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TV 1001 Navigator - Agilent Technologies

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1. The assembled kit must be screwed into the suita ble holes of the pump body with a recommended closing torque of 5 Nm TV 1001 Navigator User Manual 87 900 945 01 1 285 312 17 Technical Information Figure 41 Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles These hoses must be held on the respective nozzles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 10 C and 20 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 1 h The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole is suggested 286 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation TV 1001 Navigator Controller Compatible Vent Valve mod 969 9834 50 mm Figure 42 This vent valve waits before opening a minimum time of about 5 sec This tim
2. Figure 3 Controller model 969 8978 Pump Description The pump consists of a high frequency motor driving a turbine fitted with 8 bladed stages and 4 Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium al loy machined from a single block Proceeding from the high vacuum to the for vacu um region the turbine stages seguence is a lst stage with a blade angle of 40 2nd stage with a blade angle of 34 a 8rd stage with a blade angle of 28 Ath and 5th stages with a blade angle of 24 a 6th stage with a blade angle of 20 7th and 8th stages with a blade angle of 16 The Macrotorr stages are in the form of four discs TV 1001 Navigator User Manual 87 900 945 01 1 245 312 17 Technical Information The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accurately po sitioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy During normal operation the motor is fed with a voltage of 54 Vac three phase at 715
3. Figure 5 250 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 ich F flat ich F flang Figure 6 TV 1001 Navigator User Manual 87 900 945 01 1 251 312 17 Technical Information 1200 1000 w 800 v o n 600 o E o E 400 s a 200 0 E 2 i Si Li ea 10 10 107 1 Inlet pressure mbar Figure 7 Graph of nitrogen pumping speed vs inlet pressure 10 x ve 2 2 2 2 10 E or lt 10 E eee E E 2 i imi Hydrogen NN i n 10 Hu ger du A ii E 5 MI E e M 10 i ma 10 10 1 10 100 Foreline pressure mbar Figure 8 Graph of compression ratio vs foreline pressure 252 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 25 _ 20 a T 5 E 15 5 a 5 10 5 2 E 5 0 i iiiiin pi iii Li iti 103 10 10 1 Inlet pressure mbar Figure 9 Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump TV 1001 Navigator User Manual 87 900 945 01 1 253 312 17 Technical Information Interconnections The following figure shows the TV 1001 interconnections 254 312
4. lia Figure 52 TV 1001 Navigator User Manual 87 900 945 01 1 295 312 17 Technical Information Side Mounting The L shaped bracket P N 969 9298 is available as an option See the following figure 1 o MN GI 296 312 Place the L shaped bracket on the controller with the pump cable toward the bracket and fix it by means of the three socket head screws M5 the washers and the nuts The 6 holes on the bracket allows to mount the controller with the rotation angle that you like Turn the pump upside down Place the bracket on the pump bottom the hole on the bracket has the same diameter as the pump bottom flange Screw a little bit the three screws M6 in the holes on the pump bottom Rotate the bracket until the controller is on the chosen position Tighten the screws properly Turn the pump again Plug the line card and connect the pump cable to the pump Connect the mating connector with the jumper on the interlock signal to start the pump TV 1001 Navigator User Manual 87 900 945 01 I Technical Information 17
5. Figure 55 TV 1001 Navigator User Manual 87 900 945 01 I 299 312 17 Technical Information Connection B Fore Vacuum Pump A flange KF 40 NW is available to connect the Turbo V1001 pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V1001 pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to in stall a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil back streaming Connection C Electrical Figure 56 300 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KO resistance at 25 C and pin E is connected to the pump ground pins G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply TV 1001 Navigator User Manual 87 900 945 01 I 301 312 17 Technical Inf
6. Figure 53 TV 1001 Navigator User Manual 87 900 945 01 1 297 312 17 Technical Information Connection A High Vacuum Flange For ISO K flange connections fix the two flanges with the clamps as shown in the figure Figure 54 It is mandatory to connect the pump in such a way to withstand the torque specified in the IN STRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torque For ConFlat flange connections we recommend using Agilent hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that the connections can be made only with the bolt in the lower side Attach the units and tighten each one in turn Re peat the sequential tightening until the flange faces meet 298 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock Connection Configurations 3 z
7. 1001 NAVIGATOR E poi a ENT VALVE ERIAL LINE T Figure 10 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 P3 Vent Figure 11 This is a dedicated 24 Vdc connector to control the optional vent valve P4 External Fan Figure 12 This is a dedicated 24 Vde connector to supply the optional external fan TV 1001 Navigator User Manual 87 900 945 01 1 255 312 17 Technical Information J1 In Out Figure 13 This connector carries all the input and output sig nals to remote control the TV 1001 Navigator It is a 15 pins D type connector the available sig nals are detailed in the table the following para graphs describe the signal characteristics and use Tab 4 Pin N Signal name In Output 1 2 START STOP IN 3 INTERLOCK IN VV n lt a t 5 SPEED SETTING IN 6 SPEED SETTING IN 7 SOFT START IN 111 E gt 750 iL 9 24 Vdc OUT 10 SPARE a TTT sli 12 SPARE AAA i FEE 14 PROGRAMMABLE ANALOG SIGNAL OUT 15 GROUND OUT PROGRAMMAB
8. Model 969 8839 Model 969 8840 Figure 1 242 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The pumps only are available with the following models Model 969 8931 with ISO 200 high vacuum flange Model 969 8946 with ISO 200 F high vacuum flange Model 969 8932 with ConFlat 10 external di ameter high vacuum flange Model 969 8933 with ISO 160 high vacuum flange Model 969 8934 with ISO 250 high vacuum flange Model 969 8947 with ISO 250 F high vacuum flange TV 1001 Navigator User Manual 87 900 945 01 1 243 312 17 Technical Information The following figure shows the six models AS ES Model 969 8931 Model 969 8946 Model 969 8932 Model 969 8933 A A A LES i E At Model 969 8934 Model 969 8947 Figure 2 244 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The controller model 969 8978 is also available as an option UJUUUJUJUJOCOU
9. This paragraph details the fundamental operating procedures Make all electrical and pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become dam aged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Information When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases 234 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 Switching on and Use of TV 1001 Navigator To switch on the TV 1001 Navigator it is necessary to sup ply the mains The integrated controller automatically recognizes the interlock and start signals presence and start up the pump Soft Start mode is used to s
10. Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shi
11. TOO HIGH LOAD SHORT CIRCUIT OVERVOLTAGE NO CONNECTION PUMP OVERTEMP Admitted Values default lt 0 CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 23 Window N 206 Bit Description 274 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Inlet Screen Installation Figure 24 Figure 25 Figure 26 TV 1001 Navigator User Manual 87 900 945 01 1 215 312 17 Technical Information 276 312 The inlet screens mod 969 9304 969 9316 and 969 9350 prevent the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 96 The inlet screen is fitted in the upper part of the pump as shown in the figure Figure 27 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 28 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The following figure shows the overall flange di mensions with the protection screen fitted on pump with ISO flange and pump with CFF flange lt m DI a rr a IMENSI mm inches Figure 29 E FF 2 IMENSIONS mm inches Figure 30
12. 50 mM z nn 3 RX RS232 4 SPARE sn gt N i 7 SPARE E n e TT Note that the vent valve can also be controlled by means of the serial connection A serial communication kit with a serial cable and the T Plus software is available optional TV 1001 Navigator User Manual 87 900 945 01 I 265 312 17 Technical Information RS 232 RS 485 Communication Description 266 312 Both the RS 232 and the RS 485 interfaces are available on the connector J2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit a no parity 1 stop bit a baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where a Host MASTER a Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where TV 1001 Navigator User Manual 87 900 945 01 I Technical Information 17 When a data is indicated between two quotes it means that the ind
13. Forberedelser for installation 104 Installation 105 Fastgorelse af pumpe 106 Anvendelse 108 N dstop 110 Vedligeholdelse 111 Bortskaffelse 112 Bruksanvisning 113 S kerhetsanvisningar f r Molekyl ra turbopumpar114 Allm n information 115 F rvaring 117 F rberedelser for installation 118 Installation 119 Fasts ttning av pump 120 Anvandning 122 Underhall 125 Bortskaffning 126 Instruksjon Manual 127 Sikkerhetsanvisninger for Turbomolekyleere pumper 128 Generell informasjon129 TV 1001 Navigator User Manual 87 900 945 01 1 Contents Lagring 131 Klargjore til installasjon 132 Installasjon 133 Festing av pumpen 134 Bruk 136 Vedlikehold 139 Eliminering 140 10 Ohjek sikirja 141 Turbomolekyylipumppujen Turvaohjeet 142 Yleisi tietoja 143 Varastointi 145 Valmistelut asennusta varten146 Asennus 147 Pumpun kinnitys148 K ytt 150 Huolto 153 H vitt minen 154 11 Felhaszn l i K zik nyv 155 Biztons gi tmutat Turb molekul ris szivatty khoz 156 ltal nos inform ic 157 T rol s 159 El k sz t s telep t sre 160 TV 1001 Navigator User Manual 87 900 945 01 1 9 312 Contents 10 312 12 13 Telep t s 161 A szivatty r gzit se 162 Haszn lat 164 Karbantart s 167 Megsemmis t s 168 Podrecznik Instrukcji 169 Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych 170 Informacje ogolne 171 Magazynowanie 173 Przygotowanie do instalacj
14. TV 1001 Navigator User Manual 87 900 945 01 1 Ohjek sikirja 10 TV 1001 Navigatorin k ynnistys ja k ytt TV 1001 Navigatorin k ynnistykseen riitt ett se kytket n s hk verkkoon Sis nrakennettu valvoja tunnistaa automaattisesti lukitus ja k ynnistyssignaalit ja k ynnist pumpun Soft Start tapa on k ytett viss pumpun k ynnist mist varten pitk n seisonta ajan j lkeen Jotta k ynnistys voitaisiin saataisiin suorittaa uudelleen Soft Start menetelm ll tulee yll mainittu on aktivoitava uudelleen ohjelmiston kautta ks kappale RS 232 485 COMMUNICATION DESCRIPTION Technical Information liitteess Vihre LED LDI joka sijaitsee TV 1001 n perustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet a palaa jatkuvasti pumppu py rii normaalisti a vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa a vilkkuu nopeasti noin 200 ms n jakso virhetila TV 1001 Navigator User Manual 87 900 945 01 1 151 312 10 Ohjek sikirja TV 1001 Navigatorin pys ytt minen TV 1001 Navigatorin pys ytt miseen riitt ett se kytket n irti s hk verkosta Sis nrakennettu valvoja pys ytt pumpun v litt m sti VAROITUS K ytt j n turvallisuuden takaamiseksi Turbo V valvojan virran sy t n on tapahduttava pistokkeella kansainv lisesti hyv ksytty
15. H TIN AN Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht 88 312 TV 1001 Navigator User Manual 87 900 945 01 1 Bedrijfshandleiding 6 Opslag Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen a tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C a relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum au tel Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent TV 1001 Navigator User Manual 87 900 945 01 1 89 312 6 Bedrijfshan Uitpakken OORZICHTIG dleiding De TV 1001 Navigator wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die
16. Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brandgef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb missen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 35 C siehe Diagramm im Anhang Technical Information a Relative Luftfeuchtigkeit 0 95 nicht kondensierend VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei Anschluss der Turbopumpe an das System abnehmen Abbildung 2 Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 1001 Navigator ist an eine Prim rpumpe anzuschlie en siehe Schema in Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 35 312 2 Gehrauchsanleitung Befestigung der Pumpe WARNUNG Wenn ein L uferschaden auftritt k nnte die Verbindung zwischen der Pumpe 36 312 und dem System mit einem erheblichen Drehmoment belastet werden Setzt die Verbindung diesem Drehmoment keinen ausreichenden Widerstand entgegen besteht die M glichkeit dass sich die Pumpe vom System oder der Motor vom Pumpengeh use l st In diesem Fall k nnten Metallsplitter von der Pumpe oder vom System geschleudert werden die schwere Sch den oder den Tod und oder Sch den an b
17. Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato dis Tete Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon TV 1001 Navigator User Manual 87 900 945 01 1 131 312 9 instruksjon Manual Klargj re til installasjon TV 1001 Navigator leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TV 1001 Navigator pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse Serie Fora unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr Figur 1 Normale milj messige belastninger kan ikke delegge TV 1001 Navigator Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at
18. frequency a threshold 643 Hz a hysteresis 2 activation type high level a delay time 0 second The Navigator Software optional allows the oper ator to set all the programmable feature When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND input see the following figure TV 1001 Navigator User Manual 87 900 945 01 I 259 312 17 Technical Information Figure 17 How to Connect the Open Collector Inputs of the Controller Here below there are the typical connections of the open collector input of TV551 701 Navigator to an external system Two cases are considered ill the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open col lector pin are available 260 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 24 Vdc Loo 5 Vdc Customer s device Controller JTSK NPN Le 24 Vdc PNP 5 Vdc Customer s device Controller SK Figure 18 Case 1 TV 1001 Navigator User Manual 87 900 945 01 1 261 312 17 Technical Information 24
19. l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent qui permet d obtenir une pompe r g n r e en remplacement de la pompe endommag e Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau de vente local la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage du syst me avant l exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales concernant la gestion des d chets TV 1001 Navigator User Manual 87 900 945 01 1 55 312 3 Mode d emploi Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le
20. miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen a l mp tila 5 C 35 C ks Technical Information liitteen kaaviota suhteellinen kosteus 0 95 ei tiivist v Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n Kuva 2 Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest TV 1001 Navigator tulee kytke p pumppuun ks Technical Information liitteen kaaviota TV 1001 Navigator User Manual 87 900 945 01 1 147 312 10 Ohjek sikirja Pumpun kinnitys NTU UKI Jos roottori vaurioituu pumpun ja j rjestelm n v liseen liit nt n saattaa 148 312 kohdistua huomattavaa v nt momenttia Ellei liit nt kest kyseist momenttia pumppu saattaa irrota j rjestelm st tai moottori pumpun kotelosta T ll in metallikappaleita saattaa sinkoutua pumpusta tai j rjestelm st ja aiheuttaa vakavia vahinkoja tai kuoleman ja tai l hell olevien laitteiden vaurioita Kiinnitt k TV 1001 Navigator vakaaseen asentoon asentamalla turbopumpun sis ntulolai
21. nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du V v va TV 1001 Navigator je vybavena vstupn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Zajist te aby izolace za zen p ipojen ho k v v v TV 1001 Navigator byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 TV 1001 Navigator User Manual 87 900 945 01 1 191 312 13 Navod k Pou iti Pou iti NEBEZPE Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup Pred pou it m syst mu prove te v echna elektrick a pneumatick p ipojen P i zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 120 C Turbomolekul rni vyv vu nikdy nepou ivejte nebude li privodni priruba p ipojen k vakuov komo e nebo nem li uta enou zav rac p rubu B hem zah v n se turbomolekul rn v v vy ani jej ho p slu enstv nedot kejte Vysok teplota m e zp sobit pop leniny B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosferickym tlakem Pro erp n agr
22. r karima Ne rintse meg a turb szivatty t vagy annak tartoz kait a meleg t si folyamat k zben A magas h m rs klet g si s r l seket okozhat aada a Kerilje a szivatty t s t r z s t vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt Agressz v g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy k l nleges porttal hogy lehet v tegy k k z mb s g z pl N2 Ar stabil raml s t v delmet visel szivatty sz m ra l sd Technical Information f ggel k VESZ LY Amikor a szivatty t m rgez t zvesz lyes vagy radioakt v g zok szivatty z s ra haszn lja k vesse az egyes g zok kezel s re vonatkoz elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben 164 312 TV 1001 Navigator User Manual 87 900 945 01 1 Felhaszn l i K zik nyv 11 A TV 1001 Navigator bekapcsol sa s haszn lata A TV 1001 Navigator bekapcsol s hoz r kell kapcsolni a t pfesz lts get A be p tett vez rl automatikusan felismeri a kapcsolatot s a start jel jelenl t t s elind tja a szivatty t A Soft Start m d a szivatty hosszabb le ll st k vet elind t s ra szolg l A Soft Start m d in
23. Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 901 945 01 1 Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
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25. Information liitett lis varusteiden asentamista varten TV 1001 Navigator User Manual 87 900 945 01 1 149 312 10 Ohjek sikirja K ytt T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 120 C tta VAROITUS lk k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 2 baaria yli atmosf risen paineen Pumput on varustettu aggressiivisten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Technical Information liite VAROITUS Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell 150 312
26. Ing ngstrycket mot r tt d rr m steunderstiga 2 bar ut ver det atmosf riska trycket F r pumpning av fr tande gaser r dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str m av delgas kv ve eller argon f r att skydda lagren se bilagan Technical information 122 312 D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av explosiva gaser TV 1001 Navigator User Manual 87 900 945 01 1 Bruksanvisning 8 Start och anv ndning av TV 1001 Navigator F r att starta TV 1001 beh ver du bara ansluta till ett eluttag Den inbyggda styrenheten k nner automatiskt igen f rreglings och startsignaler och startar pumpen L get Sof Start har f ruts tts f r att t nda pumpen efter ett l ngre stillast ende F r en start med Sof Start m ste man aktivera ovann mnda l ge genom mjukvaran se stycket RS 232 485 COMMUNICATION DESCRIPTION i bilagan Technical information Den gr na lysdioden LD1 p underdelen av TV 1001 anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt l ngsamt blinkande ungef r var 400 ms systemet r i l ge f r acceleration bromsning Stop eller Waiting for interlock hastigt blinkande ungef r 200 ms feltillst nd TV 1001 Navigator User Manu
27. Ker NZ JA EN OY TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires Indications g n rales 44 Stockage 47 Preparation pour l installation 48 Installation 49 Fixation de la pompe 50 Utilisation 52 Mise en marche et utilisation du TV 1001 Navigator 53 Arr t du TV 1001 Navigator 54 Arr t d urgence 54 Entretien 55 Mise au rebut 56 Traduction de la mode d emploi originale v Agilent Technologies 44 43 312 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e AHSA AU Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 44 312 TV 1001 Navigator User Manual 87 900 945 01 1 Mode d emploi 3 Indications g n rales Cet appareillage a t concu en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill a l utilisateur de lire attentivement cette no
28. Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupostevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi TV 1001 Navigator je integriran sistem s turbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine maks 38000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor TV 1001 Navigator ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje Opremljen je s pomo nimi prilju ki za dodaten ventilator ki skrbi za nazor obe za zrak ki je nadzorovana z ra unalnikom preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 213 312 15 Priro nik za Navodila Navodila so napisana po naslednjem standardnem protokolu POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na
