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User Manual MS222E - Physik Instrumente

1. MS222E H 845 D11 Modular Hexapod System User Manual Version 1 1 0 Date 23 10 2013 This document describes the following product H 845 D11 Modular Hexapod System with Direct Drive 50 mrad s 1000 kg Load Including Power Supply Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2013 Physik Instrumente PI GmbH amp Co KG Karlsruhe Deutschland The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 23 10 2013 Document number MS222E BRo KSch Version 1 1 0 PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this Manual cccccsseeeceeeeeeeeeeeeeeeeeeeeeeeeaeaeeeees 1 1 2 Symbols and Typographic CONVENtiONS cccccsceseccceeeeeeeeeeeeaeeeeeeeesaaeeeeeeeaeeeeees 1 1 3 Other Applicable DOCUMENTS cccccccceeccsseseeec
2. 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 torr to 0 075 torr Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 2 Ambient Conditions and Classifications for Hexapod Power Supply Transport temperature 25 C to 85 C Storage temperature 0 C to 70 C Maximum relative humidity of 80 at temperatures of up to 31 C linearly decreasing until relative humidity of 50 at 40 C Degree of protection according to IEC IP20 60529 Area of application For indoor use only Maximum altitude 2000 m 1013 hPa to 790 hPa Air pressure corresponds to roughly 760 torr to 592 5 torr Li Me VONAOe Max 10 of the line voltage fluctuations ll transient overvoltages as typical for public Overvoltage category EATA yp pone power supply H 845 D11 Modular Hexapod System MS222E Version 1 1 0 63 10 Technical Data P I 10 3 Dimensions of the Hexapod All figures show the Hexapod in the reference position Dimensions in mm Note that the decimal places are separated by a comma in the drawings Y al F a p AWA 2 N Zz SS F E n N Figure 29 Hexapod front view dimensions in mm The 0 0 0 coordinates refer to the origin of the XYZ coordinate system When the default settings of the Hexapod controller are used and the Hexapod is in the reference position the pivot point is located at the
3. The Hexapod controller beeps constantly An error code is set The Status LED of the Hexapod glows red gt When the permissible output voltage range is exceeded switch off the Hexapod power supply immediately and contact our customer service department p 57 The geometrical data used by the Hexapod controller must be adapted to the Hexapod If incorrect geometrical data is used the Hexapod can be damaged by uncontrolled motions or collisions The geometrical data is adapted before delivery gt Check whether the Hexapod controller matches the Hexapod A label on the rear panel of the controller indicates for which Hexapod the controller is intended gt Use the CST command to query for the active Hexapod geometry file see user manual of the Hexapod controller Thus you can check if the label on the rear panel is still correct gt Only operate the Hexapod with a Hexapod controller whose geometrical data is adapted to the Hexapod Collisions can damage the Hexapod the load to be moved and the surroundings gt Make sure that no collisions between the Hexapod the load to be moved and the surroundings are possible in the working space of the Hexapod Do not place any objects in areas where they can get caught by moving parts Immediately stop the motion if a malfunction occurs in the Hexapod controller see user manual of the Hexapod controller H 845 D11 Modular Hexapod System MS222E Version 1 1 0 7 2 Saf
4. Wait afew minutes to let the power supply cool down 2 Switch the power supply off and on again Hexapod power supply is gt Switch on the Hexapod power switched off supply Servo mode is switched off gt Switch on the servo mode by sending an SVO command At least one limit switch ofa gt Start a reference move by sending strut is activated an FRF command Impermissible load gt Observe the permissible load and work space p 29 Brakes remain closed gt Contact our customer service department p 57 Reduced accuracy Warped base plate gt Mount the Hexapod on an even surface p 30 The recommended evenness of the surface is 100 um Increased wear Only small motions over a gt Carry out a maintenance run over long period of time the entire travel range p 45 H 845 D11 Modular Hexapod System MS222E Version 1 1 0 55 8 Troubleshooting 56 One strut does not move or is difficult to move Wear of the spindle Foreign body has entered the spindle Faulty motor Blocked joint due to wear or foreign body At least one of the brakes gt is not deactivated by activating servo control PI Carry out a strut test See user manual of the Hexapod controller The strut test should be carried out in the reference position Exception the malfunction only occurs with maximum or minimum displacement of the platform in Z Contact our customer service department p 57 If the problem with
5. 1 1 0 49 7 Maintenance pP I 9 Place the hard foam insert for the base plate of the Hexapod on the pallet Figure 24 Hexapod wrapped in foil with lower hard foam insert on a pallet 10 Place the Hexapod into the hard foam insert on the pallet see figure above Figure 25 Hexapod package with surrounding cardboard box 11 Place the cardboard box around the Hexapod see figure above 50 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 7 Maintenance Figure 26 Hexapod package without cardboard lid 12 Insert the hard foam insert for the moving platform of the Hexapod in the cardboard box see figure above 13 Close the cardboard box with the cardboard lid 14 Secure the box on the pallet 7 3 Replacing the Fuses of the Hexapod Power Supply Damage of power supply The Hexapod power supply can be damaged if unsuitable fuses are used NOTICE gt Check and replace both fuses if there is a fault H 845 D11 Modular Hexapod System MS222E Version 1 1 0 51 7 Maintenance pP I Figure 27 Location of fuses at the rear panel of the Hexapod power supply Figure 28 How to exchange fuses Tools and accessories A suitable tool to pry open the fuse carrier Replacing the fuses of the Hexapod power supply 1 Switch off the Hexapod power supply 2 Disconnect the Hexapod power supply from the power socket by pulling the power plug 3 Wait a minute to b
6. 3 M12 screws Suitable tools for fastening the screws Affixing the Load 1 Align the load so that the selected mounting holes in the moving platform can be used for affixing it Note The front side of the Hexapod with the connections to controller and power supply is perpendicular to the negative motion direction of the X axis see the dimensional drawing p 64 2 Affix the load to the selected mounting holes in the moving platform using the Screws 5 7 Connecting Cable Set and Power Supply to the Hexapod Prerequisites v The cable set is not connected to the Hexapod controller v The power supply of the Hexapod is switched off Tools and accessories Cable set that belongs to the Hexapod system p 9 Power supply that belongs to the Hexapod system p 9 Connecting cable set and power supply to the Hexapod 1 Connect the data transmission cable with the MDR68 connector to the Controller MDR68 socket in the base plate of the Hexapod 38 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 5 Installation a Press the latches together on both sides of the connector b Insert the connector into the socket on the Hexapod C d Check that the connector correctly fits Release the latches 2 Connect the data transmission cable with the sub D25 coupling to the Digital I O sub D25 panel plug in the base plate of the Hexapod 3 Connect the sub D3W3 coupling of the
7. chains of the crane from exerting impermissible forces on the Hexapod The chains of the crane must not touch the struts and the moving platform of the Hexapod Incorrect mounting can warp the base plate Warping of the base plate reduces the accuracy gt Mount the Hexapod on an even surface The recommended evenness of the surface is 100 um The Hexapod can be damaged by excessively long screws gt When selecting the screw length observe the thickness of the moving platform p 64 or the depth of the mounting holes together with the load to be mounted gt Only use screws that do not project under the moving platform after being screwed in gt Only mount the Hexapod and a load on the mounting fixtures holes intended for this purpose 6 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 2 4 Safety Measures during Start Up There is a risk of injuries caused by crushing which can occur between the moving parts of the Hexapod and a stationary part or obstacle gt Keep any part of your body away from areas where they can get caught by moving parts The Hexapod controller checks if the output voltage of the Hexapod power supply is in the permissible range When the output voltage exceeds the upper limit of the permissible range the struts of the Hexapod can be damaged Exceeding the upper limit of the permissible output voltage range is indicated as follows
