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User`s Manual - Azbil Corporation
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1. For models without display meter Model number 81446594 001 harness length 2m 81446594 002 harness length 5m For models with display meter Model number 81446594 005 harness length 2m 81446594 006 harness length 5m For connection models without display meter to multi channel indicator CMW100A 100 Model number 81446594 011 harness length 5m For AC DC adaptor Model number 81446594 030 harness length 0 2m Chapter 3 MOUNTING WIRING Connector signal names Signal name Description Remarks DC OUT Instantaneous flowrate output DC OUT Instantaneous flowrate output Power 12 to 24Vdc channel indicator is used Integration count reset input Event 2 output Integration pulse output Event 1 output Serial data output EV COM Event output common Connection example 2 4 Power GND For connection to multi channel indicator Connect only when a multi EEE DC OUT Brown Instantaneous flowrate output DCOUT Red 0 to 5V V Orange 12 to 24Vde GND Yellow Installed ey DIN Gree 2 TTT EV 2 Gray Load 30Vdc 50mA or less EV1 White A 30Vde 30Vdc 50mA or less less Internal circuit Extarnal connection example Oo Handling Precautions e Power source GND instantaneous flow rate output and event out put common lines are all connected inside this device If these lines
2. Aeaa If you press the key the blinking cursor moves to the left To change the setting value at each of these digits use the GO and CD keys ud When 3 or 24 has been set as the event type in the function setup setup the 8 digit display at P 0 6 42 and 87 To do this switch between the upper 4 digit and lower 4 digit display as follows Lower four digits Upper four digits TEE EEEE Decimal point display Cy F 2 to 7 function is displayed according to the setting values of the function setup The following table shows available parameters and setting values 17 Chapter 4 METHOD OF OPERATION Gii CMS0020 Event 1 setting value EV1 EN AAN Setting range 0 to 20 0 L min standard The conditions of display Setting mode of function Fist ig Pt np Ptah when 3 is for ae PT UNAPANNS 00000000 to 99999999 L when 3 is 3 or G4 Event 2 setting value EV2 Serres DEE 0 to 20 0 L min standard 00000000 to 99999999 L when 4 is amp for G2 when 4 is G3 or 4 EV1 hysteresis EV2 hysteresis 0 to 10 0 L min standard 0 to 10 0 L min standard Enel when 3 is for G2 when 4 is G4 or G2 EV1 ON delay 0 to 60 s when 3 is for G2 EV2 ON delay Event 1 setting value EV1 rererere UAPA iz ue 0 to 60 s 00000000 to 99999999 L Setting range 0 to 50 0 L min standard when amp 4 is G4
3. ee Le MM Li I oF e Mounting There are two ways of mounting the body 1 Fasten the body with two screws from the rear side using the mounting screw holes on the bottom of the device Hole dimensions when mounted directly unit mm 3 5 10 2 Attach the mounting bracket option and fasten the mounting bracket from the front using four screws Mounting bracket Model No 81446628 001 Hole dimensions when mounting bracket is used unit mm Chapter 3 MOUNTING WIRING E Wiring Z CAUTION When using a relay as the contact for integrated count reset input use a relay gold contact type for trace currents Otherwise defective contact may cause the device to malfunction If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure When wiring take care not to tug the display The components inside might become damaged Be sure to check that the wiring is correct before turning the power ON Incorrect wiring might cause damage or malfunction We recommend using a harness with connector exclusive to CMS sold separately 1 9 Cl O m m O View from connector insertion side gogogo al 2 Connector Pin Layout 10 The following shows the layout of the connector pins on this flow meter Compatible connector exclusive to CMS DF11 10DS 2C made by HIROSE ELECTRIC CO LTD Harness with connector
4. www azbil com Printed on recycled paper 07 Specifications are subject to change without notice Printed in Japan 1st Edition Issued in Nov 2001 C 4th Edition Issued in Feb 2008 A
5. are connected to an external device through a common power supply interference will cause device failure or faulty operation e Take care that the event output does not exceed the output rating of this device If a relay is used the coil should have a built in surge absorption diode Otherwise device failure could occur 11 Chapter 3 MOUNTING WIRING When using flowrate data serial output Connection example 5V of waf RS 2320 10kQ 10kQ driver 9 Evi O D gt O RxD EV COM HO Jevei me lano FoF CMS ae RTS O cTs Interface Computer RS 232C port e Communications protocol Currently displayed instantaneous flowrate data and integrated flowrate data is sent as ASCII code Data is sent in order instantaneous flowrate data followed by integrated flowrate data Instantaneous flowrate data is prefixed with F and integrated flowrate data is prefixed with T Example When instantaneous flowrate is 100 L min standard and integrated flowrate is 100 x 10L FO100 TOOO00100 CR LF Le 100X10L ODh OAh Integrated flowrate 100 L min standard Instantaneous flowrate e Communications specifications Communication system Conform to RS 232C Start stop transmition Transmission speed 2400bps Character length Stop bit Parity Data transmission cycle 100 10ms 12 Chapter 4 METHOD OF OPERATION Models with Display Meter Z CAUTIO
