Closed-Loop Stages and Amplifiers
Contents
1. Supply Current Model Description Voltage Consumption 8101 Linear Translation Stage 48 V 5 325 MA 8102 Z Wedge Translation Stage 48 V 5 525 mA 8103 Rotary Stage 8 V 5 525 mA 8104 Goniometer Stage 8 V 5 325 mA 22 AWG or lower wires should be used for the power supplies In noisy environments it is recommended that the ground line and power line be twisted together Closed Loop Stages and Amplifiers Operation 9 r S ge oe SS d 810x Closed Loop rev B fm Page 10 Friday June 21 2002 2 51 PM ij Selecting a Motion Controller The New Focus motion system looks and acts somewhat like a DC servo motor and can be controlled using several methods including motion control cards joysticks or other peripheral devices or even directly through the RS 232 port of a computer To create a closed loop system however you will need to use a motion control card with dynamic proportional integral derivative PID parameter switching and stiction compensation The supplied motion system s amplifier electronics require that the card have a minimum servo update rate of 2 kHz and the ability to position and hold to 1 encoder count New Focus recommends the following motion control system e Galil DMC 1800 series motion control card e Galil CABLE 100 series cable e Galil ICM1900 Breakout box e Galil WSDK Servo Tuning Software e Galil Ceramic Firmware Special2. Figure 8 Amplifier Box Schematic of the Square wave on output stage with the amplifier output an internal LC card D H BRIDGE AC output that drives LC Card the motor l l L Up COMMON DOWN DIRECTION CONTROL STAGE MOTOR 22 Principles of Operation NEW FOCUS Inc es r S ge d 810x Closed Loop rev B fm Page 23 Friday June 21 2002 2 51 PM Seat Troubleshooting Correcting the Motion Direction If you find that the stage holds when the motors are enabled and then runs away when it is disturbed touched pushed etc then the encoder signal is probably reporting negative position To correct this problem you will need to change the direction of the encoder signal There are three ways to do this e Use software Most modern controllers provide a mechanism to change the direction of the encoder via software or to change the polarity of the motor drive signal e Change the encoder connections You can change the direction of the A B quadrature by swapping either the A and A signals or the B and B signals but not both See Figure 5 for encoder pin descriptions e Change the motor connections Swap two of the motor connections to the splitter cable Closed Loop Stages and Amplifiers Troubleshooting 23 ia SR Sa oe SS d 810x Closed Loop rev B fm Page 24 Friday June 21 2002 2 51 PM ij e Amplifier Front Panel Indica
3. Signal Description Emergency_Stop Safety input This opto isolated input disables the card out put when activated Enable_In Control input Enables operation when shorted to ground 12V Accessory voltage used for powering external component ax 700mW Ground is at the GND pin 12V Accessory voltage use for powering external component max 700 mW Ground is at the GND pin 5V Accessory voltage used for powering external component ax 7 5 W Ground is at the GND pin DIRECTION TTL input signal determines the motor direction when using the amplifier box with a specific external controller Analog Input Specifications Analog Input Specifications e Signal type Differential or Single Ended e Input voltage range 10 V e Input impedance 500 kW e Input low pass filter Specific frequencies between 0 8 KHz to 10 KHz according to configuration Differential Connection A differential analog input provides noise immunity Figure 17 shows how the connection is made Figure 17 Differential analog Closed Loop Stages and Amplifiers Appendix Ill Using the I O Port 39 S gt d SS d 810x Closed Loop rev B fm Page 40 Friday June 21 2002 2 51 PM f Single Ended Connection Figure 18 shows a single ended analog input connection Figure 18 Amplifier Box Single ended f TN i analog input From J vn connection ee aa d cnd Opto Isolat