8. is referred to as the work space The work space can be limited by the following external factors Installation space Dimensions and position of the load Pivot point The rotation axes U V and W meet at the pivot point When the standard settings for the pivot point coordinates are used the pivot point is located at the origin of the XYZ coordinate system after a reference move see the dimensional drawing p 64 for more information The pivot point is shifted along with the platform during translations Rotations do not change the position of the pivot point The pivot point coordinates remain unchanged in both cases The pivot point coordinates can be changed in the Hexapod controller XYZ coordinate system The position and orientation of the Cartesian XYZ coordinate system cannot be changed which is why the system is referred to as spatially fixed The axes X Y and Z are referred to as translation axes The intersection of the axes of the spatially fixed Cartesian XYZ coordinate system 0 0 0 is referred to as the origin The Z axis is always perpendicular to the base plate of the Hexapod The following example figures of the H 810 Hexapod show that the XYZ coordinate system does not move along with motions of the platform H 845 D11 Modular Hexapod System MS222E Version 1 1 0 73 12 Glossary 74 Figure 32 H 810 Hexapod in the reference position 1 Cable outlet Version 1 1 0 MS222E PI H 845 D
9. moving platform during installation of the Hexapod and the load When the Hexapod is mounted on a tilted surface Verify that the Hexapod is lifted by the crane without the Hexapod slipping from the tilted surface in a sudden motion Verify that the chain of the crane remains under slight tension If the tension Is too strong impermissible forces can be exerted on the Hexapod Ensure an uninterruptible power supply in order to prevent an unintentional deactivation of the Hexapod system H 845 D11 Modular Hexapod System MS222E Version 1 1 0 5 2 Safety P J gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod The Hexapod power supply can be damaged due to disturbed heat dissipation gt Install the Hexapod power supply only with its bottom side equipped with rubber feet facing downwards gt Place the Hexapod power supply in a location with adequate ventilation to prevent internal heat build up gt Allow at least 15 cm clearance from the front and the rear of the unit and 1 cm from the bottom ensured by the feet of the chassis gt Never cover any ventilation openings as this will impede ventilation When the base plate of the Hexapod is affixed to the crane the chains of the crane can cause damage to the Hexapod gt Only affix the base plate of the Hexapod to the crane with a suitable crane set up that prevents the
10. origin of the XYZ coordinate system 64 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System 10 Technical Data amp FT ae Sais U al AE is Le a w a i l 65 WWW PI WS PIEZO NANO POSITIONING 550 300 229 Figure 30 Hexapod top view dimensions in mm Version 1 1 0 MS222E H 845 D11 Modular Hexapod System 10 Technical Data PI 66 Figure 31 Base plate of Hexapod dimensions in mm Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Pin Assignment for Hexapod 10 4 1 Power Supply Connection Power supply between external power supply and Hexapod via sub D3W3 panel plug at base plate of Hexapod OU elelo Je 10 4 2 Data Transmission Connection for Brakes Limit Switches and System Status Data transmission between the Hexapod and the Hexapod controller Sub D25 panel plug at base plate of Hexapod Note this pin assignment is also valid for the sub D25 f socket labeled I O at the included Hexapod controller Signal direction with respect to Hexapod ejo Fo e savsinommion foma C oo e fasmo fe sje o poon H 845 D11 Modular Hexapod System MS222E Version 1 1 0 67 10 Technical Data P L Signal direction with respect to Hexapod oo 2 room is lo ooo i fis frome a foom 2 fracos oo a froo a froo e 10 4 3 Data Transmission Connection Data tran
11. positioning Travel range X Y 110 Travel range Z 50 Travel range Ox Oy 15 Travel range 87 30 Single actuator design resolution 0 04 Min incremental motion X Y 1 Min incremental motion Z 0 5 Min incremental motion Oy Oy 02 10 Backlash X Y 4 Backlash Z 1 Backlash Oy Oy 15 Backlash 87 30 Repeatability X Y 2 Repeatability Z 1 Repeatability Ox y z 10 Max velocity X Y Z 20 Max velocity 8x Oy z 50 H 845 D11 Modular Hexapod System MS222E Unit Tolerance mm mm um um typ um typ urad typ ym typ um typ urad typ urad typ um typ um typ urad typ mm s mrad s Version 1 1 0 59 10 Technical Data P I Typ velocity X Y Z 10 mm s Typ velocity Ox y 8z 30 mrad s Mechanical properties Load base plate horizontal any 1000 300 kg max orientation Holding force de energized base 10000 3000 N max plate horizontal any orientation Motor type Brushless DC motor Miscellaneous Operating temperature range 10 to 50 C Material Aluminum alloy Stainless steel Mass 116 kg 5 Cable length to power supply 3 m 10 0 cm Cable length to controller 9 m 50 0 cm Mounting angle 0 to 360 Technical data specified at 20 3 C performance may be reduced outside this range The travel ranges of the individual coordinates X Y Z 8x Oy Oz are interdependent The data for each axis in this table shows its maximum travel where all other axes are at their ze
12. result on the Hexapod and cause damage gt When a load is to be mounted with the 3xM20 through holes use the simulation program Hexapod Simulation Software for the following Check the values of the tightening torque of the screws for safe mounting of the load Select appropriate screws and load to ensure that the maximum torque and the maximum load capacity is observed 36 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 5 Installation gt e W NF Figure 19 Mounting holes in the moving platform 1 2 3 4 5 H 845 D11 Modular Hexapod System MS222E Version 1 1 0 37 6 x M8 through holes with 16 mm depth of thread in a radius of 550 mm 3 x M12 through holes with 24 mm depth of thread in a radius of 550 mm 3 x M20 through holes in a radius of 450 mm not to be used 6 x M8 through holes with 16 mm depth of thread in a radius of 400 mm 12 x M8 through holes with 16 mm depth of thread in a radius of 300 mm 5 Installation P J Prerequisites v You have read and understood the General Notes on Installation p 27 v You have determined the permissible load and the working space of the Hexapod p 29 v You have designed the load and the environment of the Hexapod so that the permissible load of the Hexapod is observed and no collisions can occur Tools and accessories Suitably long screws Options Up to 24 M8 screws depending on load and mass distribution
13. signals of brakes limit switches system status 6 Socket for data transmission cable Controller encoder signals 7 Panel plug for power supply cable 24 VDC 8 Cube describing the orientation of the coordinate system H 845 D11 Modular Hexapod System MS222E Version 1 1 0 11 3 Product Description P J Figure 2 Connections and status LED at base plate of the Hexapod The Status LED indicates the following states Ready Permanent green glow commanded moves are performed Not ready Permanent red glow commanded moves are not performed Refer to Troubleshooting on p 55 for more information 3 3 2 Hexapod Controller General information including details of front and rear panel of the C 887 Hexapod controller is given in the MS204E user manual The Hexapod controller included in the H 845 D11 Hexapod system differs from the standard C 887 Hexapod controllers in featuring an additional sub D 25 f I O interface as labeled in Figure 3 For more information refer to Control on p 15 VEA w o wo i Fi a a rr q E W zi 5 E C3 a comme lt a _ E n 2x 24vV0C POWER OUT i a e e d Figure 3 Rear view of the Hexapod controller included in the H 845 D11 modular Hexapod system 12 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 3 3 Power
14. the General Notes on Start Up p 41 v You have correctly installed the Hexapod and the Hexapod power supply according to the instructions in Installation p 27 v You have read and understood the user manual of the Hexapod controller Accessories Hexapod controller belonging to the Hexapod system PC with suitable software see user manual of the Hexapod controller Starting up the Hexapod system 1 Connect the Hexapod to the Hexapod controller see user manual of the Hexapod controller 2 Connect the supplied power cord to the panel plug in the rear panel of the Hexapod power supply 3 Connect the Hexapod power supply to the power socket with the power cord 4 Switch on the Hexapod power supply by moving the power switch into the E position 5 Start up the Hexapod controller see user manual of the Hexapod controller 6 Operate a few motion cycles for testing purposes See user manual of the Hexapod controller 6 3 Switching Off the Hexapod System 1 Switch off the Hexapod controller Thus the servo mode is switched off and the brakes are activated 2 Switch off the Hexapod power supply by moving the power switch into the A position 44 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System 7 Maintenance PIEZO NANO POSITIONING WWW PI WS 7 Maintenance In this Chapter Carrying out a Maintenance RUN cccccsesscccecesssecceeceeeseceseceeeeceeseeeaeeeeesaeaeceeeesaaees Packi
