リニアコライダー加速器のための ピエゾアクチュエーターを用いた 振動
Contents
1. 3 EPICSL D 1 010 00000 PLCI CAMACOOOOOOOO ADCO 0 80 D 0 0 0 0 D D 0 0 0 0 1 000000000040 2 Network 3 00000000000000 Operator Interface OPI 55 U 0 D DDD 00 OpLD D D D 0 0 DD DDD PC DDD DDD DDD 0 DD D D D IOC core 1 D D D D D D D D D 0 0 1 D DUD D 0 U U U IOC Input Outout Controller 000000000000000 CAMAC VMEGPIB PLC 0 0 0 00000 1 PCO U IOC UU PLC 1 1 1 1 H U U EPICS runtime database Hl H 10 U D D DDD DDD 3 D D runtime database 0 D LI EPICS D D D D D Channel Access CA DDD 0 D U I 00 TCP IP UDP P000000000000000000000PPICSOOOOODOOODOOD 1 0 1 1 eet QD D DU put callback 0 1 0C 0000000000000000 0P 000000000000000000 uuu EPICS DO B D H U U U U EPICS runtime database 000000000 U D D D 0 D 0 D D D D 0 D 0 D 0 D D 0 D 0 D D D D 0 D 0 D 0 0 D 0 D 0 0 0 U 0 8 ADCDDDDDDDDD 00 0 ADC D 0 0000000000000 00 D DDD DDD 0 000000000000000000000000000 1400 D CY PICS0000000002. teraction Point 11100 D DDD DD 70 lnm U UU UU D U U nm U U 1 U 0000000 nm U 1 11 00 0 000 D U 00000 U 17 U U U D 0 D 0 DO DO ODO DO OD DO DO D 0 0 D UD 0 D 111 00000 D mm0000000000000000000000 1106 1 1 D DO DO DO U 0 0 0 DUD 0 00 0 UD 0 0 0 U DU 0 U U 1 0 D D lnm U D 0 0 0 0 0 0 U 0 D 0 D 0 0000000000000 U DU U U D 0 DO DO DO D ODO DO DO 0 0 D D 0 D 0 0 0 D 0 0 UU U DU U U DO ODO DO 0 0 0 00 D UD 0 0 0 D D 0 0 UU U 1 U U DO OD DD O OOOO 0 0 UD 0 U D 0 D 8 0 0 D 0 U U U U D 0 0 U U U U U D DU DUD D UD D D 0 U U 3 1 10 0000000 31000000 56cm 75cm ULU SUS303 U U O 350kg 00000 U 700kg 0 31 0000000000000 700g000000000000000000000 D U U 000 500kg 1 D D 0 0 0 0 0 0 0 0 D 0 0 D SUS3030 00 U U U U YU DU 00 UU 0 00000000000000000000000000000000000 3 300 U U U D U D D 1 1 108007 U D DU D U D 0 U 000 0 U D 0 U D U D UO DD D U 0 D U DU 3200 00 U U 00000 3100000 31000000 LU U 00000 lmn 0 8 08 D D D U D D DU DU 000000000000000000000000000000000000000040 18 M20x90 50
3. 0 710 05 03 Ti y 22 yo 0 0 0 99 6 138 888116 217 8 138 888116 0 2000 0 99 429921 138 743702 217 974531 139 061344 0 4000 0 99 321701 138 659102 218 080831 139 172254 0 6000 0 99 283105 138 641142 218 129099 139 213888 0 6000 0 99 316923 138 691443 218 098375 139 183632 0 10000 0 99 420706 138 806179 217 996804 139 083375 0 12000 0 99 587012 138 976515 217 831433 138 919392 0 14000 0 99 804115 139 189609 217 613605 138 701953 0 16000 0 100 057069 139 429999 217 357998 138 444696 0 18000 0 100 328973 139 681097 217 081468 138 163784 0 20000 0 100 602271 139 926575 216 801792 137 876891 0 22000 0 100 859958 140 151483 216 536464 137 602089 0 24000 0 101 086594 140 343028 216 301616 137 35669 0 20000 O 101 269091 140 491032 216 111139 137 156144 0 28000 0 101 397253 140 588125 215 976019 137 01305 O 30000 O 101 464114 140 629772 215 903879 136 936369 0 32000 O 101 466126 140 614208 215 898715 136 930872 0 34000 0 101 403216 140 542364 215 960771 136 996859 0 36000 0 101 278782 140 417817 216 086552 137 130157 0 38000 0 101 099597 140 246759 216 268949 137 322393 0 40000 0 100 875636 140 037978 216 497497 137 561513 0 42000 0 100 619754 139 80275 216 758787 137 8
4. U U U U D 0 0 0 D 0 D 0 0 0 D UD 0 0 D D 0 0 0 180 1000000000000000000000000000000000000 U U U U D D 0 D D D D 0 1 0 0 D 0 D 0 0 0 D 0 D D 0 U U DU U 0 D D D D DD U D D 0 0 0 0 0 0 0 0 0 0 1800000000 0000000000 4000000000000 000000 00000000000 U U Dd B Bo cos 5 2 2 Au 275 B Bosin 2 3 000x000y0000000000000000 400000000000000 cm 000000000000000000000000000000000000000040 000000000000000000000000000000000000000040 11 00000 is 2 4 BE sin 2 5 UNU 0A 2 6 mc 27 000000000000000000000000000000000000000040 0000000000000000000000000000000 2800000000 000000000000000000000000000000000000000040 electron U 28 0000000000000000000000s000000000000 00000 4 0 0 08080070807100 00000 70 Ei u 2 2 2 A 0 K 6 2 7 000400000000 0000000000000000000000000000 U U 0 110 BO 2 70 BRE 000000000000000000000000000000000000000040 000000000000000000000000000000000000000040 P 1 2 8 12 000000000000000000000000000000000000000040 000000000 E rl VJ00000000000 nE GeV EAK 950 11 K2 627 2 9 000 EUDUUDUUD GeV 0 Ben 220 9 70000 00000000000000000000000000000000000000000 00000000000000000000000000000000000000000 0000000000
