JSM−6301F走査型電顕の操作法 始動 試料交換（挿入操作） 観察操作
Contents
1. INS SLOWLP3 RETURN 1 INS SAVE_JA RETURN MO NN OO OO Kk 1 1 CRT 2 FOCUS WOBBLER 3 CRT CX Y 1 FOCUS 2 STIGMATORX 3 STIGMATOR Y 1 1 EOS MODE SEM12. 2 ACCEL VOLTAGE 0 0ky INS 0 RETURN kv ESR INITIAL SET ON OFF ON START ww X 25 0 Y 35 0 TILT 000 WD 39 5 6 7 8
3. 9 0 1 2 2 MO 3 OPE POWER OFF
4. 8 9 1 0 1 PF2 2 0 0kv 2 ACCEL VOLTAGE ON 8 uA 3 ACCEL VOLTAGE 5kV INS RETURN 4 7 5X10 Torr
5. MAGNIFEICATION 100 2 PROBE CURRENT EOS EOS 1 OPTICS CL COARSE 3X10 12 6X10 10 GUN ALIGNMENT XX Y 3 6000 2 4 PROBE CURRENT CL COARSE 3X10 12 6X10 10 CRT GUN ALIGNMENT XX Y GUN ALIGNMENT 5 PROBE CURRENT 1X10 11 6 4 5 CRT 6mm PROBE CURRENT 1 EOS MODE SEM1
6. MAGNIFICATION 2 PROBE CURRENT EOS EOS 1 OPTICS CL COARSE 7 GUN ALIGNMENT X Y 3 CL COARSE GUN ALIGNMENTC Y CL COARSE 1 4 CLCOARSE 7 CL 1 CRT EOS 1 STIGMA OL CL 2 EOS 2 EOS MODE SEM ALP 3 SCAN SPEED 2 4 CRT STIGMATORX 5 EOS 2 EOS MODE ALP SEM 6 EOS 1 STIGMA CL OL OL 1 V7G ACCEL VOLTAGE
7. 5 V7G EMISSION CURRENT 8uA 1 f FOCUS STIGMATOR Y PHOTO ACB PHOTO LEFT OO OO OO tM MO 1 128MB MO 1 6 CRT ACB
8. 2009 12 9 JSM 630 1 0 OPE POWER ON ON POWER START ON 3 ACCEL VOLTAGE READY 1 2 3 X 25 0 Y 35 0 TILT 000 WD 39 4 5 6 7
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