PET User Manual
Contents
1. Rev J January 2001 Cooling Ring Quartz Chamber O Ring Cooling Jacket Ignition Chamber Assembly Thomas Pinch Clamp Quartz Injector Thermocouple Assembly Hydrogen Teflon Fitting Oxygen Teflon Fitting Lamp Mounting Assembly Lamp Socket Halogen Lamp 14 15 16 17 18 19 20 21 22 23 24 25 Perforate Cover Assembly Clamping Plate Skin Temperature Assembly Support Pad Ceramic Spacer Stand Off Power Connector Assembly UV Detector Assembly Extension Pipe Level Mechanism Main Adjustment Knob Connection Board Assembly Pyrogenic External Torch 900 SERIES 15 o tn zZ PET 986 1 Figure 3 16 900 SERIES Pyrogenic External Torch Rev J January 2001 PET 988 Figure Description S09 EDU OT epe 39 wc gt Rev J January 2001 Cooling Ring Quartz Chamber O Ring Cooling Jacket Ignition Chamber Assembly Thomas Pinch Clamp Quartz Injector Thermocouple Assembly Hydrogen Teflon Fitting Oxygen Teflon Fitting Lamp Mounting Assembly Lamp Socket Halogen Lamp 14 15 16 17 18 19 20 21 22 23 24 Perforate Cover Assembly Clamping Plate Skin Temperature Assembly Support Pad Ceramic Spacer Stand Off UV Detector Assembly Power Connector Assembly Level Adjustment Screw Level Adjustment Screw Nut Connection Board Assembly Pyrogenic External Torch 900 SERIES 12. 729 o EX oc 569 N onu o N 0000000 o o o o o o imn ES E a ECH 90 ONS wo o 9 8 n 2 o o nooooodon o 3 M o es 9 02 Ge o HH SZ EE 210 82 ein zn idw o 509202 AINO An NOHOMOL D UV ONLY TORCH ON REAR 5 PIB 987 PCB Placement including Jumpers Configuration Set Up 2 D Figure 1 Component Side 10 900 SERIES Pyrogenic External Torch Rev J January 2001 2 0 TECHNICAL DATA 2 1 Materials Main Frame Electropolished Stainless Steel and Aluminum black anodized construction Combustion Chamber Quartz GE 214 or equivalent Norton Silicon Carbide grains encapsulated in quartz Injector Precision machined Quartz GE 214 or equivalent Steam Outlet Standard 35 25 or 28 15 female ball joint NOTE For PET 989 and PET 993 compatible with SiC process tubes the female ball joint of the steam outlet underlaps the Crystar male ball joint by 10 from center to avoid quartz cracking due to thermal expansion 2 2 Dimensions Standard PET 986 Footprint 450 x 150 mm Height 252 mm minimum Low Profile PET 988 Foot print 450 x 150 mm Height 210mm minimum SiC PET 989 Footprint 450 x 150 mm
3. 02 ON D DELAY 5 10 SECONDS PP NO v H2 ON 1 ves WV DELAY 2 5 SECONDS LAMPS OFF lt L ALARM Loch END _ E 2 lt SKIN TEMP ALARM Figure 4 1 Steam Start Recipe Recommended Flow Chart Rev J January 2001 Pyrogenic External Torch 900 SERIES 29 4 2 Operational Description Whenever and MFC setpoints are programmed and the respective solenoids are requested to energize the PIB 987 Torch Controller begins the following sequence l Start Input from DDC turns on START LED Turn on ignition lamps LAMP1 LED and LAMP2 LED are lit Turn on air coolant solenoid when temperature reaches 70 C solenoid is inhibited until reaching ignition condition SCR 399 UB Ignition chamber reaches 760 C within 45 seconds and the undertemp thermocouple verifies temperature 760 C IGNITION LED is lit and the ignition temp output is activated solenoid is activated H ENABLE LED is lit Ignition will occur within 10 seconds through the DDC recipe 59 209 zt 2 Torch On the UV Detector confirms the presence of a flame 10 The TORCH ON LED is lit only when lamps are turned off by the DDC recipe 11 The and MFCs are ramped to process setpoints by the DDC WARNING Semi S 2 standards require the installer of the PET 900 series with the PIB 987 controller to u
4. During Ignition Period AC 110 230 VAC 50 60Hz 1100V A for maximum of 2 minutes During Process Period 20VA max for the PIB only Rev J January 2001 Pyrogenic External Torch 900 SERIES 12 2 8 2 9 Rev J January 2001 Safety Features Ignition Temperature UV Detector Induction Current Sensor Skin Temperature Exterior Cover Options Configuration Stages System Configuration System Height Software Measured by a type K thermocouple mounted in a quartz well inside the injector located near point of ignition Spectral sensitivity 185 to 260 nm suitable for Hydrogen flame indication LED on display at the External Torch for Flame On Ensures Halogen lamps functionality Measured by a thermistor sets alarm on PIB 987 if skin temperature exceeds 90 C Alarm does not stop process The exterior cover of the External Torch system is a perforated electropolished Stainless Steel box to protect against burns Interchangeable left and right configuration by changing direction of perforated cover and ignition chamber assembly cover According to model number With or without bypass various ball joint types System height can be adjusted to meet needs Customized controller software available upon request Pyrogenic External Torch 900 SERIES 13 3 0 3 1 3 2 INSTALLATION Safety Installation of the External Torch must be performed by a competent technician When installing
5. Section 6 0 Spare Parts amp Accessories pg 38 39 3 Drawing of new lamps connector Assy on the PIB rear Plate pg 8 1 0 1 1 1 2 1 3 1 3 1 INTRODUCTION Scope of this Manual This manual provides the installation adjustment operation and maintenance procedures of the PET 900 series m 986 m 988 m 989 m PET 992 m 993 m PIB 987 Torch Controller General Features The PET 900 Series includes the following features m Simple to operate m Easy to maintain m Operational status LED display m Alarm status LED display m Safety interlocks Adapts to most furnace gas system configurations m Minimal impact on process duration Description Overview The External Torch safely ignites a controlled mixture of Hydrogen and Oxygen and maintains a flame for generating high purity water vapor or steam Since the External Torch is mounted outside the main process chamber steam for wet pyrogenic oxidation processes can be delivered to the process chamber with minimal impact on the process chamber s temperature profile The PET 900 series including all PET MODELS 986 988 989 992 993 consists of the External Torch where O combustion occurs and PIB 987 Torch Controller which controls ignition temperature condition and flow Digital and analog outputs from the PIB 987 can be hardware and software interlocked with the furnace controller Rev J January 20
