InstruTech, Inc.
Contents
1. InstruTech Inc page 5 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Installation Electrical Grounding Be sure the vacuum gauge and the rest of your vacuum system are properly grounded to protect personnel from shock and injury Be aware that some vacuum fittings especially those with O rings do not produce a good electrical connection between the gauge and the chamber it is connected to A good recommended practice is to remove power from any cable prior to connecting or disconnecting it The InstruTech CVM 211 will directly replace GP Mini Convectron modules that have a 9 pin D connector and you can use your existing cables and electronics For new installations fabricate a cable to connect to the signals functions you want to use Signals and pin assignments are described below WIN Power Ground Njojajk cojoo PIN NUMBER PIN DESCRIPTION 1 Relay 1 Normally Open Relay 1 Normally Closed Povver Input 11 30Vdc Analog Output Non linear GP Compatible or Log Linear 1 8V Relay 1 Common Relay Disable Disables Relay 1 when pulled low Analog Ground InstruTech Inc page 6 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Setup and Operation User Interface Basics The user interface is designed for easy operation and a natural progression of setup parameters A complete user interfa2. 205 12 3 332 699 642 oP OP oP so Torr 300 m3 oP 880 169 3 59 669 762 oP OP oP aoo Torr 40 135 oP 465 224 3 94 7 63 842 op oP oP 00 Torr 50 161 oP 604 287 4 21 828 921 oP OP oP eoo Torr 600 186 oP 730 364 44a sse 9 95 oP OP oP 700 Torr 70 27 8 oP 850 46 1 4 05 9 42 10 7 oP oP oP zeo Torr 760 23 7 oP sat 539 475 976 111 oP oP o e0 Torr s0 251 oP ser 504 asa 995 114 oP OP o 900 Torr 900 28 5 oP op 795 499 105 120 oP oP oP 4000 Torrj 1000 325 oP op mi 508 141 127 oP oP oP Notes 1 OP overpressure 2 Display auto ranges between Torr and mTorr at 1Torr Readings in normal font are in Torr Readings in blue italics are in mTorr InstruTech Inc page 17 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Appendix C Vacuum gauge contamination and cleaning The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings the inability to set zero or atmosphere and total gauge failure are all possible indications of gauge contamination Contamination can be generally characterized as either A a reaction of process gases with sensor elements or B an accumulation of material on the sensor elements Sensors that fail due to chemical reaction are genera
3. 1 845 2 230 2 301 2699 2643 2362 2881 2845 2778 2544 2 886 0100 3 000 2 820 2 008 2 98 2 681 _3 167 3 130 3 083 2 851 3 185 3297 3346 2978 s arej 3435 3386 3 149 9 483 0 050 3692 3740 3 371 3860 3 839 3778 3 542 3 888 0 217 o e ololojojlojolajnija 0 1000 4 000 3 808 3 914 3 670 4155 4134 4083 3 845 4201 0 200 4 288 4322 3 960 4439 4418 4398 4149 4498 4 687 4689 4 336 4786 arra 4 837 4555 4898 0000 5 000 4778 4973 4 987 4 978 4602 5 021 5 017 5 190 4872 5 204 6 5 233 4845 5210 5220 5616 5201 5 522 5 524 5 107 5 389 5418 7 391 5 719 5877 5 250 5 474 5 530 8 041 6 332 6 446 5 81 5 91 5 438 5 670 5 691 8 04 8 041 8 041 6 09 8 041 6 22 8 041 6 35 8 041 6 45 8 041 7 998 9 ojo So I I 5 28 ojo 5 000 5 69 10 0000 6 000 5 602 8 041 20 000 6 34 6 89 100 000 7 000 5 946 8 041 7 32 200 000 7 47 300 000 7 58 400 000 7 68 500 000 7 78 600 000 7 86 7 93 7 97 7 99 8 04 1000 0000 8 000 6 512 8 041 8 04 o1o o oojojojo oO 6 56 6 66 6 73 6 77 6 90 7 045 5706 6 045 6104 8 04 8 041 8 041 ojojojo co e asj jojpikjlol jlojlojojelojco Sjojsnjnjojojvjnjnjo The log linear output signal and pressure are related by the following formulas Pa1009 V logio P 5 where P is the pressure in Torr and V is the output signal in Volts The chart on the foll
4. Post a warning label on your gauge readout Do Not Exceed Torr Indicated Pressure fill in the blank for your gas so that an operator using the gauge will not exceed a safe pressure InstruTech Inc page 13 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Table 1 Non Linear Analog Output Voltage vs Pressure for Selected Gases The following Stinger part numbers ending with the letter A provide a Non Linear Analog output CVM211GAA CVM211GBA to CVM211GHA Refer to next page if you have ordered a Stinger with a Log Linear Analog output True Total CO2 CH4 Pressure 10 mTorr 0 4555 0 4290 0 4410 0 4550 0 4620 0 4150 0 4880 0 4800 0 4700 0 4330 0 4920 100 mTorr 0 8780 0 7450 0 6140 0 8680 0 9000 0 6680 1 0090 0 8900 0 9440 0 7680 1 0550 1 Torr 2 2168 1 8180 2 1640 2 1950 2 1720 1 5360 2 2570 2 2470 2 6030 1 9760 2 6320 5 Torr 3 6753 3 0280 4 sero 3 6720 3 3180 _2 4290 s 02soj 3 0900 5 0590 3 7150 10 Torr 4 2056 3 4800 5 7740 4 2250 3 6700 2 7340 3 2040 3 5800 6 3610 4 6050 4 6990 20 Tor 4 5766 3 8010 7 5140 4 6200 3 9030 2 9660 3 3080 3 4140 5 4060 5 1720 50 Torr 4 8464 4 0370 4 9160 4 0710 3 0750 3 4300 3 5090 6 1590 5 5830 100 Torr 4 9449 4 1220 5 0260 4 1540 5 1540 3 6180 3 6600 6 4830 5 7200 200 Torr 5 0190 4 1920 5 1060 43360 3 2600 3 8270 3 8630 6 6610 _ 5 8600 300 Torr
