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1. FINISH UNLESS THERWISE SPECIFIED DIMENSIONS ARE IN INCHES ANGLES 1 2 PLACE DECIMALS 010 MACHINED INSIDE RADIUS 015 PLACE DECIMALS 005 wacuinep SURFACES HOLES 44 005 BREAK SHARP CORNERS 005 010 MAXray Service and Installation Manual 8 7 9 MAXray Field Replaceable Parts The table below describes the field re placable parts for the MAXray spectrometer Failures of the spectrometer which involve other components will probably require factory repair Supporting documents are provided in the Installation and Alignment Procedures documentation and should be referenced prior to installation of any replacement parts Part Description NORAN P N Supporting Documents Flow Counter Window 555A135717 930A135978 Flow Counter Window Support 555A135716 930A135987 PCS Electronics 700X135656 930A135984 X ray OPTIC 555A135665 930A135985 Detector Motor 700P135600 930A135988 Theta Motor 700P135595 930A135988 Turret Motor 350A132828 930A135988 Optical Sensor All Locations 370A133449 930A135673 Microswitch Limit Switch 510A133869 930A135673 TAP Diffractor 555A135685 930A135989 WSi 50 Diffractor 555A135686 930A135989 WSi 60 Diffractor 555A135687 930A135989 WSi 80 Diffractor 555A135688 930A135989 NiC 80 Diffractor 555A135689 930A135989 CrSc 80 Diffractor 555A135690 930A135989 NiC 100 Diffractor 555A135691 930A135989 MoB4C 145 Diffractor 555A13569
2. HEIKE BIAS IS TOO HIGH FOR PHOTON ENERGY BIAS SET CORRECTLY FOR PHOTON ENERGY PROPORTIONAL COUNTER GAIN CHARGE ENTERING COUNTER FOR DIFFERENT ENERGY MULTIPLICATION IS TOO HIGH AND THE AMOUNT OF CHARGE LIBERATED IS THE AMPLIFIER IS SATURATING NOTE DIFFERENT 50 BIAS CHANGES MAY BE RINGING NEEDED TO KEEP THE PULSES ABOVE THE NOISE LEVEL BUT BELOW SATURATION Figure 7 7 PCS Pulse Waveforms 7 From the Acquire menu click Element Scan and then choose C from the periodic table to scan the spectrometer over a range of expected peak intensity positions for Carbon Once a peak is observed set the spectrometer to the energy value by typing energy equals XXX in the Send Command Window Once the spectrometer is set at the peak position open the Count menu and select Ratemeter to open a ratemeter window Alternatively use the Analog Ratemeter hooked up to the PD BNC on the Spectrometer PCS Electronics The objective is to now align the Spectrometer and X ray Optic to obtain maximum count rate at carbon There are many degrees of freedom in performing this alignment Spectrometer Tilt points optic to established working distance Spectrometer Horizontal lateral position optic relative to specimen Spectrometer Intersection focus of optic to specimen position 7 10 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Alignment e Diffractor T
3. 610A134545 THETA MOTOR CABLE 15 PIN HIGH DENSITY DETECTOR MOTOR CABLE 15 PIN HIGH POWER CURD MAT L JVH RELEASE APPROVAL VACUUM INTERLOCK CABLE BNC TO BNC CUAX SEE VACUUM INTERLOCK DOCUMENTATION MAPPING OUTPUT BNC BNC COAX HUUK UP SEM CUNSUDULE 3 5 FLOPPY DISK DRIVE MAXray SPECIR METER CONTROLLER 61051345523 BOARD 1 we NOTES mum SETTING gt SENI DURING ALIGNMENT MADE BY DATE DATE FINISH NORAN Instruments MAXray SYSIEM DIAGRAM UNLESS OTHERWISE SPECIFIED ANGLES 41 MACHINED INSIDE RADIUS 015 MAX MACHINED SURFACES a DIMENSIONS ARE IN INCHES 2 PLACE DECIMALS 010 3 PLACE DECIMALS 005 HOLES 005 BREAK SHARP CORNERS 005 010 02 10 98 AUST NOTES ON SERIAL INTERFACE THE MAXRAY CONTROLLER IS SHIPPED WITH TWO SERIAL CABLE ASSEMBLIES FOR HOOK UP TO A SUN OR PC SERIAL PORT CABLE 6104134554 IS USED FOR VOYAGER SYTEMS FOR HOOK UP TO A PC INSTALL THE PIN 1 2 REVERSER 210A135994 LCOM amp DMA030MF 5 ON CONTROLLER SERIAL PORT CONNECTOR THEN USE THE 9 PIN FEMALE TO FEMALE DATA CABLE PROVIDED 610A135993 LCOM HCRMNO9F F 15 KEYBOARD AND VGA CONNECTORS USED FOR SERVICE TROUBLESHOOTING ONLY NO STANDARD HOOK UP TO THESE CONNECTORS AMP QUT BNC ON THE SPECTROMETE
4. 8 Data is collected with a smooth flat specimen and x ray take off angle of 359 MAXray Service and Installation Manual 3 5 MAXray Specification 3 MAXray Parallel Beam Spectrometer 3 6 MAXray Service and Installation Manual Schematic Diagram of PBS Spectrometer Large area Gas Flow Proportional Counter collects x rays which NE satisfy the Bragg condition only WDS Natural Crystal or synthetic multilayer diffracts the x rays according to Broggs law Flat crystals con be used as the incident x rays are all parallel The parallel beam of x rays can travel long distances to reach the diffracting element Solid angle is defined by the distance from the optic to the specimen The x ray optic will transmit a wide band of x ray energies to the diffracting element The transfer function of the optic is energy dependent Divergent X rays From the specimen are Focused or collimated made parallel by the grazing incidence x ray optic Schematic of Grazing Incidence X ray Uptic Applied to Wavelength Dispersive X ray Spectrometry Electron Beam irradiates a specimen producing characteristic x rays which diverge from the specimen at all angles L1 Traditional WDS uses curved diffractors at large distances away from the specimen Solid angle is proportional to 1 41 7 specimen DATE 1900 27 MADE BY 08 97 2 C C C N
5. MAXray Service and Installation Manual 7 7 13 14 15 Installation Procedures 7 Installation Alignment and Calibration Procedures If the pressure is decreasing over time then proceed to attach the P 10 gas supply using the Gas Kit provided Hook up the P 10 Gas Kit as follows see MAXray System Diagram at the end of this chapter Attach the single stage regulator supplied to the Customers Two Stage regulator already in place on the P 10 Gas Cylinder Use Teflon tape on all metal thread seals Use the 1 4 diameter Black Tubing to connect the Gas Supply to the Flow Meter Note the use of Quick Disconnects similar to the Water Supply Lines on a Freedom Detector Set the 2nd Stage Regulator to approximately 10 PSI and the 3rd Stage Regulator the one NORAN supplied to 3 4 PSI Set the Flow Meter to 40 cc min for initial flushing Use the 1 8 diameter Clear Tygon Tubing to connect the Flow Meter to the Spectrometer Gas Port Either port can serve as the supply side The Flow Meter should be located at a position where the user can verify gas flow and note when the supply has been depleted The Flow Meter should be leveled with the Circular level mounted to the stand Note After establishing gas flow verify that the chamber vacuum has not degraded On FESEMs the INTERMEDIATE pressure should show minimal effect To adequately flush the Gas Flow Counter P 10 gas must flow for approximately 4 hours An overnight flush
6. 24 mA 4 15V Output 15V 400 mA maximum 5 SCAL Input TTL level 0 to 3 5 V 24 mA 6 ULD Output Analog level 0 to 12V 6 mA 7 Ground 8 Ground 9 15V Output 15V 400 mA maximum 1 12 MAXray Service and Installation Manual 1 Safety Precautions and Technical Specifications Electrical Specifications Serial 9 pin D Male 123 4 5 6789 Pin number Signal Description 1 Carrier Detect Not used 2 RXD Input to RS 232 transceiver maximum input voltage 30 V 10 mA 3 TXD Output from RS 232 transceiver output rating VOL 0 4V 3 2 mA and VOH 3 5V 1 0mA 4 DTR Data Terminal Ready Not used 5 Ground 6 DSR Data Set Ready Not used 7 RTS Request to Send Not used 8 CTS Clear to Send Not used 9 HI Ring Indicate Not used Motor 15 pin D Female High Density 5 4 3 2 1 15 14 13 12 11 Pin number Signal Description 1 5 volts Output Encoder power 2 ENC B Input digital TTL level to 3 5 V 10 mA Encoder Channel B output 3 ENC A Input digital TTL level to 3 5 V 10 mA Encoder Channel A output 4 EMC INDEX Input digital TTL level to 3 5 V 10 mA Encoder Index output 5 HOME Input digital TTL level to 3 5 V 10 mA Encoder Home output 6 LIM 1 Input digital TTL level to 3 5 V 10 mA Limit 1 sense output 7 LIM 2 Input digital TTL level to 3 5 V 10 mA Limit 2 sense output 8 N C No connection MAX
7. Be Sure That Of Is Not Further Down In Energy i e Do Wide Energy Obtain an Element Scan at C Ka Using Exiting Calibration Points Position Spectrometer at Peak Centroid Energy Send Command energy equals xxx oop Limit iterations Adjust Horizontal Axis Position TWEEK ONLY SHOULD NOT REQUIRE GROSS MOVEMENT Meet Specs With 2 3 Troublshooting Should If not See roubleshooting Adjust Tilt Axis Position TWEEK ONLY SHOULD NOT REQUIRE GROSS MOVEMENT Loop Limit Should Meet Specs With 2 3 Iterations If not See Troublshooting Obtain a Turret Scan Add the Value to the crystal txt file Adjust Intersection Position From Design Setting 3mm Maximum Unless Design Error Troubleshooting Adjust Spectrometer Horizontal Axis Position Countrate MAXray Service and Installation Manual 7 46 Engineering Layout 12 3 16 3 12 3 OPTIC DETAIL 2X R38 1 444 5 200 0 301 6 OPTIC TUBE KLENGTH VARI ABLE 45 0 371 3 A 7772 LALA ALAA AAA lA A Al A li li ll ll l li ll li ll kl ll kl ll Al erara 71 4 Basel 1 i 711 3 BELLOWS 12 I OPTIC SEE DETAIL H I H 1 200 a ini 334 9 403 8 TRAVEL MAX 469 8 149 2 UNLESS OTHERWISE SPECIFIED 01 Di mensi ons in milli meters EE AE ESAE 2 P
8. Diffractor name Diffractor 2d spacing Angstroms Element and X ray line used Theoretical peak energy of the x ray line keV Sample used Accelerating voltage keV Beam current nAmps First diffractor scan First detector scan Start keV Start End keV Peak Step eV Step Dwell sec Dwell Peak keV Counts Peak Second diffractor scan Second detector scan Start keV Start End keV End Step eV Step Dwell sec Dwell Peak keV Counts Peak Crystal motor offset computed Theoretical degrees Measured degrees Computed degree offset Detector motor offset computed Theoretical degrees Measured degrees Computed degree offset Energy scan Beginning Energy keV Ending Energy keV Step Size eV Dwell Time sec Detector Bias volts SCA Baseline volts SCA Window volts Crystal Name Peak keV Counts Detector Bias Voltage Calibration Detector Bias Voltage Volts Single Channel Analyzer SCA Voltage Calibration SCA Baseline Voltage Volts SCA Window Voltage Volts 7 42 MAXray Service and Installation Manual keV keV eV Sec keV keV keV eV Sec keV Counts Counts Counts 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration Diffractor name Diffractor 2d spacing Angstroms Element and x ray line used Theoretical peak energy of the x ray line keV Sample used Accelerating voltage keV Beam current nAmps First diffractor scan First detector scan Start keV Star
9. Install on a new system 1 2 3 4 5 Place the diskette in the drive Select Start then Run from the Windows NT task bar Type the filename a setup Click on the OK button Follow the instructions displayed on the screen Install on an existing system 1 2 3 d ue 223 95 cbe Backup your data files if they are in the C Noran subdirectory Backup your MAXray software settings These files are c noran wds bin labels txt c noran wds bin scan_tab txt c noran wds bin user_scn txt Place the diskette in the drive Select Start then Run from the Windows NT task bar Type the filename a setup Click on the OK button Follow the instructions displayed on the screen Copy your MAXray software settings back into their original directories 10 Copy your backed up data back into their original directories MAXray Service and Installation Manual 7 1 Installation 7 Installation Alignment and Calibration Procedures MAXray Installation Required Tools e Metric and SAE Hex Wrench Sets e 10 Crescent Wrench e Flat and Phillips Screwdrivers MAXray Install Spares Kit 700P 135998 Oscilloscope 20 MHz Analog Ratemeter Installation Procedures Refer to Figure 7 1 1 Unpack the Slide Interface Assembly from the shipping container If the Optic Support Tube is not installed into the Slide Interface install it now Remove the Electron Trap by loosening the two M2
10. instructed by this manual or by a qualified NORAN Instruments support specialist Never attempt internal service or system adjustments unless instructed to do so either by this manual or by a qualified NORAN Instruments support specialist Maintain proper equipment grounding Always connect equipment to a properly grounded power source receptacle If in doubt have the receptacle checked by a qualified technician Never use a ground adapter plug to connect NORAN Instruments equipment to a power source receptacle that lacks ground connection terminals CAUTION Do not move the stage when the MAXray optic is inserted without knowing its position Driving the stage into the optic will damage the Optic CAUTION The controller must be installed according to the procedures described in the installation and service manual to avoid damage to the spectrometer CAUTION The fuse s in the controller must match the line voltage CAUTION Check that the fuse s for the input AC voltage are correct The switching power supply has a universal input autoranger that eliminates the requirement of changing jumper wires or switches to change the input voltage range but the correct fuse s must be installed For 100 120 VAC operation use one T 250V fuse For 230 240 VAC operation use two T 250V 2A fuses 5x20 mm MAXray Service and Installation Manual 1 3 CAUTION CAUTION Flow Proportional Counter Window 1 Safety Precaution
11. rather than in an analog to digital converter ADC The EDS system s ADC must retain the proportionality to the original x ray energy so that a count can be stored in the appropriate channel of a multichannel analyzer In WDS the resolution is achieved by the diffractor and the SCA simply allows selection of the upper and lower limits of the size of the amplified voltage pulse that will be counted Since the counter contains a gas a window must be used to isolate the inside of the detector from vacuum if low energy x rays are to be analyzed the window must be thin The detector is called a gas flow or flow proportional counter FPC An Argon 10 methane mixture called P 10 Gas is the normal counter gas Some fully focusing spectrometers use a dual counter system with the SPC directly coupled to and behind the flow counter An exit window in the FPC allows unabsorbed higher energy x rays to enter and be counted in the SPC About 2 3 of the intensity for example will come from the rear counter The speed and low noise characteristics of the proportional counter account for two additional advantages of WDS over EDS 1 The counter can handle very high count rates up to about 10 Kcps without dead time or even up to 100 Kcps in some cases If the spectrometer is set to a peak position and say 20 Kcps can be achieved all that count rate is in the element of interest Compare this to EDS which may be limited to a few thousand
12. 312004 or equivalent 1 18 MAXray Service and Installation Manual 1 Safety Precautions and Technical Specifications Maintenance Fuse Location The fuse designator F1 is located on the power supply circuit board adjacent to terminal strip TB1 F 1 4A Normal Blow type 3AG 250V Connected to autorange adapter 115 230 VAC ADJ S4 jumper input and output barrier strips are equipped with 6 32 screws and accept up to a 25 wide lug Procedure jo Me T o Remove the detachable power cord from the controller Hemove the cover screws and cover Remove the cable clamp from the base of the chassis near the air baffle Remove the following DC power harness connectors e P11 12 plug from the PC motherboard FD 4 pin plug from the floppy drive 2 pin plug from the regulator board P4 12 pin plug from the regulator board e P1 5 pin plug from the ECS board Move these plug ends alongside the power supply Remove the four fan bracket screws and the six air baffle screws Remove the fan bracket and the air baffle Remove the two screws 8 32 by 38 inch from the front panel to free the power supply Lift up the power supply and rotate it out of the chassis Remove the four corner screws from the power supply cover and remove the cover 11 Remove the two screws holding the autorange adapter to the power supply sheet metal frame Carefully set
13. 61041355198 BE SURE TO SECURE GROUND LUG UN BOARD 7 SOLDER THE HV AND GOUND LEADS TO THEIR RESPECTIVE TERMINAL ON THE VACUUM FEEDTHROUGH COVER HV SOLDER CONNECTION WITH SHRINK TUBING SEE DETAIL BELOW BRACKET AMP Qut BNC O PCS INPUT PD Out BNC pA Detector SERVU p MOTOR CONN 1 Turret SERVO 1 MOTOR CONN inna Theta SERVO t MOTOR CONN ch NOTE FOR OTHER DETAILS OF HIGH VACUUM FEEDTHRU ASSY FEEDIHROUGH WIRING SEE 700P135655 230 135674 EU WADE BY DATE pu pan Instruments m UNLESS OTHERWISE SPECIFIED NDRAN Instruments TITLE Rev ND DATE PCS ELECTRONICS INTEGRATION RE VISIONS ON MAXRAY SPECTROMETER 930A 135984PA DIMENSIONS ARE IN INCHES ANGLES 41 2 PLACE DECIMALS 3 010 MACHINED INSIDE RADIUS 015 MAX 3 PLACE DECIMALS 005 63 MACHINED SURFACES HOLES 005 BREAK SHARP CORNERS 005 010 MAXray Service and Installation Manual Motor Replacement and Installation Turret Motor HALY the motor is supplied for the Turret assembly JOVAL L LH u T D 5mm 3 1 Remove defective motor disconnecting 9 Pin connector trom FUD Mover Harness LOGSEn 4 4 40 SHC screws LA and pull motor out of Turret Assembly Ca REMOVE Mover Mount LBL Gna Hormonic Drive waye Generator 1016 from defective motor Mount these parts onto
14. DISTANCE TIGHTEN THE SPLIT WILL BE GIVEN IN COLUMN RING CLAMP FRONT STDP ON THE LEADSCREW DESIGN DRAWING HIDDEN IN THIS VIEW Figure 7 5 Initial Setting of the Front Stop 7 Install the Seal Off Plate on rear of the Slide Interface using 4 M5 SHCS provided See Figure 7 1 Close all other chamber ports and begin evacuating the chamber This step is included to verify that there are no vacuum problems with the interface assembly prior to attaching the MAXray spectrometer While the system is pumping down unpack the MAXray Spectrometer controller and other peripheral equipment to prepare for installation If the system vacuum integrity is not compromised proceed with installing the MAXray spectrometer Vacuum integrity can be verified by observing the pump down curve Even if the system base pressure is not obtained quickly as long as the pressure continues down over time there probably are no leaks If the chamber pressure hangs up at a value significantly higher than the typical base pressure probably there is a leak somewhere Check all o ring seals but remember that the Slide Interface must remain oriented to the pole piece as determined in step 4 With the Spectrometer Controller and Host Computer unpacked complete the system hook up so that motor functioning can be verified prior to installing the spectrometer See the MAXray System Diagram at the end of this Chapter for all wiring and gas requirements Place the MAXray Sp
15. EDS resolution is typically an order of magnitude better peak overlaps are virtually eliminated 2 The high resolution leads to order of magnitude better sensitivity than EDS The sensitivity improvement is often most dramatic in the light element region 3 The better P B and elimination of overlaps yield more accurate quantitative analysis for those elements in low concentration or involved in the overlap 4 Because the WD spectrometer can be positioned at the center of the peak where P B is maximized WDS provides superior x ray maps especially for low concentrations Due to the serial nature of spectrum acquisition qualitative analysis is slow compared to EDS 6 The large solid angle achieved using the PBS optic yields a greater sensitivity to light element energies than conventional WD 7 WDS is often operated by driving the crystal directly to the peak with or without peak searches In this manner the counting time is devoted only to the points of real interest For 4 4 MAXray Service and Installation Manual 4 Overview of Parallel Beam Spectrometry and WDS X ray Optics minor elements WDS then becomes fast relative to EDS which spends most of its time counting x rays from the major elements X ray Optics Diffractors The term crystal is routinely used to describe the diffractor and in fact the device is commonly called a crystal spectrometer However the prominence of the new multilayers which
16. FROM 2 SENSOR WIRE 20 NUES ORANGE lt ORANGE Z VIOLET 21 FROM BLUE lt BLACK 10 N lt M 1406135731 6104135737 DETECTOR ARM 610A135735 2 p wer TUBING CLAMP STRIP BACK 1 DETECTUR AXIS FLIP HARNESS zg OF gale b OFF WITH OTHER WIRES E X ST CENTER CDNDUCTDR y WN ww NM VIOLET 16 FROM HOLD DOWN THETA BUNDLE CRASH o MICROSWITCH TWISTED SHIELD 2724 KYNAR SHRINK Uy SOLDERED TO TUBING OVER 53 AN LOW COUNTER GROUND LUG WIRE AND BEND 2 COAX 8 GAS SUPPLY W TUBES HV COAX END DETAIL Nd OPTIC TURRET OPTICAL SENSOR WIRING DETAIL BLUE NOTE EXCEPTION FOR HOME DETETOR LOWER LIMIT 225 orane A Am CE IF DRANGE ORANGE N 2 pas dh owes AN S33 Lg is 5 E 3 e BLUE ra BLACK 8 NA BLACK EXTEND UEHETA E Jr Sd WHITE lt YELLOW MOTOR 220 Q ON DETECTOR DEPENDS ON AXIS ONLY pu MICRUSW NC BLUE Y MICROSW CO lt BLK 10 6104135736 THETA HARNESS 4 OPTICAL SENSOR NOTE ALL SOLDERED JUNCTIONS ARE COVERED WITH KYNAR SHRINK TUBING lt 31041189445 a MAXray Service and Installation Manual Flow Counter Repair Replacement Instructions WINDOW REPLACEMENT INSTRUCT
17. Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration Locate the largest energy peak Detector Scan 0 529 keV Esa zjirjaj 12 Position the detector correctly for the diffractor scan Scan from 0 010 keV before and to 0 001 keV past this energy Use a step of 1 eV and a dwell of 1 second Close the Detector Scan window 13 Repeat steps 1 through 12 14 Calculate and record the crystal and detector offset Run the WDS Calculator program c noran wds bin calc exe Fe WDS Calculator Eile ES Enter the Crystal values for Crystal 2d Spacing Theoretical Peak Energy and Measured Peak Energy final diffractor Click Compute the Calibration Offset and then record the crystal offset This value may be negative MAXray Service and Installation Manual 7 29 Detector and Diffractor Motor Calibration 7 Installation Alignment and Calibration Procedures 15 16 17 18 19 Enter the detector values for Crystal 2d spacing Theoretical Peak Energy and Measured Peak Energy Click Compute the Calibration Offset and then record the detector offset This value may be negative Send the calibration data to the controller From the Service menu click Send Command Example CYSTAL 0 POINT SET 23 1731 0 3702 0 0881 In this example a diffractor offset of 0 3702 degrees and a detector offset of 0 0881 degrees are used with a bragg ang
18. Screws that hold it in place Carefully install the Optic Support Tube into the front of the Slide Interface flange end inserting the end of the Support Tube which has 4 tapped holes Secure the Support Tube in the Spectrometer Mount Block using 4 M2 screws and lock washers Replace the Electron Trap Some column designs call for a set screw to secure the X ray Optic if required insert the Set Screw into the tapped hole on the side of the Optic Support Tube Leave clearance for the X ray Optic Do not adjust any other screws on the Slide Interface SET SCREW HOLE FOR SOME INSTALLATIONS ELECTRON TRAP CHIDDEN IN THIS VIEW SEE COLUMN DESIGN SEAL OFF PLATE DRAWING FOR E PROPER SIDE LLLLLL LLL LLL p aaa aaa aaa a a a a aM LA 222222 D LLLLLLLLLLLLLLLLLLLLLLLL aL a I a a LR C LL SPECTROMETER MOUNT BLOCK AND MOUNT BLOCK SUPPORT EXAMPLE COLUMN TUBE SPECIFIC ES SPACER TUBE OPTIC Slide Interface CARRIAGE Figure 7 1 Slide Interface Example 7 2 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Installation Procedures 2 Attach the Port Adaptor column specific to the Slide Interface as shown in the Column Design Drawings that should be supplied Be sure to install any o rings that may be called out 3 Before installing the MAXray or Slide Interface record the system base pressure Be certain that the pre
19. Si satellite lines separated by only 2 eV in the WSi spectrum Analysis of Boron In BPSG BPSG borophosphosilicate glass is a thin film used in the semiconductor process It is important to control both the P and B dopant levels to insure proper device yield and product reliability WDS is one of the best methods for boron determination in BPSG because of its high analytical sensitivity for light elements and its straight forward linear response in this application to the boron concentration NORAN s multielement spectrometer is one of the primary tools used in the industry to perform the analysis 4 10 MAXray Service and Installation Manual 4 Overview of Parallel Beam Spectrometry and WDS WDS Applications with the Mo B4C multilayer it is in this instance the most efficient and cost effective WD system available Figure 3 5 shows an overlay of 4 and 2 BPSG In the actual analysis however peak scans are not done rather the spectrometer is simply driven to the B peak position where counts are recorded for standards and unknowns A typical linear calibration curve is shown in Figure 3 6 2000 BKo 1600 1200 800 400 181 194 Figure 4 5 Figure 5 4 6 B BPSG overlaid with 2 BPSG S Zz O D O CPS nA Figure 4 6 Figure 6 Calibration curve for B in BPSG 207 MAXray Service and Installation Manual 4 11 Acknowledgments 4 Overview of Parallel Beam Spectrometry and
20. True 70 Hz 15 Reserved PCS Assembly Input Power Requirements 15V 400 mA maximum 15V 400 mA maximum MAXray Service and Installation Manual 1 15 Electrical Specifications 1 Safety Precautions and Technical Specifications PCS Assembly Input Output Connectors PD BNC Connector PD Output TTL level 0 to 3 5 V 24 mA AMP Out BNC Connector AMP OUT Output Analog level 0 to 5V 10 mA for test only Input SHV Connector INPUT Input Output Analog level OV to 2600V 110 uA maximum Bias SHV Connector BIAS Input Analog level OV to 2600V 260 uA maximum Power 9 pin D Male 123 4 5 6 7 8 9 Pin number Signal Description 1 HVSET Input Analog level 0 to 12V 6 mA 2 LLD Input Analog level 0 to 12V 6 mA 3 HVINT Input TTL level 0 to 3 5 V 10 mA 4 15V Input 15V 400 mA maximum 5 SCAL Output TTL level 0 to 3 5 V 24 mA 6 ULD Input Analog level 0 to 12V 6 mA 7 Ground 8 Ground 9 15 Input 15 400 mA maximum 1 16 MAXray Service and Installation Manual 1 Safety Precautions and Technical Specifications Installing P 10 Gas Installing P 10 Gas The flow proportional counter requires a special gas called P 10 Tanks of P 10 gas are available from local bottled gas suppliers The tank of P 10 should have a two stage regulator with a 1 4 NPT fitting to accept the NORAN supplied third stage regulator WARNING P 10 gas is a HAZARDOUS MATERI
21. WDS Acknowledgments Authors N C Barbi and M A Henness The authors express their appreciation to Dr Michael Leonowicz and Dr Thomas Mebrahtu of Mobil Research and Development Corporation Paulsboro Research Laboratory for their assistance in providing many of the wavelength scans used in this section References The following is a brief list of references for those who may wish to delve more deeply into the theory and practice of WDS Bertin E P Principles and Practice of X Ray Spectrometric Analysis Plenum Press NY 1975 Birks L S Electron Probe Microanalysis Wiley Interscience NY 1971 Reed S J B Electron Microprobe Analysis Cambridge University Press Cambridge 1975 Goldstein et al Scanning Electron Microscopy and X Ray Microanalysis Plenum Press NY 1992 4 12 MAXray Service and Installation Manual 5 Vacuum Considerations When Using the MAXray Parallel Beam Spectrometer 139539A04 The MAXray Parallel Beam Spectrometer is a high performance wavelength dispersive spectrometer WDS utilizing a Grazing Incidence X Ray Optic to collect and collimate x rays Like any WDS spectrometer the spectrometer is open to the vacuum system of the electron microscope to which it is attached This is unlike an EDS type detector where the cryogenic environment of the solid state detector cannot tolerate a direct opening to the vacuum system The MAXray spectrometer presents an additional load on th
22. a 2d spacing of 4 027 Angstroms and LiF 220 with a 2d spacing of 2 848 Angstroms A LiF crystal of the 200 variety with a 2d spacing of 4 027 Angstroms and curved for Iron has the name LiF 200 Fe MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Crystal Installation A LiF crystal of the 220 variety with a 2d spacing of 2 848 Angstroms and curved for Strontium has the name LLiF 220 Sr Notes e These instructions refer to the IbeX controller software version 2 01 and higher e These instruction refer to all versions of the MAXray controller software Most spectrometers are LEFT Handed All MAXray spectrometers are LEFT handed The crystal 2d spacing can be found on the crystal storage box For the PeakCAP software only the crystal names in this file must match those in the PeakCAP database Be careful not to type a zero instead of an O for Oxygen A dash is the same character as a minus sign Please note that the MAXray turret positions begin with ONE not ZERO Example of a CRYSTAL TXT File for a Six Crystal MAXray Spectrometer This text file is created automatically using the save calibration data from the host PC BEAM METER YES ECS TYPE B LEFT HAND 6 DIFFRACTORS POSITION 0 4 145 SPACING 145 HOME ANGLE 240 POSITION 1 NiC100 C SPACING 100 HOME ANGLE 180 POSITION 2 WSi60 N SPACING 59 8 HOME ANGLE 120 MAXray Service and I
23. and if the microscope supports a mechanically operated Faraday cup it can be activated automatically by the software Support has been added for the integration of the and MAXray WDS systems in the Vantage software This includes both qualitative and quantitative analysis The user entered parameters in the Edit gt Acquisition Information dialog box are retained for use in the next scan automatically unless they are cleared One or both of the overlay spectra Acquisition Information parameters can be printed along with the foreground spectrum parameters beneath the spectrum Print Preview can be used to view the overlay spectra acquisition parameters The Controller software now displays all boot sequence tests along with information that identifies whether a particular test passed or failed 2 2 MAXray Service and Installation Manual 2 WDS Software Revisions Version 3 0 0 Hevisions 10 11 12 The elements labeled by the user are now added to the spectrum file When the file is loaded this information is used to label the peaks Older spectrum files can still be read but only the new file format is used when saving spectra The EMSA file format has also been changed to allow saving and loading of labeled elements Any previously stored EMSA files can also be loaded with this version The calibration information is now passed from the controller to the Windows computer when the system configuration is read
24. counts per second over the entire spectrum 2 Its low noise contributes to the excellent light element capability of WDS EDS detectors which are cooled to near liquid nitrogen temperatures to reduce inherent thermal noise continue to fight that noise as their application is stretched to lower low energy thresholds 4 6 MAXray Service and Installation Manual 4 Overview of Parallel Beam Spectrometry and WDS Spectrometers Spectrometers Interfacing Requirements The multielement spectrometer can be adapted to any SEM chamber Since crystals remain within the spectrometer housing only a very small port is required The IbeX Multielement Spectrometer In addition to the MAXray spectrometer NORAN offers another dispersive spectrometer called IbeX In the IbeX multielement device L is fixed and the diffractor simply rotates to achieve the desired angle with the incident beam It is the elimination of the L movement that gives the multielement spectrometer its defining characteristics The fixed L Permits easy interfacing to nearly any SEM chamber Since the crystals do not enter the chamber even very small ports can be used e Reduces the housing size considerably The multielement spectrometer is about one third the weight and half the linear dimensions of full range units Reduces mechanical complexity and therefore cost The multielement spectrometer is about one half the price of fully focusing units Res
25. first turret position see Figure 7 1 MoB4C145 B The name of this crystal SPACING 145 0 The 2d spacing of this crystal in Angstroms HOME ANGLE 240 0 The angular position of this crystal on the turret see dia gram MIN keV_0 121 The minimum energy in the range of this crystal MAX keV 0 395 The maximum energy in the range of this crystal POSITION 1 The second turret position 7 14 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Crystal Installation LEFT HAND RIGHT HAND Figure 7 11 Figure 7 1 Turret Positions Mounting the Crystals On the Turret The crystals MUST be mounted on the turret in a special order The crystal with the largest 2d spacing goes in POSITION see Figure 7 1 The crystal with the next largest 2d spacing goes in POSITION 1 On the IbeX if two or more crystals have the same 2d spacing the crystal that is curved for the lower atomic number element is mounted before the others then the crystal curved for the next highest atomic number is mounted Calculating the Minimum and Maximum keV These values depend on the 2d spacing of the crystal and the angular range of the spectrometer IbeX MIN keV 12 398 2d x 0 7071 MAX angle 45 sinO sin 45 0 7071 IbeX MAX keV 12 398 2d x 0 2164 IbeX MAX angle 12 5 MAXray MIN keV 12 398 2d x 0 9385 MAX angle 68 5 sin63 5 0 9304
26. more pre cisely than EDS which is especially useful when over lapping peaks are a problem Depend ing on the diffractor and element selected resolu tions of 2 eV to 25 eV are possible with WDS MAXray Service and Installation Manual 4 1 Deadtime Element Limits Detection limits Ease of use WDS deadtimes are short because the detector only needs to count not mea sure photons Detects all ele ments with x ray lines below 2 KeV Roughly on the order of 0 1 to 0 01 weight percent depending on the element or about 10 times better peak to back ground ratio than EDS PBS is used only for qualitative analysis 4 Overview of Parallel Beam Spectrometry and WDS WDS deadtimes are short because the detector only needs to count not mea sure photons Detects all ele ments having atomic numbers greater than or equal to beryllium depending on crys tal materials and position Roughly on the order of 0 1 to 0 01 weight percent depending on the element or about 10 times better peak to back ground ratio than EDS WDS needs fine tuning for high pre cision and element standards are required for quanti tative analysis EDS deadtimes are longer than those for WDS In an ana log system dead times 100 to 1 000 times larger than WDS are typical Detects all ele ments having atomic numbers greater than or equal to beryllium depending on crys tal and window
27. on the standards block Be sure to have the specimen at the exact same working distance as carbon Use the Set Spectrometer function to position the spectrometer for aluminum This will automatically change diffractor and reset electronics to pre established defaults Perform an Element Scan to locate the peak intensity energy channel and use the Send Command window to position the spectrometer at that energy Again observe the oscilloscope for the pulse amplitudes 7 12 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Alignment 12 Repeat the Horizontal and Tilt Adjustments to maximize count rate The aluminum and Figure 7 10 13 14 15 16 other high energy lines count rate can be influenced greatly by the specimen to optic distance the Intersection Adjustment will be more critical Be careful if you have changed the minimum tilt stops that the X ray optic does not hit the pole piece during any change to the Intersection Adjustment AXIS HORIZONTAL AXIS INTERSECTION DISTANCE 21 250 21 LLL EL 1 4 N N e C v gt e Z LJ Z Reise TE IS RURALES ae RR ee TILT TILT RIGHT RETRACT RELATIVE RESPONSE DF COUNT RATE TO VARIOUS AXIS ADJUSTMENTS ARBITRARY UNITS INTENSITIES NORMALIZED TO MAXIMUM NOTE THE SHARPNESS OF THE RESPONSE FOR HIGH ENERGY LINES ALSO NO
28. performance validation It is not yet determined if the standard will remain with the customer or be returned to NORAN The standard provided must be used for any sensitivity CPS nA validation 1 2 Start the WDS software by clicking on the MAXray Icon Windows NT From the Services menu click Password and type bestWDS From the Services menu select Monitor COM Port and open the command dialog box by selecting Send Command Move the Send Command window to a convenient location and type the command show in the dialog box The controller should send back configuration data which is stored in the CRYSTAL TXT file on the controller floppy disk and display the information in the Monitor COM Port window There will also be some calibration offsets listed below the configuration data this data is stored in the CALIBRAT TXT file also on the controller floppy disk From the Service menu click Initialize Motors Verify by clicking OK Three motors home in this sequence If any problems are encountered see the Troubleshooting section Start with a Carbon Standard Specimen provided Use 10kV accelerating voltage or the highest available setting for the system Adjust the probe current to 5nA or system maximum whichever is less The magnification should be at 5000X or greater Be sure that the column is aligned and the beam current as steady as possible after flashing FE source Once the carbon specimen is located and in focus the p
29. 1 User Scan 3 User Scan 5 User Scan 2 User Scan 4 User Scan Peak Energy Scan 0000 Beginning Energy 0 000 keV Search Ending Energy 2000 keV Xray Line Step Size ev z Dwell Time i 0 sec Diffractor Detector C Bias volts SCA Baseline 0 00 volts SCA Window 0 00 volts Restore All Restore Save 2 Select an element Click the up and down arrows in the top left corner of the dialog box to select an element Or click Table to select from a periodic table of elements 3 Select the X ray lines Click the X ray Line drop down box to select the K L M and N lines of interest 4 Select a diffractor Diffractor settings are passed to the Scan Setup Window The diffractor options may vary from spectrometer to spectrometer 5 Enter the elements scan parameters Beginning Energy The scan s minimum energy level in keV Ending Energy The scan s maximum energy level in keV Step Size The spectrometer step size during acquisition in eV Dwell Time The dwell time on each step in seconds Detector Bias The optimum detector voltage for the scan range e SCA Baseline The optimum detector baseline voltage for the SCA scan By optimizing this value you can reject counts produced by noise SCA Window The optimum range of detection for the SCA scan in volts By optimizing this value 7 34 MAXray Service
30. 2 930A135989 MAXray Service and Installation Manual 9 MAXray Field Replaceable Parts 9 2 MAXray Service and Installation Manual 10 Cleaning Procedures for Synthetic and Natural Crystal Diffractors Cleaning procedure must be preformed by a Service Representative When crystals are placed in a vacuum environment produced by mechanical pumps diffusion pumps or a combination of the two oil back streaming can occur which will contaminate the surface of the diffracting elements in a WDS spectrometer In some instances the oil films can become thick enough to lower the detected count rates due to absorption The same is true for the x ray detector windows Crystals can be cleaned with care Flow counter windows need to be replaced The following is the recommended procedure for cleaning of various diffractors Synthetic Multilayer TAP PET LiF Synthetic Multilayer diffractors can be cleaned by rinsing with isopropyl alcohol and gently blow drying with nitrogen DO NOT wipe the surface of the diffractor as this can scratch the surface The TAP crystal is the most affected by oil contamination TAP is a water soluble crystal Remove any oil contamination using a cotton ball wetted with acetone It is necessary to etch the crystal after cleaning due to the destruction of the surface layers during cleaning Dip the crystal into room temperature distilled water for 10 seconds and remove Gently wipe and water droplets from th
31. 6 17 2367 16 9362 15 6335 15 6918 60 47 1168 38 6286 37 2082 35 5960 31 8115 31 5419 27 2036 26 6301 24 6201 23 8517 292 IF 22 8555 21755952 21 1381 19 9365 18 9283 TUS 17 3997 17 0435 16 3737 15 4430 15 4023 50 61 5569 48 5145 46 6485 44 3051 39 2386 38 8841 33 2699 32 5390 29 9947 29 0285 28 3015 27 7808 25 8839 25 6416 24 1530 22 9083 21 4853 21 0291 20 5923 19 7722 18 6349 18 5852 17 3178 17 0020 16 9403 16 3089 15 4805 15 4635 45 56 3419 53 8902 50 9037 44 6549 44 2265 37 5561 36 7009 33 7428 32 6265 31 7888 31 1900 29 0161 28 7391 27 0417 29 022 24 0139 23 4978 23 0040 22 0780 20 7959 20 7400 19 3140 18 9592 18 8899 18 1808 1723515 17 2324 16 4661 16 3622 157979 15 3468 35 64 6413 63 7381 51 5998 50 2097 45 5753 43 8845 42 6331 41 7470 38 5826 38 1848 35 7702 33 7857 31 5493 30 8393 30 1623 28 8984 27 1602 27 0847 25 1661 24 6909 24 5980 23 6510 22 4143 22 3889 213727 21 2352 20 4890 19 8938 19 1284 18 8210 18 2522 17 3932 17 3479 16 5988 16 4217 16 0401 15 9000 25 75 13 4 KAP 8 742 PET 67 0145 64 8273 57 9590 57 1688 52 6094 49 0996 45 3318 44 1693 43 0742 41 0606 38 3496 38 2332 35 3101 34 5954 34 4562 33 0433 31 2165 31 1792 29 6925 29 4923 28 4093 27 5494 26 4488 26 0084 251955 23 9732 23 9088 22 8479 225977 22 0593 21 6619 58 8589 57 4205 54 8909 51 3320 51 1516 48 25