6. 2 3 Insert lamps assembly and close lamp base stopper screw Cooling System and Quartz Components Dismantling WARNING When handling quartz parts always wear plastic gloves Do not attempt to touch quartz it might be hot l Disconnect air inlet and exhaust plumbing connections from Cooling Chamber Open Perforated Cover Remove TC from Injector Release gaspipe holder Dismantle gasline Teflon fittings Disconnect Thomas clamp and remove Injector nb a EN ai Open Ignition Chamber Assembly cover For PET 992 only unscrew lamps assembly screw halfway 99 Remove the Quartz Chamber together with Cooling System 9 Remove the O Ring from Quartz Chamber 10 Gently pull back the Cooling Ring until it is released from the Cooling Jacket NOTE The Cooling Jacket must be pulled very carefully so you will not damage the quartz or break it 11 With a swing turn motion remove Cooling Ring through the Combustion Chamber ball joint and the quartz bypass 12 Gently pull out the Quartz Chamber Rev J January 2001 Pyrogenic External Torch 900 SERIES 35 Reassembly Reassemble in the reverse sequence to dismantling 1 Insert Chamber into Cooling Jacket 2 With a swing turn motion insert the Cooling Ring through the Combustion Chamber 3 Close the Union fitting screw finger tight 4 Place O Ring on Quartz Chamber B J 5 Connect the Injector with the Thomas clamp This can al
7. 987 Front Panel Rev J January 2001 Pyrogenic External Torch 900 SERIES 5 Torch Controller Indicators POWER Indicates power is available for system operation START Indicates an H request has initiated the automatic sequence of H interlocks and safety features LAMPS 1 amp 2 Indicate both ignition lamps are lit IGNITION Indicates the ignition lamp temperature monitored by a thermocouple is at least 760 C H2 ENABLE Indicates all safety interlocks have been satisfied and is permitted to flow TORCH ON Indicates detection of H flame by the UV detector SKIN OVERTMP Indicates the skin temperature of the torch housing is 90 C or above Test Mode The Test Mode push button is positioned inside a 3 mm hole located below the SKIN OVERTMP indicator LED Test Mode can be activated by pressing the button with any small tool inserted through the hole The Test Mode provides the option to check the PIB 987 and the External Torch manually up to the ignition point without having to start the system from the DDC Direct Digital Control and without turning on any gasses It is used for maintenance troubleshooting where the indicator lamps are checked and the achievement of correct temperature for ignition condition is tested Back Panel The PIB 987 back panel shown in Figure 1 3 includes the following connectors m External Torch connector connected to the D type connector on the interconnect board m Two I O co
8. see Figures 3 1 B 1 l 10 Rev J Detach the Teflon fittings connecting the Hydrogen and Oxygen inlets to the injector 9 10 see Figure 3 1 p 18 19 Detach the Thomas Clamp 6 and reattach it so that the handle will be positioned downward toward the right as in the following picture Detach the clamping plate 15 from the top plate Loosen total of 4 screws on the ignition chamber assembly 5 two screws on either side A B C D marked on Figure B 1 p 46 Take care not to misplace the spring washers Open the ignition chamber assembly 5 Insert lower Aluminum shield with semi circle pointing upward Insert with care by slightly lifting the quartz so that the shield slides easily into place Using the same screws of the ignition chamber assembly screw the shield into place using two lower screws A B The Oxygen and Hydrogen inlets 9 and 10 must be reinstalled ensuring that one of the straight sides of the bolt on the Teflon fittings be adjacent to the shield to ensure room for closing the top part of the ignition chamber assembly NOTE The Oxygen inlet 10 must always be on the opposite side of the axis of the perforated cover 14 Connect the upper aluminum shield to the upper part of the ignition chamber assembly using screws C and D ensuring the semicircle is pointing downward Check that all parts move smoothly without contact of quartz with the Aluminum January 200
9. Height 218 mm minimum Very Low Profile PET 992 Footprint 450 x 180 mm Height 145 mm minimum SiC PET 993 Footprint 450 x 150 mm Height 260 mm minimum PIB 987 107 x 130 x 260 mm 2 3 Weight External Torch including 9kg 20Ibs quartzware PIB 987 1 2165 Rev J January 2001 Pyrogenic External Torch 900 SERIES 11 24 2 5 2 6 2 7 Ignition Specifications Ignition Time From room temperature to above 800 C in 40 55 seconds using two 500W Halogen lamps No stand by heating of the ignition chamber Hydrogen Flow During Ignition 1 2 SLM Oxygen Flow During Ignition 1 2 SLM Hydrogen Oxygen Ratio 1 1 Flows Flame Specifications Flame Contour Maximum 20 mm in diameter Flame Length 130 mm at 1 SLM Hydrogen ratio of 1 8 150 mm at 7 SLM Hydrogen ratio of 1 8 130 mm at 10 SLM Hydrogen ratio of 1 8 130 mm at 15 SLM Hydrogen ratio of 1 8 Hydrogen Oxygen Ratio Between 1 9 1 and 1 1 NOTE 1 The flame is positioned in the middle of the combustion chamber The shape and diameter of the tip nozzle maintain the gas flow dynamics thus ensuring that flame is distanced from the quartz by 0 5 mm or more This design prevents any quartz devitrification NOTE 2 For Hydrogen flows up to 5 SLM the ratio can be 0 5 if required for an Oxygen diluted steam Cooling Specifications Air Flow 5 6 CFM 140 170 LM Air Inlet Pressure 60 80 PSI Air Inlet Swagelok type 1 4 Air Cooling Outlet HPS type NW 10 ISO KF Power