5. 00000000000000000000000 5 0 D U D U 0000 DU U 0 U DUDU 00 DUDUDU PZT 0 0000000 07 0000000070 OOo L1 L1 L1 L1 L1 L1 E ZZ EJ ET 23 a WER 528 b sy 00 518 3 9 0000000000000 7 U U D D D 0 D 1 UI IU 00 U 3 10 Weis 0000000000 Weiss 00 1 0 0 U 00 87087 1 311 1000 0000000 7 UU 0000000 0000000000000000040 3 3 2 00 U D D D D D D D 0 0 U 1 000000 7000N 2 00 0000 7000N 0000 0000040 0000000000000000000000000000000000000040 000000000000000000000000000000000000000040 000000000 3 12000 1700800000000000000000000000 0 10 20 30 40 50 60 70 80 90 100 U 312 00000000000000000000000000U00U000000000 00000000000000000000000 312000000000000000 000000000000000000000000000000000000000U040 000000000000000000000000000000000000000040 19 0000 25 34 1 00000000000000000000 3300000000000000 000000000000000 34000000000 ADO B000000 00 314000400V0000000000B00000000000000 abc 4 6 11 1 0 314 3 180 D 8 7340 000000 000000 0000000000000400000000000 Y000000ef000 UU 0 0 O KOOD EJ ET EEE 6 1 1 1 1 14 E 000000000000000000000000000000 000000000000000000000000000000 hide EE
6. 2 D D D 001 9 4000 DAC speed 7 45 r 40 F 35 30 25 5 2 15 5 10 5 i 0 200 150 100 50 0 Hz U 4 500ms 000000000000000000000000000000000040 000 1 1 5 80070 00000000000000000000000000 0 00000000000000000000000 0000000000000 13 DUDU record ai MOVERADV CH 1 VMON field SCAN 8 scan field DTYP Mel Plc 58 field FLNK 0 000000000000000e 00 field INP ip 5000 unit 0x101E amp S field PREC 4 field ASLO 6 2500000e 04 field EGU volts field HOPR 10 0000000e 00 field LOPR 10 0000000e 00 field HIHI 0 0000000e 00 field LOLO 0 0000000e 00 field HIGH 0 0000000e 00 field LOW 0 00000006 00 field HHSV MAJOR field LLSV MAJOR field HSV MINOR field LSV MINOR 14 0000000000 program FeedBackVertA double Vref double v double w double sum 0 int i 0 int proc l assign proc to MOVERADV CH 1 VMON PROC assign v to MOVERADV CH 1 VMON assign w to MOVERDAV CH_1 VOUT ss FeedBackVert A state ssl 1 when i lt 500 pvPut proc pvGet v 59 sum sum v i i 1 state ss2 when i 500 1 Vref sum 500 state ss3 state ss2 when delay 05 t state 881 state ss3 when 1 1 pvPut proc pvGet v w v Vref 20 pvPut w state ss3 2 HHHHLHHL
7. 60 000000 02 03 21 1 22 U2 0 0 25000 101 2 140 43801 216 2 140 438084 0 2000 23000 101 20467 140 468259 216 2 140 78854 0 4000 21000 101 208971 140 496771 216 2 141 021674 0 6000 19000 101 212826 140 521713 216 2 141 121542 0 8000 17000 101 216046 140 541366 216 2 141 080039 O 10000 15000 101 218331 140 554271 216 2 140 897837 0 12000 13000 101 2193 140 55937 216 2 140 584799 0 14000 11000 101 218576 140 556137 216 2 140 159759 0 16000 9000 101 215887 140 544663 216 2 139 64957 0 18000 7000 101 211168 140 525676 216 2 139 087411 0 20000 5000 101 204629 140 500502 216 2 138 510446 0 22000 3000 101 19677 140 470947 216 2 137 957033 0 24000 1000 101 18832 140 439128 216 2 137 463765 0 26000 1000 101 180135 140 407271 216 2 137 062691 0 28000 3000 101 173049 140 377513 216 2 136 77901 0 30000 5000 101 167745 140 351734 216 2 136 629491 0 32000 7000 101 16465 140 331436 216 2 136 621704 0 34000 9000 101 163892 140 317679 216 2 136 754032 0 36000 11000 101 165315 140 311076 216 2 137 016317 0 38000 13000 101 168545 140 311814 216 2 137 390957 0 40000 15000 101 173081 140 319699 216 2 137 854263 O 42000 1
8. 0 000000000000000000000000000000000000 0000 Appendix EPICS00000000 OU 00 LU U U U U U 00 OU D U 00 00 00 00 00 00 00 00 00 00 00 00 00 00 OA L3 1 E3 L3 L3 L3 E3 E3 el E 0 U EL E EJ ET 1 U 20 ILCO ODO 21 LLC 00000000000000000 CERNO OU 14TV000000000000000000000000000000400 0000000000000000000000000LECOO00D0000000 4 D 111000 0 00 000000000000000000000000000000000U00000 00000000000000000000000000000000000000 OO LC0000000000000000000000000000L4HCOO00 00000000000000000000000000000000000000 U U U U U U U U 00 00 U U 00 a EL 314 ET ELE ET E General Layout Plan 500 GeV not to scale U 2 0000000000000 000000000000000000000000000000000000000U040 000000000000000000000U0000000000 0 4 4 P MW 8 86 x gegia plm A 2 1 00000 BO ED 1 1 0 gt 00000000 or gt gt U UU 0 8087770 30km 100000 50km 11707770 100110 5006 0000 11 080 DUU DU 0 U 0000000000 1000000 21000000000000000000000 U U U 000 00000 O 30km 50km U U U U U U 0 0 0 U 0 U 250GeV 500Tev XU U 000000 21mm 30mm YU U UU 1 400um 300um 00000000000 KUD 655nm 554910 00000000000 400 5 nm 3 5nm U U D 0 DD U l4mrad 14mrad D 1C0000000000000000
