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Agilent Laser and Optics

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1. Figure 67 Air sensor orientation Agilent 10751D shown The Air Sensor should be mounted with its arrow pointing up to maximize accuracy as shown in Figure 67 Agilent 10757D E F Material Temperature Sensor When monitoring material temperature to account for material expansion the Agilent 10757D E F Material Temperature Sensor should be placed on the part of the machine closest to the workpiece The material temperature sensor contains a magnet to aid in securing it to ferrous materials For permanent mounting a clamp can be used to secure it If two material temperature sensors are used they should be placed to determine the average temperature of the workpiece After attaching a probe to the workpiece allow at least 10 minutes for the probe temperature to stabilize at the workpiece temperature Laser and Optics User s Manual Vol Accuracy and Repeatability 12 WOL compensation method comparison The method of atmospheric WOL compensation used is important in determining the overall laser system measurement accuracy Table 17 summarizes the laser system accuracy for various methods of atmospheric compensation as a function of different atmospheric conditions Table 17 Laser system measurement accuracy comparison Environment Pressure 760 mm Hg 25 mm Hg Relative Humidity 50 10 Temperature Control No Compensationt at 20 C 9 9 ppm Compensation using Agilent 10751C D Air 1 5 ppm Sensor at 20 C
2. Accuracy and Repeatability 12 Determining System Accuracy and Repeatability The measurement accuracy and repeatability of a laser interferometer system are determined by summing all the error components previously discussed The error components used to determine the measurement repeatability are a subset of the accuracy components Table 13 shows the list of components for these error budgets and how the totals are determined As shown in Table 13 the only differences between the two error budgets are the laser wavelength terms and the cosine error not being part of the repeatability error budget Table 13 Laser interferometer system accuracy and repeatability error Laser Interferometer System Accuracy is the Sum of Repeatability is the Sum of Proportional Terms Laser Wavelength Accuracy Laser Wavelength Stability Atmospheric Compensation Atmospheric Compensation Material Thermal Expansion Material Thermal Expansion Cosine Error not applicable Deadpath Error Deadpath Error Fixed Terms Electronics Error Resolution Electronics Error Resolution Optics Non Linearity Optics Non Linearity Optics Thermal Drift Optics Thermal Drift Abb Error Abb Error All these terms can be directly summed to determine the worst case system accuracy and repeatability However taking the vector sum of the individual components results in a more realistic or typical system performance Again these components are categorized into p
3. Agilent 10702A Agilent 10702A 001 Agilent 10703A Agilent 10704A Agilent 10705A Agilent 10706A Agilent 10706B Agilent 10715A Agilent 10715A 001 Agilent 10716A Agilent 10716A 001 Agilent 10717A Agilent 10719A Measurement Optics cont Linear Interferometer Same as above but with wedge windows required if interferometer is the moving component Reflector paired with Agilent 10702A Reflector paired with Agilent 10705A Single Beam Interferometer Plane Mirror Interferometer High Stability Plane Mirror Interferometer Differential Interferometer Differential Interferometer turned configuration High Resolution Interferometer High Resolution Interferometer turned configuration Wavelength Tracker requires measurement receiver and cable One Axis Differential Interferometer requires 3 mm beam from Agilent 5517C 003 One Interferometer plus Reflector pair required per axis Agilent 10721A Agilent 10724A Agilent 10735A Agilent 10736A Agilent 10736A 001 Two Axis Differential Interferometer requires 3 mm beam from Agilent 5517C 003 Plane Mirror Reflector Three Axis Interferometer Three Axis Interferometer Three Axis Interferometer with Beam Bender Laser and Optics User s Manual Vol System Design Considerations 3 Table 2 Equipment choices continued Component Commeni s Measurement Optics cont One Interferometer plus Reflector pair required per axis Agilent 107
4. Agilent 10702A Linear Interferometer Agilent 10766A Linear Interferometer Agilent 10705A Single Beam Interferometer Electronics Resolution Extension factors ERX in equations below are as follows 32 for 10885 10887 10895 10896 e 64 for 10889 256 for 10897 and 10898 e 512 for N1231A 1024 for N1231B Deadpath counts is the deadpath length D in terms of counts These counts have to be appropriate for the optics being used You must input the terms Deadpath Counts and deadpath in selected units with the correct conversion factor These terms can be determined as follows Laser and Optics User s Manual Vol Accuracy and Repeatability 12 For 2 8 optics ERX x 1 26384033 x 10 D h eadpath Counts latal TCN For 4 optics ERX x 6 31920164 x 10 Deadpath Counts Initial TCN For A 2 optics ERX x 3 15960082 x 10 Deadpath Counts a EL Initial TCN where D is the deadpath distance measured in millimeters The wavelength conversion factor is also dependent on which measurement optics are used For 2 8 optics 5 mill Wavelength Conversion Factor 791239195 x10 _tnillimeters ERX count For 4 4 optics 1 58247839 4 millimeters gt l Wavelength Conversion Factor ERX count For A 2 optics 3 16495677 4 millimeters MX pue Wavelength Conversion Factor ERX 0 SUE The deadpath distance D need not be measured with prec
5. 7 5 7014 7018 7022 7026 7029 7033 7037 7041 7044 7048 7052 7056 7059 7063 7067 7070 7074 7078 7082 7085 7089 7093 7097 7100 7104 7108 7112 7115 7119 7123 7126 7130 7134 7138 7141 7145 7149 7153 7156 7160 7164 7168 7171 7175 7179 7183 7186 7190 7194 7197 7201 7205 7209 7212 7216 7220 7224 7227 7231 7235 7239 7242 7246 7250 7254 7251 7261 7265 7268 7212 7276 7280 7283 7281 7291 7295 7298 17302 7306 7310 7313 8 0 7020 7024 7027 7031 7035 7038 7042 7046 7050 7053 7057 7061 7065 7068 7072 7076 7079 7083 7087 7091 7094 7098 7102 7106 7103 7113 7117 7120 7124 7128 7132 7135 7139 7143 7147 7150 7154 7158 7162 7165 7169 7173 7176 7180 7184 7188 7191 7195 7199 7203 7206 7210 7214 7217 7221 7225 7229 7232 7236 7240 7244 7247 7251 7255 7258 7262 7266 7270 7273 7277 7281 7285 7288 7292 7296 7299 7303 7307 7311 7314 7318 8 5 7025 7029 7033 7036 7040 7044 7048 7051 7055 7059 7062 7066 7070 7074 7077 7081 7085 7088 7092 7096 7100 7103 7107 7111 7115 7118 7122 7126 7129 7133 7137 7141 7144 7148 73152 7155 7159 7163 7167 7170 7174 7178 7182 7185 7189 7193 7196 7200 7204 7208 7211 7215 7219 7222 7226 7230 7234 7237 7241 7245 7249 7252 7256 7260 7263 7267 7271 7275 7278 7282 7286 7289 7293 7297 7301 7304 7308 7312 7316 7319 7323 9 0 70
6. Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Board for both measurement and Wavelength Tracker axes This cable s connectors are different as shown in Figure 284 One connector is a bayonet connector that inserts into the Agilent axis board The other connector fits the connector on the receiver this connector is keyed to go together only one way This connector has a locking ring which takes a 1 4 turn clockwise to secure the cable to its mating connector on the receiver Agilent N1250A B High Performance Receiver Cable The Agilent N1250A B High Performance Receiver Cable is used to connect the measurement signal from an Agilent E1708A or E1709A Receiver to the Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Board for both measurement and Wavelength Tracker axes This cable s connectors are different as shown in Figure 288 One connector is a bayonet connector that inserts into the Agilent axis board The other connector fits the connector on the receiver this connector is keyed to go together only one way This connector has a locking ring which takes a 1 4 turn clockwise to secure the cable to its mating connector on the receiver Laser and Optics User s Manual Vol 83 4 System Installation and Alignment Mounting Optics
7. Air Pressure Error Of 5 mm Hg 100 N 75 55 0 0 10 20 30 40 50 Measured Distance Meters Figure 66 Relative effect of errors in atmospheric and material temperature Laser measurement errors from environmental effects can be corrected by using a combined compensation term called the Total Compensation Number or TCN It contains a Wavelength of Light compensation term WCN and a Material Temperature compensation term MTC These terms were described individually earlier in this chapter The WCN is Equation 2 and the MTC is Equation 5 The TCN is determined from the WCN and MTC as follows TCN WCN x MTC 13 Expanding the WCN and MTC terms we get WCN MTC air wavelength 14 TCN __ x 1 Linear Thermal Coefficient x Material Temperature Standard Temperature vacuum wavelength The Wavelength of Light term compensates for changes in the laser wavelength The material temperature term corrects the measurement back to standard temperature Laser and Optics User s Manual Vol 209 12 Accuracy and Repeatability 210 Recall from the earlier section on atmospheric compensation that the laser position transducer counts the number of wavelengths of motion traveled This measurement can then be corrected for atmospheric effects by multiplying the distance by a correction factor the WCN The result was given in Equation 3 Actual Displacement true position Wavel
8. Check the Receiver cable measurement electronies Receiver connector Auto Comp Board backplane connector and power supply NO YES Measure voltage at receiver s test point Is o voltage ok YES Measure beam strength at input to receiver Perform Receiver alignment and Gain Adjustment Procedure outlined in Chapter 8 of the manual Is Problem with optical beam strength ok attenuation or low output from laser head YES See Note 2 NO Refer to Receiver Oper Serv Manual System error LED ON YES YES lt Is LED lit on wavelength tracker receiver YES Auto Comp board LEDS off following power up sequence Check measurement signal at Auto Comp Board test point 33 See Note 1 Measurement e Notes Voltage levels differential square wave at doppler shifted frequency 100 kHz to 7 2 MHz 100 kHz to 15 5 MHz for E1709A a White cable WHT 7 2 5V 5V Meas Freq b Black cable BLK T 2 5V 5V Meas Freq Agilent 10780C F Receiver Operating and Service Manual Agilent Part Number 10780 90028 Agilent E1708A Receiver Operating Manual Agilent Part Number E1708 90010 Agilent E1709A Receiver Operating Manual Agilent Part Number E1709 90006 See Chapter 8 Receivers of this manual for factory set value and range of 1070C F receiver sensitivity control For E1
9. wavelengths of motion which involves only the distance L the system will not correct for the wavelength change over D This will result in an apparent shift in the zero position on the machine This zero shift is deadpath error and occurs whenever environmental conditions change during a measurement Laser and Optics User s Manual Vol Accuracy and Repeatability 12 DEADPATH A Reflector at Initial Position p l x N easuremen Ye A fg Reflector fA fg z fa n a From Laser Xx gt _ 7 e fA fg I fA To Receiver amp q Ip B After Reflector Movement pes em n Measurement Ys At Reflector fA fg fa _ aA From Laser Xx gt a fA fg fA To Receiver amp q LEGEND p i fA m Qum um um gt fp lt gt fa and fp Figure 52 Deadpath caused by unequal lengths from initial point Deadpath error can be represented as Deadpath Error Deadpath distance x AWCN 7 where AWCN Change in wavelength compensation number during the measurement time Deadpath effects should be considered when designing a laser interferometer into an application or when using it Table 12 lists the minimum deadpath mirror position s and the deadpath values for Agilent interferometers Laser and Optics User s Manual Vol 181 12 Accuracy and Repeatability Table 12Deadpath mirror positions and values for Agilent interf
10. 1 Agilent 10706A 33 Beam Splitter gt Plane Mirror Interferometer A X Axis Receiver Laser el Ie Wu Figure 17 Yaw measurement of x y stage using discrete plane mirror interferometers 72 Laser and Optics User s Manual Vol System Design Considerations 3 The resulting angular measurement will only be as accurate as the measurement distance D However even if D is not known precisely this technique can provide extremely high resolution or relative angular changes The resolution depends on D and with electronic resolution extension can be well under 0 01 arc seconds For applications in which the stage is servo controlled to its initial angle THETA 0 this high resolution is the key measurement consideration and the accuracy of D is not critical For applications in which accuracy and resolution are both critical D may be determined precisely by rotating the stage through a known angle THETA and solving the above equation for D When installing this type of yaw measuring system take care to ensure the parallelism of the adjacent linear measurements to minimize cosine errors Angular rotation of the measurement mirror is limited to the Alignment Requirement vs Distance value for the interferometer used See the Specifications and Characteristics section of Chapter 20 Agilent 10706A Plane Mirror Interferometer in Volume II of this manual When yaw contr
11. 1 the orientation of the laser head 2 the effect of any beam bending optics in the path between the laser head and the interferometer 3 the interferometer s configuration straight through or turned and 4 the orientation of the interferometer itself For example if 1 f the lower frequency from the laser head is in the measurement path that is the path going to the measurement mirror and 2 f the higher frequency from the laser head is in the reference path that is the path going to the reference mirror 3 the measurement optics are moving away from each other the fringe counts will be INCREASING Interchanging f and fo will reverse the direction sense resulting in the fringe counts DECREASING as measurement optics move away from each other Laser and Optics User s Manual Vol Measurement Optics General Information 5 In this manual f and fo have been used to identify the two frequency components of the laser beam However because the components that left the laser head having horizontal and vertical orientations can have the opposite orientations when they arrive at an interferometer f and fp are used to identify the beam paths through the interferometers Figure 35 shows how two parallel beams derived from the same source can have different polarization orientations at interferometer inputs An interferometer using one of these beams will produce increasing counts as its measurement
12. 272 Laser and Optics User s Manual Vol Wavelength of Light Compensation i igh Mi igh Humidity Table 63 English Low Alt High Mid Temp Hig Temp 91 to 107 F Press 27 to 31 inches 80 Humidity 13 M M M M a AL BAROMETRIC PRESSURE IN INCHES OF MERCURY 91 0 31 00 7320 30 50 7363 30 45 7368 92 0 7325 7330 7334 7338 7343 7347 7351 7356 7360 7364 7369 7373 7377 7382 7386 7390 7395 7399 7403 7408 7412 7416 7421 7425 7430 7434 7438 7443 7447 7451 7456 7460 7464 7469 7473 7477 7482 7486 7508 7512 7516 7521 7525 7529 7534 7538 7542 7547 7551 7555 7560 7564 7568 7573 7577 7581 7586 7590 7594 7599 7603 7607 7612 7616 7621 7625 7629 7634 7638 7642 7647 7651 7655 7660 7664 7668 7673 93 0 7331 7335 7339 7344 7348 7352 7357 7361 7365 7370 7374 7378 7383 7387 7391 7396 7400 7404 7409 7413 7417 7422 7426 7430 7435 7439 7443 7448 7452 7456 7461 7465 7469 7474 7478 7482 7487 7491 7495 7500 7504 7508 7513 7517 7521 7526 7530 7534 7539 7543 7547 7552 7556 7560 7565 7569 7573 7578 7582 7586 7591 7595 7599 7604 7608 7612 7617 7621 7625 7630 7634 7638 7643 7647 7651 7656 7660 7664 7669 7673 7677 7600 7604 7609 7613 7617 7622 7626 7630 7635 7639 7643 7648 7652 7656 7661 7665 7669 7674 7678 7682 95 0 7342 7346 7350 7355 7359 7363 73
13. 68 0 7554 7558 7563 7567 7572 7576 7581 7586 7590 7595 7599 7604 7608 7613 7617 7744 7149 7763 7767 7772 7776 7781 7785 7790 7794 7799 7803 7808 7812 7817 7822 7826 7831 7835 7840 7844 7849 7853 7858 7862 7867 7872 7876 7881 7885 7890 7894 7899 7903 7908 7912 7917 69 0 7559 7563 7568 7572 7571 7581 7586 7590 7595 7599 7604 7608 7613 7617 7622 7627 7631 7636 7640 7645 7649 7654 7658 7663 7667 7672 7676 7681 7685 7690 7694 7699 7704 7708 7713 7717 7722 7726 3131 7735 7740 7744 7749 7753 7758 7762 7767 7772 7776 7781 7785 7790 7794 7799 7803 7808 7812 7817 7821 7826 7830 7835 7839 7844 7849 7853 7858 7862 7867 7871 7876 7880 7885 7889 7894 7898 7903 7907 7912 7916 7921 70 0 7563 7568 7572 7577 7581 7586 7590 7595 7600 7604 7609 7613 7618 7622 7627 7631 7636 7640 7645 7649 7654 7658 7663 7667 7672 7676 7681 7685 7690 7695 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 7749 7753 7758 7762 7767 7771 7776 7780 7785 7789 7794 7799 7803 7808 7812 7817 7821 7826 7830 7835 7839 7844 7848 7853 7857 7862 7866 7871 7875 7880 7884 7889 7893 7898 7903 7907 7912 7916 7921 7925 71 0 7568 7573 7577 7582 7586 7591 7595 7600 7604 7609 7613 7618 7622 7627 7631 7636 7640 7645 7649 7654 7658 7663 7667 7672 7676 7681 7685 7690 769
14. Contents Table 44 English Low Alt Low Temp Low Humidity Temp 40 to 56 F Press 27 to 31 inches 20 Humidity 254 Table 45 English Low Alt Low Mid Temp Low Humidity Temp 57 to 73 F Press 27 to 31 inches 20 Humidity 255 Table 46 English Low Alt Mid Temp Low Humidity Temp 74 to 90 F Press 27 to 31 inches 20 Humidity 256 Table 47 English Low Alt High Mid Temp Low Humidity Temp 91 to 107 F Press 27 to 31 inches 20 Humidity 257 Table 48 English High Alt Low Temp Low Humidity Temp 40 to 56 F Press 23 to 27 inches 20 Humidity 258 Table 49 English High Alt Low Mid Temp Low Humidity Temp 57 to 73 F Press 23 to 27 inches 20 Humidity 259 Table 50 English High Alt Mid Temp Low Humidity Temp 74 to 90 F Press 23 to 27 inches 20 Humidity 260 Table 51 English High Alt High Mid Temp Low Humidity Temp 91 to 107 F Press 23 to 27 inches 20 Humidity 261 Table 52 English Low Alt Low Temp Med Humidity Temp 40 to 56 F Press 27 to 31 inches 50 Humidity 262 Table 53 English Low Alt Low Mid Temp Med Humidity Temp 57 to 73 F Press 27 to 31 inches 50 Humidity 263 Table 54 English Low Alt Mid Temp Med Humidity Temp 74 to 90 F Press 27 to 31 inches 50 Humidity 264 Table 55 English Low Alt High Mid Temp Med Humidity Temp 91 to 107 F Press 27 to 31 inches 50 Humidity 265 Table 56 Eng
15. EM Clear All Status Preset All Axes Close Axis 2 Position Eror Velocity Eror Preset oo Sample Read Sample and Read Glitch NoSig ERR ERR Interrupts Enabled Data Error Direction Positive FPGA 1 Registers ID 0 0001231B Rev 0200010002 Status F333 Contig 00000 Intr Mask 0x0000 Sample 040100 DCIkA Mode 00000 DCIkA Div 0x0000 Intr Dir Ox0000 Compare 08000 Filter 0x0000 Preset3 0x000000000 Axis 3 Position Error Velocity Eror Preset p Position Preset Sample Read Sample and Read Glitch NoSig ERR ERR Interrupts Enabled Data Error Direction Positive FPGA 2 Registers ID 0 0001231B Rev 0 00020003 Status 0x0333 Config 0x0000 Intr Mask 00000 Sample 00011 DCIkB Mode 00000 DCIkB Div 0x0000 Intr Dir Ox0000 Compare 0 0211 Preset1 0x000000000 Preset2 0x000000000 NOTE Error or invalid data on axis or reference reported by N1231BGetRawPos elAlll Figure 3 Monitor screen after opening the application Info PCI Bus 5 PCI Slot 9 Hdw Rev 0x20 API Rev 0x22 Reference Glitch NoSig ERR ERR Interrupts Enabled Bus Address Oi a ae me Direct Mode Enabled Kv eo La C2 v Global Interrupt mbiabed _ Toggle 5 Press the Clear All Status button and then the Preset All Axes button in the lower left of the screen The position in uncompensated raw lambda 2048 counts
16. Example 1 The Agilent 10719A and Agilent 10721A interferometers have only ONE user accessible optic the external window facing the measurement and reference reflectors This may be cleaned if necessary by wiping with lens tissue or cloth DO NOT try to clean or blow into any other housing aperture since this may cause damage to the internal optics Example 2 The Agilent 10735A Agilent 10736A and Agilent 10736A 001 interferometers have NO user accessible optics DO NOT try to clean or blow into any housing aperture since this may cause damage to the internal optics Lens tissue CAUTION For an Agilent 10735A Agilent 10736A or Agilent 10736A 001 interferometer you must not try to clean or blow into any housing aperture since doing so may damage the optics For an Agilent 10719A or Agilent 10721A interferometer the only opening you may try to clean without possibly damaging the internal optics is the window facing the measurement and reference reflectors Laser and Optics User s Manual Vol Maintenance 7 Some optics see list below are shipped with a package of lens tissue which is made specifically for cleaning optics Use these tissues or equivalent with a pure industrial grade methanol in the following manner 1 Fold the tissue into an approximate 1 inch 25 mm square 2 Wetthe tissue with methanol do not saturate and gently wipe across the optical surfaces Use only enough pressure to remove the c
17. F Laser and Optics User s Manual Vol Material Expansion Coefficients 14 Table 68 Linear thermal expansion coefficients of metals and alloys continued Coefficient of Expansion ppm C ppm F ALUMINUM AND ALUMINUM ALLOYS Continued Casting Alloys A13 43 and 108 A108 A132 D132 360 750 40E COPPER AND COPPER ALLOYS Wrought Coppers Pure Copper Electrolytic Tough Pitch Copper ETP Deoxidized Copper High Residual Phosphorous DHP Oxygen Free Copper Free Machining Copper 0 5 Te or 1 Pb Laser and Optics User s Manual Vol 281 14 Material Expansion Coefficients Table 68 Linear thermal expansion coefficients of metals and alloys continued Coefficient of Expansion ppm C ppm F COPPER AND COPPER ALLOYS Continued Wrought Alloys Continued Gilding 95 Commercial Bronze 90 Jewelry Bronze 87 5 Red Brass 85 Low Brass 80 Cartridge Brass 70 Yellow Brass Muntz Metal Leaded Commercial Bronze Low Leaded Brass Medium Leaded Brass High Leaded Brass Extra High Leaded Brass Free Cutting Brass Leaded Muniz Metal Forging Brass Architectural Bronze Inhibited Admiralty Naval Brass Leaded Naval Brass Manganese Bronze A Phosphorous Bronze 5 A Phosphorous Bronze 8 C Phosphorous Bronze 10 D Phosphorous Bronze 1 25 282 Laser and Optics User s Manual Vol Material Expansion Coefficients Table 68 Linear thermal expan
18. Temp 13 5 to 21 5 C Press 720 to 800 mm 20 Humidity 230 Table 21 Metric Low Alt Mid Temp Low Humidity Temp 22 to 30 C Press 720 to 800 mm 20 Humidity 231 Laser and Optics User s Manual Vol 9 Table 22 Metric Low Alt High Mid Temp Low Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 20 Humidity 232 Table 23 Metric High Alt Low Temp Low Humidity Temp 5 to 13 C Press 640 to 720 mm 20 Humidity 233 Table 24 Metric High Alt Low Mid Temp Low Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 20 Humidity 234 Table 25 Metric High Alt Mid Temp Low Humidity Temp 22 to 30 C Press 640 to 720 mm 20 Humidity 235 Table 26 Metric High Alt High Mid Temp Low Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 20 Humidity 236 Table 27 Metric Low Alt Low Temp Med Humidity Temp 5 to 13 C Press 720 to 800 mm 50 Humidity 237 Table 28 Metric Low Alt Low Mid Temp Med Humidity Temp 13 5 to 21 5 C Press 720 to 800 mm 50 Humidity 238 Table 29 Metric Low Alt Mid Temp Med Humidity Temp 22 to 30 C Press 720 to 800 mm 50 Humidity 239 Table 30 Metric Low Alt High Mid Temp Med Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 50 Humidity 240 Table 31 Metric High Alt Low Temp Med Humidity Temp 5 to 13 C Press 640 to 720 mm 50 Humidity 241 Table 32 Metric High
19. 10 1 1 N 1 ow 14 15 16 This procedure will align the laser beam to within 1 2 arcminutes of the direction of travel resulting in a cosine error of approximately 0 05 ppm That is 0 05 micron per meter of travel 0 05 microinch per inch of cosine error Fasten the laser head and interferometer securely preserving the alignment Remove the referenced mirror true square and the opaque material Reposition the retroreflector until the return measurement beam is centered on the receiver alignment target and overlaps the reference beam from the interferometer Placing a piece of translucent tape over the receiver lens will help in observing the incident beams Verify that the receiver s LED is ON and the voltage at the receiver test point is between 0 6 and 1 3 Vdc for 10780C F or 1 5 and 8 0 Vdc for E1708A or 1 8 and 10 0 Vdc for E1709A Steps 12 through 22 constitute the Y axis autoreflection alignment Pitch and yaw the 50 beam splitter until the reflected laser beam is centered on the beam bender aperture Slight side to side adjustments of the 50 beam splitter may be necessary to ensure there is no beam clipping Fasten the 50 beam splitter securely Adjust the beam bender until the reflected beam is centered on the aperture of the single beam interferometer The single beam interferometer alignment target can be used as an aid and then removed Fasten the beam bender securely Place
20. 10 5 7045 7049 7052 7056 7060 7063 7067 7071 7074 7078 7082 7086 7089 7093 7097 7100 7104 7108 7111 7115 7119 7122 7126 7130 7134 7137 7141 7145 7148 7152 7156 7159 7163 7167 7171 7174 7178 7182 7185 7189 7193 7196 7200 7204 7208 7211 7215 7219 7222 7226 7230 7233 7237 7241 7244 7248 7252 7256 7259 7263 7267 7270 7274 7278 7281 7285 7289 7293 7296 7300 7304 7307 7311 7315 7318 7322 7326 7329 7333 7337 7341 11 0 7050 7054 7058 7061 7065 7069 7072 7076 7080 7083 7087 7091 7094 7098 7102 7105 7109 7113 7117 7120 7124 7128 7131 7135 7139 7142 7146 7150 7153 7157 7161 7165 7168 7172 7176 7179 7183 7187 7190 7194 7198 7201 7205 7209 7212 7216 7220 7224 7221 7231 7235 7238 7242 7246 7249 7253 7257 7260 7264 7268 7212 7275 7279 7283 7286 7290 7294 7297 7301 7305 7308 7312 7316 7318 7323 7327 7331 7334 7338 7342 7345 11 5 7055 7059 7063 7066 7070 7074 7077 7081 7085 7089 7092 7096 7100 7103 7107 7111 7114 7118 7122 7125 7129 7133 7136 7140 7144 7147 7151 7155 7158 7162 7166 7170 7173 7177 7181 7184 7188 7192 7195 7199 17203 7206 7210 7214 7217 7221 7225 7228 7232 723 7240 7243 7247 7251 7254 7258 7262 7265 7269 7273 7276 7280 7284 7287 7291 7295 7298 7302 7306 7309 7313 7317 7321 7324 7328 7332 7335 7339 7343 7346 7350 12 0
21. 10785A Agilent 10774A Short Range Straightness Optics Agilent 10775A Long Range Straightness Optics High Resolution Plane Mirror High Resolution Plane Mirror Laser and Optics User s Manual Vol Not Applicable Not Applicable Included Included Agilent 10776A 109 5 Measurement Optics General Information Resolution The fundamental optical resolution for each interferometer type is listed in Table 4 Using electronic resolution extension the system resolution is increased significantly Depending on the system additional resolution extension factors of 32 is available Table 4 Interferometer Resolutions Interferometer Type Fundamental Resolution Linear A 2 0 316 micron 12 44 microinches Plane Mirror A 4 0 158 micron 6 32 microinches High Resolution Plane Mirror A 8 0 079 micron 3 12 microinches The nominal optical measurement range for an Agilent laser measurement system is usually 40 meters 130 feet for the sum of all axes In calibrator systems this range may be doubled with the Agilent 5519A B optional long range kit The 3 mm diameter beam of the Agilent 5517C 003 Laser Head allows a maximum range of 10 meters 32 feet for the sum of all axes Measurement Direction Sense 110 Direction sense depends on the relation of the optical frequencies in the interferometer s reference and measurement paths This in turn depends on
22. 12 14 4 Time 16 0 19 2 21 6 Comparison of optics thermal drift between Interferometers 24 00 23 50 23 00 24 9 amp nje1eduio 178 12 Accuracy and Repeatability 180 Deadpath error Deadpath error is caused by an uncompensated length of the laser beam between the interferometer and the measurement reflector with the positioning stage or machine at its zero position the position at which the laser system is reset The deadpath distance is the difference in the optical path lengths of the reference and measurement components of the laser beam at the zero position If not properly compensated during changing environmental conditions these unequal beam components can produce a measurement error Figure 52 A shows the unequal path lengths for a conventional linear interferometer The deadpath length is designated as D In this diagram the reference component is fp and the measurement component is f4 The f4 optical path is longer than the fp path by D Assume that the measurement reflector a cube corner in this example moves the distance L see Figure 52 B to a new position and comes to rest Assume that while the cube corner is at rest the environmental conditions surrounding the laser beam change The laser beam wavelength changes over the entire path D L due to these environmental changes and so should be compensated Since a laser interferometer system measures only
23. 26 70 7528 26 65 7532 26 60 7537 26 55 7542 26 50 7546 26 45 7551 26 40 7556 26 35 7560 26 30 7565 26 25 7569 26 20 7574 26 15 7579 26 10 7583 26 05 7588 26 00 7593 25 95 7597 25 90 7602 25 85 7607 25 80 7611 25 75 7616 25 70 7620 25 65 7625 25 60 7630 25 55 7634 25 50 7639 25 45 7644 25 40 7648 25 35 7653 25 30 7658 25 25 7662 25 20 7667 25 15 7671 25 10 7676 25 05 7681 25 00 7685 24 95 7690 24 90 7695 24 85 7699 24 80 7704 24 75 7109 24 70 7713 24 65 7718 24 60 7722 24 55 7727 24 50 7732 24 45 7736 24 40 7741 24 35 7746 24 30 7750 24 25 7755 24 20 7760 24 15 7764 24 10 7769 24 05 7773 24 00 7778 23 95 7183 23 90 71787 23 85 7792 23 80 7797 23 75 7801 23 70 7806 23 65 7811 23 60 7815 23 55 7820 23 50 7824 23 45 7829 23 40 7834 23 35 7838 23 30 7843 23 25 7848 23 20 7852 23 15 7857 23 10 7862 23 05 7866 23 00 7871 58 0 7505 7509 7514 7519 7523 7528 7533 7537 7542 7547 7551 7556 7560 7565 7570 75714 7579 7584 7588 7593 7597 7602 7607 7611 7616 7621 7625 7630 7634 7639 7644 7648 7653 7658 7662 7667 7671 7676 7681 7685 7690 7695 7699 7704 7708 7713 7718 7722 7727 7732 7736 7741 7746 7750 7755 7759 7764 7769 7773 7778 7783 7787 7792 7796 7801 7806 7810 7815 7820 7824 7829 7833 7838 7843 7847 7852 7857 7861 7866 7870 7875 Table 57 English High Alt Low Mid Temp Med Humidity Wavelength of Light Compensation Te
24. 30 05 7305 7310 7315 7321 7326 7331 7336 7341 7346 7351 1356 7361 7366 7371 7376 7381 7386 30 00 7310 7315 7320 7325 7330 7335 7340 7345 7350 7355 7360 7365 7370 7375 7380 7385 7390 29 95 7314 7319 7324 27329 7335 7340 7345 7350 7355 7360 7365 7370 7375 7380 7384 7389 7394 29 90 7319 7324 7329 7334 7339 7344 7349 7354 7359 7364 31369 7374 7379 7384 7389 7394 7399 29 85 7323 7328 7333 7338 7343 7349 7354 7359 7364 7369 27374 7378 7383 7388 7393 7398 7403 29 80 7328 7333 7338 7343 7348 7353 7358 7363 7368 7373 7378 7383 7388 7393 7398 7403 7407 29 75 7332 7337 7342 7347 7352 7357 7362 7367 7372 7377 1382 7387 7392 7397 7402 7407 7412 29 70 7337 7342 7347 7352 27357 7362 27367 7372 7371 7382 7387 7392 7397 7401 7406 7411 7416 29 65 7341 7346 7351 7356 7361 7366 27371 7376 7381 7386 7391 7396 7401 7406 7411 7416 7420 29 60 7346 7351 7356 7361 7366 7371 7376 27381 7386 7391 7396 7400 7405 7410 7415 7420 7425 29 55 7350 7355 7360 7365 7370 7375 7380 7385 7390 7395 7400 7405 7410 7415 7419 7424 7429 29 50 7355 7360 7365 7370 7375 7380 7385 7390 7395 7399 7404 7409 7414 7419 7424 7429 7434 29 45 7359 7364 7369 7374 7319 7384 7389 7394 7399 7404 7409 7414 7419 7423 7428 7433 7438 29 40 7364 7369 7374 27379 7384 7389 7393 7398 7403 7408 7413 7418 7423 7428 7433 7437 7442 29 35 7368 7373 7378 7383 7388 7393 7398 7403 7408 7413 7418 7422 7427 7432 37431 7442 7447 29 30 7372 7378 7383 7387 7392 7397 7402 7407 7412 7417 7422 7427 7432 7437 7441 7446 7451 29 25 7377
25. 45 0 7059 7078 7097 7116 7135 7154 7173 7192 7211 7230 7249 7268 7287 7306 7325 7344 7363 7382 7401 7420 7439 7458 7477 7496 7515 7534 7553 7512 7591 7610 7629 7648 7667 7686 7933 7952 8009 8028 8047 8066 8085 8104 Table 43 English Wide Range o Temp 40 to 120 F Press 20 to 31 inches 50 Humidity Seem a M LLL 50 0 7089 7107 7126 7145 7164 7183 7201 7220 7239 7258 7277 7295 7314 7333 7352 7371 7389 7408 7427 7446 7465 7483 7502 7521 7540 7559 75777 7596 7615 7634 7653 7672 7690 7709 7728 7747 7766 7784 7803 7822 7841 7860 7878 7897 7916 7935 7954 7972 7991 8010 8029 8048 8066 8085 8104 8123 55 0 7117 7136 7155 7173 7192 7211 7229 7248 7266 7285 7304 7322 7341 7360 7378 7397 7415 7434 7453 7471 7490 7509 7527 7546 7564 7583 7602 7620 7639 7657 7676 7695 7713 7732 7751 7769 7788 7806 7825 7844 7862 7881 7900 7918 7937 7955 7974 7993 8011 8030 8048 8067 8086 8104 8123 8142 60 0 7146 7164 7183 7201 7220 7238 7257 7275 7293 7312 7330 7349 7367 7386 7404 7423 7441 7459 7478 7496 Laser and Optics User s Manual Vol TEMPERATURE IN DEGREES FAHRENHEIT 65 0 7174 7192 7210 7229 7247 7265 7284 7302 7320 7338 7357 7375 7393 7411 7430 7448 7466 7484 7503 7521 7539 7557 7576 7594 7612 7631 7649 7667 7685 7704 7722 7740 7158 7711 7
26. 60 0 7517 7522 7526 7531 7535 7540 7545 7549 7554 7558 7563 7568 7572 7577 7582 7586 7591 7595 7600 7605 7609 7614 7618 7623 7628 7632 7637 7641 7646 7651 7655 7660 7664 7669 7674 7678 7683 7688 7692 7697 7701 7706 7711 7715 7720 7724 7729 7734 7738 7743 7747 7752 7757 7761 7766 77721 7775 7780 7784 7789 7794 7798 7803 7807 7812 7817 7821 7826 7830 7835 7840 7844 7849 7854 7858 7863 7867 7872 7877 7881 7886 61 0 7522 7527 7531 7536 7540 7545 7550 7554 7559 7563 7568 7873 7577 7582 7586 7591 7596 7600 7605 7609 7614 7619 7623 7628 7632 7637 7642 7646 7651 7655 7660 7665 7669 7674 7678 7683 7688 7692 7697 7701 7706 7711 7715 7720 7724 7729 7734 7738 7743 7747 7752 7757 7761 7766 7770 7775 7826 7830 7835 7839 7844 7849 7853 7858 7862 7867 7872 7876 7881 7885 7890 Laser and Optics User s Manual Vol TEMPERATURE IN DEGREES FAHRENHEIT 62 0 7527 7532 7536 7541 7545 7550 7555 7775 7780 7784 7789 7793 7798 7802 7807 7812 7816 7821 7825 7830 7835 7839 7844 7848 7853 7858 7862 7867 7871 7876 7881 7885 17890 7894 63 0 7532 7537 7541 7546 7550 7555 7559 7564 7569 7573 7578 7582 7587 7592 7596 7601 7605 7610 7614 7619 7624 7628 7633 7637 7642 7647 7651 7656 7660 7665 7669 7674 7679 7683 7688 7692 7697 7702 7706 7711 7715 7720 7724 7
27. 71 7470 714 7473 713 7477 712 7480 711 7484 710 7487 709 7491 708 7495 707 7498 706 7502 705 7505 704 7509 703 7512 702 7516 701 7519 700 7523 699 7527 698 7530 697 7534 696 T537 695 7541 694 7544 693 7548 692 7551 691 7555 690 7558 689 7562 688 7566 687 7569 686 7573 685 7576 684 7580 683 7583 682 7587 681 7590 680 7594 679 7598 678 7601 677 7605 676 7608 675 7612 674 7615 673 7619 672 7622 671 7626 670 7629 669 7633 668 7637 667 7640 666 7644 665 7647 664 7651 663 7654 662 7658 661 7661 660 7665 659 7669 658 7672 657 7676 656 7679 655 7683 654 7686 653 7690 652 7693 651 7697 650 7701 649 7704 648 7708 647 771313 646 7715 645 7718 644 7722 643 7725 642 7729 641 7732 640 7736 Laser and Optics User s Manual Vol Table 41 22 5 7457 7460 7464 7467 7471 7474 7478 7481 7485 7488 7492 7496 7499 7503 7506 7510 7513 7517 7520 7524 7527 7531 7535 7538 7542 7545 7549 7552 7556 7559 7563 7566 7570 7574 7577 7581 7584 7588 7591 7595 7598 7602 7605 7609 7612 7616 7620 7623 7627 7630 7634 7637 7641 7644 7648 7651 7655 7659 7662 7666 7669 7673 7676 7680 7683 7687 7690 7694 7698 7701 7705 7708 7712 7715 7719 7722 7726 7729 7733 7737 7740 Wavelength of Light Compensation Metric High Alt Mid Temp High Humidity u Temp 22 to 30 C Press 640 to 720 mm 80 Humidity 23 5 7466 7469 7473 7476 7480 7483
28. 7206 786 7129 7134 7139 7145 7150 7155 7160 7165 7170 7175 7180 7185 7190 7195 7200 7205 7209 785 7133 7138 7143 7148 7153 7158 7163 7168 7173 7178 7183 7188 7193 7198 7203 7208 7213 784 7137 7142 7147 7152 7157 7162 7167 7172 7177 7182 7187 7192 7197 7202 7207 7212 7217 783 7140 7145 7150 7155 7161 7166 7171 7176 7181 7186 7191 7196 7200 7205 7210 7225 7220 782 7144 7149 7154 7159 7164 7169 7174 7179 7184 7189 27194 7199 7204 7209 7214 7219 7224 781 7148 7153 7158 7163 7168 7173 7178 7183 7188 7193 7198 7203 7208 7213 7217 7222 7221 780 7151 27156 7162 7166 7171 7176 7181 7186 7191 7196 7201 7206 7211 7216 7221 7226 7231 779 7155 7160 7165 7170 7175 7180 7185 7190 7195 7200 7205 7210 7215 7220 7225 7229 7234 778 7159 7164 7169 7174 7179 7184 7189 7194 7199 7204 7209 7213 7218 7223 7228 7233 7238 777 7162 7167 7172 7177 7182 7187 7192 7197 7202 7207 7212 7217 7222 7227 7232 7237 7241 776 7166 7171 7176 7181 7186 7191 7196 7201 7206 7211 7216 7221 7226 7230 7235 7240 7245 775 7170 7175 7180 7185 7190 7195 7200 7205 7209 7214 7219 7224 7229 7234 7239 7244 7249 774 7173 7178 7183 7188 7193 7198 7203 7208 7213 7218 7223 7228 7233 7238 7242 7247 7252 773 7177 7182 7187 7192 7197 7202 7207 7212 7217 7222 7226 7231 7236 7241 7246 7251 7256 772 7180 7186 7191 7196 7200 7205 7210 7215 7220 7225 7230 7235 7240 7245 7250 7254 7259 771 7184 7189 7194 7199 7204 7209 7214 7219 7224 7229 7234 7239 7243 7248 27253 7258 7263 770 7188 7193 7198 7203 7208 7213 7218 7223 7227
29. 7332 7336 7341 7345 7350 7355 7359 7364 7368 7373 7378 7382 7387 7391 7396 7401 7405 7410 7414 7419 7424 7428 7433 7437 7442 7447 7451 7456 7460 7465 7469 7474 7479 7483 7488 7492 7497 7502 7506 7511 7515 7520 7525 63 0 7163 7167 7172 7177 7181 7186 7190 7195 7199 7204 7209 7213 7218 7222 7227 7232 7236 7241 7245 7250 7254 7259 7264 7268 7273 7277 7282 7287 7291 7296 7300 7305 7309 7314 7319 7323 7328 7332 7337 7342 7346 7351 7355 7360 7364 7369 7374 7378 7383 7387 7392 7397 7401 7406 7410 7415 7419 7424 7429 7433 7438 7442 7447 7452 7456 7461 7465 7470 7474 7479 7484 7488 7493 7497 7502 7507 7511 7516 7520 7525 7529 64 0 7168 72113 7178 7182 7187 7191 7196 7200 7205 7210 7214 7219 7223 7228 7232 7237 7242 7246 7251 7255 7260 7264 7269 7274 7278 7283 7287 7292 7296 7301 7306 7310 7315 7319 7324 7328 7333 7338 7342 7347 7351 7356 7361 7365 7370 7374 7379 7383 7388 7393 7397 7402 7406 7411 7415 7420 7425 7429 7434 7438 7443 7447 7452 7457 7461 7466 7470 7475 7479 7484 7489 7493 7498 7502 7507 7511 7516 7521 7525 7530 7534 65 0 7174 7179 7183 7188 7192 7197 7201 7206 7210 7215 7220 7224 7229 7233 7238 7242 7247 7252 7256 7261 7265 7270 7274 7279 7284 7288 7293 7297 7302 7306 7311 7315 7320 7325 7329 7334 7338 7343 73471 73
30. 7370 7375 7379 7383 7388 7392 7397 7401 7405 7410 7414 7418 7423 7427 7431 7436 7440 7444 7449 7453 7457 7462 7466 7470 7475 7479 7483 7488 7492 7497 7501 7505 7510 7514 7518 7523 7527 7531 7536 7549 7553 7579 7584 7592 7597 7601 7605 7610 7614 7618 7623 7627 7631 7636 7640 7644 7649 7653 7657 7662 92 0 7319 7323 7328 7332 7336 7341 7345 7350 7354 7358 7363 7367 7371 7376 7380 7384 7389 7393 7397 7402 7406 7410 7415 7419 7423 7428 7432 7436 7441 7445 7449 7454 7458 7462 7467 7471 7475 7480 7484 7488 7493 7497 7501 7506 7510 7514 7519 7523 7527 7532 7536 7541 7545 7549 7554 7558 7562 7567 7571 7575 7580 7584 7588 7593 7597 7601 7606 7610 7614 7619 7623 7627 7632 7636 7640 7645 7649 7653 7658 7662 7666 Wavelength of Light Compensation i igh Mi d Humidity Table 55 English Low Alt High Mid Temp Me m Temp 91 to 107 F Press 27 to 31 inches 50 Humidity n m o TEMPERATURE IN DEGREES FAHRENHEIT 93 0 7324 7329 7333 7337 7342 7346 7350 7355 7359 7363 7368 7372 7376 7381 7385 7389 7394 7398 7402 7407 7411 7415 7420 7424 7428 7433 7437 7441 7446 7450 7454 7459 7463 7467 7472 7476 7480 7485 7489 7493 7498 7502 7506 7511 7515 7519 7524 7528 7532 7537 7541 7545 7550 7554 7558 7563 7567 7571 7576 7580 7584 7589 7893 7597 7602 7606 7610 76
31. 7404 7409 7413 7418 7423 7427 7432 7436 7441 7445 7450 7455 7459 7464 7468 7473 7477 7482 7487 7491 7496 7500 7505 7509 7514 7519 7523 7528 7532 7537 65 0 7177 7181 7186 7190 7195 7199 7204 7209 7213 7218 7222 7227 7231 7236 7240 7245 7250 7254 7259 7263 7268 7272 7277 7282 7286 7291 7295 7300 7304 7309 7314 7318 7323 7327 7332 7336 7341 7346 7350 7355 7359 7364 7368 7373 7377 7382 7387 7391 7396 7400 7405 7409 7414 7419 7423 7428 7432 7437 7441 7446 7451 7455 7460 7464 7469 7473 7478 7482 7487 7492 7496 7501 7505 7510 7514 7519 7524 7528 7533 7537 7542 66 0 7182 7187 7191 7196 7200 7205 7210 7214 7219 7223 7228 7232 7237 7241 7246 7251 7255 7260 7264 7269 7273 7278 7282 7287 7292 7296 7301 7305 7310 7314 7319 7323 7328 7333 7337 7342 7346 7351 7355 7360 7364 7369 7374 7378 7383 7387 7392 7396 7401 7406 7410 7415 7419 7424 7428 7433 7437 7442 7447 7451 7456 7460 7465 7469 7474 7478 7483 7488 7492 7497 7501 7506 7510 7515 7519 7524 7529 7533 7538 7542 7547 67 0 7188 7192 7197 7201 7206 7211 7215 7220 7224 7229 7233 7506 7511 7538 7543 7547 7552 68 0 7193 7198 7203 7207 7212 7216 7221 7225 7230 7234 7239 7243 7248 7252 7257 7262 7266 7271 7275 7280 7284 7289 7293 7298 7302 7307 7311 7316 7321 7328 7330 7334 7339 73
32. 7471 7475 7479 7483 7487 7492 7496 7500 7504 7509 7513 7517 7521 7525 7530 7534 7538 7542 7547 7551 7555 7559 7563 7568 7572 7576 7580 7585 7589 7593 7597 7601 7606 7610 7614 7618 7623 7621 7631 7635 7640 7644 7648 7652 7656 7661 7665 7669 7673 7678 7682 7686 7690 7694 7699 7703 7707 7714 7716 7720 7724 7728 7732 7737 7741 7745 273 13 Wavelength of Light Compensation Table 64 English High Alt Low Temp High Humidity Temp 40 to 56 F Press 23 to 27 inches 80 Humidity Eee TEMPERATURE IN DEGREES FAHRENHEIT 40 0 41 0 42 0 43 0 44 0 45 0 46 0 47 0 48 0 49 0 50 0 51 0 52 0 53 0 54 0 55 0 56 0 27 00 7414 7419 7425 7430 7435 7440 7446 745 1 7456 7461 7466 7471 7477 7482 7487 7492 7497 26 95 7419 7424 7429 7435 7440 7445 7450 7456 27461 7466 7471 7476 7481 7486 7491 7496 7502 26 90 7424 7429 7434 7439 7445 7450 7455 7460 7465 7471 7476 7481 7486 7491 7496 7501 7506 26 85 7428 7434 7439 7444 7449 7455 7460 7465 7470 7475 7480 7486 7491 7496 7501 7506 7511 26 80 7433 7439 7444 7449 7454 7459 7465 7470 7475 7480 7485 7490 7495 7500 7505 7510 7515 26 75 7438 7443 7449 7454 27459 7464 7469 7474 7480 7485 7490 7495 7500 7505 7510 7515 7520 26 70 7443 7448 7453 7459 7464 7469 7474 7479 7484 7489 7495 7500 7505 7510 7515 7520 7525 26 65 7448 7453 7458 7463 7468 7474 7479 7484 7489 7494 7499 7504 7509 7514 7519 7524 7529 26 60 7452 7458 7463 7468 7473 7478 7484 7489 7494 7499 7504 7509 7
33. 7487 7490 7494 7497 7501 7505 7508 7512 7515 7519 7522 7526 7529 7533 7536 7540 7543 7547 7550 7554 7558 7561 7565 7568 7572 7575 7579 7582 7586 7589 7593 7596 7600 7603 7607 7611 7614 7618 7621 7625 7628 7632 7635 7639 7642 7646 7649 7653 7656 7660 7664 7667 7671 7674 7678 7681 7685 7688 7692 7695 7699 7702 7706 7709 7713 7717 7720 71724 7727 7731 7734 7738 7741 7745 7748 7671 7675 7678 7682 7685 7689 7692 7696 7699 7703 7107 7710 7714 7717 7721 7724 7728 7731 7135 7738 7742 7745 7749 7752 TEMPERATURE IN DEGREES CELSIUS 24 5 7475 7478 7482 7485 7489 7492 7496 7499 7503 7506 7510 7514 7517 7521 7524 7528 7531 7535 7538 7542 7545 7549 7552 7556 7559 7563 7566 7570 7573 7577 7580 7584 7587 7591 7594 7598 7602 7605 7609 7672 7675 7679 7683 7686 7690 7693 7697 7700 7704 7707 7711 7714 7718 7721 7725 7728 7732 7735 7739 7742 7746 7749 7753 7756 25 0 7479 7483 7486 7490 7493 7497 7500 7504 7507 7511 7514 7518 7522 7525 7529 7532 7536 7539 7543 7546 7550 7553 7557 7560 7564 7567 7571 7574 7578 7581 7585 7588 7592 7595 7599 7602 7606 7609 7613 7616 7620 7623 7627 7630 7634 7638 7641 7645 7648 7652 7655 7659 7662 7666 7669 7673 7676 7680 7683 7687 7690 7694 7697 7701 7704 71708 7711 7715 7718 7722 7725 7729 7732 7736 7739 7743 7146
34. 7506 7509 7513 7517 7520 7524 7528 7531 7535 7539 7543 7546 7550 7554 7557 7561 7565 7568 7572 7576 7579 7383 7587 7590 7594 7598 7602 7605 7609 7613 7616 7620 7624 7627 7631 7635 7638 7642 11 5 7352 7355 7359 7363 7366 7370 7374 7378 7381 7385 7389 7392 7396 7400 7403 7407 7411 7414 7418 7422 7425 7429 7433 7436 7440 7444 7448 7451 7455 7459 7462 7466 7470 7473 7477 7481 7484 7488 7492 7495 7499 7503 7506 7510 7514 7517 7521 7525 7529 7532 7536 7540 7543 7547 7551 7554 7558 7562 7565 7569 7513 7576 7580 7584 7587 7591 7595 7599 7602 7606 7610 7613 7617 7621 7624 7628 7632 7635 7639 7643 7646 12 0 7357 7360 7364 7368 7371 7375 7379 7382 7386 7390 7393 7397 7401 7404 7408 7412 7415 7419 7423 7426 7430 7434 7437 7441 7445 7448 7452 7456 7459 7463 7467 7470 7474 7478 7482 7485 7489 7493 7496 7500 7504 7507 7511 7515 7518 7522 7526 7529 7533 7537 7540 7544 7548 7551 7555 7559 7562 7566 7570 7573 7577 7581 7584 7588 7592 7595 7599 7603 7606 7610 7614 7618 7621 7625 7629 17632 7636 7640 7643 7647 7651 12 5 7361 7365 7369 7372 7376 7380 7383 7387 7391 7394 7398 7402 7405 7409 7413 7416 7420 7424 7427 7431 7435 7438 7442 7446 7449 7453 7457 7460 7464 7468 7471 7475 7479 7482 7486 7490 7493 7497 7501 7504 7508 7512 7915 7519 152
35. 7688 7691 7695 7699 7702 7706 7709 7713 7716 7720 7723 7727 7730 7734 7737 23 5 7459 7462 7466 7469 7473 7476 7480 7483 7487 7490 7494 7498 7501 7505 7508 7512 7515 7519 7522 7526 7529 7533 7536 7540 7543 7547 7551 7554 7558 7561 7565 7568 7572 7575 7579 7582 7586 7589 7593 7596 7600 7604 7607 7611 7614 7618 7621 7625 7628 7632 7635 7639 7642 7646 7649 7653 7657 7660 7664 7667 7671 7674 7678 7681 7685 7688 7692 7695 7699 7702 7706 7710 7713 7717 7720 7724 77217 7731 7734 7738 7741 Laser and Optics User s Manual Vol 24 0 7463 7467 7470 74714 7477 7481 7484 7488 7491 7495 7498 7502 7505 7509 7512 7516 7519 7523 7527 7530 7534 7537 7541 7544 7548 7551 7555 7558 7562 7565 7569 7572 7576 7579 7583 7586 7590 7594 7597 7601 7604 7608 7611 7615 7618 7622 7625 7629 7632 7636 7639 7643 7646 7650 7653 7657 7661 7664 7668 7671 7675 7678 7682 7685 7689 7692 7696 7699 7703 7706 7710 7713 7717 7721 7724 7728 7731 7735 7738 7742 7745 24 5 7467 7471 7474 7478 7481 7485 7489 7492 7496 7499 7503 7506 7510 7513 7517 7520 7524 7527 7531 7534 7538 7541 7545 7548 7552 7555 7559 7562 7566 7569 7573 7577 7580 7584 7587 7591 7594 7598 7601 7605 7608 7612 7615 7619 7622 7626 7629 7633 7636 7640 7643 7647 7650 7654 7658 7661 7665 7668 7672 7675 76
36. 774 773 772 771 770 769 768 767 766 765 764 763 762 761 760 759 758 757 756 755 754 753 752 751 750 749 748 747 746 745 744 743 742 741 740 739 738 737 736 735 734 733 732 731i 730 729 728 727 726 725 724 723 722 721 720 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY Laser and Optics User s Manual Vol 5 0 6986 6990 6994 6997 7001 7005 7009 7012 7016 7020 7024 7027 7031 7035 7039 7043 7046 7050 7054 7058 7061 7065 7069 7073 7076 7080 7084 7088 7092 7095 7099 7103 7107 7110 7114 7118 7122 7125 7129 7133 7137 7141 7144 7148 7152 7156 7159 7163 7167 7171 7174 7178 7182 7186 7190 7193 7197 7201 7205 7208 7212 7216 7220 7223 7227 7231 7235 7239 7242 7246 7250 7254 7257 7261 7265 7269 7272 7276 7280 7284 7288 Table 19 Metric Low Alt Low Temp Low Humidity 5 5 6991 6995 6999 7003 7006 7010 7014 7018 7022 7025 7029 7033 7037 7040 7044 7048 7052 7055 7059 7063 7067 7070 7074 7078 7082 7085 7089 7093 7097 7101 7104 7108 7112 7116 7119 7123 7127 7131 7134 7138 7142 7146 7149 7153 7157 7161 7165 7168 7172 7176 7180 7183 7187 7191 7195 7198 7202 7206 7210 7213 7217 7221 7225 7228 7232 7236 7240 7244 7247 7251 7255 7259 7262 7266 7270 7214 7277 7281 7285 71289 7292 Wavelength of Light Compensation Temp 5 to 13 C Press 720 to 800 mm 20 Hu
37. 7750 7154 7757 7762 25 5 7484 7487 7491 7494 7498 7501 7505 7508 7512 7515 7519 7522 7526 7529 7533 7537 7540 7544 7547 7551 7554 7558 7561 7565 7568 7572 7575 7579 7582 7586 7589 7593 7596 7600 7603 7607 7610 7614 7617 7621 7624 7628 7631 7635 7638 7642 7645 7649 7652 7656 26 0 7488 7492 7495 7499 7502 7506 7509 7513 7516 7520 7523 7527 7530 7534 7537 7541 7544 7548 7551 7555 7558 7562 7565 7569 7572 7576 7579 7583 7586 7590 7594 7597 7601 7604 7608 7611 7615 7618 7622 7625 7629 7632 7636 7639 7643 7646 7650 7653 26 5 7493 7496 7500 7503 7507 7510 7514 7517 7521 7524 7528 7531 7535 7538 7542 7545 7549 7552 7556 7559 7563 7566 7570 7573 7571 7580 7584 7587 7591 7594 7598 7601 7605 7608 7612 7615 7619 7622 7626 7629 7633 7636 7640 7643 7647 7650 7654 7657 7661 7664 7668 7671 7675 7678 7682 7685 7689 7692 7696 7699 7703 7706 7710 7713 7717 7720 7724 7727 7731 7734 7738 7741 7745 7748 7752 7755 7759 7762 7766 7769 7773 27 0 7497 7501 7504 7508 7511 7515 7518 7522 7525 7529 7532 7536 7539 7543 7546 7550 7553 7557 7560 7564 7567 7571 7574 7578 7581 7585 7588 7592 7595 7599 7602 7606 7609 7613 7616 7620 7623 7627 7630 7634 7637 7641 7644 7648 7651 7655 7658 7662 7665 7669 7672 7676 7679 7683 7686 7690 7693 7696 7700 7703
38. 7875 7879 7884 7889 7893 7898 7902 7907 7911 67 0 7552 7556 7561 7565 7570 7574 7579 7584 7588 7593 7597 7602 7606 7611 7615 7620 7624 7629 7634 7638 7643 7647 7652 7656 7661 7665 7670 7675 7679 7684 7688 7693 7697 7702 7706 7711 7715 7720 7725 7129 7734 7738 7743 7747 7752 7756 7761 7765 7770 7775 7779 7784 7788 7793 7797 7802 7806 7811 7815 7820 7825 7829 7834 7838 7843 7847 7852 7856 7861 7866 7870 7875 7879 7884 7888 7893 7897 7902 7906 7911 7916 68 0 7557 7561 7566 7570 73575 7579 7584 7588 7593 7597 7602 7607 7611 7616 7620 7625 7629 7634 7638 7643 7647 7652 7656 7661 7666 7670 7675 7679 7684 7688 7693 7697 7702 7706 7711 7716 7720 7725 7729 7734 7738 7743 7747 7752 7756 7761 7765 7770 7775 7779 7784 7788 7793 7797 7802 7806 7812 7815 7820 7824 7829 7834 7838 7843 7847 7852 7856 7861 7865 7870 7874 7879 7883 7888 7893 7897 7902 7906 TALL 7915 7920 69 0 7562 7566 7571 7575 7580 7584 7589 7593 7598 7602 7607 7611 761 7620 7625 7629 7634 7639 7643 7648 7652 7657 7661 7666 7670 7675 7679 7684 7688 7693 7697 7702 7707 7711 7716 7720 7725 7729 7734 7738 7743 7747 7752 7756 7761 7765 7770 7774 7719 7784 7788 7793 7797 7802 7806 7811 7815 7820 7824 7829 7833 7838 7842 7847 7852 7856 7861 7865 7870 7874 7879 7883 7888 789
39. 7879 7883 7887 7891 7896 7900 7904 7909 7913 7917 7947 7951 100 0 7703 7707 7712 7716 7720 7724 7729 7733 7737 7742 7746 7750 7754 7759 7763 7767 7772 7776 7780 7784 7789 7793 7797 7801 7806 7810 7814 7819 7823 7827 7831 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874 7878 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 7926 7930 7934 7938 7943 7947 7951 7955 7960 7964 7968 7973 7977 7981 7985 7990 7994 7998 8003 8007 8011 8015 8020 8024 8028 8033 8037 8041 8045 101 0 7708 7712 7716 7720 7725 7729 7733 7738 7742 7746 7750 7755 7759 7763 7767 7772 7776 7180 7785 7789 7193 7797 7802 7806 7810 7814 7819 7823 7827 7831 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874 7878 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 7925 7930 7934 7938 7943 7947 7951 7955 7960 7964 7968 7972 7977 7981 7985 7990 7994 7998 8002 8007 8011 8015 8019 8024 8028 8032 8036 8041 8045 8049 102 0 103 0 104 0 7712 7716 7721 7725 7729 7734 7138 7742 7746 7751 7755 7759 7763 7768 7772 7716 7780 7785 7789 7793 7797 7802 7806 7810 7815 7819 7823 7827 7832 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874 7878 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 7925 7930 7934 7938 7942 7947 7951 7955 7959 7964 7968 7972 7977 7981 7985 7989 7994 7998
40. 84 Adjustable mounts Agilent 10710B and Agilent 10711A Adjustable Mounts provide a convenient means of mounting aligning and securely locking in position the optical components of the laser position transducer see Figure 21 Since both mounts allow some tilt and yaw adjustment the need for custom fixturing is minimized These mounts allow the optic being adjusted to be rotated about its optical centerline simplifying installation Agilent 10710B Agilent 10711A Adjustable Mount Adjustable Mount Figure 21 Agilent 10710B and Agilent 10711A adjustable mounts Both mounts are made of 416 stainless steel Its magnetic properties can be helpful at the design stage if magnetic clamps are used However in final installation secure the mount with the screws provided The Agilent 10719A Agilent 10721A Agilent 10735A and Agilent 10736A interferometers do not use adjustable mounts See Table 3 in Chapter 5 or Table 80 in Volume II of this manual for a list of optics that can be used with these mounts Typical mounting of optics which use adjustable mounts 1 Figure 22 shows how to mount the beam splitting and beam bending optics or the single beam interferometer in the horizontal plane using the Agilent 10710B Adjustable Mount 2 Figure 23 shows how to mount the beam splitting and beam bending optics or the single beam interferometer in the vertical plane using the Agilent 10710B Adjustable Mount Laser and Optics User s Ma
41. Abb error occurs when the measuring point of interest is displaced from the actual measuring scale location and unwanted angular motion occurs in the positioning system Abb error makes the indicated position either shorter or longer than the actual position depending on the angular offset AC interferometer A two frequency interferometer Accuracy The maximum deviation of a measurement from a known standard or true value Air deadpath The most frequently encountered form of interferometer deadpath is the difference in air path lengths between the reference and measurement arms when the stage is at its zero or home position Axis electronics The modular electronics needed to run one axis of measurement Beam splitter A device to separate and direct light beams sending the beams straight through reflecting them at a right angle or both CMM A precision coordinate measuring machine Compensation Wavelength of Light Correction for the small changes in the wavelength of light due to changes in the refractive index of air Cosine error An error between the measured distance and the actual distance traveled The error results from misalignment of the measurement axis the laser beam to the mechanical axis of motion This error is called cosine error because its magnitude is proportional to the cosine of the angle of misalignment Cube corner Also called a retroreflector A mirror assembly tha
42. Agilent further certifies that its calibration measurements are traceable to the United States National Institute of Standards and Technology formerly National Bureau of Standards to the extent allowed by the Institute s calibration facility and to the calibration facilities of other International Standards Organization members Warranty Agilent warrants Agilent hardware accessories and supplies against defects in materials and workmanship for a period specified by each product from date of shipment If Agilent receives notice of such defects during the warranty period Agilent will at its option either repair or replace products which prove to be defective Replacement products may be either new or like new Agilent warrants that Agilent software will not fail to execute its programming instructions for the period specified above due to defects in material and workmanship when properly installed and used If Agilent receives notice of such defects during the warranty period Agilent will replace software media which does not execute its programming instructions due to such defects For detailed warranty information see back matter Agilent Technologies Inc Santa Clara Site 5301 Stevens Creek Boulevard Safety Considerations General This product and related documentation must be reviewed for familiarization with this safety markings and instructions before operation This product is a safety
43. BAROMETRIC PRESSURE IN INCHES OF MERCURY 57 0 27 00 7498 26 95 7503 26 90 7507 26 85 7512 26 80 27516 26 75 7521 26 70 7526 26 65 7530 26 60 7535 26 55 7540 26 50 7544 26 45 7549 26 40 7554 26 35 7558 26 30 7563 26 25 7567 26 20 7572 26 15 7577 26 10 7581 26 05 7586 26 00 7591 25 95 7595 25 90 7600 25 85 7605 25 80 7609 25 75 7614 25 70 7618 25 65 7623 25 60 7628 25 55 7632 25 50 7637 25 45 7642 25 40 7646 25 35 7651 25 30 7656 25 25 7660 25 20 7665 25 15 7669 25 10 7674 25 05 7679 25 00 7683 24 95 7688 24 90 7693 24 85 7697 24 80 7702 24 75 7707 24 70 7711 24 65 7716 24 60 7720 24 55 7725 24 50 7730 24 45 7734 24 40 7739 24 35 7744 24 30 7748 24 25 7753 24 20 7758 24 15 7762 24 10 7767 24 05 7771 24 00 7776 23 95 7781 23 90 7785 23 85 7790 23 80 7795 23 75 7799 23 70 7804 23 65 7809 23 60 7813 23 55 7818 23 50 7822 23 45 7827 23 40 7832 23 35 7836 23 30 7841 23 25 7846 23 20 7850 23 15 7855 23 10 7860 23 05 7864 23 00 7869 Wavelength of Light Compensation i i Mi Humidity Table 49 English High Alt Low Mid Temp Low y Temp 57 to 73 F Press 23 to 27 inches 20 Humidity eee 58 0 7503 7507 7512 7517 7521 7526 7531 7535 7540 7544 7549 7554 7558 7563 7568 7572 7571 7581 7586 7591 7595 7600 7605 7609 7614 7618 7623 7628 7632 7637 7642 7646 7651 7655 7660 7665 7669 7674 7679 7683 7688 7693 7697 7702 7706 7711 7716 7720 772
44. Laser and Optics User s Manual Vol C START Is red laser beam visible either continous or flashing Is laser beam flashing Indicates a problem with the internal circuitry of the laser head See the board trouble isolation flowchart on the next page After warmup the laser head READY LED remains on Is laser power output low Replace laser tube and highvoltage power supply Is LASER ON LED lit Is front turret in the correct posiition Troubleshooting Check input power atthe laser head cable connector Pins G H S GND Pins K M T 15V 0 3V Voltages ok Problem is not in the laser head Check the following 1 Laser head cable 2 Laser head power supply 10884 or other See note 3 Measurement electronics Reposition power supply 5507 only turret Indicates a problem with the internal circuitry of the laser head See the board trouble isolation flowchart on the next page Indicates a problem with the internal circuitry of the laser head See the board trouble isolation flowchart on the next page Is Ref Signal present at measurement electronics Is Split Freq within range YES v Indicates a problem with the internal circuitry of the laser head See the boar
45. Laser and Optics User s Manual Vol 101 4 System Installation and Alignment Overlapping dot alignment procedure for Agilent 10702A Agilent 10766A Agilent 10705A This subsection describes the overlapping dots alignment method used on a two axis configuration Figure 34 is a typical measurement configuration which includes a linear interferometer and a single beam interferometer Steps 1 through 10 constitute the X axis Overlapping Dot alignment procedure 1 Place the interferometer alignment target on the laser side of the X axis interferometer and place the receiver alignment target on the receiver so that it is not in the laser beam see Figure 34 position 1 Place a piece of opaque material such as frosted tape between the interferometer and retroreflector 2 With the retroreflector and interferometer at the closest point adjust the laser head until the laser beam 1 passes through the 50 Beam Splitter 2 enters one hole of the alignment target on the interferometer and 3 exits the other hole to hit the receiver alignment target centered on the hole over the photodetector A slight lateral adjustment of the interferometer or laser head may be required 3 Remove the opaque material from between the retroreflector and interferometer and rotate the receiver alignment target to position 2 see Figure 34 4 Adjust the retroreflector to center the return measurement beam on the receiver alignment target 5 Move the ret
46. Table 28 Metric Low Alt Low Mid Temp Med Humidity Temp 13 5 to 21 5 C Press 720 to 800 mm 50 Humidity TEMPERATURE IN DEGREES CELSIUS 13 5 14 0 14 5 15 0 15 5 16 0 16 5 17 0 17 5 18 0 18 5 19 0 19 5 20 0 20 5 21 0 21 5 800 7078 7083 7088 7094 7099 7104 7109 7114 7119 7124 7129 7135 7140 7145 7150 7155 7160 799 7082 7087 7092 7097 7102 7108 7113 7118 7123 7128 7133 7138 7143 7148 7153 7158 7163 798 7085 7091 7096 7101 7106 7111 7116 7121 7127 7132 7137 7142 7147 7152 7157 7162 7167 797 7089 7094 7099 7105 7110 7115 7120 7125 7130 7135 7140 7145 7150 7155 7160 7165 7170 796 7093 7098 7103 7108 7113 7118 7124 7129 7134 7139 7144 7149 7154 7159 7164 7169 7174 795 7096 7102 7107 7112 7117 7122 7127 7132 7137 7142 7147 7152 7157 7162 7167 7172 7177 794 7100 7105 7110 7115 7121 7126 7131 7136 7141 7146 7151 7156 7161 7166 7171 7176 7181 793 7104 7109 7114 7119 7124 7129 7134 7139 7145 7150 7155 7160 7165 7170 7175 7180 7185 792 7107 7112 7118 7123 7128 7133 7138 7143 7148 7153 7158 7163 7168 7173 7178 7183 7188 791 7111 7116 7121 7126 7131 7137 7142 7147 7152 7157 7162 7167 7172 7177 7182 7187 7192 790 7115 7120 7125 7130 7138 7140 7145 7150 7155 7160 7165 7170 7175 7180 7185 7190 7195 789 7118 7123 7129 7134 7139 7144 7149 7154 7159 7164 7169 7174 7179 7184 7189 7194 7199 788 7122 7127 7132 7137 7142 7147 7153 7158 7163 7168 7173 7178 7183 7188 7192 719 7202 787 7126 7131 7136 7141 7146 7151 7156 7161 7166 7171 7176 7181 7186 7191 7196 720
47. Temp 22 to 30 C Press 720 to 800 mm 80 Humidity 247 Table 38 Metric Low Alt High Mid Temp High Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 80 Humidity 248 Table 39 Metric High Alt Low Temp High Humidity Temp 5 to 13 C Press 640 to 720 mm 80 Humidity 249 Table 40 Metric High Alt Low Mid Temp High Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 80 Humidity 250 Table 41 Metric High Alt Mid Temp High Humidity Temp 22 to 30 C Press 640 to 720 mm 80 Humidity 251 Table 42 Metric High Alt High Mid Temp High Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 80 Humidity 252 Table 43 English Wide Range Temp 40 to 120 F Press 20 to 31 inches 50 Humidity 253 Table 44 English Low Alt Low Temp Low Humidity Temp 40 to 56 F Press 27 to 31 inches 20 Humidity 254 Table 45 English Low Alt Low Mid Temp Low Humidity Temp 57 to 73 F Press 27 to 31 inches 20 Humidity 255 Table 46 English Low Alt Mid Temp Low Humidity Temp 74 to 90 F Press 27 to 31 inches 20 Humidity 256 Table 47 English Low Alt High Mid Temp Low Humidity Temp 91 to 107 F Press 27 to 31 inches 20 Humidity 257 Table 48 English High Alt Low Temp Low Humidity Temp 40 to 56 F Press 23 to 27 inches 20 Humidity 258 Table 49 English High Alt Low Mid Temp Low Humidity Temp 57 to 73 F Press 23 to 27 inches 20
48. Wavelength of Light Compensation Table 20 Metric Low Alt Low Mid Temp Low Humidity Temp 13 5 to 21 5 C Press 720 to 800 mm 20 Humidity TEMPERATURE IN DEGREES CELSIUS 13 8 14 0 14 5 15 0 15 5 16 0 16 5 17 0 17 5 18 0 18 5 19 0 19 5 20 0 20 5 21 0 21 5 800 7076 7081 7086 7091 7097 7102 7107 7112 7117 7122 7127 7132 7137 7142 7147 7152 7157 799 7080 7085 7090 7095 7100 7105 7110 7115 7120 7125 7130 7135 7140 7145 7150 7155 7160 798 7083 7089 7094 7099 7104 7109 7114 7119 7124 7129 7134 7139 7144 7149 7154 7159 7164 797 7087 7092 7097 7102 710 7113 7118 7123 7128 7133 7138 7143 7148 7152 7157 7162 7167 796 7091 7096 7101 7106 7111 7116 7121 7126 7131 7136 7141 7146 7151 7156 7161 7166 7171 795 7094 7100 7105 7110 7115 7120 7125 7130 7135 7140 7145 7150 7155 7160 7165 7169 7174 794 7098 7103 7108 7113 7118 7123 7128 7133 7138 7143 7148 7153 7158 7163 7168 7173 7178 793 7102 7107 7112 7117 7122 7127 7132 7137 7142 7147 7152 7157 7162 7167 7172 7177 7181 792 7105 7110 7116 7121 7126 7131 7136 7141 7146 7151 7156 7161 7165 7170 7175 7180 7185 791 7109 7114 27119 27124 7129 7134 27139 7144 7149 7154 7159 7164 7169 7174 71179 7184 7189 790 7113 7118 7123 7128 7133 7138 7143 7148 7153 7158 7163 7168 7173 7177 27182 7187 7192 789 7116 7121 27126 7132 7137 7142 7147 7152 7156 7161 7166 7171 7176 7181 7186 7191 7196 788 7120 7125 7130 7135 7140 7145 7150 7155 7160 7165 7170 7175 7180 7185 7190 7194 7199 787 7124 7129 7134 7139 7144 7149 7154 71
49. a Vi fA fg fA To Receiver lt A SSSSSSSSSSSSN N LEGEND A fA uu um gt fp lt fA and fg f r Rounded corners are used to help you trace paths Figure 49 Conventional plane mirror interferometer with unequal path lengths that result in optics thermal drift When a change in temperature occurs the physical size of the optical elements changes as does their index of refraction Both changes contribute to an apparent change in distance This type of interferometer has a typical thermal drift value of 0 5 micron per degree C This measurement error is a fixed value and is only a function of the change in interferometer temperature not the distance measured Optics thermal drift can be reduced by either controlling the temperature of the measurement environment or by using interferometers that are insensitive to temperature changes To reduce the temperature sensitivity of an interferometer the beam components need to travel through the same type and amount of glass Laser and Optics User s Manual Vol 177 12 Accuracy and Repeatability 178 Several interferometers available for Agilent laser measurement systems significantly reduce the optics thermal drift error The Agilent 10715A Differential Interferometer has a thermal drift on the order of fractions of a nanometer per oC The Agilent 10706B High Stability Plane Mirror Interferometer has a thermal drift optics that of a conventional plane
50. using the Metric formula for finding N and showing all our work 0 0133T 0 266000000 1 0 817 amp 1 0 551000000 2 P x 10 x 2 0 000418760 3 1 3 1 000418760 4 Save 0 0036610T 0 073220000 5 1 5 1 073220000 6 4 6 0 0932165591 7 0 3836391 x P x 7 271 7875292 8 Save e0 057627T 3 66224916 9 H x 9 158 3112458 10 3 033 x 10 x 10 0 480158009 11 Save 8 11 271 3963612 12 12 10 1000271 307 13 as 0 999728766 14 For comparison the answer we were looking for in this example just happens to be 0 9997288 Laser and Optics User s Manual Vol Wavelength of Light Compensation 13 Wavelength of Light WOL Compensation Tables This chapter contains tables of WOL compensation values for a variety of operating conditions The tables are divided into two groups the Metric group Tables 18 through 42 and the English group Tables 43 through 67 Each group of tables Metric or English is organized as follows Table 18 and Table 43 are wide range charts offering coarse compensation numbers for non precision measurements Tables 19 through 42 and Tables 44 through 67 are more detailed charts progressing from low to high altitudes and from low to high temperature and humidity To locate the appropriate table for your application read the table heading for the percent humi
51. 10884B Power Supply Agilent E1705A Fiber Optic Cable Agilent E1706A Remote Sensor Agilent E1708A Remote Dynamic Receiver Agilent E1709A Remote High Performance Receiver Agilent E1705A Fiber Optic Cable Agilent E1706A Remote Sensor Agilent E1708A Remote Dynamic Receiver Agilent E1709A Remote High Performance Receiver Continued on next page Laser and Optics User s Manual Continued Agilent E1826E F G One Axis Plane Mirror Interferometer Agilent E1827A Two Axis Vertical Beam Interferometer Agilent E1837A Three Axis Vertical Beam Interferometer Agilent E1833C 15 Bare Beam Splitter Agilent E1833E 33 Bare Beam Splitter Agilent E1833G 50 Bare Beam Splitter Agilent E1833J 67 Bare Beam Splitter Agilent E1833M 100 Bare Beam Splitter Beam Bender Agilent N1203C Precision Beam Translator Agilent N1204C Precision Horizontal Beam Bender Agilent N1207C Precision Vertical Beam Bender Agilent N1208C 33 Bare Beam Splitter Agilent N1208D 40 Bare Beam Splitter Agilent N1208E 50 Bare Beam Splitter Agilent N1208F 66 Bare Beam Splitter Agilent N1208G 60 Bare Beam Splitter Agilent N1250A B High Performance Receiver Cable Agilent N1251A B High Performance Laser Head Cable Agilent Z4399A Three Axis Interferometer Agilent Z4420B Five Axis Interferometer Certification and Warranty Certification Agilent Technologies certifies that this product met its published specification at the time of shipment from the factory
52. 15 7659 7663 7668 7673 7677 7682 7686 7691 7695 7700 7704 7709 7713 7718 7722 7727 7731 26 10 7663 7668 7672 7677 7682 7686 7691 7695 7700 7704 7709 7713 7718 7722 7727 7731 7736 26 05 7668 7672 27677 7681 7686 7691 7695 7700 7704 7709 7713 7718 7722 7727 7731 7736 7740 26 00 7672 7677 7681 7686 7690 7695 7699 7704 7709 7713 7718 7722 7726 7731 7735 7740 7744 25 95 7677 7681 7686 7690 7695 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 1149 25 90 7681 7686 7690 7695 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 7749 7753 25 85 7686 7690 7695 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 7749 7753 7757 25 80 7690 7695 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 7748 7753 7757 7762 25 75 7695 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 7748 7753 7757 7762 7766 25 70 7699 7704 7708 7713 7717 7722 7726 7731 7735 7739 7744 7748 7753 7757 7762 7766 7770 25 65 7704 7708 7713 7717 7722 7726 7731 7735 7739 7744 7748 7753 7757 7762 7766 7770 7775 25 60 7708 7713 7717 7722 7726 71731 7735 7739 7744 7748 7753 7757 7762 7766 7770 7775 1118 25 55 7713 7717 7722 7726 7731 7735 7739 7744 7748 7753 7757 7762 7766 7770 7775 7779 7784 25 50 7717 7722 7726 7731 7735 7739 7744 7748 7753 7757 1762 7766 7770 7775 7779 7784 7788 25 45 7722 7726 7731 7735 7739 7744 7748 7753 7757 7762 7766 7770 7775 7779 7784 7788 7792 25 40 7726 7731 7735 7739 7744 7748 7753 7757 7762 7766 7770 7775 7779 7784 7788 7792 7797 25 35 7731 7735 773
53. 1576 0 0003 pia A 1 850 A n Y uer IPM E A i 3xp 46 1100 THRU Ole o s wlalsle dil 26 X 40 1 024 X 1 575 PER y 7 087 0 020 MA e 188 mm 26 X 40 7 441 1 024 X 1 575 40 0 2X 5 A000 O 0 197 Piho Section A A Notes 1 Dowel Pin steel 4 004 4 012 2 Places 2 Dimensioned in Accordance with ANSI Y14 5M 1982 Figure 20 Agilent 5517C 009 Mounting Location Dimensions Laser and Optics User s Manual Vol 77 3 78 System Design Considerations Site preparation for referenced interferometers Referenced interferometers currently available from Agilent are listed in the following table For information about See chapter in Volume II Agilent 10719A One Axis Differential Interferometer Agilent 10719A C02 One Axis Differential Interferometer Agilent 10721A Two Axis Differential Interferometer Agilent 10721A C01 Two Axis Differential Interferometer Agilent 10735A Three Axis Interferometer Agilent 10736A Three Axis Interferometer Agilent 10736A Option 001 Three Axis Interferometer with Beam Bender 2 Agilent E1826E One Axis Plane Mirror Interferometer right 31 Agilent E1826F One Axis Plane Mirror Interferometer left 31 Agilent E1826G One Axis Plane Mirror Interferometer straight 31 Agilent E1827A Two Axis Vertical Beam Interferometer 32 Agilent E1837A Three Axis Vertical Beam Interferometer 33 Agilent Z4399A Three Axis Interferometer 33 Agilent Z4
54. 25 7293 7299 7304 7309 7315 7320 7326 7331 7336 7342 7347 7352 7358 7363 7368 7374 7379 28 20 7298 7303 7309 7314 7320 7325 7330 7336 7341 7347 7352 7357 7362 7368 7373 7378 7383 28 15 7303 7308 7314 7319 7324 7330 7335 734i 7346 7351 7357 7362 7367 7372 7378 7383 7388 28 10 7307 7313 7318 7324 7329 7335 7340 7345 7351 7356 7361 7367 7372 7377 7382 7387 7393 28 05 7312 7318 7323 7329 7334 7339 7345 7350 7355 7361 7366 7371 7376 7382 7387 7392 7397 28 00 7317 7322 7328 7333 7339 7344 7349 7355 7360 7365 7371 7376 7381 7386 7392 7397 7402 27 95 7322 7327 7333 7338 7343 7349 7354 7359 7365 7370 7375 7381 7386 7391 7396 7401 7407 27 90 7327 7332 7337 7343 7348 7354 7359 7364 7370 7375 7380 7385 7391 7396 7401 7406 7411 27 85 7331 7337 7342 7348 7353 7358 7364 7369 7374 7380 7385 7390 7395 7400 7406 7411 7416 27 80 7336 7342 7347 7352 7358 7363 7368 7374 7379 7384 7389 7395 7400 7405 7410 7415 7421 27 75 7341 7346 7352 7357 7362 7368 27373 7378 7384 7389 7394 7399 7405 7410 7415 7420 7425 27 70 7346 27351 7357 7362 7367 7373 7378 7383 7388 7394 7399 7404 7409 7414 7420 7425 7430 27 65 7351 7356 7361 7367 7372 7371 7383 7388 7393 7398 7404 7409 7414 7419 7424 7429 7435 27 60 7355 7361 7366 7371 7377 7382 7387 7393 7398 7403 7408 7413 7419 7424 7429 7434 7439 27 55 7360 7366 7371 7376 7382 7387 7392 7397 7403 7408 7413 7418 7423 7428 7434 7439 7444 27 50 7365 7370 7376 7381 7386 7392 7397 7402 7407 7412 7418 7423 7428 7433 7438 7443 7448 27 45 7370 7375 7380 7386
55. 4 Measurement screen 35 Solving Problems 36 3 System Design Considerations Introduction 38 Figure 5 Possible component motions 39 Accuracy Considerations 40 Determining What Equipment is Needed 40 Table2 Equipment choices 41 Electronic Components 46 Transducer Systems 46 PC Based Electronics 46 VME Compatible Electronics 46 PC Based PCI Electronics 46 Calibrator System Electronics 47 Adjustment Considerations 48 Laser beam and optics protection 48 Figure 6 Protective covers for optics and laser beam 49 Figure 7 Collapsible spiral cover for movable retroreflector 50 System Grounding 51 Laser Head 52 Orientation 52 Mounting plane tolerance 52 Figure 8 Laser position transducer mounting 52 Pointing stability 53 Thermal isolation 53 Vibration isolation 53 Magnetic shielding 53 Mounting 53 Optics 54 Plane of orientation with respect to laser head 54 Effect of optics on measurement direction sense 54 Figure 9 Direction sense fringe counts increase as optics move apart 54 Configuration effects 55 Vibration isolation for optics 55 Adjustable mounts for optics 56 Fasteners for optics 56 Vacuum applications 56 Laser and Optics User s Manual Vol Contents Differential measurements with interferometers 57 Moving interferometer instead of reflector 58 Introducing an offset into the laser beam 58 Beam Path Loss Computation 59 Considerations 59 Figure 10 Introducing an of
56. 59 mm 0 259 inch behind the measurement face Deadpath Value Distance between interferometer measurement face and cube corner face at measurement Zero position plus 6 59 mm 0 259 inch Agilent 10736A Zero deadpath condition cannot be achieved with this interferometer Because of interferometer design zero deadpath would require that measurement reflector be inside the interferometer 6 59 mm 0 259 inch behind the measurement face Distance between interferometer measurement face and cube corner face at measurement zero position plus 6 59 mm 0 259 inch Agilent 10736A 001 Zero deadpath condition cannot be achieved with this interferometer Because of interferometer design zero deadpath would require that measurement reflector be inside the interferometer For measurement axis 1 or measurement axis 3 zero deadpath would require that the measurement reflector be inside the interferometer 6 59 mm 0 259 inch behind the measurement face For the bent measurement axis measurement axis 2 zero deadpath would require that the measurement reflector be inside the interferometer 34 42 mm 1 355 inches behind the measurement face For measurement axis 1 or measurement axis 3 distance between interferometer measurement face and measurement mirror at measurement zero position plus 6 59 mm 0 259 inch behind the measurement face For the bent measurement axis measurement axis 2 distan
57. 7061 7064 7068 7072 7075 7079 7083 7086 7030 7094 7097 7101 7105 7108 7112 7116 7119 7123 7127 7130 7134 7138 7141 7145 7149 7152 7156 7160 7164 7167 7171 7175 7178 7182 7186 7189 7193 7197 7200 7204 7208 7211 7215 7219 7222 7226 7230 7233 7237 7241 7244 7248 7252 7255 7259 7263 7266 7270 7274 7277 7281 7285 7289 7292 7296 7300 7303 7307 7311 7314 7318 7322 7325 7329 7333 7336 7340 7344 7347 7351 7355 12 5 7066 7069 7073 7077 7080 7084 7088 7091 7095 7099 7102 7106 7110 7113 7117 7121 7124 7128 7132 7135 7139 7143 7147 7150 7154 7158 7161 7165 7163 7172 7176 7180 7183 7187 7191 7194 7198 7202 7205 7209 7213 7216 7220 7224 7227 7231 7235 7238 7242 7246 7249 7253 7257 7260 7264 7268 7271 7275 7279 7282 7286 7290 7293 7297 7301 7304 7308 7312 7315 7319 7323 7326 7330 7334 7337 7341 7345 7348 7352 7356 7359 13 0 7071 7075 7078 7082 7086 7089 7093 7097 7100 7104 7108 7111 7115 7119 7122 7126 7130 2133 7137 7141 7144 7148 7152 7155 7159 7163 7166 7170 7174 7177 7181 7185 7188 7192 7196 7199 7203 7207 7210 7214 7217 7221 7225 7228 7232 7236 7239 7243 7247 7250 7254 7258 7261 7265 7269 7272 7276 7280 7283 7287 7291 7294 7298 7302 7305 7309 7313 7316 7320 7324 73271 7331 7335 7338 7342 7346 7349 7353 7357 7360 7364 13 229 13
58. 7076 7080 7084 7087 7091 7095 7098 7102 7106 7109 7113 7117 7121 7124 7128 7132 7135 7139 7143 7147 7150 7154 7158 7161 7165 7169 7172 7176 7180 7184 7187 7191 7195 7198 7202 7206 7209 7213 7217 7221 7224 7228 7232 7235 7239 7243 7246 7250 7254 7258 7261 7265 7269 7272 7276 7280 7284 7287 7291 7295 7298 7302 7306 7309 7313 7317 7321 7324 7328 7332 7335 7339 10 5 7048 7052 7056 7059 7063 7067 7070 7074 7078 7081 7085 7089 7093 7096 7100 7104 7107 7111 7115 7118 7122 7126 7130 7133 7137 7141 7144 7148 7152 7155 7159 7163 7166 7170 7174 7178 7181 7185 7189 7192 7196 7200 7203 7207 7211 7215 7218 7222 7226 7229 7233 7231 7240 7244 7248 7251 7255 7259 7263 7266 7270 7274 7277 7281 7285 7288 7292 7296 7300 7303 7307 7311 7314 7318 7322 7325 7329 7333 7336 7340 7344 11 0 7054 7057 7061 7065 7068 7072 7076 7079 7083 7087 7090 7094 7098 7102 7105 7109 7113 7116 7120 7124 7127 7131 7135 7138 7142 7146 7149 7153 7157 7161 7164 7168 7172 7175 7179 7133 7186 7190 7194 7197 7201 7205 7209 7212 7216 7220 7223 7227 7231 7234 7238 7242 7245 7249 7253 7256 7260 7264 7268 7271 7275 7279 7282 7286 7290 7293 7297 7301 7304 7308 7312 7315 7319 7323 7327 7330 7334 7338 7341 7345 7349 11 57 12 0 7059 7064 7063 7068 7066 7072 7070 7075 7074 7079 707
59. 7118 7123 7129 7134 7139 7144 7149 27154 7159 7164 7170 7175 7180 7185 7190 7195 790 7117 7122 7127 7132 7137 7142 7148 27153 7158 7163 7168 7173 7178 7183 7188 7193 7198 789 7120 7125 7131 7136 7141 7146 7151 7156 7161 7167 7172 7177 7182 7187 7192 7197 7202 788 7124 7129 7134 7139 7145 7150 7155 7160 7165 7170 7175 7180 7185 7190 7195 7200 7205 787 7128 7133 7138 7143 7148 7153 7158 7164 7169 7174 27179 7184 7189 7194 7199 7204 7209 786 7131 7136 7142 7147 7152 7157 7162 7167 7172 7177 7182 7187 7192 7198 27203 7208 7213 785 7135 7140 7145 7150 7155 7161 7166 7171 7176 7181 7186 7191 7196 7201 7206 7211 7216 784 7139 7144 7149 7154 7159 7164 7169 7174 7179 7185 7190 7195 7200 7205 7210 7215 7220 783 7142 7147 7153 7158 7163 7168 7173 2178 7183 7188 7193 7198 7203 7208 7213 7218 7223 782 7146 7151 7156 7161 7166 7171 7177 7182 7187 27192 7197 7202 7207 7212 7217 7222 37221 781 7150 7155 7160 7165 7170 7175 7180 7185 7190 7195 7200 7205 7210 7215 7220 7225 7230 780 7153 7158 27163 7169 7174 7179 27184 7189 7194 7199 7204 7209 7214 7219 7224 7229 7234 779 7157 71062 7167 7172 7177 7182 7187 7192 7198 7203 7208 7213 7218 7223 7228 7232 7237 778 7161 7166 7171 7176 7181 7186 7191 7196 7201 7206 7211 7216 7221 7226 7231 7236 7241 777 7164 7169 27174 7179 7185 7190 7195 7200 7205 7210 7215 7220 7225 7230 7235 7240 7245 776 7168 7173 7178 7183 7188 7193 7198 7203 7208 7213 7218 7223 7228 7233 7238 7243 7248 775 7171 7177 7182 7187 7192 7197 7202 7207 7212 7217 7222
60. 7183 37189 7194 7200 7206 7211 7217 7223 7228 7234 7240 7245 7251 29 60 7165 7170 7176 7182 7188 7193 7199 7205 7211 7216 7222 7227 7233 7239 7244 7250 7255 29 55 7169 7175 7181 7187 7193 7198 7204 7210 7215 7221 7227 7232 7238 7243 31249 1254 7260 29 50 7174 7180 7186 7192 7197 7203 7209 7214 7220 7226 7231 7237 37242 1248 71254 7259 7265 29 45 7179 7185 7191 7196 7202 7208 37213 7219 7225 7230 7236 7242 7241 7253 7258 7264 7269 29 40 7184 7190 7195 7201 7207 7212 7218 7224 7229 7235 7241 7246 7252 7257 7263 7268 7274 29 35 7189 7194 7200 7206 7212 7217 7223 37229 7234 7240 7245 7251 7256 7262 7268 7273 7279 29 30 7193 7199 7205 7211 7216 7222 7228 27233 7239 7244 7250 7256 37261 7267 7272 7278 7283 29 25 7198 7204 7210 7215 7221 7227 7232 7238 7244 7249 7255 7260 7266 7271 7277 7282 7288 29 20 7203 7209 7214 7220 7226 7231 7237 7243 7248 7254 7259 7265 7271 7276 7282 7287 1292 29 15 7208 7214 7219 7225 7231 27236 7242 7247 7253 37259 7264 7270 7275 281 7286 7292 7297 29 10 7213 7218 7224 7230 7235 7241 7247 7252 7258 7263 7269 7274 7280 7285 7291 7296 7302 7217 7223 7229 7234 7240 7246 7251 7257 7262 7268 7274 7279 7285 7290 7296 7301 7306 29 00 7222 7228 7234 7239 7245 7250 7256 7262 7267 7273 7278 7284 7289 7295 7300 7306 7311 28 95 7227 7233 7238 7244 7250 7255 7261 7266 7272 7277 7283 7288 7294 7299 7305 7310 7316 28 90 7232 7238 7243 7249 7254 7260 7266 27271 7277 1282 7288 7293 7299 7304 7309 7315 7320 28 85 7237 7242 7248 7254 7259 7265 7270 72
61. 7227 7232 7231 37242 7241 7252 774 7175 7180 7185 7190 7195 7200 7206 7211 7216 7221 7226 7231 7235 7240 7245 7250 7255 773 7179 7184 7189 7194 7199 7204 7209 7214 7219 7224 7229 7234 27239 7244 7249 7254 7259 772 7182 7188 7193 7198 7203 7208 7213 7218 7223 7228 7233 7238 7243 7248 7253 7257 7262 771 7186 7191 7196 7201 7206 7211 7216 722i 7226 7231 7236 7241 7246 7251 7256 7261 7266 770 7190 27195 7200 7205 7210 7215 7220 7225 7230 7235 7240 7245 7250 7255 7260 7265 7269 769 7193 7198 7204 7209 7214 7219 7224 7229 7234 7239 7243 7248 7253 7258 7263 7268 7273 768 7197 7202 7207 7212 7217 27222 7227 7232 7237 7242 7247 7252 7257 7262 7267 72172 7277 767 7201 7206 7211 7216 7221 27226 7231 7236 7241 7246 7251 7256 7261 7265 7270 7275 7280 766 7204 7209 7214 7219 7224 27229 7234 7239 7244 7249 7254 7259 7264 7269 7274 7279 7284 765 7208 7213 7218 7223 7228 27233 7238 7243 7248 7253 7258 7263 7268 7273 7277 7282 7287 764 7212 7217 7222 7227 7232 7237 7242 7247 7252 7257 7261 7266 7271 7276 7281 7286 7291 763 7215 7220 7225 7230 7235 7240 7245 7250 7255 7260 7265 37270 7275 7280 7285 7290 7294 762 7219 7224 7229 7234 7239 7244 7249 7254 7259 7264 7269 7274 7278 7283 7288 7293 7298 761 7223 7228 7233 7238 7243 7248 7253 7258 7262 7267 7272 7277 7282 7287 7292 7297 7301 760 7226 7231 27236 7241 7246 27251 7256 7261 7266 7271 7276 7281 7286 7290 7295 37300 7305 759 7230 7235 27240 7245 7250 27255 7260 7265 7270 7275 7279 7284 7289 7294 7299 7304 7309 758 7234 7239
62. 7231 7236 7242 30 65 7159 7165 7170 7176 7181 7187 7192 7198 7203 7209 7214 7219 7225 7230 7235 7241 7246 30 60 7164 27170 7175 7181 27186 7192 7197 7202 7208 7213 7219 7224 73229 7235 7240 7245 7251 30 55 7169 7174 7180 7185 7191 7196 7202 7207 7212 7218 7223 7229 7234 7239 7244 7250 7255 30 50 7173 7179 7184 7190 7195 7201 7206 7212 7217 7222 7228 7233 7238 7244 7249 7254 7260 30 45 7178 7183 7189 7194 7200 7205 7211 7216 7222 7227 7232 7238 7243 37248 7254 7259 7264 30 40 7183 27188 7194 7199 7204 7210 7215 7221 7226 7231 7237 71242 7247 7253 37258 7263 7269 30 35 7187 7193 7198 7204 7209 7215 7220 7225 7231 7236 7241 7247 71252 37257 7263 7268 7273 30 30 7192 7197 7203 7208 7214 7219 7225 7230 7235 7241 7246 7251 7257 7262 126 7212 37218 30 25 7196 7202 37207 7213 7218 7224 7229 7234 7240 7245 7250 7256 7261 7266 7272 7277 7282 30 20 7201 7207 7212 7217 7223 7228 7234 7239 7244 7250 7255 7260 7266 7271 7276 7281 7287 30 15 7206 7211 7217 7222 7221 7233 7238 7244 7249 7254 7260 7265 7270 7275 7281 7286 7291 30 10 7210 7216 27221 722 7232 7237 7243 7248 7254 7259 7264 7269 72175 37280 7285 7290 7296 30 05 7215 7220 7226 7231 7237 7242 7247 7253 7258 7263 7269 7274 7279 7284 7290 7295 7300 30 00 7220 7225 7231 27236 7241 7247 7252 7257 7263 7268 7273 7278 27284 7289 7294 7299 7304 29 95 7224 7230 7235 7241 7246 7251 7257 7262 7267 7273 7278 7283 7288 7293 7299 7304 7309 29 90 7229 7234 7240 7245 7251 7256 7261 7266 7272 7277 7282 7288 7293 7298 7303 7308 7
63. 7258 7262 7266 7269 7273 7276 7280 7283 7287 7290 7294 7297 7301 7305 7308 7312 7315 7319 7322 7326 7329 7333 7336 7340 7344 7347 7351 7354 7358 7361 7365 7368 7372 7315 7379 7383 7386 7390 7393 1397 7400 7404 7407 7411 7414 7418 7422 7425 7429 7432 7436 7439 7443 7446 7450 23 0 7171 7175 7178 7182 7185 7189 7192 7196 7199 7203 7207 7210 7214 7217 7221 7224 7228 7231 7235 7238 7242 7245 7249 7253 7256 7260 7263 7267 7270 7274 7277 7281 7284 7288 7291 7295 7299 7302 7306 7309 7313 7316 7320 1323 7327 7330 7334 7338 7341 7345 7348 7352 7355 7359 7362 7366 7369 7373 7376 7380 7384 7387 7391 7394 7398 7401 7405 7408 7412 7415 7419 7422 7426 7430 7433 7437 7440 7444 7447 7451 7454 Metric Low Alt Mid Temp Low Humidity 23 5 7176 7180 7183 7187 7190 7194 7197 7201 7204 7208 7211 7215 7218 7222 7225 7229 7233 7236 7240 7243 7247 7250 7254 7257 7261 7264 72 8 7271 7275 7278 7282 7286 7289 7293 7296 7300 7303 7307 7310 7314 7317 7321 7324 7328 7331 7335 7339 7342 7346 7349 7353 7356 7360 7363 7367 7370 7374 7377 7381 7384 7388 7392 7395 7399 7402 7406 7409 7413 7416 7420 7423 7421 7430 7434 7437 7441 7445 7448 7452 7455 7459 24 0 7181 7184 7188 7191 7195 7198 7202 7206 7209 7213 7216 7220 7223 7227 7230 7234 7237 7241 7244 7248
64. 7318 7322 9 0 7023 7033 7036 7040 7044 7048 7051 7055 7059 7062 7066 7070 7074 7077 7081 7085 7088 7092 7096 7100 7103 7107 7111 7114 7118 7122 7126 7129 7133 3134 7141 7144 7148 7182 7155 7159 7163 7167 7170 7174 7178 7181 7185 7189 7193 7196 7200 7204 7207 7211 7215 7219 7222 7226 7230 7233 7237 7241 7245 7248 7252 7256 7259 7263 7267 7271 7274 7278 7282 7285 7289 7293 7297 7300 7304 7308 73121 7315 7319 7323 7326 9 5 7034 7038 7042 7045 7049 7053 7057 7060 7064 7068 7071 7075 7079 7083 7086 7090 7094 7097 7101 7105 7109 7112 7116 7120 7223 7127 7131 7134 7138 7142 7146 7149 7153 7157 7160 7164 7168 7172 7175 7179 7183 7186 7190 7194 7198 7201 7205 7209 7212 7216 7220 7224 7227 7231 7235 7238 7242 7246 7249 7253 7257 7261 7264 7268 7272 7275 7279 7283 7287 7290 7294 7298 7301 7305 7309 7313 7316 7320 7324 7327 7331 10 0 7040 7043 7047 7051 7054 7058 7062 7066 7069 7073 7077 7080 7084 7088 7091 7095 7099 7103 7106 7110 7114 7117 7121 7125 7128 7132 7136 7140 7143 7147 7151 7154 7158 7162 7166 7169 7173 7177 7180 7184 7188 7191 7195 7199 7203 7206 7210 7214 7217 7221 7225 7228 7232 7236 7240 7243 7247 7251 7254 7258 7262 7265 7269 7273 7277 7280 7284 7288 7291 7295 7299 7303 7306 7310 7314 7317 7321 7325 7328 7332 7336
65. 7321 7326 7331 7336 7341 7346 795 7270 7275 7280 7285 7290 7295 7300 7305 7310 7314 7319 7324 7329 7334 7339 7344 7349 794 7274 7279 7283 7288 7293 7298 7303 7308 7313 7318 7323 7328 7333 7338 7322 7347 7352 793 7277 7282 7287 7292 7297 7302 7307 7311 7316 7321 7326 7331 7336 7341 7346 7351 7356 792 7281 7285 7290 7295 7300 7305 7310 7315 7320 7325 7330 7334 7339 7344 7349 7354 7359 791 7284 7289 7294 7299 7304 7308 7313 7318 7323 7328 7333 7338 7343 7348 7353 7357 7362 790 7287 7292 7297 7302 7307 7312 7317 7322 7327 317331 7336 7341 7346 7351 7356 7361 7366 789 7291 7296 7301 7306 7310 7315 27320 7325 27330 7335 7340 7345 7350 7354 7359 7364 7369 788 7294 7299 7304 7309 7314 7319 7324 7329 7333 7338 7343 7348 7353 7358 7363 7368 7372 787 7298 7303 7308 7312 7317 7322 7327 7332 7337 7342 7347 7351 7356 7361 7366 7371 7376 786 7301 27306 7311 7316 7321 7326 7330 7335 7340 7345 7350 7355 7360 7365 7369 7374 7379 785 7305 7310 7314 7319 7324 71329 7334 7339 7344 7348 7353 7358 7363 7368 7373 7378 7383 784 7308 7313 7318 7323 7328 7332 7337 7342 7347 7352 7357 7362 7366 7371 7376 7381 7386 783 7312 7316 7321 7326 7331 7336 7341 7346 7350 7355 7360 7365 7370 7375 7380 7384 7389 782 7315 7320 7325 7330 7334 7339 7344 7349 7354 7359 7364 27368 7373 7378 7383 7388 7393 781 7319 7323 7328 7333 7338 27343 7348 7352 7357 7362 7367 7372 7377 7381 7386 7391 7396 780 7322 7327 7332 37336 7341 7346 7351 7356 7361 7365 7370 7375 7380 7385 7390 7394 7399 779 7325 7330 7335
66. 7322 7326 7331 7336 7340 7345 7350 7354 7359 7363 7368 7373 7377 7382 7387 7391 7396 7401 7405 7410 7414 7419 7424 7428 7433 7438 7442 7447 7451 7456 7461 7465 7470 7475 7479 7484 7488 7493 7498 7502 7507 59 0 7142 7147 7152 7156 7161 7166 7170 7175 7179 7184 7189 7193 7198 7202 7207 7212 7216 7221 7226 7230 7235 7239 7244 7249 7253 7258 7263 7267 7272 7276 7281 7286 7290 7295 7299 7304 7309 7313 7318 7323 7327 7332 7336 7341 7346 7350 7355 7360 7364 7369 7373 7378 7383 7387 7392 7396 7401 7406 7410 7415 7420 7424 7429 7433 7438 7443 7447 7452 7457 7461 7466 7470 7475 7480 7484 7489 7493 7498 7503 7507 7512 60 0 7148 7153 7157 7162 7167 7171 7176 7180 7185 7190 7194 7199 7203 7208 7213 7217 7222 7227 7231 7236 7240 7245 7250 7254 7259 7263 7268 7273 7277 7282 7286 7291 7296 7300 7305 7310 7314 7319 7323 7328 7333 7337 7342 7346 7351 7356 7360 7365 7369 7374 7379 7383 7388 7393 7397 7402 7406 7411 7416 7420 7425 7429 7434 7439 7443 7448 7452 7457 7462 7466 7471 7475 7480 7485 7489 7494 7499 7503 7508 7512 7517 61 0 7154 7158 7163 7168 7172 7177 7181 7186 7191 7195 7200 7204 7209 7214 7218 7223 7228 7232 7237 7241 7246 7251 7255 7260 7264 7269 7274 7278 7283 7287 7292 7297 7301 7306 7310 7315 7320 7324 7329 7333 7338 7343
67. 7327 7332 7337 7342 7346 7351 7356 7361 7366 7370 7375 717 7301 7306 7311 7316 27321 7326 7331 7336 7340 7345 7350 7355 7360 7365 7369 7374 7379 716 7305 7310 27315 7320 7325 7330 7334 7339 7344 7349 7354 7359 7363 7368 7373 7378 7383 715 7309 7314 7319 7324 7328 7333 7338 7343 7348 7353 7358 7362 7367 7372 7377 73821 7386 714 7313 7318 7322 7327 7332 7337 1342 73417 7352 7356 7361 7366 7371 7376 7380 7385 7390 713 7316 7321 27326 7331 7336 37341 7346 7351 7355 7360 7365 7370 7375 7339 7384 7389 7394 712 7320 7325 7330 7335 7340 7345 7349 7354 7359 7364 7369 7373 7378 7383 7388 7392 7397 711 7324 7329 27334 7339 7343 7348 7353 7358 7363 7368 7372 7371 7382 37387 7391 7396 7401 710 7328 7333 7337 7342 7347 7352 7357 7362 7366 7371 7376 7381 7386 7390 7395 7400 7405 709 7331 7336 7341 7346 7351 27356 7361 7365 7370 7375 7380 7385 7389 7394 7399 7403 7408 708 7335 7340 7345 7350 7355 7360 7364 7369 7374 7379 7383 7388 7393 7398 7402 7407 7412 707 7339 7344 7349 7354 7358 7363 7368 7373 7318 7382 7387 7392 7397 7401 7406 7411 7415 706 7343 7348 7352 7357 7362 7367 7372 7371 7381 3386 7391 7396 7400 7405 7410 7414 7419 705 7346 7351 7356 7361 7366 7371 7376 7380 7385 7390 7395 7399 7404 7409 7413 7418 7423 704 7350 7355 7360 7365 7370 7374 7379 7384 7389 7394 7398 7403 7408 7412 7417 7422 7426 703 7354 7359 27364 7369 7373 7378 7383 7388 7393 7397 7402 7407 7411 7416 7421 7425 7430 702 7358 7363 27367 7372 27377 7382 27387 7391 7396 7401 7406 7410 7415 7420 7424 7
68. 7335 7338 7342 7345 7349 7352 7356 7360 7363 7367 7370 7374 7377 7381 7384 7388 7392 7395 7399 7402 7406 7409 7413 7416 7420 7424 7427 7431 7434 7438 7441 7445 7448 7452 22 5 7173 7176 7180 7184 7187 7191 7194 7198 7201 7205 7208 7212 7215 7219 7223 7226 7230 7233 7237 7240 7244 7247 7251 7254 7258 7262 7265 7269 7272 7276 7279 7283 7286 7290 7293 7297 7301 7304 7308 7311 7315 7318 7322 7325 7329 7332 7336 7340 7343 7347 7350 7354 7357 7361 7364 7368 7371 7375 7379 7382 7386 7389 7393 7396 7400 7403 7407 7410 7414 7418 7421 7425 7428 7432 7435 7439 7442 7446 7449 7453 7457 23 0 7178 7181 7185 7189 7192 7196 7199 7203 7206 7210 7213 7217 7220 7224 7227 7231 7235 7238 7242 7245 7249 7252 7256 7259 7263 7266 7270 7274 7277 7281 7284 7288 7291 7295 7298 7302 7305 7309 7312 7316 7320 7323 7327 7330 7334 7337 7341 7344 7348 7351 7355 7358 7362 7366 7369 7373 7376 7380 7383 7387 7390 7394 7397 7401 7404 7408 7412 7415 7419 7422 7426 7429 7433 7436 7440 7443 7447 7450 7454 7458 7461 23 5 7183 7187 7190 7194 7197 7201 7204 7208 7211 7215 7218 7222 7225 7229 7232 7236 7240 7243 7247 7250 7254 7257 7261 7264 7268 7271 7275 7278 7282 7285 7289 7293 7296 7300 7303 7307 7310 7314 7317 7321 7324 7328 7331 7335 7338 7342 7346 7349 7353
69. 7340 7345 7350 7354 7359 7364 7369 7374 7379 7383 7388 7393 7398 7403 778 7329 7334 7339 7343 7348 7353 7358 7363 7367 7372 7377 7382 7387 7392 7396 7401 7406 777 7332 7337 7342 7347 7352 7356 7361 7366 7371 7376 7380 27385 7390 7395 7400 7405 7409 776 7336 27341 7345 7350 7355 7360 7365 7369 7374 7379 7384 7389 7394 7398 7403 7408 7413 775 7339 7344 7349 7354 7358 7363 7368 7373 7378 7382 7387 7392 7397 7402 7407 7411 7416 774 7343 7347 7352 7357 7362 7367 7371 7376 7381 7386 7391 7395 7400 7405 7410 7415 7420 773 7346 7351 7356 7361 7365 7370 7375 7380 7384 7389 7394 7399 7404 7408 7413 7418 7423 772 7350 7354 7359 7364 7369 7374 7378 7383 7388 7393 7397 7402 7407 7412 7417 7421 7426 771 7353 7358 7363 7367 37372 27371 7382 7387 7391 7396 7401 7406 7410 7415 7420 7425 7430 770 7356 7361 7366 7371 27376 7380 7385 7390 7395 7399 7404 7409 7414 7419 7423 7428 7433 769 7360 7365 7369 27374 7379 7384 7389 7393 27398 7403 7408 7412 7417 7422 7427 7432 7436 768 7363 7368 27373 7378 7382 27387 7392 7397 7402 7406 7411 7416 7421 7425 7430 7435 7440 767 7367 7372 7376 7381 27386 7391 7395 7400 7405 7410 7414 7419 7424 7429 7433 7438 7443 766 7370 7375 7380 7385 7389 7394 7399 7404 7408 7413 7418 7423 7427 7432 7437 7442 7446 765 7374 7378 7383 7388 7393 7397 7402 7407 7412 7416 7421 7426 37431 7435 7440 7445 7450 764 1377 7382 7387 7391 7396 7401 7406 7410 7415 7420 7425 7429 7434 7439 7444 7448 7453 763 7381 7385 7390 7395 7400 7404 7409 7414 7419 7423 7428 7433 743
70. 7343 7347 7350 7354 7357 7360 7364 7367 7371 7374 7378 7381 7385 7388 7392 7395 7398 7402 7405 7409 7412 7416 7419 7423 7426 7430 7433 7436 7440 7443 7447 7450 7454 7457 7461 7464 7468 7471 7475 7478 7481 7485 7488 7492 7495 7499 7502 7506 7509 7513 7516 7519 239 13 Wavelength of Light Compensation Table 30 Metric Low Alt High Mid Temp Med Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 50 Humidity EU MU II o s T TEMPERATURE IN DEGREES CELSIUS 30 5 31 0 31 5 32 0 32 5 33 0 33 5 34 0 34 5 35 0 35 5 36 0 36 5 37 0 37 5 38 0 38 5 800 7248 7253 27257 7262 7267 7272 7276 27281 7286 7291 7295 7300 7305 7310 7314 7319 7324 799 7251 7256 7261 7266 7270 7275 7280 7285 7289 7294 7299 7304 7308 7313 7318 7322 7327 798 7255 7259 7264 7269 7274 7279 7283 7288 7293 7298 7302 7307 7312 7316 7321 7326 7331 797 7258 7263 7268 7272 7277 7282 7287 7291 7296 7301 7306 7310 7315 7320 7325 7329 7334 796 7262 7266 7271 7276 7281 7285 7290 7295 7300 7304 7309 7314 7318 7323 7328 7333 7337 795 7265 7270 7275 7279 7284 7289 7294 7298 7303 7308 7312 7317 7322 7327 7331 7336 7341 794 7268 7273 7278 7283 7287 7292 7297 7302 7306 7311 7316 7321 7325 7330 7335 7339 7344 793 72712 7271 7281 7286 7291 7296 7300 7305 7310 7315 7319 7324 7329 7333 7338 7343 7347 792 7275 7280 7285 7290 7294 7299 7304 7308 7313 7318 7323 7327 7332 7337 7341 7346 7352 791 7279 728