10. Maintenance Annual preventive maintenance is highly recommended to maintain superior performance During annual PM the following components should be cleaned or replaced 1 Quartz Combustion Chamber 2 Quartz Injector Tip NOTE Since the injector is cleaned by 10 1 HF the holes in the injector nozzle are etched so their diameter is increased Due to this fact it is recommended not to exceed a total of 500 minutes of quartz injector etch time in HF solution For quartz dismantling instructions see Section 5 5 Troubleshooting NOTE The PIB 987 Torch Controller includes a two minute delay feature before lamps can be turned on again If lamps don t light wait two minutes and try again The following tests should be performed whenever a problem arises or whenever the PET system has been idle for an extended period l Create a short torch test recipe at the DDC similar to your standard process recipe with a short steam cycle 2 Start the torch test recipe 3 Verify that LED s are lit in the correct sequence 4 Verify the existence of a flame by placing a mirror over the site port Test Mode The Test Mode option is a manual test mode used only for maintenance troubleshooting and it enables the user to check the PIB 987 and the External Torch up to ignition conditions without having to start the system from the DDC and without having to turn on any of the gasses In order to initiate the test mode insert a small tool
11. or if the UV detector confirms the presence of a flame After 2 3 minutes the lamps are automatically shut off by the controller The PIB 987 includes an automatic two minute delay before lamps can be turned on again Rev J January 2001 Pyrogenic External Torch 900 SERIES 7 Description of Ignition Condition The PIB 987 will enable the opening signal to the valve only when the External Torch reaches the ignition condition Ignition condition is reached when ignition temperature of 760 C or higher is achieved In any case of UV shutoff the PIB 987 will shut off the valve PIB 987 Electronic schematic is presented in Figure 1 4 PIB 987 PCB Placement is presented in Figure 1 5 Rev J January 2001 Pyrogenic External Torch 900 SERIES HE721C0510 amp 9 72140510 Figure 1 4 987 Electronic Schematic Rev J January 2001 Pyrogenic External Torch 900 SERIES 9 N3dO ATIVAYON 035010 ATIVAYON CC 82 THE ooooooon us B SY 22 Een d sm AWIL AN o e 1 tno ne OU L 98 o QNOO N9 NS Li Li Li LI Bzg ete 3dAL LI L1 LI LI 5555 5 a x KEES le 3dAL 8 5 5 z zzz 8 2 i d pou 9NILL3S MOT 610 OO F o e ojo Oo Siu o B ate Besse 9
12. the two upper screws and take out the whole UV Detector unit Reassemble in the reverse sequence to dismantling 2 For PET 992 PA 2 2 2 2 4 2 5 2 6 5 6 Service Disconnect the UV detector cooling tube at the T Swagelok fitting Disconnect the UV detector from the electronic board Open the 2 Philips screws on the rear side and remove the holder with UV detector unit remove the unit using a swing turn motion Disconnect the two front screws on the UV detector unit Disconnect the cooling inlet port fitting and tube Reassemble in the reverse sequence to dismantling Whenever a maintenance troubleshooting or other problem arises please call your local representative or Persys Technology and we will be happy to assist Rev J January 2001 Pyrogenic External Torch 900 SERIES 37 6 0 SPARE PARTS AND ACCESSORIES 6 1 Spares Order spare parts and accessories from Persys Technology When ordering please state for each part required m Model Number m Part Number m Description of the Part The standard spare parts listed below are available for the PET Series For non standard spare parts please contact your local rep LINE NUMBER PART NAME 1 Quartz Combustion Chamber According to customer requirements 2 Quartz Injector Tip 3 Thermocouple Assembly Dual Thermocouple 4 Ceramic Spacer 5 Perforate Cover Assembly 6 Ignition Chamber Assembly 7 Cooling Assembly 8 Skin Temp As
13. 01 Pyrogenic External Torch 900 SERIES 1 1 3 2 The External Torch The PET 900 series includes external torches incorporating unique features designed specially for the following applications m PET 986 Designed for 125 200 mm wafer size horizontal furnaces m PET 988 Designed for vertical furnaces and small horizontal furnaces m PET 989 Designed for vertical furnaces and small horizontal furnaces with Silicon Carbide process tubes PET 992 Designed for vertical furnaces and small horizontal furnaces compact design m PET 993 Designed for 125 200 mm wafer size horizontal furnaces with Silicon Carbide process tubes The External Torch includes the following m Ignition Chamber Assembly m Injector Quartz m Combustion Chamber Quartz m Cooling System Perforated Cover Main Body Ignition Chamber Assembly The Ignition Chamber Assembly consists of a protective box made of a Stainless Steel exterior and a Ceramic interior When assembled for use in the External Torch the Ignition Chamber Assembly includes two 500W quartz Tungsten Halogen ignition lamps designed to heat the ignition chamber up to 760 C and ignite the Hydrogen and Oxygen Injector The Injector is a small quartz tube seated between the two ignition lamps designed to maintain the gas flow dynamics so the flame is distanced from both the injector tip and chamber walls The injector unit includes Hydrogen and Oxygen gas inlets 1 4 and 3 8 re
