キャノンアネルバ クリスタルゲージ M
Contents
1. 90 1 M 320XG 1 1 1 1 2 2 1 3 1 4 1 5 5 1 6 5 2 3 3 1 I O 3 2 3 3 4 5 6 J 8 9 9 1 9 22. FT 651 041 2 2 1 1 M 320XG M 320XG 2 IO 3 3 IO 4 4
3. 2 6 GAS SELECT1 OFF ON OFF N 2 6mA Ext Vcc 24V 3 3 9k Ext Vcc IN 8 _ 12 lt 24V PS2501 k ZERO INPUT 4 Ext Vcc COM D sub ZERO 3 FT 651 041 3 3 1 7 1 ST i 2 10 2 12V 24V 100mA Max 3 PS2502 1 k Ext Vcc COM D sub 4 FT 651 041 4
4. Pa J 10 Pa 8 1 6 ee 1 9 20mV 1 log Pa Log Pressure 3 MIN 1V 1x10 2 Log 1x 10 3 5V 2 Pa 1 10x 5x10T2 5 10 2 3 5 5V 9 V 3 470V 4 7x109 3 3 4 70k1dHps 0 470x10 10
5. 1 12 12 10 1 12 13 4 5 l6 7 slelAlBlolplElF 10 1 213 1415 16 17 8l9 6 5 4 3 2 1 2 0O 9 O 9 1 1 3 LED ON LED O N OFF LED OFF 4 ON OFF ON OFF 13
6. 10 Pa 1 01x10 1 00x10 0 99x10 098x10 005x10 V 2 101 2 100 2099 2098 2005 FT 651 041 3 Pa 1 5 5 0V 10V 9 9V 11 Pa 3 4 5 3 110x107 4 EET TA EET 1 x10 1 x10 OA 1 a i gt R 0 1 0 01 be 2 Pa 1 x 10 5 FT 651141 5 LED 2 2
7. M2 EEPROM EEPROM 8 4 EEPROM IC 5 EEPROM 2mm M9 6 8 We NR Na M2 a RE aa EEPROM
8. 1 2 10 Pa 11 1 1 1 2 2 1 ZERO
9. 3 8 5 10 Pa 1 x 10 Pa 7 FT 651 041 3 3 1 I O 4 I1 0 1 IDCINPUT 22 33V 2 IDCINPUT common lt 0 1Max DC24V gt REMOTE I O 5 GAS SELECT1INPUT
10. O Ar L 10 O Ar FT 651 041 10 POWER ALM LED 15 14 2 7 NG 10 3 Pa 15
11. 10Pa 5 2 ATM
12. OFF 0 5 13 ON OFF OFF 0 5 12 FT 651 041 6 1 6 M 320XG M3 2 2 7 3 EEPROM
13. M 320XG 1 N Ar H Air 1 O 2bit 2 SP1 SP2 DC 0 10V Log 1 1volt 1 1volt 1 x 10 1x102 1x 103 1x 10 1 x 105Pa 5 C 50 C 150 C MAX PUSH O Dsub15P LED3 PWR ALM 2 SP1 Status SP2 Status DC22V 33V 2W 200g NW16 NW25 34ICF 70ICF 5 C 40 C 70 FT 651 041 1 3 gt C vr Fe P CL _ we Ge 4 W 2 ee 4 A 7 EE be
14. 0 CVD M 320XG 1 1 9 CVD FT 651 041 2 0 Ar 0 Ar 0 O Ar
15. 10 FT 651 041 OO 10 12 14 15 16 16 18 FT 651 041 1 M 320XG 1 1 ANET M 320XG 1 x 10 Pa gt 10 Pa 200g 2W FT 651 041 1 2
16. ATM FT 651 041 8 8 M 320XG Pa 1 0E 05 pe HHT62 1 0E04 EN A 1 0E 03 x SF 1 0E 02 BE EE ED WABEN lt t OE 01 EH Es HH HH Hf NT 1 1 0E 00 dt EE EE CFs ET HC VEY ot FEE DCs Ti TS Nt Ft Er Beas si FE gre em ss a a 1 0E 01 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 0E 04 1 0E 05 Pa 8
17. 15 FT 651 041 9 9 1 M 320XG O CVD 0 Ar 9 2 9 2 M 320XG 1 CVD CVD
18. gt wv 4 n v 2 A ee a A y ir bp lt CY 3 1 M 32OXG 2 M 320XG ON OFF Dsub15 SP2 EXP 2 2 ON OFF LED 1 1 1 ON OFF LED ON OFF LED FT 651 041 1 4 OO Q OOOOOOO OO OQ Q 12 5 2 M 320XG 3 A 36 7 5 9 34 3 3 36 34 7OICF 31 12 7
19. 70 23 O 40 B 6 7 5 1 7 23 so LNwz5 29 940 FT 651 041 1 5 M 320XG 1 M 320XG 1 2 D Sub YC21201 1 3 HDA CTH 1 4 1 1 6 M 320XG M 320XG
20. 6 GAS SELECT2INPUT _ 8 IZEROINPUT or eyF 12 IANALOGGND 7 gt Remote 1 0O External Vcc IN RemoteI O External Vcc IN FT 651041 3 2 1 5 OFF ON OFF 0 5 1 ON 2 Gas Select2 6 6 ON
21. 8 2 mm NH IO ag 6 EEPROM 13 FT 651 041 7 M 320XG 1 B A 103Pa 1 IO 1
22. FT 51 041 A NET M 3Z20XG FT 651 041 FI 651 041 1 1 2 3
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