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MicroVac Controller User Manual

1. Jach A AN INTERLOCK MAINS FUSE TYPE T1A Figure 14 MicroVac Controller User Manual 87 900 089 01 G Interlock Jack position 61 72 5 Technical Information Use General Make all vacuum manifold and electrical connections and refer to the ion pump instruction manual prior to operating the MicroVac controller The accessory P001 connector should be left in position including the jumper between pin 3 and 7 if no external connection has been made CAUTION Before plugging in the controller power cable be sure that the selected operating voltage matches the power source to avoid equipment damage 1 Plugthe controller power cable into a suitable power source 2 Place the ON OFF switch in the ON position 3 Monitor the VacIon pump current and the controller high voltage output by watching the LED lit then read the corresponding current and pressure values 4 Ifonly the first LED of the bar graph is lit the current drawn by the pump is less than 10 nA and the voltage output is 3 kV 5 Ifthe entire bar is lit and the High Load LED is blinking this means that the current is higher than 21 mA Pressure Determination The bar graph at the left gives the indication of the pressure into the pump The left scale is for Mini Pump the right one for the 2 l s pump 62 72 MicroVac Controller User Manual 87 900 089 01 G Technical Information 5 Power Failure In
2. 2000 W o 5 o 1500 gt 1000 5 00 0 4 CURRENT A Figure 6 Pump current voltage diagram 10 8 6 E o T W cc 4 2 0 1x10 1x107 x10 1x10 1x10 x10 CURRENT A Figure7 Voltage current diagram on front connector MicroVac Controller User Manual 87 900 089 01 G 53 12 5 Technical Information 54 72 10 ng 3 y s E 6 zi o T LU cc 4 2 0 1x10 x10 1x10 1x10 1x10 1x10 PRESSURE TORR Figure 8 Pressure voltage diagram on front connector for 2 1 s pump and Minipump MicroVac Controller User Manual 87 900 089 01 G Technical Information 5 Controller Outline The outline dimensions of the MicroVac controllers are shown in the following figures 163 5 6 44 91 4 35 98 i lt gt N m S m e HE Ir Lo E T gt a a Eis 28 1 1 15 0 59 m dle gt e 106 4 4 19 e n N o dE E Dimensions mm inches Figure 9 Controller outline MicroVac Controller User Manual 87 900 089 01 G 55 72 5 Technical Information Interconnections The following figure shows the Controller interconnections IMPUT OUTPUT DEVI
3. MicroVac Controller User Manual 87 900 089 01 G 59 72 5 Technical Information Pump Connection The pump is connected to the controller rear panel via the high voltage connector by a coaxial high voltage cable assembly WARNING High voltage can cause severe injury or death Before installing or removing the connector 60 72 1 Turn the power off 2 When connecting the cable to 2 1 s pumps or larger be sure that the ground spring is in place on the high voltage connectionof the pump 3 Install the pump connector and secure it with screws 4 Plugthe controller connector Interlock The interlock is a safety device designed by Agilent to prevent serious damages to the operator due to high voltage on the pump power connector Therefore two serial electrically connected interlocks are planned both of them should be closed so that the pump can activate H V Cable Interlock consists of a Jack A grounded through a cable connected to the metal frame Remote ON OFF Interlock consists of a P001 connector included whose 3 and 7 pins are short circuited please refer to the previous figure In order to activate the pump you should 5 6 1 Plug Jack A into plug B Plug P001 connector into J001 connector Place the main switch to ON MicroVac Controller User Manual 87 900 089 01 G Technical Information 5 J 0 01 ACCESSORY Interlock HIGH VOLTAGE OUTPUT
4. leur ll est dot du fusible de protection du dispositif de changement de tension de la prise d alimentation en puissance et du filtre EMC qui n est pas compris dans le bloc prise dispositif de h d i 2 Connecteur de sortie haute tension pour l alimentation de la pompe type KINGS MicroVac Controller User Manual 87 900 089 01 G 35 72 3 Mode d emploi Installation chelle gradu e en Pascal ou en Millibar livr e comme accessoire Les contr leurs de la gamme MicroVac sont livr s avec l chelle de la pression exprim e en Torr Torricelli toutefois il est possible de la remplacer avec une autre gradu e en Pa Pascal ou mBar Millibar livr e comme accessoire La proc dure de remplacement est d crite ci apr s Apr s avoir enlev de l emballage des accessoires l tiquette requise superposer l tiquette A celle existante en prenant soin de faire coincider les trous C la fixer par des dispositifs de fixation par pression B A C gt C va 0 0 Figure 4 Installation tiquette gradu e en Pascal ou en Millibar 36 72 MicroVac Controller User Manual 87 900 089 01 G Mode d emploi 3 Procedures d utilisation Mise sous tension du Contr leur Pour mettre le contr leur sous tension il suffit de mettre l interrupteur principal sur ON apr s avoir branch le c ble d alimentation sur la prise du r seau Mise
