X-TMF-5861E-MFM-eng Cover.pmd
Contents
1. m 1 1 1 3 Specific Sicilia A 1 1 Section 2 Installation 2 1 2 1 2 2 Recommended Storage Practice 2 1 O EE EE EE EE EE 2 2 2 4 Gas Connections essesi ee ne dn teu id d dg dee dci 2 2 2 5 s kes teke Seed 2 2 2 6 Fiter inenen nende ane 2 4 27 Electucalnterfacing EE 2 5 Section 3 Operation 3 1 Theory Of Operation tied A ee NERON 3 1 3 2 Operating Procedure 3 2 3 3 Zero Adjlustment EE 3 2 3 4 Calibration Procedure 3 3 3 5 Response Flow Output Signal 3 6 Section 4 Maintenance 4 1 ETE EE 4 1 4 2 Troubleshooting EE 4 1 4 3 Sensor TUDE EET 4 4 44 Disassembly and Assembly 4 4 4 5 Use of the Conversion Tables 4 6 4 6 RestictorSizng EE 4 9 Section 4 Parts List 5 1 GSTS LEE 5 1 Section A CE Certificate CE Certificate of Mass Flow A 1 Warranty Local Sales Service Contact Information Contents Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Figures Figure Page Number Number 2 1 Model 5861 DIMENSIONS 2 ini dir 2 3 2 2 D Type Connector Pin Arrang2. npoundedar vymAng zow mrag k a ta ono a TIC CE koAmSiov yiver and xpnomjoromoere kakbddio va p pet va zap ger 100 Ot s v eopor D rj vov kaAo ov va perdi Omp kion va kadodiov zov va akpod ktn o vSeons Tov rA yuatos tou KAANSIOU nA yua tov mP neL va GVVS ETOL HETOAMK va 600 360 po pes va KATOMYEL oe ye oonc O1 eivat Kodro zov XPTOLIOTOIOLVIAL va Oop xicrnc 100 va otv motoroinon CE Owp xion ap xel va kata yet yeioornc Tia mv EGVNKAELTTO Eyyeipidio A 3 A 4 Section A CE Certification Installatio
3. Approx 10 sccm Max Flow B Full Scale Less 10 sccm RESTRICTOR Figure 3 1 Flow Sensor Operational Diagram 3 2 Operating Procedure a Apply power to the flowmeter and allow approximately 45 minutes for the instrument to warm up and stabilize its temperature b Turn on the gas supply c Shut off flow to the meter and observe the flowmeter s output signal If the output is not x10mVac check for leaks and if none are found refer to the re zeroing procedure in Section 3 3 d Open valve to allow flow to pass through the meter Monitor the flow output signal 3 3 Zero Adjustment Each Model 5861E is factory adjusted to provide a 0 10mVadc signal at zero flow After initial installation and warm up in the gas system the zero flow indication may be other than the factory setting This is primarily caused by changes in temperature between our calibration laboratory and the final installation The zero flow reading can also be affected to a small degree by changes in line pressure and mounting attitude Installation and Operation Manual Section 3 Operation X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E To check zero always mount the controller in its final configuration and allow a minimum of 20 minutes for the temperature of the controller and its environment to stabilize Using a suitable voltmeter check the controller output signal If it differs from the factory setting adjust it by
4. Less than 3 seconds Section 1 Introduction Model 5861E Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Control Usable Range 50 to 1 Sensitivity to Mounting Attitude 10 5 F S maximum deviation from specified accuracy after rezeroing under 200 psig Temperature Sensitivity Zero Less than 0 075 F S per degree C Span Less than 1 0 F S shift from original calibration over 10 50 range Pressure Sensitivity 0 03 per PSI up to 200 PSIG Power Supply Sensitivity 0 09 full scale power supply voltage variation Output Signal to 5 into 3000 ohms or greater load Maximum ripple 3 mV Leak Integrity 1 x 10 atmosphere scc sec Helium Power Requirements 15 5 at 35 mA de 15 45 35 mA de 1 05 watts power consumption Materials of Construction Fittings and Transducer Assembly Wetted parts 316 stainless steel O rings and Gaskets Standard Viton fluoroelastomers and Buna N Optional Kalrez Electrical Connections D connector 15 pin type DA 15P Dimensions See Figure 2 1 Installation and Operation Manual Section 2 Installation X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E 2 1 Receipt of Equipment When the equipment is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at
5. Table 5 1 Model 5861E Replacement Parts List ltem No Qty Description Part Number Body and Stud Weldment 5 854 2 165 Endblock and Screen Weldment S 079 Z 200 AAA 5 4 Soc Hd Cap Screw 8 32x1 2 751 Z 105 AAO 1 4029 O rings Viton375 B 029 QTA 1 between endblock Buna 375 B 029 SUA 1 8 body Kalrez 375 B 029 TTA z Removable Sensor S 774 Z 508 BMA 2 4004 O rings Viton 375 B 004 QTA 2 for sensor Buna 375 B 004 SUA 2 Kalrez 375 B 004 TTA 9 2 Allen nut 45 40 573 Q 103 ACZ 10 2 Lockspring washer 5 962 D 005 AWA Fittings 1 4 Compression Swagelok 320 B 136 BMA 1 4 Male VCR Cajon 315 2 036 1 4 Male VCO Cajon 315 Z 035 BMA 3 8 Compression Swagelok 320 B 150 BMA 3 8 Male VCR 3 8 or 1 2 Tube 315 Z 034 BMA 3 8 Male VCO 3 8 or 1 2 Tube 315 2 033 906 O rings 375 906 for fittings 375 B 906 SUA 375 B 906 TTA San Blogg 1 OEA 753 L 056 AWZ PCA D Conn S 097 Y 847 AAA 35 1 026 O ring Viton 375 B 026 QTA 1 for Header assy Buna 375 B 026 SUA 1 Kalrez 375 B 026 TTA 37 Restrictor Assembly amp Components Refer to Section 4 6 for sizing Blinding Strip 852 7 213 EA Plug for Potentiometer Holes 620 Z 434 SXA NS 2 O ring VCO Gland Size 010 Viton 375 B 010 QTA 375 B 010 SUA Kalrez 375 B 010 TTA Interconnecting Cables Length D type NS 1 Connector on one end 5 Feet S 124 Z 361 AAA with no termination
6. Assembly Eee tt ses gt ssmW su Sess ss The Model 5861E Mass Flowmeter may be disassembled in the field by user for cleaning re ranging or servicing Disassemble and assemble the meter as fllows Note the model 5861E Mass Flowmeter should be disassembled and assembled in a clean enviromentto prevent particulate contamination A Disassembly The numbers in refer to the spare parts exploded view in Figure 5 1 ACAUTION Do not attempt to disassemble the mass flowmeter until pressure has been removed and purging has been performed Hazardous gas may be trapped in the valve assembly which could result in explosion fire or serious injury 1 Remove the three screws 27 attaching the electronics cover and loosen the upper jack post on the D Connector Remove the electronics cover 40 ACAUTION Be careful not to stress the sensor lead wire to sensor assembly junction when removing the sensor connector from the PC board If the sensor lead wires are stressed an open in the sensor wiring could result 2 Unplug the sensor connector from the PC Board Remove the two screws securing the bracket 26 and PC Board 28 Remove the bracket and PC Board 3 Remove the two allen nuts 9 using an 1 8 allen wrench and washers 10 securing the sensor assembly 7 Remove the sensor assembly Note Do not attempt to disassemble the sensor assembly ACAUTION Do not scratch the O ring sealing surface 4 Remov
