CP-SP-1118E
Contents
1. AA EE A l 1 4VCR CMS0010 0050 0200 3 8VCR or equivalent product CMS0500 1000 2000 H Hydrogen Helium 2 Analog output 0 to 5Vde 1to5Vde 4to20mAdc of Withoutoptionalfunction sd al With Rs 485 communications gt gt _ ____ o Withoutoptionalfunction Cid al Gas contacting parts treated to be oil inhibiting of Withoutoptioms___ _ O D Inspection Certificate provided _______ gt gt ____ y Complying with the traceability certification i Product version LO Product version 1 L min standard indicates the volume flowrate L min per minute converted to 20 C one atmosphere 2 The gas type is initially set for hydrogen use However the user can change this setting for helium use Optical parts sold separately Harness with connector exclusive to CMS One harness is reguired for one CMS unit Harness 2m for model with communications M3 5 Y terminals 81446594 008 Harness 5m for model with communications M3 5 Y terminals Mounting bracket 81446856 001 For CMS2000 AC DC adaptor 81446957 001 Operating temperature range 0 to 40 C Harness for AC DC adaptor 81446594 030 This harness is necessary for AC DC adaptor Spare parts 81446833 002 1 2Swagelok a set of 2 81446895 001 1 4VCR a set of 2 81446895 002 3 8VCR a set of 2 Chapter 2 NAMES AND FUNCTIONS OF PARTS The following de2. External GIM NSIONS s 666s 0tees eck ieee hae aca 28 Pressure lOSS is isidro 33 Conventions Used in This Manual The following conventions are used in this manual 1 Handling Precautions Handling Precautions indicate items that the user should pay attention to when handling the CMS Series Note Notes indicate useful information that the user might benefit by knowing 1 2 3 The numbers with the parenthesis indicate steps in a sequence or indicate corresponding parts in an explanation This indicates 7 segment indication on the setup display key This indicates a key on the setup display Chapter 1 E Introduction M Features Note INTRODUCTION The CMS Series Gas mass flow meter uses uF Micro Flow sensor in the sensing section The uF sensor is a thermal flow speed sensor made using proprietary technology Integrating this ultra minute flow speed sensor with high grade channel design technology has achieved high accuracy and high rangeability Incorporates a uF sensor made possible by silicon micro machining technology and thin film forming technology One side of the uF sensor is a mere 1 7mm and at a thickness of 0 5mm this thermal flow speed sensor exhibits high sensitivity and response As the CMS Series are mass flow meter it is not influenced by temperature nor pressure High accuracy of 5 RD and high resolution 0 01L min standard CMS0010 0 1L min standard CMS005
3. There is no event action until the instantaneous flowrate value once exceeds the event lower limit setting value after the power is turned ON Event action is normal after the event lower limit setting value has been exceeded once Instantaneous flowrate value gt Event action Event standby Lower limit setting value Time Event output ON delay 0 to 60s is set for each of events 1 and 2 ON Event output ON delay OFF Instantaneous flowrate value Event ON Time A Event detected 21 Chapter 4 METHOD OF OPERATION E Flowrate zero calibration 22 If the indicated flow rate is not zero even though the actual flow rate is zero and it seems possible that the sensor s zero point may have shifted try the following pro cedure for flowrate zero calibration 1 Display the flowrate or integrated flowrate value 2 Press and hold the key 3 After approx 10 seconds have elapsed A blinks on the flowrate display 4 Press and hold wm again 5 After approx 1 second amp AL stops blinking and remains lit The amount of sensor output at this moment is now treated as zero 6 Press key to return to the instantaneous flowrate or integrated flowrate display 1 Handling Precautions Use flowrate zero calibration only after ensuring that the flow path contains only the gas being measured and after stabilizing the actual flow rate at zero Chapter 5 TROUBLES
4. no parity 2 stop bits RS 485 communication only 1 Integration pluse output rate 10L pulse 100L pluse 100L pulse 1000L pluse Unit L min cmsooi0 cmsooso cmsozoo cmsos00 cmsio00 cms2000 0 to 10 0 to 50 0 to 200 0 to 500 0 to 1000 0 to 2000 Oto 5 0 to 30 0 to 100 0 to 300 Oto 500 0 to 1000 0 to 2 5 0 to 20 0 to 50 0 to 200 0 to 250 O to 500 Oto 1 0 to 10 0 to 20 0 to 100 0 to 100 0 to 200 flexible scaling flexible scaling flexible scaling flexible scaling flexible scaling flexible scaling al ber gt a al a ae gt a al a 3 When 8 is selected at the gas type the scaling becomes the value multiplied by the conversion factor of each scaling For example when the scalling is set to 24 0 to 5 L min on the CMS0010 and the conversion factor is 0 5 the analog output scaling becomes 0 to 2 5 L min 17 Chapter 4 METHOD OF OPERATION E Parameter setup 18 Cancel the function setup key lock setting key lock disabled Set the setting value of function setup modes 3 and 4 to other than 42 To enter the parameter setup mode hold down the CENT and CW keys simultaneously for at least three seconds In the parameter setup mode F _ _ is displayed on the display The lower two digits on flowrate display indicate the parameter item Pressing the C_ _ key moves the setup to the next item Pressing the CA key moves the setup item to the previous item P
5. E Wiring AN CAUTION When using a relay as the contact for integrated count reset input use a relay gold contact type for trace currents Otherwise defective contact may cause the device to malfunction If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Be sure to check that the wiring is correct before turning the power ON Incorrect wiring might cause damage or malfunction We recommend using the harness sold separately with connector exclusive to CMS O Connector pin layout The following shows the layout of the connector pins on this flow meter 1 9 a E 2 a z View from connector insertion side 2 10 Compatible connector DF11 10DS 2C made by HIROSE ELECTRIC CO LTD Harness with connector exclusive to CMS See optional parts page 2 Connector signal table Pin Signal oa DC OUT Instantaneous flowrate output A DC OUT Instantaneous flowrate output ee OO V Power 12 to 24Vdc GND Power GND V ND For RS 485 communications Do not connect for the model without a DI integration countresetinput JO SSCS Eve Event 2 outpuvintegraton pulse output Cd ev event outpuvSeral data output 10 EVCOM SG Event output common RS 485 communications common 11 Chapter 3 MOUNTING AND WIRING Connection example 1 DC OUT Brown Instantaneous flowrate output 2 DC OUT Red 3 V Ora