5. viter toute d charge lectrique A l int rieur du contr leur se d veloppent de hautes tensions qui peuvent provoquer de graves dommages et m me la mort Avant d effectuer toute op ration d installation ou d entretien du contr leur le d brancher de la prise d alimentation Le contr leur doit tre install dans une baie pr vue cet effet Il est en tout cas n cessaire que l air de refroidissement puisse circuler librement l int rieur de l appareil Ne pas installer et ou utiliser le contr leur dans des milieux expos s aux agents atmosph riques pluie gel neige aux poussi res aux gaz de combat ni dans des milieux explosifs ou risque lev d incendie 32 72 Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes Temp rature 0 C 45 C Humidit relative 0 95 non condensante Pour la connexion du contr leur la pompe correspondante utiliser le c ble du contr leur pr vu cet effet Pour les autres connexions et pour l installation des accessoires en option voir la section Technical Information MicroVac Controller User Manual 87 900 089 01 G Mode d emploi 3 Utilisation Ce paragraphe d crit les principales proc dures de fonctionnement Pour tout autre compl ment d information et pour les proc dures concernant des connexions ou des l ments en option se reporter au paragraphe Use de la section Technical
6. 1 Operation Input Voltage Frequency Power Output Voltage Current Power Current Recorder Output Log Rec Out see attached graphs Voltage Recorder Output Rec Out Operating temperature Storage temperature Fuse mains Radio interference suppression Installation category Pollution degree Output Connector High voltage Mini 2 1 s pumps 100 120 220 240 Vac 10 1 phase 47 to 63 Hz 40 VA maximum 3 300 Vdc nominal 10 1 mA short circuit 1 2 W maximum 0 to 10 Vdc 10 V correspond to 1 mA 10 nA resolution 0 to 3 3 V corresponding to 0 to 3 3 KV with 1 V corresponding to 1 KV in linear mode Available at pins 4 and 8 of rear panel Accessory connector 0 C to 45 C 20 C to 70 C 2xT 1A slow blow disregarding the mains EN 55011 class A group 1 EN 61000 4 2 3 4 EN 61010 1 Il 2 KINGS type P N 10664 I for Model 929 0200 and 929 0201 Mains 3 meters long 1 7 Kg 4 Ibs MicroVac Controller User Manual 87 900 089 01 G Technical Information 5 ILL MM 3000 DA 2500 N
7. District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 169 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080
8. interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il MicroVac un alimentatore ad alta tensione e bassa potenza utilizzato per alimentare le pompe Ioniche dotato di un microprocessore utilizzato per pilotare il pannello frontale Oltre al connettore per alimentare la pompa presente anche un spinotto che svolge la funzione di Interlock se questo non inserito sul connettore di uscita non presente alcuna tensione Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nella sezione Technical Information Questo manuale utilizza le seguenti convenzioni AVVERTENZA I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali ATTENZIONE Le note contengono informazioni importanti estrapolate dal testo messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura 10 72 MicroVac Controller User Manual 87 900 089 01 G Istruzioni per l uso 1 Immagazzinamento Durante il trasporto e l immagazzinamento dei MicroVac devono essere soddisfatte le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa 0 95
9. itself The MicroVac controller is available in two versions which differ in the factory set input voltage and in the high voltage output connector type Model 929 0200 KINGS type High voltage connector 120 Vac 50 60 Hz Model 929 0201 KINGS type High voltage connector 220 Vac 50 60 Hz A voltage change over allows to select different operating voltages Inspect the controller for any shipping damage Model 929 0200 is factory set for 120 Vac operation Model 929 0201 is factory set for 220 Vac operation WARNING The MicroVac controller is equipped with a 3 wire power cord and plug 50 72 internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable MicroVac Controller User Manual 87 900 089 01 G Technical Information 5 MINI 20s D HIGH LOAD ag B vp F E Le dB MicroVac EB Z S mI r E 40uA H Low AE R IE 5 lla a L ad H Lia H V ON E mM jm rs mI H om EI H wt H nd q Li Sus SUE LI Les a Tor Figure 5 MicroVac Controller MicroVac Controller User Manual 87 900 089 01 G 51 72 Technical Information Controller Specifications Tab
10. of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned ta the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e f requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang
11. product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Retum only products for which the RA was issued Praduct being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulatians IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 a Agilent Technol
12. 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 089 01 G Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl
13. 24 Hd pai Abbildung 4 Installation der Skala in Pascal oder in Millibar 26 72 MicroVac Controller User Manual 87 900 089 01 G Gebrauchsanleitung 2 Bedienung Einschalten des Controllers Zum Einschalten des Controllers gen gt es das Netzkabel an die Steckdose anzuschlie en Pumpenstart D Die Pumpe startet nur wenn der Controller eingeschaltet ist und die beiden Verriegelungen Hochspannungskabel und Remote ON OFF kurzgeschlossen sind Weiteres findet sich im Abschnitt Technical Information Pumpenstopp Zum Stoppen der Pumpe mu der Hauptschalter auf dem Bedienfeld auf OFF gesetzt werden MicroVac Controller User Manual 87 900 089 01 G 21 12 2 Gebrauchsanleitung Wartung Die Controller der MicroVac Serie brauchen keinerlei Wartung Alle Eingriffe d rfen nur von autorisiertem Personal vorgenommen werden Bei Defekten kann der Reparatur Service von Agilent oder der Agilent Advance Exchange Service in Anspruch genommen werden der den defekten Controller durch ein Austauschger t ersetzt WARNUNG Vor jedem Eingriff am Controller mu der Netzstecker gezogen werden Eine eventuelle Verschrottung muf3 unter Einhaltung der einschl gigen landes blichen Vorschriften erfolgen Entsorgung 28 12 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Wast