29. ao contra flange do sistema com uma ligac o que resista a um torque de 8900 Nm a volta do seu eixo Por exemplo o flange ISO K pode ser fixado com bornes de aco de alta resist ncia como o modelo Agilent IC 63250 DCMZ A tabela a seguir cont m por cada flange o n mero de bornes IC 63250 DCMZ necess rios e o respectivo torque de aperto Tab 1 2 gt E 35 Nm 35 Nm 35 Nm A tabela a seguir cont m por cada flange ISO F o n mero dos parafusos necess rios e o respectivo torque de aperto Tab 2 N Torque de aperto S0 en 12 ann ISO 250 F 12 5 Nm A classe de resist ncia dos parafusos de aco para as flanges F deve ser gt 8 8 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de Istruc es 5 A turbobomba com flange de entrada ConFlat deve ser fixada na c mara de v cuo atrav s de parafusos espec ficos da mec nica Agilent Para ulteriores detalhes consultar o ap ndice Technical Information O TV 1001 Navigator pode ser instalado em qualquer posic o O TV 1001 n o pode ser fixado atrav s da sua base CUIDADO O TV 1001 Navigator pertence segunda categoria de instalac o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimentac o apropriada para esta categoria O TV 1001 Navigator tem dois conectores para as entradas sa das e para a comunicac o de s rie que devem ser ligados aos circuitos externos de modo a n o
30. assurer que l isolation du dispositif branch au TV 1001 Navigator a une isolation appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 Pour l installation des accessoires en option se reporter a Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 51 312 3 Mode d emploi Utilisation Ce paragraphe pr sente les principales proc dures op rationnelles Avant d utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 120 C AVERTISSEMENT Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions graves ATTENTION Lorsgue la turbopompe fonctionne viter tout choc oscillation ou d placement brusgue car les paliers pourraient se d t riorer Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bar au del de la pression atmosph rique Pour le pompage de gaz agressifs ces pompes sont dot es d une
31. de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas El TV 1001 Navigator es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vac o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 38000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El TV 1001 Navigator no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio Asimismo el TV 1001 Navigator posee conectores auxiliares con los que se puede alimentar un ventilador adicional accionar la v lvula de ventilaci n pilotarla a distancia con un ordenador host conectado mediante l nea serial RS 232 RS 485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TV 1001 Navigator User Man
32. die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten TV 1001 Navigator User Manual 87 900 945 01 1 31 312 2 Gehrauchsanleitung In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermafsen hervorgehoben VORSICHT Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausfiihrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 32 312 TV 1001 Navigator User Manual 87 900 945 01 1 Gebrauchsanleitung 2 Lagerung Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start in Gang zu setzen Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsda
33. differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 238 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 17 Technical Information Description of the TV 1001 Navigator241 Pump Description 245 Controller Description 247 Technical Specification 248 TV 1001 Navigator Outline 250 Interconnections 254 P3 Vent 255 P4 External Fan 255 JI In Out 256 Signal Description 257 HOW to Connect the Open Collector Inputs of the Controller 260 How to Connect the Outputs of the Controller 264 J2 Serial 265 RS 232 RS 485 Communication Description 266 Communication Format 266 Communication Protocol 266 Window Meanings 271 Inlet Screen Installation 275 Heater Band Installation 278 Original Instructions SHE Agilent Technologies 239 312 17 Technical Information Air Cooling Kit Installation 280 TV 1001 with Navigator Controller 280 TV 1001 Pump with Standard Rack Controller 282 Water Cooling Kit Installation 284 Vent Accessories 287 TV 1001 Navigator Controller Compatible Vent Valve mod 969 9834287 Standard Rack Controller Compatible Vent Valve mod 969 9843 289 Vent Device mod 969 9831 290 Vibration Isolator Installation 291 Purge Valve Installation 292 Serial C
34. dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i Opombe vsebujejo vse najbolj pomembne informacije iz besedila 214 312 TV 1001 Navigator User Manual 87 900 945 01 1 Priro nik za Navodila 15 Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil a Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij a temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum TV 1001 Navigator User Manual 87 900 945 01 1 215 312 15 Priro nik za Navodila Priprava za monta o TV 1001 Navigator je dobavljen v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z goli
35. el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C v ase gr fico en el anexo Technical Information a humedad relativa 0 95 no condensadora ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema Figura 2 Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles El TV 1001 Navigator ha de conectarse a una bomba primaria v ase diagrama en Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 63 312 4 Manual de istrucciones Fijaci n de la bomba POE ENS En caso de da arse el rotor la conexi n entre la bomba y el sistema 64 312 puede ser sometida a un par de fuerza excesivo En estas circunstancias la conexi n podr a no resistir a dicho par de fuerza y como consecuencia la bomba podr a separarse del sistema o el motor podr a separarse respecto del contenedor de la bomba En este caso fragmentos de metal pueden ser proyectados por la bomba o por el sistema con consiguiente grave riesgo de lesiones o muerte y o da os a los aparatos adyacentes Fijar el TV 1001 Navigator en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del
36. n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C a relativ fugtighed fra 0 til 95 ikke kondenserende a Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for f rste gang De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen Ji leia Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Agilent repr sentant TV 1001 Navigator User Manual 87 900 945 01 I 103 312 7 Istruktionsbog Forberedelser fer installation FORSIGTIG TV 1001 Navigator leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at TV 1001 Navigator ikke tabes eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignend
37. niet condenserend ni pe Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden Figura 1 In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie De TV 1001 Navigator moet op een primaire pomp aangesloten zijn zie schema in Technical information TV 1001 Navigator User Manual 87 900 945 01 1 91 312 6 Bedrijfshandleiding Bevestiging van de pomp AVES TUE Als schade aan de rotor optreedt zou de verbinding tussen de pomp en 92 312 het systeem aan een behoorlijk groot koppel onderhevig kunnen zijn Als de verbinding niet voldoende is om dit koppel te weerstaan zou de pomp van het systeem of de motor van het pomplichaam los kunnen raken In dit geval kunnen metaalfragmenten door de pomp of het systeem in het rond worden geschoten welke ernstig letsel de dood en of schade aan omliggende apparaten kunnen veroorzaken Bevestig de TV 1001 Navigator in een stabiele positie door de inlaatflens van de turbopomp op de contraflens van het systeem te monteren met een verbinding die in staat is om een koppel van 8900 Nm rondom de eigen as te weerstaan De ISO K flens kan bijvoorbeeld bevestigd worden met stalen klemmen met een hoge weerstand zoals het model Agilent IC 63250 DCMZ De volgende tabel beschrijft voor elke flens het aantal benod
38. oraz spe nienia wymog w norm CE Du e si y wewn trzne wytwarzaj ce sie w kontrolerze mog spowodowa powa ne uszkodzenia cia a lub mier Przed przeprowadzeniem czynno ci konserwacyjnych wewn trz tego urz dzenia od czy kabel zasilaj cy Zatrzymanie Awaryjne Aby zatrzyma w stanie awaryjno alarmowym TV TV 1001 Navigator nale y od czy kabel zasilania ze sterownika 180 312 TV 1001 Navigator User Manual 87 900 945 01 I Podrecznik Instrukcji 12 Konserwacja System TV 1001 Navigator nie wymaga adnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowazniony personel Przed wykonaniem jakiejkolwiek interwencji na systemie nalezy odtaczy go od zasilania otworzy odpowiedni zaw r wlotu powietrza odczeka az do ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie uszkodzonego systemu Przed wysy k systemu do konstruktora celem naprawy lub advanced exchange service nale y obowi zkowo wype ni i przekaza do miejscowego biura sprzeda y kart Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz karty musi by w o ony do opakowania systemu przed jego wysy k Je eli pompa musi by poddana rozbi rce rzyst pi do jej eliminacji z
39. permitir o acesso s partes sob tens o Assegure se de que o isolamento do dispositivo ligado ao TV 1001 Navigator esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 Para a instalac o dos acess rios opcionais consultar Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 79 312 5 Manual de Istruc es Utilizacao Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as ligac es el ctricas e pneum ticas Durante o eventual aquecimento da camara a v cuo a temperatura na flange de entrada n o deve ser superior a 120 C ATENCAO Nunca activar a bomba se a flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com a flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as operac es de aquecimento A elevada temperatura pode causar les es s pessoas Evitar colis es oscilac es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a saida de ar da bomba utilizar ar ou g s inerte sem poeiras ou part culas A press o de entrada atrav s da porta espec fica deve ser inferior a 2 bar acima da press o atmosf rica Para bombear gases agressivos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s inerte Azoto ou Ar
40. reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations TV 1001 Navigator User Manual 87 900 945 01 1 229 312 16 Instructions for Use Preparation for installation The TV 1001 Navigator is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Figure 1 Normal exposure to the environment cannot damage the TV 1001 Navigator Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 230 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following en
41. rezim Soft Start odblokovat mus te ho aktivovat vhodnym softwarovym prikazom pozri cast RS 232 485 COMMUNICATION DESCRIPTION v dodatku Technical Information Zelena di da LED na z kladnom elnom paneli zariadenia TV 1001 Navigator indikuje frekvenciou blikania sp sob innosti syst mu a iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov n beh brzdenie Stop alebo akanie na spojenie r chle blikanie interval asi 200 ms chybov stav TV 1001 Navigator User Manual 87 900 945 01 1 207 312 14 N vod na Obsluhu Vypnutie zariadenia TV 1001 Navigator Ak chcete vypn t zariadenie TV 1001 Navigator mus te ho odpojit od zdroja nap jania Zabudovany kontrolny modul vyvevu okamzite zastavi NEBEZPE Z d vodu bezpe nosti obsluhuj ceho pracovn ka mus by kontroln zariadenie nap jan pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemne nou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Vysok nap tie v kontrolnom zariaden m e sp sobi v ne kody alebo smrt Prv ne za nete prev dza dr b rske pr ce v tejto jednotke odpojte nap jaciu n ru N dzov zastavenie 208 312 Ak chcete zariadenie TV 1001 Nav
42. rikkoutuessa py rimisenergia saattaa vapautua VAROITUS T ss k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 142 312 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi TV 1001 Navigator User Manual 87 900 945 01 1 Ohjek sikirja 10 Yleisi tietoja T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st TV 1001 Navigator on kokonaisj rjestelm joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 38000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori TV 1001 Navigator j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin TV 1001 Navigator j rjestelm n kuuluu lis ksi a
43. rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted der udskifter pumpen med en repareret pumpe Inden pumpen sendes til konstrukt rens reparationsv rksted eller advanced exchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes og sendes til den lokale forhandler En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af pumpen skal foreg i overensstemmelse med det p g ldende lands s rlige love TV 1001 Navigator User Manual 87 900 945 01 1 111 312 7 Istruktionsbog Bortskaffelse 112 312 Betydningen af WEEE logoet p m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverandgren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopump
44. se A lent l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 12 Podrecznik Instrukcji Wskaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 170 Informacje ogolne 171 Magazynowanie 173 Przygotowanie do instalacji 174 Instalacja 175 Mocowanie pompy 176 Uzytkowanie 178 Wtaczenie i Uzytkowanie systemu TV 1001 Navigator 179 Zatrzymanie systemu TV 1001 Navigator 180 Zatrzymanie Awaryjne 180 Konserwacja 181 Przetworstwo odpadow 182 Ttumaczenie instrukcji oryginalnej E Agilent Technologies 169 312 12 Podrecznik Instrukcji Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaja wysoka ilos energii kinetycznej spowodowane
45. sistema con conexi n capaz de resistir a un par de 8900 Nm en torno a su propio eje A modo de ejemplo la brida ISO K puede fijarse con mordazas de acero de alta resistencia como el modelo Agilent IC 63250 DCMZ En la siguiente tabla se indican respecto de cada brida la cantidad de mordazas IC 63250 DCMZ necesarias y el par de apriete con el cual fijarlas Tab 1 ISO 160 10 35 Nm ISO 200 8 35 Nm ISO 250 6 35 Nm En la siguiente tabla se indican respecto de cada brida ISO F la cantidad de los tornillos necesarios y el par de apriete con el cual fijarlas Tab 2 Brida N Par de apriete MM 12 ou nn 150 250 F 12 5 Nm TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 La turbobomba con brida de entrada ConFlat ha de fijarse a la c mara de vac o mediante los accesorios mec nicos espec ficos Agilent Para m s detalles v ase el anexo Technical Information El TV 1001 Navigator puede instalarse en cualquier posici n El TV 1001 Navigator no puede fijarse utilizando su base ATENCI N El TV 1001 Navigator pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a El TV 1001 Navigator tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que
46. st t og for overholde EU forskriftene H yspenningene som utvikler seg inne i styreenheten kan f re til alvorlige skader eller d dsulykker F r man utf rer vedlikeholdsoperasjoner inne i enheten er det n dvendig kople fra str mkabelen N dstopp Trekk ut nettkabelen fra styreenheten for stoppe TV 1001 Navigator i en n dsituasjon 138 312 TV 1001 Navigator User Manual 87 900 945 01 I Instruksjon Manual 9 Vedlikehold TV 1001 Navigator er vedlikeholdsfritt Alt arbeid p systemet m kun utfores av autorisert personell ADVARSEL For noe arbeid gjores p systemet m det frakoples stromtilforselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom pumpen stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby en overhalt pumpe til erstatning for den gdelagte For en pumpe returneres til produsenten for reparasjon eller som innbytte mot et overhalt system er det helt ngdvendig fylle ut og sende det vedlagte skjemaet Helse og sikkerhet til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser TV 1001 Navigator User Manual 87 900 945 01 1 139 312 9 instruksjon Manual Eliminering Betydelsen av sym
47. systemet 120 312 uts ttas f r ett h gt vridmoment Om anslutningen inte t l ovann mnda vridmoment kan pumpen lossna fr n systemet eller motorn kan lossna fr n pumpens h lje detta fall kan metallf rem l slungas iv g fr n pumpen eller systemet och f rorsaka allvarliga skador eller d dsfall och eller skador p apparater i n rheten F st TV 1001 Navigator i ett stabilt l ge genom att ansluta turbopumpens intagsfl ns till systemets fl ns som m ste t la ett vridmoment p 8900 Nm kring sin axel Exempelvis kan ISO K fl nsen f stas med st lklamrar med h g h llfasthet t ex modellen Agilent IC 63250 DCMZ Tabellen som f ljer anger hur m nga klamrar IC 63250 DCMZ som r n dv ndiga f r varje fl ns samt motsvarande tdragningsmoment Tab 1 TDRAGNINGS MOMENT 18010 10 35 Nm 180200 OOOO O 8 35 Nm ISO 250 6 35 Nm Tabellen som f ljer anger hur skruvar som r n dv ndiga f r varje ISO F fl ns samt motsvarande tdragningsmoment Tab 2 7 FL NS OO ANT TDRAGNINGS MOMENT l ko O3 12 5 Nm ISO 250 F 12 5 Nm TV 1001 Navigator User Manual 87 900 945 01 1 Bruksanvisning 8 Turbopumparna med intagsfl ns ConFlat ska f stas till vakuumkammaren med hj lp av Agilent f stdelar F r detaljer h nvisas till bilaga Technical Information TV 1001 Navigator kan installeras i valfri position TV 1001 Navigator systemet kan inte fastsp nnas med sin egen bas usara TV 100
48. tillverkaren f r reparation eller advanced exchange service m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av pumpen skall ske enligt g llande lagstiftning TV 1001 Navigator User Manual 87 900 945 01 1 125 312 8 Bruksanvisning Bortskaffning 126 312 Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor NY d JA ed ZU U TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Generell informasjon 128 Lagring 131 Klargj re til installasjon 132 Installasjon 133 Festing av pumpen 13
49. turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d r skal v re mindre end 2 bar over atmosf risk tryk I forbindelse med pumpning af aggressive gasser er disse pumper udstyret med en d r igennem hvilken det er n dvendigt at forsyne pumpen med delgasser kv lstof eller argon for at beskytte lejerne se bilaget Technical Information ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser f lges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser 108 312 TV 1001 Navigator User Manual 87 900 945 01 1 Istruktionsbog 7 Start og anvendelse at TV 1001 Navigator For at starte TV 1001 er det tilstreekkeligt at tilslutte et forsyningsstik Den indbyggede styreenhed genkender blokerings og startsignaler automatisk og starter pumpen Soft Start moden bruges for at tende pumpen efter lang stilstand For at aktivere SOFT START metoden skal ovenn vnte m de programmeres ved hj lp af software se afsnit RS 232 485 COMMUNICATION DESCRIPTION i bilaget Technical Information Den gr nne LED LDI der er anbragt p panelet p TV 1001 s fundament angiver systemets funktion ved blink a konstant t ndt pumpen er i normal rotation a langsomme blink periode p ca 400 ms systemet er i stilling for
50. tyyppi ja 3 lla johtimella varustettua s hk kaapelia k ytt m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t Valvojassa kehittyv t korkeaj nnitteet voivat aiheuttaa vakavia onnettomuuksia tai jopa kuoleman Irrota s hk kaapeli ennen yksik n sis lle suoritettavien huoltotoimenpiteiden aloittamista H t pys ytys 152 312 TV 1001 Navigator on pys ytett v h t tilassa irrottamalla s hk kaapeli ohjausyksik st TV 1001 Navigator User Manual 87 900 945 01 1 Huolto Ohjek sikirja 10 TV 1001 Navigator ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilent in korjauspalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Ennen pumpun l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohje
51. 0 ms condition d erreur TV 1001 Navigator User Manual 87 900 945 01 1 53 312 3 Mode d emploi Arr t du TV 1001 Navigator Pour arr ter le TV 1001 Navigator il suffit de retirer la tension d alimentation Le contr leur incorpor arr te imm diatement la pompe AVERTISSEMENT Pour la s curit de l op rateur le contr leur Turbo V doit tre aliment par un c ble d alimentation 3 fils voir le tableau des parties qui peuvent tre ordonn es dot d une fiche approuv e niveau international Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques et satisfaire les requis des normes CE Les tensions lev es qui se d veloppent dans le contr leur peuvent provoquer de graves endommagements ou la mort Avant d effectuer les op rations d entretien l int rieur de l unit d brancher le c ble d alimentation Arr t d urgence 54 312 Pour arr ter le TV 1001 Navigator en conditions d urgence il faut d brancher le cordon d alimentation du contr leur TV 1001 Navigator User Manual 87 900 945 01 1 Entretien Mode d emploi 3 Le TV 1001 Navigator nexige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu
52. 01 Navigator User Manual 87 900 945 01 1 223 312 15 Priro nik za Navodila Odlaganje opadkov 224 312 Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 226 General Information 227 Storage 229 Preparation for installation 230 Installation 231 Pump fixing 232 Use234 Switching on and Use of TV 1001 Navigator 235 TV 1001 Navigator Switching off 236 Emergency Stop 236 Maintenance 237 Disposal 238 Original Instructions En Agilent Technologies 225 312 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a ro
53. 1 Navigator User Manual 87 900 945 01 1 193 312 13 Navod k Pouziti Vypnuti vyv wy TV 1001 Navigator Pro vypnut vyv vy TV 1001 Navigator je nutn prerusit s ov nap ti Vestav ny regulator vyv vu okam it zastavi Pro zaji t ni bezpe nosti obsluhy musi byt controller erpadla Turbo V nap jeny trojzilovym piivodnim kabelem viz tabulka dilu kter Ize doobjednat se zastr kou mezin rodn schv lenou Pou ivejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Vysok nap ti kter vznik v controlleru m e zp sobit v n zran ni i smrteln P ed prov d n m z sah dr by uvnit jednotky p vodn kabel odpojte Nouzov zastaven Pro okam it zastaven v v vy TV 1001 Navigator v nouzov situaci je t eba odpojit nap jec kabel ze s ov z suvky 194 312 TV 1001 Navigator User Manual 87 900 945 01 1 N vod k Pouziti 13 Udrzba Vyv va TV 1001 Navigator nevy aduje Z dnou udr bu Ve ker pr ce na tomto zafizeni musi provad t opravn n osoby Mardin Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te vyv vu otevfenim pr slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v vevy neklesne pod 50 C V p pad poruchy kontaktujte technic
54. 1 Navigator tillh r den andra installationsklassen eller versp nningsklassen enligt standard EN 61010 1 Anslut d rf r anordningen till en elledning som uppfyller kraven f r denna klass TV 1001 Navigator r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon sp nningsf rande del Kontrollera att anordningen som r ansluten till TV 1001 Navigator har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbeh rsutrustning beskrivs i Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 121 312 8 Bruksanvisning Anv ndning OBSERVER Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig verstiga 120 C S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sfl nsen Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som rfria fr n damn eller andra partiklar
