ANT95-3-V Stage User`s Manual
Contents
1. I I RR RR Rm Rr rere 27 Table B 2 Archived renan 28 www aerotech com vii List of Tables ANT95 3 V Series Stage User s Manual viii www aerotech com ANT95 3 V Series Stage User s Manual Overview Chapter 1 Overview This manual describes Aerotech s ANT95 3 V series positioning stage Figure 1 1 shows a typical ANT95 3 V vertical lift stage This chapter introduces standard and optional features of the 95 3 explains the model numbering sys tem and gives general safety precautions Figure 1 1 95 3 Vertical Lift Stage NOTE Aerotech continually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com Www aerotech com Chapter 1 1 Overview ANT95 3 V Series Stage User s Manual 1 1 Standard Features The ANT lift stages incorporate linear cross roller bearings a linear motor a non contact linear encoder and constraint flexures into a compact three piece wedge design The combination of their features and size make the ANT lift stages unlike any other lift stage on the market No other stage matches their accuracy repeatability resolution speed and smoothness of motion in such a small package size The linear cross roller bearings combined with the wedge style design offer excellent stiffnes2. 8 9 Figure 1 2 95 3 Dimensions 4 Chapter 1 www aerotech com ANT95 3 V Series Stage User s Manual Overview MP MOUNTING PLATE BREADBOARD STAGE MOUNTING 8X M4x0 7 THRU DEPTH 141 8 BREADBOARD MOUNTING 4X M6 OR 1 4 20 BOLT C BORE SLOT 10 0 50 95 0 DIMENSIONS MILLIMETERS Figure 1 3 MP ANT95 3 V Dimensions www aerotech com Chapter 1 5 Overview ANT95 3 V Series Stage User s Manual 1 3 Safety Procedures and Warnings The following statements apply throughout this manual Failure to observe these precautions could result in serious injury to those performing the procedures and damage to the equipment This manual and any additional instructions included with the stage should be retained for the lifetime of the stage A DANGER gt DANGER gt DANGER gt DANGER WARNING WARNING WARNING To minimize the possibility of electrical shock and bodily injury or death disconnect all elec trical power prior to making any electrical connections To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit is in use ensure that no person comes in contact with the circuitry when the stage is connected to a power source To minimize the possibility of bodily injury or death disconnect all electrical power prior to making any mechanical adjustments Moving parts of the stage can cause crushing or sheari
3. 2 1 Figure 1 2 95 3 4 Figure 1 3 MP ANT95 3 V 4 2 5 Figure 2 1 Shipping Bracket Used on 5 3 rear 10 Figure 2 2 Mounting to a Flat erre 11 Figure 2 3 Mounting Hole 7 2 7 22 12 Figure 3 1 95 3 Limit Switch 4444 2 0 22 2 19 Figure 3 2 Feedback and Motor Pin 2 20 www aerotech com List of Figures vi ANT95 3 V Series Stage User s Manual www aerotech com ANT95 3 V Series Stage User s Manual List of Tables List of Tables Table 1 1 Model Numbering System for ANT95 3 V 3 Table 3 1 Environmental 4 444 2 20 42020000200 15 Table 3 2 ANT95 3 V 4 22 4 17 Table 3 3 Motor Specifications eee 18 Table 3 4 Motor and Feedback Wiring Pinout 4 42 2 42 21 Table B 1 Current Changes 1 01 00
4. 23 Environmental Specifications 15 17 F Standard 2 16 I temperature effects 16 inspection 23 U L Unpacking and Handling the Stage 9 limit 19 Linear Cross Roller Bearings 2 EC vacuum 2 lubricants vacuum preparation 22 24 vacuum 22 www aerotech com Index 29 ANT95 3 V Series Stage User s Manual Index 08 6 WINO 19 30 Index www aerotech com Reader s Comments ANT95 3 V Series Stage Manual P N EDS169 November 5 2010 Revision 1 01 00 Please answer the questions below and add any suggestions for improving this doc ument AEROTECH Is the manual Adequate to the subject Do Well organized Clearly presented Well illustrated FS RA How do you use this document in your job Does it meet your needs What improvements if any w
5. Index 24 lubrication and cleaning process 24 A lubrication 23 Attaching the 13 M B mechanical 16 BLMC 142 17 model 9 brushless linear 2 Motor 17 C Multi axis 24 hs 14 Glednillg 24 operating 16 D Optional 2 Declaration of Incorporation 8 1 4 P E Preparing the Mounting Surface 11 Electrical 14 electrical 16 safety 6 Encoder 16 Securing the Stage to the Mounting Surface 12 ENCOdENS 20 service
