取扱説明書 アリキャットマスフローメータ
Contents
1. A Q Pi1 Pa rr48mnEL 1 Q r Pi n Po L r L 1 y y Q K AP n 2 K 2 Q AP2. g Kg SLPM SCCM CC STP STP g Kg 25 20 C 14 696 PSIA 101 32kPa 10 4 2 PV nRT factor Z PV Z2nRT Pol n V R Z factor T WEK 4 3 25 N rm te
3. NIST 2 2 1 PSIA C CCM LPM SCCM SLPM 73 Main MODE Mass AD AAD RA ole os 2 2 PSIA PS1A 14 5037psi 100kPa 0 1MPa PSIA PSIG PSIA PSIG 2 3 C
4. 4 5 6 7 Ea T 8 MOV Massflow Over Range 10 11 12 13 POV Pressure Over Range TOV Temperature Over Range M 0 5SCCM M 50SCCM M5x0 8 1 8 NPT M 0 5SCCM M 50SCCM J 2psi lt
5. o 9A 1 2 2 1 2 2PSIA 2 3 2 4 Volume 2 5 Mass 2 6 Tare 2 7 MODEP 2 8 SELECT MENU 2 9 Gas Select 2 10 RS232 Comm RS 232 2 11 Misc 2 12 Mfg Data 3 3 1 3 2 Se ae ee EA CT aac ne 3 4 4 1 4 2 4 3 4 4 25 C 5 RS 5 1 5 2 PC 5 3 RS232 Streaming Mode 5 4 RS232 Polling Mode 5 5 5 6 6 7 8 9 10 IER Aa TA DRO ROP Rep Rep aa aa a Ret eR 1 Certificate of
6. C 25C 20C 20C 25C 0C NIST 2 4 Volume 2 5 Mass Mass 14 695psia 20 C 128 MOV VOV
7. 7 Telnet 1D N ANSI 8 ASC11 A A 9 OK 10 Window Enter 2 3 LADAL Enter 11 psi 0 14 70 025 00 02 004 02 004 Air 0 14 70 025 00 02 004 02 004 Air 0 14 70 025 00 02 004 02 004 Air 12 5 4 RS 232 Polling mode 1 A Enter Backspace Delete Enter 2 3 2 0 3 A Enter
8. POV TOV 2 6 Tare Tare T 2 7 MODE MODE
9. 4 C Streaming Mode 5 5 RS 232 Streaming Mode V lt Enter gt Polling Mode FU A V lt Enter gt BS V lt Enter gt 5 6 Streaming Mode lt Enter gt Polling Mode 7 KU A lt Enter gt BS lt Enter gt amp AJ 13 6 0 8 RD 0 2 FS 0 4 RD 0 2 FS 0 2 FS 1 100 100 1 10ms me TAUAVE 0 2 FS C RUE 0 2 FS 128 H ee B7 RS232 7 M0 5CCM M50SCCM 0 Nh 40 HU a0 100 of Full Scale Typical 0 5 SCCM to 50 SCCM Meter Pressure Drop Improved Pressure Drops available 100PSIG 0 7MPa 145PSIG 1MPa 0 5VDC 0 10VDC 4 20mA 7 30VDC 40mA Ms0SCC M20SLPM 120 vof Full Scale Typical 50 SCCM to 20 SLPM Meter Pressure Drop Improved Pressure Drops available 14 JOSLPM M250SLPM 40 60 80 100 120 Sp Of Full Scale Typical 50 SLPM 100 SLPM and 250 SLPM Meter Pressure Drop Improved Pressure Drops available 15 Mo00SLPM M1500SLPM 000 SLEM 500 SLPM 20 40 60 80 100 120 a Of Full Scale
10. PAF 1 AR 2 RS 232 CF 3 RS 232 4 5 E 6 ashy 3 4 EEA PAT IV TIO e DIN DIN BB9 1 8m DIN DIN BB9 7 5m DIN DIN BB9 15m FR TT 1 8m ICO TI Cable Clearance DC 61 DC 6RT Note Allow Approximately 1 4 inch more than dimensions shown to 5 facilitate insertion and removal of cables 4 FT a Gry z DB9 Female Connector 7 9 joe 8 Pin Mini Din Male Connector 710 Pin Color Wire Red Blue White Green Block Brown IC 10 Cable MD8DB9 Cable 4 4 1 10E
11. AS 3 RS 232C JR 4 KE 5 RS 232C H 6 0 5V 0 10V K 7 9 30VDC 100mA 8 R 1 6 3 2 1 0 5VDC Alicat 0 5VDC 6 0 010V 0 SV 100 8 3 2 2 0 10VDC 0 10V 6 0 010V 0 10V 1000 6 M 8 ES 3 2 3 4 20mA
12. 4 20mA 10 9 12V 24V 10 10 9V 10 12 CSA Classi Div 2 19 11 YX fin Be 7 DS TEL Misc 0 00 EER YN MOV VOV POV TOV MOV VOV POV TOV DAD CAL EH eae TI BF HI a RS282 RS232 NN USB RS Misc Pressure Averaging Flow Averaging Misc Dead Band 0 5
13. A B C ID 5 2 PC MD8DB9 USB USB RS232 USB RS232 5 3 RS 232 Streaming mode 1 Microsoft Widows 2000 XP PA PAGS Va a 2 Hypertrml exe 3 Alicat OK 4 N Coml Com2 RS23 2C Coml Com 1 OK 5 COM1 COM2 19200 8 1 OK 6
14. NONE 110 0016 2 2 11 3F TEL 03 6432 4006 FAX 03 6432 4010 support j startechno com http www j startechno com 20
