Turbo-V 81-T - Ideal Vacuum Products, LLC
Contents
1. Figure 18 206 228 Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 Switch on the heater while the turbopump is in operation In the event of turbopump overheat the pump will be automatically cut out by the thermistor sensor The turbopump must be baked only when operat ing with an inlet pressure less than 10 mbar and with water cooling CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C Turbo V 81 T User Manual 87 900 984 01 E 207 228 17 Technical Information Air Cooling Kit Installation 208 228 An air cooling kit mod 969 9290 is available for cooling the pump during heavy operational conditions and whenever the natural air convection is not sufficient Figure 19 Fan specifications air flow 12 8 l s 27 1 CFM input voltage 24 Vdc dimensions 60 x 60 x 25 mm power 2 60 W The fan bracket is shaped so that it can be mounted close to the pump and in different positions To fix the fan to the Turbo V 81 T case execute the following procedure see the following figure 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump body 3 Co2. ACUUM TECH Figure 4 Model 969 8906 OLOGIES A V A CAUTIOM SITIO 5 SEN MO Jp Figure 5 Model 969 8907 ACUUM TECH NOLOGIES Figure 6 Model 969 8908 Turbo V 81 T User Manual 87 900 984 01 E VACUUM TECH OLOGIES 195 228 17 Technical Information Proceeding from the high vacuum to the forevacuum region the turbine stages sequence is Ist stage with a blade angle of 40 2nd stage with a blade angle of 30 Ord stage with a blade angle of 24 4th and 5th stages with a blade angle of 18 6th stage with a blade angle of 14 th 8th and 9th stages with a blade angle of 12 The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stator are made of stain
3. Connection B Y E Figure 30 1 2 3 4 5 6 1 8 9 Turbo V standard rack controller Vent valve Vacuum pump shut off valve optional System vent valve optional Vacuum chamber Ionization gauge Fore vacuum pump connecting flange Oil mist eliminator Fore vacuum pump with internal one way valve 10 Fore vacuum pump control relay 11 Connection for water cooling Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 12 Roughing line with valve optional 13 Turbopump 14 Flexible connection Connection A High Vacuum Flange To connect the Turbo V 81 T pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure Figure 31 Then fix the two flanges with the clamps or claws as shown in the figure Figure 32 Turbo V 81 T User Manual 87 900 984 01 E 217 228 17 Technical Information For ConFlat flange connections we recommend using Agilent hardware To facilitate assembly and dismantling apply Felpro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Att
4. Figure 14 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 15 204 228 Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange and pump with CFF flange dimensions are in inches mm Figure 16 Turbo V 81 T User Manual 87 900 984 01 E 205 228 17 Technical Information Heater Band Installation Figure 17 The heater band model 969 9801 and 969 9802 can be used to heat the pump casing when a bakeout is needed The heater band is applied to the upper part of the pump casing as shown in the figure and heats it to a temperature of about 80 C The heater band must be mounted such that there is perfect thermal contact with the pump wall to obtain fast and efficient heating
5. 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 184 General Information 185 Storage 186 Preparation for Installation 187 Installation 188 Use 189 Maintenance 191 Disposal 192 Original Instructions sc Agilent Technologies 183 22 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 184 228 Turbo V 81 T User Manual 87 900 984 01 E Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Turbo V 81 T is a turbo molecular pump for high and ultr
6. Technical Information 17 Vent Accessories The vent valve allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation There are several vent valves available and each vent valve has to be driven by its own control unit Refer to the Vent Valve Model Selection table to choose the valve and the related control unit Refer to the control unit manual for the pump valve controller interconnections Refer to the vent valve manual and follow the in structions to properly vent the turbomolecular pump To install the vent valve unscrew the threaded plug see figure below Figure 27 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2 5 Nm Turbo V 81 T User Manual 87 900 984 01 E 213 228 17 Technical Information Figure 28 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suitable connector on the controller Vibration Isolator Installation 214 228 Two vibration isol