71. 7347 7352 7356 7361 7366 7370 7375 7379 7384 7389 7393 7398 7402 7407 7412 7416 7421 7425 7430 7435 7439 7444 7448 7453 7458 7462 7467 7471 7476 7481 7485 7490 7494 7499 7504 7508 7513 7517 7522 Laser and Optics User s Manual Vol TEMPERATURE IN DEGREES FAHRENHEIT 62 0 7160 7164 7169 7173 7178 7183 7187 7192 7196 7201 7205 7210 7215 7219 7224 7228 7233 7238 7242 7247 7251 7256 7261 7265 7270 7274 7279 7284 7288 7293 7297 7302 7307 7311 7316 7320 7325 7329 7334 7339 7343 7348 7352 7444 7449 7463 7467 7472 7476 7481 7486 7490 7495 7499 7504 7509 7513 7518 7522 7527 63 0 7165 7170 7174 7179 7184 7188 7193 7197 7202 7207 7211 7216 7220 7225 7229 7234 7239 7243 7248 7252 7257 7262 7266 7271 T7219 7280 7284 7289 7294 7298 7303 7307 7312 7317 7321 7326 7330 7335 7339 7344 7349 7353 7358 7362 7367 7372 7376 7381 7385 7390 7394 7399 7404 7408 7413 7417 7422 7427 17431 7436 7440 7445 7449 7454 7459 7463 7468 7472 7477 7482 7486 7491 7495 7500 7504 7509 7514 7518 7523 7527 7532 64 0 7171 7175 7180 7185 7189 7194 7198 7203 7208 7212 7217 7221 7226 7230 7235 7240 7244 7249 7253 7258 7262 7267 7272 7276 7281 7285 7290 7294 7299 7304 7308 7313 7317 7322 7326 7331 7336 7340 7345 7349 7354 7358 7363 7368 7372 7377 7381 7386 7391 7395 7400
72. 7353 7356 7360 7363 7367 7370 7374 7377 7381 7384 7388 7391 7395 7398 7402 7405 7409 7413 7416 7420 7423 7427 7430 7434 7437 744 7444 7448 7451 7455 7458 7462 7465 7469 7472 7476 7479 25 5 7203 7207 7210 7214 7217 7221 7224 7228 7231 7235 7238 7242 7245 7249 7252 7256 7259 7263 7266 7270 7273 7277 7280 7284 7287 7291 7294 7298 7301 7305 7308 7312 7315 7319 7322 7326 7329 7333 7336 7340 7343 7347 7351 7354 7358 7361 7365 7368 7372 7375 7379 7382 7386 7389 7393 7396 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7449 7452 7456 7459 7463 7466 7470 7473 7477 7480 7484 26 0 7208 7212 7215 7219 7222 7226 7229 7233 7236 7240 7243 7247 7250 7254 7257 7261 7264 7268 7271 7275 7278 7282 7285 7289 7292 7296 7299 7303 7306 7310 7313 7317 7320 7324 7327 7331 7334 7338 7341 7345 7348 7352 7355 7359 7362 7366 7369 7373 7376 7380 7383 7387 7390 7394 7397 7401 7404 7408 7411 7415 7418 7422 7425 7429 7432 7436 7439 7443 7446 7450 7453 7457 7460 7464 7467 7471 7474 7478 7481 7485 7488 26 5 7213 7217 7220 7224 7227 7231 7234 7238 7241 7245 7248 7252 7255 7259 7262 7266 7269 7273 7276 7280 7283 7287 7290 7294 7297 7301 7304 7308 7311 7315 7318 7322 7325 7329 7332 7336 7339 7343 7346 7350 7353 7357 7360 7364 7367 7371
73. 7356 7360 7363 7367 7370 7374 7377 7381 7384 7388 7391 7395 7399 7402 7406 7409 7413 7416 7420 7423 7427 7430 7434 7437 7441 7444 7448 7452 7455 7459 7462 7466 Laser and Optics User s Manual Vol 24 0 7188 7192 7195 7199 7202 7206 7209 7213 7216 7220 7223 7227 7230 7234 7237 7241 7244 7248 7252 7255 7259 7262 7266 7269 7273 7276 7280 7283 7287 7290 7294 7297 7301 7304 7308 7311 7315 7319 7322 7326 7329 7333 7336 7340 7343 7347 7350 7354 7357 7361 7364 7368 7371 7375 7379 7382 7386 7389 7393 7396 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7446 7449 7453 7456 7460 7463 7467 7470 24 5 7193 7197 7200 7204 7207 7211 7214 7218 7221 7225 7228 7232 7235 7239 7242 7246 7249 7253 7256 7260 7263 7267 7271 7274 7278 7281 7285 7288 7292 7295 7299 7302 7306 7309 7313 7316 7320 7323 7327 7330 7334 7337 7341 7344 7348 7352 7355 7359 7362 7366 7369 7373 7376 7380 7383 7387 7390 7394 7397 7401 7404 7408 7411 7415 7418 7422 7425 7429 7433 7436 7440 7443 7447 7450 7454 7457 7461 7464 7468 7471 7475 25 0 7198 7202 7205 7209 7212 7216 7219 7223 7226 7230 7233 7237 7240 7244 7247 7251 7254 7258 7261 7265 7268 7272 7275 7279 7282 7286 7289 7293 7297 7300 7304 7307 7311 7314 7318 7321 7325 7328 7332 7335 7339 7342 7346 7349
74. 7362 7368 7373 7378 7384 7389 7394 7399 28 00 7318 7324 7329 7335 7340 7345 7351 7356 7362 7367 7372 7378 7383 7388 7393 7399 7404 27 95 7323 7328 7334 7339 7345 7350 7356 7361 7366 7372 7377 7382 7388 7393 7398 7403 7409 27 90 7328 7333 7339 7344 7350 7355 7360 7366 7371 7376 7382 7387 7392 7398 7403 7408 7413 27 85 7333 7338 7343 7349 7354 7360 7365 7370 7376 7381 27386 7392 7397 7402 7407 7413 7418 27 80 7337 7343 7348 7354 7359 7364 37370 7375 7380 7386 7391 7396 7402 7407 7412 7417 7423 27 75 7342 7348 7353 7358 7364 7369 7375 7380 7385 7390 7396 7401 7406 7412 7417 7422 7427 27 70 7347 7352 7358 7363 7369 7374 7379 7385 7390 7395 7400 7406 7411 7416 7421 7427 7432 27 65 7352 7357 7363 7368 7373 7379 7384 7389 7395 7400 7405 7410 7416 7421 7426 7431 7436 27 60 7357 7362 7367 27373 7378 7383 7389 7394 7399 7405 7410 7415 7420 7426 7431 7436 7441 27 55 7361 7367 7372 7377 7383 7388 7393 7399 7404 7409 7415 7420 7425 7430 7435 7441 7446 27 50 7366 7372 7377 7382 7388 7393 7398 7404 7409 7414 7419 7425 7430 7435 7440 7445 7450 27 45 7371 7376 7382 7387 7392 7398 7403 7408 7414 7419 7424 7429 7434 7440 7445 7450 7455 27 40 7376 7381 7386 27392 7397 7402 7408 7413 7418 7423 7429 7434 7439 7444 7449 7455 7460 27 35 7381 7386 7391 27397 7402 7407 7412 7418 7423 7428 7433 7439 7444 7449 7454 7459 7464 27 30 7385 7391 7396 7401 7407 7412 7417 7422 7428 7433 7438 7443 7448 7454 7459 7464 7469 27 25 7390 7395 7401 7406 7411 7417 7422 7427 7432 7438 7443 7448 7453 74
75. 7367 7371 7376 7380 7385 7390 7394 7399 7404 7408 7413 7417 7422 7427 7431 7436 7441 7445 7450 7454 7459 7464 7468 7473 7477 7482 7487 7491 7496 7501 7505 7510 60 0 7146 7151 7155 7160 7164 7169 7174 7178 7183 7187 7192 7197 7201 7206 7210 7215 7220 7224 7229 7234 7238 7243 7247 7252 7257 7261 7266 7270 7275 7280 7284 7289 7293 7298 7303 7307 7312 7317 7321 7326 7330 7335 7340 7344 7349 1353 7358 7363 7367 7372 7376 7381 7386 7390 7395 7400 7404 7409 7413 7418 7423 7427 7432 7436 7441 7446 7450 7455 7459 7464 7469 7473 7478 7482 7487 7492 7496 7501 7506 7510 7515 61 0 7152 7156 7161 7165 7170 7175 7179 7184 7188 7193 7198 7202 7207 7211 7216 7221 7225 7230 7234 7239 7244 7248 7253 7257 7262 7267 7271 7276 7280 7285 7290 7294 7299 7303 7308 7313 73117 7322 7326 7331 7336 7340 7345 7349 7354 7359 7363 7368 7372 7377 7382 7386 7391 7395 7400 7405 7409 7414 7418 7423 7428 7432 7437 7441 7446 7451 7455 7460 7464 7469 7474 7478 7483 7487 7492 7497 7501 7506 7510 7315 7520 Laser and Optics User s Manual Vol TEMPERATURE IN DEGREES FAHRENHEIT 62 0 7157 7162 7166 dad 7176 7180 7185 7189 7194 7199 7203 7208 7212 7217 7221 7226 7231 7235 7240 7244 7249 7254 7258 7263 7267 7272 7217 7281 7286 7290 7295 7300 7304 7309 7313 7318 7323 7327
76. 7374 7378 7381 7385 7388 7391 7395 7398 7402 7405 7409 7412 7416 7419 7423 7426 7430 7433 7437 7440 7444 7447 7451 7454 7458 7461 7465 7468 7472 7475 7479 7482 7486 7489 7493 27 0 7218 7222 7225 7229 7232 7236 7239 7243 7246 7250 7253 7257 7260 7264 7267 7270 7274 7277 7281 7284 7288 7291 7295 7298 7302 7305 7309 7312 7316 7319 7323 7326 7330 7333 7337 7340 7344 7347 7351 7354 7358 7361 7365 7368 7372 7375 7379 7382 7386 7389 7393 7396 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7449 7452 7456 7459 7463 7466 7470 7473 7477 7480 7483 7487 7490 7494 7497 27 5 7223 7227 7230 7234 7237 7241 7244 7248 7251 7254 7258 7261 7265 7268 7272 7215 7279 7282 7286 7289 7293 7296 7300 7303 7307 7310 7314 7317 7321 7324 7328 7331 7335 7338 7342 7345 7349 7352 7356 7359 7363 7366 7370 7373 7376 7380 7383 7387 7390 7394 7397 7402 7404 7408 7411 7415 7418 7422 7425 7429 7432 7436 7439 7443 7446 7450 7453 7457 7460 7464 7467 7471 7474 7478 7481 7485 7488 7492 7495 7498 7502 28 0 7228 7232 7235 7239 7242 7245 7249 7252 7256 7259 7263 7266 7270 7273 7277 7280 7284 7287 7291 7294 7298 7301 7305 7308 7312 7315 7319 7322 7326 7329 7332 7336 7339 7343 7346 7350 7353 7357 7360 7364 7367 7371 7374 7378 7381 7385 7388 7392
77. 7382 7387 7392 7397 7402 7407 7412 7417 7421 7426 7431 7436 7441 7446 7451 7455 29 20 7381 7386 7391 27396 7401 7406 7411 7416 7421 7426 7431 7436 7440 7445 7450 7455 7460 29 15 7386 7391 7396 7401 7406 7411 7416 7421 7425 7430 7435 7440 7445 7450 7454 7459 7464 29 10 7390 7395 7400 7405 7410 7415 7420 7425 7430 7435 7440 7444 7449 7454 7459 7464 7468 29 05 7395 7400 7405 7410 7415 7420 7425 7429 7434 7439 71444 7449 7454 7458 7463 7468 7413 29 00 7399 7404 7409 7414 7419 7424 7429 7434 7439 7444 7448 7453 7458 7463 7468 7472 7477 28 95 7404 7409 7414 7419 7424 7429 7433 7438 7443 7448 7453 37458 7462 7467 7472 7477 7481 28 90 7408 74 3 7418 7423 7428 7433 7438 7443 7448 7452 7457 7462 7467 7472 7476 7481 7486 28 85 7413 7418 7423 7428 7433 7437 7442 7447 7452 7457 7462 7466 7471 7476 7481 7485 7490 28 80 7417 7422 7427 7432 7437 7442 7447 7452 7456 7461 7466 7471 7476 7480 7485 7490 7495 28 75 7422 7427 7432 7437 7441 7446 7451 7456 7461 7466 7470 7475 7480 7485 7489 7494 7499 28 70 7426 7431 7436 7441 7446 7451 27456 7460 7465 7470 7475 7480 7484 7489 7494 7499 7503 28 65 7431 7436 7441 7446 7450 7455 7460 7465 7470 7474 7479 7484 7489 7493 7498 7503 7508 28 60 7435 7440 7445 7450 7455 7460 7464 7469 7474 7479 7484 7488 7493 7498 7503 7507 7512 28 55 7440 7445 7450 7454 7459 7464 7469 7474 7479 7483 7488 7493 7498 7502 7507 7512 7516 28 50 7444 7449 7454 7459 7464 7469 7473 7478 7483 7488 7492 7497 7502 7507 7511 7516 7521 28 45 7449 7454 7459 7463 7468
78. 7391 7396 7402 7407 7412 7417 7422 7428 7433 7438 7443 7448 7453 27 40 7375 7380 7385 7390 7396 7401 7406 7412 7417 7422 7427 7432 7437 7442 71448 7453 7458 27 35 7379 7385 7390 7395 7401 7406 7411 7416 7421 7427 7432 7437 7442 7447 1452 7457 7462 27 30 7384 7389 7395 7400 7405 7411 7416 7421 7426 7431 7436 7442 7447 7452 7457 7462 7467 27 25 7389 7394 7400 7405 7410 7415 7420 7426 7431 7436 7441 7446 7451 7456 7462 7467 7412 27 20 7394 7399 7404 7410 7415 7420 7425 7430 7436 7441 7446 7451 7456 7461 7466 7471 7416 27 15 7399 7404 7409 7414 7420 7425 7430 7435 7440 7445 7451 7456 7461 7466 7471 7476 7481 27 10 7403 7409 7414 7419 7424 7430 7435 7440 7445 7450 7455 7460 7465 7471 7476 7481 7486 27 05 7408 7413 7419 7424 7429 7434 7439 7445 7450 7455 7460 7465 7470 7475 7480 7485 7490 27 00 7413 7418 7423 7429 7434 7439 7444 7449 7454 7460 7465 7470 7475 7480 7485 7490 7495 BAROMETRIC PRESSURE IN INCHES OF MERCURY 262 Laser and Optics User s Manual Vol Table 53 English Low Alt Low Mid Temp Med Humidity Wavelength of Light Compensation Temp 57 to 73 F Press 27 to 31 inches 50 Humidity 13 aaaeeeaa a a a ae ss BAROMETRIC PRESSURE IN INCHES OF MERCURY 57 0 31 00 7129 30 95 7134 30 90 7138 30 85 7143 30 80 7147 30 75 7152 30 70 7157 30 65 7161 30 60 7166 30 55 7171 30 50 7175 30 45 7180 30 40 7185 30 35 7189 30 30 7194 30 25 7198 30 20 7203 30 15 7208 30 10 7212 30 05 7217 30 00 7222 29 95 7226 29 90 7
79. 7392 7396 7401 7405 7409 7414 7418 7422 7427 7431 7435 7440 7444 7448 7453 7457 757 7391 7395 7400 7404 7408 7413 7417 7422 7426 7430 7434 7439 71443 7447 7452 7456 7460 756 7394 7399 7403 7408 7412 7416 7421 7425 7429 7434 7438 7442 7446 7451 7455 7459 7464 755 7398 7402 7407 7411 7415 7420 7424 7428 7433 7437 7441 7446 71450 7454 7458 7463 7467 754 7401 7406 7410 7414 7419 2423 7427 7432 7436 7440 7445 7449 7453 7458 7462 7466 7470 753 7405 7409 7413 7418 7422 7427 7431 7435 7439 7444 7448 7452 7457 7461 7465 7469 7474 752 7408 7413 7417 7421 7426 7430 7434 7439 7443 7447 7451 7456 7460 7464 7469 7473 7477 751 7412 7416 7420 7425 7429 7433 7438 7442 7446 7451 7455 7459 7463 7468 7472 7476 7480 750 7415 7419 7424 7428 7432 7437 7441 7445 7450 7454 7458 7463 71467 7471 7475 7479 7484 749 7419 7423 7427 7432 7436 7440 7445 7449 7453 7457 7462 7466 7470 7474 7479 7483 7487 748 1422 27426 7431 27435 27439 7444 7448 7452 7457 7461 7465 7469 7474 7478 7482 7486 7490 747 7425 7430 7434 7438 7443 7447 7451 7456 7460 7464 7468 7473 7477 7481 7485 7490 7494 746 7429 7433 7438 7442 7446 7450 7455 2459 7463 27468 7472 7416 7480 7485 7489 7493 7497 745 7432 7437 7441 7445 7450 7454 7458 7462 7467 7471 7475 7479 7484 7488 7492 7496 7501 744 7436 7440 7444 7449 7453 7457 7462 7466 7470 7474 27479 7483 7487 7491 7496 7500 7504 743 1439 7444 7448 7452 7456 7461 7465 7469 7474 7478 7482 7486 7490 7495 7499 7503 7507 742 7443 7447 7451 7456 7460 7464 7468 7473 7477 7481 7485 7
80. 7395 7399 7402 7406 7409 7413 7416 7419 7423 7426 7430 7433 7437 7440 7444 7447 7451 7454 7458 7461 7465 7468 7472 7475 7479 7482 7486 7489 7493 7496 7500 7503 7506 28 5 7233 7237 7240 7243 7247 7250 7254 7257 7261 7264 7268 7271 7275 7278 7282 7285 7289 7292 7296 7299 7303 7306 7309 7313 7316 7320 7323 7327 7330 7334 7337 7341 7344 7348 7351 7355 7358 7362 7365 7369 7372 7376 7379 7382 7386 7389 7393 7396 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7448 7452 7455 7459 7462 7466 7469 7473 7476 7480 7483 7487 7490 7494 7497 7501 7504 7508 7511 29 0 7238 7242 7245 7248 7252 7255 7259 7262 7266 7269 7273 7276 7280 7283 7287 7290 7294 7297 7300 7304 7307 7311 7314 7318 7321 7325 7328 7332 7335 7339 7342 7346 7349 7352 7356 7359 7363 7366 7370 7373 7377 7380 7384 7387 7391 7394 7398 7401 7405 7408 7411 7415 7418 7422 7425 7429 7432 7436 7439 7443 7446 7450 7453 7457 7460 7463 7467 7470 7474 7477 7481 7484 7488 7491 7495 7498 7502 7505 7509 7512 7516 29 5 7243 7246 7250 7253 7257 7260 7264 7267 7271 7274 7278 7281 7285 7288 7291 7295 7298 7302 7305 7309 7312 7316 7319 7323 7326 7330 7333 7337 7340 7343 7347 7350 7354 7357 7361 7364 7368 7371 7375 7378 7382 7385 7388 7392 7395 7399 7402 7406 7409 7413
81. 7416 7420 7423 7427 7430 7433 74371 7440 7444 7447 7451 7454 7458 7461 7465 7468 7412 7475 7478 7482 7485 7489 7492 7496 7499 7503 7506 7510 7513 7517 7520 30 0 7248 7251 7258 7258 7262 7265 7269 7272 7276 7279 7283 7286 7289 7293 7296 7300 7303 7307 7310 7314 7317 7321 7324 7327 7331 7334 7338 7341 7345 7348 7352 7355 7359 7362 7366 7369 7372 7376 7379 7383 7386 7390 7393 7397 7400 7404 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7448 7452 7455 7459 7462 7466 7469 7473 7476 7480 7483 7487 7490 7493 7497 7500 7504 7507 7511 7514 7518 7521 7525 24 13 Wavelength of Light Compensation Table 38 Metric Low Alt High Mid Temp High Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 80 Humidity M M A TEMPERATURE IN DEGREES CELSIUS 30 5 31 0 31 5 32 0 32 5 33 0 33 5 34 0 34 5 35 0 35 5 36 0 36 5 37 0 37 5 38 0 38 5 800 7253 7258 7263 7268 7273 7278 7283 7288 7293 7297 7302 730 7312 7317 7322 7327 7332 799 7256 7261 7266 7271 7276 7281 7286 7291 7296 7301 7306 7311 7316 7321 7326 7331 7335 798 7260 7265 7270 7275 7280 7285 7289 7294 7299 7304 7309 7314 7319 7324 7329 7334 7339 797 7263 7268 7273 7278 7283 27288 7293 7298 7303 7308 7313 7318 7322 7327 1332 7337 7342 796 7267 7272 7277 7282 7286 7291 7296 7301 7306 7311 7316
82. 7446 7450 7454 7459 7463 7467 7471 7476 7480 7484 7488 7493 7497 7501 7505 7510 7514 7518 7522 7527 7531 7535 7539 7544 7548 7552 7556 7561 7565 7569 7573 7578 7582 7586 7590 7595 7599 7603 7607 7612 7616 7620 7624 7629 7633 7637 7641 7646 7650 7654 7658 7663 7667 7671 7675 7680 7684 7688 7692 7697 7701 7705 7709 7713 7718 7722 7726 7730 105 0 7396 7400 7405 7409 7413 7417 7422 7426 7430 7434 7439 7443 7447 7451 7456 7460 7464 7468 7472 7477 7481 7485 7489 7494 7498 7502 7506 7511 7515 7519 7523 7528 7532 7536 7540 7545 7549 7553 7557 7562 7566 7570 7574 7578 7583 7587 7591 7595 7600 7604 7608 7612 7617 7621 7625 7629 7634 7638 7642 7646 7651 7655 7659 7663 7668 7672 7676 7680 7684 7689 7693 7697 7701 7706 7710 7714 7718 7723 7727 7731 7735 106 0 7402 7406 7410 7414 7419 7423 7427 7431 7436 7440 7444 7448 7452 7457 7461 7465 7469 7474 7478 7482 7486 7491 7495 7499 7503 7507 7512 7516 7520 7524 7529 7533 7537 7541 7546 7550 7554 7558 7562 7567 7571 7575 7579 7584 7588 7592 7596 7601 7605 7609 7613 7617 7622 7626 7630 7634 7639 7643 7647 7651 7656 7660 7664 7668 7673 7677 7681 7685 7689 7694 7698 7702 7706 TILL 7715 TS 7723 7728 7732 7736 7740 107 0 7407 7411 7416 7420 7424 7428 7432 7437 7441 7445 7449 7454 7458 7462 7466
83. 7462 7466 7469 7473 7476 7646 7649 7653 7656 7660 7664 7667 7671 7674 7678 7681 7685 7688 7692 7695 7699 7702 7706 7709 7713 7717 7720 7724 7727 7731 7734 7738 7741 7745 24 0 7467 7470 7474 7477 7481 7484 7488 7491 7495 7498 7502 7505 7509 7512 7516 7520 7523 7527 7530 7534 7537 7541 7544 7548 7551 7555 7558 7562 7565 7569 7572 7576 7579 7583 7587 7590 7594 7597 7601 7604 7608 7611 7615 7618 7622 7625 7629 7632 7636 7639 7643 7647 7650 7654 7657 7661 7664 7668 7671 7675 7678 7682 7685 7689 7692 7696 7699 7703 7706 7710 7714 7717 7721 7124 7728 7731 7735 7738 7742 7745 7749 24 5 7471 7475 7478 7482 7485 7489 7492 7496 7499 7503 7506 7510 7513 7517 7520 7524 7527 7531 7534 7538 7541 7545 7549 7552 7556 7559 7563 7566 7570 7573 7577 7520 7584 7587 7591 7594 7598 7601 7605 7608 7612 7615 7619 7622 7626 7630 7633 7637 7640 7644 7647 7651 7654 7658 7661 7665 7668 7672 7675 7679 7682 7686 7689 7693 7696 71700 7703 7707 7711 7714 7718 7721 7725 7728 7732 7735 7739 7742 7746 7749 7753 25 0 7476 7479 7483 7486 7490 7493 7497 7500 7504 7507 7511 7514 7518 7521 7525 7528 7532 7535 7539 7542 7546 7549 7553 7556 7560 7563 7567 7570 7574 7577 7581 7584 7588 7592 7595 7599 7602 7606 7609 7613 7616 7620 7623 7627 7630 7634 7637 7641 76
84. 7464 7467 7471 7475 7478 7482 7486 7490 7493 7497 7501 7505 7508 7512 7516 7520 7523 7527 2531 7534 7538 7542 7546 7549 7553 7557 7561 7564 7568 7572 7575 7579 7583 7587 7590 7594 7598 7602 7605 7609 7613 7616 8 5 7323 7321 7330 7334 7338 7342 7345 7349 7353 7356 7360 7364 7368 7371 7375 7379 7383 7386 7390 7394 7397 7401 7405 7409 7412 7416 7420 7423 7427 7431 7435 7438 7442 7446 7450 7453 7457 7461 7464 7468 7472 7476 7479 7483 7487 7490 7494 7498 7502 7505 7509 7513 7517 7520 7524 7528 7531 7535 7539 7543 7546 7550 7554 7557 7561 7565 7569 7572 7576 7580 7584 7587 7591 7595 7598 7602 7606 7610 7613 7617 7621 9 0 7328 7332 7335 7339 7343 7346 7350 7354 7358 7361 7365 7369 7372 7376 7380 7384 7387 7391 7395 7398 7402 7406 7410 7413 7417 7421 7424 7428 7432 7436 7439 7443 7447 7450 7454 7458 7462 7465 7469 7473 7476 7480 7484 7488 7491 7495 7499 7502 7506 7510 7514 29817 7521 7525 7528 7532 7536 7540 7543 7547 7551 7554 7558 7562 7566 7569 73573 7577 7580 7584 7588 7592 7595 7599 7603 7606 7610 7614 7618 7621 7625 9 5 7333 7336 7340 7344 7347 7351 7355 7359 7362 7366 7370 7373 7377 7381 7385 7388 7392 7396 7399 7403 7407 7411 7414 7418 7422 7425 7429 7433 7436 7440 7444 7448 7451 7455 7459 7462 7466 7470 7474 7477 7481
85. 7466 7470 7473 7477 7481 7485 7489 7492 7496 7500 7504 7507 7511 7515 7519 7522 7526 7530 7534 7538 7541 7545 7549 7553 7556 7560 7564 7568 7521 7575 7579 7583 7587 7590 5 5 7294 7297 7301 7305 7309 7312 7316 7320 7324 7328 7331 7335 7339 7343 7346 7350 7354 7358 7361 7365 7369 73173 7376 7380 7384 7388 7392 7395 7399 7403 7407 7410 7414 7418 7422 7425 7429 7433 7437 7440 7444 7448 7452 7455 7459 7463 7467 7471 7474 7478 7482 7486 7489 7493 7497 7501 7504 7508 7512 7516 7519 7523 7527 7531 7534 7538 7542 7546 7550 7553 7557 7561 7565 7568 7572 7576 7580 7583 7587 7591 7595 6 0 7299 7302 7306 7310 7314 7317 7321 7325 7329 7332 7336 7340 7344 7347 7351 7355 7359 7362 7366 7370 7374 7377 7381 7385 7389 7392 7396 7400 7404 7408 17411 7415 7419 7423 7426 7430 7434 7438 7441 7445 7449 7453 7456 7460 7464 7468 7471 7475 7479 7483 7486 7490 7494 7498 7501 7505 7509 7513 7516 7520 7524 7528 7531 7535 7339 7543 7546 7550 7554 7558 7562 7565 7569 7873 7577 7580 7584 7588 7592 7595 7399 6 5 7304 7307 7311 7315 7319 1322 7326 7330 7334 7337 7341 7345 7348 7352 7356 7360 7363 7367 7371 7375 7378 7382 7386 7390 7393 7397 7401 7405 7408 7412 7416 7420 7423 7427 7431 7435 7438 7442 7446 7450 7453 7457 7461 7465 7468 7472 7476 7480 7483
86. 7468 7473 7478 7483 7488 7493 26 95 7417 7422 7427 7432 7437 7442 7447 7453 7458 7463 7468 7473 7478 7483 7488 7493 7498 26 90 7421 27427 7432 7437 7442 7447 7452 7457 7462 7467 7472 7471 7482 7487 7492 7497 7502 26 85 7426 7431 7436 7442 7447 7452 7457 7462 7467 7472 7477 7482 7487 7492 7497 7502 7507 26 80 7431 7436 7441 7446 7452 7457 7462 7467 7472 7477 7482 7487 7492 7497 7502 7507 7512 26 75 7436 7441 7446 7451 7456 7461 7466 7472 7477 7482 7487 7492 7497 7501 7506 7511 7516 26 70 7441 7446 7451 7456 7461 7466 7471 7476 7481 7486 7491 7496 7501 7506 7511 7516 7521 26 65 7445 7450 7456 7461 7466 7471 7476 7481 7486 7491 7496 7501 7506 7511 7516 7521 7525 26 60 7450 7455 7460 7465 7471 7476 7481 7486 7491 7496 7501 7506 7511 7515 7520 7525 7530 26 55 7455 7460 7465 7470 7475 7480 7485 7490 7495 7500 7505 7510 7515 7520 7525 7530 7535 26 50 7460 7465 7470 7475 7480 7485 7490 7495 7500 7505 7510 7515 7520 7525 7530 7535 7539 26 45 7464 7470 7475 7480 7485 7490 7495 7500 7505 7510 7515 7520 7525 7529 7534 7539 7544 26 40 7469 7474 7479 7485 7490 7495 7500 7505 7510 7515 7519 7524 7529 7534 7539 7544 7549 26 35 7474 7479 7484 7489 7494 7499 7504 7509 7514 7519 7524 7529 7534 7539 7544 7549 7553 26 30 7479 7484 7489 7494 7499 7504 7509 7514 7519 7524 7529 7534 7539 7544 7548 7553 7558 26 25 7484 7489 7494 7499 7504 7509 7514 7519 7524 7529 7534 7538 7543 7548 7553 7558 7563 26 20 7488 7494 7499 7504 7509 7514 7519 7524 7528 7533 7538 7543 7548 7553 7558 7562
87. 7498 7503 7507 7512 7516 7521 7525 7530 7534 7539 7543 7548 7553 7557 7562 7566 7571 728 7501 7506 7511 7515 7520 7524 7529 7533 7538 7542 7547 7551 7556 7560 7565 7570 7574 727 7505 7509 7514 7518 7523 7528 7532 7537 7541 7546 7550 7555 7559 7564 7568 7573 7578 726 7508 7513 7517 7522 7526 7531 7536 7540 7545 7549 7554 7558 7563 7567 7572 7576 7581 725 7512 7516 7521 7525 7530 7534 7539 7543 7548 7553 7557 7562 7566 7571 7575 7580 7584 724 7515 7520 7524 7529 7533 7538 7542 7547 7551 7556 7560 7565 7569 7574 7579 7583 7588 723 7519 7523 7528 7532 7537 7541 7546 7550 7555 7559 7564 7568 7573 7577 7582 7586 7591 722 7522 7527 7531 7536 7540 7545 7549 7554 7558 7563 7567 7572 7576 7581 7585 7590 7594 721 7526 7530 7535 7539 7544 7548 7553 7557 7562 7566 7571 7575 7580 7584 7589 7593 7598 720 7529 7534 7538 7543 7547 7552 27556 7561 7565 7570 7574 7579 7583 7588 7592 7597 7601 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY J S 248 Laser and Optics User s Manual Vol Wavelength of Light Compensation 13 Table 39 Metric High Alt Low Temp High Humidity Temp 5 to 13 C Press 640 to 720 mm 80 Humidity A M U TEMPERATURE IN DEGREES CELSIUS 5 0 9 5 6 0 6 5 7 0 7 5 8 0 8 5 9 0 9 5 10 0 10 5 11 0 11 5 12 0 12 5 13 0 720 7290 7295 7300 7305 7310 7315 7320 7324 7329 7334 7339 7344 7349 7354 7358 7363 7368 719 7294 7299 7304 7309 7314 7318 7323 7328 7333 7338 7343 7348 7352 7357 1362 7367 7372 718 7297 7302 27307 7312 7317 7322
88. 75 7534 7539 7544 7549 7554 7559 7564 7569 7574 7579 7584 7589 7594 7598 7603 7608 7613 25 70 7539 7544 7549 7554 7559 7564 7569 7574 7519 7584 7589 7593 7598 7603 7608 7613 7618 25 65 7544 7549 7554 7559 7564 7569 7574 7578 7583 7588 7593 7598 7603 7608 7613 7617 7622 25 60 7548 7553 7558 7563 7568 7573 7578 7583 7588 7593 7598 7603 7608 7613 7617 7622 7627 25 55 7553 7558 7563 7568 7573 7578 7583 7588 7593 7598 7603 7607 7612 7617 7622 7627 7632 25 50 7558 7563 7568 7573 7578 7583 7588 7593 7598 7602 7607 7612 7617 7622 7627 7631 7636 25 45 7563 7568 7573 7578 7583 7588 7592 7597 7602 7607 7612 7617 7622 162 7631 7636 7641 25 40 7568 7573 7578 7582 7587 71592 7597 7602 7607 7612 7617 7622 7626 7631 7636 7641 7646 25 35 7572 7577 7582 7587 7592 7597 7602 7607 7612 7617 7621 7626 27631 7636 7641 7645 7650 25 30 7577 7582 7587 7592 7597 7602 7607 7612 7616 7621 7626 7631 7636 7641 7645 7650 7655 25 25 7582 7587 7592 7597 7602 7607 7611 7616 7621 7626 27631 7636 7640 7645 7650 7655 7659 25 20 7587 7592 7597 7602 7606 7611 7616 7621 7626 7631 7636 7640 7645 7650 7655 7659 7664 25 15 7592 7596 7601 7606 7611 7616 7621 7626 7631 7635 7640 7645 7650 7655 27659 7664 7669 25 10 7596 7601 7606 7611 7616 7621 7626 7631 7638 7640 7645 7650 7654 7659 7664 7669 7673 25 05 7601 7606 7611 7616 7621 7626 7630 7635 7640 7645 7650 7654 7659 7664 7669 7673 7678 25 90 7606 7611 7616 7621 7625 7630 7635 7640 7645 7650 7654 7559 7664 7669 7673 7678 7683 24 95 7611 7616 7620 7625
89. 7541 7546 7550 7554 7559 7563 7567 7572 7576 724 7510 7514 7519 7523 7527 7532 7536 7540 7545 7549 7553 7558 7562 7566 7571 7575 7579 723 7513 7518 7522 7527 7531 7535 7540 7544 7548 7553 7557 7561 7566 7570 7574 7578 7583 722 7517 7521 7526 7530 7534 7539 7543 7547 7552 7556 7560 7565 7569 7573 7578 7582 7586 721 7520 7525 7529 7533 7538 7542 7546 7551 7555 7559 7564 7568 7572 7571 1581 7585 7589 720 7524 7528 7533 7537 7541 7546 7550 7554 7558 7563 7567 7571 7576 7580 7584 7589 7593 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 240 Laser and Optics User s Manual Vol Table 31 Wavelength of Light Compensation Metric High Alt Low Temp Med Humidity Temp 5 to 13 C Press 640 to 720 mm 50 Humidity 13 720 719 718 717 716 718 714 713 712 711 710 709 708 707 706 705 704 703 702 701 700 699 698 697 696 695 694 693 692 691 690 689 688 687 686 685 684 683 682 681 680 679 678 677 676 675 674 673 672 671 670 669 668 667 666 665 664 663 662 661 660 659 658 657 656 655 654 653 652 651 650 649 648 647 646 645 644 643 642 641 640 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 5 0 7289 7293 7296 7300 7304 7308 7311 7315 7319 7323 7326 7330 7334 7338 7342 7345 7349 7353 7357 7360 7364 7368 7372 7375 7379 7383 7387 7391 7394 7398 7402 7406 7409 7413 7417 7421 7424 7428 7432 7436 7440 7443 7447 7451 7455 7458 7462
90. 7544 7549 7554 7559 7564 7569 7574 7579 26 05 7504 7509 7514 7519 7524 7529 7534 7539 7544 7549 7554 7559 7564 7569 7574 7578 7583 26 00 7509 7514 7519 7524 7529 7534 7539 7544 7549 7554 7559 7564 7568 7573 7578 7583 7588 25 95 7514 7519 7524 7529 7534 7539 7544 7549 7554 7558 7563 7568 7573 7578 7583 7588 7592 25 90 7518 7523 7528 7534 7538 7543 7548 7553 7558 7563 7568 7573 7578 7583 7588 7592 7597 25 85 7523 7528 7533 7538 7543 7548 7553 7558 7563 7568 7573 7578 7583 7587 7592 7597 7602 25 80 7528 7533 7538 7543 7548 7553 7558 7563 7568 7573 7577 7582 7587 7592 7597 7602 7606 25 75 7533 7538 7543 7548 7553 7558 7563 7568 7572 7577 7582 7587 7592 7597 7602 7606 7611 25 70 7538 7543 7548 7553 7558 7562 7567 7572 7577 7582 7587 7592 7597 7601 7606 7611 7616 25 65 7542 7547 7552 7557 7562 7567 7572 7577 7582 7587 7592 7596 7601 7606 7611 7616 7620 25 60 7547 7552 7557 7562 7567 7572 7577 7582 7587 7591 7596 7601 7606 7611 7615 7620 7625 25 55 7552 7557 7562 7567 7572 7577 7582 7586 7591 7596 7601 7606 761 7615 7620 7625 7630 25 50 7557 7562 7567 7572 7577 7581 7586 7591 7596 7601 7606 7611 7615 7620 7625 7630 7634 25 45 7562 7567 7571 27576 7581 7586 7591 7596 7601 7606 7610 7615 7620 7625 7629 7634 7639 25 40 7566 7571 7576 7581 7586 7591 7596 7601 7605 7610 7615 7620 7625 7629 7634 7639 7644 25 35 7571 7576 7581 7586 7591 7596 7601 7605 7610 7615 7620 7625 7629 7634 7639 7644 7648 25 30 7576 7581 7586 7591 7596 7600 7605 7610 7615 7620 7625 7629 7634 7639 76
91. 7573 684 7577 683 7580 682 7584 681 7587 680 7591 679 7594 678 7598 677 7601 676 7605 675 7609 674 7612 673 7616 672 7619 671 7623 670 7626 669 7630 668 7633 667 7637 666 7640 665 7644 664 7648 663 7651 662 7655 661 7658 660 7662 659 7665 658 7669 657 7672 656 7676 655 7680 654 7683 653 7687 652 7690 651 7694 650 7697 649 7701 648 7704 647 7708 646 7712 645 7715 644 7719 643 7722 642 7726 641 7729 640 7733 Laser and Optics User s Manual Vol 22 5 7453 7457 7460 7464 7467 7471 7474 7478 7482 7485 7489 7492 7496 7499 7503 7506 7510 7513 7517 7521 7524 7528 7531 7535 7538 7542 7545 7549 7552 7556 7560 7563 7567 7570 7574 757 7581 7584 7588 7591 7595 7599 7602 7606 7609 7613 7616 7620 7623 7627 7630 7634 7638 7641 7645 7648 7652 7655 7659 7662 7666 7669 7673 7677 7680 7684 7687 7691 7694 7698 7701 7705 7708 7712 7716 7719 7723 7726 7730 7733 7737 23 0 7458 7461 7465 7468 7472 7475 7479 7482 7486 7490 7493 7497 7500 7504 7507 7511 7514 7518 7521 7525 7528 7532 7536 7539 7543 7546 7550 7553 7557 7560 7564 7567 7571 7574 7578 7582 7585 7589 7592 7596 7599 7603 7606 7610 7613 7617 7620 7624 7628 7631 7635 7638 7642 7645 7649 7652 7656 7659 7663 7667 7670 7674 7677 7682 7684 7688 7691 7695 7698 7702 7705 7709 7713 7716 7720 7723 7727 7730 7734 7737 7741 23 5
92. 7577 7581 7586 7591 7595 7600 7605 27 55 7533 7538 7543 7548 7552 7557 7562 7567 7571 7576 7581 7586 7590 7595 7600 7605 7609 27 50 7538 7542 7547 27552 7557 7562 7566 7571 7576 7582 7585 7590 7595 7600 7604 7609 7614 27 45 7542 7547 7552 7556 7561 7566 7571 7576 7580 7585 7590 7594 7599 7604 7609 7613 7618 27 40 7547 7551 7556 7561 7566 7570 7575 7580 7585 7589 7594 7599 7604 7608 7613 7618 7622 27 35 7551 7556 7561 7565 7570 7575 7580 7584 7589 7594 7599 7603 7608 7613 7617 7622 7627 27 30 7556 7560 7565 7570 7575 7579 7584 7589 7594 7598 7603 7608 7612 7617 7622 7626 7631 27 25 7560 7565 27570 27574 27579 7584 7589 7593 7598 7603 7607 7612 7617 7621 7626 7631 7635 27 20 7564 7569 7574 7579 7584 7588 7593 7598 7602 7607 7612 7616 7621 7626 7630 7635 7640 27 15 7569 7574 7578 7583 7588 7593 7597 7602 7607 7612 7616 7621 7626 7630 7635 7639 7644 27 10 7573 7578 7583 7588 7592 7597 7602 7607 7611 7616 7621 7625 7630 7635 7639 7644 7648 27 05 7578 7583 7587 7592 7597 7602 7606 7611 7616 7620 7625 7630 7634 7639 7644 7648 7653 27 00 7582 7587 7592 7597 7601 7606 7611 7615 7620 7625 7629 7634 7639 7643 7648 7653 7657 264 Laser and Optics User s Manual Vol BAROMETRIC PRESSURE IN INCHES OF MERCURY 28 30 28 25 28 10 28 05 28 00 27 95 27 90 27 85 27 80 27 75 27 70 27 65 27 60 27 55 27 50 27 45 27 40 27 35 27 30 27 25 27 20 27 15 27 10 27 05 27 00 91 0 7314 7318 7323 7327 7331 7336 7340 7344 7349 7353 7357 7362 7366
93. 7580 7584 7589 7593 7598 7602 7607 7611 716 7543 7547 7552 7556 7561 7565 7570 7574 7579 7583 7588 7592 7597 7601 7606 7610 7615 715 7346 7551 7555 7560 7564 7569 7573 7578 7582 7587 7591 7595 7600 7604 7609 7613 7618 714 7550 7554 7559 7563 7568 7572 7577 7581 7585 7590 7594 7599 7603 7608 7612 7617 7621 713 1553 7558 7562 27567 7571 7575 7580 7584 7589 7593 7598 7602 7607 7611 7616 7620 7625 712 1557 7561 7566 7570 7574 7579 7583 7588 7592 7597 7601 7606 7610 7615 7619 7623 7628 711 7560 7565 7569 7573 7578 7582 7587 7591 7596 7600 7605 7609 7613 7618 7622 2762 7631 710 7564 7568 7572 7577 7581 7586 7590 27595 7599 7604 7608 7612 7617 7621 7626 7630 27635 709 7567 7571 7576 7580 7585 7589 7594 7598 7602 7607 7611 7616 7620 7625 7629 7634 7638 708 7570 7575 7579 7584 7588 7593 7597 7601 7606 7610 7615 7619 7624 7628 7633 7637 7641 707 7574 7578 7583 7587 7592 7596 7600 7605 7609 7614 7618 7623 7627 7631 7636 7640 7645 706 7577 7582 7586 7591 7595 7599 7604 7608 7613 7617 7622 7626 7630 7635 7639 7644 7648 705 1581 7585 7590 7594 7598 7603 7607 7612 7616 7621 7625 7629 7634 7638 27643 7647 7652 704 7584 7589 7593 7597 7602 7606 7611 7615 7620 7624 7628 7633 7637 7642 7646 7650 7655 703 7588 7592 7597 7601 7605 7610 7614 7619 7623 7627 7632 7636 7641 7645 27649 7654 7658 702 7591 7596 7600 7604 7609 7613 7618 7622 7626 7631 7635 7640 7644 7648 7653 7657 7662 701 7595 7599 7603 7608 7612 7617 7621 7625 7630 7634 7639 7643 7647 7652 7656 7661 7665 700 7598 760
94. 7602 7606 7610 7615 7619 7623 7627 7632 7636 7640 664 7575 7580 7584 7588 7593 7597 7601 7606 7610 7614 7618 7622 7627 7631 7635 7639 7643 663 7579 7583 7588 7592 7596 7601 7605 7609 7613 7618 7622 7626 7630 7634 7639 7643 7647 662 7583 7587 7591 7596 7600 7604 7609 7613 7617 7621 7625 7630 7634 7638 7642 7646 7651 661 7586 7591 7595 7599 7604 7608 7612 7616 7621 7625 7629 7633 7637 7642 7646 7650 7654 660 7590 7594 7599 7603 7607 7611 7616 7620 7624 7628 7633 7637 7641 7645 7649 7654 7658 659 7594 7598 7602 7607 7611 7615 7619 7624 7628 7632 7636 7640 7645 7649 7653 7657 7661 658 7597 7602 7606 7610 7615 7619 7623 7627 7631 7636 7640 7644 7648 7652 7656 7661 7665 657 7601 7605 7610 7614 7618 7622 7627 7631 7635 7639 7643 7648 7652 7656 7660 7664 7668 656 7605 7009 7613 7618 7622 7626 7630 7634 7639 7643 7647 7651 7655 7659 7664 7668 7672 655 7608 7613 7617 7621 7625 7630 7634 7638 7642 7646 7651 7655 7659 7663 7667 7671 7675 654 7612 7616 7621 7625 7629 7633 7637 7642 7646 7650 7654 7658 7663 7667 7671 7675 7679 653 7616 7620 7624 7628 7633 7637 7641 7645 7649 7654 7658 7662 7666 7670 7674 7678 7683 652 7619 7624 7628 7632 7636 7641 7645 7649 7653 7657 7661 7666 7670 7674 7678 7682 7686 651 7623 7627 7631 7636 7640 7644 7648 7653 7657 7661 7665 7669 7673 7677 7681 7686 7690 650 7627 7631 7635 7639 7644 7648 7652 7656 7660 7664 7669 7673 7677 7681 7685 7689 7693 649 7630 7635 7639 7643 7647 7651 7656 7660 7664 7668 7672 7676 7680 7685 7689 7693 7697 648 763
95. 7630 7635 7640 7645 7649 7654 7659 7564 7665 7673 7678 7683 7687 24 90 7616 7620 7625 7630 7635 7640 7645 7649 7654 71659 7664 7668 7673 7678 7683 7687 7692 24 85 7620 7625 7630 7635 7640 7645 7649 7654 7659 7664 7668 7673 7678 7683 7687 7692 7697 24 80 7625 7630 7635 7640 7644 7649 7654 7659 7664 7668 7673 7678 7683 7687 7692 7697 7701 24 75 7630 7635 7640 7644 7649 7654 7659 7664 7668 7673 7678 7683 7687 7692 7697 7701 7706 24 70 7635 7640 7644 7649 7654 7659 7664 7668 7673 7678 7683 7687 7692 7697 7702 7706 7711 24 65 7639 7644 7649 7654 7659 7664 7668 7673 7678 7683 7687 7692 7697 7701 77106 7711 7715 24 60 7644 7649 7654 7659 7664 7668 7673 7678 7683 7687 7692 7697 7701 7706 7711 7715 7720 24 55 7649 7654 7659 7664 7668 7673 7678 7683 7687 7692 7697 7701 7706 7711 7718 7720 7725 24 50 7654 7659 7663 7668 7673 7678 7683 7687 7692 7697 7701 7706 771 7715 7720 7725 7729 24 45 7659 7663 7668 7673 7678 7683 7687 7692 7697 7701 7706 771i 7715 7720 7725 7729 7734 24 40 7663 7668 7673 7678 7683 7687 27692 7697 7701 7706 1711 7715 7720 7725 7729 7734 7738 24 35 7668 7673 7678 7683 7687 7692 7697 7701 7706 7711 7715 7720 7725 1129 7734 7739 7743 24 30 7673 7678 7683 7687 7692 7697 7701 7706 7711 7716 31720 7725 1129 7734 7739 7743 7748 24 23 7678 7683 7687 7692 7697 7702 7706 7711 7716 7720 7725 7729 7134 7139 7743 7748 7752 24 20 7683 7687 7692 7697 7702 7706 7711 27716 7720 37725 1730 7734 1139 7743 7748 7752 7757 24 15 7687 7692 7697 7702 7706 7711 7716 77
96. 7643 7648 7653 7657 26 95 7587 7592 7596 7601 7606 7610 7615 7620 7625 7629 7634 7638 7643 7648 7652 7657 7662 26 90 7591 7596 7601 7606 7610 7615 7620 7624 7629 7634 7638 7643 7647 7652 7657 7661 7666 26 85 7596 7601 7605 7610 7615 7619 7624 7629 7633 7638 7643 7647 7652 7656 7661 7666 7670 26 80 7600 7605 7610 7614 7619 7624 7628 7633 7638 7642 7647 7652 7656 7661 7665 7670 7675 26 75 7605 7610 7614 7619 7624 7628 7633 7638 7642 7647 7651 7656 7661 7665 7670 7674 7679 26 70 7609 7614 7619 7623 7628 27633 7637 7642 7647 7651 7656 7660 7665 7670 7674 7679 7683 26 65 7614 7619 7623 7628 7633 7637 7642 7646 7651 7656 7660 7665 7669 7674 7679 7683 7688 26 60 7618 7623 7628 7632 7637 7642 7646 7651 7655 7660 7665 7669 7674 7678 7683 7687 7692 26 55 7623 7627 7632 7637 7641 7646 27651 7655 7660 7664 7669 7674 7678 7683 7687 7692 7696 26 50 7627 7632 7637 7641 7646 7651 7655 7660 7664 7669 7673 7678 7683 7687 7692 7696 17701 26 45 7632 7636 7641 7646 7650 7655 7660 7664 7669 7673 7678 7682 7687 7692 7696 7701 7705 26 40 7636 7641 7646 7650 7655 7659 7664 7669 7673 7678 7682 7687 7691 7696 7700 7705 7709 26 35 7641 7645 7650 7655 7659 7664 7668 7673 7678 7682 7687 7691 7696 7700 7705 7709 7714 26 30 7645 7650 7655 7659 7664 7668 7673 7677 7682 7687 7691 7696 7700 7705 7708 7714 7718 26 25 7650 7654 7659 7664 7668 27673 7677 7682 7686 7691 7695 7700 7705 7709 7714 7718 7723 26 20 7654 7659 7663 7668 7673 7677 7682 7686 7691 7695 7700 7704 7709 7713 7718 7722 7727 26
97. 7653 7657 7661 7665 7670 7674 7678 7682 7687 7691 7695 7699 7704 7708 7712 103 0 7376 7381 7385 7389 7393 7398 7402 7406 7410 7415 7419 7423 7427 7432 7436 7440 7444 7449 7453 7457 7461 7466 7470 7474 7478 7483 7487 7491 7496 7500 7504 7508 7513 7517 7521 7525 7530 7534 7538 7542 7547 7551 7555 7559 7564 7568 7572 7576 7581 7585 7589 7593 7598 7602 7606 7610 7615 7619 7623 7627 7632 7636 7640 7644 17649 7653 7657 7661 7666 7670 7674 7678 7683 7687 7691 7696 7700 71704 7708 71313 7717 104 0 7382 7386 7390 7394 7399 7403 7407 7411 7416 7420 7424 7428 7433 7437 7441 7445 7450 7454 7458 7462 7467 7471 7475 7479 7483 7488 7492 7496 7500 7505 7509 7513 7517 7522 7526 7530 7534 7539 7543 7547 7551 7556 7560 7564 7568 7573 7577 7581 7585 7590 7594 7598 7602 7607 7611 7615 7619 7624 7628 7632 7636 7641 7645 7649 7653 7658 7662 7666 7670 7675 7679 7683 7687 7692 7696 7700 7704 7709 7713 7717 7721 105 0 7387 7391 7395 7399 7404 7408 7412 7416 7421 7425 7429 7433 7438 7442 7446 7450 7455 7459 7463 7467 7472 7476 7480 7484 7488 7493 7497 7501 7505 7510 7514 7518 7522 7527 7531 7535 7539 7544 7548 7552 7556 7561 7565 7569 7573 7578 7582 7586 7530 7595 7599 7603 7607 7611 7616 7620 7624 7628 7633 7637 7641 7645 7650 7654 7658 7662 7667
98. 7670 7674 7678 7682 7686 7690 7694 648 7632 7636 7640 7644 7649 7653 7657 7661 7665 7669 7673 7677 7681 27685 7689 7693 7697 647 7636 7640 7644 7648 7652 7656 7660 7665 7669 1673 7677 7681 7685 7689 7693 7687 7701 646 7639 7643 7648 7652 7656 7660 7664 7668 7672 7676 7680 7684 7688 7692 7696 7700 7704 645 7643 7647 7651 7655 7660 7664 7668 7672 7676 7680 7584 7688 7692 7696 7700 7704 7708 644 7647 7651 7655 7659 7663 7667 7671 7675 7679 7683 7688 7692 7696 7700 7704 7707 Tni 643 7650 7654 7659 7663 27667 7671 7675 7679 7683 7687 7692 7695 7699 7703 7707 7711 7715 642 7654 7658 7662 7666 27670 7674 7679 7683 7687 7691 7695 7699 7703 7707 7711 7715 7719 641 7658 7662 7666 7670 7674 7678 7682 7686 7690 7694 7698 7702 7706 7710 7714 7718 7722 640 7661 7665 7669 7674 7678 7682 7686 7690 7694 7698 7702 7706 7710 7714 7718 7722 11726 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 234 Laser and Optics User s Manual Vol idity Table 25 Metric High Alt Mid Temp Low Humi u Temp 22 to 30 C Press 640 to 720 mm 20 Humidity Wavelength of Light Compensation 13 eee TEMPERATURE IN DEGREES CELSIUS 720 719 718 717 716 715 714 713 712 711 710 709 708 707 706 705 704 703 702 701 700 699 698 697 696 695 694 693 692 691 690 689 688 687 686 685 684 683 682 681 680 679 678 677 676 675 674 673 672 671 670 669 668 667 666 665 664 663 662 661 660 659 658 657 656 655 654 653 652 651 6
99. 7671 7675 7679 7684 7688 7692 7696 7701 7705 7709 7713 7717 7722 7726 13 106 0 107 0 7392 7397 7396 7401 7400 7406 7405 7410 7409 7414 7413 7418 7417 7422 7422 7427 7426 7431 7430 7435 7434 7439 7438 7444 7443 7448 7447 7452 7451 7456 7455 7460 7460 7465 7464 7469 7468 7473 7472 7477 7477 7482 7481 7486 7485 7490 7489 7494 7493 7498 7498 7503 7502 7507 7506 7511 7510 7515 7515 7520 7519 7524 7523 7528 7527 7532 7532 7537 7536 7541 7540 7545 7544 7549 7549 7553 7553 7558 7557 7562 7561 7566 7565 7570 7570 7575 7574 7579 7578 7583 7582 7587 7587 7591 7591 7596 7595 7600 7599 7604 7604 7608 7608 7613 7612 7617 7616 7621 7620 7625 7625 7629 7629 7634 7633 7638 7637 7642 7642 7646 7646 7651 7650 7655 7654 7659 7659 7663 7663 7668 7667 7672 7671 7676 7675 7680 7680 7684 7684 7689 7688 7693 7692 7697 7697 7701 7701 7706 7705 7710 7709 7714 7714 7718 7718 7722 7722 7727 77126 7731 7731 7735 265 13 Wavelength of Light Compensation Table 56 English High Alt Low Temp Med Humidity Temp 40 to 56 F Press 23 to 27 inches 50 Humidity Eee TEMPERATURE IN DEGREES FAHRENHEIT 40 0 41 0 42 0 43 0 44 0 45 0 46 0 47 0 48 0 49 0 50 0 51 0 52 0 53 0 54 0 55 0 56 0 27 00 7413 7418 7423 7429 7434 7439 7444 7449 7454 7460 7465 7470 7475 7480 7485 7490 7495 26 95 7418 7423 7428 7433 7439 7444 7449 7454 7459 7464 7469 7474 27480 7485 7490 7495 7500 26 90 7423 7428 7433 74
100. 769 768 767 766 765 764 763 762 761 760 759 758 757 756 755 754 753 752 751 750 749 748 747 746 745 744 743 742 741 740 739 738 737 736 735 734 733 732 731 730 729 728 727 726 725 724 723 722 721 720 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 5 0 6987 6991 6995 6998 7002 7006 7010 7014 7017 7021 7025 7029 7032 7036 7040 7044 7047 7051 7055 7059 7063 7066 7070 7074 7078 7081 7085 7089 7093 7096 7100 7104 7108 7112 7115 7119 7123 7127 7130 7134 7138 7142 7145 7149 7153 7157 7161 7164 7168 7172 7176 7179 7183 7187 7191 7195 7198 7202 7206 7210 7213 7217 7221 7225 7228 7232 7236 7240 7244 7247 7251 7255 7259 7262 7266 7270 7274 7277 7281 7285 7289 Wavelength of Light Compensation Table 27 Metric Low Alt Low Temp Med Humidity Temp 5 to 13 C Press 720 to 800 mm 50 Humidity 5 5 6993 69926 7000 7004 7008 7011 7015 7019 7023 7027 7030 7034 7038 7042 7045 7049 7053 7057 7060 7064 7068 7072 7075 7079 7083 7087 7090 7094 7098 7102 7106 7109 7113 7117 7121 7124 7128 7132 7136 7139 7143 7147 7151 7154 7158 7162 7166 7170 7173 7177 7181 7185 7188 7192 7196 7200 7203 7207 7211 7215 7218 7222 7226 7230 7233 7237 7241 7245 7249 7252 7256 7260 7264 7267 7271 7275 7279 7282 7286 7290 7294 6 0 6998 7002 7006 7009 7013 7017 7021 7024 702
101. 7702 7706 7709 7712 7716 7719 7723 7726 7730 7133 7737 7740 7744 7747 7751 7754 7758 7761 7764 7768 7771 7775 7778 7182 7785 7789 7792 30 0 7519 7526 7530 243 13 Wavelength of Light Compensation Table 34 Metric High Alt High Mid Temp Med Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 50 Humidity RA A L TEMPERATURE IN DEGREES CELSIUS 30 5 31 0 31 5 32 0 32 5 33 0 33 5 34 0 34 5 35 0 35 5 36 0 36 5 37 0 37 5 38 0 38 5 720 1524 7528 7533 7537 1541 7546 7550 7554 7558 7563 7567 7571 7576 7580 7584 7589 7593 719 7527 7532 7536 7540 7545 7549 7553 7558 7562 7566 7570 1575 7579 7583 7588 7592 7596 718 7531 7535 7539 7544 7548 7552 7557 7561 7565 7570 7574 1578 7582 7587 7591 7595 7600 717 7534 7539 7543 7547 7551 7556 7560 7564 7569 7573 7577 7582 7586 7590 7594 7599 7603 716 7538 7542 7546 7551 7555 7559 7563 7568 7572 7576 7581 7585 7589 7593 7598 7602 7606 715 7541 7545 7550 7554 7558 7563 7567 7571 7575 7580 7584 7588 7593 7597 7601 7605 7610 714 7545 7549 7553 7557 7562 7566 7570 7575 7579 7583 7587 7592 7596 7600 7604 7609 7613 713 7548 7552 7557 7561 7565 7569 7574 7578 7582 7587 7591 7595 7599 7604 7608 7612 7616 712 7551 7556 7560 7564 7569 7573 7577 7581 7586 7590 7594 7598 7603 7607 7611 7615 7620 711 7555 7559 7563 7568 7572 7576 7581 7585 7589 7593 7598 7602 7606 7610 7615 7619 7623 710 7558 7563 7567 7571 7575 7580 7584 7588 7593 7597 7601 7605 7610 7614 7618 7622 7626 709 7562 7566
102. 7711 101 0 7374 7379 7383 7387 7391 7396 7400 7404 7408 7413 7417 7421 7426 7430 7434 7438 7443 7447 7451 7455 74 0 7464 7468 7473 7477 7481 7485 7490 7494 7498 7502 7507 7511 7515 7519 7524 7528 7532 7537 7541 7545 7549 7554 7558 7562 7566 7571 7575 7579 7584 7588 7592 7596 7601 7605 7609 7613 7618 7622 7626 7631 7635 7639 7643 7648 7652 7656 7660 7665 7669 7673 7677 7682 7686 7690 7695 7699 7703 7707 7712 7716 102 0 103 0 7380 7385 7384 7389 7388 7394 7393 7398 7397 7402 7401 7406 7405 7411 7410 7415 7414 7419 7418 7424 7422 7428 7427 7432 7431 7436 7435 7441 7439 7445 7444 7449 7448 7453 7452 7458 7456 7462 7461 7466 7465 7470 7469 7475 7474 7479 7478 7483 7482 7487 7486 7492 7491 7496 7495 7500 7499 7504 7503 7509 7508 7513 7512 7517 7516 7521 7520 7526 7525 7530 7529 7534 7533 7538 7537 7543 7542 7547 7546 7551 7550 7555 7555 7560 7559 7564 7563 7568 7567 7572 7872 7577 7576 7581 7580 7585 7584 7589 7589 7594 7593 7598 7597 7602 7601 7606 7606 7611 7610 7615 7614 7619 7618 7624 7623 7628 7627 7632 7631 7636 7636 7641 7640 7645 7644 7649 7648 7653 7653 7658 7657 7662 7661 7666 7665 7670 7670 7675 7674 7679 7678 7683 7682 7687 7687 7692 7691 7696 7695 7700 7699 7704 7704 7709 7708 7713 7712 7717 7717 7721 7721 7726 104 0 7391 7395 7399 7403 7408 7412 7416 7420 7425 7429 7433 7437 7442
103. 7717 7722 7726 7731 7736 7740 7745 7749 7754 7759 7763 25 80 7694 7698 7703 7708 7712 7717 7721 7726 7731 7735 7740 7745 7749 7754 7758 7763 7768 25 75 7698 7703 7707 7712 7717 7721 7726 371731 7735 7740 7744 7749 7754 7758 7763 7767 7772 25 70 7703 7707 7712 7717 7721 7726 7730 7735 7740 7744 7749 7753 7758 7763 7767 7772 7776 25 65 7707 7712 7716 7721 7726 7730 7735 7739 7744 7749 7753 7758 1762 776 7771 7776 7781 25 60 7712 7716 7721 7725 7730 7735 7739 7744 7748 7753 7758 7762 7767 777 7776 7780 7785 25 55 7716 7721 7725 7730 7734 7739 7744 7748 7753 7757 7762 7767 7771 71716 7780 7785 7789 25 50 7721 7725 7730 7734 7739 7744 7748 317753 7757 7762 7766 7771 7775 7780 7785 7789 7794 25 45 7725 7730 7734 7739 7743 7748 7753 7757 7762 7766 7771 7775 7780 7784 7789 7794 7798 25 40 7730 7734 7739 7743 7748 7752 7757 7762 7766 7771 7775 7780 7784 7789 7793 7798 7802 25 35 7734 7739 7743 7748 7752 7757 7761 1766 7771 7775 31780 7784 7789 7793 7798 7802 7807 25 30 7739 7743 7748 7752 7757 7761 7766 7770 7775 7779 7784 7789 7793 7798 7802 7807 7811 25 25 7743 7748 7752 7757 7761 7766 7770 7775 7779 7784 7788 7793 7797 7802 7806 7811 7815 25 20 7748 7752 7757 7761 7766 7770 7775 7779 7784 7788 7793 7797 7802 7806 7811 7815 7820 25 15 7752 7757 7761 7766 7770 7775 7779 7784 7788 7793 1797 3802 7806 7811 7815 7820 7824 25 10 7756 7761 7766 27710 7775 7779 7784 7788 7793 7791 7802 7806 7811 7815 7820 7824 7829 25 05 7761 7765 7770 7775 T7779 7784 7788 7793 7197 7802
104. 7850 7854 7858 7862 7866 7871 24 50 7807 7811 7815 7820 7824 7828 7833 7837 7841 7845 7850 7854 7858 7862 7867 7871 7875 24 45 7811 7816 7820 7824 7829 7833 7837 7841 7846 7850 7854 7858 7863 7867 7871 7875 7879 24 40 7816 7820 7824 7829 7833 7837 7842 7846 7850 7854 7858 7863 7867 7871 7875 7880 7884 24 35 7820 7825 7829 7833 7837 7842 7846 7850 7854 7859 7863 7867 7871 7876 7880 7884 7888 24 30 7825 7829 7833 7838 7842 7846 7850 7855 7859 7863 7867 7871 7876 7880 7884 7888 7892 24 25 7829 7834 7838 7842 7846 7851 7855 7859 7863 7867 7872 7876 7880 7884 7888 7893 7897 24 20 7834 7838 7842 7847 7851 7855 7859 7863 7868 7872 7876 7880 7884 7889 7893 7897 7901 24 15 7838 7843 7847 7851 7855 7859 7864 7868 7872 7876 7880 7885 7889 7893 7897 7901 7906 24 10 7843 7847 7851 7855 7860 7864 7868 7872 7877 7881 7885 7889 7893 7897 7902 7906 7910 24 05 7847 7851 7856 7860 7864 7868 7873 7877 7881 7885 7889 7893 7898 7902 7906 7910 7914 24 00 7852 7856 7860 7864 7869 7873 7877 7881 7885 7890 7894 7898 7902 7906 7910 7914 7919 23 95 7856 7860 7865 7869 7873 7877 7881 7886 7890 7894 7898 7902 7906 7911 7915 7919 7923 23 90 7861 7865 7869 7873 7878 7882 7886 7890 7894 7898 7903 7907 7911 7915 7919 7923 7927 23 85 7865 7869 7874 7878 7882 7886 7890 7894 7899 7903 7907 7911 7915 7919 7923 7928 7932 23 80 7870 7874 7878 7882 7886 7891 7895 7899 7903 7907 7911 7915 7920 7924 7928 7932 7936 23 75 7874 7878 7883 7887 7891 7895 7899 7903 7907 7912 7916 7920 7924 7928 7932 7936 79
105. 7896 7900 65 0 7539 7544 7548 7553 7557 7562 7567 7571 7576 7580 7585 7589 7594 7599 7603 7608 7612 7617 7621 7626 7631 7635 7640 7644 7649 7653 7658 7662 7667 7672 7676 7681 7685 7690 7694 7699 7704 7708 7713 7717 7122 7726 7731 7736 7740 7745 7749 7754 7758 7763 7768 7712 7777 7781 7786 7790 7795 7799 7804 7809 7813 7818 7822 7827 7831 7836 7841 7845 7850 7854 7859 7863 7868 7873 7877 7882 7886 7891 7895 7900 7904 66 0 7544 7549 7553 7558 7562 7567 7571 7576 7581 7585 7590 7594 7599 7603 7608 7612 7617 7622 7626 7631 7635 7640 7644 7649 7653 7658 7663 7667 7672 7676 7681 7685 7690 7694 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7745 7749 7754 7758 7763 7767 7772 7776 7781 7786 7190 7795 7799 7804 7808 7813 7817 7822 7827 7831 7836 7840 7845 7849 7854 7859 7863 7868 7872 7877 7881 7886 7890 7895 7900 7904 7909 67 0 7549 7553 7558 7563 7567 7572 7576 7581 7585 7590 7594 7599 7603 7608 7613 7617 7622 7626 7631 7635 7640 7644 7649 7654 7658 7663 7667 7672 7676 7681 7685 7690 7694 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 7749 7754 7758 7763 7767 7772 7776 7781 7785 7790 7795 7799 7804 7808 7813 7817 7822 7826 7831 7835 7840 7845 7849 7854 7858 7863 7867 7872 7876 7881 7885 7890 7895 7899 7904 7908 7913
106. 7917 7521 7525 7528 7532 7536 7539 7543 7547 7550 7554 7558 7561 7565 7569 7572 7576 7580 7583 7587 7591 7594 7598 7602 7605 7609 7613 7616 7620 7624 7627 7631 7635 7638 7642 7646 7649 7653 13 0 7364 7368 7371 7375 7379 7382 7386 7390 7393 7397 7401 7404 7408 7412 7415 7419 7423 7426 7430 7434 7437 7441 7445 7448 7452 7456 7459 7463 7467 7470 7474 7418 7481 7485 7489 7492 7496 7500 7503 7507 7511 7514 7518 7522 7525 7229 7533 7536 7540 7544 7547 7551 7555 7558 7562 7566 7569 7573 7577 7580 7584 7588 7591 7595 7599 7602 7606 7609 7613 7617 7620 7624 7628 7631 7635 7639 7642 7646 7650 7653 7657 13 233 13 Wavelength of Light Compensation Table 24 Metric High Alt Low Mid Temp Low Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 20 Humidity o_o eee TEMPERATURE IN DEGREES CELSIUS 13 5 14 0 14 5 15 0 15 5 16 0 16 5 17 0 17 5 18 0 18 5 19 0 19 5 20 0 20 5 21 0 21 5 720 1369 7373 7378 7383 7387 7392 7396 7401 7405 7410 7414 7419 7423 7428 7432 7437 7441 719 7372 7377 7382 7386 7391 27395 7400 7404 23408 7413 7418 7422 7427 7431 7436 7440 7445 718 7376 7381 7385 7390 7394 7399 7404 7408 7413 7417 7422 7426 7430 7435 7439 7444 7448 7217 7380 7384 7389 7393 7398 7403 7407 7412 7416 7422 7425 7430 7434 7439 7443 7447 7452 716 7383 7388 7393 7397 7402 7406 7411 7415 7420 7424 7429 7433 7438 7442 7447 745 7455 715 7387 7
107. 7922 7926 7931 7935 7939 7944 7948 7952 7956 7961 7965 7969 7974 7978 7982 7986 7991 7995 7999 8004 8008 8012 8016 8021 8025 8029 8034 100 0 7695 7699 7704 7708 7712 7716 7721 7725 7729 7734 7738 7742 7746 7751 7755 7759 7764 7768 7772 77176 7181 7785 7789 7793 7798 7802 7806 7811 7815 7819 7823 7828 7832 7836 7841 7845 7849 7853 7858 7862 7866 7870 7875 7879 7883 7888 7892 7896 7900 7905 7909 7913 7918 7922 7926 7930 7935 7939 7943 7947 7952 7956 7960 7965 7969 7973 7977 7982 7986 7990 7995 7999 8003 8007 8012 8016 8020 8024 8029 8033 8037 101 0 102 0 7699 7704 7708 7712 7716 7721 7725 7729 7734 7738 7742 7746 7751 7755 7759 7763 7768 7772 7776 7781 7785 7789 7793 7798 7802 7806 7810 7815 7819 7823 7827 7832 7836 7840 7845 7849 7853 7857 7862 7866 7870 7874 7879 7883 7887 7892 7896 7900 7904 7909 7913 7917 7921 7926 7930 7934 7939 7943 7947 7951 7956 7960 7964 7968 7973 7977 7981 7985 7990 7994 7998 8003 8007 8011 8015 8020 8024 8028 8032 8037 8041 71704 7708 7712 7716 7121 7725 7129 7734 7738 7742 7746 7751 7155 7759 7763 7768 7772 7776 7780 7785 7789 7793 7797 7802 7806 7810 7815 7819 7823 7827 7832 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874 7878 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 7925 7930 7934 793
108. 7930 7930 7935 7934 7939 7939 7943 7943 7947 7947 7952 7951 7956 7956 7960 7960 7964 7964 7969 7968 7973 7973 7977 7977 7981 7981 7986 7985 7990 7990 7994 7994 7998 7998 8002 8002 8007 8007 8011 8011 8015 8015 8019 8019 8024 8024 8028 8028 8032 8032 8036 8036 8041 8041 8045 8045 8049 8049 8053 8053 8058 B058 8062 8062 8066 8066 8070 8070 8075 107 0 7745 7749 7754 7758 7762 7766 7770 7775 7779 7783 7787 7792 7796 7800 7804 7809 7813 7817 7821 7825 7830 7834 7838 7842 7847 7851 7855 7859 7863 7868 7872 7876 7880 7885 7889 7893 7897 7901 211 13 Wavelength of Light Compensation 278 Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 14 Material Expansion Coefficients Linear Thermal Expansion Coefficients of Metals and Alloys 280 RE Agilent Technologies 219 14 Material Expansion Coefficients Linear Thermal Expansion Coefficients of Metals and Alloys 280 Table 68 provides the linear thermal expansion coefficients of the most frequently used metals and allows Table 68 Linear thermal expansion coefficients of metals and alloys ALUMINUM AND ALUMINUM ALLOYS Aluminum 99 996 Wrought Alloys EC 1060 and 1100 2011 and 2014 2024 2218 3003 4032 5005 5050 and 5052 5056 5083 5086 5154 5357 5456 6061 and 6063 6101 and 6151 7075 7090 and 7178 Coefficient of Expansion ppm C ppm
109. 7988 7992 7996 8001 8005 8009 8014 Table 59 English High Alt High Mid Temp Med Humidity Wavelength of Light Compensation 1 Temp 91 to 107 F Press 23 to 27 inches 50 Humidity eee 93 0 7671 7675 7680 7684 7688 7714 7719 7727 7732 7736 7740 7745 7749 7753 7758 7762 7766 7771 7735 7779 7784 7788 7792 7797 7801 7805 7810 7814 7818 7823 7827 7831 7836 7840 7844 7849 7853 7857 7862 7866 7870 7875 7879 7883 7888 7892 7896 7901 7905 7909 7914 7918 7922 7927 7931 7935 7940 7944 7948 7953 7957 7961 7966 7970 7974 7979 7983 7987 7992 7996 8000 8005 8009 8013 8018 94 0 7676 7680 7684 7689 7693 7697 7702 7706 7710 7715 7719 7723 7727 7732 7736 7740 7745 71749 7753 7758 7762 7766 7771 7775 7779 7784 7788 7792 7797 7801 7805 7810 7814 7818 7823 7827 7831 7836 7840 7844 95 0 7680 7684 7689 7693 7697 7702 7706 7710 7715 7719 7723 7728 7732 7736 77421 7745 7749 7754 7758 7762 7767 7771 7775 7779 7784 71788 7792 7797 7801 7805 7810 7814 7818 7823 7827 7831 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874 7879 7883 7887 7892 7896 7900 7905 7909 7913 7918 7922 7926 7931 7935 7939 7944 7948 7952 7956 7961 7965 7969 7974 7978 7982 7987 7991 7995 8000 8004 8008 8013 8017 8021 8026 Laser and Optics User s Manual Vol TEMPERATURE IN DEGREES FAHRENHE
110. 8002 8006 8011 8015 8019 8023 8028 8032 8036 8040 8045 8049 8053 7717 7721 7725 7730 7734 7738 7742 7747 7751 7755 7759 71764 7768 7772 7776 7781 7785 7789 7793 7798 7802 7806 7810 7815 7819 7823 7827 7832 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874 7878 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 7925 7930 7934 7938 7942 7947 7951 7955 7959 7964 7968 7972 7976 7981 7985 7989 7993 7998 8002 8006 8010 8015 8019 8023 8027 8032 8036 8040 8044 8049 8053 8057 7721 7126 7730 7734 7738 7743 7747 7751 7755 7760 7764 7768 7772 7777 7781 7785 7789 7794 7798 7802 7806 7811 7815 7819 7823 7828 7832 7836 7840 7845 7849 7853 7857 7862 7866 7870 7874 7879 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 7925 7930 7934 105 0 7726 7730 7734 7739 7143 7747 7751 7756 7760 7764 7768 7773 7777 7781 7785 7790 7794 7798 7802 7807 7811 7819 7823 106 0 7731 7735 7739 7743 7147 7752 7756 7760 7764 7769 7773 77717 7781 7786 7790 7794 7798 7802 7807 7811 7815 7819 7824 7828 7832 7836 7841 7845 7849 7853 7857 7862 7866 7870 7874 7879 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 7925 7929 7934 7938 7942 7946 7951 7955 7959 7963 107 7735 7739 7744 7748 7752 7756 7760 7765 7769 7773 7777 7782 7786 7790 7794 7798 7803 7807 7811 7
111. Alt Low Mid Temp Med Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 50 Humidity 242 Table 33 Metric High Alt Mid Temp Med Humidity Temp 22 to 30 C Press 640 to 720 mm 50 Humidity 243 Table 34 Metric High Alt High Mid Temp Med Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 50 Humidity 244 Table 35 Metric Low Alt Low Temp High Humidity Temp 5 to 13 C Press 720 to 800 mm 80 Humidity 245 Table 36 Metric Low Alt Low Mid Temp High Humidity Temp 13 5 to 21 5 C Press 720 to 800 mm 80 Humidity 246 Table 37 Metric Low Alt Mid Temp High Humidity Temp 22 to 30 C Press 720 to 800 mm 80 Humidity 247 Table 38 Metric Low Alt High Mid Temp High Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 80 Humidity 248 Table 39 Metric High Alt Low Temp High Humidity Temp 5 to 13 C Press 640 to 720 mm 80 Humidity 249 Table 40 Metric High Alt Low Mid Temp High Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 80 Humidity 250 Table 41 Metric High Alt Mid Temp High Humidity Temp 22 to 30 C Press 640 to 720 mm 80 Humidity 251 Table 42 Metric High Alt High Mid Temp High Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 80 Humidity 252 Table 43 English Wide Range Temp 40 to 120 F Press 20 to 31 inches 50 Humidity 253 Contents Laser and Optics User s Manual Vol
112. Based PCI Electronics The Agilent N1231A PCI Three Axis Board is optimized for connection to a PMAC motion control system from Delta Tau It is a full size Universal 3 3V and 5 0V signaling compatibility 32 bit 33 MHz PCI Rev 2 2 compliant card for use in PC compatible controllers as part of an Agilent laser interferometry position measurement system The Agilent N1231B PCI Three Axis Board with external sample has a generalized hardware interface and twice the resolution of the Agilent N1231A PCI Three Axis Board Laser and Optics User s Manual Vol System Design Considerations 3 Calibrator System Electronics Agilent 5529A 55292A Dynamic Calibrator The Agilent 5529A 55292A Dynamic Calibrator is a laser system used to ensure the accuracy of a machine s motion and positioning Controlled through your PC with Microsoft Windows installed the system is able to collect and analyze measurement data for a number of measurements The Agilent 5529A 55292A Dynamic Calibrator typically includes the following electronic components Agilent 5519A B Laser Head Agilent 10886A PC Compensation board optional for automatic compensation Agilent 10887B PC Calibrator Board Agilent 10751C D Air sensor and Agilent 10757D E F Material Temperature sensor s optional as required Agilent 10888A Remote Control units optional Agilent 55292A USB Expansion Module optional to house the PCI ISA bus 10886A and 10887B
113. C ppm F STAINLESS STEELS Continued 309 310 314 316 317 440C 446 TITANIUM AND TITANIUM ALLOYS 99 9 Ti 99 0 Ti Ti 5 A1 2 5 Sn Ti 8 Mn Laser and Optics User s Manual Vol 287 14 Material Expansion Coefficients 288 Table 68 Linear thermal expansion coefficients of metals and alloys continued ZINC AND ZINC ALLOYS Pure Zinc AG40A Alloy AC41A Alloy Commercial Rolled Zinc 0 08 Pb 03 Pb 0 3 Cd Rolled Zinc Allow 1Cu 0 010 Mg An Cu Ti Alloy 0 8 Cu 0 15 Ti Coefficient of Expansion ppm C ppm F 34 8 24 9 With the grain 23 4 across the grain With the grain 21 1 across the grain With the grain 19 4 across the grain PURE METALS Beryllium Cadmium Calcium Chromium Cobalt Gold Iridium Lithium Manganese Palladium Platinum Rhenium Rhodium Ruthenium Silicon 11 6 29 8 22 3 6 2 13 8 Laser and Optics User s Manual Vol Material Expansion Coefficients 14 Table 68 Linear thermal expansion coefficients of metals and alloys continued Coefficient of Expansion ppm C ppm F PURE METALS Continued Silver Tungsten Vanadium Zirconium Laser and Optics User s Manual Vol 289 14 Material Expansion Coefficients 290 Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 15 Glossary RE Agilent Technologies 281 15 Glossary 292 Abb error
114. Class instrument provided with a protective earth terminal Before Applying Power Verify that the product is set to match the available line voltage and the correct fuse is installed Before Cleaning Disconnect the product from operating power before cleaning Safety Earth Ground An uninterruptible safety earth ground must be provided from the mains power source to the product input wiring terminals or supplied power cable Warning Symbols That May Be Used In This Book gt Instruction manual symbol the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual Indicates hazardous voltages qr Indicates earth ground terminal E Indicates terminal is connected to chassis when such connection is not apparent Santa Clara California 95052 8059 Safety Considerations contd Ns Indicates Alternating current Indicates Direct current BODILY INJURY OR DEATH MAY RESULT FROM FAILURE TO HEED A WARNING DO NOT PROCEED BEYOND A WARNING UNTIL THE INDICATED CONDITIONS ARE FULLY UNDERSTOOD AND MET Damage to equipment or incorrect measurement data may result from failure to heed a caution Do not proceed beyond a CAUTION until the indicated conditions are fully understood and met These CAUTION labels are required by the United States Center for Devices and Radiological Health Failure to follow their instructions may result in p
115. Component Component Efficiencies Typical Agilent 10700A 67 path Agilent 10701A Agilent 10715A Agilent 10700A 67 path Agilent 10701A Agilent 10715A Agilent 10700A 33 path Agilent 10707A Agilent 10717A Using the typical laser power of 400 microwatts you can calculate the typical power at the X Y and Wavelength Tracker receivers by multiplying the product of each component efficiency by the laser output power for each axis Power at X 0 63 x 0 45 x 0 36 x 400 40 8 Power at Y 0 63 x 0 45 x 0 36 x 400 40 8 Power at WT 0 30 x 0 99 x 0 36 x 400 42 8 By using the typical efficiencies of the component a safety factor greater than 28 is achieved based on use of the Agilent 10780C Receiver which requires 1 5 microwatts The Agilent 10780F 2 2 microwatts Agilent E1708A 2 2 microwatts and Agilent E1709A 0 20 to 0 80 microwatts receivers are more sensitive Hence can operate with more axes Laser and Optics User s Manual Vol 63 3 System Design Considerations Receivers 64 General When determining the receiver mounting locations and positions keep the following points in mind 1 2 At a 45 position roll the signal will go to zero The receiver typically dissipates 2 0 Watts with a maximum dissipation of 2 7 Watts Plastic pads keep an air gap around the receiver and act as thermal and electrical isolators CAUTION Use nylon screws only Agilent 2360 0369 The rec
116. Distance between interferometer measurement face and measurement mirror at measurement Zero deadpath condition exists when the measurement mirror is flush with the 182 interferometer s measurement face zero position Agilent 10719A Zero deadpath condition exists when the measurement mirror is 19 05 mm 0 750 inch farther from the interferometer s measurement face than the reference mirror is M R 19 05 metric or M R 0 750 English where M Measurement Mirror distance from interferometer Reference Mirror distance from interferometer at measurement zero position Agilent 10721A Zero deadpath condition exists when the measurement mirror is 19 05 mm 0 750 inch farther from the interferometer s measurement face than the reference mirror is M R 19 05 metric or M R 0 750 English where M Measurement Mirror distance from interferometer Reference Mirror distance from interferometer at measurement zero position R Laser and Optics User s Manual Vol Accuracy and Repeatability 12 Table 12Deadpath mirror positions and values for Agilent interferometers continued Interferometer Agilent 10735A Mirror Position for Minimal Deadpath Zero deadpath condition cannot be achieved with this interferometer Because of interferometer design zero deadpath would require that measurement reflector be inside the interferometer 6
117. Humidity 259 Table 50 English High Alt Mid Temp Low Humidity Temp 74 to 90 F Press 23 to 27 inches 20 Humidity 260 Laser and Optics User s Manual Vol Table 51 Table 52 Table 53 Table 54 Table 55 Table 56 Table 57 Table 58 Table 59 Table 60 Table 61 Table 62 Table 63 Table 64 Table 65 Table 66 Table 67 Table 68 Table 69 English High Alt High Mid Temp Low Humidity Temp 91 to 107 F Press 23 to 27 inches 20 Humidity English Low Alt Low Temp Med Humidity Temp 40 to 56 F Press 27 to 31 inches 50 Humidity English Low Alt Low Mid Temp Med Humidity Temp 57 to 73 F Press 27 to 31 inches 50 Humidity English Low Alt Mid Temp Med Humidity Temp 74 to 90 F Press 27 to 31 inches 50 Humidity English Low Alt High Mid Temp Med Humidity Temp 91 to 107 F Press 27 to 31 inches 50 Humidity English High Alt Low Temp Med Humidity Temp 40 to 56 F Press 23 to 27 inches 50 Humidity English High Alt Low Mid Temp Med Humidity Temp 57 to 73 F Press 23 to 27 inches 50 Humidity English High Alt Mid Temp Med Humidity Temp 74 to 90 F Press 23 to 27 inches 50 Humidity English High Alt High Mid Temp Med Humidity Temp 91 to 107 F Press 23 to 27 inches 50 Humidity English Low Alt Low Temp High Humidity Temp 40 to 56 F Press 27 to 31 inches 80 Humidit
118. Lead 99 73 Pb 5 95 Solder 20 80 Solder 50 50 Solder Laser and Optics User s Manual Vol Material Expansion Coefficients 14 Table 68 Linear thermal expansion coefficients of metals and alloys continued Coefficient of Expansion ppm C ppm F LEAD AND LEAD ALLOYS Continued 1 Antimonial Lead Hard Lead 96 Pb 4 Sb Hard Lead 94Pb 6 Sb 8 Antimonial Lead 9 Antimonial Lead Lead Base Babbitt SAE 14 Alloy 8 MAGNESIUM AND MAGNESIUM ALLOYS Magnesium 99 8 Casting Alloys AM100A AZ63A AZ91A B C AZ92A HZ32A ZH42 ZH62A AK51A EZ33A EK30A and EK41A Wrought Alloys M1A and A3A AZ31B and PE AZ61A and AZ80A ZK60A B HM31A Laser and Optics User s Manual Vol 285 14 Material Expansion Coefficients Table 68 Linear thermal expansion coefficients of metals and alloys continued NICKEL AND NICKEL ALLOYS Nickel 99 95 Ni Co Duranickel Monel Monel cast Inconel Ni o nel Hastelloy B Hastelloy C Hastelloy D Hastelloy F Hastelloy N Hastelloy W Hastelloy X Illium G Ilium R 80 Ni 20 Cr 60 Ni 24 Fe 16Cr 35 Ni 45 Fe 20 Cr Constantan Coefficient of Expansion ppm C ppm F STAINLESS STEELS 301 302 302B 303 304 286 Laser and Optics User s Manual Vol Material Expansion Coefficients 14 Table 68 Linear thermal expansion coefficients of metals and alloys continued Coefficient of Expansion ppm
119. Manual Vol 57 3 58 System Design Considerations measurements both reflectors reference and measurement should be of the same type cube corner or plane mirror this minimizes thermal drift problems with ambient temperature changes To use the Agilent 10702A Agilent 10705A or Agilent 10766A in a differential configuration the reference cube corner can simply be detached from the interferometer housing and attached to the reference surface of interest This is shown in Figure 106 in Chapter 18 of Volume II Be aware that all installation and alignment requirements for the measurement reflector now apply also to the reference reflector To use the Agilent 10706A or Agilent 10706B interferometer in a differential configuration a plane mirror is recommended as the reference reflector Simply replace the reference cube corner or high stability adapter with the Agilent 10722A Plane Mirror Converter and attach the reference plane mirror to the reference surface of interest This is shown in Figure 122 in Chapter 20 of Volume II Again install and align the reference reflector the same as you would the measurement reflector Moving interferometer instead of reflector When moving the interferometer instead of the measurement reflector is required the Agilent 10702A 001 or Agilent 10766A should be used In practice for alignment reasons these are the only interferometers except the straightness interferometers that can be mo
120. Part Number 10705 60001 See Figure 32 These alignment aids are magnetic to simplify positioning them on the interferometer They are used on the input side of the interferometer to properly position the beam ALIGNMENT AIDS fs Agilent yuou ey Agilent Technologies Agilent Technologies Alignment Target Alignment Target Alignment Aid P N 10702 60001 P N 10705 60001 P N 10767 67001 Figure 32 Linear and single beam interferometer alignment aids Laser and Optics User s Manual Vol 97 4 System Installation and Alignment Autoreflection alignment procedure for Agilent 10702A Agilent 10766A Agilent 10705A This procedure describes the autoreflection alignment method used on a two axis system Figure 33 shows a measurement setup similar to Figure 34 A except that the referenced mirrors true squares are included Steps 1 through 11 constitute the X axis autoreflection alignment procedure 1 With all optical components in place install the alignment targets on the interferometer and the receiver Figure 34 position 1 Place a piece of opaque material such as frosted tape in front of the retroreflector 2 With the laser beam passing through the 50 beam splitter adjust the laser head and interferometer until the laser beam enters one hole of the alignment target and exits the other to hit the receiver alignment target centered on the hole over the photodetector This is the reference be
121. Periodically you may wish to verify proper beam alignment Refer to Chapter 4 System Installation and Alignment in this manual or the alignment procedure s for the optics in your measurement system for the appropriate procedure Procedures for Cleaning Optics WARNING The following optical cleaning procedures do not apply to the optics of the laser head Cleaning the laser head optics is rarely needed and requires access to the laser head interior where high voltages can be present All laser head maintenance should be performed by a qualified Agilent technician who is aware of the hazards involved 132 Laser and Optics User s Manual Vol Maintenance 7 Agilent Receivers Use a soft camel hair lens brush or equivalent to remove dust from the optical surfaces Dampen a few lens cleaning tissues with electronics grade methanol shake off excessive methanol and wipe across the lens surface once Use a fresh tissue dampened with methanol for each wipe Allow the methanol to evaporate CAUTION Do not use any solvent for any purpose on the Agilent 10780F E1708A or E1709A receivers fiber optic cable Using a solvent on the fiber optic cable may damage the cable The ends of the Agilent 10780F E1708A and E1709A receivers fiber optic cable may be cleaned with a clean lint free cloth Measurement optics and beam directing optics If the optical surfaces of an instrument are visibly dirty the following cleani
122. Plane Mirror Reflector Agilent 10716A F Agilent 10780C High Resolution Agilent 10700A 3 dl Receiver Interferometer Splitter Figure 56 Laser system configuration for a precision Coordinate Measuring Machine CMM 192 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 A list of parameters needed to calculate the system s measurement accuracy and repeatability for this application is provided the following subsections The laser head and optics component specifications are taken from this manual system resolution specifications for Agilent laser transducer electronics Agilent 10885A Agilent 10895A Agilent 10897B and Agilent 10898A are taken from the manual of the respective electronic board and the Agilent 10751C D Air Sensor and Agilent 10757D E F Material Temperature Sensor environmental specifications are provided in this chapter Each error component is calculated individually and summed in the appropriate error budget to determine system accuracy and repeatability Laser wavelength error When using a CMM both accuracy and long term repeatability need to be calculated Laser Wavelength Stability 0 02 ppm long term This translates to a maximum distance uncertainty of Laser Wavelength Stability Error 1 0 m 0 02 x 10 long term 0 02 micron Laser Wavelength Accuracy 0 02 ppm with optional calibration Laser Wavelength Accuracy Error 1 0 m 40 02 x 10 0 02 micr
123. Table 16 IC Stepper system accuracy with and without atmospheric compensation System Accuracy Calculation With Atmospheric Compensation Without Atmospheric Compensation microns microns Laser Wavelength Error Compensation Error Material Thermal Expansion Deadpath Error Electronics Error Optics Non Linearity Optics Thermal Drift Abb Error Cosine Error Laser and Optics User s Manual Vol 203 12 Accuracy and Repeatability Table 16 IC Stepper system accuracy with and without atmospheric compensation Direct Sum Total 0 067 micron 2 725 microns RSS sum where s are not 0 053 micron 2 710 microns independent and is an offset Use the following equation to calculate the RSS sum RS sum sum of squares of independent terms Vo sum of not independent terms offset Figure 62 graphically presents this accuracy data and shows the importance of using atmospheric compensation Figure 63 shows in more detail the relative magnitude of each component when using atmospheric compensation WORST CASE SYSTEM ACCURACY I C WAFER STEPPER 1 Laser Wave Mi 2 Compensation e Cosine 4 Deadpath 8 Electronic Hi Non Linear 7 Thermal Drift Ell With Atmospheric Compensation Without Atmospheric Compensation Pl MMMM 0 1 2 3 Positional Error at 0 2m Worst Case Microns Figure 62
124. Worst case System Accuracy with and without Atmospheric Compensation for the Wafer Stepper example 204 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 WORST CASE SYSTEM ACCURACY WITH ATMOSPHERIC COMPENSATION I C WAFER STEPPER o Laser Wave E 2 Compensation 3 Cosine 4 Deadpath 5 Electronic i 6 Non Linear 7 Thermal Drift Bl With Atmospheric Compensation 0 00 0 02 0 04 0 06 0 08 Positional Error at 0 2m Worst Case Microns Figure 63 Worst case System Accuracy with Atmospheric Compensation for the Wafer Stepper example Another potential source of error that should be included in the total accuracy budget is the flatness of the measurement mirrors In X Y stage applications long mirrors are attached to two sides of the stage as shown in Figure 61 Because the mirrors are not perfectly flat a measurement change occurs in one axis as the other axis is moved Since a mirror flatness of 4 20 is recommended for correct operation of the laser system this would induce a maximum measurement error of 0 03 micron To compensate for this measurement error map the mirror flatness then make the correction via software in the controller Laser and Optics User s Manual Vol 205 12 Accuracy and Repeatability 206 IC Stepper system repeatability calculations Long term repeatability Calculation of laser system long
125. a DIN connector for connecting to the Agilent 10884B Power Supply to provide power to the laser head one cable per system Agilent N1251B 7 meters 23 0 feet High Performance Receiver Cables for use with Agilent 10897C and 10898A VME Axis boards and N1231A B PCI Axis board one cable per receiver Agilent N1250A Agilent N1250B Laser and Optics User s Manual Vol 5 meters 16 4 feet 10 meters 32 8 feet 45 3 System Design Considerations Electronic Components 46 Transducer Systems There are three different types of electronics for Agilent laser transducer systems These electronics use different backplanes and have different performance and outputs Full details are given in the appropriate electronics system manuals PC Based Electronics The Agilent 10885A PC Axis Board and Agilent 10889B PC Servo Axis Board are compatible with PC ISA backplanes Up to six Agilent 10885As may be used in a single system VME Compatible Electronics The Agilent 10898A High Resolution VMEbus Dual Laser Axis Board Agilent 10897C High Resolution VMEbus Laser Axis Board and Agilent 10895A VMEbus Laser Axis Board are compatible with VME backplanes The Agilent 10896B VME Laser Compensation Board is also compatible with VME backplanes and works with the other Agilent VME Axis boards Up to six Agilent 10895As and several Agilent 10896As up to one for each Agilent 10895A may be used in a single system PC
126. angle for ideal zero stage angles 127 Figure 42 Input Beam Position Adjustment 128 Figure 43 Measure Point Tolerance 129 Figure 44 Agilent 5517A B C D Laser Head troubleshooting tree 143 Figure 45 Agilent Receiver troubleshooting tree 147 Figure 46 Agilent 10717A Wavelength Tracker troubleshooting tree 150 Figure 47 Typical older Agilent Laser Position Transducer block diagram 163 Figure 48 Worst case error resulting from imperfect separation of two beam components 1 73 Figure 49 Conventional plane mirror interferometer with unequal path lengths that result in optics thermal drift 177 Figure 50 Agilent 10706B High Stability Plane Mirror Interferometer Beam Paths 178 Figure 51 Comparison of optics thermal drift between Interferometers 179 Figure 52 Deadpath caused by unequal lengths from initial point 181 Figure 53 Optical configuration with and without deadpath 184 Figure 54 Abb error 187 Figure 55 Cosine error 188 Figure 56 Laser system configuration for a precision Coordinate Measuring Machine CMM 192 Figure 57 Worst case System Accuracy with and without Atmospheric Compensation for the CMM example 197 Figure 58 Worst case System Accuracy with Atmospheric Compensation for the CMM example 197 Figure 59 Worst case System Repeatability with and without Atmospheric Compensation for the CMM example 198 Figure 60 Worst case System Repeatability with Atmospheric Compensation for the CMM example 19
127. axis roll without affecting the system performance but the measurement direction sense will change with each 90 rotation Allow 50 mm 2 inches clearance around the laser head for easy servicing Allow at least 100 mm 4 inches clearance at the back of the laser head for cable connections LASER POSITION TRANSDUCER MOUNTING Beam Splitter Beam Bender Figure8 Laser position transducer mounting Laser and Optics User s Manual Vol System Design Considerations 3 Pointing stability To maintain good pointing stability it is good practice to use kinematic mounting principles Refer to Chapter 16 Laser Heads in Volume II of this manual for more information about laser head pointing stability Thermal isolation Because there is some heat dissipation from the laser heads you should choose the mounting method and location with care Where possible mount the laser head away from the measuring area to avoid any thermal effects Vibration isolation Since the system measures only the relative motion between the interferometer and reflector measurements are not affected by vibration along the beam axis of the laser source or the receiver When vibration of the laser head causes displacement of the beam perpendicular to beam axis at an interferometer or receiver the beam signal power can fluctuate If this fluctuation is too great insufficient beam signal will arrive at the receiver causing a measurement signa
128. basic Agilent Laser Measurement System components 164 beam benders 40 beam legs 91 beam path loss power budget 59 beam power loss optical power loss 59 beam splitter 292 beam splitters 40 beam through window 114 C cable 10881D E F Laser Head 82 N1250A B High Performance Receiver Cable 83 N1251A B High Performance Laser Head Cable 82 cable list 44 45 cables 10790A B C Receiver Cable 83 10791A B C Laser Head Cable 81 10880A B C Receiver Cable 83 10881A B C Laser Head Cable 81 10881D E F Laser Head Cable 82 laser head 81 cabling external 81 calculation of exact Wavelength of Light WOL compensation factor 225 calculation of signal loss 61 calibration board 10887B PC 47 calibration system electronics 47 characteristics required window 57 checklist pre installation 80 cleaning fiber optic cable 133 cleaning optics 132 clearance laser heads 52 CMM 292 color coded labels 81 compensation automatic 210 manual 210 compensation board 10886A PC 47 compensation Wavelength of Light 292 components basic laser measurement system 164 computing the optical power loss 59 configuration effects 55 configuration example four axis measurement configuration 68 multiaxis system for a precision X Y stage 67 multiaxis systems using Agilent 10719A and Agilent 10721A 75 single axis to control servo track writing 65 three axis measurement system using discrete plane mirror interfer
129. can now be read in the Position boxes corresponding to axes that have valid measurement signals as shown in Axis 2 in Figure 4 These raw count values must be multiplied by 0 31nm count and a compensation number 0 999728766 for standard air to convert them into a measurement value Laser and Optics User s Manual Vol lt lt Agilent N1231B Monitor PCI Bus 5 Slot 9 File Card Options Tools Help y Axis 1 Position Eror Velocity Emo Preset fo Position Preset Sample Read Sample and Read Glitch NoSig Interrupts Enabled Data Error Direction Positive Update Automatic Manual bue Clear All Status Preset All Axes Close Axis 2 Position Velocity Sample Sample and Read Glitch NoSig OK OK Interrupts Enabled Data Error Valid OK Direction Positive FPGA 1 Registers ID 0 0001231B Rev 0x00010002 Status 0 C303 Contig 00000 Intr Mask 0x0000 Sample 040100 DCIkA Mode 00000 DCIkA Div 020000 Intr Dir Ox0000 Compare 08000 Filter 0x0000 Preset3 0x000000000 Familiarization and Initial Operation 2 Axis 3 Position Error Velocity Eror Preset o Position Preset Sample Read Sample and Read Glitch NoSig ERR ERR Interrupts Enabled Data Error Invalid Emor Direction Positive FPGA 2 Registers ID 0 0001231B Rev O 00020003 Status 0x0333 Config 020000 Intr Mask 00000 Sample 0021 DCIkB Mo
130. can ruin a static sensitive electronic component For ESD avoidance steps see the Chapter 8 Troubleshooting in this manual Etalon An etalon is an optical reference cavity When used in the wavelength tracker the etalon provides a fixed physical distance reference to the differential interferometer Any length change measured in the etalon is presumed to be due to a change in the optical path length through the air in the cavity rather than a change in the cavity size fj The lower one of the two frequencies in the laser beam f The higher one of the two frequencies in the laser beam f fg Frequency paths in an interferometer Laser and Optics User s Manual Vol 293 15 Glossary 294 Half wave plate An optical element which introduces a relative phase shift of 180 degrees between the orthogonal components of a wave This changes the handedness of elliptical and circular light changing right to left and vice versa HEX Short for Hexadecimal See Number systems Interferometer The term interferometer may be applied to any optical arrangement where a beam of light from a light source is separated into two or more paths by a beam splitter and the parts are subsequently recombined after traversing different optical paths The two components then produce interference Kinematic mounting Kinematic means that all six degrees of freedom 8 translational 3 rotational are uniquely and unambig
131. circuit boards or components damaged insulation or evidence of arcing Determine and remedy the cause of any such condition 2 GROUND CONTINUITY TEST Plug the power cord into the Agilent electronics DO NOT CONNECT THE INSTRUMENT TO AC POWER Using a suitable ohmmeter check the resistance from the enclosure chassis to the ground pin on the power cord The reading should be less than 1 ohm Flex the power cord while making this measurement to determine whether intermittent discontinuities exist The resistance check should be performed from the enclosure to the ground pin of the cord while flexing the interconnect cable 3 Check any indicated front or rear panel ground terminals using the above procedures 4 INSULATION RESISTANCE CHECK Tie the line and neutral pins of the power cable together Check resistance from the instrument enclosure chassis to line and neutral with the LINE switch ON and the power source disconnected The minimum acceptable resistance is 2 Megohm Replace any component that results in a failure POWER LINE MODULE CHECK Check line fuse and line voltage selector in the electronics rear panel power line module to verify that the correct fuse is installed and that the instrument is properly set for the AC source to be applied Laser and Optics User s Manual Vol 151 8 Troubleshooting 152 Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 9 Unpacking and Incoming I
132. consider a typical installation with two measurement axes and a Wavelength Tracker axis Figure 165 in Chapter 24 of Volume II Assume differential interferometers good optical alignment 98 efficient plane mirrors on the stage comparable path lengths and use of any Agilent laser head The three axes X Y and Wavelength Tracker WT have the components listed in the following table Axis component efficiencies worst case Component Component Efficiencies Worst Case Agilent 10700A 67 path Agilent 10701A Agilent 10715A Agilent 10700A 67 path Agilent 10701A Agilent 10715A Agilent 10700A 33 path Agilent 10707A Agilent 10717A Assuming a minimum laser power of 120 microwatts you can calculate the worst case power at the X Y and Wavelength Tracker receivers by multiplying the product of component efficiencies by the laser output power Power at X 0 61 x 0 39 x 0 25 x 120 7 1 Power at Y 0 61 x 0 39 x 0 25 x 120 7 1 Power at WT 0 27 x 0 98 x 0 25 x 120 7 9 This system has a power safety factor of 4 7 at worst case based on use of the Agilent 10780C Receiver which requires 1 5 microwatts for each axis resulting in reliable operation and easy alignment You can also calculate this safety factor using the typical optical efficiency values listed in the following table Laser and Optics User s Manual Vol System Design Considerations 3 Axis component efficiencies typical
133. container securely Mark shipping container FRAGILE to ensure careful handling Indicate if magnetic material such as a laser head is enclosed In any correspondence refer to instrument by model number and full serial number Laser and Optics User s Manual Vol 157 10 Packaging for Storage or Shipment 158 Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 11 Principles of Operation Introduction 160 Measurement Technique 161 Basic Measurement System 163 Basic Agilent Laser Measurement System Components 164 RE Agilent Technologies 159 11 Principles of Operation Introduction 160 The measurements that an Agilent laser measurement system can make depend on the measurement optics interferometers and retroreflectors that are used The basic measurement made by all Agilent laser measurement systems is a linear measurement of the relative movement between an interferometer and its associated retroreflector along the path of the laser beam In most cases the interferometer is the fixed optic and the retroreflector is the one that moves Agilent offers interferometers and retroreflectors that allow measurements of angles flatness and straightness to be made However all of these measurements represent special applications of the basic linear measurement An angular measurement for example represents the difference in two linear measurements whose separation
134. example 199 installing laser electronics in PC 29 inteferometry Laser 294 interferometer 294 ac 292 de 292 differential 292 E1826E F G 218 E1827A Two Axis 218 E1837A Three Axis 218 linear 294 plane mirror 295 Z4399A Three Axis 218 Z4420B Five Axis NGI 218 Z4421B Five Axis 218 Z4422B Three Axis 218 interferometer reference site preparation 78 interferometer resolutions 110 interferometers 160 referenced a list 78 interferometers differential measurements 114 isolation thermal 53 vibration 53 K kinematic mounting 294 L labels color coded 81 Laser 294 laser beam introducing offset 58 laser beam protection 48 laser beam through window 114 Laser Head 294 laser head 164 5517C 009 9 mm 53 5519A B 47 orientation 52 site preparation 76 laser head cables 81 laser head powerup 31 laser head mounting feet 52 Laser Interferometry 294 laser measurement systems basic parts 38 laser positioning system one axis example 26 Laser and Optics User s Manual Vol laser tube assembly packing for storage or shipment 156 laser wavelength 169 linear interferometer 294 linear thermalexpansion coefficients of metals and alloys 280 list of cables 44 45 lithography equipment 215 lithography differential measurement 114 M magnetic shielding 53 making a measurement 33 manual compensation 210 manual organization 20 manuals available 23 m
135. interferometer within the interferometer combining the beams returned from the two retroreflectors to produce a difference frequency beam that is used as the interferometer s output sending the interferometer output to a receiver that converts the optical difference frequency from the interferometer to a series of electrical pulses at that frequency that is sent to the measurement system electronics for processing and any further use specified by the user and allowed by the electronics The main benefit of the two frequency technique is that the distance information is carried on ac waveforms or carriers rather than in dc form Since ac circuits are insensitive to changes in dc levels a change in beam intensity cannot be interpreted as motion Creating the two frequency laser beam The ac signals representing distance change are analogous to the intermediate frequency carriers in FM heterodyne receivers In the Agilent laser measurement system the ac signal or intermediate frequency is produced by mixing two slightly different frequencies near 5 x 1014 Hz 500 000 GHz differing by only a few megahertz Laser and Optics User s Manual Vol 161 11 162 Principles of Operation Using different sources to generate the two frequencies would require ultra stable sources and periodic calibration However a laser can be forced to output a laser beam composed of two frequencies simultaneously by applying an axial magnet
136. is common to all position transducers If the laser alignment is unchanged over time the cosine error will not change Therefore cosine error is part of the accuracy budget but not part of the repeatability budget Figure 55 illustrates cosine error using a ruler as a scale with an angle 0 between the measurement axis and the scale axis Measured length L is related to scale length L by L L cos 0 11 COSINE ERROR Scale Axi Fr Scale Length peer cale Axis FEE Measured Length L E l Axis of Travel L L cos O Figure 55 Cosine error Cosine error is a proportional term that is the resulting measurement error is a function of the distance measured by the interferometer Therefore the cosine error can be represented in parts per million as Cosine error in ppm 1 cos 0 x 106 12 Cosine error can be eliminated by taking care to orient the measurement laser beam parallel to the actual axis of travel Use the proper alignment procedures for each type of interferometer For example with interferometers using plane mirror reflectors Agilent 10706A B Agilent 10715A Agilent 10716A the resulting cosine error is less than 0 05 ppm e with interferometers that use cube comer reflectors Agilent 10702A Agilent 10705A the cosine error in parts per million is approximately equal to 31250 L2 where L is the measured distance in millimeters Laser and Optics User s Manual Vol
137. is precisely known The length standard for all of these measurements is the wavelength of laser light from the laser head Relative motion between the interferometer and its retroreflector generates a series of interference fringes in the laser beam The interference fringes are converted to electrical pulses in a receiver and sent to the measurement electronics which processes them as required to provide the desired measurement data The interferometric measurement system is sensitive enough that its measurements can be affected by changes in the measurement environment These changes can affect both measurement accuracy and repeatability The wavelength of laser light which is the length standard for measurements can be affected by the characteristics of the environment between the interferometer and its associated measurement reflector The process of determining the correct wavelength of light value for the measurement conditions is called compensation Agilent offers devices air sensor wavelength tracker which can be used to provide automatic compensation for the wavelength of light Alternatively wavelength of light compensation can be performed manually by measuring the atmospheric temperature pressure and humidity and calculating the compensation value or looking it up ina table Additional information about wavelength of light compensation is provided in Chapter 13 Wavelength of Light Compensation of this manual Ano
138. leadscrew This figure illustrates the displacement error E which is generated at the measurement probe tip due to angular motion 0 of the carriage Figure 54 B shows the same carriage motion as Figure 54 A but with the measurement axis coincident with the probe path In this case the measurement system measures the actual displacement and there is no offset error A helpful rule of thumb for approximating the error attributable to angular motion is that for each arcsecond of angular motion the error introduced is approximately 0 1 micron per 20 mm of offset 5 microinches per inch of offset When considering a specific application make every effort to direct the measurement path as close as possible to the actual work area where the measurement process takes place In Figure 69 a machine slide is shown with the interferometer and retroreflector placed to minimize Abb error The measurement axis is placed at approximately the same level as the work table and is also measuring down the center of the machine slide 220 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 MINIMIZE ABBE ERROR Machine Slide lt gt Top View Interferometer Retroreflector CasenbBean Working Surface 2 iudi o D gt EEE SSS a Side View Figure 69 Positioning of measurement axis to minimize Abb error For X Y stage applications the laser system can minimize Abb errors Plane mirror interferometers use