15. your Hexapod is not listed in the table or it cannot be solved as described contact our customer service department p 57 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the relevant user manuals for your system are available for download on our website http www pi ws H 845 D11 Modular Hexapod System MS222E Version 1 1 0 57 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data In this Chapter 10 Technical Data PECHES ae nee een a E eee 59 Ambient Conditions and Classifications cccccccccsssseeeceeeeeeeeeeeeeeeeeeeessaaeeseeeeeeeeesaas 62 DIMENSIONS of the Hexapod isi svtssutdsiaietsvsnesavertesreiressetdnceinwed revues ereancsus vassal Demeaaneveane 64 Pin Assignment for the Hexapod ccccseeccccesseeeceseeeeceseeecsaseeeseuseesseaeeeeesaneeesseaes 67 10 1 Specifications 10 1 1 Data Table of Hexapod Hexapod for higher loads and holding forces Active axes X Y Z Ox By Oz Motion and
16. 11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 12 Glossary Figure 33 H 810 Hexapod the platform of which has been moved in X 1 Cable outlet H 845 D11 Modular Hexapod System MS222E Version 1 1 0 75 PIEZO NANO POSITIONING WWW PI WS 13 Appendix 13 Appendix 13 1 Explanations of the Performance Test Sheet The Hexapod is tested for the positioning accuracy of the translation axes before delivery The performance test sheet is included in the scope of delivery The following figure shows the test setup used 1 F T 3 Figure 34 Test setup for measuring the X or Y axis 2 Laser interferometer 3 Mirror 4 Bench The following test cycles are performed Movement over the entire travel range with at least 20 measuring points in at least five cycles Movement over partial sections e g 1 mm in increments of e g 10 um H 845 D11 Modular Hexapod System MS222E Version 1 1 0 77 13 Appendix 13 2 EC Declaration of Conformity 78 PI Declaration of Conformity according to DIN EN ISO IEC 17050 1 2005 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Roemerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name High Load Hexapod System Model Numbers H 845 D11 Product Options all complies with the following European directives 2006 42 EC Machinery Directive 2006 95 EC Low
17. E User manual for the Hexapod system this document Screw sets Mounting accessories 000039812 1 Allen wrench 10 0 DIN 911 000036450 Accessories for connection to the grounding system 1 flat head screw with cross recess M4x8 ISO 7045 2 washers form A 4 3 DIN 7090 2 safety washers Schnorr 4mm N0110 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 5 Technical Features 3 5 1 Struts The Hexapod has six adjustable length struts Each strut carries out linear motions Each set of settings of the six struts defines a position of the moving platform in six degrees of freedom three translation axes and three rotation axes Each strut is equipped with the following components One actuator Reference and limit switches Joints for connecting to the base plate and moving platform The actuator contains the following components Brushless DC motor with rotary encoder Brake Drive screw 3 5 2 Reference Point Switch and Limit Switches The reference point switch of a strut functions independently of the angular positions of the strut ends and the lengths of the other struts When a limit switch is activated the power source of the motor is switched off to protect the Hexapod against damage from malfunctions 3 5 3 Brakes The brakes of the struts are activated by default The brakes are deactivated only when the servo mode is switch
18. OTICE Output voltage of Hexapod power supply too high The Hexapod controller checks if the output voltage of the Hexapod power supply is in the permissible range When the output voltage exceeds the upper limit of the permissible range the struts of the Hexapod can be damaged Exceeding the upper limit of the permissible output voltage range is indicated as follows The Hexapod controller beeps constantly m An error code is set The Status LED of the Hexapod glows red gt When the permissible output voltage range is exceeded switch off the Hexapod power supply immediately and contact our customer service department p 57 H 845 D11 Modular Hexapod System MS222E Version 1 1 0 41 6 Start Up pP J NOTICE Incorrect configuration of the Hexapod controller The configuration data used by the Hexapod controller e g geometrical data and servo control parameters must be adapted to the Hexapod If incorrect configuration data is used the Hexapod can be damaged by uncontrolled motions or collisions The configuration data is adapted before delivery gt Check whether the Hexapod controller matches the Hexapod A label on the rear panel of the controller indicates for which Hexapod the controller is intended gt When you have established the communication via TCP IP or RS 232 or use the user interface of the C 887 send the CST command The response shows the Hexapod to which the controller is adapted gt O
19. Supply of the Hexapod Figure 4 Front panel of power supply 1 Power LED Power Figure 5 Rear panel of power supply 1 Fuse carrier for two fuses with IEC rating T8AL 2 Power switch lo position power supply is switched off El position power supply is switched on 3 Panel plug male for line cord 4 Power LED Power 5 Fan 6 Sub D3W3 socket Power Out 1 for 24 V DC output H 845 D11 Modular Hexapod System MS222E Version 1 1 0 13 3 Product Description P I 3 4 Scope of Delivery 14 The following table contains the scope of delivery of the Hexapod The scope of delivery of the Hexapod controller is listed in the user manual of the Hexapod controller For the scope of delivery of the cable set that belongs to the Hexapod system and the Hexapod power supply see System Components p 9 Se H845B0008 Hexapod mechanics of the system including 6 hex head cap screws M12x60 ISO 4762 for mounting the base plate Packaging consisting of M850B0436 Packaging materials Pallet 880 mm x 800 mm x 162 mm Cardboard box lower part 842 mm x 762 mm x 815 mm Cardboard box upper part 870 mm x 790 mm x 120 mm Compound foil 800 mm x 800 mm x 1200 mm Hard foam insert for moving platform of Hexapod 840 mm x 760 mm x 100 mm Hard foam insert for base plate of Hexapod 840 mm x 760 mm x 100 mm Documentation consisting of H845T0001 Technical note in printed form on unpacking the Hexapod MS222
20. Voltage Directive LVD 2004 108 EC EMC Directive 2011 65 EC RoHS Directive The applied standards certifying the conformity are listed below Safety of Machinery EN 12100 2010 Safety Low Voltage Directive EN 61010 1 2010 Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 The person authorized to compile the technical file is Christian Rudolf Address see manufacturer s address April 10 2013 Karlsruhe Germany f H Norbert Ludwig Managing Director Physik Instrumente PI GmbH amp Co KG Auf der Roemerstrasse 1 76228 Karisruhe Germany PIEZO NANO POSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws SS ee A Version 1 1 0 MS222E H 845 D11 Modular Hexapod System
21. ccceeeseeeeeeeeeeeeees 15 3 5 3 BIOS ea E EE T E E T 15 3 5 4 SONTO ae ea A satu E finn E E EA EAE 15 3 5 5 MOOI tect ece bec cnehe a aan r A Aa EEN AERA 16 10 Unpacking 21 Installation 27 5 1 General Notes on Installation cccccccccccsecccssssseeceeeeeeeeeeeeeseeeeeeeesaeaeeeeeeeeeeseaas 27 5 2 Determining the Permissible Load and Working Space ccccsseeeeeeeeeeeeeeees 29 5 3 Attaching the Snap On Ferrite Suppressors cccseeeeeeesseeeeeeeesaeeeeeeeeseeeeees 30 5 4 Mounting the Hexapod on a Surface cccccceeccccecseseeeeeeeeeeeeeeeeeseeeeeeeessaeeeeeeeeeas 32 5 5 Grounding the Hexapod aici cbesindeccesea cnc cepaedadeesaade rinnen ai aa E n 35 5 6 Affixing the Load to the Hexapod cccccccecsssseeeeeceeeseeeeeseeeeeeeeesseaseeeesesaaeeeees 35 5 7 Connecting Cable Set and Power Supply to the Hexapod ccccsseeeeeseeeees 38 Start Up 41 6 1 General Notes on Start Up ccccccccsececccesseeeeeceeeeeeeeesseeeeeeesaeaeeeessseaeeeeseesaaees 41 6 2 Starting Up the Hexapod System cccccsccsccceceeeeseeeeseeeeeceeeeeeeeeeeeesseaeeeeeessaaees 43 6 3 Switching Off the Hexapod System cccccccccccsseeeeeeeeeeeeeeeeeeeeeceeeseaaeeeeeesaeees 44 Maintenance 45 7 1 Carrying out a Maintenance RUN cccccceesccceeceeseceeeeeeeeseeeeesaeeeeeeseseaeeeeeesaaees 45 7 2 Packing the Hexapod for TranSpOrt cccccsseseceesceeeseeeeeeeeeeeeeseseaeeeeessaeeeee
