マニュアル BPG402-S 和文 TIMA46J1
Contents
1. 1 tima46j1 2004 11 INFICON BPG402 S BPG402 SD SP2. BPG402 SD SP 1 2 4 TNFICON 0 1 l
3. 10V 10V e RS232C tima46j1 2004 11 PINFICON e RS232C o 1 10 B A 30 2
4. 1 Copyright 1991 by MaschinenbauVerlag GmbH Lyoner StraBe 18 6000 Frankfurt M 71 FAX 1 1 Order No 2121 tima46j1 2004 11 13 INFICON http www inficon jp 222 0033 2 2 8 NARA II5 222 0033 2 2 3 22 1 TEL 045 471 3328 FAX 045 471 3327 Document tima46j1 2004 11 TEL 045 471 3326 FAX 045 471 3327
5. INFICON AG LI 9496 Balzers lll Model__ A 9 1 SN vwCE PN BPG402 S 1 353 570 DN 25 ISO KF 353 57 1 DN 40 CF R BPG402 S 1 353 572 DN 25 ISO KF 353 573 DN 40 CF R BPG402 SD DeviceNet 2 353 576 DN 25 ISO KF 353 577 DN 40 CF R BPG402 SP Profibus 2 353 574 DN 25 ISO KF 353 575 DN 40 CF R PN 353 572 BPG402 SD SP 1 2
6. 2 2 3 4 2 12 1 DeviceNet Profibus BPG402 SD SP 1 2 10 dry air 02 CO N
7. DANGER 10 tma46j1 2004 11
8. 1 www inficon com Operating Manual tina46e1 Bayard Alpert Pirani Gauge BPG402 S BPG402 SD BPG402 SP INFICON AG LI 9496 Balzers Liechtenstein 2 www inficon com Instruction Sheet tima47e1 Bayard Alpert Pirani Gauge BPG402 SD BPG402 SP INFICON AG LI 9496 Balzers Liechtenstein C 4 73 23 EEC 89 336 EEC P1NFICON BPG402 S BPG402 SD BPG402 SP 353 570 353 571 353 572 353 573 353 574 353 575 353 576 353 577 e EN 61010 1 e EN61000 6 2 e EN61000 6 3 s EN 50325 DeviceNet
9. llE i s e e s BPG402 SD SP BPG402 S 1 2 air O2 CO N gt 5 x 103 Pa 100KPa 1 x 10 Pa 1Pa 15 10 1 x 10 Pa 1Pa 5 10
10. DN 25 ISO KF 24cm3 pImban DN 40 CF R 34cm lt 0 2MPa i eo 20 709C Fe 0 50 C 80 C ea 1E 06 65 60 lt 85 6 2000mm NN UM p 10 U775 0 75 c IP30 2 U D C VI mbar 0 M Pa 2 VI Torr 0 125 p U c tma46j1 2004 11 air p lt 10 Pa Deft C x C C He 5 9 air O gt CO N gt 1 0 Ne 4 1 H 2 4 Kr 0 5 Xe 0 4 Ar 0 8 1ba
11. 1 353 572 353 573 BPG402 S P1NFICON 25uA 5mA LED tima46j1 2004 11 PINFICON cy off OK on 1 on on 9 11
12. 42k 10 5 1 x 10 7Pa 10KPa 24VDC 20 28VDC 2V p 3 0 5A lt 0 8A 200ms 1 4A 1 25AT 18W tima46j1 2004 11 TNFICON D Sub 15 24VDC lt 35m 0 25mm lt 50m 0 34mm lt 100m 1 0mm lt RS232C gt 30m 4 40UNC 2B 4 40UNC 2B DN 40 CF R 5 NiFe 353 570 353 572 285g Y2O 353 571 535 573 550g il
13. 1 N SN Th ON T vv 1000mbar mbar
14. 10 60V 0 5ADC RS232C 9600 8 1 RS232C 1 353 572 353 573 LCD 32 x 16 16 0mm x 11 2mm mbar Torr Pa 1 0 10V 0 774V 5 x 103Pa 10V 100KPa 0 75V 1 0 1V EEPROM 0 3V 0 5V 10kQ EN 61010 SELV E 0
15. 2 4Pa 3 2Pa p 7 2 x 10 Pa 5mA 7 2 x 104Pa p lt 3 2Pa 25UA gt tima46j1 2004 11 25uA gt 5mA 7 2 x 104Pa 5mA 25uA 3 0 x 10 Pa 2 1 4 LED Me 1 p 7 2 x 10 Pa 20mA Pgegas gt 4 0W 0V 24V 3 BPG402 Sx PINFICON 1
16. 1 2 1 GND 24V D Sub 15 3 1 2 4 n o 5 OV 6 7 0V 24V 0 10V 0 10V 8 V 24V 9 10 11 n o 12 13 RS232C TxD 14 RS232C RxD 15 tima46j1 2004 11 1 3
17. 2 3 3 3 2 5mm UThresh old Y tma46j1 2004 11 nae 05
18. 3 4 5
19. J Skilled personnel
20. OK 1 BPG402 S 1 4 SETPOINT 1 x 10 Pa 10KPa UTnreshoa 0 75 x log Psetpoint C 7 75 c p N 10 Urhreshoid UTnresnog 1 1 1 t 1 UE 0 o IS Off On Off 1
21. s EN 50170 Profibus tima46j1 2004 11 11 INFICON INFICON AG Balzers 2004 11 30 Michael Schoch 2004 11 30 Dr Georg Sele 12 tima46j1 2004 11 PINFICON 1 2 4 5
22. INFICON mm BPG402 S BPG402 SD BPG402 SP 5 x 103 100KPa VGC 40x p 2 0Pa p gt 5 5 x 10 Pa 2 0 5 5 x 10 Pa 2 4Pa 3 2Pa
23. INFICON Bayard Alpert Pirani Gaude BPG402 S BPG402 SD BPG402 SP gt 9 OU 3 tima46j1 2004 11 INFICON Ri hs i 1 1 1 1 1 TO 1 LN Nami 2 Dj T0005555000 2opcoo 2 2 2 2 2 4 5 5 5 Nh 6 SR 7 7 A 7 7 8 0 9 LL 9 me 9 10 IT 10 OO 10 11 ii 11 11 13 tima46j1 2004 11
24. BPG402 Sx 2 1 2 DeviceNetrM Open DeviceNet Vendor Association Inc tima46j1 2004 11 INFICON ro DANGER
25. r P N PINFICON DANGER EN61010 s CF e KF DANGER
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