5. 5 1111 4 2830 5 2000 4 5020 33840 3 9380 4 0050 6 7260 400 Torr 5 2236 4 3860 53150 4 6210 3 4060 4 0760 4 0880 6 7670 6 1050 500 Torr 5 3294 4 4770 5 4220 4 7080 35260 4 0760 4 1610 esoo 1 e00 Tor 5 4194 4 5500 55150 4 7750 3 5730 4 1240 4 2030 6 8430 6 3420 700 Torr 5 4949 4 6110 5 6920 4 8300 3 6130 4 1660 4 2470 esoo 760 Torr 5 5340 4 6430 6 6330 4 8600 3 6320 4 1900 4 2710 6 9200 800 Torr 5 5581 4 0630 5650 48770 3 6450 4 2030 4 2660 6 9420 6 5100 900 Torr 5 6141 4 7060 5 7130 4 9190 36740 4 2370 4 3210 7 0000 1000 Torr 5 6593 4 7450 5 7620 4 9550 3 6900 4 2700 4 3540 7 0560 6 6420 Note By design these values are identical to the outputs from Helix Granville Phillips Convectron gauges Mini Convectron modules and Controllers so that equivalent units can be interchanged without affecting your process system or software InstruTech Inc page 14 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Table 2 Log Linear Analog Output Voltage vs Pressure for Selected Gases The following Stinger part numbers ending with the letter L provide a Non Linear Analog output CVM211GAL CVM211GBL to CVM211GHL True Pressure CO2 CH4 Torr nooo 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 600 0 0010 2 000 1845 1 903 2000 2 041 1602 2176 2 176 2 114
6. during the warranty period due to causes other than ordinary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the product for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICPATED OR LOST PROFITS OR ANY OTHER LOSS INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER InstruTech Inc page 20
7. A CVM 211 User Interface Map Map Normal pressure display To enter setup mode press and hold lt select gt for 3 seconds Readout displays value of setpoint turn on pressure Relay energizes when pressure is be ow this value Factory default 100 mTorr To keep this value and go to next step press lt select gt Readout displays value of setpoint turn off pressure Relay de energizes when pressure is above this value Factory default 200 mTorr To keep this value and proceed to next step press lt select gt To change this value use lt up gt lt down gt keys Then press lt select gt to save and go to next step To change this value use lt up gt lt down gt keys Then press lt select gt to save and go to next step Readout displays 000 to indicate unit is in Zero adjust mode Factory default 000 mTorr Is system evacuated to a pressure below 10 Torr 2 gj Press lt down gt to save the new user zero and exit to the normal pressure display To proceed to next step vvithout changing the zero value press lt select gt Readout displays current span value Factory default 760 Torr SS if Is system backfilled with air or N2 to some known pressure above 400 Torr 2 Or open to atmosphere with known barometric pressure Use lt up gt lt down gt keys to change the displayed value to agree with the known pressure To exit setup mode and return to the Press a
8. Cause Possible Solution Display is off blank No power Check cable connections and verify that power is being supplied Readings appear very different The process gas is different from Correct readings for different gas from expected pressure the gas used to calibrate the CVM thermal conductivity See Appendix B Module has not been calibrated or Check that zero and span atm are has been calibrated incorrectly adjusted correctly Readings are noisy or erratic Loose cables or connections Check and tighten connections Contamination Inspect gauge for signs of contamination such as particles deposits or discoloration on gauge inlet Try cleaning if appropriate Gauge cannot be calibrated zero Contamination See section below on cleaning and span vacuum amp atm Sensor failure for other cause Replace CVM module Setpoint does not actuate Incorrect setup Check setpoint setup InstruTech Inc page 8 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Module and Gauge Replacement The CVM module is factory calibrated for the specific gauge tube installed in it Since each gauge tube and module calibration is different the gauge cannot be replaced If the gauge fails for any reason the CVM 211 module must be replaced Given the low cost of anew CVM 211 module it is generally considered an expendable item If your module develops an electronic problem and you want to return the un