22. department p 57 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in injury gt Actions to take to avoid the situation H 845 D11 Modular Hexapod System MS222E Version 1 1 0 1 1 About this Document pP I NOTICE Dangerous situation If not avoided the dangerous situation will result in property damage gt Actions to take to avoid the situation INFORMATION Information for easier handling tricks tips etc Action consisting of several steps whose sequential order must be observed 1 sequential order is irrelevant o eeo oyo Labeling of an operating element on the product example socket of the RS 232 interface 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals For the latest versions of the user manuals contact our customer service department p 57 massa Ses C 887 Hexapod controller MS204E User Manual 2 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter Mendod USG cares ee cinct setae nce ct gasiaebeseeteee lt 8 aeeeocseasectect oetitsoawenteaead ueneaccuenasinck sep indeweneees 3 General Safety Instructions ccccccceeeeecceeeeeeeeeeeeeeeeeeeesaseees
23. e XYZ coordinate system Position of the pivot point after the reference move when the standard settings of the Hexapod controller are used H 845 D11 Modular Hexapod System MS222E Version 1 1 0 17 3 Product Description P J 18 Example Consecutive rotations INFORMATION For a clearer view the figures have been adapted as follows Round platform replaced by T shaped platform XYZ coordinate system shown shifted Pivot point in the top left corner of the platform 1 The U axis is commanded to move to position 10 The rotation around the U axis tilts the rotation axes V and W Figure 7 Rotation around the U axis Ii Platform in reference position Platform position U 10 U parallel to spatially fixed X axis 2 The V axis is commanded to move to position 10 The rotation takes place around rotation axis V which was tilted during the previous rotation The rotation around the V axis tilts the rotation axes U and W Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 3 Product Description Figure 8 Rotation around the V axis I Platform in reference position Platform position U 10 V 10 U and V parallel to the platform level 3 The W axis is commanded to move to position 10 The rotation takes place around the rotation axis W which was tilted during the previous rotations The W axis is always vertical to the platform level The rotation aro
24. e sure that any residual voltage has dissipated 4 Pry open the door that covers the fuse carrier and pry out the fuse carrier see Figure 28 above 52 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 5 Be sure to replace both fuses with fuses of the suitable type 100 to 240 V 2 x IEC T 8 AL with 250 V rated voltage L Low breaking T Time lag Note that IEC fuses are cited other fuse standards may require higher nominal current rating 6 Reinstall the carrier and close the door 7 4 Cleaning the Hexapod Prerequisites v You have disconnected the Hexapod from the Hexapod power supply Cleaning the Hexapod gt When necessary clean the Hexapod surface with a towel lightly dampened with a mild cleanser or disinfectant gt Do not use any organic solvents H 845 D11 Modular Hexapod System MS222E Version 1 1 0 53 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Controller beeps Output voltage of Hexapod gt Switch off the Hexapod power constantly and power supply exceeds upper supply immediately Status LED glows limit of permissible range gt Contact our customer service red department p 57 System is not ready Output voltage of Hexapod When the output voltage is too low Status LED glows power supply falls below because the temperature of the power lower limit of permissible supply is above 50 C range 1
25. ecececccececacecaececscecacnens 68 PIEZO NANO POSITIONING WWW PI WS 11 12 13 Old Equipment Disposal 71 Glossary 73 Appendix 77 13 1 Explanations of the Performance Test Sheet cccccccseeecseseesseseeseeeeeseeeeees 77 13 2 EC Declaration of Conformity 0 0 0 ccccccccccceecsesseeeeeeeeeeeeeeseeeseeessaeaeeeeesssaaeeeees 78 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this Manual cccccececsseseeeeeeeeeeeeeeeeeeeeeeeeeseseaeeeeeeess 1 Symbols and Typographic CONVentions c ccccccccecceeeeceeeceeeeeeeeeeeeeeeeeseeeeeeeeeeeaaseeeees 1 Other Applicable DOCUMENES cccccccceceseessececeeeeeeeeeesseceeeeessaeesseeceeeeesseeeaeeeeeeeeessaas 2 1 1 Goal and Target Audience of this Manual This manual contains information on the intended use of the H 845 D11 system It provides information about the following items Hexapod mechanics Details of the C 887 11 Hexapod controller included in the H 845 D11 system Power supply Cabling This manual assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures For general information about the C 887 11 Hexapod controller refer to its separate documentation For updated releases of this user manual or if you have any questions contact our customer service
26. ed on for the axes of the moving platform For more information refer to Starting Up the Hexapod System on p 43 3 5 4 Control The Hexapod is intended for operation with the Hexapod controller which is delivered with the Hexapod The Hexapod controller makes it possible to command motion of individual axes combinations of axes or all six axes at the same time in a single motion command H 845 D11 Modular Hexapod System MS222E Version 1 1 0 15 3 Product Description P J The Hexapod controller calculates the settings for the individual struts from the target positions given for the translation and rotation axes The velocities and accelerations of the struts are calculated in such a way that all struts start and stop at the same time After the Hexapod controller has been switched on or restarted the Hexapod has to complete a reference move in which each strut moves to its reference point switch After the reference move the moving platform is in the reference position and can be commanded to move to absolute target positions Differing from the standard controller the delivered Hexapod controller is equipped with an additional I O sub D25 f socket The I O socket carries lines for brakes limit switches and system status which are used for the following additional functions System status display via the Status LED at the base plate of the Hexapod p 11 Brake activation or deactivation depending on the current servo
27. eeeeas 46 T3 Replacing the Fuses of the Hexapod Power Supply ccccsssccecsseeeeeeeeeeeeeees 51 7 4 Cleaning the Hexapod sireceaecreantiee tee tics tapedancioiontiantacashbaianetieninbesesnlaauadentnbasieinooisens 53 Troubleshooting 55 Customer Service 57 Technical Data 59 101 OSGI AT NG ern e ER shtatead sh dnmneisicaitesns 59 10 1 1 Data Table of HEXaA pO ccceccceccceeeeeeeeeeaeeeeeeeeseeeeeeeeesaeeseeesesaeess 59 10 1 2 Maximum Ratings Of Hexapod ccccsceeceeceeeeeeeeeeeeeaeeeeeeseeseeesaees 60 10 1 3 Data Table of Hexapod Power Supply ccccccssesceeeeeesseeeeeeeeeees 61 10 1 4 Maximum Ratings of Hexapod Power Supply cccsseeeeeeeeeeeees 61 10 2 Ambient Conditions and Classifications ccccccccccccccscaeseeeeeeeeeseeaeeseeeeeeeeeeeaas 62 10 2 1 Ambient Conditions and Classifications for Hexapod 08 62 10 2 2 Ambient Conditions and Classifications for Hexapod Power EEE keene ene ea en en ee 63 10 3 DIMENSIONS of the Hexapod icssietcressicnictastiercendicetaniaksniswesivetsnadtbeawactieiancatsstanestans 64 10 4 Pin Assignment for HExapod cccccccssseeccceeseecceeseeecsaeeecseseeessaneeessageeesseass 67 10 4 1 Power Supply Connection ccccccccssseceeeeeseeeeeeeeseeseeeeeseaeeeeesenaaees 67 10 4 2 Data Transmission Connection for Brakes Limit Switches and SW 1g ee 2 i eens E ne 67 10 4 3 Data Transmission CONNECTION cccccccecececc
28. eeeeeeeeeeeeeeeeeeesseeeeeeeeeeeessaaaseees 2 2 Safety 3 2 1 ETO SNS Casas teatro secgane secs sasatene E 3 2 2 General Safety Instructions 0 0 cceeececcceeeeeeeeeseeceeeeeeeeeeeeeeceeeeeseaeaaeeeeeeeessaaasesss 3 2 2 1 Organizational MEASUNCS sccecuncscaeccieassceaceaccsssenecdosaietecebennenneasaises 4 2 2 2 Safety Measures during Transport cccceeeeseeeeeeeeeeeeeeeeeeeeeeeeeeeeas 4 2 2 3 Safety Measures during Installation cccccccceceeeeeseeeeeeeeeeeesaeeeeees 5 2 2 4 Safety Measures during Start Up cccceeceecceeesesseeeeeeeeeeeessaeeeeees 7 2 2 5 Safety Measures during Maintenance cccccceeeesseseeeeeeeeeesaaeeeees 8 3 Product Description 9 3 1 Features and Applications sreiiaiantstuussnentirsivenshiessvadkaeiubadooeseentnPetiinanhaucesaivosawinenwadanns 9 3 2 OY SIEM COMMOME NMS essesi iieni e arsik nin nEn E En ARE NEA AEE ERER AEE AE ASRA 9 3 3 TOUT VIEW deran east aeee sane A E EE 11 3 3 1 Hexapod ae ccieccesem sn stonmatannnieaamnaecncsdanesanatteeaatansisadonnextnciiansnentsieegentaamuiied 11 3 3 2 Hexapod Controller cccccccccssseeceecceessececeeeeeeeeeseeaeeeeesseagseeeessaaees 12 3 3 3 Power Supply of the Hexapod cceeeceececeeeeeseeeeeeeeeeeessaaeeeeeeeeees 13 3 4 CODE Ol CUM CY siiani cosa iosannuy EE iE aN A RAAE EAEN 14 3 5 PSCC AI FoatUro S assinando EATEN 15 3 5 1 CDNAS coe ecreateecsctca dette E E E 15 3 5 2 Reference Point Switch and Limit Switches