7. Base pressure with recommended forepump Inlet flange Foreline flange Rotational speed Start up time Cooling requirements Recommended forepump Operating position Coolant water Operating ambient temperature with natural air convection Operating ambient temperature Bakeout temperature Vibration level displacement Noise level With ISO 63 or CFF 4 5 Nz 77 1 s He 65 l s With KF 40 NW or CFF 2 75 No 50 I s He 56 l s H2 46 l s No gt 7 x 106 He 5 x 103 H2 3 x 102 mechanical 5 x 10 mbar 3 8 x 10 Torr diaphragm 5 x 10 mbar 3 8 x 10 Torr ISO 63 KF 40 NW CFF 4 5 O D CFF 2 75 O D KF16 NW 60 seconds Natural air convection Forced air or water optional mechanical Agilent DS 42 DS 102 NOIL E LL MN any flow 10 1 h 0 05 GPM temperature 15 C to 35 C pressure 2 to 4 bar 30 to 60 Psi 5 C to 25 C 4576 to 90 L with forced air cooling or water 120 C at inlet flange max CF flange A O rnm lt 0 01 um at inlet flange lt 45 dB A at 1 meter Turbo V 81 T User Manual 87 900 984 01 E Compliance with Storage temperature Input Lubricant Installation category Pollution degree Weight kg Ibs Technical Information 17 UNI EN 292 1 UNI EN 292 2 EN CENELEC 55011 IEC 1000 4 2 ex 801 2 IEC 1000 4 3 ex 801 3 IEC 1000 4 4 ex 801 4 EN 61010 1 IEC 1010 1 20 C to 70 C 60 Vac
8. humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles Las bombas turbomoleculares de la serie Turbo V 81 T deben usarse exclusivamente con uno de los controladores Agilent y deben conectarse a una bomba primaria v ase esquema en Technical Information Turbo V 81 T User Manual 87 900 984 01 E 55 228 4 Manual de istrucciones ATENCI N 56 228 Los controladores disponibles son los siguientes Rack controller 81 AG 969 8988 Rack controller 81 AG RS232 485 969 8989 Rack controller 81 AG Profibus 969 8990 PCB 24 V 969 9538 Navigator Controller 81AG 24 Vdc 969 8995 Navigator Controller 81AG 100 240 Vac 969 8996 El Turbo V 81 T puede instalarse en cualquier posici n Fijar el Turbo V 81 T en posici n estable conectando la brida de entrada de la turbobomba a una contrabrida fija que puede resistir a un par de 250 Nm alrededor de su eje Por ejemplo la brida ISO 63 puede ser fijada con mordazas en acero de alta resistencia tipo modelo tipo Agilent IC 63250 DCM2 La tabla siguiente describe el n mero de mordazas necesarios y con cual par de apriete apretarlos Tab 1 E BRIDA TIPO DE MORDAZA N PAR DE APRIETE ISO 63 Mordaza doble con rosca M10 4 22 Nm La turbobomba con brida de entrada ConFlat ha de fijarse a la c mara de vac o mediante los
9. not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Turbo V 81 T User Manual 87 900 984 01 E Turbo V 81 T Turbo V 81 T Turbo V 81 T User Manual 87 900 984 01 E 3 228 Contents 4 Manual de istrucciones 49 Indicaciones de Seguridad para Bombas Turbomoleculares 50 Informaci n general 51 Almacenamiento 53 Preparaci n para la instalaci n 54 Instalaci n DD Uso 97 Mantenimiento 58 Eliminaci n 59 6 228 Turbo V 81 T User Manual 87 900 984 01 E Contents 16 Instructions for Use 183 safety Guideline for Turbomolecular Pumps 184 General Information 185 Storage 186 Preparation for Installation 187 Installation 188 Use 190 Maintenance 191 Disposal 192 17 Technical Information 193 Description of the Turbo V 81 T 194 Technical Specification 198 Turbo V 81 T Outline200 Inlet Screen Installation 203 Heater Band Installation 206 Turbo V 81 T User Manual 87 900 984 01 E 11 228 Contents 12 228 Air Cooling Kit Installation 208 Water Cooling Kit Installa
10. please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the R was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 AE Agilent Technologies Vac
11. three phase 1350 Hz max 50 W max permanent lubrication Il 2 Storage temperature 20 C to 70 C ISO 63 1 83 4 03 KF 40 1 80 3 97 CFF 4 5 2 62 5 78 According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump When the Turbo V 81 T has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature Turbo V 81 T User Manual 87 900 984 01 E 199 228 17 Technical Information Turbo V 81 T Outline The following figure shows the Turbo V 81 T outlines dimensions are in inches mm 4 28 UNF 2B AT 60 CFF 2 75 VACUUM TECHNOLOGIES VACUUM TE Dimension Figur
12. 102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Tec
13. 2 PARTNUMBER lo ere oO SMB A Heater band 220 V 969 9801 II a Metallic water cooling kit 989 9828 Plastic water cooling kit 969 9824 Aicooingkt OSmeabi GEM Air cooling kit extension cable b m 969 9940 Pump extension cable 9699942 Vivato damper ones WR Vibration damper CFF 4 5 969 9376 edu 5 sas ero A T m m Dry serollSH110 SH01101 UNIV Rack controller BAG Base neg Rack controller 81 AG RS232 485 9998989 Rack controller 81 AG Profibus 969 8990 Tubo VEAS Navigator Convoler 2A Vae Ras Turbo V 81 AG Navigator Controller 100 240 Vac 969 8996 For a complete overview of Agilent s extensive product lines please refer to the Agilent catalog Turbo V 81 T User Manual 87 900 984 01 E 221 228 17 Technical Information Vent Valve Model Selection Table Tab 4 Vent valve model selection table E CONTROL UNIT MODEL VENT VALVE PART NUMBER Turbo V 81 AG Navigator Controller N O 969 9844 cable 0 7 m any version Turbo V 81 AG Rack Controller N O 969 9844 cable 0 7 m any version 222 228 Turbo V 81 T User Manual 87 900 984 01 E x Agilent Technologies 1 Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we as