4. The remainder of this chapter will focus on setting up a closed loop system using a motion control card and software For information on setting up the system with other control methods please refer to Appendix III Using the I O Port on page 37 Mounting the Stage 10 Operation For optimal performance the stage should be mounted to a flat surface New Focus recommends that the surface be flat to 0 0003 inches 8 microns There are four 8 32 M4 counter bored holes in the base of the stage Use 8 32 M4 socket head cap screws tightened to 250 in oz 18 kgf cm to bolt the stage to the table See Appendix II Mechanical Drawings on page 33 to locate the mounting holes for the different stage models NEW FOCUS Inc S Sei d d 810x Closed Loop rev B fm Page 11 Friday June 21 2002 2 51 PM d ig Mounting Stages Together The 810X stages are fully modular they can be stacked to get any combination from one to six degrees of freedom Use the 8 32 UNC 2B X 18 deep threaded mounting holes on the top of the stages to mount the units to one another Torques should not exceed 250 in oz 18 kgf cm Connecting the Components The following section takes you through the steps needed to connect the closed loop stage components together including 1 Connecting the closed loop stage motor cables to the amplifier 2 Connecting your 48 volt power supply to the amplifier 3 Connecting the
5. SS d 810x Closed Loop rev B fm Page 1 Friday June 21 2002 2 51 PM USER S GUIDE Closed Loop Stages and Amplifiers Models 8101 8102 8103 amp 8104 U S Patent 5 991 249 5 453 653 5 714 833 5 696 421 5 616 980 5 682 076 Voltages of up to 260 V are accessible inside the driver chassis mounts and motor While protection circuits are included DO CAUTION NOT operate the units with the driver or mount covers removed If the cable of a mount or motor is frayed or otherwise damaged discontinue use and return it for repair NEW FOCUS 5215 Heller Ave e San Jose CA 95138 1001 e USA phone 408 284 6808 fax 408 284 4824 e mail contact newfocus com e www newfocus com 4 Cia SS d 810x Closed Loop rev B fm Page 2 Friday June 21 2002 2 51 PM Warranty New Focus Inc guarantees its products to be free of defects for one year from the date of shipment This is in lieu of all other guarantees expressed or implied and does not cover incidental or consequential loss Products described in this document are covered by the following U S patents 5 991 249 5 453 653 5 714 833 5 696 421 5 616 980 5 682 076 Information in this document is subject to change without notice Copyright 2002 2001 1998 New Focus Inc All rights reserved The New focus and A New Focus logos and NEW FOCUS Inc are registered trademarks of NEW FOCUS Inc Document Number 810105 Rev
6. 2002 2 51 PM Seat A 272 Appendix I Specifications NEW FOCUS Inc S ge e Fs SS d 810x Closed Loop rev B fm Page 33 Friday June 21 2002 2 51 PM Appendix II Mechanical Drawings Linear Stages Figure 11 Top a 2 56 65 side and bottom views of the Model 8101 Closed Loop Hl 3007 5 Translation Stage d 2 56 65 L 99 25 3 11X 8 32 UNC 2B X 18 Deep Threading Mounting Holes 1 87 47 5 1 75 44 5 o0000000 1 75 44 5 4X Counterbored Clearance Holes for 8 32 or M4 Socket Cap Screw Farside Unless otherwise noted dimensions are in inches with metric dimensions in mm in parentheses Closed Loop Stages and Amplifiers Appendix II Mechanical Drawings 33 S ge Cia SS d 810x Closed Loop rev B fm Page 34 Friday June 21 2002 2 51 PM Figure 12 Top side and bottom views of the Model 8102 Closed Loop Z Axis Wedge 1 39 35 4 Min 1 63 41 4 Max 99 25 1 1 51 38 3 ETS 1 75 44 5 92 23 3 4 35 8 9 3 74 95 Hall 2 56 65 Seeeeee e 1 04 26 5 1 12 28 5 1 50 38 1 l 1 87 47 5 ken 4X Counterbored Clearance Holes for 8 32 or M4 Socket eg 39 25 3 Cap Screw Farside 11X 8 32 UNC 2B X 18 Deep Threading Mounting Holes IS 7 5 1 75 44 5 Unless otherwise noted dimensions are in
7. Keele 41 A Ae Contents NEW FOCUS Inc e d L S Sei ig d 810x Closed Loop rev B fm Page 5 Friday June 21 2002 2 51 PM Introduction Overview The New Focus closed loop translation stages can provide closed loop operation at resolutions of 100 nanometers or less using the built in optical encoder Model 8101 is a linear stage with 44 mm of travel that can move up to 100 mm per second Model 8102 is a linear Z wedge that can lift more than six pounds Model 8103 is a rotary stage that can move a full 360 degrees at speeds of 30 RPM or more Model 8104 is a goniometric stage that can tip or tilt 10 degrees All four models use piezo friction motor technology and high resolution encoders to provide fast highly accurate positioning of your parts Unpacking the System Unpack the stage components with care Compare the contents against the packing slip and inspect them for signs of damage If parts are missing or you notice signs of damage such as dented or scratched covers please contact New Focus immediately Save all packing materials in the event products need to be shipped elsewhere Closed Loop Stages and Amplifiers Introduction 5 o mi oe ig e d 810x Closed Loop rev B fm Page 6 Friday June 21 2002 2 51 PM The following components are included in your New Focus system 1 Closed loop stage with one encoder cable attached Depending on the model you ve or
