General System Usage - Oregon State University
Contents
1. P3A2 Extend Limit Switch Stepper Motor P3A2 Retract Limit Switch Stepper Motor P4A0 Extend Z translator Stepper Motor P1B5 P1B6 P1A6 P4A1 Retract Z translator Stepper Motor P1B5 P1B6 P1A6 Newly added signal Default is the state that the system is normally in already started up Useful Commands o DI _ReadLine D _ReadPort DIO_PortConfig DO_ReadLine DO_ReadPort DO_WriteLine DO_WritePort Register_card Release_card Ooo 0 00 0 0 Page 8 of 18 2 1 Vendor Contacts and Application Specific Information 2 1 1 Dry Vac RuVac 1 Leybold DryVac 50B Company Info LEYBOLD VACUUM USA INC 5700 Mellon Road Export PA 15632 http www leyboldvacuum com Contact s Name Ken Arondt Phone 724 327 5700 x551 Email N A 20 VAC supplied from the DIO system is required to start the pumps DB 9 Connecter Pin Signal 8 wire Conductor 1 Gnd Drain 2 3 7 4 Motor Temp Black 5 6 24 V Brown 7 Temp Alarm Red 8 Oil Pressure Orange 9 Temp Warning elow DIO Signals o DIO Inputs Backing and Load Lock Pumps Temperature Warning Oil Pressure Temperature Alarm Motor Temp If all signals are 1 then the pump is operating normally o DIO Outputs Backing Pump 120 VAC supply Load Lock Pump 120 VAC supply 2 Leybold RuVac The cooling fan operates on a separate motor and spins in the opposite direction of the2. Verify that the regulator supplying nitrogen to the leak vent valve of the turbo pump is set to 0 5 Bar If the blades are not spinning vent the turbo pump Venting the pump will provide positive pressure preventing backflow from the backing pump once the foreline is open If the blades are still spinning wait until they stop if the pump is isolated it can take several hours for the blades to spin down from full rom which is 38k for this particular pump before venting the pump Open the foreline valve Wait for the foreline interlock to engage before proceeding any further the interlock will engage approximately 30 seconds after the valve is opened This wait will give sufficient time for the foreline pressure to fall below the setpoint which is currently set at 100 mTorr To rough the chamber complete the following steps Verify that the chamber pressure cap man and load lock pressure are in the same relative state The VAT valves that are used for load lock and turbo pump isolation have a maximum differential pressure that can be present when opening and closing the valve 1 bar when closing Open the load lock isolation valve Open the roughing valve Allow the chamber to rough to 50 mTorr To check the chamber pressure hit the CHAN button on the Multigauge Controller until you reach the capacitance manometer a flashing 1 will appear towards the lower right Close the load lock isolation valve th
3. door by LIGHTLY tightening screw knob once the rough valve is open the door should close tightly and make a good seal so there is no need to overtighten the door knob Rough the load lock to 1 mTorr Close the turbo isolation valve and flow an inert gas to bring the chamber to 10 mTorr To flow a gas open the MFC shutoff valve then flip the appropriate channel to On Depending on the programmed flow rate the pressure may rise rapidly so be ready to close the shutoff valve Close the shutoff valve then turn gas flow off Transfer substrate s from the load lock to the deposition chamber by completing the following Open load lock isolation valve Set the shim in place and extend the load lock translator The shim will provide the clearance needed to successfully retract the z translator Retract 1 translator Remove the shim Fully extend the load lock translator Look in the chamber to verify that there is spacing between the substrate holder and the load lock translator Additionally verify that there is sufficient spacing between the heater and the load lock translator Move the z translator to pre load position Wait for the z translator to stop moving Look in the chamber to verify that the load lock translator can clear the substrate holder then retract the load lock translator Close load lock isolation valve Close the rough valve Page 4 of 18 10 Throttle the turbo isolation valve until t