7. Note Not used for a 5861E Figure 3 3 Adjustment Potentiometer Location ADJUST CLOCKHISE ADJUSTMENT CORRECT 1 ADJUST COUNTER CLOCKWISE w E ua D E a re om FV OUTPUT VOLTAGE VOLTS de e G o nm OUTPUT VOLTAGE VOLTS OUTPUT VOLTAGE VOLTS 2 1 1 2 Figure 3 4 Fast Response Adjustment Installation and Operation Manual Section 3 Operation X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E f Shut off the flow Connect the DVM positive lead to flow signal output pin 2 D connector and the negative lead to TP4 Readjust the zero potentiometer for an output OMV 2mV as necessary 9 Adjust flow rate for a flow signal output 50 2 500V and measure the flow rate Calculate the error as a percentage of full scale Full scale indicated measured error 100 flowrate flow rate full scale flow rate Note indicated flow rate can be found using the following formula indicated flow signal out x full scale flow rate 5 000 flow Example What is the percent of full scale error when full scale is equal to 50 slom Measured flow rate 25 75 slpm Indicated flow rate 25 slpm Full scale 25 25 75 _ aor 100 1 5 h Calculate the TP2 correction voltage error recorded in step g x 0 450 volts Example Error 1 5 TP2 correction voltage 1 5 x 0 450 0 675 volts New TP2 voltage 0 volts 0 675 0 675 v
8. Operation Manual Section 2 Installation X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E 2 7 Electrical Interfacing AA ESE EEES To insure proper operation the Model 5861E must be connected as shown in Figure 2 2 Note There are several functions on the printed circuit board which are not used by the Model 5861 E Avoid making connections marked in Figure 2 2 which are marked Also the plug in jumpers on printed circuit board are not used by the Model 5861E and have no effect on performance The following minimum electrical connections must be made for new installations Chassis Ground 0 5 Volt Signal Common 0 5 Volt Signal Output 15 Supply 15 Supply Power Supply Common 2 5 2 6 Section 2 Installation Model 5861E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Installation and Operation Manual Section 3 Operation X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E 3 1 Theory of Operation The thermal mass flow sensing technique used in the 5861E works as follows A precision power supply provides a constant power heat input P the heater which is located at the midpoint of the sensor tube Refer to Figure 3 1 At zero or no flow conditions the heat reaching each temperature sensor one upstream and one downstream of the heater is equal There
9. edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Installation and Operation Manual Section A CE Certification X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E Norsk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Vedrorende Vedlegg til h ndbok Referanse CE sertifisering av utstyr for massestromsm ling og regulering Dato Januar 1996 Til den det ang r Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt prever som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger e Brooks Instrument tilbyr levert med utstyret egnet kabel som m ter de krav som stilles til CE sertifisering e Dersom kunden selv velger kabel m kabel med fullstendig 100 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes met
10. removing the lower pot hold plug which is located closest to the controller body Adjust the zero potentiometer refer to Figure 3 3 until the desired output signal is obtained 3 4 Calibration Procedure NOTE 1 Calibration of the Model 5861E mass flowmeter requires the use of a digital voltmeter DVM a flow control valve or mass flow controller to set the flow rate and a precision flow standard calibrator such as the Brooks Vol U Meter It is recommended that the calibration be performed only by trained and qualified service personnel NOTE 2 If the mass flow controller is to be used on a gas other than the calibration gas apply the appropriate sensor conversion factor Refer to Section 4 5 a Adjust the anticipate potentiometer fully clockwise 20 turns Then adjust the anticipate potentiometer 10 turns counter clockwise to center the potentiometer This will provide a rough adjustment of this circuit and make the flow signal stable for calibration b Connect the DVM positive lead to the 0 5V signal output pin 2 D connector refer to Figure 3 2 and the negative lead to circuit common TP4 Adjust the zero potentiometer for an output of OmV 2mV Increase the flow rate until the flow signal output equals 5 000V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Adjust the linearity potentiometer for an output of 0 0V zero volts d Connect the DVM positive lead to
11. 10 Feet S 124 Z 362 AAA on other end 25 Feet S 124 Z 363 AAA 50 Feet S 124 Z 435 AAA NS 1 Connector on one end 5 Feet S 124 Z 576 AAA with Connector for Model 5870 10 Feet S 124 Z 577 AAA Series Secondary 25 Feet S 124 Z 578 AAA Electronics on other end 50 Feet S 124 Z 579 AAA 2 8 32 Mounting Screw 753 A 330 AWA QTA Viton SUA Buna TTA Kalrez AR As Required NS Not Shown eh 3 Hop Section 5 Parts List Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Table 5 2 Tool and Spare Part Kits for Model 5861E 5850 Series Service Tool Kit 5850 5860 Series Break Out Board Assembly P N S 778 D 017 AAA P N S 273 Z 668 AAA for D Connector version Permits the complete disassembly of the Installs directly between mass flow sensor Model 5861 for servicing controller and interconnecting cable Allows convenient access to all signals for easy Contains troubleshooting of system 1 O ring Removal Tool 1 Potentiometer Adjustment Tool 1 Break Out PC Board 1 Ball Point Allen Wrench 1 5 foot Extension Cable 1 Phillips Screw Driver 1 Terminal PC Board 1 Nut Driver for Orifice 1 Restrictor Removal Tool 1 Common Screw Driver 5851 5861E Header Removal Tool P N S 817 Z 036 AAA 5861E O ring Kit P N S 375 Z 334 QTA Viton SUA Buna TTA Kalrez AR As Required NS Not Shown Additional publications available MFC Contamination Control Val
12. 5 Use of the Conversion Tables AA SA AS A AAA ee AAA If a mass flowmeter is operated a gas other than the gas it was calibrated with a scale shift will occur in the relationship between the output signal and the mass flow rate This is due to the difference in heat capacities between the two gases This scale shift can be approximated by using the ratio of the molar specific heat of the two gases or sensor conversion factor A list of sensor conversion factors is given in Table 4 3 To change to a new gas multiply the output reading by the ratio of the gas factor for the desired gas to the gas factor for the calibration gas Actualgas Output x factor of the new gas flow rate reading factor of the calibrated gas Example The flowmeter is calibrated for 100slpm Nitrogen The desired gas is Carbon Dioxide The flowmeter output reading is 75 3 750 volts What is the actual carbon dioxide flow Actual CO 75 x 773 flow rate 1 58 35 slpm In order to calculate the conversion factor for a gas mixture the following formula should be used 100 100 100 Sensor P1 P2 P3 Conversion Sensor Sensor Sensor Factor Conversion Conversion Conversion Mixture Factor1 Factor2 Factor n Where P1 percentage of gas 1 by volume P2 percentage of gas 2 by volume Pn percentage of gas n by volume Example The desired gas is 20 Helium He and 80 Chlorine by volume The desi
