Splitter Box - Agilent Technologies
Contents
1. ro Change Password T Apply the above settings to all serial ports Load Factory Default Q Save Restart Submit Done S sunny 26 c 1020 mb 57 46 06 13 24 3 Thuzeec E Figure 26 80 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 where Max connection 4 is the maximum nuber of simultaneous connections that can be made to the device Local TCP port 4001 is the port on which the service providing the TCP IP lt gt RS232 interfacing is listening For more details refer to the supplier s site MOXA If the number for Max connection is greater than 1 this means that two or more users in theory are authorised to modify the DUAL parameters remotely Splitter Box User Manual 87 900 131 01 A 81 98 5 Technical Information Binary Protocol 82 98 This protocol has been implemented on the Splitter Box only for compatibility with old controllers Agilent advises against use of this protocol for new projects The three protocols have equivalent data fields which comply with the following formats Tab 7 Type No of Bytes Description nn nn me Status 1 0 30h false off 1 31h true on 5 Integer 5 xxxxx represented in BCD on 5 digits always positive BitField 8 Like the integer type but with meanings associated to the number s single bits Expo nential 1 x xEsxx where x is BCD digits E is2. Configuration NE 4100T 00 90 E8 0B CS BB 192 168 0 200 COM Mapping 12709706 16 58 28 Found Network Enabler Module s 1 Now 12 09 06 16 59 21 A Figure 13 At this point to be able to interact with the software of the card it may be necessary to change the IP address of the MOXA card Splitter Box User Manual 87 900 131 01 A 69 98 5 Technical Information Ethernet Interface From the Configuration menu select the item Configure as shown in the following figure WW Network Enabler Administrator Configuration Eile Configuration View Help 22 Broadcast Search Specify by IP Address Configuration 1 Network Enabler Module s Z Unlock Model MAC Address IP Address Sas ae E configure NE 4100T 00 90 E8 08 C8 BB 192 168 0 200 Export Configuration A Import Configuration Assign IP Address 12 09 06 16 58 28 Found Network Enabler Module s 1 12 09 06 16 59 42 Found Network Enabler Modulels 1 12 09 06 17 06 26 Found Network Enabler Module s 1 Now 12 09 06 17 09 13 A Figure 14 70 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 The screen below appears Configuration Information Auto Warning IF Address Report Password Digital 10 Network Serial Operating Mode Accessible IP s Model NE 4100T MAC Address Modify 00 90 E8 0E CS BE Device Mame NE4100T_359 Serial Number Enable Web Console Firm
3. Allumer l alimentation de la haute tension DUAL Lire les valeurs de courant pression de chaque pompe relev es par le Splitter Box Splitter Box User Manual 87 900 131 01 A Mode d emploi 3 Le Splitter Box absorbe une certaine quantit de courant de l entr e haute tension pour pouvoir fonctionner correctement L insertion du Splitter Box m me s il est teint entre le DUAL et la pompe provoque une lecture de courant et de pression erronee du DUAL Le courant relev par le DUAL ne correspond pas la somme des courants relev s par le Splitter Box Quand le Splitter Box est ins r entre le DUAL et la pompe il ne faut lire la valeur de courant pression que sur le Splitter Box parce que seul ce relev est correct Entretien Le contr leur Splitter Box n a besoin d aucun entretien N importe quel entretien sur l unit doit tre effectu par un personnel technique autoris En cas de panne contacter le Support technique Agilent ou bien s abonner au Agilent Advanced Exchange Service o le contr leur endommag est remplac par un contr leur reconditionn En cas de mise au rebut du contr leur proc der son limination conform ment aux r glementations nationales en la mati re Splitter Box User Manual 87 900 131 01 A 37 98 3 Mode d emploi Mise au rebut 38 98 Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la direct
4. Increase and Decrease buttons Pressing Next Where XXXX is GENERAL HVI HV2 HV3 HV4 Splitter Box User Manual 87 900 131 01 A Technical Information 5 To move from one value to another press the Increase or Decrease key IJfGENERAL has been selected after pressing the Next key the following is displayed Where XXXX is SERIAL FRONT Pressing Next Where XXXX is Torr Mbar Pa Pressing Next Where XXX is 1200 4800 9600 Pressing Next Splitter Box User Manual 87 900 131 01 A 89 98 5 Technical Information 90 98 Where XXX is RS232 RS485 Pressing Next Where XX is from 0 to 32 Pressing Next causes exit from the menu If HV1 2 3 4 is selected after pressing the Next key the following is displayed The mantissa flashes and with Increase Decrease the mantissa is modified Pressing next the mantissa stops flashing and the exponent starts to flash The exponent can be modified with Increase Decrease Pressing next again the measurement unit flashes this may vary between A Ampere and the pressure unit of measurement selected in the General menu The set point indication envisages 5 hysteresis on the value set Splitter Box User Manual 87 900 131 01 A Technical Information Pressing Next causes exit from
5. Box User Manual 87 900 131 01 A Istruzioni per l uso 1 Pannello posteriore Ji IN OUT Figura 3 gresso V 2 4uscite HV E 3 4 interlock tra Splitter Box e Pompe A Se corte arr per es DUAL eee 5 connettore Ethernet opzionale o un O Tee Splitter Box User Manual 87 900 131 01 A 13 98 1 Istruzioni per l uso 7 connettore seriale per RS232 e RS485 vedi pin out nell appendice Technical Information 8 2xT2 A 250 V fusibili 9 pulsante di accensione spegnimento 10 Presa di alimentazione Immagazzinamento Per trasportare e immagazzinare il controller occorre osservare le seguenti condizioni ambientali Temperatura da 20 C a 70 C Umidit relativa da 0 a 95 senza condensa Preparazione per l installazione Il controller viene fornito in un imballo protettivo speciale nel caso in cui si presentassero segni di danni che potrebbero essere stati causati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti Il materiale dell imballo completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Figura 4 Imballo del controller 14 98 Splitter Box User Manual 87 900 131 01 A Istruzioni per l uso 1 Installazione Per alimentare il controller Splitter Box usare un cavo di alimentazione a 3 fili dotato