15. Unit ID UP Down Unit ID streaming Baud 19200 Data Rate Fast 2 11 Msic SELECT MENU MODE Misc Select LCD Contrast Lep Contrastii B _ PUM DBand 2 5 FS YX ih E I O a FLOW Aug GBI 10 CH UP DOWN PVM DBand 0 5 FS PRESS Avg FLOW Avg mere 2 12 Mfg Data
16. Alicat 3 3 1 1 2 20 ee 3 2 AC DC ACDC Adapter Jack 8 DIN EVES DC 61 1 5 12V
17. 4 20mA 1 4mA 0 20mA 100 Lore Cs 3 2 4 2 0 5VDC 0 10VDC 4 20mA 6 0 5VDC 2 4 20mA 6 0 5VDC 2 0 5VDC 3 2 5 RS 232 RS 232 5 RS 232 3 8 3 3
18. Typical 500 SLPM 1000 SLPM and 1500 SLPM Meter Pressure Drop Improved Pressure Drops available 8 M amp V Series 0 0 5SCCM 0 1SCCM 0 2SCCM 0 5SCCM 0 10SCCM 0 20SCCM 0 50SCCM 3 897 336 M5X0 8 6H T 200 Both Sides p 1 050 2X 8 32 UNC 7V 175 1 8 NPT ii 350 Both Sides 25 M amp V Series 0 100SCCM 0 200SCCM 0 500SCCM 0 1SLPM 0 2SLPM 0 5SLPM 0 10SLPM By tA oo 25 i 16 M amp V Series 0 20SLPM 350 OO 1 050 2X 8 32 UNC WV 350 M amp V Series 0 50SLPM 0 100SLPM 1 4 NPT Both sides 4X 136 Y 438 8 32 UNC V 375 1 25 4mm 17 1 2 NPT Both Sides 3 4 NPT Both sides 4 000 Lea RW 0 ii 9 MODE Hours 6553 5 HAE SCC SL 999999 18 M amp V Series 0 250SLPM 4X 8 32 UNC y 375 M
19. CC Pee Ne Pie ea Sss SELECT rENU 2 8 SELECT MENU P ae Comn RS 232 Misc Mfg Data 2 9 Gas Select Gas Select FSD 2 Hudroger UP DOWN N20 Nitrous Oxide 30 UP DOWN MODE C7 2 10 RS232 Comm RS 232 Comm RS 232 Unit ID A Z Unit ID A A ID RS iC DP Unit ID Select
20. Registration Mi MOODY IS09001 2000 Jane steeee Wathe 0 NIST aa Asse anato se Approval is hereby granted for registration providing the certification rules and conditions are observed at all times Design and manufacture of precision instrumentation for the measurement and control of pressure and the flow of gas and or liquid ME BJ 7 Certificate No 0410009 Audit Date 27 Nov 2007 A It FIE D MG T Date of Issue 28 Dec 2007 Expiration Date 26 Nov 2010 Original lssue Date 10 Feb 2005 Reece G gt 1 Alicat 862kPa 8Kg cm2 2 3
21. amp V Series 0 500SLPM 0 1000SLPM 0 1500SLPM 4X 8 32 UNC V 375 ee Mass 6 66 0 008 SCCM 800 1 600 Clear Mass SLtr Air Total 10 10 1 FlowVision SC 1 Z 10 2 BB9 9 10 3 RD 10 4 Remote Electronics 60C 100C Cae 10 5 5SCCM 500SLPM 0 4 0 29 FS 10 6 VCR 1 4 VCR 10 7 10 8
22. arem viscosity Density Compressibility Number Short Form Long Form 25 degC 25 degC 25 deg C 14 696 PSIA 14 696 PSIA 14 696 PSIA 0 9997 OA Argon 225593 0 9994 GH4 Menase ftta52 06569 posess 0 8997 CO2 Carbon Dioxide 149332 18080 039 0 994 H N 2 CH4 E 178120 11453 E Noo C3HB C k Hydrogen 89 153 0 08235 1 0006 198 457 0006 CH Ethylene 103 177 1 1533 0 9943 i C4HI0 74 988 0 9728 B1458 18316 084 xe 208 785 019947 Oxygen 204 551 1308585 0 9994 LC4H10 74 52 0 9693 ir Ar H z 2 2 Mie 02 3H 2 Kr 0 9994 Xe SF6 0 9887 0 9987 0 9991 0 9992 98 Argon 2 CO2 223 973 0 9993 0 9866 75 Argon 25 Helium 230 998 0 9997 75 Helium 25 Argan 234 306 0 5306 1 0002 90 Helium 7 5 Argon i 3 A1025 25 CO 214 340 1 0003 Praxair Helistar A1025 g0 Argon 8 CO 2 Oxygen 216 817 Praxair Stargon CS 95 Argon 5 Methane 223 483 1 5850 tin micropoise 1 Poise gram cmi sec t GramsiLiter NIST REFPROP T database E m em Em E IF gt m m o Ai mere O MoO O Nitrous Oxide 148 456 1 8088 0 9946 Ne Nesm on os2ee nggs N Th 1 0720 0 9928 K FHS 11 5 RS 5 1 1 RS232
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