4. of 18 12 Enter applicable comments and then click the OK button This will exit the Startup Shutdown area and return the program to the main page 13 Allow the system to pump down to base pressure 1E 7 Page 3 of 18 1 2 Sputter a Film 1 2 1 Log User Sample Information 1 2 Input the required information Choose a Sample ID this can be anything that you choose Choose the deposition gun material o Gun numbering system Stand at the end of the system facing the load lock Guns L 1 and L 2 are located on the left hand side L 1 is the gun on the left flange that is closer to the turbo pump Guns R 1 and R 2 are located on the right hand side Currently Guns L 2 and R 2 are not installed Move onto the next page by clicking Continue 1 2 2 Load Substrate 1 Before proceeding verify that the guns shutters are fully retracted as described in section 1 1 10 Log the system base pressure Turn off the ionization gauge the gauge uses a tungsten filament and should be allowed to cool for approximately 5 minutes Set your processing temperature The temperature may overshoot and need several minutes to half an hour to stabilize Load substrate s by completing the following Vent the load lock Retrieve the substrate holder and mount your substrate s Load the substrate holder When loading or removing a substrate take care not to scratch the sealing surfaces Secure the load lock
5. 10 of 18 9 Turbo White Override Com Turbo Pump DB 15 Output Pin Signal 2 wire Conductor Fault White 15 Fault 24 V Black DIO Signals o DIO Inputs Turbo Fault Signal 1 fault present 0 no fault o DIO Outputs Turbo System Override 1 turbo pump overridden 2 1 5 Vacuum Chamber Nor Cal Company Info Nor cal Products http Awww n c com Contact s Name Steve Greuel Products Manager Monica Sales Phone 530 842 9130 Fax 530 842 4457 Email stevegreuel n c com 2 1 6 Z translator 1 Z translator Unit McAllister Technical Services McAllister Technical Services West 280 Prairie Avenue Coeur d Alene ID 83815 http www mcallister com Contact s Name Bob McAllister Phone 1 800 445 3688 Fax 208 772 3384 Email solutions mcallister com Page 11 of 18 Z Translator ZA 450 30 o The brass drive gear attached to the lead screw has 20 teeth while the worm gear has 4 starts This equates to a gear ratio of 5 1 between the motor shaft and lead screw o The z translator travels 1 inches per revolution of the lead screw Rotary Platform DPRF 450 Divide by 10 Z positions Position inches Position Steps Gun L1 Start 23 65 2 490 000 Gun L1 Finish 11 65 1 227 500 Gun R1 Stat 20 325 2 175 000 Gun R2 Finish 8 625 906 250
6. 5 http www grisk com Contact s Name N A Phone 1 800 523 1227 Email N A Purchased through Platt in Corvallis 8 42 per unit 541 753 1221 DIO Input Leak 1 Leak Present Heater Company Info Solar Products 228 Wanaque Avenue Pompton Lakes N J http www solarproducts com Contact s Name John Schafer Phone 973 248 9370 Fax 973 835 7856 Email jschafer solarproducts com Specifications o 110V o 60 W Sq Inch o 7 x7 Face o 2 25 Thick o High Purity quartz Coil direction is critical coils run parallel to the main chamber axis MDC 1 inch Translator Company Info MDC 23842 Cabot Blvd Hayward CA 94545 1661 http www mdc vacuum com Contact s Name N A Phone 1 510 265 3000 Page 13 of 18 2 1 7 4 2 1 7 5 2 1 7 6 Email N A MKS Baratron Capacitance Manometer Company Info MKS Pressure Measurement amp Control Products Six Shattuck Road Andover Massachusetts 01810 United States http Awww mksinst com Contact s Name N A Phone 1 800 227 8766 Fax 978 975 0093 Email N A Thermionics Rotary Linear Feedthroughs Company Info Thermionics Vacuum Products 231 B Otto Street Port Townsend WA 98368 http Awww thermionics com index shtm Contact s Name Tom Howard Phone 1 800 962 2310 Fax 360 385 6617 Email tom_h thermionics com Varian Multi gauge Controller Company Info Varian Electronics Manufacturing R