6. Mode Accessible IP s Model NE 41 00T Modify e 192168020 132 168 0 200 00 90 E8 0B C8 BE P Anahe Serial Number 359 Hetmask 266 266 266 0 Gateway Firmware Wer wer 1 7 IF Configuration Chato BIOS Wer Ver1 3 DNS Server 2 Modify Enable SNMP Sonny anne Leal Lo Canino Po Click the Modify check box to modify configuration y OF x Cancel Figure 17 At this point you can modify the IP address netmask of the card Let s suppose that the new address isin class C 192 168 1 200 with netmask 255 255 255 0 Splitter Box User Manual 87 900 131 01 A 13 98 5 Technical Information Configuration Information Auto Warning IF Address Report Password Digital IO Basic Network Serial Operating Mode Accessible IPs Model ME 41007T Modify Msn 192 168 1 200 00 90 E amp 06 CS BB IP Address 1921681 200 Serial Number Mad ty 359 Metmask 266 256 266 0 Firmware Wer Wer 1 7 IF Configuration Static BIOS Wer Modity LI Enable SHME Cai tlama Losail I Contact Click the Modify check box to modify configuration IF x Cancel Figure 18 Confirm with OK Wait as the values are modified on the card Please walt mapaning X Cancel 473 442 Figure 19 14 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 If the operation is successful confirmation and warning windows appear in this order Information
7. Quando si introduce lo Splitter Box tra DUAL e pompa si deve leggere la corrente pressione solo dallo Splitter box perch solo la lettura effettuata tramite lo Splitter corretta Manutenzione Il controller Splitter Box non richiede alcun intervento di manutenzione Qualsiasi tipo di intervento sull unita deve essere eseguito da personale tecnico autorizzato In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un controller rigenerato in sostituzione di quello guasto Qualora un controller dovesse essere rottamato procedere nel rispetto delle normative nazionali specifiche Splitter Box User Manual 87 900 131 01 A 17 98 1 Istruzioni per l uso Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita 18 98 Splitter Box User Manua
8. To communicate via the Ethernet interface simply encapsulate the Window protocol inside the TCP IP protocol In order to communicate via the Ethernet interface the IP address and the Subnet mask must be configured to adapt these to own network The procedure for this operation is described below Splitter Box User Manual 87 900 131 01 A 55 98 5 Technical Information J2 Serial Connector This connector provides the connection for RS 232 and RS 485 serial line J2 Pin out Figure 7 Tab 2 PIN N SIGNAL NAME 1 5 V OUT Reserved Zoo TRB i 3 gt 70 BNC E Lt x ie a ni mn E N 8 BR E ss 2 Tr _ o _ ga y j uu 56 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Connector Examples Splitter Box Figure 8 PC HOST CONTROLLER B TURBO CONTROLLER B Figure 9 RS 485 Connection Splitter Box User Manual 87 900 131 01 A 57 98 5 Technical Information Window Protocol Description Communication Format Sdata bit no parity stop bit baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string wi
9. alla mancata osservanza delle specifiche normative nazionali Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Nel appendice Technical Information vengono fornite delle informazioni dettagliate Questo manuale utilizza le seguenti convenzioni messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo Splitter Box User Manual 87 900 131 01 A Istruzioni per l uso 1 Pannello frontale Senza Display e Tastiera 0conocnornono POWER Splitter Box O O Figura 1 1 LED di indicazione Controller acceso Splitter Box User Manual 87 900 131 01 A 11 98 1 12 98 Istruzioni per l uso Con Display e tastiera Figura 2 SP1 sp3 777 77 ISIS FL FL FF spa PPA PARA PARAR A TREE TPI PF PP FOI TA T AT DS EL TE IT TH FL TSF SP2 ES AR PA SR DO LF VACUUM TECHNOLOGIES CHANNEL SELECTION Increase CONFIG decrease next EVIL qm Splitter Box Splitter
10. any specific national rule or regulation The following sections provide you with all the information needed to guarantee the operator s safety when using the equipment Detailed information is provided in the appendix entitled Technical Information The following conventions are used in this manual WARNING Warning messages call the operator s attention to a specific procedure or operation that could cause serious injury if not performed correctly The caution messages are provided before procedures that could cause damage to the equipment if not complied with Notes contain important information extracted from the text Splitter Box User Manual 87 900 131 01 A Instructions for Use 4 Front Panel Without Display and Keyboard Splitter Box O O Figure 1 MIO Splitter Box User Manual 87 900 131 01 A 41 98 4 Instructions for Use With Display and Keyboard PSS PIT PF TT FOI TA T AT SP1 7 7 7 7 SIA ASS LH FLY SP2 EA BA bi L PL EF LPF sp3 777 77 ISIS FL FL FF spa PPA PARA PARAR A VACUUM TECHNOLOGIES TA CHANNEL DISPLAY SELECTION Increase next TI decrease SO previous Splitter Box Figure 2 42 98 Splitter Box User Manual 87 900 131 01 A Instructions for Use 4 Rear Panel Ji IN OUT Figure 3 a HV input u DO quo DD 2 TD cmo D
11. or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond aWARNING notice until the indicated conditions are fully understood and met Splitter Box User Manual 87 900 131 01 A Splitter Box Splitter Box Splitter Box User Manual 87 900 131 01 A 3 98 Splitter Box 4 98 Splitter Box User Manual 87 900 131 01 A Contents Contents 1 Istruzioni per uso 9 Informazioni generali 10 Pannello frontale 11 Pannello posteriore 13 Immagazzinamento 14 Preparazione per l installazione 14 Installazione 15 Uso 16 Manutenzione 17 Smaltimento 18 2 Gebrauchsanleitung 19 Allgemeines 20 Vordere Schalttafel 21 Schalttafel auf der R ckseite 23 Lagerung 24 Vor der Installation 24 Installation 25 Gebrauch 26 Wartung 27 Splitter Box User Manual 87 900 131 01 A 5 98 Contents 6 98 3 4 Entsorgung 28 Mode d emploi 29 Indications Generales 30 Panneau frontal 31 Panneau arriere 33 Emmagasinage 34 Preparation pour l installation 34 Installation 35 Utilisation 35 Entretien 37 Mise au rebut 38 Instructions for Use 39 General Information 40 Front Panel 41 Rea
12. the 45h character and s is the String n Sequence of n characters included within the 20h and Fh range the h notation following a number indicates that the number is expressed in hexadecimal format BCD the number is represented by digits included within the 0 and 9 range ASCII 30h 39h Status can also assume values greater than 1 The commands have a read and a write mode By specifying the type of read operation being performed the Host queries the Splitter Box which in turn replies in a format compliant with the command sent As long as a write operation can be carried out the write and read formats for the same command coincide Splitter Box User Manual 87 900 131 01 A Technical Information 5 Communication Format Host to Dual controller command format header command length command channel data checksum Dual controller to Host reply format header response length command channel data checksum Tab 8 Field No of bytes Value Description Header 1 81h Header for the serial RS232 command 81h A0h RS422 Header and address for the serial RS485 Header 01h Header for the serial RS232 response 01h 20h RS422 Header and address for the serial RS485 Length 2 Data packet length in BCD command channel data fields only Command See commands description byte 0 command byte 1 subcommand Channel 1 30h No channel 31h High Voltage 1 32h High Voltag