9. ases or mixtures The sensor wire in the gauge normally operates at 125 C but under malfunction the wire temperature could exceed the ignition temperature of combustible mixtures Installation Mechanical Mount the CVM as close as possible to the pressure you want to measure Long or restricted tubing will create a pressure difference error between your process and the gauge and cause a delay in response to pressure changes Mounting the CVM too close to Mount with a gas source will also cause errors in the readings this axis Don t mount the CVM near a source of heating or horizontal cooling such as heaters or air conditioning vents Mount the CVM with its main long axis horizontal see diagram at right Pressure reading errors will occur above 1 Torr if the unit is not mounted horizontally Below 1 Torr mounting position has little to no effect Mount the CVM with port down if possible to help minimize the effect of any particles or condensation in the gauge Don t mount the CVM where it will be subjected to excessive vibration such as on mechanical pumps Vibrations may cause noisy readings and reading errors due to induced cooling of the sensor Fittings follow the fitting manufacturer s recommendations and note the following NPT fittings Wrap the threaded portion of the tubing with Teflon tape and hand tighten the gauge into the gauge port Do not use a wrench or other tool which may damage the gauge
10. ce map is shown in appendix A This section gives a brief explanation of operation for added clarity The CVM 211 Stinger module has 4 settings that can be adjusted by the user with the 3 position switch on the side of the module housing Pressing the switch straight in is referred to as pressing the lt select gt key Pressing the switch upward is referred to as pressing the lt up gt key Pressing the switch downward is referred to as pressing the lt down gt key During setup and operation be sure to consider the Torr mTorr LEDs Setting up the CVM 211 Stinger Module 1 With the CVM 211 in the normal pressure display mode press and hold lt select gt for 3 seconds The readout displays the value of the sefpoint turn on pressure The relay energizes when pressure drops below this value Factory default 100 mTorr 3a To keep this value and proceed to the next step press lt select gt 3b To change the value use the lt up gt lt down gt keys Then press lt select gt to save and go to the next step 4 The readout displays the value of the setpoint turn off pressure The relay de energizes when the pressure is above this value Factory default 200 mTorr 5a To keep this value and proceed to the next step press lt select gt 5b To change the value use the lt up gt lt down gt keys Then press lt select gt to save and go to the next step 6 The readout will display 000 to indicate th
11. e unit is in the Zero adjust mode To properly set zero the gauge must be evacuated to a pressure below 10 Torr Factory default 000 mTorr Ta If the gauge is not evacuated to a pressure below 10 Torr press lt select gt to proceed to the next step without saving a new zero value 7b If the gauge is evacuated to a pressure below 10 Torr press lt down gt to save the new user zero and proceed to the next step 8 The readout will display the current span value To set span the gauge must be backfilled with air or N2 to some known pressure above 400 Torr If barometric pressure is known the gauge may be opened to atmosphere Factory default 760 Torr 9a If you do not have a known pressure in the gauge press lt select gt briefly less than 3 seconds to exit the setup menu and return to the normal pressure display without saving a new span value 9b If you do have a known pressure in the gauge use the lt up gt lt down gt keys to change the displayed value to agree with the known pressure Press and hold lt select gt for 3 seconds until the displayed pressure switches to the new value This will save the new span setting and return to the normal pressure display Return to Factory Default Settings You can reset all values to the original factory default settings by holding the lt up gt key for 5 seconds The display will read dEF until 5 seconds has passed at which point all user settings
12. eadings at these low pressures is a constant a function of the difference between thermal conductivities of the gases At pressures above 1 Torr indicated pressure readings may diverge significantly At these higher pressures convection currents in the gauge become the predominant cause of heat loss from the sensor and calibration depends on gauge tube geometry and mounting position as well as gas properties Generally air and Nz are considered the same as far as thermal conductivity goes but even these two gases will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N2 you may see readings change by 30 to 40 Torr after the chamber is opened and air gradually displaces the Ng in the gauge For most other gases the effect is much more significant and may result in a hazardous condition as described below Other considerations when using gases other than N gt Flammable or explosive gases InstruTech CV gauges and modules are not intrinsically safe or explosion proof and are not intended for the measurement or use in the presence of flammable or explosive gases or vapors Under normal conditions the voltages and currents in InstruTech CV Gauges and Modules are too low to cause ignition of flammable gases However under certain failure conditions sufficient energy could be generated to cause flammable vapors or gases to ignite or explode Thermal gauges like the InstruT
