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1. NV edso a N mn N m2 lt bar at Torr sw X sw 197 sw 04 so 869 eg 62 ss 3 mg 97 2 1 2 5 4 0 a NC 4 a ER de 8 SHIBAURA ELETEC CORPORATION 247 0006 2 5 1 TEL 045 896 0823 FAX 045 896 0837 http www shibaura co jp eletec2. SH 3AURA PIRANI GAUGE PG SERIES PG Series 2014 Rev 1 PG 1 Ox10 1 0x10 Pa 6 Bo 8 Pa 3 ERR SP1 FY 3 fF sm BOw og a vler PIRANI GAUGE CONTROLLER PG 20S NSH a4URA PG 20S PG 30S 1 0x10 1 0x10Y Pa a AC100V 1A ON 2 b 0 5VF S 1V 1 1k 5 40 C 909 96 W x 96 H x 120 D mm 92 W x 92 H mm 3m x 1 WP 02 15 18 3 SMEO059A01H1404
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