32. 78 47 5959 46 1953 45 6894 Service and Installation Manual 3 8 keV 1 347 1 379 1 405 1 462 1 480 1 486 1 521 1 581 1 586 1 644 1 694 1 709 1 740 Element Ho Se Er Tm Br Al Yb Lu Kr Hf Rb Ta 51 Lambda A 2d 9 204 8 99 8 824 8 480 8 377 8 343 8 151 7 842 7 817 7 541 7 319 255 7 125 35 15 2467 25 75 TAP 13 4 KAP 8 742 PET 20 9432 20 4352 20 0407 19 2279 18 985 18 9055 18 4545 17 7304 17 6727 17 0298 16 5125 16 3635 16 0640 43 3834 42 1395 41 1873 39 2606 38 6933 38 5082 37 4667 35 8181 35 6879 34 2488 33 1051 STS 32 1230 63 7709 63 4066 59 6164 56 8453 56 0832 54 5937 MAXray Service and Installation Manual 3 9 4 Overview of Parallel Beam Spectrometry and WDS Parallel beam spectrometry PBS provides significant gain improvements over wavelength dispersive spectroscopy WDS on SEMs WDS in turn provides dramatically better resolution and sensitivity than its energy dispersive EDS counterpart Because EDS is so widely used many new SEM users may not have had an opportunity to use WDS and PBS is such a new development that it might be unfamiliar The following table summarizes differences among the techniques Operating principle Energy wave length range Detector Resolution PBS Geometry and crys tal diffraction allow only photons of a particular wave length to arrive at the detector which cou
33. 950A139539 Rev C IVA Ara Parallel Beam Spectrometer INSTALLATION AND SUPPORT MANUAL For use by authorized NORAN Service Personnel only Thermo NORAN 2551 West Beltline Highway Middleton WI 53562 2697 Customer Support 800 495 3839 Email support thermonoran com Web www thermonoran com Revision history Revision Revision date Principal changes A February 2000 First publication B C April 2001 WDS Software Version 3 1 2 2000 2001 Thermo NORAN All rights reserved Contents 1 Safety Precautions and Technical Specifications AC Power 1 1 P 10 Gas 1 2 Diffractors 1 2 Manual Gate Valve Option 1 2 WD Spectrometer Controller 1 3 Flow Proportional Counter Window 1 4 Motorized Retraction and Manual Retraction 1 4 Detector Touch Sensor Module 1 4 Interface Signal Description 1 5 Sensor BNC 1 5 Stage BNC 1 5 Touch Sensor Module Checkout Procedure 1 6 Equipment 1 6 List of Materials Report for Touch Sensor Board Assembly 1 7 Schematic 1 8 Assembly Drawing top 1 9 Box Drawing 1 10 SEM Venting and Window Protection 1 11 Symbols 1 11 Electrical Specifications 1 11 WD Spectrometer Controller Input Output Connectors 1 12 Mapping BNC 1 12 VAC OK BNC 1 12 PCS 9 pin D Female 1 12 Serial 9 pin D Male 1 13 Motor 15 pin D Female High Density 1 13 Keyboard 5 pin DIN 1 14 Display 15 pin D Female High Density 1 15 PCS Assembly Input Power Requirements 1 15 PCS Assembly Input Out
34. AL Handle P 10 gas in accordance with the manufacturer s Material Safety Data Sheet WARNING Fasten the tank of P 10 gas securely to a fixed object such as a wall or workbench to avoid damage to the tank The tank contains hazardous material under pressure The tank is dangerous if its valve is damaged or the tank is punctured Tools The following tools are necessary for the installation e 5 8 inch open end wrench Instructions 1 9o OY 195285 em 14 If a two stage regulator is not installed on the P 10 gas bottle install it now Wrap the open end of the 3 inch brass nipple with Teflon tape Hemove the 1 4 NPT plug on the two stage regulator and attach the third stage regulator in this opening Close the valves on the two stage and third stage regulators Open the valve on the bottle of P 10 gas Make a note of the total pressure Open the second stage regulator valve Open the third stage regulator to a reading of 2 psi on the valve on the supplied gauge Close the bottle of P 10 gas Attach an in line filter to the outlet side top of the flowmeter Make sure that Teflon tape is used on all fitting connections Attach the flow meter inlet bottom hose barb to the hose barb on the third stage regulator 11 12 13 Attach tubing from the flow meter filtered outlet barb to the spectrometer Attach a small length of tubing from the vent barb and place it in a small beaker of water Open up th
35. AXray Service and Installation Manual 1 Safety Precautions and Technical Specifications SEM Venting and Window Protection SEM Venting and Window Protection Always loosen an unused port cover before venting the SEM Air or nitrogen entering the chamber can easily break the proportional counter window Symbols the following symbols are used on this equipment Symbol Description CAUTION Refer to accompanying documents CAUTION Risk of electric shock Protective Conductor Terminal Frame or Chassis Terminal On supply Off supply O OF PR Electrical Specifications WD spectrometer controller input power requirements 100 to 240 volts ACL 50 60 Hz 2 5 amperes maximum Voltage 100 120 230 240 VAC Frequency 50 60 Hz Fuses 100 120 VAC T 250V 3A 230 240 VAX T 250V 2A Internal on Switching power supply 250V 4A MAXray Service and Installation Manual 1 11 Electrical Specifications 1 Safety Precautions and Technical Specifications WD Spectrometer Controller Input Output Connectors Mapping BNC Signal Description Map Out Output TTL level 0 to 3 5 V 24 mA VAC OK BNC Signal Description VAC OK Input TTL level 0 to 3 5 V 10 mA PCS 9 pin D Female 5 4 3 2 1 OOO OOO 6 7 8 9 Pin number Signal Description 1 HVSET Output Analog level O to 12V 6 mA 2 LLD Output Analog level to 12V 6 mA 3 HVINT Output TTL level 0 to 3 5 V
36. BE BE CAREFUL I NOT SQUEEZE SED CUNE Bre TRE Br rir THE Ee Lie SHULD SEAT COMPLE TEE IN EEE COUN LER BERG THE IND THE OPTIC SUPPORT TUBE SEE BRAWING 4 BELOW Figure 7 3 Installing X ray Optic 6 Viewing the specimen area through the open port insert the optic slowly into the microscope chamber and locate the end of the optic approximately 16mm from the central axis of the column the actual optic surfaces start 3 8mm behind front of optic assembly Observe if the X ray Optic will hit anything when inserted into this position BSED SED etc Referring to the Column Design Drawing note the distance from the Front Plate of the Slide Interface to the linear rail carriage Use a scale to adjust the position of the Carriage to the distance in the drawing With the optic in position verify that the X ray Optic is not hitting any structures within the chamber Tighten the split ring Stop on the Leadscrew at the position of the Carriage EXAMPLE INSTALLATION POLE PIECE SHAPE MAY BE DIFFERENT THE SPECIFIED WORKING DISTANCE THE OPTIC SHOULD POINT TO THE SPECIMEN NOTE SPECIMEN TO OPTIC DISTANCES REQUIRED Figure 7 4 Installing X ray Optic 7 4 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Installation Procedures CARRIAGE CUL PLATE AFTER MOVING THE CARRIAGE TO THE INTERSECTION DISTANCE SPECIFIED
37. IFICALLY THE PARTS SHOWN ON THIS DRAWING ARE CONTAINED THE ASSEMBLY TEST CHASSIS 1764117498 PWA BOARD 1764141715 AMPLIFIER PWA BOARD 140G135551 ELECTRICAL BARRIER ALSO THE CONNECTOR BRACKET CONTAINING THE PCS POWER INPUT CONNECTOR AND THE TWO OUTPUT BNCs ARE INCLUDED ON THIS ASSEMBLY 2 THE CIRCUIT BOARDS ARE UNSCREWED FROM THE STANDDFFS ON THE TEST CHASSIS AND THE CONNECTOR BRACKET IS UNSCREWED FROM THE CHASSIS THE HIGH VOLTAGE AND GROUND WIRE IS UNSOLDERED FROM THE SHV CONNECTOR ON THE TEST CHASSIS 3 REMOVE THE BOARDS AND CONNECTOR BRACKET FROM THE CHASSIS MAINTAINING ALL ELECTRICAL CONNECTIONS PLACE BOARDS ON A TABLE 4 IF INSTALLING PCS ELECTRONICS ON A NEW MAXRAY MOUNT THE ELECTRICAL BARRIER 140G135514 IN PLACE AS SHOWN ON THE SPECTROMETER BODY IF REPLACING THE PCS ELECTRONICS THEN THE BARRIER SHOULD NOT BE REMOVED A NEW ASSEMBLY APPLY 3 WIDE KAPTON TAPE ALONG THE SIDE OF THE ELECTRICAL BARRIER WHERE THE HV II PWA BOARD IS LOCATED THE TAPE SHOULD BE CUT BACK FROM THE PAINT EDGE BY 0 75 TO ALLOW FOR THE COVER CONTACT WITH THE SPECTROMETER BODY 6 SECURE THE CIRCUIT BOARDS USING BUTTON SCREWS AND PLASTIC SPACERS SECURE THE CONNECTOR BRACKET WITH TWO SCREWS BE SURE TO LOCATE WIRES AND CABLES PBS EXTENSION BETWEEN THE TWO BOARDS IN THEIR RESPECTIVE SLOTS IN THE ELECTRICAL BARRIER 2 je SHRINK TUBING HV WIRE
38. IONS l Remove the HV coax ground lead from the window mount ly removing the M3 screw Remove remaining screws which will allow the WINDOW SUPPURT to fall away The broken window may be stuck against the flow counter opening c Inspect the interior of the COUNTER for loose debris or possible damage to the ANUDE WIRE If debris is seen inside the counter the counter Should be removed from the spectrometer for Cleaning Remove 3 Me screws from the base of the counter and disconnect HV and GAS TUBING Blow debris out using dry Ne If needed a methanol rinse can help clean out small pieces of the window material 3 CAREFULLY remove the new WINDOW from the shipping box by grasping the stainless steel foil at the edge with tweezers Position the window over the WINDUW SUPPORT such that the ALUMINIZED side will face into the flow counter during operation 4 Pick up the WINDUW and WINDUW SUPPURT and position over the opening of the flow counter Be sure the o ring is clean and seated in the groove DU NUT slide the WINDUW laterally while pressed against the o ring or damage to the window will occur Insert all four M3 screws and tighten uniformly until the WINDLIW is seated tight up to the opening Remove the M3 screw needed for ground connection 109091 Me x 6mm SACS SCREWS 3X 6 I the flow counter was removed from the spectrometer re mount to the pivot arm and connect the HV and GAS
39. LACE DECIMALS 010 MACHINED INSIDE RADIUS 015 MAX 3 PLACE DECIMALS 1 005 MACHINED SURFACES we HOLES 005 BREAK SHARP CORNERS 005 010 4001 351 eck 1 HAND CRANK MADE BY DATE 11 04 97 MAXray Service and Installation Manual 7 47 8 Additional MAXray Drawings MAXray Service and Installation Manual 8 1 8 Additional MAXray Drawings 8 2 MAXray Service and Installation Manual MAXray Wiring and Plumbing DETECTOR BUNDLE dn CO Q S MM 2 E s u ge M MOAN ale MEOS 9 91 3 Sole ES DRANGE ORANGE 10 URANGE lt ORANGE 15 BLUE lt BLACK 5 0 03 esu BLUE lt VIOLET 10 M GREEN lt 22 or z GREEN BLACK GREEN lt WHITE 2 RED C nu QJ 2 K THRU URANGE 20 N ES Ds ses lt THRU DRANGE 15 EXCEPT DETECTOR Spee 20 SIS lt THRU ORANGE 20 LOWER LIMIT B gt lt THRU YELLOW EN JE TE Ox lt THRU RED u 41 p T CO p ON Ui v 20 7 CI DE T HDME mE DE a a 0 41 E zu ty T DETECTOR B ip RUE MDTHR T 211 n iom FLIP MOTOR COUNTER SEET m pt 5 lt lt Q Z x I BLACK 20
40. MAXray keV 12 398 2d x 0 2419 MIN angle 14 sin 14 0 2419 MAXray Service and Installation Manual 7 15 Crystal Installation 7 Installation Alignment and Calibration Procedures For example If the 2d spacing of the crystal is 145 0 Angstroms IbeX MIN keV 12 398 145 0 x 0 7071 12 398 102 529 0 121 IbeX MAX keV 12 398 145 0 x 0 2164 12 398 31 378 0 395 MIN KeV KeV MIN MAX Turret Position Sample LiF 2 ma PET TAP WSi60 NiC80 NiC100 4 145 4 200 Crystal Names The crystal names can be a combination of the crystalline material the 2d spacing and the element for which they were curved If the crystal is made from a natural material LiF PET TAP the 2d spacing is omitted from the name If the crystal is made from synthetic material MoBAC WSi CrSc the 2d spacing is included the name If the crystal is curved for a specific element always on the never on the MAXray the atomic symbol is added at the end of the name preceded by a dash No distinction is made between K L or M lines For an MoB4C crystal with a 2d spacing of 145 0 Angstroms that is curved for Boron the name is MoB4C145 B The same crystal used on a MAXray will have the name MoB4C145 Special Case LiF A Lithium Fluoride LiF crystal can come in more than one type LiF 200 with
41. NSTALLATION 930A 135988 PI MAXray Service and Installation Manual 8 6 UNLESS OTHERWISE SPECIFIED DIMENSIONS ARE IN INCHES ANGLES 1 2 PLACE DECIMALS i 010 MACHINED INSIDE RADIUS 015 PLACE DECIMALS 005 MACHINED SURFACES HOLES 005 BREAK SHARP CORNERS 005 010 Diffractor Replacement Instructions Posi Ihe MAXray Spectrometer is shipped from the factory with the standard set of diffractors already loaded However the occasion may arise where a diffractor must be replaced due to change in customer applications new types of diffractors becoming available or some type of upgrade NOTE ALWAYS WEAR GLUVES WHEN HANDLING DIFFRACTDRS DU DRUP DIFFRACTURS UR TOTAL LUSS MAY UCCUR l Power down the MAXray CUNTRULLER and disconnect the PCS PUWER cable Reboot the controller Initialize the motors to home which will pull the Theta Mechanism to 15 degrees to facilitate easy exchange of crystals 3 In the Services menu select Diffractors and then select the diffractor to le replaced or changed This will position the diffractor at the active position which also facilitates removal Vent the column using typical precautions Controller power can stay on with the PCS power cable disconnected and remove the side cover of the spectrometer 4 Remove the 2 56 screw holding the diffractor backing on the TURRET Pull the diffractor off of the PINS at the botto
42. R IS USED DURING BIAS AND SCA THIS QUTPUT SHOWS THE SHAPED PULSES FROM THE PROPORTIONAL COUNTER AND IS VIEWED WITH AN OSCILLOSCOPE PD BNC ON THE SPECTROMETER IS USED FOR RATEMETER INPUT A BNC COAX IS PROVIDED FOR OPTIONAL HOOK UP DIRECTLY TO THE HOST COMPUTER 1 w 10162 8 8 98 02 10 98 _ DAE 930A 155986 Service and Installation Manual 7 45 Alignment Procedure Flow Chart Load Standard Specimen Use typical sample holder for Customer Load Standard Specimen Use typical sample holder for Customer Move to Aluminum Specimen or Highest Energy Line Available for SEM Energy FOCUS USING WD MICROMETER ONLY Obtain an Element Scan at AlKa Using Existing Calibration Points Set SEM to 10kV or MAX for instrument 1nA or highter if possible 5000X on Carbon Speciment Obtain an Element Scan at C Ka Using Existing Calibration Points YES Obtain an Element Scan at AlKa Using Existing Calibration Points Specifications for CPS nA Proceed to CALIBRATION Set Specimen at 15mm W D Fix Focus Control at Repeatable Settings MAXray at Designed Instersection Distance Specifications for CPS nA and FWHM OK Position Spectrometer at Peak Centroid Energy Send Command energy equals X XXX Peak Shapes OK Intensity Position Spectrometer on Lower Energy Peak of Convolved Gaussians
43. SEM 1 11 Verision 3 2 1 Controller Software 2 2 Version 3 0 0 Changes 2 3 Version 3 0 0 Fixes 2 4 Version 3 0 0 Revisions 2 2 New Windows Software Features 2 2 Version 3 0 0 Changes 2 3 Version 3 0 0 Fixes 2 4 Version 3 1 2 Revisions 2 1 Controller Software Features 2 2 New Windows Software Features 2 1 Verision 3 2 1 Controller Software 2 2 Windows Software Changes 2 1 Windows Software Fixes 2 1 W Wavelength of Interest 4 3 WD Spectrometer Controller 1 3 WDS Applications 4 9 WDS Software Revisions 2 1 WDS Principles of 4 3 Weight 3 3 Window Protection 1 11 Window Voltages 7 21 Windows Software Changes 2 1 Windows Software Fixes 2 1 Wiring and Plumbing Drawing 8 3 Working Distance 6 1 WSi 50 Diffractor 9 1 WSi 60 Diffractor 9 1 WSi 80 Diffractor 9 1 X X ray Optic 9 1 X ray Optics 4 5 Index 4 MAXray Service and Installation Manual
44. T 4V BUT LESS THAN 42V PULSE SHOWN WOULD SATISFY THE CONDITIONS OF THE SCA AND A PULSE WOULD BE COUNTED Figure 7 9 SCA Settings from Oscilloscope 9 10 11 Loosen the Tilt Adjustment Lockdown screws to allow the movement of the spectrometer tilt axis Use the Tilt Adjustment Screw to change the tilt of the spectrometer to maximize countrate DO NOT change the Minimum Tilt Stops as these should prevent the optic from hitting the pole piece If the count rate only drops as the spectrometer is tilted retract the X ray optic Intersection adjustment about 2 3 mm and loosen the Minimum Tilt stops by 1 4 turn and then try to maximize counts using the Tilt Adjustment Screw You may need to iterate between the Three Adjustment Axis a few times being sure you are at the true peak for the element being analyzed Repeat scans over the peak and then set the spectrometer to the energy angle for maximum intensity Do not be concerned if the peak does not fall at the correct energy Calibration offsets will be added later to correct the peak position relative to the energy axis Also the port adaptor and flange are designed to position the spectrometer such that minimum adjustment is required Avoid severe changes to the nominal position If drastic changes are needed something may not be assembled correctly Once you obtain expected intensities for carbon 3000 cps nA at 5kV 6000 cps nA at 10 move to the aluminum specimen
45. TE FOR THE INTERSECTION DISTANCE CARBON INTENSITY WOULD PROBABLY KEEP INCREASING DESIGNED FOCUS IS FOR THE HIGH ENERGY LINE Relative Intensity Response The aluminum adjustment is very sensitive see Figure 7 10 and can be difficult Attempt to obtain the best possible count rate as this will assure alignment for all elements of interest Again be absolutely sure the spectrometer set at the peak intensity energy by scanning over the peak If the peak is split two peaks or severely distorted set the spectrometer to the energy at the midpoint between the peaks and re adjust all axis of the spectrometer for maximum counts After adjusting for maximum aluminum intensity check alignment again at the silicon K line Minor adjustment of the Tilt and Intersection is all that should be required The same spectral distortions can occur at silicon and these should be eliminated or minimized The use of TAP for silicon is stretching the limits for the crystal so some peak distortion is expected Once silicon intensity and resolution specifications are obtained the adjustment axis must be locked down The spectrometer is positioned at the SiKa peak energy maximum counts and the Ratemeter is observed while tightening the lock down screws The Average Maximum CPS must be maintained during the lock down Tighten Tilt Adjustment Lockdown screws to prohibit changing tilt It may be necessary to alternate between Lockdown and Minimum Tilt screws wh
46. TUBES Re attach the HV GRUUND to the front of the flow counter using the M3 screw 35325A135658 MAXroy FLUW CUUNTER ASSEMBLY 80 123 7 88 FOZZ LI RING VITEN 32325A13571 MAXroy GFPC WINDIIW PRELINE 20 MUX I Eso IOI WINDUW SUPPORT 280A126600 M3 x 6mm L SHC S NOTES If installing with the spectrometer mounted on the column be sure nothing falls onto the diffractors Move the counter into an easily accessible position FINISH NEE 2 WISE 68 1 0 DIMENSIONS ARE IN INCHES ANGLES 315 PLACE DECIMALS 010 MACHINED INSIDE RADIUS 015 3 PLACE DECIMALS z 005 MACHINED SURFACES a HOLES 005 BREAK SHARP CORNERS 005 010 MADE BY Jv aaa b DIOC QS NURAN Instruments 2 1025 22722248 pe MAXRAY FLUW REPAIRZREPLACEMEN I DATE o DATE SE VISIUNS 3304135987 PI MAXray Service and Installation Manual 8 4 PCS Electronics Integration on MAXray Spectrometer BOTTEN 1405128929 1 ELECTRICAL CUVER 140G13550 M1 ELECTRICAL BARRIER 1406135514 1 l o G f 1 Oo f i HV II PWA BUARD 176A11749e AMPLIFIER PWA BUARD 1765141715 GRDUND WIRE ASSEMBLY NOTES FOR MOUNTING OR REPLACING THE PCS ELECTRONICS ON MAXRAY SPECTROMETER 1 NORAN P N 700X135656 IS AN ASSEMBLY OF WIRED AND TESTED PCS ELECTRONICS BOARDS SPEC
47. The Send Command dialog box now has a list box of commands to select from There are now four distinct sounds corresponding to Ok Problem Alert and Question These sounds can be toggled ON or OFF from the Options menu The Peak Search dialog box has been enhanced to now include settings for the scan range step size and dwell time The peak position found using the Peak Search scan can now be recorded and used as the default energy for the selected element Communication ports COM3 and COM4 can now be used along with COM1 and COM2 to operate the spectrometer controller This allows the WDS software to be used along with a wider variety of NORAN applications Version 3 0 0 Changes 1 10 11 The Windows program version number and the Controller software version number now match making it easy to identify compatible versions of both More space has been allocated for displaying the file name in the Edit Acquisition Information dialog box and when printed the file name appears without the path The Service gt Turret Scan menu selection is disabled for IbeX spectrometers after the Service gt Initialize Motors function has been performed The Settings Beam Current menu selection is disabled when a beam current meter is not attached to the controller The default file name extension for a spectrum file has been changed from wds to wdx to eliminate confusion with the Vantage software The original wds type of fil