55. 12 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor s az ll r sz rintkez se vagy a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 156 312 TV 1001 Navigator User Manual 87 900 945 01 1 Felhaszn l i K zik nyv 11 Altal nos inform ic A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A TV 1001 Navigator egy integr lt rendszer turbo molekul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A re
56. 2 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 Maintenance The TV 1001 Navigator does not reguire any maintenance Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned pump to replace that broken down Before returning the pump to the constructor for repairs or advanced exchange service the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a pump is to be scrapped it must be disposed of in accordance with the specific national standards TV 1001 Navigator User Manual 87 900 945 01 I 237 312 16 Instructions for Use Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Eguipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a
57. 4 Bruk 136 Starte og bruke TV 1001 Navigator 137 Stoppe TV 1001 Navigator 138 N dstopp 138 Vedlikehold 139 Eliminering 140 Oversetting av den opprinnelige samsvarserkl ringen 128 2 Agilent Technologies 127 312 9 instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper De turbomolekylare pumpene som er beskrevet i den fglgende Bruksanvisningen har et hoyt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt INAH For unng skader p utstyret og forebygge operat rskader ma installasjonsanvisningene beskrevet i denne manualen f lges n ye 128 312 TV 1001 Navigator User Manual 87 900 945 01 I Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren b r lese denne brukerveiledningen og all annen informasjon fra Agilent f r utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf lging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TV 1001 Navigator systemet best r av en turbo molekul r pumpe for bruk i h y eller ultrah ye va
58. 5 01 1 Podrecznik Instrukcji 12 Magazynowanie W celu zagwarantowania najwy szego poziomu funkcjonalno ci i niezawodno ci pomp Turbomolekularnych Agilent musz by przestrzegane nast puj ce zalecenia podczas transportu przestawiania i magazynowania pomp nie nale y przekracza nast puj cych warunk w rodowiskowych temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 3 bez opar a klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesi cy od daty wysy ki UWAGA Je eli z jakiegokolwiek powodu czas magazynowania jest dtu szy nale y odesta pompe do fabryki W celu jakiejkolwiek informacii prosimy skontaktowa sie z miejscowym przedstawicielem firmy Agilent TV 1001 Navigator User Manual 87 900 945 01 1 173 312 12 Podrecznik Instrukcji Przygotowanie do instalacji System TV 1001 Navigator jest dostarczany w specjanym ochronnym opakowaniu w przypadku Slad w uszkodzen do kt rych mogtoby doj podczas transportu nale y skontaktowa sie z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu TV 1001 Navigator ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgod
59. 8 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 SIX ADDR ACK ETX CRC TV 1001 Navigator User Manual 87 900 945 01 1 269 312 17 Technical Information Command SOFT START ON Source PC Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 SIX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 270 312 TV 1001 Navigator User Manual 87 900 945 01 1 Window Meanings Technical Information 17 008 Start Stop in remote mode the window is a read only Remote default or Serial configuration Admitted Values Start 1 Stop 0 Remote 1 Serial 0 default 1 102 103 104 Soft Start write only in Stop co
60. Ar za za ito nosilcev glej prilogo Technical Information SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalke ne uporabljajte v prisotnosti eksplozivnih plinov 220 312 TV 1001 Navigator User Manual 87 900 945 01 1 Priro nik za Navodila 15 Vklop in uporaba naprave TV 1001 Navigator Za vkljucitev TV 1001 Navigator morate prikljuciti napetost Vgrajeni kontroler samodejno prepozna zaporo in prisotnost signalov za vklop ter zaZene rpalko Soft Start na in je predviden za zagon po dalj i neuporabi rpalke Za zagon Soft Start na ina je potrebno aktivirati ustrezen programski ukaz glej odstavek RS 232 485 COMMUNICATION DESCRIPTION v prilogi Technical Information Zelena LED dioda ki se nahaja na sprednji plo i TV 1001 Navigator s hitrostjo utripanja ozna uje delovne pogoje sistema a Brez utripanja rpalka je normalno vrti Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju Waiting for interloc a Hitro utripanje perioda pribli no 200 ms Napaka TV 1001 Navigator User Manual 87 900 945 01 1 221 312 15 Priro nik za Navodila Izklop naprave TV 1001 Navigator Za izklop naprave TV 1001 Navigator morate prekiniti dovod napetosti Vgrajen kontroler takoj zaustavi rpalko Za varnost operaterja mora biti krmilnik Turbo V nap
61. Hz To re duce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio The pump can be water cooled or air cooled in the first case the customer can use the dedicated channels on the pump body in the second case an external optional fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 40 NW flange 246 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Figure 4 Controller Description The dedicated controller is a solid state frequency converter which is driven by a single chip micro computer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase out put converts the single phase AC mains supply into a 3 phase low voltage medium frequency output which is required to power the pump The controller can be operated by a remote host computer via the se
62. ISO 250 F 12 5 Nm Trieda ocelovych skrutiek pre prirubu typu F musi byt wy ia ako 8 8 TV 1001 Navigator User Manual 87 900 945 01 1 N vod na Obsluhu 14 Turbovyveva so vstupnou pr rubou ConFlat musi byt pripojen k v kuovej komore pomocou vhodn ho hardware zna ky Agilent Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 1001 Navigator mo e byt nain talovan v lubovol nej polohe Zariadenie TV 1001 Navigator sa nem e upevnit pomocou vlastnej z kladnej dosky Zariadenie TV 1001 Navigator patri do druhej in tala nej prep tovej kateg rie pod a smernice EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Zariadenie TV 1001 Navigator m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj iemu okruhu tak aby nebola dostupn iadna elektrick s as Presved ite sa i zariadenie pripojen k TV 1001 Navigatoru m adekv tnu izol ciu aj pre pr pad samostatnej chyby pod a smernice EN 61010 1 TV 1001 Navigator User Manual 87 900 945 01 1 205 312 14 N vod na Obsluhu Pouzitie NEBEZPE I Tato ast popisuje z kladn sposoby pou itia zariadenia Skor nez za nete system pou ivat zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej priruby po as zahrievania vakuovej komory nesmie prekro it 120 C Nik
63. Information 17 Serial Cable Installation The supplied serial cable must be installed when the TV 1001 Navigator or the optional vent valve have to be controlled by means of a remote computer The cable is installed fixing the 9 pin D type connector into the P2 serial connector as shown in the following figure Figure 51 TV 1001 Navigator User Manual 87 900 945 01 1 293 312 17 Technical Information TV 1001 Controller Installation The controller can be mounted in two position a bottom mounting as per the complete system a side mounting To install the controller execute the following procedures Bottom Mounting See the following figure 1 Turn the pump upside down 2 Place the three fixing blocks with the through holes toward the inside and fix them with the three M6 screws to the pump bottom 3 Place the controller on the blocks with the pump cable toward the pump body 4 Fixthe controller to the blocks by means of the three socket head screws M5 5 Turn the pump again 6 Plugtheline card and connect the pump cable to the pump 7 Connect the mating connector with the jumper on the interlock signal to start the pump 294 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 d 1001 NAVIGATOR m fi u m
64. LE ANALOG SIGNAL 256 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Signal Description Start Stop input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump Interlock input signal to control the pump rotation With the supplied cover connector the interlock signal is connected to the 24 Vdc pin and the interlock signal to the GROUND pin Speed setting PWM input signal to set the pump speed The PWM signal characteristics must be the following a frequency 100 Hz 20 amplitude 24 V max a duty cycle range from 25 to 75 corresponding to an output frequency from 272 Hz to 633 Hz see the following diagram 400 Excitation Frequency Hz 300 200 50 60 70 80 Duty Cycle Figure 14 The duty cycle percentage is referred to the low level portion of the PWM signal TV 1001 Navigator User Manual 87 900 945 01 1 257 312 17 Technical Information 258 312 Programmable analog signal this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power set by the user The default setting is the freguency see the follo
65. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istruc es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 900 945 01 1 04 2011 TV 1001 Navigator Pump models 969 8931 969 8932 969 8934 969 8946 969 8933 969 8947 Kit models 969 8838 969 8839 969 8841 969 8844 969 8840 969 8845 Controller models 969 8978 Instruksjon manual Ohjek sikirja Felhaszn l i k zik nyv Podrecznik instrukcji N vod k pou iti N vod na obsluhu Priro nik za navodila User Manual Ea Agilent Technologies Notices O Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 945 01 1 Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained her
66. Stop af TV 1001 Navigator 110 N dstop 110 Vedligeholdelse 111 Bortskaffelse 112 Overs ttelse af originalinstruktionerne Agilent Technologies 99 312 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes LETE For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 100 312 TV 1001 Navigator User Manual 87 900 945 01 1 Istruktionsbog 7 Generel information Dette udstyr er beregnet til professionel anvendelse Brugeren b r l se denne brugsanvisning og anden yderligere information fra Agilent f r udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler TV 1001 Navigator systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed Systemet er i stand til at pumpe en hvilk
67. The following figure shows the ISO 250 pump flange section with the protection screen fitted on it As you can see the overall dimensions do not change as the inlet screen remains inside the pump profile TV 1001 Navigator User Manual 87 900 945 01 1 277 312 17 Technical Information Figure 31 Heater Band Installation 218 312 Figure 32 The heater band model 969 9317 and 969 9327 can be used to heat the pump casing when a bakeout is needed The heater band is available only for the pump with ConFlat inlet flange model 969 8932 It is applied to the upper part of the pump casing as shown in the figure and heats it to a temperature of about 80 C The heater band must be mounted such that there is perfect thermal contact with the pump wall to obtain fast and efficient heating TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Figure 33 Switch on the heater while the turbopump is in operation In the event of turbopump overheat the pump will be automatically cut out by the thermistor sensor The turbopump must be baked only when operat ing with an inlet pressure less than 104 mbar and with water cooling CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to pre vent thermal radiation heating the hi
68. Vdc Customer s i device Controller A i 5 Vdc JAK 24 Vdc Controller Customer s i device sode TSK Ma TT Figure 19 Case 2 with relay utilisation 262 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 24Vdc Customer s device ri Controller PNP 5 Vdc a JAK 24 Vdc E Controller Customer s i 5 Vdc device i TSK NPN UT Figure 20 Case 2 with transistor utilization TV 1001 Navigator User Manual 87 900 945 01 1 263 312 17 Technical Information How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The figure example refers to the programmable set point signal on pins 11 and 9 Controller 15 08 45 08 V 2 z 9 24 V lt A 1 Figure 21 Typical output connection 264 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 J2 Serial Figure 22 Typical output connection This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 1001 Tab 5 Pin N Signal name 1 SPARE m
69. a rotorju potem lahko med povezavo rpalke s 218 312 sistemom pride do velikega navora e povezava ne more izdr ati tak nega navora se lahko rpalka izklju i iz sistema ali se ohi je motorja iztrga iz nostilca rpalke V tak nem primeru lahko priletijo kovinski delci iz rpalke ali sistema in povzro ijo resne po kodbe ali smrt in ali po kodujejo okoli ko opremo Namestite TV 1001 Navigator na stabilno pozicijo tako da zmontirate dovodno prirobnico turbo rpalke na prirobnico na sistemu tako da povezava lahko zdr i navor ve ji od 8900 Nm okoli osi ISO K prirobnico lahko na primer pritrdite s pomo jo jeklenih dr al kot pri Agilent modelu IC63250DCMZ Naslednja tabela za vsako prirobnico prikazuje tevilo potrebnih IC63250DMZ pritrjeval ter potreben navor za pritrjevanje Naslednja tabela za vsako ISO F prirobnico prikazuje tevilo potrebnih vijakov ter potreben navor za pritrjevanje Tab 2 1 PRIROBNICA N NAVOR A O3 12 5 Nm ISO 250 F 12 5 Nm Razred jeklenih vijakov za F prirobnico mora biti gt 8 8 TV 1001 Navigator User Manual 87 900 945 01 1 Priro nik za Navodila 15 Turbo amp rpaklo z dovodno ConFlat prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Agilent strojne opreme Za dodatne informacije glejte prilogo Technical Information Napravo TV 1001 Navigator lahko namestite v poljuben polo aj Naprave TV 1001 Navigator ne morete fiksirati z njegovo
70. able Installation 293 TV 1001 Controller Installation 294 Bottom Mounting 294 Side Mounting 296 Connection A High Vacuum Flange 298 Connection B Fore Vacuum Pump 300 Connection C Electrical 300 Pump Used with Corrosive Gases 302 Pump Used in Presence of Magnetic Fields 304 Accessories and Spare Parts 305 240 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Description of the TV 1001 Navigator The TV 1001 Navigator pumping system consists of a pump with a dedicated controller fixed to it The system is available in six models that differ in the high vacuum flange The TV 1001 Navigator kit six models are Model 969 8838 with ISO 200 high vacuum flange Model 969 8844 with ISO 200 F high vacuum flange Model 969 8839 with ConFlat 10 external di ameter high vacuum flange a Model 969 8840 with ISO 160 high vacuum flange Model 969 8841 with ISO 250 high vacuum flange Model 969 8845 with ISO 250 F high vacuum flange TV 1001 Navigator User Manual 87 900 945 01 1 241 312 17 Technical Information The following figure shows the six models Model 969 8838 Model 969 8844
71. acceleration bremsning stop eller Waiting for interlock a hurtige blink periode p ca 200 ms fejl TV 1001 Navigator User Manual 87 900 945 01 I 109 312 7 Istruktionsbog Stop af TV 1001 Navigator For at afbryde TV 1001 Navigator er det tilstr kkeligt at afbryde stromtilforselen Den indbyggede styreenhed afbryder straks pumpen For operat rens sikkerhed skal Turbo V controller en str mforsynes med et 3 tr det fodekabel se tabellen over de bestilbare stykker fodekablet skal v re udstyret med et stik som skal v re godkendt p international plan Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske stod og opfylde kravene if lge CE EF normerne De h je sp ndinger som udvikles i controller en kan for rsage alvorlige skader eller d den F r der foretages vedligeholdelses operationer inde i enheden skal man koble f dekablet fra N dstop Afbrydelse af TV 1001 Navigator i n dsituationer sker ved at koble ledningen fra styreenheden 110 312 TV 1001 Navigator User Manual 87 900 945 01 1 Istruktionsbog 7 Vedligeholdelse TV 1001 Navigator behover ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale Inden der foretages noget som helst indgreb p systemet skal strommen forst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til
72. acovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie Pozn mky upozor uj na d le it inform cie v texte 200 312 TV 1001 Navigator User Manual 87 900 945 01 1 N vod na Obsluhu 14 Uchov vanie Ak chcete aby turbomolekul rne vyvevy znaCky Agilent pod vali maximalny a spol ahlivy vykon dodr iavajte nasleduj ce pokyny a neprekra ujte nasleduj ce podmienky prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti O a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy pou i re im soft tartu skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis TV 1001 Navigator User Manual 87 900 945 01 1 201 312 14 N vod na Obsluhu Priprava na instal ciu Zariadenie TV 1001 Navigator sa dod va v Speci lnom ochrannom baleni Ak je balenie poskoden co sa m ze stat napriklad pocas prepravy obr tte sa na miestne zastupenie spolo nosti Agilent Pocas vybal ovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov
73. ajan preko triveznega napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Visoka napetost ki je prisotna v krmilniku lahko povzro i hude po kodbe ali smrt Preden za nete z vzdr evalnimi postopki v notranjosti izvlecite napajalni kabel Zaustavitev v sili Za takoj enj izklop naprave TV 1001 Navigator je treba izklju iti napetostni kabel iz napetosti 222 312 TV 1001 Navigator User Manual 87 900 945 01 1 Priro nik za Navodila 15 Vzdrzevanje Naprave TV 1001 Navigator ni potrebno vzdr evati Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjeno rpalko s popravljeno Preden odnesete rpalko na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je prilo en navodilom in ga poslate lokalni prodajni pisarni Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema rpalko je treba uni iti v skladu z dolo enimi nacionalnimi standardi TV 10
74. al 87 900 945 01 1 123 312 8 Bruksanvisning Att st nga av TV 1001 Navigator Om du vill st nga av TV 1001 Navigator beh ver du bara dra ut elkabeln ur v gguttaget Den inbyggda styrenheten avbryter omedelbart pumpens funktion VARNING F r operat rens s kerhet b r Turbo V systemet vara anslutet med en str mkabel med 3 stycken ledare se tabellen ver ordinerbara delar tillsammans med kontakt godk nd p internationell niv Anv nd sladden och kontakten tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer Den h ga sp nningen som framkallas av styrenheten kan orsaka personskador eller till och med d da Dra d rf r alltid ur str mkabeln innan eventuella underh llsarbeten utf rs inuti enheten N dstopp Dra ut elsladden fr n styrenheten f r att utf ra ett n dstopp av TV 1001 Navigator 124 312 TV 1001 Navigator User Manual 87 900 945 01 1 Bruksanvisning 8 Underh ll TV 1001 Navigator r underh llsfritt Allt servicearbete m ste utf ras av auktoriserad personal VARNING Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad som kan ers tta pumpen med en renoverad pump Innan systemet l mnas in till
75. ar 114 Allman information 114 F rvaring 117 F rberedelser f r installation 118 Installation 119 Fasts ttning av pump 120 Anv ndning 122 Start och anv ndning av TV 1001 Navigator 123 Att st nga av TV 1001 Navigator 124 N dstopp 124 Underh ll 125 Bortskaffning 126 vers ttning av originalinstruktionerna 5 Agilent Technologies 113 312 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 114 312 TV 1001 Navigator User Manual 87 900 945 01 1 Bruksanvisning 8 Allm n information Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som s
76. atlakoztatni l sd Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 161 312 11 Felhaszn l i K zik nyv A szivatty r gz t se VESZ LY Ha rotorhiba jelentkezik a szivatty s a rendszer k z tti csatlakoz s 162 312 jelent s nyomat knak lehet kit ve Ha a csatlakoz s nem k pes ezt a nyomat kot elvisel sni a szivatty lev lhat a rendszerr l illetve a motor lev lhat a szivatty h zr l Ebben az esetben f mr szecsk k rep lhetnek sz t a szivatty b l vagy a rendszerb l ami komoly k rokat illetve hal los s r l seket s vagy a t bbi g p k rosod s t okozhatja R gz tse a TV 1001 Navigatort stabil helyen a turb szivatty bemeneti karim j t a rendszer ellenkarim j ra szerelve 8900 Nm tengely k r li nyomat knak ellen llni k pes csatlakoz ssal P ld ul az ISO K karima r gz thet nagy teherb r s ac lkapcsokkal mint az IC63250DCMZ Agilent t pus A k vetkez t bl zat mindegyik karim hoz megmutatja az IC63250DCMZ kapcsok sz ks ges sz m t s a hozz tartoz r gz t nyomat kot Tab 1 E KARIMA ON R GZ T NYOMAT K 1010 gt 10 35 Nm 180200 8 35 Nm 35 Nm A k vetkez t bl zat mindegyik ISO F karim hoz megmutatja a csavarok sz ks ges sz m t s a hozz tartoz r gz t nyomat kot R GZ T NYOMAT K 5 Nm ISO 250 F 12 5 Nm Az F karima ac lcsavarjai oszt ly nak gt 8 8 nak kell lenn
77. ba para o fabricante Para mais informac es contatar o representante local da Agilent TV 1001 Navigator User Manual 87 900 945 01 1 75 312 5 Manual de Istruc es Preparac o para a instalac o O TV 1001 Navigator fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remoc o da embalagem tomar muito cuidado para n o deixar cair o controller e para n o submet lo a choques ou vibrac es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protecc o do meio ambiente Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposic o do v cuo Utilizar sempre luvas ou outra protecc o adequada Figura 1 O TV 1001 Navigator n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instalac o no sistema para evitar eventuais acumulac es de p 76 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instalac o Manual de Istruc es 5 Instale este equipamento somente em locais fechados e para todos os efeitos n o utilize o equipamento em ambientes expostos aos efeitos delet rios do tempo chuva gelo neve em ambientes sujeitos a p gas