13. A hypodermic needle filled with solvent is a convenient means to accomplish this 4 Deposits of silicon dioxide may be removed by soaking the internal parts in solution of 5 of hydrofluoric acid 5 parts hydrofluoric acid HF 95 parts water H O followed by Freon 5 Sintered type restrictor elements should be replaced as it is not always possible to adequately remove deposits from them Wire mesh and A C L F E type restrictor elements can be cleaned in an ultrasonic bath Refer to Section 4 7 for the correct restrictor to use 6 Blow all parts dry with dry nitrogen and reassemble Refer to Section 4 4b assembly 7 Purge the assembled controller with dry nitrogen Perform the calibration procedure in Section 3 4 9 When the flowmeter is reinstalled in the system the connections should be leak tested and the system should be purged with dry nitrogen for 30 minutes prior to start up to prevent the formation of deposits 00 4 3 Sensor Tube AAA AAA The sensor tube 15 part of a calibrated flow divider that is designed to operate within a preset gas flow range The sensor assembly may be removed or replaced by referring to Section 4 4 Disassembly and Assembly If the sensor assembly is cleaned and reinstalled a calibration check should be performed Refer to Section 3 4 Installation and Operation Manual Section 4 Maintenance X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E 4 4 Disassembly and
14. Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861 Mass Flowmeter 4 MASS FLOW SENSOR 9901 SERIES BROOKS www BrooksInstrument com IN ST RUMENT Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Essential Instructions Read this page before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Products Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Inform and educate your personnel in the proper installation operation and maintenance of the product Install your equipment as specified in the installation instructions of th
15. allet i pluggen eller nippelen i begge ender over 360 tilkoblet elektrisk jord Kort kantkontakter er normalt utf rt i kunststoff De tilh rende flatkabler m v re utf rt med fullstendig 100 skjerming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instruc es Refer ncia Certificac o CE do Equipamento de Fluxo de Massa Data Janeiro de 1996 O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma atenc o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certificac o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 100 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas met licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado blindagem ou
16. and white to body Open circuit on ohmmeter If either ground heater yellow or sensor common Pin 1 or 4 to body white are shorted an ohmmeter reading will be obtained White to red Nominal 1100 ohms reading Pin 4 to Pin 2 White to black Depending on temperature and Pin 4 to Pin 3 ohmmeter current Blue to yell Pin 5 2 Pin 1 Nominal 1200 ohm reading Note Remove the sensor connector from the PC Board for this procedure Table 4 2 Sensor Troubleshooting Installation and Operation Manual Section 4 Maintenance X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E A System Checks The Model 5861 is generally used as a component in gas handling systems which can be quite complex This can make the task of isolating a malfunction in the system a difficult one An incorrectly diagnosed malfunction can cause many hours unnecessary downtime If possible make the following system checks before removing a suspected defective mass flow controller for bench troubleshooting or return especially if the system 15 new 1 Verify a low resistance common connection and that the correct power supply voltage and signals are reaching and leaving the meter The Break out Board refer to Table 5 2 listed in section 5 will make this job much easier 2 Verify that the process gas connections have been correctly terminated and leak checked AWARNING If is becomes necessary to remove t
17. azione CE Lo schermo deve essere collegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Onderwerp Addendum voor Instructie Handboek Referentie CE certificering voor Mass Flow Meters amp Controllers Datum Januari 1996 Dames en heren Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen e Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 100 of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden worden Het scherm moet worden verbonden met aarde Card
18. bucha met lica em ambas as extremidades em 360 A blindagem deve terminar com a ligac o massa Os conectores Card Edge nao sao em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 100 nos termos da Certificac o CE A blindagem deve terminar com ligac o massa Relativamente configurac o da cavilha queiram consultar o Manual de Instruc es A 5 A 6 Section A CE Certification Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Suomi Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asia Lis ys K ytt ohjeisiin Viite Massam r mittareiden CE sertifiointi P iv m r Tammikuu 1996 Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEC Erityist huomiota on kuitenkin kiinnitett v signaalikaapelin valintaan Signaalikaapelin kaapelin l piviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka t ytt v t CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 100 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mik li mahdollista tulisi k ytt metallisia kaapeliliittimi kiinnitett ess suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla maado
19. dpotential zu verbinden Die Belegung der Anschlu pins k nnen Sie dem beigelegten Bedienungshandbuch entnehmen A 1 A 2 Section A CE Certification Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 English Brooks Instrument 407 West Vine St Hatfield 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification Mass Flow Equipment Date January 1996 The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 10096 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to a earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certificat
20. e appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources To ensure proper performance use qualified personnel to install operate update program and maintain the product When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance 15 being performed by qualified persons to prevent electrical shock and personal injury All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Directive is applicable within the European Economic Area EU plus Norway Iceland and Liechtenstein Pressure equipment can be traded freely within this area once the PED has been complied with e Section 1 of this manual contains important safety and operating instructions related to the PED directive Meters described this manual are in compliance with EN directive 97 23 EC module H Conformity Assessment All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are
21. e the sensor assembly O rings 8 from the flowmeter body 1 Using the Brooks O ring removal tool will help prevent scratching the sealing surface 5 Remove the inlet and outlet fittings 11 from the flowmeter body 1 Remove the O rings 19 from fittings 6 Remove the 4 screws 5 from the endblock 3 and carefully remove the end block 7 Remove the restrictor assembly 37 from the inlet side of the body 1 using the header removal tool part of service kit tool kit listed in section 5 Table 5 2 Note the rotational position of the restrictor assembly Refer to Section 4 6 4 5 4 6 Section 4 Maintenance Model 5861E Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 B Assembly ACAUTION Do not get Fomblin grease on the restrictor element 37 or hands This is a special inert lubricant which is not easily removed Note It is recommended that all O rings be replaced during meter assembly All O rings should be lightly lubricated with Fomblin grease part of O ring kit Section 5 prior to their installation 1 Examine all parts for signs of wear or damage replace as necessary 2 Place the restrictor O ring 35 onto the Header plate of the restrictor assembly 37 3 Install restrictor assembly into the restrictor cavityusing the header removal tool Rotating the assembly slightly assists installation It is important that the restrictor assembly is put