48. URAN Instruments WINE SS EAE l E lt FEGIF IED DIMENSIONS IN INCHES ANGLES 21 c PLACE DECIMALS 010 MACHINED INSIDE RADIUS 015 MAX 3 PLACE DECIMALS 005 HOLES 005 MACHINED SURFACES ea BREAK SHARP CURNERS 005 010 PS SLREMSTIG DRAWING FUR ILLUS IRA TIUN JVH 03 10 98 REV NO DATE KEA UNS PART NUMBER 9304135970 MAXray Service and Installation Manual 3 7 MAXray Allowable Bragg Angles for Various Diffractors keV 0 109 0 185 0 282 0 331 0 341 0 355 0 392 0 395 0 452 0 461 0 496 0 511 0 523 0 532 0 568 0 573 0 606 0 637 0 677 0 69 0 705 0 733 0 776 0 778 0 833 0 848 0 851 0 883 0 929 0 930 0 972 0 978 1 012 1 041 1 081 1 098 1 131 1 185 1 188 1 240 2059 1 282 1 293 Element Lambda A 2d 113 747 67 016 43 965 37 456 36 358 34 924 31 628 31 387 27 429 26 894 24 996 24 262 23 706 23 305 21 827 21 637 20 459 19 463 18 313 17 942 17 586 16 914 15 977 15 936 14 884 14 620 14 569 14 041 13 346 13 331 12753 12 677 2 291 11 910 11 469 11 291 10 962 10 462 10 436 9 998 9 895 9 671 9 589 160 45 3097 24 7621 15 9488 145 51 6710 2755219 17 6501 120 33 9499 21 4920 18 1879 17 6368 100 42 0796 26 0813 21 9972 21 3201 20 4408 18 4378 18 2928 15 9198 15 6010 80 56 8983 33 3366 27 9177 27 0310 25 8839 2006 5 23 1003 20 0515 19 6438 16 2069 17 654
49. WDS Applications 4 9 Setting Up 4 9 Resolution of W Ta and Si 4 9 Analysis of Boron In BPSG 4 10 Acknowledgments 4 12 References 4 12 5 Vacuum Considerations When Using the MAXray Parallel Beam Spectrometer 6 Maintaining a Constant Physical Working Distance and Focus 7 Installation Alignment and Calibration Procedures Software Installation Instructions 7 1 Install on a new system 7 1 Install on an existing system 7 1 MAXray Installation 7 2 Required Tools 7 2 Installation Procedures 7 2 Alignment 7 9 Crystal Installation 7 14 Contents Creating the IbeX MAXray Crystal Definition File 7 14 Mounting the Crystals On the Turret 7 15 Calculating the Minimum and Maximum keV 7 15 Crystal Names 7 16 Special Case 7 16 Notes 7 17 Example of a CRYSTAL TXT File for a Six Crystal MAXray Spectrometer 7 17 MAXray Calibration Procedure 7 19 Turret Scan 7 19 Peak Offsets 7 20 Detector Bias Voltage SCA Baseline and Window Voltages 7 21 Calibration Tips 7 21 List of Commands 7 21 Troubleshooting 7 23 Motor s Fails to Move When Commanded to Home 7 23 Motors Move But Fail to Home as Specified 7 23 Motors Home as Specified but Error Occurs at Extreme Positions 7 23 Turret Home Angle is Not 90 Degrees to the Baseplate as Specified 7 23 Motor Movement is Noisy 7 24 No Counts Detected 7 24 Poor Intensity CPS nA Not Meeting Specifications 7 25 Intensities OK Resolution P B Poor 7 25 Detector and D
50. X 38H X 58D cm MAXray Service and Installation Manual 3 3 MAXray Standards 3 MAXray Parallel Beam Spectrometer MAXray Standards Element Line Standard Diffractor keV FWHM eV CPS nA OV200H OV200H 0V145H OV100N OVO80E OVO80E 0 060 0V060 TAP TAP TAP MAXray ER Specification Spectral Elemental 22 Resoluction Intensity Peak to Line a Standard 9 cts sec nA Background ppm Pure Be NOR200H Pure B NOR200H Pure B NOR80N Pure C NOR80N BN 80 NOR80N NOR60A Al TAP Si TAP Si PET Sc PET Fe LiF Cu LiF Notes 1 The NORAN smaple standards are part number 555A135192 NOR is a multi layer synthetic diffractor Resolution is Full Width Half Maximum FWHM Bo f I9 Intensities are peak counts normalized to time and beam current measured with a Faraday 5 Background positions for synthetic diffractors are peak energy 1 5A and peak energy 2 3 K_ Kb for natural diffractor 3 4 MAXray Service and Installation Manual 3 MAXray Parallel Beam Spectrometer MAXray ER Specification 6 Concentration Detection Limit Cp is calculated using the following formula Ziebold 1967 gt 3 29 T x P x Where total count time 1000 seconds P peak count rate 0 1 uA specimen current P B Peak to Background ratio 7 Guaranteed values are 80 of published specifications
51. X Multielement Spectrometer 4 7 Initialize Motors 7 6 Input Output Connectors PCS Assembly 1 16 WD Spectrometer Controller 1 12 Installing P 10 Gas 1 17 7 32 7 33 7 35 Intensity at Low Beam Voltage 3 1 Interface Signal Description 1 5 Interfacing Requirements 4 7 K keV 7 15 L Leadscrew 7 4 LiF Diffractor 10 1 List of Commands 7 21 Materials 1 7 Low Level Discriminator LLD 7 33 Index 2 MAXray Service and Installation Manual M Maintaining 6 1 Maintaining a Constant Physical Working Distance and Focus 6 1 Manual Gate Valve Option Safety Precautions 1 2 Manual Retraction Safety Precautions 1 4 Materials 1 7 MAXray Specifications 3 2 MAXray System Drawing 45 Microswitch Limit Switch 9 1 Minimum Tilt Stops 7 12 MoBAC 145 Diffractor 9 1 Monitor COM Port 7 6 Motor Error Occurs at Extreme Positions 7 23 Fail to Home 7 23 Fails to Move 7 23 Movement is Noisy 7 24 Heplacement and Installation Drawing 8 6 Motorized Retraction Safety Precautions 1 4 Mounting the Crystals 7 15 N New Windows Software Features 2 1 2 2 NiC 100 Diffractor 9 1 NiC 80 Diffractor 9 1 No Counts Detected 7 24 O Operating Principle 4 1 Optic Support Tube 7 2 Optical Sensor 9 1 Osciloscope 7 9 7 10 Index P P 10 Gas Installing 7 8 Safety Precautions 1 2 Parallel Beam Spectrometry 3 1 PBS Schematic Diagram 7 PCS Assembly Input Power Requirements 1 15 Input Output Connectors 1 16 PCS Electronics 9 1 Dr
52. allel beam of x rays of wavelength A is made incident on a material whose structure comprises a precisely parallel arrangement of planes atomic molecular or otherwise with interplanar spacing d X Ray 1 X Ray 2 d dsin gt a dsinO Figure 4 1 Bragg s law derivation Wave 1 is reflected into 1 from the top plane in the diffractor or crystal with the angle of incidence 0 equal to the angle of reflection Wave 2 2 being reflected from the lower plane travels an extra distance in the material equal to dsin dsin0 For an intense diffracted beam to result wave segments 1 and 2 must be in phase which in turn requires that the extra path length traveled by wave 2 2 must be an integral number of wavelengths that is 2 456109 must equal n MAXray Service and Installation Manual 4 3 Principles of WDS 4 Overview of Parallel Beam Spectrometry and WDS If Bragg s law is satisfied then the emerging waves will add in strength If not there will be destructive interference with one wave cancelling another and only a very weak beam will result As the crystal is scanned through an angular range the diffractor becomes a highly reflective mirror only at the Bragg angle the specificity of the angle of high reflectivity is the key to the high resolution of WDS WD spectra are acquired by scanning a diffractor and detector through a range of angles As Bragg s law is satisfied for various waveleng
53. and Installation Manual 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration you can reject counts produced by noise The sum of SCA Baseline and SCA Window must not exceed 8 4V 6 Save the defined parameters To save the set of parameters click Save Click Yes to confirm the save command To reset to the systems default settings click Reset All The bias settings and the element table are reset Click Yes to confirm the reset all command To reset the current element only click Reset Be Beryllium This buttons name changes each time the current element changes and only resets the current element 7 Apply the changes to Scan Parameters Click Close Beam Current An accurate beam current must be obtained for Quant Analysis Current varies for many reason s The beam current reading is constantly updated while running Note Not all systems have the optional equipment necessary to perform this procedure 1 From the Settings menu click Beam Current Measurement 6 948 nAmps Smooth Beem Specimen Quantitative Analysis Options Fereday Sup Amp Meter 2 Select a reading location The beam current reading is obtains from the Specimen or Beam Specimen Reads at the stage level Beam Reads at the beam device level 3 Start the beam current reading Click Start The beam current displays and continu
54. and Installation Manual keV keV eV Sec keV keV keV eV Sec keV Counts Counts Counts 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration Diffractor name Diffractor 2d spacing Angstroms Element and x ray line used Theoretical peak energy of the x ray line keV Sample used Accelerating voltage keV Beam current nAmps First diffractor scan First detector scan Start keV Start End keV Peak Step eV Step Dwell sec Dwell Peak keV Counts Peak Second diffractor scan Second detector scan Start keV Start End keV End Step eV Step Dwell Sec Dwell Peak keV Counts Peak Crystal motor offset computed Theoretical degrees Measured degrees Computed degree offset Detector motor offset computed Theoretical degrees Measured degrees Computed degree offset Energy scan Beginning Energy keV Ending Energy keV Step Size eV Dwell Time Sec Detector Bias volts SCA Baseline volts SCA Window volts Crystal Name Peak keV Counts Detector Bias Voltage Calibration Detector Bias Voltage Volts Single Channel Analyzer SCA Voltage Calibration SCA Baseline Voltage Volts SCA Window Voltage Volts keV keV eV Sec keV keV keV eV Sec keV Calibration Records Counts Counts Counts MAXray Service and Installation Manual 7 41 Calibration Records 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration
55. and Technical Specifications Touch Sensor Module Checkout Procedure Equipment VOM e Test resistor divider network and clip leads e Phillips screwdriver small NOTE If replacement of any part is required on the printed circuit board removal of ALL flux is required The control integrated circuit and associated com ponents are all high impedances and any residue flux can adversely affect the circuit operation NOTE If trouble shooting the board is required a nine volt battery and contains a de 15 19 buzzer LED and control circuitry The input from the touch sensor is via a coax connector The output to the stage automation system is also from a coax connector The control circuitry consumes approximately 25 micro amperes during normal operation and approximately three milliamperes when touch occurs Hemove the module cover by removing the four small Phillips screws Install the 9 volt battery if necessary Measure the voltage across the battery to insure a charged battery Measure the voltage at the output Stage BNC The voltage should be between 4 and 5 volts Use a clip lead and short the input Sensor BNC The LED should turn on the Buzzer should sound and the voltage at the output Stage BNC should go to approximately O volts Hemove the battery from the module Use the following resistor divider network to rest the low battery voltage condition 9 VOLT BATTERY 2K49 4K99 M
56. arallel Beam Spectrometry and WDS WDS Applications Achieving Required Motions in IbeX Wavelength spectrometers require precise and repeatable mechanical movements Conventional spectrometers utilize complex mechanical linkages to achieve the relative motions of crystal and detector such linkages are fragile require frequent adjustment must be moved slowly and are prone to some degree of backlash The eliminates these linkages utilizing two in vacuum encoded brushless servomotors to independently position the crystal and detector under computer control Such motion is referred to as positioning by independent parameterization WDS Applications A typical example of a WDS application is described below Setting Up TiN In TIN the NKa and the TiLo LB lines are separated by only about 58 eV Since the peak resolutions at the nitrogen and titanium energies are only around 30 eV the two peaks can be easily resolved and a clear distinction can be made between Ti and TiN samples without the need for deconvolution A few typical examples of WDS applications from both types of spectrometers are given in the following sections Resolution of W Ta and Si Another common overlap area in EDS is the Si with the W and or Ta M lines Sika is at 1739 eV while the W Ma is at 1774 eV and the Mp at 1835 eV Less than 100eV separate these three peaks Ta and Si present an even more severe overlap with the two Ta M lines bracket
57. arbon sample in the beam and use the Acquire Element Scan function perform a scan over the carbon K alpha peak Although it is supposed to be at 0 282 keV the spectrometer has not yet been aligned and the peak may be several eV away from this energy in either direction When the scan is complete and the peak has been located use the energy equals command from the Send Command window to move the spectrometer to the energy of the peak center which is the energy with the maximum number of counts When the spectrometer has stopped use the Service Turret Scan function to perform the turret scan When the scan is complete a peak centroid will be computed and displayed over the turret scan plot Apply this initial turret offset value to ALL diffractors by editing the HOME entry in the CRYSTAL TXT file After the Carbon alignment has been completed perform this turret scan for one x ray line using each of the six diffractors Use the table below to record your measurements When complete edit the CRYSTAL TXT file using the Windows Notepad program so that the crystal home positions match the angles found during the calibration It is necessary to reboot the controller after editing this file Retest the carbon sample again to check the success of the turret calibration NE Diffractor Name Original Home Angle Calibrated Home Angle MAXray Service and Installation Manual 7 19 MAxXray Calibration Procedure 7 Installation Alignment a
58. awing 8 5 Peak Offsets 7 20 PET Diffractor 10 1 Physical Dimensions 3 3 Plumbing Drawing 8 3 Poor Intensity 7 25 Resolution 7 25 Position the MAXray 7 6 Precautions 1 1 1 2 Pressure Relief Valves 7 6 Principles of WDS 4 3 Proportional Counting System Safety Precautions 1 3 Pump down curve logging 7 7 Q Quant Analysis 7 35 H Replaceable Parts 9 1 Required Tools 7 2 Resolution 7 25 S SCA Counter 3 3 SCA Output 3 3 MAXray Service and Installation Manual Index 3 Index SCA Scan 7 33 Baseline 7 21 7 34 Window 7 34 Schematic Diagram of PBS Spectrometer 7 Seal Off Plate 7 5 SEM Vacuum Considerations 5 1 SEM Venting and Window Protection 1 11 Sensor BNC 1 5 Setting Up Beam Current Meter 7 36 Signal Interface Description 1 5 Silicon alignment 7 13 Slide Interface 7 2 Software Installation Instructions 7 1 Specifications Electrical 1 11 MAXray 3 2 Specimen 7 35 Spectrometer 7 5 Horizontal 7 10 Intersection 7 10 Mount Block 7 2 Surface Area 5 1 Tilt 7 10 Volume 5 1 Stage BNC 1 5 Step Size 7 34 Synthetic Multilayer 10 1 System Drawing 45 System pressure logging 7 7 T TAP Diffractor 9 1 10 1 Theta Motor 9 1 Tilt Adjustment Lockdown 7 12 Timer 3 3 Tools 7 2 Touch Sensor Checkout Procedure 1 6 Touch Sensor Module 1 4 Troubleshooting 7 23 Turret Home Angle is Not 90 Degrees 7 23 Motor 9 1 Scan 7 19 230 Volt input 1 18 U Ultrahigh Resolution 3 1 V Venting
59. cal Peak Energy and Measured Peak Energy Compute and record the final crystal offset Add the calibration offset to the original crystal offset Compute and record the final detector offset Add the final crystal offset to the original Detector offset Remove the original offsets From the Service menu click Send Command Example CRYSTAL 0 POINT REMOVE 23 1731 In this example the offsets for the angle 23 1731 degrees were removed from the first crystal at position O Set the final calibration point From the Service menu click Send Command Example CRYSTAL 0 POINT SET 23 1731 0 0513 0 1562 In this example a crystal offset of 0 0513 degrees and a detector offset of 0 1562 degrees will be used for an angle of 23 1731 degrees for the first crystal at position O NOTE Use only one space between words and numbers NOTE Always use four decimal places no more no less Write the calibration data to the controller disk From the Service menu click Send Command Example SAVE CALIBRATION DATA Note Make sure the floppy disk is inserted into the controller and not write protected Record these scan parameters Setup a narrow energy scan around the theoretical peak energy From the Acquire menu click Scan Setup MAXray Service and Installation Manual 7 31 Detector and Diffractor Motor Calibration 7 Installation Alignment and Calibration Procedures Typical scan parameters are plus minus 0 025 k
60. ce 20 mm for improved solid angle for light elements Optic optimized for 100 eV to 1 8 keV detection Improvement in intensity counts second nanoamp of up to 50 times over conventional wavelength dispersive spectrometers depending on the element of interest Horizontal or vertical orientation In a vertical mount the narrow profile creates no interference with instruments on other ports Parallel x ray beam allows the use of large flat undistorted diffractors Solid angle of x ray collection is determined by the distance from the sample to the x ray optic and is unaffected by the distance to the diffractor Retractable slide for use when the optic must be moved away from the sample The MAXray spectrometer converts a divergent beam of x rays to a parallel beam so no slit is needed High resolution is maintained without sacrificing count rate Broadband x ray optic and 6 diffractor turret to cover the energy range of 100 eV to 1 8 keV Gas flow proportional counter with integrated pulse processing electronics Reliable and proven in vacuum servomotor positioning of the detector and diffractors Independent microprocessor controller for movement and data acquisition Optional gate valve for isolation from the microscope column Backed by the NORAN Instruments support network 3 2 MAXray Service and Installation Manual 3 MAXray Parallel Beam Spectrometer MAXray Specifications Control and Data Acquisition Electronics Con
61. cialist e Never remove system connections when power is applied MAXray Service and Installation Manual 1 1 P 10 Gas 1 Safety Precautions and Technical Specifications Never override or cheat electrical or mechanical interlock devices When working around high voltage sources be sure all power inputs are disconnected When working around capacitors batteries and other power sources allow a few minutes for capacitors to discharge after power has been removed Avoid contact direct or through metal tools or jewelry with any uninsulated internal electrical component without being so instructed either by this manual or by a qualified NORAN Instruments support specialist CAUTION The fuse in the power entry module must match the line voltage P 10 Gas The flow proportional counter requires a special gas called P 10 Tanks of P 10 gas are available from local bottled gas suppliers The tank of P 10 should have a two stage regulator with a 1 4 NPT fitting to accept the NORAN supplied third stage regulator WARNING P 10 gas is a HAZARDOUS MATERIAL Handle P 10 gas in accordance with the manufacturer s Material Safety Data Sheet WARNING Fasten the tank of P 10 gas securely to a fixed object such as a wall or workbench to avoid damage to the tank The tank contains hazardous material under pressure The tank is dangerous if its valve is damaged or the tank is punctured However the gas is not flammable Di
62. diffraction must occur within the angular range of the spectrometer The maximum angle allowed in the MAXray is 68 and the minimum angle is 14 If CKa at 0 282 keV is to be analyzed the NiC 2d 100 angstroms is suitable Using Bragg s law Equation 1 the CKa peak on is at 25 26 Performance is another consideration in choosing a diffractor Consider one of the more involved choices that for boron specifically and for light elements in general MAXray Service and Installation Manual 4 5 X ray Optics 4 Overview of Parallel Beam Spectrometry and WDS Detectors Wavelength spectrometers almost exclusively use gas proportional counters X rays diffracted from the crystal enter the counter and cause ionization of the contained gas There is a central wire along the height of the detector in a direction normal to the sample crystal detector plane parallel to the crystal width to which a bias voltage of typically 2000 volts is applied The electrons freed by the ionization process then are accelerated to the wire creating new ionizations in their path ultimately producing a current pulse that is proportional to the energy of the absorbed x ray As in EDS the current pulse is converted to a proportional voltage pulse in an field effect transistor FET amplified converted to a digital signal and counted Unlike EDS however the FET is held at room temperature and the digitizing is done in a single channel analyzer SCA
