1. 5 6 8 RFQ IHL 2. 4 6 4 3. 7 6 5 RF 6 6 6 7 4. 3 6 2 A B C D BE RF F RF G H 6 3 RFQ RFQ HL HL 5. A E lt H 27 4 30 HIMAC H BCR RFQ IHL RFQ HL 2 RFQ IHL 1 6 1 1 RFQ 6. VSWR 4 CAD 8 6 1 7. I O ON OFF 0 10V 0 10V RF 3Hz RF RF Es 8. f 6 2 6 8 1 1 34 E E E 9. A 1 B RF C RF 2 IHL A 1 a 3 20 kW WX 39D NF H Hl B RE 50 kW C RF WX 77D NF 3 1 2 RF 1 1 2 rr 10. r 2 EIA19 1 2 1 200 Hz 1 MHz 50 Q 0 5 1 2 ms 4 Hz AC200V 3 3W 50Hz 10dBm RF N Female RF 1 O AC200V 3 3W 50Hz RF BNC Female RE BNC Female BNC Female DC 11. LED LBD UVW 1 ON OFF ON OFF PLC OMRON Device Net