6. 0 C Carbon dode 0 555 ae E 0 555 2 The ambient temperature during adjustment is 23 C 3 Amount of change on a flowrate referenced to 23 C under 101 325kPa 4 Amount of change on a flowrate referenced to 101 325kPa at 23 C 5 The scaling of the 0 to 5V voltage output can be changed using the keys on the body When the gas type is changed the range of flowrate measurement changes as specified in maximum measured flowrate for each gas type in the table However this function produces an output by the preset scaling regardless of what gas type has been selected 22 Chapter 6 SPECIFICATIONS E External dimensions Model with display Unit mm Connecting screw 2 Re 1 4 Body mounting screw 2 M3 screws depth 4 Model without display Unit mm Connecting screw 2 Re 1 4 Body mounting screw 2 M3 screws depth 4 PK EE 68 2 0 3 23 Chapter 6 SPECIFICATIONS Mounting bracket 81446628 001 Material SUS304 Unit mm 6 5 A 4 locations Mounting hole Unit mm 1800 in amp Ill m Note The harness for AC DC adaptor 81446594 030 is necessary for the CMS to connect the AC DC adaptor Harness for AC DC adaptor 81446594 030 200 Unit mm aj AC DC adaptor connector 24 E Pressure loss CMS0020 250 0 C
7. optional function 0 Without optional function 0 Without optional function 0 Without optional function Inspection Certificate provided Y Complying with the traceability certification 0 Product version L min standard indicates flow rates converted to 20 C 101 325kPa atmospheric pressure Optional parts sold separately Harness with connector exclusive 81446594 001 Harness 2m for models without display to CMS 81446594 002 Harness 5m for models without display 81446594 005 Harness 2m for models with display 81446594 006 Harness 5m for models with display Harness for multi channel indicator 81446594 011 Harness 5m for CMW100A100 Mounting bracket 81446628 001 AC DC adaptor 81446957 001 Operating temperature 0 40 C Harness for AC DC adaptor 81446594 030 This is necceary for AC DC adaptor Chapter 2 NAMES AND FUNCTIONS OF PARTS The following describes the names and functions of parts The diagram below shows a model with display meter EV1 EV2 indicators Lights when event 1 and event 2 are output Flowrate display 7 segment display indicates flowrate by a 4 digit number The upper two digits on the display indicate the function type and the lower two digits indicate the setup Instantaneous flowrate indicator Lights when instantaneous flowrate is displayed Integrated flowrate indicator Ligh
8. or G2 AIia NI when 2 is tr The conditions of display Setting mode of function Ma ia rte AJ ief when 3 is for te PUU CIOL 00000000 to 99999999 L Azis Aa a when 43 is 43 or iy Event 2 setting value EV2 7 prre DUD 0 to 50 0 L min standard 00000000 to 99999999 L when 4 is G4 or G2 when 4 is G3 or 4 EV1 hysteresis 0 to 10 0 L min standard mh when 3 is for G2 EV2 hysteresis EV1 ON delay 0 to 10 0 L min standard 0 to 60 s rod when 4 is G for G2 AI io M when 3 is for G2 EV2 ON delay 0 to 60 s when 4 is amp for G2 18 Reverse integrated default proren LOIS OIE 00000000 to 99999999 L ma when 2 is 2 E integration Chapter 4 METHOD OF OPERATION 17 the value returns to 4 and the counting up operation continues At this time the event output of the integrated flowrate count up is kept OFF until the set value is reached again Also the countdown of the reverse integrated value stops when is reached E Resetting the integrated value and reverse integrated value To reset the integrated reverse integrated value hold down the D and GOD keys simultaneously for at least one second with the integrated reverse integrated value displayed The integrated value is reset to and the reverse integrated value is reset to the default and integration reverse integration is resumed E W
9. site Avoid mounting this device in the following locations e Locations whose operating temperature falls below 0 C and rises above 50 C e Locations whose operating humidity exceeds 90 RH Locations subject to sudden changes in temperature and condensation Locations subject to corrosive gases and flammable gases Locations where there are lots of conductive substances e g dust salt or iron dust water droplets oil mist or organic solvents Locations subject to vibration or shock Locations subject to direct sunlight Locations splashed by water or rain Locations subject to splashing by fluids e g oil chemicals Locations where strong magnetic or electrical fields are generated E Behavior when the flowrate greatly exceeds the upper limit of flowrate range When the flowrate exceeds the upper limit of flowrate range both the flowrate display and the output voltage current may indicate lower values than the actual flowrate Be sure to use this product within the flowrate range stated in the specifications If the actual flowrate exceeds 120 of the upper limit both the flowrate display and the output voltage current will stop increasing in proportion to the flowrate If the flowrate is more than 200 of the upper limit both the flowrate display and the output voltage current will begin to decrease giving the appearance that the flowrate is within the flowrate range limits Also if there is a sudd
