Home

Agilent E5250A

Contents

1. ON Supply OFF Supply STANDBY Supply INSTALLATION CATEGORY 1 INSTALLATION CATEGORY I
2. 8 SENSBE No FORCE CAUTION RR Common Common L Guard H Force Force to Triaxial connector Common Guard Sense lt Insulator lt Plate to DUT Coaxial cable Tnaxial connector Insulator lt
3. 2 18 Agilent E5250A 11 NOTE Agilent E5250A LED 3 E3230A E 5250A
4. SCPI 1 HP BASIC SP MUX M GET GET SP MUX M 2 2 FIND CALL Bias source on CALL Bias source off 3
5. Gg Ce Relay Test Adapter SYST CPON SCPI p 7 1 Agilent E5250A 11 3 5 SCPI SCPI
6. Figure 4 2 INTLK jnterlocK Switch teo UGIO1042 90xS5 a plug side view of Intlk terminal b wiring side view of Intlk terminal SMU 1
7. k or Fr 9 WARNING WARNING CAUTION I td Km
8. p 5 32 Figure 5 10 1 E3250A MEMORY SETUP PANEL ES2S2A 10x48MAT Agilent E5250A Virtual Front Pane Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOSFET Vth Card Number s 0 111111111122222222223333333333444444444 Input 123456789012345678901234567890123456789012345678 TV1 FPP TV2 ee EE DE EG NRE eS TV3 SR TV4 ESE8BS8 RAR 8SN38EIS22 SE28ESCSSB ad 8EaS WOD Se YR SD CR A EE ot HR RR DN RE CE i i RA 8 be CV i RR A Use softkeys to move cursor and to change status Agilent E5250A 11 5 37 Figure S 13 Figure S 14 VEP MEMORY SET
9. ON DRS NE Oh OFF
10. test data MST test data 1 RUN Enter numbper of devices default 24 A GC RR Enter Idlin Idlin Tdc Gmmax Gmmax Tdc Vitext Vtext Tdc Vtci Vtci Tdc ALL Tdc END Tdc
11. SCPI SCPI p 7 1 GPIB BNC E5255A 1 3 1 E3250A Figure 3 1 Relay Test 2
12. 4153 4156 2 MB E5270A 1 MB Agilent Technologies http www agilent com E5250A Agilent E5250A 11 8 3 VXTplug amp play GPIB VISA IO 1 8 4 1 4 GPIB 3
13. SMU 1 640pF E5252A4 145 pF 8 pF x 3 16494A 003 75 pF 16494A 001 123 pF i 8121 1191 2 m 130 pF x 2 10pF 145 8 x 3 75 125 130 x 2 10 pF 639 pF lt 900 pF 4 22 Agilent E5250A 11 Table 4 6 ES2S0A Agi
14. x 120 x 48 2012 Invalid channel range E ES3250A Agilent E5250A 11 11 11 Table 11 6 ES230A 3000 Card0 initialization fail E5250A 3001 Card1 initialization fail E5250A 1 E 25SA DIP
15. E3S250A lt mewiine gt lt END gt NN Agilent E5250A 11 7 3 Agilent E5250A ES250A CLS ESE ESR IDN ID OPC OPC RST SRE SRE STB TST
16. SCPI p 7 1 channel s7 p 5 1 ROUTe BIAS PORT ROUT BIAS PORT BIAS PORT ES5250A card number 12 2 Agilent E5250A 11 SCPI DIAG TEST CARD CLE card number cg7 9 number 1 2 3 4 ALL DTAG TEST CARD EXEC cg7 num
17. ES5250A ES250A 1 10 Vdc Table 3 4 ES5250A 4155 4156 SMU
18. Agilent E5250A 11 WARNING DUT Figure 4 1 NOTE 8ch 8ch Agilent 16494E 8 DUT DUT 16494E DUT DUT 16494E ES2SSA 16494E ES255A DUT DUT ES3255A 8 1 16494E 1 E3233A 1 3 16494E 16494E
19. 8 Figure 7 3 ES2S0A STATUS SUMMARY SRQ to Controller MESSAGES 4 ot Use Not Used RQS js read by we Serial Pol Service rast Status Byte Request e3716ESBMAM 3121110 Register Generatio MSS A A a MSS is read by XSTB TFT Service Request Enable Register S51413121110 xSFE XSRE PGO4003 120x120 Agilent E5250A 11 7 53 0 R Ped RnR Rt ER Figure 7 4 Table 7 4 Figu
20. Agilent E5250A 11 1 11 E5250A ES250A E5250A E5250A 301 ES25S0A A6J ANSI ZS40 E5250A UK6 1 12 Agilent E5250A 11 E5250A ES5252A E5255A E5250A ES5250A 1 ES250A
21. Tdc Agilent E5250A 11 9 33 HCI 3 1 Tdc 1 4153 4156 Figure 9 9 4155 4156 DAT 4 Continue 3 ALL 4133 4136 3 4133 4136
22. E5250A ES250A SCPI VXlplug amp play E5250A VXlplug amp play E5250A E5250A o 4 SCPI E5250A SCPI front panel key Ttalic
23. p 7 49 10 4 OUTPU OUTPU OUTPUT GHp5250 ESE ENTER 6Hp5250 A 10 0 1 OPC Operation Complete 1 12 2 4 QYE Query Error 3 8 DDE Device Dependent Error 4 ie ExE Executiongmod 5s 32 cME commasagreo 6 64 7 128 PON Power On OUTPUT Hp5250 E T QHp5250 E OUTPUT Hp5250 E T QHp5250 E Query CME SE 32 10 SE H20 16 SE Q40 8 SE B100000 W Agilent E5250A 11 ESR Rs ESR
24. ROUT COUP STAT card_no ON ON 100 OUTPUT Hp5250 ROUT 110 Sets up two coup1e 120 OUTPUT 130 6 10 ROUT COUP STAT cg77 7 o OFF COUP PORT ports G Hp5250 ROUT COUP STAT TurnS on the couple port OFF 1 amp 2 mode AT Us 3 and 3 amp 4 ALL ON for all cards on all cards Agilent E5250A 11 p 5 1 ROUT CLOS channel_list egzze ist ROUT OPEN channel_list ezgze7 7s7 ROUT OPEN CARD card no card no
25. TISO 0 iA ME Agilent E5250A 11 2 7 E5250A 1 ES230A 10 2 a
26. Vth Meas c Constant Definition Test comm Capacitance Measurement Capa_max F 2 0E 11 Capa min 8 0E 12 Sig volt V 0 03 Meas_fred Hz 1 0E 5 Cable len 16048D E m 2 Clen hptriax 16494A m 1 5 Clen usrtriax h H TRIAX m 0 Clen usrtriax 1 1 TRIAX m 0 Clen usrcoax h 1 m 1 0 Clen usrcoax 1 L m 1 0 Channel 10905 11006 E5250A 0 Me E3230A 2 Set 230init 0 9 14 Agilent E5250A
27. OFF RST OFF ROUTe BTAS STATe cg7 number state card_number 0 ALL 1 2 3 4 ALL state ON 1 ON OFF 0 OFF OUTPUT GHp5250 ROUT BIAS STAT ALL ON 7 30 Agilent E5250A 11 ROUTe BIAS STATe ROUTel BIAS STATel ON OFF ROUTe BTAS STATe card number card number 0
28. ES252A 10x12 E5255A 24 8x3 16494A 16494A 001 1 5m 16494A 002 3m 16494A 003 80cm 16494B 4156 ES230 16494B 001 1 5m 16494B 002 3m 16494B 003 80cm 16494C 4142 E5250 16494C 001 1 5m 16494C 002 3m 16494D 8 16494D 001 1 5m 16494D 002 3m 16494E 8 16494E 001 3m 16495C 16494D 6 16495D 16494D 12 16495E 16495F 12 Triax Intlk GNDU 16495F 001 16495F 002 16495G 24 Triax Intlk GNDU 16495G 001 16495G 002
29. 0 0 NAN NAN close_status close status closechan list ViStatus VI FUNC hpe5250a closeList_O ViSession vi Vimt32 VI FAR Vi closechan list close statusI closechan list ViInt32 VI FAR close status hpeS250a init ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 o closechan hst
30. ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 oO openchan list 1 0 Agilent E5250A 11 8 27 VXlIplug amp play hpeS2S0a readStatusByte Q ViStatus VI FUNC hpe5250a readStatusByte_O V1Session vi ViPInt16 statusByte Vi hpe5250a init statusByte hpeS2S0a_reset E5250A ES3250A hpe5250a dcl ViStatus VI FUNC hpe5250a res
31. SYSTem CPON ALL RST ROUTe FUNCtion channel config channel_config ACONfig NCONfig OUTPUT GHp5250 ROUT FUNC ACON ROUTe FUNCtion E p 5 1 uk ROUTe FUNC channel_config lt newline gt lt END gt ACON NCON OUTPUT GHp5250 ROUT EFUNC ACON OUTPUT GHp5250 ROUT FUNC ENTER Hp5250 AS A ACON 7 40 Agilent E5250A 11 WV gt ROUTe OPEN CARD ROUTel OPEN CARD ON
32. DIAGnostic ROUTe SYSTem TD DIAG TESTLCARD RES IEEE 488 2 SCPI p 6 1 SCPI p 11 1 SCPI
33. ROUTe CLOSe LIST ROUTel CLOSel LIST egzze 7s7 p 5 1 ON channel_ist ROUTe BIAS STATe p 7 30 ROUTe CLOSe LIST channel list channel_list p 1
34. ANAHCI ASCII 4155 4156 4133 4156 3 Idlin ANAHCI Vdstrr Vgstr TIdlin Device Validity Tdc idlin 0 1 Tdc 0 1 Tdc Averaged Tdc idhn Tdc iqlin 0 1 4 5 1 95 LE 6 LS Idlin Device Validity Tdc idlin 835 5786 3401 432 6269 047 24366 79 Averaged Tdc idlin 8718 2119 er 0 gt EO gt oar Agilent E5250A 11 9 35 GPIB 41SS 41S6 HCI
35. Ibvg file Vgstr TBVGMES Igleak file TIGLEAK MES Idleak file IDLEAK MBES Param file PARAM MES 9 36 Agilent E5250A 11 Vtci Idlin Gmmax Vtci 1 2 Idin Gmmax 1 2 Imput Parameters No of devices 3 4153 4156 PARAM MES ANALYSIS SETUP LINE2 ID TID ID W Device geometries Gate length m 1 E 6 Gate width m 1 E SOURCE SETUP ANALYSIS SETUP 1 mA x
36. OUTPUT SOUR XXX SCPI SP MUX M 3 GPIB 701 702 703 Agilent E5250A 11 9 23 HCI B1aS source on SUB Bias source on 1 1 Bias Source On COM Meas info5 REAL Vdstr Vgstr Vdd Vbb Gate 1ength Gate w AD 1 aa OUTPUT 701 SOUR amp VALS Vgstr Set Gate Stress Vo1tage OUTPUT 702 SOUR sgVALS Vdstr Set Drain Stress Vo1tage 1 OUTPUT 703j SOUR 0 0 SUBEND 1 1 Bias source otf SUB Bias Souroe off 1 Bias Source Off Set Substrate Stress Vo1tage COM Meas info5 REAL Vdstr Vgstr Vdd Vbb Gate 1ength Gate w idth ti OUTPUT 701 SOUR 0 0 Set Gate Voltage to 0 0V OUTPUT 702 SOUR 0 0 Set Drain Voltage to 0 0V OUTPUT 703 SOUR 0 0 Set Substrate Vo1t
37. NONE NONE 0 0 OU EN TPUT GHp5250 SYST CTYPE 1 TER GHp5250 AS Agilent E5250A 11 7 47 pe Re SYSTem ERRor SYSTem ERRor 1 YSTem ERRor err_no message lt newline gt lt END gt e7 no essgge 0 No error OUTPUT Hp5250j SYST ERR ENTER GHp5250 A BS SYSlem VERSion ES 250A SCPI SYSTem VERS1on YYYYV lt new1ine gt lt END gt YYYY 1995 OU EN TPUT GHp5250j SYST VERS TER GHp5250 AS 7 48 Agilent E5250A 11 YK E3230A
38. 3013 Cannot connect multiple channels in SROUTe mode 1 3014 3015 Cannot directly specify Bias Port channel ON Bad channel number combination on ES2S2A card 5 7 9 6 8 10 or 9 7 3016 Config error Re install Api
39. p 7 49 ESR register new11ne gt END gt 10 10 10 0 1 OPC Operation Complete 1 2 2 4 QYE Query Error 3 8 DDE Device Dependent Error 4 16 EXE Execution Error 5 32 CME Command Error 6 64 7 128 PON Power On OUTPUT GHp5250 ESR ENTER Hp5250 A Agilent E5250A 11 eR TF IDN IDN E5250A TDN HEWLETT PACKARD model 0 revision lt newline gt lt END gt model E5250A revision A 01 00 OUTPUT Hp5250 TDN ENTER Hp5250 AS 7 8 Agilent E5250A 11
40. VFP E5250A VFP VFP Agilent 4155 4156 ITBASIC ES250A 5 2 Agilent E5250A 11 Agilent E5250A Table 5 1 E3230A Table 5 1 EAC HP BASIC RMB UX for IBASIC Windows P QO p 6 1 p 7 D x xX x p 6 1 p 7 1 VXIplug amp
41. Agilent E5250A 11 NOTE HCI HCI MOSFET Hot Carrier Induced degradation JEDEC 29 JULY 93 MOSFET HCI 2 SP MUX Mi JEDEC 29 JULY 93 SP MUX A E5255A E5250A Agilent 4153 4136 Table 9 5
42. Continue ed Figure 9 9 HCI RAPHI LIST RaPHI GS MEDI UN doocTod 08 14PFPh HCI mmax Shii1l SITr 1OOOOE c Dsyi cs 1 CEUHRS RT 1 0 nnnnnnk eo 1 MARKERT 10 nnnnnnnks c 1 mlhT 3 TA haAREER 1 0 ee 3 ON haARKER 100 hdl NE MAX TATERS POLATE oN GmsFT DIRECT haAREERT GURSOR haAREER SRIP HTO ALY 51 5 CURSOR 1o 0 Slress see dacades di 10 ok SHORT MARKERSL LINE SCAALTNG DI SPLAY SWEEP TI ML GONST GUHSGR SETUP SETUF ETUP SETHP NOTE Pause to save 0 Tdc 9 34 Agilent E5250A 11 5 HCI 5
43. DIAGnostic TEST FRAMe STATe CONTroller FPANel CONTroller FPANel test result lt new11ne gt lt END gt 1 0 OUTPUT Hp5250 DTAG TEST FRAM STAT CONT ENTER 6Hp5250 A Agilent E5250A 11 7 19 ROU ROUTe ROUTe E3250A ROUTe ROUTe BIAS CHANnel DISAble CARD card_number ALL LIST Qchannel list LIST Qchannel list ENABle CARD card_number ALL LIST Qchannel list LIST Qchannel list PORT car
44. 8 4 SW1 SW2 4 ON 1 0 O DIP 4 1 Block 1 2 DTP 1 E5255A 1 ES525SA NN
45. Agilent E5250A 1 Agilent E5250A 11 E 2 3 CAUTION WARNING Agilent ES250A Agilent E5250A E5250A 100 240 V 10 47 63 Hz AC 100 VA
46. 1 Adc 1 10 Agilent E5250A 11 WARNING E5255A ES2SSA 1 ES2SSA 1 16 W 2 ES2SSA 32 W 3
47. TFigure 4 3 Figure 4 4 2 1 2 3 Figure 4 2 Agilent 4155 4156 Intlk 40 V 40 V 4 8 Agilent E5250A 11 Figure 4 3 Agilent 3101 0302 Switch off Switch on Units mm UGIQ1G11S5 G0 18 8 Figure 4 4 Agilent 3101 3241 10 2 4 3 3 2 Swlt
48. Conductor msulator Clear Conductive Layer Center Cover here using sleeve min 2 mm Insulator black 8 lt Center conductor for Force Sense signal KS KA Outer conductor for Guard signal Conductive layer black Agilent E5250A 11 approx 10 to 15 mm Insulator clear 4 13 WARNING ES230A ES2S0A Agilent E5250A E3250A ES255A GNDU ESs250A ES2S0A OFF ES2S0A
49. Input setup memory number to be connected gnter Enter CHANGE CHAN Agilent E5250A 11 5 39 NOTE NOTE Table S 11 VP 4155 4156 UP LEFT RIGHT DOWN 1 IVS Input HF1 Input 7 CV1 mput 9 2 IV6 Input 6 HF2 Input 8 CV2 Input 10 IVS
50. SHOW ES250A CONFIG SETUP VFP MODE DEFINE E5250A LABEL SETUP MEMORY SAVE LOAD QUIT VFP SHOW CONFIG SHOW CONFIGURATION MENU ES5250A
51. ER E 5 10 Agilent E5250A 11 NOTE Table S 3 p 5 10 ROUTe CONNection SEQuence p 7 1 Agilent E5250A Table 5 3 3 ES250A Break Before Make 1
52. 1 Vdstr 5 HCI Vgstr Vdsr Vgstr 2 CC SE Id Vd p 9 28 2 3 100 000 Idlin Gmmax Vitext Vtci 10 E10 E20 mV 20 mV
53. CARDn MAIN MENU VFP VEP 0d 5 30 Agilent E5250A 11 Figure S 9 VRP SETUP MODE MENU Agilent E5250A Virtual Front Panel Utility SETUP MODE MENU CONFIG MODE NORMAT BIAS STATE BIAS PORT OEF 10 ORE 10 OFF OEF CARD1 CARD2 CARD3 E5255 CARD4 CAUTTON If any setting parameter of this menu is changed all setup memory will be oleared Select desired softkey CHANGE CONFIG AUTO NORMAL BIAS PORT
54. 01 0 00101 101 Figure 5 7 Table 5 9 Figure 5 8 4 E3233A 4 Figure S 7 1 2 6 2x48 IV SMU1 3 44 2 1 IV SMU2 IV SMU3 3 3 IV SMU4 4 3 2 2 IV SMUS 2x48 Multiplexer R 1 2x16
55. CATALOG 4155 4156 SAVE FILE 4155 4156 LOAD FILE 4153 4136 RETURN SAVEFILE Tnput Save file name 8 Egnter gnter LOAD FILE Tnput Load file name
56. ON channel jist ROUTe BIAS STATe p 7 30 RST ROUTe BIAS CHANnel ENABle LIST channel list channel list channel list p 5 1 V s channel ist OUTPUT Hp5250 ROUT BTAS CHAN ENAB G 10401 10502 1 1 2 7 2
57. chann el _ist 1 0 ROUTe BIAS CHANnel DISable LTST channel list channel_ list disable status disable status lt newline gt lt END gt 0 1 OUT PUT egzze 7 7 s7 p 5 1 channel ist GHp5250 OUTPUT GHp5250 OUT PUT GHp5250 ENTER Hp5250 AS A ROU ROU T BTAS CHAN ENAB CARD ALL ROUT BIAS CHAN DIS 10101 T BIAS CHAN DIS 10101 10102 10201 1 0 1 10101 10201 7 24 Agilent E525
58. p 2 13 DIP 4 BIAS 4 DIP BIASin BIASout 4 1 3 IV NC BIAS INPUT p 2 13
59. 2 1 2 1 2 Mi 1 1 1 2 2L 2 2 Re E5252A hpe5230a coupleState ViStatus VI FUNC hpe5250a couplePort ViSession vi Vilnt16 coupleport cardno Vilnt16 portl ViInt16 port3 Vilnt16 port5 Vilnt16 port7 Vilnt16 port9 Vi hpe3230a init
