A051020
Contents
1. O Cl NO 1OO 42. 30 SUS 316 ww Fig 1 Fig 2 ppm 0 50 100 150 200 4000 5000 3500 5 30min 4000 3000 2h 1500 gt 0 3000 NR 200 664 0891 2000 3 36 3 1000 1000 Tel 072 780 1800 Fax 072 785 0073 500 http www_fisinc cojp 0 50 100 150 200 250 300 350 400 ppb 15 20 10 min NN NS Fig 3 0 5 V Fig 4 0 5 V e ll A051020 SP61 01F A051020 SP61 02F mV
3. 6 O 7 1 2 TS110705 01 http www fisinc co jp 100 10 10 NMB 1004KL 01W B4U LOU Cx lol 100 Sw 100B a a b b 7 A NM2 6
4. 3 4 4 4 4 5 ee WH 7 FLO DV EE LR 10 0S NSHO 3 2 4 GND 62oo6 3 2 5 7 5 TMA XT DE VOMOS MD S99 1mA NG 1 0 5 0 hm 2 3 O V 3 Oa RR 4
5. 7 4000 2m s 2 5m s 2000 1000 0 50 100 150 250 300 350 400 ppb Fig 5 0 5 V Fig 6 JOZONEMONITOR fm 121228160143 AO51020 SPG1 F SVDC 3 O24 Oppb 400ppb 8Oppb OO 1V OO 5 V 5Ocm 1 2 1 2 5V DC 3
6. 1 Os 2 Os 3 NO
7. F 1 0 250ppb 5 4 s ITO Fig 1 Fig 2 Fig 3 Fig 4 0 1V 0 5V
8. B MM3 ABS a a rn Kuroiwa e007 8 20 TR WIE Revlse Dwg By Appr By Dote Ports Name Drow By Dote UNIT Scole 2007 8 7 1 Check By ee mm 0 2007 8 7 1 Appr By Date Modlelt A05120 SP61 01F A05120 SP61 02F Dwg No REV 05012 H S IHC Z05012BR3 A051020
9. GND 5V GND 5000 DC5V 5 3 SP 6 1 0 250ppb 0 1V 0 5V 50cm AWG24 MOS 5V DC 80ppb 700mW 400mW i 10 C 60 C 65 W x 100 D x 35 H mm 80g e SP 61 es A050120 SP61 01 es 0 1V e SP 61 e AO050120 SP61 02 es 0 5V 1 5VDC 2 3 3 7 4 OFF MOS ON 3000
10. O ON O O 5V saas O 1V 1 5 0 50 100 150 200 250 300 350 400 Ozone concentration ppb 1 2 3 TS110705 01 http www fisinc co jp AO51020 SPG1 F Os O
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A051020 a051020-sp61-02