10. though e Check the piping for any gas leaks the flowrate should be zero e Check the wiring is correct Flowrate deviates e Check the piping for any gas leaks e Check the piping and connection ports for dirt oil or other foreign matter If oil is adhering to these parts contact Yamatake Corporation and ask for repair e Check the wiring is correct e Check the flowrate to see that it does not deviate considerably within several seconds or that it does not greatly exceed the measurement range The displayed value is lower Check if the gas contains foreign matter such as dust rust oil or water than expected If it seems that there is foreign matter in the flow meter contact Yamatake Corporation ask for repair The displayed value is high even though there should not be a flow The integrate flow counts up e Check the piping for any gas leaks or check if gas flow stops or counts down through the e Even if the instantaneous flowrate display is 0 a minute flow smaller than the instantaueous flowrate is zero minimum display value of this device might be present In an integrating operation even a flow under the minimum display value is counted Set the flow deadband to remove the count up of integrated value or countdown of reverse integrated value See Ml Function setup page 14 20 Chapter 6 SPECIFICATIONS E General specifications CMS0020 CMS0050 Applicable gas Air Nitrogen Argon Carbon di
11. FICATIONS Chapter 1 INTRODUCTION H Model selection guide The following shows the model number configuration Model without display Basic Flowrate Model Material Connection Gas Out _ Optional function _ Appended Description model No range type method type put 1 2 3 4 No CMS Gas Mass Flow Meter 0020 Standard flowrate range 0 to 20L min standard 0050 Standard flowrate range 0 to 50L min standard A Model without display Instantaneous flowrate output P PBT resin R Rc1 4 N Air Nitrogen Cc Carbon dioxide CO2 0 Analog output 0 to 5Vdc 0 Without optional function 0 Without optional function o Without optional function 0 Without optional function Inspection Certificate provided Y Complying with the traceability certification o Product version Model with display Basic Flowrate Model Material Connection Gas Out Optional function Appended Description odel No range type method type put 1 2 3 4 No CMS Gas Mass Flow Meter 0020 Standard flowrate range 0 to 20L min standard 0050 Standard flowrate range 0 to 50L min standard B Model with display Instantaneous flowrate output Event output Integration pulse output Integration reset input P PBT resin R Re1 4 N Air Nitrogen Can be set and changed to carbon dioxide 0 Analog output 0 to 5Vde 0 Without
12. N S Do not operate the keys with a mechanical pencil or sharp tipped object Doing so might cause faulty operation E State transition diagram In the factory settings when the device it turned on the instantaneous flowrate indicator lights to indicate the instantaneous flowrate The diagram below shows the relationship between a change in modes and the display IDAN or G24 has been set in the display mode setup the low four digits of the integrated flowrate or reverse integrated flowrate are displayed by pressing the key while the instantaneous flowrate is displayed Pressing the key again returns the display to the upper four digits of the intergrated flowrate or reverse integrated flowrate are displayed Pressing the key again returns the display to the instantaneous flowrate display When the power is turned OFF then back ON again the display state returns to that before the power was turned OFF Power ON Function setup mode l CENT key key Instantaneous flowrate display CG key held down for 3s or more um A688 L___ Integrated flowrate display or reverse integrated flowrate display key GSP key Lower four digits oa key min X10L 30 B B B B CO rey held down for parameter setup f 3s or more mode Dot display ON lt Cry ky key key key gt e Integrated flowr
13. No CP SP 1114E CMS0020 0050 Gas Mass Flow Meter Resin Model User s Manual Thank you for purchasing the CMS Series Resin Model This manual contains information for ensuring correct use of the CMS Series It also provides necessary information for installation maintenance and trou bleshooting This manual should be read by those who design and maintain devices that use the CMS Series Be sure to keep this manual nearby for handy reference Yamatake Corporation RESTRICTIONS ON USE This product has been designed developed and manufactured for general purpose application in machinery and equipment Accordingly when used in applications outlined below special care should be taken to implement a fail safe and or redundant design concept as well as a periodic maintenance program e Safety devices for plant worker protection e Start stop control devices for transportation and material handling machines e Aeronautical aerospace machines e Control devices for nuclear reactors Never use this product in applications where human safety may be put at risk NOTICE Be sure that the user receives this manual before the product is used Copying or duplicating this user s manual in part or in whole is forbid den The information and specifications in this manual are subject to change without notice Considerable effort has been made to ensure that this manual is free from inaccuracies and om