6. condensation not allowed 3 4 16UNF Rc1 2 1 2Swagelok 3 8VCR or equivalent product EN61326 1 1997 Amendment A1 1998 A2 2001 A3 2003 2 23 C shows the ambient temperature during adjustment Measurement flowrate X L min standard Chapter 6 SPECIFICATIONS 3 Amount of change on a flowrate referenced to 23 C at 10 to 60 C 101 325 kPa state 4 Amount of change on a flowrate referenced to atmospheric pressure in a 20 C 0 07 to 1 0MPa state Only for the flow range 50 to 100 in the CMS0010 this specifies for the full range of 0 to 1 0MPa 5 When the gas type conversion factor has been set to 0 100 to 0 499 the minimum display and display resolution becomes 0 5L min standard 27 Chapter 6 SPECIFICATIONS MW External dimensions O CMS0010 0050 0200 unit mm Harness with connector exclusive to CMS Es Massflow CMS inane gt ES C Z C em Connector HIROSE ELECTRIC CO LTD DF11 10DP 2DS Body mounting screw 2 M4 screws depth 5 Joint made by 2 1 4 Swagelok SS 400 1 6STSC11 1 4Swagelok connection type Application pipe Rc 1 4 material SUS316 2 1 4 VCR joint SS 4 VCR 1 00032SC11 material SUS316 1 4VCR connection type Optional Parts Sold separately Harness with connector exclusive to CMS Model No 81446594 XXX Mounting bracket Model No 81446628 001 Note The upper figure shows CMS0200 28 Chapter 6 SP
7. feeding gas into the meter make it flow following the arrow on the side of the channel If gas is fed in the opposite direction the gas flow cannot be measured accurately Chapter 3 MOUNTING AND WIRING Mounting the body AN CAUTION Mount this device horizontally When this device is mounted vertically drift will occur when flowrate is zero Do not mount so that the display is facing down Doing so might cause error or trouble There are two ways of mounting the body of the CMS0010 0050 0200 0500 1000 2000 1 Fasten the body with the following screws from the rear side using the mounting screws on the bottom of the device e CMS0010 0050 0200 two screws e CMS0500 1000 2000 four screws CMS0010 0050 0200 CMS0500 1000 CMS2000 64 5 64 5 wa e N o A oo 48 A B 2 Attach the mounting bracket and fasten the mounting bracket from the front using four screws Bracket part No as follows e CMS0010 0050 0200 81446628 001 e CMS0500 1000 81446721 001 e CMS2000 81446856 001 Unit mm o Hole dimensions when mounting bracket is used g4 5 unit mm 5 5 80 CMS0010 0050 0200 Y 04 5 CMS0500 1000 95 5 CMS2000 80 Mounting Position 1 Handling Precautions In case of vertical mounting drift will occur when flowrate is zero For details please contact Yamatake Corporation 10 Chapter 3 MOUNTING AND WIRING
8. free from inaccuracies and omissions If you should find an error or omis sion please contact Yamatake Corporation In no event is Yamatake Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2005 Yamatake Corporation ALL RIGHTS RESERVED The uF logo Micro Flow are trademark of Yamatake Corporation in Japan NX SAFETY PRECAUTIONS J E About Icons The safety precautions described in this manual are indicated by various icons Please be sure you read and understand the icons and their meanings described below before reading the rest of the manual Safety precautions are intended to ensure the safe and correct use of this prod uct to prevent injury to the operator and others and to prevent damage to proper ty Be sure to observe these safety precautions Warnings are indicated when mishandling this A WAR N N G product might result in death or serious injury Cautions are indicated when mishandling this AN CAUTION product might result in minor injury to the user or only physical damage to the product E Examples Use caution when handling the product The indicated action is prohibited Be sure to follow the indicated instructions AX WARNING Never allow gases that are within explosive limits in particular mixed gases within explosive limits that contain hydrogen to pass through this meter or device Doing so might result in explosion acci
9. output scaling ar 10 to 250 when 3 j O CMS0050 Setting mode of function Event 1settingvalue ss 10 0t0999 9 L min when 3 is fords EV1 00000000 to 99999999 L _ when amp 3 is 83 or G4 Event 2 setting value 0 0 to 999 9 L min when 4 is or de E EV2 when 24 is 43 or a4 F03 evi nysteress 5 50 0 t0 10 0 Umin when 23 is 8f or Be P O EV2 hysteresis 0 0t010 0 L min when Y is for a2 Pa Ev ON aay oo when Bis Bor Be CAC Pos EV2ON delay 8 0t0 6016 Reverse integrated 00000000 to 99999999 L when 2 is G2 default Gas type conversion 0 100 to 8 000 when 88 is Ue factor Analog output scaling PHB 10 to 250 when 3 i O CMS0200 0500 1000 2000 Setting mode of function Event 1 setting value ss 0 to 9999 L min 1 when fis is for 2 EV1 00000000 to 99999999 X10L when 3 is 43 or G4 Event 2 setting value amp Oto 9999 L min 1 when 4 is for de EV2 when 24 is G3 or a4 EV2 ON delay 0 to 60 s when 4 is for de Reverse integrated 00000000 to 99999999 X10L when 2 is Ge default Gas type conversion factor Analog output scaling Pa Poa P IA 19 Chapter 4 METHOD OF OPERATION E Display OFF mode 1 In case of gas type 4 on the CMS0200 and when F 8 conversion factor is set to 0 100 to 0 499 the range becomes 0 0 to 999 5 in 0 5 intarvals When the factor is set to 0 500 to 8 000 the range becomes 0 to 9999 However