13. the menu Accessories Tab 10 Description Positive Splitter Box with Ethernet and with display and keyboard Negative Splitter Box with Ethernet and with display and keyboard 5 Part number 929 7020 929 7021 EEE SES SERRE er Splitter Box User Manual 87 900 131 01 A 91 98 5 Technical Information Accessories 92 98 Splitter Box User Manual 87 900 131 01 A Ea Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us
14. 1 Configuration is applied ok DE Figure 20 N Network settings have changed Conduct a new search to show updated device settings DE Figure 21 Confirm again in the usual way Now using any browser connect to the URL http 192 163 1 200 and configure the remaining card parameters Splitter Box User Manual 87 900 131 01 A 75 98 5 Technical Information Ethernet Interface Network Enabler Web Console Mozilla Firefox OI x GOT pins vi Jos 51 O E e Welcome to Network Enabler Web Console Model Name INE 4100T IMAC Address 00 90 E8 0B C8 BB Serial No 359 Firmware version 1 7 Figure 22 16 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Ethernet Interface RS232 Parameter Configuration Select Network Enabler Web Console Mozilla Firefox ax File Edit view Go Bookmarks Tools Help a BO http 192 168 1 200 co IGL nmea info python ID DSP 8051 TCP IP uc AMETERART Services No information available Q Nick nmea_info py a graphical view of a El nick s Code Network Enabler Web Console Serial Settings EE Port Alias Po o Serial Parameters mn Baud Rate so Data Bits pa stop Bits Flow Control None zl FIFO Disable Enable Interface IRS 232 Only IT Apply the above settings to all serial ports http 192 168 0 200 03 htm Port 01 Ss so Sunny 21 C 1020 mb 68 46 06 13
15. 24 Thu 24 C sa 4 Figure 23 At this point you can modify the 232 serial settings on the MOXA card with the equivalent values set on the DUAL card In this example Splitter Box User Manual 87 900 131 01 A 11 98 5 Technical Information Ethernet Interface Baud Rate 9600 Data Bit 8 Stop Bit 1 Parity None Flow Control None At the end confirm your settings Y Network Enabler Web Console Mozilla Firefox l lo x File Edit view Go Bookmarks Tools Help a BO http 192 168 1 200 co CL siuetooth nokia 6630 DSP O 8051 TCP IP uc SeTcRAFT v Services No information available J Main Menu Serial Settings OK a Overview Warning The changes will take affect until Save Restart the NPort You can Save Restart NPort now or Save Restart Basic Settings NPort until all other settings configured ro Network Settings Ea Serial Settings Back Save Restart Home i O Porti A Operating Settings i lt Q Porti O Accessible IP Settings aa Auto warning Settings 0 E mail and SNMP Trap O Event Type Digital 10 C DIO Settings CI DIO Monitor O Change Password O Load Factory Default O Save Restart Ss o Sunny 26 C 1020 mb 57 46 06 13 24 1 Thu24 C SE y Figure 24 To finally save your settings select the Save Restart item 18 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Ethernet Interface TCP Serv
16. 704 die Hochspannungszuleitung am Verteilerkasten anschliefsen Verriegelung des Hochspannungs Speiseger ts an den zugeh rigen Verriegelungsverbinder anschliefsen Netzanschluss am Verteilerkasten einstecken und ihn mit Hilfe der zugeh rigen Taste Taste 9 Abb Schalttafel auf der R ckseite einschalten Splitter Box User Manual 87 900 131 01 A Wartung Gebrauchsanleitung 2 Hochspannungszuf hrung DUAL einschalten Mit Hilfe des Verteilerkastens die Strom Druckwerte aller Pumpen ablesen Um einwandfrei funktionieren zu k nnen verbraucht der Verteilerkasten am Hochspannungseingang eine gewisse Menge an Strom Der Einbau eines Verteilerkastens zwischen dem DUAL und der Pumpe ruft ein falsches Ablesen des DUAL Strom und Druckwertes hervor auch wenn er ausgeschaltet ist Der vom DUAL abgelesene Stromwert ist nicht gleich der Summe aller vom Verteilerkasten abgelesenen Stromwerte Beim Einbau des Verteilerkastens zwischen dem DUAL und der Pumpe mu der Strom bzw der Druckwert nur vom Verteilerkasten abgelesen werden weil nur der vom Verteiler abgelesene Wert richtig ist Die Dual Controller sind wartungsfrei Eventuell erforderliche Eingriffe m ssen von dazu befugtem Fachpersonal ausgef hrt werden Bei St rungen kann der Agilent Reparaturdienst in Anspruch genommen werden oder schlie en Sie einen Vertrag f r Agilent Advanced Exchange Service ab mit dem ein defekter Controller gegen einen general ber
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19. 98 aufmerksam da bei Nichteinhaltung Sch den an der Anlage entstehen k nnen Die Hinweise enthalten wichtige Informationen die im Text hervorgehoben werden Splitter Box User Manual 87 900 131 01 A Gebrauchsanleitung 2 Vordere Schalttafel Ohne Display und Tastatur Splitter Box O O Abbildung 1 1 Controller Anzeige LED leuchtet Splitter Box User Manual 87 900 131 01 A 21 98 2 Gebrauchsanleitung Mit Display und Tastatur PSS PIT PF TT FOI TA T AT SP1 7 7 7 7 SIA ASS LH FLY SP2 EA BA bi L PL EF LPF SP3 VAIS LS IL MSI IS FL FL SPA LP AP APP PPLE APE LH VACUUM TECHNOLOGIES CHANNEL f DISPLAY SELECTION Increase Es next DC decrease SO previous Splitter Box Abbildung 2 Controller Anzeige LED leuchtet 22 98 Splitter Box User Manual 87 900 131 01 A Gebrauchsanleitung 2 Schalttafel auf der R ckseite Ji IN OUT Abbildung 3 rue ea E 2 A HV Ausg nge S 3 4 Verriegelung zwischen Verteilerkasten und Pumpen A E e E E E a e N nn en v B DYAM 0 _ n nn Aue Zr no an o uan 7Tp pn uil Splitter Box User Manual 87 900 131 01 A 23 98 2 Gebrauchsanleitung 1 Serienanschluss f r RS232 und RS485 siehe pin out im Anhang Technical Information 8 2xT2 A 250 V Sicherungen 9 Ein Aus 10 Hauptsteckdose Lagerung Bei Transpo
20. CIRE rsx ADDA won _ Source Controller Destination PC Splitter Box User Manual 87 900 131 01 A 63 98 5 Technical Information Command Set pump 500Diode for channel 2 Source PC Destination Controller o je Iso 32 30 31 30 30 so 30 30 36 os 38 30 Source Controller Destination PC e o Is Js us Command Read the voltage Source PC Destination Controller o es Jai 30 30 fos 38 39 sx aon wmoow ro en on Source Controller Destination PC o Ts Is ao Io 5 5 To au els six aoon woow ao cao fex 64 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Ethernet Interface Overview Ethernet communications are provided by the Splitter Box by means of a MOXA card model NE4100T This card allows the serial protocol to be encapsulated within a TCP IP framework To communicate with the Ethernet controller either the serial port or the Ethernet port can be used Both communication ports serial and Ethernet must not be used at the same time Before you can use Ethernet communications you must configure the card with the software provided by Moxa Network Enabler Administrator 2 7 Splitter Box User Manual 87 900 131 01 A 65 98 5 Technical Information Ethernet Interface IP Address Configuration Run the Moxa supplied program VW Network Enabler Administrator Configuration File Configuration View Help Func