8. amplifier to your motion control card 4 Connecting the encoder cable to your motion control card 5 Making the appropriate software settings Before you begin setting up you may wish to familiarize yourself with the New Focus components Figures 1 and 2 show the 810X stages and the cables you will need to connect The amplifier s front panel connections are defined in Figure 3 Closed Loop Stages and Amplifiers Operation 11 ia SR Sa e d SS d 810x Closed Loop rev B fm Page 12 Friday June 21 2002 2 51 PM ij Figure 1 Models 8101 and 8102 with encoder and motor cables Encoder Figure 2 Models Motor Cables 8103 and 8104 with encoder and motor cables 12 Operation NEW FOCUS Inc A SS d 810x Closed Loop rev B fm Page 13 Friday June 21 2002 2 51 PM i Figure 3 Front panel of the amplifier box e AMPLIFIER BOX ae S E E TEA ALARM 1 e PORT OUT tte ie 2 ee Control Terminal Connector Description Control Terminal 5 pin connector Accepts input from an external 48 VDC power supply 6 5 A max Provides direct control of the motor ENABLE signal I O Port D type 25 pin connector female Interfaces to the control source joystick or controller Motor Out D type 9 pin connector male Interfaces to the motor To operate the motor requires the following minimum control signals applied to the Control Terminal 48V GND VIN VIN and ENABLE The pr
9. be achieved Embedded into each stage is an optical encoder read head and diffraction grating that work together with encoder interface electronics to achieve less than 100 nanometer resolution In order to protect the optical encoder New Focus has embedded the entire optical encoder into the stage rather than bolting it to the outside of the unit Closed Loop Stages and Amplifiers Principles of Operation 19 S ge Cia SS d 810x Closed Loop rev B fm Page 20 Friday June 21 2002 2 51 PM ij Amplifier The amplifier box is a single axis amplifier box designed to drive up to 32 motor elements in parallel The amplifier box may be operated in one of two modes velocity mode in which the motor is driven continuously or step mode in which the driver output is turned off and on at set intervals in order to drive the motor in discrete steps Step mode operation is illustrated in Figure 6 where the output is ON for 1 16 second at 0 5 second intervals The amplitude of the output corresponds to the analog input value and thus determines the speed of the motor Figure 6 output on off Amplifier output in step mode 1 16 sec ba T sec paa 0 5 sec The amplifier box features e High precision 11 bits control of the output power stage e Step mode operation e Interfaces to an analog command e Indicator LEDs e Output short circuit protection e Minimized sensitivity to cable length A 20 Principles of Operation NEW F
10. Appendix Ill Using the I O Port 9 PIN D TYPE MALE 9 PIN D TYPE FEMALE Ww w UP NEW FOCUS Inc Sa es SS 810x Closed Loop rev B fm Page 43 Friday June 21 2002 2 51 PM Joystick Interface Figure 21 Joystick oC Interface SUPPLY 5 3 Amplifier Box 5 2x LEDS BLOCK TERMINAL MALE MODE Le GND 15 a InMode 18 JOYSTICK Twisted and shielded Cable 2 dii e 2 Amplifier S aI E ET 5 S Io Circuit S iz 5 Shield a T A a 9 Ba PLANT CA Status Fault 3 eo Enable 24 ae a iti 7 LC o Lehm ie CIRCUIT pw 9 PIN D TYPE MALE 9 PIN D TYPE FEMALE a a 3 Closed Loop Stages and Amplifiers Appendix Ill Using the I O Port 43 X d 810x Closed Loop rev B fm Page 44 Friday June 21 2002 2 51 PM eg A 44 Appendix Ill Using the I O Port NEW FOCUS Inc S ge e d
11. B d S Sei d 810x Closed Loop rev B fm Page 3 Friday June 21 2002 2 51 PM Seat Contents Introduction 5 EE farsa easly ee nN ELENG 5 Unpacking the Systetl Sweets cus A ege ee 5 Additional Components Required 6 EE EE 7 Operation 9 EE 3h ie thea cess eaten O ole ae aa AEE Sd E 9 Selecting a Power Supply ees NNN NEE NEEN 9 Selecting a Motion Controller 44 10 Mounting the Stages icici pied ed Het and neces 10 Connecting the Components 006 11 EE 17 Principles of Operation 19 Closed Loop Stages asic areas eee ee 19 PATI TEC eeh ee ees 20 Troubleshooting 23 Correcting the Motion Direction 23 Amplifier Front Panel Indicators 24 Improper Encoder Alignment ueuuesceeene 24 Customer Service 25 Technical Support EE 25 SE E 25 a Closed Loop Stages and Amplifiers Contents 3 S L S Sei d 810x Closed Loop rev B fm Page 4 Friday June 21 2002 2 51 PM Seat Appendix l Specifications 27 Stage with Amplifier Characteristics 27 Amplifier Characteristics tee e d EE 29 Motor Port Pin Descriptions 08 30 CE Comp lante ege ints medians een eege 31 Appendix Il Mechanical Drawings 33 Linear tags A2 Nee ie ENEE EN Ee EES 33 R tary Sta ee EE bh weiss aus 34 EE 36 Appendix Ill Using the I O Port 37 IJO Port Pin Descriptions e SE 37 Analog Input Specifications 005 39