139. less than 0 14 ppm x deadpath distance Abbe error Abb error was first described by Dr Ernst Abb of Zeiss If errors of parallax are to be avoided the measuring system must be placed co axially in line with the line in which displacement giving length is to be measured on the work piece In simple terms Abb error occurs when the measuring point of interest is displaced from the actual measuring scale location and unwanted angular motion occurs in the positioning system Abb error makes the indicated position either shorter or longer than the actual position depending on the angular offset The Abb error is a fixed term and can be represented as Abb error offset distance x tangent of offset angle Ap tan 0 Figure 54 shows an example of Abb error and illustrates the requirements for minimizing angular error and minimizing offset of the scale from the measurement path In Figure 54 A the carriage is positioned by a leadscrew and the measurement axis is at the leadscrew centerline This figure illustrates the displacement Abb error E which is generated at the measurement probe tip due to unwanted angular motion 0 of the carriage during the measurement Figure 54 B shows the same carriage motion as Figure 54 A but with the measurement axis coincident with the probe path Here the measurement system measures the actual displacement thus no Abb error exists In general reducing the Abb offset w
140. mirror interferometer configuration 70 XY stage installed in a vacuum chamber 70 Two axis system using two Agilent 10715A differential interferometers 72 Yaw measurement of x y stage using discrete plane mirror interferometers 72 Optical Method for Yaw Measurement 74 Optical Method for Yaw Measurement 74 Agilent 5517C 009 Mounting Location Dimensions 77 Agilent 10710B and Agilent 10711A adjustable mounts 84 Horizontal plane mounting using the Agilent 10710B adjustable mount 85 Vertical plane mounting using the Agilent 10710B adjustable mount 86 Horizontal plane mounting using the Agilent 10711A adjustable mount 87 Vertical Plane Mounting Using the Agilent 10711A Adjustable Mount 87 Optimum alignment 88 Effect of optics misalignment 89 Effects of angular misalignment to the direction of travel 90 Using reference surfaces to align mirror 93 Measurement beam dot movement 95 Results of reflector movement 96 Linear and single beam interferometer alignment aids 97 Autoreflection alignment 98 Overlapping dot alignment 103 Effect of beam directing optics on laser beam polarization orientations 112 Next Generation Interferometer laser beam path 120 NGI Angular Resolution diagram 122 Interferometer datums relative to ideal zero stage angles 124 Setup for determining system zero stage angles 125 Interferometer mounting 126 Laser and Optics User s Manual Vol 13 Figures Figure 41 Input beam cone
141. movement Aligning the Agilent 10702A Linear Agilent 10766A Linear and Agilent 10705A Single Beam Interferometers The alignment techniques for the linear and single beam interferometers are nearly the same Both use a retroreflector cube corner as the measurement reflector Either the Autoreflection or the Overlapping Dots method may be used to maximize return measurement signal power and to minimize cosine error The Autoreflection method is always preferred because it is more accurate It must be used for measurement distances less than 0 5 meter 20 inches and is strongly recommended for distances over 0 5 meter The Overlapping Dots method should only be used when the measurement distance is over 0 5 meter The choice of method used depends on convenience and the nature of the application The goal for both of these alignment methods is to have the reference and measurement beams be coincident at the receiver throughout the measurement 96 Laser and Optics User s Manual Vol System Installation and Alignment 4 Alignment aids for Agilent 10702A Agilent 10766A Agilent 10705A To help in aligning these interferometers an alignment aid is included with each They are For Agilent 10702A and Agilent 10702A 001 Alignment target Agilent Part Number 10702 60001 See Figure 32 For Agilent 10766A Alignment target Agilent Part Number 10767 60001 See Figure 32 For Agilent 10705A Alignment Target Agilent
142. of laser system long term repeatability in this example is the same as system accuracy except that the cosine error term 0 05 micron is not included Therefore system repeatability in this example will be With Atmospheric Without Atmospheric Compensation Compensation Direct Sum Total 0 21 micron 9 94 microns Worst Case RSS sum Typical 0 17 micron 9 90 microns Figure 59 is a graph of the worst case repeatability Again it shows the importance of atmospheric compensation Figure 60 shows in more detail the worst case repeatability with atmospheric compensation WORST CASE SYSTEM REPEATABILITY CMM EXAMPLE 4 Laser Wave Hi 2 Compensation G Deadpath 4 Electronic I 8 Non Linear 6 Thermal Drift Ell With Atmospheric Compensation Without Atmospheric Compensation 75 Z W 0 2 4 6 8 10 Positional Error at 1 0m Worst Case Microns Figure 59 Worst case System Repeatability with and without Atmospheric Compensation for the CMM example 198 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 WORST CASE SYSTEM REPEATABILITY WITH ATMOSPHERIC COMPENSATION CMM EXAMPLE O Laser Wave E 2 Compensation 3 Deadpath 4 Electronic P 5 Non Linear 6 Thermal Drift Bi Atmospheric Compensation 0 0 0 1 0 2 0 3 Positional Er
143. on the direction of reflector movement The two frequency components fjand f exit the interferometer as a coincident beam One of the two frequency components is directed toward the object whose motion is being measured There it is reflected by a mirror or retroreflector cube corner and returned to the interferometer The other frequency component travels a fixed path through the cube corner mounted directly to the interferometer where both components recombine into a single beam Both cube corner retroreflectors offset their corresponding beams and return them parallel to the incoming beam path Small rotations or perpendicular movements will not affect the accuracy of the measurement Each laser measurement system axis must have an interferometer and retroreflector Machine design considerations determine which type of interferometer is optimum The choice of the interferometer for each axis usually specifies the retroreflector or plane mirror for that axis The Agilent 10717A Wavelength Tracker is an interferometer and etalon fixed length reference cavity combination that measures changes in laser wavelength not displacement It measures apparent change in a fixed distance which is interpreted as a variation in the laser wavelength For more detailed information on the individual optical components available from Agilent refer to chapters 18 through 34 the interferometers chapters Chapter 17 Beam Directing Optics and Ch
144. receiver use the laser beam to generate the measurement signal The reference and measurement signals along with the environment sensor signals are used by the measurement electronics to generate linear displacement information The system controller can read and display this information In addition the controller can send destination input data to the measurement electronics which outputs a real time error signal representing the difference between the destination and the actual position This error signal can be used in servo electronics to drive a stage s positioning motors Laser head A low power helium neon laser emits a coherent light beam composed of two slightly different optical frequencies fjand fs of orthogonal linear polarizations See Figure 47 Before exiting the laser assembly the beam passes through a beam splitter where a small fraction of the beam is sampled This portion of the beam is used both to generate a reference frequency and to provide an error signal to the laser cavity tuning system The difference in the amplitudes of fjand f is used for tuning while the difference in frequency between fjand fo between 1 5 MHz and 3 0 MHz depending on the model of the laser head is used for the reference signal The wavelength of light from the laser head is used as the length standard for Agilent laser measurement systems The laser head generates a coherent all light waves in phase collimated all waves travelin
145. reflector Many of the beam benders are stationary and only direct the laser beam to the measurement axis In these cases it is only necessary to provide fixed tubing for the laser beam and some type of sealed enclosure for the optics Since only one laser beam of approximately 6 mm 0 24 inch in diameter is involved relatively small diameter tubing can be used Since either the interferometer or the reflector is moving during the measurement Laser and Optics User s Manual Vol System Design Considerations 3 protecting the laser beam and the moving components requires a telescoping cover or a cover that is self sealing A wide variety of commercially available protective covers are suitable for this purpose Figure 6 illustrates techniques for protecting the laser beam and optical components with different types of protective covering Note that the cover for the retroreflector allows the retroreflector to be moved very close to the interferometer This helps minimize the deadpath errors Chapter 12 Accuracy and Repeatability in this manual has more details on minimizing deadpath PROTECTIVE COVERS Protective Cover Moving Interferometer a D 4 Fixed Conduit e For Laser Beam Fixed Interferometer gt Protective Cover gt Receiver Elect ales Laser Beam Moving Interferometer Flexible Seal Protective Cover Machine Slide Fixed Table VIEW A Figure6 Protective covers for o
146. term repeatability in this example is the same as system accuracy except that the cosine error term 0 01 micron is not included Therefore laser system long term repeatability will be With Atmospheric Without Atmospheric Compensation Compensation Direct Sum Total 0 057 micron 2 715 microns Worst Case RSS sum Typical 0 043 micron 2 710 microns Figure 64 is a graph of the worst case long term repeatability Again the importance of atmospheric compensation is shown Figure 65 shows in more detail the worst case long term repeatability with atmospheric compensation WORST CASE SYSTEM LONG TERM REPEATABILITY I C WAFER STEPPER Laser Wave RI 2 Compensation 3 Deadpath 4 Electronic I 6 Non Linear e Thermal Drift Hl Without Atmospheric Compensation 0 1 2 3 Positional Error at 0 2m Worst Case Microns Figure 64 Worst case System Long term Repeatability with and without Atmospheric Compensation for the Wafer Stepper example Laser and Optics User s Manual Vol Accuracy and Repeatability 12 WORST CASE SYSTEM LONG TERM REPEATABILITY WITH ATMOSPHERIC COMPENSATION I C WAFER STEPPER Laser Wave I 2 Compensation Deadpath D Electronic Mi 8 Non Linear 6 Thermal Drift Hi With Atmospheric Compensation 0 00 0 02 0 04 0 06 0 08 Positio
147. the beam when the positioning stage or machine is at its zero position as defined by the machine s coordinate system Unequal beam components produce an optical path length difference that will not be properly compensated during changing environmental conditions resulting in a measurement error The optical path can differ due to unequal path lengths or different optics thickness or composition in the beam path Deadpath error can be minimized in most applications by a combination of the following Minimize the distance D Mount the interferometer as close to the retroreflector as possible when the machine is at its zero position as defined by its own coordinate system This minimizes the unequal path length cases Minimize unequal path treatments as much as possible Minimize the number of optics such as windows used in the beam path Use an Agilent 10715A Differential Interferometer or Agilent 10706B High Stability Plane Mirror Interferometer instead of the Agilent 10706A Plane Mirror Interferometer Some unequal path treatment cannot be avoided with the Agilent 10706A Plane Mirror Interferometer The other interferometers have negligible difference in their treatments Figure 49 shows that component f4 travels through more glass than does fp It makes twice as many trips through the interferometer as does f4 and also two round trips through the quarter wave plate This unequal treatment of fA and fp causes deadpath error
148. the receiver alignment target on the receiver and rotate the turret of the laser head to select the small aperture Place a referenced mirror true square between the interferometer and the retroreflector so that the measurement beam from the interferometer strikes its reflective surface Align the referenced mirror with a precision indicator until its reflective surface is perpendicular to the direction of travel in both angular axes arcseconds Place a single beam interferometer alignment aid on the output side of the interferometer and adjust the single beam interferometer in pitch and yaw until the beam 1 reflects back on itself and 2 is centered on the small aperture of the laser head Slight side to side movement of the interferometer may be required to ensure that the reference beam from the Laser and Optics User s Manual Vol System Installation and Alignment 4 interferometer is still centered on the receiver alignment target Do not adjust the laser head For high accuracy alignment or for installations where there is less than 0 5 meter 20 inches between the laser head and reflector perform steps 17 through 19 17 Remove the receiver alignment target and interferometer alignment target and select the large aperture of the laser head 18 With a fast responding voltmeter preferably an analog type attached to the receiver test point and receiver case ground pitch and yaw the laser beam laser head or interferometer
149. the time spent aligning the system See Chapter 17 Beam Directing Optics in Volume II for details on the Agilent N1209A RPT There are a few exceptions however Certain optics designed for multiaxis systems provide referenced housings Installation and alignment of these optics depends on the optic refer to specific instructions for these optics Agilent 10719A Agilent 10721A Agilent 10735A Agilent 10736A elsewhere in this manual Other optics require you to fabricate your own mounts In general the alignment procedures are performed with all optical components in place Your measurement system design should allow for adjustment of the laser optics and receivers during alignment Laser beam and optics protection The laser measurement system requires protection against unintentional laser beam blockage and air turbulence problems In some applications such as machine tools protection should be provided to prevent metal chips or cutting fluid from interfering with the measurements Also the optical components usually require protection to prevent contamination of the optical surfaces by oil or cutting fluid In applications which are considered clean protection may not be needed If protection of the laser beam and optical components is required there are two general types moving component protection and stationary component protection In many applications the only moving component is the interferometer or the
150. to calculate the RSS sum RS sum sum of squares of independent terms 1 sum of not independent terms offset Figure 57 graphically presents this accuracy data and shows the importance of using atmospheric compensation Figure 58 shows in more detail the relative magnitude of each component when using atmospheric compensation 196 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 WORST CASE SYSTEM ACCURACY CMM EXAMPLE O Laser Wave Mi 2 Compensation 9 Cosine 4 z Deadpath Electronic X 6 Non Linear Thermal Drift El With Atmospheric Compensation Without Atmospheric Compensation 77 WM 0 2 4 6 8 10 Positional Error at 1 0m Worst Case Microns Figure 57 Worst case System Accuracy with and without Atmospheric Compensation for the CMM example WORST CASE SYSTEM ACCURACY WITH ATMOSPHERIC COMPENSATION CMM EXAMPLE Laser Wave Mi Compensation 3 Cosine 4 Deadpath Electronic X Non Linear 7 Thermal Drift E 0 0 0 1 0 2 0 3 Positional Error at 1 0m Worst Case Microns Figure 58 Worst case System Accuracy with Atmospheric Compensation for the CMM example Laser and Optics User s Manual Vol 197 12 Accuracy and Repeatability CMM system repeatability calculation Calculation
151. to the mating connector Receiver cables See Chapter 35 Receivers in Volume II of this manual for installation and alignment information CAUTION Each connector on the Agilent 10790A B C Receiver Cable has both a male and female half Before making a connection be sure the male half of the cable connector is properly aligned with the female half of the mating connector Failure to align the pins prior to mating the connectors may result in damaged pins Laser and Optics User s Manual Vol System Installation and Alignment 4 For use with Agilent 10895A VME Axis Board Agilent 10790A B C Receiver Cable The Agilent 10790A B C Receiver Cable is used to connect the Agilent receivers to the Agilent 10895A VME Axis Board for both measurement and Wavelength Tracker axes This cable s connectors are identical on either end as shown in Figure 282 The connectors on the cable and on the receiver and Agilent electronics are keyed to go together only one way The connectors on the cable each have a locking ring which take a 1 4 turn clockwise to secure the cable to its mating connector For use with Agilent 10885A PC 10889B PC 10896B VME 10897C VME 10898A VME or N1231A B PCI axis board Agilent 10880A B C Receiver Cable The Agilent 10880A B C Receiver Cable is used to connect the Agilent receivers to the Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B VME Laser Compensation Board
152. which may be moving Viewed another way this allows measuring the motion of one reflector relative to a reference datum elsewhere in the machine external to the interferometer itself This is unlike the typical interferometer configuration because usually the reference beam path length does not change in differential configurations it can One useful example of a differential measurement in a lithography application is for measuring the motion of the X Y stage relative to the optical column The Agilent 10719A One Axis Differential Interferometer and the Agilent 10721A Two Axis Differential Interferometer are ideally suited to this type of Laser and Optics User s Manual Vol Measurement Optics General Information 5 measurement because they provide parallel reference and measurement paths which are offset vertically by 19 mm 0 750 inch For such an application a user supplied reference plane mirror is required in addition to the measurement reflector on the X Y stage Differential measurements that can be made using an Agilent 10719A interferometer are shown in Figure 170 in Volume II of this manual Differential measurements that can be made using an Agilent 10721A interferometer are shown in Figure 178 The Agilent 10715A Differential Interferometer instead of having an offset spacing as in the Agilent 10719A or Agilent 10721A interferometers permits the reference beams and the measurement beams to be aligned essentially coa
153. x 10 0 9 micron With deadpath correction and using Wavelength Tracking Compensation Equation 9 determines the error Deadpath correction error 0 1 m 40 15 x 10 0 015 micron Electronics error With Agilent laser interferometer systems the electronics error equals measurement resolution When using the Agilent 10716A High Resolution Interferometer system measurement resolution for Agilent 10885A Agilent 10895A Agilent 10897B or Agilent 10898A electronics is Measurement Resolution 0 0025 micron Optics nonlinearity Nonlinearity when using the Agilent 10716A High Resolution Interferometer is 10 001 micron Optics thermal drift This error term should be included when determining long term repeatability The error depends on the degree of thermal cycling that the interferometer experiences With the Agilent 10716A in this application typical thermal drift will be 0 04 micron Optics Thermal Drift degree x 30 5 degree C x 0 02 micron Abb error Since this error term is independent of the type of measurement scale used but strongly dependent on how the machine is designed and built specific errors will not be included in this example However the errors should be included when calculating the error budget for an actual machine when the Abb offset is known and angular errors can be measured or estimated Abb Error 0 micron assumed Laser and Optics User s Manual Vol 195 12
154. 0 7244 7248 7251 7255 7258 7262 7265 7269 7272 7276 7219 7283 7287 7290 7294 7297 7301 7304 7308 7311 7315 7318 7322 7326 7329 7333 7336 7340 7343 7347 7350 7354 1357 7361 1365 7368 7372 7375 7319 7382 7386 7389 7393 7396 7400 7404 7407 7411 7414 7418 7421 7425 7428 7432 7435 7439 7443 7446 7450 7453 23 0 7175 7178 7182 7185 7189 7192 7196 7199 7203 7206 7210 7213 7217 7221 7224 7228 7231 7235 7238 7242 7245 7249 7252 7256 7259 7263 7267 7270 7274 7277 7281 7284 7288 7291 7295 7298 7302 7306 7309 7313 7316 7320 7323 7327 7330 7334 7337 7341 7344 7348 7352 7355 7359 7362 7366 7369 7373 7376 7380 7383 7387 7390 7394 7398 7401 7405 7408 7412 7415 7419 7422 7426 7429 7433 7436 7440 7444 7447 7451 7454 7458 23 5 7179 7183 7187 7190 7194 7197 7201 7204 7208 1211 7215 7218 7222 7225 7229 7232 7236 7240 7243 7247 7250 7254 7257 7261 7264 1268 7271 7215 7278 7282 7285 7289 7293 7296 7300 7303 7307 7310 7314 7317 7321 7324 7328 7331 7335 7338 7342 7346 7349 7353 7356 7360 7363 7367 7370 7374 7377 7381 7384 7388 7391 7395 7399 7402 7406 7409 7413 7416 7420 7423 7427 7430 7434 7437 7441 7444 7448 7452 7455 7459 7462 24 0 7184 7188 7191 7195 7199 7202 7206 7209 7213 7216 7220 7223 7227 7230 7234 7237 7241 7244 7248 7251 7255 7259 726
155. 0 1771 7778 7719 7783 7787 7791 7795 7799 7803 7808 7812 7816 27820 7824 7828 7832 7836 649 7774 7778 7782 7786 71790 7795 7799 7803 7807 7811 7815 7819 7823 7827 7832 7836 7840 648 7778 7782 7786 7790 7794 7798 7802 7806 7810 7814 7818 7823 7827 27831 7835 7839 7843 647 7781 7785 7789 7793 779 7801 7805 7810 7814 7818 7822 7826 7830 7834 7838 7842 7847 646 7784 7789 7793 7797 7801 7805 7809 7813 7817 7821 7825 7829 27833 7838 7842 7846 7850 645 7788 7792 7796 7800 7804 7808 7812 7816 7820 7825 7829 7833 7837 7841 7845 7849 7853 644 7791 7795 7799 7804 7808 7812 7816 7820 7824 7828 7832 7836 7840 7844 7848 7853 7857 643 7795 7799 7803 7807 78231 7815 7819 7823 7827 7831 7835 7840 7844 7848 7852 7856 7860 642 7798 7802 7806 7810 7814 7819 7823 7827 7831 7835 7839 7843 7847 7851 7855 7859 7863 641 7802 7806 7810 7814 7818 7822 7826 7830 7834 7838 7842 7846 7850 7854 7859 7863 7867 640 7805 7809 7813 7817 7821 7825 7829 7833 7838 7842 7846 7850 7854 7858 7862 7866 7870 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 3 252 Laser and Optics User s Manual Vol BAROMETRIC PRESSURE IN INCHES OF MERCURY 20 20 20 00 40 0 7029 7048 7068 7087 7106 7125 7144 7164 7183 7202 7221 7240 7259 7279 7298 7317 7336 7355 7375 7394 7413 7432 7451 7470 7490 7509 7528 7547 7566 7586 7605 7624 7643 7662 7681 7701 7720 7739 7758 7777 7797 7816 7835 7854 7873 7892 7912 7931 7950 7969 7988 8008 8027 8046 8065 8084
156. 0 7186 7191 7196 37201 7206 7210 7215 7220 7225 7230 7235 7239 7244 7249 7254 7259 7263 769 7189 7194 7199 7204 7209 7214 7219 7224 7229 7233 7238 7243 7248 7253 7257 7262 7267 768 7193 7198 7203 7208 7213 7218 7223 7227 7232 7231 7242 7247 7251 7256 7261 7266 7270 767 7197 7202 7207 7212 7216 7221 7226 7231 7236 7241 7245 37250 7255 7260 7264 7269 7214 766 7200 7205 7210 7215 7220 7225 7230 7235 7239 7244 7249 7254 7259 7263 7268 72173 7277 765 7204 7209 7214 7219 7224 71229 7233 7238 7243 7248 7253 7257 7262 7261 7272 7276 7281 764 7208 7213 7218 7222 7227 7232 7237 7242 7247 27251 7256 7261 7266 27270 7275 7280 7285 763 7211 7216 7221 7226 7231 7236 7241 7245 7250 7255 7260 7265 7269 7274 37279 7283 7288 762 7215 7220 7225 7230 7235 7239 7244 7249 7254 71259 7263 7268 7273 7278 27282 7287 7292 761 7219 7224 7229 7233 7238 7243 7248 7253 7257 71262 7267 7272 7276 3281 7286 7291 7295 760 7222 7227 7232 7237 7242 7247 7252 7256 7261 7266 7271 7275 7280 7285 7289 7294 7299 759 7226 7231 27236 7241 7245 7250 7255 7260 7265 7269 7274 7279 7284 7288 7293 7298 7302 758 7230 7235 27239 7244 7249 7254 7259 27264 7268 7273 272178 7283 7287 7292 7297 7301 7306 757 7233 7238 7243 7248 7253 7258 7262 7267 7272 71271 7281 7286 7291 7295 7300 7305 7309 756 7237 7242 7247 7252 7256 71261 7266 7271 7276 7280 7285 37290 7294 7299 7304 7308 7313 755 7241 27246 7250 7255 7260 7265 7270 7274 7279 7284 7289 7293 7298 7303 7307 7312 7317 754 7244 7249 7254 7259 737264 7268 7273 72
157. 0 7394 7399 7403 7408 774 7337 7342 7347 7351 7356 7361 7365 7370 7375 7379 7384 7388 7393 7398 7202 7407 7411 773 7341 7346 7350 7355 7359 7364 7369 7373 7378 7383 7387 7392 7396 7401 7405 7410 7415 772 7344 7349 7354 7358 7363 7368 7372 7377 7381 71386 7391 7395 7400 7404 7409 7413 7418 771 7348 7352 7357 7362 7366 7371 7376 7380 7385 7389 7394 7398 7403 7408 7412 7417 7421 770 7351 7356 7361 7365 7370 7374 7379 7384 7388 7393 7397 7402 7406 7411 7416 7420 7425 769 1355 7359 7364 7369 7373 7378 7382 27387 7392 7396 7401 7405 7410 7414 7419 7424 7428 768 7358 7363 7367 7372 7377 7381 7386 7390 7395 7400 7404 7409 7413 7418 7422 7427 7431 767 1362 7366 7371 7375 7380 7385 7389 7394 7398 7403 7407 7412 2417 7421 7426 7430 7435 766 7365 7370 7374 7379 7383 7388 7393 7397 7402 7406 7411 7415 7420 7425 7429 7434 7438 765 1369 7373 27378 27382 7387 7391 7396 7401 7405 7410 7414 7419 7423 7428 7432 7437 7442 764 7372 7377 7381 7386 7390 7395 7399 7404 7409 7413 7418 7422 7427 7431 7436 7440 7445 163 1375 7380 7385 7389 7394 7398 7403 7407 7412 7417 7421 7426 7430 7435 7439 7444 7448 762 7379 7383 7388 7393 7397 7402 7406 7411 7415 7420 7424 7429 7434 7438 71443 7447 7452 761 7382 7387 7391 17396 7401 7405 7410 7414 7419 7423 7428 7432 7437 7441 7446 7450 7455 760 7386 7390 7395 7399 7404 7409 7413 7418 7422 7427 7431 7436 7440 7445 7449 7454 7458 759 1389 7394 7398 7403 7407 7412 7417 7421 7426 7430 7435 7439 27444 7448 7453 745 7462 758 7393 7397 7402 7406 7411 7
158. 0 7455 7459 27464 7469 7473 7478 7482 7487 7492 7496 684 7426 7430 7435 7440 7444 7449 7454 7458 7463 7468 7472 7477 7482 7486 7491 7495 7500 683 7429 7434 7439 7444 7448 7453 7458 7462 7467 7471 7476 7481 7485 7490 7494 7499 7503 7433 7438 7443 7447 7452 7457 7461 7466 7471 7475 7480 7484 7489 7493 7498 7503 7507 681 7437 7442 7446 7451 7456 7460 7465 7470 7474 7479 7483 7488 7493 7497 7502 7506 7511 680 7441 7445 7450 7455 7459 7464 7469 7473 7418 7483 7487 7492 7496 7501 7505 7510 7514 679 7444 7449 7454 7459 7463 7468 27472 7477 7482 7486 7491 7495 7500 7505 7509 7514 7518 678 7448 7453 7458 7462 7467 7472 7476 7481 7485 7490 7495 7499 7504 7508 7513 7517 7522 677 7452 7457 7461 7466 7471 7475 7480 7485 7489 7494 7498 7503 7507 7512 7516 7521 7525 676 7456 7460 7465 7470 7474 7479 7484 7488 7493 7497 7502 7507 7511 7516 7520 7525 7529 675 7460 7464 7469 7474 7478 7483 7487 7492 7497 7501 7506 7510 7515 7519 7524 7528 7533 674 7463 7468 7473 7477 7482 7487 7491 7496 7500 7505 7509 7514 7518 7523 7527 7532 7536 673 7467 7472 7476 7481 7486 7490 7495 7499 7504 7509 7513 7518 7522 7527 7531 7536 7540 672 7471 7476 7480 7485 7489 7494 7499 7503 7508 7512 7517 7521 7526 7530 7535 7539 7544 671 7475 7479 7484 7489 7493 7498 7502 7507 7511 7516 7520 7525 7529 7534 7538 7543 7547 670 7478 7483 7488 7492 7497 7501 7506 7511 7515 7520 7524 7529 7533 7538 7542 7547 7551 669 7482 7487 7491 7496 7501 7505 7510 7514 7519 7523 7528 7532 7537 7541 7546 7550 7555 668 7486
159. 0 7505 7510 7515 7520 7524 7529 7534 27 40 7461 7466 7471 7476 7481 7485 7490 7495 7500 7505 7510 7515 7519 7524 7529 7534 7538 27 35 7465 7470 7475 7480 7485 7490 7495 7500 7505 7509 7514 7519 7524 7529 7533 7538 7543 27 30 7470 7475 7480 7485 7490 7495 7500 7504 7509 7514 7519 7524 7528 7533 7538 7543 7547 27 25 7475 7480 7485 7489 7494 7499 7504 7509 7514 7519 7523 7528 7533 7538 7542 7547 7552 27 20 7479 7484 7489 7494 7499 7504 7509 7514 7518 7523 7528 7533 7537 7542 7547 7552 7556 27 15 7484 7489 7494 7499 7504 7508 7513 7518 7523 7528 7532 7537 7542 7547 7551 7556 7561 27 10 7489 7494 7498 7503 7508 7513 7518 7523 7527 7532 7537 7542 7547 7551 7556 7561 7565 27 05 7493 7498 7503 7508 7513 7518 7522 7527 7532 7537 7542 7546 7551 7556 7560 7565 7570 27 00 7498 7503 7508 7513 7517 7522 7527 7532 7537 7541 7546 7551 7556 7560 7565 7570 7574 BAROMETRIC PRESSURE IN INCHES OF MERCURY Laser and Optics User s Manual Vol 255 13 Wavelength of Light Compensation Table 46 English Low Alt Mid Temp Low Humidity Temp 74 to 90 F Press 27 to 31 inches 20 Humidity TEMPERATURE IN DEGREES FAHRENHEIT 74 0 75 0 76 0 77 0 78 0 79 0 80 0 81 0 82 0 83 0 84 0 85 0 86 0 87 0 88 0 89 0 90 0 31 00 7220 7225 7230 7236 7241 7246 7251 7257 7262 7267 7272 7277 7282 7288 7293 7298 7303 30 95 7224 7230 7235 7240 7245 7251 7256 7261 7266 7271 7277 7282 7287 7292 7297 7302 7307 30 90 7229 7234 7239 7245 7250 7255 7260 7266 7271 7276 7281 7286 7291 729
160. 0 7585 7589 7594 7599 7604 7609 7613 7618 7623 7628 7632 7637 7642 7646 25 30 7575 7580 7585 7589 7594 7599 7604 7609 7613 7618 7623 7628 7632 7637 7642 7646 1651 25 25 7580 7584 7589 7594 7599 7604 7609 7613 7618 7623 7628 7632 7637 7642 7646 7651 7656 25 20 7584 7589 7594 7599 7604 7609 7613 7618 7623 7628 7632 7637 7642 7646 7651 7656 7660 25 15 7589 7594 7599 7604 7609 7613 7618 7623 7628 7632 7637 7642 7646 7651 7656 7660 7665 25 10 7594 7599 7604 7608 7613 7618 7623 7628 7632 7637 7642 7646 7651 7656 7660 7665 7669 7599 7604 7608 7613 7618 7623 7628 7632 7637 7642 7646 7651 7656 7660 7665 7670 7674 25 00 7604 7608 7613 7618 7623 7628 7632 7637 7642 7646 7651 7656 7660 7665 7670 7674 7679 24 95 7608 7613 7618 7623 7628 7632 7637 27642 7646 7651 7656 7660 7665 7670 7674 7679 1683 24 90 7613 7618 7623 7628 7632 7637 7642 7646 7651 7656 7660 7665 7670 7674 7679 7684 7688 24 85 7618 7623 7628 7632 7637 7642 7647 7651 7656 7661 7665 7670 7674 31679 7684 7688 7693 24 80 7623 7628 7632 7637 7642 7647 7651 7656 7661 7665 7670 7675 7679 7684 7688 7693 7697 24 75 7628 7632 7637 7642 7647 7651 7656 7661 7665 7670 7675 7679 7684 7688 7693 7697 7702 24 70 7632 7637 7642 7647 7651 7656 7661 7665 7670 7675 7679 7684 7688 7693 7698 7702 7707 24 65 7637 7642 7647 7651 7656 7661 7665 7670 7675 7679 7684 7689 7693 7698 7702 7707 7711 24 60 7642 7647 7651 7656 7661 7666 7670 7675 7679 7684 7689 7693 7698 7702 7707 7711 7716 24 55 7647 7651 7656 7661 7666 7670 7675 7680 768
161. 00 7704 7708 7712 7716 7721 7725 7729 7733 7737 7741 675 7679 7683 7687 7691 7695 7700 7704 7708 7712 7716 7720 7724 7728 7732 7736 7740 7744 674 7683 7687 7691 7695 7699 7703 7707 7711 7715 7719 7723 7727 7731 7735 7739 7743 7747 673 7686 7690 7694 7698 7702 7706 7710 7714 7719 7723 7727 7731 7735 7739 7743 7747 7751 672 7689 7694 7698 7702 7706 7710 7714 7718 7722 7726 7730 7734 7738 7742 7746 7750 7754 671 7693 7697 7701 7705 7709 7713 7717 7721 7725 7729 7733 7737 7741 7746 7750 7754 7758 670 7696 7700 7705 7709 7713 7717 7721 7725 7729 7733 7737 7741 7745 7749 7753 7757 7761 669 7700 7704 7708 7712 7716 7720 7724 7728 7732 7736 7740 7744 7748 7752 7756 7760 7764 668 7703 7707 7711 7715 7719 7724 7728 7732 7736 7740 7744 7748 7752 7756 7760 7764 7768 667 7707 7711 7715 7719 7723 7727 7731 7735 7739 7743 7747 7751 7755 7759 7763 7767 7771 666 7710 7714 7718 7722 7726 7730 7734 7738 7742 7746 7750 7754 7758 7762 7766 7770 7774 665 7714 7718 7722 7726 7730 7734 7738 7742 7746 7750 7754 7758 7762 7766 7770 7774 7778 664 7717 7721 7725 7729 7733 7737 7741 7745 7749 7753 7757 7761 7765 7769 7773 7777 7181 663 77121 7725 7729 7733 7737 7741 7745 7749 7753 153 7761 7765 7169 7773 7777 7781 7784 662 7724 7728 7732 7736 7740 7744 7748 7752 7756 7760 7764 7768 7172 7776 7780 7784 7788 661 7727 7731 7735 7739 7743 7747 7751 7755 7759 7763 7767 7771 7775 7779 7783 7787 7791 660 7731 7735 7739 7743 7747 7751 7755 7759 7763 7767 7771 T1118 7779 7783 7787 7791 7795 659
162. 01 7406 7410 7415 7419 7424 7428 7433 7437 7442 7446 7451 7455 7460 7464 7469 7473 7478 7482 7487 7491 7496 7500 7505 7509 7514 7518 7523 7528 7532 7537 7541 7546 7550 7555 7559 7564 7568 72 0 7212 7217 7222 7226 7231 7235 7240 7244 7249 7253 7258 7262 7267 7271 7276 7280 7285 73 0 7218 7222 7227 7231 7236 7240 7245 7249 7254 7258 7263 7267 7272 7276 7281 7285 7290 7294 7299 7303 7308 7312 7317 7321 7326 7330 7335 7339 7344 7348 7353 7357 7362 7366 7371 7375 7380 7384 7389 7393 7398 7402 7407 7411 7416 7420 7425 7429 7434 7438 7443 7447 7452 7456 7461 7465 7470 7474 7479 7483 7488 7492 7497 7501 7506 7510 7915 7519 7524 7528 7533 7537 7542 7546 7551 7555 7560 7564 7569 7573 7578 263 13 Wavelength of Light Compensation Table 54 English Low Alt Mid Temp Med Humidity Temp 74 to 90 F Press 27 to 31 inches 50 Humidity BAROMETRIC PRESSURE IN INCHES OF MERCURY TEMPERATURE IN DEGREES FAHRENHEIT 74 0 75 0 76 0 77 0 78 0 79 0 80 0 81 0 82 0 83 0 84 0 85 0 86 0 87 0 88 0 89 0 90 0 31 00 7223 7229 7234 7240 7245 7250 7256 7261 7266 7272 7277 7282 7288 7293 7298 7303 7309 30 95 7228 7233 7239 7244 27249 7255 7260 7265 7271 7276 7281 7287 7292 7297 7303 7308 7313 30 90 7232 7238 7243 7249 7254 27259 7265 7270 7275 7281 7286 7291 7296 7302 7307 7312 7317 30 85 7237 7242 7248 7253 7258 7264 7269 7274 7280 7
163. 01 7705 7709 7713 7718 7722 683 7657 7661 7665 7670 7674 7678 7682 7687 7691 7695 7700 7704 7708 272713 7717 7721 7125 7664 7669 7673 7677 7682 7686 7690 7694 7699 7703 7707 7712 7716 7720 7725 7729 681 7664 7668 7672 7676 7681 7685 7689 7694 7698 7702 7706 7711 7715 7719 7724 7728 7732 680 1667 7671 7676 7680 7684 7688 7693 7697 7701 7706 7710 7714 7718 7723 7727 7731 7236 679 7671 7675 7679 7683 7688 7692 7696 7700 7705 7709 7713 7717 7722 7726 71730 7735 7739 678 1674 7678 7683 7687 7691 7695 7700 7704 7708 7712 7717 7721 7725 7729 71734 7738 7742 677 7677 7682 7686 7690 7694 7699 7703 7707 7711 7716 7720 7724 7729 7733 7737 7741 7746 676 7681 7685 7689 7694 7698 7702 7706 7711 7715 7719 7723 7728 7732 7736 7740 7745 7749 675 7684 7689 7693 7697 7701 7706 7710 7714 7718 7723 21723 7731 7735 7740 7744 7748 7752 674 7688 7692 7696 7701 7705 7709 7713 7717 7722 7726 7730 7734 7739 7743 7747 7751 7756 673 7691 7695 7700 7704 7708 7712 7717 7721 7725 7729 7734 7738 7742 7746 7751 7755 7759 672 7695 7699 7703 7707 7712 7716 7720 7724 7729 7733 7737 7741 7745 7750 7754 7758 7762 671 7698 7702 7707 7711 7715 7719 7723 7728 7732 7736 7740 7745 7749 7753 7757 7762 7766 670 7702 7706 7710 7714 7718 7723 7727 7731 7735 7740 7744 7148 7752 7756 7761 7765 7769 669 7705 7709 7713 7718 7722 7726 7730 7735 7139 7743 7747 1151 7756 7760 7764 7768 7773 668 7709 7713 7717 7721 7725 7730 7734 7738 7742 7746 7751 7755 7759 7763 7767 7772 7776 667 7712 7716 7720 7725 7729 7733 7
164. 054 7058 7061 7065 7069 7072 7076 7080 7083 7087 7091 7095 7098 7102 7106 7109 7113 7117 7120 7124 7128 7132 7135 7139 7143 7146 7150 7154 7157 7161 7165 7169 7172 7176 7180 7183 7187 7191 7194 7198 7202 7205 7209 7213 7217 7220 7224 7228 7231 7235 7239 7242 7246 7250 7254 7257 7261 7265 7268 7212 7276 7219 7283 7287 7296 7294 7298 7302 7305 7309 7313 7316 7320 7324 7327 7331 7335 7338 7342 11 0 7052 7056 7059 7063 7067 7070 7074 7078 7081 7085 7089 7092 7096 7100 7103 7107 7111 7115 7118 7122 7126 7129 7133 7137 7140 7144 7148 7151 7155 1159 7163 7166 7170 7174 7177 7181 7185 7188 7192 7196 7199 7203 7207 7210 7214 7218 7222 7225 7229 7233 7236 7240 7244 7247 7251 7255 7258 7262 7266 7270 7273 7271 7281 7284 7288 7292 7295 7299 7303 7306 7310 7314 7317 7321 7325 7329 7332 7336 7340 7343 7347 Its on 7057 7061 7064 7068 7072 7076 7079 7083 7087 7090 7094 7098 7101 7105 7109 7112 7116 7120 7123 7127 7131 7134 7138 7142 7146 7149 7153 7157 7160 7164 7168 7171 7175 7179 7182 7186 7190 7193 7197 7201 7204 7208 7212 7215 7219 7223 7227 7230 7234 7238 7241 7245 7249 7252 7256 7260 7263 7267 7271 7274 7278 7282 7285 7289 7293 7297 7300 7304 7308 7311 7315 7319 7322 7326 7330 7333 7337 7341 7344 7348 7352 12 0 7062 7066 7070 70
165. 07 7612 7616 7620 7624 7629 7633 7637 7642 7646 7650 7655 7659 7663 7668 7672 7676 7680 7685 97 0 7345 7350 7354 7358 7362 7367 7371 7375 7380 7384 7388 7393 7397 7401 7405 7410 7414 7418 7423 7427 7431 7436 7440 7444 7448 7453 7457 7461 7466 7470 7474 7479 7483 7487 7491 7496 7500 7504 7509 7513 7517 7522 7526 7530 7534 7539 7543 7547 7552 7556 7560 7565 7569 7573 7578 7582 7586 7590 7595 7599 7603 7608 7612 7616 7621 7625 7629 7633 7638 7642 7646 7651 7655 7659 7664 7668 7672 7676 7681 7685 7689 98 0 7350 7355 7359 7363 7368 7372 7376 7380 7385 7389 7393 7398 7402 7406 7411 7415 7419 7423 7428 7432 7436 7441 7445 7449 7453 7458 7462 7466 7471 7475 7479 7484 7488 7492 7496 7501 7505 7509 7514 7518 7522 7526 7531 7535 7539 7544 7548 7552 7557 7561 7565 7569 7574 7578 7582 7587 7391 7595 7599 7604 7608 7612 7617 7621 7628 7630 7634 7638 7642 7647 7651 7655 7660 7664 7668 7672 7677 7681 7685 7690 7694 99 0 7356 7360 7364 7368 7373 7377 7381 7386 7390 7394 7398 7403 7407 7411 7416 7420 7424 7428 7433 7437 7441 7446 7450 7454 7458 7463 7467 7471 7476 7480 7484 7488 7493 7497 7501 7506 7510 7514 7518 7523 7527 7531 7536 7540 7544 7548 7553 7557 7561 7566 7570 7574 7578 7583 7587 7591 7596 7600 7604 7608 7613 7617 7621 7626 76
166. 093 7098 7104 7110 7116 7122 7127 7133 7139 7144 7150 7156 7161 7167 7172 30 40 7086 7091 7097 7103 7109 7115 27121 7126 7132 7138 7143 7149 7155 7160 7166 7171 7177 30 35 7090 7096 7102 7108 7114 7120 7125 7131 7137 7142 7148 7154 7159 7165 7171 7176 7182 30 30 7095 7101 7107 7113 7118 7124 7130 7136 7141 7147 7153 7158 7164 7170 7175 7181 7186 30 25 7100 7106 7112 7117 7123 7129 7135 7140 7146 7152 7157 7163 7169 7174 7180 7185 7191 30 20 7105 7111 7116 7122 7128 7134 7139 7145 7151 7157 7162 7168 7173 7179 7185 7190 7196 30 15 7110 7115 7121 7127 7133 7139 27144 7150 7156 7161 7167 7172 7178 7184 7189 7195 7200 30 10 7114 7120 7126 7132 7138 27143 7149 7155 7160 7166 7172 7177 7183 7188 7194 7199 7205 30 05 7119 7125 7131 7137 7142 7148 7154 7159 7165 27171 7176 7182 7187 7193 7199 7204 7210 30 00 7124 37130 7136 7142 7147 7153 7158 7164 7170 7175 7181 7187 7192 7198 7203 7209 7214 29 95 7129 7135 7140 7146 7152 7158 7163 7169 7174 7180 7186 7191 7197 7202 7208 7213 7219 29 90 7134 7139 7145 7151 7157 7162 7168 7174 7179 7185 7190 7196 7201 7207 7213 7218 7223 29 85 7138 7144 7150 7156 7161 7167 7173 7178 7184 7190 7195 7201 7206 7212 7217 7223 7228 29 80 7143 7149 7155 7160 7166 7172 27177 7183 7189 7194 7200 7205 7211 7216 7222 7227 7233 29 75 7148 7154 7159 7165 7171 7176 7182 7188 7193 7199 7204 7210 7216 7221 7227 7232 7237 29 70 7153 7158 7164 7170 7176 7181 7187 7192 7198 7204 7209 7215 7220 7226 7231 7237 7242 29 65 7158 7163 7169 7175 7180 7186 719
167. 1 5 km 5000 feet the absolute air pressure there and then would be closer to 635 mm 25 inches of mercury To measure pressure you need an absolute pressure indicator which is equivalent to a barometer that has not been corrected to sea level When such a pressure indicator is not readily available you can make a reasonable approximation to absolute pressure by reducing the barometric pressure obtained from the nearest weather station at the local airport for instance by 2 5 mm 0 1 inch of mercury of each 30 meters 100 feet of altitude That is _ Altitude _ Altitude P 39 CX 2 rdc c wd For Metric Units For English Units where PA is the absolute pressure and PB is the barometric pressure Note that the altitude of the weather station is not considered here since the number they report has already been corrected to sea level by the station Laser and Optics User s Manual Vol Wavelength of Light Compensation 13 Calculation of Exact Wavelength of Light WOL Compensation Factor If the Laser Position Transducer is being operated in an environment that is not included in the compensation factor tables in this manual you can calculate the exact compensation factor to an accuracy of 0 1 ppm by using the following formulas CAUTION The accuracy of your Laser Position Transducer is a function of your ability to provide it with the correct compensation factor for your measurement conditions When determining the compensati
168. 10721A Two Axis Differential Interferometer in Volume II of this manual Multiaxis systems using Agilent 10735A and Agilent 10736A three axis interferometers Multiaxis systems using Agilent 10735A and Agilent 10736A interferometers are described in Chapter 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers in Volume II of this manual Optical Device Troubleshooting Problems with the optical devices are usually caused by their misalignment Refer to the alignment procedures in Chapter 4 System Installation and Alignment of this manual for further information Air turbulence caused by ventilation equipment or temperature gradients near the laser beam path can also cause measurement problems If this is suspected shield the area around the laser beam and optical devices with cardboard tubing plastic sheet or other suitable material Some problems with sporadic counting and drift can be traced to air turbulence around the measurement path This should be considered as a possibility before troubleshooting other parts of the system The Agilent 10735A and Agilent 10736A interferometers are designed to use a 9 mm nominal diameter laser beam The required 9 mm beam is available from an Agilent 5517C 009 laser head The laser tube in this laser head is referenced to the base of the laser head The laser head base is different from that of the standard Agilent 5517C Laser Head and requires a special mounti
169. 13 7716 7720 7723 7727 7730 7734 37317 7741 7744 7748 7751 7755 7758 7762 7765 7769 7772 28 0 7497 7501 7504 7508 7511 7515 7518 7522 7525 7529 7532 7536 7539 7543 7546 7550 7953 7557 7560 7564 7567 7571 7574 7578 7581 7584 7388 7591 7595 7598 7602 7605 7609 7612 7616 7619 7623 7626 7630 7633 7637 7640 7644 7647 7651 7654 7658 7661 7665 7668 7671 7675 7678 7682 7685 7689 7692 7696 7699 7703 7706 7710 7713 7717 7720 7724 7727 7731 17734 7738 7741 7745 7148 7752 7755 7758 7162 7765 7769 7772 7776 28 5 7502 7505 7509 7512 7516 7519 7523 7526 7530 7533 1536 7540 7543 7547 7550 7554 7557 7561 7564 7568 7571 7575 7578 7582 7585 7589 7592 7596 7599 7602 7606 7609 7613 7616 7620 7623 7627 7630 7634 7637 7641 7644 7648 7651 7655 7658 7662 7665 7668 7672 7675 7679 7682 7686 7689 7693 7696 7700 7703 7707 7710 7714 7717 7721 7724 7728 7731 7734 7738 7741 7745 7748 7752 7755 7759 7762 7766 7769 7773 7776 7780 29 0 7506 7509 7513 7516 7520 7523 7527 7530 7534 7537 7541 7544 7548 7551 7555 7558 7561 7565 7568 7572 7575 7579 7582 7586 7589 7593 7596 7600 7603 7607 7610 7613 7617 7620 7624 7627 7631 7634 7638 7641 7645 7648 7652 7655 7659 7662 7666 7669 7672 7676 7679 7683 7686 7690 7693 7697 7700 7704 7707 7711 7714 7718 7721 7724 7
170. 15 7619 7623 7628 7632 7636 7641 7645 7649 7654 7658 7662 7667 7671 94 0 7330 7334 7338 7343 7347 7351 7356 7360 7364 7369 7373 7377 7381 7386 7390 7394 7399 7403 7407 7412 7416 7420 7425 7429 7433 7438 7442 7446 7451 7455 7459 7464 7468 7472 7477 7481 7485 7490 7494 7498 7503 7507 7511 7516 7520 7524 7529 7533 7537 7542 7546 7550 7554 7559 7563 7567 7572 7576 7580 7585 7589 7593 7598 7602 7606 7611 7615 7619 7624 7628 7632 7637 7641 7645 7650 7654 7658 7663 7667 7671 7676 95 0 7335 7339 7343 7348 7352 7356 7361 7365 7369 7374 7378 7382 7387 7391 7395 7400 7404 7408 7413 7417 7421 7425 7430 7434 7438 7443 7447 7451 7456 7460 7464 7469 7473 7477 7482 7486 7490 7495 7499 7503 7507 7512 7516 7520 7525 7529 7533 7538 7542 7546 7551 7555 7559 7564 7568 7572 7577 7581 7585 7590 7594 7598 7602 7607 7611 7615 7620 7624 7628 7633 7637 7641 7646 7650 7654 7659 7663 7667 7672 7676 7680 Laser and Optics User s Manual Vol 96 0 7340 7344 7349 7353 7357 7362 7366 7370 7374 7379 7383 7387 7392 7396 7400 7405 7409 7413 7418 7422 7426 7431 7435 7439 7443 7448 7452 7456 7461 7465 7469 7474 7478 7482 7487 7491 7495 7499 7504 7508 7512 7517 7521 7525 7530 7534 7538 7543 7547 7551 7555 7560 7564 7568 7573 7577 7581 7586 7590 7594 7599 7693 76
171. 1728 7731 7735 7738 7742 7145 7149 7752 7756 7759 7763 7766 7770 7773 7777 7780 7783 29 5 7510 7514 7517 7521 7524 7527 7531 7534 7538 7541 7545 7548 7552 7555 7559 7562 7566 7569 7573 7576 7579 7583 7586 7590 7593 7597 7600 7604 7607 7611 7614 7618 7621 7624 7628 7631 7635 7638 7642 7645 7649 7652 7656 7659 7663 7666 7669 7673 7676 7680 7683 7687 7690 7694 7697 7701 7704 7708 7711 7714 7718 7721 7125 7728 7732 7735 7739 7742 7746 7749 7753 7756 7760 7763 7766 7770 7773 7777 7780 7784 7787 30 0 7514 7518 7521 7525 7528 7532 7535 7539 7542 7546 7549 7552 7556 7559 7563 7566 7570 7573 7577 7580 7584 7587 7590 7594 7597 7601 7604 7608 7611 7615 7618 7622 7625 7628 17632 7635 7639 7642 7646 7649 7653 7656 7660 7663 7667 7670 7673 7677 7680 7684 7687 7691 7694 7698 7101 7705 7708 7711 7715 7718 7722 7725 7729 7732 7736 7739 7743 7746 7749 7753 7756 7760 7763 7767 7770 7774 7777 7781 7784 7788 7791 235 13 Wavelength of Light Compensation Table 26 Metric High Alt High Mid Temp Low Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 20 Humidity es TEMPERATURE IN DEGREES CELSIUS 30 5 31 0 31 5 32 0 32 5 33 0 33 5 34 0 34 5 35 0 35 5 36 0 36 5 37 0 37 5 38 0 38 5 720 7519 7523 7527 7531 7535 7539 7544 7548 7552 7556 7560 7564 7568 7572 7576 7581 7585 719 7522 7526 75
172. 1745 1149 7753 669 7695 7699 7702 7706 7710 7714 7718 7722 7726 17729 17133 7737 7741 7745 7748 7752 7756 668 1698 7702 7706 7710 7714 7717 7721 7725 7129 7733 7737 7740 7744 7748 7752 1156 7759 667 7702 7705 7709 7713 7717 7121 7725 71729 71732 7736 11740 7744 7748 7151 7755 7759 7763 666 7705 7709 7713 7717 7720 7724 7728 7132 7736 7740 7743 7747 7751 7755 1159 7762 7766 665 7708 7712 7716 7720 7724 7728 7732 17135 7739 7743 7747 7751 7754 11758 1762 7166 7770 664 7112 7716 7720 7723 7727 1131 7735 7739 7743 7746 7150 7754 7758 7762 7765 7769 7773 663 7715 7719 7723 7727 71731 7735 1738 7742 7746 7750 7154 7157 1761 7765 17169 7772 1118 662 7719 7723 7727 71730 7734 7738 7742 7746 7749 7753 7757 7761 7765 7768 7772 7776 7780 661 7722 7726 7730 7734 7738 7741 7745 7749 7753 7757 7760 7764 7768 7772 7775 7779 7783 660 7726 7730 27733 7737 7741 72745 7749 7752 7756 7160 7164 7768 7771 7775 7779 0183 1186 659 7729 7733 27737 7741 7744 1748 7752 71756 7760 7763 7767 777l 7775 7778 17182 1186 7790 658 1733 7736 7740 7744 7748 7752 7756 7759 7763 7767 7771 7774 7778 7782 7786 7789 7793 657 7736 7740 7744 7748 7751 7755 7759 7763 7766 7710 7774 7118 7782 7785 7789 317793 7796 656 7739 7143 7747 71751 7755 7759 7762 7766 7770 7774 7777 7181 7785 7789 7792 7796 7800 655 7743 7747 7751 7754 71758 7762 7766 7770 7773 7777 7781 7185 7788 7792 7796 11799 1803 654 7146 7750 7754 7758 7762 7765 7769 7773 7777 7780 7284 7788 7792 7795 7799 7803 7806 653 7750 7754 7757 77
173. 18 5 19 0 19 5 20 0 20 5 21 0 21 5 720 7373 7377 7382 7387 7392 7396 7401 7406 7410 7415 7420 7424 7429 7434 7438 7443 7447 719 7376 7381 27386 7390 7395 7400 7405 7409 7414 7419 7423 7428 7432 7437 7442 7446 7451 718 7380 27385 7389 7394 7399 7404 7408 7413 7418 7422 7427 7431 7436 7441 7445 7450 7454 717 7384 7388 7393 7398 7402 7407 7412 7416 7421 7426 7430 7435 7440 7444 7449 7453 7458 716 7387 7392 27397 7401 7406 7411 27415 7420 7425 7429 7434 7439 7443 7448 7452 7457 7462 715 7391 7396 7400 7405 7410 7414 7419 7424 7428 7433 7438 7442 7447 7451 7456 7461 7465 714 7395 7399 7404 7409 7413 7418 7423 7427 7432 7437 7441 7446 7450 7455 7460 7464 7469 713 7398 7403 7408 7412 7417 7422 7426 743 7436 7440 7445 7449 7454 7459 7463 7468 7472 712 7402 7407 7411 7416 7421 7425 7430 7435 7439 7444 7448 7453 7458 7462 7467 7471 7476 711 7406 7410 7415 7420 7424 7429 7434 7438 7443 7447 7452 7457 7461 7466 7470 7475 7479 710 7409 7414 7419 7423 7428 7433 7437 7442 7446 7451 7456 7460 7465 7469 7474 7478 7483 709 7413 7418 7422 7427 7431 7436 7441 7445 7450 7455 7459 7464 7468 7473 7477 7482 7486 708 7417 7421 7426 7430 7435 7440 7444 7449 7454 7458 7463 7467 7472 7476 7481 7485 7490 707 7420 7425 7429 7434 7439 7443 7448 7453 7457 7462 7466 7471 7475 7480 7485 7489 7494 706 7424 7428 7433 7438 7442 7447 7452 7456 7461 7465 7470 7474 7479 7484 7488 7493 7497 705 7427 7432 7437 7441 7446 7451 7455 7460 7464 7469 7474 7478 7483 7487 7492 7496 7501 704 7431 7436 74
174. 18 7623 7627 7631 7636 7640 7644 7648 7653 7657 7661 7665 7670 7674 7678 7682 653 7618 7622 7626 27631 7635 7639 7643 7648 7652 7656 7660 7665 7669 7673 7677 7681 7686 652 7621 27626 7630 7634 7638 7643 27647 7651 7656 7660 7664 7668 7672 7677 7681 7685 7689 651 7625 7629 7634 7638 7642 7646 7651 7655 7659 7663 7668 7672 7676 7680 7684 7689 7693 650 7629 7633 7637 7641 7646 7650 7654 7659 7663 7667 7671 7675 7680 7684 7688 7692 7696 649 7632 7637 7641 7645 7649 7654 7658 7662 7666 7671 7675 7679 7683 7687 7692 7696 7700 648 7636 7640 27645 27649 7653 7657 7662 7666 7670 7674 7678 7683 7687 7691 7695 7699 7703 647 7640 7644 270648 7652 7657 7661 7665 7669 7674 7678 7682 7686 7690 7695 7699 7703 7707 646 7643 7648 7652 7656 7660 7665 7669 7673 7677 7681 7686 7690 7694 7698 7702 7706 7711 645 7647 7651 7655 7660 7664 7668 7672 7677 7681 7685 7689 7693 7698 7702 7706 7710 7714 644 7651 7655 7659 7663 7668 7672 7676 7680 7684 7689 7693 7697 7701 7705 7709 7714 7718 643 7654 7658 7663 7667 7671 27675 7680 7684 7688 7692 7696 7701 7705 7709 7713 7717 7721 642 7658 7662 7666 7671 7675 7679 7683 7687 7692 7696 7700 7704 7708 7712 7717 7721 7725 641 7662 7666 7670 7674 7678 7683 7687 7691 7695 27699 7704 7708 7712 7716 7720 71724 7728 640 7665 7669 7674 7678 7682 7686 7690 7695 7699 7703 7707 7711 7715 7720 7724 7728 7732 250 Laser and Optics User s Manual Vol BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 22 0 720 7452 719 7455 718 7459 717 7463 716 7466
175. 195 7813 7831 7850 7868 7886 7904 7923 7941 7959 7978 7996 8014 8032 8051 8069 8087 8105 8124 8142 8160 8178 70 0 7202 7220 7238 7256 7274 7292 7310 7328 7346 7364 7382 7401 7419 7437 7455 7473 7491 7509 7527 7545 7563 7581 7600 7618 7636 7654 7672 7690 7708 7726 7744 7762 7780 7799 7817 7835 7853 7871 7889 7907 7925 7943 7961 7979 7997 8016 8034 8052 8070 8088 8106 8124 8142 8160 8178 8196 75 0 7229 7247 7265 7283 7300 7318 7336 7354 7372 7390 7408 7426 7444 7462 7480 7498 7516 7533 7351 7569 7587 7605 7623 7641 7659 7677 7695 7713 7731 7748 7766 7784 7802 7820 7838 7856 7874 7892 7910 7928 7946 7963 7981 7999 8017 8035 8053 8071 8089 8107 8125 8143 8161 8178 8196 8214 80 0 7256 7273 7291 7309 7327 7344 7362 7380 7398 7415 7433 7451 7469 7486 7504 7522 7540 7557 7575 7593 7611 7628 7646 7664 7682 7699 7717 7735 7753 7770 7788 7806 7824 7842 7859 7877 7895 7913 7930 7948 7966 7984 8001 8019 8037 8055 8072 8090 8108 8126 8143 8161 8179 8197 8214 8232 85 0 7282 7300 7317 7335 7353 7370 7388 7405 7423 7441 7458 7476 7493 7511 7529 7546 7564 7581 7599 7616 7634 7652 7669 7687 7704 7722 7740 7157 7775 7792 7810 7828 7845 7863 7880 7898 7915 7933 7951 7968 7986 8003 8021 8039 8056 8074 8091 8109 8127 8144 8162 8179 8197 821
176. 2 7266 7269 7213 7276 7280 7283 7287 7290 7294 7297 7301 7304 7308 7311 7315 7318 7322 7326 7329 7333 7336 7340 7343 7347 7350 7354 7357 7361 7364 7368 7371 7375 7378 7382 7385 7389 7393 7396 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7449 7453 7456 7460 7463 7467 24 5 7189 7193 7196 7200 7203 7207 7210 7214 7218 7221 7225 7228 7232 7235 7239 7242 7246 7249 7253 7256 7260 7263 7267 7270 7274 7277 7281 7284 7288 7291 7295 7299 7302 7306 7309 7313 7316 7320 7323 7327 7330 7334 7337 7341 7344 7348 7351 7355 7358 7362 7365 7369 7372 7376 7380 7383 7387 7390 7394 7397 7401 7404 7408 7411 7415 7418 7422 7425 7429 7432 7436 7439 7443 7446 7450 7453 7457 7461 7464 7468 7471 25 0 7194 7198 7201 7205 7208 7212 7215 7219 7222 7226 7229 7233 7236 7240 7243 7247 7251 7254 7258 7261 7265 7268 7272 17275 7279 7282 7286 7289 7293 7296 7300 7303 7307 7310 7314 7317 7321 7324 7328 7331 7335 7338 7342 7345 7349 7352 7356 7360 7363 7367 7370 7374 7377 7381 7384 7388 7391 7395 7398 7402 7405 7409 7412 7416 7419 7423 7426 7430 7433 7437 7440 7444 7447 7451 7454 7458 7461 7465 7468 7472 7476 25 5 7199 7203 7206 7210 7213 7217 7220 7224 7227 7231 7234 17238 7241 7245 7248 7252 7255 7259 7262 7266 7269 7273 7276 7280 7
177. 2 7476 7479 7483 7487 7491 7494 7498 7502 7505 7509 7513 7517 7520 7524 7528 7531 7535 7539 7542 7546 7550 7554 7357 7561 7565 7568 7572 7576 7580 7583 7587 7591 7594 7598 7602 7606 7609 7613 7617 7620 7624 7628 10 0 7336 7340 7343 7347 7351 7354 7358 7362 7365 7369 7373 7377 7380 7384 7388 7391 7395 7399 7402 7406 7410 7414 7417 7421 7425 7428 7432 7436 7439 7443 7447 7451 7454 7458 7462 7465 7469 7473 7477 7480 7484 7488 7491 7495 7499 7502 7506 7510 7514 7517 7521 7525 7528 7532 7536 7539 7543 7547 7551 7554 7558 7562 7565 7569 7573 7576 7580 7584 7588 7591 7595 7599 7602 7606 7610 7614 7617 7621 7625 7628 7632 10 5 7341 7344 7348 7352 7355 7359 7363 7366 7370 7374 7318 7381 7385 7389 7392 7396 7400 7403 7407 7411 7414 7418 7422 7426 7429 7433 7437 7440 7444 7448 7451 7455 7459 7463 7466 7470 7474 7477 7481 7485 7488 7492 7496 7499 7503 7507 7511 7514 7518 7522 7525 7529 7333 7536 7540 7544 7548 7551 7555 7559 7562 7566 7570 7573 7577 7581 7584 7588 7592 7596 7599 7603 7607 7610 7614 7618 7621 7625 7629 7633 7636 11 0 7345 7349 7353 7356 7360 7364 7367 7371 7375 7378 7382 7386 7390 7393 7397 7401 7404 7408 7412 7415 7419 7423 7426 7430 7434 7438 7441 7445 7449 7452 7456 7460 7463 7467 7471 7474 7478 7482 7485 7489 749
178. 2 7897 7901 7906 7910 1915 7919 7924 70 0 7566 2871 7575 7580 7585 7589 7594 7598 7603 7607 7612 7616 7621 7625 7630 7634 7639 7643 7648 7652 7657 7661 7666 7670 7675 7679 7684 7689 7693 7698 7702 7707 7711 7716 7720 7725 7729 7734 7738 7743 7747 7782 7756 7761 7765 7770 7774 7779 7783 7788 7793 7797 7802 7806 7811 7815 7820 7824 7829 7833 7838 7842 7847 7851 7856 7860 7865 7869 7874 7878 7883 7888 7892 7897 7901 7906 7910 7915 7919 7924 7928 71 0 7571 7576 7580 7585 7589 7594 7598 7603 7607 7612 7616 7621 7625 7630 7635 7639 7644 7648 7653 7657 7662 7666 7671 7675 7680 7684 7689 7693 7698 7702 7707 7711 7716 7720 7725 7729 7734 7738 7743 7747 7752 7756 7761 7765 7770 7774 7779 7783 7788 7792 7797 7802 7806 7811 7815 7820 7824 7829 7833 7838 7842 7847 7851 7856 7860 7865 7869 7874 7878 7883 7887 7892 7896 7901 7905 7910 7914 7919 7923 7928 7932 72 0 7576 7581 7585 7590 7594 7599 7603 7608 7612 7617 7621 7626 7630 7635 7639 7644 7648 7653 7657 7662 7666 7671 7675 7680 7684 7689 7693 7698 7702 7707 TILL 7716 7720 7725 7729 7734 7738 7743 7747 7752 7756 7761 7765 7770 7774 7119 7783 7788 7792 7797 7801 7806 7810 7815 7819 7824 7828 7833 7837 7842 7847 7851 7856 7860 7865 7869 7874 7878 7883 7887 7892 7896 7901 7905 7910 791
179. 2 7197 7203 7208 7214 7219 7225 7230 7236 7241 7247 29 60 7162 7168 7174 7179 7185 7191 7196 7202 7208 7213 7219 7224 7230 7235 7241 7246 7251 29 55 7167 7173 7179 7184 7190 7195 7201 7207 7212 7218 7223 77229 7234 7240 7245 7251 7256 29 50 7172 7178 7183 7189 7195 7200 7206 7211 7217 7222 77228 7233 7239 7244 7250 7255 7261 29 45 7177 7182 7188 7194 7199 7205 7211 7216 7222 7227 27233 7238 7244 7249 7255 7260 7265 29 40 7182 27187 7193 7199 7204 7210 7215 7221 7226 7232 7237 7243 7248 7254 7259 7265 7270 29 35 7186 7192 7198 7203 7209 7214 7220 7226 7231 7237 7242 7248 7253 7258 7264 7269 7275 29 30 7191 7197 7202 7208 7214 7219 7225 7230 7236 7241 7247 7252 7258 7263 7269 7274 7279 29 25 7196 7202 7207 7213 7218 7224 7230 7235 7241 7246 7252 7257 7262 7268 7273 7279 7284 29 20 7201 7206 7212 7218 7223 7229 7234 7240 7245 7251 7256 7262 7267 7272 7278 7283 7289 29 15 7206 7211 7217 7222 7228 7233 7239 7245 7250 7255 7261 7266 27272 7277 7282 27288 7293 29 10 7210 7216 7222 27227 27233 7238 7244 7249 7255 7260 7266 7271 27276 7282 7287 7292 7298 29 05 7215 7221 7226 7232 7237 7243 7248 7254 27259 7265 7270 7276 7281 7286 7292 7297 7302 29 00 7220 7226 7231 7237 7242 27248 7253 7259 7264 7270 7275 7280 7286 7291 7296 7302 7307 28 95 7225 7230 7236 7241 7247 7252 7258 7263 7269 27274 27280 7285 7290 7296 7301 7306 7312 28 90 7229 7235 7241 7246 7252 7257 7263 7268 7274 27279 7284 27290 7295 7300 7306 7311 7316 28 85 7234 7240 7245 7251 7256 7262 7267 7273 7278 7
180. 2 7198 7203 7209 7214 7220 7225 29 85 7140 7145 7151 7157 7163 7168 7174 7180 7185 7191 7197 7202 7208 7213 7219 7225 7230 29 80 7144 7150 7156 7162 7167 7173 7179 7184 7190 7196 7201 7207 7213 7218 7224 7229 7235 29 75 7149 7155 7161 7166 7172 7278 7184 7189 7195 7201 7206 7212 7217 7223 7228 7234 7239 29 70 7154 7160 7165 7171 7177 7183 7188 7194 7200 7205 7211 7216 7222 31228 7233 7239 7244 29 65 7159 7164 7170 7176 7182 7187 7193 7199 7204 7210 7216 7221 7227 7232 7238 7243 7249 29 60 7164 7169 7175 7181 7186 7192 7198 7203 7209 7215 7220 7226 7231 7237 7242 7248 7253 29 55 7168 7174 7180 7186 7191 7197 7203 7208 7214 7219 7225 7230 7236 7242 7247 7252 7258 29 50 7173 7179 7185 7190 7196 7202 7207 7213 7218 7224 7230 7235 7241 7246 7252 7257 7263 29 45 7178 7184 7189 7195 7201 7206 7212 7218 7223 7229 7234 7240 7245 7251 7256 7262 7267 29 40 7183 7188 7194 7200 7205 7211 7217 7222 7228 7233 7239 7245 7250 7256 7261 37266 37212 29 35 7188 7193 7199 7205 7210 7216 7221 7227 7233 7238 7244 37249 7255 7260 7266 7271 7277 29 30 7192 7198 7204 7209 7215 7221 7226 2232 7237 7243 7248 7254 7259 7265 7270 7276 7281 29 25 7197 7203 7208 7214 7220 7225 7231 27237 7242 7248 7253 7259 3264 7270 7275 7280 7286 29 20 7202 7208 7213 7219 7225 7230 7236 7241 7247 7252 7258 7263 7269 7274 1280 7285 7290 29 15 7207 7212 7218 7224 7229 7235 7240 7246 7252 7257 7263 7268 7273 7279 7284 7290 7295 29 20 7211 7217 7223 7228 37234 7240 7245 7251 7256 7262 7267 7273 7278 72
181. 2 7607 7611 7616 7620 7624 7629 7633 7638 7642 7646 7651 7655 7660 7664 7668 695 7602 7606 7610 7615 7619 7623 7628 7632 7637 7641 7645 7650 7654 7658 7663 7667 7672 698 7605 7609 7614 7618 7622 7627 7631 7636 7640 7644 7649 7653 7657 7662 7666 7671 7675 697 7608 7613 7617 7622 7626 7630 7635 27639 7643 7648 7652 7656 7661 7665 7670 27674 37678 696 7612 7616 7621 7625 7629 7634 7638 7642 27647 7651 7655 7660 7664 7669 7673 27677 7682 695 7615 7620 7624 7628 7633 7637 7641 7646 7650 7655 7659 7663 7668 7672 7676 27681 7685 694 7619 7623 7627 7632 7636 7641 7645 7649 7654 7658 7662 7667 7671 7675 7680 7684 7688 693 7622 7627 7631 7635 7640 7644 7648 7653 7657 7661 7666 7670 7674 27679 7683 7687 7692 692 7626 7630 7634 7639 7643 7647 7652 7656 7660 7665 7669 7673 7678 7682 7686 7691 7695 691 7629 7633 7638 7642 7646 7651 7655 27659 7664 7668 7672 7677 7681 7686 7690 7694 7699 690 7633 7637 764i 7646 7650 7654 7659 27663 7667 7672 7676 7680 7685 7689 7693 7698 7702 689 7636 7640 7645 7649 7653 7658 7662 7666 7671 7675 7679 7684 7688 7692 7697 7701 7705 688 7639 7644 7648 7652 7657 7661 7665 7670 7674 7678 7683 7687 7691 7696 7700 7704 7709 687 7643 7647 7652 7656 7660 7664 27669 27673 7677 7682 7686 7690 7695 7699 7703 7708 7712 686 7646 7651 7655 7659 7664 7668 7672 7677 7681 7685 7689 7694 7698 7702 7707 7711 7715 685 7650 7654 7658 7663 7667 7671 7676 7680 7684 7689 7693 7697 7701 7706 7710 7714 7719 684 7653 7658 7662 7666 7670 7675 7679 7683 7688 7692 7696 77
182. 2 7786 7791 7795 23 70 7728 7733 7737 7742 7746 7751 7755 7760 7764 7769 7773 7778 7782 7787 7791 7795 7800 23 65 7733 7738 7742 7747 7751 7756 7760 7765 7769 7774 7778 7782 7787 7791 7796 7800 7804 23 60 7738 7742 7747 7751 7756 7760 7765 27169 7774 7778 7783 7787 7791 7796 7800 7805 7809 23 55 7743 7747 7752 7756 7761 7765 7770 7774 7779 7783 7787 7792 7796 7801 7805 7809 7814 23 50 7747 7752 7757 7761 7766 7770 7774 7779 7783 7788 7792 7797 7801 7805 7810 7814 7818 23 45 7752 7757 7761 7766 7770 7775 7779 7784 7788 7792 7797 7801 7806 7810 7814 7819 7823 23 40 7757 7762 7766 7771 7775 7779 7784 7788 7793 7797 7802 7806 7810 7815 7819 7823 7827 23 35 7762 7766 7771 7775 7780 7784 7789 7793 7797 7802 7806 7811 7815 7819 7824 7828 7832 23 30 7767 7771 7776 7780 7785 7789 7793 7798 7802 7807 7811 7815 7820 7824 7828 7832 7837 23 25 7771 7776 7780 7785 7789 7794 7798 7803 7807 7811 7816 7820 7824 7829 7833 7837 7841 23 20 7776 7781 7785 7790 7794 7798 7803 7807 7812 7816 7820 7825 7829 7833 7838 7842 7846 23 15 7781 7785 7790 7794 7799 7803 7808 7812 7816 7821 7825 7829 7834 7838 7842 7846 7851 23 10 7786 7790 7795 7799 7804 7808 7812 7817 7821 7825 7830 7834 7838 7843 7847 7851 7855 23 05 7791 7795 7799 7804 7808 7813 7817 7821 7826 7830 7834 7839 7843 7847 7852 7856 7860 23 00 7795 7800 7804 7809 7813 7817 7822 7826 7831 7835 27839 7843 7848 7852 7856 7860 7865 BAROMETRIC PRESSURE IN INCHES OF MERCURY N Uu a 258 Laser and Optics User s Manual Vol
183. 2 7866 7870 7874 7878 7882 7886 7890 7894 7898 7902 7906 7910 7914 7918 7922 7926 23 80 7866 7870 7874 7878 7882 7887 7891 7895 7899 7903 7907 7910 7914 7918 7922 7926 7930 23 75 7871 7875 7879 7883 7887 7891 7895 7899 7903 7907 7911 7915 7919 7923 7927 7931 7935 23 70 7875 7879 7883 7887 7891 7895 7899 7903 7907 7911 7915 7919 7923 7927 7931 7935 7939 23 65 7880 7884 7888 7892 7896 7900 7904 7908 7912 7916 7920 7924 7928 7932 7935 7939 7943 23 60 7884 7888 7892 7896 7900 7904 7908 7912 7916 7920 7924 7928 7932 7936 7940 7944 7948 23 55 7889 7893 7897 7901 7905 7909 7913 7917 7921 7925 7929 7932 7936 7940 7944 7948 7952 23 50 7893 7897 7901 7905 7909 7913 7917 7921 7925 7929 7933 7937 7941 7945 7949 7952 7956 23 45 7898 7902 7906 7910 7914 7918 7922 7926 7930 7933 7937 7941 7945 7949 7953 7957 7961 23 40 7902 7906 7910 7914 7918 7922 7926 7930 7934 7938 7942 7946 7950 7953 7957 7961 7965 23 35 7907 7911 7915 7919 7923 7927 7930 7934 7938 7942 7946 7950 7954 7958 7962 7966 7969 23 30 7911 7915 7919 7923 7927 7931 7935 7939 7943 7947 7951 7954 7958 7962 7966 7970 7974 23 25 7916 7920 7924 7928 7931 7935 7939 1943 7947 7951 7955 7959 7963 7967 7970 7974 7978 23 20 7920 7924 7928 7932 7936 7940 7944 7948 7952 7956 7959 7963 7967 7971 7975 7979 7982 23 15 7925 7929 7932 7936 7940 7944 7948 1952 7956 7960 7964 7968 7972 7975 7979 7983 7987 23 10 7929 7933 7937 7941 7945 7949 7953 7957 7960 7964 7968 7972 7976 7980 7984 7987 7991 23 05 7934 7937 7941 7945 7949 7953 7
184. 20 7725 7730 11734 7739 7743 7748 7753 7757 7762 24 10 7692 7697 7702 7706 7711 7716 37720 27725 7730 7734 7739 7744 7748 7753 7757 7762 7766 24 05 7697 7702 7706 7711 7716 7721 27725 7130 7734 1739 7744 7748 7753 7757 7762 7766 7771 24 00 7702 7707 771 7716 7721 7725 7730 7135 7139 7744 31748 371753 7757 7762 7767 1771 7776 23 95 7707 7711 27716 7721 7725 7730 7735 27739 7744 7748 7753 7758 7762 7767 7771 7776 7780 23 90 7711 27716 7721 7725 7730 7735 7739 7744 71749 1153 11758 7762 7767 711 1176 7780 7785 23 85 7716 7721 27726 7730 7735 7740 7744 7749 7753 7758 7762 7767 7772 7776 7781 7785 7790 23 80 7721 7726 7730 737735 7740 7744 7749 71753 7758 7763 7767 7772 7776 7781 7785 7790 7794 23 75 7726 7730 7735 7740 7744 71749 7754 7158 7763 7767 7772 1116 31181 7785 1190 1794 7799 23 70 7731 7735 7740 7745 7749 7754 7758 7163 7767 7772 7777 778i 7786 7790 7795 7799 7803 23 65 7735 7740 7745 7749 7754 7158 7763 27768 7772 7777 7781 71786 17790 7195 7199 7804 7808 23 60 7740 7745 7749 7754 7759 7763 7768 7772 7777 7781 7786 7790 1195 7798 7804 7808 7813 23 55 7145 7750 7754 7759 7763 7768 7773 7777 7782 7786 7791 7195 7800 7804 7809 7813 7817 23 50 7750 7754 7759 7764 71768 7773 7777 7782 71786 7791 7795 7800 7804 7809 7813 7818 7822 23 45 7755 7759 7764 7768 7713 7777 7182 7787 7791 7796 3800 7805 7809 7813 7818 7822 7827 23 40 7759 7764 7769 7773 7778 7782 7787 71791 7796 7800 7805 2809 7814 7818 7823 7827 7831 23 35 7764 7769 7773 7778 7782 71787 7792 179
185. 20 meters long Laser Head Cables for Agilent 5517A B BL C D DL FL Laser Head with no reference leg and carry power only used with Agilent 10885A 10889B or N1231A B axis boards cable has spade lugs for connection to a power supply to provide power to the laser head one cable per system 44 Agilent E1847A 060 3 meters long Agilent E1847A 140 7 meters long Agilent E1847A 200 10 meters long Agilent E1847A 300 15 meters long Agilent E1847A 400 20 meters long Agilent E1848A 300 15 meters long Agilent E1848B 060 3 meters long Agilent E1848B 140 7 meters long Agilent E1848B 200 10 meters long Laser and Optics User s Manual Vol System Design Considerations 3 Table 2 Equipment choices continued Laser Head Cables for Agilent 5517A B BL C D DL FL Laser Head with no reference leg and carry power only used with Agilent 10885A 10889B or N1231A B axis boards cable has spade lugs for connection to a power supply to provide power to the laser head one cable per system Cont Agilent E1848B 300 Agilent E1848B 400 Accessory Reflectors 15 meters long 20 meters long Order as required for your application Agilent 10728A Agilent 10769A Agilent 10772A Agilent 10773A Plane Mirror Beam Steering Mirror Turning Mirror Flatness Mirror High Performance Laser Head Cable for Agilent 5517B C D Laser Head used with the Agilent 10897C and 10898A VME Axis boards and N1231A B PCI Axis board cable has
186. 22 7627 7632 7636 7641 7646 7651 7656 7660 7665 7670 7675 7679 7684 7689 7694 26 60 7622 7627 7631 7636 7641 7646 7650 7655 7660 7665 7669 7674 7619 7684 7688 7693 7698 26 55 7626 7631 7636 7641 7645 7650 7655 7660 7664 7669 7674 7679 7683 7688 7693 7697 7702 26 50 7631 7636 7640 7645 7650 7655 7659 7664 7669 7674 7678 7683 7688 7692 7697 7702 7707 26 45 7635 7640 7645 7650 7654 7659 7664 7669 7673 7678 7683 7687 7692 7697 7702 7706 7711 26 40 7640 7645 7649 7654 7659 7663 7668 7673 7678 7682 7687 7692 7696 7701 7706 7711 7715 26 35 7644 7649 7654 7658 7663 7668 7673 7677 1682 7687 7691 7696 7701 7706 7710 7715 7720 26 30 7649 7653 7658 7663 7668 7672 7677 7682 27686 2691 7696 7701 7705 7710 7715 7719 7724 26 25 7653 7658 7663 7667 7672 7677 7682 7686 7691 7696 7700 7705 7710 7714 7119 7724 7728 26 20 7658 7662 7667 27672 7677 7681 7686 7691 7695 7700 7705 7709 7714 7719 7123 7728 7733 26 15 7662 7667 7672 7676 7681 7686 7690 7695 7700 7704 7709 7714 7718 7723 7728 7732 7737 26 10 7667 7671 7676 7681 7685 7690 7695 7700 7704 7709 7714 7718 7723 7121 7732 7737 7741 26 05 7671 7676 7681 7685 7690 7695 7699 7704 7709 7713 7718 7723 7727 1732 7736 7741 7746 26 00 7676 7680 7685 7690 7694 7699 7704 7708 7713 7718 7722 7727 1132 7736 7741 7746 7750 25 95 7680 7685 7690 7694 7699 7704 7708 7713 7717 7722 7727 773l 7736 7741 7148 7750 7755 25 90 7685 7689 7694 7699 7703 7708 7713 7717 7722 7726 7731 7736 7740 7748 7750 7754 7759 25 85 7689 7694 7698 7703 7708 7712
187. 23 7428 7433 7438 7444 7449 7454 29 35 7375 7380 7385 7391 7396 7401 7406 7412 7417 7422 7427 7432 7438 7443 7448 7453 7458 29 30 7379 7385 7390 7395 7400 7406 7411 7416 7421 7426 7432 7437 71442 7447 7452 27457 7463 29 25 7384 7389 7394 7400 7405 7410 7415 7420 7426 7431 7436 7441 7446 7451 7457 7462 7467 29 20 7388 7394 7399 7404 7409 7415 7420 7425 7430 7435 7440 7446 7451 7456 7461 7466 7471 29 15 7393 7398 7403 7409 7414 7419 7424 7429 7434 7440 7445 7450 7455 7460 7465 7471 7476 29 10 7397 7403 7408 7413 7418 7423 7429 7434 7439 7444 7449 7454 7459 7465 7470 7475 7480 29 05 7402 7407 7412 7417 7423 7428 71433 7438 7443 7448 7454 7459 7464 7469 7474 1479 7484 29 00 7406 7412 7417 7422 7427 7432 7437 7443 7448 7453 7458 7463 7468 7473 7479 7484 7489 28 95 7411 7416 7421 7426 7432 7437 1442 7447 7452 7457 7462 7468 7473 7478 7483 7488 7493 28 90 7415 7421 7426 7431 7436 7441 7446 7451 7457 7462 7467 7412 7477 7482 7487 7492 7497 28 85 7420 7425 7430 7435 7440 7446 7451 7456 7461 7466 7471 7476 7481 7487 7492 7497 7502 28 80 7424 7430 7435 7440 7445 7450 7455 7460 7465 7471 7476 7481 7486 7491 7496 7501 7506 28 75 7429 7434 7439 7444 7449 7455 7460 7465 7470 7475 7480 7485 7490 7495 7500 7505 7512 28 70 7433 7438 7444 7449 7454 7459 7464 7469 7474 7479 7484 7490 7495 7500 7505 7510 7515 28 65 7438 7443 7448 7453 7458 7463 7469 7474 7479 7484 7489 7494 7499 7504 7509 7514 7519 28 60 7442 7447 7453 7458 7463 7468 7473 7478 7483 7488 7493 7498 7503 7508 7513
188. 231 29 85 7236 29 80 7240 29 75 7245 29 70 7249 29 65 7254 29 60 7259 29 55 7263 29 50 7268 29 45 7273 29 40 7277 29 35 7282 29 30 7287 29 25 7291 29 20 7296 29 15 7301 29 10 7305 29 05 7310 29 00 7314 28 95 7319 28 90 7324 28 85 7328 28 80 7333 28 75 7338 28 70 7342 28 65 7347 28 60 7352 28 55 7356 28 50 7361 28 45 7365 28 40 7370 28 35 7375 28 30 7379 28 25 7384 28 20 7389 28 15 7393 28 10 7398 28 05 7403 28 00 7407 27 95 7412 27 90 7416 27 85 7421 27 80 7426 27 75 7430 27 70 7435 27 65 7440 27 60 7444 27 55 7449 27 50 7454 27 45 7458 27 40 7463 27 35 7467 27 30 7472 27 25 7477 27 20 7481 27 15 7486 27 10 7491 27 05 7495 27 00 7500 58 0 7135 7139 7144 7149 7153 7158 7162 7167 7172 7176 7181 7186 7190 7195 7199 7204 7209 7213 7218 7223 7227 7232 7236 7241 7246 7250 7255 7260 7264 7269 7273 7278 7283 7287 7292 7297 7301 7306 7310 7315 7320 7324 7329 7334 7338 7343 7348 7352 7357 7361 7366 7371 7375 7380 7385 7389 7394 7398 7403 7408 7412 7417 7422 7426 7431 7435 7440 7445 7449 7454 7459 7463 7468 7472 7477 7482 7486 7491 7496 7500 7505 59 0 7140 7145 7150 7154 7159 7163 7168 7173 7177 7182 7186 7191 7196 7200 7205 7210 7214 7219 7223 7228 7233 7237 7242 7247 7251 7256 7260 7265 7270 7274 7279 7283 7288 7293 7297 7302 7307 7311 7316 7320 7325 7330 7334 7339 7344 7348 7353 7357 7362
189. 232 7238 7243 17249 7254 7260 7265 7271 7276 7282 7287 7293 7298 7304 7309 7314 30 95 7231 7237 7242 7248 7253 7259 7264 7270 7275 21281 7286 7292 7297 7303 7308 7313 7319 30 90 7236 7241 7247 7252 7258 7263 7269 7274 7280 7285 7291 7296 7301 7307 7312 7318 7323 30 85 7240 7246 7251 7257 7262 7268 7273 7279 7284 7290 7295 7300 7306 7311 7317 7322 7328 30 80 7245 7250 7256 7261 27267 7272 72178 7283 7289 7294 7299 7305 7310 7316 7321 7326 7332 30 75 7249 7255 7260 7266 37271 7277 7282 7288 7293 7298 7304 7309 7315 7320 7325 7331 7336 30 70 7254 7259 7265 7270 7276 7281 7287 7292 7297 7303 7308 7314 7319 7324 7330 7335 7341 30 65 7258 7264 7269 7275 7280 7286 7291 7296 7302 7307 7313 7318 7323 7329 7334 7340 7345 30 60 7263 7268 7274 7279 7285 7290 7295 7301 7306 7312 7317 7322 7328 7333 7339 7344 7349 30 55 7267 7273 7278 7284 27289 7294 7300 7305 7311 7316 7321 7327 7332 7338 7343 7348 7354 30 50 7272 7277 7283 7288 7293 7299 7304 7310 7315 7320 7326 7331 7337 7342 7347 7353 7358 30 45 7276 7282 7287 7293 7298 7303 7309 7314 7320 7325 7330 7336 7341 7346 7352 7357 7362 30 40 7281 7286 7292 7297 7302 7308 7313 7319 7324 7329 7335 7340 7345 7351 7356 7361 7367 30 35 7285 7291 7296 7301 7307 7312 7318 7323 7328 7334 7339 7344 7350 7355 7360 7366 7371 30 30 7290 7295 7301 7306 7311 7317 7322 7327 31333 7338 7343 7349 7354 7359 7365 7370 7375 30 25 7294 7300 7305 7310 7316 7321 7326 7332 7337 7343 7348 7353 7359 7364 7369 7375 7380 30 20 7299 7304 7309 7315 7320 73
190. 25 7729 7734 7738 7742 7146 7751 7755 7759 7763 7768 7772 7776 7780 7785 7789 7793 7798 7802 7806 7810 7815 7819 7823 7827 7832 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874 7879 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 7925 7930 7934 7938 7942 7947 7951 7955 7960 7964 7968 7972 7977 7981 7985 7989 7994 7998 8002 8006 8011 8015 8019 8023 8028 8032 8036 8040 8045 8049 8053 8058 8062 103 0 7726 7730 7734 7138 7743 7747 7751 7155 7760 7764 7768 7772 7777 7781 7785 7789 7794 7798 7802 7806 7811 7815 7819 7823 7828 7832 7836 7841 7845 7849 7853 7858 7862 7866 7870 7875 7879 7883 7887 7892 7896 7900 7904 7909 7913 7917 7921 7926 7930 7934 7938 7943 7947 7951 7955 7960 7964 7968 7972 7977 7981 7985 7989 7994 7998 8002 8006 8011 8015 8019 8024 8028 8032 8036 8041 8045 8049 8053 8058 8062 8066 104 0 105 0 7730 7735 7735 7740 7739 7744 7743 7748 7747 7752 7752 7757 7756 7761 7760 7765 7764 7769 7769 7774 7773 7778 7777 7782 7781 7786 7786 7790 7790 7795 7794 7799 7798 7803 7803 7807 7807 7812 7811 7816 7815 7820 7820 7824 7824 7829 7828 7833 7832 7837 7837 7841 7841 7846 7845 7850 7849 7854 7854 7858 7858 7863 7862 7867 7866 7871 7871 7875 7875 7880 7879 7884 7883 7888 7888 7892 7892 7896 7896 7901 7900 7905 7905 7909 7909 7913 7913 7918 7917 7922 7922 7926 7926
191. 26 7331 7336 7342 7347 1352 7358 7363 7368 27374 7379 7384 30 25 7303 7309 7314 7319 7325 7330 7335 7341 7346 7351 7357 7362 7367 7373 7378 7383 7389 30 10 7308 7313 7318 7324 7329 7334 7340 7345 7350 7356 7361 7366 7372 7377 7382 7388 7393 30 05 7312 7318 7323 7328 7334 7339 7344 7350 7355 7360 7366 7371 7376 7381 7387 7392 7397 30 00 7317 7322 7327 7333 7338 7343 7349 7354 7359 7365 7370 7375 7380 7386 7391 7396 7402 29 95 7321 7326 7332 7337 7342 7348 7353 7358 7364 7369 7374 7380 7385 7390 7395 7401 7406 29 90 7326 7331 7336 7342 7347 7352 7358 7363 7368 7373 7379 7384 7389 7395 7400 7405 7410 29 85 7330 7335 7341 7346 7351 7357 7362 7367 7373 7378 7383 7388 7394 7399 7404 7409 7415 29 80 7335 7340 7345 7351 7356 7361 7366 7372 7377 7382 7388 7393 7398 7403 7409 7414 7419 29 75 7339 7344 7350 7355 7360 7366 7371 7376 27381 7387 7392 7397 7402 7408 7413 7418 7423 29 70 7344 7349 7354 7359 7365 7370 7375 7381 7386 7391 7396 7402 7407 7412 7417 7423 7428 29 65 7348 7353 7359 7364 7369 7374 7380 7385 7390 7396 7401 7406 7411 7416 7422 7427 7432 29 60 7353 7358 7363 7368 7374 7379 7384 7389 7395 7400 7405 7410 7416 7421 7426 7431 7436 29 55 7357 7362 7368 7373 7378 7383 7389 7394 7399 7404 7410 7415 7420 7425 7430 7436 7441 29 50 7362 7367 7372 7377 7383 7388 7393 7398 7404 7409 7414 7419 7424 7430 7435 7440 7445 29 45 7366 7371 7377 7382 7387 7392 7398 7403 7408 7413 7418 7424 7429 7434 7439 7444 7450 29 40 7370 7376 7381 7386 7391 7397 7402 7407 7412 7418 74
192. 272 7276 7279 7283 7286 7290 7293 7297 7300 7304 7307 7311 7314 7318 7321 7325 7328 7331 7335 7338 7342 7345 7349 7352 7356 7359 7363 7366 7370 7373 7377 7380 7384 7387 7391 7394 7397 7401 7404 7408 7411 7415 7418 7422 7425 7429 17432 7436 7439 7443 7446 7450 7453 7457 7460 7463 7467 7470 7474 7477 7481 7484 7488 7491 7495 7498 7502 29 0 7228 7232 7235 7239 7242 7246 7249 7253 7256 7260 7263 7267 7270 7274 7277 7280 7284 7287 7291 7294 7298 7301 7305 7308 7312 7315 7319 7322 7326 7329 7333 7336 7339 7343 7346 7350 7353 7357 7360 7364 7367 7371 7374 7378 7381 7385 7388 7391 7395 7398 7402 7405 7409 7412 7416 7419 7423 7426 7430 7433 7437 7440 7444 7447 7450 7454 7457 7461 7464 7468 7471 7475 7478 7482 7485 7489 7492 7496 7499 7502 7506 29 5 7233 7237 7240 7244 7247 7250 7254 7257 7261 7264 7268 7271 7275 7278 7282 7285 7289 7292 7295 7299 7302 7306 7309 7313 7316 7320 7323 7327 7330 7334 7337 7341 7344 7347 7351 7354 7358 7361 7365 7368 7372 7375 7379 7382 7386 7389 7392 7396 7399 7403 7406 7410 7413 7417 7420 7424 7427 7431 7434 7437 7441 7444 7448 7451 7455 7458 7462 7465 7469 7472 7476 7479 7482 7486 7489 7493 7496 7500 7503 7507 7510 30 0 7238 7241 7245 7248 7252 7255 7259 7262 7265 7269 7272 7276 7279 7283 7286 7290
193. 283 7287 7290 7294 7297 7301 7304 7308 7311 7315 7319 7322 7326 7329 7333 7336 7340 7343 7347 7350 7354 7357 7361 7364 7368 7371 7375 7378 7382 7385 7389 7392 7396 7399 7403 7406 7410 7413 7417 7420 7424 7427 7431 7434 7438 7441 7445 7448 7452 7455 7459 7462 7466 7469 7473 7476 7480 26 0 7204 7208 7211 7215 7218 7222 7225 7229 7232 7236 7239 7243 7246 7250 7253 7257 7260 7264 7267 7271 7274 7278 7281 7285 7288 7292 7295 7299 7302 7306 7309 7313 7316 7320 7323 7327 7330 7334 7337 7341 7344 7348 7351 7355 7358 7362 7365 7369 7372 7376 7379 7383 7386 7390 7393 7397 7400 7404 7407 7411 7414 7418 7421 7425 7428 7432 7435 7439 7442 7446 7449 7453 7456 7460 7463 7467 7470 7474 7477 7481 7484 26 5 7209 7212 7216 7219 7223 7226 7230 de33 7237 7240 7244 7247 7251 7254 7258 7261 7265 7268 7272 7275 7279 7282 7286 7289 7293 7296 7300 7303 7307 7310 7314 7317 7321 7324 7328 7331 7335 7338 7342 7348 7349 7352 7356 7359 7363 7366 7370 7373 7377 7380 7384 7387 7391 7394 7398 7401 7405 7408 7412 7415 7419 7422 7426 7429 7433 7436 7440 7443 7447 7450 7454 7457 7461 7464 7468 7471 7475 7478 7482 7485 7489 27 0 7214 7217 7221 7224 7228 7231 7235 7238 7242 7245 7249 7252 7256 7259 7263 7266 7210 7273 7277 7280 7284 7287 7291 7294 7298 7
194. 284 7289 7294 7300 7305 7310 7316 7321 28 80 7239 7245 7250 7256 7261 7267 7272 7278 7283 7288 7294 7299 7305 7310 7315 7320 7326 28 75 7244 7249 7255 7260 7266 7271 7277 7282 7288 7293 7299 7304 7309 7315 7320 7325 7330 28 70 7249 7254 7260 7265 7271 7276 7282 7287 7292 7298 7303 7309 7314 7319 7324 7330 7335 28 65 7253 7259 7265 7270 7276 7281 7286 7292 7297 7303 7308 7313 7319 7324 7329 7334 7340 28 60 7258 7264 27269 7275 7280 7286 7291 7297 7302 7307 7313 7318 7323 7329 7334 7339 7344 28 55 7263 7269 7274 7280 7285 7290 7296 7301 7307 7312 7317 7323 7328 7333 7338 7344 7349 28 50 7268 27273 7279 7284 7290 7295 7301 7306 7311 7317 7322 7327 7333 27338 7343 7348 7354 28 45 7273 7278 7284 7289 7295 7300 7305 27311 7316 7321 7327 7332 7337 7343 7348 7353 7358 28 40 7277 7283 7288 27294 7299 7305 7310 7315 7321 7326 7331 7337 7342 7347 7352 7358 7363 28 35 7282 7288 7293 7299 7304 7309 7315 7320 7326 7331 7336 7341 7347 7352 7357 7362 7368 28 30 27287 7293 7298 7303 7309 7314 7320 7325 7330 7336 7341 7346 7351 7357 7362 7367 7312 28 25 7292 7297 7303 7308 7314 7319 7324 7330 7335 7340 7346 7351 27356 7361 7366 73172 7377 28 20 7297 7302 27308 7313 7318 7324 37329 73334 27340 7345 7350 7355 27361 7366 7371 7376 7381 28 15 7301 7307 7312 7318 7323 7328 7334 7339 7344 7350 7355 7360 7365 7371 7376 7381 7386 10 7306 7312 7317 7322 7328 7333 7339 7344 7349 7354 27360 7365 7370 7375 7380 7386 7391 28 05 7311 7316 7322 7327 7333 7338 7343 7349 7354 7359 7364 7370 2
195. 285 7290 7295 7301 7306 7311 7316 7322 30 80 7241 7247 7252 7257 7263 7268 7273 7279 7284 7289 7295 7300 7305 7310 7316 7321 7326 30 75 7246 7251 7257 7262 7267 7273 7278 7283 7288 7294 7299 7304 7310 7315 7320 7325 7330 30 70 7250 7256 7261 7266 7272 7277 7282 7288 7293 7298 7303 7309 7314 7319 7324 7330 7335 30 65 7255 7260 7265 7271 7276 7281 7287 7292 7297 7303 7308 7313 7318 7324 7329 7334 7339 30 60 7259 7265 7270 7275 7281 7286 7291 7296 7302 7307 27312 7317 7323 7328 7333 7338 7344 30 55 7264 7269 7274 7280 7285 7290 7296 7301 7306 7311 7317 2322 7327 7332 7337 7343 7348 30 50 7268 7274 7279 7284 7290 7295 7300 7305 7311 7316 7321 7326 7331 7337 7342 7347 2352 30 45 7273 7278 7283 7289 7294 7299 7305 7310 7315 7320 7325 7331 7336 7341 7346 7351 7357 30 40 7277 7283 7288 7293 7298 7304 7309 7314 7319 7325 7330 7335 7340 7345 7351 7356 7361 30 35 7282 7287 7292 7298 7303 7308 7313 7319 7324 7329 7334 7339 7345 7350 7355 7360 7365 30 30 7286 7292 7297 7302 7307 7313 7318 7323 7328 7333 7339 7344 7349 7354 7359 7365 7370 30 25 7291 7296 7301 7307 7312 7317 7322 7327 7333 7338 7343 7348 7353 7359 3364 7369 7374 30 20 7295 7300 7306 7311 7316 7321 7327 7332 7337 7342 7341 7353 7358 7363 7368 7373 7378 30 15 7300 7305 7310 7315 7321 7326 7331 7336 7342 7347 7352 27357 7362 7367 7372 7378 7383 30 10 7304 7309 7315 7320 7325 7330 7336 7341 7346 7351 7356 7361 7367 7372 7377 7382 7387 30 05 7309 7314 7319 7324 7330 7335 7340 7345 7350 7356 7361 7366 7371 7376 73
196. 29 7534 7538 7542 7547 7551 7555 7559 7564 7568 7572 7576 681 7511 7516 7520 7524 7529 7533 7537 7542 7546 7550 7555 7559 7563 7567 7571 7576 7580 680 7515 7519 7524 7528 7532 7537 7541 7545 7550 7554 7558 7562 7567 7571 7575 7579 7583 679 7519 7523 7527 7532 7536 7540 7545 7549 7553 7557 7562 7566 7570 7574 7579 7583 7587 678 7522 7527 7531 7535 7540 7544 7548 7553 7557 7561 7565 7570 7574 7578 7582 7586 7591 677 7526 7530 7535 7539 7543 7548 7552 7556 7560 7565 7569 7573 7577 7582 7586 7590 7594 676 7530 7534 7538 7543 7547 7551 7556 7560 7564 7568 1973 7577 7581 7585 7589 7593 7598 675 7533 7538 7542 7546 7551 27555 7559 7563 7568 7572 7376 7580 7585 7589 7593 7597 7601 674 7537 7541 27546 7550 7554 7558 7563 7567 7571 7575 7580 7584 7588 7592 7596 7601 7605 673 7541 7545 7549 7554 7558 7562 7566 7571 7575 7579 1583 7587 7592 7596 7600 7604 7608 672 7344 7549 7553 7557 7561 7566 7570 7574 7578 7583 7587 7591 7595 7599 7604 7608 7612 671 7548 7552 7557 7561 7565 7569 7574 7578 7582 7586 7590 7595 7599 7603 7607 7611 7615 670 1552 7556 7560 7564 7569 27573 7577 7581 7586 7590 7594 7598 7602 7607 7611 7615 7615 669 7555 7560 7564 7568 7572 7577 7581 7585 7589 7593 7598 7602 7606 7610 7614 7618 7623 668 7559 7563 7567 7572 7576 7580 7584 7589 7593 7597 7601 7605 7610 7614 7618 7622 7626 667 7563 7567 7571 27575 7580 7584 7588 7592 7596 7601 7605 7609 7613 7617 7621 7626 7630 666 7366 7570 7575 7579 7583 7587 7592 7596 7600 7604 7608 7613 7617 7621 7625 7629 763
197. 3 665 7570 7574 7578 7583 7587 7591 7595 7600 7604 7606 7612 7616 7620 7624 7629 7633 7637 664 1573 7578 7582 27586 759 7595 7599 7603 7607 7611 7616 7620 7624 7628 7632 7636 7640 663 7577 758i 7586 7590 7594 7598 7603 7607 7611 7615 7619 7623 7627 7632 7636 7640 7644 662 7381 7585 7589 7594 7598 7602 7606 7610 7615 7619 7623 7627 7631 7635 27639 7643 7647 662 27584 7589 7593 7597 7601 7606 7610 7614 7618 7622 7626 7631 7635 7639 7643 7647 7651 660 7588 7592 7597 7601 7605 7609 7613 7618 7622 7626 7630 7634 7638 7642 7646 7650 7655 659 7592 7596 7600 7604 7609 7613 7617 7621 7625 7629 7634 7638 7642 7646 7650 7654 7658 658 7595 7600 7604 7608 7612 7616 7621 7625 7629 7633 7637 7641 7645 7649 7654 7658 7662 657 7599 7603 7608 7612 7616 7620 7624 7628 7633 7637 7641 7645 7649 7653 7657 7661 7665 656 7603 7607 7611 7615 7620 7624 7628 7632 7636 7640 7644 7648 7653 7657 7661 7665 7669 655 7606 7611 7615 7619 7623 7627 7632 7636 7640 7644 1648 7652 7656 7660 7664 7668 7672 654 7610 7614 7618 7623 7627 7631 7635 7639 7643 7647 7652 7656 7660 7664 27668 7672 7676 653 7614 7618 7622 7626 7630 7635 7639 7643 7647 7651 7655 7659 7663 7667 7671 7675 7679 652 7617 7622 7626 7630 7634 7638 7642 7646 7651 7655 7659 7663 7667 7671 7675 7679 7683 651 7621 7625 7629 7634 7638 7642 7646 7650 7654 1658 7662 7666 7670 7675 7679 7683 7687 650 7625 7629 7633 7637 7641 7645 7650 7654 7658 7662 7666 7670 7674 7678 7682 7686 7690 649 7628 7633 7637 7641 7645 7649 7653 7657 7661 7665
198. 3 7497 7500 7504 7508 7511 7515 7519 7522 7526 7530 7533 7537 7541 7545 7548 7552 7556 7559 7563 7567 7570 7574 7578 7581 7585 7589 7592 7596 7600 7604 7607 7611 7615 7618 7622 7626 7629 7633 7637 7640 LL 7350 7354 7357 7361 7365 7368 7372 7376 7379 7383 7387 7391 7394 7398 7402 7405 7409 7413 7416 7420 7424 7427 7431 7435 7438 7442 7446 7449 7453 7457 7460 7464 7468 7472 7475 7479 7483 7486 7490 7494 7497 7501 7505 7508 7512 7516 7519 7523 7527 7530 7534 7538 7542 7545 7549 7553 7556 7560 7564 7567 7571 7575 7578 7582 7586 7589 7593 7597 7600 7604 7608 7611 7615 7619 7623 7626 7630 7634 7637 7641 7645 12 0 1355 7358 7362 7366 7369 7373 7371 7380 7384 7388 7391 7395 7399 7402 7406 7410 7414 7417 7421 7425 7428 7432 7436 7439 7443 7447 7450 7454 7458 7461 7465 7469 7472 7476 7480 7483 7487 7491 7494 7498 7502 7505 7509 7513 7516 7520 7524 7527 7531 7535 7539 7542 7546 7550 7553 7557 7561 7564 7568 7572 7575 7579 7583 7586 7590 7594 7597 7601 7605 7608 7612 7616 7619 7623 7627 7630 7634 7638 7641 7645 7649 12 5 7359 7363 7367 7370 7374 7378 7381 7385 7389 7392 7396 7400 7403 7407 7411 7414 7418 7422 7425 7429 7433 7436 7440 7444 7447 7451 7455 7458 7462 7466 7469 7473 7477 7480 7484 7488 7491 7495 7499 7503 7506 7510 7514
199. 3 7526 7530 7534 7537 7541 7545 7548 7552 7556 7559 7563 7567 7570 7574 7578 7581 7585 7589 7592 7596 7600 7603 7607 7611 7614 7618 7622 7625 7629 7633 7636 7640 7644 7647 7651 7655 13 0 7366 7370 7373 7377 7381 7384 7388 7392 7395 7399 7403 7406 7410 7414 7417 7421 7425 7428 7432 7436 7439 7443 7447 7450 7454 7458 7461 7465 7469 7472 7416 7480 7483 7487 7491 7494 7498 7502 7505 7509 7512 7516 7520 7523 7527 7531 7534 7538 7542 7545 7549 7553 7556 7560 7564 7567 571 7575 7578 7582 7586 7589 7593 7597 7600 7604 7608 7611 7615 7619 7622 7626 7630 7633 7637 7641 7644 7648 7652 7655 7659 241 13 Wavelength of Light Compensation Table 32 Metric High Alt Low Mid Temp Med Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 50 Humidity 13 5 14 0 14 5 15 0 15 5 16 0 16 5 17 0 17 5 18 0 18 5 19 0 19 5 20 0 20 5 21 0 21 5 720 7371 7375 7380 7385 7389 7394 7399 7403 7408 7412 7417 7422 7426 7431 7435 7440 7444 719 7374 7379 7384 7388 27393 7398 7402 7407 7411 7416 7421 7425 7430 7434 7439 7443 7448 718 7378 7383 7387 7392 7397 7401 7406 7410 7415 7420 7424 7429 7433 7438 7442 7447 7451 717 7382 7386 7391 7396 7400 7405 7409 7414 7419 7423 7428 7432 7437 7441 7446 7450 7455 716 7385 7390 7395 7399 7404 7408 7413 7418 7422 7427 7431 7436 7440 7445 7449 7454 7458 715 7389 7394 7398 7403 7407 7412 7417 7421 7426 7430 7435 7439 7444 744
200. 3 7937 7942 7946 7950 7955 7959 7963 7968 7972 7976 7981 7985 7989 7994 7998 8002 8007 8011 8015 8020 8024 94 0 7682 7687 7691 7695 7700 7704 7708 7712 7717 7721 7725 7730 7734 7738 7743 7747 7751 7756 7760 7764 7769 7773 7777 7782 7786 7790 7795 7799 7803 7808 7812 7816 7821 7825 7829 7834 7838 7842 7847 7851 7855 7860 7864 7868 7873 7877 7881 7885 7890 7894 7898 7903 7907 7911 7916 7920 7924 7929 7933 7937 7942 7946 7950 7955 7959 7963 7968 7972 7976 7981 7985 7989 7994 7998 8002 8007 8011 8015 8020 8024 8028 95 0 7687 7691 7696 7700 7704 7709 7713 7117 7122 7126 7730 7734 71739 7743 7747 7752 7756 7760 7765 7769 7773 7778 7782 7786 7791 71795 7799 7804 7808 7812 7817 7821 7825 7829 7834 7838 7842 7847 7851 7855 7860 7864 7868 7873 7877 7881 7886 7890 7894 7899 7903 7907 7912 7916 7920 7924 7929 7933 7937 7942 7946 7950 7955 7959 7963 7968 7972 7976 7981 7985 7989 7994 7998 8002 8006 8011 8015 8019 8024 8028 8032 TEMPERATURE IN DEGREES FAHRENHEIT 96 0 7692 7696 7700 7705 7709 7713 7718 7722 7726 7731 7135 7139 7744 7748 7152 7756 7761 7765 7769 7114 7778 7782 7787 7791 7795 7800 7804 7808 7812 7817 7821 7825 7830 7834 7838 7843 7847 7851 7856 97 0 7697 7701 7705 7710 7714 7718 7722 7727 7131 7735 7740 7744 7748 7753 77
201. 30 7234 7237 7241 7244 7248 7251 7255 7258 7262 7265 7269 7272 7276 7279 7283 7287 7290 7294 7297 7301 7304 7308 7311 7315 7318 7322 7325 7329 7332 7336 7339 7343 7346 7350 7353 7357 7360 7364 7367 7371 7374 7378 7381 7385 7388 7392 7395 7399 7402 7406 7409 7413 7416 7420 7423 7427 7430 7434 7437 7441 7444 7448 7451 7455 7458 7462 7465 7469 7473 7476 26 0 7200 7204 7207 7211 7214 7218 7221 7225 7228 7232 7235 7239 7242 7246 7249 7253 7256 7260 7263 7267 7270 7274 7277 7281 7284 7288 7291 7295 7298 7302 7305 7309 7312 7316 7319 7323 7326 7330 7333 7337 7340 7344 7347 7351 7354 7358 7361 7365 7368 7372 7375 7379 7382 7386 7389 7393 7396 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7449 7452 7456 7459 7463 7466 7470 7473 7477 7480 26 5 7205 7208 7212 7215 7229 7222 7226 7229 7233 7236 7240 7243 7247 7250 7254 7257 7261 7264 7268 7271 7275 7278 7282 7285 7289 7292 7296 7299 7303 7306 7310 7313 7317 7320 7324 7327 7331 7334 7338 7341 7345 7348 7352 7355 7359 7362 7366 7369 7313 7376 7380 7383 7387 7390 7394 7397 7401 7404 7408 7411 7415 7418 7422 7425 7429 7432 7436 7439 7443 7446 7450 7453 7457 7460 7464 7467 7471 7474 7478 7481 7485 27 0 7210 7213 7217 7220 7224 7227 7231 7234 7238 7241 7244 7248 72
202. 30 7634 7638 7643 7647 7651 7656 7660 7664 7668 7673 7677 7681 7686 7690 7694 7698 100 0 7361 7365 7369 7374 7378 7382 7386 7391 7395 7399 7404 7408 7412 7416 7421 7425 7429 7434 7438 7442 7446 7451 7455 7459 7463 7468 7472 7476 7481 7485 7489 7493 7498 7502 7506 7511 7515 7519 7523 7528 7532 7536 7540 7545 7549 7553 7358 7562 7566 7570 7575 7579 7583 7588 7592 7596 7600 7605 7609 7613 7618 7622 7626 7630 7635 7639 7643 7647 7652 7656 7660 7665 7669 7673 7677 7682 7686 7690 7695 7699 7703 101 0 7366 7370 7375 7379 7383 7387 7392 7396 7400 7404 7409 7413 7417 7422 7426 7430 7434 7439 7443 7447 7451 7456 7460 7464 7468 7473 7477 7481 7486 7490 7494 7498 7503 7507 7511 7515 7520 7524 7528 7533 7537 7541 7545 7550 7554 7558 7562 7567 7571 7575 7580 7584 7588 7592 7597 7601 7605 7609 7614 7618 7622 7627 7631 7635 7639 7644 7648 7652 7656 7661 7665 7669 7673 7678 7682 7686 7691 7695 7699 7703 7708 102 0 7371 7375 7380 7384 7388 7393 7397 7401 7405 7410 7414 7418 7422 7427 7431 7435 7439 7444 7448 7452 7456 7461 7465 7469 7473 7478 7482 7486 7491 7495 7499 7503 7508 7512 7516 7520 7525 7529 7533 7537 7542 7546 7550 7554 7559 7563 7567 7572 7576 7580 7584 7589 7593 7597 7601 7606 7610 7614 7618 7623 7627 7631 7635 7640 7644 7648
203. 30 7535 7539 7543 7547 7551 7555 7559 7564 7568 7572 7576 7580 7584 7588 718 7526 7530 7534 7538 7542 7546 7550 7555 7559 7563 7567 7571 7575 7579 7583 7587 7591 717 7529 7533 7537 7541 7546 7550 7554 7558 7562 7566 7570 7574 7578 7583 7587 7591 7595 716 1532 27537 7541 7545 7549 7553 7557 7561 7566 7570 7574 7578 7582 7586 7590 7594 7598 715 7536 7540 7544 7548 7552 7557 7561 7565 7569 7573 7577 7581 7585 7589 7593 7597 7601 714 7539 7543 7548 7552 7556 7560 7564 7568 7572 7576 7580 7585 7589 7593 7597 7601 7605 713 7543 7547 7551 7555 7559 7563 7568 7572 7576 7580 7584 7588 7592 7596 7600 7604 7608 712 7546 7550 7555 7559 7563 7567 7571 7575 7579 7583 7587 7591 7595 7599 7603 7607 7611 711 7550 7554 7558 7562 7566 7570 7574 7578 7583 7587 7591 7595 7599 7603 7607 7611 7615 710 7953 7557 7561 27566 7570 7574 7578 7582 7586 7590 7594 7598 7602 7606 7610 7614 7618 709 7557 7561 7565 7569 27573 7577 7581 7585 7589 7593 7597 7602 7606 7610 7614 7618 7622 708 7560 7564 7568 7572 7576 7581 7585 7589 7593 7597 7601 7605 7609 7613 7617 7621 7625 707 7563 7568 7572 7576 7580 7584 7588 7592 7596 7600 7604 7608 7612 7616 7620 7624 7628 706 7567 7571 7575 7579 7583 7587 7591 7596 7600 7604 7608 7612 7616 7620 7624 7628 7632 705 7570 7574 7579 7583 7587 7591 7595 7599 7603 7607 7611 7615 7619 7623 7627 7631 7635 704 7974 7578 7582 7586 7590 7594 7598 7602 7606 7610 7614 7618 27622 7626 7630 7634 7638 703 7577 7581 7585 7590 27594 7598 7602 7606 7610 7614 7618 7622 7626 76
204. 30 7634 7638 7642 702 7581 7585 7589 7593 7597 7601 7605 7609 7613 7617 7621 7625 7629 7633 7637 7641 7645 701 7584 7588 27592 7596 7600 7605 7609 7613 7617 7621 7625 7629 7633 7637 7641 7645 7648 700 7588 7592 7596 7600 7604 7608 7612 7616 7620 7624 7628 7632 7636 7640 7644 7648 7652 699 7591 7595 7599 7603 7607 7611 7615 7619 7623 7627 7631 7635 7639 1643 7647 7651 7655 698 7595 7599 7603 7607 7611 7615 7619 7623 7627 7631 7635 7639 7643 7647 7651 7655 7659 697 7598 7602 7606 7610 7614 7618 7622 7626 7630 7634 7638 7642 7646 7650 7654 7658 7662 696 7601 7605 7610 7614 7618 7622 7626 7630 7634 7638 7642 7646 7650 7653 7657 7661 7665 695 7605 7609 7613 7617 7621 7625 7629 2633 7637 7641 7645 37649 7653 7657 7661 27665 7669 694 7608 7612 7616 7620 7624 7628 7632 7636 7640 7644 7648 7652 7656 7660 7664 7668 7672 693 7612 7616 27620 7624 7628 7632 7636 7640 7644 7648 7652 7656 7660 7664 7668 7671 7675 6922 7615 7619 7623 7627 7631 7635 7639 7643 7647 7651 7655 7659 7663 7667 7671 7675 7679 691 7619 7623 7627 7631 7635 7639 7643 7647 7651 7655 7659 7663 7666 7670 7674 7678 7682 690 7622 7626 7630 7634 7638 7642 7646 7650 7654 7658 7662 7666 7670 7674 7678 7682 7685 689 7626 7630 7634 7638 7642 7646 7650 7654 7657 7661 7665 7669 7673 7677 7681 7685 7689 688 7629 7633 7637 7641 7645 7649 7653 7657 7661 7665 7669 7673 7677 7681 7684 7688 7692 687 7633 7637 7641 7644 7648 7652 7656 7660 7664 7668 7672 7676 7680 7684 7688 7692 7696 686 7636 7640 7644 7648 7652 7656 76
205. 301 7305 7308 7312 7315 7319 7322 7326 7329 7333 7336 7340 7343 7347 7350 7354 7357 7361 7364 7367 7371 7374 7378 7381 7385 7388 7392 7395 7399 7402 7406 7409 7413 7416 7420 7423 7427 7430 7434 7437 7441 7444 7448 7451 7455 7458 7462 7465 7469 7472 7476 7479 7483 7486 7490 7493 27 5 7219 7222 7226 7229 7233 7236 7240 7243 7247 7250 7254 7257 7261 7264 7268 7271 7274 7278 7281 7285 7288 7292 7295 7299 7302 7306 7309 7313 7316 7320 7323 7327 7330 7334 7337 7341 7344 7348 7351 7355 7358 7362 7365 7369 7372 7376 7379 7383 7386 7390 7393 7396 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7449 7452 7456 7459 7463 7466 7470 7473 7477 7480 1484 7487 7491 7494 7498 28 0 7224 7227 7231 7234 7237 7241 7244 7248 7251 7255 7258 7262 7265 7269 7272 7276 7279 7283 7286 7290 7293 7297 7300 7304 7307 7311 7314 7318 7321 7324 7328 7331 7335 7338 7342 7345 7349 7352 7356 7359 7363 7366 7370 7373 7377 7380 7384 7387 7391 7394 7398 7401 7405 7408 7411 7415 1418 7422 7425 7429 7432 7436 7439 7443 7446 7450 7453 7457 7460 7464 7467 7471 7474 7478 7481 7485 7488 7492 7495 7498 7302 28 5 7228 7232 7235 7239 7242 7246 7249 7253 7256 7260 7263 7267 7270 7274 7277 7281 7284 7287 7291 7294 7298 7301 7305 7308 7312 7315 T3189
206. 31 7034 7038 7042 7045 7049 7053 7057 7060 7064 7068 7071 7075 7079 7083 7086 7090 7094 7097 7101 7105 7109 7112 7116 7120 7123 7127 7131 7135 7138 7142 7146 7149 7153 22157 7161 7164 7168 7172 7175 7179 7183 7187 7190 7194 7198 7201 7205 7209 7213 7216 7220 7224 7227 7231 7235 7239 7242 7246 7250 7254 7257 7261 7265 7268 7272 7276 7280 7283 1287 7291 7294 7298 7302 7306 7309 7313 7317 7320 7324 7328 9 5 7036 7040 7043 7047 7051 7054 7058 7062 7066 7069 7073 7077 7080 7084 7088 7092 7095 7099 7103 7106 7110 7114 7117 7121 7125 7129 7132 7136 7140 7143 7147 7151 7155 7158 7162 7166 7169 7173 7177 7181 7184 7188 7192 7195 7199 7203 7207 7210 7214 7218 7221 7225 7229 7232 7236 7240 7244 7247 7251 7255 7258 7262 7266 7270 7273 7277 7281 7284 7288 7292 7296 7299 7303 7307 7310 7314 7318 7322 7325 7329 7333 10 0 7041 7045 7049 7052 7056 7060 7063 7067 7071 7075 7078 7082 7086 7089 7093 7097 7100 7104 7108 7112 7115 T7119 7123 7126 7130 7134 7137 7141 7145 7149 7152 7156 7160 7163 7167 7171 7175 7178 7182 7186 7189 7193 7197 7200 7204 7208 7212 7215 7219 7223 7226 7230 7234 7237 7241 7245 7249 7252 7256 7260 7263 7267 7271 7274 7278 7282 7286 7289 7293 7297 7300 7304 7308 7312 7315 7319 7323 7326 7330 7334 7337 10 5 7047 7050 7
