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Brooks Smart-Series Digital Mass Flow Meters and

1. 360 H 80 CE H Italiano Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilit Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualit che soddisfano le specifich
2. 9 2 2 Receipt OF EQUIPMENT een ER 9 2 3 Recommended Storage Practice usine 10 ZA Return Shipment sas trees m E 10 2 5 Gas Connections casey occa C H OEEL 10 2 6 Mechanical IN Stella D M uec acier reet tenet cette a a En 11 Passe EE 11 2 8 Electricalllhterfacing PAPES OOOO PO O endete 12 2 9 Digital Communication ii 14 2 10 INT tet kand E ta 16 Section 3 Oe rz Te TERRE REED m 19 3 1 Operating Procedure ERR 19 3 2 Zero Adjustment vas corre das bei gabe nina 19 3 3 Calibration Procedure ii 19 Section 4 MamtenanGE ai 20 AV General unik a lat 20 4 2 Troubleshooting and System CHECKS ss 20 A S Cl aniNg PrOcoquresS s lene stet esu 23 4 4 Galibration Proced re ar ce entra t amma ee Pese rena gua danken at 23 4 5 Valve Dis Assembly Procedure iii 23 DECOM SE erzielt 24 Appendix A Gas Conversion Tables sisi 28 Appendix B Dimensional draWings rn ic ak 32 Appendix C Translation of CE Marking electrical installation instructions sn nns nan ana 34 Appendix D Important Safety Instructions sir 39 Appendix E Modellsh T 8 44 Figures Figure2 1 Open Collector vinne oE AEN 13 Figure 2 2 p c boards with the locations of jumper switches Note Switch number 1 is the switch at
3. Both ambient and process gas 0 70 C Outboard 1 x 10 mbar l sec Helium 10 minutes 196 F S accuracy Performance within specifications 45 minutes Damping from 0 to 10 seconds is possible for the flow output signal s default setting is 0 5 sec Standard response of the flow output signal 1 sec Response up to 0 2 sec on request Model 5864 3sec 1 sec on request Standard 1 sec Settling time or up to 0 2 seconds is possible to within 296 full scale of final value for any command Set point step virtually without any dead time over or undershoot Model 58538 3 sec 1 sec on request To be specified at ordering Installation and Operation Manual Section 5 Specification X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S KEMAZ 1 2 3 4 5 6 7 8 9 10 11 12 TYPE EXAMINATION CERTIFICATE Equipment and protective systems intended for use in potentially explosive atmospheres Directive 94 9 EC Type Examination Certificate Number KEMA 03ATEX1433 X Issue Number 3 Equipment Smart Mass Flow Controller Model 58508 58515 58535 Series Smart Mass Flow Meters Model 58605 58645 58635 Series Manufacturer Brooks Instrument LLC Address 407 West Vine Street Hatfield PA 19440 USA This equipment and any acceptable variation thereto is specified in the schedule to this certificate and the documents therein referred to KEM
4. This series of microprocessor based field instruments is designed to meet the rigorous demands of various industries applications The use of digital technology ensures that the Brooks Smart series provides maximum accuracy and signal integrity In addition it allows easy interfacing to any peripheral equipment either through analogue or digital communication This manual covers Smart Mass Flow Meter models 5860S 5861S 5863S and 5864S and Smart Mass Flow Controller models 5850S 5851S and 58538 Digital communication The presence of a computer icon to the left of the text as shown here denotes that the accompanying text refers to digital communication Smart Control Digital communication either via RS 232 or RS 485 allows to connect our Brooks model 0160 Smart Control This interface program can be used to operate and re configure Smart Mass Flow Products calibration parameters are not accessible Smart DDE If you require bi directional links between your Windows based applications software and Brooks Smart Mass Flow Products our model 0162 Smart DDE a powerful user friendly Dynamic Data Exchange software program offers all the features you need Section 1 Introduction Models 5800 S Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 1 3 Description Smart Service If you are equipped with primary standard Volumeter calibration equipment or secondary standard Bro
5. control valve is used NOTE With regard to the power supply connections the attached cable must be as short as possible to ensure that the minimum required voltage and current is available at the mass flow device Cable Shielding Earth Cable requirements Compliance with EMC directive 89 336 EEC requires that the equipment be fitted with fully screened signal cables with at least 8096 shielding The cable shielding should be connected to the PG connector s metal shell and have 360 shielding at both ends The shielding should be connected to an earth terminal For translations of this instruction see Appendix D Translations of installation instructions Alarm pin 3 of 9 A TTL Open Collector alarm output is available Type of used transistor is NPN Umax 30V Rioad O Imox 25mA glarm output Figure 2 1 Open Collector Valve override pin 12 Controller models only To open or close the control valve independently of the Set point signal e g for safety reasons pin 12 is available to carry a valve override signal Leave floating i e not connected to allow for normal control operation gt 5 Vdc Valve Open for both NO and NC valves lt 0 Vdc Valve Closed for both NO and NC valves NOTE The valve override command on pin 12 takes precedence over the communication mediated valve override command E Digital communication pins 14 and 15 Section 2 Installation Installation and
6. CH2 6Si2 0 139 2 404 7 20 N wm 1 43 1 47 1 06 0 902 7 00 6 67 2 567 2 72 2 01 N D N N N D D e AR O I al 00 D 09 00 O 00 o Co D Co co co co co O1 NI 00 Go CO O BI 0 00 a OI lt O co O N 30 Installation and Operation Manual Appendix A X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Gas Conversion Table continued 3 168 Nitrosyl Chloride Nitrous Oxide Oxygen Oxygen Difluoride 672 0 738 Perfluorobutane Perfluoro 2 Butene Perfluoromethyl vinylether PMVE Pentane n Pentane Phosgene Phosphine Propane same as CH3CH2CH3 Propylene Propene Tetrafluoroethylene TFE Tetrafluorohydrazine Trichlorofluoromethane f 11 Trimethyloxyborane TMB B OCH3 3 0 3 1929 1 1 2 Trichloro 1 1 2 Triflouroet f 113 CH3 3N 0 22 31 Models 5800 S Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Appendix B Dimensional drawings Model 5860S icon SMART MASS FLOW 1 4 VCR 1 4 VCO 198 3 87 1 4 NPT 99 13 89 Model 58615 me Il I is BROOKS V 239 i a T T I 1 4 BSP 120 156 4BSP l9 389 Model 58635 TT 5863S CONNECTIONS 1 2 TUBE COMPR 3 4 TUBE COMPR 1 TUBE COMPR 1 2 VCR 1 2 VCO 3 4 VCO 0 5 1 15 NPT OR N 1 1 16 12 no adapte
7. NORMALLY CLOSED valve will be fully closed while a NORMALLY OPEN valve will be fully open The NORMALLY OPEN control valve meets application specific requirements since it allows nitrogen gas purging if the power supply is interrupted 2 7 In Line Filter ki ssssss s 3 An in line filter is installed as standard in the instrument s inlet to prevent any foreign material entering the flow sensor or control valve The filtering element should be periodically replaced or ultrasonically cleaned Apply only clean gasses on Mass Flow Meter Controllers Section 2 Installation Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 2 8 Electrical Interfacing The installation of Smart TMF includes a 15 pin Sub D connector For details of correct installation see Table 2 1 Table 2 1 Electrical interfacing Smart TMF Pin TMF side T 0 4 i 0 1 i 11 a a a Optional RS232C RxD or RS485 A 8 mum wer su en 7 input EE mi mm Signal Output pins 2 4 and 10 Pin 2 indicates the flow rate represented by a 0 5 Vdc or 1 5 Vdc signal proportional to the mass flow Pin 4 indicates the flow rate represented by either a 0 20 mA or 4 20 mA signal current proportional to the mass flow Both the current and voltage signals are returned via pin 10 on the D connector Analogue Setpoint Input pins 7 8 and 1
8. X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 Suomi Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEC Erityist huomiota on kuitenkin kiinnitett v signaalikaapelin valintaan Signaalikaapelin kaapelin l piviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka t ytt v t CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 80 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mik li mahdollista tulisi k ytt metallisia kaapeliliittimi kiinnitett ess suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla maadoitettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden t ytyy olla 80 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Svensk Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som st lls f r CE godk nnande
9. bedekkingsgraad van 80 D of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden worden Het scherm moet worden verbonden met aarde Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 8096 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Norsk Til den det ang r Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger Brooks Instrument tilbyr levert med utstyret egnet kabel som m ter de krav som stilles til CE sertifisering Dersom kunden selv velger kabel m kabel med fullstendig 80 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes metallet i pluggen eller nippelen i begge ender ove