22. ed into five sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section 5 Parts List It is recommended that this manual be read in its entirety before attempting to operate or repair the Model 5861E The Brooks Model 5861E Mass Flowmeter is used widely in the Semiconductor as well as many other industries where manual electronic or computer controlled gas handling occurs The Model 5861E consists of two basic units a flow sensor and an integral electronic signal control system This combination produces a stable gas flow indication which eliminates the need to continuously monitor and compensate for changing gas pressures and temperatures WARNING Do not operate this instrument in excess of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment Flow Ranges Any full scale flow rate from 10 slpm to 100 slpm Nitrogen equivalent 200 slpm Standard pressure and temperature in accordance with SEMI Semiconductor Equipment and Materials Institute standard 0 and 101 3 kPa 760 Torr Ratings Maximum Operating Pressure 1500 psi 103 bar Ambient Operating Temperature 40 F to 150 5 C to 65 Non operating 13 F to 212 F 25 C to 100 C Performance Accuracy 1 full scale including linearity at calibrated conditions Repeatability 0 25 of rate Response Time
23. element or elements is marked on the calibration sheet whch was shiupped with the flow controller The replacement assembly should be replaced in the same orientatiion as the original restrictor Refer to Section 4 4 for assembly procedure 4 11 4 12 Section 4 Maintenance Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Porous Metal Element 2 0r 3 Roll Pin 3 Header Plate Figure 4 1 Restrictor Element Assembly NOTE BYPASS ORIENTATION P SURFACE REFERENCE Note the three element assembly contains two different porosities put the two like porosity elements atthe bottom and the unlike element at the top Figure 4 2 Restrictor Element Orientation in Meter Body Installation and Operation Manual Section 5 Parts List X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E 5 1 General AAA A EE When ordering parts please specify Brooks Serial Number Model Number Part Description Part Number Quantity Refer to Figure 5 1 and Tables 5 1 and 5 2 5 1 Installation and Operation Manual Section 5 Parts List 5 TE SES 2 mE WS o2 Se EE SE ni X c LLI co 00 LO O gt Figure 5 1 Model 5861E Parts Drawing 5 2 Installation and Operation Manual Section 5 Parts List X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E
24. ement 2 3 3 1 Flow Sensor Operational Diagram 3 2 3 2 Model 5861E Calibration Connections 3 4 3 3 Adjustment Potentiometer Location 3 4 34 Fast Response Adjustment ment ended a da ERE T E n he 3 4 4 1 Restrictor Element Assembly 4 10 4 2 Orientation in Meter Body AAA 4 10 5 1 Model 5861 Parts Drawing een ee 5 2 Tables Table Page Number Number 2 1 Recommended Filter Size 2 4 4 1 Bench Troubleshooting AA 4 2 4 2 Sensor Troubleshooting 4 2 4 3 Conversion Factors Nitrogen Base nnnnnnnnnnnnennnerenneernenneene 4 7 4 4 Restrictor Selection Guide AAA 4 11 5 1 Model 5861E Replacement Parts List 5 3 5 2 and Spare Part Kits for Boite 5 4 Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Section 1 Introduction Model 5861E 1 1 Purpose 1 2 Description 1 3 Specifications The Brooks Model 5861E Flowmeter is a mass flow measurement device designed for accurately measuring flows of gases This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks 5861E Mass Flowmeter This manual is organiz
25. eration Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Table 4 1 Bench Troubleshooting Possible Cause Check Corrective Action Output stays at O Volts Clogged Sensor Clean sensor Refer to cleaning procedure Section 4 4 regardless of flow Output signal stays at 6 8V Defective PC Board Replace PC Board Refer to Section 4 4 and there is no flow through the meter Defective Sensor Replace Sensor Assembly Refer to Section 4 4 Meter grossly out of calibration Partially clogged sensor Clean sensor refer to the cleaning procedure Flow is higher than indicated Meter grossly out of calibration Partially clogged restrictor Replace restrictor Refer to Section 4 4 Flow is lower than indicated Meter output oscillates Anticipate potentiometer out of adjustment Adjust anticipate potentiometer Refer to Section 3 4 Faulty pressure regulator Check regulator output Defective PC Board Replace PC Board Refer to Section 4 4 SENSOR SCHEMATIC WIRE ensor COLOR FUNCTION Connector White n Sensor common Yellow Heater Blue Heater common Upstream Hed temperature sensor Su Downstream Black temperature sensor Sd Note Sensors manufactured before 9 88 used a wire harness interconnect newer sensors use a Flex cable Flex Circuit Wire Numbers OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Yellow
26. fore the temperatures T1 and T2 are equal When gas flows through the tube the upstream sensor is cooled and the downstream sensor is heated producing a temperature difference The temperature difference T2 T1 is directly proportional to the gas mass flow The equation is AT A P C m Where AT temperature difference T2 T1 C specific heat of the gas at constant pressure KJ kg 9K P heater power kJ s m mass flow kg s A constant of proportionality S K kJ Abridge circuit interprets the temperature difference and a differential amplifier generates a linear 0 5 Vdc signal directly proportional to the gas mass flow rate The flow restrictor shown in Figure 3 1 performs a ranging function similar to a shunt resistor in an electrical ammeter The restrictor provides a pressure drop that is linear with flow rate The sensor tube has the same linear pressure drop flow relationship The ratio of the restrictor flow to the sensor tube flow remains constant over the range of the meter Different restrictors have different pressure drops and produce controllers with different full scale flow rates The span adjustment in the electronics affects the fine adjustment of the controller s full scale flow 3 1 3 2 Section 3 Operation Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 To Power Supply T T2 Upstream Downstream Temperature Temperature Flow A