12. C 0 50 C Maximum Velocity 100 mm sec 15 mm sec Holding Force 5N 25N MTBF 20 000 hours 20 000 hours Travel Range 44mm 6mm Encoder Resolution 50nm 50nm Normal Load Capacity 18N 26N Dimensions 3 14 x 3 74x 0 76 in 4 76 x 3 74 x 1 51 in 80 x 95x19 4mm 121 x95 x 38 4mm Encoder Output AB Quadrature AB Quadrature and Sine Cosine and Sine Cosine Motor Cord Length 3 meters 3 meters Encoder Cord Length 2 meters 2 meters 75 rated load continuous operation maximum speed over the operating temperature range Closed Loop Stages and Amplifiers S gt Appendix l Specifications 27 oe ig d 810x Closed Loop rev B fm Page 28 Friday June 21 2002 2 51 PM e Rotary and Goniometer Stages Specification Model 8103 Model 8104 Accuracy 0 6 mrad 0 6 mrad Bi Directional Repeatability 9 urad 9 urad in Incremental Motion 6 urad 6 urad Operating Temperature 0 50 C 0 50 C aximum Velocity 180 degrees sec 10 degrees sec Holding Torque 9 N cm 38 N cm lge 20 000 hours 20 000 hours Travel Range 360 degrees 9 degrees continuous Encoder Resolution 3 urad 3 urad aximum On Center Load 18N 18N Dimensions 3 15 x 3 15x1 18in 3 15 x 4 84 x 1 50 in 80 x 80 x 30 mm 80 x 123 x 38 Encoder Output AB Quadrature AB Quadrature and Sine Cosine and Sine Cosine otor Cord Length 3 meters 3 meters Encoder Cord Length 2 mete
13. High voltage output Not connected 3 otor_Up High voltage output Connected to the motor UP terminal 4 otor Common High voltage output Connected to the motor COMMON terminal 3 otor_Down High voltage output Connected to the motor down termina 6 otor Connected Opto coupled Safety input connected to ground via shortage on the motor connector to enable motor operation 7 GND Power supply ground Shorted to shield 8 N C NOT IN USE 9 N C NOT INUSE 20 Appendix I Specifications o NEW FOCUS Inc So es d 810x Closed Loop rev B fm Page 31 Friday June 21 2002 2 51 PM d Seat CE Compliance The closed loop amplifier box and stages comply with the following European council directives e EMC Council directive 89 336 EEC e Emissions Standard EN 50081 2 1993 EN 55011 1991 e Conducted Emission class A e Radiated Emission class A e Immunity Standard EN 50082 2 95 e Electro Static Discharge ESD Standard EN 61000 4 2 95 e Radiated Immunity Standard EN 61000 4 3 96 ENV 50204 95 e EFT Electrical Fast Transients Standard EN 61000 4 4 95 e Conducted Immunity Standard EN 61000 4 6 96 e Surges Standard EN 61000 4 5 95 e Voltage Variations Standard EN 61000 4 11 94 e SAFETY council directive 73 23 EEC e Safety IEC 61010 1 1990 Closed Loop Stages and Amplifiers Appendix I Specifications 31 ia SR Sa oe d 810x Closed Loop rev B fm Page 32 Friday June 21
14. OCUS Inc d r S ge SS d 810x Closed Loop rev B fm Page 21 Friday June 21 2002 2 51 PM Operating Principles The amplifier box contains the amplifier card and an LC card The amplifier card converts the analog input command signal into a corresponding PWM square wave output signal that is fed to the LC card The LC card filters the signal to produce the output voltage that drives the motor The LC card type corresponds to the number of motor elements to be used and it is integrated into the amplifier box The required DC voltages are supplied by an internal DC to DC converter that is fed from an external 48 V power supply Figure 7 shows a typical application Power Supply Command 48VDC Source Amplifier PWM Output Signal Card 4 5V 412V Tee L 22 Tee H gt i mplifier L Converter gt Circuit 7 High Voltage Figure 7 Amplifier block diagram Amplifier Box Closed Loop Stage de The motor is a three terminal component Up Down and Common Voltage applied between the Up and the Common terminals causes the motor to move in one direction while voltage applied between the Down and the Common terminals causes the motor to move in the opposite direction Figure 8 is a schematic drawing of the output stage Closed Loop Stages and Amplifiers Principles of Operation 21 S ge Cia SS d 810x Closed Loop rev B fm Page 22 Friday June 21 2002 2 51 PM
15. dered there will also be two or four motor cables attached see table below Model Description Motor Configuration 8101 Linear Translation Stage Two Motors 8102 Z Axis Wedge Four Motors 8103 Rotary Stage Four Small Motors 8104 Goniometer Stage Two Small Motors 2 Amplifier Each stage comes with a matched amplifier The amplifiers are not interchangeable between models so be sure to verify that the correct amplifier type has been shipped with the stage unit see table below Stage Amplifier Model 8101 Linear Translation Stage AB1A 2A HR E2 Model 8102 Z Axis Wedge AB1A 2A HR E4 Model 8103 Rotary Stage AB1A 4 ST Model 8104 Goniometer Stage AB1A 2A HR E2 3 Motor Splitter Cable connects the motor cables to the amplifier 4 User s Guide Additional Components Required The following additional components are required to complete a closed loop motion control system 1 5 volt and 48 volt power supplies 2 Power supply to amplifier cable 3 Motion control card computer or peripheral device such as a joystick 6 Introduction NEW FOCUS Inc r S gt d SS d 810x Closed Loop rev B fm Page 7 Friday June 21 2002 2 51 PM 4 Motion controller to encoder interface cable 5 Motion controller to amplifier interface cable Information on selecting a power supply and a motion controller can be found in the Operation chapter beginning on pag