21. D uu Gud ru ______ gt su u een vi 6 Remote I Os optional Splitter Box User Manual 87 900 131 01 A 43 98 4 Instructions for Use 1 Serial connector for RS232 and RS485 see pin out in the Technical Information appendix 8 2xT2 A 250V fuses 9 ON OFF button 10 Power socket Storage The following environmental conditions must be met when transporting and storing the controller Temperature 20 C to 70 C Relative humidity O 95 non condensing Prior to Installation The controller comes in a special protective packaging if there is any sign of damage that could have been caused during transportation contact your local sales office immediately When unpacking the controller be particularly careful to avoid dropping it or knocking it against anything The packaging material is totally recyclable and complies with EEC directives 85 399 for the safeguard of the environment Figure 4 Controller Packaging 44 98 Splitter Box User Manual 87 900 131 01 A Instructions for Use 4 Installation WARNING To power the Splitter Box controller use a 3 wire power cord fitted with internationally approved plug Always use this power cord inserting the plug in a power socket fitted with a ground connection in order to avoid electrostatic discharge The high voltages present inside the controller may cause serious injury or death Before carrying out any installation or maintena
22. IOLOGICAL OR EXPLOSIVE HAZARDS RADIGACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic C Corrosive C Reactive C Flammable Explosive C Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liahle for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure ta toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model Ep Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Pl
23. Splitter Box Models 829 7020 829 7021 Manuale di Istruzioni Bedienungshandbuch Notice de Mode d Emploi User Manual 87 900 131 01 A 05 2011 u Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 131 01 A Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms cover
24. alle persone o addirittura la morte collegare tutte e quattro le uscite dello Splitter Box alle pompe tramite gli appositi cavi prima di fornire l alta tensione all ingresso dello Splitter Box Accensione del Controller Procedere come segue per accendere le pompe ioniche utilizzando un alimentatore per es Dual per fornire l alta tensione e lo Splitter Box per leggere la corrente e la pressione delle 4 pompe ad esso collegate collegare le 4 pompe con lo splitter Box collegare gli interlock di ogni pompa al corrispondente connettore sul pannelo posteriore dello Splitter Box collegare l alimentatore alta tensione allo Splitter Box attraverso l apposito cavo P N 929 0704 collegare l interlock dell alimentatore alta tensione con il corrispondente connettore di interlock collegare l alimentazione di rete allo Splitter Box ed accenderlo tramite l apposito tasto tasto 9 fig pannelo Posteriore Accendere l alimentazione alta tensione DUAL Leggere la corrente pressione di ogni singola pompa con lo Splitter Box Splitter Box User Manual 87 900 131 01 A Istruzioni per l uso 1 Lo Splitter Box per poter fuzionare correttamente assorbe una certa corrente dall ingresso alta tensione L introduzione dello Splitter box anche se spento tra il DUAL e la pompa provoca una lettura errata di corrente e pressione del DUAL La corrente letta dal DUAL non la somma delle correnti lette dallo Splitter Box
25. aterials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Retum is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessaries from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon a
26. ch 3 XXXX is the name of the pump for example 500SC Tr 500 StarCell o Triode 75 55 40 CS 750 55 o 40 StarCell o Triode 500 Diode 500 Diode o Noble Diode ecc The black squares to the left and right of the display indicate whether the set points are active black squares or not white squares The numbers to the left of the display indicate the number of the channel In the figure above the pumps of channels 1 and 2 are indicated Splitter Box User Manual 87 900 131 01 A Technical Information 5 Press the Channel Selection key for alternative display of all four channels In the figure below channels 3 and 4 are shown for example purposes Press the Display key to display all the measure ments alternatively in the configuration menu it is possible to choose between mbar Torr Pascal Splitter Box User Manual 87 900 131 01 A 87 98 5 Technical Information 88 98 Configuration Menu Press the Config key to access the configuration menu the following screen page is displayed To scroll the items of the menu press the Next key Each time Next is pressed the parameters of that screen page are saved Pressing Previous the data of the screen page are not saved the following screen page is displayed for 2 sec and subsequently the item of the previous menu tee AIBIO R T E D To select the parameters of a menu item use the
27. cts Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 131 01 A E Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel
28. di spina approvata a livello internazionale Utilizzare sempre questo cavo di alimentazione inserendo la spina in una presa di alimentazione munita di collegamento a terra onde evitare scariche elettro statiche All interno del controller sono presenti delle alte tensioni che possono provocare delle lesioni gravi o addirittura la morte Prima di eseguire qualsiasi operazione di installazione o manutenzione del controller scollegarlo dalla presa elettrica Durante il funzionamento occorre che siano rispettate le seguenti condizioni ambientali Temperatura da 0 C a 45 C Umidit relativa O 90 senza condensa L interlock del cavo viene chiuso sulla massa della pompa Se il collegamento interrotto l alta tensione viene disabilitata Chiudere l interlock con l apposito contro connettore se si utlizza un cavo senza connettore di interlock Splitter Box User Manual 87 900 131 01 A 15 98 1 Istruzioni per l uso Uso In questo paragrafo vengono riportate le principali procedure operative Per ulteriori informazioni e per le procedure riguardanti collegamenti o particolari opzioni fare riferimento al paragrafi USE nell appendice Technical Information WAYS 414020 Quando sull ingresso HV dello splitter box presente l alta tensione anche 16 98 su tutte e quattro le uscite presente l alta tensione anche se lo Splitter Box spento e scollegato dall alimentazione Per evitare gravi danni