27. gas flow through the sensor Each restrictor maintains the ratio of sensor flow to restrictor flow however the total flow through each restrictor is different Different restrictors micron porosity and active area have different pressure drops and produce meters with different full scale flow rates For a discussion of the interaction of the various parts of the meter you are urged to review Section 3 1 Theory of Operation If the restrictor assembly has been contaminated with foreign matter the pressure drop vs flow characteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the restrictor assembly when the mass flowmeter is to be calibrated to a new full scale flow rate Restrictor assembly replacement should be performed only by trained personnel The tools required for the removal replacement procedure are as follows Appropriate size wrench for the removal of the inlet process connection Restrictor removal tool contained in service tool kit P N S 778 D 017 AAA Restrictor O ring refer to the spare parts Section 5 for the correct part number The Model 5861E Mass Flowmeter utilizes porous metal restrictor assemblies for all flow rates Restrictor elements with porosities of 40 to 60 microns are used in different combinations Up to three restrictors elements can be placed in one assembly These restrictors are assembled by pressing the porous metal elements into the header plate When
28. he electrical components Install in such a manner that permits easy removal if the instrument requires cleaning When used with reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the meter purged with dry Nitrogen before use d The Model 5861 Mass Flowmeter can be installed in any position However mounting orientations other than the original factory calibration see data sheet will result in a 0 5 maximum full scale shift after re zeroing e When installing Flowmeters be aware that sharp abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy If possible have at least 10 pipe diameters of straight tubing upstream of the Model 5861E Mass Flowmeter 2 6 In Line Filter DEE It is recommended that an in line filter be installed upstream from the controller to prevent the possibility of any foreign material entering the flow sensor or control valve The filtering element should be replaced periodically or ultrasonically cleaned Table 2 1 Recommended Filter Size Maximum Flow Rate Recommended Filter Size Above 30 slpm 30 micron Note The above lists the maximum recommended porosity for each flow range lt is recommended that the minimum micron porosity that does limit the full scale flowrate be used Installation and
29. he flowmeter from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the flowmeter thoroughly with a dry inert gas such as Nitrogen before disconnecting the gas connections Failure to correctly purge the flowmeter could result in fire explosion or death Corrosion or contamination of the mass flowmeter upon exposure to air may also occur Bench Troubleshooting 1 Properly connect the mass flow controller to a 15 Vdc power supply and connect an output signal readout device 4 1 2 digit voltmeter recommended to Pins 2 and 10 D connector Refer to Figure 2 2 Apply power and allow the flowmeter to warm up for 45 minutes Do not connect to a gas source at this time Observe the output signal and if necessary perform the zero adjustment procedure Section 3 3 If the output signal will not zero properly refer to the sensor troubleshooting section and check the sensor If the sensor is electrically functional the printed circuit board is defective and will require replacement 2 Connect the flowmeter to a source of the gas on which it was originally calibrated Increase the flow until 100 indication 5 00Vdc 15 achieved Vary the flow rate over the 2 to 100 range and verify that the output signal follows the flow rate If possible connect a flow measurement device in series with the mass flowmeter to observe the actual flow behavior and verify the accurcy of the mass flometer If the mass flo
30. ignal stability may not be achieved If one of the limits is reached check the restrictor sizing Refer to section 4 6 1105 1 Vdc 0 to 20 mA 0 mA 4 to 20 mA 0 mA In the Safe State the valve will be unpowered This means that for Normally Closed valves the valve will stay closed and for Normally Open valves the valve will stay open 3 5 Response Flow Output Signal res ee ee To achieve the proper response characteristics the response compensation circuit must be adjusted This adjustment is performed by observing the output signal of the meter when the flow is suddenly stopped Place a metering valve upstream of the Model 5861E to control the flow rate A Brooks NRS precision metering valve is well suited for this application Also place a fast acting shut off valve immediately downstream of the flowmeter A solenoid valve is ideal for this but a manual toggle valve will do Keep the length of interconnecting tubing as short as possible between the valves and the Model 5861E since the tubing can have a dampening effect on the flow and the gas may not stop flowing the instant the downstream valve is closed as desired Adjustment of the fast response circuit will not alter the steady state accuracy of the flowmeter as adjusted in Section 3 4 Note This procedure requires an oscilloscope chart recorder or a DVM with a sample speed three samples per second or greater to monitor the rate of change of the output signal dur
31. in compliance with category II Ill of PED Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP ESD Electrostatic Discharge ACAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibit early failure Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E Dear Customer We appreciate this opportunity
32. ineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas B 1 888 554 FLOW Europe Z 31 318 549 290 Within Netherlands Z 0318 549 290 Asia 011 81 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS 150 Brooks ino Brooks Instrument LLC C 4 9001 QUALITY Ausimont SYSTEM A de DuPont deNemours amp Co IE gt AE DuPont Dow Elastomers NES ient Brooks Instrument LLC NGO drinken added iederen Cajon Company VOR Cajon Company Vonen DuPont Performance Elastomers Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 318 549 300 T 011 81 3 5633 7100 T 215 362 3700 F 31 318 549 309 F 011 81 3 5633 7101 F 215 362 3745 E Mail BrooksEuGBrooksInstrument com E Mail BrooksAs BrooksInstrument com E Mail BrooksAm BrooksInstrument com www Brooksinstrument com BROOKS Copyright 2008 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
33. ing the test Monitor the output signal at pin 2 of D Connector TP4 may be used for circuit common a With the shut off valve open adjust the metering valve so that the output voltage of the Model 5861E is 4 050 to 5 000 Allow the output to become stable at this setting b Close the shut off valve to stop the flow Observe the output signal as it decays c The behavior of the output signal during the transition between 10096 and 0 flow indicates the adjustment required of the anticipate potentiometer Refer to Figure 3 4 1 If the flow signal decays to 0 05 to 0 5V then rises to 0 0V the anticipate potentiometer is properly adjusted 2 If the flow signal decays rapidly and goes below 0 5V before rising to 0 0V the anticipate potentiometer must be adjusted clockwise and steps a and b repeated 3 If the flow signal decays slowly and does not go below 0 05V the anticipate potentiometer must be adjusted counterclockwise and steps a and b repeated Installation and Operation Manual Section 4 Maintenance X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E 4 1 General No routine maintenance 15 required on the Model 5861E other than occasional cleaning If an in line filter is used the filtering element should periodically be replaced or ultrasonically cleaned WARNING METER CONTROLLER SEAL COMPATIBILITY Products in this manual may contain metal or elastomeric seals gaskets O ri