6. in s Peak Current Stall 11 76 8 31 Force Constant Sine Drive 5 8 3 28 0 74 Motor 24 1 40 0 31 Resistance 25 Line Line Inductance Line Line Thermal Resistance No cooling Mechanical Specifications Magnetic Pole Pitch 16 00 0 63 1 Performance is dependant upon heat sink configuration system cooling conditions and ambient temperature Resistance 25 0 inductance Thermal Resistance No cooling 2 Values shown 100 C rise above a 25 C ambient temperature 3 Peak force assumes correct rms current consult Aerotech 4 Force constant and motor constant specified at stall 5 All performance and electrical specifications 10 6 All Aerotech amplifiers are rated Apk use torque constant in N m Apk when sizing 18 Chapter 3 www aerotech com ANT95 3 V Series Stage User s Manual Operating Specifications 3 6 Limit Switches ANT95 3 V stages have integral EOT end of travel limit switches The limit switches signal when the stage has reached its maximum useable travel distance in both directions 3 6 1 Limit Switch Wiring Limit switches are open collector TTL compatible devices that change output states when the stage approaches its maximum travel distance Since they are open collector devices they may be interfaced to 24 Volt logic inputs 4Du 25Du Connectors al it Single 25Du Connector
7. 24 VIO 5 VDC 24 CW Limit 24 WHT N C Switch Controller N C Switch 24 GRY CCW Limit Figure 3 1 ANT95 3 V Limit Switch Wiring The input to the controller is seen as a logic O typical 0 4V when no limit condition is present When the limit Switch is activated a 5V source through a pull up resistor on the controller causes a logic 1 typically 4 8 5 V to be seen by the controller input See Figure 3 1 for a diagram of limit switch wiring www aerotech com Chapter 3 19 Operating Specifications ANT95 3 V Series Stage User s Manual 3 7 Standard Stage Wiring Stages fitted with standard motors and encoders come from the factory completely wired and assembled For reference connector pin outputs and general wiring information is given in 3 7 and the following figures Pin outputs are defined Table 3 4 NOTE Refer to the other documentation accompanying your Aerotech equipment Call your Aerotech rep resentative if there are any questions on system configuration NOTE If you are using your own cables to connect the stage ensure that motor and ground wires can handle current higher than the continuous motor current listed in Table 3 3 The voltage rating of the wire insulation must be greater than the maximum drive output voltage listed in Table 3 3 SIGNAL g vL L 8l 6 00000 000 S ec Sc 111 L 25 MTR C
8. 3 1 Environmental Specifications The environmental specifications for the ANT95 3 V are listed in the following table Table 3 1 Environmental Specifications Ambient Operating 10 to 35 C 50 to 95 F Temperature The optimal operating temperature is 20 2 68 4 If at any time the operating tem perature deviates from 20 degradation in performance could occur Contact Aerotech for information regarding your specific application and environment Storage 0 to 40 C 32 to 104 F in original shipping packaging Storage 30 percent to 60 percent RH non condensing in original packaging Altitude Operating O to 2 000 m 0 to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 or below sea level Use the system in a low vibration environment Excessive floor or acoustical vibration can affect stage and system performance Contact Aerotech for information regarding your specific appli cation Dust Expo The ANT95 3 V stages are not suited for dusty or wet environments This equates to an ingress sure protection rating of IPOO Humidity Operating 40 percent to 50 percent RH The optimal operating humidity is 50 percent RH Indoor use only Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment WARNING
9. PIN B 25 O Figure 3 2 Feedback and Motor Pin Assignments 20 Chapter 3 www aerotech com ANT95 3 V Series Stage User s Manual Operating Specifications Table 3 4 Motor and Feedback Wiring Pinout Descriptions Pin Output Descripion 09000 yO erence cycle Incremental encoder output either the compliment of Marker with a line driven TTL type encoder or 2 5 V DC bias level with amplified sine wave type encoder Over Temperature sensor Signal indicating maximum travel produced by positive stage direction Active high signal indicating stage maximum travel produced by negative stage direction www aerotech com Chapter 3 21 Operating Specifications ANT95 3 V Series Stage User s Manual 3 8 Vacuum Operation Aerotech can specially prepare the ANT95 3 V stage for operation in vacuum environments Aerotech offers two vacuum preparation options one for low vacuum for use in atmospheric pressures to 10 3 torr and one for high vacuum preparation for environments from 1073 to 10 6 torr As part of this preparation attention to detail during modification cleaning and assembly results in stages with optimal performance in vacuum applications Preparation techniques for stages that will operate in a vacuum include e Lubrication with vacuum compatible lubricants e Useof materials fasteners and coatings with vacuum outgas performance compatible with the level of vacuum specified e