14. 7 900 089 01 G Instructions for Use 4 Use Procedure Controller Start up To start up the controller turn the main switch to ON after plugging the power cable into a suitable power source Starting the Pump The pump starts only when the controller is turned on and the two interlocks H V Cable and Remote ON OFF are short circuited Please refer to section Technical Information for further information Pump Shutdown To shutdown the pump turn the main switch placed on the front panel to OFF MicroVac Controller User Manual 87 900 089 01 G 41 72 4 Instructions for Use Maintenance The MicroVac series controllers do not require any maintenance interventions Any intervention must be performed by authorised personnel only When a fault has occurred it is possible to use the Agilent repair service or the Agilent advance exchange service that allows to obtain a regenerated controller replacing the faulty one WARNING Before carrying out any work on the controller disconnect it from the supply Disposal 48 72 If a pump is to be scrapped it must be disposed of in accordance with the specific national standards Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT b
15. As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance
16. CE f HM CABLE INTERLOCK TO MAINS Figure 10 Controller interconnections 56 72 MicroVac Controller User Manual 87 900 089 01 G Technical Information 5 Fuse Holder and Voltage Changer Assembly If a change in line voltage operation is desired proceed as follows 1 Unplug the power cord from the controller rear panel socket 2 On the power entry module rear panel check back door for voltage selector set 3 Usinga small screwdriver pull out the voltage selector and fuses by levering in position A 4 Replace the fuse Use only T type fuses of the following characteristics 100 120 Vac 1A 220 240 Vac 1 A HIGH VOLTAGE OUTPUT f A ACCESSORY 1 an HV CABLE 7L Fuse holder and voltage selector INTERLOCK D x Ub N 7 MAINS FUSE TYPE T1A Figure 11 Rear panel 5 Select the operating voltage then firmly insert the voltage selector and fuses in place MicroVac Controller User Manual 87 900 089 01 G 57 72 5 Technical Information 220 240 OCL 00L Figure 12 Voltage Changer 6 Check voltage selector window for correct set and connect the power cord Input Output Interconnections All input output signals are accessible at JOO1 accessory connector With the provided P001 mating connector make the connections with AWG 24 0 24 mm or smaller wire to the pins indicated in foll
17. Information Avant d utiliser le contr leur effectuer toutes les connexions lectriques et pneumatiques et se r f rer la notice de la pompe connect e Commandes Indicateurs et Connecteurs du Controleur La figure ci apr s repr sente le tableau de commande du Contr leur et les tableaux d interconnexion Pour de plus amples d tails se reporter la section Technical Information MicroVac Controller User Manual 87 900 089 01 G 33 72 3 Mode d emploi o 5 MINI 2Y HIGH LOAD 27 lE ES 4 167 H2 Eu dme E MicroVac gwa TZ NT El pa Le 3 weg Pe t put LOG DUI f PX a HE i tovetma AY 137 r 6 ll a H v ON 2 xp Alte JE Ce Ls T 27 La I 9 all r 1 ler LE jo LL n 1 Torr 8 7 Figure 2 Tableau avant du Contr leur 1 Interrupteur ON OFF principal 2 LED H T 3 Connecteur de sorite signal proportionnel au courant 10 V 1 mA log 4 Echelle de courant mA 5 Led High Load Charge lev e il clignote quand le courant consomm par la LED Ligne principale 34 72 MicroVac Controller User Manual 87 900 089 01 G Mode d emploi 3 HIGH VOLTAGE OUTPUT ACCESSORY H V CABLE INTERLOCK MAINS FUSE TYPE T1A Figure 3 Tableau arri re des Contr leurs 1 Module d entr e de l alimentation du Contr
18. MicroVac Controller Models 929 0200 929 0201 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 089 01 G 05 2011 E Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 089 01 G Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO ITALY 2 72 Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warra
19. NENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage prablem Solenoid failure Damaged flange Error code an display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase
20. _pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc 3 Agilent Technologies i Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 8 7 Complete the attached Reguest for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as reguested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will guote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange
21. anner The material is 100 6 recyclable and complies with EEC Directive 85 399 Figure 1 Controller Packing MicroVac Controller User Manual 87 900 089 01 G 41 72 4 Instructions for Use Each controller is factory set for a specific power supply model 929 0201 KINGS type High voltage connector 220 Vac 50 60 Hz model 929 0200 KINGS type High voltage connector 120 Vac 50 60 Hz Installation WARNING The controller is equipped with a 3 wire power cord and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable The controller must be installed inside a rack module but it must be positioned so that free air can flow through the holes Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk 42 72 During operation the following environmental conditions must be respected temperature from 0 C to 45 C relative humidity 0 95 without condensation To connect the controller to the pump use the specific cable supplied with the controller See the section Technical Information for de