13. ech CV gauges and modules are not recommended for use with flammable or explosive gases Moisture water vapor In some processes lyophilization for example the gas composition may not change significantly except for moisture content Water vapor can significantly change the response of a thermal gauge and correction should be made as you would for any other gas Other contaminants If your gases condense coat or corrode the sensor the gauge calibration and response to different gases will change Generally if the gauge can be calibrated Zero and atmosphere settings these changes are small enough to be ignored If you cannot set zero and atmosphere the gauge should be replaced or cleaned See the Appendix C on cleaning for more information InstruTech Inc page 12 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Convection Vacuum Gauge Indicated vs True Total Pressure Test Gases N2 Ar He 1000 100 Oo 2 L True Total Pressure Torr capacitance manometer 2 0 001 0 0001 0 001 0 01 0 1 1 10 100 1000 Indicated Pressure Torr convection gauge E CVG N2 Convectron N2 lt CVG Ar Convectron Ar Convectron He CVG He Gas Correction Chart The Y Axis is actual pressure measured by a capacitance manometer a diaphragm gauge that measures true total pressure ind
14. ependent of gas composition The X Axis is the pressure reading indicated by the convection gauge under test The chart shows readings for an InstruTech CVG as well as for a GP Convectron gauge to illustrate that the response of the gauges to these different gases is virtually indistinguishable Caution Do not assume this data applies to other convection gauges which may or may not be the same If the gas is N2 when the true total pressure is 100 Torr the gauge will read 100 Torr If the gas is Ar when the true pressure is 100 Torr the gauge will read only 10 Torr If you are backfilling your vacuum system with Ar when your system reaches atmospheric pressure of 760 Torr true pressure your gauge will be reading about 20 Torr If you continue to backfill your system attempting to increase the reading up to 760 you will overpressure your chamber and probably blow up your vacuum system If the gas is He the gauge will read 1000 Torr when pressure reaches about 10 Torr actual pressure You probably won t blow up the vacuum system but opening the chamber to atmosphere prematurely may present other hazards for both people and product What these examples illustrate is that without proper precautions use of different gases can result in injury to personal and or damage to equipment Suggested precautions when using gases other than No Install a pressure relief valve or burst disk on your chamber to protect it from overpressure
15. gressive solvent Cleaning procedure 1 With the gauge port up pour your cleaning solution into the gauge port until it is full Note The fine mesh of the port screen may not allow the solution into the gauge tube because of surface tension effects You may need to insert a small tool into the gauge vacuum port to push the port screen slightly away from the tube wall to allow solvent into the gauge Slightly away means less than about a millimeter Make sure the tool is not plated with high vapor pressure material such as zinc plating 2 Let the solution sit for a while 10 20 minutes should be sufficient Gentle agitation will help disperse the solution throughout the gauge but do not shake the gauge vigorously While the InstruTech gauge is constructed to be rugged it was not designed to withstand forces exerted by liquids in motion 3 With the gauge port down pour the solution out of the gauge and leave it to drain and dry for several hours or overnight Warming the gauge and or pumping on it will speed up the drying time 4 When you are sure the gauge is completely dry install it on a vacuum system apply power and run through the calibration setup Pump the gauge below 10 Torr and confirm that the zero vacuum can be set If zero is ok raise pressure and set the atmosphere adjustment 5a If both zero and atm can be set properly you have successfully cleaned your gauge 5b If zero or atm cannot be set the gauge ha