9. 000000000000 0000000000 515000000000 515000000000 1010730 000 1 0 40 CH1 CH2 514 00000000000000000000000000000000000040 00 10082 005V000000000000000000000000000000040 U D U 515 00000000000000 CH000000 208888880 2 5ms f 00000 emp 50mV 0 CH2 500mV 000000000000000000 0000000 D D DUD 41 5 3 PLC o0o0000000000000000 PLC Programmable Logic Controller 0 LI O O 0 516g PLCI CAMACQ D D 0000 0 000000000000000000000000 12000000000000000 5 1 1 U D U U DU 1 0 0 D 0 0 1 70 L 5 16 PLC Programmable Logic Controller ODDO U CPU I a ADC DAC D 0 D Ethernet 0000 PLCOOOD GX Developer 000000000 PLC 2 0 0 I 0 0 D 000000000000000000000000000000000 5170000 RR U 5 17 21 D 0 0 D 000000000000 CPU D D 0 000000000000 0000000000 42 531 CPU D U U Q00CPU 0000000000000 LD XO 0 16 MOV DO D1 0 56us D 5 2 0710 LDXoQOOPLCOOOOOOOOOOOO X00 ON D 1 0 0 LDO 0 000000000 MOV DO 0100 8 IU U 00000000D1000000000000000000 50Hz00000000000 0000000000 5 3 2 ADC l ll ll D U Q68ADV 0000 80us 0 0000 11111 8 00000 0 625mV 0 5 3 ADC 00000000 DD U 7710 1 0 0
10. 00000000000000000000000000000000 250000000 ym 51414 2 barr a a 2 D H H H a D x s U Z gt 0 d Li eng 1 1 1 1 1 1 1 DU 00 Field Emission O 0 O Field Emission U D D D D 0 0 D UD DU D 1 1 46 00000000 DU 0000 D Field Emission D 000 00 00 U 25 082231080 000000000000000000000000000000000000000 U 00000000000000000000000000000000U000U00000 U U EE BE HHH 1 111110 BREL 8188181888 00000000000000000000000046 20 000060 0 000 85 1 1 1 0 1 1 0 D D D D D D DDD DDD 7 D DDDDDDDDDD DDD 1 H SO4 gt 9376 HF 46 10 1 D 0000 000000000000000000000000000000000000000040 000000000000000000000000000000000000000040 00 0 70 232 DDD 1C0000000000000000000000000000 _ 0 0 1 1 0010 D 0 8 2600000 GaAs GaAs 1 0 Strain Axis Parallel to Incident Photon Axis m 1 2 1 2 i Eg 1 43 eV 32 AE 05eV strain Aan orbi pas ev 43 2 34 eV t Spin orbit 3 2 T mis eMe a Unstrained Ga As b Strained Ga As 7825 3 U 26 00000000 GaAs0 0000000000 J 3200 0000000000 0
11. 2 2 3 0 30 3 1 3 2 3 3 3 4 3 5 3 6 L U ILC 01 WECH EE td dn nd gels ite Waleed mag ed STEE gt SRS Ear ES aR 2 2 lt E Seti d tod aE E cho ZE IMs 22 2 Pal DIRE ere pee eee E a 22 3 pe TS a ee 224 Ge 0 de a E TR er 22 3 REVOVE ET eR E mE SE TO EEE 000900009 DD URE atate Gid et BAL aE ai HE E kok A STE ems e e aS a SA MM ec E bel 2 35 00000000 ee Eu ee U U me awe NO I 00 000 0090 ERE OT BAe ER EAE A SS Daim De b ea SO Sp di e EE a b gai Gte kr Spd led EN Ga b gita dE ek eie dikuak e d gizakia rtea ti edita HA Sta d ag amp FAS MN ASAE E AS 22x95 EY a 364 EN ni MAKAMA DA 9 007 U 40 4 1 4 2 U 5L 5 1 5 2 5 3 5 4 5 5 U 60 6 1 0 7L 7 1 7 2 Dok ol BREW AAO 532 ADC BM Ga A a TY 533 DACA Gr d Guede eode aen Ero tss SI ERE a s 5 3 4 Ethemet llllll lt lt AA DPE E 111 211 111 1 MOD uae ese EA Y uus ter de 211 U U D U 08 0 B TEDE M gara AA ETE A
12. 84 582 0 0 00 0 0000000 3 6 3 PSD 000000000000000000000 PSD Power Spectral Density D 00 31800000 31700000000000000 31800000000000 0000000000000000000000000000000 317000 Psb000 VODO PSD D D 0 D D D D 00 318000 X000 PSDODO VO PSD D D 000 3 1700 30Hz 50Hz 60Hz DO D 0 D D 0 0 0 0 D D D 0 0 0 D OU 3180000000000000006H0000000000000 0000000 3 1700 5082 6082 0 000000000 3 18000 100Hz0 000 000000000000000000000000000000000040 000000000000000000000000 108z00000000000 0000000000000000000000000000000000000040 0000000000000000000000000 MG 1025000000000 000 1 708 q 1 N El EJ Ed E w OF GGG 04 ESI SE 29 F01 PSD X 01 PSD V KM N N 30 50 60117 50 60 12 PSD mm Hz PSD mm Hz Frequency Hz X direction Vertical direction JO0000000000000000 PSD 317 F05 PSD X i F05 PSD V K efr Eta 65Hz i over 100Hz X direction Vertical direction 3 18 00 000000000000000 PSD00 3170000000000000 00000000 30 040 U UU 00 L 0000000000000000000000000000000000000000 000000000000000000000000000000000000000040 000000000000000000000000000000000000000U040 000000000000000000000000000000000000000040 000000000000 Appendix DUDU 41 IUUUUUUUU 041000000000000000P 20000000000000000000 uua z 00801 D yy r sin 01 h 23 rcos62 D y2 rsin h I 23 60
13. KEK KEK PREPRINT 2005 77 Nov 2005 13pp 0000 0000000 4 Helmut Wiedemann Particle Accelerator Physics Basic Principles and Linear Beam Dynamics Springer Verlag 8 OHO 06 86 0000 06 pogo 00000000000000000 6 0000 18 6 0000 1 4 6 0000 06 Yuichi Morita et al Development of a mover having one nanometer precision and 4mm moving range 6 OOOO 74 M2213 0 K Saito High Gradient SRF cavity and ILC project U U UD U 1111 1110101011 101 101001 0 D 00000000 000000000 0000000000 http www keystone intl co jp products piezo detail p36 htm PI Designing with Piezoelectric Actuators Nanopositioning Tutorial http www physikinstrumente com en products piezo_ turorial php Piezoelectricity APC international Ltd http www americanpiezo com piezo_ the ory index html 65 189 0000900000 http www nahaoka ct ac jp ec mesl piezo piezo htm 19 BERNARD JAFFE PIEZOELECTRIC CERAMICS ACADEMIC PRESS 66 000000000000000000000000000000000000 4000 00000000000000000000000000000000000 0000 00000000000 20000000000000000000000000000 000000000 200000 1 83808 00000000000000000 000000 700 PLCDO 000000000000000000000000000000000000000040 0000000000000000 EPICS000000000000000000000 OOOO O EPICS O 000000 000000000000000000000000000000000
