マニュアル PSG100-SD デバイスネット通信プロトコル tina20j1
Contents
1. 1 Copyright 1991 by MaschinenbauVerlag GmbH Lyoner StraBe 18 6000 Frankfur M 71 FAX 1 1 Order No 2121 7INFICON 16 tina20j1 0106 PSG100 SD PSG101 S ga 7INFICON http www inficon jp 222 0033 2 2 8 NARA II5 222 0033 2 2 3 22 1 TEL 045 471 3328 FAX 045 471 3327 Document tina20j1 0106 TEL 045 471 3326 FAX 045 471 33272. I 7INFICON 9
3. DeviceNet 99 DeviceNet MNS LED DeviceNet 1 1 DeviceNet 2 3 MNS LED 1 PSG100 SD PSG101 SD tina20j1 0106 PSG100 SD PSG101 S ga 7INFICON MAC ID DeviceNet PSG100 SD PSG101 SD MNS LED EEPROM
4. 3 7 6 5 4 3 2 1 0 0 1 2 3 4 5 6 tina20j1 0106 PSG100 SD PSG101 S ga 4 7INFICON 7 6 5 4 3 2 0 3 0 T 1 2 3 4 5 6 7
5. 4 T 5 4 3 5
6. MAC ID MNS LED PSG100 SD PSG101 SD 64 89 93 98 MNS LED PSG100 SD PSG101 SD 125k 2 125k 250k 500k IO COS DeviceNet 11 25V CAN 2 0V p p 1 5V p p 500 2 0V CAN H CAN _L 3 0V CAN H CAN_L 0 95V
7. COS 1 100 7 REAL IEEE 754 2 3 4 5 SEEE EEEE IEMMM MMMMM IMMMM MMMM IMMMM MMMM S 1 0 E 2 127 M 23 MSB 1 tina20j1 0106 PSG100 SD PSG101 S ga 11 7INFICON 12 5 3 2 1 0 C1 hex 48 hex 00 hex 00 hex SEEE EEEE EMMM MMMM MMMM MMMM MMMM MMMM 1100 0001 0100 1000 0000 0000 0000 0000 2 2 2 2 S 1 EEEE EEEE 2 1000 0010 10 130
8. OBj SRA aa 10 6 11 6 1 11 6 2 COS Change of State 11 7 REAL 3 2 k 11 8 Lucci 13 9 13 EEC 14 gt 15 2 tina20j1 0106 PSG100 SD PSG101 S ga 7INFICON 1 2 2 3 125k 250k 500k 1 1
9. ID 3 1U ray Trip Point Status 0 1 100 64nex Trip Point REAL 6 1E 3 mbar 833mbar 102 66n Trip Point REAL 6 20 Hysteresis 103 67n y Trip Poinupper REAL 6 Value 104 68qex Trip Pointlower REAL 6 Value 105 69n IIrip Point 6 Control Source DeviceNet 0 1 DeviceNet tina20j1 0106 PSG100 SD PSG101 S ga 7INFICON Trip Point Control Source 100 104 EEPROM Trip Point Control Source
10. 9 9 10 11 12 13 5 7 6 5 4 3 2 1 0 1 2 3 0 6 7 6 5 4 3 2 1 0 0 5 3 2 PSG100 SD PSG101 SD 1 7 6 5 4 3 2 1 0 0 tina20j1 0106 PSG100 SD PSG101 S ga 7
11. E54 tina20j1 0106 PSG100 SD PSG101 S ga 13 7INFICON EEC 98 37 EG ID EEC 73 23 EEC
12. 127 130 127 3 MSB 1 0 5 0 25 1 24 MSB 1 23 0 5 22 0 25 21 0 125 20 0 0625 19 0 03125 18 0 015625 17 0 0078125 MMM MMMM MMMM MMMM MMMM MMMM 23 100 1000 0000 0000 0000 0000 MSB 1 MSB 1100 1000 0000 0000 0000 0000 2 24 1 gt 1 23 1 gt 0 5 20 1 gt 0 0625 1 5625 1 5625 23 12 5 12 tina20j1 0106 PSG100 SD PSG101 S ga 8
13. 89 336 EEC DeviceNet PSG100 SD PSG101 SD 350 021 350 031 Balzers 2001 4 3 s EN61010 1 03 1993 e EN50081 1 1992 e EN50082 2 1995 Balzers 2001 4 3 Sue Hannes Fischer Dr Georg Sele 14 tina20j1 0106 PSG100 SD PSG101 S ga TNFIC N 1 2 w