60. 7 56 Agilent E5250A 11 VXlplug amp play VXTplug amp play Agilent E5250A VXlplug amp play 8 2 Agilent E5250A 11 NOTE VXIplug amp play Microsoft Windows 7 Professional Windows Vista Business Windows XP Professional VISA IJO Microsoft Visual Basic Microsoft Visual C Borland C Builder National Instruments LabWindows National Instruments LabVIEW Agilent VEE VISA TO GPIB IEEE 488 VISA IO Agilent GPIB Agilent IO
61. Break Before Make Agilent E5250A 11 5 27 VEP VFP Agilent Agilent 430 1 10833A B C GPIB 1 E5250 17003 E5250A 1 VFP 1 Agilent ES250A Agilent 4155 4156 ON GPIB p 4 1 2 4133 4136 ES32350A ON 3 4155 4156 SYSTEM MISCELLANEOUS 4153 4156 SYSTEM CONTROLLER 4 ES250A 4133 4156 5 4155 4156 IBA
62. 160 180 Comment 6 24 Agilent E5250A 11 VFP l VFP EB525S0A ASCII a UPLOAD GET UPLOAD b U LIB RE STORE U_ LTB c HP BASIC d LOADSUB LOADSUB
63. NAME UNIT DEFINITION Gm DIFF ID VG Vtext V GMX GMY1 GMY2 AT VD 1 2 Gmmax S MAX Gm Vto V 12X Td1in A GTL1Y1 Xaxis Ylaxis Y2axis NAME VG ID Gm SCALE LINEAR LINEAR LINEAR MIN 0V 0A 0S IMAX SV 2 mA 1 5 mS DATA VARIAVLES Vtext Idlin TTNE1 GRAD 1ine on Y1 at a point where VG 5 Gradient 0 LINE2 NORMAL line on Y1 at a point where ID 10u and a point WHERE TD 10u MARKER At a point where Gm MAX Gm Interpolate ON NOTE PARAM MES 4155 4156 Idlin Vtci Idlin 5 V 0 V Vtci 10 nmy1 um p 9 36 9 20 Agilent E5250A 11
64. START TEST MAIN MENU 3 START TEST Select IV Port of Leak Test by softkey IVn ES250A m 1 6 E5255A TIV CANCEL 3 16 Agilent E5250A 11 4 ES2S0A TIVn n 1 6 4156 IV1 IV3 IV5
65. 3 Device QYE BEXE CME Dependent Error DDE 4 Execution Error ES250A oN EXE 5 Command Error CME 6 0 7 Power On PON E5250A ON 8 15 0 8 OR ESB 8
66. Agilent 41SS 41S6 4155 4156 Agilent 16493 4155 4156 Intlk 4 10 Agilent E5250A 11 NOTE Agilent 4155 4156 1 Sn YY 4155 4156 mtlk System CALIB DIAG SYSTBM SELF CALIBRATION DIAGNOSTICS CALIB DIAG DIAG CATEGORY 1 O PERIPH 403 INT Interlock LED EXBCUTE 1 1 LED
67. E5250A 4155 4156 Table 9 5 4133 4156 GET p 9 23 Agilent E5250A 11 9 17 Table 9 5 2 NOTE 3 HCI HCI
68. 200 Execution error 220 Parameter error E3250A 222 224 222 Data out of range E5250A 223 Too much data ES5250A 224 Illegal parameter value E5250A 260 Expression error Agilent E5250A 11 11 7 es CH E3230A
69. ON OFF ROUTe COUPle STATe 7 38 1 RST ROUTe COUP 1e PORT card number couple_port card_number couple_port 7 36 0 ALL 1 2 3 4 ALL 1 3 7 9 1 5 Agilent E5250A 11 NOTE
70. SCPI ES3250A ROUTe E5250A DIAGnostic SYSTem SCPI p 7 1 Agilent E5250A 11 6 5 Table 6 1 1 ROUT FUNC channel_config NCON 2 ROUT CONN RULE card 7o rule ALL FREE 3 ROUTCONN SEQczg zo segwence ALLBBM 4 ROUT BIAS PORT cg77 no input_port_no ALL 10 ROUT BIAS CHAN ENAB CARD cg77 7o ALL ROUT BIAS CHAN ENAB LIST channel_list All
71. 3 2 RETURN Table 5 10 5 40 Agilent E5250A 11 Table S 12 Table S 13 VFP 2 OPEN ALL ON OPEN ROW ON CLOSB ROW MORE
72. 34 3 2 E5250A 3 11 2 Agilent E5250A 11 SYSTem ERRor CLS p 7 1 Agilent E5250A 11 11 3 Table 11 1 5 ER SCPI SCPI SCPI 1LXYX 0 ga
73. ES52SSA Table 5 7 1 2 2 5 ES2SSA 5 ES2SSA a 4 2 2 1 1 1 IV 01 01 08 BIAS 51 2 IV 02 BIAS 32 3 IV 03 BIAS 53 2 1 2 IV 01 01 08 BIAS 51 2 IV 02 BIAS 32 3 IV 03 BIAS 53 3 1 3 IV 01 01 08 BIAS 51 2 IV 02 BIAS 32 3 IV 03 BIAS 53 4 1 4 IV 01 01 08 BIAS 51 2 IV 02 BIAS 32 3 IV 03 BIAS 53 5 20 Agilent E5250A 11 1 1 4 4 2 I
74. 16 8 10 enable_number new11ne gt END gt 10 OR 5 Agilent E5250A 11 7 5 ESE 16 8
75. ROUT BIAS STAT card_no ON ON ROUT BIAS STAT card_no OFF OFF 100 OUTPUT GHp5250 ROUT BIAS PORT ALL 1 110 Selects SMUl input port to be input Bias Port for all cards 120 OUTPUT Hp5250 ROUT BIAS CHAN ENAB CARD ALL 130 Bias enables all output ports on all cards 140 OUTPUT Hp5250 ROUT BIAS STAT ALL ON 150 Turns on the Bias Mode for all cards Agilent E5250A 11 6 9 p 5 1 oO BS3252A ROUT COUP PORT card no input 77 no input port no SMU
76. 1 Table 4 2 2 Table 4 1 Agilent 16494B 2 3 3 p 4 8 4 DUT DUT 6 4 12 Table 4 1 mm mm 11 3 14 11 11 14 2 8 2 10 3 8 fh _ 8 f 2 11 3 3 2 is 8 mm mm
77. E5250A Local Self Test 1 ES2350A ON 2 Local Self Test LED System Fail LED Fail LED E5250A E5250A 301 BNC E5255A 1 3 1 E5250A 2 3 Figure 3 1 ES3230A
78. Connect vfp Load vfp data connect vfp Setup data Setup num Setup_data 14000 Setup num 1 24 carr Connect vfp Mat48_ data 1 FNGet vfp commen Load vfp data FNGet vfp comment Setup datas Setup num Setup_data 14000 Setup_ num 1C24 Comment FNGet VED commentS Mat48 data 1 DISP Comment CommentS Agilent E5250A
79. 92 1 3 1 4 RS 1 5 1 5 15 TI 1 6 01 ERIK 1 7 ES255A SS 1 8 1 10 ER ER NN 1 12 00 M7 2 2 RE Ri i 2 3 ME IGP 2 4 Ep 2 4 NS EA NNN RR iN 2 4 SN 2D2 ig AREe 2 6 2 6 E5250 ON NA 2 7 A RE CN 2 7 SRS EE SR 2 2 8 E5255A kk 2 10 kk SSR Rh 4 2 13 GPIB TR RE RO EN 2 17 GPIB RR 2 17 Agilent E5250A 11 1 KDE A RS nN ao Dnt et 2 18 EN CE RA 2 18 TET SO OE EO ER RR 2 18 0 SO 5 3 3 NANO 3 4 3 6 EK KR eyey beee os 3 10 NG 0 3 10
80. Ts TVn Port a Kelvin connection n 1 3 5 YES 09 NO CANCEL YES NO Select SMU channe for TVn 1eak measurement by softkey n 1 6 SMUm 4155 4156 SMUm SMUs sMU6 41501 SMU CANCEL Agilent E5250A 11 3 17 5 SMUm m 1 6
81. SWITCH 49 96 PAGE 1 48 49 96 NEXT SETUP ES250A PREV SETUP ES250A GOTO SETUP E5250A SETUP SETUP MEMORY MENU Figure 5 11 MEMORY COMMBENT Tnpu comment for this setup memory Max 20 char 20 Enter gnter GOTO SETUP
82. 11 9 37 4155 4156 HCI DATA Input Parameters Meas points Meas points DATA Meas points 13 NRG TTA RM A ART Limits for leakage tests lgleak max A 2 E 10 Idleak max A 1 E 8 Setup for drawing saving data in main menu
83. SMD 1 2 2 SMU1 1 0 IV 01 01 96 BIAS 11 SMU2 2 0 IV 02 01 96 BIAS 12 SMU3 3 0 IV 03 01 96 BIAS 13 SMU4 4 0 IV 04 01 96 BIAS 14 SMUS 5 0 IV 05 01 96 BIAS 15 SMU6 6 0 IV 06 01 96 BIAS 16 1 0 4 5 22 2 IV BIAS IV SMU BIAS IV 10 2 01 SMU Agilent E5250A 11 dR 01
84. 1 2 3 4 6 7 8 9 10 ROUTe COUPle PORT 1 1 2 Table 5 4 1 SMU1 01 01 12 SMU2 01 48 SMU3 03 01 12 SMU4 01 48 SMUS5 05 01 12 SMU6 01 48 HF1 HF2 07 01 12 01 48 CV1 CV2 09 01 12 01 48 5 14 Agilent E5250A 11 ROU
85. Figure 5 1 Card No Channel No Card No Channel No 1digit 4 digits 1digit 4 digits 1 0 4 ES250A Table 2 4 2 2 ES252A 16 E525SA 3 20 Agilent E5250A
86. SW1 SW2 SW3 Figure 9 3 3 Figure 9 4 Table 9 8 p 4 1 Agilent E5250A 11 9 25 HCI Figure 9 3 ES2SSA DIP a 8 1 1 2 IVin2 cable 3 IVin3 cable i 5 SW3 6 SW1 im ag Voutl IVout2 For E5255A in Slot 1 Connect IVin1 to SMU1 and set SW1 SW2 SW3 to Cm For E5255A in Slot 2 Connect IVin1 to SMU3 and set SW1 SW2 SW3to bm For E5255A in Slot 3 Connect IVin1 to SMU4 and set SW1 SW2 SW3 to OooOoOooo 5 OOO DOO
87. A B C A 1 0 1 0 1 0 V 200 200 200 300 300 300 I V 0 6 0 6 0 6 ILV 1 0 1 0 1 0 C V HF 1 0 1 0 1 0 0 I V 1013 5x1012 2x1012 TV 1012 5x101 2x101 C V HF 10 Sx108 2x108 10 4 Agilent E5250A 11 OU1 lt 0 1 pA I V lt 1000 pA LV lt 0 3 pF EMF lt 80 pV I V lt 110 nuV IL V lt 110 pV C V HF lt 143 pF I V lt 123 pF IIV lt 1 0 5 pF C V 0V 2 Ele
88. ES230A Table 4 3 ES2S0A ES2S0A 1 0 DC 4155 MPSMU SMU1 6 16494A 003 VSU AUX1 4 BNC VMU AUX1 4 BNC Intlk 16493J INTLK 4156 HRSMU SMU1 6 16494B 003 16494A 003 VSU AUX1 4 BNC VMU AUX1 4 BNC Intlk 16493J INTLK 41301 HPSMU SMU1 6 16494B 003 16494A 003 MPSMU SMU1 6 16494A 003 PGU HF1 2 BNC GNDU SMU1 6 16493H GNDU ES5250 60004 16493H GNDU 4142B SMU SMU1 6 16494C 001 16494A 001 VSU AUX1 4 BNC VMU AUX1 4 BNC GNDU SMU1 6 16493H GNDU E3230 60044 16493H GNDU Intlk 16435A INTLK 16493J INTLK C High Low CVl 2 BNC OUTPUT HF1
89. E5252A E5252A 10x12 Matrix Switch E5255A E5255A 24 8x3 Channe Multiplexer Block 1 Tnpu 1 No Resistance Block 2 Tnpu 2 No Resistance Block 3 Tnpu 3 No Resistance InputN N 1 6 TIV E3250A SMU BE3233A BIAS IV With Resistance No Resistance Agilent E5250A 11 5 29 CAUTION VEP SETUP MODE ck NORMAL AUTO
90. ViStatus VI FUNC hpe5250a cmdString Q ViSession vi ViString cmd str Vilnt32 size ViChar VI FAR result vi hpe5230a init cmd str E5250A 2356 size result 2 32767 result E5250A 8 18 Agilent E5250A 11 hpeS2S0a compenC A 03 Agilent 4284A LCR VXTplug amp play 00 E5252A Ea 0 H hpe3230a selectCompenFile 1 ViStatus VI FUNC hpe5250a_compenC ViSession
91. 0 00101 101 5 8 Agilent E5250A 11 2 ROUT FUNC p 7 1 Mo RST E5250A 1 2 2 5 E5250A 1
92. 3 9 Agilent E5250A 11 3 19 3 20 Agilent E5250A 11 Agilent E5250A E5250A ES252A ES5255A Agilent 16494E 8 ES255A Agilent 16495 Installation Guide
93. Parameter Out of Range 6 32 Agilent E5250A 11 RE TF ER Agilent E5250A Agilent E5250A SCPI SCPI Standard Commands for Programmable Instruments IEEE 488 1 TIEEE 488 2 SCPI 2 IEBEE 488 2 RST Agilent E5250A
94. Rlc_data DATA 1350 RI data L300 R ohm L H C TE 1420 DATA 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl H 1430 DATA 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl LIL 1440 DATA 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl H 1450 DATA 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl L GUARD C GROUND E GROUND F GUARD D Insulator v A FORCE or SENSE A RR FORCE or SENSE B 6 30 Agilent E5250A 11 100 110 120 130 140 150 160 170 180 190 200 210 220 Example of Capaoitance Compensat1ion Fred 1 E 6 MEASUREMENT FREOUENCY 1MHz 1 5 FEE5252A OUTPUT CABTE 1 5m L2 h 0 TRTAX CABLE High STDE none 0m L2 1 0 TRTAX CABLE Low STDE none 0m 3 h 2 COAX CABLE High STDE 2m L3 1 2 COAX CABLE Low STDE 2m OUTPUT 6 Hp4284 FUNC TMP CPG SET Cp G FUNCTTON OUTPUT G Hp4284 EREO sgVALS Freq SET MEAS FREO OUTPUT GHp4284 CORR LENG 2M SET 16048D TENGTH OUTPUT GHp4284 TRG H 230 240 250 260 270 280 290 ENTER Hp4284 C m G m Stat 1 Ccompen 5250 Freg
95. 200 220 240 260 E5250A 6 14 Agilent E5250A 11 Figure 6 2 Agilent E5255A BIAS marumen 1 ES2S0A 1 E3255A 2 4 ES2S0A SMU 1 SMU 2 6 AUX ES2SSA IV TVin1 E5250A SMU 1 BIAS BIAS 51 ES2SSA 1 1 8 2 3 a Ag
96. 6 IV IVinl SMU1 E525SA 4 1 BE3250A SMU INPUT 1 TIV 32 Agilent E5250A 11 TIVin2 IVin3 2 11 ES250A BIAS IV figure 2 2 0 DIP 4 OFF 0 1 2 3
97. Idlin Gmmax Vtext Vtei PARAM MES 1 2 p 9 36 RN 1 10 10 8 1000 2000 2 10 20 9 3000 5000 3 30 50 10 5000 10000 4 50 100 11 10000 20000 5 100 200 12 30000 30000 6 300 500 13 50000 100000 7 500 1000 Agilent E5250A 11 9 21 Table 9 7 HCI IDXX Idlin GMXX Gmmax VTEXX Vtext VTIXX Vtci
98. hpe5250a_ cmdData Q hpe5250a_cmdString Q 16 hpe3230a_ cmdInt16 Q 16 hpe5250a cmdInt16Arr Q 32 hpe5250a cmdInt32 Q 32 hpe5250a_cmdInt32Arr Q 64 hpe5250a cmdReal64 Q 64 hpe5250a cmdReal64Arr Q qH HPE3250A HLP Agilent E5250A 11 8 7
99. 8 Figure 7 4 Agilent E5250A 11 7 55 RR TF ER Output Queue Output Queue Output Queue 4 1 4 Figure 7 5 Figure 7 5 ES2S0A Output Queue 0 Last Data Byte to be read Queue Non Empty Next Data TE EE Byte Entered hy ss First Data Byte to be read Output Queue Summary Message to Message Available MAV Bit 4 of Status Byte Registen DO04005 120x100 Query END
100. E3230A 430 Query DEADLOCKED DEADLOCKED E5250A 440 Query UNTERMINATED after indefinite response Agilent E5250A 11 11 9 eve A E5250A ES2S0A ES250A E3250A Error Queue 3
101. ROUTe BIAS STATe p 5 1 ROUTe OPEN CARD card number card_number 0 ALL 1 2 3 4 ALL OUTPUT Hp5250 ROUT OPEN CARD ALL Agilent E5250A 11 7 41 4 ROUTe OPEN LIST ROUTe OPEN LIST p 5 1 ON ROUTe BIAS STATe p 7 30
102. Figure 2 1 b c 3 a b c 4 3 1 CAUTION
103. o bias statuns bias status biaschan list ViStatus VI FUNC hpe5250a biasChanList Q ViSession vi Vilnt16 bias disen Vilnt32 VI FAR biaschan list Vilnt32 VI FAR bias status vi hpe5250a_init bias_disen 0 1 biaschan list 3 ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 bi
104. closechan lst 0 0 100 ViStatus VI FUNC hpe5250a closeList V1iSession vi Vilnt32 VI FAR closechan list vi hpe5250a_init closechan list ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 8 12 Agilent E5250A 11 VXIplug amp play hpeS2S0a closeList Q closechan lst
105. 16 ViStatus VI FUNC hpe5250a cmdInt16 O ViSession vi ViString cmd str ViPInt16 result vi hpe5250a_init cmd str ES250A 236 result E5250A Agilent E5250A 11 8 15 VXTplug amp play hpeS2S0a cmdIn 32Arr Q E5250A E5250A result 32 ViStatus VI FUNC hpe5250a cmdInt32Arr Q ViSession vi ViString cmd str Vilnt32 size Vilnt32 VI FAR result ViPInt32 count vi hpe5250a_init cmd str E5250A 236 SiZe result 1 2147483647 result E5250A count result hpeS2S0a cmdIn 32 Q E5250A E5250A
106. Disconnect Kelvin cable from TVn terminal And disconnect a11 cables from output terminals Disconnect cable from TVn terminal And disconnect all cables From output terminadlS n 1 6 CONTINUE CANCEL 6 E5250A 4155 4156 SMU 7 CONTINUE Connect SMUm to TVn by Kelvin cable Connect SMUm to IVn by cable m SMUm 1 6 n IVn 1 6
107. E5252A 10x12 Matrix Switch E5252A 10x24 Matrix Switch E5252A 10x36 Matrix Switch E5252A 10x48 Matrix Switch E5252A 10x12 Matrix Switch ES2SSA E5255A II1 12 13 14 15 16 Channe Multiplexer E5255A 24 24 0 16 16 16 Channel Multiplexer E5255A 24 8x3 Channe Multiplexer No Card OUTPUT GHp5250j SYST CDEScription 1 ENTER GHp5250 AS Agilent E5250A 11 7 45 SPIN S YSTem CPON SYSlem CPON ALL