14. 1 Pyrogenic External Torch 900 SERIES 45 E E gt e 56 bi D lt i x PH Q T 1 mus FE Figure B 1 Injector Heat Shield Set optional Rev J January 2001 Pyrogenic External Torch 900 SERIES 46 APPENDIX C Installation Preparation Customer Pre 20 1931 W349 9 5 9NI UD3 Fant HEWVHO AHL OL GHHOVLLY dH TINOHS 201 TWOUNHHD 828008 AHL NO SSYdAH WNOlLdO JHI NTHM 40 WSHWN AHL QCSTIdlLIQW SI Aldd S NIV XNYH NI SHHOWOL 40 V ONITIVISNI NAHM 72 NMOHS 3SOHL 350440 ONINGdO LATI NINAdO LHO WHY SNOISNSMIO TIV 71 SALON 1590995 YANOLSNO OL ONICHOOOV ATEHS NOYA LHOIHH ANT MHINSO 4 40 ONISHSdSIT ANV AHL 40 DNINSdO MOTIV OL WWGAI LY 4 GONVNGLNIVA AOTIY OL 3OVdS AAAA NOS 15 31 LY 0 DM AHL 40 ONINSdO MOTIV OL RWSAI 0ST 70 WROSTI O0I 40 1 LON 8801 THSIS SSTINIVIS 2 1 ISVG1 LV 901 AHI IV LOH HO NI WIOH N 1431 OD 11 SH 7331 d MAHIA ACIS Customer Pr
15. 7 ea m lt gt 2 988 Figure 3 18 900 SERIES Pyrogenic External Torch Rev J January 2001 PET 989 Figure Description 1 Cooling Ring 14 Cover Assembly 2 Quartz Chamber 15 Clamping Plate 3 O Ring 16 Skin Temperature Assembly 4 Cooling Jacket 17 Support Pad 5 Ignition Chamber Assembly 18 Ceramic Spacer 6 Thomas Pinch Clamp 19 Stand Off 7 Quartz Injector 20 UV Detector Assembly 8 Thermocouple Assembly 21 Power Connector Assembly 9 Hydrogen Teflon Fitting 22 Level Adjustment Screw 10 Oxygen Teflon Fitting 23 Level Adjustment Screw Nut 11 Lamp Mounting Assembly 24 Precision Linear Slide 12 Lamp Socket 25 Connection Board Assembly 13 Halogen Lamp Rev J January 2001 Pyrogenic External Torch 900 SERIES gt a o a z lt 989 3 PET Figure 3 20 900 SERIES Pyrogenic External Torch Rev J January 2001 PET 992 Figure Description Rev J January 2001 Cooling Ring Quartz Chamber O Ring Cooling Jacket Ignition Chamber Assembly Thomas Pinch Clamp Quartz Chamber Thermocouple Assembly Hydrogen Teflon Fitting Oxygen Teflon Fitting Lamp Mounting Assembly Lamp Socket 13 14 15 16 17 18 19 20 21 22 23 23 Halogen Lamp Perforate Cover Assembly Clamping Plate Skin Temperature Assembly Support Pad Ceram
16. ET 992 FIGURE 3 5 993 E c o 2 o NE JN A IN Jay FIGURE 3 6 CHAMBER ALIGNMENT INJECTOR ORIENTATION 27 FIGURE 4 1 STEAM START RECIPE RECOMMENDED FLOW CHART 29 ABLE A 1 EXTERNAL TORCH ELECTRICAL PINOUT 40 ABLE A 2 PIB 987 BACK PANEL CONNECTORS PINOUT 41 FIGURE B 1 INJECTOR HEAT SHIELD SET OPTIONAL 46 FIGURE 1 CUSTOMER PRE INSTALLATION PREPARATION 47 Principle Changes in Present Revision J 1 Back and front panel design was changed 2 Fig 1 4 PIB 987 Electronic Schematic was replaced 3 Fig 1 5 was canceled same information is displayed now in the new Fig 1 5 4 Fig 1 6 PIB 987 PCB placement was replaced now Fig 1 5 5 Section 3 3 External Torch Component Assembly and Replacement a warning for model PET 989 was added 6 Section 6 1 Spares the controller was added to spare parts list Principle Changes in Previous Revision l 1 Section 2 7 power specifications were changed 2 Section 4 2 Operational Description a warning was added Principle Changes in Previous Revision H 1 Figures 1 4 and 1 6 Electronic schematic and PCB placement were updated Principle Changes in Previous Revision G 2 Two new External Torches are added to manual Principle Changes in Previous Revision F l The name of the Ignition Chamber Assembly is standardized throughout this manual 2 Part numbers and names
17. User Manual Pyrogenic External Torch 900 SERIES PET 986 PET 988 PET 989 PET 992 PET 993 PIB 987 EX 6 01 REV J January 2001 Thank you for purchasing Persys Pyrogenic External Torch This manual has been written to provide all relevant instructions for installing operating and maintaining your Pyrogenic External Torch We recommend you read these instructions before attempting to install or operate your External Torch to ensure the maximum service life of your equipment Persys Technology Ltd believes the information contained in this publication is accurate as of its latest printing date and reserves the right to make changes in specification and information without prior notice Persys is not responsible for any inadvertent errors The terms and conditions governing the sales of Persys products and the licensing and use of software consist solely of those set forth in the contracts between Persys and its customers No representation or other affirmation of fact contained in this publication including but not limited to statements regarding capacity response time performance suitability for use or performance of products described herein shall be deemed to be a warranty by Persys for any purpose or give rise to any liability by Persys whatsoever In no event shall Persys be liable for any incidental indirect special or consequential damages whatsoever including but not limited to loss of profits arising out
18. ccurred during transit If evidence of damage is found or any components are missing notify Persys and the carrier immediately External Torch Component Assembly and Installation in Furnace WARNING FOR MODEL PET 989 To prevent damage to linear slide bearings do not remove adjustable screw legs from base plate For best results assemble the components in the following order l Swing open the perforated cover on the External Torch assembly 2 Swing open the Ignition Chamber Assembly cover 3 Locate a clean smooth counter or table top to use as a work space and unpack the following components m Quartz Combustion Chamber m Quartz Injector m Thomas Pinch Clamp m O Ring 4 Gently insert the Combustion Chamber into the Cooling Jacket 5 Carefully slide the Cooling Ring with swing turn motion over the end of Combustion Chamber onto the Cooling Jacket and tighten the plumbing connection union Swagelok fitting 6 Place the 120 O Ring on the B J of the Combustion Chamber y Connect the Quartz Injector to the Combustion Chamber with the Thomas clamp 8 Tighten Thomas Clamp finger tight 9 Carefully carry the Cooling Chamber Quartz Assembly to the furnace and gently place it inside the External Torch assembly The exhaust connection should be perpendicular to the shelf Notice that the outer ring of the Combustion Chamber is placed in the outer part of the Ignition Chamber Assembly and the groove is sea