10. for more details 3 3 Encoder Resolution The encoder in the ANT95 3 V has a 20 um fundamental resolution The encoder reads the horizontal drive wedge motion not the vertical tabletop motion This increases the fundamental resolution seen at the table top The angle of the drive wedge is 7 70 which results in a fundamental encoder resolution of 2 704 um The fundamental resolution is not the same as the electrical resolution The encoder signal is multiplied inside Aerotech s controller to yield a much smaller resolution Consult the system documentation included with the stage to determine this value The mechanical resolution which is listed in the stage specification table in Section 3 5 is distinct from the electrical and fundamental resolution It is the smallest motion increment Aerotech can consistently meas ure using an external measurement device such as a laser or a capacitance probe The mechanical res olution can never be smaller than the electrical resolution of the stage 3 4 Flexure Handling ANT95 3 V stage uses flexures to laterally constrain the tabletop so it will move vertically as the drive wedge moves horizontally The flexures are engineered to provide smooth repeatable motion for the entire life of the stage They are made of thin steel however and can fail if they are mishandled Do not remove the cover from the stage unless it is absolutely necessary When the cover is off take care not to bend nic
11. stage motion and potential damage from occur ring during transport The bracket is red anodized aluminum and it must be removed from the stage before it can operate Figure 2 1 depicts the shipping bracket as it is used to constrain an ANT95 3 V stage Figure 2 1 Shipping Bracket Used on ANT95 3 V NOTE After removing the shipping bracket you should retain it for future use In the event the stage reguires service at the factory the shipping bracket should be reattached to ensure the stage ships safely 10 Chapter 2 www aerotech com ANT95 3 V Series Stage User s Manual Installation 2 3 Preparing the Mounting Surface The mounting surface should be flat to 5 um and have adequate stiffness in order to achieve the maximum performance from the ANT95 3 V When an ANT95 3 V stage is mounted to a warped surface the stage can be distorted as the mounting screws are tightened see Figure 2 2 Any distortion will decrease the overall accuracy of the stage Adjustments to the mounting surface must be done before the stage is secured Mounting to a Flat Surface Mounting to a Curved Surface Exaggerated Figure 2 2 Mounting to a Flat Surface NOTE To maintain accuracy the mounting surface should be flat within 5 over the entire stage foot print NOTE The stage base is precision machined and verified for flatness prior to stage assembly at the fac tory If machining is required to achieve the desired flatness it should be p
12. 17 3 6 Limit 2 2 222 2 2 19 3 6 1 Limit Switch Wiring 19 3 7 Standard Stage 4 49 7 2 2 20 3 8 Vacuum Operation 22 3 8 1 Special 2 4 22 Chapter 4 Maintenance 23 4 1 Service and Inspection 23 4 2 Cleaning and 0 0 42 22 24 4 2 1 Recommended Cleaning 2 24 4 2 2 Important Notes on s nnns 24 4 2 3 Lubrication and Cleaning 2 424 4 4 22 2 2 2 24 Appendix A Warranty and Field 25 Appendix B Technical 27 gt RID ML mt M DA A 29 Reader s Commenis eee 31 www aerotech com Table of Contents ANT95 3 V Series Stage User s Manual www aerotech com ANT95 3 V Series Stage User s Manual List Of Figures List of Figures Figure 1 1 ANT95 3 V Vertical Lift 5
13. ANT95 3 V Stage User s Manual P N EDS169 Revision 1 01 00 Dedicated to the Science of Motion Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 412 963 7470 412 963 7459 www aerotech com Product Registration Technical Support Revision History Register online at http www aerotech com prodreg cfm United States Headquarters Phone 412 967 6440 Fax 412 967 6870 Email service aerotech com United Kingdom Phone 44 118 940 9400 Fax 44 118 940 9401 Email service aerotech co uk Germany Phone 49 911 967 9370 Fax 49 911 967 93720 Email service aerotechgmbh de Japan Phone 81 0 47 489 1741 Sales Phone 81 0 47 489 1742 Service Fax 81 0 47 489 1743 Email service aerotechkk com jp China Phone 852 3793 3488 Email saleschina aerotech com Revision 1 01 00 November 5 2010 Revision 1 00 00 July 7 2010 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies O Aerotech Inc 2010 ANT95 3 V Series Stage User s Manual Table of Contents Table of Contents Tableor Contenis 22 costs iii EE V Eist or Tables D E EE vii Chapter 1 Overview 1 1 1 Standard 2 2 4 44 44 1 2 1 1 Optional Features 2 2 2