14. ate display or reverse integrated flowrate display Upper four digits ED rey timin 1988 Gl CDs nea X10L 9 down for 3s or more Dot display orr key e o Handling Precautions elf the key is pressed during setup the setting returns to its previ ous value e Leave the device powered up for about 30min before use to allow it to stabilize 13 Chapter 3 MOUNTING WIRING E Function setup The following describes how to set up each of the functions To enter the setup mode press the key The upper two digits on the display blink The upper two digits on the display indicate the function type and the lower two digits indicate the setup e Pressing the CD key moves the setup to the next item Pressing the 9 key moves the setup item to the previous item ey Hy X X Key lock setup Ca Dey CO rey g g X X Display mode setup Ca key CYD key g J X X Event 1 type setup 2 X X Flow deadband setup CO rey e Pressing the D key again when is displayed returns the display to lt Pressing the GD key again when is displayed changes the display to 2 e When the upper two digits are the setup item that you want to set press the key while it is blinking This selects the setup item and the lower two digits blink Press the CD and CD keys to select the desired setting value and press the D key All four digits light e Make sure that the items and the s
15. ate upper limit lower limit integrated flowrate count event functions up reverse integrated flowrate countdown integration pulse output event 2 only flowrate data serial output event 1 External input Number of points 1 reset signal of integrated count Input specifications Circuit type on other side No voltage contact or open collector Contact OFF terminal voltage 4 5 1V Contact ON terminal current approx 0 5mA current flowing to contact Allowable ON contact resistance 2509 max Allowable OFF contact resistance 100kQ min Allowable ON residual voltage 0 8V max open collector on other side Allowable OFF leakage current 50pA max open collector on other side Serial data output Open collector 30Vdc 50mA max Gas type switching function Air Nitrogen Argon Carbon dioxide CO3 Selectable gas type using keys on the body Electrical connection Harness with connector exclusive to CMS sold separately Approx 2809 1 A flowrate range used in air This product is provided with a gas type switching function which enables you to select the desired gas type using the keys on the body Also an output scaling function is provided enabling you to change the scaling of 0 to 5V output using the keys on the body Gas type CMS0020 CMS0050 Maximum Output voltage Conversion factor Maximum Output voltage Conversion factor measured flowrate V measured flowrate V minl eal N Air Nitrogen 1 0 A Argon 1
16. en greatly excessive flowrate 200 of the upper limit or more for a very short period the flowrate display and the output voltage current will continue to indicate flow within the flowrate range without indicating the spike Especially when this device is used for flow control make sure to take appropriate measures such as controlling the supply pressure or using a throttle valve so that even at maximum control output the flowrate does not exceed 120 of the upper limit Flowrate display amp output voltage current Flowrate range j 100 120 200 Actual flowrate Upper limit Chapter 3 MOUNTING WIRING E Piping Precautions for piping installation This device is a precision instrument If foreign matter such as dust oil mist or water enters the device it may cause measurement error or faulty operation When installing piping be sure to follow the procedures below to prevent foreign matter from entering the device 1 Before installing the device be sure to flush the upstream and downstream piping thoroughly to remove welding fume particulates and dust 2 Be sure to wipe the inside of the pipe to be directly connected to this device 3 After finishing the two works above check to be sure that there is no welding fume particulates or dust and then install the device B Handling Precautions e If foreign matter cannot be fully eliminated by flushing or wiping or if the regular presence of forei
17. etups are correct To continue setup press the key again and repeat the setup operation The following table shows the function and the setup 14 fl Function uw Key lock Setting value Key lock disabled Lock ON Chapter 4 METHOD OF OPERATION Factory setting Other modes cannot be entered in a key lock state Display mode Only instantaneous flowrate displayed Instantaneous flowrate integrated flowrate displayed Instantaneous flowrate reverse integrated flowrate displayed Pressing the key switches the display Event 1 type EV1 Event 2 type EV2 Not used Instantaneous flowrate upper limit value Instantaneous flowrate lower limit value Integrated flowrate count up Reverse integrated flowrate countdown Flowrate data serial output Not used Instantaneous flowrate upper limit value Instantaneous flowrate upper limit value ntegrated flowrate count up Reverse integrated flowrate countdown Integration pulse output 1L pulse ntegration pulse output 10L pulse Integration pulse output 100L pulse Same event types cannot be set to events 1 and 2 simultaneously Also integrating count up and reverse integrating countdown cannot be set simultaneously Integrated count up reverse integrated countdown and the action of integration pulse output are effective only when the mode 2 is set to or de ON delay setting EV1 Not used Used Displayed only when mode Gis set tof f