108. WAI OPC 1 7 4 Agilent E5250A 11 WR CLS CLS Error Queue p 7 49 OPC CLS OUTPUT GHp5250j CLS ESE 1 0 p 7 49 ESE enable number enable_number
109. 2 2 Agilent E5250A E5250A E5250A E5250A E5250A E5250A ES5250A
110. mode_status lt newline gt lt END gt 0 OFF 1 ON OUT OUT EN PUT PUT Hp5250 ROU G Hp5250 ROU TER 6Hp5250 A T BIAS STAT TkBTAS ST 1 2 3 4 ALL ON T 4 A 1 Agilent E5250A 11 7 31 ROUTe CLOSe CARD ROUTel CLOSe CARD channel_ist ROUTe CLOSe CARD card number card_number 0 1 2 3 4 channel list lt new11ne gt END gt 6 5 1 OUTPUT Hp5250 ROUT OPEN CARD ALL OUTPUT 6Hp5250 ROUT CLOS 10101 10202 OUTPUT GHp5250 ROUT CLOS CARD 1 ENTER Hp5250 AS A 10101 10202 7 32 Agilent E5250A 11
111. 0 1 Agilent E5250A 11 8 13 VXlIplug amp play hpeS2S0a cmd ES250A ViStatus VI FUNC hpe5250a cmd ViSession vi ViString cmd str vi hpe5250a_init cmd_str E5250A 256 hpeS2S0a cmdData OO E5250A ES5250A result ViStatus VI FUNC hpe5250a cmdData Q ViSession vi ViString cmd str Vilnt32 size ViChar VI FAR result vi hpe5250a init cmd str E5250A 2356 size result 2 32767 result E5250A hpeS2S0a cmdInt E5250A Int16 Int32 Imt16
112. Error Queue 5 B 100 Command error 101 Inyalid character 102 SyntaX error 103 Invalid separator 104 Data type error 105 GET not allowed 108 Parameter not allowed 11 4 Agilent E5250A 11 rR SC a
113. IEEE 488 2 7 4 SCPI Output Queue SRO OPO Agilent E5250A 11 7 49 RE NT FR E5250A Figu
114. ROUT BIAS CHAN DISA CARD card_no All ROUT BIAS CHAN DISA LIST channel list All ROUT BIAS STAT card_no state ALL OFF 5 ROUT COUP PORT card_no input_port_no ROUT COUP STAT cg77 7o state ALL OFF 6 ROUT CLOS channel_ list open all ROUT OPEN channel_list open all ROUT OPEN CARD cg77 no ALL channel_config NCON ACON rule FREE SROU sequence NSEQ BBM MBBR state ON 1 OFF 0 channel_list 5 p 1 cg7 7o ALL 0 1 4 input port no ROUT BIAS PORT 1 10 ROUT COUP PORT 1 3 5 7 9 6 6 Agilent E5250A 11
115. 12 7 2 Agilent E5250A 11 YK SYSTem CCONfig SYST CCON ROUTe BIAS PORT ROUT BIAS PORT BIAS PORT ES5250A card number ES5250A close_status close_status 1 close_status
116. Agilent 4155 4156 ES250A 4133 4136 ITBASIC Agilent 4155 4156 ES 2S0A IN RN 1 3 2 Ag
117. SP MUX M PARAM MES GPIB 4155 4156 Vitci Idlin 4155 4156 Gmmax GPIB Setunp Hpib sc 4155 4156 GPIB Hpib_addr 4155 4156 GPIB 17 Swm sc E5250A GPIB 7 Swm addr ES2S0A GPIB 22 4155 4156 Definition of measurement and stress setup files
118. DELETE SETUP 24 Open All INSERT Open All SETUP 24 CLEAR ATLL MORE MAIN MENU GOTO SETUP Input setup memory number to be connected gneer Current Setup Memory E3230A gnte
119. E3230A Set 230init 4155 4156 Param fileS 4133 4156 4 VTH Vth VTH 4155 4156 E3232 MES Meas OUTP ENTE vth Measurement UT GHp415x TRAC VTHY R GHp415x Vth Meas vth Test measurement data TEF V Eh lt Vth min OR Vth gt Vth max THEN Meas vth Reset Instrument OUTP UT Out str USING Imgl Test num Resu1t Vth min Vth Vth _ max Test_ comms Agilent E5250A 11 9 13
120. Figure 6 1 E3250A E5252A MOSEET to Instrument Source E5250A 1 E3232A 2 4 ES2S0A SMU 1 4 SMU 5 6 AUX ES2S2A 1 4 1 2 3 4 Agilent E5250A 11 6 13 10 Examp1e 20 30 TNTEGER Comp ete 40 DIM Channe1S 100 Creating Connection Channe1s 50 Gate Drain Substrate SourCe 60 Channe1S8 10101 10202 10303 1
121. ViStatus VI FUNC hpe5250a cmdInt ViSession vi ViString cmd str Vilnt32 value vi hpe3230a init cmd str E5250A 256 value 2147483647 2147483647 8 14 Agilent E5250A 11 VXIplug amp play hpeS2S0a cmdInt16Arr Q E5250A E5250A result 16 ViStatus VI FUNC hpe5250a cmdInt16Arr O ViSession vi ViString cmd str Vilnt32 size Vilnt16 VI FAR result ViPInt32 count vi hpe5250a_init cmd str E5250A 2356 SiZe result 1 2147483647 result E5250A count result hpeS2S0a cmdInt16 Q E5250A E5250A result
122. 160 Block data error 161 168 161 Invalid block data 168 Block data not allowed 170 Expression error 171 178 171 Invalid expression 178 Expression data not allowed 11 6 Agilent E5250A 11 Table 11 2 Ry KC SCPI E5250A 2XX Error Queue ss 4
123. IVin1 cable QO 3 BIAS 1 IV S3383 1 wn Me Vi b Vi b 2 1 in2 cable 3 1 in3 cable 4sws ml IVout1 IVout2 Block 3 OOOOOOOO6O Uni O OOOoOooooo OOO O gm 1 123456 78 9 10111213 141516 17 18 19 20 21 22 23 24 1 IVinl SMU1 2 IVin2 IVoutl Agilent E5250A 11 2 13 E5250A 3 IVin3 IVout2 4 DIP SW1 2 3 1 ON 1 2 4 OFF 0 5 1 p 2 8 24 ES325SA 1 2 1BIAS BNC
124. ROUTe BIAS STATe p 7 1 ES250A 6 6 5 12 H Agilent E5250A 11 Figure S 2 C Input 01 Bias Port e Input 02 Input 03 Input 10 Output Port we Open 1 Close Connect to Bias port Connect to Input 3 Connect to Input 1 Figure 5 2 INPUT 2 ON
125. STB 2 H HP BASIC Status SPOLL GHp5250 STB SPOLL 6 RQS STB 6 MSS Agilent E5250A 11 7 51 Table 7 3 SeS Ras RQS MSS 2 STB ES250A 0 0 1
126. 2x16 O 2x8 2x8 7 2x8 DUR 6 2 1 7 N slot 1 slot 2 slot3 CC slot 4 2x8 Multiplexer 2 2x16 Multiplexer 1 2x16 Multiplexer 2 5 23 Agilent E5250A 11 Table 5 9 IV 4 mq 0 2 2 1 1 3 SMU1 0 IV 01 01 24 2x48MUX BIAS 11 2 1 3 SMU1 0 IV 01 25 48 BIAS 11 3 1 SMU2 0 IV 02 01 08 4 BIAS 12 1 2x16MUX 2
127. 0 ES5252A ES255A ON OFF E3252A 1 10 E5255A 1 4 CHANGE CONFIG CARDn n 1 4 BIAS STATE BIAS PORT RETURN RETURN CARDn BIAS STATE ON OFF CARDn BIASPORT
128. 10 Example Using Couple Port 20 30 TNTEGER Complete 40 DIM Channe1 100 50 Substrate Gate Drain Source 60 Channe1 101 202 303 505 0 80 Put Instrument Initialize Routine here 90 100 ASSTGN GHp5250 TO 722 110 OUTPUT Hp5250 RST 120 OUTPUT Hp5250 ROUT FUNC ACON 130 OUTPUT Hp5250 ROUT CONN RULE ALL SROU 140 OUTPUT GHp5250 ROUT CONN SEO ALL BBM 40 ezzze 7 7s7 Channel 60 cgzze 7 ist 80 110 E5250A 120 130 140 Break Before Make Agilent E5250A 11 6 19 150 160 170 180 190 200 210 220 230 240 250 260 270 280 290 300 ae dd OO tg UTPUT Hp5250 ROUT TPUT Hp5250 ROUT GQHpb250 ROUT Hp5250j OPC R GHp5250 Complete UTPUT GeHp5250 RST COUP PORT ALL 3 5 COUP STAT ALL ON
129. 3002 3003 Card2 initialization fail E5250A 2 E 25SA DIP Card3 initialization fail ES250A 3 E 25SA DIP 3004 3011 Card4 initialization fail E5250A 4 E325SA DIP Bad couple port number 1 3 7 9 3012 Bad bias port number 1 10 11 12 Agilent E5250A 11 I ES250A
130. open_cardno 1 2 3 4 5 0 hpe5250a func hpeS2S0a openList openchan list 0 0 100 ViStatus VI FUNC hpe5250a_openList ViSession vi Vilnt32 VI FAR openchan list vi hpe5250a_init openchan jist ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101
131. 0 0 T BIAS CHAN DIS CARD ALL 10101 10101 10102 10201 10101 10201 Agilent E5250A 11 7 27 NOTE ROUTel BIAS PORT ROUIel BIAS PORT ES252A E5255A 1 10 6 1 RST E3252A 10 ROUTe BIAS PORT card number bias_ port
132. CANCEL ES250A E5255A BIAS BNC CONTINUE CANCEL 1 4 F 3 14 Agilent E5250A 11 NOTE Table 3 4
133. 3 ES233A BIAS BNC SCPI Table 3 2 DILAG DIAG ES525S0A NORMAL AUTO ALL Fail LED E5250A 3 6 Agilent E5250A 11 2 Table 3 2 SCPI SCPI DIAG TEST FRAM BXEC2 CONT DIAG T
134. ROUTe OPEN LTST G channel list channel_ list p 5 1 OUTPUT GHp5250 ROUT OPEN 10101 10202 ROUTel OPENI LISTI 0 1 0 1 ROUTe OPEN LIST G channel list channel_list p 5 1 open_status lt newline gt lt END gt 0 1 OUTPUT GHp5250 ROUT OPEN CARD ALL OUTPUT GHp5250 ROUT CLOS 10101 10202 OUTPUT GHp5250 ROUT OPEN 10101 10102 10201 10202 ENTER GeHp5250 AS A 07 gt 1 0 7 42 Agilent E5250A 11 s SYSTem SYSTem SYSTem BES3230A
135. E5252A ViStatus VI FUNC hpe5250a coupleState ViSession Vi VilInt16 couplestate cardno ViInt16 couple state vi hpe5250a_init couplestate cardno 1 2 3 4 5 0 hpe5250a func couple state 1 ON 0 OFF hpeS2S0a dcl E5250A DCL ES3250A ES250A ES250A ViStatus VI FUNC hpe5250a_dcl ViSession vi vi hpe5250a_init hpeS2S0a error message
136. 100 OUTPUT Hp5250j ROUT CLOS 10101 10202 110 Closes relays to create channels 10101 and 10202 Agilent E5250A 11 6 11 HP BASIC ES250A BE3230A 3 6 12 Agilent E5250A 11 Figure 6 1 E5252A E3250A
137. A Sh 2 12 32 W 16 W Agilent E5250A 11 24 E5250A A EX 24 3 BIAS 1 IV 1 24 1 BIAS 1 IV 1 96 1 BIAS 1 IV 4 E325SA 1 3 BIAS Figure 2 3 SMU INPUT 1 TIV 0 Q 1IV 1 Figure 2 3 24
138. OUTPUT GHp5250 ROUT CLOS 6 10101 10202 ROUTel CLOSel LIST egz7e s7 0 1 ROUTe CLOSe LTST channel list channel_list p 5 1 close_status lt newline gt lt END gt 1 0 OUTPUT Hp5250 ROUT CLOS 10101 10202 OUTPUT Hp5250 ROUT CLOS 10101 10102 10201 10202 ENTER GeHp5250 AS A 1 0 0 1 Agilent E5250A 11 7 33 SC Ra ER ER ROUTe CONNection RULE ROUTe CONNection RULE p 5 1 RST
139. p 5 1 ROUT FUNC NCON ROUT FUNC ACON 100 OUTPUT GHp5250 ROUT FUNC NCON 110 Sets E5250A to Normal channel configuration mode p 5 1 ROUT CONN RULE card no FREE ROUT CONN RULE cg79 zo SROU 100 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 110 Sets all cards to Free Connection rule Agilent E5250A 11 6 7 p 5 1 ROUT CONN SEO card_no NSEQ ROUT CONN SEO card_no BBM Break before Make ROUT CONN SEO card no MBBR Make before Break
140. 0 C 2 TIV 1 6 D 2 1 0 E 3 TIV 1 6 F 3 1 0 OUTPUT GHp5250 SYST CCON 1 ENTER GHp5250 AS ENTER AS USTNG 3X 6A BS FOR I 1 TO 6 C NUM BS 1 1 PRTNT BYTE No WIL WC NEXT I 7 44 Agilent E5250A 11 s lt SYSTem CDEScription SYSTem CDEScription SYSTem CDESCr1pt1on card number card_number 0 1 2 3 4 card description lt newline gt lt END gt ES252A
141. Agilent E5255A 24 8x3 Agilent 4155 4156 E E 23 C 5 C lt 60 RH NN 10 2 Agilent E5250A 11 001 501 5 C 40 C 40 C 70 C 5 80 RH 5 90 RH 65 C 0 2 000 m 6 500 0 15 240 m 30 000 ft CSA C22 2 No 1010 1 IEC61010 1 EMC
142. CONTINUE CANCEL 3 18 Agilent E5250A 11 8 5 4155 4156 SMU 4 ES250A 9 CONTINUE 4155 4156 REPORT CRT 4155 4156 LEAK TEST 10 REPORT CRT LEAK TEST MENU LEAK TEST
143. Po Vth Vth ES230A 4133 4156 BE3230A ES252A 1 10101 10202 10303 10404 2 3 4 4155 4156 B3232 MES 4153 4156 4155 4156 1H GET SMU SMU VNAME INAIME MODE FUNCTION Source Setup SMU1 Vd Id V CONST SMU2 Vg Ig V VAR1 0 5V50mV SMU3 Vs Ts COMMON CONST Common SMU4 Vsb Tsb V CONST NAME UNIT DEEFINITION SORTTd SORT Td GRAD DIFF SORTTd Vg VTH V GT1X BETA GL1G 2 Agilent E5250A 11 9 5 Vth
144. hpe5250a_opc_Q hpe250a_func hpe5250a connRuleSeq Agilent E5250A 11 8 5 VXTplug amp play hpe5230a biasPort hpe5230 biasChanCard hpe3230 biasChanList hpe5250a_biasState hpe3230a_biasChanList Q hpe3230a couplePort hpe5230a coupleState
145. 1 1 ES252A 4155 IV1 IV2 4 12 pA IV3 IV4 IVS IV6 1 01 nA 4156 IV1 IV2 1 14 pA IV3 IV4 IVS IV6 1 01 nA IV1 IV2 2 24 pA IV3 IV4 IVS IV6 2 02 nA E5255A 4155 IV1 IV6 4 12 pA 4156 IV1 IV6 1 14 pA Agilent E5250A 11 3 15 1 LEAK TEST Tnput Agilent 4155 4156 GPIB address defau1 817 2 4155S 4156 GPIB gnter 817 pgnter LEAK TEST MENU
146. WAY ROUTe COUPle PORT OUTPUT GHp5250 ROUT COUP PORT ALL 1 3 OUTPUT GHp5250 ROUT CLOS 10104 1 3 2 4 ROUT CLOS ROUTe COUPle PORT ES5252A 2 ROUTe COUPle PORT cg7 number card_number 0 1 2 3 4 port number port number lt new11ne gt END gt 1 3 7 9 OUTPUT GHp5250 ROUT COUPB PORT ALL 1 3 OUTPUT GHp5250 ROUT COUP PORT 1
147. Table 9 1 Agilent 4155 4156 Agilent 4284A LCR ES5252A ES250A Table 9 2 ES252 MBS ES5250A 4133 4156 4155 4136 Table 9 1 N ch MOSFET 1 Vth 4155 4156 1 4284A Agilent E5250A 11 9 3 Table 9 2 Vth Vth 1 1 4155 4156
148. VISA IO IO GPIB IO VXlplug amp play a E3230A Plug amp Play Driver b SETUPEXE lt install folder gt Winnt Hpe5250a lt install folder gt echo VXIPNPPATH hpe5230a bas hpe5230a c hpe5230a def hpe5230a fp hpe5230a GD hpe5230a h hpe5230a hlp readme txt DelsL1 isu Agilent E5250A 11 VXIplug amp play
149. INPUT 1 INPUT 3 Agilent E5250A 11 5 13 NOTE E5252A 2 SMU INPUT 1 2 2 OUTPUT 1 2 ROUTe COUPle PORT ON OFF ROUTe COUPle STATe p 7 1 6
150. SCPI Agilent E5250A 11 5 6 Agilent E5250A 11 HH Agilent B5250A E5252A E3255A E5250A E3232A E5255A 1 2 Agilent E5250A 11 Table 1 1 Figure 1 1 E5250A Agilent E5250A dc ES250A Agilent ES250A Table 1 1 4 10 48 2 96 ES3230A E5252A 10x12
151. Show_device 0 0 n n Show_param 0 Jdlin Gmmax Vtext Vtci 1 vl Setup for drawing saving data in main menu Save at last 0 Save at last 1 HCI 1 9 38 Agilent E5250A 11 10 Agilent E5250A ES5252A ES255A Agilent E5250A Agilent E5252A 10x12
152. VFP VFP HP BASIC WS HP BASIC WS Agilent 4284A LCR E3230A E5252A HP BASIC WS HP BASIC WS 3 E5252A Vth C ES255A HCI Agilent 4155 4156 ITBASIC ES250A 1 14 Agilent E5250A 11 E5250A
153. 4 Continue Device No XX can be used Device No XX shall not be used Idlin Gmmax Vtext Vtci Figure 9 7 GRAPHALIST EHAPHIES MEETIMH B5FEB17 11 PH 1H11
154. ES25SA GPIB GPIB WARNING CAUTION ES250A MI tk NOTE
155. WO OPC O OPC OPC 1 0 OPC OPC OPC CLS p 7 49 WAI p 7 14 1 OPC 1 lt newline gt lt END gt Output Queue 1 H Output Queue p 7 49
156. 4284A 4284A 006 1 kHz 1 MHz Cp G ES2S0A Agilent 16048D E BNC T Agilent 1250 2405 Agilent 16048D E ES2S0A CV1 CV2 16494A 2 Agilent 8121 1191 R L C
157. BIAS INPUT BNC BNC Eg 3 2 16 Agilent E5250A 11 E5250A GPIB GPIB IEEE Std 488 Agilent E5250A GPIB BE3230A OFF GPIB ADDRESS 0 30 GPIB E32S0A GPIB 22 GPIB GPIB E5250A GPIB GPIB 15
158. E MOSFET MOSFET HCI H HCI H 5 HH Idlin Gmmax Vtex SMU t Vtci 1 4155 4156 PARAM MES SMU VNAME INAME MODE FUNCTION Source Setup SMU1 VG 1G V VAR1 0 5V 20mV SMU3 VD ID V CONST 0 1 V SMU4 VB IB V CONST 0 V GNDU VS IS COMMON CONST Common Agilent E5250A 11 HCI