29. ety P J 2 2 5 Safety Measures during Maintenance The Hexapod can become misaligned as a result of improper maintenance The specifications p 59 can change as a result gt Do not loosen any screws 8 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Features and Applications ccccccccccsssceceseeeceeceeseececeeecessaeeeseueeeseueesseueesseeeessaeeesaaees 9 Syslem COMPONEN S ansrinsiatoncacetaaasut inia nnie aa Ea ETRE ERD 9 FOG T VOW aea E N 11 MOODS Ol UENO oere eae setsses becesnaetena sah olvaenoecesceasee beaecsceuenacteseaeboacceenceeee eecoceueere 14 Technical Features racic incecisinawscisansicteeawicidnsd lt duicinenenmuaswudenembaltenesdbeiaidekbnsaecaaawntctsantSeaniclenndce 15 3 1 Features and Applications The Hexapod offers a maximum velocity of up to 20 mm s and 50 mrad s The load capacity of the Hexapod achieves 1000 kg with the Hexapod base plate mounted horizontally The parallel kinematics structure and the free choice of the pivot point offer the following advantages Positioning operations in six independent axes three translation axes three rotation axes with short settling times Pivot point is maintained for rotations and moves along with linear motions High accuracy and step resolution in all axes No addition of the errors of individual axes No friction and torques fr
30. exapod System PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 2 3 Safety Measures during Installation Depending on the tilting angle of the surface to which the Hexapod is to be mounted the Hexapod can slip tilt or fall from the surface There is a risk of injuries if parts of your body get caught be the Hexapod and the Hexapod can be damaged gt Position the surface where the Hexapod is to be mounted horizontally If the surface where the Hexapod is to be mounted cannot be positioned horizontally gt Keep any part of your body away from areas where they can get caught by the Hexapod Disconnect the Hexapod from the crane only when the base plate of the Hexapod is securely affixed to the surface Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Only lift and align the Hexapod using a crane The crane must lift the Hexapod by 3 ring bolts and shackles affixed to the moving platform of the Hexapod p 21 Hold the Hexapod only by the base plate to position it on a surface Before installing the load determine the limit value for the load of the Hexapod with a simulation program p 29 Before installing the load determine the work space of the Hexapod with a simulation program p 29 Make sure that the installed load observes the limit value determined with the simulation program Avoid high forces and torques on the
31. igure 21 Top view on Hexapod the arrows mark the three M12 mounting holes with 24 mm depth to be used for transport 3 Fix three ring bolts to the three M12 mounting holes with 24 mm depth in the moving platform of the Hexapod see figure above 4 Connect each ring bolt with a shackle Figure 22 Lifting the Hexapod at its moving platform using three ring bolts and three shackles 48 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 5 Connect the shackles to the corresponding load interfaces of the crane see figure above Verify that the chain of the crane is only slightly under tension If the tension is too strong impermissible forces can be exerted on the Hexapod in the next step 6 Uninstall the Hexapod from the surface to which it is mounted When the Hexapod is mounted on a tilted surface Carefully lift the Hexapod by the crane during the uninstalling procedure so that the chain of the crane remains under tension and the Hexapod cannot slip ina sudden motion a Loosen the screws with which the Hexapod is mounted on the surface b Remove the screws Figure 23 Lifting the Hexapod by a crane 7 lf required lift the Hexapod to a suitable height see figure above 8 Pack the Hexapod in a plastic foil to protect it against dirt lt is recommended to reuse compound foil in which the Hexapod was delivered H 845 D11 Modular Hexapod System MS222E Version
32. issible Load and Working Space cccccceccssseeeeeeeeeeeeeneeeeees 29 Attaching the Snap On Ferrite Suppressors cccseeeeeeeeeeeeeeeeeeeeeeeeeeeeeaeeeeeeeeseeeeaas 30 Mounting the Hexapod on a Surface ccccccccccscssssseeeeeeeeeceeeeeeeceeeessseaaeeeeeeeeeessaaaeeees 32 Grounding the Hexapod cccccccseesecceccseeeeeeecceeseeeeceseaeeeeeseaueeesseeeaseeeessaeeeeesssaaess 35 Affixing the Load to the Hexapod cccccccccsssseeeeecaeeeeeeeseeeseeeessaeeeeeeessaaaeeeesesaaeeeees 35 Connecting the Cable Set to the Hexapod cecccccccseeeeceeeeaeeeeeeeeeaeaeeeeeesaeaseeeeesaaees 38 5 1 General Notes on Installation The Hexapod can be mounted in any orientation A Crushing hazard Depending on the tilting angle of the surface to which the Hexapod is to be mounted the Hexapod can slip tilt or fall from the surface There is a risk of injuries if parts of your body get caught be the Hexapod and the Hexapod can be damaged gt Position the surface where the Hexapod is to be mounted horizontally If the surface where the Hexapod is to be mounted cannot be positioned horizontally gt Keep any part of your body away from areas where they can get caught by the Hexapod gt Disconnect the Hexapod from the crane only when the base plate of the Hexapod is securely affixed to the surface H 845 D11 Modular Hexapod System MS222E Version 1 1 0 27 5 Installation PI NOTICE I
33. ith base plate affixing to crane Damage due to chains of crane When the base plate of the Hexapod is affixed to the crane the chains of the crane can cause damage to the Hexapod gt Only affix the base plate of the Hexapod to the crane with a suitable crane set up that prevents the chains of the crane from exerting impermissible forces on the Hexapod The chains of the crane must not touch the struts and the moving platform of the Hexapod H 845 D11 Modular Hexapod System MS222E Version 1 1 0 21 4 Unpacking 22 Accessories 3 ring bolts of appropriate size 3shackles of appropriate size Crane appropriate to carry a load of 120 kg Unpacking the Hexapod a i Figure 10 Hexapod package as delivered with lid cardboard removed 1 Open the cardboard box see figure above Figure 11 Hexapod package with upper hard foam insert removed 2 Remove the hard foam insert from the moving platform see figure above Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 4 Unpacking Figure 12 Hexapod package with surrounding cardboard box removed 3 Remove the cardboard box that surrounds the Hexapod see figure above Figure 13 Unwrapped Hexapod keep the foil for repacking 4 Remove the compound foil that the Hexapod is wrapped in Remove the foil in a way that allows a future repacking of the Hexapod H 845 D11 Modular Hexapod System MS222E Ve
34. ller side 30 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 5 Installation INFORMATION Two snap on ferrite suppressors 000045400 are included in the scope of delivery of the Hexapod system Both snap on ferrite suppressors are for permanent attachment one snap on ferrite suppressor is for the I O data cable connection for signals of brakes limit switches and system status The other snap on ferrite suppressor is for the other data cable The snap on ferrite suppressors ensure the electromagnetic compatibility of the Hexapod system gt Attach each snap on ferrite suppressor to the corresponding cable at the controller side before you connect the Hexapod to the Hexapod controller for the first time Tools and accessories 2 snap on ferrite suppressors 000045400 in the scope of delivery p 14 Permanently attaching the snap on ferrite suppressors 1 Place the KO40B0088 data transmission cable close behind the MDR68 m connector that is intended for connection to the controller into the opened Snap on ferrite suppressor See Figure 17 2 Close the snap on ferrite suppressor a Align the cable so that it is not squeezed when the snap on ferrite suppressor is closed b Carefully press the two halves of the snap on ferrite suppressor around the cable until the lock engages 3 Place the KO40B0430 data transmission cable for brakes limit switches and system status clo
35. mode p 43 Check if the output voltage of the external power supply is out of the required range low limit of output voltage is checked only when servo mode is on Limit switch check For more information see Troubleshooting on p 55 and the user manual of the Hexapod controller 3 5 5 Motion The platform moves along the translation axes X Y and Z and around the rotation axes U V andW 16 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 3 Product Description Figure 6 XYZ coordinate system and rotations to the rotation coordinates U V and W The coordinate system is depicted above the platform for better clarity Translation Translations take place in the spatially fixed XYZ coordinate system The translation axes meet at the origin of the XYZ coordinate system 0 0 0 For more information see the glossary p 73 Rotation Rotations take place around the rotation axes U V and W The rotation axes meet at the pivot point Further information on the pivot point is found in the glossary p 73 In contrast to the spatially fixed translation axes the rotation axes and thus the pivot point as well move along with the platform see also the example below for consecutive rotations A given rotation in space is calculated from the individual rotations in the sequence U gt V gt W INFORMATION The dimensional drawing p 64 contains the following Alignment of th