10. result in the indication of Err1 AN CAUTION Be sure to use this product within the flowrate range stated in the Q specifications To prevent excessive flow use a suitable means to control the supply pressure or use a throttle valve or the like to control the flowrate If the flowrate exceeds the upper limit both the flowrate display and the output voltage current may indicate considerably lower values than the actual flowrate If damage could result from the abnormal functioning of this device include appropriate redundancy in the system design Prevent foreign matter from entering the device If the rust water droplet oil mist or dust in the piping flows into the device measurement error might occur and result in damaging the device If there is a possibility that any foreign matter flows into the device provide a filter strainer or mist trap capable of eliminating more than 1pm foreign matter at the upstream and periodically inspect and replace the filter This device is exclusively for hydrogen and helium gases It cannot be used for control and measurement of gases other than hydrogen and helium and mixtures of these gases excluding mixtures within explosive limits Oxygen cannot be measured even if gas contacting sections on this device are oil inhibited This device is set initially for hydrogen gas use before shipment from the factory When using it for helium gas or mixed gases the user must change the gas type s
11. subject it to shock Doing so might damage the device a relay gold contact type for trace currents Otherwise defective contact may cause the device to malfunction Q When using a relay as the contact for integrated count reset input use Be sure to check that the wiring is correct before turning the power ON Q Incorrect wiring might cause damage or malfunction If there is a risk of a power surge caused by lightning use Yamatake Q Corporation s SurgeNon to prevent possible fire or equipment failure Q When mounting the device firmly fasten to prevent vibration Mount this device horizontally If this device is mounted vertically drift will occur when flowrate is zero Do not mount so that the display is facing down S Doing so might cause error or trouble Do not operate the keys with a mechanical pencil or sharp tipped S object Doing so might cause faulty operation Do not hold a resin cover portion at the time of carrying or piping this S device Doing so might damage the cover or dropping the device due to slipping might result in getting hurt Q Make sure that the selected analog output type matches the input type of the receiving device The output receiving device could be damaged if the analog output type selection is incorrect iii Contents SAFETY PRECAUTIONS Conventions Used in This Manual Chapter 1 Chapter 2 Chapter 3 Chapter 4 Chapter 5 Chapter 6 INTRODUCTION IN
12. the items and the setups are correct e To continue setup press the key again and repeat the setup operation t and 32 is displayed 19 1 In case of the model with RS 485 communications 3 34 after 2 2 32 is displayed for the model with RS 485 communicarions The following table shows the function and the setup 15 Chapter 4 METHOD OF OPERATION Function setup menu Function Setting Description factory Remarks setting Key lock Key lock disabled Other modes cannot be Lock ON entered in a key lock state Display mode Only instantaneous flowrate displayed Instantaneous flowrate integrated flowrate displayed Instantaneous flowrate reverse integrated flowrate displayed Event 1 type ma Not used The operation of integrating EV1 Instantaneous flowrate upper limit value count up reverse integrating Instantaneous flowrate lower limit value count down and integration Integrated flowrate count up pulse output is effective only m l Reverse integrated flowrate count down when mode 2 is set to or Flowrate data serial output ue Error output Also integrating count up and reverse integrating count down aa Al aa Ad Event 2 type Not used EV2 Instantaneous flowrate upper limit value cannot be set simultaneously Instantaneous flowrate lower limit value Integrated flowrate count up Reverse integrated flowrate count down Integration pulse output rate Integration pulse output ra
13. use at a set point within setting range 2 In case of gas type 4 on the CMS0200 and when F 2 conversion factor is set to 0 100 to 0 499 the factory setting is 5 0 and the setting range becomes 0 0 to 10 0 in 0 5 increments intervals 1 Handling Precautions e Setting value must be in measuring range If the key is held down for at least three seconds all display is turned off except for the instantaneous flow rate indicator lamp which blinks EW About integration and reverse integration When the integrated value exceeds 7999994 it is changed to Y and count up continues In this case the event output of integrated flowrate count up is OFF until again reaching the set point When the reverse integrated value is the count down stops NW Resetting the integrated value and reverse integrated value 20 To reset the integrated reverse integrated value hold down the C_A_ and Y keys simultaneously for at least one second with the integrated reverse integrated value displayed The integrated value is reset to and the reverse integrated value is reset to the default and integration reverse integration is resumed Chapter 4 METHOD OF OPERATION E What is Event standby E Event ON delay Event standby is enabled only on the instantaneous flowrate lower limit value This function prevents erroneous operation of the lower limit alarm when there is no gas flowrate for example when the device is started up
14. 0 1L min standard CMS0200 0500 1000 5L min standard CMS2000 The CMS Series are provided with extensive functions to suit a wide range of applications analog output event output integrating reverse integrating display output scaling gas type selection integrated pulse output external contact input integrating reset input and flowrate data serial output Straight pipe sections are not required before and after this device RD Reading indicates the accuracy of the read value Chapter 1 INTRODUCTION E Model selection guide The following shows the model Nos for this flow meter Basic Flowrate Model Connection Gas Appended ae Lems pop Gas Mass Flow Meter fooio Standard flowrate range O to 10L min standard t Loos0 0 HT Tp Standard flowrate range O to 50L min standard 1 ooo0o 1 _ Standard flowrate range 0 to 200L min standard 1 osoo 0 nnn ee ee ee Standard flowrate range 0 to 500L min standard 1 1000 f Standard flowrate range 0 to 1000L min standard 200 rf ft Standard flowrate range 0 to 2000L min standard 1 i Modelwithdisplay S o TST T E ERTI 9 16 18UNF CMS0010 0050 0200 3 4 16UNF CMS0500 1000 2000 PP PLT fo Rc1 4 CMS0010 0050 0200 Re1 2 CMS0500 1000 2000 ee 1 2Swagelok CMS0500 1000 2000 ES ESSE Aca EEE ESA aa OM A