14. digo ta rea OOS A Mo d arat Ae en de el MNT Il a 28 1200000 HEK ba ke E O HC 11110111 RO ga Appendix U U 1 EPI ER AL EDE Zaire RR k2 GE 0 0 00 SS A ml da AED EE eer ee E ee TEE IR RE IEN 1 11 UU 000000000000000000000000 000000000000000000010 00 000000 1018 e 00 0 1 4 0260 000000000000000000 dU D 50km 0 0 000000000000000000000000000000000000 0000000 0 0000000000000000000000000 IR interaction region U nm U U D U 0 D 0 U D U 1 D D U U D U D imn UU 0000 lnm D U 0 0 0 U D 0 0 0 0 U 00 0 0 0 00 0 0 1C000000000000000000000000000000000 00000 0 77340 00000000000000000 0 70 Kco0o000000000000000000000 00000000000000000000000000000000000040 00000000000 700g00000000000000000000000 0000000000000000000000000000000000000 U Jm O00000 4mm000000000000000000000000 00000000000 1 0 0 U 0 0 0 0 o 1 ET 1 1 OE EI EI E3 EX E ELE 1 1 E EE 1 ET ET EJ EL EL E E 000000000000000000000000000000000000 0000000000000000000U0000U0000U00U0000000 U U UU 0 U 0 0 U 00000
15. i i i i 10 56 10 58 10 6 10 62 10 64 10 66 10 46 10 48 10 5 10 52 10 54 10 56 10 58 displacement mm displacement mm output V output V U 5 000000000 0 260 D 0 DU 5 2 1 023L 0 OOO 1027 10 OOO 10 1 710 37 0000 U U 0 0000 0000000000000000000000000000000000000040 000000 100000000000000 5 100 17 2 _ 000000000000000 5 4 0 D 1 51200000 5 12 000000 2mV 0000000000000000 1 m VOC00000000000000000 000 20nm 00000 0000000000000000000000000000000 00000 0 5120000000000 0000000000000 M20x90 ARR E ZA OWES 16 72 OTE U 5 10 U 0 0 0 0 0 0 000 00 0 U 38 U 5 11 000000000 L0000000000000000000 2 05 mv qe Vu 1 60 Zio 512 00000000000000000 2mV 000000 8 250ms H 00000 2mV LHHHDHHIHHHHHHHHHHHH 101 08 710 U U 0 0 U D U 2 00000000000 20m0 DO D 0 D LO DU DUU 39 5 2 10 bAC0000000000000000000000000000000000000 5 1300 DOOD 5 0 1 0 D 0 0 1 310 U U 5 140 1000000008 000000000 5 13 000 1 1 0 0 0 U 0000 O 150V 0000 0 LA MAX U U U D 0 U O 150V 0000 DC 100KHz 0000 10V MAX U U U DD 000 100KQ U U U 25dB 150 U 5 0000000000000000000 0000000 100Hz 005Vg00000000000000000000000000 U U U U 0000000000
16. 0 AB 490 3 2 00000 31 1000 56 0 75eml U SUS3030 000 350kg 000000 700kg 0000 U 33 7 19 U U U U 0710 6 000000 X Y V 0x 0y 0v U U U U 0 4um U U U U Inm 0320000000 000000000000000000000000 330000000000000040 000 45mm D D U D 10 U U U U U U U U U U U U 3 U U U U U U X V 0y U U U U 4 5mm 0000 0 1m 0 33000000 3 2 0000000000000000000 3300000000000000000000 0000000000000000000 3400000 3300 350000000000 U DU DD U 0 72 0000 00 50000 U D D 020000 U 34 0000000000000 000000000000000000000000000000000000000040 00000000000000000000000000 3400000000000040 0 1 018188080730 00000000000000000000000 U D 7 000000000000000000000000000000000000000040 000000000000000000000000000000000000000040 0000000000000 35000000000000000000000000040 000000000000000000000000000000000000000040 000000000000000000000000000000 XVOUD YODOO 000000 20 U 34 0000000000000000000000000
17. 0000 180 00000000000 0000000000000000000000 00000000000000000 0000000000000000000000000000000000000000 3 thetal theta3 0 x 10 slope rad pulses to the motors 1 5 U 46 40 50 00000000 00000000000000000000 U 1 1 70 0000 188700 34 BU U UU U U 00000000000000000000000000000000 50Hz00000 0000000000000000000000000 51 106 000000000000000000000000000 0000000 M2213 OCOOOOOOOTRA616 100 V1 0000000000000000000000000 0000 5100 530000 u a Z Krit BEM SC HEED WERE 0 5 2 0000000000000000 0000000 GNDOOOO U 51 1070 5 1 1 lll ll U U 0 1106 GENS 5 1 0000000000C000000 000000000000000000000DU 0000000000000000000A000000000000000000000 000000000000000000000000000000000000000 Z 00Z 5 20000000000000000000000000 70 35 U 54 U 53 000000000000 EEE E wuj m E gt D RENEM 5 5 00000000000000C ex 000000 36 512 U U U 5 001000000 000 00000000000000 dU 8 107878 D 0000000000 5800 5900000000 580 5 90000000000000 000000 100owm VOOOOOOOOOOO 00260 00290 000000000000 0000000 TH t tZn 2 U 5 00000000000000000 U 56 000000000000000 000000000000000U00U000 00000040 Capasitive Sensor 0026 Calibration Capasitive Sensor 0029 Calibration 8 2 2t 4 2 ra 4 i i i 4