29. e 2 33h High Voltage 3 34h High Voltage 4 Splitter Box User Manual 87 900 131 01 A 83 98 5 Technical Information List of Commands Tab 9 Command Read Code Value Code Value Channel Admitted Write ASCII hex Values Unit of pressure RAW DO 44h30h No Channel Torr 0 measure mBar 1 Pa 2 Device Number RAW FO 46h30h HV1 HV2 HV3 HV4 See Below Voltage NR SD o 9sh30h oo HVT HVZAVS HV4 0 7000 Current R TO 54h30h HV1 HV2 HV3 HV4 X XE XX E Pressure U0 sshs h O AVLHAVZ AVS HVE XXE XX Examples Unit of pressure mbar 81h 30h34h 44h30h 30h 31h 70h Pump select for channel 3 is 500 Diode 81h 30h34h 46h30h 33h 36h 76h Read voltage 81h 30h34h 53h30h 31h 3Fh 68h Read current for channel 4 81h 30h34h 54h30h 34h 3Fh 6Ah Read pressure for channel 1 81h 30h34h 55h30h 31h 3Fh 6Eh 84 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 How to Use by Front Panel This paragraph explains how to use the front panel with display and keyboard for those models equipped with display and keyboard 929 7020 929 7021 Selection Increase Splitter Box Figure 27 Front panel Splitter Box User Manual 87 900 131 01 A 85 98 5 Technical Information 86 98 At power on the display shows Lee PILL Figure 28 Front panel After a few seconds the following screen page is displayed Set point ch 1 Set point ch 2 x x x x X ni Set point ch 4 Where Set point
30. ease use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION Does not start Noise Vertical Does not spin freely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Contact Overtemperature PARAMETERS Power Rotational Speed Current Inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow Cooling defective Clogging ION PUMIPS CONTROLLERS Poor vacuum High voltage prablem Bad feedthrough Vacuum leak Main seal leak Solenoid failure OPERATING TIME VALVES COMPONENTS Bellows leak Damaged flange Error code on display Other LEAK DETECTORS Damaged sealing area Other INSTRUMENTS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Display problem Communication failure Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS Heater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum Over temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Techno
31. easurement Environment Temperature storage 20 C to 70 C Umidity 0 95 Temperature 5 to 45 C Pollution Degree 2 Umidity 0 90 non condensing EN 61010 1 EN 55011 Class A EN 61000 3 2 EN 61000 3 3 EN 61000 6 2 EN 61000 4 2 3 4 5 6 11 8 Applied norr Splitter Box User Manual 87 900 131 01 A 5 Technical Information Controller Outline The outline dimensions for the Splitter Box controllers are shown in the following figure Figure 6 Controller Model Dimensions 54 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Communication All Splitter Box models are fitted with a RS232 and RS485 serial interface see the pin out of the connector below The unit can communicate on two different protocols Window protocol new system Binary protocol old system The Binary protocol is used in old Agilent controllers it has been implemented on this controller in order to guarantee compatibility with the old products but will no longer be developed in future Use of the Binary protocol for new projects should be avoided Please use Window protocol for new development Some models 829 7020 829 7021 also feature an Ethernet interface TCP IP
32. er Mode Configuration TCP Server Mode No TCP IP ON cEthemes TCP Server D Requesta connection i Device Proceed with data transmission Figure 25 To be able to use the program provided by Agilent DEC for communications between a PC and DUAL over a TCP IP network you must configure the card with the TCP server mode functionality Splitter Box User Manual 87 900 131 01 A 19 98 5 Technical Information Ethernet Interface Again using your browser select the Operating Settings item and define the parameters in the frame on the right as follows Network Enabler Web Console Mozilla Firefox E loj x File Edit View Go Bookmarks Tools Help lt a z gt v amp amp ttp 192 168 1 200 j Go CL moxa NE 4100 O DSP 7 8051 III TCP IP uc _HercrArT Services No information available 3 Main Menu Operating Settings O Overview OD Basic Settings Ha Network Settings Operation mode TCP Server Mode che Serial Settings TCP alive check time 7 0 99 min O Port 1 Inactivity time o 0 65535 ms Ag Max connection j 1 4 Q Port 1 Data Packing Accessible IP Settings eee 0 Hex I Enable EM Auto warning Settings 8 2 Delimiter 2 o Hex I Enable i 0 E mail and SNMP Trap POE orce transmit ms LC Event Type F O 065595 S Digital 10 TCP Server Mode i CI DIO Settings Local TCP port 4001 DIO Monitor Command port 966 Port 01
33. er le contr leur et ne lui faire subir aucun choc Le mat riel est enti rement recyclable et il est conforme aux directives CEE 85 399 en mati re de protection de l environnement Abbildung 5 Emballage du contr leur 34 98 Splitter Box User Manual 87 900 131 01 A Mode d emploi 3 Installation Pour alimenter le contr leur Splitter Box utiliser un cordon d alimentation 3 fils muni d une fiche agr e a l chelle internationale Utiliser toujours ce cordon d alimentation en introduisant la fiche dans une prise d alimentation reliee la terre afin d eviter les decharges electrostatiques Il y a des hautes tensions l int rieur du contr leur qui peuvent provoquer des blessures graves voire mortelles Avant d effectuer la moindre operation d installation ou d entretien du contr leur le d brancher de la prise lectrique Pendant le fonctionnement il est n cessaire de respecter les conditions d environnement suivantes Temp rature de 0 C 45 C Humidit relative 0 90 non condensante L interlock du cable est serr sur la masse de la pompe Si le branchement est coup la haute tension est interrompue Lorsqu on utilise un cable sans connecteur d interlock fermer l interlock avec le connecteur de fermeture pr vu cet effet Utilisation Dans ce paragraphe on indique les principales proc dures op rationnelles Pour tous autres d tails et pour les proc dures conc