36. mpermissible mechanical load and collisions Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Only lift the Hexapod using a crane The crane must lift the Hexapod by 3 ring bolts and shackles affixed to the moving platform of the Hexapod see Figure 16 on p 25 Before installing the load determine the limit value for the load of the Hexapod with a simulation program p 29 The limit values determined with the simulation program are only valid when the Hexapod controller has the servo mode switched on for the axes of the moving platform of the connected Hexapod Before installing the load determine the working space of the Hexapod with a simulation program p 29 The limits of the working space vary depending on the current position of the Hexapod translation and rotation coordinates and the current coordinates of the pivot point Avoid high forces and torques on the moving platform during installation When the Hexapod is mounted on a tilted surface Verify that the Hexapod is lifted by the crane without the Hexapod slipping from the tilted surface in a sudden motion Verify that the chain of the crane remains under slight tension If the tension is too strong impermissible forces can be exerted on the Hexapod Ensure an uninterruptible power supply in order to prevent an unintentional deactivation of the Hexapod system Make
37. n 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 7 Maintenance NOTICE Sudden impermissible forces during demounting Hexapod from tilted surface When the Hexapod slips from a tilted surface while it is connected to the crane impermissible forces can occur which can cause damage to the Hexapod gt Position the surface where the Hexapod is mounted horizontally If the surface where the Hexapod is mounted cannot be positioned horizontally gt Lift the crane carefully while loosening the screws with which the base plate of the Hexapod is mounted to the surface Prerequisites If possible You have positioned the surface where the Hexapod is mounted horizontally Accessories Original packaging including pallet cardboard box and hard foam inserts 3 ring bolts of appropriate size 3 shackles of appropriate size Crane appropriate to carry a load of 120 kg Packing the Hexapod for transport 1 Command the Hexapod to move to the reference position X Y Z U V WE 0 2 Prepare to uninstall the Hexapod system e Power down the Hexapod controller f Switch off the Hexapod power supply g Remove the load from the moving platform of the Hexapod h Remove the two data transmission cables and the power supply cable from the Hexapod controller the Hexapod power supply and the Hexapod H 845 D11 Modular Hexapod System MS222E Version 1 1 0 47 7 Maintenance F
38. n the figure above 2 Lift the Hexapod to a suitable height 3 Align the Hexapod to the surface Note The front side of the Hexapod with the connections to controller and power supply is perpendicular to the negative motion direction of the X axis p 64 When the Hexapod is to be mounted on a tilted surface Verify that the Hexapod is lifted by the crane without the Hexapod slipping from the tilted surface in a sudden motion Verify that the chain of the crane remains under slight tension If the tension is too strong impermissible forces can be exerted on the Hexapod 4 Mount the Hexapod on the six counter sunk holes with 13 5 mm in the base plate using the included screws 5 Disconnect the three shackles from the crane 6 Remove the three shackles from the ring bolts 34 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 5 Installation 7 Remove the three ring bolts from the three M12 mounting holes in the moving platform of the Hexapod 5 5 Grounding the Hexapod If a functional grounding is required for potential equalization you can ground the Hexapod either via the power supply cable or you can proceed as follows 1 Connect the base plate to the grounding system For connection use the supplied accessories p 14 and the M4 hole marked with the ground connection symbol see dimensional drawing p 64 2 Connect the moving platform to the groundi
39. n the surface where the Hexapod is mounted horizontally If the surface where the Hexapod is mounted cannot be positioned horizontally gt Keep any part of your body away from areas where they can get caught by the Hexapod gt Loosen the screws with which the Hexapod is mounted on the surface only when the Hexapod is connected to the crane by the three ring bolts and shackles NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only transport the Hexapod using a crane The crane must lift the Hexapod by 3 ring bolts and shackles affixed to the Hexapod You have two options to fix the ring bolts and shackles Recommended Use the 3xM12 mounting holes with a depth of 24 mm of the moving platform of the Hexapod as labeled in Figure 21 on p 48 Use the 3xM12 mounting holes with a depth of 50 mm of the base plate of the Hexapod see Figure 31 on p 66 NOTICE l With base plate affixing to crane Damage due to chains of crane When the base plate of the Hexapod is affixed to the crane the chains of the crane can cause damage to the Hexapod gt Only affix the base plate of the Hexapod to the crane with a suitable crane set up that prevents the chains of the crane from exerting impermissible forces on the Hexapod The chains of the crane must not touch the struts and the moving platform of the Hexapod 46 Versio
40. ng system Use one of the mounting holes in the moving platform p Figure 19 for connection or If the moving platform and the load are conductively connected with each other connect the load to the grounding system 5 6 Affixing the Load to the Hexapod NOTICE Impermissible mechanical load and collisions Impermissible mechanical load and collisions between the Hexapod the load to be moved and the surroundings can damage the Hexapod gt Make sure that the installed load observes the limit value resulting from the load test p 29 gt Avoid high forces and torques on the moving platform during installation gt Make sure that no collisions between the Hexapod the load to be moved and the surroundings are possible in the working space of the Hexapod H 845 D11 Modular Hexapod System MS222E Version 1 1 0 35 5 Installation P J NOTICE Screws that are too long The Hexapod can be damaged by excessively long screws gt When selecting the screw length observe the thickness of the moving platform or the depth of the mounting holes p 64 together with the load to be mounted gt Only use screws that do not project under the moving platform after being screwed in gt Only mount the Hexapod and the load on the mounting fixtures holes intended for this purpose NOTICE Excessive torque on Hexapod When the 3xM20 through holes are used for mounting a load an excessive torque may
41. ng the Hexapod for TranSport cccccssscccccessceeceeceeceeeeceseeeeceeseeeeeessaeeeessaaeees Replacing the Fuses of the Hexapod Power Supply cc ccccecesesceeeeeeeeeseeeeeeeeeees 51 Cleaning the Hexapod ccccccccccccesesseeceeeeeeeeeeeeseeceeeeeeeaeeeeseeeeeeessueaaeeceeeesssaaageeseess NOTICE Damage due to improper maintenance The Hexapod can become misaligned as a result of improper maintenance The specifications can change as a result p 59 gt Donot loosen any screws Depending on the operational conditions and the period of use of the Hexapod the following maintenance measures are required 7 1 Carrying out a Maintenance Run Frequent motions over a limited travel range can cause the lubricant to be unevenly distributed on the spindle gt Carry out a maintenance run over the entire travel range at regular intervals see user manual of the Hexapod controller The more often motions are carried out over a limited travel range the shorter the time between the maintenance runs has to be H 845 D11 Modular Hexapod System MS222E Version 1 1 0 45 7 Maintenance P I 7 2 Packing the Hexapod for Transport s Crushing hazard Depending on the tilting angle of the surface to which the Hexapod is mounted the Hexapod can slip tilt or fall from the surface There is a risk of injuries if parts of your body get caught by the Hexapod and the Hexapod can be damaged gt Positio