18. 0000000 0000000000 0 0015 D D DD D DDD WDD DDD DDD D D D D D 0 0 D 60 Mev D 0 0 000000 40 225 0000000000000000000000000000000000000000 0 1 000000000000000000000 000000000000 1 000 2 3 ILCO DUO 231 D00000 IZ DU DO 000000000000 1 00 U 2200000 230 DESYOCOOOOO TESLA D D 0 D D 0 0 LCD D D 0 0 0 0 0 U 0 11 86 00000000000000 _ 7 4010 1 1 8 0 0 0 U 0 0 U 0 1 1 00000000000000000000000000000000000000000 000000000000000000000000000000000000000040 U U U 0 UD 1 1 04 0 00000000000000000000000000000000000U0000040 000000000000000000000000000000000000000U040 000 60000 KEK D TESLA 0 000 00 70 po0000000 240 ICRIRO D D D 0 0 I D 0 ICHIROD OD TESLA 1 000 D U 0 00000000 000 U U 23 TESADODODO 0000 00000000000 2 4 ICHIRO 0 00000000 U U U U 000 000 1 3GHz UNU 23 06cm 0000000000 9 0000 1 038m 0000 Cc0000000000000 14000 0000 ILC U U U U U U 0 U U U U U U O 300000 5006 71 31 5MV m ITeV U U U U U U U U U U U 36MV m U 2 2 1000000000000000 00000 Field Emission D D D 0 D D 1 000 8 0 UD 1 0000000 2 0000 3 0000
19. 0000000 1046 1 0 0 0 0 1 10 0000000000000000000000 1 0 0 D 0 0 0 0 0 0 0 D 710 00000000000000 1084 1 D 0 0 0 D 0 0 0 D 0 0 0 D 0 0 0 D 000000 100000 Bo 1070000 w 10emQ 00000000000 2 9 0 000 156evgg00000 LC0000000000000000000 80 233 10010 0000000000000000000000000000 0 2900 210000 U 008860 000000 TME Theoretical Minimum Emittance O0 00000000000000 U 1 U 0 0 0 3 0 DO 1 DO DO DO 0 D UD D U U D D UD UD U 0 710 0000000000000000000000000000000010 23000 90 13 U U U U U U U U U U U U U U U Sum U U U U U U U U U U U U U U U 0 02um 200ms 10ms 0000 6mm 0000 U 2 3 760 2 34 ILCO IRO O Final Doublet O 00000000000000 am 08 0000000000 Fainal Doublet 107340 00000000000000000000000000000000000040 00000000000 D 1 1 0 00 310 0 00 070 00 00080 L1 E 1 1 i I Horizontal o 11 U 2 10 Final Dowblt 0 0000000000000000000000000000 000 41 0 Final 2 100 Double JI
20. 00000000 300000PLCOOODADCOOOODOOODOOOOODO 0000000000000 DACOODOOOOODODOOODOODOOODOODODOUODOODADCOOOODOO UDD pvGet D IOCHH 0 00 0 8 0 00 00 pvPut 100 PLCOOOOOOPLCO 4 0 0000000DAC00000000000000000000000000000 60 00000 Ethernet Ethernet UL L 3 0 0 0 0 D D PC D OPIO 0 0 12 EPICS00 CA000000000000000000000000 1082000000 0000000000 50312 1 0 0 D D 1 D 0 1 0000000 57 O 0O 10Hz 1 IOC DD 00 DD DD D D D D D 0 UO 0000000000 1 U U U U 0 U U 0 DO OD 000 DDD DDD DDD DD DUI DAC 100 00000 00000 DAC 00 DD 000000 0 D D 0 0 0 D O DO DO ODO D D DO D UD 0 D 0 D 0 D U UD DU 1092 U U DU U D D D 0 0 D 0 D D 0 0 0 DUDU 1 U U U U D 0 0 D UD 0 D 40000000 U DU U 0 D D O DO DO DO DO D 0 0 U U D 0 0 UD 0 D 0 0 0 DUD UD 1 DD 00 DA D 000 0 PLCN 0 1 1
21. 000000000000 0000000000000000000000U0000U00000U000000 16mm 000 10 618 n gt 11 11 U 35 OOOOOOOOOOOOOOOOOOOOOOG 21 33 0 1 1 U 0000000000000 0 0 0 0 1 0 0 U 0 3 90008 730 00000 U 3600000000000 M8 7mm depth U 3 010 331 0000 PZT 0000000000 0000000000000 PZI0000000000 0000000PZTOOOO 000000000000000000000000000000000000000040 16000000000000 38 000000000000000000000000 000PZTOO00000000 0 3 8 2 0 PZ7T0000000000000000000000000 Wes0 000000 0 3104000000 Weiss D D 000 0000 80000000000000000000 D DDD 4 0 0 1 0 00P22000000000000000000000000000000000000 PZTO Weiss 00000000 1 000000000000000000000000000000000000000040 22 U 3 8 0000000000000000000000000000000000000 000 000000000U00U000000000 Wes0000000000000000040 UU Weiss 00000000000000000000000000000 Wees O U 0000000000000 3106 000000000000000000000000 000000000000000000000000000000000000000040 000000000000000000000000000000000000000040 0000000000000000000000000 weiss DU U D U D 0 0 D 0 D U 0 U 000000000000000000000 3 1100 0000000000000000000000000000000000000000 00000000000000000000000000 PZ 0000000000 00000000000000 0000000000000000000 3 0 D U 0 U U 1 707