34. ernant des connexions ou des l ments en option se reporter au paragraphe USE de l appendice Technical Information Splitter Box User Manual 87 900 131 01 A 35 98 3 Mode d emploi WIS Sees ai Slt Quand la haute tension est branch e sur l entr e HV du Splitter Box un courant haute tension est galement present au niveau des quatre sorties m me si le Splitter Box est eteint et que son cordon d alimentation est debranche Pour viter des blessures graves voire mortelles brancher les quatre sorties du Splitter Box sur les pompes l aide des cables r serves cet effet avant de relier l entr e du Splitter Box la haute tension Allumage du Contr leur Proc der comme suit pour allumer les pompes ioniques l aide d un alimentateur ex Dual charg de fournir la haute tension et le Splitter Box de relev du courant et de la pression des 4 pompes qui y sont reli es 36 98 brancher les 4 pompes sur le splitter Box brancher l interlock de chaque pompe sur le connecteur correspondant situ sur le panneau arri re du Splitter Box brancher l alimentateur de haute tension sur le Splitter Box l aide du cable sp cial P N 929 0704 brancher l interlock de l alimentateur de haute tension sur le connecteur correspondant de l interlock brancher l alimentation du r seau sur le splitter Box et l allumer avec le bouton r serv cet effet bouton 9 du sch ma du panneau arri re
35. holten ausgetauscht wird Eine eventuelle Verschrottung mu unter Einhaltung der einschl gigen landes blichen Vorschriften erfolgen Splitter Box User Manual 87 900 131 01 A 21 98 2 Gebrauchsanleitung Entsorgung 28 98 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat Splitter Box User Manual 87 900 131 01 A Splitter Box User Manual Mode d emploi Indications Generales 30 Panneau frontal 31 Sans cran ni clavier 31 Avec cran et clavier 32 Panneau arriere 33 Emmagasinage 34 Preparation pour l installation 34 Installation 35 Utilisation 35 Allumage du Contr leur 36 Entretien 37 Mise au rebut 38 Traduction de la mode d emploi originale 5 Agilent Technologies 29 98 3 Mode d emploi Indications Generales AVERTISSEMENT ATTENTION 30 98 Cet appareillage a t concu en vue d une utilisation professionnelle Il est conseill l
36. ing the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed
37. ive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut Splitter Box User Manual 87 900 131 01 A Splitter Box User Manual Instructions for Use General Information 40 Front Panel 41 Without Display and Keyboard 41 With Display and Keyboard 42 Rear Panel 43 Storage 44 Prior to Installation 44 Installation 45 Use 45 Switching on of the Controller 46 Maintenance 4 Disposal 48 Original Instructions i Agilent Technologies 39 98 4 Instructions for Use General Information 40 98 This equipment is intended for professional use Prior to using this equipment the user must carefully read this Instruction Manual in its entirety and any additional information provided by Agilent Agilent declines all responsibility for damage caused by the total or partial misuse of the instructions provided herein by the improper use of the equipment by untrained personnel by unauthorized Interventions or by negligence in complying with
38. know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Be Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 9 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous m
39. l 87 900 131 01 A Splitter Box User Manual Gebrauchsanleitung Allgemeines 20 Vordere Schalttafel 21 Ohne Display und Tastatur 21 Mit Display und Tastatur 22 Schalttafel auf der R ckseite 23 Lagerung 24 Vor der Installation 24 Installation 25 Gebrauch 26 Einschalten des Controllers 26 Wartung 21 Entsorgung 28 Ubersetzung der Originalanleitungen a i Agilent Technologies 19 98 2 Gebrauchsanleitung Allgemeines Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau lesen Bei Nichtbeachtung auch teilweise der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der einheimischen hier zur Geltung kommenden Bestimmungen bernimmt die Firma Agilent keinerlei Haftung In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf bestimmte Vorg nge oder Praktiken die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf 20
40. litter Box connect the interlocks of each pump to the matching connector on the rear panel of the Splitter Box connect the HV power supply unit to the Splitter Box using the specific cable P N 929 0704 connect the interlock of the HV power supply unit with the matching interlock connector connect the mains supply to the splitter Box and switch this on using the specific key key 9 fig rear panel switch on the HV power supply DUAL read the current pressure of each single pump with the Splitter Box 46 98 Splitter Box User Manual 87 900 131 01 A Instructions for Use 4 To operate correctly the Splitter Box absorbs a certain amount of current from the HV input Introduction of the Splitter box even if OFF between the DUAL and the pump causes incorrect reading of current and pressure of the DUAL The current read by the DUAL is not the sum of the currents read by the Splitter Box When the Splitter Box is introduced between the DUAL and pump current pressure must be read only from the Splitter box because only the reading made via the Splitter box is correct Maintenance The Splitter Box controller does not require any type of maintenance Any operations on the unit must be carried out by authorized technical personnel In the case of fault it is possible to take advantage of the Agilent repair service or of the Agilent advanced exchange service which makes it possible to obtain a replacement rege
41. logies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e Ifrequesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1
42. mitted Values 8 R W N Command type 0 serial 2 Local 108 R W N Baud Rate 1200 1 2400 2 4200 3 9600 4 503 R W N RS485 Address 0 31 Setting 504 R W L Serial type Select RS232 0 RS485 1 600 R W N Unit of pressure Torr 0 measure mBar 1 Pa 2 610 R W N Device Number CH1 See Below 620 R W N Device Number CH2 See Below 630 R W N Device Number CH3 See Below 640 R W N Device Number CH4 See Below 803 R A Interlock Status See Below A Staussetpoint See Below ce N Voltage 0 7000 811 R A Current CH1 X XE XX Pressure CHI X XE XX Current CH2 X XE XX Pressure CH2 X XE XX Current CH3 X XE XX 832 R A Pressure CH3 X XE XX Current CH4 X XE XX o Pressure CH4 X XE XX JD D gt gt Splitter Box User Manual 87 900 131 01 A 61 98 5 Technical Information Pumps Type The pumps which are supported by the controller for reading pressure are as follows Tab 6 Data Type Description Admitted Values Do Sae y w o me SS a if 3 150 C Tr meg o 777 mg 5 20SC Tr neg o 6 500Diode ND pos 8 150 Diode ND pos 11 45 55 75 SEM pos X 0 Set point not reached X 1 Set point reached 62 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Interlock Status X 0 Interlock Cable OK X Interlock Cable open Examples Command Set Unit of Pressure gt mbar Source PC Destination Controller o 80 3 30 30 a sj sof sof so z 31 03 38 35 DATO