16. e 9 User Safety Care must be taken when connecting the amplifier to a motion controller and power supply If you are unfamiliar with any of the stage components please read the entire User s Guide before attempting connection of the stages Voltages of up to 260 V are accessible inside the driver chassis mounts and motors Although protection circuits are included do not operate the units with the driver or mount covers removed If the wire of a mount or motor is frayed or otherwise damaged discontinue use and contact New Focus for information on how to return it for repair CAUTION Closed Loop Stages and Amplifiers Introduction 7 S ge Cia SS d 810x Closed Loop rev B fm Page 8 Friday June 21 2002 2 51 PM Se Introduction NEW FOCUS Inc S ge X d 810x Closed Loop rev B fm Page 9 Friday June 21 2002 2 51 PM j Operation Overview Before you begin setting up your closed loop motion control system you will need to provide an external power supply and motion controller as well as cables for connecting them to the stage and amplifier This chapter offers guidelines for selecting these components followed by instructions on mounting the stages and connecting all of the components together Selecting a Power Supply The amplifier box requires 48 VDC 125 mA and ground from an external power supply to operate The power requirements for the stages are as follows
17. e connected to the controller s corresponding inputs A to A A to A etc If you are experiencing trouble with the motion direction when you begin to use your system these cables may need to be reversed See Correcting the Motion Direction on page 23 for details I I Index Pulse Signals The index pulse differential signal via I and I is also a standard signal although this signal is not used in all applications It is recommended that this signal be connected if the controller accepts it 5 VDC Ground Power Supply The 5 VDC In and Ground are required to power the encoder electronics Otherwise the encoder will read zero no matter how much vibration or shock occurs Tx Rx Serial Interface The Tx and Rx signals are for a computer interface that allows New Focus to program the NEW FOCUS Inc Sa So d SS d 810x Closed Loop rev B fm Page 17 Friday June 21 2002 2 51 PM d resolution and output frequency Normally the Tx and Rx signals will not be needed If you would like to access these features for some custom application please contact New Focus technical support for more information There are four indicator LEDs on the side of the encoder connector If any of these LEDs glow yellow or red there is a problem with the encoder alignment See Improper Encoder Alignment on page 24 for more information Software Settings When setting up your motion control system to con
18. ed Inputs The following I O Port input interfaces are opto isolated and are activated by shorting them to ground e Emergency Stop ES Disables the AMPLIFIER output e Enable Should be enabled before the motor is activated e In Mode Enables Step Mode operation when activated e Left Limit When activated it disables motor motion to the left e Right Limit When activated it disables motor motion to the right Fault Outputs The Fault is an open collector output that is active shorted to ground under the following conditions e The card is disabled by the Over Current Protection circuit e The motor is not connected the Motor Disconnect signal is floating The Fault output is capable of sinking a maximum of 20mA and is not protected from over current Cabling Connections e Analog Command a twisted shielded cable is recommended e Discrete Inputs These signals are not sensitive to noise and can be grouped together in the same harness with any of the other groups e Shielding Since the high motor voltage is induced placed on the cable shield it is required to make a good ground connection to the shield on both sides The driver card and the motor should be grounded to the infrastructure earth A A0 Appendix Ill Using the I O Port NEW FOCUS Inc S gt d SS d 810x Closed Loop rev B fm Page 41 Friday June 21 2002 2 51 PM System Interfaces This section describes the pin interfaces for sin