22. c Controller User Manual 2 Gebrauchsanleitung Allgemeines 20 Lagerung 21 Vor der Installation 21 Installation 22 Gebrauch 23 Steuerungen Anzeigen und Anschl sse des Controllers 23 Installation der als Zubeh r gelieferten Skala in Pascal oder Millibar 26 Bedienung 27 Einschalten des Controllers 27 Pumpenstart 27 Pumpenstopp 27 Wartung 28 Entsorgung 28 bersetzung der Originalanleitungen E Agilent Technologies 19 72 2 Gebrauchsanleitung Allgemeines Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau lesen Bei auch nur teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der einheimischen hier zur Geltung kommenden Bestimmungen bernimmt die Firma Agilent keinerlei Haftung Der MicroVac ist ein Hochspannungsnetzger t niedriger Leistung das zur Versorgung von Ionenpumpen verwendet wird Er ist mit einem Mikroprozessor zur Steuerung des Bedienfelds ausger stet Au er des Steckers zur Versorgung der Pumpe gibt es auch einen Stift der zur Verriegelung dient Wenn dieser nicht auf dem Ausgangsstecker eingesteckt ist liegt keine Spannung an In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte tech
23. des Micro Vaccontr leurs il faudra veiller respecter les conditions environnementales suivantes Temp rature de 20 C 70 C Humidit relative 0 95 non condensante Preparation pour l installation Le contr leur est fourni dans un emballage de protection sp cial si vous constatez des marques de dommages pouvant s tre produits pendant le transport adressez vous aussit t au bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le contr leur et ne lui faire subir aucun choc Ne pas jeter l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme la directive CEE 83 399 en mati re de protection de l environnement Figure 1 Emballage des Contr leurs MicroVac Controller User Manual 87 900 089 01 G 31 72 3 Mode d emploi Chaque contr leur est fourni par Agilent pr quip pour une certaine tension d alimentation mod le 929 0201 KINGS type High voltage connector 220 Vca 50 60 Hz mod le 929 0200 KINGS type High voltage connector 120 Vca 50 60 Hz Installation N ES Le contr leur est dot d un cable d alimentation trois fils avec une fiche du type approuv au niveau international Utiliser toujours ce cable d alimentation et introduire la fiche dans une prise pourvue d un branchement appropri la masse afin d
24. e Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU Landern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverkaufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat NS s y AS N MicroVac Controller User Manual 87 900 089 01 G MicroVac Controller User Manual Mode d emploi Indications Generales 30 Emmagasinage 31 Preparation pour l installation 31 Installation 32 Utilisation 33 Commandes Indicateurs et Connecteurs du Contr leur 33 Installation chelle gradu e en Pascal ou en Millibar livr e comme accessoire 36 Procedures d utilisation 37 Mise sous tension du Contr leur 37 Mise en marche de la Pompe 37 Arr t de la Pompe 37 Entretien 38 Mise au rebut 38 Traduction de la mode d emploi originale 3 Agilent Technologies v7 3 Mode d emploi Indications Generales Cet appareillage a t con u en vue d une utilisation professionnelle L utilisateur doit lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant l utilisation de l appareil Agilent d cline toute responsabilit quant non respect total ou partiel des instructions pour l util
25. e disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale MicroVac Controller User Manual 87 900 089 01 G MicroVac Controller User Manual 5 Technical Information MicroVac Controller Description 50 Controller Specifications 52 Controller Outline 55 Interconnections 56 Fuse Holder and Voltage Changer Assembly 57 Input Output Interconnections 58 Input Signals 58 Output Signals 59 Pump Connection 60 Interlock 60 Use 62 General 62 Pressure Determination 62 Power Failure 63 Remote Control Mode Operation 63 64 64 Troubleshooting Replacement General 64 Accessories and Spares Parts 65 Original Instructions Agilent Technologies 49 72 5 Technical Information MicroVac Controller Description The MicroVac controller is a quarter rack solid state power supply with self protection features which generates the high voltage for the pump The MicroVac ion pump controller is designed to operate the Mini and the 2 l s ion pumps but can also operate the 8 1 s ion pump The controller is designed to withstand continuous operation at short circuit condition without any damage to the ion pump or to the controller
26. en marche de la Pompe La pompe se met en marche uniquement si le contr leur est sous tension et si les deux dispositifs d interverrouillage H V Cable et Remote ON OFF sont court circuit s Pour tout autre compl ment d information se reporter la section Technical Information Arr t de la Pompe Pour arr ter la pompe mettre l interrupteur principal situ sur le tableau avant sur OFF MicroVac Controller User Manual 87 900 089 01 G 37 72 3 Mode d emploi Entretien Les contr leurs de la s rie MicroVac ne requi rent aucun entretien Toute intervention doit tre effectu e par du personnel autoris En cas de panne il est possible de faire appel au service de r paration Agilent ou au Agilent advance exchange service qui permet d obtenir un contr ler r g n r la place de celui en panne WS ERS SSG Avant d effectuer toute intervention sur le contr leur d brancher le c ble d alimentation Si un contr leur doit tre mis au rebut l liminer conform ment aux r glementations nationales en la mati re Mise au rebut 38 72 Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriel
27. essor used to control the front panel In addition to the connector to feed the pump there is also a jack acting as an interlock if it is not inserted into the output connector no voltage is present The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the section Technical Information This manual uses the following standard protocol The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 40 72 MicroVac Controller User Manual 87 900 089 01 G Instructions for Use 4 Storage When transporting and storing the MicroVacs the following environmental requirements should be satisfied temperature from 20 C to 70 C relative humidity 0 95 without condensation Preparation for Installation The controller is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking ensure that the module is not dropped or subjected to any form of impact Do not dispose of the packing materials in an unauthorised m
28. he pump reaches a Mains LED 44 72 MicroVac Controller User Manual 87 900 089 01 G Instructions for Use 4 HIGH VOLTAGE OUTPUT ACCESSORY HV CABLE INTERLOCK ies MAINS FUSE TYPE T1A Figure 3 Controller Rear Panel 1 Input module for the controller power supply It includes the protection fuse the voltage changer the power supply plug and the EMC filter not included into the plug voltage switch assembly 2 High voltage output connector for the pump KINGS type power supply 3 Connector for the output high voltage activation H V Cable Interlock 4 Input output signal connector for fittings MicroVac Controller User Manual 87 900 089 01 G 45 72 4 Instructions for Use Pascal or Millibar Graduated Scale Installation Supplied as a Fitting The MicroVac series controllers are supplied with the pressure scale expressed in Torr Torricelli however it is possible to replace it with another one a Pa Pascal or mBar Milibar graduated scale supplied as a fitting To replace proceed as follows After removing the desired label from the fitting package put label A on the existing one matching the holes C then fix it using the push locks B A C amp C va 0 0 Figure 4 Pascal or Millibar Graduated Label Installation 46 72 MicroVac Controller User Manual 8
29. ipale posizionato sul pannello frontale MicroVac Controller User Manual 87 900 089 01 G 17 72 1 Istruzioni per l uso Manutenzione I controller della serie MicroVac non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advance exchange service che permette di ottenere un controller rigenerato in sostituzione di quello guasto AVVERTENZA Prima di effettuare qualsiasi intervento sul controller scollegare il cavo di alimentazione Qualora un controller dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche Smaltimento 18 72 Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita MicroVac Controller User Manual 87 900 089 01 G MicroVa
30. isation mauvais usage par du personnel non form op rations non autoris es usage contraire aux r glementations nationales sp cifiques Micro Vac est un alimentateur haute tension faible puissance con u pour alimenter les pompes ioniques il est quip d un microprocesseur pour le pilotage du panneau avant Il est dot d un connecteur pour l alimentation de la pompe et d une broche d interverrouillage Si cette derni re n est pas branch e sur le connecteur de sortie le dispositif n est pas aliment en tension Les paragraphes suivants donnent toutes les indications n cessaires pour garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans la section Technical Information Cette notice utilise les signes conventionnels suivants AVERTISSEMENT Les messages d avertissement attirent attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions ATTENTION Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage Les notes contiennent des renseignements importants isol s du texte 30 72 MicroVac Controller User Manual 87 900 089 01 G Mode d emploi 3 Emmagasinage Pendant le transport et l emmagasinage
31. l Information MicroVac Controller User Manual 87 900 089 01 G 13 72 1 Istruzioni per l uso o 5 MINI 2Y HIGH LOAD 27 lE ES 4 wp IDA see dme E MicroVac a Be zi l 3 weg H2 7 t put LOG DUI f PX a ES Eu tm SJ rw na 3 s I our la gt n 6 E ua H V ON 2 xp Fs we UII gt MAI vs Ls Lum uu 27 La I 9 we Lo 1 ler LE jo LL n 1 Torr 8 7 Figura 2 Pannello frontale del Controller 1 Interruttore ON OFF principale 2 H V LED 3 Connettore di uscita segnale proporzionale alla corrente 10 V 1 mA log 4 Scala in corrente mA 5 Led High Load lampeggia quando la corrente assorbita dalla pompa raggiunge Mains LED 14 72 MicroVac Controller User Manual 87 900 089 01 G Istruzioni per l uso 1 HIGH VOLTAGE i OUTPUT 4 en ACCESSORY KO 3 v casie T INTERLOCK AES MAINS FUSE TYPE T1A Figura 3 Pannello posteriore dei Controller 1 Modulo di ingresso dell alimentazione per il Controller Comprende il fusibile di protezione il cambia tensione la presa di alimentazione di potenza ed il filtro EMC non compreso nel blocco presa cambia tensione 2 Connettore di uscita alta tensione per alimentazione pompa tipo KINGS 3 Connettore per abilitazione alta tensione in uscita H V Cable Interlock 4 Con
