HEB Series
Contents
1. 3 12. HEB Series 1 2 5 Sib A ei 1 1 2
3. 3 Joa vis Nem 7 9 i214 22 24 28 30 20 gt 30 SO Sd Rc378 LRc172 LRc374 Ret 3 Y
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11. 10 belts 4 D 1000 6 as
12. 0 0 1 0 02 on io Bay i i W250 XH180XD340 GALDEN Fluorinert MOCVD GSVC CAT S40 50A HEB Series 3 es MOCVD wan ies P N Eo
13. 2 3 1 2 3 Estas SIA DUT
14. i A FJ 1 2 3 4 5 6 MC 7 8 9 10
15. 2 3 4 5 Ri See Sid FBSA SHROND2RAZAS dei
16. RUN LED TROUBLELED 777 8 HEB Series 332 Asie IN Rc1 4 Ef NPT1 4 he la NPT1 4 914 RUN LED TROUBLE LED CO 2 xe DES to TROUBLE LED DC RUN LED 2 ete SS ars Sa ad Il 180 DC HEB Series 3 5 wore 7
17. 5 Peg z N 0 5MPa 8 min 3 5 min 3 min ar EEPROM 10 6 HEB series 1 2 5 Az 2
18. mal 77 5 10 5 10 8 Q HEB Series owe oe 1 GER BS oO SRS N 9 ZN
19. 1 1 12 13 14 1000m Y 1 6 7 A es 1 2 Se A FI 1 2
20. 140W a RABE I 300W Gk ONC 0 02C g130x 180mm 10 35C 0 5MPa k 4 HEBC002 WA10 HEBC002 WB10 A 4A AC100V 2A AC240V 3 8 5kg 6 5kg 2m DC 3m SMC Y HEB Series kPa 25C 180mm 25C 25C 37min IAAF OI Ik AS fs Nt aE hE i RO SALDENeHT200 geswmeao as ff 5 asc ee eee Oe rt Pr ae Fuorinertm rcra2e3 BERNA Semin GRAA FOI ICE AS 60 80 100 120 140 160 180 RUN LED TROUBLE LED DC
21. IN OUT 3 1 5 lt 2 6 7 Aa FJ
22. 25 A FI 25 A FI 50mm gt N
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24. oT A y 1 FT E18 mts HEB Series 8 ek N NPT1 4 663 14oW gt 1W 110 130xH180 A RS 485 1B RS 232C_ PID 10 35C 35 80 RH 1 GALDEN HT135 HT200 Fluorinert M FC 3283 5 15 0 60 0C 5 60C
25. 3 ease A FE rane gt EE N 2 1 6 7 Bisz gt zz N
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