15. 600 0 500 0 400 0 300 0 200 0 100 0 Flowrate L min standard e CMS2000 6000 0 5000 0 4000 0 3000 0 2000 0 1000 0 0 0 Maca 0 500 1000 1500 2000 250 Flowrate L min standard Primary pressure 100kPa 300kPa 500kPa 700kPa 33 Revision History Date 08 01 CP SP 1118E 4th Edition Overall revision 4 ed 9 Jp ed Yamatake Corporation Advanced Automation Company 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL http www azbil com Printed on recycled paper 07 azbil Specifications are subject to change without notice Printed in Japan 1st Edition Issued in Nov 2001 W 4th Edition Issued in Feb 2008 A
16. ECIFICATIONS O CMS0500 1000 unit mm Harness with connector exclusive to CMS Mounting bracket Connector HIROSE ELECTRIC CO LTD DF11 10DP 2DS Body mounting screw 4 M4 screws depth 6 2 Rc1 2 joint 148 6 Rc1 2 connection type Joint made by 2 1 2 Swagelok SS 810 1 8STSC11 Application pipe Re 1 2 material SUS316 2 3 8 VCR joint SS 8 VCR 1 8STSC11 or equivalent product 161 6 material SUS316 3 8VCR connection type Optional Parts Sold separately Harness with connector exclusive to CMS Model No 81446594 XXX Mounting bracket Model No 81446721 001 Note The upper figure shows CMS0500 29 Chapter 6 SPECIFICATIONS O CMS2000 unit mm Harness with connector exclusive to CMS Connector HIROSE ELECTRIC CO LTD DF11 10DP 2DS MADE IN JAPAN 148 6 Joint made by 2 1 2 Swagelok SS 810 1 8STSC11 Application pipe Re 1 2 1 2Swagelok connection type material SUS316 MADE IN JAPAN 2 3 8 VCR joint SS 8 VCR 1 8STSC11 or equivalent product material SUS316 3 8VCR connection type Optional Parts Sold separately Harness with connector exclusive to CMS Model No 81446594 XXX Mounting bracket Model No 81446856 001 30 Chapter 6 SPECIFICATIONS Harness with connector exclusive to CMS 81446594 ITEM ITEM 005 006 ITEM L mm couductor OE 8 006 50008 unit m
17. HOOTING NW Remedying trouble Refer to the following table if trouble occurs Nothing on display e Make sure that power of correct voltage and polarity is being supplied pto itt sure mato cones ama IO Finn is displayed The instantaneous flowrate value has exceeded 120 of the measurement range Reduce the flowrate so that it is within the range then nomal operation will automatically resume Err is displayed Sensor error e Make sure that gas is not flowing excessively or the gas is not flowing reversely e Make sure that the purging is not performed while power is supplied e The flowrate becomes within the range mormal operation will automatically resume If the device does not resume normal operation contact Yamatake Corporation and ask for repair Err is displayed Memory data error Contact Yamatake Corporation and ask for repair Err 3 is displayed Heater current error of sensor After closing the gas valve turning the power off and then on again If the device does not resume normal operation contact Yamatake Corporation and ask for repair Eris displayed Sensor heater safty circuit worked After closing the gas valve turning the power off and then on again If the device does not resume normal operation contact Yamatake Corporation and ask for repair Signal is output even e Check the piping for any gas leaks though the flowrate should Check the wiring to make sure that it is correct be zero Flowrate dev
18. No CP SP 1118E CMS Series Gas Mass Flow Meter For Hydrogen and Helium Gases User s Manual Thank you for purchasing the CMS Series Gas Mass Flow Meter for hydro gen and helium gases This manual contains information for ensuring correct use of the CMS Series It also provides necessary information for installation maintenance and trou bleshooting This manual should be read by those who design and maintain devices that use the CMS Series Be sure to keep this manual nearby for handy reference Yamatake Corporation RESTRICTIONS ON USE This product has been designed developed and manufactured for general purpose application in machinery and equipment Accordingly when used in applications outlined below special care should be taken to implement a fail safe and or redundant design concept as well as a periodic maintenance program e Safety devices for plant worker protection e Start stop control devices for transportation and material handling machines e Aeronautical aerospace machines e Control devices for nuclear reactors Never use this product in applications where human safety may be put at risk NOTICE Be sure that the user receives this manual before the product is used Copying or duplicating this user s manual in part or in whole is forbid den The information and specifications in this manual are subject to change without notice Considerable effort has been made to ensure that this manual is
19. TFOCUCTION cis Sa hi oie ee AAA A ei acess 1 F atul S sinirsiasi nas dee ceed ei ida daa 1 Model selection guide ee eee e cece reece cece cece eee eect ee eeeees 2 NAMES AND FUNCTIONS OF PARTS MOUNTING AND WIRING MOUNTING 2 2 e eee cece cece eee cece eee e eee e een rr rr rr 5 Behavior when the flowrate greatly exceeds the upper limit of flowrate range ooooococooocccoccccorccco mo 6 PIPING oooooooocccccccccccccnccc rro eee cette rr rr ee rr 6 Wiring esesseseseesersesereesorecsocsesoccesoreerocsesocececccsereesceee 11 METHOD OF OPERATION State transition diagram oo ooooocoooocoroncoronccnonccaonosos 14 Function setup es ssssssssssssossosoessosossososessosesseseesesees 15 Parameter setup essesessssessssossssoseesoseososecseseosossosesses 18 Display off mode esesessssssscsesesesesesesereresssscsesesesenes 20 About integration and reverse integration ssessessesseesesesesse 21 Resetting the integrated value and reverse integrated value 21 What is Event standby oooococonccconccconccoonococnoroncocos 21 Event ON delay cece cece cece cece cece cece eee n cece nesses enenees 21 Flowrate zero Calibration cccccccccccccccccccccceccceccceccceece 22 TROUBLESHOOTING Remedying trouble oooooooccccccccccccccrocccccccoccccco ro co 23 SPECIFICATIONS General SpecificationS cece eee e cece ence eee e eee eneeeeees 24
