ロ ー ド ポ ー ト は 新 た なス テー ジへ。
Contents
1. Bilateral Plane Pod 2 14sec FOUP 11sec FOUP RN 2 Hold Down Feature FOUP Es SeuOE BOLTS 259 25mm 573 0 52 0 60MPa G 2 626 321 25 100 3 30L min ANR OE 4 a 61 10kPa G lJ F gt 4 CT 10L7min ANR 6 mm 6 mm a DC24V 5 3A 2A 50A RS232C 2 2 F a 2m 4m 6m PS Omron V640 0 Brooks LF80 LF60Solid 8 Writer CID E842. TAS450 FOUP Front Opening Unified Pod TYPE A3 Ye es o TAS450 TYPE A3 SEMI Standard FOR450mm OAD PORT 8 va ee J FOUP EE FOUP FOUP Facial Plane When Pod is undocked Pod SEMI E158 FOUP SEMI E159 MAC SEMI M80 FOSB Facial Plane When Pod is docked BOLTS ea 100kg gt 3
3. http www tdk co jp fa
4. 1O DMS HB1 DMG HB1 Ethernet 0 SECS CDA Lockout Pad 1 2 EE Info Pad A B C D E F 2 CE 7 Sa DRE IASS TDK 272 8558 2 15 7 TEL 047 378 9227
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