7. A amp HFF Port Info Port Signal Idle State Port Signal Interlock P1A0 1 P2A0 Turbo System Override P1A1 1 P2A1 P1A2 1 P2A2 Generator Interlock P1A3 Comp Air 1 P2A3 1 Extend retract relay P3A0 P3A1 P1A4 Turbo Fault Signal 0 P2A4 Ld Lk Valve Relay A P1B0 P1B3 P1A5 Backing temp warn 1 P2A5 Ld Lk Valve Relay B P1BO P1B3 P1A6 Cap Man 1 amp P2A6 Turbo Valve Relay A P1A6 P1A7 P1B4 P2B5 P1A7 Foreline TC 1 amp P2A7 Turbo Valve Relay B P1A6 P1A7 P1B4 P2B5 P1BO Ld Lk TC 1 P2B0 Coolant Relay A P1B1 P2B1 Coolant Relay B P1B2 P2B2 Ld Lk Vent Relay P1B4 P2CO P1B3 Ld Lk Trans Top of Stroke 1 P2B3 MFC DCV Power P1B4 Ld Lk Iso Valve Closed 1 P2B4 Foreline Valve P1A7 P2B5 P1B5 1 P2B5 Backing Pump P1B6 1 P2B6 Load Lock Pump P1B7 P2B7 P1C0 Critical OR Gate 1 P2C0 Rough Valve P1C1 Backing Oil Pressure 1 amp P2C1 Leak Valve P1C2 Backing Temp Alarm 1 P2C2 Turbo Start PICs Backing Motor Temp 1 P2C3 P1C4 Load Temp Warn 1 P2C4 Turbo low speed P1C5 Load Oil Pressure 1 amp P2C5 P1C6 Load Temp Alarm 1 P2C6 Turbo interlock P1C7 Load Motor Temp 1 P2C7 Legend In Out Critical Signals Interlocked signal Damaged Output Port amp Special Startup Shutdown Considerations Code Additional Signals Source Interlocks P3A0 Z extended Stepper Motor P3A1 Z retracted Stepper Motor
8. Extend 1 translator once the z translator has stopped moving Retract load lock translator Close load lock isolation valve Close the rough valve Throttle the turbo isolation valve then fully open it Allow the substrate to cool in the load lock Retrieve substrate Loosen the door knob on the load lock Page 6 of 18 1 3 1 4 Vent the load lock Retrieve substrate Caution Do not scratch the sealing surface of the load lock Additionally if you used substrate heat you may want to use insulated gloves 9 Return the substrate holder to the load lock 10 Rough the load lock close the rough valve once the load lock is below 1 mTorr Changing Targets 1 2 3 Oo OND Bring the chamber and load lock to the same state Close Turbo Iso valve Note the isolation valve will automatically throttle itself wait and then fully close Open Load Lock Iso Vent chamber Remember to loosen the doorknob before venting Close the vent valve once the chamber has reached atmospheric pressure Change the target Remove all but two bolts on the appropriate 6 conflat flange Dismount the flange from the chamber Hold the base of the gun near the flange and move the flange in an up down motion until the seal with the gasket breaks Note Do NOT hold the shaft of the gun Remove the old target and mount the new one o Currently only US Mighty Mak guns are used on this system o Make sure that there is a thin layer
9. Hai Chiang Chris Tasker and Rick Presley Sputtering Utility Program SUP Users Manual v1 5 April 22 2005 General System Usage 1 0 1 1 General Info and Precautions There is no interlock that prevents the z translator from moving into an extended sputter gun it is the responsibility of the operator to ensure that this does NOT happen When loading or removing a substrate take care not to scratch the sealing surfaces on the load lock The deposition angle should only be varied 60 in either direction from the vertical position There are two vertical positions 0 and 180 Adjustment of the angle of incidence should go in the positive direction i e 0 to 180 rather than 360 to 180 Vacuum gauge setup Location Setpoint Load Lock TC1 3 1 mTorr Foreline TC2 2 100 mTorr Chamber Capacitance Manometer 1 100 mTorr After using the system it should be left in the following state 1 Guns shutter retracted Z translator extended 1 Translator extended Load lock isolation valve closed Turbo isolation valve open Rough valve closed our wh System Startup System startup can vary depending on the state the system is found Assuming that the system is found at atmosphere and all valves relays are closed the following startup procedure would hold Administrative access is required to startup the system Contact the system administrator Chris Tasker chris ece or