16. i i InstruTech Inc CVM 211 STINGER Convection Vacuum Gauge Module User s Manual Revision 1 05 Sept 25 2007 1475 S Fordham St Longmont CO 80503 Phone 303 651 0551 Fax 303 678 1754 E mail info instrutechinc com www instrutechinc com Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Table of Contents Introduction General Information Description Specifications Options amp Accessories Www 0 Safety General ankKAR A A Installation Mechanical Position OONA Setup amp Operation User Interface Basics Setting up the Module NSN Service Calibration Maintenance Cleaning Troubleshooting Module amp Gauge Replacement Factory Service and Support OO CO Trademarks amp Acknowledgements 9 Warranty 20 Appendices A User Interface Map B Using thermal vacuum gauges with different gases C Contamination amp Cleaning InstruTech Inc page 2 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Introduction General Information Description The InstruTech CVM 211 Stinger module provides the basic signal conditioning required to turn a convection vacuum gauge into a complete measuring instrument There are two different models of Stinger One model provides a non linear analog output and one setpoint relay The non linear analog output is identical to the Helix Granville Phillips S c
17. ins the lookup data and provides the formulas for converting the log linear output voltage into pressure values The above discussion of output signal assume the gas being 2 L Measured is Nitrogen The following discussion illustrates how Other gases affect both readings and outputs from thermal Vacuum gauge Pressure Torr 105 102 107 10 107 102 108 InstruTech Inc page 11 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Effect of Different Gases on Signals and Displayed Pressure A thermal conductivity gauge senses heat loss which depends on the thermal conductivity of the gas surrounding the sensor Since different gases and mixtures have different thermal conductivities the indicated pressure readings and outputs will also be different InstruTech convection gauges and most other thermal gauges are normally calibrated using nitrogen When a gas other than Nz is used correction must be made for the difference in thermal conductivity between N2 and the gas in use The charts and tables below indicate how different gases affect the display and output from an InstruTech convection gauge For Nz the calibration shows excellent agreement between indicated and true pressure throughout the range from 10 to 1000 Torr As it should of course since they re calibrated for No At pressures below 1 Torr the calibration curves for the different gases are similar the difference in r
18. it to InstruTech for repair contact us for return authorization as described below Factory Service and Support If you need help setting up operating or troubleshooting your module you are welcome to call us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 651 0551 Or e mail us at info instrutechinc com If it becomes necessary to return the unit to InstruTech for service or calibration please call or e mail us for a return authorization number For the safety of our employees you must down load a material disclosure form from our website at www instrutechinc com Please use this form to provide a history of the gauge detailing what gases have been used We cannot work on gauges that have been exposed to hazardous materials Trademarks amp Acknowledgements The following trademarks used throughout this manual are owned by the companies indicated Convectron and Mini Convectron are registered trademarks of Brook Automation Helix Technology Corp and Granville Phillips Company Conflat and Mini Conflat are registered trademarks of Varian Vacuum Technology Cajon and VCR are registered trademarks of the Swagelok Company Teflon is a registered trademark of DuPont Appendices A User Interface Map B Gas Correction C Contamination and Cleaning InstruTech Inc page 9 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Appendix
19. lly not salvageable Sensors that fail due to condensation coatings or particles may possibly be restored by following the cleaning procedure described below A Reactive Gases If process gases react with the materials of construction of the sensor the result is corrosion and disintegration of the sensor over time Plasma etching and other reactive semiconductor processes are examples where this failure mode is common In this instance cleaning can not solve the problem because the sensor has been destroyed the gauge or module must be replaced If you experience this failure mode quickly or frequently you should consider a different vacuum gauge for your application Thermal vacuum gauges may be available with different sensor materials that are not as reactive with your particular process gases Or you may consider a different type of gauge such as a capacitance diaphragm gauge which exposes only stainless steel or ceramic to the gases There is no material that is universally chemical resistant your choice of vacuum gauge as well as all other vacuum components should take into consideration the potential reactions between your process gases and the materials of construction Consider what effect water vapor will have when combined with your process gases because a finite amount of water will enter the chamber during venting to atmosphere B Condensation Coatings and Particles If the failure is due to an accumulation of material in