34. into the bodyin the same orientation as it was prior to removal Refer to Section 4 6 Do not press header assembly into body with an arbor press as it may damage the O ring 4 Place the end block O ring 6 in position and install end block 3 with the 4 hex socket screws 5 Tighten these screws to 34 inch lbs Do not over tighten ACAUTION The following steps must be performed as written Placing the O rings on the sensor before it is installed will result in damage to the O rings causing leak 5 Install O rings 19 on inlet and outlet fittings Install fittings into body 1 and end block 3 6 Press the lubricated sensor O rings 8 into the flow meter body 1 7 Install the sensor assembly 7 as shown in Figure 5 1 and secure with the 2 allen nuts 9 and washers 10 Tighten the allen nuts to 10 inch lbs 8 Install the printed circuit board 28 secure with bracket 26 and 2 screws 27 Plug the connector from the sensor assembly 7 into the PC board The flow arrow on the connector should be pointing in the direction of the flow 9 Install the electronics cover 40 on the meter and secure with 3 screws 27 Tighten the upper jack post on the D connector 10 Prior to installation leak and pressure test the assembled flowmeter to any applicable pressure vessel codes Installation and Operation Manual Section 4 Maintenance X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E 4
35. ion The shield should be terminated to a earth ground For pin configuration Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha S Enero 1996 Los equipos de Brooks el ctricos electr nicos en relaci n con la marca han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magn tica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de se al cuando se va a utilizar un equipo con marca CE Calidad del cable de se al prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n CE Si usted adquiere su propio cable de se al deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 100 Cuando utilice conectores del tipo 6 Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deber n utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo ta
36. itettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden t ytyy olla 100 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Nastojen liitt minen katso liiteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som st lls f r CE godk nnande Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 100 D eller runda typer av anslutningskontakter ska vara sk rmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 100 skarmade f r att vere
37. lindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s a la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 100 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre Se r f rer au manuel d instruction pour le raccordement des contacts Greek Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Eyxepidio O nyr v M tpyons Matas lavov pros 1996 kar pyava mo Brooks p povv CE xyovv pe Kavovisnodg m EMC 89 336 EEC T V TOV kaAd to va ue pyava p povv oh ua CE How ryra 10 cvv cuov H Brooks
38. methylpropane Disilane Ethane Ethanol Ethylacetylene Ethyl Chloride Ethylene Ethylene Oxide A l ECOLE C Fluoroform f 23 CHF o 529 1 584 3 127 Germanium Tetrachloride Gett 0 268 2 766 9 574 Halothane R 123B 1 G HBICIF Helium Hexafluoroacetone Hexaflorobenzine Hexafluoroethane f 116 Hexafuoropropylene HFP Hexamethyldisilane HMDS Hexane Installation and Operation Manual Section 4 Maintenance X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E Table 4 3 Conversion Factors Nitrogen Base Continued GAS NAME FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen lodide Hydrogen Selenide Hydrogen Sulfide lodine Pentafluoride Isobutane Isobutene Isopentane Methane Methylacetylene Methyl Bromide 3 Methyl 1 butene Methyl Chloride Methyl Fluoride Methyl Mercaptan Methyl Silane Methyl Trichlorosilane MTS Methyl Vinyl Ether Monoethanolamine Monoethylamine Monomethylamine Neon Nickel Carbonyl Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride Nitrogen Trioxide Nitrosyl Chloride Nitrous Oxide Octofluorocyclobutane Oxygen Oxygen Difluoride Ozone Pentafluorethane f 125 Pentane n Pentane Perchloryl Fluoride Perfluorobutane Perfluoro 2 Butene Perfluoromethyl vinylether Perfluoropropane Pentane n Pentane Phosgene Phosphine Phosphorous Pentafluoride Phosphoro
39. n and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 1996 Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilit Elettomagnetica Direttiva EMC 89 336 EEC richiesta comunque una speciale attenzione nella scelta dei di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei di segnale e dei relativi connettori Brooks fornisce di elevata qualit che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 100 connettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemit Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici Il cavo impiegato deve comunque avere una schermatura del 100 per soddisfare la certific
40. n begin processing the equipment Copies of the form can be obtained at one of the locations above 2 4 Gas Connections Standard inlet and outlet connections supplied on the Model 5861E are 3 8 compression fittings Optional VCO VCR connections are available upon request Prior to installation make certain all piping is clean and free of obstructions Install the piping in such a manner that permits easy removal if the instrument is to be removed for cleaning or test bench troubleshooting 2 5 Installation Refer to Figures 2 1 through 2 2 ACAUTION When installing the flowmeter care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until time of installation 2 2 Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Section 2 Installation Model 5861E SPAN ADJUSTMENT ZERO Sa ADJUSTMENT 15 POSITION MALE D CONNECTOR CONNECT I ON X DIM 1 4 COMPRESSION FITTING 5 17 131 1 4 TUBE 4 717120 1 4 TUBE VCR 5 03 128 3 8 COMPRESSION F TTING 5 297134 3 8 OR 1 2 TUBE vco 5 15 131 3 8 OR 1 2 TUBE VCR 5 33 135 IMM 145 8 9 16 18 UNF BOTH ENDS TLET FLOW INLET gt hans 5 80 0 8 32 UNC X 1 4 DEEP 2 MDUNTING HOLES Figure 2 1 Model 5861E Dimensio
41. ngs or valve seats It is the user s responsibility to select materials that are compatible with their process and process conditions Using materials that are not compatible with the process or process conditions could result in the Meter or Controller leaking process fluid outside the pressure boundary of the device resulting in personnel injury or death It is recommended that the user check the Meter or Controller on a regular schedule to ensure that it is leak free as both metal and elastomeric seals gaskets O rings and valve seats may change with age exposure to process fluid temperature and or pressure 2 Connect the instrument to a source of the same gas used for it s original calibration Regulate the Setpoint to 100 flow and adjust the inlet and outlet pressures to calibration conditions Verify that the output signal reaches its full scale value and stabilizes at that value Vary the command voltage over the 1 to 100 range and verify that the output signal follows the Setpoint If possible connect a flow measurement device to monitor the actual flow behavior and verify the accuracy of the mass flow instrument If the mass instrument performs as described above then it is functioning correctly and the problem may lie elsewhere 4 1 Troubleshooting D AA 44 CAUTION It is important that this flowmeter be serviced only by properly trained and qualified personnel 4 1 Section 4 Maintenance Installation and Op