10. Retract 29 Load position 6875 11 16 68 750 2 Stepper Motor Driver Anaheim Automation Company Info Anaheim Automation 910 East Orangefair Lane Anaheim CA 92801 1195 http Awww anaheimautomation com Contact s Name Alfonso Esparza Applications Phone 1 800 345 9401 Email aesparza anaheimautomation com Stepper Motor 23D309S o The motor is rated at 2 2 V 4 6A per phase o Stepper Motor Wires Color Signal Red Phase A Red White Phase A Green Phase B Green White Phase B Driver Indexer DPD60401 o The driver in this package is a 1 5 5A driver with micro stepping capabilities o The maximum speed of the motor shaft at full torque is 10 revs sec this equates to 2 inches sec 5 secs inch o The minimum speed without missing steps is 5000 steps rev divide by 25 At 1 step sec it would take 4167 minutes to traverse 1 inch o Limit Switch Wires Color Signal Orange Limit SW 1 Red Limit SW 1 Return Yellow Limit SW 2 Green Limit SW 2 Return o DIO Signals a DIO Inputs Z extended Z retracted Page 12 of 18 Extend Limit Switch 1 Switch Engaged Retract Limit Switch 1 Switch Engaged b DIO Outputs Extend Z translator Retract Z translator 2 1 7 Miscellaneous 2 1 7 1 2 1 7 2 2 1 7 3 GRI 2800 Water Sensors Company Info George Risk Industries GRI Plaza 802 S Elm St Kimball NE 6914
11. deposition 3 To strike a plasma complete the following Verify that the gun cooling water is flowing Verify that the rf cable is connected to the correct gun Throttle the turbo isolation valve Open the shutoff valves for the MFC s which will be used Adjust the flow setpoints if needed Page 5 of 18 co COON Turn On the appropriate channels ALWAYS flow the least reactive gas first Adjust the throttle valve to the appropriate processing pressure Set the striking power Then turn On the rf power Note Many of the targets used in the lab are ceramics Thus the recommended striking powers are 40 and 80 W for the 2 and 3 inch guns respectively Once the plasma is ignited monitor the dc bias and plasma characteristics Allow the dc bias to stabilize then increase the power to your sputtering power at a rate of 5 and 10 W min for the 2 and 3 inch guns respectively Slowing increasing the power on ceramic targets minimizes the possibility of cracking the target If the target is new it requires a burn in run This can range anywhere from 6 to 12 hours depending on where the target was obtained Targets that are fabricated in house typically require longer burn in times Allow the target to presputter When presputtering place the shutter should be placed in front of the target this will help keep the sputter chamber clean Log your sputter parameters while your target is presputtering Progra
12. en roughing valve Throttle the turbo isolation valve and check the foreline pressure Allow the foreline pressure to stabilize below 5 mTorr and then open the turbo isolation valve Start the turbo molecular pump This is done by Closing the turbo pump interlock switch then the start switch The blades should start to spin the turbo controller display should say Soft Startup Soft startup slowly increases the rotational speed of the blades it will take approximately 40 minutes to reach full rom After several minutes it should be it should be safe to turn on the BA Ionization gauge To do this hit the CHAN button on the Multigauge Controller until the BA lon Gauge channel is showing then hit the EMIS button Calibrate the z translator Click on Calibrate Z Translator Ensure that nothing the guns shutter are fully retracted First look in the chamber with a flashlight Retract the guns if needed Slightly extend the shutter then retract it Do this on both sides of the chamber This verifies that the shaft has not detached from the magnetic coupler Click on Extend Z Translator Allow the z translator to move to the end of its stroke i e allow the z translator to extend until it hits the limit switch Reset the stepper controller Click on Retract Z Translator this should move the z translator to the load position Extend the 1 translator Page 2
