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Oerlikon Leybold TURBOVAC SL 80 User Manual

1. PE Polyethylene FPM Fluororubber resistant to temperatures up to 150 C 302 F 10 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 1 3 Technical data TURBOVAC High vacuum connection DN 40 KF Pumping speed without inlet screen for N2 on Ar request He H3 Ultimate pressure with two stage oil sealed rotary vane pump with diaphragm pump Max permissible forevacuum pressure with N without purge gas with 0 4 mbar l s 24 sccm purge gas Max gas throughput with water cooling N2 Ar H3 He Weight Pump 1 8 kg Pump with DN 63 ISO K flange with TURBO DRIVE 400 with TURBO DRIVE 400 and air cooler with TURBO DRIVE 400 and water cooling Recommended forevacuum pumps TRIVAC Diaphragm pump DIVAC Operating speed Run up time Power consumption at run up at ultimate pressure Forevacuum connection Type of protection Noise level Ambient temperature during operation storage Max rel air humidity 1 More details in Applied technical standard IEC 721 3 3 3K3 3Z1 3B1 3C1 38S2 3M1 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Description SL 80 DN 63 ISO K 65 I s 60 I s 55 Is 49 Is lt 2 10 10 mbar lt 5 109 mbar 16 mbar 5 mbar 2 0 mbar l s t 1 6 mbar l s 1 0 5 mbar l s t 1 2 mbar l s 1 1 9 kg 2 5 kg 2 8 kg 3 1 kg D 2 5 E 0 8 T 72 000 rom 1 5 min 120 W 17 W DN 16 KF IP 20 lt 46 dB A 15 45 C 15 70 C approx 95
2. Oerlikon Leybold Vacuum Tianjin Co Ltd Beichen Economic Development Area BEDA No 8 Western Shuangchen Road Tianjin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 info vacuum tj oerlikon com sales vacuum tj oerlikon com service vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Shanghai Branch No 33 76 Fu Te Dong San Road Waigaoqiao Free Trade Zone Shanghai 200131 China Sales and Service Phone 86 21 5064 4666 Fax 86 21 5064 4668 info vacuum sh oerlikon com sales vacuum sh oerlikon com service vacuum sh oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Guangzhou Office and Service Center 1st F Main Building Science City Plaza No 111 Science Revenue Guangzhou Science City GZSC 510663 Guangzhou China Sales Phone 86 20 223 23 980 Fax 86 20 223 23 990 info vacuum gz oerlikon com sales vacuum gz oerlikon com service vacuum gz oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Beijing Branch 1 908 Beijing Landmark Towers 8 North Dongsanhuan Road Beijing 100004 China Sales Phone 86 10 6590 7622 Fax 86 10 6590 7607 sales vacuum bj oerlikon com service vacuum bj oerlikon com ndia Oerlikon Leybold Vacuum India Pvt Ltd EL 22 J Block MIDC Bhosari Pune 411026 ndia Sales and Service Phone 91 20 3061 6000 Fax 91 20 2712 1571 s
3. non condensing DN 63 CF 65 Is 60 I s 55 Is 49 Is 3 1 kg 11 Description Option water cooling Cooling water connections Cooling water data Option air cooling Power consumption Volume flow TURBO DRIVE 400 Supply voltage Residual ripple Output Voltage Power Frequency When operating a SL 80 Nominal voltage Max power consumption Max peak current input side Required power output from the power supply Max length of the DC cable shielded at 3 x 1 5 mm at 3 x 2 5 mm Relay output rating Ambient temperature during operation storage Relative air humidity Overvoltage category Contamination grade Temp of the cooling surface For Part Nos 800073V0004 07 Power consumption Type of protection Weight approx 12 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Hose nipples G 1 8 see Section 3 6 0 9 W 20 m h 24 V 10 lt 3 0 24V3 160 W O 1500 Hz 24 V 140 W 6 ADC 2 150 W 5m 20 m 42 V 0 5 A 5 45 C 15 70 C 5 to 85 non condensing ll 2 5 65 C 5 50 C lt 20 W IP 20 0 5 kg Description _ __ a a U ee u y an p a i aM ji oe xe D D io no D a a 104 108 High vacuum pressure Fig 1 2 Pumping speed curves of the SL 80 Purge gas and venting valve Part No 800152V0013 800152V0014 800152V0042 Gas flow rate at 1
4. 47 O Overpressure 5 39 Oxygen 22 P Particles 59 PLC 42 45 Power supply 10 12 17 18 25 28 41 43 48 53 56 58 66 67 Pressure rise 59 Purge gas and venting valve 10 13 19 25 39 40 59 62 R Radiation 23 24 60 Relay 12 45 46 48 52 53 Resonance damper 29 40 Rotor 5 7 8 10 23 28 31 48 52 54 57 60 62 65 67 Index S Safety valve 5 34 Shock 57 Split cage DC motor 10 Starting pressure 57 T Temperature sensor 10 66 Torque 5 7 23 28 33 V Venting valve 10 13 19 25 39 40 54 59 Vibration 23 28 29 57 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 73 Sales and Service Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 1234 Fax 49 0 221 347 1245 sales vacuum oerlikon com www oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area North Northeast Branch Office Berlin Industriestrasse 10b D 12099 Berlin Phone 49 0 30 435 609 O Fax 49 0 30 435 609 10 sales vacuum bn oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area South Southwest Branch Office Munich Karl Hammerschmidt Strasse 34 D 85609 Aschheim Dornach Phone 49 0 89 357 33 9 10 Fax 49 0 89 357 33 9 33 sales vacuum mn oerlikon com service vacuum mn oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area West amp Benelux Branch Office Cologne Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 12
5. 5 V receiver lt 0 3 V Interface connector 9 way Sub D type socket on the instrument male thread UNC4 40 Note After having changed the bus address through the rotary switch the frequency converter must be switched off yellow power LED off and then on again so as to enable the new address setting Bus addresses over 15 can only be set via Parameter 37 Refer also to Operating Instructions GA 05 281 50 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Interfaces Fig 4 4 Connection of the RS 485 bus 4 3 3 Profibus DP The Profibus DP used has been defined in the standards EN 50170 and VDI VDE 3689 For more information on the Profibus system The New Rapid Way to Profibus DP Manfred Popp Profibus Nutzerorganisation e V Haid und Neu Str 7 76131 Karlsruhe Germany P N 4 072 www profibus com Upon request we shall be pleased to provide detailed information on the hardware and the protocol used for the data Refer also to Operating Instructions GA 05 281 4 3 4 Ethernet IP interface See additional Operating Instructions 17200908 The Operating Instruction will be delivered on a CD with Part No 8000738V0007 or can be downloaded from our website 5V 9 390 Q For longer cable runs e Links for activation of the e22SHese2s g9 as ou tormina Bus terminator X5 for longer cable runs 150Q TxD RxD
6. 9 0 221 347 1234 Fax 9 0 221 347 1245 documentation vacuum oerlikon com 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 69 oerlikon leybold vacuum EC Incorporation Declaration The manufacturer Oerlikon Leybold Vacuum GmbH Bonner Stra e 498 D 50968 Cologne Germany Tel 49 0 221 347 0 email oerlikon com herewith declares that the following product Product designation Turbomolecular pump Type designation P N TURBOVAC SL 80 800002V3xxx TURBOVAC TW 70 H 800002V1xxx 800002V2xxx 800003V1934 800002V4937 TURBOVAC TW 70 LS 8000050954 TURBOVAC TW 70 LS2 8001590001 x 1 to 9 complies with the following fundamental requirements of the EC Machinery Directive 2006 42 EG Annex I Paragraph 1 1 2 1 1 3 1 1 5 1 2 1 1 2 3 1 2 4 1 1 2 4 2 1 2 6 1 3 1 1 3 2 1 3 3 1 3 4 1 3 7 1 5 1 1 5 2 1 5 4 1 5 5 1 5 13 1 6 1 and 1 7 1 Moreover the incomplete machine complies with all regulations laid down in the Low Voltage Directive LVD 2006 95 EG The following harmonised standards have been applied EN 1012 2 1996 Compressors and vacuum pumps Safety requirements Part 2 Vacuum pumps EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use Part 1 General requirements The incomplete machine may only be put into operation after it has been determined that the machine into which the incomplete machine shall be installed complies with
7. Vent on frequency O 1200 300 Hz r w ut6 Frequency at which the venting valve shall be switched on in the event of a mains power failure Power failure venting can be enabled through P240 Vent off frequency 0 1200 5 Hz r w ul6 Frequency at which the venting valve shall be switched off in the event of a mains power failure Power failure venting can be enabled through P240 Generator operation 0 1 0 r w ul6 O inactive 1 active 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Interfaces No Designation Min Max Default Unit r w Format Description 303 Actual operating 0 65535 0 r u16 Bit 0 Normal operation status Bit 1 Ready for switch on Bit 2 Speed is increasing Bit 3 Speed is dropping Bit 4 Generator operation Bit 5 Standby Bit 6 reserved Bit 7 reserved 312 Catalog number 0 127 CHAR r u16 Catalogue number of the converter of converter 8000xxV000x One ASCII char per index 313 Product name 0 127 TD_400 CHAR r u16 Product name of the converter Index 0 10 usable 0 127 CHAR r u16 One ASCII char per index Only for DeviceNet purpose 315 Serial number of O 127 CHAR r u16 Serial number of the converter converter XXXXXXXXXXX One ASCII char per index Index 0 10 usable 918 Act Profibus addr O 65535 O r u16 Active Profibus address 947 Current error number 0 65535 O r u16 Currently pending error See Section 5 Troubleshooting 130000760_002_A1 10 2009 Oer
8. y 1m 8000910100 J 3m 800091V0300 B 5m 800091V0500 oe 10m 800091V1000 20m 800091V2000 Mains cable for TURBO CONTROL 300 3 m long with EURO plug 800102V0002 with US plug 6 15P 800102V1002 with UK plug 800102V0003 PC software Turbo Drive Server for Windows 95 and higher CD ROM E Display change save and compare parameter lists E Integration of customer s software E Record parameter data 8001 10V0102 The software can also be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation gt Download Software GSD file for Profibus DP Can be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation gt Download Software 18 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Mechanical accessories Plug for connector REMOTE with integrated ON OFF switch for the pump Sub D plug 9 way Heat sink for frequency converter Top hat rail adaptor mounting aid for TURBO DRIVE 400 and TURBO POWER 300 Purge gas and venting valve 0 4 mbar I s at 1 bar 24 V DC 230 V AC 115 VAC DN 10 KF G1 Pump connection Adapter M8 DN 16 KF incl O ring 9 25 x 1 78 and Adapter centering ring DN 10 16 KF with sinter filter Gas side connection G1 4 in adapter with filter Including O ring and gasket Venting valve 24 V DC Power failure venting valve 24 V DC Spare filter Part No 152 48 800110V0001 800110V0003 80
9. y 8 I i 6 120 Q ee a Q SemS X5 i 390 Q TxD RxD 7 TURBO DRIVE X5 7 ys 8 X5 7 ys 8 l TURBO TURBO aa DRIVE DRIVE Master 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 51 Interfaces 4 3 5 Parameter list No Designation Min 1 Converter type O 2 Software version 0 3 Actual frequency O 4 Actual intermediate 0 circuit voltage Actual current O Actual electrical power O Actual motor 10 temperature 8 Save data command 0 11 Actual converter 10 temperature 16 Motor temperature 0 warning threshold Nominal motor current S Maximum frequency 750 Minimum frequency 0 20 Critical frequency 0 23 Pump type 24 Setpoint frequency 0 25 Normal operation 35 27 Current norm oper 5 29 Relay function X1 O Max Default Unit 65535 65535 65535 1500 150 65535 150 65535 150 150 60 1200 1200 1200 255 1200 99 60 0 10000 0 30 85 5 0 1200 910 600 1200 95 Field O specifies the function for normal operation Frequency dependent otor current dependent Fieldbus controlled lt Pump at standstill f lt 3 Start command is present Ready for switch on STW N Hou We wot th th et YON OT7T ONDARWN O Fieldbus controlled 52 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Bit Trigger current bearing temperature P122 Venting function P247 P248 ield 1 specifies the function fo
10. 1 generator operation No 32 36 37 119 122 125 126 127 128 131 132 133 134 139 140 150 151 Interfaces Designation Min Max Default Unit r w Format Description Max run up time 30 2000 720 S r w ul6 Max permissible time during which the pump must attain the normal operation threshold P24 P25 with the start signal present Start delay time O 255 O 01min rw ul6 Delays the start of the pump to allow lead time for the fore vacuum pump for example RS485 address 0 31 O r w ul6 Parameterizable RS485 address The address is specified either through the address switch or a value entered here provided the address switch is set to 0 A change of this parameter setting will only be effective after the power supply has been switched off and on Bearing run in 0 a 0 r w ul6 O deactivated function 1 new pump type starts with run in sequence Run in using the run in sequence specified through the pump table without run up time monitoring Run in Run in Run in Run in Run in Run in speed 1 time 1 speed2 time2 speed3 time3 Hz s Hz s Hz s 180 3600 350 5400 600 5400 Normal TMS 20 70 40 C r w ut6 Switch on temperature for fan when P29 0 3 For P125 gt P122 the normal operation relay is energised Motor temperature 10 150 0 C r i16 like P7 Bearing temperature 10 150 60 C r i16 not used for SL 80 warning threshold Motor temperature 10 150 0 C r