43. n Format83 List of Commands 84 Examples 84 How to Use by Front Panel 85 Configuration Menu 88 Accessories 91 50 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Splitter Controller Description Agilent s Splitter Box controller is fitted with a HV input connector and four HV outputs Inside the controller the four outputs are connected in parallel with the input Also the Splitter Box controller is able to measure current independently on the four outputs and to convert the current reading into pressure according to the selected Asilent pump The Splitter Box controller also features RS232 and RS485 serial communication The Splitter Box controller is available with the following options Ethernet communication Display and keyboard To connect the Splitter Box with the HV power supply unit e g the DUAL use the specific cable P N 929 0704 For connections between the HV power supply unit the Splitter Box and the pump refer to the figure below Splitter Box User Manual 87 900 131 01 A 51 98 5 Technical Information Figure 5 52 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Controller Specifications Tab 1 Input Voltage Frequency Power Fuse Input HV 110 240 Vac 10 50 to 60 Hz 2xT2 A 250 V Output HV 4 channels in parallel with the HV input To be connected to a HV power supply unit Max voltage 7000V Current M
44. nce operations on the controller disconnect this from the electric outlet During functioning the following environment conditions must be guaranteed Temperature from 0 C to 45 C Relative humidity 0 90 without condensation The interlock of the cable is closed on the ground of the pump If the connection is Interrupted the high voltage is disabled Close the interlock with the specific counter connector if a cable without interlock connector is used Use The main operating procedures are described below For further information and for procedures concerning connections or particular options refer to the USE paragraphs in the Technical Information appendix Splitter Box User Manual 87 900 131 01 A 45 98 4 Instructions for Use WARNING When high voltage is present on the HV input of the splitter box high voltage is also present on all four outputs even if the Splitter Box is OFF and disconnected from the power supply To avoid serious injury or even death connect all four outputs of the Splitter Box to the pump via the specific cables before applying high voltage to the input of the Splitter Box Switching on of the Controller Proceed as follows to switch on the ionic pumps using a power supply unit e g Dual to supply the high voltage and power the Splitter Box in order to read the current and pressure of the four pumps connected to this connect the 4 pumps with the sp
45. nerated controller If the controller is to be scrapped proceed according to specific national regulations Splitter Box User Manual 87 900 131 01 A 41 98 4 Instructions for Use Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 48 98 Splitter Box User Manual 87 900 131 01 A Splitter Box User Manual 0 1 00 000 5 e Technical Information Splitter Controller Description 51 Controller Specifications 53 Controller Outline 54 Communication 55 J2 Serial Connector 56 Connector Examples 57 Window Protocol Description 58 Window Meanings 61 Pumps Type 62 Status Set Point 62 Interlock Status63 Examples 63 Ethernet Interface 65 Overview 65 IP Address Configuration 66 RS232 Parameter Configuration 77 Binary Protocol 82 Original Instructions 2 Agilent Technologies 29 58 5 Technical Information Disposal Communicatio
46. ng command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Splitter Box User Manual 87 900 131 01 A 59 98 5 Technical Information Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The Splitter Box can answers with the following response types 60 98 Win Tab 4 Type Response Response Description Length Value Logic 1 byte after a read instruction of a logic window Numeric 6 bytes after a read instruction of a numeric window Alphanumeri 10 bytes after a read instruction of an C Alphanumeric window ACK 1 byte 0x6 the command execution has been successfully completed NACK 1 byte 0x15 the command execution has been failed Unknown 1 byte 0x32 the specified window in the command is Window not a valid window Data Type 1 byte 0x33 the data type specified in the command Error Logic Numeric or Alphanumeric is not _accorded with the specified Window Out of 1 byte 0x34 the value expressed during a write Range command is out of the range value of the specified window the specified window is Read Only or temporarily disabled for example you can t write the Soft Start when the Pump is running Splitter Box User Manual 87 900 131 01 A Technical Information 5 Window Meanings Tab 5 N Read Data Description Ad
47. ode d emploi Avec cran et clavier PSS PIT PP TT FI TA T AT SP1 7 7 7 7 SIA ASS LH FLY SP2 EA EJ bil L PL EF LPF sp3 77 77 ISIS FL FL FF spa PPA PARA PARAR A VACUUM TECHNOLOGIES ge CHANNEL DISPLAY SELECTION Increase next TI decrease SO previous Splitter Box Figure 2 32 98 Splitter Box User Manual 87 900 131 01 A Mode d emploi 3 Panneau arriere Ji IN OUT Figure 3 1 Entr e HV Haute Tension 2 AsortiesHV p 3 interlacks entre le Splitter Box et les pompes A ee E E a lex DUAL eee 5 SommecteurEthemet enopton 6 Remote 1 0 en option DO mm a O l appendice Technical Information Splitter Box User Manual 87 900 131 01 A 33 98 3 Mode d emploi 8 Fusibles 2xT2A250V eee 9 Bouton marche arr t 10 Prise d alimentation 2 0 Emmagasinage Pour transporter et emmagasiner le contr leur il faut observer les conditions suivantes d environnement temp rature de 20 C 70 C humidit relative O 95 non condensante Preparation pour l installation Le contr leur est fourni dans un emballage de protection sp cial si l on constate des dommages pouvant s tre produits pendant le transport contacter tout de suite le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomb
48. r Panel 43 Storage 44 Prior to Installation 44 Installation 45 Use 45 Maintenance 4 Disposal 48 Splitter Box User Manual 87 900 131 01 A Contents 5 Technical Information 49 Splitter Controller Description 51 Communication 55 Ethernet Interface 65 Binary Protocol 82 Communication Format 83 How to Use by Front Panel 85 Accessories 91 Splitter Box User Manual 87 900 131 01 A 7 98 Contents 8 98 Splitter Box User Manual 87 900 131 01 A Splitter Box User Manual Istruzioni per l uso Informazioni generali 10 Pannello frontale 11 Senza Display e Tastiera 11 Con Display e tastiera 12 Pannello posteriore 13 Immagazzinamento 14 Preparazione per l installazione 14 Installazione 15 Uso 16 Accensione del Controller 16 Manutenzione 17 Smaltimento 18 Traduzione delle istruzioni originali ne Agilent Technologies 9 98 1 Istruzioni per l uso Informazioni generali AVVERTENZA ATTENZIONE 10 98 Questa apparecchiatura destinata ad uso professionale L utente deve leggere attentamente il presente Manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent declina ogni responsabilit dovuta alla mancata osservanza totale o anche parziale delle istruzioni fornite in questo documento all uso improprio dell apparecchiatura da parte di personale non addestrato all esecuzione di interventi non autorizzati o