14. Forhigh vacuum stages elimination of situations that may allow gases to become temporarily trapped during pump down e Extensive cleaning prior to assembly in a clean environment and packaging in a special polyethylene bag 3 8 1 Special Guidelines To ensure that the stage will continue to perform well in the vacuum environment follow the guidelines listed below in addition to standard handling installation and lubrication guidelines outlined earlier in this manual Do not remove the stage from the sealed bag until it is ready for use 2 Always handle the stage in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the stage 3 During installation use cleaned vented stainless steel fasteners when securing the stage Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vac uum compatible lubricants could result in excessive motor operating temperatures Because of this consider all continuous torque ratings to be 40 to 60 lower than the value specified for operation in nor mal atmospheric environment Reduce motor usage accordingly 5 Forvacuum applications the recommended lubricant is a small quantity of Braycote9 602EF grease or a substitute of equal quality Baking vacuum components between 100 and 125 for 24 to 48 hours significantly reduces outgassing at initial pump down to vacuum pressure and evapora
15. Locations 12 Chapter 2 www aerotech com ANT95 3 V Series Stage User s Manual Installation 2 5 Attaching the Payload to the Stage To prevent damage to the stage or parts test the operation of the stage before any payload is mounted to the stage tabletop Proceed with the electrical installation and test the motion control system in accordance with the system documentation Document all results for future reference If Aerotech specifically adjusted the servo loop gains to the payload weight prior to shipment the payload might be required to ensure proper servo operation The ANT95 3 V is designed to carry no more than 1 kg The mating surface of the payload must be flat to approximately 10 um to prevent distortion of the stage which would invalidate the specified accuracy For information on electrical connections refer to the Electrical Installation section later in this chapter the documentation of the motion control system delivered with the stage and the wiring drawings in Chapter 3 Operating Specifications NOTE For valid accuracies the mounting interface should be flat within 10 um NOTE Donot attach a payload to the stage table with screws that are too long Mounting screws should not project more than 7 mm 276 into the stage table top www aerotech com Chapter 2 13 Installation ANT95 3 V Series Stage User s Manual 2 6 Electrical Installation Aerotech motion control systems are adjusted at the factory for opti
16. anufactorer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 USA AEROTECH Ww herewith declares that the product Aerotech Inc ANT95 3 V Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended does therefore not in every respect comply with the provisions of this directive and that the following harmonized European standards have been applied EN ISO 12100 1 2 2003 1 2009 Safety of machinery Basic concepts general principles for design ISO 14121 1 2007 Safety of machinery Risk assessment Par 1 Principles EN 60204 1 2005 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares that itis not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration Authorized Representative Manfred Besold Address Name Position Location Date AEROTECH GmbH Sud West Park 90 D 90449 N mberg Alex Weibel bs Engineer Verifying Compliance Pittsburgh PA November 5 2010 Chapter 1 www aerotech com ANT95 3 V Series Stage User s Manual Installation Chapter 2 Installation This chapt
17. eee eile ec ESSE 2 1 1 2 Model 4244 22 2 2 3 12 DIMENSIONS do 4 1 3 Safety Procedures and 1 6 1 4 EC Declaration 22 1 4 1 7 8 Chapter 2 Installation 9 2 1 Unpacking and Handling the Stage 9 2 2 Shipping Bracket 10 2 3 Preparing the Mounting 4 11 2 4 Securing the Stage to the Mounting 12 2 5 Attaching the Payload to the Stage 13 2 6 Electrical 2 2 2 2 2 4 14 Chapter 3 Operating 15 3 1 Environmental 444 15 3 2 Accuracy and Temperature 224 16 3 3 Encoder Resolution 16 3 4 Flexure Handling eterna 16 3 5 Basic Specifications ne
