レーザーテック（6920）
Contents
1.2.
3. TOKAI
4. 1 8036 2000 2000 180nm 130nm 150nm
5. TSV BGM300 Si TSV Through Silicon Via TSV
6. 100 2013 8 MATRICS
7. 20nm FPD TV FPD CLIOS
8. 2012 11 6 1 MATRICS X700HiT 2012 10 25 2009 MATRICS X700
9. T SV BGM300 SS S i C Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w s Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w 2014 2 5 1 570 84 3 48 38 39 415 12 4 FPD
10. KLA KLA M amp A KLA
11. Weaknesses SR
12. 2012 QE SR MAP 1980 3 FPD
13. SR Tnc SR Inc http www sharedresearch jp Email info sharedresearch jp 3 31 12 03 5834 8787 44 44
14. EUV MATRICS X810 2009 28nm MATRICS X700 SiC SICA6X
15. 2 SiC GaN 9 086 3 2 FPD 229 85 3 546 25 3 2013 6 3 2013 4 30 2013 6 3 3 8 948 14 2 2 421 70 6 2 708 105 9 1 691 107 3
16. FPD ee 6920 SR Research Report Shared 1 6920 SR Research Report 2014 2 5 13 400 17 6 10 250 12 8 1 440 85 7 1 710 11 4 15 000 71 1 11 670 81 1 1 620 123 6 1 710 2014 6 13 6 14 6 Pl 6 567 4 830 11 397 5 476 7 924 13 400 34 1 35 1 7 6 16 6 640 17 6 3 158 2 885 6 043 3 409 1 946 5 355 43 4 53 4 18 3 519 40 3 47 0 1 601 1 604 3 205 24 4 33 2 28 1 1 808 342 2 149 853 1 397 2 250 146 2 85 5 30 4 52 8 308 8 4 7 27 5 7 1 18 9 15 6 17
17. KLA Tencor Corporation KLA 35 esearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 2013 8 MATRICS X810 20nm EUV MATRICS X810 2012 11 EUV ArF
18. EUVL Extreme Ultra Violet Lithography TSV EUVL EUV EUV EUV DUV ArF 193nm 13 5nm EUVL 4 Share
19. a T FF sShared Wesearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 2012 36 930 SEMI 10 40 Ee 100 200 3 000 en
20. 3 DUV 3 R k X 4 N A R 4 N A k
21. SR 2012 28nm 2013 20nm MATRICS X810 28nm MATRICS X700HiT 2013 6 1 s Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w 6920 SR Research Report 2014 2 5 2013 6 1 2012 10 29 2013 6 1 3 678
22. KLA Tencor Corporation 6920 SR Research Report 2014 2 5 FPD FPD
23. 2 1 2 1 2003 6 2013 6 17 09 ROA 7 59 SR 2 2007 6 3 895 24 59 2009 6 657
24. http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved e 6920 SR Research Report 2014 2 5 SW Strengths Weaknesses Strengths
25. EUV 1 s Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w 6920 SR Research Report 2014 2 5 BASIC 1 EUV 2 EUV 3 BASIC 19
26. TSV WASAVI BGM300 2012 8 27 TSV Through Silicon Via Si TSV WASAVI BGM300 3 Cu TSV Cu
27. 2011 359 KLA SiC TSV e Shar od search http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report
28. 2009 2000 20 w es a T sShared Wesearch http www sharedresearchjp Copyright C 2013 Shared Research Inc All Rights Reserved 8 6920 SR Research Report 2014 2 5 1
29. Shared esearch http Wwww sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 nm EUVL 20 2008 M7360 30nm 40 60 QO 2002 2007 2012 M1350 60nm M6640 60nm M6640S M6641S 2003 SOnm 80 MM235Tr gonm 2002 100 M2350 W 90nm 120 140 2000 1 gt 150nm 2000 2002 2004 2006 2008 2010 2012 2014 DRAM lO EEE sss 57 lt 32 28nm IC
30. Phase 0 Phase I 2012 7 2 lt 015 6 i Phase I 40 ls 3 SR 0 1 1 2 2011