159. E3250A Must execute Init vfp setup before Connect vfp Init vfp setup Connect vfp 6 26 Agilent E5250A 11 NOTE 2 HP BASIC 1 0 5 pF CV lkHz 1MHz 1000 pF ES232A
160. ES255A 24 8x3 ES250A Agilent E5250A 11 1 3 E5250A Agilent E5250A Figure 1 1 2 4 LED LINE Local Self Test Remote Remote 3 1 LED ML Line E5250A
161. Remote GPIB System Fail Fail E3230A LED ES250A 1 4 Agilent E5250A 11 CAUTION Figure 1 2 E5250A Agilent E5250A Figure 1 2 E5250A 4 10
162. ViStatus VI FUNC hpe5250a testClear ViSession vi Vilnt16 framecard clear Vi hpe3230a init framecard clear 0 1 1 2 3 4 gt Wn 8 30 Agilent E5250A 11 VXIplug amp play hpeS2S0a testExec_Q E5250A 10
163. ES255A TFigure 4 1 DUT Shielding Ground B SMU Force Guard BIAS Bias Iine Bias line B A 4 4 2 DUT Ground Total 8 ea Agilent E5250A 11 4 5 Agilent E5250A E3230A
164. LOADSUB ALL FROM C COM 3 4 4133 4136 Vth E3232 MES 5 RUN 6 Figure 9 2 Figure 9 2 Vth Comment Vth amp C Meas Sample Program Test Time 30 Sep 1995 10 29 27 P F Min Meas Max Comment 1 P10 000E 002 18 255E 001 20 000E 001 MOSFET Vth Measurement 2 F 8 000E 12 2 164E 11 2 000E 11 Capacitanoce Measurement 9 10 Agilent E5250A 11 GPIB GPIB 4133 4156 4155 4156
165. Sch 16494E E3233A DUT DUT E5250A E5250A ES230A 4 2 Agilent E5250A 11 0
166. HCI 24 GNDU E 4 0 0 Vgstr 1 GNDU Agilent E5250A 11 Table 9 6 NOTE 4 ES2SSA 5 HCI 1 2 3 24 1 2 3 24 25 26 27 48 49 50 51 72 GNDU GNDU GNDU GNDU HCT 24 23 3
167. ViStatus VI FUNC hpe5250a cmdReal64Arr O ViSession vi ViString cmd str Vilnt32 size ViReal64 VI FAR result ViPInt32 count vi hpe5250a_init cmd_str E5250A 256 size result 1 2147483647 result E5250A count result Agilent E5250A 11 8 17 VXTplug amp play hpeS2S0a cmdReal64 Q ES5250A ES250A result 64 ViStatus VI FUNC hpe5250a cmdReal64 O ViSession vi ViString cmd str ViPReal64 result vi hpe5250a_init cmd str ES250A 236 result E5250A hpeS2S0a cmdString Q E5250A E5250A result
168. 140 Character data error 141 148 Agilent E5250A 11 11 5 5 EC 141 Invalid character data 144 Character data too long 12 148 Character data not allowed 150 String data error 151 158 151 Invalid string data 158 String data not allowed
169. Hi gt ge o o 4155 4156 SMU 1 SMU INPUT 1 OUTPUT 1 MOSFET SMU 2 SMU INPUT 2 OUTPUT 2 MOSFET SMU 3 SMU INPUT 3 OUTPUT 3 MOSFET SMU 4 SMU INPUT 4 OUTPUT 4 MOSFET 4284A Hp Hc AUX INPUT CV1 OUTPUT 5 H Lp Lc AUX INPUT CV2 OUTPUT 6 L 9 8 Agilent E5250A 11 Vth 1 GPIB 4135 74136 717 4284A 724 ES3230A 722 ON HP BASIC 4155 4156 SYSTEM MISCELLANEOUS 4133 4156 NOT SYSTEM CONTROLLER HP BASIC
170. SCPI p 11 8 11 10 Agilent E5250A 11 Table 11 S ai E3230A Ke 2000 Invalid card number 2001 Invalid channel number ES252A ES2S5A 2011 Empty channel list E5250A 2006 Command not supported on this card 2009 Too many channels in channel list
171. 1 ROUTe CONNection RULE card number rule card_number 0 ALL 1 2 3 4 ALL rule FREE SROUte OUTPUT GHp5250 ROUT CONN RULE ALL SROU ROUTel CONNection RULE ROUTe CONNection RULE card number card_number 0 1 2 3 4 rule_status new1 1ne gt END gt FREE SROU OUTPUT GHp5250 ROUT CONN RULE ALL SROU OUTPUT 6GHp5250 ROUT CONN RULE 1 ENTER 6GHp5250 AS A SROU 7 34 Agilent E5250A 11 ROUTe CONNection SEQuence ROUTe l CONNection SEQuence
172. 12 12 13 24 24 Open All gnter INSERT SETUP Input setup memory number to be nserted ENTER to cance1 gnter 12 12 23 12 Open Al 24 gnter CLEAR SETUP
173. 2 Figure 2 4 ES 1IV 1 SMU INPUT 1 TIV 0 Figure 2 4 24 1 BIAS 1 1V 2 vin2 cable 3 IVin3 cable sws pu IVin1 cable Block 1 Block 2 Block 3 BIASin2 BIASin3 OoOoooo O oOGOOO6 4 5 123456 78 ee BIASout1 BIASout2 1 IVinl SMU1 2 14 Agilent E5250A 11 Figure 2 5 E5250A IVin2 IVoutl IVin3 IVout2 DIP SW1 2 3 1 ON 1 2 4 OFF 0 BIASoutl BIASin2 BIASout2 BIASin3
174. ES232A A B Ground 16494A 001 1 5 m 16494A 002 3 m 16494B 001 1 5 m 16494B 002 3 m Agilent E5250A 11 4 19 E5250A Table 4 4 1 3 7 9 11 2 1 1 Force 2 Sense 3 3 Force 4 Sense 5 5 Force 6 Sense 7 7 Force 8 Sense 9 9 Force 10 Sense 11 11 Force 12 Sense Figure 4 9 ES252A Agilent 16494B Figure
175. RR TF eR ROUTe BIAS STATe ROUTe BIAS STATe ON OFF p 5 1 ON ROUTe BIAS CHANnel ENABle CARD p 7 25 ROUTe BIAS CHANnel ENABle LIST p 7 26 ROUTe BIAS PORT p 7 28 ON ROUTOPEN ROUT CLOSE
176. Table 2 1 Table 2 2 DIP SW3 7 IVout3 connector IVin3 cable Resistor holder 3 BIASin3 To BIAS INPUT 52 terminal i To BIAS INPUT 53 Agilent E5250A 11 A EX ES250A Table 2 1 IVin IVout DIP BIAS BIASout 0 Block 1 holder 1 BIASoutl TVin1 TVout1 DIP SW1 Block 2 holder 2 BIASin2 BIASout2 TVin2 TVout2 DIP SW2 Block 3 holder 3 BIASin3 IVin3 IVout3 DIP SW3 Table 2 2 Agilent ES2SSA IVin BIASin BIASout 1 SMU1 BIAS INPUT 51 0O 2 SMU2 BIAS INPUT 52 0O 3 SMU3 BIAS INPUT 53 0O IV _ TIV Figure 2 2 BIAS IVin DIP
177. oO 8 26 Agilent E5250A 11 VXIplug amp play hpeS2S0a_openList Q openchan list open status 0 0 100 open status openchan list ViStatus VI FUNC hpe5250a openList Q ViSession vi Vilnt32 VI FAR openchan list ViInt32 VI FAR open status vi openchan list open status hpeS250a init
178. LED STOP BNC H Agilent 16435A 1 Agilent 16493J 1 1 1634SA BNC 16435A BNC 2 16493 1 1643SA Agilent E5250A 11 4 11 ni H DUT DUT
179. Vdstr V Drain stress voltage Shou1d be determined by Id vd charact eristics Vdstr 5 Drain stress voltage Vdstr RE STORE Agilent E5250A 11 9 29 HCI 1 SP MUX RUN Enter directory name for saving data default test data 2 Enter Enter test data Isub Vg 4153 4156 Vgstr Figure 9
180. 1 RETURN Table 5 10 3 OPEN ALL DISABLE ROW ENABLE ROW MORE 1 RETURN Table 5 10 Agilent E5250A 11 5 41 VEP SAVE LOAD
181. 16 8 10 enable_number lt newline gt lt END gt 8 OR 6 MSS p 7 49 10 4 4 OUTPUT GHp5250 SRE 48 10 OUTPUT GHp5250 SRE H30 16 OUTPUT GHp5250 SRE O60 8 OUTPUT GHp5250 SRE B110000 Query OUTPUT Hp52507 SRE ENTER Hp5250 A Agilent E52
182. 10 Fail LED 10 Fail LED Local Self Test Agilent E5250A 11 3 13 1 CARDn RELAY n 1 4 4155 4156 Attach the relay test adapter on input termina and open all output of slot n Attach the relay test adapter and the BNC short cap to E5250A E5255A input And open a11 output of slot n n 1 4 CONTINUE
183. 4133 4156 Figure 9 5 9 28 Agilent E5250A 11 ho HCI gt Figure 9 5 Id Vd GRAPHILIST GRAPHI GS MEDI UM docTos O02 286PFPM 1d Wd Measuremenl MARKER HAREKERI 5 4 WV mm 1 ON A MAREER 10 0m ML NT haAX 1NTER 1 n POLATE FF A DI RECT MARKEHJ CURSOR tdiv MARKER SKIP UTO ANALY SS CURSOR nn VH TV snn m fdiw GFF MARKE RS LI NE GL1 NRN DISPLAY SWEEP TI Ml N GONST CURSOR SETUF SETUP SETUF SETUF 10 Id Vd Vdstr 0 3 V Vdstr SP MUX
184. ViStatus VI FUNC hpe5250a testExec Q ViSession vi Vilnt16 framecard exec ViPInt16 exec result vi hpe5250a_init framecard_exec 1 1 2 2 3 3 4 4 5 6 7 0 exec result hpeS2S0a timeOut LO ViStatus VI FUNC hpe5230a timeOut ViSession vi Vilnt32 timeOut Vi hpe3230a init timeOut 0 2147483647 2 Agilent E5250A 11 8 31 VXIplug amp play hpeS2S0a timeOut Q ViStatus VI FUNC hpe5250a tmeOut_Q
185. 10 Fail LED 10 Fail LED Test 1 DLocal Self Agilent E5250A 11 3 7 HP BASIC 2 4 10 Self Test by External Controller 20 30 REAL A 40 ASSIGN GHp5250 TO 722 50 OUTPUT GHp5250j DTAG TEST FRAM CLE CONT 60 OUTPUT GHp5250 DTAG TEST FRAM CLE FPAN 70 OUTPUT GHp5250j DTAG TEST CARD CLE ALL 80 DISP Press Continue to go to Contro11er Test 90 PAUSE 100 Controller Test 110 OUTPUT Hp5250 DIAG TEST FRAM EXEC CONT 120 ENTER Hp5250 A 130 IF A 0 THEN GOTO 1
186. Vih VFP NE RA Po Vth Imit setting Hpib_sc GPIB 7 Ad41Sx 4153 4156 GPIB 17 Ad4284 4284A GPIB 24 Ad5250 E5250A GPIB 22 Init setting Figure 9 2 Usercomm Vth C Meas Sample Program Test num 0 0 1 1 Agilent E5250A 11 9 11 4155 4156
187. 1 4284A R L C R 1kHz 1MHz A B L SERIES A BE C PARALLEL A C a Figure 6 4 b 1 c B F A E L B D A C L Agilent E5250A 11 6 29 Figure 6 4 2 R ohm L H C F 1 m 1420 High 1430 Low 1440 High 1430 Low
188. 11 6 23 VFP 10 Example for using VFP Data Upload Library 20 30 COM Vfp com data Mat48 datas 14000 40 DIM CommentS 20 50 Address 5250 722 E5250A GPIB Address 722 60 Setup _num 1 VFP Setup Memory Numbper 1 70 80 OUTPUT Address 5250 RST 90 100 CALL Load vfp data Address 5250 MAT48 Mat48 data 110 CALL Tnit vfp setup Mat48 datas 120 130 DISP SETUP IN PROGRESS SETUP NO Setup num 140 CALL Connect vfp Mat48 data Setup num 150 160 CommentS FNGet vfp commentS Mat48 data S Setup num 170 180 DTSP SETUP WAS COMPLETED SETUP COMMENT CommentS 190 200 END 30 Setup_datag Mat48 data 40 FNGet vfp comment Comment 100 MAT48 110 E3 250A 140
189. 26 YEP SS 5 27 AS 51 UI PO KRH 5 28 VEP EE OR EE 5 28 2 29 2 30 Ms 2 WE 5 32 BE 5 34 5 42 SGPE DE A 6 3 NODE 6 3 R AS658 6 4 ES 6 5 6 7 6 0 6 7 Agilent E5250A 11 3 0 EE 6 8 RSS RR 6 8 2 2202 NeB 0 PU 66Y DRY 2PSSeS 6 10 Ke 6 11 LT TBR Os RSS SE EDIE SE 3 6 12 e 0 252M DO2680Pa2O063228EY2RPP 6 13 2 LSE 6 15 55 6 18 uo bys nee ig a ye 6 21 MRP FT Re TA TE 6 21 Load Yip datd no SC EE GE EE 6 22 Initvip setUD TR SR 6 22 COMNECEVID SS SE 6 23 ENGet Vib SOMMen tt RR EC EE 6 23 LTS EN 6 24
190. ES3230A E3230A Agilent 16495 Installation Guide ES2S2A 16495F 16495F 001 TRIAX 12 INTLK 1 GNDU TRIAX 1 INTLK 1649SF 002 TRIAX 12 INTLK 1 GNDU 1 1 16495G 16495G 001 TRIAX 24 INTLK 1 GNDU TRIAX 1
191. ID SYSTem SYSTem CCONftig card number CDEScription card number CPON card_number ALL CTYPe card number ERRor VERSion card_number 0 1121314 Agilent E5250A 11 7 43 SYSTem CCONfig SYSTem CCONfig E5250A SYSTem CCONFig card number card_number 1 2 3 4 card_configuration new11ne gt END gt ES5252A 0 E5255A 164BCDEF 4 8 A 1 TIV 1 6 B 1 1
192. 4155 4156 Vth Init setting Figure 9 2 GPIB Ad prn GPIB 1 Prn enab 0 1 0 ENTER Tmmit instrument CALL Ca1415x DISP Agilent 4155 E 4156 Ca1ibration Completed c ENTER Meas vth Save Measurement Data OUTPUT GHp415x OUTPUT Hp415x O ENT
193. hpeS230a compenC ViStatus VI FUNC hpe5250a selectCompenFile ViSession Vi ViString file name OY 1 6 27 vi hpe5230a init file name NULL DATA0S 06 DATA07 08 E5250A CAUTION R Do not add or delete REVISION Change the value for R L C of DATAO5 06 07 or 08 C Compensation coefficient data table EVISION A 03 00 R ohm L H CF DATA00 74 65E 3 140 00E 9 58 44E 12 DATAO1 75 41E 3 90 00E 9 67 13E 12 DATA02 231 41E 3 450 00E 9 178 85E 12 D
194. p 5 26 CAUTION VFP HP BASIC VFP VFP VFP HP BASIC 4 Load vfp data Init vfp setup Connect vfp FNGet vfp comment Agilent E5250A 11 6 21 Load vfp_data VFP HP BASIC 24 E3230A Load vfFp data Address 5250 LOAD FILE Setup data Address 5250 ES5230A GP
195. 1 2 3 4 ROUT COUP STAT card number state ON OFF BE3232A card_number 0 ALL 1 2 3 4 ALL state ONor1 ON OFFor0 OFF ROUT COUP STAT card number 0 OFF 1 ON card_number 0 1 2 3 4 ROUT FUNC channel config Cg7776 co777g ACON NCON ROUT FUNC ACON NCON ROUT OPEN CARD card number card_number 0 ATr 1 2 3 4 Ari Agilent E5250A 1
196. 4 16 MAV Message Available summary message 5 32 ESB Event Status Bit 6 64 MSS Master Summary Status 7 128 OUTPUT Hp5250 STB ENTER 6Hp5250 A Agilent E5250A 11 7 13 TST9 TST E5250A RST TST test result lt newline gt lt END gt 1 0 OUTPUT GHp5250 TST ENTER 6Hp5250 A WAI OPC 1 OPC p 7 9 WAT OUTPUT Hp5250 MAT 7 14 Agilent E5250A 11 OK DIAGnostc DIAGnostic DIAGnosttc NOTE DIAGnostic
197. To E5255A Connector Plate Agilent E5250A 11 4 21 Agilent 4155 4156 Agilent 4142B DC Agilent E5270 a DN ER RE SMU SMU FORCE SENSE Table 4 6 E5250A 415374156 4142B ES270 900 pF SMU ES250A E5230A
198. S Agilent E5250A 11 1 1 5 3 0 m 0 0 SI 8 19 VXTplug amp play hpeS2S0a connRuleSeq ViStatus VI FUNC hpe5250a connRuleSeq ViSession vi Vilnt16 cardno ruleseq ViInt16 rule ViInt16 sequence vi hpe5250a init cardno ruleseqd 1 2 3 4 5 0 hpe5250a func 0 1 0 NSEQ No sequence 1 BBM Break before make 2 MBBR Make before break rule sequence 8 20 Agilent E5250A 11 VXlIplug amp play hpeS2S0a couplePort
199. coupleport _ cardno 1 2 3 4 5 0 hpe5250a func portl 1 1 2 0 1 2 port3 1 3 4 0 3 4 Port 1 6 0 5 6 port7 1 7 8 0 7 8 port9 1 9 10 0 9 10 Agilent E5250A 11 8 21 VXlIplug amp play hpeS2S0a coupleState
200. BBM 2 3 Make Before Break 1 MBBR 2 3 No Sequence 1 NSEO 2 Agilent E5250A 11 5 11 NOTE ES23SSA Break Before Make BIAS INPUT ES3252A Es250A INPUT 1 10 ON
201. SMU1 1 2 6 2 8 3 BNC 1 BIAS INPUT 51 BIAS INPUT 52 4 BNC BIAS INPUT 51 4 BIAS INPUT 53 3 BIAS INPUT 51 3 BIAS INPUT 53 2 BIAS INPUT 51 2 BIAS INPUT 53 1 4 BIAS INPUT 53 BIAS 96 1 BIAS 1 IV BNC open caps 3 BNC cables 4 BIAS INPUT 51 slot number BNC cable from Bias Source
202. 16493H 1 GNDU E5250 60044 1 TRIAX DUAL TRIAX 1 TRIAX DUAL TRIAX ES3230A Figure 4 7 TRIAX DUAL TRIAX SMU SMU INPUT 1 2 3 4 6 2 GNDU GNDU TRIAX DUAL TRIAX Agilent E5250A 11 4 17 ES230A Figure 4 7 GNDU TRIAX DUAL TRIAX 9 ro Agilent E5250A SMU INPUT AUX TRIAX DUAL TRIAX RR ae Adapter se 1 3 SY hh 6 A KO To SMU From GND Agilent 16493H Cable SMU INPUT E3230A SMU SMU INPUT 1 3 35 Force
203. SCPI Agilent E5250A SCPI HP BASIC SCPI HP BASIC SCPI SCPI ROUT CONN RULE ROUT CONN 1 RULE 2 ROUT CONN RULE ALL FREE SEQ ALL BBM 2 ROUT CONN RULE ALL FREE ROUT CONN SEQ ALL BBM Agilent E5250A
204. SYST ERR SYST VERS ES250A SCPI 12 8 Agilent E5250A 11
205. 1 BNC BIAS INPUT 52 53 BIAS INPUT 51 BIAS BIAS INPUT BIAS INPUT BIAS INPUT BIAS INPUT BNC BNC BIAS BIAS INPUT BIASin out Figure 2 5 BNC