22. 0000000000000000 62000000 0000000000000000000000000000000000000000 0000004ADC000000000000 7100000 7100000000000 0 1 1 02 000000000000000000 2mV 200m 0000000000000000 a3mv 30nm OOOOOOOOOOOOOOOOOOOOOOOOOOOOO PE lai SAJ p n M 4 A 2mV Sea U 71 100000000008070 000000000000000000000000000000000000000040 0000000000 52 72 01 00000000000 I RUNUOTOOUOOOU lum U DU U 0 0 U U lnm U L 0 D U D U 0 OU 0 0 0 U D U 00 U U U U U 0 0 0 0000 111 7 U 00 0 00 U 00000 4 1 PLC 2 EPICS U D UU PLC D OO CAMACO00000000000000000000000000 U U 0 CAMAC D 1 0 D 0 0 0 1 0000000000 CAMAC 1 1 0 1 1 0 000000000000000000PLCOOOO 1 00000000000 000000000000000 EPICSO0000000000 8 U 1 0 0 D D D IOC D 1100 1 0 50Hz 00000000 EPICS000000000000000 00000 Ll 000000000000070C0 PLC D 0 0 0 D 0 D 000 00 D 0 00 DD 0 0 0 D U U PLC DU EPICS00000000000000000000000000000000 00000000000000000000000000000 1482000000000 000001200000000000000000000000000000000U040 000000000000000000000000000000000000000040 LHZ D D D D U 0 D U 0 0 U 0 0 0 0 0 0 U D 0 0 0 0 0 0 U 0 D 0 0 0 U 0 0 0 000 U 0000000000000000000000000000000000000000040 0000000000000000000000001H00000000000
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25. 0000000040 000000000000000000000 2 64000000 0000000000000000000000000U0000000000000000 0000000000000000000000000000000000000U00U040 000000000000000000 3 PC U 63 0000000000000000000000 0 64 000 500ms D CH D 50mV 0 00 CH20 5mv QO 000000 000 107370 48 6 1 2 OOOO 0000000000000000000000000000000000000040 65 000000000000000000000000 1047 7 0000 00000000000000000000000000000000 0 bAC00000000000000000000000000000000000000 0000000000 4DC0000000000000000000000000000 66000000000000000000000000000000 DACOOOOO 0000000000 2m000000002m00000000000000 o PAM 66 0000000000000 cH0000000000 0 00000000000 2ms 0000000000000000 10ns U D D DUDU 25ms D 00000 CH1 50mV 00 CH2Q 07 00000 49 613 0000000 0000000000000000000000000000000000000000 000 6800 69000000000000000000000000000000040 000000 ON 11 0000000000000000000 6800000000000000000000 po0000000000 8 1 U D U 1 1 708 000 UO U DU 1 08 4 0 PC 212538 BE 20 7 U 50 69 0000000000000000 000000000000000000 ON 000000000000000 0 000 00000000000000000000 0 6 8 000 0 17 8 51 U TU LIHHLHHL 71 DD 00000 30Hz00000000000000000000 20 00000000 0000000000000 1820 1 11 U 00000000000000000
26. 000000040 U 180 890 000 00000000000000000 4 047 67
27. 0000040 ELE 111 008 7 08 56116 83 00 190 10 ET EZ E LEE ET EL ELE E E ET ET EE U U 00000000000000000000001 LC D D D D IR Interaction Region 000000 ILC DDD 0 U U 0 D D 0 0 0 D D D 00000 ROO nm D D D D D D D D 0 D 0 D D tam U UD D D D 0 0 D D D D D 0 0000000000000000010 006 1 D D D D 0 0000000000 inm U D 0 0 D 0 D D D D D D D D D D D 0 D D mm U D D D D D D D D 0 D D D D D D D 0 0 D DUD D D D D D D nm U 0000 JU 1 0 0 D DD _ D D D D D D 0 D D D D 0 D D D 0 U U U D D D D 0 0 D 0 D D D A 0 D D D D 0 0 0 0 0 0 D D D D 0 0 D D D D U D D D D 0 0 D D 0 0 D 0 0 0 D D D D D D 0 0 1 U D D D D D D D D D D nm D D D 0 D D UD D D D D D D 30420000 D DDD DDD DD 0 0 PSD Power Spectral Density DD H1 DDD I D D 00000000000000 502 D D 1 D D 0 D 70 0000000000000 PLC Programmable Logic Controller U D D D D D 0 0 0 D D D D D 1 D D 0 D U 0000000000000000000000 2000000000 00 50Hzf 1 70 1 LH EE EL EIERE EI LTD UL 010 0 21 2 1 2
28. 00040 00000000000000000000000 3mV 30nm D D 0 0 2mV 20nm 00000000000071000000000000000000000000000 0000000000000000000000000000000000000000 000000000000000000000000000000000000000040 000000000000000000000000000000 660000000040 00000000000000 lms U D U D U D 0 D D 0 0 D 0 D 0 0 0 0 0 0 0 U D U 000000000000000000000000000000000000000040 000000000000000000000000000000000000000040 000000000000000000000000000000000000000040 000000000000000000000000000000000U00 000000000000000000000000000000000052005500 6 1 20 90000000000 1 000 1108 2 111100 1ms 53 3 0000000000 20005 0000000000000000000000 1 0 0000000000000000000000000000000 pvPut pvGet 000 0000000 100000 5mss 00000000000000000000000 U 0000 10 e 000000000 U U 0 0 U UU UU DUDU UU DU UUU 00000000000000000000U0040 00000000000000000000000000 00000000000000 000000000040 54 Appendix 1 EPICS 05170 0000000000000 00000000 0000 0000000000 00000000000000000 PCD DDD 0101 OU EPICS Exper imental Physics and Industrial Control System 000 PLC 111 U D 10 EPICS 0 Argonne National Laboratory Los Alamos National Laboratory J 1 O 1 1 360 U D D D 0 0 D D D D D D 0 0 1 D D D D 00010 0000000 PLC D 0 D 0 PC000000000000 7 0000 EPICSO PLC00000000000000 VMEQ CAMACT 000000 200 20 10