78. be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Accessories and Spare Parts Tab 9 Description Part number Mains cable NEMA Plug 3m long 969 9958 Vent device with adjustable delay time for standard rack controller 969 9831 Vent valve for standard rack controller 969 9843 Vent valve for Navigator Controller 969984 o N Purge valve with KF16 flange 9699239 000 Purge valve with 7 16 flange 969 9240 TV 1001 Navigator User Manual 87 900 945 01 1 305 312 17 Technical Information Accessories and Spare Parts 306 312 TV 1001 Navigator User Manual 87 900 945 01 1 Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in a
79. bolet p logo WEEE p etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC direktiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverand ren av anordningen som kan v re et firma eller en forhandler som s rger for oppsamling og eliminering etter ha kontrollert avtal og betingelser i kj pekontrakten N ana Ker NZ PN AN OY 140 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet 142 Yleisi tietoja 143 Varastointi 145 Valmistelut asennusta varten 146 Asennus 147 Pumpun kinnitys 148 K ytt 150 TV 1001 Navigatorin k ynnistys ja k ytt 151 TV 1001 Navigatorin pys ytt minen 152 H t pys ytys 152 Huolto 153 H vitt minen 154 Alkuper isen ohjeiden k nn s s s Agilent Technologies 141 312 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin
80. c technick podm nky prost ed a Teplotn rozp t 20 C a 70 C a Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rni vyv vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rni v v vy je 10 m s c ode dne doru en POZOR Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent TV 1001 Navigator User Manual 87 900 945 01 1 187 312 13 N vod k Pou it Priprava k instalaci Vyv va TV 1001 Navigator se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky poSkozeni k n muz mohlo doj t b hem prepravy kontaktujte vasi mistni prodejni pobocku P i vybalovani d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 POZOR Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu A N Postava 1 V normalnim prostiedi se vyv va TV 1001 Navigator nem ze poskodit Presto doporu ujeme abyste ji nechali zakrytou dok
81. cal Information Zariadenie TV 1001 Navigator sa mus pripoji k prim rnej v veve pozri Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 203 312 14 N vod na Obsluhu Upevnenie vyvevy 4 74 de Ak sa objav chyba rotora pripojenie v vevy k syst mu bude vystaven 204 312 siln mu to iv mu momentu Ak pripojenie nie je dostato ne pevn aby to ivemu momentu odolalo m e sa odpoji v veva od syst mu alebo kryt motora od pl a v ve vy V takom pr pade sa m u z v vevy alebo syst mu prudko vymr ti kovov asti a sp sobi v ne zranenie alebo smr a alebo po kodi al ie zariadenia Upevnite zariadenie TV 1001 Navigator do stabilnej polohy tak e pripevn te vstupn pr rubu turbov vevy k pr rube syst mu Pripojenie mus by schopn vydr a to iv moment 8900 Nm okolo vlastnej osi Napr klad pr ruba typu ISO K m e by pripevnen oce ov mi svorkami s vysokou pevnos ou napr model Agilent IC63250DCMZ Nasleduj ca tabulka ukazuje pre ka dy typ priruby potrebny po et svoriek a pr slu n upev ovac kr tiaci moment Tab 1 a PR RUBA POGET UTAHOVAC KR TIACI MOMENT 180160 gt 10 35 Nm 18020 gt 8 35 Nm ISO 250 6 35 Nm Nasleduj ca tabulka ukazuje pre ka du ISO F prirubu potrebny po et svoriek a pr slu n upev ovac kr tiaci moment Tab 2 PR RUBA PO ET U AHOVAC KR TIACI MOMENT _180200F 12 5 Nm
82. cceso fisso la pompa in rotazione normale a lampeggiante lentamente periodo di circa 400 ms il sistema in stato di rampa o di frenata o di Stop o di Waiting for interlock lampeggiante velocemente periodo di circa 200 ms condizione di errore TV 1001 Navigator User Manual 87 900 945 01 1 25 312 Istruzioni per uso Arresto del TV 1001 Navigator Per arrestare il TV 1001 Navigator e sufficiente togliere la tensione di alimentazione II controller incorporato arresta immediatamente la pompa AVVERTENZA Per la sicurezza dell operatore il controller Turbo V deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella delle parti ordinabili dotato di una spina approvata a livello internazionale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensioni che si sviluppano nel controller possono provocare gravi lesioni o la morte Prima di eseguire delle operazioni di manutenzione all interno dell unit scollegare il cavo di alimentazione Arresto di Emergenza 26 312 Per arrestare in condizioni di emergenza il TV 1001 Navigator occorre staccare il cavo di alimentazione dal controller TV 1001 Navigator User Manual 87 900 945 01 1 Istruzioni per l uso 1 Manutenzione II TV 1001 Navigator non richiede alcuna manutenzione Qualsiasi intervento deve esse
83. d t s hoz azt aktiv lni kell a megfelel szoftver paranccsal l sd RS 232 485 COMMUNICATION DESCRIPTION a Technical Information f ggel kben A TV 1001 Navigatoron elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lm nyeit a ha nem villog a szivatty rendesen forog a ha lassan villog kb 400 ms os peri dus a rendszer gyorsul sban f kez sben le ll s vagy kapcsolatra v r llapotban van ha gyorsan villog kb 200 ms os peri dus az meghib sod st jelent TV 1001 Navigator User Manual 87 900 945 01 1 165 312 11 Felhaszn l i K zik nyv A TV 1001 Navigator kikapcsol sa A TV 1001 Navigator kikapcsol s hoz le kell kapcsolni a t pfesz lts get A be p tett vez rl azonnal le ll tja a szivatty t A g pkezel biztons ga rdek ben a Turbo V vez rl egys get h romeres bet pk bellel kell ell tni l sd a megrendelhet alkatr szek t bl zat t ami egyik v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek A magasfesz lts g ami az ellen rz egys gben keletkezik s lyos s r l seket s t hal lt okozhat Miel tt az egys g belsej ben karbantart si munk t v gezne kapcsolja le az eg
84. den ikke forurenses eller utsettes for nedst ving 132 312 TV 1001 Navigator User Manual 87 900 945 01 I Instruksjon Manual 9 Installasjon Ikke installer eller bruk systemet i miljoer som utsettes for regn sng eller is st v aggressive gasser eksplosjonsfarlige milj er eller milj er med stor brannfare Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk a temperatur fra 5 C til 35 C se diagram i tillegget Technical Information a relativ fuktighet 0 95 uten kondens ajd ere Tapen og beskyttelsesproppen skal fjernes f rst n r turbopumpen koples til systemet Figur 2 Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer TV 1001 Navigator m koples til en hovedpumpe se skjema i Technical Information TV 1001 Navigator User Manual 87 900 945 01 I 133 312 9 instruksjon Manual Festing av pumpen KAR Dersom rotoren delegges kan tilkoplingen mellom pumpen og systemet 134 312 utsettes for et betydelig dreiemoment Dersom tilkoplingen ikke er sterk nok til t le dette dreiemomentet kan pumpen losne fra systemet eller motoren kan losne fra pumpens hylster dette tilfellet kan metallsplinter kastes ut fra pumpen eller fra systemet Dette kan f re til alvorlige skader eller d d og eller skader p annet utstyr i n rheten Fest TV 1001 Nav
85. dy nepou ivajte turbovyvevu ak vstupn priruba nie je pripojen k v kuovej komore alebo ak nie je zablendovan V priebehu zahrievania sa nikdy nedotykajte turbovyvevy ani Ziadneho prislusenstva Vysok teploty mo u sp sobit pop leniny Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na preplachovacom vstupe mus by ni ne 2 bar pretlakov V vevy s vybaven peci lnym vstupom na vy erp vanie agres vnych plynov ktor umo uj stabiln tok inertn ho plynu napr klad Na Ar kv li ochrane lo sk v vevy pozri dodatok Technical Information NEBEZPE Ak v vevu pou vate na od erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov 206 312 TV 1001 Navigator User Manual 87 900 945 01 1 N vod na Obsluhu 14 Zapnutie a pou itie zariadenia TV 1001 Navigator Ak chcete zapnut zariadenie TV 1001 Navigator musite ho pripojit ku zdroju nap jania Integrovany kontrolny modul automaticky rozpozn pritomnost sign lov spojenia a spustenia a zapne vyvevu Rezim Soft Start sl Zi na zapnutie vyvevy po dlSom vyraden z prev dzky Ak chcete
86. e beskyttelse Figur 1 Normal atmosf risk p virkning kan ikke skade TV 1001 Navigator Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer st v i pumpen 104 312 TV 1001 Navigator User Manual 87 900 945 01 I Istruktionsbog 7 Installation FORSIGTIG Install r og anvend ikke pumpen i milj er der uds ttes for p virkninger fra atmosfeeren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene g lder ved drift a max tryk 2 bar over det atmosf riske tryk temperatur fra 5 C til 35 C se illustrationen i bilaget Technical Information a relativ luftfugtighed 0 95 ikke kondenserende Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet Figur 2 Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninger TV 1001 Navigator skal tilsluttes en hovedpumpe se skemaet Technical Information TV 1001 Navigator User Manual 87 900 945 01 I 105 312 7 Istruktionsbog Fastgorelse af pumpe EVENS IR Hvis rotoren beskadiges kan forbindelsen mellem pumpen og systemet blive 106 312 udsat for et kraftigt drejemoment Hvis forbindelsen ikke er tilstr kkelig ti
87. e periodo de 200 ms aproximadamente condici n de error TV 1001 Navigator User Manual 87 900 945 01 1 67 312 4 Manual de istrucciones Parada del TV 1001 Navigator Para parar el TV 1001 Navigator nte con desenchufarlo de la corriente El controler incorporado detiene inmediatamente la bomba ADVERTENCIA Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE Las altas tensiones que se desarrollan en el controlador pueden provocar graves da os o incluso resultar fatales Desconectar el cable de alimentaci n antes de ejecutar las operaciones de mantenimiento en el interior de la unidad requerimientos de las normas CE Parada de Emergencia 68 312 Para detener en condiciones de emergencia el TV 1001 Navigator es necesario desconectar del controlador el cable de alimentaci n TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Mantenimiento El TV 1001 Navigator no necesita ning n mantenimiento Cualquier operaci n deber ser realizada por personal autorizado GORUA Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente
88. e can be increased up to about 220 min by means of a setting of the Navigator software optional TV 1001 Navigator User Manual 87 900 945 01 1 281 312 17 Technical Information To install the vent valve unscrew the threaded plug see figure below Figure 43 Then screw the vent valve into the pump and tight en it using a 16 mm hexagonal spanner with a torque of 2 5 Nm Figure 44 288 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suita ble connector on the controller see the preceding paragraph INTERCONNECTIONS Standard Rack Controller Compatible Vent Valve mod 969 9843 ES Figure 45 This vent valve has a fixed delay time of about 5 sec This value can be used only with rack controller To install the vent valve execute the same steps as the vent valve model 969 9834 see the above paragraph TV 1001 Navigator User Manual 87 900 945 01 1 289 312 17 Technical Information Vent Device mod 969 9831 Figure 46 The vent device has adjustable delay time up to 36 min This value can be used only with rack controller T
89. ecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service in Anspruch genommen werden der eine general berholte Pumpe als Ersatz f r die defekte Pumpe zur Verf gung stellt Bevor Fa Agilent ein System zur Reparatur oder den Umtauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung der Pumpe hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TV 1001 Navigator User Manual 87 900 945 01 1 41 312 2 Gehrauchsanleitung Entsorgung 42 312 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Eguipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat N ana
90. ein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no g
91. en som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 38000 omdr min Turbinen drives af en elektrisk trefasemotor med h j effekt TV 1001 Navigator er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum TV 1001 Navigator har endvidere hj lpestik der g r det muligt at forsyne ventilator styre ventilationsventilen og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse RS 232 RS 485 De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger TV 1001 Navigator User Manual 87 900 945 01 I 101 312 7 Istruktionsbog I brugsanvisningen anvendes f lgende standardrubrikker dS er le Denne advarselsmeddelelse vises for procedurer der skal f lges naje for ikke at risikere maskinskader AVON IRR Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne modsat fald er der risiko for sv re personskader Dette g r opm rksom p vigtig information i teksten 102 312 TV 1001 Navigator User Manual 87 900 945 01 1 Istruktionsbog 7 Opbevaring Det er
92. enachbarten Ger ten zur Folge haben k nnten TV 1001 Navigator in einer stabilen Position befestigen Den Eintrittsflansch der Turbopumpe am Gegenflansch des Systems montieren Diese Verbindung soll einem Drehmoment von 8 900 Nm um die eigene Achse standhalten Der ISO K Flansch kann zum Beispiel mit hochfesten Stahlklemmen befestigt werden Typ Modell Agilent IC 63250 DCMZ Die nachstehende Tabelle gibt an wie viele Klemmen IC 63250 DCMZ f r jeden Flansch erforderlich sind und mit welchem Anzugsmoment sie festzuziehen sind Tab 1 Flansch Am Anzugsmoment ISO 160 10 35 Nm om 35 Nm ISO 250 6 35 Nm Die nachstehende Tabelle gibt an wie schrauben f r jeden ISO F Flansch erforderlich sind und mit welchem Anzugsmoment sie festzuziehen sind Tab 2 E Flansch Anz Anzugsmoment Iso200r 12 5 Nm ISO 250 F 12 5 Nm TV 1001 Navigator User Manual 87 900 945 01 1 Gebrauchsanleitung 2 Turbopumpen mit ConFlat Eingangsflansch sind mit dem speziellen Agilent Befestigungsmaterial an die Vakuum kammer anzuschliefen F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 1001 Navigator kann in jeder beliebigen Position installiert werden Modell TV 1001 Navigator kann nicht mittels seines Sockels befestigt werden NETA Der TV 1001 Navigator geh rt zur zweiten Installationsklasse berdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung angesc
93. enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent que permite obtener una bomba regenerada para sustituir la averiada Antes de enviar al fabricante una bomba para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que la bomba se tenga que desguazar eliminarla respetando las normas nacionales espec ficas TV 1001 Navigator User Manual 87 900 945 01 1 69 312 4 Manual de istrucciones Eliminaci n Significado del logotipo WEEE presente en las etiquetas El s mbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbolo v lido s lo para los pa ses miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si
94. er Stand by power Max operating power Protection fuse Compliance with Power cable Serial communication Navigator Installation category Pollution degree Storage temperature Weight kg Ibs Technical Information 17 100 240 Vac 50 60 Hz 600 VA 30 to 35 W 450 W with water cooling 300 W with air cooling 1x6 3A UNI EN 292 1 UNI EN 292 2 EN CENELEC 55011 IEC 1000 4 2 ex 801 2 IEC 1000 4 3 ex 801 3 IEC 1000 4 4 ex 801 4 EN 61010 1 IEC 1010 1 EN 1012 2 With European or NEMA plug 3 meters long optional RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and Navigator software optional ISO 160 flange 19 41 8 ISO 200 flange 19 4 43 ISO 250 flange 21 2 46 6 CF 10 flange 25 5 54 2 Controller 5 4 12 When the TV 1001 Navigator has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature TV 1001 Navigator User Manual 87 900 945 01 1 249 312 17 Technical Information TV 1001 Navigator Outline The following figures show the TV 1001 Navigator outlines dimensions are in mm inches
95. ertgase verwenden Der Eingangsdruck am Bel ftungsanschluk soll unter 2 bar ber dem atmosph rischen Druck betragen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer Offnungsklappe ausgestattet ber die zum Schutz der Lager Inertgas Stickstoff oder Argon zuzuleiten ist siehe Anhang Technical Information Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden 38 312 TV 1001 Navigator User Manual 87 900 945 01 1 Gebrauchsanleitung 2 Einschaltung und Gebrauch von Modell TV 1001 Navigator Zur Einschaltung von Modell TV 1001 ist es mit der erforderlichen Versorgungsspannung zu versorgen Der eingebaute Controller erfa t automatisch das Vorhandensein von Interlock und Anlaufsignalen und startet die Pumpe Der Modus Soft Start sieht vor die Pumpe nach einem langen Stillstand einzuschalten Um die Pumpe im Modus Soft Start zu starten ist dieser Modus mittels der Software freizugeben siehe Abschnitt RS 232 485 COMMUNICATION DESCRIPTION im Anhang Technical Information Die gr ne LED LD1 an der Bodenplatte von Modell TV 1001 gibt mit der H ufigkeit ihres Blinkens die Betriebsbedingungen des System an Daueranzeige Die Pumpe befindet sich im normalen Betrieb a Lang
96. es agressivos ambientes explosivos ou com alto risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condic es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 35 C consultar a planilha no ap ndice Technical Information a humidade relativa O 95 n o condensante Remover a etiqueta autocolante e retirar a tampa de protecc o somente no momento de ligar a turbobomba ao sistema Figura 2 Na presenca de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O TV 1001 Navigator deve ser ligado a uma bomba prim ria consultar esquema em Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 71 312 5 Manual de Istru es Fixac o da bomba ATENCAO Em caso de dano no rotor a ligac o entre a bomba e o sistema corre o 78 312 risco de sofrer um torque muito grande Se a ligac o n o resistir de maneira suficiente ao referido torque a bomba pode soltar se do sistema ou o motor pode soltar se do inv lucro da bomba Nesse caso fragmentos de metal podem ser projectados da bomba ou do sistema que podem provocar les es graves ou a morte e ou danificar os equipamentos adjacentes Colocar o TV 1001 Navigator em posic o est vel fixando o flange de entrada da turbobomba
97. es direkt v nak G zkivon si probl m k elker l s re ne rintse meg puszta k zzel a v kuumnak kitett komponenseket Mindig viseljen keszty t vagy m s alkalmas v d felszerel st Abra 1 A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TV 1001 Navigatort M gis aj nlatos z rva tartani a rendszerbe val telepit sig igy megakad lyozva a por ltali szennyez d s b rmely form j t 160 312 TV 1001 Navigator User Manual 87 900 945 01 1 Felhaszn l i K zik nyv 11 Telep t s Ne telep tse valamint ne haszn lja a szivatty t atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett h m rs klet 5 C t l 35 C ig l sd a nyom s h m rs klet diagramot a Technical Information f ggel kben relativ p ratartalom 0 95 nem kondenz l FIGYELEM Ne t vol tsa el az ntapad cs kot s a v d kupakot csak a turb szivatty rendszerre csatlakoztat sa el tt bra 2 M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd Technical Information A TV 1001 Navigatort els dleges szivatty hoz kell cs
98. es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Argon para proteger los rodamientos v ase el anexo Technical Information ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos 66 312 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Encendido y Uso del TV 1001 Navigator Para encender el TV 1001 Navigator basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce autom ticamente la presencia de las se ales de interbloqueo y de arranque y activa la bomba La modalidad Soft Start est prevista para poner en marcha la bomba luego de un per odo prolongado de inactividad Para utilizar una puesta en marcha Soft Start activa es necesario habilitar la forma anteriormente indicada mediante software v ase el apartado RS 232 485 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde LD1 situado en el panel de la base del TV 1001 indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de Waiting for interlock a parpadea r pidament
99. esivn ch plyn jsou tyto v v vy vybaveny speci ln m otvorem kter umo uje plynul p tok inertn ho plynu nap N2 Ar pro ochranu lo isek v v vy viz p lohu Technical Information NEBEZPE Pokud pou v te v vevu pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn 192 312 TV 1001 Navigator User Manual 87 900 945 01 1 N vod k Pouziti 13 Zapnuti a pouziv ni vyv vy TV 1001 Navigator Pro uvedeni vyvevy TV 1001 Navigator do provozu je nutn priv st sitov nap t Integrovany regul tor automaticky zjistuje blokov ni pr tomnost spou t cich signalu a uvede vyv vu do provozu Re im Soft Start slou i k zapnut vyv vy po del im vyrazeni z provozu Chcete li zapnout re im Soft Start musite jej aktivovat pat i n m programov m p kazem viz odstavec RS 232 485 COMMUNICATION DESCRIPTION v p loze Technical Information Zelen kontrolka umist n na elnim panelu z kladny vyv vy TV 1001 Navigator indikuje provozn stavy syst mu blik n m a bez blikani vyv va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov n rychl blik n interval cca 200 ms poruchov stav TV 100
100. essage structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt 268 312 The controller can answers with the following response types Tab 7 Type Length ET Value m TO Description Logic m pare After a read instruction of a logic Numetic 6 bytes After a read instruction of a numeric window After a read instruction of an alphanumeric window The command execution has been ACK byte 0x6 successfully completed NACK 1 byte 0x15 ABX execution has been Unknown The specified window in the Window command is not a valid window Alphanumeric 10 bytes The data type specified in the command Logic Numeric or Alphanumeric is not accorded with the specified Window Data Type Error 1 byte 0x33 0x34 The value expressed during a write Out of Range 1 byte command is out of the range value of the specified window The specified window is Read Only or temporarily disabled for example you can t write the Soft Start when the Pump is running Win Disabled 1 byte 0x35 TV 1001 Navigator User Manual 87 900 945 01 1 Examples Command START Source PC Destination Controller Technical Information 17 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 3
101. f an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the eguipment Detailed information is supplied in the appendix Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 221 312 16 Instructions for Use This manual uses the following standard protocol CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the eguipment WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text 228 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing a the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date CAUTION If for any