19. gle ended differential and joystick inputs Single Ended Analog Interface Figure 19 DC di i POWER Non differential Bee common input a interface p SI ell elz Amplifier Box ol gt gt aj F 5 1y 3 2 1 2x LEDS BLOCK TERMINAL MALE MODE DND 15 SSC InMiode 26 w LU CONTROLLER Twisted and shielded cable E z p ach Del E Amplifier a Jeers E e Se A GND 9 Led Shield a E STATUS FAULT 3 ES a ENABLE he ENABLE 24 a 2 2 amp N PLANT E SSES o Left Limit 10 LC 9 PIN D TYPE MALE 9 PIN D TYPE FEMALE a 3 Closed Loop Stages and Amplifiers Appendix Ill Using the I O Port 41 Cia S ge SS d 810x Closed Loop rev B fm Page 42 Friday June 21 2002 2 51 PM Differential Analog Interface Figure 20 Differential interface DC POWER SUPPLY o ENABLE a Vin w Vint GND 48V Amplifier Box 2x LEDS BLOCK TERMINAL MALE MODE GND 15 am Iniode 1 uw 4 CONTROLLER Twisted and shielded cable Kg A ifi Vout Vint 1 DI mp mer a vow J E Circuit Shield 1 gt Q T FAULT 3 gt a p Sromis ENABLE 24 e z ENABLE LH ES Lo N PLANT oo Emergency Stop 3 ee Right Limit 22 eo Left Limit 10 LC 4 Cet CIRCUIT 42
20. imary voltage 48V is supplied from an external source Connecting the Stage to the Amplifier Use the supplied cables to connect the stage s motor cables to the amplifier 1 Connect the motor splitter cable to the amplifier connector labeled Motor Out 2 Connect each of the motor cables to any of the splitter cable ends For the 8101 and 8104 stage models there should be two motor cables the 8102 and 8103 models have four motor cables If you are experiencing trouble with the motion direction when you begin to use your system these motor cable connections may need to be reversed See Correcting the Motion Direction on page 23 for details Closed Loop Stages and Amplifiers Operation 13 Sa So oe SS d 810x Closed Loop rev B fm Page 14 Friday June 21 2002 2 51 PM Connecting the Power Supply to the Amplifier Using 22 AWG or lower wires make the following connections from your power supply to the amplifier s Control Terminal 1 Connect 48 V to the 48 V terminal on the left of the Control Terminal see Figure 4 2 Connect the ground wire to the GND terminal If your surroundings are electrically noisy be sure to twist the ground line and power line together Do NOT turn on the power supply until all motor and encoder connections are made CAUTION Connecting the Amplifier to the Control Card The amplifier requires three signals from a motion control card an analog contro
21. inches with metric dimensions in mm in parentheses Rotary Stages Figure 13 Side top and side views of the Model 8103 Closed Loop Rotary Stage 1 74 44 2 11 50 38 1 30 7 5 Kl 3 15 80 1 75 44 5 02 66 67 5 o 0 25 6 4 Through Hole 75 19 1 1 50 38 1 Unless otherwise noted dimensions are in inches wit 34 Appendix Il Mechanical Drawings Re Sa 8X 8 32 UNC 2B X 18 Deep Threading Mounting Holes 4X Counterbored Clearance Holes for 8 32 or M4 Socket Cap Screw 1 50 38 1 D r ce 75 19 1 metric dimensions in mm in parentheses NEW FOCUS Inc es SS d 810x Closed Loop rev B fm Page 35 Friday June 21 2002 2 51 PM Figure 14 Top side and bottom views of the Model 8104 Closed Loop Goniometer Closed Loop Stages and Amplifiers Rotation Axis 1 50 38 1 i 7 5 83 21 1 4X Counterbored Clearance Holes for 8 32 or M4 Socket Cap Screw Farside i 11X 8 32 UNC 2B X 18 Deep 43 4 Threading Mounting Holes Unless otherwise noted dimensions are in inches with metric dimensions in mm in parentheses Appendix II Mechanical Drawings 35 S ge Cia SS 810x Closed Loop rev B fm Page 36 Friday June 21 2002 2 51 PM Amplifier Box Figure 15 Front top and rear x AMPLIFIER BOX views of the 2 ALARMI VO PORT MOTOR OUT Amp
22. l signal analog control return which is usually ground and motor enable which is active low Figure 4 shows the Control Terminal connectors on the amplifier box Figure 4 Control O m Terminal pin 2S da S descriptions S S 5 5 m Oo00000 Pin Name Description 1 48 V 48 Volts Input 2 GND Ground 3 Vin Analog Drive Voltage Input 4 Vin Analog Drive Return 5 ENABLE Active Low Enable Input You will need to refer to the user s manual for your control system to determine the corresponding signal connectors on your control card A 14 Operation NEW FOCUS Inc r S ge d SS d 810x Closed Loop rev B fm Page 15 Friday June 21 2002 2 51 PM d Using a high quality shielded 4 conductor cable make the following connections from your control card to the amplifier 1 Connect a 10 V analog output signal to VIN on the Control Terminal 2 Connect an analog return signal to the VIN terminal On some control cards this signal will be the same as ground 3 If your control card s analog return signal is not ground you will need to run a separate ground wire to the GND terminal You will need to insert the 48 V power supply ground connection together Tn with the control card ground to ensure proper grounding of the amplifier box 4 Make the motor enable signal connection to the ENABLE terminal Ifyou are using a controller other than a control card refer to Appendix III U
