【PDF】ヘリウムリークディテクタ HELEN シリーズ
Contents
1. 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 GS He TYK37 LD 12 2013 8 M212LD D NMW25 LL al aa M 222LD OOOOOOOO 9 6 OOOO 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 4 ms 1 GS He TYK37 LD 12 2013 8 M 212LD M 222LD M 232LD PC FE P Fe M 212LD M 222LD M 232LD2. M 212LD D M 212LD M 212LD D He M 222LD H D M 222LD He M 222LD H M 222LD D
3. Pa m Ss Pa m s 1 1m Pa 1 0 x 101 Pa m3 s 1 1m 0 00000000001Pa 100 000Pa 17 H He He N 0 H O Pam s TorrL s atmrec s mbarrL s 7 502 9 872 1Torr L s 0 1333 1 316 1 333 0 1013 1 013 1mbar L s 0 7502 0 9872 1 0 x 10 Pa mi s 1 0 x 10 mbar L s 211 8502
4. M 232LD M 232LD He 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 GS 1 He TYK37 LD 12 2013 8 2 HERLEN 12 013 Pa m s Pr 0 0 ONIU9 AU Fine 5 0 Middle 2 0 Middle1 1 3 Middle 2 0 Middle 2 0 L sec Gross 0 5 Middle2 0 3 Gross 1 8 Gross 2 0 0 5Pa m sec CO
5. 1 He 5ppm He M 222LD START STOP He
6. W20 9 14L He 1 25MPa 2 0 4MPa He 0 3mm 150mm 3m 1m a 2 18 6MPa 95m He 2 18 6MPax95ml 18L 0 0 15MPa 1m 0 1MPa 200mm
7. 211 8502 370 TEL 044 435 5856 FAX 044 434 9091 He TYK37 LD 12 2013 8 He He He
8. 370 TEL 044 435 5856 FAX 044 434 9091 GS He TYK37 LD 12 2013 8 M 212LD 2 300 000 M 212LD D 2 980 000 M 222LD 2 800 000 M 222LD M1 3 400 000 IM 222LD 275L min M 222LD H 3 500 000 M 222LD D 3 400 000 M 232LD 2 580 000 981 9360 ASL25N 50 000 0 10 9 2 x 10Pa m 981 9361 ASL25V 70 000 ie 109 2 x 10 9Pa mi 981 9370 M 212LD 64 000 0 1 Pa m S 5m 981 9371 M 222LD 64 000 0 3 Pa
9. PC Windows PC CSV Microsoft Excel PC RS 232C 9Pin USB RS232C PC He amp
10. PC He MCP He CVD SEM
11. 12 2 Pa m s He 5ppm He 8 2 Pa m s He M 232LD M 212LD M 222LD 3 1 Pa m3 s 4 1 Pa m3 s
12. 7 CO GS He TYK37 LD 12 2013 8 http www toyokokagaku co jp HELEN 3 He He leak detector He He He He
13. m S 5m 981 9351 31 000 1 981 9350 18 000 M 212 364 000 M 222 434 000 HELEN2 PC 120 000 ICD ROM RS 232C 3m He 50 000 He 84 000 2 5 24 000 95ml x 18 6MPa 18L NW25 He M 310LD D A 240
14. 02 Gross 1 8 aT NW25 ISO KF25 TMP SDRP RP DRP 30 20 y 142 8 250 L min 30 5 L min RS 232C 9 I O TMP RP DRP SDRP 2011 12 M 310LD D HELEN2 240 x 320 LCD M 222LD LCD START STOP VENT 1 MENU 1 BG SUB SETPOINT UPDOWN CAL BUZ a TO ANGE COE Pa 4 RE
15. M LD A 250M LD 2013 8 TEL 044 435 5856 FAX 044 434 9091 211 8502 370 TEL 044 435 5856 FAX 044 434 9091
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