206. 11 7 17 NOTE DIAGnostic TEST FRAMe EXECute DIAGnostic TEST ERAIMel EXECute RST DLocal Self Test 10 DTAGnostic TEST FRAMe EXECute CONTro11er FPANe1 CONTroller FPANel test result lt newline gt lt END gt 1 0 OUTPUT GHp5250 DIAG TEST FRAM CONT 7 18 Agilent E5250A 11 kk DIAGnostic TEST FRAMe STATe DIAGnostic TEST FRAMe STATe
207. 16494A 001 1 5m 16494A Agilent E5250A 11 6 27 ES250A HP BASIC Agilent 4284A LCR 4284A Ccompen 5250 Freg 1 L2 h L2 1 3 h L3 1 C m G m C co G o Freq Hz 1000 Hz 1000000 Hz 1 MHz L1
208. 59 a2 EE3 Pi 4 R1 5 a gt 4 6 Agilent E5250A 11 63 5 Table 4 2 1252 1419 6 3101 0302 3101 3241 1450 0641 LED Vp 2 1V lp 10 mA 8150 5680 24 AWG 600 V 150 C E5252A 1250 2457 i 8121 1191 E5255A 1251 2367 1251 0179 1 8 0380 3070 1 2 2260 0002 1 2 2190 0913 1 2 8121 1191 Agilent E5250A 11 4 7 Figure 4 2 WARNING
209. result 32 ViStatus VI FUNC hpe5250a cmdInt32_O ViSession vi ViString cmd str ViPInt32 result vi hpe5250a_init cmd str ES250A 236 result E5250A 8 16 Agilent E5250A 11 VXIplug amp play hpeS2S0a cmdReal E5250A Real32 Real64 Real32 ViStatus VI FUNC hpe5250a cmdReal ViSession vi ViString cmd str ViReal64 value vi hpe5250a_init cmd str ES250A 236 value 1E 300 1E 300 hpeS2S0a cmdReal64Arr Q E5250A E5250A result 64
210. ON 1 6 16 Agilent E5250A 11 160 170 Put Bias Souroe Control Routine here 180 190 OUTPUT GHp5250 ROUT CLOS gChanne1 200 OUTPUT Hp5250 OPBC 210 ENTER GHp5250 Comp1lete 220 230 Put Measurement Routine here 240 250 OUTPUT GHp5250j ROUT BTAS STAT ALL OFF 260 OUTPUT GHp5250 ROUT OPEN CARD ALL 270 OUTPUT GHp5250j OPC 280 ENTER GHp5250 Complete 290 300 OUTPUT G Hp5250 RST 310 320 END 170 190 IV 200 210 230 250 OFF 260 280 300 ES250A Agilent E5250A 11 6 17
211. Table 7 2 SYST CPON BBM Break Before Make OFF E3232A 10 E5255A OFF SYSTem CPON card_number card_number 0 ALL 1 2 3 4 ALL OUTPUT Hp5250 SYST CPON ALL 7 46 Agilent E5250A 11 WAY SYSTem CTYPe 2 SYSTem CTYPe ID SYSTem CTYPe 2 card number card_number 0 1 2 3 4 HEWLETT PACKARD model 0 revision lt newline gt lt END gt model E5252A E5255A revision A 01 00
212. 11 6 3 7 SCPI HP BASIC 1 ASSIGN ES2S0A IO 7 B3250A QPIB 22 10 ASSTGN Hp5250 TO 722 2 E5250A SCPI OUTPUT 3 E5250A ENTER 10 REAL Complete 20 30 ASSTGN eHp5250 TO 722 40 50 OUTPUT Hp5250 RST 60 70 OUTPUT Hp5250 ROUT FUNC NCON 80 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 90 OUTPUT G Hp5250j ROUT CONN SEO ALL BBM 100 OUTPUT GHp5250 ROUT CLOS 10101 10202 110 120 OUTPUT GHp5250 OPC 130 ENTER Hp5250 Complete 140 150 END 10 Complete 30 E5250A LO 50 ES250A 70 ES250A 80 FREE 90
213. 16494A m L2 h DUT High m 0 L2 1 DUT Low m 0 L3 h DUT High m 0 L3 1 DUT Low m 0 Cm 4284A F Gm 4284A S Ce F G c S 6 28 Agilent E5250A 11
214. 3 4155 4156 1 4155 4156 2 E5250A OFF IBVGMES HCI IGLEAK MES IDLEAK MES PARAM MES PARAM MES Id Vg MOSFET 5 H HCI 3 MOSFET R Tab F le 9 6 1
215. 4133 4156 E5250A SELF TEST MENU CARDI 1 RELAY CARD2 2 RELAY CARD3 3 RELAY CARD4 4 RELAY CONTROLLER FRONTPANEL MAIN MENU 4135 4156 P F N Agilent E5250A Test Utility SELE TEST MENU CARD1 RELAY CARD2 RELAY CARD3 RELAY CARD4 RELAY CONTROTLTLER FRONT PANEE MATN MENU P indiocates test was passed F indioates test was failed tart Slotl E5255A Relay Test tart Slot2 E5255A Relay Test tart Slot3 E5
216. INTLK 16495G 002 TRIAX 24 INTLK 1 GNDU 1 ES2SSA 16495C Agilent 16494D 8 6 INTLK 1 GNDU 1 1649SD Agilent 16494D 8 12 INTLK 1 GNDU 1 Agilent E5250A 11 16495E
217. VFP Cannot configure for AUTO Normal mode used File name is wrong Instrument at address XXX is not E5250A GPIB XXX E5250A E5250A GPIB YY Load vfp data 44 ess 5250 File data is not VFP format or is broken VFP GPIB address connection or firmware is bad ES250A GPIB GPIB
218. 1 lt C 2 Me 1 4 1 3 1 E52352A 1 3 3 1 36 0 1 2 E5252A p 5 16 E3235A p 3 20 Agilent E5250A 11 5 9 CAUTION 1 ROUTe CONNection RULEB p
219. 4 24 3 32 2 48 1 96 Figure 1 5 ES25SA BIAS Imput dc ac 2x8 P BNC IV Input NE SMU INPUT SMU1 SMU6 DIP SMU INPUT DUT BIAS IV i TO p 2 1 0 10 SPP PE 3 1 2kO 10 3 22kO 10
220. p 5 1 ROUTe CONNection RULE p 7 34 RST Break before make ROUTe CONNection SEOuenoe cg7 number sequence card_number 0 ALL 1 2 3 4 ALL segquence NSEQ BBM MBBR OUTPUT GHp5250 ROUT CONN SEO ALL MBBR ROUTHel CONNection SEOuence ROUTe CONNection SEOuenoe card number card_number 0 1 2 3 4 Sequence_status lt newline gt lt END gt NSEQ BBM MBBR OUTPUT Hp5250 ROUT CONN SEQ ALL MBBR OUTPUT Hp5250 ROUT
221. TBASIC E3250A Table 3 1 Agilent 4155 4156 1 10833A B C GPIB 1 ES230 17003 1 E5250A ES250A 301 ES230 60002 1 1250 0929 BNC
222. Tnput Bias Port Number gnter 1 10 gnter BIAS STATE ON OFF or MAIN MENU Changing mode will clear all setup memory OK CHANGE MODE CANCEL Agilent E5250A 11
223. hpe3230a closeList hpe5230a_openList hpe5250a_openCard hpe5230a closeList Q hpe5250a openList Q hpe5230a closeCard Q C G C G hpe5250a_compenC C G hpe3250a selectCompenFile hpe5250a testExec Q hpe5250a testClear 8 6 Agilent E5250A 11 VXIplug amp play R hpe5250a cmd hpe5250a cmdInt hpe5250a cmdReal
224. MODIFY SETUP MORE MAIN MENU Figure S 11 SETUP MEMORY MENU Agilent E5250A Virtual Front Panel Utility SETUP MEMORY MENU Current Setup Memory 1 Setup Comment Setup Comment 1 Open All 13 Open All 2 MOSFET 1 14 Open All 3 MOSFET 2 15 Open All 4 MOSFET 3 16 Open All 5 MOS CAP 1 17 Open All 6 MOS CAP 2 18 Open A 11 7 MOS CAP 3 19 Open All 8 Open All 20 Open All 9 Open A11 21 Open All 10 Open All 22 Open All 11 Open All 23 Open All 12 Open All 24 Open All Select desired softkey 5 34 Agilent E5250A 11 VFP CLEAR SETUP COPY SETUP
225. NE RE 6 25 TART EE DR 6 26 8 6 27 1 2 2 6 28 6 29 TVET TN A I RR 6 31 EE I 6 32 TI RI RR 6 32 7 PVR I 7 4 DIAGhostic fT KA DRS Ee Sa 7 15 ROUeE TR TD 7 20 SY STemMmk RL SLT NN 7 43 4 Agilent E5250A 11 10 11 12 5 7 49 7 51 7 53 7 54 7 55 Output Queue is 7 56 VXlplug amp play 0 8 3 IR VL RTE SE 8 4 RA TT AT SIS AE EE 8 5 Vt SR RE 9 3 1 9 3 LEARHIETPSD PB 3 9 7 02 2 eeP 2 RS SRES 9 9 0200 2 SB 9 11 HG6T 9 17 A te 9 17 9 23 ES 9 25 9 0 2 2 9 28 ERO 9 36
226. ROUTel BIAS STATe p 7 30 RST ROUTe BTAS CHANne1 DTSab1e LTST Gchannel list channel 57 channel list p 1 egzze 7s7 OUTPUT 6Hp5250 ROUT BTAS CHAN DTS 610301 10402 1 1 2 Agilent E5250A 11 7 23 ROUTe BIAS CHANnel DISable LIST ROUTel BIAS CHANnel DISablel LISTI channel_list
227. T CLOS sgChanne18 t Measurement Routine here GHp5250 ROUT OPEN CARD ALL G Hp5250 OPBC GHp5250 Complete 150 SMU 3 4 SMU 5 6 160 ON 180 Channel 190 200 220 240 260 280 E5250A 6 20 Agilent E5250A 11 VFP VFP VFP VFP
228. Vi hpe5250a init errstr E5250A 1 ESR_OPC 2 ESR ROL 4 ESR QYE ERROR 8 ESR DEVICE DEPENDENT ERROR 16 ESR_EXECUTION ERROR 32 ESR_ COMMAND ERROR 64 BSR_URO 128 ESR PON BSR_MULTI EVENT hpeS2S0a_func ViStatus VI FUNC hpe5250a func ViSession vi ViInt16 channel config vi hpe5250a_init channel config 0 1 sr 8 24 Agilent E5250A 11 VXlIplug amp play hpeS2S0a_init E5250A ES250A E5250A vyi VI NULL ViStatus VI FUNC hpe 230a init ViRsrc InstrDesc ViBoolean id query ViBoolean do reset ViPSession vi InstrDesc id query do_reset
229. XX Table 9 7 ES250A 1 ES255A 24 8x3 3 4155 4156 1 41301 SMU PGU 1 16494A 001 1 002 1 5m 3m 16494A 003 80 cm 3 16494D 001 8ch 9 002 1 5 m 3m 16495D 1 10833A B C GPIB 3 E5250 17002 ES5250A 1 3 BNC 3 3 5 a 9 22 Agilent E5250A 11 5 HCI
230. card_number 0 ALL 1 2 3 4 ALL gs po77 1 10 ROUT BTAS PORT card_ number E3232A card_number 0 1 2 3 4 12 4 Agilent E5250A 11 SCPI ROUT BTAS STAT card number state ROUT BTAS STAT card_number ON OFF card_number 0 arr 1 2 3 4 Ari state ON or 1 ON OFf or 0 OFF 0 OFF 1 ON card_number 0 1 2 3 4 ROUT CLOS CARD card number c gz7e7 77s
231. 11 5 7 Table 5 2 a 1 1 2 2 3 3 4 4 0 10101 10102 10103 10101 10102 10103 10112 10202 10112 10202 11010 20102 11010 20102 10101 10103 10101 10102 10103 10112 10202 10112 10201 10202 11012 20102 11012 20101 20102 2 NOTE
232. SMU INPUT SMU INPUT 6 Agilent 4155 4156 dc SMU INPUT 1 SMU INPUT 2 SMU INPUT 3 SMU INPUT 4 SMU INPUT 5 SMU INPUT 6 AUX INPUT AUX INPUT BNC 4 CV1 CV2 HF1 HF2 3200 Vdc 1 Adc 300 Vdc 1 Adc E5250A NN
233. CS80 702 1 MST CS80 702 1 SP MAT GET PROG P MAT GET SP MAT RE STORE P_MAT C COMPEN GET PROG C COM GET C_COMPEN RE STORE C_COM p 6 27 Agilent E5250A 11 9 9 Vth 1 P MAT LOAD LOAD PP _MAT 2 C COM LOADSUB P MAT
234. National Instruments Corporation NOTE Agilent Technologies Inc IBC 61010 1 INSTALLATION CATEGORIY II INSTALLATION CATEGORIY I Agi POLLUTION DEGREE 2 lent E5250A INDOOR USE Safety Class 1 AC In
235. SMUS HF1 CV1 7 SMU6 HF2 CV2 7 05 07 09 06 08 10 1 05 07 09 5 16 Agilent E5250A 11 E5252A Figure S 4 CN CN CN CN CN CN CN CN ba NN 1 CO re 2 me ee se es Nl lo wl lol I oO OO a ol lo ol lol lo ol lo CC a gt oo gt oo gt 8 lal IS i leo ep CO CO oO oO oO CO oO S 8 NN CO CO ep re NN Te CO EE 0 CV1 CV2 Inp
236. Xaxis Ylaxis Y2axis NAME Vg SORTId GRAD SCALE LINEAR LINEAR LINEAR MIN 0V 0 0 MAX SV 200 m 80 m DATA VARIAVLES VTH BETA El TANGENT 1ine on Y1 at a point where GRAD MAX GRAD E2 RKER At a point where GRAD MAX GRAD terpolate OEF E32 428 9 6 E3230A 4284A S0A E5252A 1 10905 11006 2 3 4 4A 100 kHz 0 03 V Cp G Agilent E5250A 11 Table 9 3 Tie TTT Vth E5250A p 4 1 Figure 9 1 Table 9 4 ES5250A
237. 109 Missing parameter 110 Command header error 111 114 111 Header separator error 112 Program mnemonic too long 12 113 Undefined header 120 Numeric data error 121 128 121 Invalid character in number 123 Exponent too large 32000 124 Too many digits 10 255 128 Numeric data not allowed 138 Suffix not allowed ES250A
238. 2 3 4 6 5 4 Agilent E5250A 11 Agilent E5250A HP BASIC p 9 1 VEP VEP VFP Agilent 4155 4
239. 960 LV 0 5 x Iout V 780 LV 0 5 x Iout V MPSMU 1nA 3pA 0 2 x Vout pA 3pA 0 2 x Vout pA 10 nA 7pA 0 2 x Vout pA SpA 0 2 x Vout pA 100 nA 50pA 0 4 x Vout pA 30pA 0 4 x Vout pA Agilent E5250A 11 10 9 Agilent 4155 4156 4156 HRSMU 2V 500 LV 0 5 x Iout V 280 LV 0 5 x Iout V HRSMU 10 pA 0 4 pA 0 2 x Vout pA 0 1 pA 0 2 x Vout pA 100 pA 0 4 pA 0 2 x Vout pA 0 1 pA 0 2 x Vout pA 1 nA 0 7pA 0 2 x Vout pA 0 5pA 0 2 x Vout pA 10 nA 4pA 0 2 x Vout pA 2pA 0 2 x Vout pA 100 nA 40pA 0 3 x Vout pA 20 pA 0 3 x Vout pA 10 10 Agilent E5250A 11 11 by ii
240. Agilent 16494B Agilent 16494C 4142B 1 5 80 RH 5 90 RH 65 CC Agilent 16494E 8 5 C 40 C 50 C 200 C 40 C 70 C 5 80 RH 5 90 RH 65 C Agilent E5250A 11 Agilent 4155 4156 Agilent 41SS 41S6 Agilent 4155 4156 ES230A I V Iout A Vout V 41SS MPSMU 2V
241. ES250A ES2S0A 2 2 Agilent E5250A 11 2 3 Agilent E5250A p 3 1 Agilent ES250A
242. Output gt 6 Made from Block 3 of Card in Slot 3 BIAS Input 15 1501 1502 1503 1507 1508 IV Input 0501H0502 H0503 0507 0508 SMU5 05 Output gt 8 Made from Block 1 of Cards in Slot 3 and Block 1 of each card should be connected in series Made from Block 3 of Card in Slot BIAS Input 13 1301 1302 111303 1315 1316 IV Input SMU3 03 0301H0302 0303 0315 0316 Output gt Block 2 of each ci Made from Block 2 of Cards in Slot 3 and ard should be connected in series SMU6 is not used XXXX Channel Number Agilent E5250A 11 5 25 VFP VFP VFP Agilent E5250A H Agilent 4155 4156 TBASIC VFP e e
243. ViStatus VI FUNC hpe5250a error message ViSession vi VIStatus error number ViChar VI FAR messagel Vi hpe5250a init error number messagel 256 8 22 Agilent E5250A 11 VXIplug amp play hpeS2S0a error query E5250A Error Queue p 11 1 hpe5250a_errorQueryDetect ViStatus VI FUNC hpe5250a error query ViSession vi ViPInt32 error number ViChar VI FAR error message vi hpe5250a_init error number error messagel 236 hpeS2S
244. 8 Enter VFP VFP E3230A 1 gnter 5 42 Agilent E5250A 11 CAUTION SCPI Standard Commands for Programmable Instruments IEEE 488 1 IEEE 488 2 Agilent E5250A SCPI SCPI ES2S0A SCPI HP BASIC E5250A
245. 9 Gaitis a 0 Ne 225 24dv gt ee ec UNE ee J O E EE 8 WARNING No cpsmtr servicestte parts Inskte ge eet 0 O L Agilent E5250A 11 1 5 Figure 1 3 ES232A ES2S2A Agilent ES252A 10x12 10 12 E3252A DUT DUT E3250A E5252A E5250A E5250A E3S230A 2 ES5252A 10x24 3 10x36 4 10x48 E5252A Figure 1 3 Figure 1 4 EOE LTS S
246. B 52C 189C 28 2C 40 0C 5 60 RH C 289C 409C 60 80 RH A B C A 1 0 1 0 1 0 V 200 200 200 300 300 300 I V 0 6 0 6 0 6 1 0 1 0 1 0 0 IL V 1013 5x1012 2x10 12 10 5x108 2x108 a 0 Q kt 10 6 Agilent E5250A 11 301 lt 0 1 pA I V lt 0 4pF I V lt SpF EMF lt 80 pV TV lt 180 pF 3 IL V lt 60 pF IV 1 0V 2 Electro Motive Force 5
247. HP BASIC ES230A E5250A VFP ES250A SCPI p 7 1 E5250A p 9 1 E3230A VEP HP BASIC 6 2 Agilent E5250A 11 NOTE SCPI
248. Table 5 5 NOTE ES252A E5252A ES252A Table 5 5 1 2 2 3 ES252A 5 4 1 2 2 1 1 01 10 01 12 2 2 01 10 01 12 3 3 01 10 01 12 4 4 01 10 01 12 1 1 4 4 2 3 01 10 2 4 01 12 Figure 5 4
249. ViStatus VI FUNC hpe5230a biasChanList ViSession vi Vilnt16 biaschan disen Vilnt32 VI FAR biaschan list vi hpe5250a_init biaschan_disen 0 1 biaschan list ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 oO 8 8 Agilent E5250A 11 VXIplug amp play hpeS2S0a biasChanList Q biaschan list 0 0 100