32. ne Il controller deve essere installato all interno di un apposito rack In ogni caso occorre che l aria di raffreddamento possa circolare liberamente intorno all apparato Non installare e o utilizzare il controller in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio 12 72 Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali temperatura da 0 C a 45 C umidit relativa 0 95 non condensante Per il collegamento del controller con la relativa pompa utilizzare il cavo specifico del controller stesso Per gli altri collegamenti e l installazione degli accessori opzionali vedere la sezione Technical Information MicroVac Controller User Manual 87 900 089 01 G Istruzioni per l uso 1 Uso In questo paragrafo sono riportate le principali procedure operative Per ulteriori dettagli e per procedure che coinvolgono collegamenti o particolari opzionali fare riferimento al paragrafo Use della sezione Technical Information Prima di usare il controller effettuare tutti i collegamenti elettrici e pneumatici e fare riferimento al manuale della pompa collegata Comandi Indicatori e Connettori del Controller Di seguito sono illustrati sia il pannello frontale che quello posteriore con le interconnessioni Per maggiori dettagli fare riferimento alla sezione Technica
33. nettore di ingresso uscita segnali per accessori MicroVac Controller User Manual 87 900 089 01 G 15 72 1 Istruzioni per l uso Installazione Scala Graduata in Pascal o in Millibar Fornita come Accessorio I controller della linea MicroVac vengono forniti con la scala della pressione espressa in Torr Torricelli comunque possibile sostituirla con un altra graduata in Pa Pascal o mBar Millibar fornita come accessorio Di seguito viene descritto come effettuare tale sostituzione Dopo aver estratto dalla confezione degli accessori l etichetta che interessa sovrapporre l etichetta A a quella esistente avendo cura di far coincidere i fori C quindi fissarla utilizzando i fermi a pressione B Figura 4 Installazione etichetta graduate in Pascal o in Millibar 16 72 MicroVac Controller User Manual 87 900 089 01 G Istruzioni per l uso 1 Procedure di uso Accensione del Controller Per accendere il controller portare l interruttore principale in posizione ON dopo aver inserito il cavo di alimentazione nella presa di rete Avvio della Pompa La pompa si avvia solo se il controller acceso e i due interlock H V Cable e Remote ON OFF sono cortocircuitati Per ulteriori informazioni fare riferimento alla sezione Technical Information Arresto della Pompa Per arrestare la pompa portare in posizione OFF l interruttore princ
34. nische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermaf en hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf eine bestimmte Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam daf bei Nichteinhaltung Sch den an der Anlage entstehen k nnen Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 20 72 MicroVac Controller User Manual 87 900 089 01 G Gebrauchsanleitung 2 Lagerung Beim Transport und bei der Lagerung der Controller m ssen folgende klimatische Verh ltnisse eingehalten werden Temperatur von 20 C bis 70 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend Vor der Installation Der Controller wird mit einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den m ssen der zust ndigen rtlichen Verkaufsstelle gemeldet werden Beim Auspacken vorsichtig vorgehen damit der Controller nicht f llt oder St en ausgesetzt wird Das Verpackungsmaterial mu korrekt entsorgt werden Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r Umweltschutz yd y Abbildung 1 Verpackung der Controller MicroVac Con
35. non condensante Preparazione per l installazione Il controller viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il modulo e a non sottoporlo ad urti Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Figura 1 Imballo dei controller MicroVac Controller User Manual 87 900 089 01 G 11 72 1 Istruzioni per l uso Ogni controller giunge dalla Agilent predisposto per una certa tensione di alimentazione il modello 929 0201 KINGS type High voltage connector 220 Vac 50 60 Hz il modello 929 0200 KINGS type High voltage connector 120 Vac 50 60 Hz Installazione A 401 y Il controller fornito di un cavo di alimentazione a tre fili con una spina di tipo approvato a livello internazionale Utilizzare sempre questo cavo di alimentazione ed inserire la spina in una presa con un adeguato collegamento di massa onde evitare scariche elettriche All interno del controller si sviluppano alte tensioni che possono recare gravi danni o la morte Prima di eseguire qualsiasi operazione di installazione o manutenzione del controller scollegarlo dalla presa di alimentazio
36. nty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not c
37. ogies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all retums 1 CUSTOMER INFORMATION Com Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only O Taxable Ll Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LU Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B Exchange Repair upgrade _IConsignment Demo calibration Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR L HAS pumped or been exposed ta the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic O Corrosive L Reactive a Flammable L1 Explosive L1 Biological O Radioactive List all toxic ha
38. ories and Spares Parts Tab 3 Description Part number Mating accessory connector P001 03 648487 Fuse T1A 5 x 20 mm 67 150410 01 Rack adapter 969 9191 Tai o cn E Mains cable 220 Vac European up Ge oT MicroVac Controller User Manual 87 900 089 01 G 65 72 5 Technical Information WHITE AWG22 s 1V 1 mA BASE DCS s GREEN AWG22 2 pif pue WHITE AWG18 3 J4 SCHEMATIC 03 649705 H V WIRE AWG17 BLACK AWG18 Pi Fri ne 5 Ape ACCESSORY Fre A 5 s FUSE TIA r i FRONT PANEL PCB ak HIGH VOLTAGE 2 UTPUT SCHEMATIC 03 649709 o BLACK RED 4 3 LINE u u Ls YELLOWGREEN HA CABLE FILTER INTERLOCK 2 1 BROWN LIGHT BLUE ON OFF BROWN LIGHT BLUE 48 AWG18 IAWG18 Bc T eratum H BU Wa PEN pem au Dm mere MICROVAC MAINS WIRING DIAGRAM inda CM 16 12 97 l T A3 03 649774 Figure 15 66 72 MicroVac Controller User Manual 87 900 089 01 G gt Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased
39. orrectly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met MicroVac Controller User Manual 87 900 089 01 G MicroVac Controller MicroVac Controller MicroVac Controller User Manual 87 900 089 01 G 3 72 MicroVac Controller 4 72 MicroVac Controller User Manual 87 900 089 01 G Contents 1 2 Contents Istruzioni per l uso 9 Informazioni Generali 10 Immagazzinamento 11 Preparazione per l installazione 11 Installazione 12 Uso 13 Procedure di uso 17 Manutenzione 18 Smaltimento 18 Gebrauchsanleitung 19 Allgemeines20 Lagerung 21 Vor der Installation 21 Installation 22 Gebrauch 23 Bedienung 27 Wartung 28 Entsorgung 28 MicroVac Controller User Manual 87 900 089 01 G 5 72 Contents 6 72 Mode d emploi 29 Indications Generales 30 Preparation pour l installation 31 Installation 32 Utilisation 33 Procedures d utilisation 37 Entretien 38 Mise au rebut 38 Instructions for Use 39 General Information 40 Storage 41 Preparation for Installa
40. owing figure to obtain the desired capability Input Signals Pin 3 7 Remote high voltage ON OFF or high voltage interlock requires a permanent closed pin contact Pin 3 7 must be shorted to allow the high voltage output if no remote interlock contact is connected 58 72 MicroVac Controller User Manual 87 900 089 01 G Technical Information 5 Output Signals The front panel REC OUT connector is a duplicate of this signal on a BNC connector Tab 2 PIN DESCRIPTION 2 6 Current recorder output pin 2 signal out pin 6 ground The output voltage 0 to 10 Vdc is proportional to the pump current 0 to 1 mA e g 10 Vdc correspond to 1 mA The resolution is 10 mV minimum 4 8 Voltage recorder output pin 4 signal out pin 8 ground The output voltage 0 to 3 V is proportional to the controller high voltage output 0 to 3 kV e g 1 V corresponds to 1 kV in linear mode 5 9 High voltage indication contact This pure contact which carries 1 A at 250 Vac and 0 2 A at 30 Vdc is open when the high voltage is off and closes when the high voltage in on J001 P001 GND 177 DE F B 2 10V 1mA REC LOG OUTPUT i 7 Mg ia K 3 r3 INTERLOCK 8 Ts A j 4 4 4 ik 3 l i GND 0 5 1V 1KV ANALOG OUTPUT MicroVac Controller H V ON SIGNAL H V ON SIGNAL Figure 13 P001 mating connector and J001 accessory connector
41. pe aufgenommene Strom 1 mA Netz LED 24 72 MicroVac Controller User Manual 87 900 089 01 G Gebrauchsanleitung 2 HIGH VOLTAGE OUTPUT ACCESSORY HV CABLE INTERLOCK ies MAINS FUSE TYPE T1A Abbildung 3 Riicktafel der Controller 1 Eingangsmodul der Controller Stromversorgung mit Sicherung Spannungswahlschalter Leistungsstecker und EMC Filter nicht im Block Stecker Spannungswahlschalter eingeschlossen 2 Hochspannungs Ausgangsstecker zur Pumpen versorgung Typ KINGS 3 Stecker zur Aktivierung der Ausgangshochspannung H V Cable Interlock 4 Eingangs Ausgangsstecker f r Signale f r Zubeh r MicroVac Controller User Manual 87 900 089 01 G 25 72 2 Gebrauchsanleitung Installation der als Zubeh r gelieferten Skala in Pascal oder Millibar Die Controller der MicroVac Serie werden mit Druckskala in Torr Torricelli geliefert Diese kann jedoch durch eine solche in Pa Pascal oder mBar Millibar ersetzt werden die als Zubeh r geliefert wird Im folgenden ist dieser Austausch beschrieben Das betreffende Etikett aus der Zubeh rverpackung ziehen Dies Etikett A ber den vorhandenen legen Dabei darauf achten da die L cher C bereinander liegen Dann mit den Druckkn pfen B fest machen MINI 2 s Ars pregava TSW irl 1 itt L oova N 3 A Da Le gt Z o 24 fai ER
42. pe muf das zum Controller geh rende Kabel benutzt werden Andere Anschl sse und die Installation optionalen Zubeh rs ist im Abschnitt Technical Information beschrieben MicroVac Controller User Manual 87 900 089 01 G Gebrauchsanleitung 2 Gebrauch In diesem Kapitel sind die wichtigsten Betriebsvorg nge aufgef hrt F r weitere Hinweise bez glich Anschl sse und Montage des bestellbaren Zubeh rs siehe Kapitel Use im Anhang zu Technical Information Vor Benutzung des Controllers s mtliche elektrischen und pneumatischen Anschl sse ausf hren und die Betriebsanleitung der angeschlossenen Pumpe durchlesen Steuerungen Anzeigen und Anschl sse des Controllers Nachstehend werden dass Bedienfeld des Controllers sowie die Anschlu felder beschrieben F r weitere Einzelheiten siehe Technical Information MicroVac Controller User Manual 87 900 089 01 G 23 72 2 Gebrauchsanleitung o 5 MINI ZTS O HIGH LOAD 27 lE ES MM I Lot MicroVac mM E P 3 amp put LOG DUI f N 6 AE Las HV ON 2 EI mme re og 108 nA Wag TO 24 H La I DE 9 ve 1 Hi E Jo Io n 1 Torr 8 7 Abbildung 2 Bedienfeld der Controller 1 Hauptschalter ON OFF 2 Hochspannungs LED 3 Ausgangsstecker f r Strom proportionales Signal 10 V 1 mA log 4 Stromskala mA 5 Hochlast LED blinkt wenn der von der Pum
43. ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
44. s ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut N v di Al NY W A NL MicroVac Controller User Manual 87 900 089 01 G MicroVac Controller User Manual 4 Instructions for Use General Information 40 Storage 41 Preparation for Installation 41 Installation 42 Use 43 Controller Controls Indicators and Connectors 43 Pascal or Millibar Graduated Scale Installation Supplied as a Fitting 46 Use Procedure 47 Controller Start up 47 Starting the Pump 47 Pump Shutdown 47 Maintenance 48 Disposal 48 Original Instructions z P Agilent Technologies 39 72 4 Instructions for Use General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorised interference with the equipment or any action contrary to that provided for by specific national standards The MicroVac is a high voltage and low power feeder used to feed the ionic pumps it is equipped with a microproc
