水晶発振式成膜コントローラ CRTM-6000G
Contents
1. 0 01kA 10 99 99kA 0 1kA 100 999 9kA 0 999 9As 2 0 041As 5MHz 0 029A s 6MHz 0 1As Ua a OM 1 CRTS 80 2 gt CRTM 4 1 1 1 CRTS 125ms _ 4 las 99 eo A 130 gt CRTS 99 3 12ch BCD 4ch 12ch mm _3ch POWER RATE THK 5 RS 282C i 6 WxDxH 240mmx350mmx99mm 3 6kg lo2. CRTM 6000G CRTM 6000G 8 EE hf gt TE Rt 1 9_ 93 2 2 gt 125ms gt gt 99 99 99
3. TEL 06 6397 2281 TEL 81 467 89 2261 1708N 2 2013104000TL
4. AC85 230V_50 60Hz 2 30W Max 5 40C 5 9596 RH 1 2 Tooling 100 Density 1 _ oe oe e 3 BCD 99 R 240 S1 gt CRTM 4m 8m 19 8 12m 16m Ce CRTS 80 4m 8m 12m 16m TEess Depoview RS 232C PC PC 1 CD www ulvac co jp TEL 03 5218 6011
5. gt 30 30 gt RS 232C PC 3m gt 4m gt gt D 25 D 9 12ch CD ROM 3ch POWER RATE THK 3ch ULVAC SOLUTIONS ULVAC SOLUTIONS CRTM 6000G 1 3 0 5 01MHz 5MHz 4 0 6 01MHz 6MHz 0 024Hz 0 001 MHz 0 999 9kA 2 0 041A 5MHz 0 029A 6MHz 0 001kA 0 9 999kA
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