11. 84 Motor overtemperatu no re warning 101 overload warning The pump speed has Forevacuum pressure too Check the ultimate pressure of no dropped under the nor high the backing pump and install a mal operation threshold bigger backing pump if req Gas flow too high Seal leak check process 103 Supply voltage Intermediate circuit vol DC supply voltage below Check the voltage at the power no warning tage too low or maxi 24V supply and if required set up cor mum time for generator rectly e WERE jans voltage has failed Remedy the cause for the mains power failure 106 overload error The pump speed has Forevacuum pressure too Check the ultimate pressure of yes dropped under the high the backing pump and install a minimum speed bigger backing pump if req Gas flow too high Seal leak check process 111 Motor undertempera The minimum permissi Ambient temperature too Ensure min ambient tempera yes ture error ble motor temperature low ture of 0 C IS not attained Pump cooling too high Reduce water cooing 116 Permanent overload The speed of the pump Forevacuum pressure too Check the ultimate pressure of yes error has dropped below the high the backing pump and install a normal operation thres bigger backing pump if req hold and has stayed f there for a longer peri Gas flow too high Seal leak check process od of time 117 Motor current error Motor current less than Cable fault Contact Oerlikon Leybold yes nominal current Vacuum Service Fau
12. O ring Centering ring Retaining ring C pe lar flange Bolt with washer Pump housing with SO K flange Flange DN 63 ISO K at ISO F flange with claws TTSS H Li 22 5 L2 ee Fig 3 6 Mounting the DN 63 ISO K flange 32 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Outer ring O ring Centering ring Claw with bolt Pump housing with ISO K flange Number of clamps 4x M10 Minimum clamp strength Fastening torque yield strength gt 450 N mm 20 8 Nm The fastening torque levels apply to lubricated threads Number of bolts 4x M8 Minimum bolt strength yield strength gt 450 N mm Minimum screw in depth L2 12 mm for steel 16 mm for aluminium Recommended bolts for steel flanges M8x30 ISO 4014 for alum flanges M8x35 ISO 4014 Bolt quality 8 8 or stainless steel bolts A2 A4 70 Fastening torque 20 3 Nm Number of claws 4 x M8 Minimum strength for bol and claw yield strength gt 450 N mm Minimum screw in depth L2 12 mm for steel 16 mm for aluminium Recommended bolts for steel flanges M8x35 ISO 4014 for alum flanges M8x40 ISO 4014 Bolt quality 8 8 or stainless steel bolts A2 A4 70 Fastening torque 20 3 Nm Installation DN 63 CF flange connection with clearance hole Number of bolts 8x M8 mo Minimum bolt strength yield strength gt
13. against humidity and contact with water Avoid any heat stress on the line due to unfavourable laying conditions Suitably support the connecting lines so that the pumps are not exposed to any major mechanical stress Do not expose pump frequency converter and the connections to dripping water Note the information on the IP type of protection When storing pump frequency converter and connecting lines in a humid atmosphere these can suffer corrosion Corrosion gives rise to conductive deposits which in turn can cause short circuits and reduce the insulation levels of electrical components Transport pump frequency converter and connecting cables only in their original packaging so as to avoid any mechanical damage which in turn may reduce air gaps and creepage distances When applying external voltages above 42 V to the connection termi nals observe the applicable VDE safety regulations Make the electrical connections only after pump and accessories e g air cooler have been installed mechanically 6 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 0 3 1 2 Safety Information Thermal hazards Handle the equipment only while vented and cooled down CAUTION During operation of the pump certain areas can get so hot 80 C max so that there is the risk of suffering burns Protect hot parts against being touched Note the warning information on the housing surface If these warning notices have be
14. converter dimensions in mm OEM power supply with screw terminals SITOP 24V 10A 152 50 E supplies the TURBO DRIVE 400 with 24 V DC other power supplies on request 24 V DC cable TURBO DRIVE 400 OEM power supply 3m 200 12 732 5m 200 12 733 10m 200 12 734 20m 200 12 735 Mains cable for power supply 2 m long with EURO plug 800102V0001 with US plug 5 15P 800102V1001 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 17 Description Part No Power supply unit plug and play TURBO POWER 300 800100V0002 Aih O E supplies the TURBO DRIVE 400 with 24 V DC m AN E plug amp play cables wA E desktop unit or rack mountable E A 24V DC Power cable TURBO DRIVE 400 TURBO POWER 300 1m 800094V0100 3m 800094V0300 5m 800094V0500 10m 800094V1000 20m 800094V2000 Mains cable for TURBO POWER 300 3 m long with EURO plug 800102V0002 with US plug 6 15P 800102V1002 with UK plug 800102V0003 Power supply and control unit o staat TURBO CONTROL 300 800100V0001 E supplies the TURBO DRIVE 400 with 24 V DC O NORMAL Lo E plug amp play cables POWER PIOR E desktop unit or rack mountable E with power switch Penn E with start stop switch for the turbomolecular pump E remote control TURBO CONTROL 300 E status LEDs and status relays 24V DC Control cable TURBO DRIVE 400 TURBO CONTROL 300
15. i16 like P7 Motor temperature 10 150 2 C r i16 Falling below the motor temperature lower warning lower warning threshold threshold results in a warning Motor temperature 10 150 10 C r i16 Falling below the motor temperature lower error threshold lower error threshold causes the pump to be switched off Bearing temperature 10 150 67 C r i16 not used for SL 80 error threshold Motor temperature 10 150 90 C r i16 Exceeding the motor temperature error threshold error threshold causes the pump to be switched off Enable cooling fan O 19 19 r w 116 O Cooling fan off on turbopump 19 Cooling fan on Current reduction 30 100 100 r w ul6 Is used for the reduction of the factor maximum consumption current e g for adaptation of low performance power supplies Note values lt 100 reduce the pump performance and increase the run up time ntermediate circuit O 150 O 0 1 A r i16 Actual average intermediate circuit current current of the converter Standby frequency 0 1200 910 Hz r w ul6 Standby operation frequency setpoint Enable standby O 1 O r w ul6 O normal speed P24 1 standby speed P150 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 53 Interfaces No 171 174 176 179 180 182 183 184 227 247 248 249 54 Designation Min Max Default Unit r w Format Description Error code memory 0 65535 0 r u16 Indexed parameter for storing the most recent 40 error c
16. unchanged The actions linked to the other bits are run Resp delay time O 20 10 ms r w ul6 Response delay time Pause time between received and transmitted USS protocol string of the frequency converter s serial interface RS232 and RS485 We recommend not to change the default setting 10ms Watchdog timer USS 0 65535 10 O 1s r w ut6 Delay when cancelling the control rights of the bus adapter and time out in the case of a communication interruption Defines the time characteristic when cancelling bit 10 in the control word of the USS protocol or when an interruption in the communication between bus adapter and converter and electronics is detected Handling when cancelling bit 10 or when there is an interruption on the communication side of the USS bus adapter is the same Value 0 0 Indefinite time delay In this way a change of the control right is inhibited Values 0 1 6553 5 A change in the control right corresponding to the setting of parameter 179 is only effected after the time span defined through parameter 182 has elapsed Max passing time O 1800 500 s r u16 Max permissible time during which the pump must with the start signal present have passed through the critical soeed range between 60 Hz and P20 Converter operating 0 0 0 01 h r u32 Counts the operating hours of the hours 2147483647 converter during active pump operation Warning bits 1 O 65535 O r u16 Active warnings described bit per bit See Section 3 3 6
17. 0152001 800152001 800152004 8001 10V001 800110V001 800120V001 3 4 2 4 800120V0021 E 200 18 517 Description 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 19 Description Part No inlet screen DN 40 KF E 200 17 169 DN 63 ISO K E 200 17 170 DN 63 CF E 200 17 171 Flange heater only for pumps with CF flange DN 63 CF 230 V 854 04 DN 63 CF 110 V 854 07 Copper gasket rings for CF flange Set of 10 pieces DN 63 CF 839 44 Set of hex screws with nuts screws and washers for CF flange DN 63 CF 838 81 Centering ring Al with O ring FPM DN 63 ISO K 268 41 Clamps Set of 4 pieces 267 01 Centering ring with O ring for DN 16 KF Al CR 183 26 ON RO Al FRM 182 06 Clamping ring Al DN 16 KF 183 41 Clamping Collar DN 40 KF for Ultra Sealing Rings 882 78 7 CA UJ ne 20 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Transport and storing 2 Transport and storing Remove the equipment from the transportation box and keep the packaging Make sure that the product has not been damaged during transportation If Keep the packaging this unit is damaged contact your carrier and inform Oerlikon Leybold Vacuum if necessary For storage of the product use the packaging pro vided Be careful not to damage the sockets and connections during transpor
18. 1 RS 232 C interface SERVICE X5 49 4 3 2 RS 485 interface 50 4 3 3 Profibus DP 51 4 3 4 Ethernet IP interface 51 4 3 5 Parameter list 52 4 3 6 Warning codes for parameter 227 56 4 4 Switching on 57 4 5 Shutting down 58 4 6 Venting 59 4 7 Bakeout 60 4 8 Removing the pump from the system 61 5 Maintenance 62 5 1 Cleaning 62 5 2 Oerlikon Leybold Vacuum Service 63 6 Troubleshooting 64 7 Waste disposal 68 EC Incorporation Declaration 70 EC Declaration of Conformity 71 Index 73 Original installation and operating instructions 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 3 Safety Information DANGER gt WARNING gt CAUTION gt NOTICE Obligation to Provide Information Before installing and commissioning the TURBOVAC carefully read these Operating Instructions and follow the information so as to ensure optimum and safe working right from the start The Oerlikon Leybold Vacuum TURBOVAC SL 80 has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions The pump must only be operated in the proper condition and under the conditions described in the Operating Instructions It must be operated and maintained by trained per sonnel only Consult local state and nationa
19. 2V3001 High vacuum flange DN 63 CF 800002V3002 High vacuum flange DN 63 CF VA 800002V3003 High vacuum flange DN 40 KF 800002V3004 1 5 Accessories Frequency converter TURBO DRIVE 400 with RS 232 C interface 800073V0002 with RS 485 C interface 800073V0003 with Profibus interface 800073V0004 Connecting cable pump frequency converter 0 2 m long 800152V0021 0 3 m long 800152V0023 0 4 m long 800152V0022 1 0 m long 152 47 2 5 m long 864 49 3 0 m long 864 40 5 0 m long 864 50 Mounting kit TD 400 for TURBOVAC SL80 Including 0 2 m long connection cable pump frequency converter For installing the frequency converter beside the pump 8001 10V005 underneath the pump not for TD 400 with Ethernet IP interface 8001 10V008 Water cooling with G 1 8 connections 800135V0001 incl 2 hose nipples G 1 8 Outer 8 mm for water hose 2 sealing rings approx 10x4x1 4 screws M4x20 DIN 912 4 screws M4x30 DIN 912 for mounting the frequency converter under the pump Air cooler 800136V0001 is powered by the pump 4 screws M4x10 DIN 912 16 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Description 73 3 L h oo 24V DC X4 O 18 5 4 100 79 0 AY Ooo OL ITO TURBO DRIVE TD 400 5 50 TO 8 ORTO i SERVICE X5 an REMOTE X1 1 5 i 9 Fig 1 5 Dimensional drawing for the frequency
20. 303 7000 Fax 65 6773 0039 sales vacuum sg oerlikon com service vacuum sg oerlikon com Taiwan Oerlikon Leybold Vacuum Taiwan Ltd No 416 1 Sec 3 Chunghsin Road Chutung Hsinchu County 310 Taiwan R O C Sales and Service Phone 886 3 500 1688 Fax 886 3 583 3999 sales vacuum hc oerlikon com service vacuum hc oerlikon com oerlikon leybold vacuum www oerlikon com leyboldvacuum
21. 450 N mm Copper gasket o Recommended op SS bolt M8x45 ISO 4014 Bolt with washer and nut Bolt quality 8 8 or Spee nama stainless steel bolts A2 A4 70 ump housing wi 2 LJ CF flange astening torque 15 Nm i a The fastening torque levels apply to lubricated threads DN 63 CF flange connection with blind hole thread Number of bolts 8x M8 gt Minimum bolt H Copper gasket strength yield strength gt 450 N mm A Stud bolt with washer Miimu screw aa Tee and Ait depth L2 12 mm for steel as mM Recommended bolts H Pump housing with for steel flanges M8x30 DIN 835 L1 46 mm CF flange Bolt quality 8 8 or stainless steel bolts A2 A4 70 Fastening torque 15 Nm Fig 3 7 Mounting the DN 63 CF high vacuum flange 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 33 Installation Forevacuum pump DANGER A 34 Safety valve Adsorption trap 3 5 Forevacuum connection The high vacuum pressure level which can be achieved is a function of the volume of gas flow Q to be pumped and the forevacuum pressure We recommend using dry running diaphragm vacuum pumps or TRIVAC rotary vane pumps for this purpose Connect the clean forevacuum line The connecting flanges must be clean and undamaged The cross section of this line must be so wide that safe operation of the pump can be ensured The forevacuum line must be tight Haza