10. nkopplat i samband med service V nligen kontrollera att bara BROOKS originaldelar anv nds i samband med service Observera at delar med motsvarande utseende men ej originaldelar kan p verka fl desm tarens funktion och prestanda samt p verkar s kerheten i processen Det kan ven resultera i eldsv da elektrisk fara eller felaktig funktion B e gt ESPANIOL IMPORTANTES INSTRUCCIONES DE SEGURIDAD Este ap ndice contiene importantes instrucciones de operaci n y seguridad para el uso de los rot metros de tubo de vidrio BROOKS de la Thermal Mass Flow Meter Controller El instrumento es conforme a la directiva 97 23 CE sobre Equipos a Presi n de la Comunidad Europea PED Consulte con sus autoridades locales por si existieran normas 6 directivas adicionales sobre el uso y o instalaci n de dicho tipo de instrumentos INSTRUCCIONES DE SEGURIDAD 1 Lease con cuidado todas y cada una de las identificaciones del aparato 1 asi como las secciones del Manual de Inatalaci n y Operci n antes de usar el rot metro ATENCION No operar nunca el instrumento por encima de las especificiones de M xima Presi n de Operaci n resefiadas en el Manual de Instalaci n y Operaci n El no seguir estas instrucciones puede provocar dafios y perjuicios en personas y equipos Asegurarse de que el instrumento ha sido conectado e instalado correctamente a la fuente de presi n y o el ctrica OPERACION a Empezar abriendo
11. 1 5 Vdc or 0 20 mA or 4 20 mA Note Digital output communication is simultaneously available with analogue output Installation and Operation Manual Section 1 Introduction X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Output damping provides a constant scale reading under fluctuating flow rate conditions Standard factory setting 0 5 sec Output limiting prevents possible damage to delicate acquisition devices by limiting the output to 0 5 25 Vdc on the voltage signal output and 0 21 mA on the current output An alarm TTL open collector signal output is available to the user If the instrument s specifications are exceeded either by process conditions or by the device itself an alarm signal can be generated MASS FLOW CONTROLLER Standard features include Each Smart Mass Flow Controller is provided with an adaptive valve control algorithm for the maintenance of stable flow control even under varying process conditions pressure temperature Setpoint source selectable Setpoint signal source for the Mass Flow Controller can be selected from communication RS232 RS485 or 0 5 Vdc or 1 5 Vdc or 0 20 mA or 4 20 mA Fast Response Control provides rapid gas settling times with minimal over undershoot Standard factory setting 1 sec for 5850 51 and meter models 3 sec for 5853 Valve Override VOR availabe at pin 12 allows the user to fully open or close the cont
12. 6802 ED Arnhem The Netherlands T 31 26 356 20 00 F 31 26 3 52 58 00 customer kema com www kema com Registered Arnhem 09085396 Experience you can trust 27 Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 Appendix A Gas Conversion Tables USE OF THE CONVERSION TABLES If a Mass Flow Meter or Controller is operated on a gas other than the gas it was calibrated with a scale shift will occur in the relationship between the output signal and the mass flow rate as a result of the difference in heat capacities between the two gases This scale shift can be calculated by using the ratio of the molar specific heat of the two gases or the sensor conversion factor The gasconversion table is available at Brooks Instrument under document no J 836 D 508 USE OF A MFC M FOR A DIFFERENT GAS THAN IT IS CALIBRATED FOR For use with a different gas type multiply the output reading by the ratio of the gas factor of the desired gas and the gas factor of the calibrated gas Actual gas Output factor of the new gas Flow rate Reading x factor of the calibrated gas Example The controller is calibrated for nitrogen 1000mln min full scale The desired gas is carbon dioxide Multiply the output reading by 0 740 to calculate the flow of carbon dioxide When the output reading is 750 mln min the flow rate for carbon dioxide is 750 x 0 740 555 mln min CALCULATE GAS FACTOR FOR MIX GAS
13. C4H12Si 0 183 3 94 2 2 Dichloro 1 1 1 Trifloroethane C2HCL2F3 0 259 6 82 2 2 4 41 e QD 00 7 47 1 1 Difluoro 1 Chloroethane C2H3CLF 0 341 4 77 1 Difluoroethane CH3CHF2 0 415 2 9 1 Difluoroethylene CH2 CF2 0 458 2 8 T Difluoromethane f 32 CF2H2 627 2 41 12Di 1 2 Dichloroethane Ethylene dichloride C2H4CL2 1 2 Dichlorotetrafluoroethane f 114 C2CL2F4 1 1 Di 1 1 1 Di 1 1 Di Appendix A Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 35 November 2008 Gas Conversion Table continued Dimethylamine CH3 2NH 1 269 2 01 Dimethylether CH3 20 1 281 CH3 4 i 0 0 1 37 392 3 244 332 1 493 2 77 49 394 365 613 0332 493 hane 0286 0 49 1038 1 357 2 057 2 38 Ethylene 0284 1 1 261 1 96 1 69 3 127 3 41 9 574 2 654 8 814 0 378 0 17 434 2 577 2 219 2 312 8 30 N T O 6 66 C6H14 0 204 1 757 3 84 Hydrogen 1 008 269 HBr IF r o N o HBr 3 64 1 63 1 17 0 89 5 78 H2Se 5 IN 3 61 1 539 9 907 2 59 2 503 3 222 3 70 0 717 1 782 4 23 3 127 2 30 1 518 2 14 H2Se lodine Pentafluoride IFS 0 288 1 4 0 76 i mN 0 0 o o 00 m m alot 00 01 00 NTO gt CO CO BR OC CO CO MJO CO OPIN BR BR OD oO O ol O1 P 2 061 Hexamethyldisilane HMDS
14. Controller models only The Smart Mass Flow Controller can be used either with a current or voltage Set point To use the current Set point connect the Set point signal to pin 7 and the Set point return signal to pin 1 on the terminal jumper J1 must be in place refer to Figure 2 2 To use the voltage Set point connect the Set point signal to pin 8 and the Set point return to pin 1 on the D connector 5 Vdc reference pin 11 Controller models only A 5 Vdc ref voltage is available on pin 11 This can be used to set the Setpoint with the aid of an externally located potentiometer 10 turn 2 KOhm suggested NOTE I O configuration to be defined at time of ordering Reconfiguration at customer side can be accomplished using digital communication Power Supply Mass Flow Meter models pin 5 and 9 The Mass Flow Meter s power supply is connected via pins 5 15 to 28 Vdc and 9 power supply common on the D connector Mass Flow Controller models pin 5 6 and 9 The Mass Flow Controller s power supply is connected via pin 5 15 to 28 Vdc and 9 power supply Installation and Operation Manual Section 2 Installation X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 85 common on the D connector If a 15 Vdc power supply is required pin 6 must be connected and jumper K2 on the p c board must be set the lower position see Figure 2 2 This is applicable for model 5851S and or when a Normally Opened N O
15. Corrective Action Output stays at zero Clogged Sensor Clean sensor Refer to cleaning regardless of Set point and procedures Section 4 3 22 there is flow through the meter controller Flow can not be achieved regardless of Set point applicable to MFC Output signal stays at approx 5 25 Vdc or 21 mA regardless of Set point and there is flow through the meter controller Output signal follows Set point at higher set points but will not go below 296 Output signal follows Set point at lower set points but does not reach full scale Instrument grossly out of calibration Flow is higher than desired Instrument grossly out of calibration Flow is lower than desired Controller oscillates applicable to MFC Defective electronic board Clogged Control Valve Valve override input is grounded Defective electronic board Valve leaks or is stuck open applicable to MFC 15V applied to the valve override input applicable to MFC Defective electronic board Control valve leaks or is stuck open Insufficient inlet pressure or pressure drop Partially clogged sensor Partially clogged valve applicable to MFC Valve out of adjustment applicable to MFC Valve guide spring failure applicable to MFC Partially clogged sensor Partially clogged restrictor Pressure drop or inlet pressure deviates from calibrated values Oversized orifice Valve out of adjustment Unstable
16. DuPont Performance Elastomers Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 318 549 300 T 011 81 3 5633 7100 T 215 362 3700 F 31 318 549 309 F 011 81 3 5633 7101 F 215 362 3745 E Mail BrooksEu Brooksinstrument com E Mail BrooksAs BrooksInstrument com E Mail BrooksAm BrooksInstrument com www BrooksInstrument com BROOKS Copyright 2008 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
17. MFC eng PN 541 C 051 AAG Models 5800 35 November 2008 3 OPTIONS MUST BE ORDERED FOR FLOW RANGES UP TO 3460 mln min N2 ADD C 0 10 Vdc I O CONFIGURATION NO FURTHER I O OPTIONS ARE POSSIBLE WITH THIS SELECTION D 0 5 Vdc Input 0 10 Vdc output 0550E replacement configuration E DIN ANSI PN40 150 LBS PRESSURE RATING FLANGED CONNECTION FOR THE 1 5 AND 2 58645 F ENHANCED ACCURACY SPECIFICATIONS 0 5 OF RATE PLUS 0 1 F S Flow range 50 mln min to 100 In min INTERCONNECTION CABLE ADD PER METER H INTERCONNECTION CABLE FOR RS 485 MULTI DROP CONFIGURATION BASIS PRICE FOR THE FIRST DEVICE 3 METER CABLE LENGTH ADD PER METER PRICE ADDER FOR AN ADDITIONAL DEVICE 1 MTR CABLE LENGTH I O RING VALVE MATERIAL Selection B can only be delivered for a 5853 model in combination with a Teflon Diaphragm Selection D can be delivered only in combination of a Teflon Diaphragm for Model 5853 price adder Selection D for Model 5863 price adder 48 Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 85 THIS PAGE WAS INTENTIONALLY LEFT BLANK 49 Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programmin
18. Models 5800 S November 2008 Greek Brooks to CE EMC 89 336 EEC TOV H Brooks CE Eav 80 D Kuicuxo
19. Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 35 November 2008 pins 14 and 15 are available for connecting the device to the RxD A or TxD A lines for RS 232 RS 485 communications NOTE Either RS 232 or RS 485 should be specified at the time of ordering See section 2 7 for details of how to configure the p c board 2 9 Digital Communication NOTE The printed circuit boards only need to be reconfigured if the hardware settings differ from those specified at the time of ordering El Brooks Smart Mass Flow Meters and Controllers incorporate two printed circuit boards one main board containing the processor and a piggyback board The piggyback board enables the device to communicate with a PC via an RS 232 or RS 485 connection The piggyback board is installed via the K5 K6 and K7 connectors on the main board see Figure 2 2 The p c board enclosure must be removed to gain access to the electronics Disconnect the power to the device and any cables running to the D connector Remove the three screws at the base of the electronics enclosure then lift off the enclosure The electronics enclosure must be replaced before returning the unit to service Figure 2 2 p c boards with the locations of jumper switches Note Switch number 1 is the switch at the bottom The digital communication piggyback board is used for all communication related hardware settings For this purpose the board is eq
20. S FLOWRANGES 200 300 In min 5530 80 253578 5853S B5 MASS FLOW CONTROLLER F S FLOWRANGES 1 901 2200 In min 853S B6 MASS FLOW CONTROLLER F S FLOWRANGES 2201 2500 In min 44 Installation and Operation Manual Appendix E X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S MECHANICAL CONNECTIONS 9 16 18 UNF ONLY FOR 5850 60 51 61 53 63 TUBE COMPRESSION FITTINGS ONLY FOR 5850 60 51 61 1 8 TUBE COMPRESSION FITTINGS ONLY FOR 5850 60 51 61 3 8 TUBE COMPRESSION FITTINGS ONLY FOR 5851 61 1 4 NLY FOR 5850 60 51 61 1 4 NLY FOR 5850 60 51 61 1 4 NLY FOR 5850 60 51 61 TUBE COMPRESSION FITTINGS ONLY FOR 5850 60 51 61 TUBE COMPRESSION FITTINGS ONLY FOR 5850 60 51 61 1 4 BSP F NLY FOR 5850 60 51 61 ye BSP F NLY FOR 5853 63 BSP F ONLY FOR 5853 63 6 128A ONLY FOR 5853 63 TUBE COMPRESSION FITTINGS ONLY FOR 5850 60 51 61 53 63 3 4 TUBE COMPRESSION FITTINGS ONLY FOR 5853 63 TUBE COMPRESSION FITTINGS ONLY FOR 5853 63 NPT F ONLY FOR 5853 63 i NPT F ONLY FOR 5853 63 1 NPT E SEE OPTION E ONLY FOR 5853 63 64 VCO o 200 In min max ONLY FOR 5850 60 51 61 53 63 3 4 NLY FOR 5853 63 VOR 200 In min max ONLY FOR 5850 60 51 61 53 63 DN15PN40 NLY FOR 5853 63 DN25PN40 NLY FOR 5853 63 DN40PN40 NLY FOR 5853 63 DN50PN40 ONLY FOR 5853 63 150 LBS ONLY FOR 5853 63 300 LBS NLY FOR 5853 63 1 150 LBS NLY FOR 5853 63 1 300 LBS NLY FOR 5853 63 150 LBS NLY
21. information om s kerhet och handhavande vid installation och anv ndande av Brooks Fl desm tare i Thermal Mass Flow Meter Controller Series Instrumentet r i verensst mmande med PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Kontakta de lokala myndigheterna ang ende eventuella nationella f reskrifter och ytterligare f reskrifter ang ende krav p riktig installation S KERHETS INSTRUKTION 1 L s alla instruktioner och varningsf reskrifter p 1 fl desm taren och 2 alla aktuella avsnitt i Instruktion och handhavande manualen innan produkten tas i drift 2 VARNING Anv nd inte detta instrument utanf r de angivna specifikationerna som anges i Instruktion och handhavande manualen Att ej beakta denna varning kan resultera i alvarlig personskada och eller skada p utrustningen V nligen kontrollera att instrumentet r r tt inkopplat elektriskt och mekaniskt med avseende p elektrisk sp nning och aktuellt tryck Vid ig ngs ttning a Sl pp l ngsamt p aktuellt fl de i systemet ppna processventiler l ngsamt f r att undvika f r h ga fl den b Kontrollera om det finns n gra l ckage runt fl desm tarens anslutningar Om det inte finns n got l ckage ka f rsiktigt till aktuellt arbetstryck Varning Om denna utrustning inte servas enligt instruktionsboken kan alvarlig personskada intr ffa Utrustningen kan skadas av f r h gt tryck V nligen kontrollera att processtrycket p m taren r fr
22. instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources To ensure proper performance use qualified personnelto install operate update program and maintain the product When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may resultin fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury Pressure Equipment Directive PED All pressure equipment with an internal pressure greater than 0 5 bar g and asizelargerthan 23mmor 1 inch falls underthe Pressure Equipment Directive PED The Directive is applicable within the European Economic Area EU plus Norway Iceland and Liechtenstein Pressure equipmentcan be traded freely within this area oncethe PED has been complied with Section 1 of this manual contains important safety and operating instructions related to the PED directive Meters described in this manual are in compliance with EN directive 97 23 EC module H Conformity Assessment All Brooks Instrument Flowmeters fall under flu
23. n Avaa putkistossa olevat venttiilit hitaasti jotta v ltytt isiin paineiskuilta b Tarkista mahdolliset vuodot mittarin prosessiliittimien kohdalta Mik li vuotoja ei ole nosta prosessipaine k ytt paineeseen 5 VAROITUS Mik li t t laitetta ei huolleta asianmukaisesti saattaa korkea k ytt paine aiheuttaa vakavia henkil vahinkoja ja tai laitteen rikkoutumisen On varmistettava ett putkistopaine on poistettu huollon ajaksi 6 Tulee varmistaa ett k yet n Brooks in alkuper isi varaosia kun laite vaatii huoltoa Huomaa ett korvaavat n k isoasat sek k sittely voi vaikuttaa laitteen toimintaan sek saattaa prosessin riskialttiiksi Lis ksi t m voisi aiheuttaa palo tai s hk isen vaaran tai toimintaongelmia Installation and Operation Manual Appendix D X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S DEUTSCH WICHTIGE SICHERHEITSHINWEISE Dieser Anhang enth lt wichtige Hinweise f r einen sicheren Betrieb des Ganzmetall Schwebek rperdurchflussmessers der Baureihe Thermal Mass Flow Meter Controller Series von Brooks Instrument Das Ger t entspricht den g ltigen PED Richtlinien PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Konsultieren Sie lokale Zulassungsbeh rden f r nationale und oder regionale Sicherheitsbestimmungen bzw weitergehende Installationsvorschriften SICHERHEITSHINWEISE Bitte lesen Sie alle gekennzeichneten Sicherheitshinweise Warnungen auf 1 de
24. the bottom 14 Figure 2 3 RS 232 interconnection of TMF and PC 16 Figure 2 4 RS 485 multidrop interconnection TMFs and PC e 16 Figure 2 5 TME C to R a0 0ut cable ea s ein 17 Figure 2 6 TMF C Read out and PC iii 17 Tables Table 1 1 Flow ranges per model een aa eis 6 Table 2 1 Electrical interfacing Smart TMF e 12 Table 2 2 DIDSWITCH Settings ricco ee else 15 Table 2 3 Electrical interfacing Smart TMF cable ss 18 Table 4 1 Troubleshooting elek a oa 22 Table 5 1 Flow ranges and pressure ratings ss 25 Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Section 1 Introduction 1 1 Purpose This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks Smart series Mass Flow meters 5860S 5861S 5863S and controllers 5850S 5851S 58535 1 2 How to use this Manual TE It is recommended to read this manual before installing operating or repairing these Mass Flow Instruments This manual is organised into nine sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section 5 Specification Appendices A E This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks Smart Mass Flow Meters and Controllers
25. yet Observe the output signal and if 20 Installation and Operation Manual Section 4 Maintenance X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S necessary perform the zero adjustment procedure section 3 2 If the output signal does not zero properly please contact Brooks Instrument 2 Connectthe instrument to a source of the same gas used for its original calibration Regulate the Set point to 100 flow and adjust the inlet and outlet pressures to the calibration conditions Verify that the output signal reaches 5 00 volts and stabilises at that value Vary the command voltage over the 1 to 100 range and verify that the output signal follows the Set point If possible connect a flow measurement device to monitor the actual flow behaviour and verify the accuracy of the mass flow instrument If the mass flow instrument performs as described above then it is functioning correctly and the problem may lie elsewhere Table 4 1 lists possible malfunctions which may be encountered during bench troubleshooting For controller models only Apply 5 to the 15 Vdc valve override pin pin 12 and verify that the output exceeds 10096 Connect the valve override pin to earth and verify that the output signal falls below 296 21 Section 4 Maintenance Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 Table 4 1 Troubleshooting Trouble Possible Cause Check
26. A Quality B V certifies that this equipment has been found to comply with the Essential Health and Safety Requirements relating to the design and construction of equipment and protective systems intended for use in potentially explosive atmospheres given in Annex II to the directive The examination and test results are recorded in confidential test report no 2113693 7 Compliance with the Essential Health and Safety Requirements has been assured by compliance with EN 60079 15 2003 If the sign X is placed after the certificate number it indicates that the equipment is subject to special conditions for safe use specified in the schedule to this certificate This Type Examination Certificate relates only to the design examination and tests of the specified equipment and not to the manufacturing process and supply of this equipment The marking of the equipment shall include the following 113G EExnAII T4 This certificate is issued on March 21 2008 and as far as applicable shall be revised before the date of cessation of presumption of conformity of one of the standards mentioned above as communicated in the Official Journal of the European Union K ity B V N C G van Es Q Certifidation Manager Page 1 2 ALI 9 Integral publication of this certificate and adjoining reports is allowed This Certificate may only be reproduced in its entirety and without any change KEMA Quality B V Utrechtseweg 310 6812 AR Arnhem P O Box 5185