102. gh vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C TV 1001 Navigator User Manual 87 900 945 01 1 279 312 17 Technical Information Air Cooling Kit Installation TV 1001 with Navigator Controller An air cooling kit mod 969 9297 is available to improve the TV 1001 cooling during heavy operational conditions optional Figure 34 Fan specifications 280 312 air flow 200m3 h input voltage 24 Vdc dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 4 7 W TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The fan bracket is shaped so that it can be mount ed close to the pump To fix the fan to the TV 1001 case execute the fol lowing procedure see the following figure 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump body between the pump and the controller 3 Connect the fan supply to the P4 connector of the controller ea Figure 35 TV 1001 Navigator User Manual 87 900 945 01 1 281 312 17 Technical Information 282 312 TV 1001 Pump with Standard Rack Controller When the TV 1001
103. godnie z obowi zuj cymi krajowymi normami w meritum sprawy TV 1001 Navigator User Manual 87 900 945 01 1 181 312 12 Podrecznik Instrukcji Przetworstwo odpadow 182 312 Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu Asa MATES NS V N A TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 13 N vod k Pouziti Bezpe nostni n vod pro Turbomolekul rni vyv vy 184 V eobecn informace 185 Uskladn ni 187 P prava k instalaci 188 Instalace 189 Mont v v vy 190 Pou it 192 Zapnut a pou v n v v vy TV 1001 Navigator 193 Vypnut v v vy TV 1001 Navigator 194 Nouzov zastaven 194 dr ba 195 Likvidace 196 P eklad origin ln ho n vodu E Agilent Technologies 183 312 13 Navod k Pou iti Bezpe nostni navod pro Turbomolekul rni vyv vy Turbomolekul rni
104. gon para proteger os rolamentos consultar o ap ndice Technical Information ATENCAO Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presenca de gases explosivos 80 312 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de Istruc es 5 Acendimento e Utilizac o do TV 1001 Navigator Para ligar o TV 1001 suficiente fornecer a tens o de alimentac o O controller incorporado reconhece automaticamente os sinais de interlock e de activac o e acciona a bomba O modo Soft Start previsto para ligar a bomba ap s um longo per odo de paragem Para ter um arranque com Soft Start activo necess rio habilitar o modo mencionado anteriormente utilizando o software consultar o par grafo RS232 485 COMMUNICATION DESCRIPTION no ap ndice Technical Information A luz piloto verde LD1 posicionada no painel da base do TV 1001 indica atrav s da frequ ncia de intermitencia as condic es operacionais do sistema a aceso fixo a bomba funciona normalmente a intermitencia lenta periodo de aprox 400 ms o sistema est em estado de acelerac o ou de paragem ou de Stop ou de waiting for interlock a intermitencia r pida per odo de aprox 200 ms condi o de erro TV 1001 Navigator User Manual 87 900 945 01 1 81 312 5 Manual de Istruc es Pa
105. heid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij het systeem in de verpakking worden gevoegd Mocht de pomp gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk TV 1001 Navigator User Manual 87 900 945 01 1 97 312 6 Bedrijfshandleiding Afvalverwerking 98 312 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd Ny N X J S 4 gani LX TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper 100 Generel information 100 Opbevaring 103 Forberedelser f r installation 104 Installation 105 Fastg relse af pumpe 106 Anvendelse 108 Start og anvendelse af TV 1001 Navigator 109
106. heric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 ON Figure 57 Purge layout 1 Purge gas line Gas purge port 4 5 Forevacuum pump 7 Turbopump TV 1001 Navigator User Manual 87 900 945 01 1 303 312 17 Technical Information Pump Used in Presence of Magnetic Fields 304 312 Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consump tion by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radia tion and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the inten sity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum opera tion no particular problem should be expected However if the effect is grater than the case should
107. hlossen werden die dieser Kategorie entspricht Der TV 1001 Navigator hat Verbinder f r den Ein und Ausgang und die Schnittstellenkommunikation die an die AuRenkreise angeschlossen werden m ssen soda kein Teil unter Spannung zug nglich ist Sicherstellen da die Isolierung der an den TV 1001 Navigator ange schlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1 vorgesehen wird F r die Installation der Optionsteile siehe im Anhang Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 37 312 2 Gehrauchsanleitung Gebrauch In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Vor Benutzung des Systems sind alle elektrischen und pneumatischen Anschl sse auszufilhren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Tempera tur am Eingangsflansch 120 C nicht berschreiten Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlussflansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch eventuelle hei e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr VORSICHT W hrend des Betriebs sind StoB und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder In
108. i 174 Instalacja 175 Mocowanie pompy 176 U ytkowanie 178 Konserwacja 181 Przetworstwo odpadow 182 Navod k Pou iti 183 Bezpe nostn n vod pro Turbomolekularni v vevy 184 V eobecne informace 185 Uskladn ni 187 Piiprava k instalaci 188 Instalace 189 Mont z vyv vy 190 TV 1001 Navigator User Manual 87 900 945 01 1 Contents Pou iti 192 Udr ba 195 Likvidace 196 14 Navod na Obsluhu 197 Bezpe nostne pokyny pre Turbomolekul rne vyvevy 198 V eobecne inform cie 199 Uchov vanie 201 Pr prava na in tal ciu 202 In tal cia 203 Upevnenie v vevy 204 Pou itie 206 dr ba 209 Likvid cia 210 15 Priro nik za Navodila 211 Varnostna navodila za Turbomolekularne rpalke 212 Splo ne informacije 213 Shranjevanje 215 Priprava za monta o 216 Monta a 217 Pritrjevanje rpalke 218 Uporaba 220 Vzdr evanje 223 TV 1001 Navigator User Manual 87 900 945 01 1 11 312 Contents 12 312 16 Odlaganje opadkov 224 Instructions for Use 225 Safety Guideline for Turbomolecular Pumps 226 General Information 227 Storage 229 Preparation for installation 230 Installation 231 Pump fixing 232 Use 234 Maintenance 237 Disposal 238 17 Technical Information 239 Description of the TV 1001 Navigator 241 Technical Specification 248 TV 1001 Navigator Outline 250 Interconnections 254 RS 232 RS 485 Communication Description 266 Inlet Screen Installation 275 Heater Band Installation 278 Ai
109. ia si z tematem patrz dodatek Technical Information TV 551 701 Navigator musi by pod czony do g wnej pompy patrz schemat w dodatku Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 175 312 12 Podrecznik Instrukcji Mocowanie pompy ZAGROZENIE W przypadku uszkodzenia wirnika ztacze miedzy pompa i systemem moze 176 312 by narazone na bardzo wysoki moment Je eli ztacze jest niewystarczajace by wytrzyma wspomiany moment pompa mo e sie odczepi od systemu lub silnik moze odczepi sie od obudowy pompy W takim przypadku fragmenty metalu moga by wyrzucone przez pompe lub przez system i moga one spowodowa powazne uszkodzenia lub mier os b jak i uszkodzic aparature znajdujaca sie w poblizu systemu Zamocowa system TV 1001 Navigator w pozycji stabilnej montujac ko nierz wej cia turbopompy do ko nierza systemu dokrecajac w taki spos b aby po czenie to wytrzyma o moment 8900 Nm wok w asnej osi Na przyk ad ko nierz IS0 K mo e by zamocowany stalowymi zaciskami o odpowiedniej wytrzyma o ci typ modelu Agilent IC63250DCMZ W niniejszej tabeli przedstawione zosta y dla ka dego ko nierza ilo potrzebnych zacisk w IC63250DCMZ i moment dokr cenia ich Tab 1 35 Nm 180 200 8 35 Nm MC O IT W niniejszej tabeli przedstawione zosta y dla ka dego ko nierza ISO F ilo potrzebnych rub i moment dokr cenia ich Ko nierz N
110. icated data is the corresponding ASCII character a lt STX gt Start of transmission 0x02 a lt ADDR gt Unit address 0x80 for RS 232 a lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric char acter indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 6 Data type Field length Valid characters Logic L 1 0 OFF V ON Numeric N 6 50 Y right justified with Alphanumeric A 10 from blank to ASCII lt ETX gt End of transmission 0x03 a lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type TV 1001 Navigator User Manual 87 900 945 01 1 267 312 17 Technical Information When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the m
111. ie TV 1001 Navigator User Manual 87 900 945 01 1 Felhaszn l i K zik nyv 11 A ConFlat bemeneti karim s turb szivatty t a megfelel Agilent hardverrel kell r gz teni a v kuumkamr hoz R szletes le r s rt l sd Technical Information A TV 1001 Navigator b rmely helyzetben telep thet A TV 1001 Navigator nem r gz thet az alapj n kereszt l FIGYELEM A TV 1001 Navigator a m sodik telep t si vagy t lfesz lts g kateg ri hoz tartozik az EN 61010 1 direkt va szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz A TV 1001 Navigatornak olyan bemeneti kimeneti s soros kommunik ci s csatl z sai vannak amelyeket gy kell k ls ramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Gy z dj n meg r la hogy a TV 1001 Navigatorhoz csatlakoztatott eszk z megfelel egyes hiba eset n is az RN 61010 1 direkt va szerint TV 1001 Navigator User Manual 87 900 945 01 1 163 312 11 Felhaszn l i K zik nyv Haszn lat Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra meleg t se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 120 C ot Soha ne haszn lja a turb szivatty t ha a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz nem z rja azt le a lez
112. igator User Manual 87 900 945 01 1 Istruzioni per l uso 1 Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento amp necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C vedere grafico nel appendice Technical Information umidit relativa 0 90 non condensante aid Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema Figura 2 In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Technical Information per ulteriori dettagli Il TV 1001 Navigator deve essere collegato ad una pompa primaria vedere schema in Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 21 312 1 Istruzioni per uso Fissaggio della pompa ANTAS AA Se si verifica un danno al rotore la connessione tra la pompa ed il sistema 22 312 potrebbe essere sottoposta ad una coppia significativa Se la connessione non 6 sufficiente per resistere alla suddetta coppia la pompa potrebbe staccarsi dal sistema o il motore potrebbe staccarsi dall involucro della pompa In questo caso frammenti di
113. igator i en stabil posisjon monter turbopumpens innl psflens til systemets motflens med en tilkopling som er i stand til t le et dreiemoment p 8900 Nm rundt sin egen akse ISO K flensen kan f eks festes ved hjelp av st lklemmer med h y styrke f eks modellen Agilent IC 63250 DCMZ Den f lgende tabellen beskriver antall klemmer IC 63250 DCMZ som er n dvendige for hver flens og tilh rende strammemoment Tab 1 180160 10 35 Nm ISO 200 8 35 Nm ISO 250 6 35 Nm Den folgende tabellen beskriver antall skruer som er ngdvendige for hver ISO F flens og tilhorende strammemoment Tab 2 E NA OTTO TAN 5 Nm Til flensene F ma stalskruene vare av klasse gt 8 8 TV 1001 Navigator User Manual 87 900 945 01 1 Instruksjon Manual 9 Turbopumpen med ConFlat inngangsflens skal festes til vakuumkammeret ved hjelp av de spesielle l sedelene fra Agilent For detaljer henvises det til Technical Information TV 1001 Navigator kan monteres i en valgfri stilling TV 1001 Navigator m ikke festes gjennom fundamentet FORSIKTIG TV 1001 Navigator hgrer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller kravene for denne klassen TV 1001 Navigator er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre stromkretsene slik at ingen deler under spenning er tilgje
114. igator okam ite vypn v stave n dze mus te vytiahnu k bel nap jania zo z suvky zdroja nap jania TV 1001 Navigator User Manual 87 900 945 01 1 N vod na Obsluhu 14 Udrzba Zariadenie TV 1001 Navigator nevy aduje iadnu dr bu Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l 4 1743 4H MW Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte servisn stredisko spolo nosti Agilent kde v m pokazen v vevu vymenia za n hradn repasovan Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia v vevy mus prebehn v s lade so pecifick mi predpismi danej krajiny TV 1001 Navigator User Manual 87 900 945 01 1 209 312 14 Navod na Obsluhu Likvid cia Vyznam loga WEEE nach dzaj ceho sa na Stitkoch Aplikovanie doluozznaten ho symbolu dodrZuje smernicu EU s n zvom WEEE Tento symbol platny iba pre St ty Eur pskej Unie znamen Ze vyrobok s tymto Stitkom NESMIE b
115. igde klemmen IC 63250 DCMZ en met welk koppel ze aangetrokken moeten worden Tab 1 NR AANHAAL KOPPEL 1010 35 Nm ISO 200 8 35 Nm ISO 250 6 35 Nm De volgende tabel beschrijft voor elke ISO F flens het aantal benodigde klemmen IC 63250 DCMZ en met welk koppel ze aangetrokken moeten worden Tab 2 NR AANHAAL KOPPEL ISO 250 F 12 5 Nm De klasse van de stalen schroeven voor de F flenzen moet gt 8 8 zijn TV 1001 Navigator User Manual 87 900 945 01 1 Bedrijfshandleiding 6 De turbompomp met ConFlat inlaatflens moet aan de vacu mpomp worden bevestigd met behulp van de speciale mechanische bevestigingselementen van Agilent Zie voor meer informatie de bijlage Technical information De TV 1001 Navigator kan in alle standen worden geinstalleerd De TV1001 Navigator kan niet met behulp van zijn eigen basis worden bevestigd OORZICHTIG De TV 1001 Navigator behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet De TV 1001 Navigator bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Controleer of de inrichting verbonden met de TV 1001 Navigator goed geisoleerd is ook in geval van een enkele storing zoals voorzien door de
116. ite Datatype 108 R W N 109 W L 110 R W L 111 R W L 120 R W N 121 R W N 122 R W L 123 Reserved to Agilent service 124 125 R W L 126 R W N 130 Reserved to Agilent service 200 R N 201 R N 212 312 Pump voltage in Vdc TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Pump power in W pump current x pump voltage duty Admitted Values Driving frequency in Hz Pump temperature in C ie 208 RO 204 R 205 R 206 RO 300 RO Pump status Error code Cycle time in minutes zeroed by the reset Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 Bit description see the following figure 0 to 999999 Cycle number zeroed by the reset command 0 to 9999 320 399 400 402 Pump life in hours zeroed by the reset command CRC EPROM 0E CRC Param PA 0 to 999999 0E5XXXX where XXXX are variable PA5XXXX where XXXX are variable 0 to 31 default lt 0 Serial type select TV 1001 Navigator User Manual 87 900 945 01 1 213 312 17 Technical Information N Read Write Datatype Description 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122
117. j bardzo wysok pr dko ci obrotow razem z masa w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona ZAGROZENIE Aby unikna uszkodzenia aparatury i zapobiec uszkodzeniom ciata operator w nalezy obowiazkowo przestrzega zalecen dotyczacych instalacji opisanych w niniejszej instrukcji obstugi 170 312 TV 1001 Navigator User Manual 87 900 945 01 1 Podrecznik Instrukcji 12 Informacje ogolne Ta aparatura jest przeznaczona do uzytku zawodowego Uzytkownik musi przeczyta bardzo uwaznie niniejsza instrukcje kazda dodatkowa informacje dostarczona przez firme Agilent przed u ytkowaniem aparatury Firma Agilent uchyla sie od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego braku przestrzegania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych System TV 1001 Navigator jest zintegrowanym systemem sk adaj cym si z pompy turbomolekularnej dla zastosowa wysokich i ultra wysokich pr ni jak i przez odpowiedni system sterowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzys
118. jie TV 1001 Navigator h rer til den anden installationsklasse eller oversp ndingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse TV 1001 Navigator er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opn adgang til de sp ndingsf rende dele Kontroll r at anordningen der er tilsluttet TV 1001 Navigator har en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret TV 1001 Navigator User Manual 87 900 945 01 1 107 312 7 Istruktionsbog Anvendelse Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet bor samtlige elektriske og pneumatiske tilslutninger udfores I forbindelse med opvarmning af vakuumkammeret m indl bsflangens temperatur ikke overstige 120 C ADVARSEL Pumpen m aldrig aktiveres hvis indl bsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen R r aldrig turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne Den h je temperatur kan resultere i skade p personer FORSIGTIG Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af
119. k servis firmy Agilent kter m ze dodat n hradn repasovanou vyv vu vym nou za porouchanou Pied odesl nim vyv vy vyrobci na opravu nebo vym nu za repasovany kus vypl te list Zdrav a bezpe nost p ilo en k tomuto n vodu a ode lete ho do kancel e m stn ho prodejn ho odd len P ed odesl n m p ibalte k za zen kopii tohoto listu Pokud se m v v va vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami TV 1001 Navigator User Manual 87 900 945 01 1 195 312 13 N vod k Pou it Likvidace Vyznam loga WEEE nach zejiciho se na St tku Nize uvedeny symbol odpovida sm rnicim CE pojmenovanym WEEE Tento symbol platny jen pro st ty Evropsk Unie urcuje Ze vyrobek ktery je takto ozna en NESMI byt likvidov n spole n s ostatnimi domacimi nebo pr myslov mi odpady ale je nutno ho p edat do patfi nych provoznich sb ren kde mus byt tr d n a likvidov n odd len od m stsk ho odpadu U ivateli kter mini v robek likvidovat doporucujeme aby se nakontaktoval primo s vyrobcem nebo prodejcem kter se po pat i n m prov en terminu a smluvnich podminek postar o kompletni likvidaci uveden ho vyrobku 196 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 14 N vod na Obsluhu Bezpe nostne pokyny pre Turbomolekul rne vyvevy 198 V eobecn inform cie 199 Uchov vanie 201 Pr prava na in tal ci
120. kane poprzez obrotow turbin o wysokiej pr dko ci max 38000 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci System TV 1001 Navigator jest ca kowicie bez czynnik w zanieczyszczaj cych i dlatego te jest to system odpowiedni do zastosowa gdzie jest wymagana tzw czysta pr nia Poza tym posiada konektory pomocnicze poprzez kt re istnieje mo liwo zasilania dodatkowego wentylatora sterowania zaworem wentylatora zdalnego pilotowania go poprzez g wny komputer host pod czonego z szeregowym portem RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information TV 1001 Navigator User Manual 87 900 945 01 I 171 312 12 Podrecznik Instrukcji W tej instrukcji zastosowano nastepujace umowne znaczenia UWAGA Komunikaty zwiekszonej uwagi sa wyswietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury ZAGROZENIE Komunikaty zagrozeniu przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidtowe wykonanie mogtoby spowodowa powa ne uszkodzenia ciata Sa to wazne informacje wyciagniete z tekstu 172 312 TV 1001 Navigator User Manual 87 900 94
121. ke brukes i eksplosjonsfarlige milj er 136 312 TV 1001 Navigator User Manual 87 900 945 01 I Instruksjon Manual 9 Starte og bruke TV 1001 Navigator TV 1001 startes ved sette strgmkabelen i veggkontakten Den innebygde styreenheten kjenner automatisk igjen blokkerings og startsignaler og starter pumpen Modusen Soft Start brukes n r pumpen skal startes igjen etter ha st tt stille en lengre periode For sette i gang en Soft Start er det nodvendig stille inn modusen via programvare se avsnittet RS232 485 COMMUNICATION DESCRIPTION i tillegget Technical Information Den gr nne lysdioden LD1 p TV 1001 basepanel angir systemets funksjon ved hjelp av blink a den lyser fast pumpen roterer normalt den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand TV 1001 Navigator User Manual 87 900 945 01 1 137 312 9 instruksjon Manual Stoppe TV 1001 Navigator TV 1001 Navigator stoppes ved kople det fra str mforsyningen Den innebygde styreenheten stanser pumpen umiddelbart Turbo V styreenheten m forsynes med en 3 tr ds str mkabel se tabellen for deler som kan bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk
122. kirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla TV 1001 Navigator User Manual 87 900 945 01 1 153 312 10 Ohjek sikirja H vitt minen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot p N A x 154 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz 156 ltal nos inform ic 157 T rol s159 El k sz t s telep t sre 160 Telep t s 161 A szivatty r gz t se 162 Haszn lat 164 A TV 1001 Navigator bekapcsol sa s haszn lata 165 ATV 1001 Navigator kikapcsol sa 166 Veszle llit s 166 Karbantart s 167 Megsemmis t s 168 Az eredeti utas t s ford t sa En Agilent Technologies 155 3
123. kuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin maks 38000 opm koplet til en trefaset elektrisk motor TV 1001 Navigator har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum TV 1001 Navigator har dessuten hjelpekontakter som gir muligheter for forsyning av en ekstra vifte styring av utluftingsventilen og fjernstyring av systemet med en serietilkoplet vertsmaskin De f lgende avsnitt inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 129 312 9 instruksjon Manual Denne manualen bruker f lgende standardprotokoll Sete Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades INGEA Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader Merknadene inneholder viktig informasjon som er hentet fra teksten 130 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instruksjon Manual 9 Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pumper m f lgende anvisninger f lges