20. nd hold lt select gt for 3 seconds until the display normal pressure display without switches from the original span value to the new saving a new span value press span value Unit will then exit setup menu and return lt select gt briefly to the normal pressure display mode To return all settings to original factory defaults press lt up gt key and hold for 5 seconds Display will read dEF After 5 seconds factory default settings will replace all user settings and readout will return to normal pressure display InstruTech Inc page 10 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Appendix B Using thermal vacuum gauges with different gases Principal of Operation Thermal conductivity gauges measure pressure indirectly by sensing the loss of heat from a sensor to the surrounding gases The higher the pressure of the surrounding gas the more heat is conducted away from the sensor Pirani thermal conductivity gauges maintain a sensor usually a wire at some constant temperature and measure the current or power required to maintain that temperature A standard Pirani gauge has a useful measuring range of about 10 Torr to 10 Torr By taking advantage of convection currents that are generated above 1 Torr convection enhanced Pirani gauges increase the measuring range to just above atmosphere Output Signals and Displays A vacuum gauge sensor by itself does not genera
21. ned at earth ground This applies to all products that come in contact with the gas Danger An electrical discharge through a gas may couple dangerous high voltage directly to any ungrounded conductor A person may be seriously injured or killed by coming in contact with an exposed ungrounded conductor at a high voltage potential This applies to all products that may come in contact with the gas Proper Grounding Verify that the vacuum port on which the module is mounted is electrically grounded This is essential for safety as well as proper operation The gauge and or case of the module must be connected to earth ground Use a ground lug on the flange if necessary Overpressure Warning Install suitable protective devices that will limit the level of the pressure to less than what the vacuum system can withstand The gauge should not be used above 1000 Torr absolute pressure InstruTech Inc page 4 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Gases other than Nitrogen InstruTech gauges and modules are calibrated for Nz Do not attempt to use with other gases such as argon or CO unless accurate conversion data for Nz to the other gas is properly used Refer to Appendix B for a more complete discussion of issues Do not use this device in an explosive atmosphere or in the presence of flammable gases or fumes Do not use this device to measure the pressure of explosive or combustible g
22. out the chamber including inside the gauge Particles tend to form on cooler surfaces such as in a gauge at room temperature You may slow down the build up of particles in the gauge by keeping the gauge warm within specified limits during the process cycle More commonly particles in the process chamber are swept into the gauge during the vent cycle InstruTech gauges have a screen built into the gauge port to help keep the largest particles out of the gauge In very dirty applications or where particles are small enough to get through the screen an additional filter installed on the inlet may help prolong gauge life further C Cleaning Procedures Caution Cleaning chemicals and their handling pose a variety of health safety and environmental issues Protect yourself your co workers and your surroundings by using protective clothing gloves eyewear etc performing the cleaning in a well ventilated area and disposing of waste materials in a responsible manner Cleaning solvents To be effective the cleaning agent should be one that is likely to remove the suspected contaminant It must also be compatible with the gauge materials of construction Alcohol and water are recommended cleaning solvents as they are compatible with most vacuum systems and components and will remove many contaminants commonly found in vacuum processes such as pump oil However depending on your particular contamination you may need to use a more ag