20. cture which causes disturbance or fluctuations to the gas flow Chapter 3 MOUNTING AND WIRING O Rc Joint e Coating sealant Coat with an appropriate amount of sealant Do not coat the top two threads of the screw Remove any dirt or burrs from inside the pipes Good example Bad example Sealant Sealant e Connecting Pipes Connect pipes while gripping the Rc joint section of the pipe connection port with a spanner or wrench Resin cover Flange 1 Handling Precautions Do not grip and turn the body Doing so might damage the body or cause leakage When connecting pipes do not grasp the resin cover Doing so might damage the cover e Gas flow 1 Handling Precautions When feeding gas into the meter make it flow following the arrow on the side of the channel If gas is fed in the opposite direction the gas flow cannot be measured accurately UNF Joint Chapter 3 MOUNTING AND WIRING e Connecting joint Connect joint while gripping the flange section of the pipe connection port with a spanner or wrench Resin cover Flange Tightening torque CMS0010 0050 0200 40 to 45 Nem CMS0500 1000 2000 50 to 60 Nem 1 Handling Precautions Do nat grip and turn the body Doing so might damage the body or cause leakage When connecting pipes do not grasp the resin cover Doing so might damage the cover Keep the specified tightening torque e Gas flow 1 Handling Precautions When
21. dents When using this device for gases that contain hydrogen be sure to purge the device with an inert gas nitrogen argon etc before use Use without purging the device with an inert gas might cause an explosion and accident Turn off power before purge failure to do so might result in the indication of Err1 A CAUTION Be sure to use this product within the flowrate range stated in the specifications To prevent excessive flow use a suitable means to control the supply pressure or use a throttle valve or the like to control the flowrate If the flowrate exceeds the upper limit both the flowrate display and the output voltage current may indicate considerably lower values than the actual flowrate If damage could result from the abnormal functioning of this device include appropriate redundancy in the system design Prevent foreign matter from entering the device If the rust water droplet oil mist or dust in the piping flows into the device measurement error might occur and result in damaging the device If there is a possibility that any foreign matter flows into the device provide a filter strainer or mist trap capable of eliminating more than 1um foreign matter at the upstream and periodically inspect and replace the filter This device is exclusively for hydrogen and helium gases It cannot be used for measurement of gases other than hydrogen and helium and mixtures of these gases excluding mixtures withi
22. e to slipping might result in getting hurt E Mounting Installation site Avoid mounting the CMS Series in the following locations e Locations whose operating temperature falls below 10 C and rises above 60 C e Locations whose operating humidity exceeds 90 RH e Locations subject to sudden changes in temperature and condensation e Locations subject to corrosive gases and flammable gases e Locations where there are lots of conductive substances e g dust salt or iron dust water droplets oil mist or organic solvents e Locations subject to vibration or shock e Locations subject to direct sunlight e Locations splashed by water or rain e Locations subject to splashing by fluids e g oil chemicals e Locations where strong magnetic or electrical fields are generated Chapter 3 MOUNTING AND WIRING NW Behavior when the flowrate greatly exceeds the upper limit of flowrate range When the flowrate exceeds the upper limit of flowrate range both the flowrate display and the output voltage current may indicate lower values than the actual flowrate Be sure to use this product within the flowrate range stated in the specifications If the actual flowrate exceeds 120 of the upper limit both the flowrate display and the output voltage current will stop increasing in proportion to the flowrate If the flowrate is more than 200 of the upper limit both the flowrate display and the output voltage current will begin to decrease gi
23. ection method 9 16 18UNF Rc1 4 1 4Swagelok 1 4VCR The follwing tables show the maximum measured flowrate and output voltage for each gas type The output at the maximum measured flowrate is indicated as the voltage Gas type CMS0010 CMS0050 Max measured Output voltage Max measured Output voltage flowrate V flowrate V L min standard L min standard Hydrogen User setup 10 x Gas type 50 x Gas type conversion factor conversion factor Gas type CMS0200 CMS0500 Max measured Output voltage Max measured Output voltage flowrate V flowrate V L min standard L min standard 5 5 5 Hydrogen o s o o y o Helium o s S o S A User setup 200 x Gas type 500 x Gas type conversion factor conversion factor al al 6 Max measured Output voltage Max measured Output voltage flowrate V flowrate V L min standard L min standard Hydrogen 1000 2000 1000 2000 User setup 1000 x Gas type 5 5 conversion factor 2000 x Gas type conversion factor 2 CMS0500 CMS1000 CMS2000 7 segment LED 4 digit 1L min standard 5L min standard 1L min standard 5L min standard 10L 0 to 99999999 Data is written to memory every 10min Integrated value can be reset by operating the keys or external contact input 12 to 24Vdc 11 4 to 25 2Vdc 100mA max Harness with connector exclusive to CMS sold separately 10 to 60 C 10 to 90 RH condensation not allowed 20 to 70 C