29. 32525 0 44000 0 100 347182 139 554588 217 037068 138 118427 0 46000 0 100 074793 139 308728 217 315071 138 401266 0 48000 0 99 820116 139 081313 217 575024 138 66327 0 50000 0 99 600145 138 888242 217 799851 138 887968 U 3 0 0 0 pa 0pp000000000000000000406 006000000 U U 0 U D U 0 0 0 D 0 0 U D 0 0 63 U U U U 1 U U U U U U U U U U 0 0 001000748 0 001121884 0 001616693 0 001828255 0 001804423 0 002063712 0 001550615 0 001855956 0 000873285 0 001191136 0 000179961 0 000124654 0 001536323 0 001288089 0 003104147 0 002922438 0 004780287 0 00468144 0 006457649 0 006468144 0 008032208 0 008144044 0 009409102 0 009626039 0 010507548 0 010817175 0 011264575 0 01166205 0 011637604 0 012105263 0 011605999 0 012119114 0 011171731 0 011703601 0 010359228 0 010900277 0 009214417 0 009750693 0 007803008 0 008282548 0 006207808 0 006634349 0 004524991 0 004847645 0 00285914 0 003074792 0 001317106 0 001412742 8 63264E 07 0 64 0 4 0 0 0 0D000000000000000 10 11 12 13 14 15 16 17 L U U Ryuhei Sugahara et al Ground Motion Measurement and Vibration Suppression at
30. 6 10 000 3 20 0 00000 1 4 0 000000000000000000000000000000000000 1000 000000000000000000000000000000000000000040 00000000000000000 5 000000000000000000 GaA 0000 00000000000000 J lt 320000000000000000000 0 U un 000000000000000000000000000000000000 50 0 000000000000 GAs 000000000000000000000050 0000000 GAs000000000053 320000000000000000 DO SLAC D D D 0 0 D D 00000000 0000000000000 0000000000000000 GAs0000000000 26000000000 10 100 0000000000000000000000009 00000000000 000000000 GaAs0 B U U NEA Negative Electron Affinity D 0000 U U D D D D 0 D D D D D 0 0 D D D 0 D D D D D 0 D D D D 0 D 0 D 0 0 D 0 D D 0 U 1 Ga DDD DDD GaAs000 Ca D 0 0 0 0 D 0 D D 0 U 00000000000000000NEA GaAs 1 110 1 096 D 00 na 680 1 1 1 8 0000000000000 2 0 0 U 0 0 DUU U D UAU 1 40 Electron Conversion beam Target To Positron Linac Capture Helical undulator System U 2 000000000000000000000000000000000 700 Ti 6 AAR 0
31. 7000 101 178396 140 3342 216 2 138 377961 0 44000 19000 101 184025 140 354492 216 2 138 93073 0 46000 21000 101 189621 140 379479 216 2 139 479776 0 48000 23000 101 194975 140 407828 216 2 139 992434 0 50000 25000 101 199996 140 437987 216 2 140 437787 0 1 6 0H x DD 0 0 PU 0000000 0000000000000000000500000000000000000000 61 U U U U U U U U U U U U U U U U U U 2 33144E 07 1 38504E 05 0 001009062 0 001108033 0 001653712 0 001828255 0 001889744 0 002132964 0 001697057 0 001980609 0 001082376 0 001371191 8 01117E 05 0 000360111 0 001248755 0 00101108 0 002819938 0 00265928 0 004531236 0 004445983 0 006269776 0 006288089 0 007920415 0 008033241 0 00937452 0 009584488 0 010538089 0 0108448 75 0 011338401 0 011717452 0 011728486 0 012160665 0 011689178 0 012160665 0 011228899 0 011731302 0 010381598 0 010900277 0 00920336 0 009709141 0 007768258 0 008227147 0 006163743 0 006565097 0 004485928 0 004806094 0 002834696 0 003060942 0 00130876 0 001412742 6 3012E 07 0 U2 0h 0006 7 060000000000000000 62
32. 883 D d ya rsin03 h 12 23 11 yo GE 4D 4 1 cam journal plane U 41 000000 0000 r v D 9 00000 AD P2000000000000000000 0000 410 00 0 r 1 6mm 1281 5mm h 81 13mm d2115mm D 158 7mm 000000 20000000000000000040 31 1 60 0 00000060 00000000 60 180 000000000000 00000000 2 20000000000 4300000 430000 24000 U 200000000040 2 010 630 000002000 000000000000000000000 0 440000 710 42 0000000000000000000000000000000000 420000 00000000000000000000000000000000000 2000 000 1 je U 420000000000 U 450000000 4300000000000000 4600 4400000000 0 32 x1 y1 th1 0 000000 rr ER MIL 2 136 136 102 101 5 101 100 5 100 99 5 99 98 5 98 215 215 5 216 216 5 217 217 5 218 218 5 219 x2 mm U 43 40 0 000000 0 OOOOOOOOO sO 1800000000000000 00000000 20200000000000 018 20000000000 x1_y1 th1 0 000000 th3 0 142 E E 1 k 140 Ee rw 2 5 839 j i Lay 5 a 2mm N 136 136 102 101 5 101 100 5 100 99 5 99 98 5 98 215 215 5 216 216 5 217 217 5 218 218 5 219 x2 mm 0 44 0 0 60 0000020000 0000000000000000 AD PU 0000000000 2000000 PU 0 33 slope rad pulses to the motors in U 45 40 00000020 000000
33. A GO E EO E DIE nr EZ GE a6c 00000VO0C000000000000000000 U DUDU U o as 59 n 2 EI d 727 15 KSA a 5 5 5303 0 313 000000 26 560 0 3 14 0000 27 3 5 UUD 00000000000000000000000 10251 00000 0 Servo Amp Displacement Detector Pendulum or Flexure VCM Driver or Torque Driver 3 15 00 0 MG 102S U 3 16 000 MG 102s0 O 3 5 1 OOOO 00000000 31600000 31600000000000000000000000 000000y00000000000000000000000000000 000000000000000000000y00000000000000000040 000000000000000000000000000000000000000040 0000000 de dt 0000000000 0000000 00000000 3 1 3 5 2 00000000 350000 0000 2G 0 5102V s m 20111 1075m s 00000 DCO 4008 U 3 5 0000 MG 1025 000 28 3 6 UI 0000000000000000000000000000000000000000 U U U U 3 6 1 O00000 mm U D D D D U 0 D U 3082 D D 0 0 D D 0 0 0 DUDU 000000000000000000000000000000000000000040 00000003 00000000000000000000000000000040 000000 34 00000000000000 024 000 00000000000 000 0 1 3 6 2 0000000000000000 D U D 0 D D 0 0 D U D U D 0000000 U DU 0 U D U D 0 0 UD 0 0 0 U 0 0 0 U D 0 0 U D DU 0 U 2 50 DU 0 UD U 0 0 00 U 0 0 UU 000000000000000000000000