23. lifier Box ALARM 2 ES o oo0o0 00 00000 o oo oo oo oo o OD oo oo 00000 oo oo oo 000 0 0000000000 ooo 0 00 000 0 oo oo OC OO OO 000000000 0 oo0000 000 0 0000000000 oo000 00000 000000000 0 111 2 q N 26 19 9 A o ES o 2 WE for Mounting M4 DIN 7985 ST TYPx2 TYPx2 36 Appendix Il Mechanical Drawings NEW FOCUS Inc X d 810x Closed Loop rev B fm Page 37 Friday June 21 2002 2 51 PM Seat Appendix Ill Using the UO Port I O Port Pin Description Figure 16 Pin descriptions for the amplifier s I O Port 2_EMERGENCY_STOP 12V LEFT_LIMIT GND SON OUT HEAT_SENSOR DIRECTION Not in Use GND FAULT GND VIN Pin Name Description 1 VIN Positive analog command input 2 GND Ground 3 FAULT Open collector output 4 GND Ground 5 Not in Use 6 DIRECTION TTL input option 7 HEAT_SENSOR Optional 8 SYNC_OUT Optional 9 GND Ground 10 LEFT LIMIT Digital Input For Left Limit Switch Active Low Closed Loop Stages and Amplifiers Appendix Ill Using the I O Port 37 L S gt ae d 810x Closed Loop rev B fm Page 38 Friday June 21 2002 2 51 PM Seat Pin Name Description 1 12V 12v Power Supply For External Device 2 EMERGENCY_STOP Protectio
24. n Input Active Low 3 USER VOLTAGE External power supply opto isolated type inputs 4 VIN egative analog command input 5 GND Ground 6 STEP_MODE ode Selection RESET_IN System initialization 8 Notin Use 9 Notin Use 20 HEAT_SENSOR Optiona 21 SYNC_IN Optiona 22 RIGHT_LIMIT Digital Input For Left Limit Switch Active Low 23 412V 12 V Power Supply For External Device 24 ENABLE_IN Digital Input Active Low 25 45y 5 V Power Supply For External Device 1 Further explanations for some of these signals are given in the Signal Descriptions section below 2 VIN VIN and ENABLE _IN are identical to the VIN VIN and ENABLE_IN signals in Control Terminal block Signal Descriptions Signal Description Limit Switches The amplifier has two opto isolated limit switch inputs Left_Limit and Right_Limit These inputs turn the motor off when the mechanical element driven by the motor reaches the end motion When the limit switch is active shorted to ground the motion in the corresponding direction is disabled and only motion in the other direction is possible Step_Mode Determines the amplifier s mode of operation Velocity or Step Mode a 38 Appendix IIl Using the I O Port NEW FOCUS Inc S gt S SS d 810x Closed Loop rev B fm Page 39 Friday June 21 2002 2 51 PM d e input connection ban J EE controller i
25. pport Information and advice about the operation of any New Focus product is available from our applications engineers For quickest response ask for Technical Support and know the model and serial numbers for your product Hours 8 00 5 00 PST Monday through Friday excluding holidays Toll Free 1 866 NUFOCUS 1 866 683 6287 from the USA amp Canada only Phone 408 284 6808 Support is also available by fax and email Fax 408 980 8883 Email techsupport newfocus com We typically respond to faxes and email within one business day Service In the event that the closed loop stage or amplifier malfunctions or becomes damaged please contact New Focus for a return authorization number and instructions on shipping the unit back for evaluation and repair Closed Loop Stages and Amplifiers Customer Service 25 ia Sa ai is d 810x Closed Loop rev B fm Page 26 Friday June 21 2002 2 51 PM Seat A 26 Customer Service NEW FOCUS Inc r S ge e d d 810x Closed Loop rev B fm Page 27 Friday June 21 2002 2 51 PM j Appendix I Specifications Stage with Amplifier Characteristics Linear Stages Specification Model 8101 Model 8102 Accuracy 3 um 3 um Bi Directional Repeatability 150 nm 150 nm Min Incremental Motion 00 nm 00 nm Straightness 4 um Flatness 6 um Operating Temperature 0 50