27. Appendix E X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S ENHANCEM ENTS STANDARD RESPONSE 1 SEC 5850 51 3 SEC 5853 1 B FAST RESPONSE SPECIFY VALUES SEC 1 LINEAR RAMP SPECIFY VALUES SEC 1 D FLOW OUTPUT DAMPING SPECIFY VALUES SEC CALIBRATION UNCALIBRA TED STANDARD CALIBRA TION INCLUDED STORAGE OF MULTIPLE CAL CURVES ADD PER AVAILABLE CALIBRATION GAS 1 POWER SUPPLY INPUT 2 CERTIFIED FOR USE IN ZONE 2 5850S BC IHA1AB3CA1B1 TYPICAL MODEL NUMBER BROOKS SMART MASS FLOW PRODUCTS Nors 1 ENHANCEMENTS PLEASE FILL IN THE REOUESTED SPECIFICATIONS WHEN YOU HAVE DESCRIBED THE ENHANCEMENTS Standard response time of the flow output signal Model 5850 51 and 5860 60 standard 1 sec or on reguest better than 0 2 sec Model 5853 63 standard 3 sec or on request better than 1 sec Model 5864 3 sec Standard settling time for controllers Model 5850 51 standard 1 sec or on request better than 0 2 sec Model 5853 standard 3 sec or on request better than 1 sec to within 2 full scale of final value 2 AREA SAFETY CLASSIFICATION A SPECIAL CABLE CONNECTOR IS REQUIRED FOR ZONE 2 CERTIFICATION REQUIREMENTS THIS WILL BE SUPPLIED WHEN YOU HAVE SELECTED THE INTERCONNECTING CABLE IF THE CUSTOMER MAKES HIS OWN CABLE SET YOU ALWAYS HAVE TO SELECT POSITION B MATING CONNECTOR ONLY 47 Appendix E Installation and Operation Manual X TMF 5800S
28. FIBUS DP up to 12 Mbit sec self selecting Alarm TTL Open Collector Output signal earthed when activated Max 30 Vdc 25 mA Or via communication port when used digitally 5 Vdc ref 5 Vdc reference voltage load impedance gt 2000 Ohm Security If self diagnostics detects a failure the alarm mode will be activated Open Collector Output via the connector Details of the cause of the failure are available through digital communication To prevent unauthorized setting or reranging of span or zero these functions are only accessible via the Brooks Smart Control model 0160 or using Smart DDE model 0162 Power 15Vdc to 28Vdc or 15Vdc use only 24 Vdc for NO requirements valves and for use of 5851 S Power Consumption Mass Flow Models 5860 S 5861 S 5863 S and 5864 S Meters for 24 Vdc 10 at 80 mA 120 mA for Profibus for 15 Vdc 596 at 90 mA Power Consumption Mass Flow Models 5850 S 5851 S and 5853 S Controllers for 24 Vdc 1096 at 140 mA 180 mA for Profibus for 15 Vdc 10 at 185 mA NOTE With valve override function activated the total power consumption specifications are for 15 Vdc at 285 mA or for 24 Vdc at 370 mA 25 Section 5 Specification Models 5800 S Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 26 Temperature Leak Integrity Warm up time Damping Response Meters Settling Time Controllers
29. FOR 5853 63 300 LBS ONLY FOR 5853 63 2 150LBS ONLY FOR 5853 63 2 300 LBS ONLY FOR 5853 63 ONLY FOR 5853 63 ONLY FOR 5853 63 SE O G A gt O gt O D n assesses JE 3 3 A A sk I ajajajaja k gt gt z Z o gt o JU gt gt gt 2 6 G G sls gt gt zziz G G JU o o 9 218 3 lt gt r lt m gt m gt UJ c Z gt NOT FOR 5853 see Options 3 1 PTFE KALREZ KALREZ SENSOR O RINGS amp VALVE SEAT NOT FOR 5853 63 NOT FOR 5853 63 see Options 3 I T 1Y 2E 2F III JEJE Im IT 2lolB N ISIN oz DIO zio 9m lt lt gt gt Pr r lt lt gt Im lt m ms gt 2 o zo O o n 5 o O 8 g lo e Ia 8 a SPECIFY 45 Appendix E Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 lt Io gt o m INPUT OUTPUT 0 5Vdc 0 5 Vdc amp 0 20mA INCL RS 232 9600 BDS 0 20 mA 0 20mA 8 0 5Vdc INCL RS 232 9600 BDS 1 5V dc 1 5 Vdc amp 4 20mA INCL RS 232 9600 BDS CARDEDGE CONNECTOR ONLY 0 5 VO COMMUNICATION RS 485 at i i C e ol e FL i M if zo GE apo ell y e olo elo L LI 131917 FERNER LL TIT Installation and Operation Manual
30. Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Brooks Smart Series Digital Mass Flow Meters and Controllers se I Brooks Smart Family BROOKS www BrooksInstrument com INSTRUMENT Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 Essential Instructions Read this page before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Products Read all instructions prior to installing operating and servicing the product If this instruction manual is notthe correct manual please see back cover for local sales office contact information Save this instruction manual for future reference If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Inform and educate your personnel in the proper installation operation and maintenance of the product Install your equipment as specified in the installation
31. Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 80 D eller runda typer av anslutningskontakter ska vara sk rmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 80 skarmade f r att verensst mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse 38 Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Appendix D Important Safety Instructions ENGLISH IMPORTANT SAFETY INSTRUCTIONS This appendix contains important safety and operating instructions for use with the Thermal Mass Flow Meter Controller Series The instrument complies to the PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Consult local authorities as to national and or local safety codes and any additional installation requirements SAFETY INSTRUCTIONS Please read all instructions and cautionary markings on 1 the flowmeter and 2 all appropriate sections of the Instruction and Operating Manual before using this product WARNING Do not operate this instrument in excess of the specifications listed in the Instruction and Operating Manual Failure to heed th
32. SES In order to calculate the conversion factor for a gas mixture the following formula should be used Sensor 400 conversion P1 P2 Pn factor for sensor sensor sensor Mixture conversion conversion conversion factor 1 factor 2 factor n Where P1 percentage of gas 1 by volume P2 percentage of gas 2 by volume Pn percentage of gas n by volume Example The desired gas is 20 Helium He and 80 Chlorine CI2 by volume The desired full scale flow rate of the mixture is 20 In min Sensor conversion factor for the mixture is 100 Mixture Factor f 20 4 80 y 0 946 386 sss N2 equivalent flow 20 0 946 21 14 In min NOTE It is generally accepted that the mass flow rate derived from this equation is only accurate to 596 The table below lists the conversion factors for various gases with respect to nitrogen The conversion table is used to determine the flow rate for gases other than the pre selected gas The flow meter is factory set to a pre selected gas pressure and flow range Installation and Operation Manual Appendix A X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Gas Conversion Table 4 12 3 90 534 f 115 7 16 5 20 4912 4 134 2 322 27 2 491 1877 0 177 123 8 76 10 5 5 492 N 4 912 4 50 N O o Dichlorofluoromethane f 21 CHCL2F 0 456 E N o O O1 Ol Dichlorosilane IH2CL2 0 442 Diedthylsilane
33. al danneggiamento dello strumento stesso Controllare che lo strumento sia correttamente collegato alle fonti di pressione che a quelle elettriche ISTRUZIONI OPERATIVE a Lentamente procedere ad aprire il flusso allo strumento Aprire lentamente le valvole di processo dello strumento per evitare picchi di pressione b Controllare l assenza di perdite sia sui raccordi di entrata che in quelli di uscita dello strumento Se non si riscontra alcuna perdita portare lo strumento alla pressione di esercizio ATTENZIONE Se allo strumento non viene fatta regolarmente una corretta manutenzione alle alte pressioni potrebbero verificarsi lesioni personali e o danni allo strumento Assicurarsi che la pressione di processo sia stata tolta laddove si necessiti effettuare una manutenzione Assicurarsi che siano utilizzate solo parti originali nella manutenzione degli strumenti Si fa notare che la sostituzione con parti compatibili e la manutenzione effettuata non seguendo le procedure del fornitore posso provocare alterazioni nelle prestazioni dello strumento ed alterare lo stato di sicurezza delle Vs linee di processo Ancor pi potrebbe provocare rischi di incendio rischi elettrici o far risultare errati i processi in corso m PO a o gt 2 Installation and Operation Manual Appendix D X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S SWEDISH VIKTIG S KERHETSINFORMATION Denna bilaga inneh ller viktig
34. arded with the packing materials Inspect for damaged or missing parts Section 2 Installation Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 2 3 Recommended Storage Practice If equipment supplied by Brooks Instrument is to be placed in intermediate or long term storage it is recommended that it be a Stored within the original shipping container b Storedina sheltered area under the following conditions 1 Optimum ambient temperature 21 C 70 F maximum 32 C 90 F minimum 7 C 45 P 2 Optimum relative humidity 45 maximum 60 minimum 25 c Subjected to a visual inspection upon removal from storage to verify that the condition of the equipment is as received If the equipment has been in storage for more than ten months or if it has not been stored under the recommended conditions all pressure containing seals should be replaced In addition the device should be subjected to a pneumatic pressure test in accordance with the applicable vessel codes 2 4 Return Shipment Prior to returning any instrument to the factory contact your nearest Brooks location for a Return Materials Authorization Number RMA This can be obtained from one of the following locations Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 Email BrooksAm BrooksInstr