42. ns COLOR CODE 1 Common Command Pot ccW Black A 4 Valve Off 15 Suppl Orange 6 A5VdeSupply Blue 8 Red BIk Supply Voltage Common Grn BIk 0 5 Volt Signal Common Org Blk i13 NENNEN ed ea VVN 14 Chassis Ground nd rn Wh ue eem Transducer Input Blu Wht Factory Activated Option Input Pot S These connections are used for the 5850E and 5851E Mass Flow Controllers Make no connections to these pins PIN OUT TOP VIEW O lacooooo O 90000095 1 Cable shield tied to chassis ground in meter connector Make no connection on customer end 2 All power leads must be connected to power supply Figure 2 2 D Type Connector Pin Arrangement Section 2 Installation Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Any Brooks Instrument mass flowmeter or flow controller with a 15 pin D Connector PC Board bearing the CE Mark must use a 100 shielded cable and metal shell mating connectors The shield 15 tied over 360 degrees to the shell at both ends This is mandatory to be in compliance with the EMC Directive 89 336 EEC Recommended installation procedures a The Model 5861E should be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to t
43. nsst mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse F r elektrisk anslutning till kontaktstiften h nvisas till medf ljande instruktionsmanual Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods
44. nt has been in storage for an excess of ten 10 months or in conditions in excess of those recommended all pressure boundary seals should be replaced and the device subjected to a pneumatic pressure test in accordance with applicable vessel codes 2 1 Section 2 Installation Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 2 3 Return Shipment EEE A A AAA Prior to returning any Brooks equipment to the factory contact the factory for a Return Materials Authorization Number RMA This can be obtained at Brooks Instrument Product Service Department 407 West Vine Street Hatfield PA 19440 0903 or call toll free 1 888 554 FLOW 3569 Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu Brooksinstrument com Also completion of Form 03 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the meter is required before any Brooks Personnel ca
45. olts Adjust flow rate for a flow signal output of 100 5 000V Connect the DVM positive lead to TP2 and the negative lead to TP4 Adjust the linearity potentiometer for an output equal to the new calculated TP2 voltage Note the output signal should be kept at 5 000 V during this adjustment This can be done by varying the actual flowrate Repeat steps d f and g 1 If the error recorded in step 9 is less than 0 5 then the calibration procedure is complete 2 If the error is greater than 0 5 set the flow rate for a flow signal output of 100 5 000V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Calculate a new TP2 voltage as follows error measured New TP2 voltage recorded 0 450 TP2 step g voltage Example Sensor error 0 7 found in step g Measured TP2 voltage 0 567 volts TP2 correction 0 7 x 0 450 0 315 volts New TP2 correction 0 315 0 567 0 882 volts 3 5 Section 3 Operation Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 3 Adjust the linearity potentiometer for an output equal to the new TP2 voltage and then repeat step k Note The voltage at TP2 can range from 10 to 3 volts however it is recommended that this voltage stay between 2 5 and 2 5 volts for proper operation If the recommended voltage range is exceeded the desired accuracy and or s
46. once regarding his liability A report should be submitted to the Product Service Department Brooks Instrument Hatfield Pennsylvania 19440 0903 Remove the envelope containing the packing list Carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing materials Inspect for damaged or missing parts Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan Box 428 011 81 3 5633 7100 6710 Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com 2 2 Recommended Storage Practice ne If intermediate or long term storage is required for equipment as supplied by Brooks Instrument it is recommended that said equipment be stored in accordance with the following a Within the original shipping container b Store in a sheltered area with the following conditions 1 Ambient temperature 21 C 70 F nominal 2 Relative humidity 45 nominal 60 maximum 25 minimum Upon removal from storage a visual inspection should be conducted to verify its condi tion is as received If the equipme
47. red full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture 8 100 Mixture 946 Factor 20 80 1 386 876 N equivalent flow 20 946 21 14 slpm 4 7 4 8 Section 4 Maintenance Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 Table 4 3 Conversion Factors Nitrogen Base FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR kg m Acetylene Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f 13B1 1 3 Butadiene Butane 1 Butene CIS 2 Butene Trans 2 Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetrafluoride f 14 Carbonyl Fluoride Sulfide Chlorine Chlorine Dioxide Chlorine Trifluoride 2 Chlorobutane Chlorodifluoromethane f 22 Chloroform Trichloromethane Chloropentafluoroethane f 115 Chlorotrifluoroethylene Chlorotrifluoromethane f 13 Cyanogen Cyanogen Chloride Cyclobutane Cyclopropane Deuterium Diborane Diboromodifluoromethane f 12B2 1 2 Dibromotetrafluoroethane f 114B2 Dichlorodifluoromethane f 12 Dichlorofluoromethane f 21 Dichlorosilane 1 2 Dichloroethane 1 2 Dichlorotetrafluoroethane f 114 2 2 Dichloro 1 1 Difluoro 1 Chloroethane 1 1 Difluoroethane 1 1 Difluoroethylene Diethylsilane Difluoromethane f 32 Dimethylamine Dimethylether 2 2 Di
48. repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to eng
49. rjeta Card Edge no son met licos los cables utilizados deber n ser protegidos con un apantallamiento del 100 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Para ver la configuraci n de los pines Por favor consultar Manual de Instrucciones adjunto Installation and Operation Manual Section A CE Certification X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E Francais Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Sujet Annexe au Manuel d Instructions R f rence Certification CE des D bitm tres Massiques Effet Thermique Date Janvier 1996 Messieurs Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du cable utilis pour v hiculer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind a 100 Les connecteurs D ou de type circulaire doivent tre reli s a la terre Si des presse toupes sont n cessaires ceux doivent tre m talliques avec mise la terre Le b