14. Standard Rack Controller 216 Connection A High Vacuum Flange 217 Connection Configurations 218 Connection B Fore Vacuum Pump 219 Connection C Electrical 219 Pump used in Presence of Magnetic Fields Accessories and Spare Parts 221 Vent Valve Model Selection Table 222 Original Instructions P Agilent Technologies 220 193 228 17 Technical Information Description of the Turbo V 81 T The Turbo V 81 T pump is available in four versions The difference among the four versions lies purely in the high vacuum connection The four versions are Model 969 8905 with ISO 63 high vacuum flange Model 969 8906 with KF 40 NW high vacuum flange Model 969 8907 with ConFlat 4 5 external diameter high vacuum flange Model 969 8908 with ConFlat 2 75 external diameter high vacuum flange Pump Description The pump consists of a high frequency motor driving a turbine fitted with 9 bladed stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium al loy machined from a single block VACUUM TECHNOLOGIES Figure 3 Model 969 8905 194 228 Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17
15. Turbo V 81 T W cum producis Models 968 8905 989 8906 969 8907 Manual de Instrucciones Spanish pages 7 18 User Man ual English pages 19 58 87 900 984 01 E 04 2011 of E Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 984 01 E Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agre
16. a high vacuum applications which can pump any type of non corrosive gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine max 80000 rpm driven by a high performance 3 phase electric motor The Turbo V 81 T is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol The caution messages are displayed before procedures which if not followed could cause damage to the equipment WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text Turbo V 81 T User Manual 87 900 984 01 E 185 228 16 Instructions for Use Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensi
17. accesorios mec nicos espec ficos Agilent Para m s detalles v ase el anexo Technical Information El Turbo V 81 T no puede fijarse utilizando su base El Turbo V 81 T pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a Para instalar los accesorios opcionales v ase Technical Information Turbo V 81 T User Manual 87 900 984 01 E Uso ADVERTENCIA ATENCI N ADVERTENCIA Manual de istrucciones 4 En el manual de la unidad de control se encuentran todas las instrucciones para el correcto funcionamiento de la turbo bomba Leer atentamente este manual antes de su uso Para obtener mejores presiones de m xima es posible calentar el sistema Durante el calentamiento de la c mara de vac o la temperatura en la brida de entrada no debe superar los 120 C con acoplamiento ConFlat y los 80 C con acoplamiento ISO Usar siempre refrigeraci n por agua durante las operaciones de calentamiento No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbo bomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas Ev tense golpes oscilaciones o bruscos desplazamientos de la t
18. ach the units and tighten each one in turn Repeat the sequential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock Connection Configurations Figure 33 218 228 Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 Connection B Fore Vacuum Pump A flange KF 16 NW is available to connect the Turbo V 81 T pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V 81 T pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming Connection C Electrical Figure 34 The turbopump is connected to the controller through an 6 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KQ resistance at 25 C and pin E is connected
19. ante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga la bomba y de no someterla a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada Figura 1 El Turbo V 81 T no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo Turbo V 81 T User Manual 87 900 984 01 E Manual de istrucciones 4 Instalaci n ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema Figura 2 No instalar ni o utilizar la bomba en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C v ase gr fico en el anexo Technical Information