19. e Installation Preparation Figure C 1 47 900 SERIES Pyrogenic External Torch Rev J January 2001
20. e PIB 987 Torch Controller is a universal unit with functional inputs and outputs which can be connected and hardware software interlocked through the furnace DDC and recipe m Pins 1 and 2 Torch UV On m Pins3and4 To Valve m Pins5and 6 Skin temp m Pins 7 and 8 Ignition Condition m Pins 9 and 10 Lamps ok m Pins 11 and 12 Start IN m Pins 13 and 14 H Valve IN The output is a relay contact which is shorted during UV on flame exists and lamps are at off stage Relay contact is shortened only if the ignition condition is ready This output should hardware interlock to the gas interface board valve operation This output is a basic safety interlock which enables turning on the valve only if the following conditions exist e Start signal from the DDC Lamps on Ignition temperature is over 760 C or e UV is on Lamps off Relay contacts are shorted only if external torch housing is over 90 C This option is implemented through the recipe as an alert but will not interrupt processing Relay output shorted only if ignition condition is ready to enable continuing the recipe up to the stage of Torch On Relay contacts are shorted only if the internal electric current monitor detects current through the lamps Any logical input from 5 to 32 volts from the DDC will operate the solid state relay for heating up the lamps and bring the External Torch to ignition conditio
21. hten the ball joint clamp between the combustion chamber and the process tube Rev J January 2001 Pyrogenic External Torch 900 SERIES 26 ALIGNMENT NIITCHC2 Calways from hinge side ALIGNMENT PIN GAS LINE CLAMP BAR Figure 3 6 Chamber Alignment Injector Orientation Rev J January 2001 Pyrogenic External Torch 900 SERIES 27 4 0 OPERATION WARNING Do not operate the External Torch before verifying that the Ignition Chamber Assembly is closed Do not bypass External Torch interlocks or alarms You are dealing with potentially explosive gasses The External Torch must be operated by trained personnel If the External Torch is not operated properly the gas mixture may explode shattering the quartzware or damaging the wafer process 4 1 Start Up Procedure Using inputs and outputs from the PIB 987 the steam start procedure recipe steps described in Figure 4 1 are recommended with your DDC ATTENTION During ignition period a H and setpoints should never exceed 2 SLM each H5 O ratio must be 1 Rev J January 2001 Pyrogenic External Torch 900 SERIES 28 START LAMPS gt ALARM A Ba N NO lt CURRENT ALARM END YES DELAY 30 SECONDS NO COOLING AIR ON i 3 P d gt E Pd Ni DEG gt DELAY 2 SECONDS NO
22. ic Spacer Stand Off Power Connector Assembly UV Detector Assembly Connection Board Assembly Quartz Adapter Level Adjustment Screw Pyrogenic External Torch 900 SERIES 21 2 X V dee A wee ff AYR Y 75 Figure 3 4 992 Rev J January 2001 Pyrogenic External Torch 900 SERIES 22 PET 993 Figure Description 1 Cooling Ring 15 Clamping Plate 2 Quartz Chamber 16 Skin Temperature Assembly 3 O Ring 17 Support Pad 4 Cooling Jacket 18 Ceramic Spacer 5 Ignition Chamber Assembly 19 Stand Off 6 Thomas Pinch Clamp 20 Power Connector Assembly 7 Quartz Chamber 21 UV Detector Assembly 8 Thermocouple Assembly 22 Extension Pipe 9 Hydrogen Teflon Fitting 23 Level Mechanism 10 Oxygen Teflon Fitting 24 Main Adjustment Knob 11 Lamp Mounting Assembly 25 Connection Board Assembly 12 Lamp Socket 26 Stopper Pin 13 Halogen Lamp 27 Precision Linear Slide 14 Perforate Cover Assembly Rev J January 2001 Pyrogenic External Torch 900 SERIES MAIN BODY 7 5 NS A 2 22 g d 7 eS MOVING SYSTEM 24 900 SERIES Figure 5 PET 993 Pyrogenic External Torch Rev J January 2001 3 3 After carefully unpacking the boxes check the components against the packing list to ensure the shipment is complete All External Torch components should be visually inspected for any damage that may have o
23. le A 1 External Torch Electrical Pinout NAME PIN DESCRIPTION SKIN TEMP 1 OUT TC TC SKIN TEMP 2 OUT 12 VOLT POWER IN LAMP 1 RET CHASSIS LAMP 2 9 LAMP 2 RET Rev J January 2001 Pyrogenic External Torch 900 SERIES 40 Table A 2 PIB 987 Back Panel Connectors Pinout LAMPS CONNECTOR PLUG IN SCREW 5 PIN FEMALE LAMP 1 LAMP 1 EARTH CHASSIS LAMP 2 LAMP 2 110 220 VOLT AC RET 110 VOLT AC RET PET 986 CONNECTOR D TYPE 9 PIN SKIN TEMP IN TC IN TC IN SKIN TEMP IN UV IN UV 12 VOLT UV GND AON DO ODN Rev J January 2001 CONTACT 1 CONTACT 2 POWER OUT Pyrogenic External Torch 900 SERIES 41 CONNECTORS BLOCKS TERMINAL 2x10 PIN FEMALE TORCH UV ON RELAY CONTACT N O N C TORCH UV ON RELAY CONTACT TO H2 VALVE RELAY CONTACT N O TO H2 VALVE GND SKIN TEMP RELAY CONTACT N O N C SKIN TEMP RELAY CONTACT IGNITION COND RELAY CONTACT N O N C IGNITION COND RELAY CONTACT LAMPS OK RELAY CONTACT N O N C LAMPS OK RELAY CONTACT 2 3 4 5 6 7 8 9 X HEADER START IN 5 32 VOLT 1000 Ohms SSR START IN GND VALVE IN UP TO 100 VOLT 0 5 Amp VALVE GND AIR ON RELAY CONTACT GND AIR ON RELAY CONTACT TEMP REF 650 C PYRO LOW TEMP REF 650 C PYRO LOW Rev J January 2001 Pyrogenic External Torch 900 SERIES 42 Description of Inputs Outputs Th