22. 70 Fax 49 0 221 347 1291 sales vacuum kn oerlikon com Oerlikon Leybold Vacuum GmbH Service Competence Center Emil Hoffmann Strasse 43 D 50996 Cologne Suerth Phone 49 0 221 347 1439 Fax 49 0 221 347 1945 service vacuum kn oerlikon com Oerlikon Leybold Vacuum GmbH Mobil Customer Service Emil Hoffmann Strasse 43 D 50996 Cologne Suerth Phone 49 0 221 347 1765 Fax 49 0 221 347 1944 service vacuum kn oerlikon com Oerlikon Leybold Vacuum Dresden GmbH Service Competence Center Zur Wetterwarte 50 Haus 304 D 01109 Dresden Service Phone 49 0 351 88 55 00 Fax 49 0 351 88 55 041 info vacuum dr oerlikon com 10 09 Oerlikon 5700 Mellon Road USA Export PA 15632 Fax LV_10305_2009 Europe Belgium Oerlikon Leybold Vacuum Nederland B V Belgisch bijkantoor Leuvensesteenweg 542 9A B 1930 Zaventem Sales Phone 32 2 711 00 83 Fax 32 2 720 83 38 sales vacuum zv oerlikon com Service Phone 32 2 711 00 82 Fax 82 2 720 83 38 service vacuum zv oerlikon com France Oerlikon Leybold Vacuum France S A 7 Avenue du Qu bec Z A de Courtaboeuf 1 B P 42 F 91942 Courtaboeuf Cedex Sales and Service Phone 33 1 69 82 48 00 Fax 33 1 69 07 57 38 info vacuum ctb oerlikon com sales vacuum ctb oerlikon com Oerlikon Leybold Vacuum France S A Valence Factory 640 Rue A Berg s B P 107 640 F 26501 Bourg l s Valence Cedex Service Phone 33 4 75 82 33 00 F
23. A ted Adhere to the relevant regulations and take the necessary precau tions when handling contaminated parts Separate clean components according to their materials and dispose of these accordingly We offer this service Further details are available on request When sending us any equipment observe the regulations given in Section 5 2 Oerlikon Leybold Vacuum service 68 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum oerlikon leybold vacuum Our products comply with the requirements of the EC Machinery Directive up to December 28 2009 98 37 EG from December 29 2009 2006 42 EG and fulfil the corresponding regulations laid down in the Low Voltage Directive LVD 2006 95 EG und Electromagnetic Compatibility EMC Directive 2004 108 EG An Incorporation Declaration in accordance with the EC Machinery Directive 2006 42 EG is provided on the next page Should you require a separate copy of the Incorporation Declaration with the current date then please request it from documentation vacuum oerlikon com In order to be able to send you the proper Incorporation Declaration we require the part number and the serial number of the corresponding product as well as your full address You can contact our technical documentation officer Mr Herbert Etges best through the following e mail address documentation vacuum oerlikon com Oerlikon Leybold Vacuum GmbH Bonner StraBe 498 D 50968 K ln Tel
24. E Qa L a Frequency converter Bracket Sliding nuts I aoe Protection cap MAN VAN Aj Fig 3 2 Mounting air cooling and frequency converter beside the pump 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 27 Installation NOTICE WARNING A Torque when the rotor seizes High vacuum flange Closure screw for the purge gas connection Forevacuum connection Cooling water connection Connection thread for the vibration sensor Connection cable to TURBO DRIVE Power supply of the TURBO DRIVE Fig 3 3 Connection elements 3 4 Attach the pump to the vacuum chamber Never touch the rotor Touching the rotor may cause injury and damage the rotor bearing The high vacuum flange must be solidly mounted to the vacuum cham ber Observe Safety Information 0 1 6 Remove the transport seal from the intake flange and remove the desiccant Pay attention to maximum cleanliness when connecting If the pump should suddenly seize an ensuing deceleration torque of up to 175 Nm will have to be absorbed by the system In most applications the pump is flanged to the high vacuum flange at the apparatus The pump can be mounted and operated in any desired attitude No support is required If nonetheless an additional fastening is requested you can use the 4 boreholes in the pump s bottom Use exclusively flange connecting components and fittings which ha
25. If reactive gases in low concentrations must be pumped operate the pump with purge gas We would be glad to consult with you as regards the media which can safely be handled with this unit Install a micropore filter when pumping media which contains dust Suited for venting or purging are all gases Suited gases HB which will not cause corrosion or pitting in aluminium and steel and H which in connection with process deposits in the pump will not cause cor rosion or sticking For venting and as the purge gas we recommend inert gases like nitrogen or argon The temperature of these gases should be between 5 C and 80 C max relative humidity should not exceed 10 ppm The gas must be clean In individual cases and after consultation also dry filtered oil free air or filte red ambient air may be used filter mesh lt 1um Change the filters after some time at least annually 4 2 Start up The TURBO DRIVE 400 offers the possibility of gently running in pumps which were not operated for a period between 6 and 12 months Before starting set up parameter 119 correspondingly Turbomolecular pumps which were not operated for a period of over 12 months should be returned to us For more information on this please contact your local sales partner 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 47 Interfaces 4 3 Interfaces The frequency converter has a RS 282 interface as standard SERVICE X5 and is optionally eq
26. TURBOVAC with integrated frequency converter to TURBO CONTROL 300 3 8 2 Connecting the power supply The power supply must meet the requirements given in Section 1 5 Peak loads in the kHz range may be present on the DC side The power supply should have a current limitation or control When connecting several frequency converters to a single power supply then each frequency converter must be fused separately 24 VDC cable Connect the frequency converter to the 24 V DC power supply or to the TURBO CONTROL 300 or to the TURBO POWER 300 via the 24 V DC cable NOTICE Ensure correct polarity Pin 1 24 VDC ch Pin 2 OV Pin 3 GND The frequency converter is equipped with an internal 8 AT slow blow fuse It can only be replaced by Oerlikon Leybold Vacuum staff Connect the power supply to the mains 42 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Installation Shielding Pin 3 GND Pin1 24V Pin2 OV Fig 3 17 Pin assignment of the DC connector X4 Model Hirose HS16P 3 Heat sink and forced cooling required Operation possible without additional coolin Ambient temperature 1 2 3 4 5 6 Motor current Parameter 5 Fig 3 18 Cooling requirements for the TURBO DRIVE 400 when fitted separately Emergency shut down By shutting down the power supply voltage Please note the information on shutting down and emergency shut down provided in Section 4 5 Shutting do
27. afety Informations 0 4 6 Disconnect the pump only when it has come to a full stop The green LED at the frequency converter must have gone out Then switch the mains power off and wait until the yellow power LED is off Then only disconnect any cable connections The pumps may be contaminated with process gases These gases may be Hazardous gases toxic and hazardous to health In addition deposits with similarly dangerous properties may have formed Many of these gases and deposits form acids Deposits when they come into contact with humid air This will result in serious corro sion damage to the pump To avoid health hazards and corrosion damage when the pumps are detached from the system fasten a container of desiccant under the trans Desiccant port cover of the high vacuum connection and then close the pump imme diately at all flange connections Store the pump with a desiccant in an air tight PE bag Corrosion damage due to faulty packing will nullify the guarantee Pack the pump so that it cannot be damaged during shipping and storage Pay particular attention to protection for the flanges and the electrical plug Observe the instructions in Section 5 2 if you forward the pump to Oerlikon Leybold Vacuum 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 61 Maintenance Rotor exchange WARNING A 62 Purge gas filter Adsorption trap 5 Maintenance We recommend an exchange of the rotor un
28. ales vacuum pu oerlikon com service vacuum pu oerlikon com Japan Oerlikon Leybold Vacuum Japan Co Ltd Headquarter 23 3 Shin Yokohama 3 chome Tobu A K Bldg 4th Floor Kohoku ku Yokohama shi 222 0033 Sales Phone 81 45 47 11 3330 Fax 81 45 471 3323 info vacuum yh oerlikon com sales vacuum yh oerlikon com Oerlikon Leybold Vacuum Japan Co Ltd Osaka Sales Office 3F Shin Osaka Terasaki No 3 Bldg 1 5 28 Nishi Miyahara Yodogawa ku Osaka shi Osaka 532 0004 Phone 81 6 6399 6271 Fax 81 6 6399 6273 info vacuum os oerlikon com sales vacuum os oerlikon com Oerlikon Leybold Vacuum Japan Co Ltd Tsukuba Technical Service Center Kogyo Danchi 21 Kasuminosato Ami machi Inashiki gun Ibaraki ken 300 0315 Service Phone 81 298 89 2841 Fax 81 298 89 2838 info vacuum iik oerlikon com sales vacuum iik oerlikon com South Korea Oerlikon Leybold Vacuum Korea Ltd SF Jellzone 2 Tower Jeongja dong 159 4 Bundang gu Sungnam si Gyeonggi do Bundang 463 384 Korea Sales Phone 82 31 785 1367 Fax 82 31 785 1359 sales vacuum bd oerlikon com Service 623 7 Upsung Dong Cheonan Si Chungcheongnam Do Korea 330 290 Phone 82 41 589 3035 Fax 82 41 588 0166 service vacuum cn oerlikon com Singapore Oerlikon Leybold Vacuum Singapore Pte Ltd 1 Science Park Road Singapore Science Park 2 02 12 Capricorn Building Singapore 117528 Sales and Service Phone 65 6
29. alls Installation Vibration influence Earthquake protection 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 29 Installation DN 40 KF flange connection with clamping collar for ultra sealing rings a g I A Z Centering ring with O ring Fastening torque 10 Nm The fastening torque applies to forged Clamping collar for ultra sealing threads rings with 3 fastening bolts M8x35 Pump housing with KF flange Fig 3 5 Mounting the DN 40 KF high vacuum flange NOTICE NOTICE Install an inlet screen Foreign objects which enter the pump through the intake would cause serious damage to the rotor That s why we recommend installing an inlet screen Damages caused during operation without the inlet screen are excluded from warranty Insert the inlet screen so that the surface curvature is at the top and apply some pressure lightly at the rim so that the inlet screen engages see Fig 3 4 If dust could pass from the vacuum chamber into the pump then a micropo re filter must be installed between the vacuum chamber and the pump Flange mounting for KF flanges When flanging on the high vacuum connecting flange place the O ring on the centering ring The O ring must remain in place smooth and untwisted When using an ultra sealing ring always use an outer support ring The contact surfaces of pump housing vacuum system and centering ring must be free of grease and
30. as to ensure adequate strength in case the rotor should seize Flange mounting for CF flanges Before fitting check to ensure that the sealing edge is undamaged Do not touch the copper gasket and the sealing edge with your bare hands The contact surfaces of pump housing vacuum system and centering ring must be free of grease and dry so as to ensure adequate strength in case the rotor should seize Mount the turbomolecular pump according to Fig 3 7 and tighten the bolts crosswise step by step When the pump shall be baked out the threads of the bolts should have been lubricated with a high temperature lubricant Owing to the deformation of the copper gasket the fastening torque of all bolts must be checked once more after having completed the installation work During operation the pump can get so hot that there is the risk of suffer ing burns up to approximately 80 C Protect the hot parts against being touched Installation CAUTION A NOTICE NOTICE CAUTION 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 31 Installation Flange DN 63 ISO K at ISO K flange aI Ss oy a a ANY Outer ring O ring Centering ring Clamp Pump housing with ISO K flange Flange DN 63 ISO K at ISO K flange with collar flange Xs Sno Li Outer ring