35. e document no 834 L 030 upon request The model 585359 control valve assembly consists of an axially mounted main valve driven by the top mounted pilot valve The main valve should not be disassembled If necessary please return the Mass Flow Controller to the factory 1 Wetted components include the body laminar flow element and all valve components including the orifice process adapters and inlet filter 23 Models 5800 S Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Section 5 24 Specification PERFORMANCE SPECIFICATIONS Flow 0 7 of rate and 0 2 F S at calibration conditions Accuracy 0 5 of rate and 0 1 F S optional consult factory 1 0 F S for flowrates above 11001 min for 5863 5853 Repeatability X 0 2596 of rate Rangeability 50 1 within specified accuracy Controllability 100 1 i e total operating range Stability Less than 0 5 of rate per year Temperature Zero Less than 0 07596 F S per degree C Sensitivity For flowrates over 100 l min gas and ambient temperature must be equal PHYSICAL SPECIFICATIONS Materials of Wetted parts stainless steel with Viton Buna N Construction PTFE Kalrez or EPDM seals Mechanical NPT F Tube compression VCR VCO Downport Option connections Flanged DIN or ANSI type available Electrical 15 pin D type connector goldplated contacts connections SPECIFICATIONS Certification CE ce
36. e richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 8095 I connettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemit Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici II cavo impiegato deve comunque avere una schermatura del 80 per soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra 36 Installation and Operation Manual Appendix C X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Nederlands Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een
37. e veiligheidsinstructies voor het gebruik van de Themal Mass Flow Meter Controller Series Deze instrumenten voldoen aan de PED Pressure Equipment CE Directive 97 23 EC wet op het vervaardigen en distibueren van drukvaten binnen de Europese lidstaten De locale authoriteiten kunnen u op de hoogte stellen van de daar geldende additionele en of locale eisen voor installatie en gebruik VEILIGHEIDS INSTRUCTIES Lees voor het in gebruiknemen alle instructies en waarschuwingen op de flowmeter en in de gebruiks handleiding WAARSCHUWING Gebruik dit instrument niet buiten de in de gebruiks handleiding vastgelegde MAXIMALE GEBRUIKS DRUKKEN Het niet in acht nemen van deze waarschuwingen kunnen leiden tot persoonlijke verwondingen en of beschadiging van de meetapparatuur Overtuig u zelf v r het in gebruik nemen dat het instrument volgens de geldende voorschriften is ingebouwd in de leiding en aangesloten op het eventuele spanningsnetwerk INGEBRUIK NEMEN a Langzaam opvoeren van de stroom in het systeem Open de kranen langzaam om een plotselinge golfbeweging van de vloeistofstroom te voorkomen b Controleer het instrument op eventuele lekkage met name de in en uitlaat aansluitingen Als er geen lekkage wordt ontdekt kan het systeem op bedrijfsdruk worden gebracht WAARSCHUWING Nalatig onderhoud van dit instrument kan ernstig persoonlijk letsel en of beschadiging van de meet apparatuur tot gevolg hebben Overtuig u zelf ervan dat de procesdr
38. el caudal cuidadosamente Abra lentamente las v lvulas para evitar puntas de caudal b Comprobar si existen fugas en el caudal metro y sus conexiones Si no se encuentran fugas continuar abriendo hasta conseguir las condiciones normales de servicio ATENCION Llevar un mantenimiento adecuado con el f n de prevenir y evitar fallos debidos a altas presiones de operaci n El no seguir estas instrucciones puede provocar dafios y perjuicios en personas y equipos Despresurizar la l nea antes de desmontar el rot metro Utilice solo piezas originales BROOKS para el mantenimiento de su rot metro El uso de piezas de otros suministradores con apariencia similar puede afectar las prestaciones y la seguridad del equipo Cualquier cambio indebido puede resultar en una explosi n 6 operaci n incorecta m e B e o Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 35 November 2008 Appendix E Modellist SMART MASS FLOW METERS CONTROLLERS 5860S BA MASS FLOW METER F S FLOWRANGES 0 003 0 008 In min 5860S BC MASS FLOW METER F S FLOWRANGES 0 008 30 In min 9015 80 5865 86 5863S BK MASS FLOW METER F S FLOWRANGES 600 700 In min 8635786 58505 B0 5863S BJ MASS FLOW METER F S FLOWRANGES 500 600 In min 5863S BL MASS FLOW METER F S FLOWRANGES 700 800 In min 5853S BE MASS FLOW CONTROLLER F S FLOWRANGES 100 200 In min 5853S BF MASS FLOW CONTROLLER F
39. eldurchf hrungen mit AnschluBm glichkeiten f r die Kabelabschirmung verwendet werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlieBen Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm Bige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 80 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotential zu verbinden English All Brooks electrical electronic equipment bearing the CE mark has been successfully tested in accordance with the Electromagnetic Compatibility regulations EMC directive 89 336 EEC However special care is required when selecting signal cables to be used with equipment bearing the CE mark Quality of signal cables cable glands and connectors Brooks supplies high quality cabling that meets the specifications for CE certification However if you wish to use your own signal cable you should select one that is fully screened with at least 80 shielding Any D or Circular type connectors used should be screened with a metal shield If applicable metal cable glands must be used to clamp the cable shielding The cable shielding should be connected to the metal shell or gland and have 360 shielding at both ends The shielding should be connected to an earth terminal Card Edge Connectors are n
40. entilen pnes til fullt operasjonstrykk ADVARSEL Dersom utstyret ikke blir riktig vedlikeholdt kan det f re til alvorlige personskader og eller skade p instrumentet p grunn av potensielle h ye trykk P se at prosesstrykket er avlastet f r utstyret demonteres Bruk alltid Brooks original deler ved service Merk at selv om erstatningene ser like ut kan de p virke produktets virkem te og gj re prosessen usikker Det kan videre f re til brann elektrisk risiko eller feil virkem te m Bo ITALIANO IMPORTANTI ISTRUZIONI PER LA SICUREZZA Questa appendice contiene importanti istruzioni sia per la sicurezza che per l uso corretto degli flussometri metallici della Brooks Instrument della Thermal Mass Flow Meter Controller Series Questi strumenti seguono la normativa PED Direttiva CE 97 23 EC per gli strumenti in pressione Consultare le autorit locali per i codici di sicurezza nazionali internazionali e per ulteriori norme di installazione ISTRUZIONI DI SICUREZZA Prima di utilizzare il prodotto leggere attentamente tutte le istruzioni ed I marchi di sicurezza applicati sui flussimetri 1 e Appendici relative delle istruzioni e del manuale operativo 2 ATTENZIONE Non utilizzare questo strumento oltre I limiti massimi delle specifiche elencate sia nelle istruzioni per l uso che nel manuale operativo La mancata osservanza di tali istruzioni potrebbe causare il rischio di lesioni personali e o
41. equipment to ensure accuracy and reliability for repairs and recalibration The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance ISO Americas TY 1 888 554 FLOW C Fn Europe T 31 318 549 290 Within Netherlands ZP 0318 549 290 SYSTEM Asia Z 011 81 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS Brooks Instrument LLC DuPont Dow Elastomers DuPont Dow Elastomers Teflon rne renes E I DuPont de Nemours Co
42. g Following this purge the device thoroughly with dry nitrogen once again 3 If the sensor is contaminated remove the sensor and use a haemostat or tweezers to push a 0 007 diameter piano wire through the flow sensor tube to remove any contamination end closest to the control valve The sensor tube can then be flushed with a solvent that leaves no residue This can be accomplished conveniently using a hypodermic needle filled with solvent NOTE Do not soak the sensor assembly in a cleaning solution If solvent seeps into the sensor assembly it will probably damage the sensor or at least significantly alter its operating characteristics 4 4 Calibration Procedure EA AAA A A A A A A A A ss The calibration of Smart Mass Flow devices is not described in this manual Such calibration requires the use of accurate and traceable calibration equipment such as Brooks Volumeter equipment in addition to digital communications However if the above equipment is available at your facility then Brooks Instrument will supply you with copy of the calibration procedure document no 834 P 064 upon request 4 5 Valve Dis Assembly Procedure le FW ur ur NOTE If dis assembly is required but the necessary expertise or equipment is not available then the instrument should be returned to the factory However if the requisite equipment is available at your facility Brooks Instrument will supply you with copy of the dis assembly procedur
43. g instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration
44. gnal kabler og stik Brooks lever kabler af h j kvalitet der im dekommer specifikationerne til CE m rkning Hvis der anvendes andre kabel typer skal der benyttes et sk rmet kabel med hel sk rm med 80 daekning Forbindelses stikket type D eller cirkulaere skal v re sk rmet med metalhus og eventuelle PG forskruninger skal enten v re af metal eller metal sk rmet Sk rmen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen b r v re forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 80 d kning Sk rmen b r v re forbundet til jord Deutsch Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel f r CE zertifizierte Ger te sind spezielle Anforderungen zu beachten Qualit t der Verbindungskabel AnschluBstecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten daB eine 80 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich sollten Kab