18. evice in the direct sunlight Doing so might damage the device Do not use this device outside of the operating pressure range Also do not subject this device to a pressure above the pressure resistance Doing so might damage this device If this device is used for monitoring flowrate of a burner design pipes and instrumentation so that backfire will not damage this device Prevent foreign matter from entering the device If the rust water droplet oil mist or dust in the piping flows into the device measurement error might occur and result in damaging the device If there is a possibility that any foreign matter flows into the device provide a filter strainer or mist trap capable of eliminating more than 1um foreign matter at the upstream and periodically inspect and replace the filter Do not connect piping on the device in such a way that large force will be applied to the product Doing so might damage the device Do not peel off the pipe connector port seals until just before connecting the piping Doing so might allow foreign objects to enter the connector port and cause defective operation Take care not to coat with too much sealant Dirt or burrs in the piping may also cause errors When connecting piping fasten the flange section of the pipe connector port and turn the pipe side to connect When mounting the device firmly fasten to prevent vibration Chapter 3 MOUNTING WIRING E Mounting Installation
19. g position Horizontal mounting Meter section must not face down If this device is mounted vertically it may drift causing an error while the flowrate is zero For details contact Yamatake Corporation Rated voltage 12 to 24Vdc Supply voltage range 10 8 to 26 4V Current consumption Sampling cycle 100mA max 100 10ms Display Flowrate display 7 segment LED 4 digit selectable between instantaneous and integrated flowrates Instantaneous Min display 0 1 L min 0 1 L min flowrate Resolution 0 1 L min 0 1 L min Integrated flowrate Display unit Display range TL 0 to 99999999 Data storage Data is written to memory every 10min Integrated value can be reset by keys or external contact input Indicator LEDs Instantaneous flowrate display integrated flowrate display event 1and 2 display Output signal instantaneous flowrate output 0 to 5Vdc allowable load resistance 10kQ min Even if the flowrate exceeds the flowrate range the output does not exceed 5 7 V 21 Chapter 6 SPECIFICATIONS Item CMS0020 CMS0002 Output scaling function 5 Selectable from 0 to 2 0 to 5 0 to 10 Selectable from 0 to 10 0 to 20 0 to 30 0 to 20L min 0 to 50L min Factory setting 0 to 20L min Factory setting 0 to 50L min Event output Number of points 2 Output Open collector 30Vdc 50mA max Description of Selectable from instantaneous flowr
20. gn matter can be expected be sure to install a filter If dust oil or moisture adheres to mettalic mesh the Micro Flow sensor chip measurement error or faulty operation may result nnn rs Metallic mesh Filter installation For applications with compressed air or propane which regularly contain oil mist or applications where rust in the piping is expected be sure to install a filter Name Mist separator Specifications For details refer to Yamatake s Specification sheet CP SS 1824E Straight pipe section Chapter 3 MOUNTING WIRING In case of a different diameter pipe A diameter is different from B diameter straight pipe section may be required Upstream side enlarged Downstream side reduced 5D 3D x gt CMS CMS gt Fr A B B A Different diameter socket Different diameter socket 5D 3D rT gt CMS CMS f A B B A Upstream side reduced Downstream side enlarged 5D 3D f cms cms k f A B B A Different diameter socket Different diameter socket 425D 3D i oms ovs i gt B B A D indicates the connecting port size CMS0020 0050 6mm In case of a same diameter pipe A and B diameters are same straight pipe section may not be required Upstream side elbow Downstream side elbow A m gt A ae i CMS J CMS B B Upstream side ball valve Downstrea
21. hapter 6 SPECIFICATIONS Primary pressure 0 5kPa 200 0 r ra a a 150 0 8 8 g Fa 100kPa 2 100 0 F wee a i A 4 aet _ a300kPa e 500kPa 700kPa Flowrate L min standard CMS0050 800 0 rimary pressure 700 0 600 0 500 0 400 0 300 0 Pressure loss Pa 200 0 100 0 0 0 0 10 20 30 a 1kPa Fi a 100kPa 300kPa 500kPa 700KPa 40 50 60 Flowrate L min standard The graph shows the data in air The values for the gases other than air can be obtained by multiplying the specific gravities shown in the table below Specific gravity with air as 1 0 Argon 1 38 Carbon dioxide 1 53 Example On the conditions that the model is CMS0050 the primary pressure is 100 kPa and the flowrate is 50 L min the pressure loss for argon is calculated as follows From the graph of CMS0050 the pressure loss is gained about 400 Pa when the primary pressure is 100 kPa and the flowrate is 50 L min Multiply this value by 1 38 the specific gravity of argon and the result is 400 X 1 38 552 Pa 25 Revision History Printed Manual Number Edition Revised pages Description date Feb 2008 CP SP 1114E 4th Edition Overall revision 4 ed 16 Jp ed azbil Yamatake Corporation Advanced Automation Company 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL http