207. 313 29 85 7234 7239 7244 7250 7255 7260 27266 7271 7276 7282 7287 7292 7297 7303 7308 7313 7318 29 80 7238 7244 7249 7254 7260 7265 7270 7276 7281 7286 7291 7297 7302 7307 7312 7317 7322 29 75 7243 7248 7254 7259 7264 7270 7275 7280 7285 7291 7296 7301 7306 7312 7317 7322 7327 29 70 7247 27253 7258 7264 7269 7274 7280 7285 7290 7295 7301 7306 7311 7316 7321 7326 7331 29 65 7252 7257 7263 7268 7274 3279 7284 7289 7295 7300 7305 7310 7315 7321 7326 7331 7336 29 60 7257 7262 7267 27273 7278 27283 7289 7294 7299 7304 7310 7315 7320 7325 7330 7335 7340 29 55 7261 7267 7272 7277 7283 7288 7293 7299 7304 7309 7314 7319 7324 7330 7335 7340 7345 29 50 7266 7271 7277 7282 7287 7293 7298 7303 7308 7314 7319 7324 7329 7334 2339 7344 7349 29 45 7271 7276 7281 7287 7292 23297 7302 7308 7313 7318 7323 7328 7334 7339 7344 7349 7354 29 40 7275 7281 7286 7291 7297 7302 7307 7312 7317 7323 7328 7333 7338 7343 7348 7353 7358 29 35 7280 7285 7291 7296 7301 7306 7312 7317 27322 7327 7332 7337 7343 7348 7353 7358 7363 29 30 7285 7290 7295 7300 7306 7311 7316 7321 7327 7332 27337 7342 7347 7352 7357 7362 7367 29 25 7289 7295 7300 7305 7310 7316 7321 7326 7331 7336 7341 7347 7352 7357 7362 7367 7372 29 20 7294 7299 7304 7310 7315 7320 7325 7331 7336 7341 7346 7351 7356 7361 7366 737 7376 29 15 7298 7304 7309 7314 7320 7325 7330 7335 7340 7345 7351 7356 7361 7366 7371 7376 7381 29 10 7303 7308 7314 7319 7324 7329 7335 7340 7345 7350 7355 7360 7365 7370 7375 7380 7385 b 7308 7313 7318
208. 34 describes the different NGI interferometer models Other Agilent optics that are neither 1 interferometers nor 2 beam directing optics are described in Chapter 36 Accessories in Volume II of this manual Laser and Optics User s Manual Vol Measurement Optics General Information 5 Table3 Measurement Optics Summary Model Number and Name Agilent 10702A Linear Interferometer Application General Purpose System Resolution Beam Separation 12 7 mm 0 5 in Config uration Straight through or Turned Reflector Agilent 10703A Reflector Weight Agilent 10711A Agilent 10702A 001 Linear Interferometer General Purpose 12 7 mm 0 5 in Straight through or Turned Agilent 10703A Agilent 10711A Agilent 10705A Single Beam Interferometer Low mass Limited space Not Applicable single beam Straight through or Turned Agilent 10704A Agilent 10710B Agilent 10706A Plane Mirror Interferometer Plane Mirror 12 7 mm 0 5 in Straight through or Turned Agilent 10724A or user supplied Agilent 10711A Agilent 10706B High Stability Plane Mirror Interferometer Plane Mirror 12 7 mm 0 5 in Straight through or Turned Agilent 10724A or user supplied Agilent 10715A Differential Interferometer High Accuracy Plane Mirror 12 7 mm 0 5 in Straight through or Turned Agilent 10724A or user sup
209. 345 7350 7355 7360 7364 7369 741 7296 7301 27306 7310 7315 7320 7325 7330 7335 27339 7344 7349 7354 7358 7363 7368 7373 740 7299 7304 7309 7314 7319 7324 7329 7333 7338 7343 7348 7352 7357 7362 7367 7371 7316 739 7303 7308 7313 7318 7323 7327 7332 7337 7342 7347 7351 7356 7361 7366 7370 7375 7380 738 7307 7312 7317 7321 7326 7331 7336 7341 7345 7350 7355 7360 7364 7369 7374 7379 7383 737 7310 7315 7320 7325 7330 7335 7339 7344 7349 7354 7359 7363 7368 7373 7377 7382 7387 736 7314 7319 7324 7329 7333 7338 7343 7348 7353 7357 7362 7367 7372 7376 7381 7386 7390 735 7318 7323 7327 7332 27337 27342 7347 7351 7356 7361 7366 7370 7375 7380 7385 7389 7394 734 7321 7326 7331 7336 7341 7345 7350 7355 7360 7365 7369 7374 7379 7383 7388 7393 7398 733 7325 7330 7335 7340 7344 7349 7354 7359 7363 7368 7373 7378 7382 7387 7392 7396 7401 732 7329 7334 7338 7343 7348 7353 7358 7362 7367 7372 27376 7381 7386 7391 7395 7400 7405 731 7332 7337 27342 7347 7352 7356 7361 7366 7371 27375 7380 7385 7389 7394 7399 7404 7408 730 7336 7341 7346 7350 7355 7360 7365 7369 7374 7379 7384 7388 7393 7398 7402 7407 7412 729 7340 7345 7349 7354 7359 7364 7368 7373 7378 7383 7387 7392 7397 7401 7406 7411 7415 728 7343 7348 27353 7358 7362 27367 7372 7377 7381 7386 7391 7396 7400 7405 7410 7414 7419 727 7347 7352 7357 7361 7366 7371 7376 7380 7385 7390 7394 7399 7404 7408 7413 7418 7422 726 7351 7355 7360 7365 7370 7375 7379 7384 7389 7393 7398 7403 7407 7412 7417 7421 7426 725 7354 7359 7364 73
210. 372 7399 7427 7454 7481 7508 7535 7562 755 7125 7157 7188 7218 7248 7277 7306 7334 7362 7389 7417 7444 7471 7498 7524 7551 7579 750 7144 7176 7206 7236 7266 7295 7323 7352 7379 7407 7434 7461 7488 7514 7541 7568 7595 745 7163 7195 7225 7255 7284 7313 7341 7369 7397 7424 7451 7478 7504 7531 7557 7584 7611 740 7183 7213 7244 7273 7302 7331 7359 7387 7414 7441 7468 7495 7521 7548 7574 7600 7627 735 7202 7232 7262 7292 7321 7349 7377 7405 7432 7459 7485 7512 7538 7564 7590 7617 7643 730 7221 7251 7281 7310 7339 7367 7395 7422 7449 7476 7503 7529 7555 7581 7607 7633 7660 725 7240 7270 7299 7329 7357 7385 7413 7440 7467 7493 7520 7546 7572 7598 7623 7650 7676 720 7259 7289 7318 7347 7375 7403 7431 7458 7484 7511 7537 7563 7589 7614 7640 7666 7692 715 7278 7308 7337 7365 7394 7421 7449 7475 7502 7528 7554 7580 7605 7631 7657 7682 7708 710 7297 7326 7355 7384 7412 7439 7466 7493 7519 7545 7571 7597 7622 7648 7673 7699 7724 705 7316 7345 7374 7402 7430 7457 7484 7511 7537 7563 7588 7614 7639 7664 7690 7715 7141 700 7335 7364 7393 7421 7448 7475 7502 7528 7554 7580 7606 7631 7656 7681 7706 7731 7157 695 7354 7383 7411 7439 7467 7494 7520 7546 7572 7597 7623 7648 7673 7698 7723 7748 7173 690 7373 7402 7430 7458 7485 7512 7538 7564 7589 7615 7640 7665 7690 7714 7739 7764 7789 685 7392 7421 7449 7476 7503 7530 7556 7582 7607 7632 7657 7682 7706 7731 7756 7780 7806 680 7411 7440 7467 7495 7521 7548 7574 7599 7625 7649 7674 7699 7723 7748 1172 119 2822 675 1430 7458 7486 7
211. 375 7380 27385 7389 7394 7399 7403 7408 7412 7417 7422 7426 7431 7435 7440 7444 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 238 Laser and Optics User s Manual Vol Table 29 Metric Low Alt Mid Temp Med Humidity Wavelength of Light Compensation Temp 22 to 30 C Press 720 to 800 mm 50 Humidity 13 eee TEMPERATURE IN DEGREES CELSIUS 800 799 798 797 796 795 794 793 792 791 790 789 788 787 786 785 784 783 782 781 780 719 778 7171 776 775 774 773 772 771 770 769 768 767 766 765 764 763 762 761 760 759 758 757 756 755 754 753 752 751 750 749 748 747 746 745 744 743 742 741 740 739 738 737 736 735 734 733 732 731 730 729 728 727 726 725 724 123 722 1721 720 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY Laser and Optics User s Manual Vol 22 0 7165 7168 7172 TELS 7179 7182 7186 7189 7193 7197 7200 7204 7207 7211 7214 7218 7221 7225 7229 7232 7236 7239 7243 7246 7250 7253 7257 7260 7264 7268 7271 7275 7278 7282 7285 7289 7292 7296 7300 7303 7307 7310 7314 7317 7321 7324 7328 7332 7335 7339 7342 7346 7349 7353 7356 7360 7363 7367 7371 7374 7378 7381 7385 7388 7392 7395 7399 7403 7406 7410 7413 7417 7420 7424 7427 7431 7435 7438 7442 7445 7449 22 5 7170 7173 7177 7180 7184 7187 7191 7194 7198 7201 7205 7209 7212 7216 7219 7223 7226 7230 7233 7237 724
212. 37L Agilent 10737R Agilent 10766A Agilent 10767A Agilent 10767B Agilent 10770A Agilent 10771A Agilent 10774A Agilent 10775A Agilent E1826E Agilent E1826F Agilent E1826G Agilent E1827A Agilent E1837A Agilent Z4399A Agilent Z4420B Agilent Z4421B Agilent Z4422B Optic Mounts Compact Three Axis Interferometer left Compact Three Axis Interferometer right Linear Interferometer Linear Retroreflector paired with Agilent 10766A Lightweight Retroreflector Angular Interferometer Angular Retroreflector paired with Agilent 10770A Short Range Straightness Optics matched set Long Range Straightness Optics matched set One Axis Plane Mirror Interferometer right One Axis Plane Mirror Interferometer left One Axis Plane Mirror Interferometer straight Two Axis Vertical Beam Interferometer Three Axis Vertical Beam Interferometer Three Axis Interferometer Five Axis Interferometer Five Axis Interferometer Three Axis Interferometer Adjustable mounts simplify installation and alignment Agilent 10710B Agilent 10711A Measurement Receivers Use with Agilent 10700A 10701A 10705A 10707A Use with Agilent 10702A 10706A 10706B 10715A 10716A One required per axis one required with Agilent 10717A Wavelength Tracker if used Agilent 10780C Agilent 10780F Agilent E1708A Agilent E1709A Receiver Remote Receiver Remote Dynamic Receiver Remote High Performance Receiver Receiver Cables for use with Agi
213. 38 7443 7449 7454 7459 7464 7469 7474 7479 7484 7489 7494 7499 7504 26 85 7427 7433 7438 7443 7448 7453 7458 7464 7469 7474 7479 7484 7489 7494 7499 7504 7509 26 80 7432 7437 7443 7448 7453 7458 7463 7468 7473 7478 7483 7489 7494 7499 7504 7509 7513 26 75 7437 7442 7447 7452 7458 7463 7468 7473 7478 7483 7488 7493 7498 7503 7508 7513 7518 26 70 7442 7447 7452 7457 7462 7468 7473 7478 7483 7488 7493 7498 7503 7508 7513 7518 7523 26 65 7446 7452 7457 7462 7467 7472 7477 7482 7488 7493 7498 7503 7508 7513 7518 7522 7527 26 60 7451 7456 7462 7467 7472 7477 7482 7487 7492 7497 7502 7507 7512 7517 7522 7527 1532 26 55 7456 7461 7466 7472 7477 7482 7487 7492 7497 7502 7507 7512 7517 7522 7527 7532 7537 26 50 7461 7466 7471 7476 7481 7486 7492 7497 7502 7507 7512 7517 7522 7527 7532 7536 7541 26 45 7466 7471 7476 7481 7486 7491 7496 7501 7506 7511 7516 7521 7526 7531 7536 7541 7546 26 40 7470 7476 7481 7486 7491 7496 7501 7506 7511 7516 7521 7526 7531 7536 7541 7546 7551 26 35 7475 7480 7486 7491 7496 7501 7506 7511 7516 7521 7526 7531 7536 7541 7546 7550 7555 26 30 7480 7485 7490 7495 7500 7505 7511 7516 7521 7526 7530 7535 7540 7545 7550 7555 7560 26 25 7485 7490 7495 7500 7505 7510 7515 7520 7525 7530 7535 7540 7545 7550 7555 7560 7565 26 20 7490 7495 7500 7505 7510 7515 7520 7525 7530 7535 7540 7545 7550 7555 7560 7564 7569 26 15 7494 7500 7505 7510 7515 7520 7525 7530 7535 7540 7545 7550 7554 7559 7564 7569 7574 26 10 7499 7504 7509 7514 7519 7524 7529 7534 7539
214. 39 7743 7748 7753 7757 7762 7766 7771 7775 7780 7784 7789 7793 7797 7802 7806 23 60 7739 7744 7748 7753 7757 7762 7766 7771 7775 7780 7784 7789 7793 7798 7802 7806 7811 23 55 7744 7748 7753 7758 7762 7767 77711 7776 7780 7785 7789 7793 7798 7802 7807 7811 7815 23 50 7749 7753 7758 7762 7767 7771 7776 7780 7785 7789 7794 7798 7803 7807 7811 7816 7820 23 45 7753 7758 7763 7767 7772 7776 7781 7785 7790 7794 7798 7803 7807 7812 7816 7820 7825 23 40 7758 7763 7767 7772 7776 7781 7785 7790 7794 7799 7803 7808 7812 7816 7821 7825 7829 23 35 7763 7768 7772 7777 7781 7786 7790 7795 7799 7803 7808 7812 7817 7821 7825 7830 7834 23 30 7768 7772 7777 7781 7786 7790 7795 7799 7804 7808 7813 7817 7821 7826 7830 7834 7839 23 25 7773 7777 7782 7786 7791 7795 7800 7804 7808 7813 7817 7822 7826 7830 7835 7839 7843 23 20 7777 7782 7786 7791 7795 7800 7804 7809 7813 7818 7822 7826 7831 7835 7839 7844 7848 23 15 7782 7787 7791 7796 7800 7805 7809 7813 7818 7822 7827 7831 7835 7840 7844 7848 7853 23 10 7787 7791 7796 7800 7805 7809 7814 7818 7823 7827 7831 7836 7840 7844 7849 7853 7857 23 05 7792 7796 7801 7805 7810 7814 7819 7823 7827 7832 7836 7840 7845 7849 7853 7858 7862 23 00 7797 7801 7806 7810 7814 7819 7823 7828 7832 7836 7841 7845 7849 7854 7858 7862 7867 BAROMETRIC PRESSURE IN INCHES OF MERCURY N tn 266 Laser and Optics User s Manual Vol BAROMETRIC PRESSURE IN INCHES OF MERCURY 57 0 27 00 7500 26 95 7505 26 90 7509 26 85 7514 26 80 7518 26 75 7523
215. 392 7396 7402 7405 7410 7414 7419 7423 7428 7432 7437 7441 7446 27450 7454 7459 714 7391 7395 7400 7404 7409 7413 7418 7422 7427 7431 2436 7440 7445 7449 7454 7458 7462 713 7394 7399 7403 7408 7413 7417 7422 7426 7431 7435 7440 7444 7448 7453 7457 7462 7466 712 1398 7403 7407 7412 7416 2421 7428 7430 7434 7439 2443 7448 7452 7456 7461 2465 7470 711 7402 7406 7411 7415 7420 7424 7429 7433 7438 7442 7447 7451 7456 7460 7464 7469 7473 710 1405 7410 7414 7419 7423 7428 7432 7437 7441 7446 7450 7455 7459 7464 7468 7472 7477 709 7409 7413 7418 7423 7427 7432 7436 7441 7445 7449 7454 7458 7463 7467 7472 7476 7480 708 1413 7417 7422 7426 7431 7435 7440 7444 7449 7453 7457 7462 27466 7471 7475 27479 7484 707 7416 7421 7425 7430 7434 7439 7443 7448 7452 7457 7461 7465 7420 7474 7479 7483 7487 706 1420 7424 7429 7433 27438 7442 7447 7451 7456 7460 7465 7469 7473 7478 7482 7487 7491 705 7424 7428 7433 7437 1442 7446 7451 7455 7459 7464 7468 7473 7477 27481 7486 7490 7494 704 1427 7432 7436 7441 7445 7450 7454 7459 7463 7467 7472 7476 37481 7485 7489 7494 7498 703 7431 7435 7440 7444 1449 7453 7458 7462 7467 7471 7475 7480 7484 7489 7493 7497 7502 702 7435 7439 7444 7448 7453 7457 7461 7466 7470 7475 7479 7483 7488 7492 7496 7501 7505 701 7438 7443 7447 7452 7456 7461 7465 7469 7474 7478 7483 7487 7491 7495 7500 7504 7509 700 7442 7446 7451 7455 7460 7464 7469 7473 7477 7482 7486 7491 7495 7499 7504 7508 7512 699 7445 7450 7454 7459 7463 7468 7472 7477 7481 7485 7490 7494
216. 4 7048 7052 7055 7059 7063 7066 7070 7074 7078 7081 7085 7089 7093 7096 7100 7104 7108 7111 7115 7119 7123 7126 7130 7134 7138 7141 7145 7149 7153 7156 7160 7164 7168 TIT 7175 7179 7183 7186 7190 7194 7197 7201 7205 7209 7212 7216 7220 7224 7227 7231 7235 7239 7242 7246 7250 7254 7257 7261 7265 7269 7272 7276 7280 7284 7287 7291 7295 7299 7302 7306 7310 TEMPERATURE IN DEGREES CELSIUS 7 5 7016 7020 7023 7027 7031 7034 7038 7042 7046 7049 7053 7057 7061 7064 7068 7072 7076 7079 7083 7087 7091 7094 7098 7102 7105 7109 7113 7117 7120 7124 7128 7132 7135 7139 7143 7147 7150 7154 7158 7162 7165 7169 7173 7176 7180 7184 7188 7191 7195 7199 7203 7206 7210 7214 7218 7221 7225 7229 7232 7236 7240 7244 7247 7251 7255 7259 7262 7266 7270 7274 7271 7281 7285 7289 7292 7296 7300 7303 7307 7311 7315 8 0 7021 7025 7029 7032 7036 7040 7044 7047 7051 7055 7059 7062 7066 7070 7073 7077 7081 7085 7088 7092 7096 7100 7103 7107 7111 7114 7118 7122 7126 7129 7133 7137 7141 7144 7148 7152 7155 7159 7163 7167 7170 7174 7178 7182 7185 7189 7193 7197 7200 7204 7208 7211 7215 7219 7223 7226 7230 7234 7238 7241 7245 7249 7252 7256 7260 7264 7267 7272 7275 7279 7282 7286 7290 7293 7297 7301 7305 7308 7312 7316 7320 8 5 7027 7030 7034 7038 7042 7045 704
217. 4 7698 7701 7705 7708 7712 7715 7719 7722 7726 7729 7733 7736 7740 7743 7747 7750 7754 7787 7761 26 5 7485 7488 7492 7495 7499 7502 7506 7508 7513 7516 7520 7523 7527 7530 7534 7537 7541 7544 7548 7551 7555 7558 7562 7565 7569 7572 7576 7579 7583 7586 7590 7593 7597 7600 7604 7607 7611 7614 7618 7621 7625 7628 7632 7635 7639 7642 7646 7649 7653 7656 7660 7663 7667 7670 7674 7677 7681 7684 7688 7691 7694 7698 7701 7705 7708 7712 7715 7719 7722 7726 71729 7733 7736 7740 7743 7747 7750 7754 7757 7761 7764 27 0 7489 7492 7496 7499 7503 7506 7510 7513 7517 7520 7524 7527 7531 7534 7538 7541 7545 7548 7552 7555 7559 7562 7566 7569 7573 7576 7580 7583 7587 7590 7594 7597 7601 7604 7608 7611 7615 7618 7622 7625 7629 7632 7636 7639 7643 7646 7650 7653 7657 7660 7664 7667 7670 7674 7677 7681 7684 7688 7691 7695 7698 7702 7705 7709 7712 7716 7719 7723 7726 7730 7733 7737 7740 7744 7747 7751 7754 7758 7761 7765 7768 27 5 7493 7497 7500 7504 7507 7511 7514 7518 7521 7525 7528 7532 7535 7539 7542 7545 7549 7552 7556 7559 7563 7566 7510 7573 7577 7580 7584 7587 7591 7594 7598 7601 7605 7608 7612 7615 7619 7622 7626 7629 7633 7636 7640 7643 7647 7650 7654 7657 7661 7664 7667 7671 7614 7678 7681 7685 7688 7692 7695 7699 7702 7706 7703 77
218. 4 7919 7923 7928 7932 7937 73 0 7581 7586 7590 7595 7599 7604 7608 7613 7617 7622 7626 7631 7635 7640 7644 7649 7653 7658 7662 7667 7671 7675 7680 7684 7689 7693 7698 7702 7707 7711 7716 7720 7725 7729 7734 7738 7743 7747 7752 7756 7761 7765 7770 7774 7779 7783 7788 7792 7797 7801 7806 7810 7815 7819 7824 7828 7833 7837 7842 7846 7851 7855 7860 7864 7869 7873 7878 7882 7887 7891 7896 7900 7905 7909 7914 7918 7923 7927 7932 7936 7941 275 13 Wavelength of Light Compensation Table 66 English High Alt Mid Temp High Humidity Temp 74 to 90 F Press 23 to 27 inches 80 Humidity M MM M ai i i A TEMPERATURE IN DEGREES FAHRENHEIT 74 0 75 0 76 0 77 0 78 0 79 0 80 0 81 0 82 0 83 0 84 0 85 0 86 0 87 0 88 0 89 0 90 0 27 00 7586 7591 7596 7600 7605 7610 7615 7620 7625 7629 7634 7639 7644 7649 7653 7658 7663 26 95 7590 7595 7600 7605 7610 7615 7619 7624 7629 7634 7639 7643 7648 7653 7658 7663 7667 26 90 7595 7600 7605 7609 7614 7619 7624 7629 7633 7638 7643 7648 7653 7657 7662 7667 7672 26 85 7599 7604 7609 7614 7619 7623 7628 7633 7638 7643 7647 7652 7651 7662 7667 7671 7676 26 80 7604 7609 7614 7618 7623 7628 7633 7638 7642 7647 7652 7657 7661 7666 7671 7676 7680 26 75 7608 7613 7618 7623 7628 7632 7637 7642 7647 7651 27656 7661 7666 7671 7675 7680 7685 26 70 7613 7618 7622 7627 2632 7637 71642 7646 7651 7656 7661 7665 7670 7675 7680 7684 7689 26 65 7617 76
219. 4 8232 8250 Wavelength of Light Compensation 90 0 7309 7326 7344 7361 7378 7396 7413 7431 7448 7465 7483 7500 7518 7535 7553 7570 7587 7605 7622 7640 7657 7675 7692 7709 7727 7744 7162 7779 7797 7814 7831 7849 7866 7884 7901 7919 7936 7953 7971 95 0 7335 7352 7369 7387 7404 7421 7438 7456 7473 7490 7507 7525 7542 7559 7577 7594 7611 7628 7646 7663 7680 7697 7715 7732 7749 7767 7784 7801 7818 7836 7853 7870 7887 7905 7922 7939 7956 7974 7991 8008 8026 8043 8060 8077 8095 8112 8129 8146 8164 8181 8198 8215 8233 8250 8267 8285 100 0 7361 7378 7395 7412 7429 7446 7463 7481 7498 7515 7532 7549 7566 7583 7600 7618 7635 7652 7669 7686 7703 7720 7737 7754 7772 7789 7806 7823 7840 7857 7874 7891 7908 7926 7943 7960 7977 7994 8011 8302 105 0 7387 7404 7421 7438 7472 7488 110 0 7413 7429 7446 7463 7480 7497 7514 7530 7547 7564 7581 7598 7614 7631 7648 7665 7682 7698 7715 7732 7749 7766 7782 7799 7816 7833 7850 7867 7883 7900 7917 7934 7951 7967 7984 8001 8018 8035 8051 8068 8085 8102 8119 8136 8152 8169 8186 8203 8220 8236 8253 8270 8287 8304 8320 8337 115 0 7439 7455 7472 7489 13 120 0 7465 7481 7498 7514 7531 7547 7564 7580 7597 7613 7630 7646 7663 7680 7696 7713 7729 7746 7762 7779 7795 7812 7828 7845 7861 7878 78
220. 4 1748 7752 7757 7761 7765 7769 7774 7778 7782 25 45 7718 7722 7727 7731 7735 7740 7744 7748 7753 7757 7761 7765 7770 7774 7778 7782 7786 25 40 7723 7727 7731 7736 7740 7744 7749 7753 7757 7761 7766 7770 7774 31138 7782 7787 7791 25 35 7727 7731 7736 7740 7744 7749 7753 7757 7761 7766 7770 7774 7778 7783 7787 7791 7795 25 30 7732 7736 7740 7745 7749 7753 7757 7762 7766 7770 7774 7779 7783 7787 7791 7795 7799 25 25 7736 7740 7745 7749 1753 7758 7762 7766 7770 7775 7779 7783 7787 7191 7796 7800 7804 25 20 7741 7745 7749 7753 1758 7362 7166 7771 7775 7779 7783 7787 11792 7796 7800 7804 7808 25 15 7745 7749 7754 7758 7762 7766 7771 7775 7779 7783 7788 7792 7796 7800 7804 7808 7813 25 10 7749 7754 7758 7762 7767 7771 7775 7118 7784 7788 7792 7796 7800 7805 7809 7813 7817 7754 7758 7763 7767 31771 7775 7780 7784 7788 7792 7796 7801 7805 7809 7813 7817 7821 25 00 7758 7763 7767 7771 7776 7780 7784 7788 7792 7797 7801 7805 7809 7813 7817 7822 7826 24 95 7763 7767 7772 7776 7780 7784 7788 7793 7797 7801 7805 7809 7814 7818 7822 7826 7830 24 90 7767 7772 7776 7780 7784 7789 7793 7797 7801 7805 7810 7814 7818 7822 7826 7830 7834 24 85 7772 7776 7780 7785 7789 7793 7797 7802 7806 7810 7814 7818 7822 7826 7831 7835 7839 24 80 7776 7781 7785 7789 7793 7798 7802 7806 7810 7814 7818 7823 7827 7831 7835 7839 7843 24 75 7781 7785 7789 7794 7798 7802 7806 7810 7815 7819 7823 7827 7831 7835 7839 7843 7847 24 70 7785 7790 7794 7798 7802 7806 7811 7815 7819 7823 7827 7831 7835 78
221. 4 7288 7293 7298 7302 7307 7312 7317 7321 7326 7331 7335 7340 7345 7349 7354 790 7282 7287 7292 7296 7301 7306 7311 7315 7320 7325 7329 7334 7339 7343 7348 7353 7357 789 7286 7290 7295 7300 7305 7309 7314 7319 7323 7328 7333 7337 7342 7347 7352 7356 7361 788 72689 7294 7299 7303 7308 7313 7317 7322 7327 7332 7336 1341 7346 7350 7355 7360 7364 787 1293 7297 7302 7307 7311 7316 7321 7326 7330 7335 7340 7344 7349 7354 7358 7363 7368 786 7296 7301 7305 7310 7315 27320 7324 7329 7334 7338 7343 7348 7352 7357 7362 7366 7371 785 7299 7304 7309 7314 7318 7323 7328 7332 7337 7342 2346 7351 7356 7360 7365 7370 7374 784 7303 7308 7312 7317 7322 7326 7331 7336 7340 7345 7350 7354 7359 7364 7368 7373 7378 783 1306 7311 7316 7320 7325 7330 27335 7339 7344 7349 7353 7358 7362 7367 7372 7376 7381 782 7310 7315 7319 7324 7329 7333 7338 7343 7347 7352 7357 7361 7366 7370 7375 7380 7384 781 7313 7318 7323 7327 7332 7337 7341 7346 7351 7355 7360 7365 7369 7374 7378 7383 7388 780 7317 7321 7326 7331 7335 7340 7345 7349 7354 7359 7363 7368 7373 7377 7382 3386 7391 779 7320 7325 7330 7334 7339 37344 7348 7353 7357 7362 7367 7371 7376 7381 7385 7390 7394 778 7324 7328 7333 7338 7342 37347 7352 7356 7361 7366 7370 7375 7379 7384 7389 7393 7398 777 7327 7332 7336 7341 7346 7350 7355 7360 7364 7369 7374 7378 7383 7387 7392 7397 7401 776 7331 7335 7340 7345 7349 7354 7358 7363 7368 7372 7377 7382 7386 7391 7395 7400 7405 775 7334 7339 7343 7348 7353 7357 7362 7366 7371 7376 7380 7385 739
222. 4 7638 7642 7647 7651 7655 7659 7663 7667 7672 7676 7680 7684 7688 7692 7696 7700 647 7638 7642 7646 7650 7654 7659 7663 7667 7671 7675 7679 7683 7688 7692 7696 7700 7704 646 7641 7645 7650 7654 7658 7662 7666 7671 7675 7679 7683 7687 7691 7695 7699 7703 7707 645 7645 7649 7653 7658 7662 7666 7670 7674 7678 7682 7687 7691 7695 7699 7703 7707 7711 644 7649 7653 7657 7661 7665 7670 7674 7678 7682 7686 7690 7694 7698 7702 7706 7711 7715 643 7652 7656 7661 7665 7669 7673 7677 7681 7686 7690 7694 7698 7702 7706 7710 7714 7718 642 7656 7660 7664 7668 7673 7677 7681 7685 7689 7693 7697 7701 7705 7710 7714 7718 7722 641 7660 7664 7668 7672 7676 7680 7685 7689 7693 7697 7701 7705 7709 7713 7717 7721 7725 640 7663 7667 7672 7676 7680 7684 7688 7692 7696 7700 7705 7709 7713 7717 7721 7725 7729 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 242 Laser and Optics User s Manual Vol Wavelength of Light Compensation Table 33 Metric High Alt Mid Temp Med Humidity o Temp 22 to 30 C Press 640 to 720 mm 50 Humidity 13 TEMPERATURE IN DEGREES CELSIUS BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 22 0 720 7449 719 7452 718 7456 717 7459 716 7463 715 7466 714 7470 713 7474 712 7477 71i 7481 710 7484 709 7488 708 7491 707 7495 706 7498 705 7502 704 7506 703 7509 702 7513 701 7516 700 7520 699 7523 698 7527 697 7530 696 7534 695 7538 694 7541 693 7545 692 7548 691 7552 690 7555 689 7559 688 7562 687 7566 686 7569 685
223. 4 7689 7693 7698 7703 7707 7712 7716 7721 24 50 7652 7656 7661 7666 7670 7675 7680 7684 7689 7694 7698 7703 7707 7712 7716 7721 7725 24 45 7656 7661 7666 7670 7675 7680 7684 7689 7694 7698 7703 7707 7712 7716 7721 7725 7730 24 40 7661 7666 7671 7675 7680 7685 7689 7694 7698 7703 7708 7712 7717 7721 7726 7730 7735 24 35 7666 7671 7675 7680 7685 7689 7694 7698 7703 7708 7712 7717 71721 7726 7730 7735 7739 24 30 7671 7675 7680 7685 7689 7694 7699 7703 7708 7712 7717 7721 7726 7730 7735 7739 7744 24 25 7675 7680 7685 7690 7694 7699 7703 7708 7713 7717 7722 7726 7731 7735 7740 7744 7748 24 20 7680 7685 7690 7694 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 7749 7753 24 15 7685 7690 7694 7699 7704 7708 7713 7717 7722 7726 7731 7736 7740 7744 7749 7753 7758 24 10 27690 7695 7699 7704 7708 7713 7718 7722 7727 7731 7736 7740 7745 7749 7754 7158 7762 24 05 7695 7699 7704 7709 7713 7718 7722 7727 7731 7736 7740 7745 7749 7754 7758 7763 7767 24 00 7699 7704 7709 7713 7718 7723 7727 7732 7736 7741 7745 7750 7754 7758 7763 7767 7772 23 95 7704 7709 7714 7718 7723 7727 7732 7736 7741 7745 7750 7754 7759 7763 7768 7772 7776 23 90 7709 7714 7718 7723 7727 7732 7737 7741 7746 7750 7755 7759 7763 7768 7772 7777 71781 23 85 7714 7718 7723 7728 7732 7737 7741 7746 7750 7755 7759 7764 7768 7772 7777 7781 7786 23 80 7719 7723 7728 7732 7737 7741 7746 7751 7755 7759 7764 7768 7773 7777 7782 7786 7790 23 75 7723 7728 7733 7737 7742 7746 7751 7755 7760 7764 7769 7773 7777 778
224. 40 23 70 7879 7883 7887 7891 7895 7899 7904 7908 7912 7916 7920 7924 7928 7932 7937 7941 7945 23 65 7883 7887 7891 7896 7900 7904 7908 7912 7916 7920 7925 7929 7933 7937 7941 7945 7949 23 60 7888 7892 7896 7900 7904 7908 7913 7917 7921 7925 7929 7933 7937 7941 7945 7949 7953 23 55 7892 7896 7900 7905 7909 7913 7917 7921 7925 7929 7933 7937 7942 7946 7950 7954 7958 23 50 7897 7901 7905 7909 7913 7917 7921 7925 7930 7934 7938 7942 7946 7950 7954 7958 7962 23 45 7901 7905 7909 7913 7918 7922 7926 7930 7934 7938 7942 7946 7950 7954 7958 7962 7967 23 40 7906 7910 7914 7918 7922 7926 7930 7934 7938 7943 7947 7951 7955 7959 7963 7967 7971 23 35 7910 7914 7918 7922 7927 7931 7935 7939 7943 7947 7951 7955 7959 7963 7967 7971 7975 23 30 7915 7919 7923 7927 7931 7935 7939 7943 7947 7951 7955 7959 7963 7968 7972 7976 7980 23 25 7919 7923 7927 7931 7935 7940 7944 7948 7952 7956 7960 7964 7968 7972 7976 7980 7984 23 20 7924 7928 7932 7936 7940 7944 7948 7952 7956 7960 7964 7968 7972 7976 7980 7984 7988 23 15 7928 7932 7936 27940 7944 7948 7952 7956 7961 7965 7969 7973 7977 7981 7985 7989 7993 23 10 7933 7937 7941 7945 7949 7953 7957 7961 7965 7969 7973 7977 7981 7985 7989 7993 7997 23 05 7937 7941 7945 7949 7953 7957 7961 7965 7969 7973 7977 7981 7985 7989 7993 7997 8001 23 00 7941 7946 7950 7954 7958 7962 7966 7970 7974 7978 7982 7986 7990 7994 7998 8002 8006 BAROMETRIC PRESSURE IN INCHES OF MERCURY N Cn e tn M M on d a N M a 268 Laser and Optics Us
225. 40 7445 7450 7454 7459 7463 7468 7473 7477 7482 7486 7491 7495 7500 7504 703 7435 7439 7444 7449 7453 7458 7462 7467 7472 7476 7481 7485 7490 7494 7499 7503 7508 702 7438 7443 7448 7452 7457 7462 7466 7471 7475 7480 7484 7489 7493 7498 7502 7507 7511 701 7442 7447 7451 7456 7461 7465 7470 7474 7479 7483 7488 7492 7497 7501 7506 7510 7515 700 7446 7450 7455 7460 7464 7469 7473 7478 7482 7487 7491 7496 7501 7505 7510 7514 7518 699 7449 7454 7459 7463 7468 7472 7477 7481 7486 7491 7495 7500 7504 7509 7513 7518 7522 698 7453 7458 7462 7467 7471 7476 7481 7485 7490 7494 7499 7503 7508 7512 7517 7521 7526 697 7457 7461 7466 7471 7475 7480 7484 7489 7493 7498 7502 7507 7511 7516 7520 7525 7529 696 7460 7465 7470 7474 7479 7483 7488 7492 7497 7501 7506 7510 7515 7519 7524 7528 7533 695 7464 7469 7473 7478 7482 7487 7491 7496 7500 7505 7509 7514 7518 7523 7527 7532 7536 694 7468 7472 7477 7481 7486 7491 7495 7500 7504 7509 7513 7518 7522 7526 7531 7535 7540 693 7471 7476 7481 7485 7490 7494 7499 7503 7508 7512 7517 7521 7526 7530 7535 7539 7543 692 7475 7480 7484 7489 7493 7498 7502 7507 7511 7516 7520 7525 7529 7534 7538 7543 7547 691 7479 7483 7488 7492 7497 7501 7506 7510 7515 7519 7524 7528 7533 7537 7542 7546 7550 690 7482 7487 7491 7496 7500 7505 7510 7514 7518 7523 7527 7532 7536 7541 7545 7550 7554 689 7486 7491 7495 7500 7504 7509 7513 7518 7522 7527 7531 7535 7540 7544 7549 7553 7558 688 7490 7494 7499 7503 7508 7512 7517 7521 7526 7530 7535 7539 7544 7548 75
226. 40 7844 7848 7852 24 65 7790 7794 7798 7803 7807 7811 7815 7819 7823 7828 7832 7836 7840 7844 7848 7852 7856 24 60 7794 7799 7803 7807 7811 7815 7820 7824 7828 7832 7836 7840 7844 7848 7852 7856 7860 24 55 7799 7803 7807 7811 7816 7820 7824 7828 7832 7836 7840 7845 7849 7853 7857 7861 7865 24 50 7803 7808 7812 7816 7820 7824 7828 7833 7837 7841 7845 7849 7853 7857 7861 7865 7869 24 45 7808 7812 7816 7820 7825 7829 7833 7837 7841 7845 7849 7853 7857 7861 7865 7870 7874 24 40 7812 7817 7821 7825 7829 7833 7837 7841 7845 7850 7854 7858 7862 7866 7870 7874 7878 24 35 7817 7821 7825 7829 7833 7838 7842 7846 7850 7854 7858 7862 7866 7870 7874 7878 7882 24 30 7821 7825 7830 7834 7838 7842 7846 7850 7854 7858 7862 7867 7871 7875 7879 7883 7887 24 25 7826 7830 7834 7838 7842 7846 7851 7855 7859 7863 7867 7871 7875 7879 7883 7887 7891 24 20 7830 7834 7839 7843 7847 7851 7855 7859 7863 7867 7871 7875 7879 7883 7887 7891 7895 24 15 7835 7839 7843 7847 7851 7855 7859 7864 7868 7872 7876 7880 7884 7888 7892 7896 7900 24 10 7839 7843 7848 7852 7856 7860 7864 7868 7872 7876 7880 7884 7888 7892 7896 7900 7904 24 05 7844 7848 7852 7856 7860 7864 7868 7872 7876 7880 7884 7889 7893 7896 7900 7904 7908 24 00 7848 7852 7856 7861 7865 7869 7873 7877 7881 7885 7889 7893 7897 7901 7905 7909 7913 23 95 7853 7857 7861 7865 7869 7873 7877 7881 7885 7889 7893 7897 7901 7905 7909 7913 7917 23 90 7857 7861 7865 7869 7874 7878 7882 7886 7890 7894 7898 7902 7906 7910 7914 7918 7921 23 85 786
227. 415 7420 7424 7429 7434 7438 7443 7447 71452 7456 7461 7465 757 7396 7401 7405 7410 7414 7419 7423 7428 27432 743 7441 7446 7450 7455 7459 7464 7468 756 7400 7404 7409 7413 7418 7422 7427 7431 7436 7440 7445 7449 7454 7458 7463 7467 7472 755 1403 7408 7412 7417 7421 7426 7430 7435 27439 7444 7448 7453 7457 7462 27466 7471 7475 754 7406 7411 7416 7420 7425 7429 7434 7438 7443 7447 7452 1456 7461 7465 7470 7474 7479 753 7410 7414 7419 7424 7428 7433 7437 7442 7446 7451 7455 7460 7464 7468 7473 7471 7482 752 7413 7418 7422 7427 7431 7436 7440 7445 7449 7454 7458 7463 7461 7472 7416 7481 7485 751 1417 7421 7426 27430 7435 7439 7444 7448 27453 7457 7462 7466 7471 7475 7480 7484 7489 750 7420 7425 7429 7434 7438 7443 7447 7452 7456 7461 7465 7470 7474 7419 7483 7488 7492 749 7424 7428 7433 7437 7442 7446 7451 7455 7460 7464 7469 7473 7478 7482 7486 7491 7495 748 7427 7432 277436 7441 7445 7450 7454 7459 7463 7468 7472 7476 1481 7485 7490 7494 7499 741 7431 7435 717440 7444 7449 7453 7458 7462 7466 7471 7475 7480 7484 7489 7493 7498 7502 746 7434 7439 7443 7448 7452 7457 7461 7465 7470 7474 7479 7483 7488 7492 7497 7501 7505 745 7438 7442 7447 7451 7455 7460 7464 7469 7473 7478 7482 7487 7491 7495 7500 7504 7509 744 7441 7445 7450 7454 7459 7463 7468 7472 7477 7481 7486 7490 7494 7499 7503 7508 7512 743 7444 7449 7453 7458 7462 7467 7471 7476 27480 7485 7489 7493 7498 7502 7507 7511 7515 742 7448 7452 7457 7461 7466 7470 7475 7479 7484 7488 7492 7497 7501 7506 7510
228. 417 7422 7427 717432 7437 71442 74417 71452 7457 71462 28 20 7387 7392 7397 7402 7407 7412 7417 7422 7427 27432 7437 7442 7447 7452 7457 7462 1466 28 15 7391 7396 7401 7406 7412 7417 7422 7427 7432 7431 7442 7446 7451 7456 7461 7466 7471 28 10 7396 27401 7406 27411 27416 7421 7426 7431 7436 7441 7446 7451 7456 7461 7466 7471 7475 28 05 7400 7406 7411 7416 7421 7426 7431 7436 7441 7446 7451 7456 7460 7465 7470 7475 7480 28 00 7405 7410 7415 7420 7425 7430 7435 7440 7445 7450 7455 7460 7465 7470 7475 7480 7484 27 95 7410 7415 7420 7425 7430 7435 7440 7445 7450 7455 7460 7465 7469 7474 71479 7484 7489 27 90 7414 7419 7425 7430 7435 7440 7445 7449 7454 7459 7464 7469 2474 7479 7484 7489 7493 27 85 7419 7424 7429 7434 7439 7444 71449 7454 7459 7464 7469 7474 7479 7483 7488 7493 7498 27 80 7424 7429 7434 7439 7444 7449 7454 7459 7464 7468 7473 7478 7483 7488 7493 7498 7502 27 75 7428 7433 7438 7443 7448 7453 7458 7463 7468 7473 7478 7483 7488 7492 7497 7502 7507 27 70 7433 7438 7443 7448 7453 7458 7463 7468 7473 7478 7482 7487 7492 7497 1502 7507 7511 27 65 7438 7443 7448 7453 7458 7463 7467 7472 7477 7482 27487 7492 7497 7501 7506 7511 7516 27 60 7442 7447 7452 7457 7462 7467 7472 7471 7482 7487 7492 7496 7501 7506 7511 7516 7520 27 55 7447 7452 7457 7462 7467 7472 27471 7482 7486 7491 7496 7501 7506 7511 7515 7520 7525 27 50 7451 27456 7461 7466 7471 7476 7481 7486 7491 7496 7501 7505 7510 7515 7520 7525 7529 27 45 7456 7461 7466 7471 7476 7481 7486 7491 7496 750
229. 420B Five Axis Interferometer 34 Agilent Z4421B Five Axis Interferometer 34 Agilent Z4422B Three Axis Interferometer 33 The optics in a referenced interferometer are referenced to points on the outside of the case This allows the interferometer to be installed in a predefined position and minimizes any alignment required with respect to the measurement mirror s used with it Refer to Chapter 5 Measurement Optics General Information and Chapter 6 NGI Measurement Optics General Information in this manual for information that can help you design the mounting location for an Agilent referenced interferometer Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 4 System Installation and Alignment Introduction 80 Pre Installation Checklist 80 System Grounding 81 External Cabling 81 Mounting Optics 84 Aligning Optics 88 Receiver Alignment and Gain Adjustment 92 Autoreflection Method Summary 92 Overlapping Dots Method Summary 94 Aligning the Agilent 10702A Linear Agilent 10766A Linear and Agilent 10705A Single Beam Interferometers 96 RE Agilent Technologies 79 4 System Installation and Alignment Introduction This chapter provides information to help you install and align an Agilent laser measurement system Information presented includes Pre installation checklist Installation of the laser heads and receivers Installation of optics Alignment proce
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231. 43 7348 7352 7357 7361 7366 7370 7375 7380 7384 7389 7393 7398 7402 7407 7411 7416 7420 7425 7430 7434 7439 7443 7448 7452 7457 7461 7466 7470 7475 7479 7484 7489 7493 7498 7502 7507 7511 7516 7520 7325 7529 7534 7538 7543 7548 7552 7557 69 0 7199 7204 7208 7213 7217 7222 7226 7231 7235 7240 7244 7249 7253 7258 7262 7267 7272 7276 7281 7285 7290 7294 7299 7303 7308 7312 7317 7321 7326 7335 7340 7344 7349 7353 7358 7362 7367 7371 7376 7380 7385 7389 7394 7398 7403 7407 7412 7417 7421 7426 7430 7435 7439 7444 7448 7453 7457 7462 7466 7471 7480 7485 7562 70 0 7205 7209 7214 7218 7223 7227 7232 7236 7241 7245 7250 7254 7259 7263 7268 7272 7271 7282 7286 7291 7295 7300 7304 7309 7313 7318 7322 7327 7331 7336 7340 7345 7349 7354 7358 7363 7367 7372 7376 7381 7386 7390 7395 7399 7404 7408 7413 7417 7422 7426 7431 7435 7440 7444 7449 7453 7458 7462 7467 7471 7476 7480 7485 7490 7494 7499 7503 7508 7512 7517 7521 7526 7530 7535 7539 7544 7548 7553 7557 7562 7566 71 0 7210 7215 7219 7224 7228 7233 7237 7242 7246 7251 7255 7260 7264 7269 7273 7278 7282 7287 7291 7296 7300 7305 7310 7314 7319 7323 7328 7332 7337 7341 7346 7350 7355 7359 7364 7368 7373 7377 7382 7386 7391 7395 7400 7404 7409 7413 7418 7422 7427 7431 7436 7440 74
232. 43 7648 7653 25 25 7581 7586 7591 7595 7600 7605 7610 7615 7620 7624 7629 7634 7639 7643 7648 7653 7658 25 20 7586 7590 7595 7600 7605 7610 7615 7620 7624 7629 7634 7639 7643 7648 7653 7657 7662 25 15 7590 7595 7600 7605 7610 7615 7620 7624 7629 7634 7639 7643 7648 7653 7657 7662 7667 25 10 7595 7600 7605 7610 7615 7619 7624 7629 7634 7635 7643 7648 7653 7657 7662 7667 7671 gt 7600 7605 7610 7615 7619 7624 7629 7634 7639 7643 7648 7653 7657 7662 7667 7671 7676 25 00 7605 7610 7614 7619 7624 7629 7634 7638 7643 7648 7653 7657 7662 7667 7671 7676 7681 24 95 7610 7614 7619 7624 7629 7634 7638 7643 7648 7653 7657 7662 7667 7671 7676 7681 7685 24 90 7614 7619 7624 27629 7634 7638 7643 7648 7653 7657 7662 7667 7671 7676 7681 7685 7690 24 85 7619 7624 7629 7634 7638 7643 7648 7653 7657 7662 7667 7671 7676 7681 7685 7690 7695 24 80 7624 7629 7634 7638 7643 7648 7653 7657 7662 7667 7672 7676 7681 7685 7690 7695 7699 24 75 7629 7634 7638 7643 7648 27653 7657 7662 7667 7672 7676 7681 7686 7690 7695 7699 7704 24 70 7634 7638 7643 7648 7653 7657 7662 7667 7672 7676 7681 7686 7690 7695 7699 7704 7709 24 65 7638 7643 7648 7653 7657 7662 7667 7672 7676 7681 7686 7690 27695 7700 7704 37109 7713 24 60 7643 7648 7653 7657 7662 7667 27672 7676 7681 7686 7690 7695 7700 7704 7709 7713 7718 24 55 7648 7653 7657 7662 7667 7612 27676 7681 7686 7690 7695 7700 7704 7709 7713 7718 7723 24 50 7653 7657 7662 7667 7672 7676 27681 7686 7690 7695 7700 7704 7709 714 7718 7723 7727 24 45 7
233. 44 7648 7651 7655 7658 7662 7665 7669 7672 7676 7679 7683 7686 7690 7693 7697 7700 7704 7708 7711 7715 7718 7122 7725 7729 7732 7736 7739 7743 7746 7750 7753 7751 25 5 7480 7483 7487 7490 7494 7497 7501 7505 7508 7512 7515 7519 7522 7526 7529 7533 7536 7540 7543 7547 7550 7554 7557 7561 7564 7568 7571 7575 7578 7582 7585 7589 7592 7596 7599 7603 7606 7610 7613 7617 7620 7624 7627 7631 7634 7638 7641 7645 7648 7652 7655 7659 7662 7666 7669 7673 7676 7680 7683 7687 7691 7694 7698 7701 7705 7708 7712 7115 7719 7722 7726 7729 7733 7136 7740 7743 7747 7750 7754 IST 7761 26 0 7484 7488 7491 7495 7498 7502 7505 7509 7512 7516 7519 7523 7526 7530 7533 7837 7540 7544 7547 7551 7554 7558 7561 7565 7568 7572 7575 7579 7582 7586 7589 7593 7596 7600 7603 7607 7610 7614 7618 7621 7625 7628 7632 7635 7639 7642 7646 7649 7653 7656 7660 7663 7667 7670 7674 7677 7681 7684 7688 7691 7695 7698 7702 7705 7709 7712 7716 7719 7723 7726 7730 7733 7737 7740 7744 7747 7751 7754 7758 7761 7765 26 5 7489 7492 7496 7499 7503 7506 7510 7513 7517 7520 7524 7527 7531 1534 7538 7541 7545 7548 7552 7555 7559 7562 7566 7569 7573 7576 7580 7583 7587 7590 7594 7597 7601 7604 7608 7611 7615 7618 7622 7625 7629 7632 7636 7639 7643 7646 7650 7653 7657 7660 76
234. 45 7449 7454 7458 7463 7467 7472 7477 7481 7486 7490 7495 7499 7504 7508 7513 7517 7522 7526 7531 7535 7540 7544 7549 7553 7558 7562 7567 7871 72 0 7216 7220 7225 7229 7234 7238 7243 7247 7252 7256 7261 7265 7270 7274 7279 7283 7288 7292 7297 7301 7306 7310 7315 7319 7324 7328 7333 7337 7342 7346 7351 7355 7360 7364 7369 7373 7378 7382 7387 7391 7396 7400 7405 7409 7414 7419 7423 7428 7432 7437 7441 7446 7450 7455 7459 7464 7468 7473 7477 7482 7486 7491 7495 7500 7504 7509 7513 7518 7522 7527 7531 7536 7540 7545 7549 7554 7558 7563 7567 7572 7576 73 0 7221 7226 7230 7235 7239 7244 7248 7253 7257 7262 7266 7271 7275 7280 7284 7289 7293 7298 7302 7307 7311 7316 7320 7325 7329 7334 7338 7343 7347 7352 7356 7361 7365 7370 7374 7379 7383 7388 7392 2393 7401 7406 7410 7415 7419 7424 7428 7433 7437 7442 7446 7451 7455 7460 7464 7469 7473 7478 7482 7487 7491 7496 7500 7505 7509 7514 7518 7523 7527 7532 7536 7541 7545 7550 7554 7559 7563 7568 7572 7577 7581 271 13 Wavelength of Light Compensation Table 62 English Low Alt Mid Temp High Humidity Temp 74 to 90 F Press 27 to 31 inches 80 Humidity M M M M M eee TEMPERATURE IN DEGREES FAHRENHEIT 74 0 75 0 76 0 77 0 78 0 79 0 80 0 81 0 82 0 83 0 84 0 85 0 86 0 87 0 88 0 89 0 90 0 31 00 7227 7
235. 45 7850 7854 7859 7863 7868 7872 7877 7881 7886 7890 7895 7899 7904 7908 7913 7918 7922 71 0 7565 7569 7574 7579 7583 7588 7592 7597 7601 7606 7610 7615 7619 7624 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7678 7682 7687 7691 7696 7700 7705 7709 7714 7718 7723 7727 7732 7736 7741 7746 7750 7755 7789 7764 7768 7773 7737 7782 7786 7791 7795 7800 7804 7809 7813 7818 7822 7827 7831 7836 7840 7845 7849 7854 7858 7863 7867 7872 7876 7881 7885 7890 7894 7899 7903 7908 1913 7917 7922 7926 72 0 7570 7574 7579 7583 7588 7592 7597 7601 7606 7610 7615 7619 7624 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7678 7682 7687 7691 7696 7700 7705 7709 7714 7718 7723 7727 7732 7736 7741 7745 7750 7754 7759 7763 7768 7772 77177 7781 7786 7790 7195 7799 7804 7808 7813 7817 7822 7867 7871 7876 7881 7885 7890 7894 7899 7903 7908 7912 7917 7921 7926 7930 13 73 0 7574 7687 7691 7714 7718 7723 7727 7732 7736 7741 7745 7750 7754 71759 7763 7768 7772 7777 7781 7786 7790 7795 7799 7804 7808 7813 7817 7822 7826 7831 7835 7840 7844 7849 7853 7858 7862 7867 7871 7876 7880 7885 7889 7894 7898 7903 7907 7912 7916 7921 7925 7930 7934 259 13 Wavelength of Light Compensation Table 50 English High Alt Mid Temp Low Humidity u Temp 74
236. 467 7472 7476 7481 7486 7490 7495 7500 7504 7509 7514 745 7443 7447 7452 7457 7461 7466 7471 7475 7480 7484 7489 7494 7498 7503 7508 7512 7517 744 7446 7451 7455 7460 7465 7469 7474 7479 7483 7488 7493 7497 1502 7506 7511 7516 7520 743 7450 7454 7459 7464 7468 7473 7477 7482 7487 7491 7496 7501 7505 7510 7514 7519 7524 742 7453 7458 7462 7467 7472 7476 7481 7485 7490 7495 7499 7504 7509 7513 7518 7522 7527 741 7457 7461 7466 7470 7475 7480 7484 7489 7493 7498 7503 7507 7512 7517 7521 7526 7530 740 1460 7465 7469 7474 7478 7483 7488 7492 7497 7501 7506 7511 7515 7520 7525 7529 7534 739 7463 7468 7473 7477 7482 7486 7491 7496 7500 7505 7510 7514 7519 7523 7528 7533 7537 738 7467 27472 7476 7481 7485 7490 7495 7499 7504 7508 7513 7517 7522 7527 7531 7536 7541 737 7470 7475 7480 7484 7489 7493 7498 7503 7507 7512 7516 7521 7525 7530 7535 7539 7544 736 7474 7478 7483 7488 7492 7497 7501 7506 7511 7515 7520 7524 7529 7533 7538 7543 7547 735 7477 7482 7486 7491 7496 7500 7505 7509 7514 7519 7523 7528 7532 7537 7541 7546 7551 734 7481 7485 7490 7494 7499 7504 7508 7513 7517 7522 7526 7531 7536 7540 7545 7549 7554 733 7484 7489 7493 7498 7502 7507 7512 7516 7521 7525 7530 7534 7539 7544 7548 7553 7557 732 7488 7492 7497 7501 7506 7510 7515 7520 7524 7529 7533 7538 7542 7547 7552 7556 7561 731 7491 7496 7500 7505 7509 7514 7518 7523 7528 7532 7537 7541 7546 7550 7555 7560 7564 730 7495 7499 7504 7508 7513 7517 7522 7526 7531 7536 7540 7545 7549 7554 7588 27563 7567 729
237. 482 7486 7491 7496 7501 7506 7511 7516 7521 7526 7530 7535 28 35 7461 7466 7471 7476 7481 7486 7491 7496 7501 7506 7510 7515 7520 7525 7530 7535 7540 28 30 7466 7471 7476 7481 7486 7490 7495 7500 7505 7510 7515 7520 7525 7529 7534 7539 7544 28 25 7470 7475 7480 7485 7490 7495 7500 7505 7510 7514 7519 7524 7529 7534 7539 7543 7548 28 20 7475 7480 7485 7490 7494 7499 7504 7509 7514 7519 7524 7529 7533 7538 7543 7548 7553 28 15 7479 7484 7489 7494 7499 7504 7509 7514 7518 7523 7528 7533 7538 7543 7547 7552 7557 28 10 7484 7489 7494 7498 7503 7508 7513 7518 7523 7528 7532 7537 7542 7547 7552 7557 7561 28 05 7488 7493 7498 7503 27508 7513 27518 7522 7527 7532 7537 7542 7547 7551 7556 7561 7566 28 00 7493 7498 7502 7507 7512 27517 7522 7527 7532 7536 7541 7546 7551 7556 7560 7565 7570 27 95 7497 7502 7507 7512 7517 27522 7526 7531 7536 7541 7546 7551 7555 7560 7565 7570 7574 27 90 7502 7507 7511 7516 7521 7526 7531 7536 7541 7545 7550 7555 7560 7564 7569 7574 7579 27 85 7506 7511 7516 7521 7526 7530 7535 7540 7545 7550 7555 7559 7564 7569 7574 7578 7583 27 80 7511 7516 7520 7525 7530 7535 7540 7545 7549 7554 7559 7564 7568 7573 7578 7583 7587 27 75 7515 7520 7525 7530 7535 7539 7544 7549 7554 7559 7563 7568 7573 7578 7582 7587 7592 27 70 7520 7524 7529 27534 7539 7544 7549 7553 7558 7563 7568 7572 7577 7582 7587 7591 7596 27 65 7524 7529 7534 7539 7543 7548 7553 7558 7563 7567 7572 7577 1582 7586 7591 7596 7601 27 60 7529 7533 7538 7543 7548 7553 7557 7562 7567 7572
238. 490 7494 7498 7502 7506 7511 741 7446 7450 7455 7459 7463 7468 7472 7476 7480 7485 7489 7493 7497 7501 7506 7510 7514 740 7450 7454 7458 7462 7467 7471 7475 7480 7484 7488 7492 7496 7501 7505 7509 7513 7517 739 7453 7457 7462 7466 7470 7474 7479 7483 7487 7491 7496 7500 7504 7508 7512 7517 7521 738 7456 7461 7465 7469 7474 7478 27482 7486 7491 7495 7499 7503 7507 7512 7516 7520 7524 737 7460 7464 7469 7473 7477 7481 7486 7490 7494 7498 7502 7507 7511 7515 7519 7523 7527 736 7463 7468 7472 7476 7480 7485 7489 7493 7497 7502 7506 7510 7514 7518 7522 7527 7531 735 7467 7471 7475 7480 7484 7488 7492 7497 7501 7505 7509 7513 7518 7522 7526 7530 7534 734 1470 7475 7479 7483 7487 7492 7496 7500 7504 7508 7513 7517 7521 7525 7529 7533 7538 733 7474 7478 7482 7487 7491 7495 7499 7503 7508 7512 7516 37520 7524 7528 7533 7537 7541 732 7477 7481 7486 7490 7494 7498 7503 7507 7511 7515 7519 7524 7528 7532 7536 7540 7544 731 7481 7485 7489 7493 7498 7502 7506 7510 7514 7519 7523 7527 7531 7535 7539 7543 7548 730 7484 7488 7493 27497 7501 7505 7509 7514 7518 7522 7526 7530 7534 7539 7543 7547 7551 729 7488 7492 7496 7500 7504 7509 7513 7517 7521 7525 7530 7534 7538 7542 7546 7550 7554 728 7491 7495 7499 7504 7508 7512 7516 7520 7525 7529 7533 7537 7541 7545 7549 7554 7558 727 7494 7499 7503 7507 7511 7516 7520 7524 7528 7532 7536 7540 7545 7549 7553 7557 7561 726 7498 7502 7506 7511 7515 7519 7523 7527 7531 7536 7540 7544 7548 7552 7556 7560 7564 725 7501 7506 7510 7514 751
239. 5 7478 7482 7486 7490 7493 7497 7501 7505 7508 7512 7516 7520 7523 7527 7531 7535 7538 7542 7546 7550 7553 7557 7561 7565 7568 7572 7576 7580 7583 7587 7591 7595 7598 7602 Laser and Optics User s Manual Vol 7 0 7307 7311 7315 7318 7322 7326 7329 7333 7337 7341 7344 7348 7352 7356 7359 7363 7367 TATL 7374 7378 7382 7386 7389 7393 7397 7401 7404 7408 7412 7416 7419 7423 7427 7431 7434 7438 7442 7446 7449 7453 7457 7460 7464 7468 7472 7475 7479 7483 7487 7490 7494 7498 7502 7505 7509 7513 7517 7520 7524 7528 7532 7535 7539 7543 7547 7550 7554 7558 7562 7565 7569 7573 7576 7580 7584 7588 7591 7595 7599 7603 7606 TEMPERATURE IN DEGREES CELSIUS 7 5 7312 7316 7319 7323 7321 7331 7334 7338 7342 7346 7349 7353 7357 7360 7364 7368 7372 7375 7379 7383 7387 7390 7394 7398 7402 7405 7409 7413 7416 7420 7424 7428 7431 7435 7439 7443 7446 7450 7454 7458 7461 7465 7469 7473 7476 7480 7484 7487 7491 7495 7499 7502 7506 7510 7514 7517 7521 7525 7529 7532 7536 7540 7543 7547 7551 7555 7558 7562 7566 7570 7573 7577 7581 7585 7588 7592 7596 7600 7603 7607 7611 8 0 7317 7320 7324 7328 7332 7335 7339 7343 7347 7350 7354 7358 7361 7365 7369 7373 7376 7380 7384 7388 7391 7395 7399 7402 7406 7410 7414 7417 7421 7425 7429 7432 7436 7440 7443 7447 74
240. 5 7699 7704 7708 7713 7717 7722 7726 7731 7735 7740 7744 7749 7753 7758 7762 7767 7771 7776 7780 7785 7789 7794 7798 7803 7807 7812 7816 7821 7825 7830 7834 7839 7843 7848 7853 7857 7862 7866 7871 7875 7880 7884 7889 7893 7898 7902 7907 7911 7916 7920 7925 7929 72 0 7573 7577 7582 7586 7591 7595 7600 7604 7609 7613 7618 7622 7627 7631 7636 7640 7645 7650 7654 7659 7663 7668 7672 7677 7681 7686 7690 7695 7699 7704 7708 7713 7717 7722 7726 7731 1135 7740 7744 7749 7753 7758 7762 7761 7711 7776 7780 7785 7789 7794 7798 7803 7807 7812 7816 7821 7825 7830 7834 7839 7843 7848 7852 7857 7861 7866 7870 7875 7879 7884 7888 7893 7897 7902 7906 7911 7915 7920 7924 7929 7933 73 0 7578 7582 7587 7591 7596 7600 7605 7609 7614 7618 7623 7627 7767 7771 7776 7780 7785 7789 7794 7798 7803 7807 7812 7816 7821 7825 7829 7834 7838 7843 7847 7852 7856 7861 7865 7870 7874 7879 7883 7888 7892 7897 7901 7906 7910 7915 7919 7924 7928 7933 7937 13 267 13 Wavelength of Light Compensation Table 58 English High Alt Mid Temp Med Humidity Temp 74 to 90 F Press 23 to 27 inches 50 Humidity TEMPERATURE IN DEGREES FAHRENHEIT 74 0 75 0 76 0 77 0 78 0 79 0 80 0 81 0 82 0 83 0 84 0 85 0 86 0 87 0 88 0 89 0 90 0 27 00 7582 7587 27592 7597 7601 7606 7611 7615 7620 7625 7629 7634 7639
241. 5 7730 7734 7739 7743 7748 7753 7157 7762 7767 7771 7776 7780 7785 7790 7794 7799 7804 7808 7813 7817 7822 7827 7831 7836 7841 7845 7850 7854 7859 7864 7868 7873 59 0 7508 7512 7517 7522 7526 7531 7535 7540 7545 7549 7554 7558 7563 7568 7572 7577 7582 7586 7591 7595 7600 7605 7609 7614 7619 7623 7628 7632 7637 7642 7646 7651 7655 7660 7665 7669 7674 7679 7683 7688 7692 7697 7702 7706 7711 7716 7720 7725 7729 7734 7739 7743 7748 7752 7757 7762 7766 7771 7776 7780 7785 7789 7794 7799 7803 7808 7812 7817 7822 7826 7831 7836 7840 7845 7849 7854 7859 7863 7868 7873 7877 60 0 7513 7517 7522 7526 7531 7536 7540 7545 7549 7554 7559 7563 7568 7572 7577 7582 7586 7591 7596 7600 7605 7609 7614 7619 7623 7628 7632 7637 7642 7646 7651 7655 7660 7665 7669 7674 7678 7683 7688 7692 7697 7702 7706 7711 7715 7720 7725 7729 7734 7738 7743 7748 7752 7757 7761 7766 7771 7775 7780 7785 7789 7794 7798 7803 7808 7812 7817 7821 7826 7831 7835 7840 7844 7849 7854 7858 7863 7867 7872 7877 7881 61 0 7517 7522 7527 7531 7536 7540 7545 7550 7554 7559 7563 7568 7573 7577 7582 7586 7591 7596 7600 7605 7609 7614 7619 7623 7628 7632 7637 7642 7646 7651 7655 7660 7665 7669 7674 7678 7683 7688 7692 7697 7701 7706 7711 7715 7720 7724 7729 7134 7738 7743 774
242. 5 7579 681 7513 7518 7522 27527 7531 7535 7540 7544 7548 7553 7557 7561 7566 7570 7574 7579 7583 680 7517 7521 7526 7530 7535 7539 7543 7548 7552 7556 7561 7565 7569 7574 7578 7582 7587 679 7521 7525 7529 7534 7538 7543 7547 7551 7556 7560 7564 7569 7573 7577 7582 7586 7590 678 7524 7529 7533 7537 7542 27546 7551 7555 7559 7564 7568 7572 7577 7581 7585 7589 7594 677 7528 7532 27537 7541 7546 27550 7554 7559 7563 27567 7572 7576 7580 27584 7589 7593 7597 676 7532 7536 7540 7545 7549 27553 7558 27562 27567 7571 7575 7579 27584 7588 7592 7596 7601 675 7535 7540 7544 7548 27553 7557 7561 7566 7570 7574 7579 7583 7587 7592 7596 7600 7604 674 7539 7543 7548 7552 7556 27561 7565 7569 7574 7578 7582 7587 7591 7595 7599 7604 7608 673 7543 7547 27551 7556 7560 7564 7569 7573 7577 7582 7586 7590 7594 7599 7603 7607 761i 672 7546 7551 7555 7559 7564 7568 7572 7577 7581 7585 7590 7594 7598 7602 7607 7611 7615 671 7550 7554 7559 27563 7567 7572 7576 7580 7585 7589 7593 7597 7602 7606 7610 7614 7619 670 7554 7558 7562 7567 7571 7575 7580 7584 7588 7592 7597 7601 7605 7609 7614 7618 7622 669 7557 7562 7566 7570 7575 7579 7583 7587 7592 7596 7600 7605 7609 7613 7617 7621 7626 668 7561 7565 7570 7574 7578 7582 7587 7591 7595 7600 7604 7608 7612 7617 7621 7625 7629 667 7564 7569 7573 7578 7582 7586 7590 7595 7599 7603 7607 7612 7616 7620 7624 7629 7633 666 7568 7572 7577 7581 7585 7590 7594 7598 7603 7607 7611 7615 7620 7624 7628 7632 7636 665 7572 7576 7580 7585 7589 7593 7598
243. 50 649 648 647 646 645 644 643 642 641 640 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 22 0 7446 7449 7453 7456 7460 7463 7467 7470 7474 7417 7481 7485 7488 7492 7495 7499 7502 7506 7509 7513 2917 7520 7524 1527 7531 7534 7538 7541 7545 7549 7552 7556 7559 7563 7566 7570 7573 7577 7580 7584 7588 7591 7595 7598 7602 7605 7609 7612 7616 7620 7623 7627 7630 7634 7637 7641 7644 7648 7651 7655 7659 7662 7666 7669 7673 7676 7680 7683 7687 7691 7694 7698 7701 7705 7708 7712 7715 7719 7723 7726 7730 22 5 7450 7453 7457 7461 7464 7468 7471 7475 7478 7482 7485 7489 7492 7496 7500 7503 7507 7510 7514 7517 7521 7524 7528 7531 7535 7539 7542 7546 7549 7553 7556 7560 7563 7567 7570 7574 7578 7581 7585 7588 7592 7595 7599 7602 7606 7609 7613 7617 7620 7624 7627 7631 7634 7638 7641 7645 7648 7652 7656 7659 7663 7666 7670 7673 7677 7680 7684 7687 7691 7695 7698 7702 7705 7709 7712 7716 7719 71723 7126 7130 7734 23 0 7454 7458 7461 7465 7468 7472 7476 7479 7483 7486 7490 7493 7497 7500 7504 7507 7511 7514 7518 7522 7525 7529 7532 7536 7539 7543 7546 7550 7553 7557 7560 7564 7568 7571 7575 7578 7582 7585 7589 7592 7596 7599 7603 7606 7610 7614 7617 7621 7624 7628 7631 7635 7638 7642 7645 7649 7652 7656 7660 7663 7667 7670 7674 7671 7681 7684
244. 50 7255 7260 7265 7269 7274 27279 7284 7289 7294 7298 7303 7308 7313 7317 7322 7327 752 7254 7259 7203 7268 7273 7278 7283 7288 7292 7297 7302 7307 7311 7316 7321 7326 7330 751 7257 7262 7267 7272 27277 7282 23286 7291 7296 7301 7306 7310 7315 7320 7325 7329 7334 750 7261 7266 27271 7276 7280 27285 37290 7295 7300 7304 7309 7314 7319 7323 7328 7333 7337 749 7265 7269 7274 7279 7284 7289 7294 7298 7303 7308 7313 7318 7322 7327 7332 2336 7341 748 7268 7273 27278 7283 7288 7292 7297 7302 7307 7312 7316 7321 7326 7331 7335 7340 7345 747 7272 7277 7282 7286 7291 7296 7301 7306 7310 7315 7320 7325 7329 7334 7339 7343 7348 746 7276 7280 7285 7290 7295 7300 7305 7309 7314 7319 7324 7328 7333 7338 7342 7347 7352 745 7279 7284 7289 7294 7299 27303 7308 7313 7318 7322 7327 17332 7337 7341 7346 7351 7355 744 7283 7288 7293 7297 7302 7307 7312 7317 7321 7326 7331 7335 7340 7345 7350 7354 7359 743 7287 7291 7296 7301 7306 7311 7315 7320 7325 7330 7334 7339 7344 7348 7353 7358 7362 742 7290 7295 7300 7305 7309 7314 7319 7324 7328 7333 7338 7343 7347 7352 7357 7361 7366 741 7294 7299 7303 7308 7313 7318 27323 7327 7332 7337 7342 7346 7351 7356 7360 7365 7370 740 7298 7302 7307 7312 7317 7321 7326 7331 7336 7340 7345 7350 7354 7359 7364 7368 7373 739 7301 27306 7311 7316 7320 7325 7330 7335 7339 7344 27349 7353 7358 7363 7367 7372 7377 738 7305 7310 7314 7319 7324 27329 273333 7338 7343 7348 7352 7357 7362 7366 7371 7376 7380 737 7308 7313 7318 7323 7328 7332 7337 7342 7347 73
245. 51 7255 7258 7262 7265 7269 7272 7276 7279 7283 7286 7290 7293 7297 7300 7304 7307 7311 7314 7318 7321 7325 7328 7332 7335 7339 7342 7346 7349 7353 7356 7360 7363 7367 7370 7374 7377 7381 7384 7388 7391 7395 7398 7402 7405 7409 7412 7416 7419 7423 7426 7430 7433 7437 7440 7444 7447 7451 7454 7457 7461 7464 7468 7471 7475 7478 7482 7485 7489 27 5 7214 7218 7221 7225 7228 7232 7235 7239 7242 7246 7249 7253 7256 7260 7263 7267 7270 7274 7277 7281 7284 7288 7291 7294 7298 7301 7305 7308 7312 7315 7319 7322 7326 73298 7333 7336 7340 7343 7347 7350 7354 7357 7361 7364 7368 7371 7375 7378 7382 7385 7389 7392 7396 7399 7403 7406 7410 7413 7417 7420 7423 7427 7430 7434 7437 7441 7444 7448 7451 7455 7458 7462 7465 7469 7472 7476 7479 7483 7486 7490 7493 28 0 7219 7223 7226 7229 7233 7236 7240 7243 7247 7250 7254 7257 7261 7264 7268 7271 7275 7278 7282 7285 7289 7292 7296 7299 7303 7306 7310 2313 7316 7320 7323 7327 7330 7334 7337 7341 7344 7348 7351 7355 7358 7362 7365 7369 7372 7376 7379 7383 7386 7390 7393 7397 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7449 7452 7456 7459 7463 7466 7470 7473 7477 7480 7484 7487 7490 7494 7497 28 5 7224 7227 7231 7234 7238 7241 7245 7248 7252 7255 7259 7262 7265 7269 7
246. 51 7455 7458 7462 7466 7470 7473 7477 7481 7485 7488 7492 7496 7499 7503 7507 7511 7514 7518 7522 7526 7529 7533 7537 7540 7544 17548 7552 79585 7559 7563 7567 7510 7574 7518 7581 7585 7589 7593 7596 7600 7604 7608 7611 7615 8 5 7322 7325 7329 7333 7336 7340 7344 7348 7351 7355 7359 7362 7366 7370 7374 7377 7381 7385 7389 7392 7396 7400 7403 7407 7411 7415 7418 7422 7426 7429 7433 7437 7441 7444 7448 7452 7456 7459 7463 7467 7470 7474 7478 7482 7485 7489 7493 7496 7500 7504 7508 751i 7515 7519 7523 7526 7530 7534 7537 7541 7545 7549 7552 7556 7560 7563 7567 7571 7575 7578 7582 7586 7590 7593 7597 7601 7604 7608 7612 7616 7619 9 0 7326 7330 7334 7337 7341 7345 7349 7352 7356 7360 7363 7367 7371 7375 7378 7382 7386 7389 7393 7397 7401 7404 7408 7412 7415 7419 7423 7427 7430 7434 7438 7441 7445 7449 7453 7456 7460 7464 7467 7471 7475 7479 7482 7486 7490 7494 7497 7501 7505 7508 7512 7516 7520 7923 7527 7531 7534 7538 7542 7546 7549 7553 7557 7560 7564 7568 7572 7575 7579 7583 7586 7590 7594 7598 7601 7605 7609 7612 7616 7620 7624 9 5 7331 7335 7338 7342 7346 7350 7353 7357 7361 7364 7368 7372 7316 7379 7383 7387 7390 7394 7398 7402 7405 7409 7413 7416 7420 7424 7428 7431 7435 7439 7442 7446 7450 7453 7457 7461 7465 7468 741
247. 51 7356 7361 7365 7370 7375 7379 7384 736 7312 7317 7322 37326 7331 7336 7341 7345 7350 7355 7359 7364 7369 7373 7318 7383 7387 735 7316 7321 7325 7330 27335 7340 7344 7349 7354 7358 7363 7368 7372 7377 7382 7386 7391 734 71319 7324 7329 27334 7338 7343 7348 7353 7357 7362 7367 7371 7376 7381 7385 7390 7394 733 7323 7328 7333 7337 7342 73417 7352 7356 7361 7366 7370 7375 7380 7384 7389 7393 7398 732 7327 7332 7336 7341 7346 7350 7355 7360 7365 7369 7374 7379 7383 7388 7392 7397 7402 731 7330 7335 7340 7345 7349 7354 7359 7363 7368 7373 7377 7382 7387 7391 7396 7401 7405 730 7334 7339 7344 7348 7353 27358 7362 7367 7372 7376 7381 7386 7390 7395 7399 7404 7409 729 7338 7342 7347 7352 7357 7361 7366 7371 7375 7380 7385 7389 7394 7398 7403 7408 7412 728 7341 7346 7351 27356 7360 7365 7370 7374 7379 7384 7388 7393 7397 7402 7407 7411 7416 727 7345 7350 7355 7359 7364 27369 7373 7378 7383 7387 7392 7396 7401 7406 7410 7415 7419 726 7349 7353 7358 7383 7368 7372 7377 7382 7386 77391 7395 7400 7405 7409 7414 7418 7423 725 7352 7357 7362 7366 7371 7376 7381 7385 7390 7394 7399 7404 7408 7413 7417 7422 7426 724 7356 7361 7365 7370 7375 7379 7384 7389 7393 7398 7403 7407 7412 7416 7421 7425 7430 723 7360 7364 7369 7374 7378 27383 7388 7392 7397 7402 7406 7411 7415 7420 7424 7429 7434 722 7363 7368 7373 7377 7382 7387 7391 7396 7401 7405 7410 7414 7419 7424 7428 7433 7437 721 7367 7372 27376 7381 7386 7390 7395 7400 7404 7409 7413 7418 7423 7427 7432 7436 7441 720 7371 7
248. 513 7540 7566 7592 7617 7642 7667 7691 7716 7740 7764 7789 7813 7838 670 7449 7477 7505 7531 7558 7584 7609 7635 7660 7684 7709 7733 7757 7781 7805 7830 7854 665 7468 7496 7523 7550 7576 7602 7627 7652 7677 7702 7726 7750 7774 7798 313822 7846 7870 7487 7515 7542 7568 7594 7620 7645 7670 7695 7719 7743 7767 7791 7814 7838 7862 7887 7506 7534 7561 7587 7613 7638 7663 7688 7712 7736 7760 7184 7807 7831 7855 7879 7903 650 7526 7553 7579 7605 7631 7656 7681 7705 7730 7754 7777 1801 7824 7848 7871 7895 7919 645 1545 7571 7598 7624 7649 7674 7699 7723 7747 17771 71794 7818 7841 7864 7888 7911 7935 640 7564 7590 7616 7642 7667 7692 7717 7741 7765 7788 7812 7835 7858 7881 7904 7928 7951 635 7583 7609 7635 7661 7686 7710 7735 7759 7782 7806 7829 7852 7875 7898 7921 7944 7968 630 7602 7628 7654 7679 7704 7728 7752 7776 7800 7823 7846 7869 7892 7914 7937 7960 7984 625 7621 7647 7672 7697 7722 7746 7770 7794 7817 7840 7863 7886 7908 7931 7954 7977 8000 620 7640 7666 7691 7716 7740 7764 7788 7812 7835 2858 7880 7903 7925 7948 7970 7993 8016 615 7659 7685 7710 7734 7759 7783 7806 7829 7852 7875 7897 7920 7942 7964 7987 8010 8032 610 7678 7703 7728 7753 7777 7801 7824 7847 7870 7892 7915 7937 7959 7981 8003 8026 8049 605 7697 37722 7747 1771 7795 7819 7842 7865 7887 7910 7932 7954 7976 7998 8020 8042 8065 600 7716 7741 7766 17790 7813 7837 7860 7882 7905 7927 7949 7971 7993 8015 8036 8059 8081 595 7735 7760 7784 7808 7832 7855 7878 7900 7922 7944 7966 7988 8010 8031 8053 80
249. 514 7519 7524 7529 7534 26 55 7457 7462 7468 7473 7478 7483 7488 7493 7498 7504 7509 7514 7519 7524 7529 7534 7539 26 50 7462 7467 7472 7478 7483 7488 7493 7498 7503 7508 7513 7518 7523 7528 7533 7538 7543 26 45 7467 7472 7477 7482 7488 7493 7498 7503 7508 7513 7518 7523 7528 7533 7538 7543 7548 26 40 7472 7477 7482 7487 7492 7497 7502 7508 7513 7518 7523 7528 7533 7538 7543 7548 7553 26 35 7476 7482 7487 7492 7497 7502 7507 7512 7517 7522 7527 7532 7537 7542 7547 7552 7587 26 30 7481 7486 7492 7497 7502 7507 7512 7517 7522 1527 7532 7537 7542 7547 7552 7557 7562 26 25 7486 7491 7496 7501 7507 7512 7517 7522 7527 71532 7537 7542 7547 7552 7557 7562 7567 26 20 7491 7496 7501 7506 7511 7516 7521 7526 7531 7537 7542 7546 7551 7556 7561 7566 7571 26 15 7496 7501 7506 7511 7516 7521 7526 7531 7536 7541 7546 7551 7556 7561 7566 7571 7576 26 10 7500 7506 7511 75 6 7521 7526 7531 7536 7541 7846 7551 7556 7561 7566 7571 7576 7589 26 05 7505 7510 7515 7520 7526 7531 7536 7541 7546 7551 7556 7561 7566 7570 7575 7580 7585 26 00 7510 7515 7520 7525 7530 7535 7540 7545 7550 7555 7560 7565 7570 7575 7580 7585 7590 25 95 7515 7520 7525 7530 7535 7540 7545 7550 7555 7560 7565 7570 7575 7580 7585 7590 7594 25 90 7520 7525 7530 7535 7540 7545 7550 7555 7560 7565 7570 7575 7580 7584 7589 7594 7599 25 85 7524 7529 7535 7540 7545 7550 7555 7560 7565 7569 7574 7579 7584 7589 7594 7599 7604 25 80 7529 7534 7539 7544 7549 7554 7559 7564 7569 7574 7579 7584 7589 7594 7599 7604 7608 25
250. 52 7357 7361 7366 7370 7375 7379 7384 7389 7393 7398 7402 7407 7411 7416 7421 7425 7430 7434 7439 7443 7448 7452 7457 7462 7466 7471 7475 7480 7484 7489 7494 7498 7503 7507 7512 7516 7521 7526 7530 7535 7539 66 0 7180 7184 7189 7193 7198 7202 7207 7211 7216 7221 7225 7230 7234 7239 7243 7248 7252 7257 7262 7266 7271 7275 7280 7284 7289 7293 7298 7303 7307 7312 7316 7321 7325 7330 7334 7339 7344 7348 7353 7357 7362 7366 7371 7375 7380 7385 7389 7394 7398 7403 7407 7412 7416 7421 7426 7430 7435 7439 7444 7448 7453 7457 7462 7467 7471 7476 7480 7485 7489 7494 7499 7503 7508 7512 7517 7521 7526 7530 7535 7540 7544 67 0 7185 7190 7194 7199 7203 7208 7212 7217 7221 7226 7231 7235 7240 7244 7249 7253 7258 7262 7267 7271 7276 7281 7285 7290 7294 7299 7303 7308 7312 7317 7321 7326 7331 7335 7340 7344 7349 7353 7358 7362 7367 7372 7376 7381 7385 7390 7394 7399 7403 7408 7412 7417 7422 7426 7431 7435 7440 7444 7449 7453 7458 7462 7467 7472 7476 7481 7485 7490 7494 7499 7503 7508 7513 7517 7522 7526 7531 7535 7540 7544 7549 68 0 7191 7195 7200 7204 7209 7213 7218 7222 7227 7231 7236 7241 7245 7250 7254 7259 7263 7268 7272 7271 7281 7286 7290 7295 7300 7304 7309 7313 7318 7322 7327 7331 7336 7340 7345 7349 7354 7359 7363 7368 7372 73
251. 52 7557 7561 687 7493 7498 7502 7507 7511 7516 7520 7525 7529 7534 7538 7543 7547 7552 7556 7560 7565 686 7497 7501 7506 7511 7515 7520 7524 7528 7533 7537 7542 7546 7551 7555 7559 7564 7568 685 7501 7505 7510 7514 7519 7523 7528 7532 7537 7541 7545 7550 7554 7559 7563 7567 7572 684 7504 7509 7513 7518 7522 7527 7531 7536 7540 7545 7549 7553 7558 7562 7567 7571 7575 683 7508 7512 7517 7521 7526 7530 7535 7539 7544 7548 7553 7557 7561 7566 7570 7575 7579 682 7512 7516 7521 7525 7530 7534 7538 7543 7547 7552 7556 7561 7565 7569 7574 7578 7583 681 7515 7520 7524 7529 7533 7538 7542 7547 7551 7555 7560 7564 7569 7573 7577 7582 7586 680 7519 7523 7528 7532 7537 7541 7546 7550 7555 7559 7563 7568 7572 7577 7581 7585 7590 679 7523 7527 7532 7536 7540 7545 7549 7554 7558 7563 7567 7571 7576 7580 7584 7589 7593 678 7526 7531 7535 7540 7544 7549 7553 7557 7562 7566 27571 7575 7579 7584 7588 7592 7597 677 7530 7534 7539 7543 7548 7552 7557 7561 7565 7570 7574 7579 7583 7587 7592 7596 7600 676 7534 7538 7542 7547 7551 7556 7560 7565 7569 7573 7578 7582 7586 7591 7595 7600 7604 675 7537 7542 7546 7551 7555 7559 7564 7568 7573 7577 7581 7586 7590 7594 7599 7603 7607 674 7541 7545 7550 7554 7559 7563 7567 7572 7576 7581 7585 7589 7594 7598 7602 7607 7611 673 7545 7549 7553 7558 7562 7567 7571 7575 7580 7584 7589 7593 7597 7602 7606 7610 7615 672 7548 7553 7557 7561 7566 7570 7575 7579 7583 7588 7592 7596 7601 7605 7609 7614 7618 671 7552 7556 7561 7565 7570 7574 7578 7583 7
252. 551 7555 7559 7563 7566 7570 7574 7578 7582 7585 7589 Wavelength of Light Compensation i i idity Table 23 Metric High Alt Low Temp Low Humi u Temp 5 to 13 C Press 640 to 720 mm 20 Humidity 5 5 7292 7296 7300 7304 7307 7311 7315 7319 7323 7326 7330 7334 7338 7341 7345 7349 7353 7356 7360 7364 7368 7371 7375 7379 7383 7386 7390 7394 7398 7402 7405 7409 7413 7417 7420 7424 7428 7432 7435 7439 7443 7447 7450 7454 7458 7462 7466 7469 7473 7477 7481 7484 7488 7492 7496 7499 7503 7507 7511 7514 7518 7522 7526 7529 7533 7537 7541 7545 7548 7552 7556 7560 7563 7567 7571 7575 7578 7582 7586 7590 7593 6 0 7297 7301 7305 7309 7312 7316 7320 7324 7327 7331 7335 7339 7342 7346 7350 7354 7357 7361 7365 7369 7372 7376 7380 7384 7387 7391 7395 7399 7402 7406 7410 7414 7418 7421 7425 7429 7433 7436 7440 7444 7448 7451 7455 7459 7463 7466 7410 7474 7478 7481 7485 7489 7493 7496 7500 7504 7508 7511 7515 7519 7523 7526 7530 7534 7538 7541 7545 7549 7553 7556 7560 7564 7568 7571 7575 7579 7583 7587 7590 7594 7598 6 5 7302 7306 7310 7313 7317 7321 7325 7328 7332 7336 7340 7343 7347 7351 7355 7358 7362 7366 7370 7373 7377 7381 7385 7388 7392 7396 7400 7403 7407 7411 7415 7418 7422 7426 7430 7433 7437 7441 7445 7448 7452 7456 7460 7463 7467 7471 747
253. 57 7761 7765 7710 7774 7778 7783 7787 7791 7796 7800 7804 7808 7813 7817 7821 7826 7830 7834 7839 7843 7847 7851 7856 7860 7864 7869 7873 7877 7882 7886 7890 7894 7899 7903 7907 7912 7916 7920 7925 7929 7933 7938 7942 7946 7950 7955 7959 7963 7968 7972 7976 7981 7985 7989 7993 7998 8002 8006 8011 8015 98 0 7701 7706 7710 7714 7719 7723 7727 7732 71736 7740 7744 7749 7753 7757 7762 7766 7770 7774 7779 7783 7787 7792 7796 7800 7804 7809 7813 7817 7822 7826 7830 7835 7839 7843 7847 7852 7856 7860 7865 7869 7873 7877 7882 7886 7890 7895 7899 7903 7908 7912 99 0 7706 7711 7715 7719 7723 7728 7732 7736 7741 7745 7749 100 0 7711 7715 7720 7724 7728 7732 TT37 7741 7745 7750 7754 7758 7762 7767 7771 7775 7780 7784 7788 7792 7797 7801 7805 7809 7814 7818 7822 7827 7831 7835 7839 7844 7848 7852 7857 7861 7865 101 0 7716 7720 7724 7729 7733 7737 7742 7746 7750 7754 7759 7763 7767 7771 7776 7780 7784 7789 7793 7797 7801 7806 7810 7814 7818 7823 7827 7831 7836 7840 7844 7848 7853 7857 7861 7865 7870 7874 7878 7882 7887 7891 7895 7900 7904 7908 7912 7917 7921 7925 7929 7934 7938 7942 7947 7951 7955 7959 7964 7968 7972 7976 7981 7985 7989 7994 7998 8002 8006 8011 8015 8019 8023 8028 8032 8036 8040 8045 8049 8053 8058 102 0 7721 77
254. 58 7463 7469 7474 27 20 7395 7400 7406 27411 7416 27421 7427 7432 7437 7442 7447 7453 7458 7463 7468 7473 7478 27 15 7400 7405 7410 7416 7421 7426 7431 7437 7442 7447 21452 7457 7462 7468 7473 7478 7483 27 10 7404 7410 7415 7420 7426 7431 7436 7441 7447 7452 7457 7462 7467 7472 747 7483 7488 27 05 7409 7415 7420 27425 7430 7436 7441 7446 7451 7456 7462 7467 71472 411 7482 7487 7492 27 00 7414 7419 7425 7430 7435 7440 7446 7451 7456 7461 7466 7471 741 7482 7487 7492 7497 BAROMETRIC PRESSURE IN INCHES OF MERCURY 270 Laser and Optics User s Manual Vol Table 61 Wavelength of Light Compensation English Low Alt Low Mid Temp High Humidity Temp 57 to 73 F Press 27 to 31 inches 80 Humidity 13 he ee BAROMETRIC PRESSURE IN INCHES OF MERCURY 28 70 7344 28 65 7349 28 60 7354 28 55 7358 28 50 7363 28 45 7367 28 40 7372 28 35 7377 28 30 7381 28 25 7386 28 20 7391 28 15 7395 28 10 7400 28 05 7405 28 00 7409 27 95 7414 27 90 7418 27 85 7423 27 80 7428 27 75 7432 27 70 7437 27 65 7442 27 60 7446 27 55 7451 27 50 7456 27 45 7460 27 40 7465 27 35 7469 27 30 7474 27 25 7479 27 20 7483 27 15 7488 27 10 7493 27 05 7497 27 00 7502 58 0 7137 7141 7146 FASL 7155 7160 7164 7169 7174 7178 7183 7188 7192 7197 7202 7206 7211 7215 7220 7225 7229 7234 7239 7243 7248 7252 7257 7262 7266 7271 7276 7280 7285 7289 7294 7299 7303 7308 7313 7317
255. 587 7591 7596 7600 7604 7609 7613 7617 7622 670 7555 7560 7564 7569 7573 7578 7582 7586 7591 7595 7599 7604 7608 7612 7617 7621 7625 669 7559 7564 7568 7572 7577 7581 7586 7590 7594 7599 7603 7607 7612 7616 7620 7624 7629 668 7563 7567 7572 7576 7580 7585 7589 7593 7598 7602 7607 7611 7615 7619 7624 7628 7632 667 7566 7571 7575 7580 7584 7588 7593 7597 7601 7606 7610 7614 7619 7623 7627 7632 7636 666 7570 7575 7579 7583 7588 7592 7596 7601 7605 7609 7614 7618 7622 7627 7631 7635 7639 665 7574 7578 7583 7587 7591 7596 7600 7604 7609 7613 7617 7622 7626 7630 7634 7639 7643 664 7577 7582 7586 7591 7595 7599 7604 7608 7612 7617 7621 7625 7629 7634 7638 7642 7647 663 7581 7585 7590 7594 7599 7603 7607 7612 7616 7620 7624 7629 7633 7637 7642 7646 7650 662 7585 7589 7593 7598 7602 7607 7611 7615 7619 7624 7628 7632 7637 7641 7645 7649 7654 661 7588 7593 7597 7601 7606 7610 7614 7619 7623 7627 7632 7636 7640 7644 7649 7653 7657 660 7592 7596 7601 7605 7609 7614 7618 7622 7627 7631 7635 7640 7644 7648 7652 7657 7661 659 7596 7600 7604 7609 7613 7617 7622 7626 7630 7635 7639 7643 7647 7652 7656 7660 7664 658 7599 7604 7608 7612 7617 7621 27625 7630 7634 7638 7642 70647 7651 7655 7659 7664 7668 657 7603 7607 7612 7616 7620 7625 7629 7633 7638 7642 7646 7650 7655 7659 7663 7667 7671 656 7607 7611 27615 7620 7624 7628 27633 7637 7641 7645 7650 7654 7658 7662 7667 7671 7675 655 7610 7615 7619 7623 7628 7632 7636 7640 7645 7649 7653 7657 7662 7666 7670 7674 7679 654 7614 76
256. 59 7164 27169 7174 7178 7183 7188 7193 7198 7203 786 7127 7132 7137 7142 7147 7152 7157 7162 7167 7172 7177 7182 7187 7192 7197 7201 7206 785 7131 27136 27141 7146 7151 7156 7161 7166 7171 7176 7181 7186 7191 7195 7200 7205 7210 784 7135 7140 7145 7150 7155 7160 7165 7170 7175 7179 7184 27189 7194 7199 7204 7209 7213 783 7138 7143 7148 7153 7158 7163 7168 7173 7178 7183 7188 7193 7198 7203 7207 7212 7217 782 7142 7147 7152 7157 7162 7167 7172 7177 7182 7187 7192 7196 7201 7206 7211 7216 7221 781 7146 7151 7156 7161 7166 171 7175 7180 7185 7190 7195 7200 7205 7210 7215 7219 7224 780 7149 7154 7159 7164 7169 7174 7179 7184 7189 7194 7199 7204 7208 7213 7218 7223 7228 779 7153 7158 7163 7168 7173 7178 7183 7188 7193 7197 7202 7207 7212 7217 7222 7226 7231 778 7157 7162 7167 7172 7176 7181 7186 7191 7196 7201 7206 7211 7216 7220 7225 7230 7235 777 7160 27165 7170 7175 7180 7185 7190 7195 7200 7205 7209 7214 7219 7224 7229 7234 7238 776 7164 7169 7174 7179 7184 7189 7194 7198 7203 7208 7213 7218 7223 7228 7232 723 7242 775 7168 7173 7177 7182 7187 7192 7197 7202 7207 7212 737217 7222 7226 7231 7236 7241 7245 714 7171 7176 7181 7186 7191 7196 7201 7206 7211 7215 7220 7225 7230 7235 27239 7244 7249 773 7175 7180 7185 7190 7195 7200 7204 7209 7214 7219 7224 7229 7233 7238 7243 7248 7253 772 7179 7183 7188 7193 7198 7203 7208 7213 7218 27223 7227 2232 7237 7242 7247 7251 7256 771 7182 7187 7192 7197 7202 7207 7212 7217 7221 7226 3231 7236 37241 7245 7250 7255 7260 77
257. 6 7301 7306 7312 30 85 7233 7239 7244 7249 7254 7260 7265 7270 7275 7280 7285 7291 7296 7301 7306 7311 7316 30 80 7238 7243 7248 7254 7259 7264 7269 7274 7280 7285 7290 7295 7300 7305 7310 7315 7320 30 75 7242 7248 7253 7258 7263 7268 7274 7279 7284 7289 7294 7299 7304 7309 7315 7320 7325 30 70 7247 7252 27257 7263 7268 7273 27278 7283 7288 7294 7299 7304 7309 7314 7319 7324 7329 30 65 7251 7257 7262 7267 7272 7277 7283 7288 7293 7298 7303 7308 7313 7318 7323 7328 7333 30 60 7256 7261 7266 7271 7277 7282 7287 7292 7297 7302 7307 7313 7318 7323 7328 7333 7338 30 55 7260 7266 7271 7276 7281 7286 7291 7297 7302 27307 7312 7317 7322 7327 7332 27337 7342 30 50 7265 7270 7275 7280 7286 7291 7296 7301 7306 7311 7316 7321 7326 7331 7336 7341 7346 30 45 7269 7274 7280 7285 7290 7295 7300 7305 7310 7316 7321 7326 7331 7336 7341 7346 7351 30 40 7274 7279 7284 7289 7294 7300 7305 7310 7315 7320 7325 7330 7335 7340 7345 7350 7355 30 35 7278 7283 7289 7294 7299 7304 27309 7314 7319 7324 7329 7334 7340 7345 7350 37354 7359 30 30 7283 7288 7293 7298 7303 7308 7314 7319 7324 7329 7334 7339 7344 7349 7354 7359 7364 30 25 7287 7292 7298 7303 7308 7313 7318 7323 7328 7333 7338 7343 7348 7353 7358 7363 7368 30 20 7292 7297 7302 7307 7312 7317 7322 7328 27333 7338 7343 7348 7353 7358 7363 7368 7373 30 15 7296 7301 7306 7312 7317 7322 7327 7332 7337 7342 7347 7352 7357 7362 7367 7372 7377 30 10 7301 7306 7311 7316 7321 27326 27331 7336 7341 7346 7351 7356 7361 7366 7371 7376 7381
258. 6 7802 7805 7809 7814 7818 7823 7821 7832 7836 23 30 7769 7774 7778 7783 7787 7792 7196 37801 7805 7810 7814 7819 7823 7827 7832 7836 7841 23 25 7774 7778 7783 7787 7792 27796 7801 7805 7810 7814 7819 7823 7828 7832 7837 7841 7845 23 20 7779 7783 7788 7792 7797 27801 7806 7810 7815 7819 7824 7828 7832 7837 7841 7846 7850 23 15 7783 7768 7792 7797 7801 7806 7810 7815 7819 7824 7828 7833 7837 7841 7846 7850 7855 23 10 7788 7793 7797 7802 7806 7811 7815 7820 7824 7829 7833 7837 7842 7846 7851 7855 7859 23 05 7793 7797 7802 7807 7811 7815 7820 7824 7829 7833 7838 7842 7846 7851 7855 7860 7864 23 00 7798 7802 7807 7811 7816 7820 7825 7829 7834 7838 7842 7847 7851 7856 7860 7864 7869 BAROMETRIC PRESSURE IN INCHES OF MERCURY 274 Laser and Optics User s Manual Vol Wavelength of Light Compensation i i Mi igh Humidity Table 65 English High Alt Low Mid Temp Hig ty Temp 57 to 73 F Press 23 to 27 inches 80 Humidity 13 aaaea amaaa UO BAROMETRIC PRESSURE IN INCHES OF MERCURY 57 0 27 00 7502 26 95 7507 26 90 7511 26 85 7516 26 80 7520 26 75 7525 26 70 7530 26 65 7534 26 60 7539 26 55 7544 26 50 7548 26 45 7553 26 40 7558 26 35 7562 26 30 7567 26 25 7571 26 20 7576 26 15 7581 26 10 7585 26 05 7590 26 00 7595 25 95 7599 25 90 7604 25 85 7609 25 80 7613 25 75 7618 25 70 7622 25 65 7627 25 60 7632 25 55 7636 25 50 7641 25 45 7646 25 40 7650 25 35 7655 25 30 7660 25 25 7664 25 20 7669 25 15 7673 25 10 76
259. 60 7664 27668 7672 7676 7679 7683 7687 7691 7695 7699 685 7639 7643 7647 7651 7655 7659 7663 7667 7671 7675 7679 27683 7687 7691 7695 7698 7702 684 1643 76417 1651 7655 7659 7663 27667 7671 7675 7678 7682 7686 7690 7694 7698 7702 7706 683 7646 7650 7654 7658 7662 7666 7670 7674 7678 7682 7686 7690 7694 7697 7701 7705 7709 682 7650 7654 31658 7662 7666 7670 7673 7677 7681 7685 7689 7693 7697 7701 7705 7709 7712 681 7653 7657 7661 7665 7669 7673 7677 7681 7685 7689 7693 7696 7700 7704 7708 7712 7716 680 7657 7661 7665 7669 7672 7676 7680 7684 7688 27692 7696 7700 7704 7708 7711 7715 7719 679 7660 7664 7668 7672 7676 7680 7684 7688 7692 7695 7699 7703 7707 7711 7715 7719 7722 678 7664 7668 27671 7675 7679 7683 7687 7691 7695 7699 7703 7707 7710 7714 7718 7722 7726 677 7667 7671 7675 7679 7683 7687 7691 7694 7698 7702 7706 1710 7714 7718 71722 11725 7729 676 7670 7674 31678 7682 7686 7690 7694 7698 7702 7706 7710 7713 7717 7721 7725 7729 7733 675 7674 7678 7682 7686 7690 7694 7697 7701 7705 7709 7713 111 1721 7724 1128 1132 7736 674 7677 37681 7685 7689 7693 7697 7701 7705 7709 7712 7716 7720 7724 71728 7732 1135 7739 673 7681 7685 7689 7693 7696 7700 7704 7708 7712 7716 7720 11724 7727 1131 7735 1138 7743 672 7684 7688 7692 7696 7700 7704 7708 7712 27715 7719 7723 7727 7731 7735 1138 7742 7746 671 7688 7692 7696 7699 7703 7707 7711 7715 7719 7723 7726 7730 7734 7738 7742 11746 7749 670 7691 7695 7699 7703 7707 7711 7715 7718 37722 217126 1130 7734 7738 7741 7
260. 608 7612 7617 7621 7625 7630 7634 7638 7643 7647 7652 7656 7660 93 0 7318 7322 7327 7331 7335 7340 7344 7348 7353 7357 7361 7366 7370 7374 7379 7383 7387 7392 7396 7400 7405 7409 7413 7418 7422 7426 7431 7435 7439 7444 7448 7452 7457 7461 7465 7470 7414 7478 7483 7487 7491 7496 7500 7504 7509 7513 7517 7522 7526 7530 7535 7539 7543 7548 7552 7556 7561 7565 7569 7574 7578 7582 7587 7591 7595 7600 7604 7608 7613 7617 7621 7626 7630 7634 7639 7643 7647 7652 7656 7660 7665 94 0 7323 7327 7332 7336 7340 7345 7349 7353 7358 7362 7366 7371 7375 7379 7384 7388 7392 7396 7401 7405 7409 7414 7418 7422 7427 7431 7435 7440 7444 7448 7453 7457 7461 7466 7470 7474 7479 7483 7487 7492 7496 7500 7505 7509 7513 7518 7522 7526 7531 7535 7539 7544 7548 7552 7557 7561 7565 7569 7574 7578 7582 7587 7591 7595 7600 7604 7608 7613 7617 7621 7626 7630 7634 7639 7643 7647 7652 7656 7660 7665 7669 95 0 7328 7332 7337 7341 7345 7350 7354 7358 7363 7367 7371 7375 7380 7384 7388 7393 7397 7401 7406 7410 7414 7419 7423 7427 7432 7436 7440 7445 7449 7453 7457 7462 7466 7470 7475 7479 7483 7488 7492 7496 7501 7505 7509 7514 7518 7522 7527 7531 7535 7540 7544 7548 7552 7557 7561 7565 7570 7574 7578 7583 7587 7591 7596 7600 7604 7609 7613 7617 7622 7626 7
261. 61 7765 7769 7773 7776 7780 7184 7788 7191 7795 7799 7802 7806 7810 652 7753 7757 7761 7765 7768 7772 7776 7780 7784 7787 7191 7795 7798 7802 7806 7810 7813 651 7757 7761 27764 7768 7772 7776 7779 7783 7787 7191 7194 71198 7802 7806 7809 7813 7817 650 7160 7764 7768 7772 7775 7779 3783 7787 7790 7794 7798 7801 7805 7809 7813 7816 7820 649 7764 7767 7771 7775 1719 7783 7786 7790 7794 7797 7801 7805 7809 7812 7816 7820 7823 648 1767 7171 7715 7778 7782 7786 7790 7793 779 7801 7805 7808 7812 7816 7819 7823 7827 647 71711 7774 7778 7782 7786 7789 7793 7797 1801 7804 7808 7812 7815 7819 7823 7826 7830 646 7714 7778 7782 7785 7789 7793 71797 7800 7804 7808 7811 7815 7819 7822 7826 7830 7833 645 7777 7781 7785 71789 7792 7796 7800 7804 7807 7811 7815 7818 7822 7826 7829 7833 7837 644 7781 7785 7788 27792 7796 7800 7803 7807 7811 7814 7818 7822 7826 7829 7833 7836 7840 643 7784 7788 37792 271796 7799 7803 7807 7810 7814 7818 7822 7825 7829 7833 7836 7840 7843 642 7788 7792 7795 7799 7803 7806 7810 7814 7818 7821 7825 7829 7832 7836 7840 7843 7847 641 7791 7795 7799 7802 7806 7810 7814 7817 7821 7825 7828 7832 7836 7839 7843 7847 7850 640 7795 7798 7802 7806 7810 7813 7817 7821 7824 7828 7832 7835 7839 7843 7846 7850 7854 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 236 Laser and Optics User s Manual Vol 800 799 798 797 796 795 794 793 792 791 790 789 788 787 786 785 784 783 782 781 780 779 778 177 776 775 774 773 772 771 770
262. 630 7634 7639 7643 7647 7652 7656 7660 7665 7669 7673 TEMPERATURE IN DEGREES FAHRENHEIT 96 0 7333 7337 7342 7346 7350 7355 7359 7363 7367 7372 7376 7380 7385 7389 7393 7398 7402 7406 7411 7415 7419 7423 7428 7432 7436 7441 7445 7449 7454 7458 7462 7467 7471 7475 7479 7484 7488 7492 7497 7501 7505 7510 7514 7518 7523 7527 7531 7535 7540 7544 7548 7553 7557 7561 7566 7570 7574 7579 7583 7587 7592 7596 7600 7604 7609 7613 7617 7622 7626 7630 7635 7639 7643 7648 7652 7656 7660 7665 7669 7673 7678 97 0 7338 7342 7347 7351 7355 7359 7364 7368 7372 7377 7381 7385 7390 7394 7398 7402 7407 7411 7415 7420 7424 7428 7433 7437 7441 7445 7450 7454 7458 7463 7467 7471 7476 7480 7484 7488 7493 7497 7501 7506 7510 7514 7519 7523 7527 7532 7536 7540 7544 7549 7553 7557 7562 7566 7570 7575 7579 7583 7587 7592 7596 7600 7605 7609 7613 7618 7622 7626 7630 7635 7639 7643 7648 7652 7656 7661 7665 7669 7673 7678 7682 98 0 7343 7347 7351 7356 7360 7364 7369 7373 7377 7382 7386 7390 7394 7399 7403 7407 7412 7416 7420 7424 7429 7433 7437 7442 7446 7450 7455 7459 7463 7467 7472 7476 7480 7485 7489 7493 7497 7502 7506 7510 7515 7519 7523 7528 7532 7536 7540 7545 7549 7553 7558 7562 7566 7570 7575 7579 7583 7588 7592 7596 7601 7605 7609 7613 7618 7622
263. 64 7667 7671 7674 7678 7681 7685 7688 7692 7695 7699 7702 7706 7709 7713 7716 7720 7723 7727 7730 7734 7737 7741 7744 7748 7751 7755 7758 7762 7765 7769 27 0 7493 7497 7500 7504 7507 7511 7514 7518 7521 7525 7528 7532 7535 7539 7542 7546 7549 7553 7556 7560 7563 7567 7570 7574 7571 7580 7584 7587 7591 7594 7598 7601 7605 7608 7612 7615 7619 7622 7626 7629 7633 7636 7640 7643 7647 7650 7654 7657 7661 7664 7668 7671 7675 7678 7682 7685 7689 7692 7696 7699 7703 7706 7710 7713 7717 7720 7724 7727 7731 7734 7738 7741 7745 7748 7752 7755 7159 7762 7766 71769 7773 2745 7498 7501 7505 7508 7512 7515 7519 7522 7525 7529 7532 7536 7539 7543 7546 7550 7553 7557 7560 7564 7567 7571 7574 7578 7581 7585 7588 7592 7595 7599 7602 7606 7609 7613 7616 7620 7623 7627 7630 7634 7637 7641 7644 7647 7651 7654 7658 7661 7665 7668 7672 7675 7679 7682 7686 7689 7693 7696 7700 7703 7707 7710 7714 7717 7721 7724 7728 7731 7735 7738 7742 7745 7749 7752 7756 7759 7763 7766 7769 7773 7776 28 0 7502 7505 7509 7512 7516 7519 7523 7526 7530 7533 7537 7540 7544 7547 7551 7554 7558 7561 7565 7568 7572 7575 7579 7582 7586 7589 7592 7596 7599 7603 7606 7610 7613 7617 7620 7624 7627 7631 7634 7638 7641 7645 7648 7652 7655 7659 7662 7666 7669 7673 7676 7679 7
264. 644 7648 7652 7657 7661 7665 7669 7674 7678 7682 7687 7691 7695 7699 7363 7367 7371 7375 7380 7384 7388 7392 7397 7401 7405 7410 7414 7418 7422 7427 7431 7435 7439 7444 7448 7452 7456 7461 7465 7469 7473 7478 7482 7486 7491 7495 7499 7503 7508 7512 7516 7520 7525 7529 7533 7537 7542 7546 7550 7554 7559 7563 7567 7512 7576 7580 7584 7589 7593 7597 7601 7606 7610 7614 7618 7623 7627 7631 7635 7640 7644 7648 7653 7657 7661 7665 7670 7674 7678 7682 7687 7692 7695 7699 7704 103 0 7368 7372 7376 7380 7385 7389 7393 7397 7402 7406 7410 7414 7419 7423 7427 7431 7436 7440 7444 7448 7453 7457 7461 7465 7470 7474 7478 7482 7487 7491 7495 7499 7504 7508 7512 7516 7821 7525 7529 7533 7538 7542 7546 7551 7555 7559 7563 7568 7572 7576 7580 7585 7589 7593 7597 7602 7606 7610 7614 7619 7623 7627 7631 7636 7640 7644 7648 7653 7657 7661 7665 7670 7674 7678 7682 7687 7691 7695 7699 7104 7708 104 0 7372 7377 7381 7385 7389 7394 7398 7402 7406 7411 7415 7419 7423 7428 7432 7436 7440 7445 7449 7453 7457 7462 7466 7470 7474 7479 7483 7487 7491 7496 7500 7504 7508 7513 7517 7521 7525 7530 7534 7538 7542 7547 7581 7555 7559 7564 7568 7572 7576 7581 7585 7589 7593 7598 7602 7606 7610 7615 7619 7623 7627 7632 7636 7640 7644 7649 7653 7657 7661 7666 7
265. 657 7662 7667 7672 27676 7681 7686 7691 7695 7700 7704 7709 7714 7718 7723 7727 1132 24 40 7662 7667 27672 7677 7681 7686 7691 7695 7700 7705 7709 7714 7718 7323 7727 7732 7736 24 35 7667 7672 7677 7681 7686 7691 7695 7700 7705 7709 7714 7718 7723 73728 7732 7737 7741 24 30 7672 7677 7681 7686 7691 7695 7700 7705 7709 7714 7719 7723 7728 7732 7737 7741 7746 24 25 7677 7681 7686 7691 7695 7700 7705 7709 7714 7719 7723 7728 17132 7737 7741 7746 1150 24 20 7681 7686 7691 7696 7700 7705 7710 7714 7719 7723 7728 7732 7737 7742 7746 7751 7755 24 15 7686 7691 7696 7700 7705 37710 7714 7719 7723 17728 1733 7737 7742 7746 7751 7755 7760 24 10 7691 7696 7700 7705 7710 7714 7719 7724 7128 7733 7737 7142 7746 7751 7755 7760 7764 24 05 7696 7701 7705 7710 7715 7719 71724 7728 7733 7737 10742 7747 7751 71756 71760 7765 7169 24 00 7701 7705 37710 7715 7719 7724 7728 7733 7738 7742 7747 7751 17156 7760 7765 7369 7774 23 95 7705 7110 7715 7719 7724 7729 7733 7738 7742 7747 7751 7756 17160 7765 7169 7114 7118 23 90 7710 7715 7720 7724 7729 7733 7738 7743 7141 1752 7756 7761 7765 7770 7774 7779 1183 23 85 7715 7720 7724 7729 7734 371738 7743 7747 7152 7756 7761 7765 7770 7714 1119 7783 7788 23 80 7720 7724 7729 7734 7738 7743 7747 71752 7757 7761 7766 7770 7774 71719 7783 7788 7792 23 75 7725 7729 7734 7738 7743 7748 7752 37757 7161 7766 7770 7775 7779 7184 7188 7792 7797 23 70 7729 7734 7739 7743 7748 7752 7757 7761 7766 27720 7775 7779 7784 7788 7793 7797 7802 23 65 7734 77
266. 66 7170 7174 7177 7181 7185 7188 7192 7196 7199 7203 7207 7210 7214 7218 7221 7225 7229 7232 7236 7240 7243 7247 7251 7254 7258 7262 7265 7269 7273 7276 7280 7284 7287 7291 7295 7298 7302 7306 7309 7313 T311 7320 7324 7328 7331 7335 7339 7342 7346 7350 7353 7357 7361 7364 7368 245 13 Wavelength of Light Compensation Table 36 Metric Low Alt Low Mid Temp High Humidity Temp 13 5 to 21 5 C Press 720 to 800 mm 80 Humidity BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY TEMPERATURE IN DEGREES CELSIUS 13 5 14 0 14 5 15 0 15 5 16 0 16 5 17 0 17 5 18 0 18 5 19 0 19 5 20 0 20 5 21 0 21 5 800 7080 7085 7091 7096 7101 7106 7111 7117 7122 7127 7132 7137 7142 7147 7153 7158 7163 799 7084 7089 7094 27099 7105 7110 7115 7120 7125 7131 7136 7141 7146 7151 7156 7161 7166 798 7087 7093 7098 7103 7108 7113 7119 7124 7129 7134 7139 7144 7150 7155 7160 7165 7170 797 7091 7096 7101 7107 7112 7117 7122 7127 27133 7138 7143 7148 7153 7158 7163 7168 7173 796 7095 7100 7105 7110 7116 7121 7126 7131 7136 7141 7146 7152 7157 7162 7167 7172 7177 795 7098 7104 7109 7114 7119 7124 7130 7135 7140 7145 7150 7155 7160 7165 7170 7175 7181 794 7102 7107 7112 7118 7123 7128 7133 7138 7143 7149 7154 7159 7164 7169 7174 7179 7184 793 7106 7111 7116 7121 7126 27132 7137 7142 7147 7152 7157 7162 7167 7172 7178 7183 7188 792 7109 7115 7120 7125 7130 7135 7140 7146 7151 7156 7161 7166 7171 7176 7181 7186 7191 791 7113
267. 670 7674 7678 7683 7687 7691 7695 7700 7704 7708 7712 105 0 7377 7382 7386 7390 7394 7399 7403 7407 7411 7415 7420 7424 7428 7432 7437 7441 7445 7449 7454 7458 7462 7466 7471 7475 7479 7483 7488 7492 7496 7500 7505 7509 7513 7517 7521 7526 7530 7534 7538 7543 7547 7551 7555 7560 7564 7568 7572 7577 7581 7585 7589 7594 7598 7602 7606 7611 7615 7619 7623 7627 7632 7636 7640 7644 7649 7653 7657 7661 7666 7670 7674 7678 7683 7687 7691 7695 7700 7704 7708 7712 7717 7539 7543 7547 7551 7556 7560 7564 7568 7573 7577 7581 7585 7590 7594 7598 7602 7607 7611 7615 7619 7623 7628 7632 7636 7640 7645 7649 7653 7657 7662 7666 7670 7674 76178 7683 7687 7691 7695 7700 7704 7708 7712 7717 7721 107 7387 7391 7396 7400 7404 7408 7412 7417 7556 7560 7565 7569 7573 7577 7581 7586 7590 7594 7598 7603 7607 7611 7615 7619 7624 7628 7632 7636 7641 7645 7649 7653 7657 7662 7666 7670 7674 7679 7683 7687 7691 7695 7700 7704 7708 7712 7717 7721 7725 0 257 13 Wavelength of Light Compensation Table 48 English High Alt Low Temp Low Humidity Temp 40 to 56 F Press 23 to 27 inches 20 Humidity TEMPERATURE IN DEGREES FAHRENHEIT 40 0 41 0 42 0 43 0 44 0 45 0 46 0 47 0 48 0 49 0 50 0 51 0 52 0 53 0 54 0 55 0 56 0 27 00 7412 7417 7422 7427 7432 7438 7443 7448 7453 7458 7463
268. 68 7372 7376 7380 7385 7389 7393 7398 7402 7406 7411 7415 7419 7424 7428 7432 7437 7441 7445 7450 7454 7458 7463 7467 7471 7475 7480 7484 7488 7493 7497 7501 7506 7510 7514 7519 7523 7527 7532 7536 7540 7545 7549 7553 7557 7562 7566 7570 255 7579 7583 7588 7592 7596 7601 7605 7609 7614 7618 7622 7627 7631 7635 7640 7644 7648 7652 7657 7661 7665 7670 7674 7678 7683 7687 Laser and Optics User s Manual Vol TEMPERATURE IN DEGREES FAHRENHEIT 96 0 7347 7351 7356 7360 7364 7369 7373 7377 7382 7386 7390 7394 7399 7403 7407 7412 7416 7420 7425 7429 7433 7438 7442 7446 7450 7455 7459 7463 7468 7472 7476 7481 7485 7489 7494 7498 7502 7507 7511 7515 7519 7524 7528 7532 7537 7541 7545 7550 7554 7558 7563 7567 TALL 7575 7580 7584 7588 7593 7597 7601 7606 7610 7614 7619 7623 7627 7631 7636 7640 7644 7649 7653 7657 7662 7666 7670 7675 7679 7683 7688 7692 97 0 7353 7357 7361 7365 7370 7374 7378 7383 7387 7391 7396 7400 7404 7408 7413 7417 7421 7426 7430 7434 7439 7443 7447 7451 7456 7460 7464 7469 7473 7477 7482 7486 7490 7494 7499 7503 7507 7512 7516 7520 7525 7529 7533 7537 7542 7546 7550 7555 7559 7563 7568 7572 7576 7580 7585 7589 7593 7598 7602 7606 7611 7615 7619 7624 7628 7632 7636 7641 7645 7649 7654 7658 7662 7667 7671 7675 7679 7684
269. 683 7686 7690 7693 7697 7700 7704 7707 7711 7714 7718 7721 7725 7728 7732 7735 7739 7742 7746 7749 7753 7756 7760 7763 7766 7770 7773 7712 7780 28 5 7506 7510 7513 7517 7520 7524 7527 7531 7534 7538 7541 7545 7548 7552 7555 7558 7562 7565 7569 7572 7576 7579 7583 7586 7590 7593 7597 7600 7604 7607 7611 7614 7618 7621 7624 7628 7631 7635 7638 7642 7645 7649 7652 7656 7659 7663 7666 7670 7673 7677 7680 7684 7687 7691 7694 7697 7701 7704 7708 TILL 7715 7718 7722 7725 7729 7732 7736 7739 7743 7746 7750 7753 7757 7760 7763 7767 7710 7774 7777 7781 7784 29 0 7511 7514 7518 7521 7525 7528 7532 7535 7538 7542 7545 7549 7552 7556 7559 7563 7566 7570 7573 7577 7580 7584 7587 7591 7594 7597 7601 7604 7608 7611 7615 7618 7622 7625 7629 7632 7636 7639 7643 7646 7649 7653 7656 7660 7663 7667 7670 7614 7677 7681 7684 7688 7691 7695 7698 7702 7705 7708 7712 7715 7719 7722 7726 7729 7733 7736 7740 7743 77471 7750 7754 7757 7760 7764 7767 7771 7774 77178 7781 7785 7788 29 5 7515 7519 7522 7525 7529 7532 7536 7539 7543 7546 7550 7553 7557 7560 7564 7567 7571 7574 7577 7581 7584 7588 7591 7595 7598 7602 7605 7609 761 7616 7619 7622 7626 7629 7633 7636 7640 7643 7647 7650 7654 7657 7661 7664 7667 7671 7674 7678 7681 7685 7688 7692 7695 7699
270. 69 7373 7378 7383 7388 27392 7397 7402 7406 7411 7416 7420 7425 7430 724 7358 7363 7368 7372 7377 37382 27386 7391 7396 7401 7405 7410 7415 7419 7424 7428 7433 723 7362 7366 7371 7376 27381 7385 7390 7395 7399 7404 7409 7413 7418 7423 7427 7432 7437 722 7365 7370 7375 7380 7384 7389 7394 7398 7403 7408 7412 7417 7422 7426 7431 7436 7440 721 7369 7374 7378 7383 7388 7393 7397 7402 7407 7411 7416 7421 7425 7430 7435 7439 7444 720 7373 7377 7382 7387 7392 7396 7401 7406 7410 7415 7420 7424 7429 7434 7438 7443 7447 246 Laser and Optics User s Manual Vol Wavelength of Light Compensation Table 37 Metric Low Alt Mid Temp High Humidity Temp 22 to 30 C Press 720 to 800 mm 80 Humidity 13 TEMPERATURE IN DEGREES CELSIUS BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 800 799 798 797 796 795 794 793 792 791 790 789 787 786 785 784 783 782 781 779 778 777 776 775 774 773 772 771 770 769 768 767 766 765 764 763 762 761 759 758 757 756 755 754 753 752 751 750 749 748 747 746 745 744 743 742 741 740 739 738 737 736 735 734 733 732 731 730 729 728 727 726 725 724 723 722 721 720 22 0 7168 7171 71175 7178 7182 7186 7189 7193 7196 7200 7203 7207 7210 7214 7218 7221 7225 7228 7232 7235 7239 7242 7246 7249 7253 7257 7260 7264 7267 7271 7274 7278 7281 7285 7289 7292 7296 7299 7303 7306 7310 7313 7317 7321 7324 7328 7331
271. 7 24 55 7881 24 50 7885 24 45 7890 24 40 7894 24 35 7898 24 30 7903 24 25 7907 24 20 7911 24 15 7916 24 10 7920 24 05 7924 24 00 7929 23 95 7933 23 90 7937 23 85 7942 23 80 7946 23 75 7950 23 70 7955 23 65 7959 23 60 7964 23 55 7968 23 50 7972 23 45 7977 23 40 7981 23 35 7985 23 30 7990 23 25 7994 23 20 7998 23 15 8003 23 10 8007 23 05 8011 23 00 8016 BAROMETRIC PRESSURE IN INCHES OF MERCURY Laser and Optics User s Manual Vol 92 0 7673 7677 7681 7686 7690 7694 7699 7703 7707 7712 7716 7720 7725 7729 7733 7738 7742 7746 7751 TIOS 7759 7764 7768 7772 7777 7781 7785 7790 7794 7798 7803 7807 7812 7816 7820 7825 7829 7833 7838 7842 7846 7851 7855 7859 7864 7868 7872 7877 7881 7885 7890 7894 7898 7903 7907 7911 7916 7920 7924 7929 7933 7937 7942 7946 7950 7955 7959 7963 7968 7972 7976 7981 7985 7989 7994 7998 8003 8007 8011 8016 8020 Wavelength of Light Compensation 13 Table 67 English High Alt High Mid Temp High Humidity Temp 91 to 107 F Press 23 to 27 inches 80 Humidity 93 0 7677 7682 7686 7690 7695 7699 7703 7708 7712 7716 7721 7725 7729 7734 7738 7742 7747 7751 7755 7760 7764 7768 7773 7777 7781 7786 7790 7794 7799 7803 7807 7812 7816 7820 7825 7829 7833 7838 7842 7846 7851 7855 7859 7864 7868 7872 7877 7881 7885 7890 7894 7898 7903 7907 7911 7916 7920 7924 7929 793
272. 7 7752 7757 7761 7766 7770 7775 7780 7784 7789 7793 7798 7803 7807 7812 7816 7821 7826 7830 7835 7839 7844 7849 7853 7858 7862 7867 7872 7876 7881 7885 Laser and Optics User s Manual Vol TEMPERATURE IN DEGREES FAHRENHEIT 62 0 7522 7527 7531 7536 7541 7545 7550 7554 7559 7564 7568 7573 7577 7582 7586 7591 7596 7600 7605 7609 7614 7619 7623 7628 7632 7637 7642 7646 7651 7655 7660 7665 7669 7674 7678 7683 7688 7692 7697 7701 7706 7710 7715 7720 7724 7729 7733 7738 7743 7747 7752 7756 7761 7766 7770 7775 7779 7784 7789 7793 7798 7802 7807 7812 7816 7821 7825 7830 7834 7839 7844 7848 7853 7857 7862 7867 7871 7876 7880 7885 7890 63 0 7527 7532 7536 7541 7545 7550 7555 7559 7564 7568 7573 7577 7582 7587 7591 7596 7600 7605 7610 7614 7619 7623 7628 7632 7637 7642 7646 7651 7655 7660 7665 7669 7674 7678 7683 7687 7692 7697 7701 7706 7710 7715 7720 7724 7729 7733 7738 7742 7747 7752 7756 71761 7765 7770 7775 7779 7784 7788 7793 77971 7802 7807 7811 7816 7820 7825 7830 7834 7839 7843 7848 7852 7857 7862 7866 7871 7875 7880 7885 7889 7894 64 0 7532 7536 7541 7546 7550 7555 7559 7564 7568 7573 7578 7582 7587 7591 7596 7600 7605 7610 7614 7619 7623 7628 7632 7637 7642 7646 7651 7655 7660 7664 7669 7674 7678 7683 7687 7692 7697 7702 7706
273. 7 7083 7081 7086 7085 7090 7088 7094 7092 7097 7096 7101 7099 7105 7103 7108 7107 7112 7110 7116 7114 271219 7118 7123 7121 7127 7125 7130 7129 7134 7133 27138 7136 27141 7140 7145 7144 7149 7147 7152 7151 7156 7155 7160 7158 7163 7162 27167 7166 7171 7169 7174 7173 7178 7177 7182 7180 7186 7184 7189 7188 7193 7191 7197 7195 7200 7199 7204 7203 7208 7206 7211 7210 7215 7214 7219 7217 7222 7221 7226 7225 7230 7228 7233 7232 7237 7236 7241 7239 7244 7243 7248 7247 7252 7250 7255 7254 7259 7258 7263 7261 7266 7265 7270 7269 7274 7272 7277 7276 7281 7280 7285 7284 7288 7287 7292 7291 7296 7295 7299 7298 7303 7302 7307 7306 7311 7309 7314 7313 7318 7317 7322 7320 27325 7324 7329 7328 7333 7331 7336 7335 7340 7339 7344 7342 7347 7346 7351 7350 7355 7354 7358 12 5 7069 7073 7077 7080 7084 7088 7092 7095 7099 7103 7106 7110 7114 7117 7121 71253 7128 7132 7136 7139 7143 7147 7150 7154 7158 7161 7165 7169 7172 7176 7180 7183 7187 7191 7194 7198 7202 7205 7209 7213 7216 7220 7224 7227 7231 7235 7238 7242 7246 7249 7253 7257 7260 7264 7268 7271 7275 7279 7282 7286 7290 7293 7297 7301 7304 7308 7312 7313 7323 7326 7330 7334 7337 7341 7345 7348 7352 7356 7359 7363 13 13 0 7075 7078 7082 7086 7089 7093 7097 7100 7104 7108 7111 7115 7119 7122 7126 7130 7133 7137 7141 7144 7148 7152 7155 7159 7163 71
274. 7 71402 7406 7411 7415 7420 7424 7429 7433 7438 720 7369 7373 7378 7383 7387 7392 7396 7401 7405 7410 7414 7419 7423 7428 7432 7437 7441 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 230 Laser and Optics User s Manual Vol a A 800 799 798 797 796 795 794 793 792 791 790 789 788 787 786 785 784 783 782 781 780 779 778 777 776 775 774 773 772 771 770 769 768 767 766 765 764 763 762 761 760 759 758 757 756 755 754 753 752 751 750 749 748 747 746 745 744 743 742 741 740 739 738 737 736 735 734 733 732 731 730 729 728 727 726 725 724 723 722 721 720 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY Laser and Optics User s Manual Vol 22 0 7161 7165 7169 7172 7176 7179 7183 7186 7190 7193 7197 7200 7204 7208 7211 7215 7218 7222 7225 7229 7232 7236 7240 7243 7247 7250 7254 7257 7261 7264 7268 7271 7275 7279 7282 7286 7289 7293 7296 7300 7303 7307 7311 7314 7318 7321 7325 7328 7332 7335 7339 7343 7346 7350 7353 7357 7360 7364 7367 7371 7374 7378 7382 7385 7389 7392 7396 7399 7403 7406 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7446 Table 21 7 Temp 22 to 30 C Press 720 to 800 mm 20 Humidity 22 5 7166 7110 7173 7177 7180 7184 7188 7191 7195 7198 7202 7205 7209 7212 7216 7219 7223 7227 7230 7234 7237 7241 7244 7248 7251 7255