14. 5 SEMI Level 44 52 41 46 54 DRAFT 51 33pex Device Manufacturer 7 ldentifier 4c 45 59 42 4f 4c 44 tina20j1 0106 PSG100 SD PSG101 S ga 5 7INFICON D 52 34pey Manufacturer Model 5 Number 38 39 36 35 31 89651 53 35iex Firmware Revision 5 Level 31 2e 30 30 30 1 000 54 36nex Hardware Revision 5 Level 31 2e 30 30 30 1 000 55 37pex Serial Number 30 38 39 36 35 31 44 39 89651D961200050 36 31 32 30 30 30 35 30 56 38qey Device Configuration 50 54 54 52 32 31 31 53 2D 44 PSG100 SD PSG101 SD 60 3Cnex Exception Status 0 OK 1 DeviceNet DeviceNet Get Attribute Single Set Attribute Single 1 4 0Epex 16 10nex 5 3 04pex 5 3 1 PSG100 SD PSG101 SD
15. 01pex 1 0T hex ID 1 O01pex Vendor ID UINT 2 02pex IDevice Type UINT 3 03hex Product Code UINT 4 04hex IFRevision STRUCT DeviceNet 5 05hex Status WORD 6 06pex Serial Number UDINT ODVA 7 07hey Product Name SHORT 54 54 52 32 31 31 53 2D 44 PSG100 SD PSG101 SD 5 05pex Reset 14 0Enex Get Attribute Single 16 10iex Set Attribute Single 5 2 DM 64pex 100 64pex s ID 2 J 49 31pex Device Type 3 SEMI 56 47 54 VGT 50 32hex Standard Revision
16. DeviceNet 14 0Epex Get Attribute Single DeviceNet T 10pex Set Attribute Single DeviceNet 100 104 2 Trip Point Trip Point Hysteresis Trip pointupper Point Trip Pointlower Value 2 2
17. 5 7 OBpex 112 70pnex 10 tina20j1 0106 PSG100 SD PSG101 S ga 7INFICON ID 101 6Bhax Analog Output Mode 0 log 14 0Enex IGet Attribute Single 6 PSG100 SD DeviceNet Group 2 Only Slave PSG100 SD COS 6 1 6 2 COS Change of State 5 4 100 ID 100 64nex Pressure Change DeviceNet
18. 0 45V 150mV 1 CAN_H CAN_L 1IC V 0 6V 3 2 LED MNS x 1 0 50 C 20 80 C 3 DeviceNet a b CAN C d CAN 24V 4 MNS LED MNS LED ODVA LED 90 91 92 99 MAC ID tina20j1 0106 PSG100 SD PSG101 S ga 5 7INFICON 5 1
19. 1X tina20j1 PSG100 SD PSG101 SD 350 021 350 031 PSG100 SD PSG101 SD S S DeviceNet VINFICON 7INFICON 1 3 2 lt 4 3 DeviceNet gt 4 4 MNS LED gt 4 5 kk 5 5 1 01hex 5 5 2 DM 64pex 5 5 3 04pex Ba 6 5 3 1 hk 6 5 3 2 7 5 4 6KR KK 8 5 5 68hex 8 5 6 69pex 9 5 7
20. 7INFICON 2 7 6 5 4 3 2 1 0 0 CO NM I 0 DO 54 67ia 103 67ne ID 3 03pex Sensor Status 0 1 14 0Epax Get Attribute Single DeviceNet 16 10ha Set Attribute Single DeviceNet
21. 0 lt 63 MACID 90 125k 91 250k 92 500k 99 DeviceNet 90 91 92 DeviceNet MNS LED DeviceNet MAC ID DeviceNet PSG100 SD PSG101 SD MNS LED MAC ID MNS LED PSG100 SD PSG101 SD EEPROM
22. 104 68n 8 tina20j1 0106 PSG100 SD PSG101 S ga 7INFICON ID 1 01rex Pressure Value REAL 6 3 08nex Pressure Units 0 mbar 1 Torr 2 Pascal 14 0Enex Get Attribute Single DeviceNet 16 10pex Set Attribute Single DeviceNet 56 69n 105 69nex
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