24. ed flowrate DISP key Lower four digits key ENT ke L min o 8888 EERIE y Parameter setup MODE key X10L CY key for 3s or more miang CSP key DISP key CSP key CSP key Integrated flowrate or reverse integrated flowrate Upper four digits L min O m H A Al CENT key MODE key X10L 0 w No decimal F for 3s or more point display CSP key 1 Handling Precautions 14 e Leave the device powered up for about 30 minuites befor use to allow it to stabilize Chapter 4 METHOD OF OPERATION NW Function setup The following describes how to set up each of the functions e To enter the setup mode press the key The upper two digits on the display blink The upper two digits on the display indicate the function type and the lower two digits indicate the setup e Pressing the C_ _ key moves the setup to the next item Pressing the CA_ key moves the setup item to the previous item Key lock setup Display mode setup Event 1 type setup Flow deadband setup e Pressing the CV key again when 2 is displayed returns the display to 4 Pressing the A key again when is displayed changes the display to 2 e When the upper two digits are the setup item that you want to set press the key while it is blinking This selects the setup item and the lower two digits blink e Press the CA and CW keys to select the desired setting value and press the key All four digits light e Make sure that
25. esidual voltage Allowable OFF 50uA max open collector on other side leakage current 24 CMS0500 CMS1000 CMS2000 Hydrogen Helium Gas must not contain corrosive components chlorine sulfur acid etc 500L min standard 1000L min standard 2000L min standard standard indicates the calibration criteria 101325 kPa 20 C 5 lt yx lt 100L min 10 lt y lt 200L min 20 lt y lt 400L min 1 FS 1digit 1 FS 1 digit 1 FS 1digit 100 lt y lt 500L min 200 lt y lt 1000L min 400 lt y lt 2000L min 5 RD 1 digit 5 RD 1 digit 5 RD 1 digit Flow range 0 to 75 0 10 FS C 1 digit Flow range 75 to 100 0 15 FS C 1digit 0 1 FS 0 1MPa 1 digit max 0 5Vdc 1 5Vdc Allowable load resistance 250kQ min 6Vdc max even if flowrate exceeds range 4 20mAdc Allowable load resistance 3002 max 24mAdc max even if the flowrate exceeds range Open collector 30Vdc 50mA max 100ms 10 10 100 1000 L pulse No voltage contact or open collector 0 8V max open collector on other side 50uA max open collector on other side Chapter 6 SPECIFICATIONS 25 Chapter 6 SPECIFICATIONS Display Flowrate display 7 segment LED 4 digit instantaneous Malay flowrate integrated fowrat operating the keys or external contact input Power 12 to 24Vdc supply 11 4 to 25 2Vdc TOOMA max Harness with connector exclusive to CMS sold separately Operating humidily range 20 to 70 C condensation not allowed Conn
26. etting Use of this device for helium gas or mixed gases without changing the gas type setting might result in an error Do not use this device outside of the operating pressure range Also do not subject this device to a pressure above the pressure resistance Doing so might damage this device When connecting piping fasten the hexagonal section of the joint and turn the pipe side to connect After connecting the piping check for any gas leaks When mounting the device firmly fasten to prevent vibration In the case of 1 2Rc 1 4Rc connections take care not to coat with too much sealant Dirt or burrs in the piping may also cause errors Chapter 3 MOUNTING AND WIRING A CAUTION Before connecting pipes on Swagelok connection method and VCR connection method check the precautions in the instruction manual provided by the connecting joint manufacturer When purchasing a separate connecting joint use the following made by corresponding connection joint maker 1 4Swagelok Swagelok Co Ltd SS 400 1 6STSC11 1 2Swagelok Swagelok Co Ltd SS 810 1 8STSC11 1 4VCR Swagelok Co Ltd SS 4 VCR 1 00032SC11 3 8VCR Swagelok Co Ltd SS 8 VCR 1 8STSC11 or equivalent product This device is a precision instrument Do not drop it nor subject it to shock Doing so might damage the device Do not hold a resin cover portion at the time of carrying or piping this device Doing so might damage the cover or dropping the device du
27. iates e Check the piping for any gas leaks e Check the piping and connection ports for dirt oil or other foreign matter If oil is adhering to these parts contact Yamatake Corporation e Check the wiring to make sure that it is correct e Check the flowrate to see that it does not deviate considerably within several seconds or that it does not greatly exceed the measurement range The displayed value is Check if the gas contains foreign matter such as dust rust oil or water lower than expected If it seems that there is foreign matter in the flow meter contact Yamatake There should be no flow Corporation and ask for repair but the indicated flow rate is higher than zero Integration is incremented Check the piping for any gas leaks or check if gas flow stops or reverse integration is There is a possibility that a small volume gas less than the minimum decremented even though display value is flowing even though the instantaneous flowrate indication the instantaneous flowrate is zero The flowrate less than the minimum indication value is counted in indication is Zero the integration computation Set the flow deadband to remove the countup of integrated value or countdown of reverse integrated value See Function setup 23 Chapter 6 SPECIFICATIONS NW General specifications moder Ne CMS0010 CMS0050 CMS0200 Applicable gas Hydrogen Helium Gas must not contain corrosive components chlorine sulfur acid e
28. integrated flowrate is 100L FOTO0 0TOO000100 C R LF Lo 100L ODh OAh Integrated flowrate 10 0 L min standard Instantaneous flowrate e Communications specifications Item Description Communications method Conform to RS 232C Start stop transmission Transmission speed 9600bps Data transmission cycle 100 10ms 13 Chapter 4 METHOD OF OPERATION N CAUTION Do not operate the keys with a mechanical pencil or sharp tipped object Doing so might cause faulty operation Make sure that the selected analog output type matches the input type of the receiving device The output receiving device could be damaged if the analog output type selection is incorrect NW State transition diagram Function setup mode In the factory setting the instantaneous flowrate indicator lamp lights The following diagram shows the relationship between migration modes and display If S20 or Sti are set in the display mode setup the integrated flowrate or reverse integrated flowrate is displayed by pressing the DISP key while the instantaneous flowrate is displayed Pressing the key again returns the display to the instantaneous flowrate display When the power has been turned OFF then back ON again the display state before the power was turned OFF is held Power ON key key Instantaneous flowrate display Cy key for 3s or more L min 0 xo o BBB Bj CESP key Integrated flowrate or reverse integrat