50. sizing a restrictor assembly for gases other than nitrogen the sensor conversion factor must be used to calculate a nitrogen equivalent flow rate Use the following equation to obtain the desired flow in nitrogen equivalent units Refer to Table 4 3 for the conversion factor list N equivalent desired gas flow sensor conversion factor Installation and Operation Manual Section 4 Maintenance X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E Example The desired gas is cyanogen The desired full scale flow rate is 30 slpm Sensor conversion factor is 0 498 from Table 4 3 Nitrogen equivalent flow 30 0 498 60 24 sccm Table 4 4 Restrictor Selection Guide Range slpm Restrictor Element PartNumber Equivalent Flow Combination 151026 1 40micon S 613 E 636 BMT S 613 E 523 BMT S 613 E 526 BMT S 613 E 528 BMT 1 40 micron 2 60 micron S 613 E 529 BMT 3 60 micron S 613 E 527 BMT Based on 0 C Standard Reference Temperature For Hydrogen from 130slpm to 200 5 use 3 60 micron restrictor elements Note If the Nitrogen equivalent flow is between two sizes choose the larger size In the previous example the restrictor should be sized for a 60 24 slpm flow rate P N S 613 E 528 BMT If a restrictor assembly is being replaced because the original has become contaminated the original may be used as a guide to select the replacement assembly The porosity of the original
51. the 0 5V signal output pin 2 of D Connector and the negative lead to TP4 circuit common Adjust the actual flow rate to within 2 of desired full scale flow Measure the flow rate using suitable volumetric calibration equipment Adjust the flow rate to the proper full scale flow Flow signal voltage measured flow rate x 5 000 full scale flow rate Adjust the span potentiometer Refer to Figure 3 3 until the 0 SV signal output equals the flow signal voltage calculated above e Connect the DVM positive lead to TP1 sensor voltage The voltage at TP1 is 100 times the output voltage of the sensor This voltage can range from 1 2 to 12 volts however it is recommended that this voltage stay between 2 0 to 9 0 volts for proper operation If the recommended voltage range exceeds this than the desired accuracy and or signal stability may not be achieved If one of the limits is reached check the restrictor sizing procedure Refer to Section 4 6 3 3 Section 3 Operation Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 D TYPE amp 99000953 COMPONENT SIDE OF PC BOARD o o o o o o PIN OUT VIEW Figure 3 2 Model 5861E Calibration Connections BROOKS MASS FLOW SENSOR SBOE SERIES Test Points Circuit Common TP3 Vaive Voltage TP2 Lin Voltage 1 Sensor Voltage D Span Linearity Anticipale Zero
52. to service your flow measurement and control requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received 18 of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www BrooksInstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Contents X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E Paragraph Page Number Number Section 1 Introduction 1 1 cir es 1 1 12
53. us Trifluoride Propane same as CH CH CH Propylene Propene Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride Sulfur Trioxide Sulfuryl Fluoride Tetrachloromethane Tetrafluoroethylene TFE Tetrafluorohydrazine Trichlorofluoromethane f 11 Trichlorosilane Trimethyloxyborane TMB 1 1 2 Trichloro 1 1 2 Triflouroet f 113 Trimethylamine Tungsten Bexannonde Vinyl Bromide GHP 0 524 1 985 4 772 Vinyl Chloride CL 0 542 1 492 2 788 Vinyl Fluoride CHF 0 576 1 281 2 046 Water Vapor 0 861 0 802 0 804 1 383 2 180 5 851 4 10 Section 4 Maintenance Model 5861E 4 6 Restrictor Sizing Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 It is generally accepted that the mass flow rate derived from this equation is only accurate to 5 The sensor conversion factors given in Table 4 3 are calculated based on a gas temperature of 21 C and a pressure of one atmosphere The specific heat of most gases are not strongly pressure and temperature dependent however gas conditions that vary widely from these reference conditions may cause an additional error due to the change in specific heat due to temperature and or pressure The restrictor assembly is a ranging device for the sensor portion of the flowmeter It creates a pressure drop which is linear with flow rate This diverts a sample quantity of the process
54. utsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r MassedurchfluBger te Datum 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel f r CE zertifizierte Ger te sind spezielle Anforderungen zu beachten Qualit t der Verbindungskabel AnschluBstecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten da eine 100 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich sollten Kabeldurchf hrungen mit AnschluBm glichkeiten f r die Kabelabschrimung verwendet werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlie en Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm ige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 100 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Er
55. ve Application Guide service Manual Installation and Operation Manual Section A CE Certification X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E Dansk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Emne Till g til instruktions manual Reference CE meerkning af Masse Flow udstyr Dato 1996 Brooks Instrument har gennemf rt meerkning af elektronisk udstyr med succes i henhold til regulativet om elektrisk st j EMC direktivet 89 336 EEC Der skal dog g res opmeerksom p benyttelsen af signalkabler i forbindelse med CE m rkede udstyr Kvaliteten af signal kabler og stik Brooks lever kabler af h j kvalitet der im dekommer specifikationerne til CE m rkning Hvis der anvendes andre kabel typer skal der benyttes et sk rmet kabel med hel sk rm med 100 daekning Forbindelses stikket type D eller cirkul re skal v re sk rmet med metalhus og eventuelle PG forskruninger skal enten v re af metal eller metal sk rmet Sk rmen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen b r v re forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 100 deekning Skaermen veere forbundet til jord Forbindelse af stikket venligst referer til vedlagte instruktions manual Med venlig hilsen De
56. wmeter functions as described above it is functioning properly and the problem may lie elsewhere Table 4 1 lists possible malfunctions which may be encountered during bench troubleshooting Sensor Troubleshooting If itis believed the sensor coils are either open or shorted troubleshoot using Table 4 2 If any of the steps do not produce the expected results the 4 3 Section 4 Maintenance Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG Model 5861E November 2008 sensor assembly is defective and must be replaced Refer to Section 4 4 for the disassembly and assembly procedures to use when replacing the sensor Note Do not attempt to disassemble the sensor Cleaning Procedures Should the Model 5861 Mass Flowmeter require cleaning due to deposition use the following procedures 1 Remove the unit from the system 2 Refer to Section 4 4 to disassemble the meter ACAUTION Do not soak the sensor assembly in a cleaning solution If solvent seeps into the sensor assembly it will probably damage the sensor or at least significantly alter its operating characteristics 3 Use a hemostat or tweezers to push a 0 007 dia piano wire through the flow sensor tube to remove any contamination For best results push the wire into the downstream opening of the sensor tube end closest to the control valve The sensor tube can be flushed with a non residuous solvent Freon TF recommended
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