User Manual of Compact Sputter
Contents
1. chamber door P ging ping Close roughing valve Pumping mechanical pump Open foreline valve 3 1 Manually Pumping Pumping mechanical pump Standby Acceleration Normal Failure Brake Open roughing valve Open foreline valve Pumping TMP after 5E 2 Torr High Vac Close roughing valve Figure 6 Pumping line 3 2 Automatically pumping Automatic pumping is processed by touching auto pumping menu in yellow rectangle on touch screen Figure 7 Automatic pumping control panel gt Process Equipment Pioneer sw A Process pressure control Compact Sputter 75S S ee 4 Process pressure control gt Process pressure is controlled by the combination with process gas and low vacuum pump The process pressure is set according to following flow chart sequence Introduce gas Setting pressure reached Set process pressure Sputtering process 4 1 Manual process pressure control gt Vacuum related menu is shown on touch panel as follows Set gas flow rate Open G M gas main valve DZ OUT Open valve of Ar out O2 out Check flow rate Figure 8 Schematic of gas introduction line Check pressure reached Process Equipment Pioneer au 5 Sputtering process Compact Sputter 75S 5 Sputtering process Sputtering is processed through plasma discharge by applying power on cathode after process pressure is set Control process pressure Apply power on spu2. continuous sputtering process The process gases are prepared by users Gas pressure gt 1 2kg cm Gas line Ya stainless steel electro polished Gas line finishing 1 4 LOK SYSTEM Process Equipment Pioneer 2 Sample loading Compact Sputter 75S 2 Sample loading Sample loading is manually done on touch panel according to following sequence TMP off amp Breaking vacuum Close chamber door Sample loading on substrate holder 2 1 Manually vacuum breaking If V V is clicked on touch screen red color rectangle vacuum is sequentially being broken At this time R V G M and M V must be kept in closed states But safety interlock system prevents V V from being opened under the open state of R V and G M During vacuum breaking TMP must be shut down but it is acceptable for rotary pump to work with roughing valve close 2 2 Manually vacuum breaking 02 1H Flow Set Figure 3 Gas introduction to chamber 2 3 Automatically vacuum breaking If auto vent in yellow rectangle is touched vacuum breaking is 5 automatically processed through eo a proper sequence Figure 5 Automatic pumping 1D SYSTEM 4 Process Equipment Pioneer 3 Pumping Compact Sputter 75S ss 3 Pumping gt Pumping is processed in the order of rough vacuum pumping and high vacuum pumping as follows All of these operation are done on touch screen O Open roughing valve Pumping TMP after 5E 2 Torr
3. Compact Sputter 75S User Manual Version 1 Head Office amp Factory 175 25 Cheongcheon Dong 2 Bupyung Gu Incheon 403 853 Rep Korea Phone 82 32 508 8060 Fax 82 32 508 8069 Email atech atechsystem co kr SYSTEM Process Equipment Pioneer Compact Sputter 75S Contents Checking points prior to operation Sample loading Pumping Process pressure control Sputtering process Sample unloading Error checking SYSTEM Process Equipment Pioneer Compact Sputter 75S Summary 1 Sputter source Target size 2in to 3in Target cooling Water cooled Shutter equipped for preventing contamination Applied power dc rf 2 Substrate holder Substrate size max 4 Substrate heating max 300 C 3 Pumping system TMP 51liter sec Oil rotary pump 200liter min Main valve optional APC control part optional YY MM DD HH MM SS TIMER 00 00 00 Gas control Flow Set Ar OUT i a a i A zg Bis a l ji N2 OUT r E Ei 1 0 nr lo Sputter Time Vacuum control A Control PLC based touch screen Auto pumping auto venting Setting power and time 5 Process gas Ar N O optional 6 Utilities CDA pressure 2 5 5 0 kg cm PCW 2 5 5 0 kg cm Warning light Pumping control Standby Acceleration lormal Low Vac Torr High Vac 123 Torr Power control Figure 1 Control panel in Process Equipment Pioneer 4 39 1 Checki
4. ng points prior to operation Compact Sputter 75S 1 Checking points prior to operation Before system operation following items should be checked 1 1 Air pressure and water pressure gt Because air pressure is essential for valve operation its supply state must be checked before system operation Air condition CDA Clean Dry Air Air pressure range 2 5 5kg cm gt Because cooling water is essential for dissipating heat from sputter target and for cooling TMP cooling water pressure temperature and flow rate must be controlled in an appropriate range Cooling water temperature lt 20 C Cooling water pressure 1 2kg cm Cooling water flow rate gt 20l min The utilities for air and water pressures are prepared by user But the connection ports are equipped on the sputter system by supplier Connection port for air 1 4 LOK type Connection port for water 3 8 LOK type 1 2 Checking of power connection It is essential that power source is well connected and the main electric distribution board and the breaker in system are positioned in turn on Electricity 220V single phase 15A gt Electrical grounds in system must be independently secured and it is supplied by user gt Power source connector must be externally connected through main breaker 1 3 Process gas connections Argon and nitrogen gases are provided as main gases and their remaining amounts in bombes must be checked periodically for a
5. tter cathode Sputtering process 5 1 Target to substrate distance control Target to substrate distance is manually controlled over the range of 60mm to 100mm 5 2 Sputtering process Sputtering is processed by setting process time and power in menu enclosed with red rectangle as shown in following figure 9 Sputter Time Figure 9 Sputtering power control panel Ar Process Equipment Pioneer 24 6 Sample unloading amp 7 Error checking Compact Sputter 75S 6 Sample unloading gt Processed sample is manually unloaded from substrate holder after coating sample as shown in following flow chart Break vacuum Open chamber door Q O O Q or 0 Q WY Q 3 pei qd 7 Error checking The errors occurred in system are monitored and displayed with their messages such as cause Occurrence frequency time and date etc YY MM DD HH MM SS TIMER 00 00 00 lt ERROR LIST gt AS icon in touch screen iS clicked the Trigger Data Time Content Clear Data Time pictures of error message or main VYYY MW DD HH MM SS AAAAABAAAAAARARAARAR VYYY MM DD HH MM SS con t ro are re 0 ea t e d ly d j S p ay e d YYYYZMMZDD HH MM SS AAAA YYYYZMMZDDO HH MM SS l YYYYZMMZDD HH MM SS AAA YYYY MM DD HH MM SS Figure 10 Control part ions Figure 11 Error message picture TN y Process Equipment Pioneer S aa STE 4 _
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