31. SiC Silicon Carbide GaN Gallium Nitride 2012 6 6 2013 1 25 5 549 49 8 FPD 132 67 09 141 50 39 5596 35 100
32. 18 24 FPD 2 FPD 2000
33. Si TSV BGM300 Si TSV esearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 Si LX330 LX330 CD EUVL Extreme Ultra Violet Lithography EUVL
34. 100 FPD CLIOS 2013 Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w s Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w 6920 SR Research Report 2014 2 5 8 2012 8 FPD CLIOS FPD EL MP15 Scan
35. CD MR300 CMOS CIS CMOS Complementary Metal Oxide Semiconductor Image Sensor C1S CCD Charge Coupled Device CIS
36. 1 2 SiC
37. MATRICS MAGICS 53 296 847 2 7 978 88 6 6 896 47 1 MATRICS FPD CLIOS 2014 6 X810 X810HiT 2013 11 Shared Research http Wwww sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w 6920
38. WO jl 2013 6 Y22 3 150mm pmm rai MAGICS MPM193EX MATRICS CMOS Image Sensor amp CCD PEGSIS P100 X810 Y TSV aN XLX330 WASAVP BGM300 gt SIC 3 13 WASAVE SICA6x TROIS33 MAGICS
39. SiC 219 2012 OPTELICS HYBRID 5 2013 6 405nmm 1 f8 44 6920 SR Research Report 2014 2 5
40. SiC 1 2011 8 s Shared GYesearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 09 6 10 6 11 6 12 6 PD 9 267 8 931 12 722 12 337 11 397 34 4 3 6 42 4 3 0 7 6 gt 3 855 3 172 3 107 5 714 4 311 2 7 17 7 2 1 83 9 24 6 41 6 35 5 24 4 46 3 37 8 5 412 5 759 9 615 6 623 7 086 47 9 6 4 67 0 31 1 7 0 58 4 64 5 75 6 53 7 62 2 4 416 4 372 6 603 5 550 5
41. ei i A 3 6 109 SR R amp D
42. 6920 SR Research Report 2014 2 5 2013 6 2013 8 12 2013 6 11 397 7 69 2 149 30 49 2 537 14 7 1 610 10 5 2013 6 47 0 2012 6 53 1 PC 2013 FPD
43. 2013 6 2 2013 2 1 2013 6 2 2013 1 25 2 6 566 34 1 1 807 146 2 1 951 206 9 1 241 192 3 2012 FPD
44. MATRICS X700 HiT 2012 11 X700 40 s Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w Shared Yesearch http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved e 6920 SR Research Report 2014 2 5 ECCS B310 2012 10 23 In situ ECCS B310 10 In situ
45. TSV 3 SR BGM300 TSV Through Silicon Via Si TSV 3 TSV
46. Si TSV BGM300 Cu Si TSV Si 2012 6 2012 8 13 2012 6 12 337 3 096 3 089 26 5 2 974 29 5 1 798 18 5 2013 6 53 19 2011 6 10 1 28 1 2011 6 4 2
47. heNN 28 32 Ge 33 40 40 RE nN 40 0 SN 42 i 42 43 Copyright C 2013 Shared Research Inc All Rights Reserved Shared 6920 SR Research Report 2014 2 5 09 6 10 6 11 6 12 6 13 6 14 6 9 267 8 931 12 722 12 337 11 397 13 400 34 4 3 6 42 4 3 0 7 6 17 6 2 654 3 405 5 475 6 550 5 355 62 2 28 3 60 8 19 6 18 3 28 6 38 1 43 0 53 1 47 0 657 747 2 441 3 089 2 149 2 250 227 0 26 5 30 4 4 7 8 4 19 2 25 0 18 9 16 8 660 714 2 296 2 974 2 537 2 250 221 4 29 5 14 7 11 3 8 0 18 0 24 1 22 3 16 8 651 362 1 517 1 798 1 610 1 450 319 7 18 5 10 5 9 9 11 9 14 6 14 1 10 8 11 786 11 786 11 786 11 786 23 572 EPS 57 8 32 1 134 7 159 6 71 4 64 3 EPS 26 3 127 9 159 3 71 3 DPS 15 0 15 0 41 0 53 0 48 0 20 0 BPS 1 058 5 1 075 5 1 193 9 1 3