23. ow relay SPDT contact rating 1A at 30 Vdc resistive or ac non inductive connector 9 pin D male RF EMI protection CE compliant Options amp Accessories PS401 A Power Supply Description Wall mount AC adapter to power one CVM module Power Input 100 240 VAC Power Plug North America 115VAC Plug Output 24 VDC 500mA Output Connector 9 pin D sub pre wired to mate with CVM Connector can be opened to enable user to make connections to signals and relays Cable Length 2m 6ft InstruTech Inc page 3 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Safety Instrutech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions Failure to comply with these safety procedures may result in serious bodily harm including death and or property damage Failure to comply with these warnings violates the safety standards of the installation and intended use of the instrument Instrutech Inc disclaims all liability for the customer s failure to comply with these requirements Although every attempt has been made to consider most possible installations Instrutech cannot anticipate every contingency that arises from various installations operation or maintenance of the module If you have any questions about the safe ins
24. owing page shows the graphical results of the table and formulas above Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale InstruTech Inc page 15 Log Linear Analog Output Voltage vs Pressure Output Signal Volts 0 0001 0 001 0 01 0 1 1 10 100 1000 Pressure Torr This is a plot of the formulas and data for the log linear output signal from the previous page Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Table 3 Displayed Pressure Readings vs Pressure for Selected Gases Pressure N2 Ar He o2 coz kr rreontz Freonaa oz ne cH ressure o moj oo 00 00 00 00 oo oo 00 00 00 01 mTorr o1 o1 of or 07 07 or or or 07 or a mTorr 1 0 07 08 10 11 04 15 15 13 07 17 6 mor 50 33 40 50 44 23 76 70 60 35 77 m0 mror 10 0 66 81 97 mo 48 147 135 121 74 153 80 mror 50 0 324 405 492 649 235 725 69 0 60 0 348 772 1 Tore 1 00 600 940 970 950 400_ 1 05 1 04 155 745 1 60 10 Torr 10 0 4 00 oP 103 497 178 296 339 op 215 279 20 Torr 20 0 680 oP 223 659 2 29 332 372 oP ses 355 50 Tor 60 0 7 85 oP 776 822 2 57 379 414 oP oP a 100 Torr 100 6 88 oP 209 925 274 468 491 oP OP oP 200 Torr 200 979 oP
25. s been contaminated beyond recovery and must be replaced You can try cleaning it again but if the first pass doesn t recover the gauge additional cleanings are not likely to succeed InstruTech Inc page 19 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to SELLER s satisfaction that it is defective returned to SELLER s plant properly identified within twenty four 24 months unless otherwise noted after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER and a return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged
26. tallation and use of this product please contact Instrutech at the address shown on page 1 of this manual Service and operation Do not modify this product or substitute any parts without authorization of a qualified Instrutech technician Return the product to an Instrutech qualified service and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made After servicing this product ensure that all safety checks are made by a qualified service person Replacement Parts When replacement parts are required ensure that the parts are specified by Instrutech Inc Unauthorized substitutions or non qualified parts may result in fire electric shock or other hazards To reduce the risk of fire or electric shock do not expose this product to rain or moisture This product is not waterproof and careful attention must be paid to not spill any type of liquid onto this product Due to the possibility of corrosion under certain environmental conditions it is possible that the product s safety could be compromised over time It is important that the product be periodically inspected for sound electrical connections and grounding Do not use if the grounding or electrical insulation has been compromised Electrical conditions Danger When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors are maintai
27. te any output signal or readout Electronic signal conditioning is required to convert heat loss into a useable signal and or readout of pressure Note that the output signal voltage is not the same as the displayed pressure readings Table 3 below shows the displayed readings at various pressures for selected gases Non Linear Analog Output Non Linear Output 6 F Granville Phillips first Convectron gauge controllers p at Output Volts produced a non linear output signal of 0 375 to 5 659 VDC for 0 to 1000 Torr of No roughly in the shape of an S curve ea as shown at right GP adopted the same output curve for most of their Mini Convectron modules and controllers with g l non linear output though in recent years some GP controllers produced a different S curve a oe The non linear output from InstruTech convection gauges modules and controllers duplicates exactly the original S 1 curve of 0 375 to 5 659 VDC for 0 to 1000 Torr Table 1 below contains the lookup data for converting the H H H H H H H non linear output voltage into pressure values 108 102 107 10 10 102 10 Pressure Torr Log Linear Output Many InstruTech modules and controllers also provide a log Output Volts linear output signal as an alternative to the non linear signal 6 described above This output shown at right is a 1 Volt per decade signal that may be easier to use for data logging or 5 i control Table 2 below conta