63. e located outside of the focal plane of the MAXray Optic ALIGNMENT OF MAXray keV 10 0 Specimen A Set electronic focus controls at the midpoint center coarse and fine focus knobs of the range for the designed working distance for the MAXray being installed may change for each installation see column drawing Set the PROBE CURRENT Clear LENS de Gauss lens if available FOCUS the specimen image using the fine Z AXIS STAGE CONTROL ONLY Note that changing areas on the same specimen can change specimen height and focus Refocus using the stage controls only CHANGE keV STILL ON SPECIMEN A To focus image adjust the ELECTRONIC CONTROLS on console only DO NOT CHANGE Z AXIS CONTROL ON STAGE SAME keV CHANGE SPECIMEN to B Focus image using fine Z AXIS STAGE CONTROL ONLY DO NOT CHANGE CONSOLE FOCUS Note that the lower loop you cannot change keV and specimen at the same time If the loop is broken at any time you would typically have to return to the baseline established during alignment The user must become proficient in placing the specimens to be analyzed at the correct stage position The use of height setting jigs is strongly recommended MAXray Service and Installation Manual 6 1 6 Maintaining a Constant Physical Working Distance and Focus 6 2 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Software Installation Instructions
64. e main valve of the tank of P 10 gas There should be 2 3 bubbles every second coming from the tubing in the beaker Hemove the tubing from the beaker of water MAXray Service and Installation Manual 1 17 Maintenance 1 Safety Precautions and Technical Specifications Maintenance Converting Input to 230 Volt AC for Europe The switching power supply has a universal input autoranger that eliminates the requirement of changing jumper wires or switches to change the input voltage range Nevertheless the correct fuse s must be installed according to the input AC voltage For 100 120 VAC operation use one T 250V fuse For 230 240 VAC operation use two T 250V 2A fuses bx20mm Parts Required Fuses 2A 5x20 mm fuses 2A T 250V quantity 2 NORAN Instruments part number 510A126840 Continental European power cord quantity 1 NORAN Instruments part number 600A125780 Procedure 1 Remove the fuse block cover in the Corcom PEM using a small blade screwdriver or similar tool Remove the fuse and unscrew the fuse holder form the plate Flip the fuse holder over so that it can accommodate the two 5x20mm fuses Insert the 2A T 250V fuses and screw back together Replace the fuse block cover in the Corcom PEM Qu 2980 25 99 Connect the Continental European style power cord to the PEM Changing a Blown Fuse in the Controller Switching Power Supply Parts Required 4A Normal Blow Type SAG 250V Littelfuse
65. e surface with a dry cotton ball DO NOT use air or nitrogen A gas stream can cause the crystal to crack due to thermal effects The PET crystal is cleaned similarly to the TAP crystal Although PET isn t as sensitive to thermal stresses use the same precautions during drying The LiF crystal will normally not show any loss of intensity due to oil contamination because the x rays diffracted by LiF are not easily absorbed The crystal can be cleaned with a cotton ball wetted with acetone No etching is necessary or possible except at the factory MAXray Service and Installation Manual 10 1 LiF 10 Cleaning Procedures for Synthetic and Natural Crystal Diffractors 10 2 MAXray Service and Installation Manual Index A AC Power Safety Precautions 1 1 Alignment 6 1 7 9 Procedure Flow Chart 46 Allowable Bragg Angles 8 Aluminum alignment 7 13 Amp Out BNC 7 9 Applications WDS 4 9 B Beam Current 7 35 Beam Current Meter Setting up 7 36 Beginning Energy 7 34 Bias Scan 7 32 Bias Voltage 7 10 7 33 Blown Fuses Changing 1 18 Board Assembly 1 7 Bragg Angles Allowable 8 Bragg s Law 4 3 Buzzer 1 4 C Calculating the keV 7 15 CALIBRAT TXT 7 20 Calibration 7 25 Procedure 7 19 Text File CALIBRAT TXT 7 6 7 9 Tips 7 21 Carbon Standard Specimen 7 9 Carriage 7 4 Cleaning Procedures 10 1 Commands List 7 21 Control and Data Acquisition Electronics 3 3 Controller 3 3 7 5 Controller WD Spectrometer Safety Precau
66. e vacuum pump system in an electron microscope The spectrometer alone contributes the following loads Spectrometer Volume 10 41 Spectrometer Surface Area 3390 sq cm Not including mechanisms motors Elastomer Seals 292 cm Depending upon the microscope vacuum system present these additional loads will create a higher equilibrium pressure P Q S where P is the pressure is the throughput in outgassing and leaks and S is the pumping speed In field emission SEMS vacuum can be a critical operating parameter In testing on various FESEMs the MAXray spectrometer did produce higher base pressures in the microscope chamber however little to no degradation in the intermediate and gun pressure was seen The MAXray has been tested up to 5 days on an FESEM without causing degradation in the gun vacuum level Users will have to tolerate higher sample chamber pressures when operating a MAXray spectrometer Other notes concerning vacuum compatibility 1 The MAXray spectrometer by virtue of its unique design is actually coupled to the microscope by a rather poor conductance 3 5 liters sec Although this may extend initial pump down the poor conductance limits the actual load seen by the microscope vacuum system 2 The MAXray spectrometer does utilize the industry standard Gas Flow Proportional Counter for detecting diffracted x rays To enable detection of low energy photons a thin polymer window isolates the P 10 Argon 10 metha
67. eV a step of 1 eV a dwell of 1 second 27 Begin the scan From the Acquire menu click Start Scan 28 Record the peak energy value First move the cursor to the peaks center Second from the View menu click Peak Information The peak energy value displays File Edit Acquire Count Settings View Options Quant Service Help OKa 10 kV 30nA wds 200 175 1504 126 100 75 50 25 0 0 51 0 52 0 53 0 54 0 55 0 56 0 57 Bias Scan Determine the detectors bias voltage for an x ray line 1 From the Settings menu click Bias Scan Bias Scan Stat 80000 End V 00 Stp V io Dwell sec 100 Correct Bias Voltage 1800 1900 2000 2100 2200 2300 Chose 2 Begin the Scan Use the systems default settings Click Start 3 Center the correct bias voltage 7 32 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration The correct bias voltage is above the first shoulder and prior to the sharp peak If this point is not visible or not centered on the display modify the starting voltage until the correct voltage is determined the example above shows a centered voltage point e f the display is to far left increase the starting bias and decrease the ending bias by the same amounts e f the display is to far right decrease the starting bias and increase the endi
68. eV Wavelength 12 398 0 282 243 9645 Angstroms Angle asin 43 9645 100 226 0812 degrees The angular offset 2 28 2426 26 0812 2 1614 degrees X Because the starting peak position was lower in energy than the final peak position the offsets must be ADDED Use the CRYSTAL x POINT SET command in the Service Send Command window to set the new offsets and scan over the Carbon K alpha peak again If the NiC100 diffractor is in the THIRD position on the turret the command would be crystal 2 point set 26 0812 2 1624 2 1624 7 20 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures MAxXray Calibration Procedure If the peak is within 1 0 eV 0 001 keV of the correct position the calibration for this crystal is complete The controller software recognizes the diffractors arranged on the turret in positions Zero through Five In the Settings Configuration window the diffractors are listed in the order One through Six Use the save calibration data command to write the offsets to disk Detector Bias Voltage SCA Baseline and Window Voltages It is important to determine the correct detector bias voltage and the correct SCA baseline and window voltages for each x ray line on the flow proportional counter The controller shipped from the factory may not have the correct settings installed on the controller diskette These voltages should be verified usi
69. eak keV Counts Detector Bias Voltage Calibration Detector Bias Voltage Volts Single Channel Analyzer SCA Voltage Calibration SCA Baseline Voltage Volts SCA Window Voltage Volts keV keV eV Sec keV keV keV eV Sec keV Calibration Records Counts Counts Counts MAXray Service and Installation Manual 7 39 Calibration Records 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration Diffractor name Diffractor 2d spacing Angstroms Element and X ray line used Theoretical peak energy of the x ray line keV Sample used Accelerating voltage keV Beam current nAmps First diffractor scan First detector scan Start keV Start End keV Peak Step eV Step Dwell sec Dwell Peak keV Counts Peak Second diffractor scan Second detector scan Start keV Start End keV End Step eV Step Dwell sec Dwell Peak keV Counts Peak Crystal motor offset computed Theoretical degrees Measured degrees Computed degree offset Detector motor offset computed Theoretical degrees Measured degrees Computed degree offset Energy scan Beginning Energy keV Ending Energy keV Step Size eV Dwell Time sec Detector Bias volts SCA Baseline volts SCA Window volts Crystal Name Peak keV Counts Detector Bias Voltage Calibration Detector Bias Voltage Volts Single Channel Analyzer SCA Voltage Calibration SCA Baseline Voltage Volts SCA Window Voltage Volts 7 40 MAXray Service
70. easure the voltage going into the printed circuit board battery connector J3 It should be approximately 6 volts The module LED should flash and the alarm buzz approximately once every five seconds Hemove the resistor divider clip leads etc Replace the cover 1 6 MAXray Service and Installation Manual 1 Safety Precautions and Technical Specifications Detector Touch Sensor Module List of Materials Report for Touch Sensor Board Assembly Item Quantity Part Number Value Ref Description 1 1 1504103385 1MF C1 2 1 170A141753 PWB 3 3 150A112766 01 C3 C4 C5 4 1 480A000808 1N4150 1 5 1 245A002369 RED DS1 6 2 210A003313 BNC J1 J2 7 1 210A128705 2 J3 8 1 470A000113 1K H1 9 1 470A000175 910K H2 10 1 470A000138 150K R3 11 2 470A000153 4M7 R4 R9 12 1 470A000115 1K5 H5 13 1 470A000159 470K R6 14 3 470A000145 1M R7 R8 R14 15 2 470A000152 3M R10 R11 16 1 470A000148 1M5 R12 17 1 470A000120 3K9 R13 18 1 130A111669 BUZZER SPK1 19 1 210A117653 BLACK TP TP1 20 1 318A128706 8213 U1 21 1 480A000811 1N5231 VH1 22 1 140G127866 Touch Sensor Front Panel 23 1 254A110049 LED Grommet 24 1 400A130215 Battery 9 Volt 25 4 2802108596 Screw 2 56 0 281 Pan 26 2 28023001094 Nut 4 40 Elastic Stop 27 2 280a116753 Nut Hex 7 16 26 28 2 28028002372 Screw 4 40 0 25 SS Pan Head Blk Ox 29 1 9302130218 Touch Sensor Gen
71. ectrometer on a table for testing Complete the following hook ups for test Detector Theta and Turret motor cables from Controller to Spectrometer Controller power cable COM 1 Serial Cable from Host Computer to Controller Host Computer keyboard VGA display and power cable DO NOT HOOK UP PCS CABLE NOW DO NOT HOOK UP GAS FLOW NOW MAXray Service and Installation Manual 7 5 9 10 11 Installation Procedures 7 Installation Alignment and Calibration Procedures DO NOT HOOK UP VACUUM INTERLOCK NOW Turn on power to the Controller then insert Floppy Disk with controller software Turn on power to the Host Computer and allow time to boot Once the system has booted start the MAXray software by clicking on the MAXray icon The program will read configuration data from the Controller and then will accept user commands See Troubleshooting on page 7 23 Open the WDS Software by clicking on the MAXray Icon Windows NT From the Service menu click Password and then type bestWDS to access service options From the Service menu click Monitor COM Port Open the command dialog box by clicking Send Command from the Service menu Drag the Send Command window to a convenient location and then type the command show in the dialog box The controller should send back configuration data which is stored in the CRYSTAL TXT file on the controller floppy disk and display the information in the Monitor COM Port
72. eline values now default to 0 3 volt in this new software version The turret move commands have been added to the Service Send To dialog box The EMSA file format containing XY data types used by the Vantage software can now be loaded NOTE EMSA files cannot properly be loaded as overlay spectra Windows Software Changes 1 The Edit Scan Parameters dialog box now remembers the last element whose data was displayed and uses this when this dialog box is opened The program no longer puts up a message box when hardware is being initialized for a WDS acquisition during quantitative analysis Windows Software Fixes 1 When the Edit Scan Parameters dialog box was opened the scan parameters for the element Be was displayed If a Be diffractor was not installed on the turret the dialog box would not permit any other element s parameters to be edited This has been corrected in version 3 1 by using the last element s data as the opening data displayed The first time this dialog box is opened it displays the parameters for the lowest atomic number element that is available on the particular instrument MAXray Service and Installation Manual 2 1 2 4 5 Version 3 0 0 Hevisions 2 WDS Software Revisions The default background energy positions used in quantitative analysis were valid for the MAXray whose high energy range limit is 2 keV With the introduction of the MAXray we discovered that the calculatio
73. encoder Therefore with 100 1 gear reduction on the Turret motor very small angular change in the Flag position may be all that is needed When the proper alignment is achieved tighten the Clamp Screws BLANK DIFFRACTUR BACKING SENSOR INTERUPT FLAG OPTICAL SENSOR SENSOR MNT CLAMP SCREWS SENSOR ADJUST SET SCREWS 90 0000 Figure 7 12 Optical Sensor Mount Adjustment Motor Movement is Noisy 2 Excessive play in worm gear worm wheel mesh Adjust for minimal play Poor lubrication of gearing or bearings Use Fomblin or Krytox vacuum compatible grease on all gears and bearing as required Use sparingly however it is found that the worm mechanisms can require a generous application to get lubricant into all teeth Wipe away excess grease from any mechanisms DO NOT LUBRICATE HARMONIC DRIVE IN TURRET MECHANISM Consult factory if this mechanism is creating excess noise 3 Motor is bad Replace motor No Counts Detected Wrong standard chosen for spectrometer setting Diffractors not labeled correctly Check CRYSTAL TXT File Change to other diffractors which could detect same energy even if not optimum No HV Bias on flow counter Check interlock Not sufficient bias on flow counter Use Electronics Dialog box to adjust bias SCA not set up properly Use Electronics Dialog box to adjust SCA settings Gross misalignment Return to factory settings Align on carbon Gross calibration error in spect
74. eptance angle for low energies and the effects of misalignment are less pronounced After alignment at CKa the spectrometer is aligned to maximize count rate for AlKa which is more difficult and requires more iteration to achieve proper intensity and resolution The alignment at AlKa will not adversely affect the alignment at CKa unless the optic is defective 8 Adjust the Horizontal Adjustment screws which move the spectrometer in a horizontal plane inclined relative to beam axis Turn both screws simultaneously loosening one and tightening the other on either side of the interface block You should observe a fall off in total count rate on either side of the peak position for the horizontal axis MAXray Service and Installation Manual 7 11 Alignment 7 Installation Alignment and Calibration Procedures NOTE If the ratemeter does not appear to respond to changes even though you see higher repetition rates on the oscope the SCA settings may need to be adjusted AMPLIFIER CORRESPONDING SCA RANGE DUTPUT SCA IS CONTROLLED BY TWD RANGE s 12V DACS THE BASELINE IS WINDOW SET TO ELIMINATE THE NOISE PEAK NOT LESS THAN 3VDO AND THE WINDOW SETS THE UPPER LEVEL DF THE SCA BASELINE WINDOW leV IN THE EXAMPLE SHOWN THE SCA BASELINE IS SET 1V AND THE WINDOW TO 9V THIS CORRESPONDS TO ACCEPTING A PULSE IF THE AMPLITUDE IS GREATER THAN ABOU
75. eral Description 30 0 930a130216 Assembly Instructions 31 0 930A135936 Touch Sensor Module Checkout Procedure MAXray Service and Installation Manual 1 7 1 Safety Precautions and Technical Specifications Detector Touch Sensor Module Schematic L 22 50 11 4 6 1 4 aog 11128123 1111 5 HJn0I gun ss 4 T ELE TRE 21 71 i T all tr 12224115 Lr CNOILVMULDY 30V1 01 KI 1n4MI HINOL WIE LDA au IZRXVN 5 amp H H VESPA peu If WE F Tty ETZ8jyR su z T a 2 aT WE JTH DIH gut UR d EN TE THd5 L v z MAXray Service and Installation Manual 1 8 1 Safety Precautions and Technical Specifications Detector Touch Sensor Module Assembly Drawing top MAXray Service and Installation Manual 1 9 Detector Touch Sensor Module 1 Safety Precautions and Technical Specifications Box Drawing AO b CN 4 self adhesive feet provided w box 00 0 REF 700P127869 A TOUCH SENSOR ALARM BOX 012 2 280A122449 B SCREW 4 40 X 1 4 PAN HD PHIL SS 021 1764141753 A TOUCH SENSEE BOARD ASSEMBLY 031 NO 145A112823 B PLASTIC ENCLOSURE 041 NO 140G127867 M TOUCH SENSOR REAT PANEL 052 2 610P003216 M CABLE BNC TO BNC PLUG 6 061 NO 910P130218 A CABLE BNC TO PLUG 1 10 M
76. es can still be loaded and both wds and wdx file names are displayed in the Open File dialog box list Only wdx type files can be saved from the Save and Save As menu selections The Rate Meter Smooth check box is checked by default whenever the Rate Meter dialog box is opened The diffractor name is now displayed when moving the cursor over the Periodic Table The Configuration dialog box can be left open while the application is running The Damp check boxes in the Rate Meter and Beam Current Meter dialog boxes have been changed to Smooth to better explain the averaging effect The Rate Meter dialog box has been enlarged to permit better visibility from farther away The Service menu items requiring a password are grayed out until a password is entered MAXray Service and Installation Manual 2 3 Version 3 0 0 Hevisions 2 WDS Software Revisions Version 3 0 0 Fixes The memory corruption problems associated with stopping a scan have been corrected 2 The problems associated with loading and displaying overlay files has been fixed 3 The ECS card type used in the controller is now recorded correctly 4 Thecrystal 2d spacing in the Settings Configuration dialog box is now reported correctly to three decimal places 5 The analog rate meter no longer plots below the zero baseline All selected acquisition parameters are now printed along with the spectrum and the parameter names printed match those in the Edi
77. ffractors CAUTION Do not touch the face of the diffractors CAUTION Do not touch or attempt to clean the surface of any diffracting crystal The diffractor surfaces are sensitive and some can be dissolved with cleaning solvents including water Manual Gate Valve Option Never pump the column down with the gate valve closed and the spectrometer at atmosphere WARNING Do not open the gate valve when the SEM is at vacuum and the WD spectrometer is at air Opening the gate valve under these conditions could expose the microscope vacuum system to contamination If the filament is powered on it may also be damaged MAXray Service and Installation Manual 1 Safety Precautions and Technical Specifications WD Spectrometer Controller WD Spectrometer Controller WARNING All electrical equipment must meet applicable codes and must be installed by NORAN Instruments authorized support representatives WARNING Dangerous voltages are present inside the equipment High operating voltages are present inside the equipment These voltages can produce burns or fatal electrical shocks Numerous internal components operate at high voltages and may not be insulated or shielded Components such as capacitors can store high voltages even with the power disconnected When you are working around high voltage sources be sure all power inputs are disconnected Never remove any outer covers or guards that are fastened with screws without being