275. 7 7442 7447 7452 7456 7384 7389 7394 7398 7403 7408 7412 7417 7422 7427 7431 7436 7441 7446 7450 7455 7460 761 7388 7392 7397 7402 7406 7411 7416 7421 7425 7430 7435 7440 7444 7449 7454 7458 7463 760 7391 27396 7400 7405 7410 7415 7419 7424 7429 7433 7438 7443 7448 37452 7457 7462 7467 759 7394 7399 7404 7409 7413 7418 7423 7427 7432 7437 7442 7446 7451 7456 7460 7465 7470 758 7398 7403 7407 7412 7417 7421 7426 7431 7436 7440 7445 7450 7454 7459 7464 7469 7473 757 7401 7406 7411 7415 7420 7425 7430 7434 2439 7444 7448 7453 7458 7463 7467 7472 7471 756 7405 7409 7414 7419 7424 27428 7433 7438 7442 7447 7452 7456 7461 7466 7471 7475 7480 755 7408 7413 7418 7422 7427 7432 7436 7441 7446 7450 7455 7460 7465 7469 7474 7479 7483 754 7412 7416 7421 7426 7430 7435 7440 7445 7449 7454 7459 7463 7468 7473 7471 7482 7487 753 7415 7420 7425 7429 27434 27439 7443 7448 7453 7457 7462 2467 7471 7476 71481 7485 7490 752 7419 7423 7428 7433 7437 7442 7447 7451 7456 7461 7465 7470 7475 7479 7484 7489 7493 751 7422 7427 7431 7436 7441 7445 7450 7455 7459 7464 7469 7473 7418 7483 7487 7492 7497 750 7425 7430 7435 7440 7444 7449 7453 7458 7463 7467 7472 7477 7481 7486 7491 7496 7500 749 7429 7434 7438 7443 7448 7452 7457 7462 7466 7471 7476 7480 7485 7490 7494 7499 7504 748 7432 7437 7442 7446 7451 7456 7460 7465 7470 7474 7479 7484 7488 7493 7498 7502 7507 747 7436 7441 7445 7450 7454 7459 7464 7468 7473 7478 7482 7487 7492 7496 7501 7506 7510 746 7439 7444 7449 7453 7458 7463 7
276. 7 inches 80 Humidity 277 14 Material Expansion Coefficients Linear Thermal Expansion Coefficients of Metals and Alloys 280 Table 68 Linear thermal expansion coefficients of metals and alloys 280 15 Glossary 292 Figure 71 Degrees of freedom for X Axis 293 Table 69 Number systems 295 Index Laser and Optics User s Manual Vol Figures Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 12 Figure 13 Figure 14 Figure 15 Figure 16 Figure 17 Figure 18 Figure 19 Figure 20 Figure 21 Figure 22 Figure 23 Figure 24 Figure 25 Figure 26 Figure 27 Figure 28 Figure 29 Figure 30 Figure 31 Figure 32 Figure 33 Figure 34 Figure 35 Figure 36 Figure 37 Figure 38 Figure 39 Figure 40 Figures Typical single axis Agilent Laser Interferometer Positioning System 27 Start Programs pop up menu 33 Monitor screen after opening the application 34 Measurement screen 35 Possible component motions 39 Protective covers for optics and laser beam 49 Collapsible spiral cover for movable retroreflector 50 Laser position transducer mounting 52 Direction sense fringe counts increase as optics move apart 54 Introducing an offset into the laser beam 60 Single axis system for servo track writing 66 Multiaxis system for a precision x y stage 67 Four axis configuration 69 Two axis plane
277. 7047 7050 7054 7058 7062 7065 7069 7073 7071 7080 7084 7088 7092 7096 7099 7103 7107 7111 7114 7118 7122 7126 7129 7133 7137 7141 7144 7148 7152 7156 7159 7163 7167 7171 7175 7178 7182 7186 7190 7193 7197 7201 7205 7208 7212 7216 7220 7223 7227 7231 7235 7238 7242 7246 7250 7254 7257 7261 7265 7269 7272 7276 7280 7284 7287 7291 7295 6 0 6999 7003 7007 7011 7014 7018 7022 7026 7029 7033 7037 7041 7044 7048 7052 7056 7060 7063 7067 7071 7075 7078 7082 7086 7090 7093 7097 7101 7105 7108 7112 7116 7120 7123 7127 7131 7135 7138 7142 7146 7150 7153 7157 7161 7165 7168 7172 7176 7180 7183 7187 7191 7195 7198 7202 7206 7210 7213 7217 7221 7225 7229 7232 7236 7240 7244 7247 7251 7255 7259 7262 7266 7270 7274 7277 7281 7285 7289 7292 7296 7300 6 5 7005 7009 7012 7016 7020 7024 7027 7031 7035 7039 7042 7046 7050 7054 7057 7061 7065 7069 7072 7076 7080 7084 7087 7091 7095 7099 7102 7106 7110 7114 7117 7121 7125 7129 7132 7136 7140 7144 7147 7151 7155 7159 7162 7166 7170 7174 7177 7181 7185 7189 7192 7196 7200 7204 7207 7211 7215 7219 7222 7226 7230 7234 7237 7241 7245 7249 7252 7256 7260 7264 7267 7271 7275 7279 7282 7286 7290 7294 7297 7301 7305 Laser and Optics User s Manual Vol 7 0 7010 7014 7018 7022 7025 7029 7033 7037 7040 704
278. 705A Single Beam Interferometer CS lt S P i BS d eee Agilent 5517B C D hr a Head Figure 11 Single axis system for servo track writing Agilent 10780C F Receiver Multiaxis configurations The maximum number of independent axes of displacement that can be measured using one laser head depends on 1 the measurement system electronics 2 the strength of the beam from the laser head and 3 the sensitivity of the receivers used By using the proper combination of beam splitters beam benders and interferometers the measurement axes can be established with a minimum number of components The following paragraphs provide examples of routing the laser beam for multiaxis measurement configurations 66 Laser and Optics User s Manual Vol System Design Considerations 3 Multiaxis system for a precision x y stage Figure 12 shows a multiaxis system for a precision X Y stage This system uses one Agilent 5517C Laser Head one laser head cable Use an Agilent N1251A B High Performance Laser Head Cable to connect to Agilent 10895A Agilent 10897C or Agilent 10898A VME electronic boards Use an Agilent 10881A B C Laser Head Cable to connect to Agilent 10885A Agilent 10889B or Agilent N1231A B PC compatible electronics MULTIAXIS SYSTEM av Agilent 10706B K High Stability Plane Agilent 10706B T t a Mirror Interferometer High Stability Plane N Agilent 10780C F Mirror Interf
279. 7083 7089 7095 7101 7107 7113 7119 7124 7130 7136 7142 7148 7153 7159 7165 7171 7176 30 40 7088 7094 7100 7206 7112 7118 7123 7129 7135 7141 7147 7152 7158 7164 7170 7175 7181 30 35 7093 7099 7105 7111 7116 7122 7128 7134 7140 7146 7151 7157 7163 7169 7174 7180 7186 30 30 7098 7103 7109 7115 7121 7127 7133 7139 7144 7150 7156 7162 7167 7173 7179 7185 7190 30 25 7102 27108 7114 7120 7126 7132 7138 7143 7149 7155 7161 7166 7172 7178 7184 7189 7195 30 20 7107 27113 7119 7125 7131 7137 7142 7148 7154 7160 7165 7171 7177 7183 7188 7194 7200 30 15 7112 7118 7124 7130 7135 7141 7147 7153 7159 7164 7170 7176 7182 7187 7193 7199 7204 30 10 7117 7123 7129 7134 7140 7146 7152 7158 27163 7169 7175 7181 7186 7192 7198 7203 7209 30 05 7122 7127 7133 7139 7145 7151 7157 7162 7168 7174 7180 7185 7191 7197 7202 7208 7213 30 00 7126 7132 7138 7144 7150 7156 7161 7167 7173 7179 7184 7190 7196 7201 7207 7213 7218 29 95 7131 7137 7143 7149 27154 7160 7166 7172 27178 7183 7189 7195 7200 7206 37212 7217 7223 29 90 7136 7142 27148 7153 7159 7165 7171 7177 7182 7188 7194 7199 7205 7211 7216 7222 7227 29 85 7141 7147 7152 7158 7164 7170 7176 7181 7187 7193 7198 7204 7210 7215 7221 7226 7232 29 80 7146 7151 7157 7163 7169 7175 7180 7186 7192 7197 7203 7209 7214 7220 7226 7231 7237 29 75 7150 7156 7162 7168 7174 7179 7185 7191 7196 7202 7208 7213 7219 7225 7230 7236 7241 29 70 7155 7161 7167 7173 7178 7184 7190 7195 7201 7207 7212 7218 7224 71229 7235 7240 7246 29 65 7160 7166 7172 27177
280. 708A or E1709A see their respective manuals listed above NO Replace Auto Comp gt Block the beam so that it does not enter the receiver Does LED on receiver stay lit NO signal ok YES Check reference signal at Auto Comp Board test point 30 See Note 1 Reference NO signal ok YES Problem exists elswhere in system See Note 3 Check measurement electronics and system laser head Refer to Receiver Operating Service Manual Alignments and Adjustments paragraphs regarding chapter 4 Check the Receiver cable and cable to axis board Cables ok Replace cables Refer to Receiver Oper Service Manual See Note 2 Figure 46 Agilent 10717A Wavelength Tracker troubleshooting tree 150 Laser and Optics User s Manual Vol Troubleshooting 8 Before and After Service Product Safety Check The following safety checks must be performed after any troubleshooting and repair procedures have been completed to ensure the safe operation of the instrument WARNING Resistance checks described below require that the power cord be connected to the instrument and that AC power be disconnected Be sure that the power cord is not connected to power before performing any safety checks 1 VISUAL INSPECTION Visually inspect the interior of the serviced instrument for signs of abnormal internally generated heat such as discolored printed
281. 7126 7730 7733 7737 7740 7744 7747 7751 7754 7758 7761 7765 7768 7772 7775 7779 7782 7785 7789 29 0 7516 7519 7522 7526 7529 7689 7692 7703 7706 7710 7713 7717 7720 7724 7727 7731 7734 7738 7741 7744 7748 7751 7755 7758 7762 7765 7769 7772 7776 7779 7783 7786 7790 7793 29 5 7520 7523 7527 7530 7534 7537 7541 7544 7548 7551 7555 7558 7562 7565 7569 7572 7575 7579 7582 7586 7589 7593 7596 7600 7603 7607 7610 7614 7617 7620 7624 7627 7631 7634 7638 7641 7645 7648 7652 7655 7659 7662 7665 7669 7672 7676 7679 7683 7686 7690 7693 7697 7700 7704 7707 7710 7714 7717 7721 7724 7728 7731 7735 7738 7742 7745 7749 7752 7756 7759 7762 7766 7769 7713 7716 7780 7783 7787 7790 7794 7797 13 30 0 7525 7528 7531 7535 7538 251 13 Wavelength of Light Compensation Table 42 Metric High Alt High Mid Temp High Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 80 Humidity Sa i ee TEMPERATURE IN DEGREES CELSIUS 30 5 31 0 31 5 32 0 32 5 33 0 33 5 34 0 34 5 35 0 35 5 36 0 36 5 37 0 37 5 38 0 38 5 720 7529 7534 7538 7543 7547 7552 7556 7561 7565 7570 7574 7579 7583 7588 7592 7597 7601 719 7532 7537 7541 7546 7550 7555 7559 7564 7568 7573 7577 7582 7586 7591 7595 7600 7604 718 7536 7540 7545 7549 7554 7558 7563 7567 7572 7576 7581 7585 7590 7594 7599 7603 7608 717 7539 7544 7548 7553 7557 7562 7566 7571 7575
282. 7232 7237 7242 72417 7252 7257 7262 7266 769 7101 7196 7201 7206 7211 7216 7221 7226 7231 7236 7241 7246 7251 7255 7260 7265 7270 768 7195 7200 7205 7210 7215 7220 7225 7230 7235 7240 7244 7249 7254 7259 7264 7269 7273 767 7199 7204 7209 7214 7219 7224 7229 7233 7238 7243 7248 7253 7258 7263 7267 7272 7277 766 7202 7207 7212 7217 7222 7227 7232 7237 7242 7247 7252 7257 7261 7266 7271 7276 7281 765 7206 7211 7216 7221 7226 7231 7236 27241 7246 7250 7255 7260 7265 7270 7275 7279 7284 764 7210 7215 7220 7225 7230 27234 7239 7244 7249 7254 27259 31264 7269 7273 37278 7283 7288 763 7213 7218 7223 7228 7233 7238 7243 7248 7253 7258 7262 7267 7272 7277 7282 7286 7291 762 7217 7222 7227 7232 7237 1242 7247 7251 7256 7261 7266 7271 7276 7280 7285 7290 7295 761 7221 7226 7231 7236 7240 7245 7250 7255 7260 7265 7270 7274 7279 7284 7289 7294 7298 760 7224 7229 7234 7239 7244 27249 7254 7259 7264 7268 7273 23278 27283 7288 7292 329 7302 759 7228 7233 27238 7243 7248 7253 7257 7262 7267 7272 7277 7282 7286 7291 7296 7301 7305 758 7232 7237 7242 7246 7251 7256 7261 7266 7271 7276 7280 7285 7290 7295 7300 7304 7308 757 7235 7240 7245 7250 7255 7260 7265 7270 7274 7279 7284 7289 7294 7298 7303 7308 7313 756 7239 7244 7249 7254 7259 7263 27268 7273 7278 7283 7288 7292 7297 7302 7307 7311 7316 755 7243 7248 7252 7257 7262 27267 31272 727 7282 7286 7291 7296 7301 7306 7310 7315 7320 754 7246 7251 7256 7261 7266 7271 7276 7280 7285 7290 7295 7300 7304 7309 7314 7319 7323 753 72
283. 7244 7249 7254 27258 7263 7268 7273 7278 7283 7288 7293 7298 7302 7307 7312 757 7237 7242 7247 7252 7257 7262 7267 7272 7271 71282 7287 7292 7296 7301 7306 7311 7316 756 7241 7246 7251 7256 7261 7266 7271 7276 7280 7285 7290 7295 7300 7305 7310 7314 7319 755 7245 7250 7255 7260 7264 7269 7274 27279 7284 7289 7294 7299 7304 7308 7313 7318 7323 754 7248 7253 7258 7263 7268 7273 7278 27283 7288 7293 7297 7302 7307 7312 7317 7322 7326 753 7252 7257 7262 7267 7272 27277 7282 7286 7291 7296 7301 7306 7311 7316 7320 7325 7330 752 7256 7261 7265 7270 7275 7280 7285 7290 7295 7300 7305 7309 7314 7319 7324 7329 7333 751 7259 7264 27269 7274 7279 7284 7289 7294 7298 7303 7308 7313 7318 7323 7327 7332 7337 780 7263 7268 7273 7278 7283 7287 7292 7297 7302 7307 7312 7317 7321 7326 7331 7336 7341 749 7267 7272 7276 7281 7286 37291 7296 7301 7306 7311 7315 7320 7325 7330 7335 7339 7344 748 7270 7275 7280 7285 7290 7295 7300 7304 7309 7314 7319 7324 7329 7333 7338 7343 7348 747 7274 7279 7284 7289 7293 27298 7303 7308 7313 7318 7323 7327 7332 7337 7342 7341 7351 746 7278 7282 7287 7292 27297 27302 7307 7312 7317 7321 7326 7331 7336 7341 7345 7350 7355 745 7281 27286 27291 7296 7301 7306 7310 7315 7320 7325 7330 7335 7339 7344 7349 7354 7358 744 7285 7290 7295 7300 7304 7309 7314 7319 7324 7329 7333 7338 7343 7348 7352 7357 7362 743 7289 7293 7298 7303 7308 7313 7318 7323 7327 7332 27337 7342 7347 7351 7356 7361 7366 742 7292 7297 7302 7307 27312 7316 7321 7326 7331 7336 7341 7
284. 7252 7255 7258 7262 7265 7269 7273 7276 7280 7283 7287 7290 7294 7297 7302 7304 7308 7311 7315 7318 7322 7325 7329 7333 7336 7340 7343 7347 7350 7354 7357 7361 7364 7368 7372 7375 7318 7382 7385 7389 7392 7396 7400 7403 7407 7410 7414 7417 7421 7424 7428 7431 7435 7438 7442 7445 7449 7452 7456 7459 7463 Wavelength of Light Compensation TEMPERATURE IN DEGREES CELSIUS 24 5 7186 7189 7193 7196 7200 7203 7207 7210 7214 7217 7221 7224 7228 7231 7235 7238 7242 7246 7249 7253 7256 7260 7263 7267 7270 7274 7277 7281 7284 7288 7291 7295 7298 7302 7305 7309 7312 7316 7319 7323 7327 7330 7334 7337 7341 7344 7348 7351 7355 7358 7362 7365 7369 7372 7376 7379 7383 7386 7390 7393 7397 7400 7404 7408 7411 7415 7418 7422 7425 7429 7432 7436 7439 7443 7446 7450 7453 7457 7460 7464 7467 25 0 7190 7194 7198 7201 7205 7208 7212 7215 7219 7222 7226 7229 7233 7236 7240 7243 7247 7250 7254 7257 7261 7264 7268 7271 7275 7278 7282 7285 7289 7292 7296 7299 7303 7306 7310 7314 7317 7321 7324 7328 7331 7335 7338 7342 7345 7349 7352 7356 7359 7363 7366 7370 7373 7377 7380 7384 7387 7391 7394 7398 7401 7405 7408 7412 7415 7419 7422 7426 7430 7433 7437 7440 7444 7447 7451 7454 7458 7461 7465 7468 7472 25 5 7195 7199 7202 7206 7209 7213 7216 7220 7223 7227 72
285. 729 7734 7738 7743 7747 7752 7757 7761 7766 7770 7775 7779 7784 7789 7793 7798 7802 7807 7812 7816 7821 7825 7830 7834 7839 7844 7848 7853 7857 7862 7867 7871 7876 7880 7885 7889 7894 7899 64 0 7537 7541 7546 7551 7555 7560 7564 7569 7513 7578 7583 7587 7592 7596 7601 7606 7610 7615 7619 7624 7628 7633 7638 7642 7647 7651 7656 7660 7665 7670 7674 7679 7683 7688 7692 7697 7702 7706 7711 7715 7720 7724 7729 7734 7738 7743 7747 7752 7756 7761 7766 7770 7775 7779 7784 7788 7793 7798 7802 7807 7811 7816 7821 7825 7830 7834 7839 7843 7848 7853 7857 7862 7866 7871 7875 7880 7885 7889 7894 7898 7903 65 0 7542 7546 7551 7556 7560 7565 7569 7574 7578 7583 7587 7592 7597 7601 7606 7610 7615 7619 7624 7629 7633 7638 7642 7647 7651 7656 7661 7665 7670 7674 7679 7683 7688 7693 7697 7702 7706 7711 TTS 7720 7724 7729 7734 7738 7743 7747 7752 7156 7761 71766 7770 7775 7779 7784 7788 7793 7798 7802 7807 7811 7816 7820 7825 7829 7834 7839 7843 7848 7852 7857 7861 7866 7871 7875 7880 7884 7889 7893 7898 7903 7907 66 0 7547 7551 7556 7560 7565 7570 7574 7702 7706 7711 7715 7720 7724 7729 7734 7738 7743 7747 7752 7756 7761 7766 7770 77178 7779 7784 7788 7793 7797 7802 7807 7811 7816 7820 7825 7829 7834 7838 7843 7848 7852 7857 7861 7866 7870
286. 7293 7297 7300 7304 7307 7310 7314 7317 7321 7324 7328 7331 7335 7338 7342 7345 7348 7352 7355 7359 7362 7366 7369 7373 7376 7380 7383 7386 7390 7393 7397 7400 7404 7407 7411 7414 7418 7421 7425 7428 7431 7435 7438 7442 7445 7449 7452 7456 7459 7463 7466 7469 7473 7476 7480 7483 7487 7490 7494 7497 7501 7504 7507 7511 7514 13 231 13 Wavelength of Light Compensation Table 22 Metric Low Alt High Mid Temp Low Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 20 Humidity ee TEMPERATURE IN DEGREES CELSIUS 30 5 31 0 31 5 32 0 32 5 33 0 33 5 34 0 34 5 35 0 35 5 36 0 36 5 37 0 37 5 38 0 38 5 800 7242 7247 7252 7256 7261 7266 7270 7275 7279 7284 7289 7293 7298 7302 7307 7311 7316 799 7246 7251 7255 7260 7264 7269 7274 7278 7283 7287 7292 37296 7301 7305 7310 7314 7319 798 7249 7254 7259 27263 7268 7272 7277 7282 7286 7291 7295 7300 7304 7309 7313 7318 7322 797 7253 7257 7262 7267 7271 7276 37280 7285 7290 7294 7299 7303 7308 7312 7317 7321 7326 796 7256 7261 7266 7270 7275 7279 7284 7288 7293 7298 7302 7307 7311 7316 7320 7325 7329 795 7260 7264 7269 7274 7218 27283 7287 7292 7296 7301 7305 7310 7314 7319 7323 7328 17332 794 7263 7268 7272 7277 7282 7286 27291 7295 7300 7304 7309 7313 7318 7322 732 7331 7336 793 7267 7271 7276 7280 7285 7290 7294 7299 7303 7308 7312 7317 7321 7326 7330 7335 7339 792 7270 7275 7279 7284 7288 7293 7298 7302 7307 7311 7316 7320 7325 7329 7334 733
287. 73 7077 7081 7084 7088 7092 7095 7099 7103 7106 7110 7114 7118 7121 7125 7129 7132 7136 7140 7143 7147 7151 7154 7158 7162 7165 7169 7173 7176 7180 7184 7187 7191 7195 7198 7202 7206 7209 7213 7217 7220 7224 7228 7232 7235 7239 7243 7246 7250 7254 7257 7261 7265 7268 7272 7276 7279 7283 7287 7290 7294 7298 7301 7305 7309 7312 7316 7320 7323 7327 7331 7334 7338 7342 7345 7349 7353 7357 12 5 7068 7071 7075 7079 7082 7086 7090 7093 7097 7101 7104 7108 7112 7115 7119 7123 7126 7130 7134 7141 7145 7148 7152 7156 7163 167 7170 7178 7185 7189 7192 7196 7200 1203 17207 7211 7214 7218 7222 7225 7229 7233 7236 7240 7244 7247 7251 7255 7258 7262 7266 7269 7273 7277 7280 7284 7288 7292 7295 7299 7303 7306 7310 7314 7317 7321 7325 7328 7332 7336 7339 7343 7347 7350 7354 7358 7361 13 0 7073 7077 7080 7084 7088 7091 7095 7099 7102 7106 7109 7113 7117 7120 7124 7128 13 7135 7139 7142 7146 7150 7153 7157 7161 7164 7168 7172 7175 71789 7183 7186 7190 7194 7197 7201 7205 7208 7212 7216 7219 1223 7227 7230 7234 7238 7241 7245 7249 1252 7256 7260 7263 7267 7271 7274 7278 7282 7285 7289 7293 7296 7300 7304 7307 7311 7315 7318 7322 7326 7329 7333 7337 7340 7344 7348 7351 7355 7359 7362 7366 13 237 13 Wavelength of Light Compensation
288. 7307 7311 7316 7321 7325 7330 7335 7339 7344 7349 7353 7358 7362 7367 7372 7316 7381 736 7310 7315 7320 7324 7329 7334 7338 27343 7348 7352 7357 7361 7366 7371 7375 7380 7384 735 7314 7319 7323 7328 7333 7337 7342 7347 7351 7356 7360 7365 7370 7374 27379 7383 7388 734 7317 7322 7327 7332 7336 7341 7346 7350 7355 7359 7364 7369 7373 27378 7382 7387 7391 733 7321 7326 7331 7335 7340 27345 7349 7354 7358 7363 7368 7372 7377 717381 7386 7390 7395 732 7325 7330 7334 7339 7344 7348 7353 7357 17362 7367 7371 7376 27380 7385 7389 7394 7398 731 7328 7333 27338 7343 7347 7352 7356 7361 7366 7370 7375 7379 7384 7388 7393 7397 7402 730 7332 7337 7341 7346 7351 7355 7360 7365 7369 7374 7378 7383 7388 7392 7397 7401 7406 729 7336 7340 7345 7350 7354 27359 7364 7368 7373 37371 7382 7387 7391 7396 7400 7405 7409 728 7339 7344 7349 7353 7358 27363 7367 7372 7376 7381 7386 7390 7395 7399 7404 7408 7413 727 7343 7348 27352 27357 7362 7366 7371 7376 7380 7385 7389 7394 7398 7403 7407 7412 7416 726 7347 7351 7356 7361 7365 7370 7375 7379 7384 7388 7393 7397 7402 7406 7411 7415 7420 725 7350 7355 7360 7364 7369 7374 7378 7383 7387 7392 7396 7401 7405 7410 7414 7419 7423 724 7354 7359 7363 7368 27373 7377 7382 7386 7391 7395 7400 7405 7409 7413 7418 7422 7427 723 7358 7362 27367 7372 7376 7381 27385 7390 7395 7399 7404 7408 7413 7417 7422 7426 7430 722 7361 7366 27371 7375 7380 7384 7389 7394 7398 7403 7407 7412 7416 7421 7425 7430 7434 721 7365 7370 7374 2737379 7383 7388 7393 739
289. 7322 7326 7329 7333 7336 7340 7343 7347 7350 7353 7357 7360 7364 7367 7371 7374 7378 7381 7385 1388 7392 7395 7399 7402 7406 7409 7413 7416 7420 7423 7426 7430 7433 7437 7440 7444 7447 7451 7454 7458 7461 7465 7468 7472 7475 7479 7482 7486 7489 7492 7496 7499 7503 7506 29 0 7233 7237 7240 7244 7247 7251 7254 7258 7261 7264 7268 7271 7215 7278 7282 7285 7289 7292 7296 7299 7303 7306 7310 7313 7316 7320 7323 2321 7330 7334 7337 7341 7344 7348 T351 7355 7358 7362 7365 73698 7372 7375 7379 7382 7386 7389 7393 7396 7400 7403 7407 7410 7414 7417 7421 7424 7427 7431 7434 7438 7441 7445 7448 7452 7455 7459 7462 7466 7469 7473 7476 7480 7483 7486 7490 7493 7497 7500 7504 7507 7511 29 5 7238 7242 7245 7248 7252 7255 7259 7262 7266 7269 7273 7276 7280 7283 7287 7290 7293 7297 7300 7304 7307 7311 7314 7318 7321 7325 7328 7332 7335 7339 7342 7345 7349 7352 7356 7359 7363 7366 7370 7373 7377 7380 7384 7387 7390 7394 7397 7401 7404 7408 7411 7415 7418 7422 7425 7429 7432 7435 7439 7442 7446 7449 7453 7456 7460 7463 7467 7470 7474 7477 7480 7484 7487 7491 7494 7498 7501 7505 7508 7512 7515 30 0 7243 7246 7250 7253 7251 7260 7264 7267 7271 7274 7277 7281 7284 7288 7291 7295 7298 7302 7305 7309 7312 7315 7319 7322 7326 7329 7333 7336 7340
290. 7324 7329 7334 27339 7344 7349 7355 7360 7365 7370 7375 7380 7385 7390 29 00 7312 7318 7323 7328 7333 7339 7344 7349 7354 7359 7364 7369 7374 7379 7384 7389 7394 28 95 7317 7322 7328 7333 7338 7343 7348 7353 7359 7364 7369 7374 7319 7384 7389 7394 7399 28 90 7322 7327 7332 7337 7343 7348 7353 7358 7363 7368 7373 7378 7383 7388 7393 7398 7403 28 85 7326 7332 7337 7342 7347 7352 7357 7363 7368 7373 7378 7383 7388 7393 7398 7403 7408 28 80 7331 7336 7341 7347 7352 7357 7362 7367 7372 7377 7382 27387 7392 7391 7402 7407 7412 28 75 7336 7341 7346 7351 7356 7361 7367 7372 2737 7382 7387 2392 7397 7402 27407 7412 7417 28 70 7340 7345 7351 7356 7361 7366 7371 7376 7381 7386 7391 7397 7402 7407 7412 7416 7421 28 65 7345 7350 7355 7360 7366 7371 7376 7381 7386 7391 7396 7401 7406 7411 7416 7421 7426 28 60 7349 7355 7360 7365 7370 27375 7380 7385 7391 7396 7401 7406 7411 7416 7421 7425 7430 28 5 7354 7359 7364 27370 27375 7380 7385 7390 7395 7400 7405 7410 7415 7420 7425 2430 7435 28 50 7359 7364 7369 7374 7379 7384 7390 7395 7400 7405 7410 7415 7420 7425 7430 7434 7439 28 45 7363 7369 7374 7379 7384 7389 7394 7399 7404 7409 7414 7419 7424 7429 7434 7439 7444 28 40 7368 7373 7378 7383 7389 7394 7399 7404 7409 7414 7419 7424 7429 7434 7439 7443 7448 28 35 7373 7378 7383 7388 7393 7398 7403 7408 7413 7418 7423 7428 7433 7438 7443 7448 7453 28 30 7377 7382 7388 7393 7398 7403 7408 7413 7418 7423 7428 7433 7438 7443 7448 27453 7457 28 25 7382 7387 7392 7397 7402 7407 7412 7
291. 7365 7369 7373 7378 7382 7387 7391 7395 7400 774 7332 7337 7341 7346 7350 7355 7359 7364 7368 7372 7377 7381 7386 7390 7394 7399 7403 773 7336 7340 7345 7349 7354 7358 7363 7367 7371 7376 7380 7385 7389 7393 7398 7402 7406 772 7339 7344 7348 7353 7357 7361 7366 7370 7375 7379 7384 7388 7392 7397 7401 7405 7410 771 7343 7347 7352 7356 7360 7365 7369 7374 7378 7383 7387 7391 7396 7400 7404 7409 7413 770 7346 7351 7355 7359 7364 7368 7373 7377 7382 7386 7390 7395 7399 7403 7408 7412 7416 769 7349 7354 7358 7363 7367 7372 7376 7381 7385 7389 7394 7398 7402 7407 7411 7416 7420 768 7353 7357 7362 7366 7371 27375 7380 7384 7388 7393 7397 7402 7406 7410 7415 7419 7423 767 7356 7361 7365 7370 7374 7379 7383 7387 17392 7396 7401 7405 7409 7414 7418 7422 7427 766 7360 7364 7369 7373 7378 7382 7386 7391 7395 7400 7404 7408 7413 7417 7421 7426 7430 765 7363 7368 7372 27377 7381 7385 7390 7394 7399 7403 7407 7412 7416 7420 7425 7429 7433 764 7367 37371 7376 7380 7384 7389 7393 7398 7402 7406 7411 7415 7419 7424 7428 7432 7437 763 7370 7375 7379 7383 7388 7392 7397 7401 7405 7410 7414 7418 7423 7427 7431 7436 7440 762 7374 7378 7383 7387 7391 7396 7400 7404 7409 7413 7418 7422 7426 7430 7435 7439 7443 761 7377 7382 7386 7390 7395 7399 7404 7408 7412 7417 7421 7425 7430 7434 7438 7442 7447 760 7381 7385 7389 7394 7398 7403 7407 7411 7416 7420 7424 7429 71433 7437 7442 7446 7450 759 7384 7388 27393 7397 7402 7406 7410 7415 7419 7423 7428 7432 7436 7441 7445 7449 7453 758 7387
292. 737 7741 7746 7750 7754 7758 7762 7767 7771 7775 7779 666 7715 7720 7724 7728 7732 7736 7741 7745 7749 7753 7757 7762 7766 7770 7774 7778 7783 665 2719 7723 7727 7731 7736 7740 7744 7748 7752 7757 1761 7765 7769 7773 7778 7782 7786 664 7722 7726 37731 7735 7739 7743 7747 7752 7756 7760 7764 7768 7773 7777 7781 7785 7789 663 7726 7730 7734 7738 7742 7747 7751 7755 7759 7763 7768 7772 7776 7780 7784 7789 7793 662 7729 7733 7738 7742 7746 7750 7754 7758 7763 776 7771 7775 7779 7783 7788 7792 7796 661 7733 7737 7741 7745 7749 7753 7758 7762 7766 7770 7774 7779 7783 7787 7791 7795 7799 660 7736 7740 7744 7749 7753 7757 7761 7765 7769 7774 7778 7782 7786 7790 7794 7799 7803 659 7740 7744 7748 7752 7756 7760 7764 7769 7773 7777 7781 7785 7789 7794 7798 7802 7806 658 7743 7747 7751 7755 7760 7764 7768 7772 7776 7780 7785 7789 7793 7797 7801 7805 7810 657 7746 7751 7755 7759 7763 7767 7771 7775 7780 7184 7788 7792 7796 7800 7805 7809 7813 656 7750 7754 7758 7762 7766 7771 7775 7779 7783 7787 7791 7795 7800 7804 7808 7812 7816 655 7753 7758 7762 7766 7770 7774 7778 7782 7786 7791 7795 7799 7803 7807 7811 7815 7820 654 7757 7761 7765 7769 7773 7777 7782 7786 7790 7794 7798 7802 7806 7811 7815 7819 7823 653 7760 7764 7769 7773 7777 7781 7785 7789 7793 7797 7801 7806 7810 7814 7818 7822 7826 652 7764 7768 7772 7776 7780 7784 71788 7793 7797 1801 7805 7809 7813 7817 7821 7826 7830 651 7767 27771 7775 7780 7784 7788 7792 7796 7800 7804 7808 7812 7817 7821 7825 7829 7833 65
293. 7375 7380 7385 7390 7395 00 7316 7321 7327 7332 7337 27343 27348 7353 7359 7364 77369 7374 7379 7385 7390 7395 7400 27 95 7321 7326 7331 27337 7342 7347 27353 7358 7363 7369 7374 7379 7384 7389 7394 7400 7405 27 90 7325 7331 7336 7342 7347 7352 7357 7363 7368 27373 27378 7384 7389 7394 7399 7404 7409 27 85 7330 7336 7341 7346 7352 7357 7362 7367 7373 7378 7383 7388 7393 7399 7404 7409 7414 27 80 7335 7340 7346 7351 7356 7362 27367 7372 7377 7383 7388 7393 7398 7403 7408 7414 7419 27 75 7340 7345 7351 7356 7361 7366 7372 7377 27382 7387 7393 7398 7403 7408 7413 7418 7423 27 70 7345 7350 27355 7361 7366 7371 27376 7382 7387 7392 27397 7402 7408 7413 7418 7423 7428 27 65 7349 7355 7360 7365 7371 7376 7381 7386 7392 7397 7402 7407 7412 7417 7422 7427 7433 27 60 7354 7360 7365 7370 7375 7381 7386 7391 7396 7401 7407 7412 73417 7422 7427 7432 7437 27 55 7359 7364 7370 7375 7380 7385 7391 7396 7401 7406 7411 7416 7422 7427 7432 7437 7442 27 50 7364 7369 7374 7380 7385 7390 7395 7401 7406 7411 7416 7421 7426 7431 7436 7441 7446 27 45 7369 7374 7379 7384 7390 7395 7400 7405 7410 7416 7421 7426 7431 7436 7441 7446 7451 27 40 7373 7379 7384 7389 7394 7400 27405 7410 7415 7420 7425 7431 7436 7441 7446 7451 7456 27 35 7378 7383 7389 7394 7399 7404 7410 7415 7420 7425 7430 7435 7440 7445 7450 7455 7460 27 30 7383 7388 7393 7399 7404 7409 7414 7419 7425 7430 7435 7440 7445 7450 7455 7460 7465 27 25 7388 7393 7398 7404 7409 7414 7419 7424 7429 7434 7440 7445 7450 7455 7460
294. 7465 7470 27 20 7393 7398 7403 7408 7413 7419 7424 7429 7434 7439 7444 7449 7454 7459 7464 7469 7474 27 15 7397 7403 7408 7413 7418 7423 7429 7434 7439 7444 7449 7454 7459 7464 7469 7474 7479 27 10 7402 7407 7413 7418 27423 7428 7433 7438 7444 7449 7454 7459 7464 7469 7474 7479 7484 27 05 7407 7412 7417 7423 7428 7433 7438 7443 7448 7453 7458 7463 7468 7473 7478 7483 7488 27 00 7412 7417 7422 7427 7432 7438 7443 7448 7453 7458 7463 7468 7473 7478 7483 7488 7493 BAROMETRIC PRESSURE IN INCHES OF MERCURY 254 Laser and Optics User s Manual Vol Wavelength of Light Compensation 13 Table 45 English Low Alt Low Mid Temp Low Humidity Temp 57 to 73 F Press 27 to 31 inches 20 Humidity _ TEMPERATURE IN DEGREES FAHRENHEIT 57 0 58 0 59 0 60 0 61 0 62 0 63 0 64 0 65 0 66 0 67 0 68 0 69 0 70 0 71 0 72 0 73 0 31 00 7127 7133 7138 7144 7149 7155 7160 7166 7171 7177 7182 7188 7193 7198 7204 7209 7215 30 95 7132 27137 7143 7148 7154 7159 7165 7170 7176 7181 7187 7192 7198 7203 7208 7214 7219 30 90 7136 7142 7147 7153 7158 7164 7170 7175 7180 7186 7191 7197 7202 7208 7213 7218 7224 30 85 7141 7146 7152 7158 7163 7169 7174 7180 7185 7190 7196 7201 7207 7212 7217 37223 7228 30 80 7145 7151 7157 7162 7168 7173 7179 7184 7190 7195 7200 7206 7211 7217 7222 7227 1233 30 75 7150 7156 7161 27167 7172 7178 7183 7189 7194 7200 7205 7210 7216 7221 27226 7232 7237 30 70 7155 7160 7166 7171 7177 7182 7188 7193 7199 7204 7210 7215 27220 7226
295. 7473 7478 7483 7487 7492 7497 7502 7506 7511 7516 7520 7525 28 40 7453 7458 7463 7468 7473 7477 7482 7487 7492 7497 7501 7506 7511 7515 7520 7525 7529 28 35 7458 7463 7467 7472 7477 7482 7487 7491 7496 7501 7506 7510 7515 7520 7524 7529 7534 28 30 7462 7467 7472 7477 7482 7486 7491 7496 7501 7505 7510 7515 7519 7524 7529 7533 7538 28 25 7467 7472 7476 7481 7486 7491 7496 7500 7505 7510 7514 7519 7524 7529 7533 7538 7542 28 20 7471 7476 7481 7486 7490 7495 7500 7505 7509 7514 7519 7524 7528 7533 7538 7542 7547 28 15 7476 7481 7485 7490 7495 7500 7504 7509 7514 7519 7523 7528 7533 7537 7542 2547 7551 28 10 7480 7485 7490 7495 7499 7504 7509 7514 7518 7523 7528 7532 7537 7542 7546 7551 7556 28 05 7485 7490 7494 7499 7504 7509 7513 7518 7523 7527 7532 7537 7541 7546 7551 7555 7560 28 00 7489 7494 7499 7504 7508 27513 7518 7522 7527 7532 7536 7541 7546 7550 7555 7560 7564 27 95 7494 7498 7503 7508 27513 7517 7522 7527 7532 7536 7541 7546 7550 7555 7559 7564 7569 27 90 7498 7503 7508 7512 7517 7522 7527 7531 7536 7541 7545 7550 7555 7559 7564 7568 7573 27 85 7503 7507 7512 27517 7522 7526 7531 7536 7540 7545 7550 7554 7559 7564 7568 7573 7577 27 80 7507 7512 7517 7521 7526 7531 7535 7540 7545 7549 7554 7559 7563 7568 7573 7577 7582 27 75 7512 7516 7521 7526 7531 27535 7540 7545 7549 7554 1559 7563 7568 7572 7577 7581 7586 27 70 7516 7521 7526 7530 7535 7540 7544 7549 7554 7558 7563 7568 7572 7577 7581 7586 7590 27 65 7521 7525 7530 7535 37539 7544 7549 7553 7558
296. 7478 7483 7487 7492 7496 7500 7505 7509 7514 7518 7522 697 7455 7459 7464 7468 7473 7477 7482 7486 7491 7495 7500 7504 7508 7513 7517 7522 7526 696 7458 7463 7467 7472 7477 7481 7485 7490 7494 7499 7503 7508 7512 7516 7521 7525 7530 695 7462 7467 7471 7476 7480 27485 7489 7494 7498 7502 7507 7511 7516 7520 7524 7529 7533 694 7466 7470 7475 7479 7484 7488 7493 7497 7502 7506 7510 7515 7519 7524 7528 7532 7537 693 7469 7474 7478 7483 7487 7492 7496 7501 7505 7510 7514 7518 7523 7527 7532 7536 7540 692 7473 7478 7482 7487 7491 7495 7500 7504 7509 7513 7518 7522 7526 7531 7535 7539 7544 691 1477 7481 7486 7490 7495 7499 7504 7508 7512 7517 7521 7526 7530 7534 7539 7543 7547 630 7480 7485 7489 7494 7498 7503 7507 7512 7516 7520 7525 7529 7534 7538 7542 7547 7551 689 7484 7489 7493 7497 7502 7506 27511 7515 7520 7524 7528 7533 7537 7541 7546 7550 7554 688 7488 7492 7497 7501 7506 7510 7514 7519 7523 7528 7532 7536 7541 7545 7549 7554 7558 687 7491 7496 7500 7505 7509 7514 27518 7522 27527 7531 7536 7540 7544 7549 7553 7557 7562 686 7495 7499 7504 7508 7513 7517 7522 7526 7530 7535 7539 7544 7548 7552 7557 7561 7565 685 7499 7503 7508 7512 7516 7521 7525 7530 7534 7538 7543 7547 7551 7556 7560 7564 7569 684 7502 7507 27511 7516 7520 7524 27529 7533 7538 7542 7546 7551 7555 7559 7564 7568 7572 683 7506 7510 7515 7519 7524 27528 7533 7537 7541 7546 7550 7554 7559 7563 7567 7572 7576 682 7510 7514 27519 7523 27527 7532 27536 7541 7545 7549 7554 7558 7562 7567 7571 757
297. 7485 7488 7492 7496 7500 7503 7507 7511 7514 7318 7522 7526 7529 7533 7537 7540 7544 7548 7551 7555 7559 7563 7566 7570 7574 7577 7581 7585 7589 7592 7596 7600 7603 7607 7611 7615 7618 7622 7626 7629 10 0 7337 7341 7345 7349 7352 7356 7360 7363 7367 7371 7374 7378 7382 7386 7389 7393 7397 7400 7404 7408 7411 7415 7419 7423 7426 7430 7434 7437 7441 7445 7449 7452 7456 7460 7463 7467 7411 7474 7478 7482 7486 7489 7493 7497 7500 7504 7508 7511 7515 7519 7523 7526 7530 7534 79831 7541 7545 7548 7552 7556 7560 7563 7567 7571 7574 7578 7582 7586 7589 7593 7597 7600 7604 7608 7611 7615 7619 7623 7626 7630 7634 10 5 7342 7346 7350 7353 7357 7361 7364 7368 7372 7375 7379 7383 7387 7390 7394 7398 7401 7405 7409 7412 7416 7420 7424 7427 7431 7435 7438 7442 7446 7449 1453 7457 7460 7464 7468 7472 7415 7479 7483 7486 7490 7494 7497 7501 7505 7509 7512 7516 7520 7523 7527 7531 7534 7538 7542 7546 7549 7553 7557 7560 7564 7568 7571 7575 7519 7582 7586 7590 7594 7597 7601 7605 7608 7612 7616 7619 7623 7627 7631 7634 7638 11 0 7347 7351 7354 7358 7362 7365 7369 7313 7371 7380 7384 7388 7391 7395 7399 7402 7406 7410 7413 7417 7421 7424 7428 7432 7436 7439 7443 7447 7450 7454 7458 7461 7465 7469 7472 7476 7480 7484 7487 7491 7495 7498 7502
298. 7487 7491 7495 7498 7502 7506 7510 7513 7517 7521 7525 7528 7532 7536 7540 7543 7547 7551 7555 7558 7562 7566 7570 7573 7577 7581 7585 7588 7592 7596 7600 7603 Laser and Optics User s Manual Vol 7 0 7308 7312 7316 7320 7323 7327 7331 7335 7338 7342 7346 7350 7353 7357 7361 7365 7368 7372 7376 7380 7383 7387 7391 7394 7398 7402 7406 7409 7413 7417 7421 7424 7428 7432 7436 7439 7443 7447 7451 7454 7458 7462 7466 7469 7473 7477 7481 7484 7488 7492 7496 7499 7503 7507 7510 7514 7518 7522 7525 7529 7533 7537 7540 7544 7548 7552 7555 7559 7563 7567 7570 7574 7578 7582 7585 7589 7593 7597 7600 7604 7608 TEMPERATURE IN DEGREES CELSIUS 75 7313 7317 7321 7324 7328 7332 7336 7339 7343 7347 7351 7354 7358 7362 7366 7369 7373 7377 7381 7384 7388 7392 7395 7399 7403 7407 7410 7414 7418 7422 7425 7429 7433 7437 7440 7444 7448 7451 7455 7459 7463 7466 7470 7474 7478 7481 7485 7489 7493 7496 7500 7504 7508 78311 7515 7519 7522 7526 30 7534 7537 7541 7545 7849 7552 7556 7560 7564 7567 7571 7575 7579 7582 7586 7590 7593 7597 7601 7605 7608 7612 8 0 7318 7322 7326 7329 7333 7337 7341 7344 7348 7352 7355 7359 7363 7367 7370 7374 7378 7382 7385 7389 7393 7396 7400 7404 7408 7411 7415 7419 7423 7426 7430 7434 7437 7441 7445 7449 7452 7456 7460
299. 7491 7495 7500 7504 7509 7513 7518 7523 7527 7532 7536 7541 7545 7549 7554 7558 667 7490 7494 7499 7504 7508 7513 7517 7522 7526 7531 7535 7540 7544 7549 7553 7558 7562 666 7493 7498 7503 7507 7512 7516 7521 7525 7530 7534 7539 7543 7548 7552 7557 7561 7566 665 7497 7502 7506 7511 7516 7520 7525 7529 7534 7538 7543 7547 7552 7556 7561 7565 7569 664 7501 7506 7510 7515 7519 7524 7528 7533 7537 7542 7546 7551 7555 7560 7564 7569 7573 663 7505 7509 7514 7519 7523 7528 7532 7537 7541 7546 7550 7555 7559 7563 7568 7572 7571 662 7509 7513 7518 7522 7527 7531 7536 7540 7545 7549 7554 7558 7563 7567 7572 7576 7580 661 7512 7517 7521 7526 7531 7535 7540 7544 7549 7553 7557 7562 7566 7571 7575 7580 7584 660 7516 7521 7525 7530 7534 7539 7543 7548 7552 7557 7561 7566 7570 7574 7519 7583 7588 659 7520 7524 7529 7534 7538 7543 7547 7552 7556 7560 7565 7569 7574 7578 7583 7587 7591 658 7524 7528 7533 7537 7542 7546 7551 7555 7560 7564 7569 7573 7577 7582 7586 7591 7595 657 7527 7532 7537 7541 7546 7550 7555 7559 7563 7568 7572 7577 7581 7586 7590 7594 7599 656 7531 7536 7540 7545 7549 7554 7558 7563 7567 7572 7576 7580 7585 7589 7594 7598 7602 655 7535 7539 7544 7549 7553 7557 7562 7566 7571 7575 7580 7584 7589 7593 7597 7602 7606 654 7539 7543 7548 7552 7557 7561 7566 7570 7575 7579 7583 7588 7592 7597 7601 7605 7610 653 7542 7547 7552 7556 7560 7565 7569 7574 7578 7583 7587 7592 1596 7600 7605 7609 7613 652 7546 7551 7555 7560 7564 7569 7573 7578 7582 7586 7591 7595 7600
300. 7499 7503 7507 7512 7516 698 7449 7454 7458 7463 7467 7471 7476 7480 7485 7489 7493 7498 7502 7506 7511 7518 7519 697 7453 7457 27462 7466 27471 7475 7480 7484 7488 7493 7497 7501 7506 7510 7514 7519 7523 696 1456 7461 7465 27470 7474 7479 7483 7488 7492 7496 7501 7505 7509 7514 7518 7522 7526 695 7460 7465 7469 7473 7478 7482 7487 7491 7496 7500 7504 7509 7513 7517 7521 7526 7530 694 7464 7468 7473 7477 7482 7486 7490 7495 7499 7503 7508 7512 7516 7521 7525 7529 7534 693 7467 7472 7476 7481 7485 7490 7494 7498 7503 7507 7511 7516 7520 7524 7529 7533 7537 692 7471 7476 7480 7484 7489 7493 7498 7502 7506 7511 7515 7519 7524 7528 7532 7536 7541 691 7475 7479 7484 7488 7492 7497 7501 7506 7510 7513 7519 7523 7527 7531 7536 7540 7544 690 7478 7483 7487 7492 7496 7500 7505 7509 7514 7518 7522 7526 7531 7535 7539 7544 7548 689 7482 7486 7491 7495 7500 7504 7508 7513 7517 7521 7526 7530 7534 7539 7543 7547 7551 688 7486 7490 7495 7499 7503 7508 7512 7516 7521 7525 7529 7534 7538 7542 7546 7551 7555 687 7489 7494 7498 7503 7507 7511 7516 7520 7524 7529 7533 7537 7542 7546 7550 7554 7558 686 7493 7497 7502 7506 7512 7515 7519 7524 7528 7532 7537 7541 7545 7549 7554 7558 7562 685 7497 7501 7505 7510 7514 7519 7523 7527 7532 7536 7540 7544 7549 7553 7557 7561 7566 684 7500 7505 7509 7514 7518 7522 7527 7531 7535 7539 7544 7548 7552 7557 7561 7565 7569 683 7504 7508 7513 7517 7522 7526 7530 7534 7539 7543 7547 7552 7556 7560 7564 7569 7573 682 7508 7512 7516 7521 7525 75
301. 75 8097 590 7754 7779 7803 7827 7850 7873 7895 7918 7940 7962 7983 8005 8026 8048 8070 8091 8114 585 7773 7798 7822 7845 7868 7891 7913 7935 7957 7979 8000 8022 8043 8065 8086 8108 8130 580 7792 7816 7840 7864 7886 7909 7931 7953 7975 7996 8018 8039 8060 8081 8103 8124 8146 575 7811 7835 7859 7882 7905 7927 7949 7971 7992 8014 8035 8056 8077 8098 8119 8140 8162 570 7830 7854 7877 7900 7923 7945 7967 7989 8010 8031 8052 8073 8094 8115 8136 8157 8178 565 7849 7873 7896 7919 7941 7963 7985 8006 8027 8048 8069 8090 8111 8131 68152 8173 8195 560 7868 7892 7915 7937 7959 7981 8003 8024 8045 8066 8086 8107 8127 8148 8169 8190 8211 555 7887 7911 7933 7956 7978 7999 8021 8042 8062 8083 8104 8124 8144 8165 8185 8206 8227 50 7907 7930 7952 7974 7996 8017 8038 8059 8080 8100 8121 8141 8161 8181 8202 8222 8243 545 7926 7948 7971 7993 8014 8035 8056 8077 8097 8118 8138 8158 8178 8198 8218 8239 8259 540 7945 7967 7989 8011 8032 8053 8074 8095 8115 8135 8155 8175 8195 8215 8235 8255 8276 535 7964 7986 8008 8030 8051 8072 8092 8112 8133 8152 8172 8192 8212 8231 8251 8271 8292 530 7983 8005 8027 8048 8069 8090 8110 8130 8150 8170 8189 8209 8228 8248 8268 8288 8308 525 8002 8024 8045 8066 8087 8108 8128 8148 8168 8187 8207 8226 8245 8265 8284 8304 8324 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY Ba 228 Laser and Optics User s Manual Vol 800 799 798 797 796 795 794 793 792 791 790 789 788 787 786 785 784 783 782 781 780 719 718 777 776 775
302. 7514 7519 741 7451 7456 7460 7465 7469 7474 7478 7482 7487 7492 7496 2500 7505 7509 7513 7518 7522 740 7455 7459 7464 7468 7473 27477 7481 7486 7490 7495 7499 7504 7508 7512 7517 7521 7526 739 7458 7463 7467 7472 7476 7480 7485 7489 7494 7498 7503 7507 7511 7516 7520 7525 7529 738 7462 7466 2737471 7475 7479 7484 7488 7493 7497 7502 7506 7510 7515 7519 7524 7528 7532 737 7465 7470 7474 7478 7483 7487 7492 7496 7501 7505 7509 7514 2518 7523 7527 7531 7536 736 7469 7473 7477 7482 7486 7491 7495 7500 7504 7508 7513 7517 7522 7526 7530 7535 7539 735 7472 7476 37481 7485 7490 7494 7499 7503 7507 7512 7516 7521 7525 7529 7534 7538 7542 734 7476 7480 7484 7489 7493 7498 7502 7506 7511 7515 7520 7524 7528 7533 7537 7541 7546 733 7479 7483 7488 7492 7497 7501 7505 7510 7514 7519 7523 7527 7532 7536 7540 7545 7549 732 7482 7487 7491 7496 7500 7504 7509 7513 7518 7522 7526 7531 7535 7539 7544 7548 7552 731 7486 7490 7495 7499 7503 7508 7512 7517 7521 7525 7530 7534 7538 7543 7547 7551 7556 730 7489 7494 7498 27503 7507 7511 7516 7520 7524 7529 7533 7537 7542 7546 7551 7555 7559 729 7493 7497 7502 7506 7510 7515 7519 7523 7528 7532 7537 7541 7545 7550 7554 7558 7563 728 7496 7501 7505 7509 7514 7518 7522 7527 7531 7536 7540 7544 7549 7553 7557 7562 7566 721 7500 7504 7508 7513 7517 7522 7526 7530 7535 7539 7543 7548 7552 7556 7561 7565 7569 726 7503 7507 7512 7516 7521 7525 7529 7534 7538 7542 7547 7551 7555 7560 7564 7568 7573 725 7507 7511 7515 7520 7524 7528 7533 7537
303. 7519 7524 28 55 7447 7452 7457 7462 7467 7472 7477 27482 7488 7493 7498 7503 7508 7513 7518 7523 7528 28 50 7451 7456 7461 7467 7472 7477 7482 7487 7492 7497 7502 7507 7512 7517 7522 7527 7532 28 45 7456 7461 7466 7471 7476 7481 7486 7491 7496 7501 7506 7512 7517 7522 7527 7532 7537 28 40 7460 7465 7470 7476 7481 7486 7491 7496 7501 7506 7511 7516 7521 7526 7531 7536 7541 28 35 7465 7470 7475 7480 7485 7490 7495 7500 7505 7510 7515 7520 7525 7530 7535 7540 7545 28 30 7469 7474 7479 7484 7489 7495 7500 7505 7510 7515 7520 7525 7530 7535 7540 7545 7550 28 25 7474 7479 7484 7489 7494 7499 7504 7509 7514 7519 7524 7529 7534 7539 7544 7549 7554 28 20 7478 7483 7488 7493 7498 7503 7508 7513 7518 1523 7528 7533 7538 7543 7548 7553 7558 28 15 7483 7488 7493 7498 7503 7508 7513 7518 7523 7528 7533 7538 7543 7548 7553 7558 7563 28 10 7487 7492 7497 7502 7507 7512 7517 7522 7527 7532 7537 7542 7547 7552 7557 7562 7567 28 05 7492 7497 7502 7507 7512 7517 7522 7527 7532 7537 7542 7547 7552 7557 7562 7567 7572 28 00 7496 7501 7506 7511 7516 7521 7526 7531 7536 7541 7546 7551 7556 7561 7566 7571 7576 27 95 7501 7506 7511 7516 7521 7526 7531 7536 7541 7546 7551 7555 7560 7565 7570 7575 7580 27 90 7505 7510 7515 7520 7525 7530 7535 7540 7545 7550 7555 7560 7565 7570 7575 7580 7585 27 85 7510 7515 7520 7525 7530 7535 7540 7544 7549 7554 7559 7564 7569 7574 7579 7584 7589 27 80 7514 7519 7524 7529 7534 7539 7544 7549 7554 7559 7564 7569 7574 7579 7583 7588 7593 27 75 7519 7524
304. 7529 7534 7538 7543 7548 7553 7558 7563 7568 7573 7578 7583 7588 7593 7598 27 70 7523 7528 7533 7538 7543 7548 7553 7558 7563 7568 7573 7577 7582 7587 7592 7597 7602 27 65 7528 7533 7538 7542 7547 7552 7557 7562 7567 7572 7577 1582 7587 7592 7597 7601 7606 27 60 7532 7537 7542 7547 7552 7557 7562 7567 7572 7576 7581 7586 7591 7596 7601 7606 7611 27 55 7537 7542 7546 7551 7556 7561 7566 7571 7576 7581 7586 7591 7596 7600 7605 7610 7615 27 50 7541 7546 7551 7556 7561 7566 7571 7575 7580 7585 7590 7595 7600 7605 7610 7615 7619 27 45 7546 7550 7555 7560 7565 7570 7575 7580 7585 7590 7595 7599 7604 7609 7614 7619 7624 27 40 7550 7555 7560 7565 7570 7575 7579 7584 7589 7594 7599 7604 7609 7614 7618 7623 7628 27 35 7555 7559 7564 7569 7574 7579 7584 7589 7594 7599 7603 7608 7613 7618 7623 7628 7633 27 30 7559 7564 7569 7574 7579 7583 7588 7593 7598 7603 7608 7613 7617 7622 7627 7632 7637 27 25 7563 7568 7573 7578 7583 7588 7593 7598 7602 760 7612 7617 7622 7627 7632 7636 7641 27 20 7568 7573 7578 7583 7587 7592 7597 7602 7607 2612 7617 7621 7626 7631 7636 7641 7646 27 15 7572 7577 7582 7587 7592 7597 7602 7606 7611 7616 7621 7626 7631 7635 7640 7645 7650 27 10 7577 7582 7587 7592 7596 7601 7606 7611 7616 7621 7625 7630 7635 7640 7645 7649 7654 27 05 7581 7586 7591 7596 7601 7606 7611 7615 7620 7625 7630 7635 7639 7644 7649 7654 7659 27 00 7586 7591 7596 7600 7605 7610 7635 7620 7625 7629 7634 7639 7644 7649 7653 7658 71663 BAROMETRIC PRESSURE IN INCHES OF MERCURY
305. 7563 7567 7572 7577 7581 7586 37590 7595 27 60 7525 7530 7535 7539 7544 7549 7553 7558 7563 7567 7572 7516 7581 7585 7590 7595 7599 27 55 7530 7534 7539 7544 7548 27553 7558 7562 7567 7572 7576 7581 7585 7590 7594 7599 7603 27 50 7534 7539 7543 7548 7553 7557 7562 7567 7571 7576 7581 7585 7590 7594 7599 7603 7608 27 45 7539 37543 7548 7553 7557 7562 7567 7571 7576 7580 7585 7590 7594 7599 7603 7608 7612 27 40 7543 7548 7552 7557 7562 27566 7571 7576 7580 7585 7589 7594 7598 7603 7608 7612 7617 27 35 7548 7552 7557 7562 7566 7571 7575 7580 7585 7589 7594 7598 7603 7607 7612 7616 7621 27 30 7552 7557 7561 7566 7571 7575 27580 7584 7589 7594 7598 7603 7607 7612 7616 7621 7625 27 25 7557 7561 7566 7570 7575 7580 7584 7589 7593 7598 7603 7607 7612 7616 7621 7625 7630 27 20 7561 7566 27570 7575 7580 7584 7589 7593 7598 7602 7607 7612 7616 7621 7625 7629 7634 27 15 7565 7570 7575 7579 7584 7589 7593 7598 7602 7607 7611 7616 7620 7625 7629 7634 7638 27 10 7570 7575 7579 7584 7588 7593 7598 7602 7607 7611 7616 7620 7625 7629 7634 7638 7643 27 05 7574 7579 7584 7588 7593 7598 7602 7607 7611 7616 7620 7625 7629 7634 7638 7643 7647 27 00 7579 7584 7588 7593 7597 7602 27607 7611 7616 7620 7625 7629 7634 7638 7642 7647 7651 BAROMETRIC PRESSURE IN INCHES OF MERCURY 256 Laser and Optics User s Manual Vol Wavelength of Light Compensation 1 i igh Mi Humidity Table47 English Low Alt High Mid Temp Low A Temp 91 to 107 F Press 27 to 31 inches 20 Humidi
306. 7567 26 15 7493 7498 7503 7508 7513 7518 7523 7528 7533 7538 7543 7548 7553 7558 7562 7567 7572 26 10 7498 7503 7508 7513 7518 7523 7528 7533 7538 7543 7548 7553 7557 7562 7567 7572 7577 26 05 7503 7508 7513 7518 7523 7528 7533 7538 7543 7548 7552 7557 7562 7567 7572 7576 7581 26 00 7508 7513 7518 7523 7528 7533 7538 7542 7547 7552 7557 7562 7567 7572 7576 7581 7586 25 95 7512 7517 7522 7527 7532 7537 7542 7547 7552 7557 7562 7567 7571 7576 7581 7586 7591 25 90 7517 7522 7527 7532 7537 7542 7547 7552 7557 7562 7566 7571 7576 7581 7586 7590 7595 25 85 7522 7527 7532 7537 7542 7547 7552 7557 7561 7566 7571 7576 7581 7586 7590 7595 7600 25 80 7527 7532 7537 7542 7541 7552 7556 7561 7566 7571 7576 7581 7585 7590 7595 7600 7604 25 75 7532 7537 7542 7547 7551 7556 7561 7566 7571 7576 7581 7585 7590 7595 7600 7604 7609 25 70 7536 7541 7546 7551 7556 7561 7566 7571 7576 7580 7585 7590 7595 7600 7604 7609 7614 25 65 7541 7546 7551 7556 7561 7566 7571 7576 7580 7585 7590 7595 7600 7604 7609 7614 7618 25 60 7546 7551 7556 7561 27566 7571 7575 7580 7585 7590 7595 7599 7604 7609 7614 7618 7623 25 55 7551 7556 7561 27566 7570 7575 7580 7585 7590 7595 7599 7604 7609 7614 7618 7623 7628 25 50 7556 7561 7565 7570 7575 7580 7585 7590 7595 7599 7604 7609 7614 7618 7623 7628 7632 25 45 7560 7565 7570 27575 7580 7585 7590 7594 7599 7604 7609 7614 7618 7623 7628 7632 7637 25 40 7565 7570 7575 7580 7585 7590 7594 7599 7604 7609 7613 7618 7623 7628 7632 7637 7642 25 35 7570 7575 758
307. 7570 7575 7579 7583 7587 7592 7596 7600 7604 7609 7613 7617 7621 7626 7630 708 7565 7570 27574 7578 7582 7587 7591 7595 7599 7604 7608 7612 7616 7621 7625 7629 7633 707 7569 7573 7577 7581 7586 7590 7594 7598 7603 7607 7611 7615 7620 7624 7628 7632 7637 706 7572 7576 7581 7585 7589 7593 7598 7602 7606 7610 7615 7619 7623 7627 37631 7636 27640 705 7576 7580 7584 7588 7593 7597 7601 7605 7610 7614 7618 7622 7626 7631 7635 7639 7643 704 7579 7583 7588 7592 7596 7600 7605 7609 7613 7617 7621 7626 7630 7634 7638 7642 7647 703 7582 7587 7591 7595 7599 7604 7608 7612 7616 7621 7625 7629 7633 7637 7642 7646 7650 702 7586 7590 7594 7599 7603 7607 7611 7616 7620 27624 7628 7632 7637 7641 7645 7649 7653 701 7589 7594 7598 7602 7606 7611 7615 7619 7623 7627 7632 7636 7640 7644 7648 7653 7657 700 7593 7597 7601 7606 7610 7614 7618 7622 7627 7631 7635 7639 7643 7648 27652 7656 7660 699 7596 7601 7605 7609 7613 7617 7622 7626 7630 7634 7638 7643 7647 7651 7655 7659 7663 698 7600 7604 7608 7612 7617 7621 7625 7629 7633 7638 7642 7646 7650 7654 7658 7663 7667 697 7603 7607 7612 7616 7620 7624 7628 7633 7637 7641 7645 7649 7653 7658 7662 7666 7670 696 7607 7611 7615 7619 7623 7628 2632 7636 7640 7644 7649 7653 7657 7661 7665 7669 7674 695 7610 7614 7619 7623 7627 7631 7635 7639 7644 7648 7652 7656 7660 7664 7669 7673 7677 694 7614 7618 7622 7626 7630 7635 7639 7643 7647 7651 7655 7659 7664 7668 7672 7676 7680 693 7617 7621 7625 7630 7634 7638 7642 7646 7650 7655 7659 7663 7667
308. 76 7281 7287 7292 7298 23303 7309 7314 7320 7325 28 80 7241 7247 7253 7258 7264 7269 7275 7281 7286 7292 7297 7303 7308 7313 7319 7324 7330 28 75 7246 7252 7257 7263 7269 7274 7280 7285 7291 7296 7302 7307 7313 7318 7323 7329 7334 28 70 7251 7257 7262 7268 7273 27279 7284 7290 7296 7301 7306 7312 731 7323 7328 7334 7339 28 65 7256 7261 7267 27273 7278 7284 7289 7295 7300 7306 7311 7317 7322 7327 7333 7338 7344 28 60 7261 7266 7272 7277 7283 7288 27294 7299 7305 7310 7316 7321 7327 7332 7337 7343 7348 28 55 7265 7271 7277 7282 7288 7293 7299 7304 7310 7315 7321 7326 7331 7337 31342 7348 7353 28 50 7270 7276 7281 7287 737292 7298 7303 7309 7314 7320 7325 7331 7336 7341 7347 7352 7357 28 45 7275 7281 7286 7292 7297 7303 7308 7314 7319 7325 7330 7335 7341 7346 7351 7357 7362 28 40 7280 7285 7291 7296 7302 7307 27313 7318 7324 7329 7335 7340 7345 7351 7356 7361 7367 28 35 7285 7290 7296 7301 7307 7312 7318 7323 7329 7334 7339 7345 7350 7355 7361 7366 7371 28 30 7289 7295 7300 7306 27311 7317 7322 7328 7333 27339 7344 7349 7355 7360 7365 7371 7376 28 25 7294 7300 7305 7311 7316 7322 7327 7333 7338 7343 7349 7354 7359 7365 7370 7375 7381 28 20 7299 7305 7310 7316 7321 27326 7332 7337 7343 7348 7353 7359 7364 7369 7375 7380 7385 28 15 7304 7309 7315 7320 7326 7331 7337 7342 7347 7353 7358 7364 7369 7374 7379 7385 7390 28 10 7309 7314 7320 7325 7331 7336 7341 7347 7352 7358 7363 7368 7374 7379 7384 7389 7395 28 05 7313 7319 7324 7330 27335 37341 7346 7351 7357
309. 7604 7608 7613 7617 651 7590 7555 7559 7564 7568 7572 7577 7581 7586 7590 7595 7599 7603 7608 7612 7616 7621 650 7554 7558 7563 7567 7572 7576 7581 7585 7589 7594 7598 7603 7607 7611 7616 7620 7624 649 7558 7562 7567 27571 7575 7580 7584 7589 7593 7598 7602 7606 7611 7615 7619 7624 7628 648 7561 7566 7570 7575 7579 7584 7588 7592 7597 7601 7606 7610 7614 7619 7623 7627 7632 647 7565 7570 7574 27579 7583 7587 7592 7596 7601 7605 7609 7614 7618 7622 7627 7631 7635 646 7569 7573 7578 7582 7587 7591 7596 7600 7604 7609 7613 7617 7622 7626 7630 7635 7639 645 7573 7577 7582 7586 7590 27595 7599 7604 7608 7612 7617 7621 7625 7630 7634 7638 7643 644 7576 7581 7585 7590 7594 7599 7603 7607 7612 7616 7620 7625 7629 7633 7638 7642 7646 643 7580 7585 7589 7594 7598 7602 7607 7611 7615 7620 7624 7628 7633 7637 7641 7646 7650 642 7584 7588 7593 7597 7602 7606 7610 7615 7619 7624 7628 7632 7636 7641 7645 7649 7654 641 7588 7592 7597 7601 7605 7610 7614 7619 7623 7627 7632 7636 71640 7644 7649 7653 7657 640 7591 7596 7600 7605 7609 7614 7618 7622 7627 7631 7635 7640 7644 7648 7652 765 7661 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY Laser and Optics User s Manual Vol 249 13 Wavelength of Light Compensation Table 40 Metric High Alt Low Mid Temp High Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 80 Humidity BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY TEMPERATURE IN DEGREES CELSIUS 13 5 14 0 14 5 15 0 15 5 16 0 16 5 17 0 17 5 18 0
310. 7626 7631 7635 7639 7643 7648 7652 7656 7661 7665 7669 7674 7678 7682 7686 99 0 7348 7352 7356 7361 7365 7369 7374 7378 7382 7386 7391 7395 7399 7404 7408 7412 7416 7421 7425 7429 7434 7438 7442 7446 7451 7455 7459 7464 7468 7472 7476 7481 7485 7489 7494 7498 7502 7506 7511 7515 751 7524 7528 7532 7536 7541 7545 7549 7554 7558 7562 7566 7571 7575 7579 7584 7588 7592 7596 7601 7605 7609 7614 7618 7622 7626 7631 7635 7639 7644 7648 7652 7656 7661 7665 7669 7674 7678 7682 7686 7691 100 0 101 0 102 0 7353 7357 7361 7366 7370 7374 7378 7383 7387 7391 7336 7400 7404 7408 7413 7417 7421 7426 7430 7434 7438 7443 7447 7451 7455 7460 7464 7468 7473 7477 7481 7485 7490 7494 7498 7503 7507 7511 7515 7520 7524 7528 7532 7537 7541 7545 7550 7554 7558 7562 7567 7571 7575 7580 7584 7588 7592 7597 7601 7605 7609 7614 7618 7622 7627 7631 7635 7639 7644 7648 7652 7657 7661 7665 7669 7674 7678 7682 7686 7691 7695 7358 7362 7366 7371 7375 7379 7383 7388 7392 7396 7400 7405 7409 7413 7418 7422 7426 7430 7435 7439 7443 7447 7452 7456 7460 7464 7469 7473 7477 7482 7486 7490 7494 7499 7503 7507 7511 7516 7520 7524 7529 7533 7537 7541 7546 7550 7554 7558 7563 7567 7571 7576 7580 7584 7588 7593 7597 7601 7605 7610 7614 7618 7622 7627 7631 7635 7640 7
311. 7660 7665 7669 7673 7678 7682 7686 7691 7695 7699 7704 7708 7712 7717 7721 7725 7730 7734 7738 7743 7747 7751 7756 7760 7764 7769 7773 7777 7782 7786 7790 7795 7799 7803 7808 7812 7816 7821 7825 7829 7834 7838 7842 7847 7851 93 0 7665 7669 7673 7678 7682 7686 7691 7695 7699 7704 7708 7712 7717 7721 7725 7730 7734 7738 7743 7747 7751 7756 7760 7764 7769 7713 AT 7782 7786 7790 7795 7799 7803 7808 7812 7816 7821 7825 7829 7834 7838 7842 7847 7851 7855 7860 7864 7868 7873 7817 7881 7886 7890 7894 7899 7903 7907 7912 7916 7920 7925 7929 7933 7938 7942 7946 7951 7955 7959 7964 7968 7972 7977 7981 7985 7990 7994 7998 8003 8007 8011 94 0 7669 7673 7678 7682 7686 7691 7695 7699 7704 7708 7712 7717 7721 7725 7730 7734 7738 7142 7747 7751 7755 7760 7764 7768 7773 7777 7781 7786 7790 7794 7799 7803 7807 7812 7816 7820 7825 7829 7833 7838 7842 7846 7851 7855 7859 7864 7868 7872 7877 7881 7885 7890 7894 7898 7903 7907 7911 7915 7920 7924 7928 7933 7937 7941 7946 7950 7954 7959 7963 8002 8006 8011 8015 95 0 7673 7678 7682 7686 7691 7695 7699 7704 7708 7712 7717 7721 7725 7729 7734 7738 7742 7747 7751 7755 7760 7764 7768 7773 7777 7781 7786 7790 7794 7799 7803 7807 7811 7816 7820 7824 7829 7833 7837 7842 7846 7850 7855 7859 7863 7868
312. 7660 7664 7669 7673 7677 7682 7686 7691 7695 7699 7704 7708 7712 26 25 7646 7651 7655 7660 7664 7669 7673 7677 7682 7686 7691 7695 7699 7704 7708 7712 7717 26 20 7651 7655 7660 7664 7669 7673 7678 7682 7686 7691 7695 7699 7704 7708 7712 7717 7721 26 15 7655 7660 7664 7669 7673 7678 7682 7686 7691 7695 7699 7704 7708 7713 7717 7721 7725 26 10 7660 7664 7669 7673 7678 7682 7686 7691 7695 7700 7704 7708 7713 7717 7721 7725 7730 26 05 7664 7669 7673 7678 7682 7686 7691 7695 7700 7704 7708 7713 7712 7721 7726 7730 7134 26 00 7669 7673 7678 7682 7686 7691 7695 7700 7704 7708 27713 7717 7721 11726 7730 7734 7738 25 95 7673 7678 7682 7687 7691 7695 7700 2704 7708 7713 7717 7721 7726 7730 7734 7739 7743 25 90 7678 7682 7687 7691 7695 7700 7704 7709 7713 7717 7722 1126 7730 1134 7739 7743 7747 25 85 7682 7687 7691 7695 7700 7704 7709 7713 7717 7722 7726 7730 7735 7739 7743 7747 7752 25 80 7687 7691 7696 7700 7704 7709 7713 7717 7722 7726 7730 17735 7739 7743 7747 7752 7756 25 75 7691 7696 7700 7704 7709 7713 7717 7722 7726 7730 7735 7739 7743 7748 7752 7756 7760 25 70 7696 7700 7704 7709 7713 7718 7722 7726 7731 27735 7139 1743 7148 7752 7756 7760 7765 25 65 7700 7705 7709 7713 7718 7722 7726 7731 7735 7739 7744 1748 31752 7756 7761 7765 7769 25 60 7705 7709 7713 7718 71722 7726 7731 7735 7739 7744 71748 11752 7756 7761 7765 7769 7773 25 55 7709 7713 7718 7722 7727 7731 7138 7740 7744 7748 7752 7757 7761 7765 7769 7774 7778 25 50 7714 7718 7722 7727 7131 7735 7740 174
313. 7671 7675 7679 7684 692 7620 7625 7629 7633 7637 7641 7646 7650 7654 7658 7662 7666 7670 7675 7679 7683 7687 691 7624 7628 7632 7636 7641 7645 7649 7653 7657 7661 7666 7670 7674 7678 7682 7686 7690 690 7627 7632 7636 7640 7644 7648 7652 7656 7661 7665 7669 7673 7677 7681 7685 7690 7694 689 7631 7635 7639 7643 7647 7652 7656 7660 7664 27668 7672 7676 7681 7685 7689 7693 7697 688 7634 7638 7643 7647 7651 7655 7659 7663 7667 7672 7676 7680 7684 7688 7692 7696 7700 687 7638 7642 7646 7650 7654 7658 7663 7667 7671 7675 7679 7683 7687 7691 7696 7700 7704 686 7641 7645 7649 7654 7658 7662 7666 7670 7674 7678 7683 7687 7691 7695 7699 7703 7707 685 7645 7649 7653 7657 7661 7665 7669 7674 7678 7682 7686 7690 7694 7698 7702 7706 7711 684 7648 7652 7656 7660 7665 7669 7673 7677 7681 7685 7689 7693 7697 7702 7706 7710 7714 683 7652 7656 7660 7664 7668 7672 7676 7680 7684 7689 7693 7697 7701 7705 7709 7713 7717 682 7655 7659 7663 7667 7671 7676 7680 7684 7688 7692 7696 7700 7704 7708 37712 7717 7721 681 7658 7663 7667 7671 7675 7679 7683 7687 7691 7695 7699 7704 7708 7712 37716 7720 71724 680 7662 7666 7670 7674 7678 7682 27687 7691 7695 7699 7703 7707 7711 7715 7719 7723 7727 7665 7669 7674 7678 7682 7686 7690 7694 7698 7702 7706 7710 7714 7718 7723 772 7731 678 7669 7673 7677 7681 7685 7689 7693 7697 7702 7706 7710 7714 7718 7722 27726 7730 7734 677 7672 7676 7680 7685 7689 7693 7697 7701 7705 7709 7713 77117 7721 7725 7729 7733 7737 676 7676 7680 7684 7688 7692 7696 77
314. 7688 7692 7697 98 0 7358 7362 7367 7371 7375 7379 7384 7388 7392 7397 7401 7405 7409 7414 7418 7422 7427 7431 7435 7440 7444 7448 7452 7457 7461 7465 7470 7474 7478 7482 7487 7491 7495 7500 7504 7508 7513 7517 7521 7525 7530 7534 7538 7543 7547 7551 7555 7560 7564 7568 7573 7577 7581 7586 7590 7594 7598 7603 7607 7611 7616 7620 7624 7628 7633 7637 7641 7646 7650 7654 7659 7663 7667 7671 7676 7680 7684 7689 7693 7697 7701 99 0 7363 7368 7372 7376 7381 7385 7389 7393 7398 7402 7406 7411 7415 7419 7423 7428 7432 7436 7441 7445 7449 7453 7458 7462 7466 7471 7475 7479 7483 7488 7492 7496 7501 7505 7509 7513 7518 7522 7526 7531 7535 7539 7543 7548 7552 7556 7561 7565 7569 7573 7578 7582 7586 7591 7595 7599 7603 7608 7612 7616 7621 7625 7629 7633 7638 7642 7646 7651 7655 7659 7663 7668 7672 7676 7681 7685 7689 7693 7698 7102 7706 100 0 7369 7373 7371 7382 7386 7390 7395 7399 7403 7407 7412 7416 7420 7424 7429 7433 7437 7442 7446 7450 7454 7459 7463 7467 7472 7476 7480 7484 7489 7493 7497 7501 7506 7510 7514 7519 7523 7527 7531 7536 7540 7544 7549 7553 7551 7561 7566 7570 7574 7578 7583 7587 7591 7596 7600 7604 7608 7613 7617 7621 7626 7630 7634 7638 7643 7647 7651 7655 7660 7664 7668 7673 7677 7681 7685 7690 7694 7698 7703 7707
315. 77 7381 7386 7390 7395 7399 7404 7408 7413 7418 7422 7427 7431 7436 7440 7445 7449 7454 7458 7463 7467 7472 7477 7481 7486 7490 7495 7499 7504 7508 7513 7517 7522 7527 7531 7536 7540 7545 7549 7554 69 0 7196 7201 7205 7210 7214 7219 7223 7228 7232 7237 7241 7246 7250 7255 7260 7264 7269 7273 7278 7282 7287 7291 7296 7300 7305 7309 7314 7318 7323 7327 7332 7337 7341 7346 7350 7355 7359 7364 7368 7373 7377 7382 7386 7391 7395 7400 7404 7409 7414 7418 7423 7427 7432 7436 7441 7445 7450 7454 7459 7463 7468 7472 7477 7482 7486 7491 7495 7500 7504 7509 7513 7518 7522 7527 7531 7536 7540 7545 7549 7554 7559 70 0 7202 7206 7211 7215 7220 7224 7229 7233 7238 7242 7247 7251 7256 7260 7265 7269 7274 7278 7283 7287 7292 7297 7301 7306 7310 7315 7319 7324 7328 7333 7337 7342 7346 7351 7355 7360 7364 7369 7373 7378 7382 7387 7392 7396 7401 7405 7410 7414 7419 7423 7428 7432 7437 7441 7446 7450 7455 7459 7464 7468 7473 7477 7482 7486 7491 7496 7500 7505 7509 7514 7518 7523 7527 7532 7536 7541 7545 7550 7554 7559 7563 71 0 7207 7212 7216 7221 7225 7230 7234 7239 7243 7248 7252 7257 7261 7266 7270 7275 7279 7284 7288 7293 7297 7302 7306 7311 7315 7320 7324 7329 7333 7338 7342 7347 7351 7356 7361 7365 7370 7374 7379 7383 7388 7392 7397 74
316. 7707 7710 7714 7717 7721 7724 7728 7731 7735 7738 7142 7745 7749 7752 7756 7759 7763 7766 7770 7773 7777 27 5 7502 7505 7509 7512 7516 7519 7523 7526 7530 7533 7537 7540 7544 7547 7551 7554 7558 7561 7565 7568 7572 7575 7579 7582 7586 7589 7593 7596 7600 7603 7607 7610 7614 7617 7621 7624 7627 7631 7634 7638 7641 7645 7648 7652 7655 7659 7662 7666 7669 7673 7676 7680 7683 7687 7690 7694 7697 7701 7704 7708 TALL 7715 7718 7722 7725 7729 7732 7736 7739 7743 7746 7749 7783 7756 7760 7763 7767 7770 7774 7777 7781 28 0 7506 7510 7513 7517 7520 7524 7527 7531 7534 7538 7541 7545 7548 7552 7555 7559 7562 7566 7569 7573 7576 7580 7583 7587 7590 7594 7597 7600 7604 7607 7611 7614 7618 7621 7625 7628 7632 7635 7639 7642 7646 7649 7653 7656 7660 7663 7667 7670 7674 7677 7681 7684 7687 7691 7694 7698 7701 7705 7708 7712 7715 7719 7722 7726 7729 7733 7736 7740 7743 7747 7750 7754 7757 7761 7764 7768 7771 7774 7718 7781 7785 28 5 7511 7514 7518 7521 7525 7528 7532 7535 7539 7542 7546 7549 7553 7556 7560 7563 7567 7570 7574 7577 7581 7584 7587 7591 7594 7598 7601 7605 7608 7612 7615 7619 7622 7626 7629 7633 7636 7640 7643 7647 7650 7653 7657 7660 7664 7667 7671 7674 7678 7681 7685 7688 7692 7695 7699 7102 7706 7709 7713 7716 7719 7723
317. 7710 7715 7719 7724 7729 7733 7738 7742 7747 7751 7756 7761 7765 7710 7774 7779 7783 7788 7793 7797 7802 7806 7811 7815 7820 7825 7829 7834 7838 7843 7847 7852 7857 7861 7866 7870 7875 7879 7884 7889 7893 7898 65 0 7537 7541 7546 7550 7555 7559 7564 7569 7573 7578 7582 7587 7591 7596 7601 7605 7610 7614 7619 7623 7628 7632 7637 7642 7646 7651 7655 7660 7664 7669 7674 7678 7683 7687 7692 7696 7701 7706 7710 7715 7719 7724 7728 7733 7737 7742 7747 4191 7756 7760 7765 7769 7774 7779 7783 7788 7792 7797 7801 7806 7811 7815 7820 7824 7829 7833 7838 7843 7847 7852 7856 7861 7865 7870 7874 7879 7884 7888 7893 7897 7902 66 0 7541 7546 7550 7555 7560 7564 7569 7573 7578 7582 7587 7591 7596 7601 7605 7610 7614 7619 7623 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7674 7678 7683 7687 7692 7696 7701 7705 7710 7715 7719 7724 7728 7733 7137 7742 7746 7751 7156 7760 7765 7769 7774 7778 7783 7787 7792 7797 7801 7806 7810 7815 7819 7824 7828 7833 7838 7842 7847 7851 7856 7860 7865 7869 7874 7879 7883 7888 7892 7897 7901 7906 67 0 7546 7551 7555 7560 7564 7569 7573 7578 7583 7587 7592 7596 7601 7605 7610 7614 7619 7623 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7678 7683 7687 7692 7696 7701 7705 7710 7714 7719 7724 7728
318. 7733 7737 7742 7746 7751 7755 7760 7764 7769 7774 7778 7783 7787 7792 7796 7801 7805 7810 7814 7819 7824 7828 7833 7837 7842 7846 7851 7855 7860 7864 7869 7874 7878 7883 7887 7892 7896 7901 7905 7910 68 0 7551 7555 7560 7564 7569 7574 7578 7583 7587 7592 7596 7601 7605 7610 7614 7619 7623 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7678 7683 7687 7692 7696 7701 7705 7710 7714 7719 7723 7728 7732 7737 7742 7746 7751 7755 7760 7764 7769 7773 7778 7782 7787 7791 7796 7801 7805 7810 7814 7819 7823 7828 7832 7837 7841 7846 7850 7855 7860 7864 7869 7873 7878 7882 7887 7891 7896 7900 7905 7909 7914 69 0 7556 7560 7565 7569 7574 7578 7583 7587 7592 7596 7601 7605 7610 7614 7619 7624 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7678 7682 7687 7692 7696 7701 7705 7710 7714 7719 7723 7728 7732 7737 7741 7746 7750 7755 7759 1764 7769 7796 7800 7805 7809 7814 7818 7823 7827 7832 7836 7841 7846 7850 7855 7859 7864 7868 7873 7877 7882 7886 7891 7895 7900 7904 7908 7914 7918 70 0 7560 7565 7569 7574 7578 7583 7587 7592 7596 7601 7606 7610 7615 7619 7624 7628 7633 7710 7714 7719 7723 7728 7732 7137 7741 7746 7750 7755 7759 7764 7768 7773 7777 7782 7786 7791 7795 7800 7804 7809 7814 7818 7823 7827 7832 7836 7841 78
319. 7734 7738 7742 7746 7750 7754 7758 7762 7766 7770 7774 7778 7782 7786 7790 7794 7798 658 7738 7742 7746 7750 7754 7758 7762 7766 7770 7774 7778 7782 7185 7789 7793 7797 7801 657 7741 7745 7749 7753 7757 7761 7765 7769 7773 7777 7781 7785 7789 7793 7797 7801 7805 656 7745 7749 7753 7757 7761 7765 7769 7772 7776 7780 7784 7788 7792 7796 7800 7804 7808 655 7748 7752 7756 7760 7764 7768 7772 7776 7780 7784 7788 7792 7796 7800 7804 7807 7811 654 7752 7756 7760 7764 7767 7771 7775 7779 7783 7787 7791 7795 7799 7803 7807 7811 7815 653 7755 7759 7763 7767 7771 7775 7779 7783 7787 7791 7795 7798 7802 7806 7810 7814 7818 652 7739 7762 7766 7770 7714 7778 7782 7786 7790 7734 7798 7802 7806 7810 7814 7818 7821 651 7762 7766 7770 7774 7778 7782 7786 7790 7793 7797 7801 7805 7809 7813 7817 7821 7825 650 7765 7769 7773 7777 7781 7785 7789 7793 7797 7801 7805 7809 7813 7816 7820 7824 7828 649 7769 7773 7777 7781 7785 7789 7792 7796 7800 7804 7808 7812 7816 7820 7824 7828 7832 648 7772 7776 7780 7784 7788 7792 7796 7800 7804 7808 7812 7815 7819 7823 7827 7831 7835 647 7776 7780 7784 7788 7791 7795 7799 7803 7807 7811 7815 7819 7823 7827 7830 7834 7838 646 7779 7783 7787 7791 7795 7799 7803 7807 7811 7814 7818 7822 7826 7830 7834 7838 7842 645 7783 7787 7791 7794 7798 7802 7806 7810 7814 7818 7822 7826 7829 7833 7837 7841 7845 644 7786 7790 7794 7798 7802 7806 7810 7813 7817 7821 7825 7829 7833 7837 7841 7844 7848 643 7790 7793 7797 7801 7805 7809 7813 7817 7821 7825 7828 7832
320. 78 25 05 7683 25 00 7687 24 95 7692 24 90 7697 24 85 7701 24 80 7706 24 75 7711 24 70 7715 24 65 7720 24 60 7724 24 55 7729 24 50 7734 24 45 7738 24 40 7743 24 35 7748 24 30 7752 24 25 7757 24 20 7762 24 15 7766 24 10 7771 24 05 7775 24 00 7780 23 95 7785 23 90 7789 23 85 7794 23 80 7799 23 75 7803 23 70 7808 23 65 7813 23 60 7817 23 55 7822 23 50 7826 23 45 7831 23 40 7836 23 35 7840 23 30 7845 23 25 7850 23 20 7854 23 15 7859 23 10 7864 23 05 7868 23 00 7873 58 0 7507 7512 7516 7521 7525 7530 7535 7539 7544 7549 7553 7558 7562 7567 7572 7576 7581 7586 7590 7595 7600 7604 7609 7613 7618 7623 7627 7632 7637 7641 7646 7650 7655 7660 7664 7669 7674 7678 7683 7687 7692 7697 7701 7706 7711 7715 7720 7724 7729 7734 7738 7143 7748 7782 7157 7761 7766 7771 7775 7780 7785 7789 7794 7799 7803 7808 7812 7817 7822 7826 7831 7836 7840 7845 7849 7854 7859 7863 7868 7873 7877 59 0 7512 7517 7521 7526 7530 7535 7540 7544 7549 7554 7558 7563 7567 7572 7577 7581 7586 7590 7595 7600 7604 7609 7614 7618 7623 7627 7632 7637 7641 7646 7651 7655 7660 7664 7669 7674 7678 7683 7687 7692 7697 7701 7706 7711 7715 7720 7724 7729 7734 7738 7743 7748 7152 7757 7761 7766 7771 7775 7780 7784 7789 7794 7798 7803 7808 7812 7817 7821 7826 7832 7835 7840 7845 7849 7854 7858 7863 7868 7872 7877 7881
321. 78 7283 7287 7292 7297 17302 7306 7311 7316 7320 753 7248 7253 7258 7262 726 7272 7277 7282 3286 7291 7296 7300 7305 7310 7314 7319 7324 752 7252 7256 27261 7266 7271 7276 27280 7285 7290 7295 7299 7304 7309 7313 7318 7323 7327 751 7255 7260 7265 7270 7275 7279 7284 7289 7294 3298 7303 7308 7312 7317 7322 7326 7331 750 7259 7264 7269 7273 7278 7283 7288 7292 7297 7302 7307 7311 7316 7321 7325 7330 7334 749 7263 7267 27272 7277 7282 7287 7291 7296 7303 7305 7310 7315 7319 7324 7329 7333 7338 748 7266 7271 27276 7281 7285 7290 7295 7300 7304 7309 7314 7318 7323 7328 7332 7337 7341 747 7270 7275 7280 7284 7289 7294 7299 7303 7308 7313 7317 7322 7327 7331 7336 7340 7345 746 7274 7278 7283 7288 7293 7297 7302 7307 7312 7316 7321 7326 7330 7335 7339 7344 7349 745 7277 7282 7287 7292 7296 7301 7306 7310 7315 7320 7325 7329 7334 7338 7343 7348 7352 744 7281 7286 7290 7295 7300 7305 7309 7314 7319 7323 7328 7333 7337 7342 7347 7351 7356 743 7285 7289 7294 7299 7304 7308 7313 7318 7322 7327 7332 7336 7341 7346 37350 7355 7359 742 7288 7293 7298 7303 7307 7312 7317 7321 7326 7331 7335 7340 7345 7349 7354 7358 7363 741 7292 7297 7301 7306 7311 7316 7320 7325 7330 7334 7339 7344 7348 7353 7357 7362 7366 740 7296 7300 7305 37310 7314 7319 7324 7329 7333 7338 7342 7347 7352 7356 7361 7365 7370 739 7299 7304 7309 7313 7318 7323 7328 7332 7337 7341 7346 7351 7355 7360 7364 7369 7374 738 7303 7308 7312 7317 7322 7326 7331 7336 7340 7345 7350 7354 7359 7363 7368 7373 7377 737
322. 7806 7810 7815 7819 7824 7828 7833 25 00 7765 7770 7774 7719 7783 7788 27792 7797 7801 7806 7810 7815 7819 7824 7828 7833 7837 24 95 7770 7774 7779 7783 7788 171792 7797 7801 7806 7810 7815 7819 7824 7828 7833 7837 7842 24 90 7774 7779 7783 7788 7792 779 7801 7806 7810 7815 7819 7824 7828 7833 7837 7842 7846 24 85 7779 7783 7788 7792 7797 7801 7806 7810 7815 7819 7824 7828 7833 7837 7841 7846 7850 24 80 7183 7788 7792 27797 7801 7806 7810 7815 7819 7824 7828 7832 7837 7841 7846 7850 7855 24 75 7788 7792 7797 7801 7806 7810 7815 7819 7824 7828 7832 7837 7841 7846 7850 7855 7859 24 70 7792 7797 7801 7806 7810 7815 7819 7824 31828 7832 7837 7841 7846 7850 7855 7859 7863 24 65 7797 7801 7806 7810 7815 7819 7824 7828 27832 7837 7841 7846 7850 7855 7859 7863 7868 24 60 7801 7806 7810 7835 7819 7824 7828 7832 7837 7841 7846 7850 7854 7859 7863 7868 7872 24 55 7806 7810 7815 7819 7824 7828 7832 7837 31841 7846 7850 7854 7859 7863 7868 7872 7876 24 50 7810 7815 7819 7824 7828 7832 7837 7841 7846 7850 7854 7859 7863 7868 7872 7876 7881 24 45 7815 7819 7824 7828 7832 7837 7841 7846 7850 7854 7859 7863 7868 7872 7876 7881 7885 24 40 7819 7824 7828 7833 7837 7841 7846 7850 7855 7859 7863 7868 7872 7876 7881 7885 7890 24 35 7824 7828 7833 7837 7841 7846 7850 7855 7859 7863 7868 7872 7876 7881 7885 7890 7894 24 30 7828 7833 7837 7841 7846 7850 7855 7859 7863 7868 7872 7876 7881 7885 7890 7894 7898 24 25 7833 7837 7842 7846 7850 7855 7859 7863 7868 7872 7876 7881 7885 7890 7
323. 780C Receiver or Agilent 10780F Remote Receiver Agilent 10780C F Operating and Service Manual 10780 90028 Agilent E1708A Remote Dynamic Receiver Agilent E1707A E1708A Operating Manual E1708 90010 Agilent E1709A Remote High Performance Receiver Agilent E1709A Operating Manual E1709 90006 The Agilent part number of a manual may be changed when the manual is updated How to Order Manuals The Agilent Part Number of this manual is given on the front title page and back inside cover Use it to order additional copies of this manual 24 Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 2 Familiarization and Initial Operation Introduction 26 Setting Up the System Electronics 29 Aligning the Optics 32 Making Measurements 33 Solving Problems 36 RE Agilent Technologies 25 2 Familiarization and Initial Operation Introduction Your laser interferometer positioning system is a set of optics electronics and electro optical products that measure distance very accurately This chapter provides basic information on how to set up a laser system to make measurements A one axis example is used for simplicity Each axis of a laser positioning system is set up aligned and operated in essentially the same way A six axis system is similar to a one axis system therefore only a single axis system will be described in this chapter Additional axe
324. 7831 7831 7835 7835 7839 7839 7843 7844 7848 7848 7852 7852 7856 7856 7860 7860 7864 7865 7869 7869 7873 7873 7877 7877 7881 7882 7886 7886 7890 7890 7894 7894 7898 7899 7903 7903 7907 7907 7911 7911 7915 7915 7919 7920 7924 7924 7928 7928 7932 7932 7936 7937 7941 7941 7945 7945 7949 7949 7953 7954 7957 7958 7962 7962 7966 7966 7970 7971 7974 7975 1979 7979 7983 7983 7987 7987 7991 7992 7995 7996 8000 8000 8004 8004 8008 8009 8012 8013 8017 8017 8021 8021 8025 8026 8029 8030 8033 8034 8038 8038 8042 8042 8046 8047 8050 8051 8055 8055 8059 8059 8063 261 13 Wavelength of Light Compensation Table52 English Low Alt Low Temp Med Humidity Temp 40 to 56 F Press 27 to 31 inches 50 Humidity Eee LLL TEMPERATURE IN DEGREES FAHRENHEIT 40 0 41 0 42 0 43 0 44 0 45 0 46 0 47 0 48 0 49 0 50 0 51 0 52 0 53 0 54 0 55 0 56 0 31 00 7029 7035 7041 7047 7053 7059 7065 7071 7077 27083 7089 7094 7100 7106 7112 7217 7123 30 95 7034 7040 7046 7052 7058 7064 7070 7076 7082 27087 7093 7099 27105 7111 7116 7122 7128 30 90 7039 7045 7051 7057 7063 7069 7075 7080 7086 7092 7098 7104 7110 7115 7121 7127 7233 30 85 7044 7050 7056 7062 7067 7073 7079 7085 7091 7097 7103 7108 71214 7120 126 7131 7137 30 80 7048 7054 7060 7066 7072 7078 7084 7090 7096 7102 7107 7113 7119 7125 7130 7136 7142 30 75 7053 7059 7065 7071 7077 7083 7089 7095 7100 7106 7112 7118 7124 7129 7135 7141 7146 30 70 7058 7064 7070 7076 7082 7088 70
325. 7836 7840 7844 7848 7852 642 7793 7797 7801 7805 7809 7813 7816 7820 7824 7828 7832 7836 7840 7843 7847 7851 7855 641 7796 7800 7804 7808 7812 7816 7820 7824 7828 7831 7835 7839 7843 7847 7851 7855 7858 640 7800 7804 7808 7812 7815 7819 7823 7827 7831 7835 7839 7843 7846 7850 7854 7858 7862 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 244 Laser and Optics User s Manual Vol BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 5 0 800 6988 799 6992 798 6996 797 7000 796 7003 795 7007 794 7011 793 7015 792 7019 791 7022 790 7026 789 7030 788 7034 787 7037 786 7041 785 7045 784 7049 783 7052 782 7056 781 7060 780 7064 779 7068 778 7071 777 7075 776 7079 775 7083 774 7086 773 7090 772 7094 771 7098 770 7101 769 7105 768 7109 767 7113 766 7117 765 7120 764 7124 763 7128 762 7132 761 7135 760 7139 759 7143 758 7147 757 7150 756 7154 755 7158 754 7162 753 7166 752 7169 751 7173 750 7177 749 7181 748 7184 747 7188 746 7192 745 7196 744 7199 743 7203 742 7207 741 7211 740 7215 739 7218 738 7222 737 7226 736 7230 735 7233 734 7237 733 7241 732 7245 731 7248 730 7252 729 7256 728 7260 727 7264 726 7267 725 7271 724 7275 723 7279 722 7282 721 7286 720 7290 Wavelength of Light Compensation Table 35 Metric Low Alt Low Temp High Humidity u Temp 5 to 13 C Press 720 to 800 mm 80 Humidity 555 6994 6998 7001 7005 7009 7013 7016 7020 7024 7028 7032 7035 7039 7043
326. 7851 7856 7860 7865 7869 7874 7879 7883 7888 Laser and Optics User s Manual Vol TEMPERATURE IN DEGREES FAHRENHEIT 62 0 7525 7529 7534 7538 7543 7548 7552 7557 7561 7566 7571 7575 7580 7584 7589 7593 7598 7603 7607 7612 7616 7621 7626 7630 7635 7639 7644 7649 7653 7658 7662 7667 7672 7676 7681 7685 7690 7694 7699 7704 7708 7713 7717 7722 7727 7731 7736 7740 7745 7750 7754 7759 7763 7768 7773 7771 7782 7786 7791 7796 7800 7887 7892 63 0 7529 7534 7539 7543 7548 7552 7557 7562 7566 7571 7575 7580 7584 7589 7594 7598 7603 7607 7612 7617 7621 7626 7630 7635 7639 7644 7649 7653 7658 7662 7667 7672 7676 7681 7685 7690 7694 7699 7704 7708 7713 7717 7722 7727 7731 7736 7740 7745 7749 7754 7759 7763 7768 7772 7777 7782 7786 7791 7795 7800 7804 7809 7814 7818 7823 7827 7832 7837 7841 7846 7850 7855 7859 7864 7869 7873 7878 7882 7887 7892 7896 64 0 7534 7539 7544 7548 7553 7557 7562 7566 7571 7576 7580 7585 7889 7594 7598 7603 7608 7612 7617 7621 7626 7630 7635 7640 7644 7649 7653 7658 7662 7667 7672 7676 7681 7685 7690 7694 7699 7704 7708 7713 7717 7722 7726 7731 7736 7740 7745 7749 7754 7759 7763 7768 7772 TA 7781 7786 7791 7795 7800 7804 7809 7813 7818 7823 7827 7832 7836 7841 7845 7850 7855 7859 7864 7868 7873 7877 7882 7887 7891
327. 7872 7876 7881 7885 7889 7894 7898 7902 7906 7911 7915 7919 7924 7928 7932 7937 7941 7945 7950 7954 7958 7963 7967 7971 7976 7980 7984 7988 7993 7997 8001 8006 8010 8014 8019 TEMPERATURE IN DEGREES FAHRENHEIT 96 0 7678 7682 7686 7691 7695 7699 7704 7708 7712 7716 7721 7125 7729 7734 7738 7742 7747 7751 7155 7760 7764 7768 7773 7777 7781 7785 7790 7794 7798 7803 7807 7811 7816 7820 7824 7829 7833 7837 7841 7846 7850 7854 7859 7863 7867 7872 7876 7880 7885 7889 7893 7897 97 0 7682 7686 7691 7695 7699 7704 7708 7712 7716 7721 7725 7729 7734 7738 7742 7747 7751 7755 7759 7764 7768 7172 7777 7781 7785 7790 7794 7798 7802 7807 7811 7815 7820 7824 7828 7833 7837 7841 7846 7850 7854 7858 7863 7867 7871 7876 7880 7884 7889 7893 7897 7901 98 0 7686 7691 7695 7699 7704 7708 7712 7716 7721 7725 7729 7734 7738 7742 7747 7751 7755 7759 7764 7768 7772 7777 7781 7785 7789 7794 7798 7802 7807 7811 7815 7820 7824 7828 7832 7837 7841 7845 7850 7854 7858 7862 7867 7871 7875 7880 7884 7888 7892 7897 7901 7905 7910 7914 7918 7923 7927 7931 7935 7940 7944 7948 7953 7957 7961 7965 7920 7974 7978 7983 7987 7991 7996 8000 8004 8008 8013 8017 8021 8026 8030 99 0 7691 7695 7699 7104 7708 7712 7716 7721 7725 7729 7734 7738 7742 7746 7751 7914 7918
328. 79 7682 7686 7689 7693 7696 7700 7703 7707 7710 7714 7717 7721 7724 7728 7731 7735 7739 7742 7746 7749 25 0 7472 7475 7479 7482 7486 7489 7493 7496 7500 7503 7507 7510 7514 7517 7521 7524 7528 7531 7535 7538 7542 7546 7549 7553 7556 7560 7563 7567 7570 7574 7577 7581 7584 7588 7591 7595 7598 7602 7605 7609 7612 7616 7619 7623 7626 76306 7633 7637 7640 7644 7647 7651 7655 7658 7662 7665 7669 7672 7676 7679 7683 7686 7690 7693 7697 7700 7704 7707 7711 7714 7718 7721 7725 7728 7732 7735 7739 7742 7746 7749 7753 25 5 7476 7480 7483 7487 7490 7494 7497 7501 7504 7508 7511 7515 7518 7522 7525 7529 7532 7536 7539 7543 7546 7550 7553 7557 7560 7564 7567 7571 7574 7578 7581 7585 7588 7592 7595 7599 7602 7606 7609 7613 7616 7620 7623 7627 7630 7634 7637 7641 7644 7648 7652 7655 7659 7662 7666 7669 7673 7676 7680 7683 7687 7690 7694 7697 7701 7704 7708 7711 7715 7718 7722 7725 7729 7732 7736 7739 7743 7746 7750 7753 7757 26 0 7480 7484 7487 7491 7494 7498 7501 7505 7508 7512 7515 7519 7522 7526 7529 7533 1536 7540 7543 7547 7550 7554 7557 7561 7564 7568 7571 7575 7578 7582 7585 7589 7592 7596 7599 7603 7606 7610 7613 7617 7620 7624 7627 7631 7634 7638 7642 7645 7649 7652 7656 7659 7663 7666 7670 7673 7677 7680 7684 7687 7691 769
329. 8 7032 7036 7039 7043 7047 7051 7054 7058 7062 7066 7069 7073 7071 7081 7085 7088 7092 7096 7100 7103 7107 7ill 7115 7118 7122 7126 7130 7133 7137 7141 7145 7148 7152 7156 7160 7163 7167 7171 7175 7178 7182 7186 7190 7193 7197 7201 7205 7208 7212 7216 7220 7223 7227 7231 7235 7239 7242 7246 7250 7254 7257 7261 7265 7269 7272 7276 7280 7284 7287 7291 7295 7299 6 5 7004 7007 7011 7015 7019 7022 7026 7030 7034 7037 7041 7045 7049 7052 7056 7060 7064 7067 7071 7075 7079 7082 7086 7090 7094 7097 7101 7105 7109 7112 7116 7120 7124 7127 7131 7135 7139 7142 7146 7150 7154 7157 7161 7165 7169 7172 7176 7180 7184 7187 7191 73195 7199 7202 7206 7210 7214 7217 7221 7225 7229 7232 7236 7240 7244 7247 7251 7255 7259 7262 7266 7270 7274 7277 7281 7285 7289 7292 7296 7300 7304 Laser and Optics User s Manual Vol 7 0 7009 7013 7016 7020 7024 7028 7031 7035 7039 7043 7046 7050 7054 7058 7061 7065 7069 7073 7076 7080 7084 7088 7091 7095 7099 7103 7106 7110 7114 7118 7121 7125 7129 7133 7136 7140 7144 7147 7181 7155 7159 7162 7166 7170 7174 7177 7181 7185 7189 7192 7196 7200 7204 7207 7211 7215 7219 7222 7226 7230 7234 7237 7241 7245 7249 7252 7256 7260 7263 7267 7271 7275 7278 7282 7286 7290 7293 7297 7301 7305 7308 TEMPERATURE IN DEGREES CELSIUS
330. 8 7942 7947 7951 7955 7959 7964 7968 7972 7976 7981 7985 7989 7994 7998 8002 8006 8011 8015 8019 8023 8028 8032 8036 8040 8045 103 0 7708 7712 7716 7721 7725 7729 7733 7738 7742 7746 7751 7755 7759 7763 7768 7772 7776 7780 7785 7789 7793 7797 7802 7806 7810 7814 7819 7823 7827 7831 7836 7840 7844 7848 7853 7857 7861 7865 7870 7874 7878 7882 7887 7891 7895 7899 7904 7908 7912 7916 7921 7925 7929 7933 7938 7942 7946 7951 7955 7959 7963 7968 7972 7976 7980 7985 7989 7993 7997 8002 8006 8010 8014 8019 8023 8027 8031 8036 8040 8044 8048 104 0 7712 7716 7721 7725 7729 7733 7738 7742 7746 7750 7755 7759 7763 7767 7772 7776 7780 7784 7789 7793 7797 7801 7806 7810 7814 7818 7823 7827 7831 7835 7840 7844 7848 7852 7857 7861 7865 105 0 7717 7721 7725 7729 7733 7738 7742 7746 7750 7755 7759 7763 7767 77172 7776 7780 7784 7789 7793 7797 7801 7806 7810 7814 7818 7823 7821 7831 7835 7839 7844 7848 7852 7856 7861 7865 7869 7873 7878 7882 7886 7890 7895 7899 7903 7907 7912 7916 7920 7929 7933 106 0 107 0 7721 7725 7725 7729 7729 7734 7733 71738 7738 7742 7742 7746 77146 7750 7750 7755 7755 7759 7759 7763 7763 7767 7167 7772 7712 1116 7776 7780 7780 7784 7784 7788 7789 7793 7793 7797 7197 7801 7801 7805 7805 7810 7810 7814 7814 7818 7818 7822 7822 7826 7827
331. 8 7342 791 7274 7278 7283 7287 7292 7296 7301 7306 7310 7315 7319 7324 7328 7333 7337 7341 7346 790 7277 317282 7286 7291 7295 7300 7304 7309 7313 7318 7322 7327 7331 7336 7340 7345 7349 789 7280 7285 7290 7294 7299 7303 7308 7312 7317 7321 7326 7330 7335 7339 7344 7348 7353 788 7284 7288 7293 7298 7302 7307 7311 7316 7320 7325 7329 7334 7338 7343 7347 7352 7356 787 7287 7292 7297 7301 7306 7310 7315 7319 7324 7328 7333 7337 7342 7346 7350 7355 7359 786 7291 7295 7300 7304 7309 7314 7318 7323 7327 7332 7336 7341 7345 7349 7354 7358 7363 785 7294 7299 7303 7308 7312 7317 7321 7326 7330 7335 7339 7344 7348 7353 7357 7362 7366 784 7298 7302 7307 7311 7316 7320 7325 7329 7334 7338 7343 7347 7352 7356 7361 7365 7369 783 7301 7306 7310 7315 7319 7324 7328 7333 7337 7342 7346 7351 7355 7360 7364 7368 7373 782 7305 7309 7314 7318 7323 7327 7332 7336 7341 7345 27350 7354 7358 7363 7367 7372 7376 781 7308 7313 7317 7322 7326 7331 7335 7340 7344 7349 7353 7357 7362 7366 7371 7375 7379 780 7312 7316 27321 7325 7330 7334 7339 27343 7348 27352 7356 7361 7365 7370 7374 7378 7383 779 7315 7320 7324 271329 7333 7338 7342 7346 1351 7355 7360 7364 7369 7373 7377 7382 7386 778 7318 7323 7327 7332 7336 7341 7345 7350 7354 7359 7363 7368 7372 7376 7381 7385 7390 777 7322 7326 7331 7335 7340 7344 7349 7353 7358 7362 7367 7371 7375 7380 7384 7389 7393 776 7325 7330 7334 7339 7343 7348 7352 7357 7361 7366 7370 7374 7379 7383 7388 7392 7396 775 7329 7333 7338 7342 7347 7351 7356 7360
332. 8 7522 7527 7531 7535 7539 7543 7547 7551 7555 7560 7564 7568 724 7505 7509 7513 7517 7522 7526 7530 7534 27538 7542 7547 27551 7555 7559 7563 7567 7571 723 7508 7512 7517 27521 7525 7529 7533 7538 7542 7546 7550 7554 7558 7562 7566 7570 7574 722 7512 7516 7520 7524 7528 7533 7537 7541 7545 7549 7553 7557 7562 7566 7570 7574 7578 721 7515 7519 7524 7528 7532 27536 7540 7544 7548 7553 7557 7561 7565 7569 7573 7577 7581 720 7519 7523 7527 7531 7535 27539 7544 7548 7552 7556 7560 7564 7568 7572 7576 1581 7585 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 232 Laser and Optics User s Manual Vol 720 719 718 717 716 715 714 713 712 711 710 709 708 707 706 705 704 703 702 701 700 699 698 697 696 695 694 693 692 691 690 689 688 687 686 685 684 683 682 681 680 679 678 677 676 675 674 673 672 671 670 669 668 667 666 665 664 663 662 661 660 659 658 657 656 655 654 653 652 651 650 649 648 647 646 645 644 643 642 641 640 BAROMETRIC PRESSURE IN MILLIMETERS OF MERCURY 5 0 7288 7291 7295 7299 7303 7306 7310 7314 7316 7321 7325 7329 17333 7337 7340 7344 7348 7352 7355 7359 7363 7367 7370 7374 7378 7382 7386 7389 7393 7397 7401 7404 7408 7412 7416 7419 7423 7427 7431 7435 7438 7442 7446 7450 7453 7457 7461 7465 7468 7472 7476 7480 7484 7487 7491 7495 7499 7502 7506 7510 7514 7517 7521 7525 7529 7533 7536 7540 7544 7548 7
333. 81 7386 7391 30 00 7313 7318 7324 7329 7334 7339 7344 27350 7355 7360 7365 7370 7375 7380 7386 7391 7396 29 95 7318 7323 7328 7333 7339 7344 7349 7354 7359 7364 7370 7375 7380 7385 7390 7395 7400 29 90 7322 7327 7333 27338 27343 7348 7353 7358 7364 7369 7374 7379 7384 7389 7394 7399 7404 29 85 7327 7332 7337 7342 7347 7353 7358 7363 7368 7373 7378 7383 7389 7394 7399 7404 7409 29 80 7331 7336 7342 7347 7352 7357 7362 7367 7372 7378 7383 7388 7393 7398 7403 7408 7413 29 75 7336 7341 7346 27351 7356 7361 7367 7372 7377 7382 7387 7392 7397 7402 7407 7413 7418 29 70 7340 7345 7350 7356 7361 7366 7371 7376 7381 7386 7392 7397 7402 7407 7412 7417 71422 29 65 7345 7350 7355 7360 7365 7370 7376 7381 7386 7391 7396 7401 7406 7411 7416 7421 7426 29 60 7349 7354 7359 7365 7370 7375 7380 7385 7390 7395 7400 7405 7410 7416 7421 2426 7431 29 55 7354 7359 7364 7369 7374 7379 7384 7389 7395 7400 7405 7410 7415 7420 7425 7430 7435 29 50 7358 7363 7368 7373 7379 7384 7389 7394 7399 7404 7409 7414 7419 7424 7429 7434 7439 29 45 7363 7368 7373 7378 7383 7388 7393 7398 7403 7409 7414 7419 7424 7429 7434 7439 7444 29 40 7367 7372 7377 7382 7388 7393 7398 7403 7408 7413 7418 7423 7428 7433 7438 7443 7448 29 35 7371 7377 7382 7387 7392 7397 7402 7407 7412 7417 7422 7427 7432 7437 7442 7447 7452 29 30 7376 7381 7386 7391 7396 7402 7407 7412 7417 7422 7427 7432 7437 7442 7447 7452 7457 29 25 7380 7386 7391 27396 7401 7406 7411 7416 7421 7426 7431 7436 7441 7446 7451 7456 7461 29 20 73
334. 815 7820 7824 7828 7832 7837 7841 7845 7849 7853 7858 7862 7866 7870 7875 7879 7883 7887 7891 7896 7900 7904 7908 7913 7917 7921 3 9 269 13 Wavelength of Light Compensation Table 60 English Low Alt Low Temp High Humidity Temp 40 to 56 F Press 27 to 31 inches 80 Humidity MmsucC cl a eee TEMPERATURE IN DEGREES FAHRENHEIT 40 0 41 0 42 0 43 0 44 0 45 0 46 0 47 0 48 0 49 0 50 0 51 0 52 0 53 0 54 0 55 0 56 0 31 00 7030 7036 7043 7049 7055 7061 7067 7072 7078 7084 7090 7096 7102 7108 7114 7119 7125 30 95 7035 7041 7047 7053 7059 7065 7071 7077 7083 7089 7095 7101 7107 7112 7118 7124 7130 30 90 7040 7046 7052 7058 7064 7070 7076 7082 7088 7094 7100 7105 7111 7117 7123 7129 27134 30 85 7045 7051 7057 7063 7069 7075 7081 7087 7093 7098 7104 7110 7116 7122 7128 7133 7139 30 80 7050 7056 7062 7068 7074 7080 7085 7091 7097 7103 7109 7115 7121 7126 7132 7138 7144 30 75 7054 7060 7066 7072 7078 37084 7090 7096 7102 7108 7114 7120 7125 7131 7137 7143 7148 30 70 7059 7065 7071 7077 7083 7089 7095 7101 7107 7113 7118 7124 7130 7136 7142 7147 7153 30 65 7064 7070 7076 7082 7088 7094 7100 7106 7111 7117 7123 7129 7135 7140 7146 7152 7158 30 60 7069 7075 7081 7087 7093 7099 7104 7110 7116 7122 7128 7134 7139 7145 7151 7157 7162 30 55 7074 7080 7086 7091 7097 7103 7109 7115 7121 7127 7133 7138 7144 7150 7156 7161 7167 30 50 7078 7084 7090 7096 7102 7108 7114 7120 7126 7131 7137 7143 7149 7155 7160 7166 7172 30 45
335. 84 7289 7294 7300 7216 7222 7228 7233 7239 7244 7250 7255 27261 7266 72172 7277 7283 7288 7294 7299 7304 29 00 7221 7227 7232 7238 317244 7249 7255 7260 7266 7271 7211 7282 7288 7293 7298 7304 7309 28 95 7226 7232 27231 7243 7248 7254 7259 7265 7270 7276 7281 7287 7292 7298 7303 7308 7314 28 90 7231 7236 7242 7247 7253 7259 7264 7270 37275 7281 37286 7291 7291 7302 7308 7313 7318 28 85 7235 7241 7247 7252 7258 7263 7269 7274 7280 7285 7291 7296 7302 7307 7312 7318 7323 28 80 7240 7246 27251 7257 7263 7268 7274 7279 7285 7290 7295 7301 7306 7312 7317 7322 7328 28 75 7245 7251 7256 7262 7267 7273 7278 7284 7289 7295 7300 7306 7311 7316 7322 7327 7332 28 70 7250 7255 7261 7267 7272 7278 7283 7289 7294 7299 7305 7310 7316 7321 7326 7332 7337 28 65 7255 7260 7266 7271 7277 7282 7288 7293 7299 37304 7310 7315 7320 7326 7331 7336 7342 28 60 7259 7265 7271 7276 7282 7287 7293 7298 7303 7309 7314 7320 7325 7330 7336 7341 7346 28 55 7264 7270 7275 7281 7286 7292 7297 7303 7308 7314 7319 7324 7330 7335 7340 7346 7351 28 50 7269 7275 7280 7286 7291 7297 7302 7307 7313 7318 7324 7329 7334 7340 7345 7350 7356 28 45 7274 7279 7285 7290 7296 7301 7307 7312 7318 7323 7328 7334 7339 7344 7350 7355 7360 28 40 7279 7284 7290 7295 7301 7306 7312 7317 7322 7328 31333 7338 7344 7349 7354 7360 7365 28 35 7283 7289 7294 7300 7305 7311 7316 7322 7327 7332 27338 7343 7348 7354 7359 7364 7369 28 30 7288 7294 7299 7305 7310 7316 7321 7326 7332 7337 7342 7348 7353 7358 7364 7369 7374 28
336. 85 7390 7395 7400 7405 7410 7415 7421 7426 7431 7436 7441 7446 7451 7456 7461 7465 29 15 7389 7395 7400 7405 7410 7415 7420 7425 7430 7435 7440 7445 7450 7455 7460 7465 7470 29 10 7394 7399 7404 7409 7414 7419 7424 7429 7434 7439 7444 7449 7454 7459 7464 7469 7474 29 05 7398 7404 7409 7414 27419 7424 7429 7434 7439 7444 7449 7454 7459 7464 7469 7474 7479 29 00 7403 7408 7413 7418 7423 7428 7433 7438 7443 7448 7453 7458 7463 7468 7473 7478 7483 28 95 7407 7412 7418 7423 7428 7433 7438 7443 7448 7453 7458 7463 7468 7472 7477 7482 7487 28 90 7412 7417 7422 7427 7432 27437 7442 7447 7452 7457 7462 7467 7472 7477 7482 7487 7492 28 85 7416 7421 7426 7432 7437 7442 7447 7452 7456 7461 7466 7471 7476 7481 7486 7491 7496 28 80 7421 7426 7431 7436 7441 7446 7451 7456 7461 7466 7471 7476 7481 7486 7491 7495 7500 28 75 7425 7430 7435 7440 7445 7450 7455 7460 7465 7470 7475 7480 7485 7490 7495 7500 7505 28 70 7430 7435 7440 7445 7450 7455 7460 7465 7470 7475 7480 7485 7489 7494 7499 7504 7509 28 65 7434 7439 7444 7449 7454 7459 7464 7469 7474 7479 7484 7489 7494 7499 7504 7509 7513 28 60 7439 7444 7449 7454 7459 7464 7469 7474 7479 7484 7488 7493 7498 7503 7508 7513 7518 28 55 7443 7448 7453 7458 7463 7468 7473 7478 7483 7488 7493 7498 7503 7508 7512 7517 7522 28 50 7448 7453 7458 7463 7468 27473 7478 7483 7487 7492 7497 7502 7507 7512 27517 7522 7526 28 45 7452 7457 7462 7467 7472 7477 7482 7487 7492 7497 7502 7507 7511 7516 7521 7526 7531 28 40 7457 7462 7467 7472 7477 7
337. 894 7898 7903 24 20 7837 7842 7846 7850 7855 7859 7863 7868 7872 7877 7881 7885 7890 7894 7898 7903 7907 24 15 7842 7846 7850 7855 7859 7864 7868 7872 7877 7881 7885 7890 7894 7898 7903 7907 7911 24 10 7846 7851 7855 7859 7864 7868 7872 7877 7881 7885 7890 7894 7898 7903 7907 7911 7916 24 05 7851 7855 7859 7864 7868 7872 7877 7881 7885 7890 7894 7898 7903 7907 7911 7916 7920 24 00 7855 7860 7864 7868 7873 7877 7881 7886 7890 7894 7899 7903 7907 7911 7916 7920 7924 23 95 7860 7864 7868 7873 7877 7881 7886 7890 7894 7899 7903 7907 7912 7916 7920 7924 7929 23 90 7864 7869 7873 7877 7881 7886 7890 7894 7899 7903 7907 7912 7916 7920 7925 7929 7933 23 85 7869 7873 7877 7882 7886 7890 7895 7899 7903 7907 7912 7916 7920 7925 7929 7933 7937 23 80 7873 7877 7882 7886 7890 7895 7899 7903 7908 7912 7916 7920 7925 7929 7933 7938 7942 23 75 7878 7882 7886 7891 7895 7899 7903 7908 7912 7916 7921 7925 7929 7933 7938 7942 7946 23 70 7882 7886 7891 27895 7899 7904 7908 7912 7916 7921 7925 7929 7933 7938 7942 7946 7952 23 65 7887 7891 7895 7899 7904 7908 7912 7917 7921 7925 7929 7934 7938 7942 7946 7951 7955 23 60 7891 7895 7900 7904 7908 7912 7917 7921 7925 7930 7934 7938 7942 7947 7951 7955 7959 23 55 7896 7900 7904 7908 7913 7917 7921 7925 7930 7934 7938 7942 7947 7951 7955 7959 7964 23 50 7900 7904 7909 7913 7917 7921 7926 7930 7934 7938 7943 7947 7951 7955 7960 7964 7968 23 45 7905 7909 7913 7917 7922 7926 7930 7934 7939 7943 7947 7951 7955 7960 7964 7968 7972 23 40 7909 7
338. 9 Figure 61 Laser System Configuration for an Integrated Circuit Wafer Stepper 200 Figure 62 Worst case System Accuracy with and without Atmospheric Compensation for the Wafer Stepper example 204 Figure 63 Worst case System Accuracy with Atmospheric Compensation for the Wafer Stepper example 205 Figure 64 Worst case System Long term Repeatability with and without Atmospheric Compensation for the Wafer Stepper example 206 Figure 65 Worst case System Long term Repeatability with Atmospheric Compensation for the Wafer Stepper example 207 Figure 66 Relative effect of errors in atmospheric and material temperature 209 Figure 67 Air sensor orientation Agilent 10751D shown 212 Figure 68 Equal path length correction 217 Figure 69 Positioning of measurement axis to minimize Abb error 221 Figure 70 XY Stage measurement with Agilent 10706A Plane Mirror Interferometer 222 Figure 71 Degrees of freedom for X Axis 293 Laser and Optics User s Manual Vol Tables Table 1 Table 2 Table 3 Table 4 Table 5 Table 6 Table 7 Table 8 Table 9 Table 10 Table 11 Table 12 Table 13 Table 14 Table 15 Table 16 Table 17 Table 18 Table 19 Table 20 Table 21 Table 22 Table 23 Table 24 Table 25 Table 26 Table 27 Table 28 Tables Laser Head and Receiver Manuals 23 Equipment choices 41 Measurement Optics Summary 107 Interferometer Resolutions 110 NGI
339. 9 7053 7056 7060 7064 7068 7071 7075 7079 7083 7086 7090 7094 7097 7101 7105 7109 7112 7116 7120 7123 7127 7131 7135 7138 7142 7146 7150 7153 7157 7161 7164 7168 7172 7176 7179 7183 7187 7190 7194 7198 7202 7205 7209 7213 7217 7220 7224 7228 7231 7235 7239 7243 7246 7250 7254 7257 7261 7265 7269 7272 7216 7280 7284 7287 7291 7295 7298 7302 7306 7310 7313 7317 7321 7324 9 0 7032 7036 7040 7043 7047 7051 7054 7058 7062 7066 7069 7073 7077 7080 7084 7088 7092 7095 7099 7103 7106 7110 7114 7118 7121 7125 7129 7132 7136 7140 7144 7147 7151 7155 7158 7162 7166 7170 7173 7177 7181 7184 7188 7192 7196 7199 7203 7207 7210 7214 7218 7222 7225 7229 7233 7236 7240 7244 7248 7251 7255 7259 7262 7266 7270 7274 7277 7281 7285 7288 7292 7296 7300 7303 7307 7311 7314 7318 7322 7326 7329 9 5 7037 7041 7045 7049 7052 7056 7060 7063 7067 7071 7075 7078 7082 7086 7089 7093 7097 7101 7104 7108 7112 7115 7119 7123 7126 7130 7134 7138 7141 7145 7149 7152 7156 7160 7164 7167 7171 7175 7178 7182 7186 7190 7193 7197 7201 7204 7208 7212 7216 7219 7223 7227 7230 7234 7238 7241 7245 7249 7253 7256 7260 7264 7267 7271 7275 7279 7282 7286 7290 7293 7297 7301 7305 7308 7312 7316 7319 7323 7327 7330 7334 10 0 7043 7047 7050 7054 7058 7061 7065 7069 7072
340. 9 7453 7458 7462 714 7393 7397 7402 7407 7411 7416 7420 7425 7429 7434 7439 7443 7448 7452 7457 7461 7466 713 7396 7401 7406 7410 7415 7419 7424 7429 7433 7438 7442 7447 7451 7456 7460 7465 7469 712 7400 7405 7409 7414 7418 7423 7428 7432 7437 7441 7446 7450 7455 7459 7464 7468 7473 711 7404 7408 7413 7417 7422 7427 7431 7436 7440 7445 7449 7454 7458 7463 7467 7472 7476 710 7407 7412 27416 7421 7426 7430 7435 7439 7444 7448 7453 7457 7462 7466 7471 7475 7480 709 7411 7416 7420 7425 7429 7434 7438 7443 27447 7452 7457 7461 7466 7470 7474 7479 7483 708 7415 7419 7424 7428 7433 7437 7442 7447 7451 7456 7460 7465 7469 7474 7478 7482 7487 707 7418 7423 7427 7432 7437 7441 7446 7450 7455 7459 7464 7468 7473 7477 7482 7486 7490 706 7422 7426 7431 7436 7440 7445 7449 7454 7458 7463 7467 7472 7476 7481 7485 7490 7494 705 7426 7430 7435 7439 7444 7448 7453 7457 7462 7466 7471 7475 7480 7484 7489 7493 7498 704 7429 7434 7438 7443 7447 7452 7457 7461 7466 27470 7474 7479 7483 7488 7492 7497 7501 703 7433 7437 7442 27447 7451 7456 7460 7465 7469 7474 7478 7483 7487 7491 7496 7500 7505 702 7436 7441 7446 7450 7455 7459 7464 7468 7473 7477 7482 7486 7491 7495 7499 7504 7508 701 7440 7445 7449 7454 7458 7463 7467 7472 7476 7481 7485 7490 7494 7499 7503 7507 7512 700 7444 7448 7453 7457 7462 27466 7471 7475 7480 7484 7489 7493 7498 7502 7507 7511 7515 699 7447 7452 7457 7461 7466 7470 7475 7479 7484 7488 71492 7497 7501 7506 7510 7515 7519 698 7451 7456 7460 7465 7469 7474
341. 9 7744 7748 7753 7757 7762 7766 7770 7775 7779 7784 7788 7792 7797 7801 25 30 7735 7739 7744 7748 7753 7757 7762 7766 7770 7775 7779 7784 7788 7792 7797 7801 7805 25 25 7740 7744 7748 7753 7757 7762 7766 7770 7775 7779 7784 7788 7792 7797 7801 7805 7810 25 20 7744 7748 7753 7757 7762 7766 7770 7775 7779 7784 7788 7792 7797 7801 7805 7810 7814 25 15 7749 7753 7757 7762 7766 7771 7775 7779 7784 7788 7792 7797 7801 7805 7810 7814 7818 25 10 7753 7757 7762 7766 7771 7775 7779 7784 7788 7792 7797 7801 7805 7810 7814 7818 7823 7771 7715 7779 7784 7788 7793 7797 7801 7806 7810 7814 7818 7823 7827 25 00 7762 7766 7771 27775 7780 7784 7788 7793 7797 7801 7806 7810 7814 7819 7823 7827 7831 24 95 7766 7771 7775 7780 7784 7788 7793 7797 7801 7806 7810 7814 7819 7823 7827 7832 7836 24 90 7771 7775 7780 7784 7788 7793 7797 7801 7806 7810 7814 7819 7823 7827 7832 7836 7840 24 85 7775 7780 7784 7789 7793 7797 27802 7806 7810 7815 7819 7823 7827 7832 7836 7840 7845 24 80 7780 7784 7789 7793 7797 7802 7806 7810 7815 7819 7823 7828 7832 7836 7840 7845 7849 24 75 7784 7789 7793 7797 7802 7806 7810 7815 7819 7823 7828 7832 7836 7840 7845 7849 7853 24 70 7789 7793 7798 27802 7806 7811 7815 7819 7823 7828 7832 7836 7841 7845 7849 7853 7858 24 65 7793 7798 7802 7806 7811 7815 7819 7824 7828 7832 7836 7841 7845 7849 7853 7858 7862 24 60 7798 7802 7807 7811 7815 7819 7824 7828 7832 7837 7841 7845 7849 7854 7858 7862 7866 24 55 7802 7807 7811 7815 7820 7824 7828 7832 7837 7841 7845