20. ators for ISO and CFF inlet flange version pumps are available as accesso ries The two model part numbers are the following model 969 9375 for ISO 63 flange model 969 9376 for CFF 4 5 flange They typically reduce the vibration transmitted from the Turbo V 81 T to the system by a factor of 20 Please refer to the relevant instruction manual Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 Typical Layout Diagram With Navigator Controller Connection Connection C 2 MAINS suePLv gt Turbo V Navigator controller Vent valve Vacuum pump shut off valve optional System vent valve optional 1 2 3 4 5 Vacuum chamber 6 Ionization gauge 7 Fore vacuum pump connecting flange 8 Oil mist eliminator 9 Fore vacuum pump with internal one way valve 10 Fore vacuum pump control relay 11 Connection for water cooling 12 Roughing line with valve optional Turbo V 81 T User Manual 87 900 984 01 E 215 228 17 Technical Information 216 228 13 Turbopump 14 Fan 15 Flexible connection With Standard Rack Controller MAINS TURBO V SUPPLY P CONTROLLER
21. e 8 Turbo V 81 T outline 200 228 Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 YN Lo o o o Y O Q E 3 o Inlet pressure mbar Figure 9 Graph of pumping speed vs inlet pressure with a 8 m h mechanical pump Helium Compression ratio Hydrogen L ft ttt ft iti L it tit 10 1 10 Foreline pressure mbar Figure 10 Graph of compression ratio vs foreline pressure Turbo V 81 T User Manual 87 900 984 01 E 201 228 17 Technical Information o mE iz 2 E gt Q X o gt O pun X H 107 10 Inlet pressure mbar Figure 11 Graph of Nitrogen throughput against inlet pressure using a DS102 as forevacuum pump 202 228 Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 Inlet Screen Installation Figure 12 Figure 13 The inlet screens mod 969 9300 and 969 9309 prevent the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure Turbo V 81 T User Manual 87 900 984 01 E 203 228 17 Technical Information
22. ement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if
23. hnologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 O Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 900 984 01 E Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan 8821 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Lein Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt cu
24. iones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas Las bombas de la serie Turbo V 81 T son bombas turbomoleculares para aplicaciones de alto y ultra alto vac o capaces de bombear cualquier tipo de gas o compuesto gaseoso no corrosivo No son adecuadas para bombear l quidos ni part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 80000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El Turbo V 81 T no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada Turbo V 81 T User Manual 87 900 984 01 E 51 228 4 Manual de istrucciones Este manual utiliza las convenciones siguientes vig Los mensajes de atenci n se visualizan antes de los procedimientos que al no respetarse podr an provocar da os al equipo VO ANA Los mensajes de advertencia atraen la atenci n del operador sobre un procedimient
25. its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like Nitrogen or Helium for pump bearing protection see the appendix Technical Information When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases Turbo V 81 T User Manual 87 900 984 01 E Instructions for Use 16 Maintenance The Turbo V 81 T series pumps does not require any maintenance Any work performed on the system must be carried out by authorized personnel Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned system to replace that broken down Before returning the pump to the constructor for repairs or advanced exchange service the Health and Safety sheet a
26. k that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely gt m F i 7 Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agile
27. l Information 17 The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm The water kit is assembled as shown in the figure Figure 25 Turbo V 81 T User Manual 87 900 984 01 E 211 228 17 Technical Information 212 228 1 Connect the plate to the pump bottom with four screws M3x20 Figure 26 2 Assemble the metal or the plastic kit as shown Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 15 C and 35 C with an inlet pressure between 2 and 4 bar The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 96 of Ethyl Glycole is suggested Turbo V 81 T User Manual 87 900 984 01 E