124. l at modst dette drejemoment kan pumpen rive sig l s fra systemet eller motoren kan rive sig l s fra pumpens bekl dning I dette tilf lde kan metalfragmenter blive slynget ud af pumpen eller systemet hvilket kan medf re alvorlige kv stelser eller d dsfald og eller materiel beskadigelse af apparaterne i n rheden Mont r TV 1001 Navigator i en stabil position ved at montere turbopumpens indgangsflange p systemets kontraflange Forbindelsen skal kunne t le et drejemoment p 8 900 Nm omkring dens egen akse ISO K flangen kan eksempelvis fastsp ndes ved hj lp af st lklemmer med hgj styrke f eks modellen Agilent IC 63250 DCMZ Nedenst ende tabel beskriver antallet af klemmer IC 63250 DCMZ som er n dvendige til hver enkelt flange samt det n dvendige tilsp ndingsmoment for klemmerne Tab 1 N Lange tits Ant Drejnings moment ISO 160 35 Nm 35 Nm 35 Nm Nedenst ende tabel beskriver antallet af skruer som er ngdvendige til hver enkelt ISO F flange samt det ngdvendige tilsp ndingsmoment Tab 2 o aaa n ISO 200 F 12 5 Nm TV 1001 Navigator User Manual 87 900 945 01 1 Istruktionsbog 7 Turbopumpen med ConFlat indlobsflange skal tilsluttes p vakuumkammeret ved hj lp af Agilent monteringsudstyret I bilaget Technical Information findes yderligere detaljer TV 1001 Navigator kan installeres i en hvilken som helst position Navigator TV 1001 kan ikke fastgores i fundamentet voimas
125. l aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi queste pompe sono dotate di una apposita porta attraverso la guale 6 necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteggere i cuscinetti vedere l appendice Technical Information AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tos sici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi 24 312 TV 1001 Navigator User Manual 87 900 945 01 1 Istruzioni per l uso 1 Accensione ed Uso del TV 1001 Navigator Per accendere il TV 1001 Navigator e sufficiente fornire la tensione di alimentazione Il controller incorporato riconosce automaticamente la presenza dei segnali di interlock e di avvio ed avvia la pompa Il modo Soft Start amp previsto per accendere la pompa dopo un prolungato periodo di fermo Per avere una partenza con Soft Start attivo occorre abilitare il modo suddetto tramite software vedere il paragrafo RS232 485 COMMUNICATION DESCRIPTION nell appendice Technical Information Il LED verde posto sul pannello della base del TV 1001 Navigator indica con la frequenza del suo lampeggio le condizioni operative del sistema a
126. l repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e Ifrequesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division
127. lastno spodnjo ploskvijo POZOR Po direktivi EN 61010 1 spada TV 1001 Navigator v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava TV 1001 Navigator ima vhodne izhodne in serijske priklju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Prepri ajte se da je izolacija naprave priklju ene na TV 1001 Navigator primerna tudi v primerno ene napake kar je opisano v direktivi EN 61010 1 TV 1001 Navigator User Manual 87 900 945 01 1 219 312 15 Priro nik za Navodila Uporaba SVARILO Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosfere Za rpanje agresivnih plinov so te rpalke opremljene s priklju kom ki omogo a stalen pretok inertnih plinov kot N2
128. ligheid van de bediener dient de controller Turbo V gevoed te worden met een driedradige voedingskabel zie de tabel met de bestanddelen die u kunt bestellen voorzien van een stekker met internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen De in de controller ontwikkelde hoge voltage kan ernstige letsels of de dood veroorzaken Maak de voedingskabel los alvorens onderhoudswerkzaamheden in het systeem uit te voeren Noodstop 96 312 Om de TV 1001 Navigator in noodomstandigheden te stoppen moet de stroomtoevoerkabel van de controller losgemaakt worden TV 1001 Navigator User Manual 87 900 945 01 1 Bedrijfshandleiding 6 Onderhoud De TV 1001 Navigator is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd Alvorens werkzaamheden aan het systeem uit te voeren de voeding loskoppelen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent in te schakelen zo krijgt men een geregenereerde pomp ter vervanging van de defecte pomp Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veilig
129. ma bomba regenerada que substitua a que apresenta defeito Antes de reenviar ao fabricante uma bomba para as repara es ou o advanced exchange service indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguran a e Sa de anexa ao presente manual de instru es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedi o Caso uma bomba tenha que ser destru da proceder sua elimina o respeitando as normas nacionais espec ficas TV 1001 Navigator User Manual 87 900 945 01 1 83 312 5 Manual de Istru es Eliminac o 84 312 Significado do log tipo WEEE presente nos r tulos O s mbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este s mbolo v lido apenas para os pa ses da Comunidade Europeia indica gue o produto no gual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e eliminac o ap s a oportuna verificac o dos termos e condic es do contrato de venda N ana N TI 4 NA N J S N OY TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire
130. metallo potrebbero essere proiettati dalla pompa o dal sistema i quali potrebbero causare seri danni o la morte e o danni agli apparati adiacenti Fissare il TV 1001 Navigator in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia di 8900 Nm attorno al proprio asse Per esempio la flangia ISO K puo essere fissata con morsetti in acciaio ad alta resistenza tipo il modello Agilent IC63250DCMZ La seguente tabella descrive per ogni flangia il numero di morsetti IC63250DCMZ necessari e con quale coppia di serraggio stringerli Coppia di serraggio 35 Nm 35 Nm La seguente tabella descrive per ogni flangia ISO F il numero di viti necessarie e con quale coppia di serraggio stringerle Tab 2 cel Flanga oc N Coppia di serraggio 1S0200F gt 12 5 Nm ISO 250 F 12 5 Nm Per le flange F le viti in acciaio devono essere di classe gt 8 8 TV 1001 Navigator User Manual 87 900 945 01 1 Istruzioni per l uso 1 La turbopompa con flangia di ingresso ConFlat deve essere fissata alla camera da vuoto per mezzo dell apposita minuteria meccanica Agilent Per ulteriori dettagli vedere appendice Technical Information Il TV 1001 Navigator puo essere installato in qualsiasi posizione II TV 1001 Navigator non pu essere fissato tramite la sua base ATTENZIONE II TV 1001 Navigator appartiene alla seconda categoria di installazio
131. mi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Slika 1 Normalna izpostavljenost na okolje ne more po kodovati naprave TV 1001 Navigator Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom 216 312 TV 1001 Navigator User Manual 87 900 945 01 1 Montaza Priro nik za Navodila 15 Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere temperatura Od 5 C od 45 C glej diagram pritisk temperatura v prilogi Technical Information a Relativna vla nost 0 95 brez kondenza Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem Slika 2 V prisotnosti magnetnih polje mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information TV 1001 Navigator morate priklju iti na primarno rpalko glej Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 217 312 15 Priro nik za Navodila Pritrjevanje rpalke SVARILO e pride do napake n
132. n adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc I Agilent Technologies i
133. n failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the fina
134. nak 158 312 TV 1001 Navigator User Manual 87 900 945 01 1 Felhaszn l i K zik nyv 11 T rol s A Agilent turbomolekul ris szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni a h m rs klettartom ny 20 C 70 C relativ p ratartalom 0 95 nem kondenz l a A turbomolekularis szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti Egy turbomolekul ris szivatty rakt roz si ideje 10 h nap a sz ll t s d tum t l TAV Ha valamilyen okb l a rakt roz si id t t ll pik a szivatty t vissza kell vinni a gy rba Inform ci rt forduljon a helyi Agilent k pviselethez TV 1001 Navigator User Manual 87 900 945 01 1 159 312 11 Felhaszn l i K zik nyv El k sz t s telep t sre FIGYELEM A TV 1001 Navigatort k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399
135. nca do operador durante o uso da aparelhagem Informac es detalhadas s o fornecidas no ap ndice Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 73 312 5 Manual de Istruc es Este manual utiliza as seguintes convenc es CUIDADO As mensagens de cuidado s o visualizadas antes de proceder gue se n o observadas poderiam causar danos aparelhagem MUA As mensagens de aten o atraem a aten o do operador num procedimento ou uma pr tica especifica que se n o executada de modo correto poderiam provocar graves les es pessoais As notas cont m informac es importantes estrapoladas pelo texto 74 312 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de Istruc es 5 Armazenagem Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser observadas as seguintes prescric es durante o transporte o deslocamento e a armazenagem das bombas as condic es ambientais devem ser as seguintes temperatura de 20 C a 70 C humidade relativa de O a 95 nao condensante a aoaccionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em modalidade Soft Start 0 tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedic o CUIDADO Se por uma raz o qualquer o per odo de armazenagem for superior ser necess rio enviar outra vez a bom
136. ndie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 35 C Cf graphique dans Technical Information humidit relative 0 95 non condensante Nain Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me Figure 2 En pr sence de champs magn tiques la pompe doit tre prot g e l aide d crans appropri s Pour tout autre renseignement se reporter l opuscule Technical Information Le TV 1001 Navigator doit tre connect une pompe primaire Cf sch ma dans Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 49 312 3 Mode d emploi Fixation de la pompe NEA TAN En cas d endommagement du rotor la connexion pompe syst me 50 312 pourrait tre soumise un couple tr s important Si la connexion n est pas en mesure de r sister au dit couple la pompe peut se d tacher du syst me ou le moteur de l enveloppe de la pompe Dans ce cas des morceaux de m tal peuvent tre expuls s par la pompe ou le syst me et entra ner des blessures graves voire la mort et ou endommager s rieusement les quipements environnants Fixer le TV 1001 Navigator de fa on stable en assurant la collerette d entr e de la turbopompe la contre collerette du s
137. ndition Set Point type Set Point threshold expressed in Hz mA or s Set Point delay time between the pump start and the set point check seconds Set Point signal activation type the signal can be high level active or low level active 0 Frequency 1 Current 2 Time default 0 default 582 0 to 99999 default 0 0 high level active 1 low level active default 0 Set point hysteresis in of threshold 0 to 100 default 2 Intercooling Active Stop write only in stop TV 1001 Navigator User Manual 87 900 945 01 1 271 312 17 Technical Information Description Baud rate Pump life cycle time cycle number reset Interlock type default 1 Analog output type output voltage signal proportional to freguency or power Rotational freguency setting Hz Maximum rotational freguency in Hz active only in Stop condition Set vent valve on off on closed Set the vent valve operation Admitted Values 600 lt 0 1200 1 2400 2 4800 3 9600 4 default 4 To reset write 4 Impulse 0 Continuous 1 0 frequency 1 power default 0 150 to 646 default 646 150 to 646 default 646 0021 Off 0 default 1 Automatic 0 see note 1 On command 1 see note 2 Vent valve opening 0 to 65535 delay corresponding expressed in 0 2 sec to 0 to 13107 sec Pump current in mA de N Read Wr
138. ndszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 38000 fordulat perc biztos tja A TV 1001 Navigator szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Fel van szerelve k ls csatlakoz kkal hogy tov bbi ventill tort t pl ljon vez relje a ventill tor szelepet amit t voli helyr l ir ny t egy soros vonalon RS 232 vagy RS 4835 kereszt l csatlakoztatott gazdag p seg ts g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben TV 1001 Navigator User Manual 87 900 945 01 1 157 312 11 Felhaszn l i K zik nyv Ez a k zik nyv a k vetkez figyelmeztet jelz seket haszn lja 310730311 A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem tartanak be az a berendez s k rosod s t okozhatja VESZ LY A vesz lyt jelz zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra ami ha nem megfelel en v gzik el s lyos szem lyi s r l sekhez vezethet A megjegyz sek fontos a sz vegb l kivonatolt inform ci kat tartalmaz
139. ne o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria II TV 1001 Navigator ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso al TV 1001 Navigator abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Per l installazione degli accessori opzionali vedere Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 23 312 1 Istruzioni per uso Uso In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C AVVERTENZA Non far funzionare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura puo causare lesioni alle persone ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando in funzione cuscinetti potrebbero danneggiarsi Per la mandata al
140. nformaciones al respecto se ruega contactar con el representante local de Agilent TV 1001 Navigator User Manual 87 900 945 01 1 61 312 4 Manual de istrucciones Preparaci n para la instalaci n El TV 1001 Navigator se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 1001 Navigator y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente ATENCI N Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vacio Utilizar siempre guantes u otra protecci n adecuada Figura 1 EI TV 1001 Navigator no puede dafiarse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo 62 312 TV 1001 Navigator User Manual 87 900 945 01 I Manual de istrucciones 4 Instalaci n No instalar ni o utilizar la bomba en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante
141. ngelige Forsikre deg om at isoleringen av anordningen koplet til TV 1001 Navigator har en egnet isolering ogs under forhold med en enkel feil i fglge EN 61010 1 standarden For installasjon av tilleggsutstyr vises det til Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 135 312 9 instruksjon Manual Bruk Alle instruksjoner for korrekt bruk finnes i dette avsnittet Les ngye gjennom denne manualen for systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 120 C Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke beror turbopumpen eller noe av tilleggsutstyret under oppvarmingen De hoye temperaturene kan fore til brannskader dude Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell pning Til denne pningen skal flyt av inaktive gasser argon eller kvelstoff koples for beskytte lagrene se Technical Information ANNUAIRES N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene f lges Pumpen skal ik
142. ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado al TV 1001 Navigator mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v ase Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 65 312 4 Manual de istrucciones Uso En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vacio la temperatura de la brida de entrada no ha de ser superior a 120 C ADVERTENCIA No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbo bomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCI N Evitense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual
143. norm EN 61010 1 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn TV 1001 Navigator User Manual 87 900 945 01 1 93 312 6 Bedrijfshandleiding Gebruik In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng alle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 120 C bedragen Laat de pomp nooit draaien als de inlaatflens niet op de vacuiimkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken VOORZICHTIG Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of argon ter bescherming van de lagers krijgt geleverd zie bijlage Technical Information WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van giftige brandbare of radioactieve gas
144. ntivo comandare la valvola di vent pilotarlo da remoto tramite un computer host collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information TV 1001 Navigator User Manual 87 900 945 01 1 17 312 1 Istruzioni per uso Questo manuale utilizza le seguenti convenzioni Pym mli messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura NIN messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Le note contengono informazioni importanti estrapolate dal testo 18 312 TV 1001 Navigator User Manual 87 900 945 01 1 Istruzioni per l uso 1 Immagazzinamento Per garantire il massimo livello di funzionalita ed affidabilit del le pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C a umidit relativa da 0 a 95 non condensante a il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Sta
145. nual de Istruc es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instruc es e todas as informac es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instruc es pelo uso indevido por parte de pessoas n o treinadas por operac es n o autorizadas ou pelo uso contr rio as normas nacionais espec ficas O TV 1001 Navigator um sistema integrado constitu do por uma bomba turbomolecular para aplicac es de alto e ultra alto v cuo integrada no relativo controller O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 38000 r p m m x movida por um motor el ctrico trif sico de alto rendimento O TV 1001 Navigator totalmente isentos de agentes contaminadores e portanto adeguado para aplicac es que requerem um v cuo limpo Al m disso o TV 1001 Navigator tem conectores auxiliares atrav s dos quais poss vel alimentar um ventilador adicional comandar a v lvula de vent accion lo por um controlo remoto atrav s de um computer host conectado por meio de linhas seriais RS 232 RS 485 Nos seguintes par grafos est o descritas todas as informac es necess rias para garantir a segura
146. ny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska Aby unikn problem w odgazowywania nale y nie dotyka go ymi r koma cz ci przeznaczonych do wytwarzania pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie gt Posta 1 System TV 1001 Navigator nie moze by uszkodzony poprzez wystawienie go na dziatanie atmosfery Mimo to zaleca sie aby pompa do momentu jej instalacji na systemie pozostata zamknieta w celu unikniecia zanieczyszczenia jej pytem 174 312 TV 1001 Navigator User Manual 87 900 945 01 1 Podrecznik Instrukcji 12 Instalacja Nie instalowad i lub uzytkowa pompy w otoczeniach wystawionych na czynniki atmosferyczne deszcz mr z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania nale y obowi zkowo przestrzega nast puj cych warunk wi otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym a temperatura od 5 C do 35 C patrz wykres graficzny w dodatku Technical Information wzgl dna wilgo 0 95 bez opar UWAGA Usuna ta me klejaca i zdja korek zabezpieczajacy dopiero w momencie potaczenia pompy do systemu Posta 2 W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznan
147. o install the vent device unscrew and remov e the threaded plug see figure below Figure 47 Screw the flange mod 969 9108 on the pump tak ing care of the o ring right position 290 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Assemble the seal ring and lock the vent device in position using the KF klamp Valve KF klamp Figure 48 Vibration Isolator Installation Three vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The three model part numbers are the following model 969 9345 for ISO 160 flange model 969 9346 for ISO 200 flange model 969 9336 for CFF 10 flange They typically reduce the vibration transmitted from the TV 1001 Navigator to the system by a factor of 20 Please refer to the relevant instruction manual TV 1001 Navigator User Manual 87 900 945 01 1 291 312 17 Technical Information Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure Figure 49 and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure Figure 50 292 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical
148. omto p pad by z v vevy nebo syst mu mohly vylet t kovov lomky kter by mohly zp sobit v n raz nebo smrt a tak po kodit okolni zafizeni V v vu TV 1001 Navigator um st te do stabilni polohy a privodni p rubu turbomolekul rn vyv vy p ipevn te k protip rub syst mu pomoc pr pojky kter odol to iv mu momentu 8900 Nm kolem sv osy Nap p rubu ISO K lze p ipevnit pr chytkami z vysoce pevn oceli jako je typ IC63250DCMZ firmy Agilent N sleduj c tabulka uv d nezbytn po et p chytek IC63250DCMZ pro ka dou p rubu a p slu n utahovac moment Tab 1 P IRUBA POGET UTAHOVAC MOMENT 180160 10 35 Nm 35 Nm ISO 250 6 35 Nm Nasledujici tabulka uv di nezbytny po et roubu pro ka dou pr rubu ISO F a p slu n utahovac moment Tab 2 18020F 12 5 Nm ISO 250 F 12 5 Nm Tiida ocelovych roubi pro pfirubu F musi byt gt 8 8 190 312 TV 1001 Navigator User Manual 87 900 945 01 1 N vod k Pouziti 13 Turbomolekul rn vyv va se vstupn p rubou ConFlat se mus p ipevnit k vakuov komo e pou it m p slu n ho materi lu firmy Agilent Viz podrobn popis v p loze Technical Information Vyv vu TV 1001 Navigator lze instalovat v libovoln poloze Vyv vu TV 1001 Navigator nelze p ipevnit pomoc jej podstavy POZOR Podle sm rnice EN 61010 1 pat i vyv va TV 1001 Navigator do druh elektroinstala n
149. ormation Pump Used with Corrosive Gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar I s This value can be exceeded according to the process requirements Please contact Agilent for specific applications 302 312 The purge gas throughput with the recommended forepump of 15 m h 11 CFM allows to achieve a high vacuum pressure in the 10 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Turn off the Turbopump 4 Open the Turbo V vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo V pump and the backing pump are stopped and the system is at atmosp