250. 0 Arr 1 2 3 4 AL sequence NSEO No Sequence BBM Break Before Make MBBR Make Before Break ROUT CONN SEO card number ROUT COUP PORT card number couple po77 6 tr Mm SEQ No Sequence BBM Break Before Make MBBR Make Before Break card_number 0 1 2 3 4 BE3232A Mm card_number 0 ALL 1 2 3 4 Arr couple_port 1 1 3 5 7 9 1 5 12 6 Agilent E5250A 11 SCPI ROUT COUP PORT card number 1 ES3252A card_number 0
251. 1 ES5252A Table 9 3 Figure 9 1 E5250A 1 E5252A 10x12 1 4155 4156 1 16494A 003 80 cm 4 16494A 001 6 002 1 5m 3m 1649SF 1 4284A 006 LOR 1 16048D E 1 1250 2405 BNC T 2 10833A B C GPIB 3 Agilent E5250A 11 9 7 Vth Figure 9 1 Vth GPIB Cable Total 3 ea HP BASIC Controller 16048D 4155 4156 A Shielding Box or Test Fixture E5252A Output 16494A wiOpt 003 16494A ES25DA ES2ZG2A wiOpt 001 or Opt 002 6 ea Table 9 4 ES2S0A SS
252. 11 VEP Po Vth VFP VFP VFP VFP p 5 p 6 21 1 ENTER Meas_vth Test commS MOSFET Vth Measurement Constant Definitton Channe1 10101 10202 10303 10404 Meas vth OUTPUT Hp5250 ROUT CLOS gChannels Connect to DUT OUTPUT 6
253. ENTER GHp5250 AS A 1 3 Agilent E5250A 11 7 37 NOTE ROUTe COUPle STATe ROUTel COUPlel S TATe ES5252A ES5255A ON OFF p 5 1 ROUTe COUPle PORT p 7 36 RST OFF ROUTe COUPB1e STATe card 7777 e7 state card_number 0 ALL 1 2 3 4 ALL state ON 1 ON OFF 0 OFF OUTPUT GHp5250 ROUT COUP STAT ALL ON 7 38 Agilent E5250A 11 NOTE ROUT
254. Input setup memory number to be cleared ENTER to cancel Enter Open All CLEAR ALL Clear all setup memory OK CLEAR ALL CANCEL CLEAR ALL 5 36 Agilent E5250A 11 Figure S 12 VRP MODIFY SETUP MEMORY SETUP PANEL Figure 5 12 Figure 5 14 1
255. 100 OUTPUT Hp5250 ROUT CONN SEO ALL BBM 110 Sets all cards to Break before Make connection sequence p 5 1 ROUT BIAS PORT card no input port no input port no ROUT BIAS CHAN ENAB CARD cg77 7o ROUT BIAS CHAN ENAB LIST channel 7 sf 6 8 Agilent E5250A 11 ROUT BIAS CHAN DISA CARD card no ROUT BIAS CHAN DISA LIST channel list
256. 3 a BNC ES25SA 1 E3233SA 3 10 Agilent E5250A 11 Agilent ES250A Agilent 4155 4156 GPIB 1 4155 4156 ES230A ON 2 4133 4156 SYSTEM MISCELLANEOUS 4133 4156 SYSTEM CONTROLLER 3 ES250A 4155 4156 4 4155 4156 TIBASIC pisplay 2 AIll IBASIC 5 4155 4156 GET GET rr 6 GET SELF TEST gnter 7
257. Agilent E5250A 11 1 15 1 16 Agilent E5250A 11 WARNING Agilent ES250A 3 E5250A E5250A ES230A IE3 E5250A Agilent ES2S0A 200 Vdc E5250A 3 AC
258. Agilent E5250A 6 SMU 4 AUX Table 4 3 ES250A E5250A Table 4 3 Agilent 4156 ES270 SMU Agilent 41501 HPSMU Agilent 4142B SMU 4156 41301 Agilent 16494B 003 4142B Agilent 16494C 001 ES3270 Agilent 16494B 001 E3250A SMU SMU INPUT 1 2 3 4 5 6 SMU FORCE SMU SENSE 4 14 Agilent E5250A 11
259. CE OUTPUT GHp5250 OPC Query OUTPUT QHp5250 EOPC ENTER Hp5250 A Agilent E5250A 11 7 9 ER RST RST E5250A Table 7 1 RST BBM Break Before Make OFF ES252A 10 E5255A OFF RST OUTPUT Hp5250 RST 7 10 Agilent E5250A 11 RE br SRE SRE 1 0 SRE enable number enable_number
260. E5250A 2 8 Agilent E5250A 11 Figure 2 1 CAUTION E5250A Agilent E5252A 1 Screw Hole for Module Extractor Module Extractor Agilent E5255A ITTTTTTI OOODl0 ec eeeeee o SD E5250A Agilent E5250 60003 1 2 Agilent E5250A
261. Figure 6 3 to Instrurment Source E5250A 1 ES252A 2 lt 4 ES2S0A SMU 1 SMU 2 SMU 3 4 SMU 5 6 AUX ES2S2A 1 2 3 4 6 6 18 Agilent E5250A 11
262. card_number 0 1 2 3 4 ROUT CLOS LIST channel list c a77e7 77s7 channel_ ist ROUT CLOS LTST Gchannel list 0 1 channel_list ROUT CONN RULE card number rule card_number 0 arr 1 2 3 4 Arr rule FREE SROUte Agilent E5250A 11 12 5 SCPI W ROUT CONN RULE card number FREE SROU card_number 0 1 2 3 4 ROUT CONN SEQ card number sequence card_number
263. 1 10 1 10 hpeS2S0a biasState ON ViStatus VI FUNC hpe5230a biasState ViSession vi Vilnt16 biasstate cardno Vilnt16 state vi biasstate_cardno state hpe3230a _init 22K 5 3 0 hpe5250a func 0 OFF 1 ON Agilent E5250A 11 VXlIplug amp play hpeS2S0a close E5250A E5250A
264. 11 2 9 Figure 2 2 Module pins SMU input connectors BIT2 2 CC CC B73 4 BIT1 1 0 OFF BIT4 R 1 ON ES250A ES2SSA Agilent E5255A 2 8 3 ES5255A ES3233A E323SA H Agilent ES2SSA IVin cable DIP SW setting connection BIT1 BIT2 BIT3 SMU1 0 SMU2 1 SMU3 1 SMU4 0 SMU5 0 SMU6 1 Resistors BIT4 0 ohm 0 other 1 Screws Total 48 Resistors Total 24 0 0 0 1 1 1 2 10 swu4 Ft mm co DIP SW1 IVout1 IVout2 connector i connector in cable Resistor holder 1 To BIAS INPUT 51 BIASin2 BIASout1 terminal 9 IVin2 cable Resistor holder 2 DP SW2 kk Figure 2 2
265. 3 Output 17 1 c co J Agilent E5250A 11 1 9 E5255A Table 1 2 ES2SSA 2x8 BLOCK1 BIAS 1 51 1 8 BLOCK2 BIAS 2 52 9 16 BLOCK3 BIAS 3 53 17 24 Figure 1 6 E5255A BIAS INPUT OUTPUT BIAS INPUT CuTruT OSA Max 24 axs CH MULPLEER 2 n ES2S0A WARNING ES2SSA 200 Vdc CAUTION 200 Vdc 1 Adc 300 Vdc
266. 3XY Error Queue 3 SCPI E3230A E3250A Cp 11 10 Table 11 3 300 Device specific error Ci 311 Memory error E5250A 350 Queue overflow Error Queue 4 3 11 8
267. 5 31 ES2S0A VEP E5250A DEFINE LABEL DEFINE LABEL MENU E5250A INPUT E5250A INPUT CARDn INPUT ES255A E3255A BIAS nm 1 4 MAIN MENU INPUTn LABEL n 1 10 Tnput Label Name INPUTnLABEL E5250A nm 1 10 MORE INPUTn LABEL n 1 5 INPUTn L
268. CO I 3 11 NN 3 12 HE RB 3 15 20 EE 4 3 8ch 4 5 4 5 4 6 4 8 BU Oc 4 12 BS250 go 4 14 ES230A 4 14 E5255A 4 17 GNDUI 4 17 ES2S0A 2 4 19 ES252A 4 19 E5255A 4 21 SS 4 22 2 Agilent E5250A 11 2 APW 5 3 5 4 nS Es 5 5 VFP 5 5 6 5 7 5 10 SUS SC A 11 ZN AS ER 12 14 ES252 FE CNT RN LS TEN 5 16 E5255A 5 20 VEPS
269. Connect vVfFp Setup data Setup num 2 COM Vfp com data Setup data 14000 Meas c Constant Definition Test commS FNGet vfp commentS Setup data Setup num 3 Meas c Connect to DUT Connect vVfFp Setup data Setup num 3 Meas c Connection All Open Connect vVfFp Setup data Setup num 2 Set5230init COM Vfp com data Setup data 14000 Adrs Adrs5250 CALL Load vfp data Adrs VFP FTTLE Setup datas CALL Init vfp setup Setup datas 4 3 4 9 16 Setup num Vth Setup_ num Open All VFP Setup num VFP VFP FILE VFP Vth 1 Open Al 3 lt VFP
270. E5250A VFP VFP VFP 5 26 Agilent E5250A 11 VRP VEP VFP E3250A VFP ES3250A ES230A 24 1
271. HP BASIC 4284A 1 p 6 27 VFP VFP ES250A HP BASIC HP BASIC p 6 21 lt 1
272. HPF1 CV1 1 OPEN CLOSE ES230A ON ON UP LEFT RIGHT DOWN MORE 2 3 ON
273. VXTplug amp play hpeS2S0a_ biasChanCard ViStatus VI FUNC hpe5250a biasChanCard ViSession vi Vilnt16 disable enable Vilnt16 bias cardno Vi hpe5250a init disable enable 0 1 bias cardno 1 2 3 4 5 0 hpe5250a func hpeS2S0a biasChanList biaschan list 0 0 100 o
274. p 10 1 Agilent E5250A 3 AC E5250A 2 4 Agilent E5250A 11 Plug BS 1363 A 250 V 10A PN 8120 4420 Plug AS 3112 250 V 10 A PN 8120 4419 Plug CEE 7 sheet VIL 250 V 10 A PN 8120 4519 Plug NEMA 5 15P 125 V 10 A PN 8120 6825 Plug NEMA 6 15P 250 V 10 A PN 8120 3996 8120 0698 Plug SEV 1011 250 V 10 A PN 8120 2104 Plug SR 107 2 D1 250 V 10 A PN 8120 2956 Plug IS 1293 and IS 6538 250 V 10 A PN 8120 4211 Plug JIS C 8303 125V 12 A PN 8121 0743 gt Plug Israel SI 32 250 V 10 A PN 8120 5182 Plug IRAM 2073 10A 250 V 10 A PN 8120 6870 Plug CEI 23 16 25
275. 0 2 0 3 0 4 Message Available MAV Queue Summary Message Output Queue Output Queue p 7 56 5 Standard Event Status Bit ESB Summary Message 1 6 Request Service RQS Message Master Summary Status MSS Summary Message SRQ 1 STB 7 0 7 52 Agilent E5250A 11
276. 1 2 3 4 ALL DIAGnostiic DIAGnostic TEST CARD CLEar card_number ALL EXECute card number ALL STATe card_number FRAMe CLEar CONTroller FPANel EXECute CONTroller FBANe1 STATe CONTro11er FPANel card_number 1 21314 Agilent E5250A 11 7 15 NOTE DIAGnostic TEST CARD CLEar DIAGnostic TEST CARD CLEar DTAGnostio TEST CARD CLEar card number card_number 1 2 3 4 ALL OUTPUT GHp5250 DIAG TEST CARD CLE 1 DIAGnostic TESTECARDI EXECute SYST CPON DTAGnostioc TEST
277. 12345678 910111213141516 17 18 19 20 21 22 23 24 Table 9 8 ES2S0A 41SS 41S6 ES2S0A ES2SSA SMU1 SMU INPUT 1 Output 1 24 1 ate SMU3 SMU INPUT 3 Output 25 48 2 Drain SMU4 SMU INPUT 4 Output49 72 3 Sub GNDU Source 9 26 Agilent E5250A 11 5 HCI Figure 9 4 HCI BNC Cable 3ea a eA stOT1 16494D 001 or 002 9ea Shielding Box y BIAS SOURCE 1 Bias Input Output NE _ SLOT2 1 24 1 1 1to124F 5 Bias Input y BIAS SOURCE 2 25 48 2S to 148 NN Bias Input E5250A 49 72 BIAS SOURCE 3 J ER 49 to Rs 16495D PP N 2 16494A 003 3ea Drain lt 4155 4156 SE Gate Sub GNDU Source a 41501 16494A 001 or 002 1 SS a 24 25 26 48
278. 2 4 6 Sense 4 18 Agilent E5250A 11 WARNING Figure 4 8 Table 4 4 ES2S0A Agilent ES252A Agilent E5255A BS3252A BS3255A ES230A ESs250A ES2S0A OFF ES2S2A Agilent ES252A Figure 4 8 E3230A ES252A Figure 4 8 ES250A SMU AUX ES3232A ES2S2A Input A AUX Signal hne SMU Force or Sense Guard Ground B E5252A Table 4 4 H
279. 2 4284A 3 ES250A OFF BBM Vth 4155 4156 Vth ES250A Vth MOSFET Vth E5250A ND 0 tt 4284A E5250A E5250A AG 9 4 Agilent E5250A 11 Vth
280. 24 1 MOSFET Vth 1 ES3250A VFP 4133 4136 VFP HP BASIC p 6 1 VFP
281. 3 BNC T 2 BNC T Agilent 1250 0781 Agilent 1250 2405 BIAS INPUT 2 BNC T adapter To Bias Source em BNC cable Agilent E5250A 11 2 15 96 1 BIAS 1IV 4 Figure 2 6 E5250A ES5255A 4 8 BNC 5 BNC 3 SMU INPUT 1 TIV 0 O 1 24 1 BIAS 1 IV 1 p 2 14 24 4 IVinl
282. 4 Relay Test 5 ES5255A a BIAS b BIAS BNC 6 Remote LED Local Self Test 7 Local Self Test 8 Local Self Test LED 3 4 Agilent E5250A 11 NOTE Figure 3 1 NOTE Fail LED ES3230A E5255A ES25SA p 2 10
283. 7 1 Agilent E5250A 2 E3250A 3 1 1 ES5250A 1 2 ES252A 1 1 E5250A INPUT 3 4 1 i Close 0 2 0 om E5252A Card 1 Output E5252A Card 2 Output ON a 1
284. Agilent E5250A E5250A 2 SCPI SCPI ES250A E5250A 0 100 199 200 299 300 399 400 499 100 32767 E5250A E5250A Error Queue
285. Agilent E5250A VXlplug amp play Table 8 1 Table 8 1 E5250A ES250A hpe3230a init ES3250A hpe5230a close E5250A hpe5250a_reset E5250A hpe5230a self test E5250A hpe5250a_error_query hpe5230a error message ES52S0A hpe5230a_revision query hpe5250a timeOut hpe3250a timeOut Q hpe5250a errorQueryDetect hpe5230a errorQueryDetect Q Sg hpe5250a dcl ESR hpe3230a esr Q E5250A hpe5250a_readStatusByte_Q E5250A
286. Break Before Make 100 10101 10202 120 130 6 4 Agilent E5250A 11 NOTE CAUTION Agilent E5250A 6 Table 6 1 E5250A p 1 7 1 Table 6 1
287. DEFINE E5250A CARD1 CARD2 CARD3 CARD4 Select de 5250A Virtual Front Panel Utility LABEL MENU TNPUT1 gt TFTWML TNPUT2 FTM TNPUT3 EV Y TNPUT4 2 TV TNPUT5 TWD TNPUT6 i TV6 Y TNPUT7 TNPUT8 TH TNPUT9 WI TNPUT10 CV2 E5252A No Bias Input Port E5252A No Bias Input Port E5255A BTAS1 C3B1 BTAS2 C3B2 BTAS3 C3B3 E5255A BTAS1 C4B1 BTAS2 C4B2 BTAS3 C4B3 sired softkey Agilent E5250A 11 5 33 VFP SETUP MEMORY SETUP MEMORY MENU E5250A 1 Current Setup Memory E5250A NEXT SETUP ES250A PREV SETUP ES250A GOTO SETUP E5250A
288. GPIB GPIB GPIB lt 10 lt x2m gt 10 lt 20 m 4m Agilent E5250A 11 2 17 0 E5250A i
289. Vi GPIB0 1 INSTR VI TRUE VI FALSE VI TRUE E5250A VI FALSE E5250A VI NULL hpeS2S0a opc OO OPC ViStatus VI FUNC hpe5250a opc_Q ViSession vi ViPBoolean result vi result hpe5250a_init VI TRUE VI FALSE Agilent E5250A 11 8 25 VXlIplug amp play hpeS2S0a openCard ON ViStatus VI FUNC hpe5250a openCard ViSession vi Vilnt16 open cardno vi hpe5250a_init
290. ViStatus VI FUNC hpe5250a close ViSession vi vi hpe5250a_init hpeS2S0a closeCard Q closechan ist 0 0 ViStatus VI FUNC hpe5230a closeCard O ViSession vi Vilnt16 close card Vilnt32 VI FAR closechan list vi hpe5250a_init close card 1 2 3 4 0 hpe5250a func closechan list Agilent E5250A 11 8 11 VXTplug amp play hpeS2S0a closeList
291. 1 12 h L2 1l L3 DISP CO DISP CO END h 3 1 C m G m C oc G C RRECTED C DATA C RRECTED G DATA G Cc Agilent E5250A 11 6 31 gt E3250A ASCII l C COMPEN GET C_COMPEN A RE STORE C_COM HP BASIC LOADSUB LOADSUB ALL FROM C _ COM
292. 10 2 01 48 Figure 5 5 1 0 00101 101 5 18 Agilent E5250A 11 NOTE 1 SMUS HF1 CV1 0 07 09 SMU6 HF2 CV2 06 08 10 05 07 09 Figure 5 5 ES252A 10x48 Input Port Input Port No Output Port Output Port No Chahnel Agilent E5250A 11 5 19 Table S 7 ES2SSA E5255A
293. 2 BNC OUTPUT AUX1 4 BNC Agilent E5250A 11 4 15 ES230A AUX CV1 CV2 HF1 HF2 ES5250A 4142B HCU 41422A HVU 41423A BNC Agilent 1251 2277 Agilent 4156 Agilent ES250A Figure 4 6 Figure 4 6 41S6 Agilent E5250A Kelvin Triaxial Cable Triaxial Cable 2 mm BNC Cable Agilent 4156 INTLK Cable Connector Plate 4 16 Agilent E5250A 11 CAUTION ES230A ES2SSA Agilent E
294. 4155 4156 IBASIC Run Tnput Agilent E5250A GPIB Address defau 722 8 ES250A GPIB gsnter E5250A 722 sgnter 4155 4156 SELF TEST LEAK TEST QUIT Agilent E5250A 11 3 11 Figure 3 2 gt ore SELF TEST
295. Agilent E5250A 11 Re KC Query ES250A Output Queue 4X Error Queue 2 Table 11 4 400 Query error 410 Query INTERRUPTED INTERRUPTED E5250A DAB GET 420 Query UNTERMINATED UNTERMINATED
296. BASIC 9 2 Agilent E5250A 11 Vth Vth Vth