22. hat is Event standby E Event ON delay Event standby is enabled only on the instantaneous flowrate lower limit value This function prevents erroneous operation of the lower limit alarm when there is no gas flowrate for example when the device is started up There is no event action until the instantaneous flowrate value once exceeds the event lower limit setting value after the power is turned ON Event action is normal after the event lower limit setting value has been exceeded once Instantaneous flowrate value 4 Event gt Event action standby Lower limit setting value gt Time ON Event output OFF ON delay times 0 to 60s are set for each of events 1 and 2 Event output OFF Instantaneous flowrate value Event detected 19 Chapter 5 TROUBLESHOOTING E Remedying trouble In the case of models with display meter refer to the following table if trouble occurs In the case of models without display meter contact Yamatake Corporation Phenomena Countermeasure Nothing on display e Make sure that the power with correct voltage and polarity is being supplied e Make sure that connectors are correctly connected ALH displayed The instantaneous flowrate value has exceeded 120 of the measurement range Reduce the flowrate so that it is within the flowrate range Err displayed Memory data error Contact Yamatake Corporation and ask for repair Signal is output even
23. in the sensing section The uF sensor is a thermal flow speed sensor made using proprietary technology Integrating this ultra minute flow speed sensor with high grade channel design technology has achieved high accuracy and high rangeability e Incorporates a uF sensor made possible by silicon micro machining technology and thin film forming technology One side of the uF sensor is a mere 1 7mm and at a thickness of 0 5mm this thermal flow speed sensor exhibits high sensitivity and response e As this device is a mass flow meter it is not influenced by temperature nor pressure e Implements a high accuracy of 5 RD and a high range ability of 100 1 Model Range of measurement CMS0020 0 2 to 20 L min standard CMS0050 0 5 to50 L min standard e Instantaneous flowrate values can be displayed remotely by combining with a multi channel indicator CMW100A100 sold separately e Models with display meter are provided with extensive functions to suit a wide range of applications analog output event output integrating reverse integrating display output scaling gas type selection integrated pulse output external contact input integrating reset input flowrate data serial output e Straight pipe sections are not required before and after this device in case of a same diameter pipe RD Reading indicates the accuracy of the read value The accuracy varies depending on the measured flowrate For details see Chapter 6 SPECI
24. issions If you should find an error or omis sion please contact Yamatake Corporation In no event is Yamatake Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2001 Yamatake Corporation ALL RIGHTS RESERVED The F logo Micro Flow are trademark of Yamatake Corporation in Japan IF SAFETY PRECAUTIONS J E About Icons The safety precautions described in this manual are indicated by various icons Please be sure you read and understand the icons and their meanings described below before reading the rest of the manual Safety precautions are intended to ensure the safe and correct use of this prod uct to prevent injury to the operator and others and to prevent damage to proper ty Be sure to observe these safety precautions Warnings are indicated when mishandling this A WAR N l N G product might result in death or serious injury Cautions are indicated when mishandling this A CAUTION product might result in minor injury to the user or only physical damage to the product E Examples AN Use caution when handling the product S The indicated action is prohibited Q Be sure to follow the indicated instructions WARNING Never allow gases that are within explosive limits to pass through this meter or device Doing so might result in explosion accidents CAUTION Be sure to use this product within the flow
25. m side ball valve the valve having the structure the valve having the structure which does not disturb the gas flow which does not disturb the gas flow qki cms J cms EXE A B B A E Handling Precautions e Provide the 5D straight pipe section between the CMS and the butterfly valve or the like in case of a valve having the structure which causes disturbance or fluctuations to the gas flow Chapter 3 MOUNTING WIRING Coating sealant Connecting Pipes Gas flow Coat with an appropriate amount of sealant Do not coat the top two threads of the screw Remove any dirt or burrs from inside the pipes Good example Bad example Sealant omer Connect pipes while gripping the Resin cover hexagonal section of the pipe connection port with a spanner or Flange wrench Hexagonal section E Handling Precautions f i A ar meter make it flow following the arrow on cE ms He the side of the channel If gas is fed in the opposite direction the gas flow cannot be measured accurately Chapter 3 MOUNTING WIRING Mounting the body Z CAUTION If this device is mounted vertically it may drift causing an error while the flowrate is zero S Do not mount so that the top surface is facing down Doing so might cause error or trouble Q Mount this device horizontally Mounting Position