18. er describes the installation procedure for the ANT95 3 V stage including handling the stage prop erly preparing the mounting surface to accept the stage securing the stage to the mounting surface attach ing the payload and making the electrical connections Installation must follow the instructions in this chapter Failure to follow these instructions could result in injury and damage to the equipment WARNING 2 1 Unpacking and Handling the Stage Carefully remove the stage from the protective shipping container Use compressed nitrogen or clean dry air to remove any dust or debris that has collected during shipping Visually inspect the stage for damage If any damage has occurred during shipping report it immediately Set the stage on a smooth flat and clean sur face This is a simple yet very important step in maintaining the integrity of the stage Each stage has a label listing the system part number and serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate this label and record the infor mation for later reference Improper stage handling could adversely affect the stage s performance Therefore use care when moving the stage WARNING Lift the stage only by the base WARNING www aerotech com Chapter 2 9 Installation ANT95 3 V Series Stage User s Manual 2 2 Shipping Bracket Aerotech provides a shipping bracket to prevent unwanted
19. erformed on the mounting sur face rather than the stage base Shimming should be avoided if possible If shimming is required it should be minimized to improve the rigidity of the system www aerotech com Chapter 2 11 Installation ANT95 3 V Series Stage User s Manual 2 4 Securing the Stage to the Mounting Surface ANT95 3 V is designed to be mounted using four X 12 mm or 8 X 3 8 in socket head cap screws Using the specified screw length will guarantee a minimum of 1 5x diameter thread engagement Torque the mounting screws to 2 3 N m 1 7 ft Ib The mounting pattern for the ANT95 3 V is 75 mm X 125 mm There is a gap between the through holes in the cover and the mounting holes which can make inserting the mounting screws challenging You can remove the cover of the stage to more easily access the mounting holes Replace the cover immediately afterwards to prevent damage to the stage Take special care not to touch or mark the flexures in any way Any bends dings or scratches could cause them to fail prematurely If you remove the cover of the stage high magnetic fields at the ends of the magnet tracks will be exposed Keep metal objects away from the ends of the magnet tracks DANGER The stage must be mounted securely Improper mounting can result in injury and damage to the equipment WARNING NOTE Donot attempt to manually move the stage if it is connected to a power source Figure 2 3 Mounting Hole
20. he other for high vacuum 1073 to 10 torr A mounting plate is also available for customers who wish to mount the AN T95 3 V to a standard grid pat temed surface The mounting plate will accommodate a 25 mm or 1 in grid pattern 2 Chapter 1 www aerotech com ANT95 3 V Series Stage User s Manual Overview 1 1 2 Model Numbers Stage model number example ANT95 3 V PLUS NONE The tables below list the available options in the order they appear in the example above Aerotech con tinually improves its product offerings and listed options can be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com Table 1 1 Model Numbering System for ANT95 3 V Stages ANT95 3 V Series Vertical Lift Stage ANT95 3 V 3 mm travel stage with linear motor and limits ANT95 3 V PLUS 3 mm travel stage with linear motor and limits and high accuracy calibration Mounting Plate NONE No mounting plate MP ANT 95 3 V Breadboard mounting plate www aerotech com Chapter 1 3 Overview ANT95 3 V Series Stage User s Manual 1 2 Dimensions CABLE EXIT APPROX 1 M LONG 25 9X 4 0 7 7 6 0 2 1 2 LIMIT TRAVEL 17 1 2 ELEC TRAVEL cA 1 5 WEDGE DIRECTION 1 2 NOMINAL TRAVEL 50 CENTER OF TRAVEL da 37 5 L 53 MOUNTING HOLES 75 4X 4 6 THRU ALL 936 DIMENSIONS MILLIMETERS
21. in a purchase order number or approval within 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement com ponents are warranted for one year from date of shipment At times the buyer may desire to expedite a repair Regardless of warranty orout Rush Service of warranty status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approval www aerotech com Appendix A 25 Warranty and Field Service ANT95 3 V Series Stage User s Manual On site Warranty Repair On site Non warranty 26 Repair Company Address If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs For warranty field repairs the cus tomer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair itis de
