavelengths When the measurement spectra have been acquired the spectral data will be automatically saved by WinSE into a sub directory within the C WinSE Result directory Analysis 12 To extract information about the thickness of your films you must fit your experimental spectra to a theoretical model The easiest way to do this is using the WinElli_ll program Move the WinSE window out of the way and double click on the WinElli_ Il icon in the Windows Desktop screen 13 Once in WinElli_Il right click on Session 1 in the left menu bar and select Add Function and then Spreadsheet Now click on the Open File icon and then press the Hard Drive button in the Ellipsometric Measurements section to locate your file gaton I Docu Gigio 4 Spreads hert 1 A File Export snaks Gattalue Open File Selected data bppr Pleat ome nic machi ements Hard Drive 14 All spectra are saved in the C WinSE Result directory To find the measurement you just took simply right click and Arrange Icons by their Modified Date then choose the last sub directory in the list Now open the pae file associated with your spectra if there are two choose the longer file name 152. Right click on SpreadSheet_1 in the left menu bar and select Structure Standard This menu allows you to set the presumed structure of your measured sample so that the model can make a fit to the experimental data You can insert and remove layers using the associated icons and specify the estimated thickness of each layer in your sample 0000020 90000 ession Structyl Fle Structure Layer Mublayers 90008 0e ove Layer For simple thickness measurements you can generally utilize NK files to define your layers using the NK file database which is included in the program To do this select your layer tick the In Database option and press the Find N K File button 16 17 18 NOTE If you can t achieve a good fit with NK files Dispersion Laws may be required instead to properly fit your sample a database of these is also included in the program To use these select Dispersion Law from the Optical Index menu bar then tick the In Database option and press the Find Dispersion Law button to browse the database Once you have set up your structure press the green Tick icon Now right click on Structure_1 in the left menu bar and choose the Regression option Go into the Pass Definition sub menu and choose the spectral range for your fit 2 4 eV is a good typical range You can also tick untick any parameters that you want to be variable or fixed during the fit in this sub menu this is important if you a
3. alter in the process are the specified sample thickness in the Sample Ref sub menu if your sample is much thicker thinner than an ordinary silicon wafer piece or the incidence angle of the measurement in the Operation sub menu NOTE this is set by default to 75 which should be fine for most samples 9 If you are happy with the process parameters click the Save button on the left of the Recipe screen and go back to the Main Menu by clicking the Automatic button at the bottom of the screen 10 Now you can click Start to begin the ellipsometry measurement The system will first adjust the vertical height of the sample stage in order to find the optimal height at which to take its measurements During this step you should generally see a Gaussian shaped profile with a distinct intensity maximum if you don t you might want to alter the sample thickness specified in your recipe see step 8 WinSE for GESSE FMGINERR MODE Product ALD Job SINGLESAMPLE Fils Helo HE ib d 2124 2012 4 22 56 PM Ls l l istom Cuswamer Maintenance Shalus Foces Signal Messureameantrph Results Graghics Intensity 1 0 2 3 17028 0 4 mi TS j 5 05e 16920 0 6 5250 15780 0 7 5450 18980 o z B6560 11768 0 9 6866 9866 D 10 7050 8100 0 11 7250 T544 0 Shage is going bo ths Poston 5647 200000 am a Fil 4pplp Spline Method Comparason Quesity 096 S400 to 1 00 Fit
4. SOPRA GES 5E Spectroscopic Ellipsometer User s Guide PLEASE NOTE The ellipsometer is to be left on at all times Important This is not a comprehensive guide for use of the Ellipsometer and not a User s Manual of the Elliocometer Manufacturer This is short reminder notices and operating tips for references only made by other users Training is required before using the Ellipsometer To obtain training contact the Cleanroom Manager 1 Load your sample onto the centre of the ellipsometer stage If your sample is smaller than the central hole you can place it on the black backing piece as shown KN 2 Turn on the computer monitor The programs used for ellipsometry are WinSE for measurements and WinElli_Il for analysis Measurement 3 Double click on the WinSE icon 4 When software has finished starting up click on the Log On button For user name choose Customer no password needed 5 Click the Initialization button and press Yes to confirm When system has finished initialization you will see a green message saying System Awaiting Process 6 Choose a process to run Select ALD in the Product menu and then choose the singlesample mlim file in the Job menu this is a basic measurement template 7 To view the details of this process or to create a new one for your own measurements you can click on the Recipe button at the bottom of the screen 8 Usually the only parameters that you may wish to
5. re fitting with Dispersion Laws Now press the Run Regression button 2 to attempt to fit your experimental data to the theoretical model If the fit is good the calculated R value should be close to 1 If not then you may have to alter your structure definition and re try the Regression i e repeat steps 15 17 When you are finished with the machine close down WinElli_Il and then Log Off of WinSE Turn off the computer monitor but leave the ellipsometer on
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