342. 913 7918 7922 7926 7930 7934 7939 7943 7947 7951 7956 7960 7964 7968 7972 7977 23 35 7914 7918 7922 7926 7930 7935 7939 7943 7947 1952 7956 7960 7964 7968 7973 7977 7981 23 30 7918 7922 7927 7931 7935 7939 7943 7948 7952 7956 7960 7964 7969 7973 7977 7981 7985 23 25 7923 7927 7931 7935 7939 7944 7948 7952 7956 7960 7965 7969 7973 7977 7981 7986 7990 23 20 7927 7931 7935 7940 7944 7948 7952 7956 7961 7965 7969 7973 7977 7982 7986 7990 7994 23 15 7932 7936 7940 7944 7948 7952 7957 7961 7965 7969 7973 7978 7982 7986 7990 7994 7998 23 10 7936 7940 7944 7949 7953 7957 7961 7965 7969 7974 7978 7982 7986 7990 7994 7999 8003 23 05 7940 7945 7949 7953 7957 7961 7966 7970 7974 7978 7982 7986 7991 7995 7999 8003 8007 23 00 7945 7949 7953 7958 7962 7966 7970 7974 7978 7982 7987 7991 7995 7999 8003 8007 8012 BAROMETRIC PRESSURE IN INCHES OF MERCURY 276 Laser and Optics User s Manual Vol 91 0 27 00 7668 26 95 7672 26 90 7677 26 85 7681 26 80 7685 26 75 7690 26 70 7694 26 65 7698 26 60 7703 26 55 7707 26 50 7711 26 45 7716 26 40 7720 26 35 7724 26 30 7729 26 25 7733 26 20 7737 26 15 7742 26 10 7746 26 05 7750 26 00 7755 25 95 7759 25 90 7763 25 85 7768 25 80 7772 25 75 7777 25 70 7781 25 65 7785 25 60 7790 25 55 7794 25 50 7798 25 45 7803 25 40 7807 25 35 781 25 30 7816 25 25 7820 25 20 7824 25 15 7829 25 10 7833 7837 25 00 7842 24 95 784 24 90 7850 24 85 7855 24 80 7859 24 75 7863 24 70 7868 24 65 7872 24 60 787
343. 94 7911 7927 7944 7960 7977 7993 8010 8026 8043 8059 8076 8092 8109 8126 8142 8159 8175 8192 8208 8225 8241 8258 8274 8291 8307 8324 8340 8357 8373 253 13 Wavelength of Light Compensation Table44 English Low Alt Low Temp Low Humidity Temp 40 to 56 F Press 27 to 31 inches 20 Humidity TEMPERATURE IN DEGREES FAHRENHEIT 40 0 41 0 42 0 43 0 44 0 45 0 46 0 47 0 48 0 49 0 50 0 51 0 52 0 53 0 54 0 55 0 56 0 31 00 7028 7034 7040 7046 7052 7058 7064 7070 7075 7081 7087 7093 7098 7104 7110 7116 7121 30 95 7033 7039 7045 7051 7057 7063 7068 7074 7080 7086 7092 7097 7103 7109 7115 7120 7126 30 90 7038 7044 7050 7056 7062 7067 7073 7079 7085 7091 7096 7102 7108 7114 7119 7125 7131 30 85 7042 7048 7054 7060 7066 7072 7078 7084 7090 7095 7101 7107 7113 7118 7124 7130 7135 30 80 7047 7053 7059 7065 7071 27077 7083 7088 7094 7100 7106 7111 7117 7123 7129 7134 7140 30 75 7052 7058 7064 7070 7076 7082 7087 7093 7099 7105 7110 7116 7122 7128 7133 7139 7144 30 70 7057 7063 7069 7075 7080 7086 7092 7098 7104 7109 7115 7121 7127 7132 7138 27144 7149 30 65 7062 7068 7073 7079 7085 7091 7097 7103 7108 7114 7120 7126 7131 7137 7143 7148 7154 30 60 7066 7072 7078 7084 7090 7096 7102 7107 7113 7119 7125 7130 7136 7142 7147 7153 7158 30 55 7071 7077 7083 7089 7095 7101 7106 7112 7118 7124 7129 7135 7141 7146 7152 7157 7163 30 50 7076 7082 7088 7094 7099 7105 7111 7117 7123 7128 7134 7140 7145 7151 7157 7162 7168 30 45 7081 7087 7
344. 94 7099 7105 71211 7117 7123 37128 7134 7140 7148 7151 30 65 7063 7069 7075 7081 7087 7092 7098 7104 7110 7116 7121 7127 7133 7139 7144 7150 7156 30 60 7068 7074 7079 7085 7091 7097 7103 7109 7115 7120 7126 7132 7138 7143 7149 7155 7160 30 55 7072 7078 7084 7090 7096 7102 7108 7114 711 7125 7132 7137 7142 7148 7154 7159 7165 30 50 7077 7083 7089 7095 7101 7107 7112 7118 7124 7130 7136 7141 7147 7153 7158 7164 7270 30 45 7082 7088 7094 7100 7106 72111 7117 7123 7129 7135 7140 7146 7152 7157 7163 7169 37 34 30 40 7087 7093 7099 7104 7110 7216 7122 7128 7134 7139 7145 7151 7156 7162 7168 7173 7179 30 35 7092 7097 7103 7109 7115 72121 7127 7132 7138 7144 7150 7155 7162 7167 7172 7178 7184 30 30 7096 7102 7108 7114 7120 7126 7131 7137 7143 7149 7154 7160 7166 7171 7177 7183 7188 30 25 7101 7107 7113 7119 7125 7130 7136 7142 7148 7 53 7159 7165 7170 7176 7182 7187 7193 30 20 7106 7112 7118 7124 7129 7135 7141 7147 7152 7158 7164 7169 7175 7181 7186 7192 7198 30 15 7111 71 7 7122 7128 7134 7140 7146 7151 7157 7163 7169 7174 7180 7185 7191 7197 7202 30 10 7116 7121 7127 7133 7139 7145 7150 7156 7162 7168 7173 7179 7184 7190 7196 7201 7207 30 05 7120 7126 7132 7138 7144 7149 7155 7161 7167 7172 7178 7184 7189 7195 7200 7206 7211 30 00 7125 7131 7137 7143 7148 7154 7160 7166 7171 7177 7183 7188 7194 7198 7205 721 7216 29 95 7130 7136 7142 7147 7153 7159 7165 7170 7176 7182 7187 7193 7199 7204 7210 7215 7221 29 90 7135 7141 7146 7152 7158 7164 7169 7175 7181 7186 719
345. 957 7961 7965 7969 7973 7976 7980 7984 7988 7992 7996 23 00 7938 7942 7946 7950 7954 7958 7962 7965 7969 7973 7977 7981 7985 7988 7992 7996 8000 BAROMETRIC PRESSURE IN INCHES OF MERCURY 260 Laser and Optics User s Manual Vol Table 51 Wavelength of Light Compensation English High Alt High Mid Temp Low Humidity l Temp 91 to 107 F Press 23 to 27 inches 20 Humidity 13 SS aaa a a a BAROMETRIC PRESSURE IN INCHES OF MERCURY 91 0 27 00 7656 26 95 7660 26 90 7664 26 85 7669 26 80 7673 26 75 7678 26 70 7682 26 65 7686 26 60 7691 26 55 7695 26 50 7699 26 45 7704 26 40 7708 26 35 7712 26 30 7717 26 25 7721 26 20 7725 26 15 7730 26 10 7734 26 05 7738 26 00 7743 25 95 7747 25 90 7751 25 85 7756 25 80 7760 25 75 7764 25 70 7769 25 65 7773 25 60 7778 25 55 7782 25 50 7786 25 45 7791 25 40 7795 25 35 7799 25 30 7804 5 25 7808 25 20 7812 5 15 7817 25 10 7821 25 05 7825 25 00 7830 24 95 7834 24 90 7838 24 85 7843 24 80 7847 24 75 7851 24 70 7856 24 65 7860 24 60 7865 24 55 7869 24 50 7873 24 45 7878 24 40 7882 24 35 7886 24 30 7891 24 25 7895 24 20 7899 24 15 7904 24 10 7908 24 05 7912 24 00 7917 23 95 7921 23 90 7925 23 85 7930 23 80 7934 23 75 7938 23 70 7943 23 65 7947 23 60 7951 23 55 7956 23 50 7960 23 45 7965 23 40 7969 23 35 7973 23 30 7978 23 25 7982 23 20 7986 23 15 7991 23 10 7995 23 05 7999 23 00 8004 Laser and Optics User s Manual Vol 92 0
346. A Remote Control unit 47 10895A VMEbus Laser Axis Board 46 10897B High Resolution VMEbus Laser Axis Board 46 10898A High Resolution VMEbus Dual Laser Axis Board 46 5517C 009 75 5517C 009 9 mm Laser Head 53 5519A B Laser Head 47 55292A USB Expansion Module 47 5529A 55292A system 47 9 mm beam 5517C 009 75 A Abb error definition 186 minimizing 220 absolute pressure 224 ac interferometer 292 accuracy 292 definition 168 accuracy considerations 40 adjustable mounts 56 84 mounts adjustable 48 adjustment considerations 48 adjustments positioning 56 aids alignment 97 air deadpath 292 air sensor 10751C D 47 212 air turbulence 214 air turbulence reducing 215 aligning and mounting next generation 123 Laser and Optics User s Manual Vol aligning optic 88 aligning optics 32 88 alignment aids 97 alignment method autoreflection 92 overlapping dots 94 alignment principles 90 alignment techniques autoreflection and overlapping dots 92 ambient pressure 224 angular motion 39 pitch or yaw 39 API library installation 29 applications vacuum 56 atmospheric compensation error 173 automatic compensation 210 automatic compensation for the wavelength of light 160 autoreflection alignment method 98 autoreflection method alignment procedure 92 autoreflection method of alignmen 92 axis electronics 292 axis measurement 106 B barometric pressure 224
347. Accuracy and Repeatability Cosine error If the proper alignment procedure for the Agilent 10716A is followed the worst case cosine error is Cosine Error 0 05 ppm Cosine Error in microns 0 05 ppm 1 0 m 0 05 micron CMM system accuracy calculation Now the appropriate components can be summed together to obtain system measurement accuracy and repeatability Worst case system accuracy and repeatability is determined by directly summing these components However a more realistic but still conservative system repeatability is the vector sum RSS Root Sum of Squares of the individual components System accuracy and repeatability will be calculated with and without atmospheric compensation to show the importance of compensating for changes in atmospheric conditions The results are presented in Table 15 Table 15 System accuracy with and without atmospheric compensation System Accuracy Calculation With Atmospheric Compensation Without Atmospheric Compensation microns microns Laser Wavelength Error 0 02 0 02 Compensation Error 0 15 9 0 Material Thermal Expansion 0 0 0 0 Deadpath Error 0 015 0 90 Electronics Error 0 0025 0 0025 Optics Non Linearity 0 001 0 001 Optics Thermal Drift 0 02 0 02 Abb Error 0 0 0 0 Cosine Error 0 05 0 05 Direct Sum Total 0 26 micron 9 99 microns RSS sum where s are not 0 22 micron 9 95 microns independent and is an offset The following equation is used
348. Agilent Laser and Optics User s Manual Volume RE Agilent Technologies Notices Agilent Technologies Inc 1992 1996 2000 2002 2007 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or transla tion into a foreign language without prior agreement and written consent from Agi lent Technologies Inc as governed by United States and international copyright laws Manual Part Number 05517 90086 Edition Fifth edition September 2007 Printed in USA Agilent Technologies Inc 5301 Stevens Creek Boulevard Santa Clara California 95052 8059 Warranty The material contained in this docu ment is provided as is and is subject to being changed without notice in future editions Further to the maxi mum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not lim ited to the implied warranties of mer chantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequen tial damages in connection with the furnishing use or performance of this document or of any information con tained herein Should Agilent and the user have a separate written agree ment with warranty terms covering the material in this document that conflict with these terms the warranty terms
349. ERATURE IN DEGREES CELSIUS Tad 7013 7017 7020 7024 7028 7032 7035 7039 7043 7047 7050 7054 7058 7062 7065 7069 7073 7077 7080 7084 7088 7091 7095 7099 7103 7106 7110 7114 7118 7121 7125 7129 7133 7136 7140 7144 7148 7151 7155 7159 7162 7166 7170 7174 7177 7181 7185 7189 7192 7196 7200 7204 7207 7211 7215 7218 7222 7226 7230 7233 7237 7241 7245 7248 7252 7256 7260 7263 7267 7271 7275 7278 7282 7286 7289 7293 7297 7301 7304 7308 7312 8 0 7018 7022 7026 7030 7033 7037 7041 7044 7048 7052 7056 7059 7063 7067 7071 7074 7078 7082 7085 7089 7093 7097 7100 7104 7108 7112 7115 7119 7123 7127 7130 7134 7138 7141 7145 7149 7153 7156 7160 7164 7168 7171 7175 7179 7182 7186 7190 7194 7197 7201 7205 7209 7212 7216 7220 7223 7227 7231 7235 7238 7242 7246 7250 7253 7257 7261 7264 7268 7272 7276 7279 7283 7287 7291 7294 7298 7302 7306 7309 7313 7317 8 5 7024 7027 7031 7035 7039 7042 7046 7050 7053 7057 7061 7065 7068 7072 7076 7080 7083 7087 7091 7094 7098 7102 7106 7109 7113 7117 7120 7124 7128 7132 7135 7133 7143 7147 7150 7154 7158 7161 7165 7169 7173 7176 7180 7184 7187 7191 7195 7189 7202 7206 7210 7214 7217 722 7225 7228 7232 7236 7240 7243 7247 7251 7255 7258 7262 7266 7269 1213 7271 7281 7284 7288 7292 7295 7299 7303 7307 7310 7314
350. IT 96 0 7685 7689 7693 7698 7702 7706 7711 7715 7719 7724 7728 7732 7736 7741 7745 7749 7754 7758 7762 7767 7771 7775 7780 7784 7788 7792 7797 7801 7805 7810 7814 7818 7823 7827 7831 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874 7879 7883 7887 7892 7896 7900 7905 7909 7913 7917 7922 7926 7930 7935 7939 7943 7948 7952 7956 7961 7965 7969 7973 7978 7982 7986 7991 7995 7999 8004 8008 8012 8017 8021 8025 8030 97 0 7689 7694 7698 7702 7707 7711 7715 T1219 7724 7728 7732 7737 7741 7745 7750 7754 7758 7762 7767 7771 7775 7780 7784 7788 7793 7797 7801 7805 7810 7814 7818 7823 7827 7831 7836 7840 7844 7848 7853 7857 7861 7866 7870 7874 7879 7883 7887 7892 7896 7900 7904 7909 7913 7917 7922 7926 7930 7935 7939 7943 7947 7952 7956 7960 7965 7969 7973 7978 7982 7986 7990 7995 7999 8003 8008 8012 8016 8021 8025 8029 8033 98 0 7694 7698 7703 7707 7711 7715 7720 7724 7728 7733 7737 7741 7745 7750 7754 7758 7763 7767 7771 7776 7180 7184 7788 7793 7797 7801 7806 7810 7814 7818 7823 7827 7831 7836 7840 7844 7848 7853 7857 99 0 7698 7103 7707 7711 7716 7720 7724 7728 7733 7737 7741 7746 7750 7754 7759 7763 7767 771 7776 7780 7784 7789 7793 7797 7801 7806 7810 7814 7819 7823 7827 7831 7836 7840 7844 7849 7853 7857 7861 7866 7870 7874
351. Interferometers summary 119 Screw Torque Requirement 127 Chapter content summary 138 Recommended test equipment 141 Agilent 10780C or Agilent 10780F Receiver signal chart 145 Error components for accuracy and long and short term repeatability error budgets 169 System measurement resolution for each interferometer 171 Deadpath mirror positions and values for Agilent interferometers 182 Laser interferometer system accuracy and repeatability error 189 Parameters needed to calculate each error component 191 System accuracy with and without atmospheric compensation 196 IC Stepper system accuracy with and without atmospheric compensation 203 Laser system measurement accuracy comparison 213 Metric Wide Range Temp 2 to 50 C Press 525 to 800 mm 50 Humidity 228 Metric Low Alt Low Temp Low Humidity Temp 5 to 13 C Press 720 to 800 mm 20 Humidity 229 Metric Low Alt Low Mid Temp Low Humidity Temp 13 5 to 21 5 C Press 720 to 800 mm 20 Humidity 230 Metric Low Alt Mid Temp Low Humidity Temp 22 to 30 C Press 720 to 800 mm 20 Humidity 231 Metric Low Alt High Mid Temp Low Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 20 Humidity 232 Metric High Alt Low Temp Low Humidity Temp 5 to 13 C Press 640 to 720 mm 20 Humidity 233 Metric High Alt Low Mid Temp Low Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 20 Humidity 234 Metric High Alt Mid Tem
352. PCI Three Axis Board 46 electronics cables connecting 31 electronics error 170 electrostatic discharge ESD 29 electrostatic discharge ESD 293 environment temperature controlled 214 environment sensors 166 environmental conditions 166 environmental effects 214 298 environments vacuum 56 environments non uniform 214 equipment required 140 error abb 186 atmospheric compensation 173 cosine 188 292 deadpath definition 180 proportional 295 error deadpath 292 error electronics 170 ESD 29 ESD Electrostatic Discharge 293 etalon 293 example determining accuracy and repeatability IC Wafer Stepper 199 Precision Coordinate Measuring Machine CMM example 191 examples calculation of measurement accuracy and repeatability of Agilent laser systems 190 expansion coeffients 280 expansion module USB 55292A 47 F f2 293 fA 293 fasteners 113 fasteners for optics 56 fB 293 fiber optic cable cleaning 133 five axis interferometer Z4421B 218 five axis interferometers Z4420B 218 fl 293 four axis measurement configuration example configurations 68 frequency measurement 294 fundamental optical resolution 110 G gauge block 93 grounding laser head 51 PC electronics 51 PCI electronics 51 receiver 51 system 81 VME electronics 51 grounding system 10895A 51 10897B 51 10898A Dual Laser Axis 51 H half wave plate 294 HEX 294 Hexadecimal 294 IC Wafer Stepper
353. Three Axis Interferometer 218 Laser and Optics User s Manual Vol r Agilent Technologies Service and Support Contacting Agilent Technologies For more information about Agilent test and measurement products applications and services visit our web site at http www agilent com services English index html Agilent s Test Measurement Fax Service for United States and Canada Technical information for test and measurement products and services is available 24 hours a day 7 days a week by calling 1 800 829 4444 Technical Support If you need technical assistance with an Agilent test and measurement product or application you can find a list of local service representatives on the web site listed above If you do not have access to the Internet one of the following centers can direct you to your nearest representative Asia Pacific Japan Hong Kong SAR Measurement Assistance Center Tokyo Japan Tel 852 2599 7777 Fax 852 2506 9284 Tel 81 426 56 7832 Fax 81 426 60 8747 Australia New Zealand Blackburn Victoria Australia United States Test amp Measurement Call Center Tel 61 3 9210 5555 Englewood CO U S A Canada Tel 800 829 4444 Toll free in US Mississauga ON Canada Tel 877 894 4414 Fax 805 206 4700 Europe European Marketing Organization The Netherlands Tel 31 20 547 2000 Fax 31 20 547 7799 Printed in U S A Data subject to change Rev 12 06 Continued from front
354. am that hits the receiver AUTOREFLECTION ALIGNMENT Ll Y Axis Retroreflector A Reflector Indicat Alignment Aid MEET A P N 10706 60001 Beam Bender ee aan Axis Single Beam gt Interferometer Y Axis Voltmeter Receiver A a Indicator Test i X Axis ida Cu Retroreflector Laser gt am r p lt Beam 1 Linear X A Splitter E piedi Interferometer Figure 33 Autoreflection alignment 98 Laser and Optics User s Manual Vol System Installation and Alignment 4 3 Place a referenced mirror true square between the interferometer and retroreflector so that the measurement beam from the interferometer hits its reflective surface See Figure 33 Align the referenced mirror true square with a precision indicator until its reflective surface is perpendicular to the direction of travel See Figure 33 4 Turn the front turret of the laser head to select the small aperture If the distance between the laser head and the reflector is 0 5 meter 20 inches or more the formula given above in the paragraph on Overlapping Dots determines the cosine error based on the offset of the return beam at the laser head For example a distance between the laser head and reflector of 0 5 meter and an offset of the return beam at the small aperture of the laser of 500 microns 0 0202 inch gives a cosine error of approximately 0 12 ppm 5 Pitch and yaw the laser head until the beam reflects back on itself from the referen
355. ame Output MEAS MEAS 15V Return RET 15V Wire Color 1 BLK MEAS FREQ 2 WHT MEAS FREQ 3 WHT GRA 15V RETURN 4 WHT GRA GRN 15V NOTE A dash following a signal name indicates a negative true signal The receivers should be inspected at least twice a year depending on their operating environment Inspect as follows VISUAL INSPECTION Inspect the unit for indication of mechanical and electrical defects Look for signs of overheating corrosion accumulations of dust oil loose electrical connections or broken parts Also check the Agilent 10780F Remote Receiver for loose fiber optic connections at both ends of the fiber REPAIR AND CLEANING Repair any obvious defects and if necessary clean the unit with dry clean compressed air or a vacuum cleaner Laser and Optics User s Manual Vol 145 8 146 Troubleshooting CAUTION To avoid scratching the lens during cleaning the following procedure is recommended Use a soft camel hair lens brush or equivalent to remove dust from the optical surfaces Dampen a few lens cleaning tissues with electronics grade methanol shake off excessive methanol and wipe across the lens surface once Use a fresh tissue dampened with methanol for each wipe Allow the methanol to evaporate The ends of the Agilent 10780F Agilent E1708A or Agilent E1709A fiber optic cable may be cleaned with a clean lint free cloth Periodically you may wish to verify pro
356. and surface finish of 0 4 um or better Please contact Agilent to discuss alternatives for mounting to materials that do not match the baseplate CTE Figure 38 Interferometer datums relative to ideal zero stage angles Laser and Optics User s Manual Vol NGI Measurement Optics General Information 6 Determining system zero stage angles Assuming the system zero stage angle is ideal one method is to use large true squares as shown in Figure 39 First position true squares firmly against the interferometers datums namely A and B An autocollimator can then determine the relative angle between the true squares representing the interferometer datums and the stage mirror The true squares are then removed and the interferometers mounted Autocollimator ent e Autocollimator True square placed against interferometer datums True square placed against interferometer datums Figure 39 Setup for determining system zero stage angles Laser and Optics User s Manual Vol 125 6 NGI Measurement Optics General Information Effect of misalignment The interferometers datums will have slight tolerances between them The two orthogonal mirrors on the stage will also have a tolerance on their orthogonality Hence the system zero stage angle between the stage mirror and the interferometer s datums will not be ideal Once the stage angle has been adjusted to the system zero stage angles the stage an
357. anuals how to order 24 material temperature sensor 10757D E F 47 212 measurement differential 293 differential with interferometers 57 making 33 parallelism 295 measurement axis 106 measurement direction sense 110 optics affect 54 measurement frequency 294 measurement optics summary table 107 measurement point tolerance next generation interferometers 129 metals and alloys linear thermal expansion coeffients 280 monitor application installation from CD 29 motion angluar 39 motions possible component 39 mounting and aligning next generation interferometers 123 mounting feet on the laser head 52 mounting plane tolerance 52 mounting screws for optics 56 mounting fasteners 113 mounting kinematic 294 MTC 294 multiaxis configurations 66 multiaxis measuring system considerations when designing 59 multiaxis system for a precision X Y stage example configuration 67 multiaxis systems using Agilent 10719A and Agilent 10721A example configuraton 75 multiaxis systems using Agilent 10735A and Agilent 10736A example configuration 75 Laser and Optics User s Manual Vol N N1231A PCI Three Axis Board 46 Agilent N1231A 46 N1250A B High Performance Receiver Cable 83 N1251A B High Performance Laser Head Cable 82 next generation iInterferometer 118 next generation interferometer measurement point tolerance 129 next generation interferometers fiber optic interface specifications 130 NGI introduct
358. apter 36 Accessories in Volume II of this manual Receiver The coincident beam is directed to a receiver e g Agilent 10780C or Agilent 10780F where the two frequency components interfere mix at the receiver s polarizing plate This produces a difference frequency which is detected by the receiver s photodetector and converted to an electrical signal The receiver Circuitry then amplifies the signal which becomes the measurement frequency Displacement information is obtained in the measurement electronics by a comparison of both the measurement and reference signals Laser and Optics User s Manual Vol 165 11 166 Principles of Operation Environment sensors As described at the beginning of this manual chapter the laser measuring system is sensitive enough that its measurements can be affected by environmental conditions during the measurement The Agilent 10751C or Agilent 10751D Air Sensor can be used with measurement electronics to automatically and continuously provide compensation for changes in the wavelength of laser light resulting from changes in the atmospheric conditions at the time of the measurement The Agilent 10757D Agilent 10757E or Agilent 10757F Material Temperature Sensor can be used with measurement electronics to automatically and continuously enable changes in measurement information based on changes in the temperature of the item being measured The Agilent 10717A Wavelength Tracker d
359. ard because the Agilent 10885A has different connectors Use the Agilent 10751C D and Agilent 10757D E F sensors instead one Agilent Automatic Compensation Board Four axis linear configuration Figure 13 shows a four axis measurement configuration with all components aligned in one plane Note that any of the components beam benders beam splitters or interferometers could be rotated in 90 increments to provide a three dimensional configuration Since interferometers can also bend the laser beam through 90 the number of components can be minimized In an application where the Agilent 10702A Linear Interferometer is the moving component and the Agilent 10703A Retroreflector is the fixed reference the Agilent 10702A Linear Interferometer 001 must be used to eliminate alignment errors If a right angle beam bend is made through the Agilent 10702A it must be the fixed component When the Agilent 10705A Single Beam Interferometer is used it must be the fixed component Laser and Optics User s Manual Vol System Design Considerations 3 FOUR AXIS CONFIGURATION Single Beam Retroreflector Interferometer Beam Bender 25 y Linear Retroreflector Interferometer 50 Beam 25 Receiver 50 Laser Beam aw Linear Interferometer v Fa 25 25 Receiver Single Beam Interferometer XN Retroreflector Receiver Figure 13 Four axis configuration Two axis plane mirror Figure 14 sho
360. are sides e g a metrologist s true square 1 Before installing the optics define all beam bends location and angle with an optical square Agilent 10777A or pentaprism This ensures the best possible starting point for the final adjustment of the laser system optics The remainder of this chapter has these major parts 1 N Receiver alignment and gain adjustment procedure which is common to all measurement axes 13 A discussion of the two major alignment methods autoreflection and overlapping dots 1 gt Specific alignment techniques for each type of interferometer Laser and Optics User s Manual Vol 91 4 System Installation and Alignment Receiver Alignment and Gain Adjustment See Chapter 35 Receivers in this manual for this information There are two basic alignment techniques used with a laser measurement system 1 Autoreflection and 2 Overlapping Dots Autoreflection is the more accurate method and is always preferred Autoreflection should always be used 1 for short travel applications 2 measurements where cosine error must be reduced to the absolute minimum possible and 3 when plane mirror reflectors are used Overlapping Dots is a satisfactory method in applications involving relatively long travel In general regardless of the technique used alignments are performed with all optical components in place Autoreflection Method Summary The autoreflection method o
361. are specified in parts per million ppm of the laser frequency They are proportional errors that is the measurement error is a function of the distance measured All laser sources for Agilent laser transducer systems have the same wavelength accuracy and stability specifications These values are specified in a vacuum Lifetime wavelength accuracy for the laser heads is 0 1 ppm standard and 0 02 ppm with optional calibration Wavelength stability of the laser heads is typically 0 02 ppm over their lifetime and 0 002 ppm over one hour Electronics error Electronics error stems from the method used to extend basic optical measurement resolution in an interferometer system The basic resolution of an interferometer system is 1 2 when using cube corner optics The resolution can be electronically or optically extended beyond A 2 In an Agilent laser measurement system the electronics error equals the uncertainty of the least resolution count That is electronic error equals the measurement resolution It is the quantization error of the electronic counter in the system Other methods of electronic resolution extension can cause jitter and nonlinearity in measurement data thus adding other errors The electronics error term is a fixed error equal to the least resolution count on Agilent systems When using an Agilent laser measurement system there are three possible linear measurement resolutions depending on the interferomet
362. articular area Laser Head troubleshooting Agilent 5517A B BL C D DL FL Laser Head Laser heads are listed here in the same order in which they are listed in Chapter 16 Laser Heads in Volume II of this manual Laser head adjustment procedures are given in the laser head s own operating and service manual Laser and Optics User s Manual Vol 141 8 142 Troubleshooting The following symptoms indicate problems with the Agilent 5517A Agilent 5517B Agilent 5517BL Agilent 5517C Agilent 5517D Agilent 5517DL or Agilent 5517FL Laser Head If one or more of these symptoms are observed use the Troubleshooting Tree Figure 44 to assist in determining if the laser head is actually at fault Detailed repair procedures are outlined in the laser head s operating and service manual No laser light being emitted from the laser head exit port Low power output from the laser head LASER ON indicator not lit READY indicator does not illuminate as expected Normally the indicator will start to blink on and off within three minutes of applying power to the laser head This indicates that the laser head is in the process of warming up When the 55174 5517B 5517BL 5517C 5517D 5517DL or 5517FLLaser Head is ready for use the indicator assumes a steady on condition Absence of reference signal or bad reference signal e Agilent 5517B BL C D DL FL Laser Head s 15V POWER ON or 15V POWER ON indicator is not lit
363. as opposed to plane mirrors Measurement frequency The frequency of interference wavefronts detected by the receiver MTC Material Temperature Compensation term Laser and Optics User s Manual Vol Glossary 15 Number systems Number systems used in dealing with the computer are typically one or more of the following binary octal decimal or hexadecimal hex To help you understand the relationship of these number systems refer to Table 69 Calculators and computer programs that can convert from one of these number systems to another are available from Agilent Technologies and other sources Throughout this manual numbers may be represented in binary base 2 octal base 8 decimal base 10 or hexadecimal base 16 number systems Where it is necessary to specify the number system used in order to reduce the possibility of confusion a base number will be indicated as a subscript or in brackets at the end of the number For example 100 16 256 10 400 8 100000000 2 Table 69 Number systems Hexa Binary decimal Decimal 2 16 10 o o 0 100 0 001 0 110 0 111 1 000 1 001 1010 1 011 1100 1 001 1 110 1 111 2 2 00 NO OH WD 1 2 3 4 5 6 7 8 9 A B C D E F mer NOOR WONM O Note that any one or more of the hexadecimal values shown here as A through F may be represented in lower case a b etc Paralle
364. asured Preparing a proper mounting location minimizes initial beam walkoff The following information in this section will allow you to design and build a mounting location for a next generation interferometer Procedure The Agilent Next Generation interferometers installation can be performed in four parts 1 Adjust stage angle to the system zero stage angles see the Ideal zero stage angles Determining system zero stage angles and Effect of misalignment subsections 2 Mount the interferometers see the Mounting the interferometers subsection 3 Adjust the input beam angle to be normal to the stage see the Adjusting the input beam angle subsection 4 Translate the input beam to the center of the primary remote sensor see Beam translation alignment subsection Laser and Optics User s Manual Vol 123 6 124 NGI Measurement Optics General Information Ideal zero stage angles To minimize beam walkoff the stage mirror should ideally be aligned to the ideal zero stage angle using the interferometer s datums the ideal zero stage angle is when the stage mirror is normal to the A datum and parallel to the B datum of the interferometers as shown in Figure 38 The mounting surface A datum shall be a similar material to the interferometer baseplate or have similar coefficients of thermal expansion CTE This mounting surface should be prepared to have a surface profile of 20 um
365. asurement mirror As a result when the measurement mirror moves at 300 mm second the frequency shift seen in the measurement path is approximately 2 MHz The frequency shift is monitored by a photodetector and converted to an electrical signal f f1 Af A second photodetector inside the laser head monitors the fringe frequency before the paths are separated and provides a reference signal that corresponds to zero motion f f1 Doppler frequency shifting Frequency shifting that results from or indicates relative motion between the source and receiver observer is known as Doppler shift One example often used is the apparent change in pitch of a whistle or horn as the distance between the it and the listener changes Another example is the red shift in the spectrums of stars indicating that the universe is expanding The two frequencies from the photodetectors are sent to a special counter The counter counts up on the Doppler shifted signal from the retroreflector and down from the reference signal With no retroreflector motion the frequencies Laser and Optics User s Manual Vol Principles of Operation 11 are equal and no net count is accumulated When the retroreflector moves the Doppler frequency increases or decreases to produce net positive or negative cumulative counts corresponding to the distance and direction traversed in wavelengths of light Basic Measurement System A basic Agilent laser measurem
366. asurement system s measurement axis must have an interferometer and a reflector Machine design considerations determine which type of interferometer is best The choice of the interferometer for each axis usually determines the reflector for that axis This chapter describes the Agilent Technologies measurement optics available for Agilent Technologies laser measurement systems The first part of this chapter presents material that should be useful to the user of any of the interferometers Following this introductory material chapters 8 through 25 describe individual interferometer types including characteristics and specifications Table 3 lists the measurement optics in order by Agilent Model Number it doesn t list the Next Generation Interferometers see Chapter 6 NGI Measurement Optics General Information Table 3 also 1 identifies the chapter in which each measurement optic is described 2 provides summary descriptions of the measurement optics and 3 lists the reflectors and Agilent adjustable optics mounts with which the optics may be used The mounts are described in Chapter 36 Accessories in Volume II of this manual Agilent Technologies beam directing optics are described in Chapter 17 Beam Directing Optics of this manual Agilent Technologies next generation interferometers NGIs are introduced in Chapter 6 NGI Measurement Optics General Information in this manual Chapters 31 through
367. atible with vacuum environments Contact Agilent Call Center for information telephone numbers of various call centers are listed on the Service and Support page at the back of this manual Typically these components have housings made of stainless steel and optical elements attached to the housings using a lower volatility vacuum grade adhesive See the specifications for a list of materials used in the optics Use Through Window If the laser beam has to go through a window for example into a vacuum chamber the window must meet the following requirements A minimum window aperture of 25 4 mm 1 inch with a minimum thickness of 8 mm 0 3 inch If a larger window is used it must be proportionally thicker to assure no distortion in the window when under differential pressures Transmitted wavefront distortion less than 2 10 peak valley single pass over a 23 mm 0 9 inch diameter Parallelism of faces less than 2 arc minutes to reduce beam steering Surface quality 60 40 or better per Mil 0 13830 The window must be strain free Differential Measurements with Interferometers 114 Several interferometers have the capability to make differential measurements A differential measurement is one in which both the reference beam and the measurement beam travel to external mirrors outside the interferometer housing This allows measurement of the relative positions of the two external mirrors either or both of
368. ause it has a remote reference mirror which minimizes deadpath when the interferometer itself cannot be located at the zero point During use of the interferometer system there are two alternative methods to minimize deadpath effects The first method is to always move the moving optic typically the measurement reflector to the position where the deadpath distance is zero that is where measurement path length equals reference path length before resetting the laser system This aligns the machine s zero point to the zero deadpath position If you always do this no further compensation will be required The second method which you should use when it is not possible to align the machine s zero point to the zero deadpath position at reset is to provide deadpath compensation via software in the system controller Note that when using the Agilent 10719A in its angle measuring configuration the software correction is the only method possible since the measurement and reference path lengths are inherently unequal by 19 05 mm 0 750 inch By expanding Equation 3 the corrected actual displacement can be represented as Actual displacement Accumulated Counts Deadpath Counts x a x WCN Deadpath distance 8 Accumulated counts is the displacement measured in units of LRCs Least Resolution Counts Deadpath counts is the deadpath distance in terms of compensated LRCs using the initial compensation numbe
369. bly for storage or for shipment to Agilent for an exchange laser tube Chapter 11 Principles of Laser Interferometry provides basic concepts techniques and principles that determine the overall measurement performance of Agilent laser measurement systems Laser and Optics User s Manual Vol 21 1 22 About This Manual Chapter 12 Accuracy and Repeatability provides basic concepts techniques and principles that determine the overall measurement performance of Agilent laser measurement systems Chapter 13 WOL Compensation Numbers provides tables of Wavelength of Light WOL compensation values for different environmental conditions and step by step instructions on how to calculate the compensation factor if your system operates in an environment other than those covered by the tables Chapter 14 Material Expansion Coefficients provides the linear thermal expansion coefficients of the most frequently used metals and alloys Chapter 15 Glossary Volume II is organized as follows Chapter 16 Laser Heads provides descriptions and specifications for each of the current nine Agilent laser heads Agilent 5517A Agilent 5517B Agilent 5517BL Agilent 5517C Agilent 5517D Agilent 5517DL Agilent 5517FL Agilent 5519A and Agilent 5519B Chapter 17 Beam Directing Optics provides descriptions specifications and other information for the beam splitters beam benders and beam translator that are available for Agilent la
370. boards and provide USB connectivity to them The PC compensation boards provide the interfaces between the air and material temperature sensors and your PC The boards convert the analog electrical voltages from the sensors to digital forms that the PC uses to calculate the compensation factors These factors adjust for changes in the systems operating environments Typical sensors used with each Agilent 10886A PC Compensation board are the Agilent 10751C D Air Sensor and one to three Agilent 10757D E F Material Temperature sensors The Agilent 10887B PC Calibrator Board enable the PC to perform laser calibrator related functions with the Agilent 5529A calibrator software An Agilent Two Axis 5529A 5529A Dynamic Calibrator and an Agilent 55292A USB Expansion Module are also available The USB software hosts up to five axes on one computer Laser and Optics User s Manual Vol 47 3 System Design Considerations Adjustment Considerations 48 In general when aligning the Agilent optics it will be necessary to adjust most or all of the optical components Most optics are not referenced to their housings since simple adjustments by the user can usually provide optimum alignment The Agilent 10710B and Agilent 10711A Adjustable Mounts should be used to provide the adjustment capability for most optical components For systems having many measurement axes using the Agilent N1209A RPT beam maniplulator may pay for itself by reducing
371. by measurements made by two interferometer axes i e Pitch or Yaw The accuracy of the measure point locations also affects the beam locations and should be considered when sizing the measurement mirror s The measure point mean and deviation tolerances are shown in Figure 43 using a five axis interferometer as an example A Al 0 05 15 D 9E A l QUE t o jJ Dimensions in mm Nominal Measure Points Deviation Tolerance Zone Actual Measure Points Nominal Mean Mean Tolerance Zone A Actual Mean Measure Points Shifted by Mean Variance Mean Variance Figure 43 Measure Point Tolerance Laser and Optics User s Manual Vol 129 6 NGI Measurement Optics General Information Fiber Optic Interface Specifications 130 NGI interferometers have integral remote sensors with ST connectors eliminating the need to mount separate remote sensors The ST connectors are pre aligned at the factory so the customer will only need to connect the fiber optic cables Both plastic and glass fibers with ST connectors can be used which can be obtained from Agilent Multiple lengths are available for your requirements If an ST type bulk head feedthrough is necessary for connecting the fibers customers can use AMP s 504021 1 Fiber Optic Connectors ST Coupling Receptacle Plastic Fibers Bending
372. ce between interferometer s beam bender measurement face and measurement mirror at measurement zero position plus 34 42 mm 1 355 inches Agilent 10776A Zero deadpath condition exists when the measurement cube corner is flush with the interferometer s measurement face Distance between interferometer measurement face and cube corner face at measurement Zero position Agilent 10770A Zero deadpath condition exists when the angular reflector face is parallel to the interferometer s measurement face Difference in beam path lengths between interferometer and angular reflector at measurement zero position Agilent 10774A When used with the straightness reflector the reference and measurement beam paths are the same length in air Deadpath does not exist Agilent 10775A When used with the straightness reflector the reference and measurement beam paths are the same length in air Laser and Optics User s Manual Vol Deadpath does not exist 183 12 Accuracy and Repeatability 184 During system design there are two key approaches to minimizing deadpath effects One approach is to locate the stationary optic typically the interferometer as close as possible to the zero point of the moving optic The zero point is established at the time the laser system is reset This will minimize or eliminate deadpath in most applications This is shown in Figure 53 whic
373. ced mirror true square and is centered on the small aperture of the laser head Slight side to side movements of the interferometer may be required to ensure that the reference beam from the interferometer is centered on the receiver alignment target For high accuracy alignment or for installations where there is less than 0 5 meter 20 inches between the laser head and reflector perform steps 6 through 8 6 Remove the receiver alignment target and interferometer alignment target and select the large aperture of the laser head 7 With a fast responding voltmeter preferably an analog type attached to the receiver test point and receiver case ground pitch and yaw the laser beam laser head or interferometer on this axis until a signal is received on the receiver The voltmeter will suddenly jump to some value greater than 0 25 volt This is a critical adjustment and may initially require great care 8 Adjust the laser beam in pitch and yaw to get the maximum voltmeter reading which may be fluctuating Now carefully readjust the interferometer until the voltage reading suddenly drops back down to about 0 3 volt The alignment should be adjusted such that the voltage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage system operation will be degraded Laser and Optics User s Manual Vol 99 4 100 System Installation and Alignment
374. city than Agilent 5519A used in the Agilent 5529A Dynamic Calibrator System and Metrology applications Order as required to manipulate beam path to your configuration Agilent 10567A Agilent 10700A Agilent 10700B Agilent 10700C Agilent 10701A Agilent 10707A Agilent 10725A Agilent 10725B Agilent 10725C Agilent 10726A Agilent E1833C Agilent E1833E Laser and Optics User s Manual Vol Dual Beam Beam Splitter useful in vacuum applications 3395 Beam Splitter 4 Beam Splitter 1596 Beam Splitter 50 Beam Splitter Beam Bender 5096 Beam Splitter no housing 496 Beam Splitter no housing 1596 Beam Splitter no housing Beam Bender no housing 1596 Bare Beam Splitter 33 Bare Beam Splitter 41 3 42 System Design Considerations Table 2 Equipment choices continued Beam Directing Optics cont Component Comment s Agilent E1833G Agilent E1833J Agilent E1833M Agilent N1203C Agilent N1204C Agilent N1207C Agilent N1208C Agilent N1208D Agilent N1208E Agilent N1208F Agilent N1208G Agilent N1209A Measurement Optics 50 Bare Beam Splitter 67 Bare Beam Splitter 100 Bare Beam Splitter Precision Beam Translator Precision Horizontal Beam Bender Precision Vertical Beam Bender 33 Bare Beam Splitter 40 Bare Beam Splitter 50 Bare Beam Splitter 66 Bare Beam Splitter 60 Bare Beam Splitter RPT RTP Beam Manipulator One Interferometer plus Reflector pair required per axis
375. crements about the beam axis roll other roll deviations from the four optimum positions degrade the measurement signal If either the laser head or receiver is rotated 45 about the beam axis all position information will be lost because the receiver will not be able to distinguish between the two frequencies Angular motion of the receiver about the Y or Z axis has no effect on the measurement within alignment limits specified for the receiver Receiver specifications are given in Chapter 35 Receivers in Volume II of this manual Angular motions of the interferometer and retroreflector depend on the particular components for limitations Laser and Optics User s Manual Vol 39 3 System Design Considerations Accuracy Considerations Several factors outside the laser measurement system can affect system accuracy These factors the measurement environment machine and material temperature and the optics installation and their interrelationships must be understood in order to predict the performance of the system Detailed descriptions and methods of compensation are given in Chapter 12 Accuracy and Repeatability of this manual Generally Agilent laser measurement systems offer automatic compensation for air environments and also for temperature changes of the work material For a temperature controlled environment 20 0 5 C typical system accuracy using air sensor automatic compensation is 1 5 ppm Using th
376. d Agilent 10791A B C Laser Head Cable has spade lugs for use with a power supply other than the Agilent 10884B The Agilent 10791A B C Laser Head Cable connects an Agilent 5517 A B BL C D DL FL to the Agilent 10895A VMEbus Aaxis Board The Agilent 10791A B C Laser Head Cable has spade lugs for connecting the laser head to a customer supplied power supply see Figure 283 in Chapter 36 of Volume II For use with Agilent 10885A PC 10889B PC 10896B VME 10897C VME 10898A VME or N1231A B PCI axis board Agilent 10881A B C Laser Head Cable has a DIN for use with the Agilent 10884B Power Supply The Agilent 10881A B C Laser Head Cable connects an Agilent 5517 A B BL C D DL FL to the Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B VME Laser Compensation Board Agilent 10897C VME High Resolution Laser Axis Board Laser and Optics User s Manual Vol 81 4 82 System Installation and Alignment Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Board The Agilent 10881A B C cable is Y shaped and has three connectors that are all different as shown in Figure 285 in Chapter 36 of Volume II The connectors on the laser head end of the cable and the laser head are keyed to go together only one way The Agilent logo will be up on the connector boot when the connection is correctly made The cable connector has locking rings which take about 1 3
377. d 40 Electronic Components 46 Adjustment Considerations 48 System Grounding 51 Laser Head 52 Optics 54 Beam Path Loss Computation 59 Receivers 64 Example Configurations 65 Optical Device Troubleshooting 75 Site Preparation 76 RE Agilent Technologies 37 3 System Design Considerations Introduction 38 Although there are many possible configurations of the laser and optics all Agilent laser measurement systems have these basic parts in common e A laser source to produce the two optical frequencies f and f and generate the reference signal In discussions in this manual f is the lower frequency and f is the higher Beam directing optics to direct all or part of the laser beam to each measurement axis of the system using right angle bends Measurement optics to separate the two optical frequencies direct them over the reference and measurement paths and recombine them Onereceiver per measurement axis to detect the difference in optical frequencies and produce the measurement signal for that axis Electronics to convert the measurement and reference signals into displacement data Two important characteristics of Agilent interferometers must be emphasized Only the change in relative position of the optics is detected Either optical component may move as long as optical alignment is maintained If the interferometer is fixed and the retroreflector is the moving component toward or a
378. d Optics User s Manual Vol Measurement Drift Microns Accuracy and Repeatability 12 small thermal drift of the Agilent 10706B Since either optical path length may be longer than the other depending on the actual optical elements used the thermal drift may be positive or negative Figure 51 is a plot of the thermal drift performance of the Agilent 10706B Agilent 10716A and Agilent 10715A interferometers as compared to a conventional plane mirror interferometer The left vertical scale is thermal drift in microns The right vertical scale is the interferometer s temperature in C The horizontal scale is time The thermal drift of the conventional plane mirror interferometer Agilent 10706A closely tracks the optics temperature changes at a rate of approximately 0 5 micron per C The Agilent 10715A shows essentially zero drift The Agilent 10706B and Agilent 10716A show much smaller drift than the conventional plane mirror interferometer typically 0 04 micron per degree C MEASUREMENT DRIFT AND TEMPERATURE VS TIME 1 75 1 50 A Interferometer Temperature 27 00 26 50 1 25 26 00 1 00 K Conventional Plane Mirror Interferometer 75 25 50 25 00 50 24 50 25 0 00 P 25 Figure 51 Laser and Optics User s Manual Vol Agilent 10715A 7 2 9 6 Agilent 10706B and Agilent 10716
379. d trouble isolation flowchart on the next page Note Also check pin L for 15V 0 3V although it does not affect LASER ON LED The 15V specifications apply when the cable is loaded with the nominal operating current This adjustment assumes that all the receivers are also connected Check Ref laser Replace Ref NO head cable laser continuity head cable YES Indicates a problem with the internal circuitry YES System problem exists elsewhere of the laser head See the board trouble isolation flowchart on the next page Figure 44 Agilent 5517A B C D Laser Head troubleshooting tree Laser and Optics User s Manual Vol 143 8 8 144 Troubleshooting Agilent 5519A B Laser Head See the Agilent 5519A B Laser Head Service Manual for laser head troubleshooting information Receiver troubleshooting Agilent 10780C 10780F E1708A E1709A Receiver This section is basically written for troubleshooting the Agilent 10780C F receiver but many of the same techniques can be used to troubleshoot the Agilent E1708A or E1709A receiver For troubleshooting information specific to the Agilent E1708A or E1709A receiver see their respective operating manuals Allow the laser head sufficient time to complete its tuning cycle prior to determining whether or not the Agilent 10780C Agilent 10780F Agilent E1708A or Agilent E1709A receiver is working properl
380. d with plane mirrors mounted at 90 to each other on the top edges of an X Y stage create a very accurate positioning system which eliminates Abb error Figure 70 shows a typical installation for an X Y stage The principal advantage of this type of positioning system is that the measurement in both X and Y axes takes place at the work surface plane If there are angular errors in the cross slides of the stage any displacement of the work surface due to these errors is measured by the laser Laser and Optics User s Manual Vol 221 12 Accuracy and Repeatability X Y STAGE MEASUREMENT Work Surface Plane Laser Beam Laser Beam Plane Mirror Interferometer Receiver Plane Mirrors Y Axis Receiver Figure 70 XY Stage measurement with Agilent 10706A Plane Mirror Interferometer References 1 Quenelle R C Nonlinearity n Interferometer Measurements Agilent Technologies Journal p 1 0 April 1983 Barrell H amp Sears J E 1939 Phil Trans Roy Society A258 1 64 Edlen B The Refractive Index of Air Metrologia 1966 2 71 80 Birch K P Downs MJ Metrologia 1993 30 155 162 Birch K P Downs MJ Metrologia 1994 31 315 316 Estler W Tyler Applied Optics 24 6 1985 808 815 Baldwin D R amp Siddall G J A double pass attachment for the linear and plane mirror interferometer Proc SPIE Vol 480 p 78 83 1984 c oO A CO N 8 Steinmetz C R Displacement Measurement Repeatabil
381. de 00000 DCIkB Div 00000 Intr Dir Ox0000 Compare 0221 Preset1 0x000000000 Preset2 000000000 NOTE Error or invalid data on axis or reference reported by N1231BGetRawPos elAlll Figure 4 Measurement screen Info PCI Bus 5 PCI Slot 9 Hdw Rev 0x20 API Rev 0x22 Reference Glitch NoSig OK OK Interrupts Enabled Bus Address Ol DI ge we Direct Mode Filter Enabled Kv 714 eo La C2 v Global Interrupt Toggle To exit this application click the Close button in the lower left corner of the application s screen or the close X button in the upper right corner of the window Laser and Optics User s Manual Vol 35 2 Familiarization and Initial Operation Solving Problems 36 Here is information about three simple problems that may occur while you are trying to make a measurement If there is no red beam from the laser head Ensure that the laser head cable is securely connected to the back of the laser head Ensure that the power supply is connected to the laser head cable Ensure that the power supply is plugged into an operating outlet and that the POWER ON light is illuminated Ifthe green LED on the receiver does not light Ensure that there is a red beam from the laser head and the Ready LED is illuminated Ensure that the laser beam passes through the large aperture in the laser head Ensure the laser head s reference conn
382. dity pressure and temperature range The precise compensation number can be found where the temperature and pressure columns intersect The compensation numbers in Tables 18 through 67 represent the last four digits of a seven digit fraction of the form 0 999abcd The wavelength of light WOL compensation number is entered in the form 0 999abcd where abcd is found in the tables Laser and Optics User s Manual Vol 227 13 Wavelength of Light Compensation Table 18 Metric Wide Range Temp 2 to 50 C Press 525 to 800 mm 50 Humidity rM M n aaa TEMPERATURE IN DEGREES CELSIUS 2 0 5 0 8 0 11 0 14 0 17 0 20 0 23 0 26 0 29 0 32 0 35 0 38 0 41 0 44 0 47 0 50 0 800 6954 6987 7020 7052 7083 7114 7145 7175 7204 7233 7262 7291 27319 7347 7376 7404 7433 795 6973 7006 7038 7070 7102 7132 7162 7192 7222 7251 7279 7308 7336 7364 7392 7420 7449 790 6992 7025 7057 7089 7120 7150 7180 7210 7239 7268 7296 7325 7353 7381 7409 7437 7465 785 7011 7044 7076 7107 7138 7168 7198 7228 7257 7285 7314 7342 7370 7397 7425 7453 7481 780 7030 7063 7094 7126 7156 7186 7216 7245 7274 7303 7331 7359 7386 7414 7442 7470 7498 775 7049 7081 7113 7144 7175 27205 7234 7263 7292 7320 7348 7376 7403 7431 7458 7486 7514 770 7068 7100 7132 7163 7193 7223 7252 7281 7309 7337 7365 7393 7420 7447 7475 7502 7530 765 7087 7119 7150 7181 7211 7241 7270 7298 7327 7355 7382 7410 7437 7464 7491 7519 7546 760 7106 7138 7169 7199 7229 7259 7288 7316 7344 7
383. djustment range includes the sum of the tolerances The stage angle range will be reduced 1 urad for every 1 urad of input beam misalignment Beam translation alignment The input beam position should be translated to the center of the input aperture once the input angle is set This provides the maximum angular range Translate beam until centered on input aperture Figure 42 Input Beam Position Adjustment Manipulator requirements The beam directing optics must be able to manipulate the input laser beam to the center of the interferometer s input aperture with total input beam angle Laser and Optics User s Manual Vol NGI Measurement Optics General Information 6 Measure Point Tolerance Measure point tolerance defines the tolerance of the location of the apex of each cube corner relative to each other deviation tolerance and their average locations to the interferometer datums mean tolerance The mean offset is defined by the average of all cube corner actual offsets relative to the datums in a multi axis interferometer Individual cube corner s deviation offset is defined by the distance each cube corner is actually located relative to its nominal position shifted by the mean offset This tolerance is important for achieving repeatable and known measure point positions from unit to unit on a customer system The alignment system metrology may rely on this in order to define abb offsets and define angles calculated
384. dures for the different interferometers Installation and alignment of the wavelength tracker Pre Installation Checklist 80 In addition to reading chapters 1 through 3 of this manual complete the following items before installing a laser position transducer into any application Li E Complete Beam Path Loss Calculation see the Beam Path Loss Computation section in Chapter 3 System Design Considerations If you are using a plane mirror interferometer you must supply the plane mirror reflector if the Agilent 10724A Plane Mirror Reflector will not work for your installation See Chapter 5 Measurement Optics General Information and chapters 18 through 34 in Volume II of this manual for interferometer descriptions and mirror specifications See Chapter 36 Accessories in Volume II of this manual for a description of the Agilent 10724A Plane Mirror If you are using the Agilent 10715A Differential Interferometer you must supply an adjustable mount for the reference mirror included with the Agilent 10715A Determine laser head and interferometer orientation for required direction sensing See the Chapter 11 Principles of Operation Chapter 3 System Design Considerations and Chapter 5 Measurement Optics General Information in this manual If you are using an Agilent 10719A One Axis Differential Interferometer or an Agilent 10721A Two Axis Differential Interferometer you must
385. e Agilent 10717A Wavelength Tracker for compensation the measurement repeatability is on the order of 0 2 ppm depending on the environment Determining What Equipment is Needed 40 First sketch out your optical configuration Remember Each measurement axis except for the Agilent 10717A Wavelength Tracker requires an interferometer and associated retroreflector Each measurement axis after the first one requires a beam splitter The number of beam splitters required is n 1 where n is the number of measurement axes e fan Agilent 10717A Wavelength Tracker is used it counts as a measurement axis Ifa multiaxis interferometer such as the Agilent 10721A Agilent 10735A Agilent 10736A or Agilent 10737L R is used be sure the beam directing optics you select will provide enough laser beam power to drive the receivers through the multiple measurement paths of the interferometer Beam benders should be arranged so their exiting beams are perpendicular to one polarization plane of the incoming laser beam Rotation of the beam during bending can result in problems due to the effects of polarization Beam splitters should be arranged so one exiting beam is along the axis of the incoming beam and the second beam is perpendicular to one polarization of the incoming beam as described above for beam benders Each measurement axis requires an interferometer The nature of the measurement s to be made influences the
386. e measurement signal loss also tends to degrade the geometric accuracy of the machine through warping or bending Therefore you should consider thermally isolating the heat source from the machine as well as the measurement path Optics installation effects When planning the installation of the laser head and optics on a specific machine important points to remember are Install the interferometer and retroreflector to minimize deadpath errors Align the laser beam path parallel to the axis of motion to minimize cosine errors Select the measurement paths to minimize Abb error Use thermally stable optics These effects are not a concern for the optical axis used for the Agilent 10717A Wavelength Tracker The components of the wavelength tracker are aligned at the factory to minimize any cosine or Abb errors Laser and Optics User s Manual Vol 215 12 Accuracy and Repeatability 216 In many cases it may not be possible to completely eliminate these sources of error but every effort should be made to minimize them The paragraphs below discuss methods of installing and compensating for these errors Minimizing deadpath errors Deadpath error is an error introduced due to an uncompensated length of laser light between the interferometer and the retroreflector when the machine is at its zero position Deadpath is the difference in optical path lengths between the reference and measurement components of
387. e Agilent E1709A Remote High Performance Receiver requires a minimum of 0 20 to 0 80 microwatts depending on the AC DC ratio with standard 2 meter plastic fiber optic cable Adjustment of the receiver s gain is required to obtain this sensitivity See the alignment and gain adjustment procedures in Chapter 35 Receivers in Volume II of this manual 60 Laser and Optics User s Manual Vol System Design Considerations 3 The beam splitters have worst case as well as typical transmission and reflection specifications Refer to the paragraphs titled Axis component efficiencies worst case and Axis component efficiencies typical on the following pages for these specifications e In addition all optics have small reflection and absorption losses that occur at each internal interface or component which is taken into account in their efficiency value Fingerprints dirt or oil on a glass surface significantly reduce optical efficiency by increasing both reflection and absorption losses System misalignment also reduces the amount of light reaching the receiver Thermal gradients in the beam path can bend the beam and distort the wave front both of which reduce optical signal strength at the receiver Calculation of signal loss In order to assess the signal loss in a measurement system each optical component has been characterized by both worst case and typical optical efficiencies These efficie
388. e Agilent receiver or the Agilent 10717A Wavelength Tracker is faulty Laser and Optics User s Manual Vol Troubleshooting 8 The front panel LEDs combined with the error messages listed in the appropriate electronics manuals provide assistance with both programming and hardware problems The SYSTEM ERROR LED illuminates when a problem occurs in the measurement or reference path of the Wavelength Tracker axis or when incorrect programming strings have been sent by the system controller By sending an error message query to the Agilent electronics via the system controller the system will respond indicating which board address is generating the error message and provide a brief description of the error The Agilent 10717A Wavelength Tracker is an optical device and is prealigned at the factory If found defective it should be returned to Agilent Technologies where it will be evaluated for repair Follow the procedures outlined in Chapter 10 Packaging for Storage or Shipment of this manual for packaging methods and procedures Laser and Optics User s Manual Vol 149 8 Troubleshooting Ema Check compensation mode control CMC 1 Check for alignment of beam through system optics wavelength tracker and receiver Perform wavelength tracker Installation and Alignament Procedure outlined in subchapter 71 of this manual Beam alignemt ok YES Check for 15 0 5V the Receiver cable
389. e NGI optics See the Specifications information in the appropriate chapter in this manual for specifications 6 The retroreflectors also called cube corners do not change the angular direction of the beam However they do displace the beam and reverse its direction The laser beam remains parallel to its original path In the case of the Agilent 10705A Single Beam Interferometer reference cube corner and the Agilent 10704A Retroreflector the displacement is zero because the beam hits the center of the cube corner when properly aligned 7 On multiaxis configurations the first axis to be adjusted is the axis whose angular adjustment of the laser beam requires adjustment of the laser head After the first axis is aligned the laser head is locked down and any angular adjustment of the laser beam in the other measurement axes is accomplished by rotating the optical components 8 Properly aligned interferometers exhibit less sensitivity to temperature See Deadpath error in Chapter 12 Accuracy and Repeatability of this manual for details 9 Set up multiaxis systems with all legs of the laser beam orthogonal to each other and to the measurement mirrors For ease of optical layout and alignment you should keep the laser beams horizontal or vertical 1 ce Define all beam legs plane and direction against machined surfaces known to be parallel or perpendicular to the stage plane Use an auto reflection mirror with squ
390. e fully under stood and met WARNING A WARNING notice denotes a haz ard It calls attention to an operat ing procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met User s Manual Agilent 5517A B C D DL FL Laser Head Agilent 5519A B Laser Head Agilent 5529A Dynamic Calibrator Agilent 10567A Dual Beam Beam Splitter Agilent 10700A 33 Beam Splitter Agilent 10700B 4 Beam Splitter Agilent 10700C 15 6 Beam Splitter Agilent 10701A 50 Beam Splitter Agilent 10702A Linear Interferometer and 10702A 001 with Windows Agilent 10703A Retroreflector Agilent 10704A Retroreflector Agilent 10705A Single Beam Interferometer Agilent 10705A 080 Fiber Optic Receiver Adapter Agilent 10706A Plane Mirror Interferometer Agilent 10706A 080 Fiber Optic Receiver Adapter Agilent 10706B High Stability Plane Mirror Interferometer Agilent 10707A Beam Bender Agilent 10710B Adjustable Mount Agilent 10711A Adjustable Mount Agilent 10713B C D Cube Corner Agilent 10715A Differential Interferometer and 10715A 001 Turned Configuration Agilent 10716A High Resolution Interferometer and 10716A 001 Turned Configuration Agilent 10717A Wavelength Tracker Agilent 10719A One axis Differential Interferometer Agilent 10719A C02 One axis Differential Interferometer low th
391. e interferometer is rotated 90 as shown Agilent 10706A Y Axis Plane Mirror Receiver Interferometer a eme p gt YAW U Agilent 10726A Bare Optic Agilent 10725A Y Axis A Bare Optic Receiver a gt Laser Beam From a 33 Beam Splitter 67 Path Agilent 10706A Agilent 10700A Plane Mirror Interferometer Figure 19 Optical Method for Yaw Measurement Similar techniques can be used with the Agilent 10715A Differential Interferometer This is done by splitting off part of the Y axis combined measurement signal after going completely through the interferometer and using this as the input beam to the Y axis interferometer This technique outputs Y Y information directly on the Y axis receiver 74 Laser and Optics User s Manual Vol System Design Considerations 3 Both of these optical configurations require some special optical components not available through Agilent Technologies In both figures a small 50 non polarizing beam splitter is required This beam splitter must be very small to avoid blocking or clipping the adjacent beam This is also true for the beam bender required in the configuration shown in Figure 19 Multiaxis systems using Agilent 10719A and Agilent 10721A interferometers Multiaxis systems using Agilent 10719A and Agilent 10721A interferometers are described in Chapter 25 Agilent 10719A One Axis Differential Interferometer and Chapter 26 Agilent
392. e mounting holes The Agilent 5517C 009 Laser Head s laser beam output is referenced to locations on its base You can install this laser head simply by providing appropriate mounting holes or you can create a specially prepared site to take advantage of its referenced output capability specifications for a site for this latter use are given in Figure 20 Site preparation for optical devices Beam Benders such as the Agilent 10726A are used to create the laser path from the laser head to the interferometer The Agilent 10726A Beam Benders are supplied by Agilent without mounting hardware When you attach these optical pieces to their mounting hardware use an attachment method that will not damage or distort them In a measurement system having more than one interferometer unit a Beam Splitter such as the Agilent 10725A is used to create a second laser path to deliver the laser beam from the laser head to the second interferometer Agilent 10726A Beam splitters are supplied by Agilent without mounting hardware When you attach these optical pieces to their mounting hardware use an attachment method that will not damage or distort them Laser and Optics User s Manual Vol System Design Considerations 3 AGILENT 5517C 009 MOUNTING LOCATION CN A Pin 4 004 0008 1 0 01 A 1 024 x 1 575 Pin 04 004 2 008 Llo ed 1 0 01 A 0 1576 Dia B 47 mm A 0
393. each Agilent receiver and the Agilent laser measurement system electronics are all connected to their respective chassis To prevent ground loops they all should be grounded through one common point The Agilent 10780C or Agilent 10780F receiver mounting is isolated from ground by using the nylon screws supplied A system using VME electronics Agilent 10898A Agilent 10897C and Agilent 10895A axis boards PC electronics Agilent 10885A and Agilent 10889B axis boards or PCI electronics N1231A B axis board should be grounded through the electronics power line Laser and Optics User s Manual Vol 51 3 System Design Considerations Laser Head Orientation An Agilent laser head may be mounted in any orientation as long as it is positioned to direct the beam into the optical system parallel to or orthogonal with the machine axes being measured See Chapter 16 Laser Heads in Volume II of this manual for more information about laser head orientation Mounting plane tolerance 52 The plane defined by the three mounting feet on the laser head must be parallel to either the bottom or sides of the beam splitters and of the beam bender housings to within 3 and to the bottom or sides interferometers to within 11 This ensures that the polarization axes of the interferometers are oriented properly relative to the polarization vectors of the laser beam Figure 8 The laser head can be rotated in 90 increments about the beam
394. ec 0 39 urad as the Agilent 10706B See 4 128 on three axes 0 04 arcsec 0 2 urad 0 05 arcsec 0 24 urad A 512 1 2 nm 0 047 yin A 1024 0 62 nm 0 024 yin A 1024 0 62 nm 0 024 yin A 1024 0 62 nm 0 024 yin 4 2048 0 31 nm 0 012 yin A 1024 0 62 nm 0 024 yin 0 007 arcsec 0 03 urad A 1024 0 62 nm 0 024 yin 0 01 arcsec 0 05 prad isting above 4 1024 on three axes 0 005 arcsec 0 025 urad 0 006 arcsec 0 03 prad Three axes each the same as the Agilent 10735A See listing above Three axes each the same as the Agilent 10735A See listing above A 2 316 5 nm 12 5 pin 20 0 arcsec 97 0 urad 4 64 10 0 nm 0 4 pin 0 63 arcsec 3 0 prad A 512 11 2 nm 0 047 pin 0 08 arcsec 0 38 prad Notes 1 The system resolution is based on using 32X electronic resolution extension This is available with the Agilent 10885A and Agilent 10895A 2 The system resolution is based on using 256X electronic resolution extension This is available with the Agilent 10897B and Agilent 10898A electronics 3 The Agilent 10719A interferometer makes a single measurement which may be either linear or angular optically subtracted depending on the installation The linear and angular measurements are mutually exclusive and therefore not simultaneous 4 The Agilent 10721A interferometer makes a two adjacent linear measurements which can be subtracted electronically to give an angular measur
395. eceiver photodetector only measures the overlapping portion of the laser beams For maximum signal the interferometer and retroreflector are aligned so the reference beam from the interferometer and the measurement beam from the retroreflector exactly overlap upon recombination These recombined laser beams then enter the receiver in the center of the lens aperture From Figure 26 it is clear that if the recombined laser beams entering the receiver are not centered on the photodetector measurement signal loss will occur If the interferometer or the retroreflector are misaligned Figure 27 the reference and measurement beams no longer completely overlap resulting in signal loss Laser Beam Receiver Figure 26 Optimum alignment Laser and Optics User s Manual Vol System Installation and Alignment 4 OPTICS MISALIGNMENT Reference Beam Retroreflector N Laser Beam a gt Beam Measurement aU a ee lt Receiver Detects Only Overlapped Portion See View A A Measurement Beam View A A Figure 27 Effect of optics misalignment Typically a lateral offset of 1 4 of the beam diameter between the beams is allowable for an adequate measurement signal However you must make every effort to optimize the laser beam overlap for maximum performance If the measurement beam is not aligned parallel to the direction of retroreflector travel there are two effects First a cosine erro
396. ector is connected to the electronics Ensure that the receiver cable is securely connected at the receiver and at the system electronics Ensure that the system electronics are connected to an operating power source and are turned on Ensure that the alignment of the laser head optics and receiver causes the beam from the interferometer to be centered on the receiver s lens Block the beam between the interferometer and measurement reflector The reference path beam should be centered on the receiver s lens When you unblock the measurement path beam it should overlap the reference path beam on the receiver lens If everything above seems correct but the LED still doesn t light adjust the receiver s gain control If the controller does not indicate motion of the measurement reflector Ensure that there is a red beam from the laser head and the Ready LED is illuminated Ensure that the laser system electronics are powered Ensure that the laser beam is properly aligned and that the receiver s green LED is lighted If the receiver s green LED remains lighted when no measurement signal is present reduce the receiver s gain via its gain control Ensure that the controller is on and the program is running Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 3 System Design Considerations Introduction 38 Accuracy Considerations 40 Determining What Equipment is Neede
397. ed to fasten the interferometer in place with a clamping fixture Set the reflector in the laser beam line coming from the interferometer Adjust the reflector to reflect the beam back into the interferometer Place the receiver parallel to the laser beam from the laser head to the interferometer The lens must be facing the interferometer Fasten the receiver in place with a fixture or clamp Adjust the reflector and receiver to get the return beam on the receiver lens When the Laser Ready indicator comes on the green LED on the receiver will light when the beam alignment is satisfactory Block the beam from the interferometer to the receiver The green LED on the receiver should go out Unblock the beam and the green LED should light again If this happens the basic optics alignment is complete and you can skip step 7 of this procedure If the receivers green LED stays on when the beam from the interferometer is blocked the receiver gain is too high Go to the next step With the beam blocked turn the receiver s gain adjustment control until the LED goes out When the beam is unblocked the LED should light again indicating that the optics are aligned properly If the green LED does not light readjust beam alignment until it does light Laser and Optics User s Manual Vol Familiarization and Initial Operation 2 Making Measurements To make a measurement a the electronics must be connected and on b the laser beam mu
398. efractometer or by using empirical data Without a refractometer it is best simply to measure the air pressure temperature and relative humidity and then relate this data to the refractive index using the formulas by Barrel amp Sears or Edlen The accuracy and repeatability of the compensation number derived by the empirical method depends on the accuracy of the formula used and the ability to measure the atmospheric conditions Barrell H amp Sears J E 1939 Phil Trans Roy Society A258 1 64 TEdlen B The Refractive Index of Air Metrologia 1966 2 71 80 Birch K P Downs MJ Metrologia 1993 30 155 162 Birch K P Downs MJ Metrologia 1994 31 315 316 Estler W Tyler Applied Optics 24 6 1985 808 815 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 The empirical method suffers from the following disadvantages compared to using a refractometer itis an indirect measurement which is subject to sensor error itis an approximation good to only 0 05 ppm itis slow in response due to sensor time constants and calculation time e it requires periodic calibration of the sensors itignores air composition changes such as Carbon dioxide and Chemical vapors Agilent laser position transducer systems generally provide two methods of atmospheric compensation In the first method an air sensor is available that 1 measures air temperature and pressure 2 allows a selectable hu
399. eiver housing must be electrically isolated from the mounting fixture The remote sensor in the Agilent 10780F Remote Receiver Agilent E1708A Remote Dynamic Receiver and Agilent E1709A Remoter High Performance Receiver does not dissipate any power The remote sensor does not require a nylon screw Allow a 5 cm space at the rear of each receiver housing for each cable connection The fiber optic sensor head of the Agilent 10780F E1708A and E1709A receivers may be mounted directly to certain interferometers Agilent 10719A Agilent 10721A Agilent 10735A Agilent 107364 Agilent 10737L R or directly to optional adapter plates Option 080 available for the Agilent 10702A Agilent 10705A and Agilent 10706A B interferometers Alignment pins are provided for easy installation and alignment This eliminates the need for any other user supplied mount for the sensor head Maintain a bend radius not less than 35 mm 1 4 inches to prevent signal attenuation in the receiver s fiber optic cable Clearance for laser beam Figure 263 in Chapter 35 in Volume II of this manual shows the Agilent 10780C and Agilent 10780F receivers and the proper beam spacing Alignment adjustment required The Agilent 10780C Agilent 10780F Agilent E1708A or Agilent E1709A receiver requires an alignment relative to the input beam to maximize measurement signal strength See the alignment and gain adjustment procedures in Chapter 35 Receivers of t
400. ement repeatability of this piece of equipment is important the effects of thermal changes of the interferometer should be included With the Agilent 10706B High Stability Plane Mirror Interferometer typical thermal drift will be 0 04 micron Optics Thermal Drift dessen x 30 1 degree C 30 004 micron Laser and Optics User s Manual Vol Accuracy and Repeatability 12 Abb error In X Y stage applications it is usually easy to have the interferometer measurement axis in line with the wafer Therefore Abb offset will be zero and no Abb error will occur Abb Error 0 micron Cosine error If the proper alignment procedure for the Agilent 10706B High Stability Plane Mirror Interferometer is followed the worst case cosine error is Cosine Error 0 05 ppm Cosine Error in microns 0 05 ppm x 0 2 m 0 01 micron IC Stepper System accuracy calculation Now you can sum the appropriate components together to obtain system measurement accuracy and repeatability Worst case system accuracy and repeatability is determined by directly summing these components However a more realistic but still conservative system repeatability is the vector sum RSS Root Sum of Squares of the individual components System accuracy and repeatability will be calculated with and without atmospheric compensation to show the importance of compensating for changes in atmospheric conditions The results are presented in Table 16
401. ement with a linear measurement simultaneously 5 The Agilent 10735A Agilent 10736A and Agilent 10736A 001 interferometers make linear and angular measurements so they have both linear and angular resolution specifications Laser and Optics User s Manual Vol 171 12 Accuracy and Repeatability 172 Optics nonlinearity Optics nonlinearity occurs as a result of the optical leakage of one polarization component into the other The interferometer optical element in a laser interferometer system can contribute to measurement uncertainty because of its inability to perfectly separate the two laser beam components vertical and horizontal polarizations Optics nonlinearity error is periodic with a period of one wavelength of optical path change or a 360 phase shift between the reference and measurement frequencies Nonlinearity caused by optical leakage affects all interferometer systems whether they are single frequency or two frequency Leakage of one laser beam component into the other occurs for two reasons First the light leaving any laser source is not perfectly polarized linearly instead it is slightly elliptical Second the interferometer optical element is unable to perfectly separate the two laser beam components Figure 48 shows a computed error plot of nonlinearity versus optical path length change for worst case conditions when using a linear interferometer The peak to peak phase error is BA corresponding
402. ength counts x WCN x vacuum Wavelength 3 We can now combine the compensation for both atmospheric and material temperature effects and calculate the true length of the object at standard 20 C temperature Using equations 3 and 13 we get Actual Length Wavelength counts x TCN x vacuum Wavelength 15 Laser compensation capability The laser system electronics can accept a manually entered Total Compensation Number TCN or automatically determine the TCN ifa compensation board is installed Manual compensation For manual compensation the Total Compensation Number TCN is entered through the system controller to the Agilent laser electronics The TCN can be calculated via Equation 13 or 14 See Chapter 13 Wavelength of Light Compensation for Wavelength Compensation numbers and the method to calculate them manually See Chapter 14 Material Expansion Coefficients for information about Material Temperature compensation numbers Manual compensation can also be done without deriving or looking up the factors by using the appropriate Agilent automatic compensation board for the Agilent laser electronics The compensation board computes compensation factors from the environmental data atmosphere and machine or part temperature entered manually through the controller to the Agilent electronics Automatic compensation With most Agilent laser electronics the necessary information for wavelength compensat
403. ent Sales and Service Office see Certification and Warranty page at the front of this manual for information relative to warranty claims Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 10 Packaging for Storage or Shipment Laser Tube 156 Tagging for Service 156 Original Packaging 156 Other Packaging 156 RE Agilent Technologies 155 10 Packaging for Storage or Shipment Laser Tube The laser tube assembly should be shipped in an Agilent container designed for that purpose In addition the container must indicate that the laser tube contains magnetic material To exchange the laser tube assembly first order the replacement assembly and then upon receipt return the old assembly in the same container If it is necessary to ship a laser assembly contact your nearest Agilent Sales and Service Office for an approved container Tagging for Service If a product is being returned to Agilent Technologies for service please provide enough information to help us do what is needed and return the product to you For best service results be as explicit as possible when describing the assembly failure symptoms Original Packaging Containers and materials identical to those used in factory packaging are available through any Agilent Technologies office If the instrument is being returned to Agilent for servicing attach a blue tag indicating the type of service required return address
404. ent system consists of 1 a laser head 2 an interferometer and its associated retroreflector 3 a measurement receiver and 4 measurement and control electronics See Figure 47 Because it is often not possible to line up the laser head output with the interferometer input aperture the system will also include beam directing optics Additionally the system may also include environment sensing or wavelength tracking devices or both BLOCK DIAGRAM Beam Splitter Telescope 2 Frequency HeNe Laser Laser Tuning Circuit Photodetector Beam Splitter Photodetector Agilent 5517A B C D Laser Head lt gt meg F Reference Cube Corner Moving f2 Optic f4 amp f2 fy gt Measurement I Signal f2 amp fytAry fytAty Qa na Agilent 10780C F Agilent 10702A Agilent 10703A 7 Receiver Linear Interferometer Retroreflector f4 fotAfy E 32 Bit Digital Position Output E GPIO Position Output gt HP IB Position Output gt Motor Drive Output Laser Position Transducer f4 f2 Electronics Reference Signal LEGEND A f4 and fj Figure 47 Typical older Agilent Laser Position Transducer block diagram Laser and Optics User s Manual Vol 163 11 Principles of Operation Basic Agilent Laser Measurement System Components 164 The laser head serves as the light beam and reference frequency source The optics and the measurement
405. ents Displacement Pitch A 128 5 nm 0 04 arcsec 0 2 urad 0 05 arcsec 0 24 urad See Specifications Turned only custom custom custom Agilent 10736A Three axis Interferometer 3 Linear Plane Mirror Measurements Displacement Pitch 4 128 b nm 0 04 arcsec 0 2 urad 0 05 arcsec 0 24 urad See Specifications Turned only custom custom custom Agilent 10736A 001 Three axis Interferometer with Beam Bender 3 Linear Plane Mirror Measurements Displacement Pitch 1 128 b nm 0 05 arcsec 0 24 urad See Specifications Turned only custom custom custom Laser and Optics User s Manual Vol Table 3 Measurement Optics Summary continued Model Number and Name Agilent 10737L R Compact Three axis Interfero meters Application 3 Linear Plane Mirror Measurements Displacement Pitch System Resolution Beam Separation Measurement Optics General Information Config uration Turned only Reflector Plane mirror or cube corners Reflector Weight Customer determined 5 Agilent 10711A Agilent 10766A Linear Interferometer General Purpose 11 mm 0 43 in Straight through or Turned Agilent 10767A Agilent 10785A Agilent 10770A Angular Interferometer High Accuracy Plane Mirror 11 mm 0 43 in Agilent 10771A Agilent
406. er Manuals Measurement System Electronics Personal Computer PC Measurement Data Agilent N1231B PCI Board Figure 1 Typical single axis Agilent Laser Interferometer Positioning System All Agilent laser systems share a similar configuration Figure 1 shows PC compatible electronics and a linear interferometer but the system configuration is the same for all types of Agilent electronics and interferometers All Agilent laser systems require a reference signal from the laser head and a measurement signal from the receiver to be connected to the electronics to determine relative movement between the optics All Agilent laser systems feature separate laser head interferometer and reflector The laser beam must be aligned with the optical elements and the motion of the optics to preserve beam alignment and provide an accurate measurement The optics and receiver must be aligned so the beam strikes the lens of the receiver to generate a measurement signal Misalignment results in loss of the measurement signal Laser and Optics User s Manual Vol 2 2 28 Familiarization and Initial Operation A controller is required for all laser positioning systems A controller is needed to control the system electronics and provide a display of the distance measured The PC is the controller for PC compatible electronics Example and demo software programs are provided with the Agilent PC compatible electronics to set up the system and d
407. er chosen Table 11 lists the measurement resolutions for each interferometer available with this system when used with the Agilent 10885A PC Axis Board the Agilent 10895A VME Laser Axis Board the Agilent 10897B High Resolution VMEbus Laser Axis Board or the Agilent 10898A High Resolution VMEbus Dual Laser Axis Board Laser and Optics User s Manual Vol Interferometer Accuracy and Repeatability 12 Table 11 System measurement resolution for each interferometer Fundamental Optical Resolution System Resolution Note System Resolution Note Agilent 10702A A 2 316 5 nm 12 5 pin 1 4 64 10 0 nm 0 4 pin 2 A 512 1 2 nm 0 047 yin Agilent 10705A Agilent 10706A Agilent 10706B Agilent 10715A Agilent 10716A Agilent 10719A Agilent 10721A Agilent 10735A Agilent 10736A Linear Angular Linear Angular Linear Yaw Pitch Agilent 10736A 001 Agilent 10766A Agilent 10770A Angular A 2 316 5 nm 12 5 pin A 4 158 2 nm 6 2 pin A 4 158 2 nm 6 2 yin A 4 158 2 nm 6 2 pin A 8 79 1 nm 3 1 pin A 4 158 2 nm 6 2 pin 1 71 arcsec 8 3 prad A 4 158 2 nm 6 2 pin 2 56 arcsec 12 4 urad Three axes each the same 2 64 10 0 nm 0 4 pin A 128 5 0 nm 0 2 pin A 128 5 0 nm 0 2 uin A 128 5 0 nm 0 2 pin A 256 2 5 nm 0 1 uin A 128 5 0 nm 0 2 pin 0 05 arcsec 0 26 prad A 128 5 0 nm 0 2 pin 0 08 arcs
408. er s Manual Vol BAROMETRIC PRESSURE IN INCHES OF MERCURY 91 0 27 00 7662 26 95 7666 26 90 7670 26 85 7675 26 80 7679 26 75 7684 26 70 7688 26 65 7692 26 60 7697 26 55 7701 26 50 7705 26 45 7710 26 40 7714 26 35 7718 26 30 7723 26 25 7727 26 20 7731 26 15 7736 26 10 7740 26 05 7744 26 00 7749 25 95 7753 25 90 7757 25 85 7762 25 80 7766 25 75 7771 25 70 7775 25 65 7779 25 60 7784 25 55 7788 25 50 7792 25 45 7797 25 40 7801 25 35 7805 25 30 7810 25 25 7814 25 20 7818 25 15 7823 25 10 7827 25 05 7831 25 00 7836 24 95 7840 24 90 7844 24 85 7849 24 80 7853 24 75 7857 24 70 7862 24 65 7866 24 60 7871 24 55 7875 24 50 7879 24 45 7884 24 40 7888 24 35 7892 24 30 7897 24 25 7901 24 20 7905 24 15 7910 24 10 7914 24 05 7918 24 00 7923 23 95 7927 23 90 7931 23 85 7936 23 80 7940 23 75 7944 23 70 7949 23 65 7953 23 60 7958 23 55 7962 23 50 7966 23 45 7971 23 40 7975 23 35 7979 23 30 7984 23 25 7988 23 20 7992 23 15 7997 23 10 8001 23 05 8005 23 00 8010 92 0 7666 7671 7675 7679 7684 7688 7692 7697 7701 7705 7710 7714 7718 7723 7727 7732 7736 7740 7745 7749 7753 7758 7762 7766 7771 7775 7779 7784 7788 7792 7797 7801 7805 7810 7814 7818 7823 7827 7831 7836 7840 7844 7849 7853 7857 7862 7866 7870 7875 7879 7883 7888 7892 7896 7901 7905 7909 7914 7918 7922 7927 7931 7936 7940 7944 7949 7953 7957 7962 7966 7970 7975 7979 7983
409. erence plane mirror to the reference surface of interest This is shown in Figure 121 in the plane mirror chapter Chapter 20 of this manual Again install and align the reference reflector the same as you would the measurement reflector Laser and Optics User s Manual Vol 115 5 Measurement Optics General Information Moving Interferometer Instead of Reflector 116 When moving the interferometer instead of the measurement reflector is required the Agilent 10702A 001 or Agilent 10766A should be used In practice for alignment reasons these are the only interferometers except the straightness interferometers that can be moved while making measurements For a detailed explanation of why this option is required see Figure 100 in the Linear Interferometers chapter Chapter 18 in Volume II of this manual Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 6 NGI Measurement Optics General Information Introduction 118 NGI Optical Schematic 120 NGI Angular Resolution 121 Alignment and Mounting 123 Measure Point Tolerance 129 Fiber Optic Interface Specifications 130 RE Agilent Technologies 117 6 NGI Measurement Optics General Information Introduction 118 The Next Generation Interferometer NGI differs from previous interferometers due to its monolithic structure The optical elements i e quarter wave plates cube corners and input rhomboids are opt