24. n The two leads to the gas interface board for the H Valve on demand are input to the PIB 987 and returned to the Valve through pins 3 and 4 as described above Rev J January 2001 Pyrogenic External Torch 900 SERIES 43 m Pins 15 and 18 Air Cooling on m Pins 19 and 20 Temp Ref 650 C Rev J January 2001 Pyrogenic External Torch 900 SERIES Relay output is shorted only if the Thermocouple Assembly in the ignition chamber exceeds 70 C at which time the solenoid opens and air flows into the cooling jacket This output is a voltage source equivalent for 650 C The user should specify the need for this output and the type of TC the user uses for pyro low on the existing system Pyro low interlock is used to prevent gas flow to the furnace when furnace temperature is lower than 650 C This interlock is only relevant for INTERNAL TORCH OPERATION where Hydrogen is ignited internally in the furnace The equivalent 650 C voltage supplied by the PIB 987 overcomes this interlock 44 NOTE APPENDIX B Installation of Injector Heat Shield Set on External Torch The information in this appendix is relevant only to those customers who specially order the Injector Heat Shield Set due to their requirements Installation of the Injector Heat Shield Set on the External Torch is optional and only necessary in cases in which there is water condensation in the Injector For assistance in installation procedure
25. n there is a LED that is lit when lamps are on or flame is on All the outputs are connected by a cable from the D type connector at the External Torch to the back panel of the PIB 987 A second connector on the External Torch supplies the AC power to the lamps and is connected by a cable to the TO LAMPS connector on the PIB 987 back panel EXTERNAL TORCH GND LAMP PAIR 1 o LAMP PAIR 2 TO PIB 987 B LAMPS CONNECTOR EXTERNAL TORCH INTERCONNECT BOARD CONTROL CABLE CONNECTOR TC HOUSING y OVER TEMP HOUSING UV DETECTOR UV DETECTOR LED HOUSING D TYPE CONNECTOR TO PIB 987 B Figure 1 1 External Torch Interconnections Rev J January 2001 Pyrogenic External Torch 900 SERIES 4 Both connectors to the lamps on the External Torch and the PIB 987 are the same for 220V and 110V AC The difference in voltage is controlled by the cable interconnect between the External Torch and the PIB 987 The External Torch Electrical pinout is presented in Table 1 APPENDIX A 1 3 3 The PIB 987 Torch Controller The External Torch is interfaced to the DDC by the model PIB 987 Torch Controller The PIB 987 includes an ON OFF power switch with LIGHT ON indicator Torch Status and Alarm LED s on its front panel see Figure 1 2 TORCH CONTROLLER MODEL PIB 987 ve 2 IGNITION H2 ENABLE Figure 1 2
26. nnectors connected to the DDC furnace controller m LAMPS connector which supplies the power to the lamps connector in the External Torch and AC line input connector The pinout of the PIB 987 back panel connectors is presented in Table 2 APPENDIX A Rev J January 2001 Pyrogenic External Torch 900 SERIES 6 4 TOPET 109 8 7 6 5 43 2 1 yo C 11 12 13 14 15 16 17 18 19 20 T12AL250V 100 230 AC LINE 1100VA max Figure 1 3 987 Back Panel Description of Operation Connection through the PIB 987 The furnace operator programs the process recipe with and MFC settings and solenoid requests for initiation of torch ignition Once the PIB 987 Torch Controller is started by the DDC recipe the PIB turns on the Halogen ignition lamps The ignition chamber reaches the operating temperature of 760 C within 55 seconds and the actual temperature is verified by the under temperature thermocouple sensing circuit following which a digital output signal is transferred to the DDC enabling the H flow Ignition will then occur within 10 seconds The solenoid is interlocked by the PIB 987 and can be activated only if ignition temperature is reached
27. not handle the lamps with bare hands l For all types of PETs except PET 992 l l Disconnect air inlet and exhaust plumbing connections from Cooling Chamber 1 2 Open Perforated Cover 1 3 Remove TC from Injector 1 4 Release gaspipe holder 1 5 Dismantle gasline Teflon fittings 1 6 Disconnect Thomas Clamp and remove Injector 1 7 Open Ignition Chamber Assembly cover 1 8 Remove Cooling System together with Quartz Chamber 1 9 Remove the two screws holding the Ignition Chamber Assembly and pull out Ignition Chamber Assembly Take care not to pull Lamp Base Assembly so electrical wires will not tear 1 10 Open Lamp Base screw stopper and remove lamp base 1 11 Replace lamp 1 12 Return Ignition Chamber Assembly to place 1 13 Reconnect electrical wires to connector 1 14 Adjust Ignition Chamber Assembly in place and close screws finger tight 1 15 Return Cooling System together with Quartz Chamber 1 16 Reconnect Injector to Quartz Chamber with Thomas Pinch Clamp 1 17 Close Ignition Chamber Assembly 1 18 Assemble gasline Teflon fittings 1 19 Fasten gaspipe holder 1 20 Return TC to Injector 1 21 Close Perforated Cover 1 22 Connect air inlet and exhaust plumbing connections to Cooling Chamber Rev J January 2001 Pyrogenic External Torch 900 SERIES 34 2 PET 992 Lamp Replacement 2 1 Open Lamp Base screw stopper and remove lamps assembly 2 2 Replace lamp
28. of or relating to this publication or the information contained in it even if Persys has been advised knew or should have known of the possibility of such damages The products described in this document are confidential and propriety of Persys or its licensors No part of this document may be reproduced in any form including by electronic retrieval systems without prior written permission of Persys Copyright 1993 by Persys Technology Ltd Persys All rights reserved TABLE OF CONTENTS 1 0 INTRODUCTION 1 Scope of this Manual 2 General Features I 2 3 Weight 11 2 4 Ignition Specifications 12 5 0 MAINTENANCE TROUBLESHOOTING 31 5 1 Introduction 3l reventive Maintenance roubleshooting omponent Replacement xternal Torch Dismantling and Reassembl Service N A AAN CA A N wiol la 95 92 LA LA 95 6 0 SPARE PARTS AND ACCESSORIES 38 6 1 Spares 38 APPENDIX 40 Description of Inputs Outputs 40 APPENDIX B 45 Installation of Injector Heat Shield Set on External Torch 45 APPENDIX 47 Customer Pre Installation Preparation 47 FIGURE 1 1 EXTERNAL TORCH INTERCONNECTIONS FIGURE 1 2 PIB 987 FRONT PANEL FIGURE 1 3 PIB 987 BACK PANEL FIGURE 1 4 PIB 987 ELECTRONIC SCHEMATIC FIGURE 1 5 PIB 987 PCB PLACEMENT INCLUDING JUMPERS CONFIGURATION SET UP COMPONENT SIDE FIGURE 3 1 PET 986 FIGURE 3 2 PET 988 FIGURE 3 3 PET 989 FIGURE 3 4 P