150. pompen 86 Algemene informatie 86 Opslag 89 Uitpakken 90 Installatie 91 Bevestiging van de pomp 92 Gebruik 94 Inschakeling en gebruik van de TV 1001 Navigator 95 Afzetten van de TV 1001 Navigator 96 Noodstop 96 Onderhoud 97 Afvalverwerking 98 Vertaling van de originele instructies Ka Agilent Technologies 85 312 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen N ETH TIN Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 86 312 TV 1001 Navigator User Manual 87 900 945 01 1 Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toes
151. porte sp ciale travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte azote ou argon pour prot ger les paliers voir l appendice Technical Information AVERTISSEMENT Lorsgue la pompe est utilis e pour le pompage de gaz toxigues inflammables ou radioactifs suivre les proc dures typigues de chaque gaz Ne pas utiliser la pompe en presence de gaz explosifs 52 312 TV 1001 Navigator User Manual 87 900 945 01 1 Mode d emploi 3 Mise en marche et utilisation du TV 1001 Navigator Pour allumer le TV 1001 Navigator il suffit de fournir la tension d alimentation Le contr leur incorpor reconnait automatiquement la pr sence de signaux d interlock et de d marrage et il actionne la pompe Le mode Soft Start a t concu pour permettre d allumer la pompe apres une longue p riode d inutilisation Pour mettre en marche en mode Soft Start il est n cessaire d activer ce mode op ratoire a l aide du logiciel Cf paragraphe RS232 485 COMMUNICATION DESCRIPTION dans l appendice Technical Information La LED verte LD1 plac e sur le panneau de la base du TV 1001 indique par sa fr quence de clignotement les conditions op rationnelles du systeme allum e fixe la pompe est en rotation normale a clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente interlock a clignote rapidement p riode d environ 20
152. ppa j rjestelm n vastalaippaan liitoksella joka kest 8900 Nm n momentin akselinsa ymp ri Esim ISO K laippa voidaan kiinnitt eritt in kest vill ter skiinnikkeill esim malli Agilent IC 63250 DCMZ Seuraavassa taulukossa ilmoitetaan jokaiselle laipalle tarvittava IC 63250 DCMZ kiinnitinm r ja niiden kiristysmomentit Tab 1 KIRISTYS MOMENTTI ISO 160 10 35 Nm so 8 35 Nm ISO 250 6 35 Nm Seuraavassa taulukossa ilmoitetaan jokaiselle ISO F laipalle sruuvien kiinnitinm r ja niiden kiristysmomentit Tab 2 LAIPPA M R KIRISTYS MOMENTTI SOME 0 12 5 Nm _ISO 250 F 12 5 Nm TV 1001 Navigator User Manual 87 900 945 01 1 Ohjek sikirja 10 Turbopumppu ConFlat sis ntulolaipalla tulee kiinnitt tyhji kammioon sopivien Agilentin mekaanisten varusteiden avulla Lis tietoja l ytyy Technical Information liitteest TV 1001 Navigator voidaan asentaa mihin tahansa asentoon TV 1001 Navigatoria ei voida kiinnitt perustansa kautta HUOMIO TV 1001 Navigator laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett TV 1001 Navigator laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Ks Technical
153. pping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 A sj Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Com Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only O Taxable O Non taxable 2 PRODUCT IDENTIFICATION Produc
154. pr sentant Agilent de zone TV 1001 Navigator User Manual 87 900 945 01 1 47 312 3 Mode d emploi Preparation pour l installation ATTENTION Le TV 1001 Navigator est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TV 1001 Navigator et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e Figure 1 Le TV 1001 ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation 48 312 TV 1001 Navigator User Manual 87 900 945 01 1 Mode d emploi 3 Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige a la poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou a fort risque d ince
155. processus de collecte et mise au rebut NY M N 4 OY ABBE 56 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 58 Informaci n general 58 Almacenamiento 61 Preparaci n para la instalaci n 62 Instalaci n 63 Fijaci n de la bomba 64 Uso66 Encendido y Uso del TV 1001 Navigator 67 Parada del TV 1001 Navigator 68 Parada de Emergencia 68 Mantenimiento 69 Eliminaci n 70 Traducci n de las instrucciones originales 25 Agilent Technologies 57 312 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a ser liberada ELLI IST Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 58 312 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual
156. puliittimi joiden avulla on mahdollista k ytt lis tuuletinta ohjata tuuletusventtiili ja k ytt j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla RS 232 RS 485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 143 312 10 Ohjek sikirja T m k sikirja k ytt seuraavanlaisia merkint j HUOMIO Huomio merkinn t varoittavat toimenpiteist joiden laiminly nti voi johtaa laitteen vaurioitumiseen VOV Varoitus merkint jen teht v n on kiinnitt k ytt j n huomio erityisiin toimintatapoihin joiden virheellinen suorittaminen voi aiheuttaa vakavia henkil vahinkoja Huomiot sis lt v t t rke tekstist otettua tietoa 144 312 TV 1001 Navigator User Manual 87 900 945 01 1 Ohjek sikirja 10 Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n si
157. pumps are used with the standard rack controller it is necessary to utilize the air cooling kit model 969 9315 Figure 36 Fan specification a air flow 55 1 s 120 CFM a input voltage 120 Vac 50 60 Hz maximum power 17 W dimensions 127 x 127 mm 5 x 5 inches To fix the fan to the pump position it ensuring that the holes in the plate line up with those in the pump base Insert the respective washers and screws and tighten with a screwdriver TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Connect the fan to the controller Figure 37 TV 1001 Navigator User Manual 87 900 945 01 1 283 312 17 Technical Information Water Cooling Kit Installation 284 312 Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers are 969 9337 metal lic model and 969 9347 plastic model Figure 38 Model 969 9337 OL Fr x X E Figure 39 Model 969 9347 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Water Cooling Kit Installation CAUTION The items of the plastic model kit must be assem bled as shown in the following
158. r Moment dokr cenia ISO 200 F 12 5 Nm 180250 gt 12 5 Nm Dla kotnierzy F ruby stalowe musza posiadac klase gt 8 8 TV 1001 Navigator User Manual 87 900 945 01 1 Podrecznik Instrukcji 12 Turbopompa z kotnierzem wejsciowym ConFlat musi by zamocowana do komory pr zniowej poprzez odpowiednie drobne uktady mechaniczne firmy Agilent W celu dodatkowych informacji nalezy zapozna sie z dodatkiem Technical Information TV 1001 Navigator moze by zainstalowany w jakiejkolwiek pozycji System TV 1001 Navigator nie moze by mocowany poprzez wtasna podstawe UWAGA TV 1001 Navigator nalezy do drugiej kategorii instalacji lub nadnapiecia przewidzianej przez norme EN 61010 1 Dlatego tez podtaczy urzadzenie do linii zasilania kt ra spetni te wymogi TV 1001 Navigator posiada konektory wejsciowe wyjsciowe i dla komunikacji szeregowej kt re musza by podtaczone do obwod w zewnetrznych w spos b aby zadna czes znajdujaca sie pod napieciem nie mogta by dostepna Nalezy upewni sie Ze izolacja podtaczonego urzadzenia do TV 1001 Navigator posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 Aby zainstalowa opcjonalne akcesoria nalezy zapozna sie z Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 177 312 12 Podrecznik Instrukcji Uzytkowanie W tym paragrafie zosta y przedstawione g wne procedury operat
159. r Cooling Kit Installation 280 Water Cooling Kit Installation 284 Vent Accessories 287 TV 1001 Navigator User Manual 87 900 945 01 1 Contents Vibration Isolator Installation 291 Purge Valve Installation 292 Serial Cable Installation 293 TV 1001 Controller Installation 294 Pump Used with Corrosive Gases302 Pump Used in Presence of Magnetic Fields 304 Accessories and Spare Parts 305 TV 1001 Navigator User Manual 87 900 945 01 1 13 312 Contents 14 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari Informazioni Generali 16 Immagazzinamento 19 Preparazione per l installazione 20 Installazione 21 Fissaggio della pompa 22 Uso24 Accensione ed Uso del TV 1001 Navigator25 Arresto del TV 1001 Navigator 26 Arresto di Emergenza 26 Manutenzione 27 Smaltimento 28 Traduzione delle istruzioni originali o Agilent Technologies 16 15 312 1 Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantita di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata NUTIA ZN Per evita
160. ragem do TV 1001 Navigator Para parar o TV 1001 Navigator suficiente desligar a tens o de alimentac o O controller incorporado para imediatamente a bomba Para a seguranca do operador o controller Turbo V deve ser alimentado com um cabo de alimentac o com 3 fios ver a tabela das partes gue podem ser encomendadas eguipado de uma tomada aprovada a n vel internacional Utilize este cabo e tomada juntos com uma tomada adeguadamente conectada a terra para evitar chogues el ctricos e satisfazer os reguisitos das normas CE As altas tens es gue se desenvolvem no controller podem provocar graves danos ou at morte Antes de realizar operac es de manutenc o no interno da unidade desligar o cabo de alimentac o Paragem de Emerg ncia 82 312 Para parar o TV 1001 Navigator em condic es de emer gencia necess rio desligar do controller o cabo de alimentac o TV 1001 Navigator User Manual 87 900 945 01 1 Manual de Istruc es 5 Manutenc o O TV 1001 Navigator n o requer qualquer manutenc o Todas as operac es devem ser efectuadas por pessoal autorizado ATENCAO Antes de executar qualquer operac o no sistema deslig lo da alimenta o introduzir ar na bomba abrindo a v lvula especifica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent que permite obter u
161. re danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 16 312 TV 1001 Navigator User Manual 87 900 945 01 1 Istruzioni per l uso 1 Informazioni Generali Questa apparecchiatura amp destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilita dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il TV 1001 Navigator amp un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller Il sistema amp capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liguidi o di particelle solide L effetto pompante e ottenuto tramite una turbina rotante ad elevata velocit 38000 giri min max mossa da un motore elettrico trifase ad alto rendimento Il TV 1001 Navigator e totalmente privo di agenti contaminanti ed e quindi adatto per applicazioni che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i quali possibile alimentare un ventilatore aggiu
162. re eseguito da personale autorizzato Prima di effettuare qualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto amp possibile usufruire del servizio di riparazione Agilent che permette di ottenere una pompa rigenerata in sostituzione di quella guasta Prima di rispedire al costruttore una pompa per riparazioni o advanced exchange service 6 indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TV 1001 Navigator User Manual 87 900 945 01 1 21 312 1 Istruzioni per uso Smaltimento Significato del logo WEEE presente sulle etichette II simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunita Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contatta
163. re il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita N hav N TI Y NA N J S N OY 28 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeine 30 Lagerung 33 Vor der Installation 34 Installation 35 Befestigung der Pumpe 36 Gebrauch 38 Einschaltung und Gebrauch von Modell TV 1001 Navigator 39 Stoppen von Modell TV 1001 Navigator 40 Not Aus 40 Wartung 41 Entsorgung 42 Ubersetzung der Originalanleitungen I a Agilent Technologies 29 312 2 Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine grof e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden WARNUNG Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 30 312 TV 1001 Navigator User Manual 87 900 945 01 1 Gebra
164. reater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator TV 1001 Navigator TV 1001 Navigator User Manual 87 900 945 01 1 3 312 TV 1001 Navigator 4 312 TV 1001 Navigator User Manual 87 900 945 01 1 Contents Contents 1 Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni Generali 17 Immagazzinamento 19 Preparazione per l installazione 20 Installazione 21 Fissaggio della pompa 22 Uso 24 Manutenzione 27 Smaltimento 28 2 Gebrauchsanleitung 29 Sicherheitshinweise f r Turbomolekula
165. rength steel clamps like Agilent model IC63250DCMZ The following table shows for each flange the necessary number of IC63250DCMZ clamps and the relevant fixing torgue FLANGE N FIXING TOROUE 35 Nm ISO 250 6 35 Nm The following table shows for each ISO F flange the necessary number of screws and the relevant fixing torque Tab 2 FIXING TORQUE 180 200 F 12 5 Nm The class of the steel screws for F flange must be gt 8 8 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TV 1001 Navigator ca be installed in any position The TV 1001 Navigator cannot be fixed by means of its base CAUTION The TV 1001 Navigator belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 1001 Navigator has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the TV 1001 Navigator is adequate even in the case of single fault as per directive EN 61010 1 TV 1001 Navigator User Manual 87 900 945 01 1 233 312 16 Instructions for Use Use
166. rial connection A Windows based software is available optional TV 1001 Navigator User Manual 87 900 945 01 I 247 312 17 Technical Information Technical Specification Tab 3 Pumping speed with inlet screen 150 160 CFF 10 ISO 200 ISO 250 N2 790 l s 950 I s 1050 l s He 820 l s 870 l s 900 s Hz 860 l s 900 I s 920 l s Compression ratio Nz gt 1 x 109 1 x 109 He 5 x 107 1 x 107 Hz 2 x 106 1 x 106 Base pressure lt 1 x 10 10 mbar with recommended forepump lt 1 x 10 10 Torr According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump Inlet flange ISO 160 ISO 200 ISO 250 CF 10 Foreline flange KF 40 NW Rotational speed 38000 rpm Start up time lt 4 minutes Recommended forepump DS 402 TriScroll 300 Operating position Any Operating ambient temperature 5 C to 35 C Bakeout temperature 120 C at inlet flange max CF flange 80 C at inlet flange max ISO flange Vibration level displacement lt 0 01 um at inlet flange Lubricant permanent lubrication Cooling requirements Forced air or water Coolant water Minimum flow 200 I h 0 89 GPM Temperature 10 C to 20 C Noise level lt 45 dB A at 1 meter 248 312 TV 1001 Navigator User Manual 87 900 945 01 1 Power supply Input voltage Input freq Max input pow
167. rmation TV 1001 Navigator User Manual 87 900 945 01 1 45 312 3 Mode d emploi Cette notice utilise les signes conventionnels suivants f r Inn Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement Vappareillage AWTS KIA SN Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale gui effectu e de facon impropre risgue de provoguer de graves l sions Les notes contiennent des renseignements importants isol s du texte 46 312 TV 1001 Navigator User Manual 87 900 945 01 1 Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des pompes Turbomol culaires Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 2 non condensante a Ala premiere utilisation les pompes turbomol culaires doivent toujours tre mises en marche par le client en mode soft Start a Le temps de stockage d une pompe turbomol culaire est de 10 mois a compter de la date dexp dition Mein En cas de d passement du temps de stockage pour toutes raisons la pompe doit tre retourn e en usine Pour tout renseignement contacter le re
168. rpumpen 30 Allgemeine Informationen 31 Lagerung 33 Vor der Installation 34 Installation 35 Befestigung der Pumpe 36 Gebrauch 38 Wartung 41 TV 1001 Navigator User Manual 87 900 945 01 1 5 312 Contents 6 312 Entsorgung 42 Mode d emploi 43 Normes de s curit pour Pompe Turbomol culaires 44 Indications g n rales 45 Stockage 47 Preparation pour l installation 48 Installation 49 Fixation de la pompe50 Utilisation 52 Entretien 55 Mise au rebut 56 Manual de istrucciones 57 Indicaciones de Seguridad para Bombas Turbomoleculares 58 Informaci n general 59 Almacenamiento 61 Preparaci n para la instalaci n 62 Instalaci n 63 Fijaci n de la bomba 64 Uso 66 Mantenimiento 69 Eliminaci n 70 TV 1001 Navigator User Manual 87 900 945 01 1 Contents 5 Manual de Istruc es 71 Indicac es de Seguranca para Bombas Turbomoleculares 72 Informac es gerais 73 Armazenagem 75 Preparac o para a instalac o 76 Instalac o 77 Fixac o da bomba 78 Utilizac o 80 Manutenc o 83 Eliminac o 84 6 Bedrijfshandleiding 85 Veiligheidsinstructies voor Turbomoleculaire pompen 86 Algemene informatie 87 Opslag 89 Uitpakken 90 Installatie 91 Bevestiging van de pomp 92 Gebruik 94 Onderhoud 97 Afvalverwerking 98 7 Istruktionsbog 99 Sikkerhedsanvisninger for Molekyl re turbopumper 100 TV 1001 Navigator User Manual 87 900 945 01 1 1 312 Contents 8 312 Generel information 101 Opbevaring 103
169. rt quando ricevute e messe in funzione per la prima volta a il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione Nuit Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent TV 1001 Navigator User Manual 87 900 945 01 1 19 312 1 Istruzioni per uso Preparazione per l installazione Il TV 1001 Navigator viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TV 1001 Navigator e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente II materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente una da Onde evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata Figura 1 II TV 1001 Navigator non puo essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comungue di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquina mento da polvere 20 312 TV 1001 Nav
170. same Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus TV 1001 Navigator User Manual 87 900 945 01 1 39 312 2 Gehrauchsanleitung Stoppen von Modell TV 1001 Navigator Zum Stoppen von Modell TV 1001 Navigator ist die Versorgungsspannung abzuschalten Der eingebaute Controller sorgt f r den sofortigen Pumpenstopp WARNUNG F r die Sicherheit des Bedieners muss der Controller Turbo V mit einem dreidr htigen Stromkabel siehe Tabelle der Bestellteile versorgt werden das mit einem auf internationaler Ebene genehmigten Stecker ausgestattet ist Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforderungen der EG Richtlinien zu entsprechen Die Hochspannungen die sich im Controller entwickeln k nnen zu schweren Sch den oder zum Tod f hren Vor den Wartungsarbeiten innerhalb der Einheit die Stromkabel trennen Not Aus Zur Stillsetzung von Mod TV 1001 Navigator in Notsituationen ist vom Controller das Netzkabel abzuziehen 40 312 TV 1001 Navigator User Manual 87 900 945 01 1 Wartung Gebrauchsanleitung 2 Modell TV 1001 Navigator erfordert keine Wartung Eventuelle Eingriffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden WARNUNG Vor jedem Eingriff am System den Netzst
171. sen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen 94 312 TV 1001 Navigator User Manual 87 900 945 01 1 Bedrijfshandleiding 6 Inschakeling en gebruik van de TV 1001 Navigator Om de TV1001 Navigator in te schakelen is het voldoende om deze van stroom te voorzien De ingebouwde controller herkent automatisch de aanwezigheid van interlock en startsignalen en start de pomp De Soft Start modus is voorzien om de pomp na een langdurige periode van stilstand in te schakelen Om met Soft Start te starten moet bovengenoemde modus via de software worden vrijgegeven zie paragraaf RS 232 485 COMMUNICATION DESCRIPTION in de bijlage Technical Information De groene LED LD1 op het paneel van de basis van de TV 1001 geeft door de freguentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal a knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waiting for interlock a knippert snel periode van circa 200 ms fouttoestand TV 1001 Navigator User Manual 87 900 945 01 1 95 312 6 Bedrijfshandleiding Afzetten van de TV 1001 Navigator Hiervoor behoeft slechts de stroomvoorziening te worden onderbroken De ingebouwde controller stopt onmiddellijk de pomp WAARSCHUWING Voor de vei
172. ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta AN NE pe 4 X L N 70 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 72 Informac es gerais 72 Armazenagem 75 Preparac o para a instalac o 76 Instalac o 77 Fixac o da bomba 78 Utilizac o 80 Acendimento e Utilizac o do TV 1001 Navigator Paragem do TV 1001 Navigator 82 Paragem de Emerg ncia 82 Manutenc o 83 Eliminac o 84 Traduc o das instruc es originais che Agilent Technologies 81 71 312 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instruc es t m uma alta guantidade de energia cin tica devida a alta velocidade de rotac o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rotac o poderia ser liberada ATENCAO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instruc es de instalac o descritas neste manual 72 312 TV 1001 Navigator User Manual 87 900 945 01 1 Ma
173. t ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta TV 1001 Navigator User Manual 87 900 945 01 1 145 312 10 Ohjek sikirja Valmistelut asennusta varten TV 1001 Navigator toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TV 1001 Navigatorin putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta JE i i e J PV a gt 4 Kuva 1 TV 1001 Navigator ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen 146 312 TV 1001 Navigator User Manual 87 900 945 01 1 Asennus Ohjek sikirja 10 Pumppua ei tule asentaa ja tai k ytt ymp rist ss
174. t Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if reguesting a billable service 3A LI Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair upgrade _IConsignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this reguirement presents a problem The eguipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR 0 HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed C Toxic L Corrosive Reactive 1 Flammable El Explosive 1 Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to an
175. t fall finns risk f r sv ra personskador Detta visar p viktig information i texten 116 312 TV 1001 Navigator User Manual 87 900 945 01 1 Bruksanvisning 8 F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomrade 20 C till 70 C a Relativ fuktighet O till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r f rsta g ngen a De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet maia Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information TV 1001 Navigator User Manual 87 900 945 01 1 117 312 8 Bruksanvisning F rberedelser f r installation OBSERVER TV 1001 Navigator levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TV 1001 Navigator inte tappas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 2 och uppfyller EU direktiv 85 399 om milj skydd Komponenter som skall