29. m o Yamatake Corporation 81446957 001 Note The harness for AC DC adaptor 81446594 030 is necessary for the CMS to connect the AC DC adaptor O Harness for AC DC adaptor 81446594 030 unit mm sree Bites AC DC adaptor connector 31 Chapter 6 SPECIFICATIONS Mounting bracket 81446628 001 CMS0010 0050 0200 Material SUS304 unit mm A four place Mounting bracket 81446721 001 CMS0500 1000 Material SUS304 unit mm 65 A 4 places 4 5 zea Mounting bracket 81446856 001 CMS2000 Material SUS304 unit mm 6 5 A 4 places 5 5 De 32 E Pressure loss Pa Pressure loss Pressue loss Pa Pa Pressure loss e CMS0010 e CMS0200 1400 0 1200 0 1000 0 800 0 600 0 400 0 200 0 0 0 e CMS1000 2500 0 2000 0 1500 0 1000 0 500 0 0 0 Flowrate L min standard Pa Pressure los Chapter 6 SPECIFICATIONS e CMS0050 160 0 140 0 120 0 100 0 80 0 60 0 40 0 20 0 0 0 Flowrate L min standard Primary pressure 0 5kPa 100kPa 300kPa 500kPa 700kPa Flowrate L min standard Flowrate 800 L min standard 1200 Pa Pressure loss Pa Pressure loss e CMS0500 700 0
30. n explosive limits Oxygen cannot be measured even if gas contacting sections on this device are oil inhibited This device is set initially for hydrogen gas use before shipment from the factory When using it for helium gas or mixed gases the user must change the gas type setting Use of this device for helium gas or mixed gases without changing the gas type setting might result in an error Do not use this device outside of the operating pressure range Also do not subject this device to a pressure above the pressure resistance Doing so might damage this device CAUTION When connecting piping fasten the hexagonal section of the joint and Q turn the pipe side to connect After connecting the piping check for any gas leaks Before connecting pipes on Swagelok connection method and VCR Q connection method check the precautions in the instruction manual provided by the connecting joint manufacturer When purchasing a separate connecting joint use the following made by corresponding connection joint maker 1 4Swagelok Swagelok Co Ltd SS 400 1 6STSC11 1 2Swagelok Swagelok Co Ltd SS 810 1 8STSC11 1 4VCR Swagelok Co Ltd SS 4 VCR 1 00032SC11 3 8VCR Swagelok Co Ltd SS 8 VCR 1 8STSC11 or equivalent product In the case of 1 2Rc 1 4Rc connections take care not to coat with too Q much sealant Dirt or burrs in the piping may also cause errors S This device is a precision instrument Do not drop it nor
31. nge O 12 to 24Vdc GND Yellow DA Pink RS 485 DB Blue communications Installed externally Load 30Vdc 50mA max EV2 Gray F Load Q Z S 30Vdc 50mA max 30Vdc y 10 EV COM SG Black mues Interal circuit EV1 White External connection example o Handling Precautions e Power source GND instantaneous flow rate output and event out put common lines are all connected inside this device If these lines are connected to an external device through a common power supply interference will cause device failure or faulty operation e Take care that the event output does not exceed the output rating of this device If a relay is used the coil should have a built in surge absorption diode Otherwise device failure could occur 12 Chapter 3 MOUNTING AND WIRING Connection of totalizer pulse output to a counter e Non voltage input type 30Vdc or less Counter When using flowrate data serial output e Connection example RXD GND RTS CTS Interface Computer RS 232C port e Communications protocol Currently displayed instantaneous flowrate data and integrated flowrate data is sent as ASCII code Data is sent in order instantaneous flowrate data followed by integrated flowrate data Instantaneous flowrate data is prefixed with F and integrated flowrate data is prefixed with T Example When instantaneous flowrate is 10 0L min standard and
32. ress the key at the item you want to set The current setting value is displayed If you press the CENT key again the lowermost digit blinks paa ES Buga If you press the key the blinking cursor moves to the left To change the setting value at each of these digits use the CA and CW keys Press the CENT key the setting value is fixed When 3 or 2 has been set as the event type in the function setup setup the 8 DT dm nal digit display at is i utc and i To do this switch between the upper 4 digit and lower 4 digit display as follows Lower four digits 5668 Decimal point display Upper four digits HEBE key The following table shows available parameters and setting values ree Gi F i to is displayed according to the setting values of the function setup Chapter 4 METHOD OF OPERATION O CMSO0010 Parameter Item Factory setting Setting range The conditions of display Setting mode of function Event 1settingvalue 0 00 to 99 99 L min when 43 is for ae 00000000 to 99999999 L when 3 is 43 or 04 Event 2 setting value AZ 0 00 to 99 99 Limin when 4 is or de when 4 is 43 or 4 Pa enms 8 50 0 00 01 00 Umin when 81s 8 ort evzon dey 8 ovos0 s wren dis O toros a eae 00000000 to 99999999 L when amp 2 is Hz default 0 a 0 0 0 la Z 4 4 y a Yan y Gas type conversion 0 100 to 8 000 when 88 is 06 factor Analog
33. scribes the names and functions of parts The diagram below shows CMS0500 model EV1 EV2 indicators Lights when event 1 and event 2 are output Flowrate display 7 segment display indicates flowrate by a 4 digit number The upper two digits on the display indicate the function type and the lower two digits indicate the setup Instantaneous flowrate indicator lamp Lights when instantaneous flowrate is displayed Integrated flowrate indicator lamp Lights when integrated flowrate is displayed Display meter Ca_ ED keys Select the mode and the mode setup key Used to fix a mode setup key Used to switch the display MODE key Used to select the setup mode Signal connector Connects the power supply and output signals O Pipe connection inlet gt Pipe connection outlet The gas inflow is The gas outflow is connected here connected here Chapter 3 MOUNTING AND WIRING AN WARNING Never allow gases that are within explosive limits in particular mixed O gases within explosive limits that contain hydrogen to pass through this meter or device Doing so might result in explosion accidents When using this device for gases that contain hydrogen be sure to purge the Q device with an inert gas nitrogen argon etc before use Use without purging the device with an inert gas might cause an explosion and accident Turn off power before purge failure to do so might