31. ax 33 4 75 82 92 69 marketing vacuum vc oerlikon com Great Britain Oerlikon Leybold Vacuum UK LTD Silverglade Business Park Leatherhead Road Unit 2 KT9 2QL Chessington Surrey London Sales Phone 44 13 7273 7300 Fax 44 13 7273 7301 sales vacuum n oerlikon com Service Phone 44 20 8971 7030 Fax 44 20 8971 7003 service vacuum n oerlikon com Italy Oerlikon Leybold Vacuum Italia S r l Via Trasimeno 8 1 20128 Milano Sales Phone 39 02 27 22 31 Fax 89 02 27 20 96 41 sales vacuum mi oerlikon com Service Phone 39 02 27 22 31 Fax 89 02 27 22 3217 service vacuum mi oerlikon com Netherlands Oerlikon Leybold Vacuum Nederland B V Proostwetering 24N NL 3543 AE Utrecht Sales and Service Phone 31 30 242 6330 Fax 81 30 242 6331 sales vacuum ut oerlikon com service vacuum ut oerlikon com Leybold Vacuum USA Inc Phone 1 724 327 5700 1 724 325 3577 info vacuum ex oerlikon com Spain Oerlikon Leybold Vacuum Spain S A C Huelva 7 E 08940 Cornella de Llobregat Barcelona Sales Phone 34 93 666 43 11 Fax 34 93 666 43 70 sales vacuum ba oerlikon com Service Phone 34 93 666 46 16 Fax 34 93 685 43 70 service vacuum ba oerlikon com Sweden Oerlikon Leybold Vacuum Scandinavia AB Box 9084 SE 40092 G teborg Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 info vacuum gt oerlikon com sales vacuum gt oerlikon com Visiting deli
32. bar 0 4 mbar l s 24 sccm Solenoid valves 2 normally closed Mains supply 24 V DC 230 V AC 115 VAC Power consumption 4W 6 W 4 W Connection to pump DN 10 KF Needed for this Adapter M8 DN10 16KF P N 800110V0011 Including O ring 9 25 x 1 78 and Adapter centering ring DN 10 16 KF with sinter filter Gas connection G1 4 in Recommended for this Adapter with filter including O ring and gasket 800110V0012 Dimensions 60 x65x45mm 61x65x45mm_ 61x65x 45mm 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 13 Description Od DN d h m 40KF 55 155 237 SS 63IS0 K_ 95 145 227 63CF 113 5 166 248 Purge gas connection pump with flange DN 63 ISO K drawn Fig 1 3 Dimensional drawings for SL 80 pumps combination examples dimensions in mm 14 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Description Od 100 109 DN d h2 h3 40 KF 55 163 217 63 ISO K 95 153 207 63CF 113 5 174 228 Fig 1 4 Dimensional drawings for SL 80 pumps combination examples dimensions in mm 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 15 Description 1 4 Ordering data TURBOVAC SL 80 Part No High vacuum flange DN 63 ISO K 80000
33. ch are screwed into the bottom of the pump use the washers Otherwise the bolts may possibly be too long The stop plate serves as a mounting aid With it the sliding nuts can be moved to their correct position The attached parts may provided flanges and plugs are not in the way be fitted in 15 increments as required When fitting as shown in the figures the 0 2 m long cable will do for the frequency converter When the power supply connector shall point in the other direction then the 0 4 m long cable will be needed Insert the connecting cable from the air cooler into the air cooler socket When fitting be sure not to pinch the cable As the purge gas and venting valve use either valves with a M8 screw in thread or screw in the M8 DN16KF adapter and connect the valve to it See also Section 3 7 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 25 Installation Frequency converter 4 screws Sliding nuts Mounting panel 4 cylinder head screws with washers Water cooling Protection cap Fig 3 1 Mounting water cooling and frequency converter underneath the pump 26 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Installation Air cooler 4 cylinder head screws with washers Hoo Stop plate mounting aid lt Air cooler socket B
34. connected it to a suitable backing pump Operation with additional heat sources involving thermal radiation thermal conduction via the high vacuum or the forevacuum flange strong magne tic fields or very hot process gases for example Use in systems in which impact stress and vibrations or periodically occurring forces affect pump frequency converter and cables Operation on moving system or system components locks or movable pump systems for example Operation at vibration absorbers and vacuum components gate valves valves which are not capable of sustaining the specified deceleration tor que should the pump rotor seize Stepping on pump add on parts drive electronics flanges and cables to climb onto the system Fitting of add on parts to the forevacuum flange which cause an inadmis sible high load Removing covering or obstructing warning notices Standstill or storing of pump and drive electronics without suitable seal ing off and drying Storing in a humid atmosphere can cause corrosion Conversions manipulations and maintenance work by personnel not authorised by Oerlikon Leybold Vacuum Any non conforming utilisation of pump frequency converter and acces WARNING sories can result in severe injury and cause damage to components A 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 23 Installation 24 Ambient temperature Magnetic field Radiation Places of installation 3 2 Opera
35. converter We recommend adhering to a cleaning interval of about five years 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 5 2 Oerlikon Leybold Vacuum Service Whenever you send us in equipment indicate whether the equipment is con taminated or is free of substances which could pose a health hazard If it is contaminated specify exactly which substances are involved You must use the form we have prepared for this purpose A copy of the form has been reproduced at the end of these Operating Instructions Declaration of Contamination for Compressors Vacuum Pumps and Components Another suitable form is available from www oerlikon com Oerlikon Leybold Vacuum Documentation Download Documents Attach the form to the equipment or enclose it with the equipment This statement detailing the type of contamination is required to satisfy legal requirements and for the protection of our employees We must return to the sender any equipment which is not accompanied by a contamination statement Maintenance Contamination Form 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 63 Troubleshooting CAUTION 6 Troubleshooting When the connector cable is attached the outputs at the frequency con A verter are not free of voltage 64 Before you start searching for the source of the problem you should carry out a few simple checks Are the connections in good working order E Mains conne
36. cooling or an air cooling fan is available as optional equipment The intake flange should be fitted with a wire mesh inlet screen to protect the pump against mechanical damage caused by foreign objects The pump is driven by an electronic frequency converter TURBO DRIVE All functions like for example speed control pump sensing or temperature monitoring are monitored by the TURBO DRIVE This unit is powered by an external power supply The TURBO DRIVE may be installed beside or underneath the pump or up to 5 m away The pumps are equipped with a purge gas facility The purge gas and venting connection is blanked off by default with a M8 closure screw A purge gas and venting valve may be connected either directly or by using a M8 DN16KF adapter For space reasons when the frequency converter is installed at the side only either the air cooler or a purge gas valve can be connected 1 2 Standard equipment The pumps are shipped sealed in a PE bag with a desiccant to absorb moi sture The maximum useful life of the desiccant is one year The high and forevacuum flanges are covered with protection caps The connection elements and the inlet screen are not part of the standard equipment A suitable DC coupling for the power supply is included In the case of pumps with integrated frequency converter it is supplied with the pump in the case of pumps with a separate frequency converter it is supplied with the frequency converter
37. ction M 24 V DC cable to the frequency converter HM Connector cable between the frequency converter and the pump Is the forevacuum pressure sufficient After having removed the cause for the error reset the error message at the TURBO DRIVE Incase of errors with error codes 1 to 7 by applying a STOP signal via the socket REMOTE X1 or the serial interface or by switching the mains power off E Incase of error code 8 by switching the mains power off The error codes can only be read if a serial interface is present The following table has been provided as a guide when determining the causes of errors 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Error Designation code 1 Overspeed warning 2 Pass through time error 3 not used 4 Short circuit error 5 Converter tem perature error 6 Run up time error 7 Motor tem perature error 8 Pump error Meaning The actual frequency exceeds the setpoint by over 10 Hz The pump has not rea ched the minimum speed after the maximum run up time has elapsed Overtempera ture at the power output stage or within the frequency con verter The pump has not rea ched the normal opera ting frequency after the maximum run up time The motor temperature has exceeded the shut down threshold Pump couldn t be identi fied or no pump is connected Possible Cause Frequency converter defec tive Forevacuum pressure too high Gas flow too h
38. dry so as to ensure adequate strength in case the rotor should seize Apply to the inner clamping surfaces of the clamping ring elements a sui table lubricant LITHELEN vacuum grease for example Only the clamping collar for ultra sealing rings as depicted in the figure may be used A standard clamping collar is not capable of exerting the necessary press on force and should the rotor suddenly seize the pump may twist Mount the turoomolecular pump according to Fig 3 5 and tighten the three bolts of the clamping collar step by step 30 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum The KF connector for the high vacuum flange is not strong enough to keep the pump from rotating if it should suddenly seize Rotation of the pump can cause leaks in the forevacuum line Secure the pump addition ally to prevent rotation in case it should suddenly seize Flange mounting for ISO K flanges When flanging on the high vacuum connecting flange place the O ring on the centering ring The O ring must remain in place smooth and untwisted Thereafter put the outer ring in place Mount the turbomolecular pump according to Fig 3 6 and tighten the bolts crosswise step by step When using an ultra sealing ring always use an outer support ring The infor mation on the number of bolts and clamps also applies to the ultra sealing rings The contact surfaces of pump housing vacuum system and centering ring must be free of grease and dry so
39. e them in place with hose clamps Alternatively the hose nozzles can be screwed out then the G 1 8 in connections will be accessible When switching the cooling water supply on and off by means of an electric ally actuated valve connect the valve so that it will be switched on and off together with the pump 38 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Installation Clamping ring DN 16 KF DN 16 KF DN 10 16 KF os Adapter Purge gas and M8 DN 10 16 KF venting valve Connection gas side Fig 3 13 Connecting the purge gas and venting valve 3 7 Connect purge gas or a venting valve The pumps are equipped with a purge gas facility The purge gas and venting connection has been blanked off as a standard with a M8 closure screw A purge gas and venting valve or a power failure venting valve or a venting valve may be either connected directly or using a M8 DN16KF adapter The power failure venting valve or venting valve vents the pump and the fore vacuum line when the pump is switched off and thus keeps oil vapor from diffusing back from the forevacuum line A choke nozzle in the vent port ensures that the pump is not vented too fast When having to decide which gases need or not need to be pumped with purge gas we are available to provide assistance Refer to Section 4 1 for suited gases When operating the pump with purge gas the pump needs to be vented via the purge gas valve after havi
40. ecular pump Type designation P N TURBOVAC SL 80 800002V3xxx TURBOVAC TW 70H 800002V1xxx 800002V2xxx 800003V1934 8000024937 x 1 to 9 The product complies to the following European Council Directives EC Directive relating to electromagnetic compatibility 2004 108 EG The following harmonised standard has been applied EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements Cologne dated POF OF OF Cologne dated 27 9 09 Dr Monika Mattern Klosson Harald Udelhoven Head of Research amp Development Head of Quality Management 300296213 _002_A0 09 2009 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 71 oerlikon leybold vacuum Declaration of Contamination of Compressors Vacuum Pumps and Components The repair and or servicing of compressors vacuum pumps and components will be carried out only if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer can refuse to accept any equipment without a declaration A separate declaration has to be completed for each single component This declaration may be completed and signed only by authorized and qualified staff Customer Dep Institute Reason for return applicable please mark Address Repair chargeable warrant Exchange _ chargeable _ warranty Exchange already arranged received Person to contact Return only ren