29. se the alarm signal in case ofa flameout during a pyrogenic process as a latched signal in the host controller It is recommended to flow H and O together while constantly maintaining the required process ratio Note Increasing O2 above the stychiometric ratio makes the flame smaller meaning that UV detection is more difficult Rev J January 2001 Pyrogenic External Torch 900 SERIES 30 5 0 MAINTENANCE TROUBLESHOOTING WARNING Disconnect the electrical power from the equipment before attempting to service any electric components During maintenance wear eye and face protection WARNING Temperature near the air cooling outlet can rise to 200 C or higher Please take extreme care when performing maintenance work in the source cabinet 5 1 Introduction This section describes preventive maintenance troubleshooting and component replacement for the 900 Series External Torch 5 2 Preventive Maintenance External Torch preventive maintenance consists of periodic system adjustments general cleaning and visual safety checks Routine Checks l Perform a flame failure check periodically by blocking the UV detector site path Verify the FLAME OUT LED illuminates and H ON LED turns off 2 Check thermocouple positioning 3 Check quartzware connections for any stressed or loose fittings cracks or contamination Rev J January 2001 Pyrogenic External Torch 900 SERIES 31 5 3 Annual Preventive
30. sembly 9 Teflon Fitting 1 4 1 4 10 Teflon Fitting 3 8 1 4 11 11 1 UV Detector Assembly 11 2 UV Detector Assembly for PET 992 12 UV Detector Extension Pipe For high torches 13 UV Detector Cooling Assembly 14 Power Connector 15 O Ring Viton 2 010 For Thermocouple 16 O Ring 120 16 1 Viton 16 2 Kalrez Rev J January 2001 Pyrogenic External Torch 900 SERIES PART NUMBER EX 4 2XX EX 4 221 EX 5 400 EX 5 401 EX 3 003 EX 3 300 EX 3 200 EX 4 300 EX 5 300 ST 6 610 ST 6 620 EX 5 200 EX 5 201 EX 5 223 EX 5 240 EL 4 180 ST 6 051 ST 6 060 ST 9 060 38 LINE NUMBER PART NAME 17 18 20 21 22 23 24 18 1 18 2 18 3 22 1 22 2 Precision Linear Slide BSP 10 35 SL For PET 989 and PET 993 Connection Board PET 986 and PET 993 PET 988 989 PET 992 Halogen Lamp 110V 500W Lamp Socket Thomas Pinch Clamp 35 Stand Off Stand Off 33 Stand Off 44 Heat Shield Set Controller We recommend you keep the following Spare parts Rev J January 2001 Several Halogen Lamps One Quartz Chamber One Thermocouple One Quartz Injector Several Ceramic Spacers Several O Rings 120 Teflon Fittings One Controller PIB 987 One UV Detector Pyrogenic External Torch 900 SERIES PART NUMBER ST 5 001 EX 5 100 EX 5 101 EX 5 102 EX 3 256 EX 3 255 ST 4 706 EX 2 002 EX 2 003 EX 3 280 PIB 987 39 APPENDIX A Description of Inputs Outputs Tab
31. skin temperature maximum 90 C The Main Body The External Torch is placed on a height adjustable Steel and black anodized Aluminum construction the Stage The stage includes the UV Detector unit the electrical connection board where lamps are connected and the electronic connection board The stage type is unique for each PET model PET 986 Height is adjustable using a single adjustment knob PET 988 Designed for a small space height is adjustable using four pliable legs PET 989 Designed for Silicon Carbide process tubes consists of a double sliding base to overcome thermal expansion of Silicon Carbide process tubes during process Moving length fluctuates by 10 mm Height is also adjustable using four pliable legs PET 992 Designed for a small space and low height of the process tube steam inlet from shelf as low as 70 mm Height is adjustable using four pliable legs PET 993 Designed for Silicon Carbide process tubes consists of a double sliding base to overcome thermal expansion of Silicon Carbide process tubes during process Height is adjustable using a single adjustment knob Rev J January 2001 Pyrogenic External Torch 900 SERIES 3 External Torch Interconnections The interconnect board on the External Torch see Figure 1 1 interconnects all the related gauges from the External Torch such as the UV detector skin over temp sensor and TC type K output into a D type connector In additio
32. so be performed at a later step 6 Check that the Ignition Chamber Assembly is open and with a swing turn motion put the whole system inside Notice that the outer ring of the Combustion Chamber is placed in the outer part of the Ignition Chamber Assembly and the groove is seated on the Stainless Steel pin located on the Ignition Chamber Assembly This is very important so SiC Hot Spots are aligned to Halogen lamps 7 Connect Injector with Thomas clamp if you have not done so previously Make sure Thomas clamp is positioned vertically upwards 30 Close it finger tight For PET 992 only screw lamps assy back 8 Close Ignition Chamber Assembly 9 Connect gaslines 10 Connect thermocouple 11 Tighten gaslines to base plate by tightening gasline holder in order to prevent accidental quartz breakage due to pulling of the gaslines 12 Reconnect air inlet 13 Close perforated cover 14 Reconnect air exhaust 15 Test system before operation UV Detector 1 For all types of PETs except 992 1 1 Disconnect the UV Detector connector from the electronic board 1 2 For PET 986 and PET 993 only Open the two screws holding the middle base plate from the shafts e Lift out the middle base plate and put aside Rev J January 2001 Pyrogenic External Torch 900 SERIES 36 1 3 1 4 For PET 988 989 Open perforated cover Ignition Chamber Assembly cover and remove Cooling Assembly only Disconnect