13. he capacitance manometer is out of range it will display Then fully open the turbo isolation valve 11 Retract the z translator If you did not verify that the guns shutters are fully retracted do so before retracting 12 Once the z translator has stopped moving set angle of incidence 60 from vertical 13 Wait until the system has reached base pressure then hit Continue Note The control program will check that the load lock isolation valve must be closed the z translator must be retracted and the 1 translator must be retracted before allowing you to continue 1 2 3 Strike Plasma Program Stepper 1 Determine a valid throw distance and angle of incidence Throw distance is the distance from the face of the gun to the center of the chamber The graph located in the Appendix shows minimum throw distance as a function of theta Diagram of substrate assembly 3 8125 o A E 1 5 I o eee a oa g Y 2 a D Not to scale Theta can be adjusted 60 from the vertical position note that the vertical position is shown in the diagram If either gun L 1 or L2 is being used theta can be adjusted from 60 to 0 and 0 to 300 0 is vertical If gun R 1 is being used theta can be adjusted from 120 to 240 180 is vertical Verify that the throw distance and the angle of incidence set earlier are valid 2 Extend the shutter then the gun that will be used for this
14. m stepper controller Note that the scale has been reversed fully extended is 0 not 30 as the z translator ruler says Thus when retracting the position is increasing Rotate the shutter and move it out of the way Move your substrate into place Hit the Continue button once sputtering is complete 1 2 4 Retrieve Substrate 1 ONDA Extinguish the plasma by completing the following Retract the z translator Move the shutter back in front of the gone Slowly decrease the RF input power to the recommended striking power if you are using a ceramic target Unless you are sputtering at the recommended striking powers NEVER turn off the power without allowing it to cool down Use the same rates for increasing decreasing rf power Turn off the rf power Retract the sputter gun and shutter Turn off heater Remove your substrate s by completing the following Set angle of incidence back to 0 Look in the chamber to ensure there are no obstructions Extend the z translator to the pre load position Close the turbo isolation valve and leak up to 10 mTorr Rough the load lock Open load lock isolation valve Extend Load lock translator the shim should not be used this time If the load lock translator hits the substrate holder the angle of incidence may need to be adjusted by a few degrees for proper unloading Once the load lock translator is in place extend the z translator
15. nced to the Z translator _ Turbo Pump O 17 3 8 11 3 8 3 8 Note The numbers referenced above are referenced relative to the physical position of the z translator There is an addition 3 16 offset required get the position of the center of the wafer 11 9 16 for L 2 and 17 9 16 for L 1 3 1 Maximum Throw Distance Max Throw T i Max Throw Distance Distance 8 215 ea st 7 775 3 91 xs 11 1 125 11 1 125 Page 16 of 18 3 2 Throw Distance vs Theta 3 2 1 Guns Installed on Left Flange Min Throw Distance vs Theta 4 5 3 5 Min Throw Distance 0 10 20 30 40 50 60 70 80 90 Theta Degrees 3 2 2 Guns Installed on Right Flange Page 17 of 18 Min Throw Distance Inches 4 5 go oa wo N oa N a E oO Min Throw Distance vs Theta 90 100 110 120 130 140 150 Theta Degrees Page 18 of 18 160 170 180
16. ocklin 3715 Atherton Road Rocklin California 95765 http Awww varianinc com Contact s Name N A Phone N A Email N A The original manual sent with the Multi Gauge was not correct it did not have correct datasheet for the set point board installed in the Multi Gauge L8727302 Set Point DB25 o SP1 Cap Man o SP2 Foreline TC o SP3 Load Lock TC Pin Signal 8 wire Conductor Oo PO Page 14 of 18 2 1 7 7 SP3 NO 10 SP3 C Yellow 11 SP2 C Red 13 SP1 C Black 23 SP2 NO_ Orange 25 SP1 NO Brown DIO Inputs o Cap Man 1 Pressure below set point of 1E 1 o Foreline TC 1 Pressure below set point of 1E 1 o Load Lock TC 1 Pressure below set point of 1E 3 VAT Valves Company Info Thermionics Vacuum Products 231 B Otto Street Port Townsend WA 98368 http Awww thermionics com index shtm Contact s Name Tom Howard Phone 1 800 962 2310 Fax 360 385 6617 Email tom_h thermionics com 70 80 psi is required to open close the valve DIO Signals o DIO Inputs Load Lock Iso Closed 1 Valve Closed o DIO Ouputs Ld Lk Valve Relay A B Closed A 0 B 0 Intermediate A 1 B 0 Open A 1 B 1 Turbo Valve Relay A B Closed A 0 B 0 Intermediate A 1 B 0 Open A 1 B 1 Page 15 of 18 General System Usage 3 0 Chamber Dimensions refere