41. en removed covered or obstructed include corre sponding additional warning notices Hazards caused by materials and substances The pump is not suited for pumping of reactive or corrosive media DANGER If the rotor is attacked by process gases it can suffer destruction Thus in the flange mounts high forces and torque conditions can occur The mounting screws for the pump may be torn off When using clamped flange connections at the housing or with components above the housing sudden twisting of the entire pump can be experi enced When pumping dusty media use a dust filter If low concentration corrosive or reactive gases are being pumped then operate the pump with purge gas Please consult us as to which types of pump are required for specific processes and applications The forevacuum line must be tight Hazardous gases can escape at leaks or the gases being pumped can react with air or humidity A leak search will always be required after having installed the pump and after service work on the vacuum Upon delivery the pump has an integral leak rate of lt 5 107 mbar s When pumping toxic gases we recommend a leak search on a regular basis If the pump has previously handled hazardous gases implement the proper precautionary measures before opening the intake or exhaust connection Before opening the pump purge it for a longer period of time with an inert gas If necessary use gloves a respirator and or pr
42. he turbomolecular pump In the case processes requiring a purge gas the pump must be vented via the purge gas and venting valve when shutting the pump down When additionally venting the vacuum chamber the venting function of the purge gas and venting valve must be opened before opening the chamber valve This will ensure the presence of a higher pressure in the area of the ball bearings compared to the remaining vacuum area This will prevent particles dust or aggressive gases from being forced through the bearings into the not yet vented motor chamber of the pump Cautious venting of the pump is possible from the high vacuum side since here the bearing forces will be lowest When doing so no free jet of gas must be allowed to form on the rotor so as to avoid exposing the rotor to additio nal forces When venting the pump through its foreline connection neither oil nor par ticles may be entrained in the gas flow from the forevacuum side into the pump Speed of the Pressure Rise All turbomolecular pumps may be vented at full speed However the pres Speed sure must not increase faster than specified through the pressure rise Curve Pressure rise curve The pump must be vented significantly slower when there is the risk of par ticles entering into the pump from the process During venting the flow must Particles be of the laminar type in both the vacuum chamber and the turbomolecular pump The speed of the pressure rise during ve
43. hout a vacuum retention valve close the valve in the forevacuum line When the system is not operating ensure that neither ambient air nor clean ing media can enter the pump If a failure occurs the turbomolecular pump will be shut down automatically The red LED at the frequency converter lights up In the case of an emergency shut down the pump is switched off as described above The rotor of the turbomolecular pump may be stopped faster by venting the pump Under vacuum conditions the pump may take up to one hour to run down when venting to atmospheric pressure it may take up to one minute During the time the pump is running down the green LED at the frequency conver ter will flash indicating that the rotor has not yet arrived at standstill When shutting down by switching off the power supply voltage there will be only enough power for the LEDs down to a speed of the pump of appro ximately 200 Hz Thus the pump may still turn without a LED being on For this reason when switching off without venting wait for approximately 15 minutes after the LEDs have turned off until the pump has arrived at stand still Unplug any connectors only when the mains voltage is switched off and the pump does no longer turn the green LED is off 58 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Operation 4 6 Venting Refer to Section 4 1 for suited gases Venting Methods There are three different methods of venting t
44. igh Rotor blocked Ambient temperature too high Poor cooling Forevacuum pressure too high Gas flow too high Forevacuum pressure too high Gas flow too high Fan defective Water cooling switched off Pump not connected cor rectly to frequency conver ter Frequency converter soft ware not current Hardware defective Troubleshooting Remedy Contact Oerlikon Leybold Vacuum Service Chec backi backi k the ultimate pressure of the ng pump and install a bigger ng pump if req Seal leak check process Chec k if the rotor turns freely Contact Oerlikon Leybold Vacuum Service if the rotor is damaged or blocked Ensure max ambient temperature of 45 C Improve cooling Chec backi backi Seal Chec backi backi k the ultimate pressure of the ng pump and install a bigger ng pump if req leak check process k the ultimate pressure of the ng pump and install a bigger ng pump if req Seal leak check process Replace fan Switch on water cooling Chec k connection between pump and frequency converter Contact Oerlikon Leybold Vacuum Service Contact Oerlikon Leybold Vacuum Service Shut down yes yes yes yes yes yes 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 65 Troubleshooting Error Designation Meaning Possible Cause Remedy Shut code down 82 Fan voltage has failed no 83 Motor temperature no low warning
45. it after 80 000 operating hours at the latest Such maintenance work can only be done by the Oerlikon Leybold Vacuum Service If required contact the Oerlikon Leybold Vacuum service center nea rest to your location You can find the address on our internet page www oerlikon com At high pump loads for example during cyclic operation at high gas throughputs or at high ambient temperatures the aforementioned mainten ance work should be carried forward Please consult Oerlikon Leybold Vacuum for recommendations Observe Safety information 0 1 7 Depending on the degree of contamination of the purge gas used the filter will clog and will have to be exchanged our experience indicates that this will become necessary after 1 to 6 months When an adsorption trap is used regenerate or renew the adsorption agent regularly refer to the operating instructions provided with the trap 5 1 Cleaning If required clean the turbomolecular pump of dust with a dry cloth Cleaning the frequency converter internally The converter essentially requires no servicing since it contains no compo nents which could be adjusted Depending on the installation particulars and the ambient conditions the converter may collect grime dust moisture on the inside Such contamina tion can lead to malfunctions overheating or short circuits and will have to be avoided to the maximum extent possible The Oerlikon Leybold Vacuum Service Department can clean the
46. j l 1 5 GND i yt GND TURBO DRIVE sy l Shield SERVICE X5 9 pin IBM PC RS 232 interface Fig 4 2 Providing a RS 232 connection 4 3 1 RS 232 C interface SERVICE X5 Standards DIN 66020 Protocol acc to VDI VDE 3689 Transmission rate 19200 baud Response delay default setting 10 ms parameter 180 Address range non addressable Max cable length 5m Interface connector 9 way Sub D type socket on the instrument female thread UNC4 40 Note If on the controlling side an RS 282 interface in accordance with the PC standard with a 9 pin Sub D male connector is present then a straight through cable as shown in Fig 4 2 may be used Refer also to Operating Instructions GA 05 281 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 49 Interfaces Links for activation of the bus terminator 0 5 A 24 V DC 1 6 7 2 TxD RxD gt 3 TxD RxD cae 4 9 5 oo Fig 4 3 Pin assignment for the socket at the frequency converter for RS 485 interface male 4 3 2 RS 485 interface Standards ISO IEC 8482 EIA 485 Protocol acc to VDI VDE 3689 Transmission rate 19200 baud fixed Response delay default setting 10 ms parameter 180 Address range Ole 1D Max cable length 50 m with bus termination Type of cable 2 wire twisted pair twisted pair cable Differential voltage levels logic O see also Standards transmitter 1 5 5 V receiver gt 0 3 V logic 1 transmitter 1 5
47. l agencies regarding specific requirements and regulations Address any further safety operation and or maintenance questions to our nearest office DANGER indicates an imminently hazardous situation which if not avoided will result in death or serious injury WARNING indicates a potentially hazardous situation which if not avoided could result in death or serious injury CAUTION indicates a potentially hazardous situation which if not avoided could result in minor or moderate injury NOTICE is used to notify users of installation operation programming or maintenance information that is important but not hazard related We reserve the right to alter the design or any data given in these Operating Instructions The illustrations are not binding Retain the Operating Instructions for further use 4 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Safety Information Important Safety Information Mechanical hazards Avoid exposing any part of the human body to the vacuum The pressure in the pump must not exceed 1 4 bar absolute The pump is intended for generating a vacuum only If there is a risk of an overpressure within the system and the pump then the pump must be protected against this by way of an overpressure safety valve for example Vent the pump only up to atmospheric pressure When using the pump with a purge gas valve protect the purge gas supply such that in the event of a malfunction no over
48. likon Leybold Vacuum 55 Interfaces 4 3 6 Warning codes for parameter 227 P227 Bit 0 4 5 7 8 9 10 11 12 18 14 15 56 Designation Motor temperature warning Converter tempera ture warning not used Motor under temperature warning not used Overspeed warning not used Overload warning not used Power supply voltage warning Fan voltage has failed Meaning The motor tempera ture has passed the warning threshold Overtemperature at the power output stage or within the fre quency converter The minimum permis sible motor temperatu re warning threshold is not reached The pump speed has dropped under the normal operation threshold Supply voltage failure during active operation of the pump P4 gt Umax or P4 lt Umin Possible cause Forevacuum pressure too high Gas flow too high Fan defective Water cooling switched off Ambient temperature too high Poor cooling Ambient temperature too low Pump cooling too high Forevacuum pressure too high Gas flow too high Intermediate circuit voltage too low or maximum time for gene rator operation was exceeded DC power supply voltage below 24V Mains voltage failure 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Remedy Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Replace fan Switch on water cooling E
49. lty connector 128 Motor temperature Motor temperature sen Sensor defective short Contact Oerlikon Leybold yes sensor error sor defective circuit or broken cable Vacuum Service 143 Overspeed error yes 66 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Error code div Error Yellow power LED is not on Red LED flashes Turbomolecular pump does not start ERROR LED does not light Turbomolecular pump produces loud running noises and vibrations Turbomolecular pump does not reach ultimate pressure Running pump can not be stopped via X1 Possible Cause No DC power DC power miswired Frequency converter defective Warning message See Section 3 3 6 Warning codes for the possible reasons of the warning Interface protocol error No communication via the serial interface REMOTE connector X1 connec ted wrongly REMOTE and SERVICE connec tors mixed up Wrong Profibus address set Rotor out of balance Bearing defective Measurement instrument defective Measurement sensors soiled Leaks at the equipment lines or the pump Pump soiled Forevacuum pump provides insuffi cient pumping speed or ultimate pressure which is too high Frequency parameters program med wrongly Pump has been started via the serial interface the interface con trols the pump Troubleshooting Shut down Remedy Check cables and power supply Ensure correct polarit
50. n conforming utilization Non conforming utilizations for both pump and frequency converter are among others E Pumping of gases and vapours for which the materials of the pump are unsuitable E Operation in connection with processes in which GaAr gallium arsenide is being pumped H Pumping of gas mixtures with an oxygen content of gt 21 H Pumping of corrosive gases and dust containing gases without reverting to purge gas operation E Pumping of condensable vapours without suitably controlling the tempe rature of the pump Upon compression within the pump these vapours may condense or form deposits H Pumping of dusts and solids without the use of suitable screens and fil ters E Operation at an inadmissibly high forevacuum pressure E Operation at inadmissibily high gas loads E Utilization of both pump and frequency converter in explosion hazard areas H Non compliance of the specified maintenance and servicing intervals for both pump and frequency converter E Operation of the pump and drive electronics in environments which demand protection type IP 20 or higher and where the installation site is over 1000 m the above sea level E Utilization in systems and pump systems in which the pressure may exceed 1 4 bar abs E Operation with an inadequately mounted pump 22 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Installation Operation without having flanged the pump to the system or without having