410. ermal drift Agilent 10721A Two axis Differential Interferometer Agilent 10721A C01 Two axis Differential Interferometer low thermal drift Agilent 10722A Plane Mirror Converter Agilent 10723A High Stability Adapter Agilent 10724A Plane Mirror Reflector Agilent 10725A 50 Beam Splitter Agilent 10725B 4 Beam Splitter Agilent 10725C 15 Beam Splitter Agilent 10726A Beam Bender Agilent 10728A Plane Mirror Agilent 10735A Three axis Interferometer Agilent 10736A Three Axis Interferometer Agilent 10736A 001 Three Axis Interferometer Beam Bender Agilent 10737L R Compact Three axis Interferometers Agilent 10753B Laser Tripod Agilent 10759A Footspacing Kit Agilent 10766A Linear Interferometer Agilent 10767A Linear Interferometer Agilent 10767B Lightweight Retroreflector Agilent 10768A Diagonal Measurement Kit Agilent 10769A Beam Steering Mirror Agilent 10766A Linear Interferometer Agilent 10767A Linear Interferometer Agilent 10767B Lightweight Retroreflector Agilent 10770A Angular Interferometer Agilent 10771A Angular Retroreflector Agilent 10772A Turning Mirror Agilent 10773A Flatness Mirror Agilent 10774A Short Range Straightness Optics Agilent 10776A Straightness Accessory Kit Agilent 10777A Optical Square Agilent 10780C Receiver Agilent 10780F Remote Receiver Agilent 10790A B C Receiver Cable Agilent 10880A B C Receiver Cable Agilent 10881A B C Laser Head Cable Agilent 10882A B C Laser Head Cable Agilent
411. ermal isolation 53 three axis interferometer E1837A 218 ZA399A 218 Z4422B 218 three axis measurement system using discrete plane mirror interferometers example configuration 71 tolerance mounting plane 52 troubleshooting 10717A Wavelength Tracker 148 10780C F Receiver 144 5519A B Laser Head 144 laser head 141 optical device 75 148 test equipment required 140 troubleshooting receiver 144 true square 91 93 true squares referenced mirrors 98 two axis interferometer E1827A 218 two axis measurement system using two Agilent 10715A interferometers example configuration 71 two axis plane mirror example configuration 69 two axis plane mirror in a vacuum example configuration 69 300 two frequency laser beam how created 161 U USB Expansion Module 47 V vacuum applications 56 114 vacuum chamber 57 vacuum environments 56 values efficiency 61 vibration isolation 53 113 VME electronics 10897B High Resolution VMEbus Laser Axis Board 46 10898A Dual Laser Axis Board 46 W wavelength conversion factor 219 wavelength of laser light 160 wavelength laser 169 Wavelength of Light WOL 224 wavelength of light value 160 window laser beam going through 114 WOL compensation factor calculation 225 WOL compensation method comparison 213 yaw 39 Z Z4399A Three Axis Interferometer 218 Z4420B Five Axis Interferometer 218 Z4421B Five Axis Interferometer 218 Z4422B
412. ermined In the second example the laser measurement system is built into an integrated circuit manufacturing system such as a wafer stepper or inspection machine and controls the position of the wafer stage For this example accuracy long term repeatability and short term repeatability will be determined Short term repeatability is calculated for the wafer stepper application because process time for wafer exposures is typically very short lt 2 minutes Table 14 shows a list of parameters needed to calculate each error component Laser and Optics User s Manual Vol Accuracy and Repeatability 12 Table 14 Parameters needed to calculate each error component System Error Component Parameters Laser Wavelength Measurement Distance L Laser Specifications Atmospheric Compensation Measurement Distance L Environmental Conditions Compensation Performance Material Thermal Expansion Measurement Distance L Material Temperature Material Cosine Error Measurement Distance L Interferometer Type Misalignment Angle Deadpath Error Deadpath Distance Environmental Conditions Compensation Performance Electronics Error Resolution Interferometer Type Electronics Optics Non Linearity Interferometer Type Optics Thermal Drift Interferometer Type Temperature Changes Abb Error Abb Offset Angular Changes Precision Coordinate Measuring Machine CMM e
413. erometer lt gt amp Recei X Axis b Ww eceiver Agilent 10706B High Stability Plane Agilent 10780C F _ Ss d Mirror Interferometer Receiver Nj gt 7 Agilent 10780C F Receiver Agilent 10701A Agilent 10717A 50 Beam Splitter Wavelength Tracker Agilent 10780C F Receiver Agilent 10701A Agilent 10707A 50 Beam Splitter Beam Bender Agilent 5517C Laser Head Figure 12 Multiaxis system for a precision x y stage three Agilent 10701A 50 Beam splitters three Agilent 10706B High Stability Plane Mirror interferometers one Agilent 10707A Beam Bender one Agilent 10717A Wavelength Tracker Laser and Optics User s Manual Vol 67 3 68 System Design Considerations e four Agilent 10780F Remote receivers e four receiver cables Use Agilent 10790A B C Receiver cables to connect to Agilent 10895A VME electronics boards Use either the Agilent 10880A B C or the N1250A B high performance Receiver cables to connect to Agilent 10885A 10889B or N1231A B PC compatible electronics boards or Agilent 10897C or Agilent 10898A VME electronics boards e four Agilent 10710B Optics mounts e three Agilent 10711A Optics mounts e three Agilent laser axis of measurement electronics Agilent 108854 Agilent 10889B Agilent 10895A Agilent 10897C Agilent 10898A or Agilent N1231A B The Agilent 10751A A B and Agilent 10757A B C sensors cannot be used with the Agilent 10886A PC compatible electronics bo
414. erometers Interferometer Agilent 10702A Mirror Position for Minimal Deadpath Deadpath Value Distance between interferometer measurement face and cube corner face at measurement zero position Zero deadpath condition exists when the measurement cube corner is flush with the interferometer s measurement face Agilent 10705A Distance between interferometer measurement face and cube corner face at measurement zero position Zero deadpath condition exists when the measurement cube corner is flush with the interferometer s measurement face Agilent 10706A Distance between interferometer measurement face and cube corner face at measurement zero position plus 7 62 mm 0 300 inch Zero deadpath condition cannot be achieved with this interferometer Because of interferometer design zero deadpath would require that measurement reflector be inside the interferometer 7 62 mm 0 300 inch behind the measurement face Agilent 10706B Distance between interferometer measurement face and cube corner face at measurement zero position Zero deadpath condition exists when the measurement mirror is flush with the interferometer s measurement face Agilent 10715A Distance between front face of reference mirror and front face of measurement mirror Zero deadpath condition cannot be achieved with this interferometer design because the reference and measurement mirrors cannot be coplanar Agilent 10716A
415. ersonal injury This symbol indicates laser radiation LASER RADIATION DO NOT STARE INTO BEAM CONTINOUS WAVE 1mW 670nm CLASS Il LASER PRODUCT CAUTION Laser radiation when open DO NOT STARE INTO THE BEAM For additional safety and acoustic noise information see back matter 8 CD L 03 11 97 R1 J CW1FL Contents 1 About This Manual Introduction 20 How to Locate Information 20 Manual Organization 20 Manuals Available 23 Table 1 Laser Head and Receiver Manuals 23 How to Order Manuals 24 2 Familiarization and Initial Operation Introduction 26 A one axis example is used for simplicity 26 Basic steps apply to all laser systems 26 Contents Agilent laser interferometer positioning systems at a glance 26 Figure 1 Typical single axis Agilent Laser Interferometer Positioning System 27 All Agilent laser systems share a similar configuration A controller is required for all laser positioning systems What follows 28 Setting Up the System Electronics 29 Install the laser electronics board in the PC 29 27 28 Install the API library and monitor program on computers used for program development 29 Connect the electronics cables 31 Power up the laser head 31 Aligning the Optics 32 Making Measurements 33 Figure 2 Start Programs pop up menu 33 Figure 3 Monitor screen after opening the application Laser and Optics User s Manual Vol 34 Contents Figure
416. es cannot cover all possible malfunctions or combination of malfunctions However at the very minimum these procedures will direct you to the general area of the problem WARNING Use of controls adjustments or procedures other than those specified herein may result in hazardous laser light exposure or exposure to high voltages Laser and Optics User s Manual Vol 139 8 Troubleshooting Electrostatic Discharge ESD Electronic components and assemblies can be permanently damaged by electrostatic discharge To avoid damage caused by ESD follow the following precautions 1 Ensure that static sensitive devices or assemblies are serviced at static safe work stations providing the proper grounding for personnel e g table mat with wrist strap Ensure that static sensitive devices or assemblies are stored in static shielding containers e g antistatic poly bags Do not wear clothing subject to static charge build up such as wool or synthetic materials Do not handle components or assemblies in carpeted areas Do not remove the component or assembly from its static protective container until you are ready to install it Avoid touching component leads or assembly edge connectors with your fingers Required Test Equipment 140 The equipment required to maintain the laser heads and receivers is listed in Table 8 Other equipment may be substituted if it meets or exceeds the critical specifications listed in t
417. escribed in Chapter 24 in Volume II of this manual is also an environment sensor Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 12 Accuracy and Repeatability Introduction 168 The Components of System Accuracy and Repeatability 168 Determining System Accuracy and Repeatability 189 Examples Determining System Accuracy and Repeatability 190 Achieving Optimum System Accuracy and Repeatability 208 Non Uniform Environments 214 References 222 RE Agilent Technologies 167 12 Accuracy and Repeatability Introduction This chapter introduces the basic concepts techniques and principles that determine the overall measurement performance of Agilent laser measurement systems Two examples of modeling a laser system s accuracy and repeatability are provided Understanding the error components in the laser interferometer system will help you use the modeling technique described in this chapter The measurement accuracy and repeatability is determined by summing the error components in the system s error budgets Before proceeding with the discussion of each component in the accuracy and repeatability error budgets review the definitions of accuracy and repeatability given below Accuracy The maximum deviation of a measurement from a known standard or true value Repeatability The maximum deviation between measurements under the same conditions and with the same measuring
418. f alignment is recommended for all applications especially those having less than 0 5 meter 20 inches travel It is based on the principle of aligning a reflecting surface normal to the direction of travel and aligning the laser beam perpendicular to this reflecting surface that is parallel to the direction of travel to minimize cosine error This technique is fast and is the best way to eliminate cosine error The principle steps used for the Autoreflection method of alignment are given below A detailed autoreflection alignment procedure for a specific configuration of optics follows the autoreflection method and the overlapping dots method summaries 1 Mount the laser head and optics in the desired locations and align the laser beam roughly parallel to the axes 2 Provide a reflector aligned perpendicular to the axis of travel Place the reflector between the interferometer and retroreflector 92 Laser and Optics User s Manual Vol System Installation and Alignment 4 Typical reflectors having required mirror flatness and referenced sides for autoreflection are e True Square e Other precision angle plates or squares with a gage block wrung to the appropriate surface The mirrored surface should be perpendicular to its sides or angle plate within 15 arcseconds Typical means for aligning the mirrored surface perpendicular to the axis of travel are Locating the mirror reference surfaces against fixed reference s
419. figuration X Y STAGE INSTALLED IN A VACUUM CHAMBER Agilent 10706B Plane Mirror Interferometer X Y STAGE X Y Agilent 10780C Y Axis Laser f Receiver Agilent 10706B gt ZE Plane Mirror mess S lt n ume Agilent 10567A interferometer Wi Agilent 10780C Beam Splitter X Axis Receiver indow Figure 15 XY stage installed in a vacuum chamber 70 Laser and Optics User s Manual Vol System Design Considerations 3 Two axis measurement system using two Agilent 10715A differential interferometers In X Y stage applications where maximum measurement accuracy and stability are required the Agilent 10715A Differential Interferometer can be used instead of the Agilent 10706A B Plane Mirror Interferometer In Figure 16 an X Y stage using Agilent 10715A s is illustrated As with plane mirror interferometers the reflectors are plane mirrors mounted at 90 to each other on the stage Using the Agilent 10715A Differential Interferometer also requires mounting the reference mirror supplied with the Agilent 10715 between the interferometer and measurement reflector Mounting instructions for the reference mirror are given later in this chapter The Agilent 10715A 001 interferometer turns the beam as shown in Figure 16 This configuration requires use of opposite input apertures for each interferometer resulting in reversed direction senses for the X and Y axes The reversed direction sense must be cor
420. fset into the laser beam 60 Calculation of signal loss 61 Receivers 64 General 64 Clearance for laser beam 64 Alignment adjustment required 64 Example Configurations 65 Single axis system for servo track writing 65 Figure 11 Single axis system for servo track writing 66 Multiaxis configurations 66 Multiaxis system for a precision x y stage 67 Figure 12 Multiaxis system for a precision x y stage 67 Figure 13 Four axis configuration 69 Figure 14 Two axis plane mirror interferometer configuration 70 Figure 15 XY stage installed in a vacuum chamber 70 Figure 16 Two axis system using two Agilent 10715A differential interferometers 72 Figure 17 Yaw measurement of x y stage using discrete plane mirror interferometers 72 Figure 18 Optical Method for Yaw Measurement 74 Figure 19 Optical Method for Yaw Measurement 74 Optical Device Troubleshooting 75 Site Preparation 76 Site preparation for laser head 76 Site preparation for optical devices 76 Figure 20 Agilent 5517C 009 Mounting Location Dimensions 77 Site preparation for referenced interferometers 78 4 System Installation and Alignment Introduction 80 Pre Installation Checklist 80 System Grounding 81 External Cabling 81 Laser head cables 81 Laser and Optics User s Manual Vol 3 Contents Receiver cables 82 Mounting Optics 84 Adjustable mounts 84 Figure 21 Agilent 10710B and Agilent 10711A adjustable mounts 84 Typical mount
421. furthest point of travel Pitch and yaw the single beam interferometer to center the return beam from the retroreflector on the receiver alignment target When aligning the single beam interferometer it may also be necessary to make slight lateral adjustments to ensure that the reference beam from the single beam interferometer is also centered on the receiver alignment target Return the retroreflector to the point closest to the single beam interferometer Repeat steps 15 through 18 until the return beam from the retroreflector is centered on the receiver alignment target at both extremes of travel Secure the single beam interferometer preserving the alignment Remove the single beam alignment target and the receiver alignment target Verify that the receiver s LED is ON and the voltage at the receiver test point is between 0 6 and 1 3 Vdc for 10780C F or 1 5 and 8 0 Vdc for E1708A or 1 8 and 10 0 Vdc for E1709A Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 5 Measurement Optics General Information General 106 Resolution 110 Range 110 Measurement Direction Sense 110 Vibration Isolation 113 Fasteners 113 Vacuum Applications 114 Use Through Window 114 Differential Measurements with Interferometers 114 Moving Interferometer Instead of Reflector 116 RE Agilent Technologies 105 5 Measurement Optics General Information General 106 Each laser me
422. g parallel to one another light beam consisting of two orthogonally polarized frequency components The laser measurement system uses this beam to generate measurement signals MEASurement Frequency In addition to this beam the laser head generates an electrical reference signal REFerence FREQuency System optics The major portion of the beam passes out of the laser head to an interferometer The interferometer is a polarizing beam splitter that reflects one polarization frequency and transmits the other The beam splitter is oriented such that the reflected and transmitted beams are at right angles to each other The reflected beam f is reflected off a fixed retroreflector or mirror usually mounted directly on the interferometer The transmitted frequency fj passes through the interferometer and is reflected back to the interferometer by a movable retroreflector or plane mirror If the distance between the interferometer and the movable retroreflector remains fixed the difference frequency f5 f equals the reference signal Under these Laser and Optics User s Manual Vol Principles of Operation 11 conditions the Agilent laser measurement system electronics detects no change in relative position of the interferometer and the movable retroreflector When the movable retroreflector changes position relative to the fixed interferometer a doppler frequency shift occurs This Doppler shifted frequency becomes f Af depending
423. g the incident beams MEASUREMENT BEAM DOT MOVEMENT rr a Retroreflector fy Position 1 reed 01 1063 0 i 7 l l l pee E gt gt J L l l LW T tO I fH Ee E i 4 lt l I l Receiver ee y lt I fy a ca Eae IOl l Interferometer L al Travel Axis Displaced Measurement Beams Laser Axis Figure 30 Measurement beam dot movement 4 Move the retroreflector away from the interferometer If the laser beam is not parallel to the axis of travel the measurement beam dot will begin to move away from the reference beam dot The dot will move until the beam is cut off by the edge of the interferometer s aperture Stop moving the retroreflector before the beam is thus blocked or when the end of travel is reached Figure 30 shows why the measurement dot moves 5 Figure 31 illustrates a typical two dot pattern on the receiver that is seen after the optics have moved Now rotate the beam until the dots again overlap at the receiver This adjustment of the laser beam can be done by moving the laser head beam bender or interferometer depending on the optical layout Lateral movement of either the laser head or interferometer may also be necessary to achieve alignment Laser and Optics User s Manual Vol 95 4 System Installation and Alignment RESULTS OF REFLECTOR MOVEMENT Reference Dot Measurement Dot Agilent 10780C Receiver Figure 31 Results of reflector
424. gle range will be reduced 1 urad for every 10 urad of datum misalignment from ideal Mounting the interferometers The Agilent interferometer is to be placed on the plane A datum the mounting surface slid on the plane into position along the line B datum created by two dowels and finally slid along the line on the plane to the stopping point C datum created by a single dowel See Figure 40 Apply pressure here to ensure proper mate to C datum Apply pressure here to ensure proper mate to gt B datum Figure 40 Interferometer mounting The interferometers must stabilize to the frame temperature before mounting bolts are tightened Approximately 44 Newtons should be continuously applied on the interferometer in the two positions shown in Figure 40 to ensure proper mate to the B and C datums Torque each of the three screws as listed in Table 6 The interferometer can be stabilized by attaching it to the frame tightening screws to 0 5 newton m and waiting gt 1 hour Then loosen screw and tighten to final torque 126 Laser and Optics User s Manual Vol NGI Measurement Optics General Information 6 Table 6 Screw Torque Requirement M3 1Nm M4 2 4 Nm M5 5 Nm Adjusting the input beam angle Input beam angles for ideal zero stage angles Assuming the system zero stage angles are ideal the input beam has a unique angle that is not perfectly normal due to glass tolerances This unique inp
425. h Atmospheric Compensation for the Wafer Stepper example 207 Achieving Optimum System Accuracy and Repeatability 208 Minimizing environmental effects 208 Figure 66 Relative effect of errors in atmospheric and material temperature 209 Laser compensation capability 210 Manual compensation 210 Automatic compensation 210 Sensor placement 211 Figure 67 Air sensor orientation Agilent 10751D shown 212 WOL compensation method comparison 213 Table 17 Laser system measurement accuracy comparison 213 Non Uniform Environments 214 Changing temperature conditions 214 Airturbulence 214 Optics installation effects 215 Minimizing deadpath errors 216 Figure 68 Equal path length correction 217 Compensation for deadpath errors 217 Minimizing Abb error 220 Figure 69 Positioning of measurement axis to minimize Abb error 221 Figure 70 X Y Stage measurement with Agilent 10706A Plane Mirror Interferometer 222 References 222 13 Wavelength of Light Compensation Introduction 224 Absolute Pressure Versus Barometric Pressure 224 Calculation of Exact Wavelength of Light WOL Compensation Factor 225 Wavelength of Light WOL Compensation Tables 227 Table 18 Metric Wide Range Temp 2 to 50 C Press 525 to 800 mm 50 Humidity 228 Table 19 Metric Low Alt Low Temp Low Humidity Temp 5 to 13 C Press 720 to 800 mm 20 Humidity 229 Table 20 Metric Low Alt Low Mid Temp Low Humidity
426. h shows how to eliminate deadpath in a basic optical layout for an interferometer system OPTICAL CONFIGURATION WITH AND WITHOUT DEADPATH A With Deadpath Zero Position lt D gt lt L Deadpath Measurement Length B Without Deadpath Zero Position Figure 53 Optical configuration with and without deadpath It is important to understand that the zero deadpath condition occurs when the reference and measurement optical paths have equal length For some interferometers this may NOT correspond simply to bringing the interferometer and measurement mirror as close as possible For example due to the differential design of the Agilent 10719A and Agilent 10721A interferometers the zero deadpath condition occurs when the mirror is 19 mm 0 750 inch FARTHER from the interferometer than the reference mirror is located This condition makes the reference and measurement path lengths equal because the reference beam travels an additional 19 mm 0 750 inch inside the interferometer Laser and Optics User s Manual Vol Accuracy and Repeatability 12 The second approach is to choose an interferometer model which permits the minimum deadpath in the installation wherever possible While Agilent interferometers can usually be installed with essentially zero deadpath the application itself sometimes imposes constraints For example in some cases the Agilent 10715A may be the interferometer of choice bec
427. hapters provide descriptions specifications installation and except for linear interferometers alignment information for each interferometer that is available for Agilent laser measurement systems The alignment procedure for linear interferometers is in Chapter 4 of this manual Chapter 6 NGI Measurement Optics General Information introduces Agilent s next generation interferometers NGIs and provides alignment mounting and fiber optics interface specifications Detailed information on the individual NGI types including characteristics and specifications are described in chapters 31 through 34 Chapter 7 Maintenance provides general maintenance information and procedures for cleaning the lens of the Agilent 10780C Agilent 10780F Agilent E1708A and Agilent E1709A receivers the measurement optics and the beam directing optics A Before and After Service Product Safety Check procedure is also provided Chapter 8 Troubleshooting provides information to help you find defective components in an Agilent laser measurement system when a problem occurs It can help determine whether the problem source is in the system electronics environmental sensor laser head receiver or the optics Chapter 9 Unpacking and Incoming Inspection provides information for unpacking and inspection and warranty claims Chapter 10 Packaging for Storage or Shipment provides specific detailed information on packaging the laser tube assem
428. he fault to a receiver or E1709A Agilent 107XX Optics System level troubleshooting for isolating the fault to the optical assemblies The Agilent 107XX optics are repairable only by Agilent Technologies Additional information is provided in the manuals that are supplied with each instrument Laser and Optics User s Manual Vol Troubleshooting 8 Troubleshooting Assumptions The troubleshooting procedures assume that 1 The system controller is operating properly Before connecting the system controller to the Agilent electronics check the controller by a Booting the unit up and verifying appropriate responses b Running your own known good programs and c Executing any controller diagnostics unique to your particular controller All system controls have been double checked to verify that they are in the proper positions This includes the correct setting of all circuit board address and test switches See Preliminary Checks or similar information in the troubleshooting chapter of your electronics manual All system cabling is configured correctly and that all cables are making proper electrical connection The system optics are clean Refer to Chapter 7 Maintenance in this manual Power to the system is removed before replacing any units or circuit boards You adhere to the precautions outlined in Electrostatic Discharge ESD section of this chapter The troubleshooting procedur
429. he table Refer to the appropriate electronics manual for a list of test equipment required for electronics maintenance and the calibration of environmental sensors Agilent 10751C or Agilent 10751D Air Sensor and 10757D Agilent 10757E or Agilent 10757F Material Temperature Sensor Laser and Optics User s Manual Vol Troubleshooting 8 Table8 Recommended test equipment Instrument Required Characteristics Model Number Laser Power Meter Range 1 microwatt to 1 milliwatt Coherent Inc Ultima Accuracy 10 Labmaster or equivalent Digital Voltmeter Range 15V to 15V 0 01 Vdc Agilent 34401A NOTE Accurary of 0 01 Vdc required for voltage adjustments Oscilloscope Ability to display signals between dc and Agilent 54624A 100 MHz Clip on DC Milliammeter DC Current Range 1mA to 10A fullscale Agilent 34401A Accuracy 3 of full scale 0 15 mA Troubleshooting Information The possible system problems that can occur can be divided into the following areas Malfunction of the laser head Malfunction of one or more receivers Malfunction misalignment or improper application of the optical devices Malfunction of the system controller or its improper programming Malfunction of the Agilent system electronics If one of these areas is suspect as the source of the trouble refer to the appropriate troubleshooting information and flowcharts provided in this section for that p
430. his manual Laser and Optics User s Manual Vol System Design Considerations 3 Example Configurations Single axis system for servo track writing Figure 11 shows a single axis system to control servo track writing This system uses one each of e Agilent 5517A 5517B or 5517C Laser Head laser head cable Use an Agilent N1251B High Performance Laser Head Cable to connect to Agilent 10898A VME electronics board or Agilent N1231A B PCI electronics boards Use an Agilent 10881A B C Laser Head Cable to connect to Agilent 10885A or Agilent 10889B PC compatible electronics boards Use an Agilent 10891A B C Laser Head Cable to connect to Agilent 10895A VME electronics boards Agilent 10705A Single Beam Interferometer Agilent 10704A Reflector Agilent 10780C Receiver Receiver cable Use an Agilent N1250A B Receiver Cable to connect to Agilent N1231A B PCI electronics boards Agilent 10897C VME electronics board or Agilent 10898A VME electronics board Use an Agilent 10880A B C Receiver Cable to connect to Agilent 10885A or Agilent 10889B PC compatible electronics boards Use an Agilent 10790A B C Receiver Cable to connect to Agilent 10895A VME electronics boards Agilent laser axis of measurement electronics Agilent 10885A 10889B 10897C 10898A or N1231A B Laser and Optics User s Manual Vol 65 3 System Design Considerations SINGLE AXIS SYSTEM Agilent 10704A Retroreflector Agilent 10
431. ic field The two resultant frequencies are very close together but have opposite circular polarizations Both frequencies are extremely stable and do not require recalibration Waveplates within the laser head convert the circularly polarized beam components to orthogonally polarized components before the beam leaves the laser head A polarizing beam splitter in the interferometer is used to separate the two beams Using the two frequency laser beam at the interferometer One of the laser frequency components f is used as the measuring beam and reflects from the external cube corner back to the beam splitter Here the measuring beam mixes with the second or reference frequency f2 to produce fringe patterns These patterns are composed of alternate light and dark bands caused by successive reinforcement and cancellation interference of the beams If the movable cube corner reflector remains stationary the interference rate beat frequency will be the exact difference between the laser s two frequencies about 1 5 to 3 million fringes per second depending on the laser head used When the cube corner moves the frequency of the returning beam shifts up or down by f Af depending on the direction and velocity of the motion A cube corner velocity of 300 millimeters per second one foot per second causes a frequency shift of approximately 1 MHz When a plane mirror interferometer is used the measurement beam makes two passes to the me
432. ically cemented or contacted directly onto the polarizing beam splitter PBS surfaces Also the quarter wave plates have highly reflective HR coatings that serve as reference mirrors The reference beam path then remains inside the interferometer without crossing any air interfaces hence this eliminates most external mounting parts and increases measurement stability by avoiding thermal expansion problems The overall optical structure is condensed The input laser beam has two polarizations that are orthogonal to each other Nonpolarizing beam splitters composed of rhomboid prism and sometimes spacer assemblies are used to split an input laser beam into two separate beams according to power level and beam pattern An example beam splitting percentage is 50 and 50 where the ratio of S to P polarization is unaffected The distance between separate beams is determined by the rhomboid length which is adjustable for each design The input splitting optics and coatings are configured by design to support many beam pattern and power level requirements This chapter provides alist of next generation measurement optics in order by Agilent Model Number Table 5 The table also 1 identifies the chapter in which each measurement optic is described and 2 provides summary descriptions of the measurement optics e an optical schematic of the Agilent NGI Figure 36 adiagram of angular resolution of the Agilent NGI Figure 37 procedu
433. ilent 10780C Agilent 10780F Agilent E1708A and Agilent E1709A receivers Chapter 36 Accessories provides descriptions of hardware such as adjustable mounts height adjuster post base and cables This chapter also provides descriptions specifications and system information for the optics which are not interferometers and are not usually referred to as beam directing optics such as plane mirror reflectors Index Manuals Available Table 1 lists manuals currently available for Agilent laser heads and receivers These manuals provide component level troubleshooting and adjustment information In addition to these manuals manuals are available describing the electronic components of a laser measurement system Contact Agilent Technologies for help in ordering the information you need Table 1 Laser Head and Receiver Manuals Product Name of Manual Current Agilent Part Number See NOTE below Agilent 5517A Laser Head Agilent 5517A Laser Head 05517 90046 Operating and Service Manual Agilent 5517B Laser Head Agilent 5517B C D Laser Head 05517 90047 or Operating and Service Manual Agilent 5517C Laser Head or Agilent 5517D Laser Head Laser and Optics User s Manual Vol 23 1 About This Manual Table 1 Laser Head and Receiver Manuals Agilent 5519A B Laser Head Name of Manual Agilent 55194 B Laser Head Service Manual Current Agilent Part Number See NOTE below 05519 90006 Agilent 10
434. ill reduce sensitivity to unwanted angular motions 186 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 ABBE OFFSET A Measurement Axis at Leadscrew B Measurement Axis at Probe Path Measurement Axis Abb Offset I 79 y y Actual Probe Distance Measurement Path Axis of Movement Measured __ p Distance i Measured lE Error in 4 Distance Measurement of Movement Figure 54 Abb error As a general rule Abb error is approximately 0 1 micron per 20 mm of offset for each arc second of angular motion Abb error can occur with any type of displacement transducer In high accuracy applications where it is not possible to completely eliminate the Abb effect you may measure the unwanted angular displacement directly and then correct for Abb errors via software A variety of interferometers can serve this purpose particularly the Agilent 10719A when used as an angle measuring optic the Agilent 10735A or the Agilent 10736A for plane mirror of X Y stage applications Laser and Optics User s Manual Vol 187 12 Accuracy and Repeatability 188 Cosine error Misalignment of the measurement axis the laser beam to the mechanical axis of motion results in an error between the measured distance and the actual distance traveled This error is called cosine error because its magnitude is proportional to the cosine of the angle of misalignment Cosine error
435. in the separate agreement shall con trol Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or sub contract Software is delivered and licensed as Commercial computer soft ware as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Gov ernment will receive no greater than Restricted Rights as defined in FAR 52 221 19 c 1 2 June 1987 U S Govern ment users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Safety Notices CAUTION A CAUTION notice denotes a haz ard It calls attention to an operat ing procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indi cated conditions ar
436. ing of optics which use adjustable mounts 84 Fasteners 85 Figure 22 Horizontal plane mounting using the Agilent 10710B adjustable mount 85 Figure 23 Vertical plane mounting using the Agilent 10710B adjustable mount 86 Figure 24 Horizontal plane mounting using the Agilent 10711A adjustable mount 87 Figure 25 Vertical Plane Mounting Using the Agilent 10711A Adjustable Mount 87 Aligning Optics 88 General 88 Figure 26 Optimum alignment 88 Figure 27 Effect of optics misalignment 89 Figure 28 Effects of angular misalignment to the direction of travel 90 Alignment principles 90 Receiver Alignment and Gain Adjustment 92 Autoreflection Method Summary 92 Figure 29 Using reference surfaces to align mirror 93 Overlapping Dots Method Summary 94 Figure 30 Measurement beam dot movement 95 Figure 31 Results of reflector movement 96 Aligning the Agilent 10702A Linear Agilent 10766A Linear and Agilent 10705A Single Beam Interferometers 96 Alignment aids for Agilent 10702A Agilent 10766A Agilent 10705A 97 Figure 32 Linear and single beam interferometer alignment aids 97 Autoreflection alignment procedure for Agilent 10702A Agilent 10766A Agilent 10705A 98 Figure 33 Autoreflection alignment 98 Overlapping dot alignment procedure for Agilent 10702A Agilent 10766A Agilent 10705A 102 Figure 34 Overlapping dot alignment 103 Laser and Optics User s Manual Vol 5 Measurement Optic
437. instrument This also refers to how stable the measurement will be over time The Components of System Accuracy and Repeatability The system measurement accuracy and repeatability error budgets share many of the same error components System measurement repeatability is divided into short term and long term repeatability Short term repeatability is the measurement stability over a period shorter than one hour long term repeatability is stability over a period longer than one hour Error components that make up the accuracy and repeatability error budgets are shown in Table 10 168 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 Table 10 Error components for accuracy and long and short term repeatability error budgets System Error Budgets Long Term Short term Error Components by Category Accuracy Repeatability Repeatability Intrinsic Laser Wavelength Electronics Error Optics Nonlinearity Environmental Atmospheric Compensation Material Thermal Expansion Optics Thermal Drift Installation Deadpath Error Abb Error Cosine Error Both the accuracy and the repeatability error budgets have several components Some of these components are affected by the operating environment while others are affected by the system installation The error components can be categorized as either proportional or fixed terms Proportional error terms are generally specified in parts per mi
438. interferometer choice Laser and Optics User s Manual Vol System Design Considerations 3 Each measurement axis including the Agilent 10717A Wavelength Tracker requires a receiver The interferometer used can influence the receiver choice Note that the Agilent 5519A and Agilent 5519B laser heads include a built in receiver Then from your layout determine your optics needs Choose the Agilent laser head optical and electronic components accordingly Decide on a compensation scheme and finally select cables Table 2 summarizes the equipment choices For advice and help contact Agilent Technologies Table 2 Equipment choices Component Commeni s Laser One required per system Agilent 5517A Agilent 5517B BL Agilent 5517C Std 5517C 003 5517C 009 Agilent 5517D DL Agilent 5517FL Std 5517FL 009 Agilent 5519A Agilent 5519B Beam Directing Optics Lowest velocity largest size 6 mm beam 25 higher velocity than Agilent 5517A small size 6 mm beam Higher velocity than Agilent 5517A and 5517B small size 6 mm beam diameter 3 mm beam diameter 9 mm beam diameter Higher velocity than Agilent 5517A B BL C small size 6 mm beam Highest velocity small size 6 mm beam 6 mm beam diameter 9 mm beam diameter Largest size built in receiver and power supply used in the Agilent 5529A Dynamic Calibrator System and Metrology applications Largest size built in receiver and power supply higher velo
439. ion 118 nominal optical measurement range 110 Nonlinearity 10706B 200 10716A 192 Nonlinearity 10716A 192 nonlinearity optics definition 172 number systems 295 base 10 295 base 16 295 base 2 295 base 8 295 0 offset into the laser beam introducing 58 optic aligning 88 optical device troubleshooting 75 148 optical devices site preparation 76 optical efficiency 59 61 optical power loss computing 59 optics 54 aligning 88 cleaning 132 system 164 optics alignment 32 optics nonlinearity definition 172 optics protection 48 optics thermal drift definition 176 option 5517C 009 75 overlapping dot alignment procedure alignment method 102 overlapping dots alignment procedure 92 overlapping dots alignment method 94 P packaging original materials 156 parallelism measurement 295 Index pentaprism 91 pitch 39 plane and direction 91 plane mirror interferometer 295 E1826E F G 218 pointing stability 53 possible component motions 39 power safety factor 62 powering up system 31 powering up the laser head 31 Precision Coordinate Measuring Machine CMM example 191 pressure absolute 224 barometric 224 problems solving 36 proportional error 295 protecting laser beam 48 protecting optics 48 R range nominal optical measurement 110 receiver 165 only restriction 39 receiver cables 82 receiver mounting locations and positions 64 receiver troubleshooting 144
440. ion can be obtained automatically by using the appropriate Agilent automatic compensator board and environmental sensors WOL compensation is provided by using either the Agilent 10751C D Air Sensor to measure air temperature pressure and humidity or the Agilent 10717A Wavelength Tracker to measure the laser wavelength change directly The Agilent 10757D E F Material Temperature Sensor provides the temperature Laser and Optics User s Manual Vol Accuracy and Repeatability 12 data for the Material Temperature term The Agilent automatic compensation board automatically provides an updated total compensation number TCN The Agilent 10717A Wavelength Tracker and its accompanying Agilent 10780C Agilent 10780F Agilent E1708A or Agilent E1709A receiver provide the Agilent automatic compensation board with information indicating any changes in the laser wavelength Unlike the air sensor the wavelength tracker measures relative differential changes in the laser wavelength with respect to an initial value The absolute accuracy is dependent on this initial value Some methods of determining an initial compensation number are by using an Agilent 10751C D Air Sensor using look up tables such as those in Chapter 13 Wavelength of Light Compensation of this manual measuring temperature pressure and humidity and then inputting these values into the automatic compensation board measuring a known standard le
441. is correction is referred to as atmospheric or wavelength of light WOL compensation The index of refraction n of air is related to Ay and X4 by Ay 1 ZA Laser and Optics User s Manual Vol 173 12 Accuracy and Repeatability 174 Any change in air density which is a function of air temperature air pressure humidity and composition affects the index of refraction Thus a change in air density alters the required compensation of the laser measurement Without proper compensation system accuracy and repeatability will be degraded For example assuming a standard and homogeneous air composition a one ppm error will result from any one of the following conditions e al1 C 1 8 F change in air temperature a2 5 mm 0 1 inch of mercury change in air pressure an 8076 change in relative humidity The wavelength compensation number WCN is the inverse of the index of refraction that is A 2 wen 4 Ay Since the laser interferometer system counts the number of wavelengths of distance traveled actual displacement can be determined as follows Actual displacement wavelength counts x WCN x Ay 3 This equation shows that uncertainty in the wavelength compensation number directly affects the interferometer measurement This error is a proportional term and is specified in parts per million The wavelength compensation number can be derived by a direct measurement of index of refraction using a r
442. is 2 Megohms Replace any component that results in a failure POWER LINE MODULE CHECK Check line fuse and line voltage selector in the electronics rear panel power line module to verify that the correct fuse is installed and that the instrument is properly set for the AC source to be applied Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 8 Troubleshooting Introduction 138 Troubleshooting Assumptions 139 Electrostatic Discharge ESD 140 Required Test Equipment 140 Troubleshooting Information 141 Before and After Service Product Safety Check 151 RE Agilent Technologies 137 8 Troubleshooting Introduction 138 This chapter provides information to help you find defective components in an Agilent laser measurement system when a problem occurs It can help determine whether the problem source is in the system electronics environmental sensor laser head receiver or the optics Component level troubleshooting and calibration should be performed by Agilent Technologies technicians only However component level troubleshooting and calibration information is provided for selected assemblies This chapter is structured as indicated in Table 7 Table7 Chapter content summary Instrument Type of Information Laser Heads System level troubleshooting for isolating the fault to the laser head Agilent 10780C 10780F E1708A System level troubleshooting for isolating t
443. ision The error in measuring D simply shows up as an uncompensated deadpath AD This value would be much smaller than the error due to D The ability to correct for deadpath error in software does not eliminate the necessity of minimizing deadpath for proper location of the interferometer wherever possible If the deadpath D is large compared to the distance traveled L then the predominant error is a zero shift due to uncertainty in determining the change in air wavelength and this error cannot be eliminated in software Laser and Optics User s Manual Vol 219 12 Accuracy and Repeatability Minimizing Abb error Abb offset errors occurs when the measuring point of interest is displaced from the actual measuring scale location and there are angular errors in the positioning system A very important advantage of laser systems is that the Abb error evident in almost all positioning systems is very easily reduced Abb offset error will make the indicated position either shorter or longer than the actual position depending on the angular offset The amount of measurement error resulting from Abb offset is Offset distance x tangent of offset angle Figure 54 illustrates Abb error and demonstrates the requirement for minimizing angular error and placement of the measurement path In Figure 54 A the measurement axis is coincident with the leadscrew centerline and is measuring a displacement of the carriage at the
444. isplay the measurement VMEbus electronics require a separate controller What follows The remaining sections of this chapter describe how to quickly set up and operate an Agilent laser interferometer positioning system using PC based electronics Only essential information is included Details not covered in this chapter are found in other chapters of this manual or in the manual s for the specific system electronics you are using The first step in system setup is connecting the system electronics This includes installing the electronics boards in their backplane connecting the cables from the laser head and receiver and starting the software program The second step in system setup is aligning the optics This step includes aligning the beam from the laser head parallel to the optics motion and aligning the optics and receiver lens so the beam enters the receiver lens during the entire range of motion The last step in system operation is making a measurement This requires the software to be running on the controller to display measurement results Problem solving is the last part in this chapter The most common problems and their solutions are presented to help you operate your system successfully Laser and Optics User s Manual Vol Familiarization and Initial Operation 2 Setting Up the System Electronics WARNING The PC power cord must be unplugged to prevent personal injury and damage to the electronics Ins
445. ity in Tens of Manometers with Laser Interferometry Proc SPIE Vol 92 1 p 406 420 1988 222 Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 13 Wavelength of Light Compensation Introduction 224 Absolute Pressure Versus Barometric Pressure 224 Calculation of Exact Wavelength of Light WOL Compensation Factor 225 Wavelength of Light WOL Compensation Tables 227 RE Agilent Technologies 223 13 Wavelength of Light Compensation Introduction This chapter provides the tables tables 18 to 67 of Wavelength of Light WOL compensation values for different environmental conditions and step by step instruction on how to calculate the compensation factor if your system operates in an environment other than those covered by the tables Absolute Pressure Versus Barometric Pressure 224 The ambient pressure used in determining your compensation factor must be absolute pressure not the barometric pressure which is usually absolute pressure that has been corrected to sea level Barometric pressure as defined here is the absolute pressure that would be measured at a given location if that location was at sea level and the weather conditions were the same Suppose for example that you were in Denver Colorado U S A at a time when the weather report said the barometric pressure was 762 mm 30 00 inches of mercury Since Denver s altitude is about
446. ive See the Specifications information for each optic for a list of materials used in the optic Laser and Optics User s Manual Vol System Design Considerations 3 If the laser beam has to go through a window for example into a vacuum chamber the window must meet the following requirements 1 A minimum window aperture of 25 4 mm 1 inch with a minimum thickness of 8 mm 0 3 inch If a larger window is used it must be proportionally thicker to assure no distortion in the window when under differential pressures 2 Transmitted wavefront distortion less than A 10 peak valley single pass over a 23 mm 0 9 inch diameter 3 Parallelism of faces less than 2 arc minutes to reduce beam steering 4 Surface quality 60 40 or better per Mil 0 13830 5 The window must be strain free Differential measurements with interferometers Several interferometers have the capability to make differential measurements A differential measurement is one in which both the reference beam and the measurement beam travel to external mirrors outside the interferometer housing This allows measurement of the relative positions of the two external mirrors either or both of which may be moving Viewed another way this allows measuring the motion of one reflector relative to a reference datum elsewhere in the machine external to the interferometer itself This is unlike the typical interferometer configuration because usually the reference bea
447. l error Magnetic shielding Agilent laser heads contain a permanent magnet When installing an Agilent laser measurement system in an application sensitive to magnetic fields shielding around the laser head may be required Mounting See Chapter 16 Laser Heads in Volume II of this manual for laser head installation and mounting instructions The laser source in Agilent 5517C 009 9 mm Laser Head is referenced to locations on the outside of the laser head allowing the laser head to be installed in a predefined mounting location minimizing the need for laser head alignment A diagram of the mounting location for this laser head is presented in Figure 20 Laser and Optics User s Manual Vol 53 3 System Design Considerations Optics Plane of orientation with respect to laser head The mounting plane tolerance of the optics to the laser head is the same as discussed in the paragraph titled Mounting plane tolerance above That is the bottom or sides of the interferometers should be parallel to within 1 of the plane defined by the laser head s three mounting feet Effect of optics on measurement direction sense The orientation and configuration of the interferometers affects the measurement direction sense The direction sense depends on which frequency is in the measurement path of the interferometer For example if f lower frequency is in the measurement path and f5 higher frequency is in the reference path a
448. l term specified in parts per million The material temperature sensor for Agilent laser systems is the Agilent 10757D E F Material Temperature Sensor It has an accuracy of 0 1 C and a measurement repeatability better than 0 1 C Linear coefficients of expansion for various commonly used materials are presented in Chapter 14 Material Expansion Coefficients of this manual Optics thermal drift In a laser interferometer system changes in temperature of some optical components during the measurement can cause measurement uncertainty This effect occurs in the measurement optic the interferometer in the form of a change in optical path length with temperature This change in optical path length appears as an apparent distance change Laser and Optics User s Manual Vol Accuracy and Repeatability 12 This optical path length change is caused by the two laser beam components horizontal and vertical polarizations passing through different amounts of glass as shown in Figure 49 With a conventional plane mirror interferometer such as the Agilent 10706A beam component f4 travels through more glass than does fp Beam component fa makes twice as many trips through the polarizing beam splitter as does fp Component f also makes two round trips through the quarter wave plate whereas fp does not pass through the quarter wave plate at all UNEQUAL PATH LENGTHS Quarter pum CU Y As fA fg fA From Laser gt gt
449. lent 10895A VME Axis board one cable per system Agilent 10790A Agilent 10790B Agilent 10790C Laser and Optics User s Manual Vol 5 meters long 10 meters long 20 meters long 43 3 System Design Considerations Table 2 Equipment choices continued Component Commeni s Receiver Cables for use with Agilent 10885A or 10889B Axis boards or Agilent N1231A B PCI Three Axis Board one cable per receiver Agilent 10880A 5 meters long Agilent 10880B 10 meters long Agilent 10880C 20 meters long Laser Head Cables for Agilent 5517A B BL C D DL FL Laser Head used with Agilent 10885A 10889B or N1231A B axis boards cable has a DIN connector for connecting to the Agilent 10884B Power Supply to provide power to the laser head one cable per system Agilent 10881A 3 meters long Agilent 10881B 7 meters long Agilent 10881C 20 meters long Laser Head Cables for Agilent 5517A B BL C D DL FL Laser Head used with Agilent 10885A 10889B or N1231A B axis boards cable has spade lugs for connection to a power supply to provide power to the laser head one cable per system Agilent 10881D 3 meters long Agilent 10881E 7 meters long Agilent 10881F 20 meters long Laser Head Cables for Agilent 5519A B Laser Head used with Agilent 10887P Programmable PC Calibrator Board in the Agilent 5529A 55292A system one cable per system Agilent 10882A 3 meters long Agilent 10882B 7 meters long Agilent 10882C
450. lish High Alt Low Temp Med Humidity Temp 40 to 56 F Press 23 to 27 inches 50 Humidity 266 Table 57 English High Alt Low Mid Temp Med Humidity Temp 57 to 73 F Press 23 to 27 inches 50 Humidity 267 Table 58 English High Alt Mid Temp Med Humidity Temp 74 to 90 F Press 23 to 27 inches 50 Humidity 268 Table 59 English High Alt High Mid Temp Med Humidity Temp 91 to 107 F Press 23 to 27 inches 50 Humidity 269 Table 60 English Low Alt Low Temp High Humidity Temp 40 to 56 F Press 27 to 31 inches 80 Humidity 270 Table 61 English Low Alt Low Mid Temp High Humidity Temp 57 to 73 F Press 27 to 31 inches 80 Humidity 271 Table 62 English Low Alt Mid Temp High Humidity Temp 74 to 90 F Press 27 to 31 inches 80 Humidity 272 Table 63 English Low Alt High Mid Temp High Humidity Temp 91 to 107 F Press 27 to 31 inches 80 Humidity 273 Table 64 English High Alt Low Temp High Humidity Temp 40 to 56 F Press 23 to 27 inches 80 Humidity 274 Table 65 English High Alt Low Mid Temp High Humidity Temp 57 to 73 F Press 23 to 27 inches 80 Humidity 275 Laser and Optics User s Manual Vol 11 Contents Table 66 English High Alt Mid Temp High Humidity Temp 74 to 90 F Press 23 to 27 inches 80 Humidity 276 Table 67 English High Alt High Mid Temp High Humidity Temp 91 to 107 F Press 23 to 2
451. lism measurement A parallelism measurement consists of two straightness measurements made along the same axis from the same straightness reflector Parallelism is calculated by comparing the slopes of the two straightness measurements Plane mirror interferometer An interferometer designed to use plane flat mirrors to measure motion Proportional error A laser wavelength error that is a function of the distance measured Laser and Optics User s Manual Vol 295 15 Glossary 296 Quarter wave plate An optical element which introduces a relative phase shift of 90 degrees between the orthogonal components of a wave This converts linear polarized light to elliptical light and vice versa Receiver The detector mixer and electronics to convert the optical signal to an electrical signal Reference frequency The laser Reference Frequency is the difference in frequency between the two orthogonally polarized frequency components of the laser beam The higher the reference frequency the greater the measurement velocity or slew rate allowed during a measurement except as limited by system electronics The Reference Frequency may also be referred to as the split frequency Referenced interferometer An interferometer having internal optical components and laser beam paths whose positions are related to reference surfaces on its housing in specified ways Repeatability The maximum deviation between mea
452. llion ppm The resulting measurement error is a function of the distance measured by the interferometer system Fixed error terms are noncumulative Fixed terms are given in units of length such as nanometers or microns The resulting measurement errors are not a function of the measured distance Environmental and installation error components are often the largest contributors to the error budgets Be sure to keep them in mind when designing and installing the laser interferometer system A more detailed discussion of these error components follows Laser wavelength An interferometer system generates optical fringes when relative movement occurs between the measurement optics of the system Each fringe generated represents displacement by a fraction of the laser s wavelength However Laser and Optics User s Manual Vol 169 12 Accuracy and Repeatability 170 fringes are also generated if the laser wavelength changes causing an apparent distance change measurement even when there is no actual displacement of an optic This apparent movement is measurement error The laser source of any interferometer system has some type of frequency stabilization to maintain its wavelength accuracy and repeatability A laser interferometer system s accuracy is fundamentally based on the laser s wavelength accuracy The system s repeatability is based on the laser s wavelength stability Laser wavelength accuracy and stability
453. m path length does not change in differential configurations it can One useful example of a differential measurement in a lithography application is for measuring the motion of the X Y stage relative to the optical column The Agilent 10719A One Axis Differential Interferometer shown in Figure 170 of Chapter 25 in Volume II and the Agilent 10721A Two Axis Differential Interferometer shown in Figure 178 in Chapter 26 are ideally suited to this type of measurement because they provide parallel reference and measurement paths which are offset vertically by 19 mm 0 750 inch For such an application a user supplied reference plane mirror is required in addition to the measurement reflector on the X Y stage The Agilent 10715A interferometer shown in Figure 140 in Chapter 22 of Volume IT also permits differential measurements between two plane mirrors However instead of having an offset spacing as in the Agilent 10719A or Agilent 10721A the Agilent 10715A permits the reference beams and the measurement beams to be aligned essentially coaxially A specially shaped reference plane mirror is supplied with the Agilent 10715A Customized differential configurations are possible with several other interferometers However considerable care should be exercised during design and layout to avoid introduction of alignment errors thermal or mechanical instabilities and potential deadpath problems When making differential Laser and Optics User s
454. matter Warranty contd Agilent does not warrant that the operation of Agilent products will be uninterrupted or error free If Agilent is unable within a reasonable time to repair or replace any product to a condition as warranted customer will be entitled to a refund of the purchase price upon prompt return of the product Agilent products may contain remanufactured parts equivalent to new in performance or may have been subjected to incidental use The warranty period begins on the date of delivery or on the date of installation if installed by Agilent If customer schedules or delays Agilent installation more than 30 days after delivery warranty begins on the 31st day from delivery Warranty does not apply to defects resulting from a improper or inadequate maintenance or calibration b software interfacing parts or supplies not supplied by Agilent c unauthorized modification or misuse d operation outside of the published environmental specifications for the product or e improper site preparation or maintenance TO THE EXTENT ALLOWED BY LOCAL LAW THE ABOVE WARRANTIES ARE EXCLUSIVE AND NO OTHER WARRANTY OR CONDITION WHETHER WRITTEN OR ORAL IS EXPRESSED OR IMPLIED AND AGILENT SPECIFICALLY DISCLAIMS ANY IMPLIED WARRANTIES OR CONDITIONS OF MERCHANTABILITY SATISFACTORY QUALITY AND FITNESS FOR A PARTICULAR PURPOSE Agilent will be liable for damage to tangible property per incident u
455. ment Pressure 760 mm Hg 25 mm Hg possible storm fronts during measurement pressure not controlled Humidity 50 10 humidity controlled environment LASER SYSTEM CONFIGURATION ON I C WAFER STEPPER Agilent 10717A Wavelength Tracker Agilent 10706B High Stability Plane Mirror Interferometer X Y STAGE X Y Agilent 10780C Agilent 10780C Receiver Receiver l9 as 33 33 A AA Laser 100 67 33 i Agilent 10706B gt gt Ag High Stability Plane Mirror In Agilent 10700A Agilent 10701A Interferometer 33 Beam 50 Beam Aailent 10780C Splitter Splitter 9 Receiver Figure 61 Laser System Configuration for an Integrated Circuit Wafer Stepper Each error component will be calculated individually and then summed to determine system repeatability Laser and Optics User s Manual Vol Accuracy and Repeatability 12 Laser wavelength error The time required for an operation by IC fabrication equipment is often only a few minutes Thus accuracy long term stability and short term stability need to be calculated Laser Wavelength Stability 0 002 ppm short term This translates to a maximum distance error of Laser Wavelength Stability Error 0 2 m 0 002 x 10 short term 0 0004 micron Laser Wavelength Stability 0 02 ppm long term Laser Wavelength Stability Error 0 2 m 0 02 x 10 long term x0 004 micron Laser Wavelength Accuracy 0 02 ppm wi
456. midity 6 0 6997 7001 7004 7008 7012 7016 7019 7023 7027 7031 7034 7038 7042 7046 7049 7053 7057 7061 7064 7068 7072 7076 7079 7083 7087 7091 7094 7098 7102 7106 7110 7113 7117 7121 7125 7128 7132 7136 7140 7143 7147 7151 7155 7158 7162 7166 7170 7173 7177 7181 7185 7188 7192 7196 7200 7203 7207 7211 7215 7218 7222 7226 7230 7233 7237 7241 7245 7248 7252 7256 7260 7264 7267 7271 7275 7279 7282 7286 7290 7294 7297 6 5 7002 7006 7010 7013 7017 7021 7025 7028 7032 7036 7040 7043 7047 7051 7055 7058 7062 7066 7070 7073 7077 7081 7085 7088 7092 7096 7100 7103 7107 7111 7115 7118 7122 7126 7130 7133 7137 7141 7145 7148 7152 7156 7160 7163 7167 7171 7175 7178 7182 7186 7190 7193 7197 7201 7205 7208 7212 7216 7220 7223 7227 7231 7235 7238 7242 7246 7250 7253 7257 7261 7265 7268 7272 7276 7280 7283 7287 7291 7295 7298 7302 7 0 7008 7011 7015 7019 7023 7026 7030 7034 7038 7041 7045 7049 7053 7056 7060 7064 7068 7071 7075 7079 7082 7086 7090 7094 7097 7101 7105 7109 7112 7116 7120 7124 7127 7131 7135 7139 7142 7146 7150 7154 7157 7161 7165 7169 7172 7176 7180 7184 7187 7191 7195 7199 7202 7206 7210 7213 7217 7221 7225 7228 7232 7236 7240 7243 7247 7251 7255 7258 7262 7266 7270 7273 7271 7281 7285 7288 7292 7296 7300 7303 7307 TEMP
457. midity setting and 3 calculates a compensation number for the system This product the Agilent 10751C D Air Sensor provides a compensation accuracy of 1 4 ppm and a repeatability better than 1 4 ppm depending on the temperature range The second method of compensation uses a differential refractometer the Agilent 10717A Wavelength Tracker The wavelength tracker uses an optical technique to provide compensation repeatability as small as 0 14 ppm Since itis a differential refractometer only changes in the air s index of refraction are measured This means the initial compensation number must be determined from another source which also determines the compensation accuracy One popular method for accurately determining the initial compensation number is to measure a known standard or artifact with the laser system on the machine Alternatively high accuracy external sensors or the Agilent 10751C D Air Sensor can be used to obtain the initial compensation value The repeatability of the Agilent 10717A Wavelength Tracker s compensation number is given by the equation 0 06 ppm x AT 0 002 ppm ili n Repeatability 4 0 067ppm degrees C mmHg x AP 4 This equation shows that the compensation number s repeatability is a function of ambient temperature and pressure This temperature and pressure dependency is based on the materials used to construct the Agilent 10717A Wavelength Tracker Additional information about waveleng
458. mirror interferometer typically 0 04 micron C Other interferometers incorporating a similar high stability design include the Agilent 10716A Agilent 10719A Agilent 10721A Agilent 10735A and Agilent 10736A Figure 50 is an optical schematic of the Agilent 10706B High Stability Plane Mirror Interferometer In the Agilent 10706B the reference beam cube comer has been replaced by a quarter wave plate with a high reflectance coating on the back This optical design allows the measurement and reference beams to have the same optical path lengths in the glass essentially eliminating measurement errors caused by temperature changes of the optics EQUAL PATH LENGTHS IN HIGH STABILITY INTERFEROMETER High Reflector Quarter wave E Plates A BA E A From Laser Xx A phat BY gt M a Z To Receiver a 2 PANEM EM A VW A Stage Mirror LEGEND a fa m um um um pa fg lt gt fa and fg f r Rounded corners are used to help you trace paths Figure 50 Agilent 10706B High Stability Plane Mirror Interferometer Beam Paths The optical path lengths for the two beams may differ slightly due to the normal dimensional tolerances in the thicknesses of the quarter wave plates and in the geometry of the beam splitter These small variations result in the Baldwin D R amp Siddall G J A double pass attachment for the linear and plane mirror interferometer Proc SPIE Vol 480 p 78 83 1984 Laser an
459. mirror moves away from it an identical interferometer parallel to the first but using the second beam will produce decreasing counts as its measurement mirror moves away Laser and Optics User s Manual Vol 111 5 Measurement Optics General Information VERTICAL AND HORIZONTAL POLARIZATION Notes 1 Shaded ovals represent laser beam cross section enlarged 2 V Vertical Polarization Component 3 H Horizontal Polarization Component 4 fa and fp represent beam paths in Interferometer H 4 Beam Bender Z P fA d Interferometer Interferometer Figure 35 Effect of beam directing optics on laser beam polarization orientations 112 Laser and Optics User s Manual Vol Measurement Optics General Information 5 Vibration Isolation Vibration of the optics along the laser beam can cause the fringe count in the laser measurement system electronics to fluctuate rapidly Vibrations along this axis constitute real measurable displacements you will have to decide if these fluctuating measurements are acceptable in your application In extreme cases however the velocity of the optics may momentarily exceed the velocity limitation of the laser measurement system causing an error When vibration occurs perpendicular to the beam the beam signal power can fluctuate If this fluctuation is too great insufficient beam signal will arrive at the receivers causing a measurement signal error Loose mo
460. model number and full serial number Also mark the container FRAGILE to ensure careful handling The laser head container should indicate the instrument contains magnetic material In any correspondence refer to the instrument by model number and full serial number Other Packaging The following general instructions should be used for repacking system components with commercially available materials These methods DO NOT apply to the laser tube assembly or the Agilent 10735A or Agilent 10736A interferometers which MUST be shipped in an Agilent approved container If the laser assembly has not been removed from the laser head itself the laser head may be packaged and shipped with the methods below 1 Wrap the instrument in heavy paper or plastic If the instrument is a circuit board wrap it in anti static material first then add additional wrapping material If shipping to Agilent Technologies office or service center attach 156 Laser and Optics User s Manual Vol Packaging for Storage or Shipment 10 a tag indicating the service required return address model number and full serial number Use a strong shipping container A double wall carton made of 350 pound test material is adequate Use a layer of shock absorbing material 70 to 100 mm 3 to 4 inches thick around all sides of the instrument to provide firm cushioning and prevent movement inside the container Protect the front panel with cardboard Seal shipping
461. mp 57 to 73 F Press 23 to 27 inches 50 Humidity SSE 59 0 7510 7514 7519 7524 7528 7533 7538 7542 7541 7551 7556 7561 7565 7570 7574 7579 7584 7588 7593 7598 7602 7607 7611 7616 7621 7625 7630 7635 7639 7644 7648 7653 7658 7662 7667 7671 7676 7681 7685 7690 7695 7699 7704 7708 7713 7718 7722 7727 7732 7736 7741 7745 7750 7755 7759 7764 7768 7773 7778 7782 7787 7792 7796 7801 7805 7810 7815 7819 7824 7829 7833 7838 7842 7847 7852 7856 7861 7865 7870 7875 7879 60 0 7515 7519 7524 7529 7533 7538 7542 7547 7552 7556 7561 7565 7570 7575 7579 7584 7589 7593 7598 7602 7607 7612 7616 7621 7625 7630 7635 7639 7644 7648 7653 7658 7662 7667 7671 7676 7681 7685 7690 7695 7699 7704 7708 7713 7718 7722 7727 7731 7736 7741 7745 7750 7754 7758 7764 7768 7773 7778 7782 7787 7791 7796 7801 7805 7810 7814 7819 7824 7828 7833 7837 7842 7847 7851 7856 7860 7865 7870 7874 7879 7884 61 0 7520 7524 7529 7533 7538 7543 7547 7552 7556 7561 7566 7570 7575 7579 7584 7589 7593 7598 7602 7607 7612 7616 7621 7625 7630 7635 7639 7644 7649 7653 7658 7662 7667 7672 7676 7681 7685 7690 7695 7699 7704 7708 7713 7718 7722 7727 7731 7736 7741 7745 7750 7754 7759 7764 7768 7773 7777 7782 7787 7791 7796 7800 7805 7810 7814 7819 7823 7828 7833 7837 7842 7846
462. nal Error at 0 2m Worst Case Microns Figure 65 Worst case System Long term Repeatability with Atmospheric Compensation for the Wafer Stepper example Short term repeatability In this example calculation of system short term repeatability is the same as long term repeatability except 1 long term laser wavelength error is replaced by short term error and 2 optics thermal drift is not included The atmospheric compensation error is assumed to be the same However under normal operating conditions atmospheric pressure changes would generally be substantially less than those used in this example for the short periods of interest in IC fabrication With Atmospheric Without Atmospheric Compensation Compensation Direct Sum Total X 0 050 micron 2 708 microns Worst Case RSS sum Typical 0 042 micron 2 700 microns As seen from these values the difference between system long term and short term repeatability is only a few nanometers If the assumed short term environmental changes especially atmospheric pressure are much smaller then short term repeatability will be significantly smaller Laser and Optics User s Manual Vol 207 12 Accuracy and Repeatability Achieving Optimum System Accuracy and Repeatability 208 To achieve the best measurement accuracy and repeatability from a laser interferometer system in your application 1 Whenever possible make the measurements in a tightly controlled stable envir
463. ncy values for each optical component are listed in the Specifications section for each optic that is the specifications section in Chapter 17 Beam Directing Optics for beam splitters and chapters 18 through 34 in Volume II of this manual for interferometers Optical efficiency is defined as s Optical Power Out Eff s ee SAEN Optical Power In The optical efficiencies for the interferometers are given with the respective measurement reflector efficiency included For example the Agilent 10702A Linear Interferometer efficiency includes the efficiency of the Agilent 10703A Retroreflector The combined optical efficiency of a given measurement axis is the product of the efficiencies of the individual optics in the beam path This combined efficiency times the minimum laser output power in microwatts yields the worst case optical power at the receiver This value must be at least 1 5 microwatts for the Agilent 10780C Receiver or 2 2 microwatts for the Agilent 10780F Remote Receiver and Agilent E1708A Remote Dynamic Receiver or 0 20 to 0 80 microwatts for Agilent E1709A Remote High Performance Receiver A beam power safety factor of at least three is recommended even though worst case laser and optics are assumed Creating a system with five or more axes of measurement may result in a beam power safety factor that is less than three Laser and Optics User s Manual Vol 61 3 62 System Design Considerations As an example
464. nd the optics are moving away from each other the fringe counts will be INCREASING This corresponds to using an Agilent 55174 Agilent 5517B or Agilent 5517C Laser Head mounting feet in horizontal plane with an Agilent 10702A Linear Interferometer mounted with labels facing up and down see Figure 9 Interchanging f and f e g rotating interferometer 90 in this example will result in the fringe counts DECREASING The optical schematics for the interferometers in Chapter 5 Measurement Optics General Information show which frequency polarizations are in the measurement path DIRECTION SENSE Reference Cube Corner um m f Agilent 10703A E R g Retroreflector T EA x ft Of Agilent 10702A Linear Interferometer LEGEND a fy m Qm Em m gt f f and f Figure 9 Direction sense fringe counts increase as optics move apart 54 Laser and Optics User s Manual Vol System Design Considerations 3 As with the laser heads when the interferometers are rotated 90 the measurement direction sense will change This rotation causes switching of frequencies in the measurement path Configuration effects Many of the distance measuring interferometers can be configured to turn the beam at right angles When configuring the linear single beam and plane mirror interferometers to turn the beam the measurement direction sense will be changed This is because the measurement and reference paths a
465. nds on the machine design and the position that is measured or controlled On a wafer stepper the wafer is positioned relative to the optical column If the measurement axes are placed to allow measurements between the wafer and optical column for example using an Agilent 10719A or Agilent 10721A differential interferometer material temperature effects may be ignored This assumes the material expansion in the measurement path is equal to that in the reference path Material Thermal Expansion 0 micron assumed Deadpath error Deadpath error is a function of deadpath distance method of compensation and environmental conditions With no compensation for deadpath Equation 7 determines the error Deadpath Error 0 1 m x 0 9 x 10 0 9 micron With deadpath correction and the use of the wavelength tracker Equation 9 determines the error Deadpath correction error 0 1 m x 40 14 x 10 0 014 micron Electronics error With Agilent laser interferometer systems the electronics error equals the measurement resolution When using the Agilent 10706B High Stability Plane Mirror Interferometer system measurement resolution for the Agilent 10885A Agilent 10895A Agilent 10897B or Agilent 10898A electronics is Measurement Resolution 0 005 micron Optics nonlinearity Nonlinearity when using the Agilent 10706B High Stability Plane Mirror Interferometer is 0 0022 micron Optics thermal drift Because the measur
466. nformation is included Chapter 3 System Design Considerations provides general information that you should know and consider when designing Agilent laser measurement systems Topics include the basic components of an Agilent laser measurement system effect of motion of any of the components accuracy considerations measurement range adjustment considerations laser beam and optics protection system grounding mounting plane tolerance fastening Laser and Optics User s Manual Vol About This Manual 1 clearance pointing stability thermal isolation vibration isolation magnetic shielding effect of optics on measurement direction sense and vacuum application Chapter 4 System Installation and Alignment provides you with general procedures on how to install and align the various optics and accessories in various Agilent laser measurement systems This chapter includes the alignment procedure for linear interferometers Chapter 5 Measurement Optics General Information introduces Agilent s measurement optics interferometers straightness optics retroreflectors also called cube corners available for Agilent Technologies laser measurement systems The first part of this chapter presents material that should be useful to the user of any of the interferometers Detailed information on the individual interferometer types including characteristics and specifications are described in chapters 18 through 30 Each of these c
467. ng procedures should be used The optics should be handled with care so nothing comes in contact with the optical surfaces Fingerprints will collect dust and dirt which will attenuate and disperse the laser beam Also acids in fingerprints may etch glass or the optical coating In general preventing contamination of optics is preferable to cleaning them Cleaning the optics should be avoided unless the signal intensity of the beam is noticeably reduced If cleaning the optics is required be careful to avoid rubbing particles into the coated surfaces Permanent reduction of signal intensity could result If particles are observed on the optics surface remove them by blowing off with clean pressurized air or preferably dry nitrogen If these are unavailable commercially available products such as Kodak Laboratory Sprayer or Micro Duster TX 600 from the Texwipe Company may be used Laser and Optics User s Manual Vol 133 7 134 Maintenance CAUTION Cleaning optics with tissues or pressurized air is recommended only for exposed glass surfaces that are easily accessible to the user DO NOT TRY TO CLEAN ANY OPTICAL SURFACE LOCATED INSIDE AN OPTIC HOUSING Some interferometers contain fragile optical components which are deliberately mounted internally for protection DO NOT TRY TO DEFEAT THIS PROTECTION Optical surfaces which cannot be easily viewed or reached should NEVER be cleaned either with a tissue or with pressurized air
468. ng site configuration as shown in Figure 20 Laser and Optics User s Manual Vol 75 3 System Design Considerations The standard Agilent beam directing optics are designed for use with a 6 mm maximum nominal diameter laser beam For use in 9 mm installations Agilent offers the Agilent 10725A 9 mm Laser Beam Splitter and the Agilent 10726A 9 mm Laser Beam Bender These two optical devices do not include mounting hardware The 9 mm laser measurement system user designer or installer must devise a mounting method that will hold the required optics in position without causing stress that may distort the optic The recommended receiver for 9 mm work is an Agilent 10780F Remote Receiver with a 9 mm lens on the fiber optic cable input If you have an Agilent 10780F Remote Receiver with a 6 mm lens you can order a 9 mm Replacement Lens Kit Assembly Agilent part number 10780 67003 and a 9 mm Alignment Target Agilent part number 10780 40009 The 9 mm lens can be used with any laser beam having a smaller diameter The 9 mm lens can replace the 6 mm lens if replacement becomes necessary be sure to order the 9 mm Alignment Target also The standard Agilent 10780C input aperture is designed for use with a 6 mm laser beam so it is not recommended for use in a 9 mm laser system Site Preparation 76 Site preparation for laser head Generally Agilent laser heads require no special site preparation other than providing appropriat
469. ngth To calculate the initial compensation number by measuring a known standard or artifact use the following formula Compensation Measured length from laser system on machine 14 Number Actual length from a Standards laboratory If relative compensation is satisfactory for your application the default values of initial compensation may be used See the laser electronics documentation for your system for details Sensor placement To correct for the effects of air conditions on the laser reading place the Agilent 10717A Wavelength Tracker or Agilent 10751C D Air Sensor where it can accurately monitor the conditions influencing the laser beam Mount the sensor as close as possible to the measurement path so it monitors the condition of these laser beams Agilent 10717A Wavelength Tracker When you use the wavelength tracker mount the unit on a stable surface so that alignment is maintained Laser and Optics User s Manual Vol 211 12 Accuracy and Repeatability 212 Agilent 10751C D Air Sensor The air sensor should not be placed directly below the measurement beam path because the heat from the air sensor will affect the laser beam The Agilent 10751C D Air Sensor base contains a magnet to aid in securing it to magnetic materials For permanent mounting fasten the sensor using the 1110 32 tapped hole on the bottom of the unit Mounting arrow A Agilent AX Rei llative Humidity 507 25 75
470. ning a reliable multiaxis measuring system When using the Agilent 10780C F or Agilent E1708A receivers typically up to four measurement axes can be easily implemented without optical power loss imposing significant constraints A system of five or six axes is usually feasible although closer attention to the power loss budget is required A system having more than six axes is possible under certain circumstances with PC or VME based electronics but the optical power loss budget quickly becomes the limiting constraint The Agilent E1709A receiver was designed for systems that have more than six measurement axes Minimum laser output power is 120 microwatts for the laser heads The typical laser output power is about 400 microwatts The output power is relatively constant over the life of the tube and tends to drop off immediately at the end Higher laser output power is available upon request Laser and Optics User s Manual Vol 59 3 System Design Considerations INTRODUCING AN OFFSET A Offset Only gt To Other Optics From Laser Head y B Offset Plus Direction Change To Other Optics E From Laser Head p Figure 10 Introducing an offset into the laser beam Minimum required power at the Agilent 10780C Receiver is 1 5 microwatts The Agilent 10780F Remote Receiver and Agilent E1708A Remote Dynamic Receiver require 2 2 microwatts with its standard Z meter fiber optic cable more with longer cables Th
471. nment 4 4 40 Pan Head Screw Agilent 2200 0121 Lock Washer Agilent 2190 0004 g Agilent 10711A Al Provi ways Provide Adjustable Mount 1 0mm 040 Clearance For Final Lateral Adjustment Figure 24 Horizontal plane mounting using the Agilent 10711A adjustable mount VERTICAL PLANE MOUNTING NOTE Yaw Beam Adjustment Limited Agilent 10711A Adjustable Mount 90 Mounting Hardware 4 40 Cap Screw Agilent 3030 0253 Figure 25 Vertical Plane Mounting Using the Agilent 10711A Adjustable Mount Laser and Optics User s Manual Vol 87 4 System Installation and Alignment Aligning Optics 88 General When installed in a positioning system any transducer must be aligned to ensure correct operation and minimum measurement error The major objectives in aligning the laser system are 1 maximizing the measurement signal at the receiver and 2 minimizing cosine error In general 1 the measurement signal at the receiver is maximized by aligning the optics to center the laser beam on the receiver input and 2 cosine error is minimized by aligning the laser beam in the measurement axis parallel to the motion of travel Figure 26 shows a measurement axis where the laser beam is aligned parallel to the mechanical motion of travel of the retroreflector and centered on the receiver OPTIMUM ALIGNMENT ao Reference Beam e a Retroreflector Interferometer Measurement Beam The r
472. ns tissue 134 Alcohol 135 Maintenance Procedures 135 Before and After Service Product Safety Check 8 Troubleshooting Introduction 138 Table 7 Chapter content summary 138 Troubleshooting Assumptions 139 Electrostatic Discharge ESD 140 Required Test Equipment 140 Table 8 Recommended test equipment 141 Troubleshooting Information 141 Laser Head troubleshooting 141 Contents 133 135 Figure 44 Agilent 5517A B C D Laser Head troubleshooting tree 143 Receiver troubleshooting 144 Table 9 Agilent 10780C or Agilent 10780F Receiver signal chart 145 Figure 45 Agilent Receiver troubleshooting tree Optical device troubleshooting 148 147 Agilent 10717A Wavelength Tracker troubleshooting 148 Laser and Optics User s Manual Vol Figure 46 Agilent 10717A Wavelength Tracker troubleshooting tree 150 Before and After Service Product Safety Check 151 9 Unpacking and Incoming Inspection Introduction 154 Unpacking and Incoming Inspection 154 Warranty Claims 154 10 Packaging for Storage or Shipment Laser Tube 156 Tagging for Service 156 Original Packaging 156 Other Packaging 156 11 Principles of Operation Introduction 160 Measurement Technique 161 Introduction 161 Creating the two frequency laser beam 161 Using the two frequency laser beam at the interferometer 162 Doppler frequency shifting 162 Basic Measurement System 163 Figure 47 Typical older Agilent Laser Position T
473. nspection Introduction 154 Unpacking and Incoming Inspection 154 Warranty Claims 154 RE Agilent Technologies 153 9 Unpacking and Incoming Inspection Introduction This chapter provides information for unpacking and inspection and warranty claims Information about laser tube shipment tagging for service and packaging for reshipment is presented in Chapter 10 Packaging for Storage or Shipment of this manual WARNING To avoid hazardous electric shock do not perform electrical tests when there are signs of shipping damage to any portion of the outer enclosure covers panels meters Unpacking and Incoming Inspection Inspect the shipping container for damage If the shipping container or cushioning material is damaged it should be kept until the contents of the shipment have been checked for completeness and the instrument has been checked mechanically and electrically If the contents are incomplete if there is mechanical damage or defect or if the instrument or some component fails notify the nearest Agilent Technologies Office If the shipping container is damaged or if the cushioning material shows signs of stress notify the carrier as well as the Agilent Technologies office Keep the shipping materials for the carrier s inspection The Agilent office will arrange for repair or replacement at Agilent s option without waiting for a claim settlement Warranty Claims 154 Contact the nearest Agil
474. nual Vol System Installation and Alignment 4 3 Figure 24 shows how to mount certain linear plane mirror or differential interferometers in the horizontal plane using the Agilent 10711A Adjustable Mount 4 Figure 25 shows how to mount certain linear plane mirror or differential interferometers in the vertical plane using the Agilent 10711A Adjustable Mount Fasteners All optical components which are designed to be used with an Agilent 10710B or Agilent 10711A Adjustable Mount are supplied with English mounting hardware The screws supplied with each optical component are those required to mount to its respective adjustable mount HORIZONTAL PLANE MOUNTING 4 40 Pan Head Screw Agilent 42200 0121 Lock Washer Agilent 42190 0004 NA gt of AN E E E E 2 SS Ed E E E E D 2 K g g y AQ ca mg N Ce Agilent 10710B 2 Adjustable Mount Figure 22 Horizontal plane mounting using the Agilent 10710B adjustable mount Laser and Optics User s Manual Vol 85 4 System Installation and Alignment VERTICAL PLANE MOUNTING Agilent 10710B Adjustable Mount 4 40 Cap Screw Agilent 3030 0253 NOTE Yaw Beam Adjustment Limited Agilent 10710B Adjustable Mount 4 40 Pan Head Screw Agilent 2200 0121 Lock Washer Agilent 2190 0004 Figure 23 Vertical plane mounting using the Agilent 10710B adjustable mount 86 Laser and Optics User s Manual Vol System Installation and Alig
475. o vibration effects than others This is particularly true of differential style interferometers such as the Agilent 10715A Agilent 10719A and Agilent 10721A The stability of these interferometers is due to the fact that both their reference beams and their measurement beams travel to external mirrors Any motion of the interferometer itself that is common to both beams will not appear as a measurement Of course any vibration between the reference and measurement mirrors will constitute real measurable displacements Laser and Optics User s Manual Vol 55 3 56 System Design Considerations Adjustable mounts for optics The optical elements inside several of the Agilent laser measurement system optics are not precisely referenced to their housings In most applications involving these optics a few simple alignments during system installation can usually provide equal or better alignment than referencing the optics to their housings Therefore slight positioning adjustments of the unreferenced interferometers beam splitters and beam benders are needed for proper system alignment Positioning adjustments for most optics can be provided by using Agilent 10710B or Agilent 10711A Adjustable Mounts as appropriate These mounts allow adjustment of pitch and yaw of any attached optic Roll adjustment is typically not required and can usually be avoided by careful optical system layout For a listing of which Adjustable Mount
476. ol of a stage must be done at high speeds using a closed loop control system the Y Y value needs to be obtained quickly If the difference is calculated in software in the controller it may be too slow There are two methods to achieve a high speed Y Y output Electronically Optically Electronic yaw calculation method This difference calculation can be done in hardware for both the Y and the Y axes A custom servo board could be designed to accept position information from both Y and Y and perform a fast angular calculation yielding an input for the yaw servo See the appropriate electronics documentation for servo loop interfacing Optical yaw calculation method There are optical configurations that will allow direct output of the difference between Y and Y for example on the Y axis receiver This is shown in Figures 18 and 19 both using the Agilent 10706A Plane Mirror Interferometer Laser and Optics User s Manual Vol 73 3 System Design Considerations OPTICAL METHOD FOR YAW MEASUREMENT Agilent 10706A Plane Mirror Interferometer X Y STAGE Y Axis Receiver Agilent 10725A 50 Beam Splitter Y Axis Bare Optic Receiver Laser Beam From a 33 Beam Splitter 67 Path Agilent 10706A Agilent 10700A Plane Mirror Interferometer Figure 18 Optical Method for Yaw Measurement OPTICAL METHOD FOR YAW MEASUREMENT Note A 1 2 wave plate is note needed when th
477. ometers 71 two axis measurement system using two Agilent 10715A differential interferometers 71 two axis plane mirror 69 two axis plane mirror in a vacuum 69 configurations multiaxis 66 controller 28 36 coordinate measuring machine 292 coordinate measuring machines 215 cosine error 292 definition 188 297 Index cover protective telescoping 49 cube comer 292 D dc interferometer 292 deadpath 292 deadpath counts 218 deadpath error 292 definition 180 deadpath errors compensation for 217 minimizing 216 degrees of freedom 293 determining 64 determining the overall laser system measurement accuracy 213 differential configurations customized 57 differential interferometer 292 differential measurement 293 differential measurement in a lithography application 114 differential measurements with interferometers 57 differential measurements with interferometers 114 direction sense 110 displacement how it is measured 161 doppler frequency shifting 162 dynamic calibrator 5529A 47 USB Expansion Module 47 E E1826E F G Single Axis Plane Mirror Interferometer 218 E1827A Two Axis Interferometer 218 E1837A Three Axis Interferometer 218 effect on measurement direction sense 54 effects of configuration 55 effects of temperature changes 160 efficiency values 61 electronic resolution 170 electronics 10885A PC Axis Board 46 10897B 46 5529A 55292A calibration system 47 N1231A