78. have greatly improved light element analysis makes the general term diffractor more appropriate The term crystal implies a regular arrangement or stacking of atoms or ions to form the crystalline structure of metals and minerals The very efficient multilayer in fact are not crystals but rather vacuum deposited alternating layers of different materials The interplanar spacing is the thickness of the lower atomic number spacer while the diffracting planes are the layers of the higher Z material Although both terms will be used here diffractor is preferred The commonly used diffractor are listed in the table below Since Bragg s law contains the quantity 2d diffractors are typically described by their 2d value Designation Full Name 2d A PET Pentaerythritol tetrakis 8 742 TAP Thallium acid phthalate 25 9 W Sii Tungsten Silicon Multilayer 50 65 Ni C Nickel Carbon Multilayer 80 100 Mo B4C Moly Boron Carbide Multilayer 140 205 NOTE The multilayers can be manufactured to any specified 2d value within approximately the ranges shown The crystal d spacing must be of the same magnitude as the wavelength of the x ray to be measured For example the CKa x ray at 0 282 keV would require NiC a synthetic crystal with a 2d value of 100 angstroms The SiKo x ray at 1 74 keV would require TAP a natural crystal with a 2d value of 25 75 angstroms A practical requirement in crystal selection is that
79. ich counteract each other to keep the count rate maximized If the Intersection Distance was changed from the install position re position the Stop and tighten The Horizontal adjustments should be tight already if the opposing screws were moved simul taneously Do not overtighten the lock down screws They should only be tightened enough to prevent changes in the aligned position The spectrometer should be retracted and inserted to verify that the aligned position is maintained after moving MAXray Service and Installation Manual 7 13 Crystal Installation 7 Installation Alignment and Calibration Procedures Once the spectrometer is aligned to the microscope the calibration offsets for each crystal must be determined See MAXray calibration data PLEASE DOCUMENT PROBLEMS IN WRITING Crystal Installation Creating the IbeX MAXray Crystal Definition File When the IbeX MAXray controller software starts up it reads the CRYSTAL TXT file on the controller floppy disk This file defines the configuration of the spectrometer It can be edited with any ASCII editor such as DOS Edit Below is an example and a description of the individual entries in the file The underlined items are the ones to edit Never use more than ONE SPACE to separate items ECS Type B ECS TYPE A for older systems ECS TYPE B for newer Systems LEFT HAND LEFT HAND or RIGHT HAND spectrometer 6 DIFFRACTORS POSITION 0 The
80. iffractor Motor Calibration 7 25 Setting up the Calibration 7 25 Calibration Procedure 7 26 Bias Scan 7 32 SCA Scan 7 33 Scan Parameters 7 34 Beam Current 7 35 oetting Up Beam Current Meter 7 36 Calibration Records 7 38 MAXray System 45 Alignment Procedure Flow Chart 46 Engineering Layout 47 8 Additional MAXray Drawings MAXray Wiring and Plumbing 8 3 Flow Counter Repair Replacement Instructions 8 4 vi Contents PCS Electronics Integration on MAXray Spectrometer 8 5 Motor Replacement and Installation 8 6 Diffractor Replacement Instructions 8 7 9 MAXray Field Replaceable Parts 10 Cleaning Procedures for Synthetic and Natural Crystal Diffractors Synthetic Multilayer 10 1 TAP 10 1 PET 10 1 LiF 10 1 Index vil Contents viii Diagrams List of Diagrams Schematic Touch sensor 1 8 Assembly Drawing 1 9 Box Drawing 1 10 Schematic Diagram of PBS Spectrometer 3 7 Allowable Bragg Angles 3 8 MAXray System 7 45 Alignment Procedure Flow Chart 7 46 Engineering Layout 7 47 MAXray Wiring and Plumbing 8 3 Flow Counter Repair Replacement Instructions 8 4 PCS Electronics Integration on MAXray Spectrometer 8 5 Motor Replacement and Installation 8 6 Diffractor Replacement Instructions 8 7 MAXray Diagrams 1 Safety Precautions and Technical Specifications AC Power WARNING All electrical equipment must meet applicable codes and be installed by NORAN Instruments au
81. ilt position of Turret relative to collimated beam e Diffractor Angle must be at the Bragg angle for maximum intensity Detector Angle relative to the diffracted beam Additionally the impact of each of these alignments is energy dependent There are some interaction effects which necessitates iteration between all adjustments AC Spectrometer Tilt and Spectrometer Intersection CD Diffractor Angle and Spectrometer Intersection especially at high energy MINIMUM TILT STOPS Front Plate ex 5 SHCS 4mm or 5 32 HEX KEY SHOULD NOT BE CHANGED FROM FACTORY POSITION UNLESS NEEDED SEE TEXT TILT ADJUSTMENT LOCKDOWN MS SHCS REQUIRES 4mm 5 32 HEX KEY INTERSECTION ADJUSTMENT RETRACTIUN LEADSCREW USED p Gas LOUSE DURING TO ADJUST FOCAL POINT OF OPTIC LEADSCREW STOP ESTABLISHES FOCUS POSITION lt TILT ADJUSTMENT SCREW PROS 1 4 80 SET SCREW REQUIRES 5 64 HEX KEY PROVIDES FINE ADJUSTMENT OF THE TILT ANGLE HORIZONTAL ADJUSTMENT SCREWS CONE ON EACH SIDE OF INTERFACE BLOCK 174 80 SWIVEL HEAD SET SCREW 2 NOTE AS THE TILT REQUIRES 1 8 or 3mm HEX KEY TILT ADJUSTMENTS SCREW IS INSERTED PUSHING MOVES SPECTROMETER HORIZONTALLY SEE DETAIL ABOVE PLATES APART THE OPTIC CIN AND OUT OF THE PLANE OF THIS IS TILTED DOWN POINTING TO A DRAWING LOWER WORKING DISTANCE Figure 7 8 Spectrometer Alignment Adjustments Alignment is started at carbon Ka because the x ray optic has the largest acc
82. ing the Si peak by 30 eV on the low side and 25 eV on the high side A difficult analytical problem is found in the analysis of thin Ta or W Si films used in the semiconductor manufacturing process Since these films are produced on Si wafers Si emission from the substrate can overwhelm the Si and Ta or W peaks from the film To avoid significant penetration into the film and the resulting high substrate intensity a low accelerating voltage less than 10 keV must be selected The use of the L lines of W or Ta is thus precluded and the overlapped M lines must be used for analysis Because of the severity of the overlap the quantitative precision required can only be obtained by resolving the analyzed peaks dictating the use of WDS MAXray Service and Installation Manual 4 9 WDS Applications 4 Overview of Parallel Beam Spectrometry and WDS The following figure shows spectra from TaSi and WSi In the WSi spectrum there is a noticeable indication that two Si satellite lines are present just to the high energy side of the Ka These lines in fact are separated by only 2eV at 1752 and 1754 eV 1600 SiKo 159992 1739eV 1400 12000 1200 10000 1000 8000 800 TaMa Satelite lines at 1752 and 1754 eV 6000 600 400 4000 W 1773eV SiKa 200 d 2000 34 4 0 1702 1714 1726 1738 1780 1740 1760 1800 Figure 4 4 WDS spectra from TaSi left WSi right Note the indication of the 2
83. is preferred for setting Bias and SCA voltages but 4 hours should be acceptable for beginning the alignment procedures See page 1 17 Connect the Spectrometer Motor Cables PCS Power Cable 9 pin and Vacuum Interlock See separate documentation for interface to specific microscope Apply power to the Controller and allow the system to boot 1 minute Initialize the motors from the Host Computer to verify that everything is still working Wait the specified 4 hours or overnight 7 8 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Alignment Alignment Once the system has pumped down to user requirements and the flow counter has been flushed proceed with powering on the spectrometer controller and host computer if not already on The most critical aspect of aligning the MAXray spectrometer is the ability to reproducibly locate a specimen at the exact same working distance Even a standard block in a 1 cup can be tilted slightly providing some variation in specimen height By some means once the alignment is started at a particular Working Distance WD the top of all other specimens must be located at the same point in space Hook up the oscilloscope to the AMP Out BNC on the Spectrometer body and set the time base to 1usec and sensitivity to 1V div Offset the channel DC level so that a full 0 to 5V waveform can be observed Standards will be provided for alignment and
84. it aside NOTE The mounting surface is covered with thermal grease MAXray Service and Installation Manual 1 19 Maintenance 1 Safety Precautions and Technical Specifications 12 Find the F1 fuse under the former position of the autorange adapter 13 Pull the existing fuse out of its holder and insert the replacement 14 Reverse the above procedure to reassemble the controller Be careful not to pinch wires when you install the fan 1 20 MAXray Service and Installation Manual 2 WDS Software Revisions Version 3 1 2 Revisions Revision Notes for Thermo NORAN WDS Software Version 3 0 1 April 18 2001 New Windows Software Features 15 A new method for setting up default detector bias voltages for each x ray line has been added 16 17 18 to the WDS software for the IbeX MAXray and MAXray Instead of making measurements at boron and silicon energies computing the slopes and intercepts and then entering them in the drtwds ini file this new method requires only one measurement and the measured data can be entered directly into the WDS program See Bias Offset Correction in the beX or Installation and Support Manual This feature can be turned On or Off in the new Bias Offset dialog box The Bias Offset dialog box is opened from the new Service Bias Offset menu selection During hardware installation it is no longer necessary to make the Baseline Slope and Intercept measurements All bas
85. ith the spectrometer installed an AUXILIARY PORT or the STAGE DOOR must be loosened to provide pressure relief during venting FAILURE TO PROVIDE ADEQUATE PRESSURE RELIEF WILL RESULT IN DAMAGE TO THE GAS FLOW COUNTER WINDOW 7 6 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Installation Procedures SPECTROMETER IS LOCATED ONTO PINS IN THE MOUNT BLOCK DO NOT SCRATCH O RING SURFACES BE SURE THAT O RING IS SEATED PROPERLY IN GROOVE SPECTROMETER CAN REST ON REAR WEAR STRIP BLOCK MOUNT WITH 4 5 X 80mm SOCKET HEAD CAP SCREWS DELRIN WEARSTRIP Figure 7 6 Mounting Spectrometer to Slide Interface 12 Evacuate the microscope chamber Immediately go to the Spectrometer Gas Inlet Ports and determine if any suction can be felt by covering both ports with a finger If the ports are sucking air the Gas Flow Counter Window may be damaged See the Troubleshooting section of this manual Note the pump down curve i e log the system pressure over time Time Pressure Comment The system should reach the 1E 5 mbar range within an hour The MAXray Spectrometer shares vacuum with the microscope chamber and thus provides additional gas load on the vacuum system Some degradation in base pressure is expected Depending on the size of the chamber and the pumps utilized this degradation can vary from 1 2 to 1 order of magnitude in total pressure
86. k Watch the Monitor COM Window as the data is sent back from the controller Locate the largest energy peak 0 522 keV Start keV 518 End keV 528 Step eV Dwell sec 2 Start Stop Position the detector correctly for the diffractor scan MAXray Service and Installation Manual 7 27 Detector and Diffractor Motor Calibration 7 Installation Alignment and Calibration Procedures 10 11 Scan from 0 010 keV before and to 0 001 keV past this energy Use a step of 1 eV and a dwell of 1 second Close the Crystal Scan window From the Service menu click Detector Scan Record the scan parameters Scan over a wide detector range around the theoretical peak energy Typical scan parameters are plus minus 0 200 keV a step of 4 eV a dwell of 1 second Hecord this energy and the counts in the peak Watch the Monitor COM Window as the data is sent back from the controller Locate the largest energy peak 0 530 keV Start keV 45 End keV 5 Step eV 5 Dwell sec 2 Record the scan parameters Scan over a narrow detector range around the recorded peak energy Typical scan parameters are plus minus 0 010 keV e astep of 1 eV a dwell of 1 second Record this final detector position and the counts in the peak Watch the Monitor COM Window as the data is sent back from the controller 7 28 MAXray Service and Installation Manual 7
87. le of 23 1731 degrees for the first calibration value of diffractor O NOTE Use only one space between words and numbers NOTE Always use exactly four decimal places for bragg angles diffractor offsets and detector offsets Check the beam current and re adjust it if necessary Record the scan parameters Setup over a wide energy scan around the theoretical peak energy From the Acquire menu click Scan Setup Typical scan parameters are plus minus 0 100 keV a step of 3 eV a dwell of 1 second Begin the scan From the Acquire menu click Start Scan File Edit Acquire Count Settings View Options Quant Service Help 0 515 keV 37 cts scan 1 after det and cry scans 5 35 Peak Information Bkgd Left 10 499 kev Energy 25 Counts Right 0 523 ERR Resolution 15 Compute Peak Bad M 0 51 0 52 0 53 0 54 0 55 0 56 0 57 0 58 0 59 kev Record the peak energy value First move the cursor to the peaks center 7 30 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration 20 21 22 23 24 25 26 Second From the View menu click Peak Information The peak energy value displays Record the calibration offset Run the WDS Calculator program c noran wds bin calc exe Based on the peak position enter the Crystal 2d Spacing Theoreti
88. les not hooked up correctly See the MAXray System diagram Controller power supply problems Microstep motor board problems Or prod 97 19 Bad Motor Replace motor See Motor Replacement Instructions drawing Motors Move But Fail to Home as Specified 1 Motor cables not hooked up properly See the Alignment Flow Chart Motor binds prior to reaching lower limit Call Factory Bad lower limit or home sensor microswitch or optical Replace Sensor See the Wiring and Plumbing drawing 4 Damaged wiring to sensors See the Wiring and Plumbing drawing 5 Microstep motor board problems Motors Home as Specified but Error Occurs at Extreme Positions 1 Mechanism reaches limit sensor prior to reaching specified angle Turret Home Angle is Not 90 Degrees to the Baseplate as Specified This could occur in the field after a change in diffractor A precision 90 degree gauge block will be required to align the turret 1 Loosen the Sensor Mount Clamp Screws and adjust the Optical Sensor Mount using the Adjust Set Screws as shown in the diagram below This moves the sensor position relative to the Flag on the Turret and moves the Home position Caution this adjustment is very sensitive The Microstep motor boards seek home by looking for both the optical sensor MAXray Service and Installation Manual 7 23 Troubleshooting 7 Installation Alignment and Calibration Procedures interrupt AND the next index pulse from the optical
89. m of the TURRET this may require some wiggling of the backing Place diffractor into an appropriate container to prevent damage Install the new diffractor sliding into place over the PINS and then securing with the 2 56 screw and lockwasher DU NUT DVER TIGHTEN but the screw Should be snug Use the menu commands to move Diffroctors an be sure that the TURRET mechanism still Functions properly 6 Replace the side cover and evacuate the system 7 During any change of the diffractors there is a chance that the TURRET position will move thus changing the relative home position TURRET SCANS will be necessary on all diffractors to verify that the HOME UFFSET has not changed The service engineer should verify full Functioning of the spectrometer after completing the installation of a new diffractor 8 Be sure to modify the CRYSTAL IXT file on the FLOPPY DISK to accurately reflect changes made to the crystal configuration Dir Pe tor MOU geo on Backing Hc SPLIT RING LUCK WASHER X ue Phillips Head screw e AX Xe KAK CACAO SOK 11 Ig JT Lee Lut off Jewelers 00 Phillips Screwdriver Supplied in Spares Install kit WADE BY DATE JVH 02 25 98 S NERAN Ims uMents IW Jl 09725788 TITLE l MAXray DIFFRACTDR REVISIONS REPLACEMENT INSTRUCTIONS 9304135989
90. materials Roughly on the order of 1 0 to 0 1 weight percent depending on the element the detec tor the sample and other conditions Many applications can be fully auto mated and EDS can perform standard less quantitative analysis Higher throughputs are possible with WDS Both EDS and WDS can detect all ele ments except hydro gen helium and lithium Use WDS for trace element analysis For quantitative analysis WDS requires more attention than EDS This chapter covers the principles of WDS describes the dramatic gain increases available with PBS and provides some examples of PBS capabilities with MAXray 4 2 MAXray Service and Installation Manual 4 Overview of Parallel Beam Spectrometry and WDS Principles of WDS Principles of WDS WDS is based on Bragg s law of x ray diffraction Bragg s law n 2d sin0 Equation 1 where is the wavelength of interest d is the interplanar spacing of the diffractor 0 is the angle of x ray incidence on the diffractor n is an integer and E keV 12 398 A Equation 2 NOTE In Equation 2 that Energy and Wavelength are inversely related short wavelengths are high energy It is often a source of confusion when EDS users look at a conventional wavelength spec trum and see a to the left of a Ka Here spectra will always be dis played with energy increasing to the right The classic derivation of Bragg s law is as follows Consider that a par
91. n of the background positions for peak energies above Si did not give valid values This has been corrected in version 3 1 and the new default values are computed when the Restore All button in the Edit gt Scan Parameters dialog box is used The values for one element at a time may be set by clicking on the Restore atomic symbol button in this dialog box It is necessary to click the Save button to record these new settings When performing combined EDS WDS quantitative analysis the WDS peak background is now subtracted correctly The program now prints properly to a printer setup for 600 dpi The energy range in the Settings gt Configuration dialog box is now displayed correctly Verision 3 2 1 Controller Software Features 1 2 4 Now Controls both the and MAXray in the same program Controls the new Beam Current Meter if it is installed See Chapter 6 Beam Current Option Model A214 New commands have been added to control the Beam Current Meter Displays run time diagnostics using 25 30 43 or 60 rows Version 3 0 0 Revisions Revision Notes for Thermo NORAN WDS Software Version 3 0 0 February 18 2000 New Windows Software Features 1 The new NORAN Beam Current Monitor is now supported both manually through the use of the Settings gt Beam Current dialog box and automatically in the quantitative analysis section of the software Both beam current and specimen current can be measured
92. nd Calibration Procedures Peak Offsets In the next calibration step angular offsets will be added to the controller file named CALIBRAT TXT so it is important that the controller has been booted from a floppy disk that contains no CALIBRAT TXT file Look for this disk using Windows Notepad This procedure should be performed AFTER the spectrometer alignment Starting again with carbon scan over the K alpha peak find the peak position using View Peak Information and record this peak position If the peak is not at the correct energy 0 282 keV and angular offset must be added to shift the peak The offset for the crystal motor and the detector motor should be the same An approximate offset can be calculated or an offset tried and then tested Below is an example calculation for a Carbon peak calibration using the Bragg equation to find the difference between the two peak positions in degrees The supplied program WdsCalc should be used to calculate the angels based on the energy offsets Since 2dsinO Re arrange asin A 2d Where The angle in degrees The wavelength in Angstroms 2d The spacing of the diffractor in Angstroms Example The crystal used was a NiC100 that has a 2d spacing of 100 Angstroms 1 Peak position from the initial scan over carbon K alpha 0 262 keV Wavelength 12 398 0 262 247 3206 Angstroms Angle Asin 47 3206 100 228 2426 degrees Correct peak position of the carbon peak 20 282 k