42. nly operate the Hexapod with a Hexapod controller whose configuration data is adapted to the Hexapod NOTICE Damage from collisions Collisions can damage the Hexapod the load to be moved and the environment gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod gt Do not place any objects in areas where they can get caught by moving parts gt Ifthe Hexapod controller malfunctions stop the motion immediately INFORMATION The Status LED of the Hexapod glows red when the limit switches of the Hexapod struts are activated or when the Hexapod coniroller has the servo mode switched off In order to deactivate the limit switches and to switch on the servo mode a successful reference move of the Hexapod is required 1 Start up the Hexapod system p 43 Start up also includes a reference move See user manual of the Hexapod controller 2 Ifthe Status LED remains red and or the reference move is not successfully performed Contact our customer service department p 57 42 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 6 Start Up INFORMATION When the output voltage of the Hexapod power supply falls below the lower limit of the permissible range the Status LED glows red and motion commands are not performed to protect the Hexapod from impermissible forces An error code is only set when the
43. om moving cables The Hexapod is controlled with the Hexapod controller which is delivered with the Hexapod The position commands to the Hexapod controller are entered in Cartesian coordinates 3 2 System Components The Hexapod is delivered together with a Hexapod controller a power supply and a cable set H 845 D11 Modular Hexapod System MS222E Version 1 1 0 9 3 Product Description P J 10 Components of the H 845 D11 Hexapod system H845B0008 Modular Hexapod with direct drive 50 mrad s 1000 kg load 6 D Hexapod controller control of 2 additional servo motor axes included TCP IP and RS 282 interface 19 chassis with additional I O bracket M850B0384 Power supply of the Hexapod 110 230 V 24 V 700 VA 1 sub D3W3f connector 3763 2 Power cords for power supply of Hexapod and for Hexapod controller K040B0088 Data transmission cable MDR68m to MDR68m 1 1 9 m KO60B0140 Power supply cable sub D3W3m to sub D3W3f 1 1 3 m K040B0430 Data transmission cable for brakes limit switches and system status sub D25m to sub D25f 1 1 9 m 000045400 2 Laird snap on ferrite suppressors Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 3 Product View 3 3 1 Hexapod Figure 1 H845B0008 Hexapod 1 Moving platform 2 Strut 3 Base plate 4 Status LED Status details see below 5 Panel plug for data transmission cable Digital I O
44. power supply cable to the 24 VDC sub D3W3 panel plug in the base plate of the Hexapod Do not use force 4 Connect the sub D3W3 connector of the power supply cable to the Power Out1 socket of the power supply Electronics Cable Set and Power Supply Mechanics C 887 11 1 female male Power Supply Figure 20 Connection diagram for cable set 1 K040B0088 Data transmission cable MDR68m to MDR68m 9 m 2 K040B0430 Data transmission cable for brakes limit switches and system status sub D25m controller side to sub D25f Hexapod side 9m 3 K060B0140 Power supply cable sub D3W3m power supply side to sub D3W3f Hexapod side 3 m H 845 D11 Modular Hexapod System MS222E Version 1 1 0 39 PIEZO NANO POSITIONING WWW PI WS 6 Start Up 6 Start Up In this Chapter General Notes on Start Up cccceccceccccececseeeseeeeeeeesseeeeeeeeeeeeesseeeaeeeeeeesssaaaaeeeeeeees 41 Starting Up the Hexapod System cccccccccssesseeeceeeeeeeeeeeeeeeceeesseueeseeeeeeeessaaaaeseeeeees 43 Switching Off the Hexapod SySteM ccccccccsesesecceeeeseeeeeseeeeeeeeeeaeeeeeeeeeeesseaeeeeeeeeees 44 6 1 General Notes on Start Up 7 J Risk of crushing by moving parts There is a risk of injuries caused by crushing which can occur between the moving parts of the Hexapod and a stationary part or obstacle gt Keep any part of your body away from areas where they can get caught by moving parts N
45. program Hexapod Simulation Software is installed For more information see the manual of the Hexapod controller Determining the working space and permissible load of the Hexapod gt Follow the instructions in the manual of the Hexapod controller to determine the working space and the limit value for the load of the Hexapod with the simulation program The limit values in the following table are for orientation They apply when the center of mass is at or when the gravital forces are exerted on the origin of the XYZ coordinate system 0 0 0 The limit values are given for horizontal mounting and for any orientation Servo mode switched on Servo mode switched off for for Hexapod Hexapod Max load capacity Max holding force Mounting position of Mounted Any Mounted Any the base plate horizontally orientation _ horizontally orientation 1000 kg 300 kg 10000 N 3000 N If you need help in determining the limit value for the load or determining the working space gt Contact our customer service department p 57 H 845 D11 Modular Hexapod System MS222E Version 1 1 0 29 5 Installation 5 3 Attaching the Snap On Ferrite Suppressors 1 1 Figure 17 Proper location of snap on ferrite suppressors 1 Snap on ferrite suppressor 000045400 2 Connector of data transmission cable for brakes limit switches and system status sub D25 m controller side 3 Connector of data transmission cable MDR68 m contro
46. rect mounting can warp the base plate Warping of the base plate reduces the accuracy gt Mount the Hexapod on an even surface The recommended evenness of the surface is 100 um 32 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 600 Figure 18 Mounting holes in the base plate 3 x M12 through holes with 50 mm depth M4 screw for grounding 11 x Counterbore holes with 17 5 mm for M16 6 x Counterbore holes with 13 5 mm for M12 KR MH H 845 D11 Modular Hexapod System MS222E Version 1 1 0 5 Installation 33 5 Installation P J Prerequisite v You have read and understood the General Notes on Installation p 27 v If possible Position the surface where the Hexapod is to be mounted horizontally v You have connected the Hexapod to a crane via 3 ring bolts and shackles as described in Unpacking p 21 Tools and accessories Allen wrench 10 0 and six of the supplied screws p 14 Optional 11 M16x60 screws suitable for holes with 17 5 mm not included in the scope of delivery Mounting the Hexapod 1 Make the necessary holes in the surface 6counterbore holes with 13 5 mm for mounting with M12x60 screws see figure above Optional 11 counterbore holes with 17 5 mm for M16x60 screws The arrangement of the six mounting holes as well as the 11 mounting holes with 17 5 mm in the base plate of the Hexapod can be found i
47. ro positions If the other linear or rotational coordinates are not zero the available travel may be less 10 1 2 Maximum Ratings of Hexapod The Hexapod is designed for the following operating data Maximum Operatin f p g Maximum Power Frequency Unloaded Maximum Operating Voltage Consumption 60 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Data Table of Hexapod Power Supply Hexapod Power Supply Output voltage 24 V DC 20 A max Input voltage 110 230 V AC 50 60 Hz Input power 700 W Output power 500 W Fuses 2x IEC T 8 AL with 250 V rated voltage Dimensions 236 mm x 132 mm x 296 mm handles Mass 4 7 Kg 10 1 4 Maximum Ratings of Hexapod Power Supply The power supply is designed for the following operating data Maximum Operatin P g Maximum Output Frequency Unloaded Maximum Operating Voltage H 845 D11 Modular Hexapod System MS222E Version 1 1 0 61 10 Technical Data P I 10 2 Ambient Conditions and Classifications 10 2 1 Ambient Conditions and Classifications for Hexapod 62 Transport 25 C to 85 C temperature Storage temperature 10 C to 70 C Maximum relative humidity of 80 at temperatures of up to 31 C linearly decreasing until relative humidity of 50 at 40 C Degree of protection IP20 according to IEC 60529 Area of application For indoor use only Maximum altitude
48. rsion 1 1 0 23 4 Unpacking Figure 14 Top view on Hexapod the arrows mark the three M12 mounting holes with 24 mm depth to be used for transport 5 Fix three ring bolts to the three M12 mounting holes with 24 mm depth in the moving platform of the Hexapod see Figure 14 6 Connect each ring bolt with a shackle f Shackle Figure 15 Lifting the Hexapod at its moving platform using three ring bolts and three shackles 7 Connect the shackles to the corresponding load interfaces of the crane see figure above 24 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System 4 Unpacking PIEZO NANO POSITIONING WWW PI WS Figure 16 Lifting the Hexapod by a crane 8 Lift the Hexapod out of the cardboard box 9 Remove the hard foam insert from the base plate of the Hexapod 10 Compare the contents against the items covered by the contract and against the packing list If parts are incorrectly supplied or missing contact PI immediately 11 Inspect the Hexapod for signs of damage If you notice signs of damage contact PI immediately 12 Keep all packaging materials in case the product needs to be transported again later H 845 D11 Modular Hexapod System MS222E Version 1 1 0 25 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ccccccccccccecccssesseeeeeeeeeeeeeeseeceeeeesseeeeeeeeeeeeessaaaaeeeeeeees 27 Determining the Perm