26. or Ge ON delay setting EV2 Event standby setting Gas type selection Not used Used Air Nitrogen Argon Carbon dioxide CO2 Displayed only when mode rue we ap rt G is set too fori Displayed only when mode 33 or 04 is set to 2 For details see page 19 Analog output scaling CMS0020 0 to 20 L min standard 0 to 10 L min standard 0 to 5 L min standard 0 to 2 L min standard For analog output scaling see page 16 Analog output scaling CMS0050 Flowrate conver sion reference temperature Flow deadband setting 0 to 50 L min standard 0 to 30 L min standard 0 to 20 L min standard 0 to 10 L min standard Referenced to 20 C 101 325kPa Referenced to 0 C 101 325kPa Referenced to 25 C 101 325kPa No deadband Less than 0 2L min standard Less than 0 5L min standard Less than 1 0L min standard 15 Chapter 4 METHOD OF OPERATION Analog output scaling You can specify the scaling of the voltage output 0 5Vdc When 8 Gas type selection is changed the range of flowrate measurement changes as specified in maximum measured flowrate for each gas type on page 21 However this function produces an output by the preset scaling regardless of what gas type has been selected raze Example In CMS0050 if 2 Gas type selection is changed to 42 Carbon dioxide the range of flowrate measurement changes to 0 to 25 L min If you set the scaling to am
27. oxide CO2 Gas must not contain any corrosive components chlorine sulfur acid etc It also must be a clean gas which does not contain dust nor oil mist Air flowrate range 1 0 to 20 L min standard standard refers to a flowrate after conversi 0 to 50 L min standard ion to 20 C 101 325kPa Maximum measured Air Nitrogen 20 L min 50 L min flowrate for each gas Argon 20 L min 50 L min type 101 325kPa 20 C conversion Measurement accuracy at 23 C 101 325kPa x is the measured flowrate 2 Temperature characteristics at 0 to 35 C 3 Pressure characteristics 0 to 0 5 MPa 4 Operating temperature range Carbon dioxide 10 L min 25 Limin 1 FS 1digit 5 RD 1digit 1 FS 1digit 5 RD 1digit 1 FS 1digit 5 RD 1digit 0 to 50 C 0 2 lt lt 4L min 4 lt x lt 20L min 0 2 lt x lt 4L min 4 lt x lt 20L min 0 2 lt x lt 4L min 4 lt x lt 20L min 1 FS 1digit 5 RD 1 digit 1 FS 1 digit 5 RD 1 digit 1 FS 1 digit 5 RD 1 digit 0 5 lt x lt 5L min 5 lt Xx lt 50L min 0 5 lt x lt 5L min 5sx lt 50L min 0 5 lt x lt 5L min 5sx lt 50L min Storage temperature range 20 to 50 C Operating humidity range 10 to 90 RH condensation not allowed Operating pressure range 0 to 0 5MPa Pressure resistance 0 7MPa Connection aperture 1 4 Re Body material PBT polybutylene terephthalate Case material ABS Mountin
28. p 0 to 30 L min the 0 to 5V output is generated as shown in the figure below Voltage output V TOD pf seeseee sees te seer a aoe cet A Measurement range of carbon dioxide i Flowrate L min The maximum voltage output is calculated as follows when the output scaling has been set up Measured flowrate of preset gas aaa X5V Scaling upper limit value For details on the preset gas measurement flowrate see page 21 o Handling Precautions e Factory settings are iN e Pressing the key during operation returns to the previous setting value and enters the setup mode 16 E Parameter setup Chapter 4 METHOD OF OPERATION Cancel the function setup key lock setting key lock disabled To enter the parameter setup mode hold down the GED and CD keys simultaneously for at least three seconds In the parameter setup mode F is displayed on the display The lower two digits on flowrate display indicate the parameter item Pressing the CD key moves the setup to the next item Pressing the GD key moves the setup item to the previous item Ay Pressing the CD key again while 7 7 function is displayed the display returns Wa to Pie Alitnately pressing the GD key again while is displayed the display returns to 7 function Press the G amp D key at the item you want to set The current setting value is displayed If you press the GXD key again the lowermost digit blinks BABA
29. perate the keys with a mechanical pencil or sharp tipped object Doing so might cause faulty operation Do not remove the case and disassemble pipe connections Doing so might cause malfunction SO COO SOOO OO If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure iii Conventions Used in This Manual The following conventions are used in this manual C Handling Precautions Handling Precautions indicate items that the user should pay attention to when handling the CMS Series Note Notes indicate information that might benefit the user C This indicates the item or page that the user is requested to refer to 1 2 3 Numbers within parentheses indicate steps in a sequence or parts of an explanation This indicates 7 segment indication on the setup display D ODB key This Indicates keys on the setup display Contents SAFETY PRECAUTIONS Conventions Used in This Manual Chapter 1 INTRODUCTION E IntrOdUCIONR sists isialesiiscdexedadinicietcdciine teed lescainn dean sassdaaeexs 1 E 00 9 Beene Cr nn ene ninererrnicet rier tirrricice a aaa 1 E Model selection guide sesee eee ee cece cece ecee ee ceceeceeeeees 2 Chapter 2 NAMES AND FUNCTIONS OF PARTS Chapter 3 MOUNTING AND WIRING ME MOUntiing 2 0 cece cece eee eee eee n ence teen ene e een n teense eeeeeeneeeees 5 E Behavior