93. nd approximately three milliamperes when touch occurs e The contract closure from the Touch Sensor on the detector is connected to the input of a discriminator and terminated with a one megohm resistor to the battery and a 0 1 microfarad capacitor to ground When a touch condition occurs this signal is grounded The output to the stage automation system is from an open drain terminated with a one megohm resistor to the battery and a 5 1 volt zener diode to ground This signal should be connected to a TTL input with a pull up resistor in the stage automation system The signal is a negative true signal touch ground and no touch 5 volts and is capable of sinking up to five milliamperes MAXray Service and Installation Manual 1 Safety Precautions and Technical Specifications Detector Touch Sensor Module e When a touch occurs the LED is turned on and the buzzer sounded When the battery voltage decreases to approximately seven volts the LED and the buzzer are turned on momentarily about once every five seconds to indicate the battery should be replaced NOTE If replacement of any part is required on the printed circuit board removal of all flux is required The control integrated circuit and associated compo nents are all high impedances and any residue flux can adversely affect the circuit operation NOTE If trouble shooting the board is required insert 90 megohms of resistance in series with a oscilloscope 10 megohm pr
94. ne from the vacuum system Any leakage through this window will produce an additional load on the vacuum system Note also in spectrometers fitted with a gate valve to isolate the spectrometer during chamber venting excessive time isolated from vacuum will cause the pressure to rise in the spectrometer The MAXray Installation 5 1 5 Vacuum Considerations When Using the MAXray Parallel Beam Spectrometer pressure rise can be due to both leakage from the flow counter and outgassing from the spectrometer surfaces 3 Depending upon storage and shipping conditions the initial pump down of a MAXray spectrometer can take anywhere from 12 to 36 hours 5 2 MAXray Installation 139539A04 6 Maintaining a Constant Physical Working Distance and Focus On older SEMs maintaining the same physical working distance when changing specimens or keV can be challenging It is important that after alignment of the MAXray spectrometer all specimens being analyzed must be located at the same physical point in space so that the optic is focused on the specimen surface The flowchart below illustrates the technique used at NORAN Instruments when working with an SEM for which the apparent working distance and focus is not compensated when changing keV Additionally no microscope will compensate the actual WD when changing specimen i e electronic focus will change but the change in specimen height is not compensated Therefore the specimen could b
95. ng bias by the same amount 4 Exit Bias Scan Click Close SCA Scan A single channel analyzer SCA scan fine tunes the detector bias voltage found with the Bias Scan function The Detector Bias voltage SCA Baseline voltage and SCA Window voltage must be determined 1 From the Settings menu click SCA Scan Single Channel Analyzer Scan LLD 3 volts End p4 volts Step 2 volts Dwell 1 0 Window fo2 volts Bias 2300 volts Noise Peak T0 220 S30 KU 550 280 100280 2 Begin the scan Enter the Bias voltage and Low Level Discriminator LLD and then click Start e LLD The voltage setting that prevents the noise peak from displaying Bias The voltage determined during in the bias scan Use the system default settings for all other parameters 3 Determine the correct SCA voltage The SCA voltage occurs at the valley between the noise peak and the signal peak e The SCA Window voltage is the peaks width from the baseline voltage to where the peak tails off 4 Exit Single Channel Analyzer Scan MAXray Service and Installation Manual 7 33 Detector and Diffractor Motor Calibration 7 Installation Alignment and Calibration Procedures Click Close Scan Parameters 1 Setacquisition parameters for individual elements From the Edit menu click Scan Parameters Scan Parameters mpm Table User Scan
96. ng the Settings SCA Scan function The bias should be high enough to pull the signal peak out of the noise and center it at between 3 0 to 3 5 volts The SCA baseline voltage should be set at the valley between the noise peak and the signal peak and the SCA window voltage should be set to be as wide as the signal peak There are entries in the window program s initialization file that can be used to set these voltages based on low and high energy measurements and the slope and intercept of their associated plots Calibration Tips 1 Delete any CALIBRAT TXT file from the controller disk before starting 2 Remove the calibration offsets for any crystal before beginning and remember to replace them when complete If re calibrating an element on a diffractor that has already been calibrated first set the crystal and detector offsets to zero for this diffractor 4 Ifthe calculated angular offset does not work use small offsets to find the closest 10 5 The offsets for one diffractor should be similar the all others and should be less then 3 0 degrees 6 If the calibration is more than 3 0 degrees off verify that the correct sample is being used List of Commands These commands can be sent using the Service Send Command window 1 Seta calibration offset point Crystal X sel da lt dddd JDDDD 4 0006 where X is the turret position of the crystal 0 through 5 aa aaaa is the Bragg angle of the peak b bbbb is the cry
97. nstallation Manual 7 17 Crystal Installation POSITION 3 WSi60 O SPACING 59 8 HOME ANGLE 60 POSITION 4 SPACING 25 75 HOME ANGLE 0 POSITION 5 PET Mo SPACING 8 742 HOME ANGLE 300 7 Installation Alignment and Calibration Procedures 7 18 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures MAxXray Calibration Procedure MAXray Calibration Procedure Turret Scan Each of the six diffractors on the turret are mechanically aligned as closely as possible after installation Because there are small offsets that cannot be corrected for using screws the turret must be rotated over a small angular range while intensities are measured at discrete positions If the spectrometer is centered as closely as possible to an x ray peak this turret scan generates a peak of intensities and computes the center of the peak The offsets should be small less than 5 degrees and very close to each other less than 3 degrees If these differences are much larger there is a problem The home position of each diffractor is stored on the controller floppy disk in the file named CRYSTAL TXT refer to page 7 1 through 7 4 to edit this file You will need to edit some values in this file for the turret calibration This procedure should be performed AFTER the initial spectrometer alignment on carbon and BEFORE the final spectrometer alignment on Silicon Begin the procedure by placing the c
98. nts photons It does not measure energy PBS uses a special optic and flat crystals and uses a larger solid angle than WDS A WD spectrometer is tuned to one energy at a time WDS resolution is limited by calibra tion accuracy res olution on the order of 24 eV for manga nese WDS Geometry and crys tal diffraction allow only photons of a particular wave length to arrive at the detector which counts photons It does not measure energy A WD spectrometer is tuned to one wavelength at a time WDS resolution is limited by calibra tion accuracy res olution on the order of 24 eV for manga nese EDS Current induced in the detector is pro portional to photon energy The detec tor determines pho ton energy and counts and sorts photons by energy An EDS detector counts photons of all energies It eval uates all energy lev els at the same time EDS resolution is reduced by Noise in the detec tor signal current Incomplete conver sion of photon energy to signal cur rent Resolution accu racy on the order of 130 to 140 eV for manganese Significance Although one tech nique measures photon energy and the other measures wavelength the results are the same because these two parame ters are directly related EDS provides faster but less accurate results which is especially useful for data intensive anal ysis such as map ping WDS can resolve peaks
99. obe This way the probe will not load the circuit and adversely affect your trouble shooting NOTE If the Detector Touch Sensor Module is being used without being con nected to the stage automation system connect the ground wire provided between a chassis ground and the Stage BNC of the module This will pre vent the sensor from floating and building up a charge which could distort the SEM image Interface Signal Description Sensor BNC The contact closure form the detector is connected to the module input BNC through a coax cable The signal is terminated with a one megohm resistor to the battery and a O 1 microfarad capacitor to ground When a touch condition occurs this signal is grounded Stage BNC The output to the stage automation system is from an open drain terminated with a one megohm resistor to the battery and a 5 1 volt zener diode to ground This signal should be connected via a coax cable to a TTL input with a pull up resistor in the stage automation system This signal is a negative true signal touch ground and no touch 5 volts and is capable of sinking up to five milliamperes NOTE If the Detector Touch Sensor Module is being used without being con nected to the stage automation system connect the ground wire provided between the sensor from floating and building up a charge which could dis tort the SEM image MAXray Service and Installation Manual 1 5 Detector Touch Sensor Module 1 Safety Precautions
100. offset computed Theoretical degrees Measured degrees Computed degree offset Energy scan Beginning Energy keV Ending Energy keV Step Size eV Dwell Time Sec Detector Bias volts SCA Baseline volts SCA Window volts Crystal Name Peak keV Counts Detector Bias Voltage Calibration Detector Bias Voltage Volts Single Channel Analyzer SCA Voltage Calibration SCA Baseline Voltage Volts SCA Window Voltage Volts 7 38 MAXray Service and Installation Manual keV keV eV Sec keV keV keV eV Sec keV Counts Counts Counts 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration Diffractor name Diffractor 2d spacing Angstroms Element and x ray line used Theoretical peak energy of the x ray line keV Sample used Accelerating voltage keV Beam current nAmps First diffractor scan First detector scan Start keV Start End keV Peak Step eV Step Dwell sec Dwell Peak keV Counts Peak Second diffractor scan Second detector scan Start keV Start End keV End Step eV Step Dwell Sec Dwell Peak keV Counts Peak Crystal motor offset computed Theoretical degrees Measured degrees Computed degree offset Detector motor offset computed Theoretical degrees Measured degrees Computed degree offset Energy scan Beginning Energy keV Ending Energy keV Step Size eV Dwell Time Sec Detector Bias volts SCA Baseline volts SCA Window volts Crystal Name P
101. oller command window From the Service menu click Send Command Type show No offsets should appear If there are offsets remove them with the command crystal n point remove bragg Example If an offset exists for crystal O at a bragg angle of 23 1731 the command is crystal 0 point remove 23 1731 9 Display the COM Port Monitor window From the Service menu click Monitor COM Port Calibration Procedure 1 From the Service menu click Diffractor Scan 2 Record the scan parameters Scan over a wide diffractor range around the theoretical peak energy Typical scan parameters are plus minus 0 200 KeV for some diffractors this range maybe too wide Use a smaller range when necessary 7 26 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures a step of 4 eV dwell of 1 second 3 Record the energy and counts in the peak 6 Detector and Diffractor Motor Calibration Watch the Monitor COM Window as the data is sent back from the controller Locate the largest energy peak Crystal Scan Scan 0 521 keV Start 52 End keV 54 Step ev 2 Dwell sec 2 Record the scan parameters Scan over a narrow diffractor range around the recorded peak energy Typical scan parameters are plus minus 0 010 KeV astep of 1 eV a dwell of 1 second Record this final diffractor position and the counts in the pea
102. ometry The MAXray is integrated with the VOYAGER VANTAGE Defect Analysis and EasyEDS software When a peak overlap appears in an EDS spectrum an ultrahigh resolution scan is performed over the region in question and a new spectrum window is opened to display the results in a familiar energy scale The overlapped EDS peaks are then accurately identified and labeled using the MAXray scan results Applications The MAXray Parallel Beam Spectrometer is ideal for applications that require superior light element x ray detection and for applications that use low beam currents and accelerating voltages such as analysis of small particles analysis of beam sensitive samples e thin film analysis In addition to unequaled intensity performance for Be B C N O and F the MAXray spectrometer also identifies overlapping peaks for materials or applications such as TiN WSi2 CrO N and Ti O and V O and Cr F and Fe Na and Zn Si and W Si and Ta MAXray Service and Installation Manual 3 1 Interface 3 MAXray Parallel Beam Spectrometer Interface Because of its innovative design the MAXray spectrometer interfaces with virtually any defect review tool or SEM A manually operated gate valve is offered as an option to provide vacuum isolation between the MAXray and the SEM chamber MAXray Specifications MAXray Spectrometer NORAN Instruments exclusive grazing incidence reflective x ray optic Sample to optic distan
103. ooks like that below CH1SENSE 1 CH2SENSE 1 FCUPPOL 0 FCUPDELAY 2 7 36 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Setting Up Beam Current Meter 6 Toselect the number of columns displayed edit the AUTOEXEC BAT file on the Controller boot disk to include one of the lines listed below If none of these lines are found the default of 60 rows is used SET VIDEO25 SET VIDEOSO SET VIDEO43 SET VIDEOGO 7 boot up the Controller loads the beam current parameters from the CRYSTAL TXT file and test the beam current meter The results of the test can be seen on a monitor attached to the Controllers VGA port MAXray Service and Installation Manual 7 37 Calibration Records 7 Installation Alignment and Calibration Procedures Calibration Records Use these pages for each crystal Detector and Diffractor Motor Calibration Diffractor name Diffractor 2d spacing Angstroms Element and X ray line used Theoretical peak energy of the x ray line keV Sample used Accelerating voltage keV Beam current nAmps First diffractor scan First detector scan Start keV Start End keV Peak Step eV Step Dwell Sec Dwell Peak keV Counts Peak Second diffractor scan Second detector scan Start keV Start End keV End Step eV Step Dwell Sec Dwell Peak keV Counts Peak Crystal motor offset computed Theoretical degrees Measured degrees Computed degree offset Detector motor
104. osition in space of the specimen must be reproducible for all other specimens In focus is defined as a reproducible working distance and focus lense settings Insert the Spectrometer to the previously set Stop step 6 during Installation Set the spectrometer to nominal values of the Bragg angle for carbon by opening the Settings menu and selecting Position Spectrometer Choose C from the Periodic Table and note that commands are being sent to the controller displayed in the Monitor COM Port window MAXray Service and Installation Manual 7 9 Alignment 7 Installation Alignment and Calibration Procedures 6 Once the motors have stopped moving pulse waveforms should be visible on the oscilloscope check triggering If the waveforms are very low amplitide LT 1V or if the pulses exceed 5V and clipping is observed then the Gas Flow Proportional Counter BIAS needs to be adjusted Change the Bias voltage From the Service menu click Electronics Change the bias baseline and window voltage settings Change the bias value to obtain pulses which utilize the full dynamic range of the PCS Amplifier See Figure 6 7 and verify the values of the SCA baseline and window If no pulses are visible see Troubleshooting If you do not have an oscilloscope see Bias Scan and SCA Scan A ll NLELLLL NE TN Pitt Ke TT T pit LE LL LL LL LLL et tT Pit et PITY Te tT
105. ously updates To average the reading click MAXray Service and Installation Manual 7 35 Setting Up Beam Current Meter 7 Installation Alignment and Calibration Procedures Damp 4 Stop the reading 5 Click Stop Setting Up Beam Current Meter The Beam Current Meter is connected to the special serial port board of the MAXray or MAXray ll Controller It is setup internally as COM Port 4 and although it does not use any interrupts the serial port card can be configured for either IRQ 5 or IRQ 9 The Beam Current Meter is attached to the WDS Controller using a 9 pin male to 9 pin female serial cable A null modem cable is not necessary and will not work 1 To use the Beam Current Meter a An RS 232 board must be installed and setup for IRQ5 or 9 b The METER TXT file must be on the Controller boot disk The new Beam Current Meter commands that can be used in the Send Command are READ BEAM ONE READ BEAM TWO FAR CUP IN FAR CUP OUT To use the Beam Current Meter the first line in the CRYSTAL TXT file must be BEAM METER YES The new METER TXT file must include the parameters for channel one sense channel two sense Faraday cup polarity and Faraday cup retraction delay time Below are the acceptable values for each of these parameters channel one sense 1 or 1 channel 2 sense 1 or l Faraday cup polarityO or 1 Faraday cup retraction delay timeO 1 2 4 5 or 10 milliseconds A sample file l
106. put Connectors 1 16 PD BNC Connector 1 16 AMP Out BNC Connector 1 16 Input SHV Connector 1 16 Bias SHV Connector 1 16 Contents Power 9 pin D Male 1 16 Installing P 10 Gas 1 17 Tools 1 17 Instructions 1 17 Maintenance 1 18 Converting Input to 230 Volt AC for Europe 1 18 Parts Required 1 18 Procedure 1 18 Changing a Blown Fuse in the Controller Switching Power Supply 1 18 Parts Required 1 18 Fuse Location 1 19 Procedure 1 19 2 WDS Software Revisions Version 3 1 2 Revisions 2 1 New Windows Software Features 2 1 Windows Software Changes 2 1 Windows Software Fixes 2 1 Verision 3 2 1 Controller Software 2 2 Features 2 2 Version 3 0 0 Revisions 2 2 New Windows Software Features 2 2 Version 3 0 0 Changes 2 3 Version 3 0 0 Fixes 2 4 3 MAXray Parallel Beam Spectrometer Ultrahigh Resolution and Intensity at Low Beam Voltage 3 1 Applications 3 1 Interface 3 2 MAXray Specifications 3 2 MAXray Spectrometer 3 2 Control and Data Acquisition Electronics 3 3 Software 3 3 MAXray Standards 3 4 MAXray ER Specification 3 4 Notes 3 4 Contents Schematic Diagram of PBS Spectrometer 7 MAXray Allowable Bragg Angles for Various Diffractors 8 4 Overview of Paralle Beam Spectrometry and WDS Principles of WDS 4 3 X ray Optics 4 5 Diffractors 4 5 Detectors 4 6 Spectrometers 4 7 Interfacing Requirements 4 7 The Multielement Spectrometer 4 7 Achieving Required Motions in IbeX 4 9
107. ray Service and Installation Manual 1 13 Electrical Specifications 1 Safety Precautions and Technical Specifications Pin number Signal Description 9 Ground 10 MOTOR C Output Analog level 0 24 V 1 5 A max Motor winding C 11 MOTOR D Output Analog level 0 24 V 1 5 A max Motor winding D 12 N C 13 MOTOR A Output Analog level 0 24 V 1 5 A max Motor winding A 14 MOTOR B Output Analog level 0 24 V 1 5 A max Motor winding B 15 N C Keyboard 5 pin DIN Pin number Signal 1 Keyboard Clock Output VOL 45V 10 mA and VOH 2 4V 2 6 mA 2 Keyboard Data Input VOL 45V 10 mA and VOH 2 4V 2 6 mA 3 Not connected Ground 5V Output Keyboard power 1 14 MAXray Service and Installation Manual 1 Safety Precautions and Technical Specifications Electrical Specifications Display 15 pin D Female High Density 5 43 2 1 15 14 13 12 11 Pin number Signal Red Output analog level 0 2V 25 mA Green Output analog level 0 2V 25 mA Blue Output analog level 0 2V 9 25 mA N C Ground Red Ground Green Ground OI GQ N Blue Ground cO N C O Ground Reserved N Reserved Horizontal Sync Output TTL level to 3 5 V 10 mA Negative True 31 9 kHz 6 Vertical Sync Output TTL level 0 to 3 5 V 10 mA Positive