176. tart the pump after it has stopped for a long time To start with the Soft Start function on activate the mode in the software see paragraph RS 232 485 COMMUNICATION DESCRIPTION in the Technical Information appendix The green LED located on the TV 1001 Navigator base front panel indicates with its flashing freguency the system operating conditions a with no flashing the pump is normally rotating slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status a fast flashing period of about 200 ms error condition TV 1001 Navigator User Manual 87 900 945 01 1 235 312 16 Instructions for Use TV 1001 Navigator Switching off To switch off the TV 1001 Navigator it is necessary to re move the mains The integrated controller immediately stops the pump WARNING The Turbo V controller must be powered with 3 wire power cord see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable Emergency Stop To immediately stop the TV 1001 Navigator in an emergency condition it is necessary to remove the supply cable from the mains plug 236 31
177. temming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De TV1001 Navigator is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 38 000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De TV 1001 Navigator is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen De TV 1001 Navigator is bovendien van hulpconnectors voorzien waarmee een extra ventilator kan worden gevoed de luchtuitlaatkleppen kunnen worden aangestuurd en waarmee het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend RS 232 RS 485 In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical information TV 1001 Navigator User Manual 87 900 945 01 1 87 312 6 Bedrijfshandleiding Deze handleiding maakt van de volgende symbolen gebruik ali 74 P ie Bij dit synbool staat tekst met procedures die indien niet opgevolgsd schade aan apparatuur kunnen veroorzaken N R
178. tice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Le TV 1001 Navigator est un systeme int gr constitu d une pompe turbomol culaire concue pour des applications de vide pouss et ultrapouss et dot d un contr leur Le systeme est a m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce a une turbine tournant a vitesse lev e 38000 tr min maxi mue par un moteur lectrique triphas a haut rendement Le TV 1001 Navigator est totalement exempt d agents polluants et il est par cons quent indiqu pour toutes les applications exigeant un vide propre Le TV 1001 Navigator est en outre dot de connecteurs auxiliaires permettant d alimenter un ventilateur suppl mentaire de commander la soupape de ventilation de le piloter a distance a l aide d un ordinateur host connect par ligne s rielle Les paragraphes suivants fournissent toutes les indications n cessaires a garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Info
179. tijdens het trans port veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TV 1001 Navigator niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming Figuur 1 De TV 1001 Navigator kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen 90 312 TV 1001 Navigator User Manual 87 900 945 01 1 Bedrijfshandleiding 6 Installatie De pomp mag niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig Zijn max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 35 C zie grafiek in de bijlage Technical Information relatieve vochtigheid 0 90
180. tor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 226 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 General Information This eguipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the eguipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the eguipment or any action contrary to that provided for by specific national standards The TV 1001 Navigator is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liguids or solid particles The pumping action is obtained through a high speed turbine max 38000 rpm driven by a high performance 3 phase electric motor The TV 1001 Navigator is free of contaminating agents and therefore is suitable for applications reguiring a clean vacuum It is eguipped with auxiliary connectors to supply an additional fan to control the vent valve to be controlled from a remote site by means o
181. trider mot g llande lokala f reskrifter Systemet TV 1001 Navigator best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin max 38000 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i TV 1001 Navigator som d rf r passar f r till mpningar som kr ver ett rent vakuum TV 1001 Navigator har dessutom en hj lpkontakt som g r det m jlig att f rse str m till en extra ventilator att kontrollera avluftningsventilen och att fj rrstyra den med hj lp av en host dator som r ansluten genom seriell f rbindelse RS 232 RS 485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical information TV 1001 Navigator User Manual 87 900 945 01 1 115 312 8 Bruksanvisning I bruksanvisningen anv nds f ljande standardrubriker Musa Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna anna
182. tum VORSICHT Falls die Lagerdauer aus verschiedenen Gr nden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter TV 1001 Navigator User Manual 87 900 945 01 1 33 312 2 Gehrauchsanleitung Vor der Installation VORSICHT Modell TV 1001 Navigator wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle za melden Modell TV 1001 Navigator ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem fs zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefasst werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden gt i F JO c EN Abbildung 1 Modell TV 1001 Navigator kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 34 312 TV 1001 Navigator User Manual 87 900 945 01 1 Gebrauchsanleitung 2 Installation Die Pumpe darf nicht in Umgebungen die ungesch tzt vor Wetter Regen Frost
183. tupom ktor je v rozpore so pecifick mi tandardmi danej krajiny Zariadenie TV 1001 Navigator predstavuje integrovan syst m s turbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi r chla turb na max 38000 ot ok min tu poh an vysokov konn m 3 f zovym elektrick m motorom Zariadenie TV 1001 Navigator neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie je vybaven pomocn mi konektormi na pripojenie al ieho ventil tora na ovl danie vetracieho ventilu a kv li mo nosti ovl dania zo vzdialen ho miesta pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 199 312 14 N vod na Obsluhu N vod na pouzitie obsahuje tieto tandardn oznacenia POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia 1 4 34 4H 0 Nebezpe ie maj s stredi pozornos pr
184. u 202 In tal cia 203 Upevnenie v vevy 204 Pou itie 206 Zapnutie a pou itie zariadenia TV 1001 Navigator 207 Vypnutie zariadenia TV 1001 Navigator 208 N dzov zastavenie 208 dr ba 209 Likvid cia 210 Preklad origin lneho n vodu E Agilent Technologies 17 312 14 N vod na Obsluhu Bezpecnostn pokyny pre Turbomolekul rne vyvevy Turbomolekul rne vyvevy opisan v nasleduj cej priru ke sa vyznacuj vysokou kinetickou energiou a to vd aka vysokej rychlosti ot cania v kombin cii so Specifickou hmotnostou svojich rotorov V pr pade syst movej poruchy napr pri kontakte rotora a statora alebo pri zlomen rotora sa moZe uvolnit rotacn energia 13 132148 MW Pokyny k in tal cii uveden v tomto n vode musia by d sledne dodr ovane aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy 198 312 TV 1001 Navigator User Manual 87 900 945 01 1 N vod na Obsluhu 14 Vseobecn inform cie Toto zariadenie je ur en pre profesion lnych pracovnikov Sk r nez za nete zariadenie pou ivat pre itajte si n vod na pou itie a v etky dal ie pokyny spolo nosti Agilent Spolo nost Agilent nenesie Ziadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iasto nom s lade s t mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek pos
185. ual 87 900 945 01 1 59 312 4 Manual de istrucciones Este manual utiliza las convenciones siguientes ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que al no respetarse podr an provocar da os al equipo POLE AH Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una operaci n especifica que al no realizarse correctamente podr a provocar graves lesiones personales Las notas contienen informaci n importante extraida del texto 60 312 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones a durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales a temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez a el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ATENCI N En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores i
186. uchsanleitung 2 Allgemeine Informationen Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem fsem Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und MifSachtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Modell TV 1001 Navigator ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuumanwendungen integriert mit einem entsprechenden Controller besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine max 38 000 1 min erreicht die von einem Hochleistungs drehstrommotor angetrieben wird Modell TV 1001 Navigator enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r Anwendungen die ein sauberes Vakuum erfordern Modell TV 1001 Navigator verf gt des weiteren ber Zusatzanschl sse ber die ein zus tzlicher Ventilator versorgt das Entl ftungsventil gesteuert oder die Vorrichtung von einem Host Computer ber eine serielle Leitung gesteuert werden kann RS232 RS485 In den folgenden Abschnitten sind alle erforderlichen Informationen f r
187. ud nebude nainstalovana do syst mu a tim se ochr nila pred jak mkoli zne i t n m a prachem 188 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instalace N vod k Pou iti 13 Vyv vu neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je treba dodr ovat n sledujici podm nky dan prostred m a maximalni tlak Z bary nad atmosf rick m tlakem a teplota od 5 C do 35 C viz diagram tlak teplota v pr loze Technical Information relativni vlhkost 0 95 bez sr en P ed p ipojen m turbomolekul rn vyv vy do syst mu nesund vejte adhezn a ochrann v ko Postava 2 V pr tomnosti magnetick ch poli se v v va mus chr nit feromagnetickym stin nim Viz podrobn informace v p loze Technical Information Vyv va TV 1001 Navigator se mus pripojit k prim rn mu erpadlu viz Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 189 312 13 Navod k Pou iti Monta vyv wy Pokud dojde k poru e rotoru propojeni vyv vy se systemem by mohlo byt vystaveno velk mu to ivemu momentu Pokud toto propojeni nebude schopno wydr et tento to ivy moment vyv va by se mohla odpojit od systemu nebo kryt elektromotoru by se mohl odpojit od pla t vyv vy V t
188. uts ttas f r vakuum f r inte hanteras med bara h nder pga kontamineringsrisken Anv nd alltid handskar eller liknande skydd Figur 1 Normal p verkan fr n omgivningen kan inte skada TV 1001 Navigator Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den 118 312 TV 1001 Navigator User Manual 87 900 945 01 1 Bruksanvisning 8 Installation Installera och anv nd inte pumpen i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar ver atmosf riskt tryck temperatur fran 5 C till 45 C se bild i Technical Information a relativ luftfuktighet 0 95 utan kondens 33103110 Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet Figur 2 I n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar TV 1001 Navigator m ste anslutas till en huvudpump se schemat i Technical information TV 1001 Navigator User Manual 87 900 945 01 1 119 312 8 Bruksanvisning Fasts ttning av pump VARNING I h ndelse av rotorfel kan anslutningen mellan pumpen och
189. v konn m trojf zov m elektromotorem Za zen TV 1001 Navigator neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vy aduj c ist vakuum Je vybaveno p davn mi konektory pro p ipojen p davn ho ventil toru ovl d n odvzdu ovac ho ventilu kter je ovl d n na d lku pomoc hostitelsk ho po ta e p ipojen ho s riovou linkou RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 185 312 13 N vod k Pou it Tento manual pou iva nasledujici standardni protokol POZOR V stra n hl en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen 3132418108 Varovn hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v p pad nedodr en mohly zp sobit v n raz Pozn mky obsahuj d le it informace p evzat z textu 186 312 TV 1001 Navigator User Manual 87 900 945 01 1 N vod k Pouziti 13 Uskladn ni Aby byla zajist na maxim ln provozuschopnost a spolehlivost turbomolekul rnich vyv v firmy Agilent musite dodr ovat n sledujici pokyny P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj
190. vironmental conditions must be respected maximum pressure 2 bar above atmospheric pressure a temperature from 5 C to 35 C see the diagram pressure temperature in the appendix Technical Information relative humidity O 95 non condensing CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system Figure 2 In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 1001 Navigator must be connected to primary pump see Technical Information TV 1001 Navigator User Manual 87 900 945 01 I 231 312 16 Instructions for Use Pump fixing WARNING If a rotor failure occurs the connection of the pump to the system could be 232 312 subjected to a significant torque If the connection is not sufficient to withstand that torque the pump could detach from the system or the motor housing could detach from the pump envelope In this case metal fragments could be projected from the pump or system which could cause serious injury or death and or damage to surrounding equipment Fix the TV 1001 Navigator in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torque of 8900 Nm around its axis For example the ISO K flange can be fixed using high st
191. vyv vy jak jsou popisov ny v nasledujicim navodu obsahuj velk mno stvi kinetick energie diky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefunk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie A 174234180 Pokyny k instalaci uveden v tomto n vodu musi b t p sn dodr ov ny za elem prevence po kozen za zen a zran n obsluhy 184 312 TV 1001 Navigator User Manual 87 900 945 01 1 N vod k Pouziti 13 Vseobecn informace Toto zarizeni je ur eno pro odborniky U ivatel by si m l pred pou it m zarizeni precist tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopravn nym z sahem do zafizeni nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v p slu n ch st tn ch norm ch V v va TV 1001 Navigator je integrovan syst m s turbomolekul rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na max 38000 ot min poh n n vysoce
192. wing example diagram Output V Freguency Hz Figure 15 Fault this open collector output signal is ON when a system fault condition is detected Programmable set point this open collector output signal is enabled when the reference guantity chosen freguency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vdc when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference guantity is the freguency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example a reference quantity frequency a threshold 500 Hz a hysteresis 1 activation type high level TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 v a Set point output Vdc 495 500 595 Frequency Hz Figure 16 The set point output stays at 0 Vdc until the fre quency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency be comes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings a reference quantity
193. y materi l zlikvidujte predpisanym sp sobom Materi l je 100 recyklovate n a spl a po iadavky smernice EEC 85 399 Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu A N Postava 1 Bezn vystavenie vplyvu prostredia nem ze zariadenie TV 1001 Navigator po kodit Napriek tomu je vhodne aby zariadenie zostalo zabalen az do in tal cie kv li prevencii kontamin cie prachom 202 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instal cia POZOR N vod na Obsluhu 14 Vyvevu nein talujte ani nepou ivajte v prostredi vystavenom vonkaj m vplyvom d sneh ad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny tlak 2 bary nad rov ou atmosf rick ho tlaku a teplota od 5 C do 35 C C pozri z vislos tlaku od teploty v dodatku Technical Information relat vna vlhkos 0 95 bez kondenz cie Neodstra ujte lepiacu p sku a ochrann uz ver sk r ne pripoj te turbov vevu k syst mu Postava 2 V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Techni
194. y third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature 1 1 1 1 21 2 1111 Pg 2 3 s Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the produci on Page 2 TURBO PUMPS and TURBO CONTROLLERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging EEG OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communicatio
195. y wlaczy TV 1001 Navigator wystarczy dostarczy napi cie zasilania Wbudowany sterownik rozpoznaje automatycznie obecno sygna w interlock u i uruchomienia i uruchamia pomp Tryb Soft Start przewidziano w celu w czenia pompy po d u szym okresie postoju Aby mo liwe by o uruchomienie przy aktywnym Soft Start nale y w czy w w tryb poprzez oprogramowanie patrz paragraf RS 232 485 COMMUNICATION DESCRIPTION w dodatku Technical Information Zielona dioda led znajduj ca si na panelu podstawy TV 1001 Navigator wskazuje z cz stotliwo ci w asnego migania stan operacyjny systemu a za wiecona na sta e pompa znajduje si w normalnych obrotach a miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock a miga szybko okres 200 ms stan b du TV 1001 Navigator User Manual 87 900 945 01 1 179 312 12 Podrecznik Instrukcji Zatrzymanie systemu TV 1001 Navigator Aby zatrzyma TV 1001 Navigator wystarczy odlaczy napiecie zasilania Wbudowany sterownik zatrzyma natychmiast pompe Dla zagwarantowania bezpieczeristwa operatorowi kontroler Turbo V powinien by zasilany kablem zasilajacym o 3 przewodach zobacz tabele czesci dajacych sie zam wi i zamontowana wtyczka zgodna z miedzynarodowymi normami Kabel ten podtaczy wraz z wtyczka do kontaktu uziemionego celem unikniecia porazen pradem elektrycznym
196. ys gr l a t pfesz lts g szolg ltat k belt V szle ll t s A TV 1001 Navigator v szhelyzetben val azonnali le ll t s hoz el kell t vol tani a t pk belt a h l zati dugaszb l 166 312 TV 1001 Navigator User Manual 87 900 945 01 1 Felhaszn l i K zik nyv 11 Karbantart s A TV 1001 Navigator nem ig nyel karbantart st A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie VESZ LY A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett Miel tt jav t sra vagy cser re visszak ldi a rendszert a gy rt hoz az ehhez a kezik nyvh z csatolt Eg szs g s biztons g rlapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz Az rlap egy m solat t sz ll t s el tt el kell helyezni a rendszert tartalmaz csomagba Ha a szivatty t le kell selejtezni azt a specifikus nemzeti el r soknak megfelel en rtalmatlan tani kell TV 1001 Navigator User Manual 87 900 945 01 1 167 312 11 Felhaszn l i K zik nyv Megsemmis t s 168 312 A c mk n jelenl v WEEE logo jelent
197. yst me au moyen d une connexion en mesure de r sister un couple de 8900 Nm autour de son axe La bride d entr e ISO K peut tre fix e l aide d taux en acier haute r sistance comme le mod le Agilent IC 63250 DCMSZ Le tableau suivant indique pour chaque collerette le nombre de pinces IC63250 DCMZ n cessaires et le couple de serrage appliquer Tab 1 d Bride N Couple de serrage 20 meen 10 MI _ 150 200 8 35 Nm Le tableau suivant indique pour chaque bride d entr e ISO F le nombre de vis n cessaires et le couple de serrage a appliquer TV 1001 Navigator User Manual 87 900 945 01 1 Mode d emploi 3 La turbopompe a bride d entr e ConFlat doit tre fix e a la chambre vide l aide des l ments m caniques Agilent pr vus cet effet Pour tout autre d tail se reporter l appendice Technical Information Le TV 1001 Navigator peut tre install e dans n importe quelle position Le TV 1001 Navigator ne peut tre fix par sa base ATTENTION Le TV 1001 Navigator appartient la deuxi me cat gorie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie Le TV 1001 Navigator dispose de connecteurs pour les entr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de facon qu aucune partie sous tension ne soit accessible S
198. yt odstraneny spolu s be nym domacim alebo priemyselnym odpadom ale sa musi odstranit ako deleny odpad Vyzyvame preto kone n ho uZivatela aby sa skontaktoval s dod vatelom pristroja i uz je to vyrobca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja 210 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Splo ne informacije 212 Shranjevanje 215 Priprava za monta o 216 Monta a 217 Pritrjevanje rpalke 218 Uporaba 220 Vklop in uporaba naprave TV 1001 Navigator Izklop naprave TV 1001 Navigator222 Zaustavitev v sili 222 Vzdr evanje 223 Odlaganje opadkov 224 Prevod navodil v izvirniku 212 221 E Agilent Technologies 211 312 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 212 312 TV 1001 Navigator User Manual 87 900 945 01 1 Priro nik za Navodila 15 SploSne informacije
199. ywne Przed zastosowaniem systemu nale y wykona wszystkie po czenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr niowej temperatura na ko nierzu nie mo e przekroczy 120 C Nigdy nie nale y uruchomi pomp w przypadku kiedy ko nierz wej ciowy nie jest pod czony do komory lub nie jest zamkni ty z ko nierzem zamkni cia Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura mo e spowodowa uszkodzenia cia a na osobach Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza pompy zastosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 bar ponad ci nienie atmosferyczne Dla pompowania niszcz cych gaz w pompy te s wyposa one w odpowiedi wlot poprzez kt ry nale y dostarczy pompie przep yw oboj tnego gazu Azot Argon dla zabezpieczenia o ysk Patrz dodatek Technical Information 178 312 Kiedy pompa jest stosowana do pompowania gaz w toksycznych atwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa pompy w obecno ci gaz w wybuchowych TV 1001 Navigator User Manual 87 900 945 01 1 Podrecznik Instrukcji 12 W czenie i U ytkowanie systemu TV 1001 Navigator Ab

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