17. of thermal compound on the cathode o There are no screws needed the magnet keeper will hold the target in place Remove and discard the used gasket Gaskets are NEVER to be reused Clean the knife edge on the 6 flange and the chamber with a Kimwipe and some methanol Obtain a new gasket and visually inspect the gasket for defects and cleanliness Blow the gasket off with nitrogen Mounting the flange First place the copper gasket on the 6 flange Ensure that it is seated properly then slowly move the flange towards the chamber Remember all knife edges are sealing surfaces Once the flange is seated on the chamber line up the leak check grooves Hold the flange there and install four bolts finger tight You can then let the flange loose and finish installing all the bolts Finally torque the flange A 6 flange is tighten to 16 ft lb Open Rough Valve and allow the system to pump below 50 mTorr Close Load Lock Iso Valve the rough valve should automatically close Throttle Turbo Iso Valve and allow the foreline to stabilize Open Turbo Iso Valve Changing Gas Cylinders 1 Log any gas changes and update the labeling on the MFC box appropriately Page 7 of 18 Application Notes 2 0 DIO Card Steps for programming for PCI 7248 pgs 36 40 49 59 66 71 74 o Initialize the card o Register_Card PCl_7248 0 o Setup the ports DIO_PortConfig card i 5 Channel_P1A OUTPUT_PORT DO_WritePort card i 5 Channel_P1
18. pump motor The arrow indicates the direction of the pump motor 2 1 2 RF Power Supply 1 ENI OEM 25A 2500W RF Power Supply ENI Products 100 Highpower Road Rochester NY 01887 http www enipower com Page 9 of 18 Contact s Name Vitaly Phone 585 427 8300 Email N A Name Billy Technician Phone 585 214 0316 Email N A Name Debbie Thibault Sales Phone 585 292 7478 Email Debbie_thibault mksinst com 2 ENI MW 25D RF Matching Network 2 1 3 Sputter Guns US Inc Mighty Mak L200A01L L300A01L Company Info Us Inc 6280 San Ignacio Ave Suite E San Jose CA 95119 1365 http www us incorp com Contact s Name Todd Johnson Phone 408 363 6909 Fax 408 363 6996 Email 2 1 4 Turbo Molecular Pump Varian TV1001 Navigator Company Info Varian Electronics Manufacturing Rocklin 3715 Atherton Road Rocklin California 95765 http Awww varianinc com Contact s N A 100 mTorr cross over pressure Since the dry vac roots blower stack pumps so quickly we will use 1E 4 as the crossover pressure 10 sccm nitrogen leak used to keep particulates and corrosive materials away from the bearings of the turbo pump Turbo Pump Female DB 9 Input Pin Signal 8 wire 2 wire Conductor conductor 1 Start Black 2 Low Speed Brown 3 Interlock Red 4 Turbo Black Override 5 6 Start Com Orange 7 Low Speed Yellow Com 8 Interlock Green Com Page
19. st edu for assistance 1 System verification Verify that the control system DIO input output board vacuum gauge controllers etc is powered Check that the RS 232 cable for the stepper motor controller is plugged into the back of the PC Leaving the RS 232 unplugged can cause the control program to stall or react extremely slowly 2 In the control program enter the System Startup Shutdown area A login prompt will appear when the button is clicked 3 Turn on the chillers and dry mechanical pumps by performing the following tasks Energize the 120 V coolant relays by clicking the Coolant Relay button The color of this button should change from red to green Open the cooling water supply return valves Provide 120V to the backing and load lock pumps by clicking on the Backing Pump and Load Lock Pump buttons Page 1 of 18 The chillers and dry mechanical pumps are located in the storage closet Turn on the chillers In the current setup there are 2 chillers one supplying cooling water to the system and the other supplying cooling water to the dry mechanical pumps The load lock pump has an additional RuVac in series First turn on the load lock pump which is the left control box wait 30 seconds and then turn on the RuVac Turn on the backing pump get opening the foreline complete the following tasks Verify that the Turbo Pump blades are not spinning by placing your hand on top of the pump
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