ホットカソードゲージ ボックスユニット BMR2
Contents
1. ULVAC SOLUTIONS ULVAC SOLUTIONS G TRAN BMR2 M 11 BMR2 M30 x 1 25 M 11 M 12 M 13 M 14 M 15 5 0x10 9 9x10 Pa SS I Fz Rs 20 NN Mi 2 10 40C 0 50ms 5 OV 10VDO 1IV M 12 50ms 10mV i SETPOINT1 2 0 10VDC a MON ON OFF M 13 Filament 1 2 1021 DEGAS ON OFF UFCO34 Emission valid 1 2 LED POWER ERROR FIL DEGAS RS MODE SEF1 SET 2 M 14 RS 485 9600bps 19200 bps 38400 bps 0 Mode1 Read only Mode2 Read Cont2. G TRAN BMR2 G TRAN UL T ITEET 0 10V gt DC24V gt gt 2 RS 485
3. rol 26 5 24VDO 2V 1 2A 815 D sub 15 M2 6 M 15 750g 1 a 1 3 1 765 IO GND GND DIMR2 MM 2 M3 3 2 0 SENSOR www ulvac co jp TEL 03 5218 6011 TEL 06 6397 2281 TEL 81 467 89 226 1 1848N 1 2013030000TL
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