26. rs 2 meters 75 rated load continuous operation maximum speed over the operating temperature range 28 Appendix I Specifications NEW FOCUS Inc So g Fs d 810x Closed Loop rev B fm Page 29 Friday June 21 2002 2 51 PM j Amplifier Characteristics Specifications Amplifier Box Power Input 48 VDC 5 aximum Motor Output 250 290 Vrms Power Consumption 48 VDC 0 125 A without Load Power Consumption 48 VDC 6 5 A max with Maximum Load Dimensions W x D x H 5 87 x 4 67 x 1 61 in 149x 118 5 x 41 mm without mounting bracket Weight 450 gr Mounting options Desktop Wall Mount Operating Temperature 0 to 50 C Storage Temperature 40 to 70 C Operating Humidity Up to 80 Closed Loop Stages and Amplifiers Appendix I Specifications 29 is S gt Mo d 810x Closed Loop rev B fm Page 30 Friday June 21 2002 2 51 PM e Motor Port Pin Descriptions We recommend that you use the supplied splitter cable to connect the stage motor cables to the amplifier For your reference the motor port pins are described in Figure 10 Figure 10 Pin descriptions for the amplifier s motor port Motor Down Motor_Phase 5 2 Motor Connected 6 Pin Signal Name Function Description 1 GND Power supply ground Shorted to shield 2 otor_Phase
27. sing the I O Port on page 37 for connection information Connecting the Encoder to the Control Card A high density 15 pin male connector is provided for making the necessary connections from the control card to the encoder The pin descriptors for this connector are shown in Figure 5 Figure 5 444 8 Pin descriptions for E the encoder s Self as 15 pin high density E 6446464 EH D connector no nL 9 0 QO 1 fesnet E Pin Function 1 Reserved 2 Serial WE IN 3 Serial F Rx 4 A quadrature 3 A quadrature 6 Reserved Closed Loop Stages and Amplifiers Operation 15 d r S gt SS d 810x Closed Loop rev B fm Page 16 Friday June 21 2002 2 51 PM i 16 Operation Pin Function Reserved Reserved B quadrature coll CIN B quadrature l Future Use 5 VDC Ground l Index nJ BR Ww N l Index You will need to refer to the user s manual for your control system to determine the corresponding signal connectors on your control card Depending on the control card you are using the following connections may need to be made 1 A A B B A B Quadrature Most if not all controllers accept A A B and B differential signals from all of the standard encoders out there including the one in the 810X models The encoder s four A B quadrature signals will need b
28. tors The Alarm 1 and Alarm 2 LEDs on the front panel of the amplifier box light to green orange or red depending on the status of the system The table below defines the various status indicators Condition Alarm 1 Alarm 2 VCC lt 4 6V Off Off Motor Disconnected Orange Off Motor Disabled Off Orange OK Motor connected and enabled Green Off Over current Protection Red Red Improper Encoder Alignment The encoder interface box has four LEDs on the side of it the On Index indicator and three signal and alignment indicators see Figure 9 Figure 9 Encoder SS e interface box Proper Optimal Alignment __ _ ama Yeo Vy Ee indicator green bright green LAT f mA il j I DA Improved Alignment indicator yellow 15 pin HD connector improper Alignment Qn Index indicator Indicator red The Proper Optimal Alignment indicator should glow green or bright green when the encoder is properly aligned and installed as it was in the factory If the Improper Alignment indicator glows red or the Improved Alignment indicator glows yellow then there is an alignment problem with the encoder head in the stage You will need to return the unit to New Focus for repair See Customer Service on page 25 for more information 24 Troubleshooting NEW FOCUS Inc S ge d j d 810x Closed Loop rev B fm Page 25 Friday June 21 2002 2 51 PM Customer Service Technical Su
29. trol the stage and amplifier we recommend that you follow the motion controller manufacturer s recommended procedure as defined in their user manual However these are some tips to keep in mind e This motion system looks and acts somewhat like a DC servo motor The amplifier takes a 10 VDC proportional signal where supplied voltage is directly proportional to velocity of the stage e PID parameters should generally be set to low values as compared to typical DC servo motors Closed Loop Stages and Amplifiers Operation 17 S gt oe SS d 810x Closed Loop rev B fm Page 18 Friday June 21 2002 2 51 PM A 18 Operation NEW FOCUS Inc S ge e d d 810x Closed Loop rev B fm Page 19 Friday June 21 2002 2 51 PM Mo Principles of Operation Closed Loop Stages The piezo friction motors have a shaped geometry that allows the piezo elements to move a friction strip against the top portion of the motor The piezo element expands and contracts in both horizontal and vertical directions to move the friction strip In all closed loop stages more than one motor element must work in concert to move the piezo friction strip simultaneously and achieve maximum force and velocity The amplifier causes the motor to be excited at or very near the resonant frequency of the piezo elements This generates the maximum force and moves the piezo elements their maximum distance allowing maximum speed to
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