51. ng shut down the pump see Section 4 5 Consider the additional purge gas flow when selecting a suitable backing pump We recommend a purge gas flow of 0 4 mbar I s 24 sccm with Nitrogen The pressure in the pump must not exceed 1400 mbar 0 4 bar over WARNING pressure Observe Safety Informations 0 1 2 to 0 1 5 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 39 Installation 1 Turbomolecular pump 2 Forevacuum gauge port 3 Forevacuum pump 4 Resonance damper 5 Adsorption trap 6 Forevacuum valve 7 Purge gas and venting valve 8 High vacuum valve 9 Valve in the roughing pump line 10 Frequency converter Roughing line recommend to achieve the shortest possible cycle times Fig 3 14 Schematic of a turbomolecular pump system 3 8 Electrical connection The TURBO DRIVE 400 frequency converter needed to operate the TURBO VAC SL 80 has either been integrated in the pump or is a separate unit For connection examples see Fig 3 15 and 3 16 WARNING Observe Safety Informations 0 2 NOTICE Disconnect and connect the cable connections only while the pump is turning no longer green status LED off and with the mains power swit ched off yellow power LED off Otherwise there is the risk of damaging the frequency converter 3 8 1 Connecting pump and frequency converter Connect the pump to the frequency converter using a suitable connecting cable 15 way Sub D plug X3 C
52. ns Pin assignment of the connector Relay Normal operation While deceleration acceleration Stop 5 43 2 1 Mae T 4 connected to 5 as shown passive _ _ com W During normal operation f gt 0 9 F 00000 0000 J one 4 connected to 3 active Relay Error nom 2 9 8 7 6 1 0 g W No error 1 connected to 2 as shown passive __COM 41 Error is present 1 connected to 9 active TURBO DRIVE 400 Pin assignment for the Start Stop input 7 2 kQ Switching threshold for 7 24V sv the Start Stop control input 26kQ 62V Low Level lt 9V Bt if High Level gt 10 5 V ell 3 6 kQ TURBO DRIVE 400 Caution No power feed is allowed at pin 7 Fig 3 20 Pin assignment of the REMOTE X1 connector Start Stop operation Example 1 Operation via a PLC 0 V STOP 24 V START Relay output rating 42 V 0 5 A JO n Example 2 Operation via contacts Contact open STOP TURBO DRIVE 400 Contact closed START 7 6 gt TURBO DRIVE 400 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 45 Installation 3 8 4 Relay status Input data status Start Pump Normal stop rotating frequency present signal gt 90 of setpoint frequency Stop no no no Stop yes no no Stop yes yes no Start no n
53. nsure max ambient temperature of 45 C Improve cooling Ensure min ambient temperature of 0 C Reduce water cooling Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Operation 108 mbar 10 Starting pressure 10 Sv Pumping speed of the forevacuum pump m h V Volume of the vacuum chamber m3 10 0 25 50 75 100 Sv V 125 Fig 4 5 Determining the starting pressure of a turbomolecular pump when evacuating large volumes 4 4 Switching on Switch on the 24 V DC power supply The yellow LED at the frequency con verter lights up The maximum starting pressure for the turbomolecular pump can be read Starting pressure from the graph in Fig 4 5 Switch on the turbomolecular pump at the frequency converter E via pins 7 and 8 of the socket REMOTE X1 see Fig 3 18 For example via a remote control or with the aid of the plug with integrated ON OFF switch see Section 1 5 Accessories E by a start command via the interface see Section 4 3 For the power supply units offered or recommended by Oerlikon Leybold Vacuum If the contacts 7 and 8 at the REMOTE X1 connector are closed the pump starts automatically when the DC voltage is switched on provided parameter 12 is set to 0 The turbomolecular pump accelerates The green LED flashes When the pump reaches normal operation the green LED lights u
54. nting of the running pump will greatly influence the load on the rotor stator pack and the bearings The slower the pump is vented the longer the service life of the bearings will be The pump must not be vented to pressures above atmospheric pressure 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 59 Operation 108 D mbar e 10 N N Q EL 40 O oO gt Q O m O 5 10 15 20 25 30 s Time Fig 4 6 Maximum rise in pressure 4 7 Bakeout For TURBOVACs with CF flange If pressures in the range of 10 8 mbar or below are to be developed the vacuum chamber and the components installed therein will have to be baked out In addition the TURBOVAC can be baked out using the flange heater provided for this purpose Protect the rotor against intensive direct heat radiation When baking out at the forevacuum side at a sorption trap for example ensure that the com ponents attached direct are not heated to more than 100 C 212 F The forevacuum pump must be in operation so as to eliminate the vapors liberated at the sorption trap 60 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Operation 4 8 Removing the pump from the system Shut down the pump and vent as described in Sections 4 5 and 4 6 If the pump has previously handled hazardous gases implement the pro DANGER per precautionary measures before opening the intake or exhaust connec A A A p tion Observe S
55. o no Start yes no no Start yes yes no Stop no no yes Stop yes no yes Stop yes yes yes Start no no yes Start yes no yes Start yes yes yes 46 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Error is Motor Output data Relay Relay drive NORMAL ERROR off off off on on on OPERATION passi passi passi passi passi active passi passi passi passi passi passi ve ve ve ve ve ve passive passive passive passive passive passive active active active active active active LED LED STATUS ERROR green red off off flashes off flashes off off off flashes off green off off red flashes red flashes red off red flashes red flashes red Operating mode Other modes are not possible they indicate a failure affecting the TURBO DRIV Pump not operating Pump is decelerating E 400 Just after stop pump was in the normal operating mode before that Just after start Pump is accelerati ng Pump is in the normal operating mode Error Error Error Error Error is present p is present p is present p is present p ump ump has just occurred ump ump Error has just occurred is at standstill is decelerating is at standstill is decelerating Operation 4 Operation 4 1 Media compatibility purge gas The TURBOVAC SL 80 is suitable for pumping air and clean gases
56. odes The individual error memory entries are accessed via this parameter with additional index number The last error code is accessed with index O and the oldest with index 39 See Section 5 Troubleshooting for the error codes Error rotor frequency O 65535 O Hz r u16 Actual speed when error occurred Access analogously as for parameter 171 Error operating hours O O h r u32 Operating hours when error occurred 2147483647 Access analogously as for parameter 171 Fallback PZD1 0 65535 1024 r w ul6 Response when cancelling the control rights or in the case of a communication interruption of the bus adapter Behaviour in case bit 10 in the control word of the bus adapter is cancelled or when interrupting the communication between converter and bus adapter see also P182 Here it is assumed that the respective bus adapters perform a cyclic communication on the USS side so that the respective converter electronics is capable of detecting a communication interruption The bits in parameter 179 represent an equivalent to the control word in the USS protocol The actions linked to these bits are run provided bit 10 in the control word USS protocol for bus adapter is cancelled or if there are interruptions in the communication between converter and bus adapter Here bit 10 is of special significance Bit 10 O The control rights are returned to the next lower priority level All other bits are not relevant Bit 10 1 The control rights remain
57. oerlikon leybold vacuum deal vacuum products be www idealvac com TURBOVAC SL 80 Wide Range Turbomolecular Pump with Integrated or External Frequency Converter Incorporation Declaration amp Operating Instructions 130000760_002_A1 Part Nos 800002V3001 800002V3004 Contents 0 1 0 2 0 3 0 4 0 5 0 6 0 7 1 1 1 2 1 3 1 4 1 5 3 1 3 1 4 3 2 3 3 3 4 3 5 3 6 3 7 3 8 3 8 1 3 8 2 3 8 3 3 8 4 Important Safety Information Mechanical hazards Electrical hazards Thermal hazards Hazards caused by materials and substances Danger of ignition Dangers in connection with safety related measures and precautions Risk of damaging the pump Description Design Standard equipment Technical data Ordering data Accessories Transport and storing Installation Conforming utilization Non conforming utilization Operating environment Fitting accessories Attach the pump to the vacuum chamber Forevacuum connection Connect the cooling Connect purge gas or a venting valve Electrical connection Connecting pump and frequency converter Connecting the power supply Mounting the frequency converter Relay status 2 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Page Oo N N OO A Co 10 10 11 16 16 21 22 22 22 24 25 28 34 35 39 40 40 42 43 46 Contents 4 Operation 47 4 1 Media compatibility purge gas 47 4 2 Start up 47 4 3 Interfaces 48 4 3
58. on Leybold Vacuum 5 Safety Information WARNING A 10 11 12 13 14 Electrical hazards The electrical connections must only be provided by a trained electri cian as specified for example by the regulations EN 50110 1 Observe local regulations The frequency converter must only be connected to power supplies which meet the requirements for functional extra low voltages with positive isolation in accordance with IEC 60364 4 41 or local regula tions PELV Lethal voltages are present at the mains connections Before starting with any maintenance and service work de energise lockout tagout the product first Unplug any connectors only when the mains voltage is switched off and the pump does no longer turn Unauthorized device conversion and modifications are prohibited for safety reasons Hazardous voltages are present within the frequency converter When coming into contact with these death or severe injury can result After the pump has arrived at standstill disconnect the frequency converter from the mains power and prevent it against being switched on inad vertently lockout tagout before opening it Basically there is no reason why the frequency converter should be opened There are no user ser viceable parts inside When the connector cable is attached the outputs at the frequency converter are not free of voltage Lay connecting lines so that they cannot be damaged Protect the lines
59. onnect the Sub D plugs with the hexagon threaded bolts UNC 4 40x6 at the pump connector Make sure that the frequency converter is adequately cooled for this see Section 3 8 3 and also Fig 3 18 40 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Installation TURBOVAC with integrated frequency converter TURBO DRIVE 400 with air cooler Mains Power supply 24 V DC cable a max 20 m TURBOVAC with integrated frequency converter TURBO DRIVE 400 without forced cooling Mains Power supply 24 V DC cable a max 20 m TURBOVAC without integrated frequency converter without forced cooling Frequency converter TURBO DRIVE 400 Cooler optional XA Mains PSA E Power supply J DC cable with shielding max 20 m 24 V DC cable max 5m Fig 3 15 Examples for connection 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 41 Installation 100 240 V REMOTE 50 60 Hz max 20m 24V a Os TSA WW Programmable logic control PLC Do mee OQ MAINS A lta NE e CT 88 swore 299 0 SUNNE isk SS 33 Erg iw J le OS K C e a max 20m q DC control cable 100 240 V 50 60 Hz Fig 3 16 Examples for connection top TURBOVAC with separate frequency converter to TURBO POWER 300 bottom
60. or informa tion 18 60 l h 50 p 40 30 20 Cooling water flow 10 5 10 15 20 25 30 35 o 40 Cooling water temperature Fig 3 10 Cooling water requirements Minimum coolant inlet temperature at which condensation does not yet occur as a function of maximum room emperature and maximum relative humidity Example Max ambient temperature 25 C Min coolant inlet temperature 17 C gt Max relative humidity 60 Fig 3 11 Dewpoint diagram Maximum ambient temperature Installation Maximum relative humidity 20 30 40 45 C 50 40 60 70 35 80 90 30 100 25 7 r A 5 10 15 20 25 o 30 Minimum coolant inlet temperature 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 37 Installation Cooling water connections Fig 3 12 Pump with water cooling Cooling water specifications Feed temperature 10 40 C Feed pressure 2 to 7 bar absolute Cooling water requirement See Fig 3 10 Appearance colourless clear free of oils and greases Sediments lt 250 mg l Particle size lt 150 um pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Connecting the cooling water Connect the cooling water hoses to the hose nozzles and secur