28. lange capable of withstanding a torque of 250 Nm around its axis For example the ISO 63 flange can be fixed using high strength steel clamps as Agilent model IC 63250 DCMZ The following table shows the necessary number of clamps and the relevant fixing torque Tab 1 E A E LL oL AA Ss ISO 63 M10 clamps 4 22 Nm The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The Turbo V 81 T cannot be fixed by means of its base CAUTION The Turbo V 81 T belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category For installation of optional accessories see Technical Information Turbo V 81 T User Manual 87 900 984 01 E 189 228 16 Instructions for Use Use 190 228 All the instructions to correctly use the turbopump are contained in the controller manual Read carefully this manual before use the pump To obtain better limit pressures it is possible to heat the pump While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C for a ConFlat flange and 80 C for a ISO flange While heating always use the water cooling Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of
29. less steel These are supported and accurately positioned by spacer rings During normal operation the motor is fed with a voltage of 54 Vac three phase at 1350 Hz max To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio The pump can be water cooled or air cooled in the first case the customer can use a dedicated external plate made of nickel plated brass in the second case an external optional fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a residual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 16 NW flange 196 228 Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 AA VACUUM TECHNOLOGIES CONTROLLER CONNECTOR FOREPUMP CONNECTOR Figure 7 Turbo V 81 T User Manual 87 900 984 01 E 197 228 17 Technical Information Technical Specification 198 228 Tab 2 Technical Specification Pumping speed Compression ratio
30. na bomba para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que la bomba se tenga que desguazar eliminarla respetando las normas nacionales espec ficas Turbo V 81 T User Manual 87 900 984 01 E Manual de istrucciones 4 Eliminaci n Significado del logotipo WEEE presente en las etiquetas El s mbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbolo v lido s lo para los pa ses miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta Turbo V 81 T User Manual 87 900 984 01 E 59 228 4 Manual de istrucciones Eliminaci n 60 228 Turbo V 81 T User Manual 87 900 984 01 E Turbo V 81 T User Manual
31. ng the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations 186 228 Turbo V 81 T User Manual 87 900 984 01 E Instructions for Use 16 Preparation for Installation The Turbo V 81 T is supplied in a special protective pack ing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Figure 1 Normal exposure to the environment cannot damage the Turbo V 81 T Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust Turbo V 81 T User Manual 87 900 984 01 E 187 228 16 Instructions for Use Installation CAUTION Do no
32. nnect the fan supply to the P4 connector of the controller Turbo V 81 T User Manual 87 900 984 01 E Figure 20 VACUUM TECHNOLOGIES Figure 21 Figure 22 Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 209 228 17 Technical Information Water Cooling Kit Installation Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers are 969 9823 metallic model and 969 9824 plastic model Figure 23 CAUTION The items of the plastic model kit must be assembled as shown in the following figure Figure 24 210 228 Turbo V 81 T User Manual 87 900 984 01 E Technica
33. nt com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc a 8 ada ud deu ilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 o 6 1 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product
34. o o una operaci n especifica que al no realizarse correctamente podr a provocar graves lesiones personales Las notas contienen informaci n importante extra da del texto 52 228 Turbo V 81 T User Manual 87 900 984 01 E Manual de istrucciones 4 Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ATENCI N En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent Turbo V 81 T User Manual 87 900 984 01 E 53 228 4 Manual de istrucciones Preparaci n para la instalaci n ATENCI N 54 228 El Turbo V 81 T se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido dur
35. oducts are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100
36. ror code on display Other Main seal leak Solenoid failure VALVES COMPONENTS Bellows leak Damaged flange Damaged sealing area Other LEAK DETECTORS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Communication failure INSTRUMENTS Display problem Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS Heater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum Over temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Pr
37. stomercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10 e e e Ui it Agilent Technologies