28. the sensor you may be able to restore your gauge or module by cleaning Contamination may be as simple as condensed water or as difficult as solid particles Condensation Some gases such as water vapor can condense on sensor surfaces forming a liquid coating that changes the rate at which heat is removed from the sensor which changes the calibration The sensor can often be restored simply by pumping on the gauge between process cycles A dry N2 purge will help speed up drying or the gauge may be gently heated provided temperature doesn t exceed the specified limit 150 C with cables or electronics removed Coatings Some gases can condense on sensor surfaces forming a solid coating which again changes the rate at which heat is removed from the sensor Some of these coatings may be removed using an appropriate solvent following the procedure described below Particles Particles generated by the process may enter the gauge during the process cycle or during the venting cycle The result is interference with heat removal from the sensor The cleaning procedure described below may be able to remove particles from the gauge However particulate contamination is the most difficult to remove as particles can become stubbornly trapped inside the gauge InstruTech Inc page 18 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module In some processes solid particles are created during the process through
29. urve The other model provides a Log linear analog output and one setpoint relay Refer to part number on the module and review Tables 1 and 2 of this manual to make sure you have ordered the appropriate model for your use A built in display provides a convenient user interface for setup and operation of the vacuum gauge This manual applies to InstruTech CVM 211 series modules Specifications measurement range signal 1x10 to 1000 Torr 1 1x10 to 1333 mbar 1 1x10 Pa to 133 kPa display 3 digit LED 3 digits from 999 Torr to 10 0 mTorr 2 digit LED from 9 9 mTorr to 1 0 mTorr 1 digit LED from 0 9 mTorr to 0 1 mTorr materials exposed to gases gold plated tungsten 304 amp 316 stainless steel glass nickel Teflon internal volume 26 cm 1 589 in internal surface area 59 7 cm 9 25 in vveight 136 g 4 8 oz housing molded plastic fittings flanges 1 8 NPT 1 2 tubulation 4VCR 8VCR Mini Conflat NW16CF 2 3 4 Conflat NVV35CF KF16 KF25 KF40 operating temperature 0 to 40 C storage temperature 40 to 70 C bakeout temperature 70 C humidity 0 to 95 RH non condensing mounting position horizontal recommended output 1 log linear 1 to 8 Vdc 1V decade or 2 non linear analog S curve 0 375 to 5 659 Vdc Helix GP compatible input power 11 to 30 Vdc protected against power reversal transients and over voltages trippoint rela one single pole double thr
30. will be replaced by the original factory default values and the display will return to the normal pressure display If you release the lt up gt key before 5 seconds has passed the display will return to normal pressure display without resetting to factory defaults InstruTech Inc page 7 Instruction Manual InstruTech CVM 211 Stinger Convection Vacuum Gauge Module Service Calibration Every InstruTech module is calibrated prior to shipment using Nitrogen However you can adjust the zero and span using the procedure described above Zero and span settings affect the displayed value and the output signal Care should be exercised when using gases other than nitrogen N2 See Appendix B for more information Maintenance Under normal circumstances there is no maintenance required for your InstruTech module Good manufacturing practice suggests the unit should be periodically calibrated against known calibration standards Cleaning The most common cause of all vacuum gauge failures is contamination of the sensor Contamination can be generally characterized as either a reaction of process gases with sensor elements or an accumulation of material on the sensor elements Sensors that fail due to chemical reaction are generally not salvageable Sensors that fail due to coating may possibly be restored by cleaning See Appendix C for a more complete discussion of contamination and cleaning procedures Troubleshooting Possible
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