49. r Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktiviert Die Verriegelung mit dem entsprechenden Gegenstecker schlie en wenn ein Kabel ohne Verriegelungsstecker benutzt wird Splitter Box User Manual 87 900 131 01 A 25 98 2 Gebrauchsanleitung Gebrauch In diesem Kapitel sind die wichtigsten Betriebsvorg nge aufgef hrt F r weitere Hinweise bez glich Anschlu und Montage des bestellbaren Zubeh rs verweisen wir auf das Kapitel USE im Anhang zu Technical Information Wenn es am HV Eingang des Verteilerkastens es zu hohen Spannungen kommt ist die Hochspannung auch an allen vier Ausg ngen vorhanden auch wenn der Verteilerkasten ausgeschaltet und nicht an die Hauptleitung angeschlossen ist Um schwere Sch den und Lebensgefahr zu vermeiden alle vier Ausg nge des Verteilerkastens mit Hilfe angebrachter Kabel an die Pumpen anschlie en bevor die Hochspannung dem Eingang des Verteilerkastens zugef hrt wird Einschalten des Controllers 26 98 Zum Einschalten der Ionenpumpen wie folgt vorgehen Dabei ein Speiseger t z B Dual verwenden um mit Hochspannung einzuspeisen sowie den Verteilerkasten um den Strom und den Drucke der 4 daran angeschlossenen Pumpen abzulesen die 4 Pumpen an den Verteilerkasten anschlie en Verriegelungen aller Pumpen am zugeh rigen Verbinder auf der Steuertafel auf der R ckseite des Verteilerkastens anschliefsen mit Hilfe des Kabels P N 929 0
50. rt und Lagerung der Controller m ssen folgende Umgebungsbedingungen eingehalten werden Temperatur 20 C bis 70 C Rel Luftfeuchtigkeit 0 95 nicht kondensierend Vor der Installation Der Controller wird mit einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den m ssen sofort der zust ndigen rtlichen Verkaufsstelle gemeldet werden Das Verpackungsmaterial mu korrekt entsorgt werden Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r Umweltschutz Abbildung 4 Verpackung des Controllers 24 98 Splitter Box User Manual 87 900 131 01 A Gebrauchsanleitung 2 Installation WARNUNG Zur Einspeisung des Controller Verteilerkastens mu immer ein Netzkabel mit 3 Leitern und mit einem den internationalen Normen entsprechenden Netzstecker verwendet werden Es sollte immer dieses Netzkabel benutzt werden das an eine vorschriftsm ig geerdete Steckdose anzuschlie en ist um Stromentladungen zu vermeiden Im Controller kommt es zu hohen Spannungen die schwere Sch den verursachen und lebensgef hrlich sein k nnen Vor jedem Montage bzw Wartungseingriff der am Controller vorgenommen wird mu daher der Netzstecker gezogen werden W hrend des Betriebs m ssen folgende Umgebungsbedingungen eingehalten werden Temperatur von O C bis 45 C Rel Luftfeuchtigkeit O 90 nicht kondensierend Die Verriegelung des Kabels wird auf der Masse de
51. s we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 FIR Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxable 2 PRODUCT IDENTIFIGATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable C1 Billable HM New PO hard copy must be submitted with this form 3B JExchange _ Repair upgrade _ Consignment Demo Calibration _ Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH B
52. th the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character 58 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field ls not present The field length is variable according to the data type as per the following table Tab 3 Data Type Field Length Valid Characters Logic L 1 0 OFF Y 0N Men E a Alphanumeric A 10 tromblankio ASC lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a readi
53. tion Configuration O Network Enabler Module s By Network Enabler Admit No 7 Model MAC Address IP Address Status Configuration d COM Mapping Message Log 0 No Time Description I Now 12 09 06 16 55 42 A Figure 10 66 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Ethernet Interface From the Configuration menu select Broadcast Search VW Network Enabler Administrator Configuration Eile Configuration View Help 2 E os Specify by IP Address Configuration O Network Enabler Module s Unlock Model MAC Address IP Address Status Configure Export Configuration Mp AND Import Configuration NY Assign IP Address Message Log 0 No Time Description Now 12 09 06 16 58 26 Figure 11 The following screen appears displaying the MOXA cards found on the network In the example shown a MOXA card has been found at IP address 192 168 0 200 with MAC address 00 90 E8 0B C8 BB Splitter Box User Manual 87 900 131 01 A 67 98 5 Technical Information Ethernet Interface NE 41 007 OO 90 E8 08 C8 BB 192168 0 200 Figure 12 68 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Ethernet Interface The next figure displays the MOXA cards found W Network Enabler Administrator Configuration Eile Configuration View Help 222 28h TA Network Enabler Admit o Modi MAC Address IP Address
54. utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant l utilisation de l appareillage Agilent d cline par cons quent toute responsabilit en cas d inobservation totale ou partielle des instructions donn es d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage Les notes contiennent des renseignements importants isol s du texte Splitter Box User Manual 87 900 131 01 A Mode d emploi 3 Panneau frontal Sans ecran ni clavier 0000000000000 POWER Splitter Box O O Figure 1 1 LED d indication contr leur en marche Splitter Box User Manual 87 900 131 01 A 31 98 3 M
55. ware Wer Wer 1 7 Enable Telnet Console BIOS Wer vane mi Time Zone GMT 01 00 Amsterdam Berlin Bern Fome Local Date 01 01 00 Local Time 7 11 49 Click the Modify check box to modify configuration Wi OF Figure 15 With your mouse select the second checkbox for Modify then select Enable Web Console and deselect the item Enable Telnet Console This will allow you to use a browser to configure the rest of the parameters as can be seen further on With your mouse select the Network tab Splitter Box User Manual 87 900 131 01 A 71 98 5 Technical Information Cs le nrnat Ur af Arr Ethernet Interface Configuration Information Auto Warning IP Address Report Password Digital 10 Model i l NE 4100T LE 7 Modify MAC Address 192168 0 200 00 90 E amp 0B C BB IF Address Serial Number Modify 359 Hetmask 255 255 255 0 Gateway Firmware Wer Wer 1 7 IF Configuration Static Operating Mode Accessible IPs Modify BIOS Wer Enable SHME Community Name Location Contact Click the Modify check box to modify configuration uff OF x Cancel Figure 16 Select the Modify checkboxes for IP address and Netmask 72 98 Splitter Box User Manual 87 900 131 01 A Technical Information 5 Configuration Information Auto Warming IF Address Report Password Digital 10 Basic Network Serial Operating
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