38. t name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for al costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date b FAILURE INFORMATION Failure Mode REQUIRED FIELD See next page for suggestions of failure terms Detailed Description of Malfunction Please provide the error message Application system and model whee Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION Does not start Noise Vertical Does not spin freely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Cantact Overtemperature Cooling defective Clogging PARAMETERS Power Rotational Speed Current inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow OPERATING TIME ION PUMPS CONTROLLERS Bad feedthrough Poor vacuum Vacuum leak High voltage prablem Er
39. t remove the adhesive and protective cap before connecting the turbopump 188 228 to the system Figure 2 Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C see the diagram pres sure temperature in the appendix Technical Information relative humidity 0 95 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The Turbo V 81 T pumps must be used in conjunction with one of the suitable Agilent controller and they must be connected to a primary pump see Technical Information Turbo V 81 T User Manual 87 900 984 01 E Instructions for Use 16 The available controllers are the following Rack controller 81 AG 969 8988 Rack controller 81 AG RS232 485 969 8989 Rack controller 81 AG Profibus 969 8990 PCB 24 V 969 9538 Navigator Controller 81AG 24 Vdc 969 8995 Navigator Controller SIAG 100 240 Vac 969 8996 The Turbo V 81 T can be installed in any position Fix the Turbo V 81 T in a stable position connecting the inlet flange of the turbopump to a fixed counter f
40. tion 210 Vent Accessories 213 Vibration Isolator Installation 214 Typical Layout Diagram 215 Pump used in Presence of Magnetic Fields 220 Accessories and Spare Parts 221 Vent Valve Model Selection Table 222 Turbo V 81 T User Manual 87 900 984 01 E Turbo V 81 T User Manual Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 50 Informaci n general 51 Almacenamiento 53 Preparaci n para la instalaci n 54 Instalaci n 95 Uso 57 Mantenimiento 58 Eliminaci n 59 Traducci n de las instrucciones originales UE Agilent Technologies 49 228 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a ser liberada VOI ANA Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 50 228 Turbo V 81 T User Manual 87 900 984 01 E Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucc
41. to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply Turbo V 81 T User Manual 87 900 984 01 E 219 228 17 Technical Information Pump used in Presence of Magnetic Fields 220 228 Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum opera tion no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Agilent s special ist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor Turbo V 81 T User Manual 87 900 984 01 E Technical Information 17 Accessories and Spare Parts Tab 3 Accessories and Spare Parts E DESCRIPTION
42. ttached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a system is to be scrapped it must be disposed of in accordance with the specific national standards Turbo V 81 T User Manual 87 900 984 01 E 191 228 16 Instructions for Use Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 192 228 Turbo V 81 T User Manual 87 900 984 01 E Turbo V 81 T User Manual 17 Technical Information Description of the Turbo V 81 T 194 Pump Description 194 Technical Specification 198 Turbo V 81 T Outline 200 Inlet Screen Installation 203 Heater Band Installation 206 Air Cooling Kit Installation 208 Water Cooling Kit Installation 210 Vent Accessories 213 Vibration Isolator Installation 214 Typical Layout Diagram 215 With Navigator Controller 215 With
43. urbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Helio para proteger los rodamientos v ase el anexo Technical Information Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos Turbo V 81 T User Manual 87 900 984 01 E 57 228 4 Manual de istrucciones Mantenimiento ADVERTENCIA 58 228 Las bombas de la serie Turbo V 81 T no requieren mantenimiento Cualquier operaci n deber ser realizada por personal autorizado Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para sustituir el averiado Antes de enviar al fabricante u
44. uum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all retums 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable L Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable a Billable New PO hard copy must be submitted with this form 3B Exchange _ Repair Upgrade Consignment Demo Calibration Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic C Corrosive C Reactive C Flammable Explosive Biological Radioactive List all toxic hazardous materials Include produc
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