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【PDF】SLシリーズ圧力調整器取扱説明書

1. SEMI F 78 1 8
2. SL Series N HP LP HP HP
3. 1 2 3
4. 1
5. INCR SL Series DECR
6. APTech 1 2 3
7. DECR SL Series
8. SL Series J J
9. Ra max 2PW 2 4 SH 3PW 3 MPa 3 3 MPA A 1 SL5201 SUS er SS 36r a 14 SH msG 24 SUS 316L 174 WIN OUT OUT 0 1 0 0 2MPa 0 1 0 0 4MPa 0 1 0 0 7MPa 2 FV4 11 4 MV4 1 4
10. 1 2 3 2 SL Series N
11. 1 SL5201 A SL5201 SL5202 SL5206 SL5210 0 14MPa 0 0035MPa SUS316L SUS316L PCTFE 9 PCTFE 8 8 10 SL5400 Series ss4lozlsllzPwlFv4lFv4 ll 02 0 007 0 2MPa 06 0 007 0 4MPa 1 2 10 0 014 0 7MPa 4 39 6
12. 1 DECR 2 10 3 INCR 10 2 3
13. DECR DECR INCR
14. APTech ECCN ECCN http Www bis doc gov 2B999 g lt gt SUS316L SL5200 Series A 88kPa 0 07MPa
15. 7
16. WIN 0UT IN OUT 1 SL5400 Series SL5402 SL5406 su5410 0007 lt 0 2MPa 0007 lt 0 4MPa 0014 0 7MPa 6 9MPa 20 7MPa 41 4MPa 40 71C 7 2x10 Pa m sec 2x10 7 Pa mi sec 2 0 7MPa 0011MPa 19 7cm 1 91kg 1 10 90 C 22 He 7MPa 3 4 SH SUS316L
17. SUS31 6L C 22 SUS316L SUS316L PCTFE 8 2 SL5500 Series SD l02lSIM I2PwlFV4lFv4 SL55 0 007 0 2MPa 02 A 88kPa 0 2MPa 06 0 007 0 4MPa 0 014 0 7MPa 1 SL5502 3 MPA 2 1 4 0 1 0 0 2MPa 0 1 0 0 4MPa 1 0 1 0 0 7MPa H 0
18. M 0 25 m PCTFE Mi 0 18 m X 013 um 3 SH 2PW 2 2 3PW 3 4PW 4 MPA MPa mg 9 2 MPA FV4 1 4 MV4 1 4 1 TW4 1 4 H FV6 3 8 MV6 3 8 TW6 3 8 FV8 1 2 1 4 MVS_ 2 Tw8 1 2 0 1 0 0 4MPa 0 1 0 0 7MPa pre S SUS 316L SUS 316L SUS 316L 0 7MPa e C 22 1
19. 0 7MPa 0 0017MPa 9cm 163kg 1 10 90 C 2 He 10 5MPa 3 He 7MPa 5 SUS316L SH SUS316L C 22 SUS316L C 22 SUS316L C 22 PCTFE PCTFE 8S 4 SL5800 Series SL58 02 s 02 0007 0 2MPa
20. 3 8 3 8 MV6 TW6 SL5200 Series _ SL5201 A SL5201 SL5202 sl5206 SL5210 88kPa 0 07MPa 0 0034 lt 0 07MPa 0 0034 0 2MPa 00070 4MPa 0007 lt 0 7MPa 1 0MPa 3 4MPa 6 9MPa 40 71C 2x10 Pa m sec 2x10 Pa m sec 9 4x10 Pa m sec Ra max 0 25 um 0 18 m 0 13 m 0 14MPa 0 0014MPa 3 1cm 0 45kg 3 1 10 90 C 2 He 0 7MPa 3
21. 1 10 90 C 2 He 2 1MPa 3 He 0 7MPa 4 S SUS316L SUS316L SUS316L SUS316L PCTFE 8 16 4 H H 1 4 00 83000304 0 1 0 2MPa 40 60C
22. L TW6 3 8 1 FV8 1 2 H MV8 1 2 2 TW8 1 2 4 4 a 1 RS S hP SUS 316L SUS 316L _ 2 IN OUT IN 0OUT 15 SL5800 Series SL5802 SL5806 SL5810 0 007 0 2MPa 0 007 0 4MPa 0 014 0 7MPa 2 1MPa A 13 8MPa 2x10 2x10 Pa m sec JPa m sec 9 Ra max 0 25 ee m 0 13 m Ps NPT 1 8 0 7MPa 0 035MPa
23. SEMI F1 5 SL Series
24. lcCh SL5200 Series SL5400 Series SL5500 Series SL5800 Series 2 3 4 5 6 7 8 SL5200 Series 9 10 SL5400 Series 11 12 SL5500 Series 13 14 SL5800 Series 15 16 17 SL Series IS0 JIS 1 I
25. C06 0007 0 4MPa 10 0014 0 7MPa Ramax VM 025 m VmmL_ 0O18gm 0O13gm 1 3 39 6 PCTFE VS e _ MPa MPA 2 MPA wpw 1 4 0 1 0 0 4MPa 0 1 0 0 7MPa 0 1 0 1 1MPa 0 1 4MPa 0 3MPa FV4 1 4 MV4 1 4 TW4 1 4 FV6 3 8 MV6 3 8
26. 00 83000305 01 lt 0 4MPa 25 75 1 F S 00 83000300 01 lt 0 7MPFa 2 F S 00 83000297 01 lt 11MPa A ASME B40 1 A 00 83000299 0 1 4MPa ASME B40 1 IV 00 83000301 0 3MPa 00 83000302 0 7MPa 00 83000303 0 28MPa SUS316L SUS316L 1 3 P5
27. 1 0 1 1MPa 2 0 1 4MPa 4 0 3MPa 10 0 7MPa S SUS 316L SUS 316L SUS 316L 40 0 28MPa SH C 22 C 22 2 IN OUT HIN OUT SL5500 Series SL5502 A SLl5502 sussoe SL5510 88kPa 0 2MPa 0 007 lt 0 2MPa 0007 0 4MPa 0014 lt 0 7MPa 24 1MPa S49MEa 69 0MPa 40 71C 2x10 Pa m sec 2x100 Pa mi sec 2 4x10 Pa m sec 3 Ra max 0 25 ug m 0 18 m 0 13 m NPT 1 8
28. SO 4414 Pneumatic fluid power General rules relating to systems 2 JIS B 8370 3 a

【PDF】SLシリーズ圧力調整器取扱説明書

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