61. or may cause injury and damage the rotor bearing Foreign objects which enter the pump through the intake would cause serious damage to the rotor That s why we recommend installing an inlet screen Damages caused during operation without the inlet screen are excluded from warranty The contact surfaces of pump housing vacuum system and centering ring must be free of grease and dry so as to ensure sufficient stability in case the rotor seizes Contact Oerlikon Leybold Vacuum first before planning to operate the pump without air cooling Also water cooled pumps need cooling air for the frequency converter Ensure correct polarity when connecting the TURBO DRIVE A wrong polarity may cause an internal fuse to blow The fuse can only be changed by Oerlikon Leybold Vacuum Service The interface connectors have UNC 4 40 threads Do not use connec tors with M3 treads Disconnect and connect the cable connections only while the pump is turning no longer green status LED off and with the mains power switched off yellow power LED off Otherwise there is the risk of damaging the frequency converter Exposure of the pump to accelerating forces must be avoided or reduced to such an extent that the rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first 8 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Description with ai
62. otective clothing and work under an exhaust hood Firmly seal off the pump When shipping the contaminated pump for servicing please also state the type of hazard For this you must use a form which we have pre pared for you Contaminated parts can be detrimental to health and environment Before beginning with any work first find out whether any parts are contaminated Adhere to the relevant regulations and take the neces sary precautions when handling contaminated parts 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 7 Safety Information CAUTION CAUTION A NOTICE 0 5 1 0 6 Danger of ignition During operation the pressure inside the turbomolecular pump is so low that there is no danger of ignition at pressures below about 100 mbar A hazardous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar During operation the pump can reach temperatures as high as 120 C internally and at parts of the outside surfaces 80 C Sparks could occur in case of damage to the pump and these could ignite explosive mixtures Also note the safety information provided by the gas supplier Dangers in connection with safety related measures and precautions The frequency converter is not equipped with its own emergency shut down switch Such a facility needs to be provided from the side of the system Risk of damaging the pump Never touch the rotor Touching the rot
63. p permanently Avoid the influences of shock and vibration when the pump is running Exposure of the pump to accelerating forces must be avoided or reduced NOTICE to such an extent that the rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 57 Operation Generator operation Venting Emergency shut down CAUTION After a mains power failure the pump can run up automatically once more 4 5 Shutting down Switch off the pump at the frequency converter E via contacts 7 and 8 of the socket REMOTE X1 if parameter 12 0 E apply a stop command via the interface if parameter 12 1 or 2 E for the power supply units offered or recommended by Oerlikon Leybold Vacuum switch off the DC voltage After switching off the green status LED will flash until the rotor of the turbo molecular pump is at standstill This may take several minutes With the DC power supply off the turbomolecular pump will act as a generator supplying the frequency converter with energy as indicated by the yellow power LED Switch off the forevacuum pump When using oil sealed forevacuum pumps vent the turbomolecular pump before it comes to a stop refer to Section 4 6 When using TRIVAC pumps the built in anti suckback valve will close auto matically shutting off the forevacuum line In forevacuum pumps wit
64. pressure can occur within the system The pump must be firmly mounted to the vacuum chamber If the mounting is not sturdy enough pump blockage could cause the pump to break loose internal pump components could be thrown in all directions Never operate the pump in bench testing for example without proper flanging to the vacuum chamber Observe the informa tion in Section 3 4 We recommend to change the rotor after 80 000 hours of operation at the latest Due to high speed and temperature the service life of the rotor is limited If the rotor is changed too late it may be destroyed Thus in the flange mounts high forces and torque conditions can occur The mounting screws for the pump may be torn off When using clamped flange connections at the housing or with components above the housing sudden twisting of the entire pump can be experi enced Turbopumps as described in the following operation manual contain a high portion of kinetic energy due to their high rotational speed in combination with the specific rotor mass In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy is released To avoid the destruction of the equipment and to prevent injuries of the operating staff the leading European manufacturers of vacuum pumps strictly recommend to follow the installation instructions as given in this manual WARNING AAAA 130000760_002_A1 10 2009 Oerlik
65. r cooler and frequency converter mounted to the pump with frequency converter mounted under the pump with water cooling and frequency converter mounted under the pump Fig 1 1 Examples of SL 80 1 Description The TURBOVAC SL 80 is a wide range turbomolecular pump designed to Use evacuate vacuum chambers down to pressure levels in the high vacuum range It is suitable for pumping air and clean gases The TURBO DRIVE 400 frequency converter and a forevacuum pump are required for its operation 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 9 Description Bearings Motor Cooling Frequency converter Purge gas connection 1 1 Design The pumps comprise essentially the pump housing a multi stage rotor with the stator group and the drive The first section of the rotor is a turbomolecular pump rotor while the second tile represents a Holweck stage The Holweck pumping stage increases the permissible forevacuum pressure level markedly when compared with the classic turbomolecular pump The rotor shaft runs in two lifetime lubricated ceramic ball bearings The pump is driven by a split cage DC motor In this motor the rotor and stator windings are separated by a vacuum tight can Consequently the rotor runs inside the vacuum while the stator is outside the vacuum This eli minates any need of vacuum feedthroughs The pump is equipped with a temperature sensor and a resistor code Water
66. r the error relay Energised when an error is present Deenergised when an error is present Hz 0 1 V 0 1 A 0 1 W C C aG 0 1 A Hz Hz Hz Hz r readable w writable r w Format Description r r r r w r w r w r w u16 u32 u16 6 4 u16 u16 u16 u16 u16 u16 u16 u16 u16 136 Turbo Drive 400 xx yy version zz correction index Actual rotor frequency Actual intermediate circuit voltage of the converter Actual motor current Actual drive input power Actual value of the motor temperature A write command with any value saves temporary data into nonvolatile memory Actual heat sink temperature of the converter Exceeding the motor temperature warning threshold results in a warning Maximum permissible motor current Highest permissible frequency Lowest permissible frequency Minimum frequency level When the pump is accelerating this frequency must be reached within the maximum passing time P183 5 SL 80 Setpoint of the rotor frequency Setpoint of the frequency dependent normal operation level Motor current dependent normal operation level If P29 0 1 Defines the normal operation level Normal operation if P5 lt P27 Parameter cannot be changed during operation of the system If required special functions can be assigned to the normal operation and the error relay o mains power failure or no generator operation P303 Bit 4
67. rdous gases can escape at leaks or the gases being pumped can react with air or humidity Observe Safety Information 0 4 5 Fig 3 14 is a schematic diagram of a pump system incorporating a turbo molecular pump and a TRIVAC forevacuum pump with an anti suckback valve A separate safety valve must be provided for oil sealed forevacuum pumps without an anti suckback valve The safety valve prevents oil flowing back from the forevacuum pump into the turoomolecular pump when the system is not running To ensure that the forevacuum space at the turoomolecular pump is kept lar gely free of oil vapors during operation as well we recommend installing an adsorption trap in the forevacuum line Alternatively purge the forevacuum line with inert gas In this case the pressure in the forevacuum line must be over 102 mbar Provide a roughing line to achieve the shortest cycle times Ensure that the pump is sufficiently isolated against vibrations generated by the forevacuum pump No forces from the piping system may be allowed to affect the turoomolecu lar pump Support the piping correspondingly or decouple through flexible joints 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Installation Fig 3 8 Pump with air cooling 3 6 Connect the cooling Cooling of the pump depends on
68. t loan for credit Phone Fax Calibration _ DKD _ Factory calibr End user C Quality test certificate DIN 55350 18 4 2 1 A Description of the product Failure description Material description Catalog number Additional parts Serial number Application Tool Type of oil ForeVacuum Pumps Application Process B Condition of the equipment Contamination 1 Has the equipment been used toxic 2 Drained Product service fluid corrosive 3 All openings sealed airtight flammable 4 Purged L explosive 2 If yes which cleaning agent radioactive 2 and which method of cleaning microbiological 2 1 If answered with No go to D Aj other harmful substances oggaogis C Description of processed substances Please fill in absolutely 1 What substances have come into contact with the equipment Trade name and or chemical term of service fluids and substances processed properties of the substances According to safety data sheet e g toxic inflammable corrosive radioactive X Tradename Chemical name 2 Are these substances harmful 3 Dangerous decomposition products when heated If yes which 2 Components contaminated by microbiological explosive or radioactive products substances will not be accepted without written evidence of decontamination D Legally binding declaration we hereby declare that the information supplied on this form is accura
69. ta NOTICE tion Do not stand below the pump while connecting or removing the turbo CAUTION molecular pump A The turoomolecular pump is shipped in a sealed PE bag with desiccant Do not open the sealed package until immediately before installing Do not remove the covers and blanking flanges until you are ready to make the connections to ensure that the turoomolecular pump is installed under the cleanest possible conditions Turbomolecular pumps which were not operated for a period of over 12 months should be returned to us For more information on this please contact your local sales partner Do not store pump and accessories in a moist atmosphere so as to prevent these items from suffering corrosion 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 21 Installation 3 Installation 3 1 Conforming utilization The turbomolecular pump is intended for generating a vacuum It is suited for non corrosive processes only The turbomolecular pump must be bolted to a rigid vacuum system and connected to a suitable backing pump The turbomolecular pump must only be operated with correspondingly speci fied frequency converters the special connecting cables and mounting bolts Both pump and frequency converter are intended for being operated within closed rooms The use of any accessories which have not been specified by Oerlikon Leybold Vacuum is only allowed after approval by Oerlikon Leybold Vacuum 3 1 1 No