22. k ding or mar the flexures in any way Never handle the stage by the flexures or flexure mounting supports If a flexure appears damaged contact Aerotech support 16 Chapter 3 www aerotech com ANT95 3 V Series Stage User s Manual Operating Specifications 3 5 Basic Specifications Basic ANT95 3 V series positioning stage specifications are shown in Table 3 2 Specifications for the motor are given in Table 3 3 Table 3 2 ANT95 3 V Specifications Mechanical Specifications ANT95 3 V ANT95 3 V PLUS Travel 3 mm mS MTBF Mean Time Between Fail 30 000 Hours ure 1 Certified with each stage 2 Measured perpendicular or parallel to wedge direction 3 In Position Stability listing is a 3 sigma value 4 Assumes loading along axis of travel 5 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 6 PLUS requires the use of an Aerotech controller www aerotech com Chapter 3 17 Operating Specifications ANT95 3 V Series Stage User s Manual Table 3 3 Motor Specifications Performance Specifications 1 5 Continuous Force No cooling 2 N Ib 9 7 2 18 Peak Force 9 N Ib 38 7 8 7 Electrical Specifications Winding Designation BEMF Constant Line Line Max V mis Viin s 3 78 0 10 Continuous Current No cooling 2 Amprms 2 94 2 08
23. mall portion of travel for most of the duty cycle it is recommended that the stage be periodically driven through full travel to redistribute the lubrication in the bearings The motor is completely non contact and requires no lubrication www aerotech com Chapter 4 23 Maintenance ANT95 3 V Series Stage User s Manual 4 2 Cleaning and Lubrication 4 2 1 Recommended Cleaning Solvents For standard linear roller bearings Kluberplex BEM 34 132 grease is recommended For high speed applications i e near max speed at a duty cycle of 50 frequent maintenance with stand ard lubricants is required If a solvent is necessary for cleaning the stage use isopropyl alcohol 4 2 2 Important Notes on Lubrication When cleaning and or lubricating components of the ANT95 3 V stages Be sure to use a clean dry soft lint free cloth for cleaning 2 Take the opportunity during the lubrication procedure to inspect the linear motion guides for any damage or signs of wear 3 Inapplications that have multiple stages bolted together to form multi axis systems the orthogonality may be lost if the stage tables of the support stages are loosened Precision aligned stages should not be loosened or disassembled 4 Because proper assembly and calibration can only be done at the factory do not further disassemble the stage If the stage is disassembled then reassembled a laser interferometer is required for post assembly verification to maintain warran
24. mum performance When the ANT95 3 V series stage is part of a complete Aerotech motion control system setup involves connecting the stage to the appropriate drive chassis with the cable provided Connect the provided cable to the 25 pin connector on the stage Labels on the drive indicate the appropriate connections Refer to your drive manuals and doc umentation for additional installation and operation information In some cases if the system is uniquely con figured a drawing showing system interconnects is supplied An integral linear motor comes mounted to ANT95 3 V stages The electrical wiring from the motor and encoder are integrated into one connector at the factory Refer to Section 3 7 for standard motor wiring and connector pin outputs Never connect or disconnect any electrical component or connecting cable while power is applied or serious damage may result WARNING The stage s protective ground is located on pin 10 and 22 of the stage s 25 pin electrical con nector If you are using cables other than those provided by Aerotech you must connect pin 10 and 22 to a ground connection WARNING 14 Chapter 2 www aerotech com ANT95 3 V Series Stage User s Manual Operating Specifications Chapter 3 Operating Specifications The surrounding environment and operating conditions can affect the performance and service life of the stage This chapter provides information on ideal environmental and operating conditions
25. ng injuries All personnel must remain clear of any moving parts Improper use of the stage can cause damage shock injury or death Read and understand this manual before operating the stage If the stage is used in a manner not specified by the manufacturer the protection provided by the stage can be impaired Stage cables can pose a tripping hazard Securely mount and position all stage cables to avoid potential hazards Chapter 1 www aerotech com ANT95 3 V Series Stage User s Manual Overview Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment The stage must be mounted securely Improper mounting can result in injury and damage to the equipment Use care when moving the stage Manually lifting or transporting stages can result in injury Only trained personnel should operate inspect and maintain the stage This stage is intended for light industrial manufacturing or laboratory use Use of the stage for unintended applications can result in injury and damage to the equipment Before using this stage perform an operator risk assessment to determine the needed safety requirements A A A A A A 2 2 2 2 2 2 Z Z 2 2 2 www aerotech com Chapter 1 7 Overview ANT95 3 V Series Stage User s Manual 1 4 EC Declaration of Incorporation M