45. tailed information about the above mentioned and the other connections and about the options installation MicroVac Controller User Manual 87 900 089 01 G Instructions for Use 4 Use This paragraph describes the fundamental operating procedures Detailed information and operating procedures that involve optional connections or options are supplied in the paragraph USE of the section Technical Information Make all vacuum manifold and electrical connections and refer to the pump instruction manual prior to operating the controller Controller Controls Indicators and Connectors The following paragraph illustrates either the front and rear panel with its interconnections More details are contained in the appendix Technical Information MicroVac Controller User Manual 87 900 089 01 G 43 72 4 Instructions for Use o 5 MINI ZTS O HIGH LOAD 27 lE ES 4 wp Eu dme E MicroVac 100 ua 1 1 El pa Le 3 weg H2 7 t put LOG DUI f PX a Eu tm SJ wy r 6 E IL H V ON 2 xp SRL Alte E Ce re og 108 nA Wag TO 27 La I 9 all r 1 5 zx 2 0 0 n 1 Torr 8 7 Figure 2 Controller Front Panel 1 ON OFF main switch 2 H V LED 3 Output signal proportional to 10 V 1 mA log current connector 4 Scale expressed in current mA 5 High Load Led it blinks on when the current absorbed by t
46. the event of a power failure momentary or long period the controller is switched off When power is restored the controller will automatically restart Remote Control Mode Operation It is possible to remotely switch onb and off the high voltage using a permanent contact connected to pins 3 and 7 of J001 accessory connector with the mains power ON OFF switch to ON MicroVac Controller User Manual 87 900 089 01 G 63 72 5 Technical Information Replacement General Replacement controllers are available on advance exchange basis through Agilent service sales organization WARNING High voltage in the controller can cause severe injury or death Before servicing turn power off and remove the power cable Troubleshooting a No current voltage LED bar graph lit with mains power ON but H V ON LED off Mains LED on Verify mains connections and power fuses Verify on P001 that pins 3 7 are shorted Verify the H V cable interlock b Vac Ion pump is operating at High pressure and only the first LED is lit No high voltage output Replace the unit c Vac Ion pump operating at Low pressure and all LED are lit Switch power off and disconnect the high voltage cable Switch power on and verify that only one LED is lit If this happens the high voltage cable or the pump are shorted If not replace the unit 64 72 MicroVac Controller User Manual 87 900 089 01 G Technical Information 5 Access
47. tion 41 Installation 42 Use 43 Use Procedure 47 Maintenance 48 Disposal 48 Technical Information 49 MicroVac Controller Description 50 Controller Outline 55 Interconnections 56 Fuse Holder and Voltage Changer Assembly 57 MicroVac Controller User Manual 87 900 089 01 G Contents Use 62 Replacement 64 Accessories and Spares Parts 65 MicroVac Controller User Manual 87 900 089 01 G 7 12 Contents 8 72 MicroVac Controller User Manual 87 900 089 01 G MicroVac Controller User Manual 00 09 71 Istruzioni per l uso Informazioni Generali 10 Immagazzinamento 11 Preparazione per l installazione 11 Installazione 12 Uso 13 Comandi Indicatori e Connettori del Controller 13 Installazione Scala Graduata in Pascal o in Millibar Fornita come Accessorio 16 Procedure di uso 17 Accensione del Controller 17 Avvio della Pompa 17 Arresto della Pompa 17 Manutenzione 18 Smaltimento 18 Traduzione delle istruzioni originali Agilent Technologies 9 72 1 Istruzioni per l uso Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad
48. troller User Manual 87 900 089 01 G 21 72 2 Gebrauchsanleitung Alle Agilent Controller sind f r eine bestimmte Anschluf spannung ausgelegt das Modell 929 0201 KINGS type High voltage connector 220 V 50 60 Hz das Modell 929 0200 KINGS type High voltage connector 120 V 50 60 Hz Installation WARNUNG Der Controller wird mit einem 3 adrigen Netzkabel geliefert das mit einem den internationalen Normen entsprechenden Stecker ausgeriistet ist Es sollte immer dieses Netzkabel benutzt werden das an eine korrekt geerdete Steckdose anzuschlieBen ist um Stromentladungen zu vermeiden Im Inneren des Controllers entstehen hohe Spannungen die schwere Sch den verursachen und lebensgef hrlich sein k nnen Vor jedem Montage bzw Wartungseingriff mu deshalb der Netzstecker gezogen werden Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden F llen muf auf die ungehinderte Zirkulation der K hlluft im Bereich des Ger ts geachtet werden Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Schnee Staub und aggressiven Gasen ausgesetzt sind und in denen Explosions und erh hte Brandgefahr besteht 22 12 Beim Betrieb m ssen folgende Umgebungs bedingungen eingehalten werden Temperatur von 0 C bis 45 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend F r den Anschluf des Controllers an die Pum
49. zardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Prim Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Pg 2 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode io describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging ada OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPO

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