49. se behind the sub D25 m connector that is intended for connection to the controller into the opened snap on ferrite Suppressor see Figure 17 4 Repeat step 2 for the second snap on ferrite suppressor H 845 D11 Modular Hexapod System MS222E Version 1 1 0 31 5 Installation P J 5 4 Mounting the Hexapod on a Surface NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only transport the Hexapod using a crane The crane must lift the Hexapod by 3 ring bolts and shackles affixed to the Hexapod You have two options to fix the ring bolts and shackles Recommended Use the 3xM12 mounting holes with a depth of 24 mm of the moving platform of the Hexapod as labeled in Figure 14 on p 24 Use the 3xM12 mounting holes with a depth of 50 mm of the base plate of the Hexapod see Figure 31 on p 66 gt Hold the Hexapod only by the base plate to position it on a surface NOTICE a With base plate affixing to crane Damage due to chains of crane When the base plate of the Hexapod is affixed to the crane the chains of the crane can cause damage to the Hexapod gt Only affix the base plate of the Hexapod to the crane with a suitable crane set up that prevents the chains of the crane from exerting impermissible forces on the Hexapod The chains of the crane must not touch the struts and the moving platform of the Hexapod NOTICE Warping of the base plate E Incor
50. seceeeeessaeeeeeeeeeeessaaaeeeeeeees 3 2 1 Intended Use The modular Hexapod in short Hexapoa is a laboratory device in accordance with DIN EN 61010 1 It is intended to be used in interior spaces and in an environment that is free of dirt oil and lubricants Based on its design and realization the Hexapod is intended for positioning adjusting and shifting of loads in six axes at various velocities The Hexapod is part of a Hexapod system The intended use of the Hexapod is only possible in connection with the Hexapod controller which is part of the Hexapod system and coordinates all motions of the Hexapod and the Hexapod power supply 2 2 General Safety Instructions The H 845 D11 Hexapod system is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the Hexapod system gt Only use the Hexapod system for its intended purpose and only use it if it is in a good working order Read the user manuals Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the Hexapod system H 845 D11 Modular Hexapod System MS222E Version 1 1 0 3 2 Safety PI 2 2 1 Organizational Measures User Manual gt Always keep this user manual next to the Hexapod system lf the user manual is lost or damaged contact our customer service departmen
51. servo mode of the Hexapod controller is activated gt Check the power supply and observe the permissible load and workspace p 29 INFORMATION The output voltage of the Hexapod power supply is deactivated automatically when the internal temperature sensor detects temperatures above 70 C 1 Wait afew minutes to let the power supply cool down 2 Switch the power supply off and on again 6 2 Starting Up the Hexapod System INFORMATION The brakes of the Hexapod are activated when the Hexapod controller has the servo mode switched off The servo mode is switched off in the following cases Hexapod controller is switched off Hexapod controller is rebooting Servo mode is switched off by an SVO command for command description see the user manual of the C 887 Hexapod controller The allowable position error of a strut is exceeded Atleast one of the limit switches of a strut is activated The output voltage of the Hexapod power supply is below or above the permissible output voltage range The Hexapod power supply is switched off H 845 D11 Modular Hexapod System MS222E Version 1 1 0 43 6 Start Up pP J INFORMATION The cube on the base plate item 8 of Figure 1 on p 11 visualizes the orientation of the coordinate system This can be useful for example to visualize a motion of the Hexapod when the Hexapod base plate is mounted other than horizontal Prerequisite v You have read and understood
52. smission between the Hexapod and the Hexapod controller MDR68 socket at base plate of Hexapod All signals TTL 68 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Pin assignment e oe o __ St r H 845 D11 Modular Hexapod System MS222E Version 1 1 0 69 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal Since 13 August 2005 in accordance with the EU directive 2002 96 EC WEEE electrical and electronic equipment can no longer be disposed of in the member states of the EU with other wastes When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 D 76228 Karlsruhe Germany X H 845 D11 Modular Hexapod System MS222E Version 1 1 0 71 PIEZO NANO POSITIONING WWW PI WS 12 Glossary 12 Glossary Work space The entirety of all combinations of translations and rotations that the Hexapod can approach from the current position
53. sure that no collisions between the Hexapod the load to be moved and the environment are possible in the working space of the Hexapod NOTICE gt gt Damage to the Hexapod power supply The Hexapod power supply can be damaged due to disturbed heat dissipation Install the Hexapod power supply only with its bottom side equipped with rubber feet facing downwards Place the Hexapod power supply in a location with adequate ventilation to prevent internal heat build up Allow at least 15 cm clearance from the front and the rear of the unit and 1 cm from the bottom ensured by the feet of the chassis Never cover any ventilation openings as this will impede ventilation 28 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 5 Installation INFORMATION The optionally available PlVeriMove software for collision checking can be used to mathematically check possible collisions between the Hexapod the load and the environment The use of the software is recommended when the Hexapod is located in a limited installation space and or operated with a spatially limiting load For details regarding the activation and configuration of the PlVeriMove software for collision checking see Technical Note C887T0002 included in the scope of delivery of the software 5 2 Determining the Permissible Load and Working Space Tools and accessories PC with Windows operating system on which the simulation
54. t p 57 Add all information given by the manufacturer to the user manual for example supplements or Technical Notes Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can lead to injury as well as property damage Only install and operate the Hexapod system after having read and understood this user manual Personnel Qualification The Hexapod system may only be started up operated maintained and cleaned by authorized and qualified staff 2 2 2 Safety Measures during Transport There is a risk of injuries caused by crushing since the Hexapod is very heavy and capable of exerting high forces gt Keep any part of your body away from areas where they can get caught by the Hexapod An impermissible mechanical load can damage the Hexapod gt gt Only send the Hexapod in the original packaging Only transport the Hexapod using a crane The crane must lift the Hexapod by 3 ring bolts and shackles affixed to the Hexapod p 21 When the base plate of the Hexapod is affixed to the crane the chains of the crane can cause damage to the Hexapod gt Only affix the base plate of the Hexapod to the crane with a suitable crane set up that prevents the chains of the crane from exerting impermissible forces on the Hexapod The chains of the crane must not touch the struts and the moving platform of the Hexapod Version 1 1 0 MS222E H 845 D11 Modular H
55. und the W axis tilts the rotation axes U and V H 845 D11 Modular Hexapod System MS222E Version 1 1 0 19 3 Product Description P J Figure 9 Rotation around the W axis Ii Platform in reference position Platform position U 10 V 10 W 10 U and V parallel to the platform level W vertical to the platform level For more data on the travel ranges see the Specifications p 59 section 20 Version 1 1 0 MS222E H 845 D11 Modular Hexapod System PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking The Hexapod is delivered in a special packaging with adapted foam inserts A Risk of crushing There is a risk of injuries caused by crushing since the Hexapod is very heavy and capable of exerting high forces gt Keep any part of your body away from areas where they can get caught by the Hexapod NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only transport the Hexapod using a crane The crane must lift the Hexapod by 3 ring bolts and shackles affixed to the Hexapod You have two options to fix the ring bolts and shackles Recommended Use the 3xM12 mounting holes with a depth of 24 mm of the moving platform of the Hexapod as labeled in Figure 14 on p 24 Use the 3xM12 mounting holes with a depth of 50 mm of the base plate of the Hexapod see Figure 31 on p 66 NOTICE W

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