26. ould you like to see Please be specific or cite examples Nmep o me seria erp Name SCs Aerotech Subsidiary Email Order Mailyourcommentsto Farto Aerotech Inc 412 967 6870 101 Zeta Drive Pittsburgh PA 15238 U S A service aerotech com
27. r Return Procedure by the buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty with out first obtaining approval from Aerotech No credit will be given nor repairs made for products returned without such approval Any returned product s must be accompanied by a return authorization number The return authorization number may be obtained by calling an Aerotech service center Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than 30 days after the issuance of a return authorization number will be subject to review After Aerotech s examination warranty or out of warranty status will be deter Returned Product War mined If upon Aerotech s examination a warranted defect exists then the prod ranty Determination uct s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an airfreight return the product s will be shipped collect Warranty repairs do not extend the original warranty period After Aerotech s examination the buyer shall be notified of the repair cost At such Returned Product time the buyer must issue a valid purchase order to cover the cost of the repair and Non warranty Deter freight or authorize the product s to be shipped back as is at the buyer s mination expense Failure to obta
28. rrants its products to be free from defects caused by faulty mate rials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repairing or issuing credit at its option for any products that are returned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or sub sequently provided or whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its prod ucts shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser for a minimum Laser Products period of one year from date of shipment This warranty covers defects in work manship and material and is voided for all laser power supplies plasma tubes and laser systems subject to electrical or physical abuse tampering such as opening the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrie
29. s with minimal friction for smooth movement The cross roller bearings also incorporate a system to prevent cage creep and keep the rollers centered in the bearing rails The ANT95 3 V is driven by a linear motor The brushless linear motor uses an ironless forcer which means there is zero cogging and there are no attractive forces resulting in unsurpassed smoothness of motion A moving magnet track design eliminates the need for cable management improving long term reliability A high accuracy non contact linear encoder allows the ANT95 3 V series stages to have an incremental step size of 2 nm when coupled with Aerotech drives and controls This is especially useful in alignment applications where outstanding step to step resolution is critical The unique flexure constraint allows smooth and extremely repeatable motion that takes full advantage of the drive wedge style design without the extra vertically oriented bearing set used in competing designs For multi axis applications the ANT95 3 V can mount directly to any standard ANT95 50 L or ANT95 50 XY stage 1 1 1 Optional Features The ANT95 3 V stages have two accuracy grades standard accuracy and high accuracy PLUS The high accuracy grade offers a dramatic improvement for more demanding applications See Section 3 5 Basic Specifications for more details For vacuum applications two preparation options are available one for low vacuum environments down to 10 torr and t