33. spectively and a type K thermocouple placed in a quartz well inside the injector at the point of ignition measuring the ignition temperature Combustion Chamber The Combustion Chamber is a quartz tube comprising of two quartz encapsulated Silicon Carbide Hot Spots aligned to the ignition point contributing to a faster ignition and higher ignition temperature A quartz bypass in the Combustion Chamber enables the flow of additional gasses besides the ignition gas lines The Combustion Chamber holds the injector on one side and is connected to the tube with a female ball joint outlet on the other side Rev J January 2001 Pyrogenic External Torch 900 SERIES 2 NOTE The PET 989 and PET 993 models have a shorter female ball joint designed to endure thermal expansion of male ball joint on the Silicon Carbide furnace tube during process thus preventing breakage of the Combustion Chamber quartz Cooling System The Combustion Chamber is cooled by compressed air flowing into a Cooling System Cooling Ring amp Jacket which is a double wall Stainless Steel heat exchanger The air flows in through a Swagelok type inlet and out through an HPS type exhaust outlet The Cooling Jacket has an opening at the bottom enabling operation of the UV Detector Perforated Cover The exterior of the External Torch is covered by a perforated electropolished Stainless Steel box to protect against burns A thermostat is positioned on the cover to sense
34. ted on the Stainless Steel pin located on the Ignition Chamber Assembly see Figure 3 6 Rev J January 2001 Pyrogenic External Torch 900 SERIES 25 18 Align the Cooling Chamber Quartz Assembly horizontally and in a straight line with the Ignition Chamber Assembly bore by adjusting the support pads Make sure the support pads are parallel to the Cooler Close the Ignition Chamber Assembly cover and close perforated Torch Assembly cover Connect the air cooling supply line to the air inlet connection elbow Swagelok fitting on the Cooling Chamber assembly Connect the air exhaust line to the Cooling Jacket exhaust connection Loosen the ultratorr fitting at the end of the External Torch overtemp thermocouple CAUTION Use extreme caution to avoid breaking the TC or gas inlets on the quartz injector Insert the Thermocouple through the end of the injector and slide it all the way until the ultratorr fitting fits snugly over the end of the injector Tighten the ultratorr fitting to secure the thermocouple in place Attach the Teflon gaslines to the Teflon connectors The Oxygen inlet port is larger than the Hydrogen inlet and each Teflon fitting on the gaslines can only fit on its respective inlet port Adjust height of main body unit if necessary to align the torch Combustion Chamber to the process tube Raise or lower the torch assembly until perfect alignment is obtained with process tube Install and tig
35. through the test mode hole located on the PIB 987 Torch Controller and press the push button behind this hole The test mode will check the following m Turn on of lamps Accomplishment of correct temperature for ignition Rev J January 2001 Pyrogenic External Torch 900 SERIES 32 5 4 Component Replacement The following components should be checked and replaced as recommended below UV Detector Assembly The UV detector should be replaced every year Tungsten Halogen Lamps Lamps should be replaced every year Ignition Chamber Assembly Should be replaced only if the white ceramic is damaged For dismantling of any of these parts see Section 5 5 5 5 External Torch Dismantling Reassembly WARNING Before you attempt to dismantle the External Torch it is required to comply with the precautions given below If you do not you can cause injury to people and damage to equipment Disconnect the External Torch from electrical and gas supplies Disconnect External Torch from furnace tube Beware of any sharp objects When handling quartz wear plastic gloves Whenever any parts of the External Torch have to be cleaned or replaced according to our recommendation or whenever troubleshooting requires so dismantle External Torch according to the following procedures Rev J January 2001 Pyrogenic External Torch 900 SERIES 33 Lamp Replacement WARNING Store spare lamps in original packaging Do
36. your External Torch for the first time it is compulsory to call a Persys representative Details of specific safety precautions are given throughout the instructions at the appropriate points m Wear appropriate safety gear when handling contaminated components m Check that all required components are available and of the correct type before starting work m Ensure that the installation technician is familiar with quartz safety handling procedures Unpacking NOTE Quartz parts Chamber and Injector should be cleaned prior to installation according to customers quartzware cleaning procedures CAUTION Quartzware is packed separately in a protective carton Do not handle quartzware with bare hands use cleanroom gloves Quartzware is fragile handle it with care When unpacking the box you will find the manual and documentation on top and the following parts packed in separate boxes m Themainunit and the stage m The cooling system m quartz parts Combustion Chamber and Injector m ThePIB 987 Controller including cables and connectors m Small parts and accessories Rev J January 2001 Pyrogenic External Torch 900 SERIES 14 Parts description of all models for reference is given in the following figures 3 1 PET 986 3 2 PET 988 3 3 989 3 4 992 3 5 993 PET 986 Figure Description Ho ROV Sec
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