34. tc Flow range 1 10L min standard 50L min standard 200L min standard standard indicates the calibration criteria 101 325kPa 1atm 20 C Measurement accuracy 2 0 1 lt x lt 2L min 0 5 lt y lt 10L min 2 lt y lt 40L min 101 325kPa 23 C conversion 1 FS 1 digit 1 FS 1digit 1 FS 1 digit x measured flowlate 2 lt y lt 10L min 10 lt y lt 50L min 40 lt y lt 200L min 5 RD 1 digit 5 RD 1 digit 5 RD 1 digit Temperature characteristics 3 Flow range 0 to 75 0 10 FS C 1 digit 10 to 60 C Flow range 75 to 100 0 15 FS C 1digit Pressure characteristics 4 Flow range 0 to 50 0 3 FS 0 1MPa 1digit max 0 1 FS 0 1MPa 1 digit max ADO O1 MPA dig max Output signal 0 5Vdc 1 5Vdc Allowable load resistance 250kQ min instantaneous flowrate output 6Vdc max even if flowrate exceeds range 4 20mAdc Allowable load resistance 300Q max 24mAdc max even if the flowrate exceeds range Event Numberofevents 2 output Open collector 30Vdc 50mA max Integration pulse 100ms 10 output width Integration pulse 1 10 100 L pulse 10 100 1000 L pulse output rate External Number of input 1 input Circuit type on other No voltage contact or open collector side Contact OFF 4 5 1V terminal voltage Contact ON approx 0 5mA current flowing to contact terminal current Allowable ON 250Q max contact resistance Allowable OFF 100kQ min contact resistance Allowable ON 0 8V max open collector on other side r
35. te Integration pulse output rate ON delay setting Not used Displayed only when mode EV1 Used 43 is set to Ml or tie ON delay setting Not used isplayed only when mode EV2 Used 4 is set to OV or G2 Event standby Displayed only when mode setting or 4 is set to He For more detail see page 26 st Gas type selection Conversion factor CF for each gas When 43 is selected set the type set by the user conversion factor CF in the Analog output a scaling oe parameter setup mode mae MI Flowrate conversion U4 to 0 35 C 101 325 kPa atomospheric reference temperature gt 1 C step pressure reference Flow deadband No deadband When gas type 4 is selected setting Less than minimum display setting value x CF Less than 1 FS become the deadband Less than 2 5 FS CF refers to the compensation Less than 5 FS coefficient according to gas type and its range is 0 10 to 8 00 The minimum display differs from models For more detail see page 26 re al SS aon mb I PY aan II Z Le 16 Chapter 4 METHOD OF OPERATION Item Function Setting Setting description Factory Remarks setting Communications Communication function disabled For the model with address Communication address RS 485 communication only Transmission 9600bps For the model with speed 4800bps RS 485 communication only 2400bps Data format 8 data bits even parity 1 stop bit For the model with 8 data bits
36. ully eliminated by flushing or wiping or if the regular presence of foreign matter can be expected be sure to install a filter If dust oil or moisture adheres to the metallic mesh or to the Micro Flow sensor chip measurement error or device failure may result al ape Metallic mesh Flow direction gt O Straight pipe section Chapter 3 MOUNTING AND WIRING In case of a different diameter pipe A diameter is different from B diameter straight pipe section may be required Upstream side enlarged Downstream side reduced 5D 3D E cms cms A B B A Different diameter socket Different diameter socket 5D 3D os ows f A B B A Upstream side reduced Downstream side enlarged 5D 3D Mm r eos ows A B B A Different diameter socket Different diameter socket 5D 3D A B A D indicates the connecting port size CMS0500 1000 2000 12mm CMS0010 0050 0200 6mm In case of a same diameter pipe A and B diameters are same straight pipe section may not be required Upstream side elbow Downstream side elbow A A y t ous y B B Upstream side ball valve Downstream side ball valve the valve having the structure the valve having the structure which does not disturb the gas flow which does not disturb the gas flow Los ows Kir A B 1 Handling Precautions Provide the 5D straight pipe section between the CMS and the butterfly valve or the like in case of a valve having the stru
37. ving the appearance that the flowrate is within the flowrate range limits Also if there is a sudden greatly excessive flowrate 200 of the upper limit or more for a very short period the flowrate display and the output voltage current will continue to indicate flow within the flowrate range without indicating the spike Especially when this device is used for flow control make sure to take appropriate measures such as controlling the supply pressure or using a throttle valve so that even at maximum control output the flowrate does not exceed 120 of the upper limit Flowrate display amp output voltage current Flowrate range I i I I I Li 100 120 200 Actual flowrate Upper limit E Piping Precautions for piping installation This device is a precision instrument If foreign matter such as dust oil mist or water enters the device it may cause measurement error or faulty operation When installing piping be sure to follow the procedures below to prevent foreign matter from entering the device 1 Before installing the device be sure to flush the upstream and downstream piping thoroughly to remove welding fume particulate and dust 2 Be sure to wipe the inside of the pipe to be directly connected to this device 3 After the above two operations are complete check to be sure that there is no welding fume particulate or dust and then install the device o Handling Precautions elf foreign matter cannot be f
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