30. rate range stated in the specifications To prevent excessive flow use a suitable means to control the supply pressure or use a throttle valve or the like to control the flowrate If the flowrate exceeds the upper limit both the flowrate display and the output voltage current may indicate considerably lower values than the actual flowrate If damage could result from the abnormal functioning of this device include appropriate redundancy in the system design This device is a precision instrument Do not drop it nor subject it to shock Doing so might damage the device Do not hold a resin cover portion at the time of carrying or piping this device Doing so might damage the cover or dropping the device due to slipping might result in getting hurt Do not install the device in the direct sunlight Doing so might damage the device Do not use this device outside of the operating pressure range Also do not subject this device to a pressure above the pressure resistance Doing so might damage this device If this device is used for monitoring flowrate of the burner consider the pipes and instrumentation so that backfire will not damage this device SO o OOS Prevent foreign matter from entering the device If the rust water droplet oil mist or dust in the piping flows into the device measurement error might occur and result in damaging the device If there is a possibility that any foreign matter flows into
31. the device provide a filter strainer or mist trap capable of eliminating more than 1um foreign matter at the upstream and periodically inspect and replace the filter Do not connect piping on the device in such a way that large force will be applied to the product Doing so might damage the device Mount this device horizontally If this device is mounted vertically it may drift causing an error while the flowrate is zero CAUTION Do not mount so that the top surface is facing down Doing so might cause error or trouble Do not peel off the pipe connector port seals until just before connecting the piping Doing so might allow foreign objects to enter the connector port and cause defective operation Take care not to coat with too much sealant Dirt or burrs in the piping may also cause errors When connecting piping fasten the flange section of the pipe connector port and turn the pipe side to connect When mounting the device firmly fasten to prevent vibration When using a relay as the contact for integrated count reset input use a relay gold contact type for trace currents Otherwise defective contact may cause the device to malfunction When wiring take care not to tug the display The components inside might become damaged Be sure to check that the wiring is correct before turning the power ON Incorrect wiring might cause damage or malfunction Do not o
32. ts when integrated flowrate is displayed 4 Display meter GD icy L_ DD wey Used to switch the display Select the mode and the mode setup GRD key Hey Used to select the setup mode Used to fix a mode setup Signal connector Connects the power supply and output signals Pipe connection inlet gt The gas inflow is connected here Pipe connection outlet The gas outflow is connected here Arrow mark Flowrate range Indicates gas flow direction Chapter 3 MOUNTING AND WIRING 7 WARNING Never allow gases that are within explosive limits to pass through this meter or device Doing so might result in explosion accidents OS 00 OS OOS 0 Z CAUTION Be sure to use this product within the flowrate range stated in the specifications To prevent excessive flow use a suitable means to control the supply pressure or use a throttle valve or the like to control the flowrate If the flowrate exceeds the upper limit both the flowrate display and the output voltage current may indicate considerably lower values than the actual flowrate If damage could result from the abnormal functioning of this device include appropriate redundancy in the system design Do not hold a resin cover portion at the time of carrying or piping this device Doing so might damage the cover or dropping the device due to slipping might result in getting hurt Do not install the d
33. when the flowrate greatly exceeds the upper limit of flowrate range se eeee cence eee eee eee 5 E Piping sccscceccssccesccsccnscnsccessenseesesessesseeseesesesseenes 6 ME WIIG 1 eee eee eee cece eee eee rete ence teen eee n teen ene e een eneeenes 10 Chapter 4 METHOD OF OPERATION Models with Display Meter E State transition digram cece ee eee cence eee eee e cece ene eens 13 E Function setup see ee cece cece cece cence eee eeeeneeeeneneeneees 14 M Parameter setup ese eee eee eee e cece cence cence cence cence eeneees 17 ME Integration cece ee cece e eee eee een e nee n een e teen ence eenenenenes 19 E Resetting the integrated value and reverse integrated value 19 E Whatis Event standby ce eee ee cece e cece e cence cence eeneees 19 E Event ON delay se ce cece cece cece eee n eee e eee n ee ceneeeeneeee 19 Chapter 5 TROUBLESHOOTING E Remedying trouble ee cee cece eee c cece cece eee eeeeeneeeeneeee 20 Chapter 6 SPECIFICATIONS HM General specifications s sesressssereesesecrrersereresereerees 21 E External dimensions 0c cccec ence nee n ene eeeeeeeeeeeeeeeene 23 E PreSSUFre lOSS isis ccc eoeecceaeetind cade cdeesedeceeeeeerece ed ae Secale ne 25 Chapter 1 E Introduction E Features Note INTRODUCTION The CMS0020 0050 Gas mass flow meter resin model uses uF Micro Flow sensor
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