297. C C Manufacturer s Name Agilent Technologies Singapore International Pte Ltd Manufacturer s Address No 1 Yishun Ave 7 SINGAPORE 768923 Singapore Declares under sole responsibility that the product as originally delivered Product Name Low Leakage Switch Mainframe 10x12 Matrix Switch24 8x3 CH Multiplexer 24 8x3 CH Multiplexer Model Number Agilent E5250A Agilent E5252A Agilent E5255A Product Options This declaration covers all options of the above product S complies with the essential requirements of the following applicable European Directives and carries the CE marking accordingly Low Voltage Directive 2006 95 EC EMC Directive 2004 108 EC and conforms with the following product standards EMC Standard Limit IEC 61326 1 2005 EN 61326 1 2006 CISPR 11 2003 EN55011 1998 A1 1999 A2 2002 Group 1 Class A IEC 61000 4 2 2001 EN 61000 4 2 1995 A1 1998 A2 2001 4 kV CD 8 kV AD IEC 61000 4 3 2002 A1 2002 EN 61000 4 3 2002 A1 2002 3 Vm 80 MHz 1 GHz 1 4 2 GHz 1 V m 2 2 7 GHz IEC 61000 4 4 2004 EN 61000 4 4 2004 0 5 kV signal lines 1 kV power lines IEC 61000 4 5 2001 EN 61000 4 5 1995 A1 2001 0 5 kV Iine line 1 kV line ground IEC 61000 4 6 2003 EN 61000 4 6 1996 A1 2001 3 V 0 15 80 MHz IEC 61000 4 11 2004 EN 61000 4 11 2004 0 for 170 5 cycle 0 for 250 300 cycles 70 for 25 30 cycles Canada ICES NMB 001 2004 Australia New Zealand AS NZS CISPR 11 2004 Safety IEC 61010 1 2001 EN 61010 1 2001 Canada
298. CAN CSA C22 2 No 1010 1 92 NRTL C Supplementary Information The product was tested in a typical configuration with Agilent Technologies test systemSs This DoC applies to above listed products placed on the EU market after March 20 2010 Date Toshiyuki Kawaji QA Manager Agilent Technologies For further information please contact your local Agilent Technologies sales office agent or distributor or Agilent Technologies Deutschland GmbH Herrenberger StraRe 130 71034 Boblingen Germany WEEE Directive 2002 96 EC marking requirements WEEE Directive Annex I Monitoring and Control instrumentation www agilent com environmen 7product Microsoft Windows Visual C Visual Basic Microsoft Corporation Borland C Builder International Inc LabWindows LabVIEW
299. CISPR 11 Group 1 class A amp ENS50082 1 100 240 V 10 47 63 Hz 100 VA 4 30 mm 001 301 001 501 I V I V C V 2 HF 2 I V 230 mm x 430 mm 30 mm x 395 mm x 424 mm 30 mm x 395 mm x 424 mm 11 2 kg 2 0 kg 2 1 kg 2 4 12 3 3 24 8 x 3 Agilent E5250A 11 rh A x 600 mm 001 001 A 23 2C S59C 60 RH B 52C 189C 28 2C 40 0C 5 60 RH C 280C 409C 60 80 RH
300. CONN SEQ 0 ENTER Hp5250 A A MBBR Agilent E5250A 11 7 35 NOTE Rae TF kA ROUTe COUPle PORT ROUTe COUPle PORT E5252A E5255A p 5 1 AR ni 2 LO 1 2 3 4 5 6
301. Plate g 4 12 SMU Agilent E5250A 11 NOTE RR Agilent 8121 1191
302. ViSession vi ViPInt32 pTimeOut0 vi hpe5250a_init PTimeOut 8 32 Agilent E5250A 11 NOTE CAUTION NOTE Agilent E5250A E3250A Vh HCI ES5250A HPLIF 3 5 Agilent 4155 4156 HP BASIC E3230A Agilent 4155 4156 Agilent 4284A LCR HP
303. W L m HCI GET Pl L m 25 I Stress duration setup DATA DAT A DATA DAT DAT A A 10 20 100 200 1000 2000 10000 20000 100000 Agilent E5250A 50 500 5000 50000 4155 4156 PARAM MES GET VB LINE1 VG E5250A p 2 1 DATA
304. 0 V 10 A PN 8120 6978 Plug GB 1002 figure 3 250 V 10 A PN 8120 8376 Plug SANS 164 1 250 V 10 A PN 8120 4211 8121 0564 Plug TISI 166 250 V 10 A PN 8121 1866 Plug NBR 14136 250 V 10 A PN 8121 1809 Plug CNS 10917 2 125 V 10 A PN 8120 6825 8121 1635 Plug CS 0017 2003 250 V 10 A PN 8120 8871 8121 1638 Agilent E5250A 11 2 5 C 409C 5 80 RH 0m 2000 m 40 C 70 C 5 90 RH 65 C 0m 13 240 m E5250A Dl 2 6 Agilent E5250A 11 ES250A ES2S0A Agilent E5250A
305. 03 ON HP BASIC p 9 23 MSI CS80 702 1 MST CS80 702 1 SP MUX LOAD SP MUX EDIT E5250A 413374136 IDVD MES GET OUTPUT 722 ROUT CLOS 10101 20101 30101 4155 4156 Single Id Vd
306. 0404 Channels to Create 70 80 But Instrument Initialization Routine here 90 100 ASSTGN GHp5250 TO 722 Assigns E5250A GPTB address to 722 110 OUTPUT Hp5250 RST 120 OUTPUT GHp5250 ROUT FUNC NCON Sets Normal Config mode 130 OUTPUT Hp5250 ROUT CONN RULE ALL SROU Sets Sing1e rule 140 OUTPUT GHp5250 ROUT CONN SEO ALL BBM Sets BBM sequenCe 150 160 OUTPUT GHp5250 ROUT CLOS gChanne1 Creates channels 170 OUTPUT Hp52507 OPC 180 ENTER Hp5250 Comp1ete 190 200 Put Measurement Routine here 210 220 OUTPUT GHp5250 ROUT OPEN CARD ALL Opens all relays 230 OUTPUT GHp5250 OPC 240 ENTER GHp5250 Comp1ete 250 260 OUTPUT Hp5250 RST 270 280 END 40 channel_list Channel 60 channel_ist 80 110 E5250A 120 130 140 Break Before Make 160 Channel 170 180
307. 0A 11 ss ROUTe BIAS CHANnel ENABle CARD ROU Te BIAS CHANnel ENABle CARD ON ROUTe BIAS STATe p 7 30 RST ROUTe BTAS CHANne1 ENABle CARD card_ number card_number 0 ALL 1 2 3 4 ALL OUTPUT GHp5250 ROUT BTAS CHAN ENAB CARD ALL Agilent E5250A 11 7 25 SCSZ Rs ROUTe BIAS CHANnel ENABle LIST EROUIel BIAS CHANnel ENABlel LISTI channel_list
308. 0a errorOueryDetect ViStatus VI FUNC hpe5250a errorQueryDetect ViSession Vi ViBoolean errorQueryDetect vi hpe5250a_init errorQueryDetect VI TRUE VI FALSE hpeS2S0a errorOueryDetect Q ViStatus VI FUNC hpe5250a errorQueryDetect_O ViSession vi ViPBoolean pErrDetect vi hpe5250a_init pErrDetect VI TRUE VI FALSE Agilent E5250A 11 8 23 VXlIplug amp play hpeS2S0a esr Q ESR ViStatus VI FUNC hpe5250a esr Q ViSession vi ViChar VI FAR errstr
309. 1 MARHKER 100 hl NT A LNTER amsFT POLATE GFF decads di MARKER SKIP UTO Y Sls 1 nn m CURSOR io n Str as sae daeada fdiw 10 k MARKER ILI NE C 1RN DISPLAY SWEEP TI hl Na CONST CURSOR SETUP SETUP SE TLUP SET UP 9 32 Agilent E5250A 11 5 HCI 1 E5250A CS80 702 1 MST 2C880 702 1Y SP_MUX A GET GET SP MUX A
310. 1 12 7 SCPI ROUT OPEN LIST Gchannel list eZg77e7 77s7 ezgze7 ist ROUT OPEN LTST Gchannel list 0 1 channel_ist SYST CCON card number E5252A E3233A card_number 1 2 3 4 SYST CDES card number card_number 0 1 2 3 4 SYST CPON card number card_number 0 arr 1 2 3 4 Ari SYST CTYP card number ID card_number 0 1 2 3 4
311. 11 OUTPUT12 Figure 1 4 ES2S2A T ox12 MMAKTRIEK SWITCH CuTPuT 200y a Mex Tn WARNING ES2S0A ES2S2A 200 Vdc Agilent E5250A 11 1 7 E5255A ES2SSA Agilent E5255A 24 8x3 E3250A 2 8 3 E325SA DUT BE3230A ES255A 4 ES255A 6 16
312. 156 TBASIC E3250A ITBASIC VEP ES3230A VEP p 5 26 Agilent E5250A 11 5 5 Agilent E5250A ES252A E5255A 5 6 Agilent E5250A 11 Figure S 1 Agilent E5250A
313. 255A Relay Test tart Slot4 E5255A Relay Test tart E5250A Controller Test tart E5250A Front Panel UIF Test eturn to MAIN MENU N indioates test was not exeouted Prepare the relay test adapterSs before you select CARDn RELAY key Select desired softkey 3 12 Agilent E5250A 11 CONTROLLER F CR 1 FRONT PANEL ES5250A 4 LED LED Remote LED System Fail LED Fail LED Local Self Test LED 2 10 Locavsef Test
314. 3 Output 0Q 0Q H Table 1 2 2x8 TFigure 1 6 Agilent E5250A 11 E5255A Figure 1 5 ES2SSA BLOCK 1 BIAS Input1 V4 Resistor Ku IV Input 1 9 omt 1 2 3 4 5 6 7 8 BLOCK 2 BIAS Input2 ww Resistor IO IV Input 2 Ss um OO OOOO DD 9 10 11 12 13 14 15 16 BLOCK 3 BIAS Input3 v4 Resistor gt IV Input 3
315. 3 ES23SA 1 1 gt 10 lt 3 5 I V 10 V 400 fA o Agilent E5250A 11 10 7 Agilent 16494D 8 Agilent 16495C 6 Agilent 16495D 12 Agilent 1649SE Agilent 16495F 12 Agilent 16495G 24 5 C 40 C 40 C 70 7C Agilent 16494A
316. 4 9 Agilent 16494B Connector Plate Side E5252A Side 4 20 Agilent E5250A 11 Figure 4 10 Table 4 S Figure 4 11 ES230A ES2SSA E5255A Figure 4 10 E32350A SMU ES25SA Figure 4 10 E3255A ES2SSA B Ground ES252A Table 4 5 E3233A 1 8 1 8 9 16 1 8 17 24 ES2SSA 16494D 001 8 1 5 m 16494D 002 8 3 nm Agilent 16494D 8 FEMALE MALE
317. 50A 11 7 11 RR NT FR SRE 10 0 1 1 2 2 4 3 8 4 16 MAV Message Available Summary Message 5 32 ESB Event Status Bit 6 64 MSS Master Summary Status 7 128 7 12 Agilent E5250A 11 STB p 7 49 STB register new11ne gt END gt sr STB 10 10 10 0 1 1 2 2 4 3 8
318. 5255A BNC BNC ES255A BNC Agilent 1251 2277 GNDU Agilent 4142B DC Agilent 41501 GNDU 1A Ce GNDU Agilent 16493H GNDU 1 A GNDU E3230A GNDU ES5250A GNDU 1A 1 A Agilent co 6
319. 6 Isub Vg gt Figure 9 6 Isub Vg PHI LI ST PHI GCS MEDI UM 4aucTos ngi 209F Mm lb Vg Measuremenl MaREKER MARKEERIL 5 Mi 1 Bl1n nn nu 1 on STE 23 Sn nnnnn A haRKER s nn ul 4 LHNTER SUB POLATE OFF EBI REGT ha HEE ou CURSOR MaREKER SkIP TO ANALY 3 CURSOR o oo wa tv 1 00 7diw i10 0 OFF MaAREER LI NE CLT HG DISPLAY TSWEEF TI hl Hi CONST CURSOE ESETUP SETUP SETUR SETUR 3 E3233A 1 25 49 Device1 Connect HCI degradation test devroes 9 30 Agilent E5250A 11 Figure 9 7 5 HCI
320. 6 Agilent E5250A 11 ROUTe BIAS CHANnel ENABle LIST ROUTel BIAS CHANnel ENABlel LIST channel_list channel_list 1 0 ROUTe BIAS CHANnel ENAB1e LTST channel list channel_list channel_ist p 5 1 channel ist enable_status enable_status new1 1ne gt END gt 1 OUTPUT GHp5250 OUTPUT GHp5250 4 ROU OUTPUT GHp5250 ENTER GHp5250 AS ROU NN ROUT BIAS CHAN ENAB T BIAS CHAN ENAB A
321. 60 140 DISP Failed Press Continue to go to I F Test 150 GOTO 170 160 DISP Passed Press Continue to go to I F Test 170 PAUSE 180 Fron Panel I F Test 190 OUTPUT Hp5250 DTAG TEST FRAM EXEC FPAN 200 DISP Bress Loca1 Se1f Test Key within 10 sec 210 ENTER GHp5250 A 220 IF A 0 THEN GOTO 250 230 DISP Eatiled Press Continue to go to Relay Test 240 GOTO 260 250 DISP PBassed Press Continue to go to Relay Test 260 PAUSE 270 Relay Test 280 OUTPUT GHp5250j DTAG TEST CARD EXEC2 1 290 ENTER GHp5250 A 300 IF A 0 THEN GOTO 330 310 DISP Card 1 failed Press Continue to test Card 2 320 GOTO 340 330 DISP Card 1 passed Press Continue to test Card 2 340 PAUSE 350 OUTPUT Hp5250 DIAG TEST CARD EXEC 2 360 ENTER Hp5250 A 370 IF A 0 THEN GOTO 400 380 DISP Card 2 failed Press Continue to test Card 3 390 GOTO 410 400 DISP Card 2 passed Press Continue to test Card 3 10 PAUSE 20 OUTPUT GHp5250j DTAG TEST CARD EXEC2 3 30 ENTER GHp5250 A 40 IF A 0 THEN GOTO 470 50 DISP Card 3 failed Press Continue to test Card 4 60 GOTO 480 70 DISP Card 3 passed Press Continue to test Card 4 80 PAUSE 490 OUTPUT Hp5250 DIAG TEST CARD EXEC 4 500 ENTER G Hp5250 A 510 IF A 0 THEN GOTO 540 520 DISP Card 4 failed be ie 1 1 1 1 1 3 8 Agilent E5250A 11 2 530
322. 7 50 Agilent E5250A 11 Figure 7 2 E5250A BSB MAV Output Queue 6 RQS E5250A Figure 7 2 Table 7 3 ES2S50A STATUS MMARY MESSAGES from Not Used RQS js read by lt Serial Pol Status Byte Reglster Not Used RQS 6 MSS MSS js read by XSTB ee Standard Event Output Queue lt FT1 1 CO Co PGO4002 120x80
323. ABEL n 6 10 RETURN DEFINE LABEL MENU Max 5 char string 5 gnter gnter 5 32 Agilent E5250A 11 ES2SSA Figure S 10 YFP CARDn INPUT n 1 4 BIASnLABEL CARDn INPUT E5255A BIAS n 1 3 RETURN DEFINE LABEL MENU BIASn LABEL n 1 3 Tnput Lab el Name Max 5 char string 5 Enter gnter DEFINE LABEL MENU Agilent E
324. ALL FROM U LTB Load vfp data CS80 7011 MSI MST CS80 701 1 Load vfp data Setup data LOAD FILE 9 La Load vVfFp data Address 5250 LOAD FTLE CS80 701 1 Setup data Agilent E5250A 11 6 25
325. ATA03 177 56E 3 390 00E 9 135 45E 12 DATA04 100 70E 3 400 00E 9 80 00E 12 DATA05 100 70E 3 400 00E 9 80 00E 12 DATA06 100 70E 3 400 00E 9 80 00E 12 DATA07 114 00E 3 544 00E 9 130 00E 12 DATA08 114 00E 3 544 00E 9 130 00E 12 DATA09 0 00E 3 0 00E 9 1 20E 12 END of Data Agilent E5250A 11 line and DATAxx 1 p 6 27 line Frame Path 1 Frame Path 2 Card Path High Card Path Low Triax Cable m User Triax Cbl H m User Triax Cbl L m User Coax Cbl H m User Coax Cbl L m Stray Capacitance 8 29 VXTplug amp play hpeS2S0a self test E5250A ViStatus VI FUNC hpe5250a self test ViSession vi ViPInt16 test result ViChar VI FAR test message vi hpe5250a init test_result 0 test messagell 256 oO hpeS2S0a testClear ES250A framecard clear
326. Agilent E5250A 0 Agilent Technologies Notices Agilent Technologies Inc 1995 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or transla tion into a foreign language without prior agreement and written consent from Agi lent Technologies Inc as governed by United States and international copyright laws Manual Part Number E5250 97000 Edition Edition 1 November 1995 Edition 2 January 1997 Edition 3 August 1997 Edition 4 January 2000 Edition 5 May 2000 Edition 6 January 2001 Edition 7 August 2003 Edition 8 July 2005 Edition 9 May 2008 Edition 10 July 2009 Edition 11 August 2011 Agilent Technologies Inc 5301 Stevens Creek Blvd Santa Clara CA 95051 USA Warranty The material contained in this docu ment is provided as is and is sub ject to being changed without notice in future editions Further to the max imum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a par ticular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or perfor mance of t
327. CARD EXECute card number card_number 1 2 3 4 ALL 7es7 result lt new 1ne gt lt END gt 1 0 OUTPUT GHp5250 DIAG TEST CARD ALL 7 16 Agilent E5250A 11 YK DIAGnostic TEST CARD STATe 7 DIAGnostic TEST CARD STATe DTAGnostio TEST CARD STATe card number card_number 1 2 3 4 7es7 result lt new 1ne gt lt END gt 1 0 1 OUTPUT GHp5250 DIAG TEST CARD STAT 1 ENTER Hp5250 A DIAGnostic TEST EFRAIMe CLEar DTAGnostio TEST FRAMe CLEar CONTro11er FPANel CONTroller FPANel OUTPUT GHp5250 DIAG TEST FRAM CLE CONT Agilent E5250A
328. ER GHp415x A PGC Vth 9 12 4155 4136 EM STOR TRAC DEF VTH DAT DISK 4 VTH DAT VTH DAT Agilent E5250A 11 Vth Vth Meas vth Constant Definition Test comm MOSFET Vth Measurement Param file 4155 4156 ES252 MES Vth_max Vth V 2 0 Vth min Vth V 0 1 Channel Vth 10101 10202 10303 10404 ES3230A Channel