34. D U D 0 0 0 D 080 760 80us x 8 0000 160us 8 5 2 0000000 50Hz0000000000000U00U000000 53 3 DACI I U 00 Q68DAV 00 804s 0 0000 000000 8 00000 0 625mV 54 DACJOOOOOO 43 U U D U D U U D 1101 1 80us SD 0000 640us 5 3 0000000 50HEz00000000000000000000000000000040 00 0 5 3 4 Ethernet L 0 QJ71E71 100 0000 100Mbps U U D D DD 0 D 0 0 D 0 U U U U U U U U U U 16100000 O 5 5 Ethernet 0000000 54 gag 0000000000 U s180000000000000000000000000000000 O00 150V 0 0000000000000000000000000U00000000000000U040 000000 5 191 010100 0 U U D D 4 U 0 0 00000000000 320000 55 90 0000000000000000000000000000000000000000 00 520000000000000000000000000000000000000 00000000000000000000 cH100000000 52000000000 0000000000 CHe20000000000 52100000000 1 0 0 D 0 U U 5082 00 U 44 5 18 U DU DU U DUDU D U DU 1 00 150V 00000000000000000000000000000000000U00000 000 piezoA ch2 mesurement 0 6 T T T T 0 5 0 4 0 3r 0 2r Dir movement of table um 0L 1 1 1 1 1 1 1 1 1 01 0 20 40 60 80 100 120 140 160 Voltage on piezo V 519 00000000000000000000000000000000000040 000000000040 45 22 5 20 10000000000 7 00 0000040 erta BA OA
35. D D 0 0 1 1 0 21 T Final Doublet JO D D 0 0 D D 0 1 000000000000 000000000000000000000000000000000000000040 00000000090Final Doublet 000000000000 Final Double D D D D 14 00000 0 o V2 Bl a P V2 1 a 2 10 2 e L 6 gt 2 1 oy U U U zzil z 10000000000000000000 eil o 000000000000 LOO 2 10 1 1 D 0 D U D D U U D U DU el pv 00000 siv 1 0 00000000000000000000000000000U0000000000U040 000000000000000000000000000000000000000040 U U 0 U D 00 0 D 0000 U D U D U 0 D U 0 0 0 00 878 0 0 00 0 00 DUDU 0000000000000000000000000000000000000000 000000000000000000000000000 12000000000000 U U 0 U D U 00000 U 1 Geometrical Aberration OD H H D E 7 2 0000000000000000000 0000000KcC0000000000000000000U0000000U000010 U DDD D D D D D D D D D U D Geometrical Aberration 0 0 O U DD DDD DDD DD 0 D 0 DDD 00 D 0 DD 0 D 0 D D UO D D D D D D Local Chromaticity Correction 1 D D LU 0 D 0 0 DO OO DO UU U Local Chromaticity Correction Y 000 21100000000 1 Chromaticity and 2 Order Dispersion Correction i M I i i 1 1 Sextupole Pair S i i i i fn 000 Final Doublet 1 1 Sextupole Pair 2 11
36. Local Chromaticity Correction U D D U 0 D D 0 D D U Final Doublet D 0 1 0 15 DU 0 D D D DD 0 Final Double DD D D 0 D D D 0 D DU D D D 0 D Final Double D D DD 0 D DD D D I i Uu DD 0 D 0 D D D 0 DU D D D D D U Geometrical Aberration D B DB B D D 0 0 0 D D D D C D D 0 D UD U U D 0 D 0 D D 0 D D D D DO 0 0 0 D 0 D 0 D 0 D D D 0 D D D D 0 0 0 0 U Geometrical Aberration 0 00 Ka rri ba 2 11 U U D U 0 U D 0 0 DO DO D UD UD 0 000000000000 s200 U U D U D 0 0 000 U DU 2 11 1 1 D D 0 0 0 D U D 0 U D 0 0 D 0 0000000000 2 11 0 0 0 0 0 Local Chromaticity Correction 000000 0000000 Geometrical Aberration 1 U DDD DDD DDD DD D D dispersion n 00 Final Doublet OO 1000000 Transfer Matrix Y EC EU B U 0 Final Doublet 000000 KO OOO K Ka 7 2 12 UD 0 D D 0 8 1 1 70 U U D D D D D D D D 0 0 D D 0 D D D D D 4 D 710 0000000000000000 C222 000000000000000000000 U D Final Dowblet7 0000000000000000000000000000000000U00 212000 00000000000000000000 2120000000000 16 2 3 5 11100 U 1RO000000000000
37. MBA na yr su L 1ms AM igan d AEK mi 52 00000000000000000000000000000000 CHI O Cz20000CH1000000000 CH20000000000000 Joe 00 000 1ms 000000 CHL D 500mV 00 CH2 B 0000 46 161 U U 000 00 000 U 61 10 0000000000000000000000000000000000000000 000000000000000000000000000000000000000040 0000000000000000000000000000000000 6100000 0000000000000000 620000000000000000000 ADC U U U 0 U 0000000000 0000000 7 4 0 U D D 0 0 DU reference 0000000 reference 1 U U 1 1 U U D UU DAC 1 1 D D DU 0 D 1 1 1 reference 20Hz 5001 11 D D D 0 0 D 1 D 1 0 0 DAC 1000 0 400000101 10000 0 DOU Appendix 0000 600 PC M20x90 ABRE E BEE gie Zn 3 06 1 1 7030 000078 9 62 0000000000000000 00 E AKt it 70 2700 S T0 Zn 201i 47 6 1 1 ID Ul 0000000000000000000000000000000000000000 00000 6300000000000000000000 IESU 7 000000000000000000000000 00000000000000000000 ADCOOOOODACO0000000000 00000000000000000000000000000000
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