45. id group 1 Meterslargerthan 25bmmor 1 inch are in compliance with category I II Ill of PED Meters of 25mmor 1 inch or smaller are Sound Engineering Practice SEP ESD Electrostatic Discharge ACAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of circuit boards or devices Handling Procedure Powerto unit must be removed Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibit early failure Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Dea
46. igure 2 5 Installation and Operation Manual Section 2 Installation X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Length 38 m part number 124 Z 236 AAA Length 6 m part number 124 Z 237 AAA Length 12m part number 124 Z 610 AAA THERMAL SIDE READ OUT SIDE Sub D 15 pin female Sub D 15 pin male DE N des rn N f C gt 4 at A Le ARA Le Figure 2 5 TMF C to Read out cable If no digital communication is required a split cable can be supplied to interconnect the Brooks Microprocessor Control amp Read out Unit the Smart Mass Flow Meter Controller and computer see figure 2 5 Length 3m part number 124 Z 893 AAA Length 6m part number 124 Z 894 AAA Length 12m part number 124 Z 895 AAA READ OUT SIDE Sub D 15 pin male THERMAL SIDE Sub D 15 pin female COMPUTER SIDE Sub D 9 pin female Figure 2 6 TMF C Read out and pc NOTE Special cables can be supplied multidrop RS 485 installations are required For detailed information about the cable connections see table 2 3 Section 2 Installation Models 5800 S Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Table 2 3 Electrical interfacing Smart TMF cable Sub D 15 c Read out side Computer side sub D 15p sub D 15p female male pin no pin no Colour Function Setpoint return 0 1 5 Vdc Flow sig
47. inlet pressure Defective p c board Clean the control valve Section 4 3 or return the device to the factory Check the valve override input pin 12 Contact Brooks Instrument Clean and or adjust control valve Section 4 3 Check the valve override terminal pin 12 Contact Brooks Instrument Clean the control valve or return the device to the factory Section 4 3 Adjust pressures inspect in line filters and clean replace as necessary Clean sensor see cleaning procedures Section 4 3 Clean the control valve Section 4 3 or return the device to the factory see cleaning procedures Adjust valve see calibration procedures Section 4 4 Controller oscillates see below Clean sensor see cleaning procedures Section 4 3 Replace or clean restrictor Adjust pressures Check orifice size Adjust valve see calibration procedures Section 4 4 Check external pressure regulator Contact Brooks Instrument Installation and Operation Manual Section 4 Maintenance X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S 4 3 Cleaning Procedures When deposition makes it necessary to clean the Smart Mass Flow Controller or Mass Flow Meter use the following procedures 1 Remove the unit from the system 2 Purge with dry nitrogen gas which removes virtually all particulate matter from the device Should contamination persist subject all wetted components to ultrasonic cleanin
48. ionen und gef hrliche Betriebszust nde k nnen weitere Folgen sein N e gt o FRANCAIS INSTRUCTIONS IMPORTANTES DE SECURITE Cet appendice contient des instructions importantes de s curit pour Putilisation du Thermal Mass Flow Meter Controller Series Cet instrument est conforme aux nouvelles directives PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC INSTRUCTIONS Veuillez bien lire toutes les instructions remarques et avertissements 1 sur l appareil et 2 dans le manuel d installation d utilisation et d entretien AVERTISSEMENTS Ne pas utiliser cet instrument en dehors des caract ristiques de fonctionnement sp cifi es dans le manuel d instructions Dans le cas contraire le personnel risque de se blesser gri vement et ou d endommager le mat riel S assurer que l appareil est bien reli lectriquement et soumis une pression de travail OPERATION a Lorsque l installation du d bitm tre dans la canalisation est achev e La mise en d bit du d bitm tre doit tre ex cut e progressivement en ouvrant doucement le vanne de r gulation afin d viter tout sur d bit b V rifier que les raccordements d entr e et sortie soient parfaitement tanches sans fuite puis mettre sous pression de travail AVERTISSEMENT Lors d interventions d entretien bien s assurer que la pression dans la canalisation est proche de z ro Dans le cas contraire le personnel risque de se blesser gri vemen
49. ired this can be done via Smart Control model 0160 or via the zero push button next to the diagnostics LED The zero adjustment should be carried out under process conditions and no flow 3 3 Calibration Procedure Calibration of the Smart Mass Flow device is not described in this manual Calibration can only be achieved with use of the accurate Brooks Vol U Meter equipment and the digital communication Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 Section 4 Maintenance 4 1 General No routine maintenance is required on the Smart Mass Flow Meters and Controllers other than occasional cleaning The in line filter should periodically be replaced or ultrasonically cleaned NOTE If recalibration is required but the necessary expertise or equipment is not available the instrument should be returned to the factory 4 2 Troubleshooting and System checks The Smart Mass Flow Meters and Controllers are generally used as a component in gas handling systems which can be complex in nature It can therefore be very difficult to isolate a malfunction in the system An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime If possible perform the following system checks before removing a suspect Mass Flow Meter or controller for bench troubleshooting or return to the factory especially if the system is new 1 Verify a low resistance common connectio
50. is warning can result in serious personal injury and or damage to the equipment Please make sure that the instrument is properly connected to electrical and pressure sources OPERATION a Slowly initiate flow into the system Open process valves slowly to avoid flow surges b Check for leaks around the meter inlet and outlet connections If no leaks are present bring the system up to operating pressure WARNING If this equipment is not properly serviced serious personal injury and or damage to the equipment can result from potentially high operating pressures Please make sure that the process line pressure is removed prior to service Please make sure that original parts of Brooks are used when the device requires servicing Note however that look alike substitutions and procedures can affect the product s performance and place the save operation of your process at risk It furthermore may result in fire electrical hazards or improper operation e Bo N o DANISH VIGTIGE SIKKERHEDSINSTRUKTIONER Denne instruktion indeholder vigtige oplysninger om sikkerhed og anvendelse af Brooks Thermal Mass Flow Meter Controller Series Instrumentet opfylder PED trykudstyrs CE direktivet 97 23 EC Kontakt de lokale myndigheder for oplysning om nationale og eller lokale sikkerhedskrav og yderligere krav i forbindelse med installationen SIKKERHEDSINSTRUKTIONER 1 L s alle instruktioner samt faremarkeringer p 1 flowmeteret og 2 i a
51. lle relevante sektioner af instruktions og brugervejledningen f r instrumentet tages i brug 2 ADVARSEL Anvend ikke dette instrument udover de specifikationer som er angivet i instruktions og brugervejledningen Manglende opm rksomhed p denne advarsel kan resultere i alvorlige personskader og eller skader p udstyret 3 V r sikker p at instrumentet er korrekt tilsluttet elektrisk og mekanisk 4 ANVENDELSE a Luk langsomt flow ind i systemet For at undg trykst d bnes afsp rringsventilen langsomt b Kontroller ind og udgangstilslutningerne for l kager Hvis ingen l kager findes kan systemet bringes op p normalt procestryk 5 ADVARSEL Hvis vedligehold af instrumentet ikke sker som anbefalet er der i tilf lde af h je tryk risiko for alvorlige skader p s vel personer som p instrumentet S rg derfor for at instrumentet er trykl st f r det afmonteres for service 6 V r opm rksom p kun at anvende originale Brooks reservedele n r instrumentet skal vedligeholdes Bem rk at anvendelse af uoriginale reservedele kan forringe instrumentets specifikationer og dermed ge risikoen for skader Desuden kan anvendelse af uoriginale reservedele medf re risiko for brand elektrisk st d eller forringet 39 Appendix D Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 NEDERLANDS BELANGRIJKE VEILIGHEIDSINSTRUCTIES Deze appendix bevat belangrijk
52. m Ger t und 2 alle entsprechenden Kapitel in der dazugeh rigen Installations und Bedienungsanleitung vor dem Betrieb des Ger tes WARNUNG Betreiben Sie das Ger t nicht au erhalb der Spezifikationen In der Installations und Bedienungsanleitung finden Sie den baugr Benspezifischen MAXIMALEN BETRIEBSDRUCK in der entsprechenden Tabelle Bei Nichtbeachtung dieses Hinweises kann das Ger t besch digt und oder zerst rt werden und dies kann zu ernsthaften Verletzungen und oder zum Tod von Personen f hren Bitte stellen Sie sicher dass das Ger t einwandfrei mit elektrischen und druckbeaufschlagten Leitungen verbunden ist BETRIEB a Lassen Sie das Ger t zu Beginn langsam durchstr men ffnen Sie Ventile langsam damit Druckst Be verhindert werden b Pr fen Sie den Aufbau am Ein und Ausgang des Ger tes auf Leckagen Wenn Sie kein Leck feststellen k nnen erh hen Sie langsam den Systemdruck bis der gew nschte Prozessdruck erreicht ist WARNUNG Bei unsachgem Ber Wartung des Ger tes geht von diesem aufgrund potentiell hoher Betriebsdr cke ein hohes Sicherheitsrisiko f r Personen und Material aus Bitte vergewissern Sie sich vor Wartungsarbeiten dass die Leitungen drucklos sind Verwenden Sie ausschlieBlich Original Ersatzteile von Brooks Instrument f r die Wartung und Reparatur von Ger ten Verwendung von Fremdfabrikaten oder Nachbildungen kann die Leistung des Ger tes einschr nken und die Betriebssicherheit aufheben Fehlfunkt