108. rometer Remove Set Points and use wide scan to find peaks 7 24 MAXray Service and Installation Manual 7 Installation Alignment and Calibration Procedures Detector and Diffractor Motor Calibration Poor Intensity CPS nA Not Meeting Specifications 1 Qr ML ge 9 I9 N Poor alignment Re adjust all spectrometer setting at a fixed stage position Optimize bias and SCA setting Use o scope to observe waveforms Bad diffractor crystal or synthetic Turret angle is off Perform turret scan and adjust home position in CRYSTAL TXT file Specifications can only be checked using NORAN supplied standard specimens For poor light elements fluorine and lower proportional counter window can affect intensities Change window Electron column conditions as specified accelerating voltage aperture setting Intensities OK at low energy poor at high energies Optic is not pointing at the specimen Realign spectrometer Intensities OK Resolution P B Poor Co alignment of optic is bad Check to see if optic is damaged SCA not properly set Check baseline setting gt 2V Theta Detector scan synchronization off Perform Detector and Theta Scan independently and apply calibration offsets Detector and Diffractor Motor Calibration Setting up the Calibration 1 Load the sample into the microscope e Whenever possible use a pure element standard For elements such as nitrogen and oxygen use a binary compo
109. s and Technical Specifications For continued protection against fire replace the fuse s only with the specified type Do not place objects under or around the bottom of the controller that would restrict the cabinet cooling Never operate your NORAN Instruments equipment if you notice unusual noises or foul odors Disconnect the power cord from the main power source and call your local NORAN Instruments support specialist CAUTION Make sure the P 10 gas flow through the proportional counter is correct before energizing the detector Flow Proportional Counter Window CAUTION CAUTION CAUTION CAUTION WARNING The material that isolates the gas inside the detector from the vacuum of the spectrometer and the SEM chambers is made of polypropylene If the window must be replaced follow these precautions Shut off the high voltage to the detector Turn off the P 10 gas Solvents must not come into contact with the window Do not seal off the gas flow routinely or the window will break Motorized Retraction and Manual Retraction Do not change the retraction limits set during installation Detector Touch Sensor Module The Detector Touch Sensor module requires a nine volt battery and contains a buzzer LED and control circuitry The input from the touch sensor is via a coax connector as is the output to the stage automation system The control circuitry consumers approximately 25 microamperes during normal operation a
110. ssure is representative of a typical base pressure Vent the microscope column and remove the port cover for the designated installation port Mount the Slide Interface to the port using supplied hardware Do not tighten the bolts 4 Using a flashlight looking down the Support Tube verify the tip of the pole piece is centered in the tube If it is not centered loosen the Port Adaptor screws which mount to the chamber and shift the alignment to center the pole piece in the Support Tube Tighten all Port Adaptor bolts and verify the alignment of the pole piece in the Support Tube O RING ELECTRON TRAP CENTER THE TIP Dr THE POLE PIECE WITHIN THE OPTIC SUPPORT TUBE LEFT TO RIGHT CENTERING ONLY lt TOP TO BOTTOM NOT REQUIRED THIS MAY BE DIFFICULT WITH FLAT BOTTOMED LENSES SFECITROUME TER MOUNT BLUCK Figure 7 2 View Down Support Tube MAXray Service and Installation Manual 7 3 Installation Procedures 7 Installation Alignment and Calibration Procedures 5 Viewing the inside of the chamber from a stage door or another port insert the Slide Interface until the Support Tube is visible and accessible for installation of the X ray Optic Install the X ray Optic by pushing the large end into the Support Tube This is designed to be a snug fit so be careful to not cock the optic during installation If a Set Screw is required tighten it against the X ray Optic X RAY OPTIC INSERT X RAY HPTIC INTO THE SUPPURT TU
111. stal motor offset c cccc is the detector motor offset NOTE Always use four digits after the decimal point MAXray Service and Installation Manual 7 21 MAxXray Calibration Procedure 7 Installation Alignment and Calibration Procedures 2 Remove a calibration offset point crystal X point remove aa aaaa where Xis the turret position of the crystal through 5 aa aaaa is the Bragg angle of the peak NOTE Always use four digits after the decimal point Save the calibration offsets to the controller floppy disk save calibration data 4 Display the Turret and Calibration information in the Monitor window Show 5 List the system status in the Monitor window Status 6 Move the spectrometer to an energy position energy where aa aaa is the desired energy in keV NOTE The energy selected must be in the range of the active crystal 7 22 MAXray Service and Installation Manual 7 installation Alignment and Calibration Procedures Troubleshooting Troubleshooting This guide is intended to outline all potential problems which may be encountered in the field Some of the root causes of failure should not occur in the field like feed through wiring error however all possible sources of failure are listed for completeness Motor s Fails to Move When Commanded to Home 1 Feed through wiring error Internal motor harness error or damage See Wiring and Plumbing drawing Motor cab
112. t End keV Peak Step eV Step Dwell sec Dwell Peak keV Counts Peak Second diffractor scan Second detector scan Start keV Start End keV End Step eV Step Dwell Sec Dwell Peak keV Counts Peak Crystal motor offset computed Theoretical degrees Measured degrees Computed degree offset Detector motor offset computed Theoretical degrees Measured degrees Computed degree offset Energy scan Beginning Energy keV Ending Energy keV Step Size eV Dwell Time Sec Detector Bias volts SCA Baseline volts SCA Window volts Crystal Name Peak keV Counts Detector Bias Voltage Calibration Detector Bias Voltage Volts Single Channel Analyzer SCA Voltage Calibration SCA Baseline Voltage Volts SCA Window Voltage Volts keV keV eV Sec keV keV keV eV Sec keV Calibration Records Counts Counts Counts MAXray Service and Installation Manual 7 43 Calibration Records 7 Installation Alignment and Calibration Procedures 7 44 MAXray Service and Installation Manual MAXray System MAXray SPECTROMETER 1 4 DIA BLACK POLYETHYLENE TUBING 1 8 DIA TYGON TUBING CABLE TD PD CLIMPUTER OUT e a eE THETA TURRET DETE EE MN C P 10 GAS FLOW METER AND VALVE X ES SINGLE STAGE REGULATOR SUPPLIED IN GAS KIT NORAN y 5 10 GAS CYLINDER AND 2 5 REGULATOR SUPPLIED BY CUSTOMER PCS POWER CABLE 9 PIN
113. t gt Acquisition Information dialog box The loaded spectrum now changes its file name to reflect the path it was loaded from 8 No elements are highlighted when the Scan Periodic Table dialog box is opened The program no longer crashes on exit using the File Exit menu item 10 The controller now allows you to add and save the first calibration point when starting a calibration sequence 11 Old spectrum files will not be over written without a warning 12 The filename extension is now only added if it is not entered as part of the name 2 4 MAXray Service and Installation Manual 3 MAXray Parallel Beam Spectrometer Ultrahigh Resolution and Intensity at Low Beam Voltage The new MAXray Parallel Beam Spectrometer is a revolutionary new product that extends the power of microanalysis for FESEMs and defect review tools The MAXray spectrometer is ideal for microanalysis especially for the analysis of low energy x ray lines A NORAN Instruments exclusive reflective optic placed close to the sample like a solid state detector converts a divergent beam of x rays to a parallel beam Parallel Beam Spectrometry PBS combines the resolving properties of wavelength dispersive spectrometry with the sensitivity of a large area energy dispersive detector The combination of detector design and proximity to the sample used in PBS provides great improvement in low energy resolution and sensitivity over energy dispersive spectr
114. tallation Manual 4 7 Spectrometers 4 Overview of Parallel Beam Spectrometry and WDS multielement spectrometers can be scanned through an angular range to pick up other x ray lines but will suffer loss in performance as the angle deviates from the optimum The larger the deviation the less results compare favorably with fully focusing systems Fortunately however for moderate scanning ranges reasonable performance is achieved axes of turret rotation Diffractors on each face of a turret square or hexagonal Arc described by the detector motion Detector Figure 4 2 Multielement spectrometer motion The following spectrum from albite was obtained in a multielement spectrometer by scanning the TAP crystal through an angular range of about 1299 1800 8 8 Ma 10 1 Al 32 2 Si 1600 1400 1200 1000 800 600 400 200 1044 1151 1258 1365 1473 1648 1834 Energy eV Figure 4 3 A mutlielement spectrometer scan Na Si The improved resolution and Peak to background over EDS despite moving off the focusing condition is significant Note that despite the higher Si concentration the AI and Si peak heights are nearly equal due to the diffractor being optimized in this case for Al Crystal radius plays a significant role in the relative peak heights obtained with this type of spectrometer 4 8 MAXray Service and Installation Manual 4 Overview of P
115. the new motor using the same screws 1 and LEI and Harmonic Drive Shor gt Comp r a 3 Note gapping between face of Flip Motor Mount and whe wove Generator 4 Ke mount the new motor assembly using the 4 4 40 screws The assembly is self aligning Or HOOK UO the conuroller mmo esu SMOOT motor movement before re installing on the column Detector or heto Motor Both the Detector and Theta motors are similar in replacment Parts supplied will have motor mount and worm gear already assembled LA Motor assemblies have different worm gears Do not attempt to use a Detector motor in the Theta Drive Cor the opposite 0UF135595 Theta Motor Assy Single Start Worm 700 135600 Detector Mtr Assy Quad Start Worm Disconnect ve connector Orr Motory encoder harness to defective motor C Remove defective motor loosening 4 86 32 SHC screws 3 Install new motor assembly being sure to Orient Correctly Tor the mourn 4 Adjust play in worm gear worm wheel mesh should be minimal play but not bind gears Note how worm wheel and worm gear should be centered relative to each other There WURM GEAR WHEEL 2 HOOK Ub the Controller ond test Motor movement before re installing spectrometer SVH 08 285 98 NURAN Instruments ND DATE MOTOR REPLACMENT AND I
116. thorized support representatives WARNING Dangerous voltages are present inside the equipment High operating voltages are present inside the equipment These voltages can produce severe burns or fatal electrical shocks Failures in improperly grounded equipment can transfer dangerous voltages to outside surfaces Numerous internal components operate at high voltages and may not be insulated or shielded Components such as capacitors and batteries can store high voltages even with the power disconnected WARNING Maintain proper equipment grounding e Always connect equipment to a properly grounded power source receptacle If in doubt have the receptacle checked by a qualified technician e Never use a ground adapter plug to connect NORAN Instruments equipment to a power source receptacle that lacks ground connection terminals e Never operate your NORAN Instruments equipment if you notice unusual noises or foul odors Disconnect the power cord from the main power source and call your local NORAN Instruments support specialist WARNING Avoid contact with internal high voltage sources e Never remove any outer covers or guards that are fastened with screws without being so instructed either by this manual or by a qualified NORAN Instruments support specialist Never attempt internal service or system adjustments unless instructed to do so either by this manual or by a qualified NORAN Instruments support spe
117. ths being emitted from the sample sharp peaks result Peak width is typically from 2 to 25 eV compared to 80 to 160 eV in EDS High resolution leads to high peak to background ratio P B P B controls sensitivity and minimum detection limits for both analysis and mapping Since the angle of incidence equals the angle of reflection a detector or counter must be positioned at the same angle relative to the diffractor as the incident x ray beam makes with the diffractor itself Relative to the incident beam the diffractor is at an angle 0 and the detector at 20 In the derivation of Bragg s law a parallel beam of x rays was assumed In the SEM however use of a spot or high magnification raster means that the beam starts essentially at a point and diverges on its way to the diffractor In PBS a special collimating optic is placed close 20 mm to the surface of the sample Divergent x rays passing through this optic are converted into a parallel beam of x rays This beam strikes a large flat diffractor and is diffracted into the window of a gas filled proportional counter Since the parallel beam does not have to be focused as in conventional WDS the distance between the sample and diffractor does not have to equal the distance between the diffractor and the detector window allowing the detector to be moved closer to the diffractor The Bragg angle relationship still must be met though Implications of the nature of PBS 1 Compared with
118. tions 1 3 Converting Input to 230 Volt AC for Europe 1 18 CrSc 80 Diffractor 9 1 Crystal Definition File 7 14 Definition of 4 5 Diffractors 4 5 Mounting 7 15 Names 7 16 Text File CRYSTAL TXT 7 6 7 9 7 19 Text File CRYSTAL TXT Creating 7 14 Text File Example 7 17 Crystal Calibration 7 25 D Damp 7 36 Data Acquisition Electronics 3 3 Deadtime 4 2 Detection Limits 4 2 Detector 1 4 4 6 Angle 7 11 Bias Voltage 7 21 7 32 Motor 9 1 Resolution 4 1 Detector Calibration 7 25 Detector Touch Sensor Module 1 4 MAXray Service and Installation Manual Index 1 Index Diffractor Angle 7 11 CrSc 80 9 1 Definition of 4 5 MoB4C 145 9 1 NiC 100 9 1 NiC 80 9 1 Replacement Instructions Drawing 8 7 Safety Precautions 1 2 9 1 Tilt 7 11 WSi 50 9 1 WSi 60 9 1 Diffractor Calibration 7 25 Dot Mapping 3 3 Dwell Time 7 34 E Elastomer Seals 5 1 Electrical Specifications 1 11 Electron Trap 7 2 Element Limits 4 2 Ending Energy 7 34 Energy Wavelength Range 4 1 Engineering Layout Drawing 47 Europe Power input 1 18 F Flow Counter Window 9 1 Repair Replacement Instructions Drawing 8 4 Safety Precautions 1 4 Support 9 1 Focus Maintaining 6 1 Front Plate 7 4 Fuse blown Changing 1 18 G Gas Flow Counter Window 7 7 Gas Inlet Ports 7 7 Gate Valve Manual Safety Precautions 1 2 Grazing Incidence X Ray Optic 5 1 H Horizontal Adjustment 7 11 Host Computer 7 5 7 6 HV Bias Supply 3 3 IBe
119. tricts its application to specified elements or energy ranges Although focusing is exact for only one wavelength per crystal small errors in L can be tolerated which means that good performance can be maintained over several degrees of scanning For the elements designated one per crystal expected WDS performance is achieved For the light elements performance can even be superior to fully focusing units because the best diffractor can be used for each element designated In the L is typically 20 or 25 cm 8 or 10 depending on chamber size Up to six diffractors can be used in a given spectrometer each optimized for a specific element by selection of the best material and d spacing and then curved to the radius required by the focusing equation Each diffractor will be curved to a different radius correct for focusing its designated element Each diffractor therefore is on a unique Rowland circle The spectrometer permits selection of the diffractor and its rotation to a specified angle or through a range of angles The detector a flow proportional counter moves along an arc maintaining a constant detector to diffractor distance L2 L to its 20 position see Figure 4 2 Further if the diffractor is rotated to an angle other than the one for the crystal s designated element Bragg s law can be satisfied but not the focusing equation since 0 changes but both R and L are fixed Consequently MAXray Service and Ins
120. troller Electronics and 3 axis motor controller in single tower format Timer 0 1 second resolution 9 999 seconds max SCA counter 650 000 cps max 9 999 999 counts max Control DACs for bias baseline window Dot mapping Analog only providing TTL pulse output 1 50 us duration Data acquisition electronics Integrated preamplifier amplifier single channel analyzer SCA and bias supply Remotely programmable baseline window and HV bias Baseline and window programmable over full range of amplifier SCA output TTL pulse 300 ns width Analog amplifier output 0 5 volt Gaussian HV bias supply 1325 2600 volts Software Fully integrated with VOYAGER and VANTAGE Defect Analysis and EasyMicro software Automatically launches in overlap conditions Automated calibration Automatic peak identification and labeling Prior experience with WDS is not required for operation Additional software training is not required Built in manual override of all acquisition parameters Spectral display in energy units keV Energy cursor and KLM markers Peak ID hinting Resizable window for ease of use on the desktop Convenient menu selections for loading and saving data Pre formatted printouts for fast report generation Physical Dimensions approximate Spectrometer Max 17 50W X 11 88H X 6 19 D in 44 5 W X 30 2 H X 15 8 D cm Weight 57 Ib 26 kg Controller tower format 9 W X 15H X 23 D in 23 W
121. und when possible Set the microscope s Accelerating Voltage and Beam Current For all synthetic diffractors light elements use 10 keV and 5 nAmps 9 For and PET diffractors heavy elements use 20 keV and 5 nAmps For LiF diffractors use 30 keV and 5 nAmps Run the MAXray software Double click on the program icon Record the crystal name From the Settings menu click Configuration Determine the diffractor 2d spacing Record the diffractor 2d spacing the element name and the x ray line MAXray Service and Installation Manual 7 25 Detector and Diffractor Motor Calibration 7 Installation Alignment and Calibration Procedures From the Edit menu click Scan Parameters Read the theoretical peak energy of the x ray line Record the theoretical peak energy the sample used the accelerating voltage and the beam current 5 Setthe Bias Baseline and Window From the Edit menu click Scan Parameters Use the following parameters Parameter Heavy elements Light elements Bias 2250 volts 2200 volts Baseline 1 5 volts 0 3 volts Window 6 5 Volts 8 0 volts Save the settings by clicking Save 6 Move the diffractor and detector to their initial positions From the Settings menu click Position Spectrometer Select an element from the periodic table and then click OK 7 Unlock the service menu From the Service menu click Password Enter the password bestWDS 8 Display the contr
122. window There will also be some calibration offsets listed below the configuration data this data is stored in the CALIBRAT TXT file on the controller floppy disk This verifies that communication is working between the host and controller If any error messages are received see Troubleshooting in this document From the Service menu click Initialize Motors The Initialize Motors verification displays Click OK Three motors home in this sequence At the high speeds used for homing the motors will generate some acoustic noise which is normal If the motors fail to home see Troubleshooting Vent the chamber and remove Seal off Plate from rear of Slide Interface Retract the slide mechanism about 4 inches or any necessary distance to easily access the screws to mount the spectrometer Remove the Cover Plate from the front of the Spectrometer housing Turn off power to the Controller and disconnect the three Motor Cables Position the MAXray onto the Slide Interface aligning the pins on the interface to the holes on the spectrometer body Insert and tighten the M5 Screws 4 that secure the spectrometer to the interface Be sure the O ring surface is clean and seated prior to installation of the Spectrometer NOTE Some versions of the MAXray do not have any PRESSURE HELIEF VALVES integrated on the interface Therefore prior to installation of the spectrometer be sure that the AIR ADMIT valve is closed Also prior to venting the CHAMBER w

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