70. te and sufficient to judge any contamination level Name of authorized person block letters Date signature of authorized person firm stamp 17200001_002_A1 Oerlikon Leybold Vacuum 72 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum A Adapter 10 18 19 25 39 54 Adsorption trap 34 40 62 Air cooler 6 9 11 16 25 27 41 Air cooling 8 10 12 25 27 35 36 Ambient temperature 11 12 24 35 37 43 56 65 66 Anti suckback valve 34 58 Bakeout 3 60 Burns 7 31 Cc Contamination 12 63 68 Cooling 8 12 16 25 28 35 38 41 43 44 53 56 65 66 Cooling water 12 28 37 38 D Danger of ignition 8 Deposits 6 22 47 61 Desiccant 10 21 28 61 Dimensional drawings 14 15 Dripping or spraying water 6 24 Dust 7 22 30 47 59 62 E Earthquake protection 29 Emergency shut down 8 43 58 F Forevacuum connection 11 28 29 34 Forevacuum pressure 10 11 22 34 36 56 60 64 66 Forevacuum pump 9 11 34 40 57 58 60 67 Fuse 8 42 G Generator 52 54 56 58 66 H Hazardous gases 7 34 61 Heat sink 19 43 52 High vacuum flange 16 28 29 31 Holweck stage 10 Humidity 6 7 11 12 34 37 47 Inlet screen 8 10 11 20 29 30 Interface 8 16 44 48 51 54 57 58 64 67 L LED 8 40 44 46 50 57 58 61 67 Magnetic field 24 Mains power failure 52 58 66 Media 7 47 58 Motor temperature 48 52 53 56 64 66 N Nitrogen 39
71. the regulations laid down in the EC Machinery Directive 2006 42 EG The manufacturer commits himself to make the special documentation on the incomplete machine electronically available to national authorities upon request The special engineering documentation belonging to the machine was compiled in accordance with Annex VII Part B Documentation Officer Herbert Etges Tel 49 0 221 347 0 Fax 49 0 221 347 1250 Documentation vacuum oerlikon com Oerlikon Leybold Vacuum GmbH Bonner Stra e 498 D 50968 Cologne Germany Cologne dated 2 3 0 7 O Z Cologne dated Z i og oj G babel Ly Fone ri VA i Dr Monika Mattern Klosson Harald Udelhoven Head of Research amp Development Head of Quality Management 300296213_002_A0 09 2009 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum oerlikon leybold vacuum EC Declaration of Conformity The manufacturer Oerlikon Leybold Vacuum GmbH Bonner Stra e 498 D 50968 Cologne Germany Tel 49 0 221 347 0 email oerlikon com herewith declares that the products specified and listed below which we have placed on the market comply with the applicable EC Council Directives This declaration becomes invalid if modifications are made to the product without agreement of Oerlikon Leybold Vacuum GmbH Compliance with the EMC Directives requires that the components are installed within a system or machine in a manner adapted to EMC requirements Product designation Turbomol
72. the required pumping power and the ambient temperature When the pump is insufficiently cooled it will shut down High gas throughputs cyclic operation or high ambient temperatures will necessitate air or water cooling Air or water cooling can be mounted to the pump see Section 3 3 Part Nos see Section 1 5 The pump must be operated with the air cooling unless you have an NOTICE agreement from Oerlikon Leybold Vacuum for different operation CH Air cooling When installing air cooled pumps within a system ensure that sufficient quan tities of fresh air are freely available The air cooling facility is powered via the pump 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 35 Installation Gas flow in mbar I s 30 45 60 7 5 9 0 10 5 12 0 Forevacuum pressure in mbar 13 5 15 0 16 5 Operation not possible Water cooling 25 I h 20 C Ambient temperature 40 C Water cooling 35 I h 40 C Ambient temperature 40 C Air cooling Ambient temperature 25 C Air cooling Ambient temperature 40 C Convection cooling 22 C For pumps with an ISO K flange and aluminium housing Gas flow in mbar I s 0 102 15 30 45 60 75 9 0 10 5 12 0 13 5 15 0 16 5 Forevacuum pressure in mbar Fig 3 9 Cooling requirements of the SL 80 36 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum For pumps with a CF flange and in the case of special applica tions please ask us f
73. ting environment The maximum permissible ambient temperature is 45 C 113 F Do not expose the pump or the frequency converter to dripping or spraying water If the pump is used within a magnetic field the magnetic induction at the sur face of the pump housing may not exceed B 5 mT if impinging radially and B 15 mT if impinging axially Install shielding equipment as appropriate if these values are exceeded The standard pump version without frequency converter is resistant to radia tion up to 10 Gy Places of installation up to 1000 m above sea level 3300 ft are possible without restrictions At altitudes over 1000 m heat dissipation by the ambient air is impaired Please consult us The frequency converter must not be operated in explosive gas atmo spheres 1 mT milliTesla 10 G GauB 1 Gy Gray 100 rad 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Installation 3 3 Fitting accessories Either a water or air cooling facility and a purge gas and venting valve can be fitted to the pump Moreover the frequency converter may be fitted beside or underneath the pump For space reasons when the frequency converter is installed at the side only either the air cooler or a purge gas valve can be connected See Fig 3 1 and 3 2 When fitting the accessories note the following For fitting place the pump with the protection cap in place on its high vacuum flange In the case of bolts whi
74. tion Quick analysis of problems Dispensing with a flow controller Cost savings through smaller power supply units if peak loads can be reduced Cost savings through smaller power supply units if peak loads can be reduced Dispensing with pressure gauges Normal operating mode is attained faster processes can be started faster 48 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum How to do it With Field Bus systems like Profibus For example by a control computer Monitoring of E Motor current P5 E Motor temperature P7 E Frequency converter temperature P11 Reducing the rotor s frequency through P24 Reading of error memories P171 P174 and P176 error code speed operating hours for error Changing the rotor frequency through parameter 24 With P139 motor current reduction factor With P36 delay Monitor motor current P5 second function for Normal Operation relay relay switches as soon as the motor current threshold is tripped Adjust second function P29 Set motor current thresh P27 Reduce frequency threshold through P25 Interfaces 1 1 4 and 6 9 are O 6 TxD 2 0 internally connec RxD 3 o O17 ted and must not ols be used 4 9 GND 5 o 9 Fig 4 1 Pin assignment for the socket at the frequency converter female SERVICE X5 1 4 and 6 9 are 2 rm 2 internally connected TxD T RxD and must not be i g used RxD r r TxD
75. uipped with serial interfaces E RS 485 C E Profibus DP The TURBO DRIVE 400 is configured through the parameters according to the parameter list Pxxx denotes parameter value xxx The PC software TURBO DRIVE Server allows convenient access by the user to the parameters of the frequency converter Interfaces priority level The optional interface has the highest priority level followed by the Service interface X5 The Remote input X1 has the lowest priority level See also parameter 179 in Section 4 3 5 Applications which can be implemented with the aid of the serial interface Application Networking of several pumps and other equipment Automation Avoidance of warnings and warnings before overload operation and early detection of a failing pump Standby operation Troubleshooting Slow pressure control by changing the pumping speed Reducing the maximum motor current Starting the pump with a delay if several consumers are connected to the same PSU Frequency converter as a simple pressure gauge since motor current is dependent on the vacuum conditions Lowering the normal operation threshold Benefits to the customer Savings relating to the costs for signalling cables Savings related to repetitive manual work E Precise planning for maintenance E Improved reliability of sensitive production processes in a vacuum E Extending the service life for the ball bearings Cutting energy consump
76. ve been manufactured in accordance with DIN 28403 DIN 28404 ISO 1609 KF and ISO K flange connections or ISO 3669 CF flange connections 28 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Correct Wrong Fig 3 4 Installing the inlet screen The flange material to which the pump is bolted must have at operating tem perature a minimum strength specification of 150 N mm Operation with vibration absorber The pump is precision balanced and is generally operated without a reson ance damper To decouple extremely sensitive equipment and to prevent transfer of external vibrations to the pump a special resonance damper is available for mounting at the high vacuum flange In this case mount the turbomolecular pump separately A vibration absorber cannot reliably sustain the high deceleration torque in case of a rotor seizure If additional mounting is not possible then the pump must be protected by a suitable shield during operation Besides the forevacuum connection it is possible to connect a vibration sen sor thread M8 9 3 mm deep If several turbomolecular pumps are installed to the vacuum chamber of the same system there is the risk of interference vibration interference between the pumps If such a risk exists please contact Oerlikon Leybold Vacuum Application Support The standard mounting arrangement for the pump is adequate to ensure earthquake protection If required mount the system to the floor or the w
77. very address Datavagen 57B SE 43632 Askim Switzerland Oerlikon Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH 8050 Zurich Sales Phone 41 44 308 40 50 Fax 41 44 302 43 73 sales vacuum zh oerlikon com Service Phone 41 44 308 40 62 Fax 41 44 308 40 60 service vacuum zh oerlikon com America USA Oerlikon Leybold Vacuum USA Inc 5700 Mellon Road USA Export PA 15632 Phone 1 724 327 5700 Fax 1 724 325 3577 info vacuum ex oerlikon com Sales Eastern amp Central time zones Phone 1 724 327 5700 Fax 1 724 333 1217 Pacific Mountain Alaskan amp Hawaiian time zones Phone 1 408 436 2828 Fax 1 408 436 2849 Service Phone 1 724 327 5700 Fax 1 724 325 3577 Latin America Oerlikon Leybold Vacuum USA Inc Brazilian Office Av D ria 360 cj 12 Campo Belo 04635 070 Sao Paulo SP BRAZIL Sales Phone 55 11 3554 3117 Fax 55 11 3554 3117 nelson batistucci oerlikon com Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 O Fax 49 0 221 347 1250 info vacuum oerlikon com Asia P R China Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Beichen Economic Development Area BEDA No 8 Western Shuangchen Road Tianjin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 info vacuum tj oerlikon com sales vacuum tj oerlikon com service vacuum tj oerlikon com
78. wn 3 8 3 Mounting the frequency converter The frequency converter may be affixed with the aid of the enclosed M4 slid ing nuts The bottom side of the frequency converter must be cooled suffi ciently If the frequency converter is mounted without the optional heat sink ensure sufficient cooling by other means 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 43 Installation o 24V DC X4 TURBO DRIVE TD 400 DRIVE X3 week Looe oN o Za cag C eRE 0 SEAVICE X5 gers REMOTE ft RROR EAT SINK HEAT SINK O HEATSINK E ol RO XS oc p ORO wg S K NA N i R sem a S Mee S oo FOND 9 can lt Os OF X Dot CAV Ka a o Nae KONE ee Grows eo O DA eye go Green LED STS off Pump at standstill lt 3 Hz flashes slowly 1 s Start command is present about 10 s after start flashes fast 3 s Running up or running down on Normal operation Yellow LED PWR off No supply voltage flashes Supply voltage too low or too high on Supply voltage is present Red LED ERR off No error no warning flashes Warning is present pump can be operated possibly with some restrictions on Fault is present pump stopped or can not be operated Fig 3 19 TURBO DRIVE 400 front and rear side 44 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum Installation Relay functio
79. y of the DC cable Replace frequency converter The following may damage the freq converter E Disconnection of the DC cable while the pump was still rotating E Non compliance with the note related to connecting several pump to a single power supply The pump can continue to no run as long as operation limits are only exceeded for a short time In case of longer exceeding send pump and frequency conver ter to the OLV service Use USS protocol Connect bus as shown in Section 3 3 Connect as shown in Fig 3 20 Connect correctly Set address between 0 and 126 Balance the rotor no Replace the bearing Inspect the measurement sensor no Clean or replace the sensors Check for leaks Clean the pump Check the ultimate pressure of the forevacu um pump and install a higher capacity vacu um pump if necessary Check parameters Disconnect the DC supply or connect serial no interface and stop via bus 130000760_002_A1 10 2009 Oerlikon Leybold Vacuum 67 Disposal 7 Waste disposal Contamination The equipment may have been contaminated by the process or by environ mental influences In this case the equipment must be decontaminated in accordance with the relevant regulations We offer this service at fixed prices Further details are available on request WARNING Contaminated parts can be detrimental to health and environment Before beginning with any work first find out whether any parts are contamina

Oerlikon Leybold TURBOVAC SL 80 User Manual

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