53. n and that the correct power supply voltage and signals are present of the connector of the Smart TMF 2 Verify that the process gas connections have been made correctly and that they have been tested for leaks 3 Ifthe mass flow controller appears to be functioning but cannot achieve Set point verify that there is sufficient inlet pressure and pressure drop at the controller to provide the required flow 4 Verify that all user selectable jumpers and switches have been set to the appropriate positions Refer to Figure 2 2 and table 2 2 NOTE If it becomes necessary to remove the instrument from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the instrument thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to correctly purge the instrument could result in fire explosion or death The MF series Smart Mass Flow device may also become corroded or contaminated upon exposure to air Bench Troubleshooting 1 Establish a proper connection between the Smart Mass Flow Meter or Controller and a 15 Vdc to 28 Vdc power supply and if necessary to a 15 Vdc power supply and connect an output signal read out device 412 digit voltmeter recommended to pins 2 and 10 on the 15 pin Sub D connector Switch on the power and allow the instrument to warm up for 45 minutes In case of a Controller model adjust the Set point to zero Do not connect the device to a gas source
54. nal output grey pink TTL Open collector alarm output red blue 4 20 mA Flow signal output 4 brown re Power supply common g blue white Optional RS232C TxD or RS485 A Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Section 3 Operation 3 1 Operating Procedure 1 Apply power to the Smart Mass Flow device and allow approximately 45 minutes for the instrument to reach a stable temperature 2 Check the flow reading before turning on the pressurised gas supply If the flow reading is gt 0 2 then the instrument should be re zeroed see section 3 2 3 Turnon the gas supply 4 Regulate flow to 0 Monitor the instrument s output signal If the output is not 0 296 check for leaks 5 Commence normal operation 3 2 Zero Adjustment Each Smart Mass Flow device is factory adjusted to provide a 0 10 mVdc signal at zero flow The adjustment is carried out in our calibration laboratory an ambient the temperature of 20 C is maintained After initial installation and warm up in the gas system the zero flow indication may differ from the factory setting This is primarily caused by differences in temperature between our calibration laboratory and the final mounting position When checking the zero flow indication always mount the device in its final location and allow a minimum of 45 minutes for it to reach a stable temperature In case Zero adjustment is requ
55. oks Smart Mass Flow Meters you can use the model 0163 Brooks Smart Service program for re configuration diagnostics calibration and or verification The HART protocol based commands are listed in a separate Communication manual Document Brooks part number 541 C 053 AAA Models 58605 5861S 5863S and 5864S Brooks Smart Mass Flow Meters are primarily used to provide accurate measurements of gas flows The heart of these systems is the thermal mass flow sensor which produces an electrical output signal as a function of flow rate In addition models 5850S 5851S and 5853S Brooks Smart Mass Flow Controllers control gas flows The flow ranges per model are listed in Table 1 1 Table 1 1 Flow ranges per model Controller Model refers to normal conditions i e 0 C 1013 25mbar The Brooks Smart Mass Flow Meter is a stand alone instrument with microprocessor based electronics on board The MF series Smart Mass Flow Controller has an integrally mounted control valve module with which stable gas flows can be achieved The standard features listed below apply to all models The supplied inlet adapter has a built in upstream inlet filterfor flow straightening Besides reducing the effects of changes in upstream piping this also protects the measuring element from occasional debris in the flow stream In addition it eliminates the need for extra expensive nlet filtering e Flow signal adjustable via software 0 5 Vdc or
56. on metallic as standard The cables used must be screened with 80 shielding to comply with CE certification The shielding should be connected to an earth terminal 34 Installation and Operation Manual Appendix C X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Espafiol Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magnetica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de sefial cuando se va a utilizar un equipo con marca CE Calidad del cable de sefial prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n CE Si usted adquiere su propio cable de sefial deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 80 Cuando utilice conectores del tipo D 6 Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deberan utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizad
57. os deberan ser protegidos con un apantallamiento del 8096 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Francais Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pour v hiculer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 80 96 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 8096 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre 35 Appendix C Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG
58. r 360 tilkoblet elektrisk jord Kort kantkontakter er normalt utf rt i kunststoff De tilh rende flatkabler m v re utf rt med fullstendig 80 skjerming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav Portugu s O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma atenc o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certificac o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 80 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas met licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado blindagem ou bucha met lica em ambas as extremidades em 360 A blindagem deve terminar com a ligag o massa Os conectores Card Edge n o s o em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 80 nos termos da Certificac o CE A blindagem deve terminar com ligag o massa 37 Appendix C Installation and Operation Manual
59. r Customer We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www BrooksInstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 Table of Contents Section 1Elntroduetion Um 5 PODO E EE 5 1 2 How to use this Manual een 5 A 6 Section MA TES ALON RERO 9 vae
60. r based Read out and Control Electronics This model provides the power supply for Smart Mass Flow devices as well as providing local read out and displaying the analogue output signals Figure 2 3 shows the interconnection diagram of the RS 232 configuration The pin assignment on an IBM Compatible PC This is standard for RS 232 Section 2 Installation Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 00000000 Ot 000000 D connector to PC 15 25 pin 9 pin 7 5 Figure 2 3 RS 232 interconnection of TMF and PC Figure 2 4 RS 485 multidrop interconnection TMFs and PC The RS 485 is essentially a multidrop connection It allows a maximum of 32 devices to be connected to a computer system IBM ompatible PCs are not eguipped with RS 485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore reguired o connect an RS 485 to a standard PC Figure 2 4 is an interconnection diagram showing two TMFs linked to an IBM compatible PC via RS 485 and RS 485 to RS 232 converter The RS 485 bus a daisy chain network meaning that the wires are connected at the units as in figure 2 4 2 10 Interconnection EE If no digital communication is required i e analogue I O only the following cables are available for connection of the Smart Mass Flow Meter Controller to the Brooks Microprocessor Control amp Read out Unit see f
61. rials from entering the instrument s inlet or outlet Do not remove the protective end caps until the actual moment of installation When used with reactive gases some of which may be toxic contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the Mass Flow device should be purged for a significant time with Nitrogen before and after use on reactive gasses Recommended installation procedures a Allmodels should be mounted in places that are relatively free from mechanical shocks and vibration b Leave sufficient room for access to the electrical components c Installin a manner that allows the instrument to be easily removed for cleaning d The mounting position of the Smart Mass Flow Meter or Controller can be either horizontal or vertical in case process pressures are smaller than 10 bar e For higher process pressures a horizontal installation is preferred since these pressures may cause a thermal siphon effect of the output signal at zero flow conditions and degrading specifications NOTE The control valve of the Smart Mass Flow Controller provides precision control and is not designed for positive shut off If positive shut off is required it is recommended that a separate shut off valve be installed in line downstream from the Smart Mass Flow Controller NOTE If the power supply to the Smart Mass Flow Controller is interrupted a