329. EST FRAM STAT CONT DIAG TEST FRAM CLE CONT DIAG TEST FRAM EXEC FPAN DIAG TEST FRAM STAT FPAN DIAG TEST FRAM CLE FPAN DIAG TESTECARD EXEC7 ALL Card No 1 4 DIAG TESTECARD STAT 7 ALL Card No 1 4 DIAG TEBSTECARD CLE ALL Card No 1 4 DIAG TEST FRAM EXEC FPAN E5250A 4 LED 10 LED Remote LED System Fail LED Fail LED Local Self Test LED LED 10 Local Self Test LED
330. Ee Ee GNDU 4 3 TS el Be Ss Device1 Device2 Device24 Total 24ea NOTE SP MUX M Vdstr Vgstr Devicel 8 Devicel Agilent E5250A 11 9 27 HCI 1 GPIB 4155 4156 717 B3250A 722 SP MUX Mp 701 702 7
331. GHp5250 OPC ENTER GHp5250 A Meas vth OUTPUT 6GHp5250j ROUT OPEN CARD ALL Connection All Open OUTPUT 6GHp5250 OPC ENTER GHp5250 A Meas _c Test comm Capacitance Measurement Constant Definition Channe1 10905 11006 Meas c OUTPUT Hp5250 ROUT CLOS gChannels Connect to DUT OUTPUT 6GHp5250 OPC NTER GHp5250 A Meas c OUTPUT 6 Hp5250j ROUT OPEN CARD ALL Connection All Open OUTPUT GHp5250 OPC NT Hp5250 A Set5230init OUTPUT GHp5250 ROUT FUNC NCON OUTPUT 6 Hp5250 ROUT BTAS STAT ALL OFF OUTPUT 6 Hp5250j ROUT CONN RULE ALL SROU OUTPUT 6 Hp5250j ROUT CONN SEO ALL BBM OUTPUT 6 Hp5250j ROUT OPEN CARD ALL OUTPUT 6Hp5250 OPC ENTER GHp5250 A Agilent E5250A 11 9 15 Vth 2 ENTER Meas_vth COM Vfp com data Setup datas 14000 Meas vth Constant Definitton Test commS FNGet vfp commentS Setup data Setup num 1 Meas vth Connect to DUT Connect vVfFp Setup data Setup num 1 Meas vth Connection All Open Meas c
332. GOTO 550 540 DISP Card 4 passed 550 END 30 90 100 170 180 260 270 340 1 350 410 2 420 480 3 490 550 4 Agilent E5250A 11 3 9 Table 3 3 Agilent 4155 4156
333. IB LOAD_FILE Setup_dataS 14000 CALL Load vfp data 722 MAT48 1 Mat48 data Init vVfp setup Load vfp data E3230A Break Before Make ON OFF 1 10 Connect vfp Init vVfp setup Setup data Setup_dataS 14000 CALL Init vfp setup Mat48 data 6 22 Agilent E5250A 11
334. IST channel list be ezgze7 ist Agilent E5250A 11 12 3 SCPI ROUT BTAS CHAN DTS LTST Gchannel list 1 0 channel_ist ROUT BTAS CHAN ENAB CARD card number card_number 0 ALL 1 2 3 4 Arr ROUT BIAS CHAN ENAB hTST 6G c g777e list ROUT BIAS CHAN ENAB hTST channel list channel_ist 0 1 channel list ROUT BIAS PORT cg7 number bias_port E3232A
335. O ES252A 0UTPUT 1 2 3 4 5 6 9 INPUT SMU1 8 sf P 3 HF i SMU2 H opl opl oPl d SMU3 3 sus oS HF1 CV1 SMU6 OB b 0 J HF2 cv2 OO 1 6 Agilent E5250A 11 ES232A INPUT E5252A 10 6 SMU1 SMU4 SMUS5 HF1 CV1 SMU6 HF2 CV2 2 3 1 SMUS HF1 CV1 SMU1 SMU2 OUTPUT ES252A 12 6 OUTPUT1 OUTPUT2 OUTPUT3 OUTPUT4 OUTPUTS OUTPUT6 OUTPUT7 OUTPUT8 OUTPUT9 OUTPUT10 OUTPUT
336. SIC pisplay 2 IBASIC 6 IBASIC GET GET ON 7 GET VFP Enter 8 4155 4156 IBASIC Run Tnput Agilent E5250A GPIB Address defau 722 9 ES5250A GPIB snter E5250A 722 gnter 4133 4136 VFP E5250A 1 5 28 Agilent E5250A 11 VFP
337. SMU3 0 IV 03 01 08 4 BIAS 13 2 2x16MUX 3 SMU4 0 IV 04 01 08 2x8MUX BIAS 14 4 1 SMU2 0 IV 02 09 16 3 BIAS 12 1 2x16MUX 2 SMU3 0 IV 03 09 16 3 BIAS 13 2 2x16MUX 3 SMUS 0 IV 05 01 08 2xSMUX BIAS 15 5 24 Agilent E5250A 11 Figure S 8 BIAS Input 11 1101 1102 1147 1148 IV Input SMU1 01 0101H 0102 0103 0147 0148 Output 1 8 BIAS Input 1 1401 11402 1403 1407 1408 IV Input 0401 0402 0403 SMU4 04 0407 0408 Output Made from Cards in Slot 1 and 2 Block 1 to 3 of each card should be connected in series BIAS Input 12 1201 1202 1203 1215 1216 IM Input 0201H0202 0203 0215 0216 SMU2 02
338. Sable C ARD ON ROUTe BIAS STATe p 7 30 RST ROUTe BTAS CHANne1 DISable CARD card number card_number 0 ALL 1 2 3 4 ALL OUTPUT GHp5250 ROUT BTAS CHAN DTS CARD ALL 7 22 Agilent E5250A 11 ROUTe BIAS CHANnel DISable LIST ROUTel BIAS CHANnel DISablel LIST channel_list egzze7 7 s7 ON
339. T CLOS Figure 5 3 1 2 ON 0105 2 0105 0206 0105 4 0105 0106 0205 0206 Figure 5 3 2XN 1 6 2XN 1 a INPUT INPUT 2XN 2XN J i 2XM ee law OUTPUT OUTPUT 1 Connect condition 2 Disconnect condition N 1 to 5 908 M 1 to 6 for Normal Config Open M 1 to 24 max for Auto Config NOTE ES250A E3252A Agilent E5250A 11 5 15
340. UP PANEL ES2SSA 2x24MUX Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOS CAP Card Number s Input 12345678 TV1 a BS1 GGGGGG WU he BS1 G GGGGGG so BS Use softkeys to move cursor and to change status MEMORY SETUP PANEL ES2SSA 2x24MUX Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOS CAP Card Number 0 111111111122222 Input 123456789012345678901234 TV1 ID 2 0 Re oe BSl GG GGGGGGGGGG G G Use softkeys to move cursor and to change status 5 38 Agilent E5250A 11 VRP Table S 10 MEMORY SETUP PANEL CHANGE Current Setup Memory CHAN H COMMENT NEXT CARD
341. V BIAS IV 01 03 BIAS 51 53 IV SMU 2 01 08 Figure 5 6 Figure S 6 ES2SSA Block 1 BIAS Input 5102 a m 0103 BIAS Input 53 7 Es 6 Channel No Agilent E5250A 11 5 21 Table 5 8 Agilent ES255A BS5250A 1 1 1 2 1 3 1 4 ES25SA Table 5 8 1 2 2 5 ES2SSA
342. VXlIplug amp play Driver 3 1 E5250A 1 3 5 LIF 1 1 ES252A Es252A Installation Guide 1 1 ES255A ES255A Installation Guide 1 BNC 3 1 BNC 2 2 0 Q 10 3 1 2kQ 10 3 22 ko 10 3 1 a Agilent Technologies thttp www agilent com ES250A Agilent E5250A 11 1 13 E5250A VFP Agilent 4155 4156 IBASIC BE3230A
343. age to 0 0V SUBEND 4 3 5 SP MUX RE STORE WSP_MUX NOTE 9 24 Agilent E5250A 11 5 HCI 1 Table 9 7 2 BS525SA DIP Figure 9 3 3 E5255A 1IVin1 Figure 9 3 1 1 IVinl SMU1 2 IVinl SMU3 3 IVinl SMU4 DIP
344. as status biaschan list bias disen 0 bias disen 0 bias status 1 0 bias disen 1 bias status 1 0 Agilent E5250A 11 8 9 VXTplug amp play hpeS2S0a biasPort E5252A ViStatus VI FUNC hpe5230a biasPort ViSession vi ViInt16 biasport_cardno Vilnt16 bias por0 vi biasport cardno bias_port hpe3230a _init 1 4 5 0 hpe5250a func
345. ber 1 0 cg7 9 number 1 2 3 4 ALL DIAG TEST CARD STAT 2 card number 1 0 1 card number 1 2 3 4 DIAG TEST FRAM CLE unit unit CONT FPAN DTAG TEST FRAM EXEC unit 1 0 unit CONT FPAN DTAG TEST FRAM STAT unit 1 0 1 unit CONT FPAN ROUT BTAS CHAN DIS CARD cg7 number card_number 0 ALL 1 2 3 4 ALr ROUT BIAS CHAN DIS L
346. card_number 0 ALL 1 2 3 4 ALL Zs po77 1 10 OUTPUT GHp5250 ROUT BTAS PORT ALL 6 7 28 Agilent E5250A 11 NOTE ROUTe BIAS PORT ROUTHel BIAS PORT ES3252A E5255A 1 10 ROUTe BIAS PORT cg7 number card_number 0 1 2 3 4 port number lt newline gt lt END gt 1 10 OUTPUT GHp5250 ROUT BIAS PORT ALL 4 OUTPUT GHp5250 ROUT BIAS PORT 1 ENTER GHp5250 A A 4 Agilent E5250A 11 7 29
347. ch off Switch on 2 0 Units mm UGIG1O 85x60 Agilent E5250A 11 LED Figure 4 5 Agilent 4155 4156 Imtk LED 0 LED LED 4 5 6 40 V LED LED 1 LED Figure 4 5 2 LED 4 6 Figure 4 2 LED Agilent 1450 0641 6 11 19 5 gt 9 5 6 Units mm UGQ1913 5Qx50 athodg Anode 5
348. ctro Motive Force 5 3 E5252A 1 1 1 kHz 1 MHz 1000 pF E5252A Agilent 16494A 0011 5m 3dB lt 10MHz C V HF gt 10 lt 3 IL V 10 V 400 fA Agilent E5250A 11 301 501 A 23 2C S59C 60 RH
349. d_number ALL bias_port PORT card_number STATe card_number ALL state STATe card number CLOSe CARD card number LIST Qchannel list LIST Qchannel_ list 7 20 Agilent E5250A 11 ROUTe 237 ww ROUTe CONNection RULE card number ALL rule RULE card_number SEQuence cg7 number ALL sequence SEQuence Cg7 number COUPle PORT card number ALL couple_port PORT C number STATe card_number ALL state STATe card number FUNCtion channel_config FUNCtion OPEN CARD card_number ALL LIST Qchannel list LIST Qchannel list card_number channel_list 0 1121314 p 5 1 state ON OFF 0 1 rule FREE SROU channel_config _ ACON NCON segquence NSEQ BBM MBBR Agilent E5250A 11 7 21 ROUTe BIAS CHANnel DISable CARD ROUTel BIAS CHANnel DI
350. e COUPle STATe ROUTe COUPle STATe ES5252A BS25SA p 1 ROUTe COUP e STATe card number card_number 0 1 2 3 4 mode_status lt newline gt lt END gt 0 OFF 1 ON OUTPUT GHp5250 ROUT COUP STAT ALL ON OUTPUT GHp5250 ROUT COUP STAT 2 ENTER Hp5250 A A 1 Agilent E5250A 11 7 39 ECR oI FE KR ROUTe FUNCtion ROUTe FUNCtion channel list card_number p 5 1 ROUT FUNC
351. et ViSession vi Vi hpe3250a init hpeS2S0a revision query BS250A ViStatus VI FUNC hpe5250a revision query V1Sesslon vi ViChar VI FAR driver rev ViChar VI FAR instr rev Vi hpe5230a init driver revl 256 instr rev E5250A 256 8 28 Agilent E5250A 11 hpeS2S0a _ selectCompenFile A 03 00 E5252A hpe5250a compenC 6 RS H VXlplug amp play 1 1H A i
352. his document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the sep arate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or sub contract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 orasa commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regU lation or contract clause Use duplication or disclosure of Software is subject to Agi lent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data DECLARATION OF CONFORMITY Agilent Technologies According to EN ISO IEC 17050 1 2004
353. ilent E5250A 11 2 3 Table 3 1 ES2S0A E5250A ES230A p 3 4 2 I SCPI p 3 6 p 3 10 E5250A SCPI p 3 6 0 NY p3 10 E5250A Local Self Test p 3 4 ee 1 SCPI p 3 6 p 3 10 Agilent E5250A 11 3 3 ES250A ON
354. ilent E5250A 11 6 15 10 Example Using Bias Mode 1 30 TNTEGER Complete 40 DIM Channe1S 100 50 Channe1 10101 10108 1 70 Put Tnstrument Tnitial ization Routine here 80 90 ASSTGN GHp5250 TO 722 100 OUTPUT Hp5250 RST 110 OUTPUT GHp5250 ROUT FUNC NCON 120 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 130 OUTPUT GHp5250 ROUT BTAS PBORT 1 7 140 OUTPUT GHp5250 ROUT BTAS CHAN ENAB CARD 1 150 OUTPUT Hp5250j ROUT BTAS STAT 1 ON 40 channel ist Channels 30 channel_ist 70 100 ES250A 110 120 FREE 130 ES255A 140 1 150
355. lent SMU 16494A 003 80 cm 75 pF 0 16494B 003 80 cm 90 pF 16494C 001 4142B 1 5 m 140 pF E5250A E5252A 1 145 pF E5252A 2 1 8 pF E5255A 1 180 pF E5255A 2 1 60 pF 16494A 001 13m 125 pF 16494A 002 3 m 240 pF 16494B 001 1 5 m 140 pF 16494B 002 3 m 260 pF 16494C 001 4142B 1 5m 140 pF 16494C 002 4142B 3 m 260 pF 16494D 001 1 5 m 125 pF 16494D 002 3 m 240 pF 16494E 003 3 m 240 pF 8121 1191 Xm 1m 130 pF Agilent E5250A 11 4 23 4 24 Agilent E5250A 11 5 Agilent ES250A E5250A E5250A
356. lent ES2SSA E5255A 3017 Too many relays closed Max 200 200 3018 Can t change to ACONfig mode Check card confip URI 3019 Cannot use same port for Couple and Bias Agilent E5250A 11 11 13 ES230A 11 14 Agilent E5250A 11 12 SCPI SCPI Agilent E5250A SCPI
357. n BmmBR VtBKt YEF1 HBHSUPBNBHt MaRKER EURBDR BlB 553BE3BEmV 1 HUUUUUUUUUA 7 5nUUUUDUnnu MARKER 94U UUUUUUUUWV 179 H7UUUUUUUA BiB I75UUUUUU DN ta Td1in 175B05BOD0ODWA i MARKER g DDm 1 5UW MTNJMAW THTER Ip Gm FOLATE BN EBIHEET EID I 15n u MARKER diy ir EMRSE MAEKER SKIP AUTD A A NALY Ss15 n nn 9 00 Fipsph un Dn YE Vi BUU NW 1V 5 nn DFF 1 18 MARKER LINE SCALIMEG ISFLATIISHEEF TIMIMEG EDN5T TEURSDE sETUF sETUP sETUP sETUP Agilent E5250A 11 9 31 HCI 4155 4156 Figure 9 8 HCI Degradation Test is Completed Figure 9 8 HAPHT LIST FHaPHI GE MEDI UM ducTod 98 10F HUI Gmmas Shi fill Slr ioonoosecs Hawi re 1l ARKEIR OFF Gml MT 292 8 1 u8
358. play p 8 1 VFP x x x O VFP p 5 26 a b PC c 4155 4156 ITBASIC Agilent E5250A 11 5 3 CAUTION Agilent E5250A 7 SCPI Table 5 1 qp 6 1 HP BASIC E5230A VFP Agilent 4284A LCR E3230A CV1 CV2
359. r COPY SETUP Input copy SrC amp dest setup memory number src dest Enter 5 LS Enter Agilent E5250A 11 1 5 35 VEP DELETE SETUP Tnput setup memory number to be deleted ENTER to cancel gnter
360. re 7 1 E5250A Summary Message from Standard Event Queue Status Register Non empty utput SRQ to Controller Queue i NotUsed Not Use Y RQS is read by i EE now_YW Serial Poll Request 3 7 16IESBMAM 31211101 Status Byte Register Generatlon MSS MSS is read by es 4 STB Tr lt Service Request Enable Register a 5 4 3 2 10 ssrE SRE PGO4001 120x120 E3250A RQS 6 SROQ GPIB GPIB
361. re 7 4 ES250A DD o 8 5 SC eo i Eas8ms 8g cb ES amp RE 235 gt CG OG PONURQCMEEXEDDEIQY QCDPc Standard Event 716151413121 110 Status Register 1 7 ESR 8 ey 8 Standard Event RGS IN 22 2 2 WO EE amp Status Enable Register PONURQCMEEXEDDEQYERQCOPC ESE 7161514 21 110 XESE2 U Summary Message to Event Summary Bit ESB BIt 5 of Status Byte Register p904004 100x100 7 54 Agilent E5250A 11 ES2S50A 0 Operation Complete OPC OPC 7 9 1 0 2 Query Brror Output Queue QYB
362. ternational Electrotechnical Commission IEC
363. ut Port SMU1 rE os Gr SMU4 on 9 amp HF2 08 Input Port No Channel No XXXX Output Port Output Port No 5 17 Agilent E5250A 11 Table S 6 Agilent ES252A ES250A 1 1 2 1 3 1 4 MS E 5252A Table 5 6 0 1 2 2 OM ES252A 5 oo 3 4 se 4 2 2 1 10x12 0 01 10 01 1 2 10x24 0 01 10 01 24 1 3 10x36 0 01 10 01 36 1 4 10x48 0 01 10 01 48 1 0 4 2 01
364. vi ViReal64 frequency ViReal64 len hptrx ViReal64 len usrtrx h ViReal64 len usrtrx 1 ViReal64 len usrcoax h ViReal64 len usrcoax 1 ViReal64 raw c ViReal64 raw _g ViPReal64 compen c ViPReal64 compen g vi frequency len hptrx len usrtrx h len usrtrx 1 len usrcoax h len usrcoax 1 TaW _C raw_g compDen c compDen g hpe3230a init 1E 3 1E 6 Hz Agilent 16494A DUT high 0 DUT low 0 DUT high DUT low F S F

Download Pdf Manuals

Related Search

Related Contents

Gator PPO User Manual V100    CP100  Nokia 9236274 GPS Receiver User Manual    NZXT Respire T20  TH-47LFT30J  Samsung 2333TN manual de utilizador  GXV3615WP_HD User Manual  組立・取扱説明書  

Copyright © All rights reserved. Failed to retrieve file