478. on Atmospheric compensation Since the wavelength tracker provides relative compensation information the initial compensation number from another source determines the compensation accuracy In this example the initial compensation number is derived from measuring a known artifact or standard with the laser system on the machine The accuracy of measuring the artifact or standard is the sum of the laser system measurement repeatability machine repeatability and touch probe accuracy It is assumed that no error is induced in measuring the artifact Consequently in this example accuracy and repeatability of atmospheric compensation information will be equal Using Equation 4 given earlier in this chapter and the specified environmental conditions accuracy and repeatability of compensation information from wavelength tracker can be determined Laser and Optics User s Manual Vol 193 12 Accuracy and Repeatability Compensation accuracy and repeatability 0 06 ppm degreeC 0 002 ppm H 3 0 067ppm aE x 0 5 degree C x 25mm Hg 0 15 ppm At maximum distance the position uncertainty due to compensation will be Compensation Error 1 0 m 0 15 x 10 0 15 micron With no atmospheric compensation the error would be 9 0 ppm This translates to a position uncertainty at the maximum distance of 1 m of 9 0 microns Material thermal expansion On a CMM with a laser interferometer system used as the posi
479. on factor by calculation rather than by using the compensation factor tables the results you get depends on the resolution of the equipment on which you make your calculation and on your ability to operate it without error You will be working with numbers that are very small and numbers that are very large even the smallest error can have a significant effect on the accuracy of your answer and any error is extremely difficult to detect or trace We strongly suggest that you make a practice run using values from any of the compensation factor tables to get a feeling for what is required In the formulas below T Air Temperature P Air Pressure H Relative Humidity C Compensation Factor to be entered into the controller 10 N 108 C where N is given in Metric and English systems by Metric T in degrees Celsius P in millimeters of mercury H in 1 10 0 817 0 0133T 20057627 1 0 0036610T N 0 3836391P x 3035 x 10 x Hx English T in degrees Fahrenheit P in inches of mercury H in 1 10 2 P 26 7 0 187T 0 934915 0 00203389 T 0 032015T N 97443P x 1 089 x 10 x Hx e Laser and Optics User s Manual Vol 225 13 Wavelength of Light Compensation EXAMPLE Using the Standard conditions Humidity 50 H Pressure absolute 760 mm Hg P Temperature 20 C T We will calculate the compensation factor
480. on this axis until a signal is received on the receiver The voltmeter will suddenly jump to some value greater than 0 25 volt This is a critical adjustment and may initially require great care 19 Adjust the laser beam in pitch and yaw to get the maximum voltmeter reading which may be fluctuating Now carefully readjust the interferometer until the voltage reading suddenly drops back down to about 0 3 volt The alignment should be adjusted such that the voltage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage system operation will be degraded This will align the laser beam to within 1 2 arcminutes to the direction of travel resulting in a cosine error of approximately 0 05 ppm That is 0 05 micron per meter of travel 0 05 microinch per inch of cosine error 20 Fasten the single beam interferometer and beam bender securely making sure the alignment is preserved Remove the reflector true square 21 Adjust the retroreflector until the return measurement beam is centered on the receiver and overlaps the reference beam from the interferometer Placing a piece of translucent tape over the receiver lens will help in observing the incident beams 22 Verify that the receiver s LED is ON and the voltage at the receiver test point is between 0 6 and 1 3 Vdc for 10780C F or 1 5 and 8 0 Vdc for E1708A or 1 8 and 10 0 Vdc for E1709A
481. onment Also use the appropriate compensation methods to correct for atmospheric and material temperature effects 2 When designing a machine to use a laser interferometer system minimize both deadpath distances and Abb offsets If a deadpath exists on the machine correct for it during measurements 3 For each measurement axis be sure to properly align optical components during installation to minimize the amount of cosine error 4 Use the proper components for the particular application If significant changes in environmental conditions are expected use automatic compensation and interferometers with minimal thermal drift Additional details are presented below Minimizing environmental effects The relative importance of typical atmospheric effects and material temperature errors is shown in Figure 66 Measurement errors due to material temperature errors are especially important in many applications Ideally all distance measurements with the laser system would be made in a temperature controlled room held at exactly 20 C 68 F the standard temperature Then the machine or part would be at its true size and the wavelength compensation number determined earlier could be used directly Laser and Optics User s Manual Vol Accuracy and Repeatability 12 RELATIVE EFFECT OF ERRORS 600 550 500 Material Temperature Error Of 1 C Steel T 400 2 o E 300 9 ui Air Temperature 200 Error Of 1 C
482. onment the effects of air turbulence can be minimized by protecting the laser beam with some type of cover Since this would normally be done for protection against beam interruption air turbulence effects will usually not be a significant installation factor in a typical environment Protection against air turbulence problems which occur in a controlled environment depends largely on the specific application For systems such as integrated circuit lithography equipment in small closely controlled enclosures it may be sufficient to provide constant air flow over the measurement paths In other cases such as large coordinate measuring machines protecting the laser beams with covers prevents air turbulence effects from interfering with the measurement Avoiding thermal gradients One source of air turbulence which can affect both the laser system and also the accuracy of the machine itself is thermal gradients created by localized heat sources e g motors electromagnetics lamps etc located on or near the machine You should shield the measurement path from these types of heat sources A key benefit of the Agilent 10780F Agilent E1708A and Agilent E1709A remote receivers is that they allow remote mounting of the receiver electronics eliminating its 2 watts of heat from the measurement area The remote fiber optic pickup is entirely passive and dissipates no heat A local heat source which can affect the laser system enough to caus
483. ontaminant 3 Do notreuse the tissue 4 For additional cleaning repeat the process using a new tissue Except as described in the CAUTION above for the Agilent 10719A Agilent 10721A Agilent 10735A Agilent 10736A or Agilent 10736A 001 interferometers which may be damaged by incorrect attempts at cleaning for external optical surfaces that are hard to reach the tissue may be held with a clamping tweezer such as a hemostatic forceps Alternatively a cotton tipped swab may be used Take care not to scratch the coated surface Do not scrub the surface with a dry tissue Alcohol Avoid alcohol contamination with the following precautions 1 Useonly new previously unopened containers Alcohol absorbs water if left exposed to air This will result in water spots when the alcohol evaporates 2 Transfer the alcohol to a squeeze bottle that can be capped and made airtight 3 Never transfer alcohol back into the original container Maintenance Procedures Each laser head and receiver are shipped with their own service manual which contains the adjustments and checks required to keep each respective laser head and receiver at peak performance Included in the manual are the test equipment required equipment setups and procedures to perform the adjustments Before and After Service Product Safety Check The following safety checks must be performed after any troubleshooting and repair procedures have been completed to ensure the
484. oor environment its accuracy may be limited by its own geometry thermal expansion and optics thermal drift In this case the most practical solution is to improve the environment and use optics that are thermally stable Air turbulence Air Turbulence is an important factor to be considered during installation of a laser system It is usually caused by variations in air temperature The major effect of air turbulence is reduction of amount of signal at the receiver This reduction is due to either physical deflection of the laser beam or degradation of the beam s coherence Excessive air turbulence may cause complete loss of measurement signal This loss of signal will be detected by the Agilent electronics which will output an error signal One application where serious consideration must be given to air turbulence is a temperature controlled environment Although it would appear that such an environment would be ideal temperature controlled areas often exhibit greater air turbulence than non controlled areas This turbulence is caused by incomplete mixing of new air from the temperature control unit with existing air creating thermal gradients or pockets Although such environments are good for a machine s thermal stability the short term fluctuations can cause measurement signal degradation in the laser system Laser and Optics User s Manual Vol Accuracy and Repeatability 12 Reducing air turbulence In an uncontrolled envir
485. ot disturbed Laser and Optics User s Manual Vol 103 4 104 System Installation and Alignment 10 1 12 13 14 15 16 17 18 19 20 Lock the laser head and X axis optics down securely Remove the receiver alignment target Verify that the LED indicator on the receiver is lighted and that the voltage at the receiver test point is between 0 6 and 1 3 Vdc Steps 11 through 20 constitute the Y axis Overlapping Dot alignment procedure Place the alignment target on the Y axis single beam interferometer and on the Y axis receiver Place a piece of opaque material between the single beam interferometer and the retroreflector Pitch and yaw the 50 6 beam splitter until the reflected laser beam is centered in the beam bender entrance aperture Slight lateral adjustments of the 50 beam splitter may be necessary to ensure there is no beam clipping Fasten the 50 beam splitter securely Adjust the beam bender until the reflected beam is centered on the alignment target installed on the single beam interferometer Fasten the beam bender securely in place With the single beam interferometer and retroreflector at their closest points adjust the single beam interferometer until the reference beam is centered on the receiver alignment target Remove the opaque material Adjust the Y axis retroreflector until the measurement beam is centered on the receiver alignment target Move the retroreflector to its
486. p Low Humidity Temp 22 to 30 C Press 640 to 720 mm 20 Humidity 235 Metric High Alt High Mid Temp Low Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 20 Humidity 236 Metric Low Alt Low Temp Med Humidity Temp 5 to 13 C Press 720 to 800 mm 50 Humidity 237 Metric Low Alt Low Mid Temp Med Humidity Temp 13 5 to 21 5 C Press 720 to 800 mm 50 Humidity 238 Laser and Optics User s Manual Vol 15 Tables Table 29 Metric Low Alt Mid Temp Med Humidity Temp 22 to 30 C Press 720 to 800 mm 50 Humidity 239 Table 30 Metric Low Alt High Mid Temp Med Humidity Temp 30 5 to 38 5 C Press 720 to 800 mm 50 Humidity 240 Table 31 Metric High Alt Low Temp Med Humidity Temp 5 to 13 C Press 640 to 720 mm 50 Humidity 241 Table 32 Metric High Alt Low Mid Temp Med Humidity Temp 13 5 to 21 5 C Press 640 to 720 mm 50 Humidity 242 Table 33 Metric High Alt Mid Temp Med Humidity Temp 22 to 30 C Press 640 to 720 mm 50 Humidity 243 Table 34 Metric High Alt High Mid Temp Med Humidity Temp 30 5 to 38 5 C Press 640 to 720 mm 50 Humidity 244 Table 35 Metric Low Alt Low Temp High Humidity Temp 5 to 13 C Press 720 to 800 mm 80 Humidity 245 Table 36 Metric Low Alt Low Mid Temp High Humidity Temp 13 5 to 21 5 C Press 720 to 800 mm 80 Humidity 246 Table 37 Metric Low Alt Mid Temp High Humidity
487. p to the greater of 300 000 or the actual amount paid for the product that is the subject of the claim and for damages for bodily injury or death to the extent that all such damages are determined by a court of competent jurisdiction to have been directly caused by a defective Agilent product TO THE EXTENT ALLOWED BY LOCAL LAW THE REMEDIES IN THIS WARRANTY STATEMENT ARE CUSTOMER S SOLE AND EXCLUSIVE REMEDIES EXCEPT AS INDICATED ABOVE IN NO EVENT WILL AGILENT OR ITS SUPPLIERS BE LIABLE FOR LOSS OF DATA OR FOR DIRECT SPECIAL INCIDENTAL CONSEQUENTIAL INCLUDING LOST PROFIT OR DATA OR OTHER DAMAGE WHETHER BASED IN CONTRACT TORT OR OTHERWISE For consumer transactions in Australia and New Zealand the warranty terms contained in this statement except to the extent lawfully permitted do not exclude restrict or modify and are in addition to the mandatory statutory rights applicable to the sale of this product to you Assistance Product maintenance agreements and other customer assistance agreements are available for Agilent products For any assistance contact your nearest Agilent Sales and Service Office 8 CD L 03 11 97 R1 J CW1Bm RE Agilent Technologies Manual Part Number 05517 90086 Volume I Printed in U S A SEPTEMBER 2007
488. per beam alignment Refer to Chapter 35 Receivers and in Volume II refer to Chapter 4 System Installation and Alignment and Chapter 5 Measurement Optics General Information for procedures Laser and Optics User s Manual Vol Troubleshooting 8 Notes 1 Voltage levels differential square wave at doppler shifted frequency 100 kHz to 7 2 MHz 100 kHz to 15 5 MHz for E1709A a White cable WHT 7 2 5V 5V Meas Freq X b Black cable BLK F 2 5V 5V Meas Freq Check for beam alignment at receiver using target Is LED lit on receiver x 2 Agilent 10780C F Receiver Operating and Service Manual Agilent Part Number 10780 90028 Agilent E1708A Receiver Operating Manual Agilent Part Number E1708 90010 Check for Agilent E1709A Receiver Operating Manual Re align NO measurement signal Agilent Part Number E1709 90006 optics es at Axis or Auto Comp Board WHT BLK 3 See Chapter 8 Receivers of this manual for factory set value and range of 1070C F receiver sensitivity control For E1708A or E1709A see their Note 1 respective manuals listed above Measurement Block the beam signal ok so that it does not enter the receiver YES Check for 15 0 5V the Receiver cable Check the Receiver cable measurement electronics NO output Axis or Auto comp board output Problem exists WHT GRA GRN elsewhere in system Back
489. plane connector and power supply Does NO LED on receiver stay lit YES Measure voltage at receiver s test point Perform Receiver alignment Is and Gain Adjustment voltage procedure outlined ok in Chapter 8 of this manual YES Measure beam strength at input to receiver Refer to Receiver Service Manual Alignments and Adjustments paragraphs chapter 4 See Note 2 Check the Receiver cable and cable to axis board Problem with optical Is path attenuation or beam strength low output from ok laser head See Note 3 NO Cables ok Replace cables YES Refer to Refer to Reciever Oper Service Manual Receiver Oper Serv Manual See Note 2 See Note 2 Figure 45 Agilent Receiver troubleshooting tree Laser and Optics User s Manual Vol 147 8 148 Troubleshooting Agilent 5519A B Laser Head internal receiver See the Agilent 5519A B Laser Head Service Manual for internal receiver troubleshooting information Optical device troubleshooting Problems with the optical devices are usually caused by their misalignment Refer to the alignment procedures in this manual for further information Air turbulence caused by ventilation equipment or temperature gradients near the laser beam path can also cause measurement problems If this is suspected shield the area around the laser beam and optical devices with cardboard tubing plastic sheet or other suitable mate
490. plied Agilent 10711A Agilent 10715A 001 Differential Interferometer High Accuracy Plane Mirror 12 7 mm 0 5 in Turned Agilent 10724A or user supplied 50g 1 8 oz Agilent 10711A Agilent 10716A High Resolution Interferometer High Resolution Plane Mirror 12 7 mm 0 5 in Straight through or Turned Agilent 10724A or user supplied 50g 1 8 oz Agilent 10711A Agilent 10717A Wavelength Tracker Wavelength of li ght compensation Not Applicable Not Applicable Built in Not Applicable Agilent 10719A One axis Differential Interferometer One Linear Plane Mirror Measurement Differential or One Angular Measurement Laser and Optics User s Manual Vol 1 128 5 nm 0 054 arcsec 0 26 urad See Specifications Straight through only custom custom custom 107 Measurement Optics General Information Measurement Optics Summary continued Model Number and Name Agilent 10721A Two axis Differential Interferometer Application Two Linear Plane Mirror Measurements Differential Linear Yaw System Resolution 4 128 5 nm 0 08 arcsec 0 4 urad Beam Separation See Specifications Config uration Straight through only Reflector custom Reflector Weight custom custom Agilent 10735A Three axis Interferometer 3 Linear Plane Mirror Measurem
491. ptical devices from the system Most systems contain more than one axis and consequently more than one receiver If trouble is suspected with one particular receiver exchange it with another receiver to verify the suspected malfunction If you suspect problems Laser and Optics User s Manual Vol Troubleshooting 8 with the alignment of a receiver refer to Chapter 35 Receivers and Chapter 5 Measurement Optics General Information in this manual for the appropriate alignment procedures A loose or broken fiber optic connection at either the remote lens or electronics of the Agilent 10780F Remote Receiver Agilent E1708A or Agilent E17094A can also cause the receiver to appear bad The receiver LED indicator may remain on even if the beam between the interferometer and the retroreflector is blocked This can occur occasionally with correct optical alignment if the measurement path is very short and few optical devices are used in the measurement path If this situation occurs refer to the receiver s operating and service manual The troubleshooting tree of Figure 45 will help you determine if the Agilent 10780C Receiver Agilent 10780F Remote Receiver is faulty Repair of the Agilent 10780C or Agilent 10780F is outlined in the Agilent 107SOC F Operating and Service Manual Table 9 shows the Agilent 10780C F Receiver signal chart Table9 Agilent 10780C or Agilent 10780F Receiver signal chart Receiver Input Signal N
492. ptics and laser beam Laser and Optics User s Manual Vol 49 3 System Design Considerations Figure 7 shows a different type of protective cover Again the mechanical arrangement allows the retroreflector to be close to the interferometer at the closest point of travel even though the telescoping cover is not entirely collapsible Another type of protective cover is the flexible bellows This is generally used for short travel distances COLLAPSIBLE SPIRAL COVER Machine Saddle Moving Retroreflector Spiral Cover Fixed Interferometer a Receiver To Electronics Fixed Conduit Laser Beam For Laser Beam Figure7 Collapsible spiral cover for movable retroreflector 50 Laser and Optics User s Manual Vol System Design Considerations 3 System Grounding Be sure to consider electrical grounding requirements as you plan and install your Agilent laser measurement Grounding is important for safety reasons but your grounding arrangement can also affect your laser system s performance Best practice requires that all system components that are connected to electrical ground should be connected to ground at a common point not at separate points Your electrical ground connections should radiate from a single point Using more than one grounding point could create a ground loop which could introduce an unacceptable level of electrical noise into the electronics Signal grounds on each Agilent laser head
493. r All LEDs on the rear panel of the laser head should light except for the READY LED The laser head should emit a red laser beam within 45 seconds after receiving power About halfway through the lock up period the READY LED blinks on and off to indicate that the laser is in the process of locking When the head is ready for use this LED remains on indicating the laser has achieved lock and is generating a reference signal The laser head requires a period to stabilize the frequencies before a reliable measurement can be made The length of the stabilization period depends on which model laser head is installed in the system WARNING Do not stare directly into the beam or its reflection from a polished surface or this could result in eye damage 2 Now align the optics as described in the following section titled Aligning the Optics To line up the connectors for the N1231B Ref and Meas cables the red dot on the cable connector is to the right Laser and Optics User s Manual Vol 31 2 Familiarization and Initial Operation Aligning the Optics 32 The laser head optics and receiver must be aligned so the laser beam from the optics returns to the receiver lens 1 Set the laser head on a stable surface and point the beam in the direction you intend to move the optics Set the interferometer in the laser beam path so the beam enters the interferometer aperture perpendicular to the aperture You may ne
494. r WCNO Ay R is equal to the LRC in units of length where R is the amount of resolution extension The compensation number at the time of measurement is WON In most cases when you enter a deadpath distance into the software a positive value corresponds to the case in which the measurement path length is longer than the reference path length However for the Agilent 10719A and Agilent 107214 differential interferometers the deadpath distance sign depends on the measurement mirror position during reset For example if the measurement and reference mirrors are located coplanar during reset the deadpath distance is 19 mm 9 750 inch Laser and Optics User s Manual Vol 185 12 Accuracy and Repeatability Even with this correction a small error still remains because of the repeatability of the compensation number determination This deadpath correction error is given as Deadpath Correction Error Deadpath Distance x Wavelength Compensation Number Repeatability 9 The error in measuring the deadpath distance can generally be ignored if its measurement tolerance is within 0 5 mm Deadpath error and deadpath correction error are both proportional values that are specified in parts per million However the measurement error is a function of deadpath distance rather than the distance measured by the interferometer Using the Agilent 10717A Wavelength Tracker and software correction the deadpath correction error will be
495. r is generated of a magnitude directly related to the angle of misalignment For a complete description of cosine error see Chapter 12 Accuracy and Repeatability in this manual Second when movement occurs between the optics the angular misalignment also causes a lateral displacement of the measurement beam with respect to the reference beam at recombination resulting in additional signal loss Figure 28 illustrates the result of angular misalignment Laser and Optics User s Manual Vol 89 4 90 System Installation and Alignment ANGULAR MISALIGNMENT Laser Beam Receiver Laser Axis Reference Beam u Retroreflector Position 1 Retroreflector Position 2 iu Interferometer Measurement Beam Travel Axis Figure 28 Effects of angular misalignment to the direction of travel The presence of measurement signal through the total length of travel does not guarantee that the measurement axis is aligned for minimum cosine error Also any angular misalignment of the laser beam to the direction of travel causes a decrease in the measurement signal strength Alignment principles Before beginning any alignment procedure you should understand the basic principles The following information summarizes the various factors that affect the optical alignment of the laser system While performing the alignment procedure keep in mind 1 In order to achieve maximum accuracy the la
496. radius Connectors available Attenuation Glass Fibers Bending radius Connectors available Attenuation 35 mm minimum ST to V pin Agilent E1705B and ST to ST Agilent E1705C approximately 190 dB km 47 mm minimum ST to V pin Agilent E1705E and ST to ST Agilent E1705F approximately 12 dB km Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 7 Maintenance General 132 Procedures for Cleaning Optics 132 Maintenance Procedures 135 RE Agilent Technologies 131 7 Maintenance General Periodically inspect the laser head optical components receivers and associated items for indication of mechanical or electrical defect Look for signs of overheating corrosion accumulations of dust oil loose electrical connections or broken parts Also check the Agilent 10780F Remote Receiver Agilent E1708A Dynamic Remote Receiver and the Agilent E1709A Remote High Performance Receiver for loose fiber optic connections at both ends of the fiber Repair any obvious defect If necessary clean the unit with dry clean compressed air or a vacuum cleaner CAUTION Do not use compressed air on an Agilent 10719A Agilent 10721A Agilent 10735A Agilent 10736A or Agilent 10736A 001 interferometer The units may be damaged by use of compressed air CAUTION To avoid scratching an optical device during cleaning use the optics cleaning procedures below
497. ransducer block diagram Basic Agilent Laser Measurement System Components 164 Laserhead 164 System optics 164 Receiver 165 Environment sensors 166 12 Accuracy and Repeatability Introduction 168 The Components of System Accuracy and Repeatability 168 Contents 163 Table 10 Error components for accuracy and long and short term repeatability error budgets 169 Laser wavelength 169 Electronics error 170 Table 11 System measurement resolution for each interferometer 171 Laser and Optics User s Manual Vol Contents Optics nonlinearity 172 Figure 48 Worst case error resulting from imperfect separation of two beam components 173 Atmospheric compensation 173 Material thermal expansion 176 Optics thermal drift 176 Figure 49 Conventional plane mirror interferometer with unequal path lengths that result in optics thermal drift 177 Figure 50 Agilent 10706B High Stability Plane Mirror Interferometer Beam Paths 178 Figure 51 Comparison of optics thermal drift between Interferometers 179 Deadpath error 180 Figure 52 Deadpath caused by unequal lengths from initial point 181 Table 12 Deadpath mirror positions and values for Agilent interferometers 182 Figure 53 Optical configuration with and without deadpath 184 Abb error 186 Figure 54 Abb error 187 Cosine error 188 Figure 55 Cosine error 188 Determining System Accuracy and Repeatability 189 Table 13 Laser interferometer s
498. re switched on the interferometers therefore changing the direction sense For more information see the Chapter 5 Measurement Optics General Information in this manual Vibration isolation for optics Vibration of the optics along the beam can cause the fringe count in the laser measurement system electronics to fluctuate rapidly Vibrations along this axis constitute real measurable displacements you will have to decide if these fluctuating measurements are acceptable in your application In extreme cases however the velocity of the optics may momentarily exceed the velocity limitation of the laser system causing an error When vibration occurs perpendicular to the beam the beam signal power can fluctuate If this fluctuation is too great insufficient beam signal will arrive at the receivers causing a measurement signal error Loose mounting can cause the optics to move inappropriately during a measurement causing a measurement error or loss of beam power Elastic mounting can have the same effect as loose mounting It can also be responsible for a sag offset in the optics positions If there is vibration in the machine an elastic mounting can transmit and amplify the vibration to the attached optic possibly causing more errors You should anticipate these effects and minimize them if necessary during the laser measurement system design process Certain interferometers are inherently less susceptible t
499. rected in the electronics or by software Note that the receiver for each axis is above the input beam Three axis measurement system using discrete plane mirror interferometers X Y YAW Some X Y stage applications require measurement or control of the stage yaw Yaw is angular rotation of the stage about an axis the Z axis perpendicular to the plane of the stage With two interferometers on one axis of the stage angular motion can be calculated Figure 17 the yaw angle THETA is measured using axes Y and Y and is calculated as follows THETA arctan 7 Laser and Optics User s Manual Vol 71 3 System Design Considerations TWO AXIS MEASUREMENT SYSTEM X Y STAGE gt gt Reference x Mirror A Y X Axis A MIRRORS X Axis Receiver Laser X Axis m Differential Interferometer 001 Reference Laser Y Axis Mirror Laser Beam AA gt 50 Y Axis Beam Receiver Splitter Note Beam from laser passes under the receivers The return beams return to the receivers after being offset in the interferometers Figure 16 Two axis system using two Agilent 10715A differential interferometers YAW MEASUREMENT OF X Y STAGE Agilent 10706A Plane Mirror Interferometer X Y STAGE YAW U Y Axis Receiver K AW Agilent 10706A Y Plane Mirror Interferometer x Agilent 10701A pa 50 Beam Splitter y Axis l i A 67 Receiver MIRRORS n AA Agilent 10700A 33
500. referenced interferometers a list 78 referenced mirrors true squares 98 remote control units 10888A 47 repeatability definition 168 resolution system for interferometers 171 resolution electronics 170 resolution fundamental optical 110 resolution interferometers 110 retroreflectors 160 returning product to Agilent Technologies 156 roll 39 S safety checks 135 151 sense measurement direction 110 sensor placement 211 sensors environment 166 shielding magnetic 53 shipment laser tube assembly 156 single axis plane mirror interferometer E1826E F G 218 single axis system to control servo track writing example configuration 65 site preparation for laser head 76 299 Index site preparation for optical devices 76 site preparation for referenced interferometers 78 six degrees of freedom 293 stability pointing 53 starting system 31 storage laser tube assembly 156 summary of measurement optics table 107 system grounding 51 81 10895A 51 10898A 51 laser head 51 PC electronics 51 PCI electronics 51 receiver 51 VME electronics 51 system measurement resolution for each interferometer 171 system optics 164 system power up 31 T tagging returned products 156 temperature changes effects 160 temperature controlled environment 214 test equipment required 140 thermal drift optics definition 176 thermal expansion coeffients 280 thermal gradients avoiding 215 th
501. res for aligning and mounting the NGI page 123 fiber optics specifications page 130 Chapters 31 through 34 in Volume II of this manual provide complete descriptions of the different NGI interferometer models Table 5 lists and summarizes the Agilent NGI interferometers All of the NGIs products are dual pass interferometers and hence have an optical resolution of 4 4 Depending on the resolution extension the measurement resolution can go down to 0 15 nm Laser and Optics User s Manual Vol Table 5 Model Number and Name Agilent E1826E F G NGI Interferometers summary Number Axes Beam Diameter 9 mm maximum visible Optical Resolution NGI Measurement Optics General Information Typical Optical Efficiency Input power axis output power Base Plate Material Invar Option 070 Passivated 416 Stainless Steel Option 071 0 40 kg 89 Ibs Agilent E1827A 9 mm maximum visible All axes 26 Passivated 416 Stainless Steel 2 35 kg 5 22 Ibs Agilent E1837A 9 mm maximum visible All axes 18 Passivated 416 Stainless Steel 2 67 kg 5 93 Ibs Agilent 24399A 9 mm maximum visible All axes 1896 Invar 1 66 kg 3 65 Ibs Agilent 24422B 9 mm maximum visible Axis 3 1396 Axes 1 and 2 1896 Passivated 416 Stainless Steel 1 95 kg 4 3 Ibs Agilent 24420B 9 mm maximum visible Axis 5 796 A
502. rial Some problems with sporadic counting and drift can be traced to air turbulence around the measurement path This should be considered as a possibility before troubleshooting other parts of the system If the problem is traced back to dirty optics refer to Procedures for Cleaning Measurement Optics in Chapter 7 Maintenance of this manual before you try to clean them Defective measurement optics should be returned to Agilent Technologies where they will be evaluated for repair Follow the procedures outlined in Chapter 10 Packaging for Storage or Shipment of this manual for packaging methods and procedures Procedures for cleaning optics are given in Chapter 7 Maintenance of this manual Agilent 10717A Wavelength Tracker troubleshooting Troubleshooting the Agilent 10717A Wavelength Tracker involves proper interpretation of the Agilent laser system electronics front panel annunciators system and board level self tests and knowing when the Wavelength Tracker requires realignment to the system optics The main system problems that could occur include Misalignment of the wavelength tracker the receiver the system optics and system laser source Improper programming of system Malfunction of the receiver Malfunction of the Agilent system electronics for example the Agilent Automatic Compensation Board Troubleshooting trees figures 45 and 46 respectively will help you determine if th
503. roportional terms or fixed terms The resulting measurement errors from proportional terms are a function of the distance measured Fixed terms are noncumulative and the resulting measurement errors are not a function of the distance measured Repeatability error components can also be divided into short term lt 1 hour and long term gt 1 hour components For short term repeatability only a subset of the total error components is included Generally the optics and material thermal effects are negligible over a short period of time and these components are deleted from the short term repeatability error budget Additionally short term laser wavelength stability is used instead of long term wavelength stability and atmospheric changes especially pressure will also be smaller Steinmetz C R Displacement Measurement Repeatability in Tens of Manometers with Laser Interferometry Proc SPIE Vol 921 p 406 420 1988 Laser and Optics User s Manual Vol 189 12 Accuracy and Repeatability Examples Determining System Accuracy and Repeatability 190 The examples below illustrate the calculation of measurement accuracy and repeatability of Agilent laser measurement systems for two typical applications In the first example the laser system is part of a precision coordinate measuring machine CMM and monitors the position of the touch probe on the machine In this example accuracy and long term repeatability will be det
504. ror at 1 0m Worst Case Microns Figure 60 Worst case System Repeatability with Atmospheric Compensation for the CMM example IC Wafer Stepper example In this example the laser system is built into an Integrated Circuit Wafer Stepper and controls the position of the wafer stage A typical configuration for this application is shown in Figure 61 It uses Agilent 10706B High Stability Plane Mirror Interferometers and an Agilent 10717A Wavelength Tracker Following is a list of parameters needed to calculate the system accuracy and repeatability The laser head and optics component specifications are taken from this manual system resolution specifications for Agilent laser transducer electronics Agilent 10885A Agilent 10895A Agilent 10897B and Agilent 10898A are taken from the manual of the respective electronic board and the Agilent 10751C D Air Sensor and Agilent 10757D E F Material Temperature Sensor environmental specifications are provided in this chapter Laser and Optics User s Manual Vol 199 12 Accuracy and Repeatability 200 Dimensions see figure below Maximum distance measured L 0 2 m Deadpath distance D 0 1 m Cosine Error 0 05 ppm Agilent 10706B aligned according to procedure in this manual Nonlinearity 2 2 nm Agilent 10706B Abb error none assume zero offset Measurement resolution 5 nanometers Agilent 10706B ENVIRONMENT Temperature 20 C 0 1 temperature controlled environ
505. roreflector to its furthest point of travel 6 Pitch and yaw the laser head to center the return beam on the receiver alignment target 7 Return the retroreflector to the point closest to the interferometer 8 Repeat steps 4 through 7 until the return beam is centered on the receiver alignment target at both ends of travel A lateral offset of 500 microns over a 0 5 meter travel is equal to a cosine error of 0 12 ppm or 0 12 micron per meter of travel 0 12 microinch per inch 102 Laser and Optics User s Manual Vol System Installation and Alignment 4 OVERLAPPING DOT ALIGNMENT poea 1 1 dri Y Axis Retroreflector Beam Bender VON Axis Single Beam Interferometer Y Axis Voltmeter Receiver 1 Test Point X Axis Retroreflector gt LL m pur 50 X Axis Beam Linear X Ax Splitter pees Interferometer A Alignment Schematic Laser Beam Receiver Alignment Target Position 2 Interferometer Allgnment Target Receiver Alignment Target Position 1 P d M r j To Interferometer Pa Receiver From Interferometer B Alignment Target for Interferometer C Alignment Target for Receiver Figure 34 Overlapping dot alignment 9 Ifthe reference beam returning from the interferometer is not centered on the receiver target adjust the interferometer until both the reference and the measurement beams are centered In step 10 make sure the alignment is n
506. s General Information General 106 Table 3 Measurement Optics Summary 107 Resolution 110 Table 4 Interferometer Resolutions 110 Range 110 Measurement Direction Sense 110 Contents Figure 35 Effect of beam directing optics on laser beam polarization orientations 112 Vibration Isolation 113 Fasteners 113 Vacuum Applications 114 Use Through Window 114 Differential Measurements with Interferometers 114 Moving Interferometer Instead of Reflector 116 6 NGI Measurement Optics General Information Introduction 118 Table 5 NGI Interferometers summary 119 NGI Optical Schematic 120 Figure 36 Next Generation Interferometer laser beam path 120 NGI Angular Resolution 121 Figure 37 NGI Angular Resolution diagram 122 Alignment and Mounting 123 General 123 Procedure 123 Figure 38 Interferometer datums relative to ideal zero stage angles Figure 39 Setup for determining system zero stage angles 125 Figure 40 Interferometer mounting 126 Table 6 Screw Torque Requirement 127 Figure 41 Input beam cone angle for ideal zero stage angles 127 Laser and Optics User s Manual Vol 124 Figure 42 Input Beam Position Adjustment 128 Measure Point Tolerance 129 Figure 43 Measure Point Tolerance 129 Fiber Optic Interface Specifications 130 7 Maintenance General 132 Procedures for Cleaning Optics 132 Agilent Receivers 133 Measurement optics and beam directing optics Le
507. s and receivers for Agilent laser measurement systems into precision measuring or positioning equipment Typical applications are for equipment used in the integrated circuit disk drive and precision machine industries This manual does not provide detailed information about laser head or receiver electronics That information is provided in the manual for the particular unit Refer to the section titled Manuals Available at the end of this chapter for details Information about measurement system electronic components such as printed circuit boards and air and material temperature sensors is also not in this manual Contact Agilent Technologies for help in ordering the documentation you want How to Locate Information The table of contents list of figures list of tables and an alphabetical index of subjects help you locate information Manual Organization 20 This user s manual consists of two volumes Volume I is organized as follows Chapter 1 About this Manual this chapter introduces you to the content and organization of this manual and gives information about available supplementary manuals Chapter 2 Familiarization and Initial Operation describes a typical single axis laser interferometer positioning system It provides a simple Getting Started procedure that describes how to quickly set up and operate an Agilent laser interferometer positioning system using PC based electronics Only essential i
508. s x Wavelength Conversion Factor x TCN Deadpath in selected units Accumulated raw counts is the actual output from the electronics rather than the number of wavelengths For the Agilent 10716A interferometer a displacement count equals A 256 where is the wavelength of the laser in air for Agilent laser electronics Laser and Optics User s Manual Vol 217 12 Accuracy and Repeatability 218 When using one of the interferometers listed below an actual displacement count is equal to A 4 x Electronics Resolution Extension Factor where X is the wavelength of the laser in air for Agilent laser electronics Agilent 10706A B Plane Mirror Interferometer Agilent 10715A Differential Interferometer Agilent 10719A One Axis Differential Interferometer Agilent 10721A Two Axis Differential Interferometer Agilent 10735A Three Axis Differential Interferometer Agilent 10736A Three Axis Differential Interferometer Agilent 10736A 001 Three Axis Differential Interferometer with Beam Bender Agilent E1826E F G One Axis Plane Mirror Interferometer Agilent E1827A Two Axis Interferometer Agilent E1837A Three Axis interferometer e Agilent Z4399A Three Axis interferometer e Agilent Z4422B Three Axis interferometer Agilent Z4420B Five Axis interferometer e Agilent Z4421 B Five Axis interferometer For the interferometers listed below a displacement count equals A 2 x Electronics Resolution Extension Factor
509. s are then operated like the axis in the example Basic steps apply to all laser systems Specific products identified by Agilent model number are used in the example but the installation and operation of other Agilent products are similar The example shows the use of PC compatible electronics and a linear interferometer If you are using a different interferometer you may need to refer to the chapter in this manual that describes that interferometer for more details on optical alignment Regardless of the specific products you are using the information and procedures presented in this chapter will help you get started quickly and easily Agilent laser interferometer positioning systems at a glance 26 Figure 1 shows the components of a typical single axis Agilent laser system All Agilent laser systems combine optics interferometer and reflector electronics and opto electronics laser head and receiver to make a highly accurate positioning system Laser and Optics User s Manual Vol Familiarization and Initial Operation 2 Beam directing Optics beam benders beam splitters Laser Head Beam Agilent 5517C Measurement Optics Agilent 10702A Interferometer n Laser an Receiver Beam Agilent 10703A Retroreflector Agilent E1708A Reference Measurement Frequency Frequency Laser Head and Optics Described in this Manual Measurement System Electronics Described in oth
510. s under changing conditions Correct the residual distance D in software in the controller Equalize the path lengths of fp and f by moving the reference cube corner a distance D from the interferometer See Figure 68 Assuming the atmospheric conditions are equivalent and the distances between the cube corners and the interferometer are equal this configuration would not have deadpath errors due to unequal path lengths Take care when using this method of reducing deadpath because any drift in the position of the reference cube corner will also show up as a measurement error This drift can result from non rigid mounting and thermal expansion for example Laser and Optics User s Manual Vol Accuracy and Repeatability 12 EQUAL PATH LENGTH CORRECTION Reference Cube Corner m um um es um nd M 5 gt _ gt EA i Measurement f Cube Corner B I LEGEND m m m m p t5 gt f4 and fg Figure 68 Equal path length correction Compensation for deadpath errors Correction for deadpath error unequal path length is necessary if there is a change in the laser wavelength due to environmental conditions Compensation for deadpath error can be done by correcting for the deadpath distance D in software in the controller In this case the general relation True Position Wavelength counts due to motion x vacuum wavelength x TCN is expanded to be True Position Accumulated Counts Deadpath Count
511. safe operation of the instrument Laser and Optics User s Manual Vol 135 7 136 Maintenance WARNING Resistance checks described below require that the power cord be connected to the instrument and that AC power be disconnected Be sure that the power cord is not connected to power before performing any safety checks VISUAL INSPECTION Visually inspect the interior of the serviced instrument for signs of abnormal internally generated heat such as discolored printed circuit boards or components damaged insulation or evidence of arcing Determine and remedy the cause of any such condition GROUND CONTINUITY TEST Plug the power cord into the Agilent electronics DO NOT CONNECT THE INSTRUMENT TO AC POWER Using a suitable ohmmeter check the resistance from the enclosure chassis to the ground pin on the power cord The reading should be less than 1 ohm Flex the power cord while making this measurement to determine whether intermittent discontinuities exist The resistance check should be performed from the enclosure to the ground pin of the cord while flexing the interconnect cable Check any indicated front or rear panel ground terminals using the above procedures INSULATION RESISTANCE CHECK Tie the line and neutral pins of the power cable together Check resistance from the instrument enclosure chassis to line and neutral with the LINE switch ON and the power source disconnected The minimum acceptable resistance
512. ser beam must be parallel to each axis of travel For most systems start the alignment at the laser head and move out one component at a time until the last component on an axis is aligned and the laser beam impinges on the receiver aperture The exception to this principle will be systems using an Agilent 10719A Agilent 10721A Agilent 10735A or Agilent 10736A interferometer these are referenced interferometers whose design and construction allows them to be installed in specified fixed locations relative to the measurement mirrors with which they will be used For these systems it will be necessary to provide adjustment of the laser beam relative to the interferometer since the interferometer itself is not adjustable The angular direction of the beam can be aligned by moving the laser head or adjusting a beam bender Laser and Optics User s Manual Vol System Installation and Alignment 4 4 The reflected beam can be aligned by adjusting a beam splitter or interferometer 5 The angular direction of the beam will not be changed by adjusting a retroreflector Similarly the angular direction of a beam transmitted straight through a beam splitter or interferometer will not be changed by adjusting that component There will be up to a 30 arc minute deviation of the beam when it passes through any interferometer except the Agilent 10702A 001 Agilent 10719A Agilent 10721A Agilent 10735A Agilent 10736A Agilent 10766A or th
513. ser measurement systems Chapter 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10676A Retroreflectors Chapter 19 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector Chapter 20 Agilent 10706A Plane Mirror Interferometer Chapter 21 Agilent 10706B High Stability Plane Mirror Interferometer Chapter 22 Agilent 10715A Differential Interferometer Chapter 23 Agilent 10716A High Resolution Interferometer Chapter 24 Agilent 10717A Wavelength Tracker Chapter 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers Chapter 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers Chapter 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Chapter 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Laser and Optics User s Manual Vol About This Manual 1 Chapter 29 Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Chapter 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics Chapter 31 Agilent E1826E F G One Axis Plane Mirror Interferometer Chapter 32 Agilent E1827 A Two Axis Vertical Beam Interferometer Chapter 33 Agilent Z4420B and Agilent Z4421B Five Axis Interferometers Chapter 34 Agilent E1837 A Z4399A and Z4422B Three Axis Interferometers Chapter 35 Receivers provides descriptions and system information for the Ag
514. sion coefficients of metals and alloys continued COPPER AND COPPER ALLOYS Continued Wrought Alloys Continued Free Cutting Phosphorous Bronze Cupro Nickel 30 Cupro Nickel 10 Nickel Silver 65 18 Nickel Silver 55 18 Nickel Silver 65 12 High Silicon Bronze A Low Silicon Bronze B Aluminum Bronze 3 Aluminum Silicon Bronze Aluminum Bronze Beryllium Copper Casting Alloys 88 Cu 8 SN 4 Zn 88 Cu 11 Sn 88 Cu 6 Sn 1 5 Pb 4 5 Zn 87 Cu 8 Sn 1 Pb 4 Zn 87 Cu 10 Sn 1 Pb 2 Zn 80 Cu 10 Sn 10 Pb 78 Cu 7 Sn 15 Pb 85 Cu 5 Sn 5 Pb 5 Zn 72 Cu 1 Sn 3 Pb 24 Zn 67 Cu 1 Sn 3 Pb 29 Zn 61 Cu 1 Sn 1 Pb 37 Zn Manganese Bronze 60 000 psi Laser and Optics User s Manual Vol Coefficient of Expansion 14 ppm C ppm F 283 14 Material Expansion Coefficients 284 Table 68 Linear thermal expansion coefficients of metals and alloys continued COPPER AND COPPER ALLOYS Continued Casting Alloys Continued Manganese Bronze 65 000 psi Manganeze Bronze 110 000 psi Aluminum Bronze Alloy 9A Aluminum Bronze Alloy 9B Aluminum Bronze Alloys 9C amp 9D IRON AND IRON ALLOYS Pure Iron Fe C Alloys 0 06 C 0 22 C 0 40 C 0 56 C 1 08 C 1 45 C Invar 36 Ni 13 Mn 1 2 C 13 Cr 0 35 C 12 0 Cr 0 4 Ni 0 09 C 17 7 Cr 9 6 Ni 0 06 C 18 W 4 Cr 1 V Gray Cast Iron Malleable Iron Pearlitic Coefficient of Expansion ppm C ppm F LEAD AND LEAD ALLOYS Corroding
515. st be aligned c the software program must be running in the controller 1 Turn on the power to the controller PC 2 Press the Start button located at the bottom left of the task bar in the Start menu window as shown in Figure 2 3 Select Programs then select Agilent N1231B API from the pop up menu The Agilent N1231B API pop up menu is displayed as shown in Figure 2 gg Reflection Sessions Netscape SmartUpdate Programs f Agilent N1231B API N1231B Example YY Documents gt gj AvantGo gt S N1231B License b Settings gt a Enhanced Keyboard Manager x N1231B Monitor 2J Find gt S HP Lock gt S N1231B Readme Help LS InstallShield as lomegaw are Bun BP Shut Down Figure 2 Start Programs pop up menu 4 From the Agilent N1231B API pop up menu click on the N1231B Monitor icon to open the Monitor application With no input signals connected to the Agilent N1231B board the Agilent N1231B Monitor screen should appear as shown in Figure 3 The PCI bus and slot number may differ from those shown in Figure 3 Laser and Optics User s Manual Vol 33 2 34 Familiarization and Initial Operation S Agilent N1231B Monitor PCI Bus 5 Slot 9 Position Eror Velocity Eror Preset fo Position Preset Sample Read Sample and Read Glitch NoSig Interrupts Enabled Data Error Direction Positive Update Automatic 2 C Manual Updating
516. supply a suitable mounting arrangement for the interferometer See chapters 25 and 26 for recommendations If you are using an Agilent 10735A Three Axis Interferometer Agilent 10736A Three Axis Interferometer or an Agilent 10736A 001 Three Axis Interferometer with Beam Bender you must 1 provide a Laser and Optics User s Manual Vol System Installation and Alignment 4 suitable mounting location that references the interferometer to the stage whose motion is being measured and 2 make provision for adjusting the laser beam input to the interferometer by translating and turning the beam Provide for aligning the optics laser head and receiver s on the machine Be sure to allow for transmitted beam offset of beam splitters Agilent 10700A and Agilent 10701A in your design System Grounding Most Agilent laser systems are grounded through the line cord For these systems additional grounding of the chassis is not required but doing so shouldn t interfere with normal operation Refer to system grounding information in Chapter 3 System Design Considerations of this manual External Cabling The following paragraphs cover all external connections to the laser head and receiver Each instrument is shipped with a set of color coded labels These can be used to label both the cables and their respective rear panel connectors for easy identification Laser head cables For use with Agilent 10895A VME Axis Boar
517. supports which optic see the Chapter 36 Accessories in Volume II of this manual In some applications referenced housings can provide significant advantages For example the alignment requirements for certain multiaxis applications can be difficult or impossible to achieve without referenced housings In those cases interferometers such as the Agilent 10719A Agilent 10721A Agilent 10735A Agilent 10736A and all of the NGI optics should be considered These products have referenced housings and prealigned optical elements Because they have individual mounting requirements these products are not intended for use with the adjustable mounts described above For more information about these optics refer to Chapter 5 Measurement Optics General Information and Chapter 6 NGI Measurement Optics General Information in this manual Fasteners for optics Any optical component that fits an adjustable mount is supplied with mounting screws to mount it on the appropriate adjustable mount Vacuum applications There are vacuum options for Agilent optical components which are compatible with vacuum environments Contact Agilent Call Center for information telephone numbers of various call centers are listed on the Service and Support page at the back of this manual The housings of these components are made of stainless steel and the optical elements are attached to these housings using a low volatility space grade adhes
518. surements under the same conditions and with the same measuring instrument This also refers to how stable the measurement will be over time Retroreflector Also called a cube corner A mirror assembly that always reflects light back parallel to the incoming beam Split frequency Another name for the Reference Frequency The difference between the two frequencies in a two frequency laser system Straightness Straightness is a measurement of displacement perpendicular to the axis of intended motion of the optics TCN Total Compensation Number This is a combined compensation term that contains a Wavelength of Light compensation term WCN and a Material Temperature compensation term MTC Wavelength tracker A device with an interferometer and a fixed measurement path that is immune to ambient temperature and pressure changes By monitoring the apparent changes in this fixed pathlength wavelength changes can be very accurately detected and corrected Laser and Optics User s Manual Vol Index Numerics 10717A Wavelenght Tracker troubleshooting 148 10751C D Air Sensor 212 10751C D Air sensor 47 10757D E F Material Temperature Sensor 47 212 10790A B C Receiver Cable 83 10791A B C Laser Head Cable 81 10880A B C Receiver Cable 83 10881A B C Laser Head Cable 81 10881D E F Laser Head Cable 82 10885A PC Axis Board 46 10886A PC Compensation board 47 10887B PC Calibrator Board 47 10888
519. t always reflects the light beam parallel to the incoming beam DC interferometer A single frequency interferometer Deadpath The difference in OPL optical path length between the reference and measurement arms of an interferometer when the stage is at its zero or home position Deadpath error If interferometer deadpath exists and is not compensated the measurement stage zero point or home position will appear to move around with changes in air temperature pressure humidity and or with changes in temperature of glass components and the metrology frame Differential interferometer An interferometer assembly in which the fixed reference mirror can be remotely mounted allowing a differential measurement Laser and Optics User s Manual Vol Glossary 15 Differential measurement A measurement in which both the reference beam and the measurement beam travel to external mirrors outside the interferometer housing THE SIX DEGREES OF FREEDOM Y Axis of Vertical Straightness Z Axis of Horizontal Straightness X Axis of Linear Displacement Figure 71 Degrees of freedom for X Axis Degrees of freedom Possible motions Generally there are six degrees of freedom for each axis as shown in Figure 71 Three of the degrees of freedom are translational Three of the degrees of freedom are rotational ESD Electrostatic Discharge A natural phenomenon which while possibly insignificant on a human scale
520. t between the measure points distance between the image at the cube corners apexes on the measurement mirror The distance between the measurement points d will vary due to several factors If you do not compensate for these factors with a system calibration step you can estimate the angular resolution error by considering all of the contributing tolerances The tolerances that affect the distance between the measurement points on the measurement mirror where the image of the cube corners apexes will be located on the measurement mirror are as follows error due to beam parallelism e g 25 uradians error due to beam primary to secondary parallelism e g 15 uradians error due to initial alignment e g data alignment input beam alignment error due to cube corner positions e g 50 umeters Laser and Optics User s Manual Vol 121 6 NGI Measurement Optics General Information 4 Plate Reference fg 2 Mirror To Receiver From fB Laser gt fg 1 To Reference Receiver Mirror X 4 Plate 4 Plate Figure 37 NGI Angular Resolution diagram 122 Laser and Optics User s Manual Vol NGI Measurement Optics General Information 6 Alignment and Mounting General Before any interferometer is installed a suitable mounting location must be prepared for it The interferometer s mounting location defines the relationship of its measurement beams to the stage whose motion is to be me
521. tall the laser electronics board in the PC CAUTION The Agilent N1231B board contains components that may be damaged by electrostatic discharge ESD Do not handle the Agilent N1231B board or any of its components without taking adequate measures to prevent damage due to electrostatic discharge ESD The Agilent N1231B PCI Three Axis Board can be installed in any full length PCI I O backplane slot 1 2 Unplug the PC power cord Remove the cover on the PC See the manual for your PC for specific instructions for this step and the next few steps Install the Agilent PC axis board in the PC Replace the PC cover Plug in the PC power cord but leave the PC power off Install the API library and monitor program on computers used for program development To Install the N1231B API library 1 a A CO N Exit from all applications Insert the CD in an appropriate drive Navigate to the directory N1231B API Development Run Setup exe Follow the instructions on the screen Laser and Optics User s Manual Vol 29 2 30 Familiarization and Initial Operation When asked to choose a Setup Type the default choice of Typical is recommended Other choices are Compact and Custom The setup types are described below Typical installs all files Compact installs all files except those in the User Files directory Custom allows you to select the components to be installed If running under Windows NT and
522. th of light compensation is provided in Chapter 13 Wavelength of Light Compensation of this manual Laser and Optics User s Manual Vol 175 12 Accuracy and Repeatability 176 Material thermal expansion Since a part or machine s dimensions are a function of temperature a correction for material expansion or contraction may be required This correction relates the distance measurement back to a standard temperature of 20 C 68 F To achieve this correction the temperature of the part or machine during the time of the measurement and its coefficient of linear thermal expansion must be known The method of correction is to electronically change the effective laser wavelength e g through the controller software by an amount sufficient to correct for thermal expansion or contraction This correction or compensation term is known as Material Temperature Compensation and is defined as Material Temperature Compensation 1 o AT 5 where a coefficient of linear thermal expansion AT T 20 C Therefore the compensated distance measurement at standard temperature is L L Material Temperature Compensation 6 where L length at 20 C Ly length at temperature T Assuming a known coefficient of thermal expansion the magnitude of this error is a function of the object s temperature and the temperature sensor s measurement accuracy and repeatability This error term is also a proportiona
523. th optional calibration Laser Wavelength Accuracy Error 0 2 m 0 02 x 10 0 004 micron Atmospheric compensation Since the wavelength tracker provides relative compensation information the initial compensation number from another source determines the compensation accuracy In this example the initial compensation number is obtained by measuring a known artifact or standard with the laser system The accuracy of measuring the artifact is the sum of the laser system measurement repeatability machine repeatability and the accuracy of the alignment mark sensing system It is assumed that no error is induced in measuring the artifact on the machine Consequently in this example accuracy and repeatability of the atmospheric compensation information will be equal Using Equation 4 and the specified environmental conditions accuracy and repeatability of compensation information from wavelength tracker can be determined Compensation accuracy and repeatability 0 06 ppm degree C 0 002 ppm H 0 067ppm aE x 0 1 degree C x 25mm Hg 0 14 ppm At maximum distance the position error due to compensation will be Compensation Error 0 2 m x 0 14 x 10 0 028 micron With no atmospheric compensation the error would be 9 0 ppm This translates into a position error of 1 8 microns Laser and Optics User s Manual Vol 201 12 Accuracy and Repeatability 202 Material thermal expansion This error depe
524. the other which can be visually observed Since the human eye can resolve a displacement of the beam of approximately 300 micrometers 0 01 inch this technique can be applied to reduce cosine error for measurement travel of 0 5 meter 20 inches or longer For travel less than this the sensitivity of this technique is normally not sufficient and autoreflection should be used Cosine error E in parts per million ppm can be calculated from the following formula 2 E 5 8D Where D is the distance measured in millimeters inches and S is the lateral offset of the returning beam in micrometers thousands of an inch For example if the distance measured is 600 mm and this results in an offset of the return beam of 1 2 mm 1200 u then 2 1200 7 27 0 5ppm 0 5 micrometer per meter of travel 8 x 600 The following are the principle steps used for the Overlapping Dots method of alignment followed by a detailed alignment procedure for a specific configuration 1 Mount the laser head and optics in their desired locations 2 Select the small beam aperture on the laser head Laser and Optics User s Manual Vol System Installation and Alignment 4 3 With the optics as close together as possible adjust any component laser head interferometer or retroreflector to get the dots reference and measurement beams to overlap at the receiver Placing a piece of translucent tape over the receiver lens will help in observin
525. ther environmental factor that can affect the measurement is the temperature of the material being measured Agilent offers material temperature sensors that can enable automatic compensation for the effects of temperature changes Material temperature compensation can also be performed manually by measuring the material temperature and calculating the effect of the difference between the standard temperature and the Laser and Optics User s Manual Vol Principles of Operation 11 temperature at the time of the measurement Chapter 14 Material Expansion Coefficients in this manual provides expansion coefficient values for many commonly used materials Measurement Technique Introduction Agilent laser measurement systems measure displacement by 1 2 generating a two frequency laser beam sampling part of the beam to determine the frequency difference between the two frequencies in the beam This difference frequency is sent to the measurement system electronics as the Reference Frequency sending the two frequency laser beam to an interferometer that separates the beam into two single frequency beams Each beam has one of the two frequencies of the original beam sending one interferometer output beam to a non moving reference retroreflector or a plane mirror that returns it to the interferometer sending the second interferometer output beam to a measurement retroreflector or a plane mirror that returns it to the
526. this is the first time the software has been installed or if the software has been uninstalled prior to this installation reboot the controller Perform the steps in the following subsection To Install the Agilent N1231B monitor program To Install the Agilent N1231B monitor program a A CO N See the readme doc file on the CD for the latest installation information If the Agilent N1231B API Library is not yet installed follow the instructions above to install it before proceeding with this installation Exit from all applications Insert the CD in an appropriate drive Navigate to the directory N1231B Monitor Run Setup exe Follow the instructions on the screen Laser and Optics User s Manual Vol Familiarization and Initial Operation 2 Connect the electronics cables 1 Connect the largest connector on the laser head cable to the back of the laser head 2 Connect the smallest connector on the laser head cable to the Reference connector on the Agilent N1231B PCI Three Axis Board that you just installed in your PC 3 Connect the Agilent 10884B Laser Power Supply to the remaining connector the medium size DIN connector of the laser cable 4 Connect the receiver cable to the back of the receiver and to one of the three MEASurement connectors in the Agilent N1231B PCI Three Axis Board Power up the laser head 1 Plug the Laser Power Supply into line power nominally 110 V or 230 V ac to start the lase
527. tion scale material compensation should be done to the measured part not the machine Therefore the material temperature error term depends on the type of material being measured and the specifications of the temperature sensor This can be a significant error if the temperature of the part is not tightly controlled or compensation is not adequate For example with a 0 5 m part made of steel a 0 00 ppm C and using the Agilent 10757D E F Material Temperature Sensor the resulting measurement accuracy and repeatability will be Measurement Accuracy amp x temperature sensor repeatability x part length 100 PP 46 1 degree C x 0 5m degree C 0 5 micron The Agilent 10757D C E temperature sensor has a measurement repeatability equal to its accuracy Measurement Repeatability 0 5 micron Since this error is independent of the type of measurement scale but strongly dependent on the type of material and temperature sensor performance specific errors will not be included in this example However this error should be included when calculating the error budget for an actual machine Material Thermal Expansion 0 micron assumed 194 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 Deadpath error Deadpath error is a function of deadpath distance method of compensation and environmental conditions With no compensation for deadpath Equation 7 determines the error Deadpath Error 0 1 m 9
528. to 90 F Press 23 to 27 inches 20 Humidity TEMPERATURE IN DEGREES FAHRENHEIT 74 0 75 0 76 0 77 0 78 0 79 0 80 0 81 0 82 0 83 0 84 0 685 0 86 0 87 0 88 0 89 0 90 0 27 00 7579 7584 7588 7593 7597 7602 7607 7611 7616 7620 7625 7629 7634 7638 7642 7647 7651 26 95 7583 7588 7593 7597 7602 7606 7611 7615 7620 7625 7629 7633 7638 7642 27647 7651 7656 26 90 7588 7593 7597 7602 7606 27611 7615 7620 7624 7629 7633 7638 7642 7647 7651 7656 7660 26 85 7592 7597 7602 7606 7611 7615 7620 7624 7629 7633 7638 7642 7647 7651 7656 7660 7664 26 80 7597 7601 7606 7611 7615 7620 7624 7629 7633 7638 7642 7647 7651 7656 7660 7664 7669 26 75 7601 7606 7611 7615 7620 7624 7629 7633 7638 7642 21647 7651 7656 7660 7664 7669 7673 26 70 7606 7610 7615 7620 7624 7629 7633 7638 7642 7647 7651 7655 7660 7664 7669 7673 7678 26 65 7610 7615 7619 7624 7629 7633 7638 7642 7647 7651 7655 7660 7664 7669 7673 7677 7682 26 60 7615 7619 7624 7628 7633 7638 7642 7646 7651 7655 7660 7664 7669 7673 767 7682 7686 26 55 7619 7624 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7677 7682 7686 7691 26 50 7624 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7677 7682 7686 7691 7695 26 45 7628 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7677 7682 7686 7691 7695 7699 26 40 7633 7637 7642 7646 7651 7655 7660 7664 7669 7673 7677 7682 7686 7691 7695 7699 7704 26 35 7637 7642 7646 7651 7655 7660 7664 7669 7673 7677 7682 7686 7691 7695 7699 7704 7708 26 30 7642 7646 7651 7655
529. to a worst case peak to peak error of 4 8 nanometers of distance Using a statistical model the RSS Root Sum of Squares value is 4 2 nanometers worst case peak to peak including the contribution from the laser head This nonlinearity error is a fixed term and is different for each interferometer Quenelle R C Nonlinearity in Interferometer Measurements Agilent Technologies Journal p 10 April 1983 Laser and Optics User s Manual Vol Accuracy and Repeatability 12 NONLINEARITY ERROR VS OPTICAL PATH LENGTH CHANGE Nonlinearity Error degrees of phase Optical Path Length Change degrees of phase Figure 48 Worst case error resulting from imperfect separation of two beam components Atmospheric compensation The atmospheric compensation error term is usually the single largest component in an error budget The magnitude of this error depends on the accuracy of the compensation method the atmospheric conditions in which the laser system is operating and how much the atmospheric conditions change during a measurement The laser wavelength is specified as the vacuum wavelength Ay In vacuum the wavelength is constant to the degree specified by the stability specification but in an air atmosphere the wavelength depends on the index of refraction of the atmosphere Since most laser interferometer systems operate in air it is necessary to correct for the difference between y and the wavelength in air A4 Th
530. turn clockwise to secure the cable to the mating connector Agilent 10881D F E Laser Head Cable has spade lugs for use with a power supply other than the Agilent 10884B The Agilent 10881D F E Laser Head Cable connects an Agilent 5517A B BL C D DL FL to the Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B VME Laser Compensation Board Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Board The Agilent 10881D E F Laser Head Cable has spade lugs for connecting the laser head to a customer supplied power supply see Figure 286 in Chapter 36 of Volume II Agilent N1251B High Performance Laser Head Cable has a DIN for use with the Agilent 10884B Power Supply The Agilent N1251B High Performance Laser Head Cable connects an Agilent 5517A B BL C D DL FL to the Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Board As shown in Figure 289 the Agilent N1251B cable is Y shaped and has three connectors that are all different The connectors on the laser head end of the cable and the laser head are keyed to go together only one way The Agilent logo will be up on the connector boot when the connection is correctly made The cable connector has locking rings which take about 1 3 turn clockwise to secure the cable
531. ty 3 eee BAROMETRIC PRESSURE IN INCHES OF MERCURY 91 0 31 00 7308 30 95 7312 30 90 7317 30 85 7321 30 80 7325 30 75 7330 30 70 7334 30 65 7338 30 60 7343 30 55 7347 30 50 7351 30 45 7356 30 40 7360 30 35 7364 30 30 7369 30 25 7373 30 20 7377 30 15 7382 30 10 7386 30 05 7391 30 00 7395 29 95 7399 29 90 7404 29 85 7408 29 80 7412 29 75 7417 29 70 7421 29 65 7425 29 60 7430 29 55 7434 29 50 7438 29 45 7443 29 40 7447 29 35 7451 29 30 7456 29 25 7460 29 20 7464 29 15 7469 29 10 7473 29 05 7477 29 00 7482 28 95 7486 28 90 7491 28 85 7495 28 80 7499 28 75 7504 28 70 7508 28 65 7512 28 60 7517 28 55 7521 28 50 7525 28 45 7530 28 40 7534 28 35 7538 28 30 7543 28 25 7547 28 20 7551 28 15 7556 28 10 7560 28 05 7564 28 00 7569 27 95 7573 27 90 7578 27 85 7582 27 80 7586 27 75 7591 27 70 7595 27 65 7599 27 60 7604 27 55 7608 27 50 7612 27 45 7617 27 40 7621 27 35 7625 27 30 7630 27 25 7634 27 20 7638 27 15 7643 27 10 7647 27 05 7651 27 00 7656 Laser and Optics User s Manual Vol 92 0 7313 7317 7322 7326 7330 7335 7339 7343 7348 7352 7356 7361 7365 7369 7374 7378 7382 7387 7391 7395 7400 7404 7408 7413 7417 7421 7426 7430 7434 7439 7443 7447 7452 7456 7461 7465 7469 7474 7478 7482 7487 7491 7495 7500 7504 7508 7513 7517 7521 7526 7530 7534 7539 7543 7547 7552 7556 7560 7565 7569 7573 7578 7582 7586 7591 7595 7599 7604 7
532. typical Wavelength Tracking Compensationt 0 19 ppm Measurement in Vacuum 0 1 ppm These accuracy specifications include the laser head term but exclude electronics accuracy and interferometer nonlinearity terms T No compensation means that no correction in compensation number occurs during environmental changes System accuracy equals these values measurement repeatability plus accuracy of initial compensation value Laser and Optics User s Manual Vol 213 12 Accuracy and Repeatability Non Uniform Environments 214 Compensation for environmental effects is practical only when the material being measured is at a constant temperature and when the medium through which the measurement laser beam passes is not disturbed such as by air turbulence Changing temperature conditions Material temperature compensation is accurate only when the part and the machine are at thermal equilibrium with their surroundings Changing temperature can change thermal gradients in both the machine and the part In this case the primary machine errors are due to complex bending effects which distort machine geometry in addition to simple thermal expansion These effects are extremely difficult if not impossible to describe mathematically Changing temperatures also affect the measurement optics resulting in optics thermal drift as described earlier in this chapter Therefore if a machine is operated in a p
533. unting can cause the optics to move inappropriately during a measurement causing a measurement error or loss of beam power Elastic mounting can have the same effect as loose mounting It can also be responsible for a sag offset in the optics positions If there is vibration in the machine an elastic mounting can transmit and amplify the vibration to the attached optic possibly causing more errors You should anticipate these effects and minimize them if necessary during the laser measurement system design process Certain interferometers are inherently less susceptible to vibration effects than others This is particularly true of differential style interferometers such as the Agilent 10715A Agilent 10719A and Agilent 10721A The stability of these interferometers is due to the fact that both their reference beams and their measurement beams travel to external mirrors Any motion of the interferometer itself that is common to both beams will not appear as a measurement Of course any vibration between the reference and mirrors will constitute real measurable displacements Fasteners Any optical component that fits an adjustable mount is supplied with mounting screws to mount it on the appropriate adjustable mount Laser and Optics User s Manual Vol 113 5 Measurement Optics General Information Vacuum Applications Many of the optical components of the laser measurement system have vacuum options which are comp
534. uously restricted For kinematic mounting uses a locating plane a locating line and a locating point The locating plane will be the surface to which the top or the bottom of the interferometer is bolted The locating line should be a 2 point contact or rail which aligns the front face of the interferometer The locating point should be a 1 point contact or pad which constrains side to side translations of the interferometer When installing the interferometer press it firmly against its locating plane line and point while torquing down the mounting screws If the platform is made with reasonable accuracy this mounting method can completely eliminate the need to adjust or align a referenced interferometer during installation Then only the laser beam itself will need to be aligned to its proper position Laser An acronym for Light Amplification by Stimulated Emission of Radiation A laser is a device that uses the natural oscillations of atoms or molecules between energy levels for generating coherent light Laser Head The laser source with its focusing and polarization components Laser Interferometry A technique for measuring distance using the wavelength of laser light by observing and counting optical interference patterns It can also refer to devices using interferometric techniques to measure surface flatness Linear interferometer An interferometer designed to use cube corners retroreflectors
535. urfaces on the machine s positioning system e g ways rails guides See Figure 29 Measuring the reference surfaces on the mirror true square or gauge block with a dial indicator and adjusting the pitch and yaw of the mirror surface See Figure 31 USING REFERENCE SURFACES TO ALIGN MIRROR Guide Rails True Square Reference Mirror Mirrored Surface Figure 29 Using reference surfaces to align mirror Laser and Optics User s Manual Vol 93 4 System Installation and Alignment 1 Place the perpendicular reflector at the far end of travel 2 Select the small aperture on the laser head by rotating the front turret 3 Adjust the laser beam so that the beam is reflected by the reflector back upon itself Alignment is complete when the small return beam is centered on the small aperture of the laser head This adjustment of the laser beam can be performed by moving the laser head beam bender or interferometer depending on the optical layout Overlapping Dots Method Summary 94 The overlapping dots alignment method uses the principle that if the measurement beam to the retroreflector is not parallel to the direction of travel it is offset upon recombination with the reference beam of the interferometer see Figure 30 When motion occurs between the retroreflector and interferometer along the measurement path any angular misalignment causes a displacement at the receiver of one laser beam with respect to
536. ut beam angle that minimizes initial beam walkoff and maximizes the stage angle range will fall within the input beam cone angle IBCA If the system zero stage angles are ideal meaning that the stage mirror is square to the datums the only input beam angular adjustment necessary would be the IBCA Assuming ideal zero stage angle to find the unique input beam angle two conditions must exist The measurement mirror must be perpendicular to datum A and parallel to datum B of the mounting location which is the ideal zero stage angle The interferometer s measurement axis primary beam must be perpendicular to the measurement mirror Distinct pitch angle of input beam ranges 1 mrad for the interferometer Distinct yaw angle of input beam ranges 1 mrad for the interferometer Figure 41 Input beam cone angle for ideal zero stage angles Laser and Optics User s Manual Vol 127 6 128 NGI Measurement Optics General Information Input beam angles for system zero stage angles There are still tolerances between the orthogonal stage measurement mirrors and the A and B datums meaning that the system zero stage angle would not be ideal Therefore to account for both the tolerance in the glass and the tolerances in the system s alignment to the datums this latter tolerance must be added to the IBCA The beam directing optics must be able to manipulate the input laser beam such that its angular a
537. ved while making measurements For a detailed explanation of why this option is required see Figure 101 in Chapter 18 of Volume II Introducing an offset into the laser beam There may be an occasion when you will want to simply introduce an offset into your laser beam to get it from the laser head to the interferometer without having to relocate either one of them Figure 10 shows two ways in which this can be done To simply translate the beam you can use two reflectors such as the Agilent 10726A Beam Bender as a periscope as shown in Figure 10 A Changing the spacing between the reflectors or rotating the device can change the amount of offset To reverse the direction of the beam you can use two reflectors in a retroreflector arrangement as shown in Figure 10 B Laser and Optics User s Manual Vol System Design Considerations 3 Beam Path Loss Computation Multiaxis positioning systems must be designed to allow sufficient optical power to reach each Agilent 10780C Agilent 10780F Agilent E1708A or Agilent E1709A Receiver in the system Since all optics have an efficiency of less than 100 an optical power loss budget must be created as a part of any multiaxis system design This chapter defines optical efficiency as it relates to the signal loss through components A method for computing the optical power loss in a system is described Considerations The following considerations are important in desig
538. way from the interferometer motion with respect to its original position is detected Conversely if the retroreflector is fixed the interferometer can be the moving component Agilent laser position transducers can detect and measure all linear motions that is 3 degrees of the 18 degrees of freedom defined in the Glossary Small angle measurements may be made by multiple measurements on the same axis The measurement system is relatively insensitive to all other motions as briefly described below See Figure 5 Laser and Optics User s Manual Vol System Design Considerations 3 POSSIBLE COMPONENT MOTIONS Laser Head Retroreflector TN pn Receiver A Yq 2 W Sot CC Qe lt lt os Figure5 Possible component motions 1 Motion of the receiver or laser head along the beam path X has no effect on the measurement since both f and f would exhibit Doppler shift Small motions of the laser head receiver interferometer or retroreflector in a direction perpendicular to the beam path Y or Z have no effect on the measurement The only restriction is that sufficient light returns to the receiver Angular motion pitch or yaw of the laser head about the Z or Y axis has the effects described below It introduces a measurement error cosine error It may displace the laser beam so that insufficient light returns to operate the receiver Although the laser head or the receiver may be rotated in 90 in
539. ws an X Y stage measurement configuration using the Agilent 10706B High Stability Plane Mirror Interferometer The X Y stage has plane mirrors mounted at 90 to each other these are the reflectors for the plane mirror interferometers The advantages of this configuration are discussed in Chapter 12 Accuracy and Repeatability of this manual The Agilent 10706A Plane Mirror Interferometer is used to bend the laser beam Two axis plane mirror in a vacuum In an application where the X Y stage is installed in a vacuum chamber the configuration in Figure 14 may not be suitable Figure 15 shows a configuration using the Agilent 10567A Dual Beam Beam Splitter which allows the laser beam to enter and exit the chamber through one window This allows the receivers to remain outside the chamber and leaves only the optics inside For window specifications refer to the Vacuum applications on page 56 If the Agilent 10567A is not used two windows and possibly additional beam splitters and benders will be required Laser and Optics User s Manual Vol 69 3 System Design Considerations TWO AXIS PLANE MIRROR INTERFEROMETER CONFIGURATION Agilent 10706B Plane Mirror Interferometer X Y STAGE X Y Agilent 10780C Receiver b uad A Laser UY Agilent 10706B Plane Mirror Interferometer gt Agilent 10701A 50 Beam Agilent 10780C Splitter Receiver y Figure 14 Two axis plane mirror interferometer con
540. xample The typical configuration for this application is shown in Figure 56 It uses Agilent 10716A High Resolution interferometers and the Agilent 10717A Wavelength Tracker This CMM has a working measurement volume of 1 0 m x 1 0 m x 1 0 m Laser and Optics User s Manual Vol 191 12 Accuracy and Repeatability Dimensions see figure below Maximum distance measured L 1 0 m Deadpath distance D 0 1 m Cosine Error 0 05 ppm Agilent 10716A aligned according to procedure in this manual Nonlinearity 1 0 nm Agilent 10716A Abb error none assume zero offset Measurement resolution 2 5 nanometers Agilent 10716A ENVIRONMENT Temperature 20 C 0 5 temperature controlled environment Pressure 760 mm Hg 25 mm Hg possible storm fronts during measurement pressure not controlled Humidity 50 10 humidity controlled environment Agilent 10780C Agilent 10716A Receiver Agilent 10716A High resolution High Resolution Interferometer Interferometer Agilent 10707A Beam Bender Agilent 10724A Plane Mirror Reflector Agilent 10701A 50 Beam Splitter Agilent 10700A 33 Beam Splitter Plane Mirror Reflector Agilent 10780C Receiver lt Agilent 10707A Beam Bender Di 10780C p Receiver Fa Agilent 10717A Wavelength Tracker Agilent 10707A Beam Bender Agilent 10707A a Beam Bender ON Agilent 5517B 7 c9 Laser Head Agilent 10724A
541. xes 1 thru 4 10 Passivated 416 Stainless Steel 3 13 kg 6 9 Ibs Agilent 24421B Laser and Optics User s Manual Vol 9 mm maximum visible Axis 5 796 Axes 1 thru 4 10 Passivated 416 Stainless Steel 3 15 kg 7 Ibs 119 6 NGI Measurement Optics General Information NGI Optical Schematic REFERENCE PATH f MEASUREMENT PATH fg Al4 Plate e Al4 Plate Reference Reference f B 2 W Mirror Mirror To Receiver m fa fB From From Laser Laser f Be 1 To m Receiver Reference Relavar Reference Mirror Mirror CT w X A 4 Plate A 4 Plate A 4 Plate gt Al4 Plate Measurement Mirror C Weasurement mirror COMBINED PATH fA fg Al4 Plate f 2 Reference A B 14 Mirror Receiver fA From a Laser To Receiver Reference Mirror A4 Plate A 4 Plate Measurement Mirror LEGEND n m m m pa ig X f4 and fg r Rounded corners are used to help you trace paths Figure 36 Next Generation Interferometer laser beam path 120 Laser and Optics User s Manual Vol NGI Measurement Optics General Information 6 NGI Angular Resolution The angular resolution can be calculated by using the following equation Ax Linear resolution a d Beam separation Where see Figure 37 on page 122 Ax the position change of the stage linear resolution d the distan
542. xially A specially shaped reference plane mirror shown in Figure 144 is supplied with the Agilent 10715A For more information about the Agilent 10715A see Chapter 22 Agilent 10715A Differential Interferometer in Volume II of this manual Customized differential configurations are possible with several other interferometers However considerable care should be exercised during design and layout to avoid introduction of alignment errors thermal or mechanical instabilities and potential deadpath problems When making differential measurements both reflectors reference and measurement should be of the same type cube corner or plane mirror this minimizes thermal drift problems with ambient temperature changes To use the Agilent 10702A Agilent 10705A or Agilent 10766A in a differential configuration the reference cube corner can simply be detached from the interferometer housing and attached to the reference surface of interest This is shown in Figure 105 in the Linear Interferometers chapter Chapter 18 of this manual Be aware that all installation and alignment requirements for the measurement reflector now apply also to the reference reflector To use the Agilent 10706A or Agilent 10706B interferometer in a differential configuration a plane mirror is recommended as the reference reflector Simply replace the reference cube corner or high stability adapter with the Agilent 10722A Plane Mirror Converter and attach the ref
543. y English Low Alt Low Mid Temp High Humidity Temp 57 to 73 F Press 27 to 31 inches 80 Humidity English Low Alt Mid Temp High Humidity Temp 74 to 90 F Press 27 to 31 inches 80 Humidity English Low Alt High Mid Temp High Humidity Temp 91 to 107 F Press 27 to 31 inches 80 Humidity English High Alt Low Temp High Humidity Temp 40 to 56 F Press 23 to 27 inches 80 Humidity English High Alt Low Mid Temp High Humidity Temp 57 to 73 F Press 23 to 27 inches 80 Humidity English High Alt Mid Temp High Humidity Temp 74 to 90 F Press 23 to 27 inches 80 Humidity English High Alt High Mid Temp High Humidity Temp 91 to 107 F Press 23 to 27 inches 80 Humidity Linear thermal expansion coefficients of metals and alloys Number systems Laser and Optics User s Manual Vol 295 261 262 263 264 265 266 267 268 269 210 271 272 273 274 275 276 277 280 Tables Tables 18 Laser and Optics User s Manual Vol Agilent Laser and Optics User s Manual Volume 1 About This Manual Introduction 20 How to Locate Information 20 Manual Organization 20 Manuals Available 23 How to Order Manuals 24 RE Agilent Technologies 1 About This Manual Introduction This Laser and Optics User s Manual is intended for system designers concerned with designing and installing the optics laser head
544. y When the Agilent 10780C F receiver photodetector receives an adequate laser beam signal the LED indicator illuminates located on the Receiver s top surface and the DC voltage at the external beam monitor test point is greater than 0 7 See the Alignment and Gain Adjustment Procedure in Chapter 35 Receivers in Volume II of this manual for procedures to adjust this test point voltage The alignment and gain adjustment procedures for the Agilent E1708A or E1709A receiver can be found in their respective operating manuals If the MEASUREMENT SIGNAL ERROR indicator on the Agilent electronics illuminates the problem may be with one of the system s measurement axis receivers If a SYSTEM ERROR indicator illuminates and the system is equipped with a Wavelength Tracking Compensation system the problem could be with the wavelength tracker axis receiver or the overall alignment of the Wavelength Tracking Compensation system components By sending an error message query to the Agilent electronics via the system controller the system will respond indicating which axis is generating the error message Improperly aligned optical devices in either a measurement or a wavelength tracking axis can also cause a receiver to appear bad Check for this by either placing the receiver directly in the laser beam path from the laser head or by reflecting the laser beam onto the receiver s photodetector using a retroreflector This isolates all other o
545. ystem accuracy and repeatability error 189 Examples Determining System Accuracy and Repeatability 190 Table 14 Parameters needed to calculate each error component 191 Precision Coordinate Measuring Machine CMM example 191 Figure 56 Laser system configuration for a precision Coordinate Measuring Machine CMM 192 Table 15 System accuracy with and without atmospheric compensation 196 Figure 57 Worst case System Accuracy with and without Atmospheric Compensation for the CMM example 197 Figure 58 Worst case System Accuracy with Atmospheric Compensation for the CMM example 197 Figure 59 Worst case System Repeatability with and without Atmospheric Compensation for the CMM example 198 Figure 60 Worst case System Repeatability with Atmospheric Compensation for the CMM example 199 IC Wafer Stepper example 199 Figure 61 Laser System Configuration for an Integrated Circuit Wafer Stepper 200 Table 16 IC Stepper system accuracy with and without atmospheric compensation 203 Figure 62 Worst case System Accuracy with and without Atmospheric Compensation for the Wafer Stepper example 204 Figure 63 Worst case System Accuracy with Atmospheric Compensation for the Wafer Stepper example 205 Laser and Optics User s Manual Vol Contents Figure 64 Worst case System Long term Repeatability with and without Atmospheric Compensation for the Wafer Stepper example 206 Figure 65 Worst case System Long term Repeatability wit

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