48. FPD 809 79 139 2013 6 2009 7 2009 6 FPD 809 09 6 10 6 11 6 12 6 13 6 9 267 8 931 12 722 12 337 11 397 34 4 3 6 42 4 3 0 7 6 gt 2 840 5 143 6 433 8 804 9 086 64 0 81 1 25 1 36 9 3 2 30 6 57 6 50 6 71 4 79 7 5 518 2 803 5 128 2 294 775 6 0 49 2 83 0 55 3 66 2 59 6 31 4 40 3 18 6 6 8 908 986 1 162 1 240 1 536 13 4 8 6 17 8 6 7 23 9 9 8 11
49. 2014 6 1 3 amp w es e 1 sShared Wesearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved Shared 1 6920 SR Research Report 2014 2 5 13 6 14 6 14 6 Pb 1Q 2Q kie Te lke Me kie 4Q 3 678 2 889 2 381 2 449 971 4 505 40 9 13 400 1440 148 190 456 73 6 56 0 5 3 1 889 1 520 1 419 526 269 2 182 140 1 44 11 3 795 85 8 43 6 51 4 52 6 59 6 21 5 27 7 48 4 839 762 806 798 778 827 1 2 39 119 117 7 3 8 5 22 8 26 4 33 8 32 6 80 1 18 3 1 050 758 614 272 509 1 355 37 6 2 250 4 9 105 78 8 7 8 28 5 26 2 25 8 30 1 16 8 1 014 938 757 172 511 1 434 41 0 2 250 19 7 11 4 52 9 2 0 27 6 32 5 31 8 31 8 16 8 646 595 451 82 326 935 42 0 1 450
50. 2014 1 24 2014 6 7 1 13 400 17 6 2 250 4 7 2 250 11 39 1 450 9 99 jesearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 2013 6
51. Haze to to
52. 5 407 3 650 6 2013 1 3 4 6 3 EUV BASIC 2013 2 22 EUVL Extreme Ultra Violet Lithography EUV EUV
53. 144 09 1 050 63 1 014 147 646 81 FPD 60 40
54. 3 Emerging Market MR300 BSI CIS MRAM ReRAM PRAM _ SiC GaN ae s Shared 6Qesearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w 6920 SR Research Report 2014 2 5
55. DUV UV Ultra Violet 400nm 780nm X 10nm 190nm 280nm DUV Deep Ultra Violet DUV esearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 X I YTV a 10nm 13 5nm 190nm 280nm 400nm 780nm ArF 193nm KrF 248nm i g 365nm 436nm SR 1 2
56. 2013 6 2 6 566 7 500 1 807 1 800 1 951 1 800 1 241 1 200 2013 6 11 000 14 000 2 000 3 100 2 150 3 100 1 400 2 050 38 0 55 0 2 2012 sShared 6Qesearch http www s
57. LiB 2012 10 ECCS B310 TSS20 ECCS B310 In situ In situ ECCS B310
58. 1 1 21 6 50 1 508 1 2 1 6 2013 6 1 790 53 0 196 5 3 406 17 1 1 1 393 37 19 1
59. DUV k N A 3 s Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w Shared 6920 SR Research Report 2014 2 5 1 2 SR
60. SEMTi 2014 23 2 2015 2 4 FPPD 4 104 26 09 422 54 79 949 27 59 2 7 2 44 8 MATRICS
61. 2013 8 20nm 16nm NAND DRAM SiC GaN FPD LiB Lithium Ion Rechargeable Battery 2014 6 15 000 7
62. 5SR Inc SR Inc Shared Research SR Inc SR Inc SR Inc SR Inc
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65. 25 0 2011 6 5 8 FPD 38 44 6920 SR Research Report 2014 2 5 2008 6 8 804 36 9 FPP 1 563 67 1 731 92 6 1 240 6 7 559 6 40 FPD 90 s Shared GYesearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved Shared eSsearch 6920 SR Research Report 2014 2 5
66. DRAM PC FPD TV Shared Yesearch http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved e 6920 SR Research Report 2014 2 5 SiC Silicon Carbide GaN Gallium Nitride 7 212 36 8 FPD 22
67. lt Shared esearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w Shared esearch http Wwww sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w 6920 SR Research Report 2014 2 5 SR GCA
68. Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w 6920 SR Research Report 2014 2 5 WASAVI LX330 2012 11 14 WASAVI LX330 CD LP300 EUVL Extreme Ultra Violet Lithography EUVL CD MATRICS X810 2012
69. 17 8 15 1 57 2 4 4 17 6 20 6 18 9 20 8 10 8 SR EPJ 1 681 1 383 585 2 794 790 5 260 59 8 822 634 425 530 2803 186 230 184 124 196 821 216 380 80 285 5 3 2564 5 136 4 201 3 123 4 043 4326 5 989 65 7 489 622 395 158 426 261 297 160 102 250 447 826 79 1 738 332 43 506 3 231 2 319 1 663 1 874 507 3 597 199 7 11 7 59 469 843 55 78 195 320 182 48 374 65 5 574 673 712 383 918 SR 2014 6 2 2014 1 31 2014 6 2 2014 1 24
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71. 1 10 CIS FPD FPD 2010 6 FPD CLIOS 1 2 3 4 1 FPD
72. 7 2013 7 22 2013 3 15 2013 6 1 38 43 38 5 a http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 40 44 6920 SR Research Report 2014 2 5 2013 5 2013 5 27 2013 6 30 1 2 2013 3 2013 3 8 2013 3 15 2013 1 2013 1 25 2013 6 2
73. 11 13 20nm EUV MATRICS X810 2012 11 EUV ArF EUV MATRICS X810 2009 28nm MATRICS X700
74. sShared Search lt SR Research Report 2014 2 5 6920 sr_inquiries Gsharedresearch jp s Shared Yesearch http www sharedresearch jp gt 6920 SR Research Report 2014 2 5 0 4 GPS 4 5 a 12 ER 12 12
75. 1009 KLA 1 2 3 Applide Materials 1976 Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w s Shared GYesearch http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 to KLA 2000 2005
76. 2 5 476 16 6 847 53 2 922 52 79 609 50 9 lesearch http www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 5 i DRAM NAND ee Sic GaN
77. 2014 2 5 pj 2 Me MATRICS MAGICS 5 aSnm328nm gt 20np gt 1Anm gt 10nm I EUV 4 ap muw ge 4 A DP NIL i FinFET gt 5 1 a 4 gt
78. SR Research Report 2014 2 5 2 MAGICS 2014 6 16nm 10nm SiC GaN TSV BSI Mi Illuminated CMOS sensor 2014 6 1 2013 10 31 2014 6 1 971 73 6 509 1 050 511 1 014 326 646
79. SiC Silicon Carbide 1 SiC SiC nm SiC TROIS33 SiC SiC SiC LED GaN s Shared Research http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved w Shased 6920 SR Research Report 2014 2 5 Gallium Nitride
80. 0 9 1 10 0 13 5 SR Shared Gewearch http Www sharedresearch jp Copyright C 2013 Shared Research Inc All Rights Reserved 6920 SR Research Report 2014 2 5 SiC TSV BGM300
81. 6 16 8 1 952 585 2 537 929 1 321 2 250 206 9 75 0 14 7 52 4 125 9 11 3 29 7 12 1 22 3 170 16 7 16 8 1 241 369 1 610 614 836 1 450 192 3 73 1 10 5 50 5 126 6 9 9 SR 13 6 14 6 P 6 567 4 830 11 397 5 476 7 924 34 1 35 1 7 6 16 6 640 5 549 3 537 9 086 3 280 6 970 49 8 30 7 3 2 40 9 97 1 273 502 775 420 1 020 60 1 68 8 66 2 53 8 103 0 745 791 1 536 800 910 45 7 8 5 23 9 7 4 15 1 4 229 4 536 8 765 8 000 7 000 57 1 3 1 39 7 89 2 54 3 3 064 3 380 6 444 5 980 5 690 65 2 5 0 47 9 95 2 68 4 416 308 724 1 220 400 20 6 10 5 16 6 193 1 29 8 749 848 1 597 800 910 44 7 8 9 23 2 6 8 7 3 SR
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