30. termined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply If any Aerotech product cannot be made functional by telephone assistance or pur chased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs and the prevailing labor cost includ ing travel time necessary to complete the repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Pittsburgh PA Fax 412 963 7459 15238 2897 Appendix A www aerotech com ANT95 3 V Series Stage User s Manual Technical Changes Appendix B Technical Changes Table B 1 Current Changes 1 01 00 Section s Affected General Information Section 1 4 Added section Section 3 1 Added section Chapter 2 Installation Section 2 4 Added safety information and warnings Section 2 6 and Section 1 3 Section 3 7 Added note about current requirements of motor and ground wires www aerotech com Appendix B 27 Technical Changes ANT95 3 V Series Stage User s Manual Table B 2 Archived Changes Section s Affected General Information 28 Appendix B www aerotech com Index ANT95 3 V Series Stage User s Manual
31. tes water vapor that impregnates porous surfaces on alu minum parts and Teflon cables Aerotech recommends that customers bake out vacuum systems when first installing them in the vacuum chamber 22 Chapter 3 www aerotech com ANT95 3 V Series Stage User s Manual Maintenance Chapter 4 Maintenance This chapter will cover information about intervals between lubrications detail the lubrication and inspection process and cover which lubricants are recommended for use NOTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced Always operate the stage with the hard cover in place to help keep dirt out To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER 4 1 Service and Inspection Schedule Lubricant inspection and replenishment in ANT95 3 V stages depends on conditions such as duty cycle speed and the environment Inspect the stage once per month until a trend develops for the application Longer or shorter intervals may be required to maintain the film of lubricant on the bearing surfaces In gen eral lubricate stages operating in a clean environment annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris lubrication every six months is recommended If the application process uses only a s
32. ties 4 2 3 Lubrication and Cleaning Process The lubrication and cleaning process is outlined in the steps that follow Before beginning lubrication see Section 4 2 1 for recommended lubricants To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER Remove power to the stage Remove any accumulated dust or debris from the inside of the assembly Remove any dirty or dried lubricant from the v channels of the linear bearing rails Use a clean lint free cloth with a side to side motion You can use swab soaked in Isopropyl Alcohol to remove stubbom debris 4 Apply athin continuous film of lubricant to the exposed v channels of the bearing rails on both ends of the stage A good quality natural bristle artist s brush makes an excellent applicator Do not use any applicator that could scratch or otherwise damage the v channels 5 Manually move the stage to the opposite end of travel This will work the grease into the linear bearing guides The stage table should move freely with little resistance Repeat steps 2 through 4 for any areas covered by the original table position Restore power to the stage drive the stage table back to its original position to redistribute lubricants 24 Chapter 4 www aerotech com ANT95 3 V Series Stage User s Manual Warranty and Field Service Appendix A Warranty and Field Service Aerotech Inc wa
33. www aerotech com Chapter 3 15 Operating Specifications ANT95 3 V Series Stage User s Manual 3 2 Accuracy and Temperature Effects The accuracy specification of ANT95 3 V stages is measured at the center of travel 25 mm above the table top with the stage in a horizontal position The stage is assumed to be fully supported by a mounting surface meeting or exceeding the specification in Section 2 3 Extreme temperature changes could cause a decrease in performance or permanent damage to the stage Aerotech stages are designed for and built in a 20 C 68 F environment Any deviation from standard oper ating temperature will affect stage accuracy The severity of temperature effects on all stage specifications depends on many different environmental conditions including how the stage is mounted Contact the fac tory for more details The ANT95 3 V encoder scale is mounted on glass and measures the linear travel of the wedge The ther mal expansion coefficient of the glass is 3 25 ppm C Translated through the wedge angle of 7 70 it becomes an effective thermal expansion coefficient of 0 44 ppm C As the temperature of the operating environment changes from the temperature listed on the accuracy plot included with the stage the accuracy of the stage will change by 0 44 ppm C from the center of travel For calibrated PLUS stages Aerotech con trollers can adjust the calibration based on the temperature of the environment Contact Aerotech
Download Pdf Manuals
Related Search