62. rol valve independently of the set point Low flow cut off prevents the valve from opening whenever the Set point is less than 196 of full scale Digital communication features Digital communication via RS485 or RS232 provides access to all of the Smart TMF s functions including Accurate mass flow measurement and Set point regulation controller only as a percentage of full scale and in selectable engineering units Flow totalizer Ambient temperature Operational settings Calibration storage of up to 10 calibration curves Controller settings controller only e PID settings Section 1 Introduction Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 8 November 2008 e selectable soft start e adaptive valve control Adaptive filtering for signal flow component e Alarms gt Self diagnostic e EEPROM error e database error e analogue output error gt Out of range indications for analogue set points higher than 100 controller only flow valve controller only analogue output Environmental errors no gas flow detected power supply outside specification range ambient temperature outside specified range high and low flow alarms Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Section 2 Installation 2 1 General This section contains the procedures for the receipt and installation of the instrument Do no
63. rs FLENS 28 10 04 BROOKS 3e ud CONNECTIONS DIN DN15 PN40 ANSI1 150 LBS DIN DN25 PN40 ANSI1 300 LBS DIN DN40 PN40 ANSIT 5 150 LBS DIN DN50 PN40 ANSI1 5 300 LBS ANSI 0 5 150 LBS ANSI2 150 LBS ANSI 0 5 300 LBS JANSI2 300 LBS 32 Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Appendix B Models 5800 S Model 58505 BROOKS SMART MASS FLOW I HH HI 1 to F 1 4 NPT 6mm TUBE COMPR 10mm TUBE COMPR Model 58515 MASS FLOW SMART Lila Filters gt gt excl incl incl 9 16 18 UNF no 94 1130 1 2 VCO 1 1 4 VCO 1 4 NPT mm TUBE COMPR 10mm TUBE COMPR 1 1 4 BSP 170 5 26 6 Model 58535 E 2 VCO 74 VCO 10 11 Model 58535 CONNECTIONS i oS y y o ANSI 0 5 150 LBS ANSI 2 150 LBS ANSI 0 5 300 LBS ANSI 2 300 LBS 33 Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 Appendix C Translation of CE Marking electrical installation instructions Dansk Brooks Instrument har gennemf rt CE m rkning af elektronisk udstyr med succes i henhold til regulativet om elektrisk st j EMC direktivet 89 336 EEG Der skal dog g res opmaerksom p benyttelsen af signalkabler i forbindelse med CE m rkede udstyr Kvaliteten af si
64. rtified e EMC Directive 89 336 EEC EN 61326 1 1997 A1 1998 e Pressure Equipment Directive 97 23 EC e 3 G EEx nA II T4 per EN 60079 15 2003 e KEMAO03ATEX1433 X The modules shall be installed in a suitable enclosure providing a degree of protection of at least IP54 according to EN 60529 taking into account the environmental conditions under which the equipement will be used Setpoint Input Voltage 0 5 Vdc or 1 5 Vdc input impedance gt 2000 Ohm Current 0 20 MA or 4 20 MA Communication 250 Ohm impedance Analogue Voltage 0 5 Vdc or 1 5 Vdc gt 2000 Ohm output Current 0 20 mA or 4 20 mA max loop resistance 375 Ohm Installation and Operation Manual Section 5 Specification X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Table 5 1 Flow ranges and pressure ratings Brooks Smart Mass Flow Products Mass Flow Mass Flow Flow Ranges N2 Pressure P E D Module H Controller Meter Equivalent Ratings Category Nor Moser Vinte Marto Juni Bar sos 00 ps po funn jus pa 585818 5861 S 20 106 l min 100 100 bar SER E P 5853 FE 5863 EN min 170 1 DENEN all 150 Ibs flanges 2 for all other connections 1 referring to normal conditions i e 0 C 1013 25 mbar 2 300 bar version optional 3 max Delta P for 5853 S is 20 bar Digital RS 232 or RS 485 Communication Baud rate 1200 2400 3600 4800 7200 9600 19K2 38K4 PRO
65. t attempt to start the system until the instrument has been permanently installed It is extremely important that the start up procedures be followed in the exact sequence presented NOTE Operating procedure do not operate this instrument outside the specification range listed in section 5 Before bringing the unit into operation make sure that all gas connections have been correctly tightened and that all the necessary electrical connections have been made 2 2 Receipt of Equipment When the equipment is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to your nearest Product Service Department Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 Email BrooksAm BrooksInstrument com http www brooksinstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 Email BrooksEu Brooksinstrument com Remove the envelope containing the packing list Carefully remove the instrument from the packing case Make sure spare parts are not disc
66. t et ou d endommager le mat riel Bien s assurer que les pi ces d origine Brooks sont utilis es pour des interventions d entretien Des pi ces de substitution pourraient affecter les performances de l appareil et engendrer de graves disfonctionnements Po N o 41 Appendix D Installation and Operation Manual X TMF 5800S MFC eng PN 541 C 051 AAG Models 5800 S November 2008 NORSK VIKTIG SIKKERHETS INSTRUKS Dette tillegget inneholder viktige sikkerhets og drifts instruksjoner for bruk av Brooks metall r r mengde m ler Thermal Mass Flow Meter Controller Series Instrumentet tilfredstiller PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Kontakt lokale myndigheter for nasjonale eller lokale sikkerhetskoder og andre installasjonskrav SIKKERHETS INSTRUKS k Les alle instruksjoner og sikkerhetsanmerkninger for 1 mengde m leren Flow meteret og 2 alle aktuelle seksjoner av instruksjons manualen f r bruk av produktet ADVARSEL Bruk ikke dette instrumentet utover de spesifikasjonene som er gitt I instruksjons boken Dersom advarslene ikke f lges kan det resultere i alvorlig personskader og eller deleggelse av utstyret Kontroller at instrumentet er skikkelig koblet b de elektrisk og mekanisk DRIFT a Start forsiktig Ventilen pnes langsomt for unng str mning sjokk b Kontroller at det ikke er lekkasjer rundt m lerens inn og utl pstilkoblinger Dersom det ikke er synlige lekkasjer kan v
67. uipped with a dipswitch block SW1 holding 4 switches RS 232 Board 097 B 364 ZZZ or RS 485 Board 097 B 363 ZZZ and to select the baud rate Table 2 2 summarises the possible settings Installation and Operation Manual Section 2 Installation X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 S Table 2 2 Dipswitch settings Physical Baud rate Dipswitch block SW1 layer selection Switch Switch Switch Switch 4 selection 1 2 3 a los C RS485 on mo REN or o SN PA Jem sie 188400 jon__ on Since Brooks Smart Mass Flow devices are capable of communication immediately after start up you should set the correct baud rates prior to power up Any changes to the baud rate settings or the physical layer selection made during operation will take effect immediately The communication I O drivers are directly connected to the D connector on top of the device The RS 232 is essentially a point to point connection i e one host computer and one Smart Mass Flow device Most IBM compatible PCs are eguipped with one or more RS 232 ports COM ports as standard The RS 232 usage and definitians are very diverse On the MF Smart Mass Flow devia the TxD signal is the output signal of the devia and the RxD the input signal The communication terminals can be directly connected to a serial COM port of any PC The other part of the terminals can be connected to Brooks model 0152 0154 Microprocesso
68. uk is afgevoerd alvorens onderhoud aan het instrument te plegen Overtuig u ervan dat er uitsluitend originele Brooks Instrument onderdelen worden gebruikt voor onderhoud en service aan het instrument U wordt erop gewezen dat het gebruik van universele onderdelen en voorschriften om daar mee om te gaan nadelige gevolgen kunnen hebben voor het gebruik van het instrument en daardoor de juiste weking van UW proces in gevaar kan komen Zelfs kan het gebruik daarvan resulteren in brandgevaarlijke situaties electriciteitsgevaar of onjuist functioneren a B DE D SUOMI TURVAOHJEET T m liite sis lt t rkeit turva ja k ytt ohjeita Brooks Thermal Mass Flow Meter Controller Series Instrumentit kuuluvat CE direktiiviin PED PRESSURE EQUIPMENT CE DIRECTIVE 97 23 EC Kysy lis paikallisilta viranomaisilta koskien kansainv lisi ja tai paikallisia turvakoodeja sek muita asennusvaatimuksia TURVAOHJEET Kaikki ohjeet ja 1 virtausmittariin kiinnitetyt varoittavat merkinn t sek 2 manuaalin soveltuvat kohdat on luettava ennen laitteen k ytt nottoa 2 VAROITUS l k yt t t instrumenttia yli manuaalissa mainittujen maksimiarvojen Mik li t t varoitusta ei noudateta voi seurauksena olla vakava henkil vahinko ja tai laitteen vaurioituminen 3 Varmista ett mittalaite on oikein asennettu sek prosessiputkistoon ett s hk isesti 4 K YTT a P st paineet hitaasti j rjestelm
69. ument com http www brooksinstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com Any instrument returned to Brooks requires completion of Form RPR003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the instrument This is required before any Brooks Personnel can begin processing Copies of the form can be obtained from any Brooks Instrument location listed above 2 5 Gas Connections ee dr Jassosta All models are fitted with the following inlet and outlet connectors as standard NPT F tube compression fittings V R VCO DIN or ANSI flanges Prior to installation make certain that all piping is clean and free of obstruction Install the piping in a manner that permits easy access to the instrument should it need to be removed for cleaning or test bench troubleshooting Installation and Operation Manual Section 2 Installation X TMF 5800S MFC eng PN 541 C 051 AAG November 2008 Models 5800 85 2 6 Mechanical Installation For dimensional drawings see Appendix B Dimensional drawings NOTE When installing the Mass Flow device care should be taken to prevent foreign mate

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